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TWI599786B - Conductor pattern inspection device - Google Patents

Conductor pattern inspection device Download PDF

Info

Publication number
TWI599786B
TWI599786B TW105138409A TW105138409A TWI599786B TW I599786 B TWI599786 B TW I599786B TW 105138409 A TW105138409 A TW 105138409A TW 105138409 A TW105138409 A TW 105138409A TW I599786 B TWI599786 B TW I599786B
Authority
TW
Taiwan
Prior art keywords
signal
conductor pattern
inspection
detection signal
electrode
Prior art date
Application number
TW105138409A
Other languages
English (en)
Chinese (zh)
Other versions
TW201812331A (zh
Inventor
Toshiro Yasuda
Shinichi Murakami
Original Assignee
Oht Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oht Inc filed Critical Oht Inc
Application granted granted Critical
Publication of TWI599786B publication Critical patent/TWI599786B/zh
Publication of TW201812331A publication Critical patent/TW201812331A/zh

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2801—Testing of printed circuits, backplanes, motherboards, hybrid circuits or carriers for multichip packages [MCP]
    • G01R31/281—Specific types of tests or tests for a specific type of fault, e.g. thermal mapping, shorts testing
    • G01R31/2812—Checking for open circuits or shorts, e.g. solder bridges; Testing conductivity, resistivity or impedance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/50—Testing of electric apparatus, lines, cables or components for short-circuits, continuity, leakage current or incorrect line connections
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2832—Specific tests of electronic circuits not provided for elsewhere
    • G01R31/2836—Fault-finding or characterising
    • G01R31/2839—Fault-finding or characterising using signal generators, power supplies or circuit analysers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/312—Contactless testing by capacitive methods

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
TW105138409A 2015-12-22 2016-11-23 Conductor pattern inspection device TWI599786B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2015250121A JP6014950B1 (ja) 2015-12-22 2015-12-22 導電体パターン検査装置
JP2015-250121 2015-12-22

Publications (2)

Publication Number Publication Date
TWI599786B true TWI599786B (zh) 2017-09-21
TW201812331A TW201812331A (zh) 2018-04-01

Family

ID=57197568

Family Applications (1)

Application Number Title Priority Date Filing Date
TW105138409A TWI599786B (zh) 2015-12-22 2016-11-23 Conductor pattern inspection device

Country Status (4)

Country Link
JP (1) JP6014950B1 (ja)
KR (1) KR101763535B1 (ja)
CN (1) CN107064706B (ja)
TW (1) TWI599786B (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018169338A (ja) * 2017-03-30 2018-11-01 大日本印刷株式会社 検査装置、検査方法、および、検査装置用のプログラム

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1645609A (zh) * 2004-01-20 2005-07-27 三星电子株式会社 半导体器件的测试图案及利用其的测试方法
JP2008026320A (ja) * 2006-07-20 2008-02-07 Microinspection Inc 非接触シングルサイドプローブ及び、これを用いたパターン電極の断線・短絡検査装置及びその方法
JP2008076187A (ja) * 2006-09-20 2008-04-03 Oht Inc 回路パターン検査装置
TW200819762A (en) * 2006-10-19 2008-05-01 Tokyo Cathode Lab Pattern inspection device
TW201132996A (en) * 2009-08-17 2011-10-01 Fcom Corp Detecting device of conductive pattern and detecting method

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001221824A (ja) * 2000-02-10 2001-08-17 Oht Inc 検査装置及び検査方法、検査ユニット
JP2004184385A (ja) * 2002-11-30 2004-07-02 Oht Inc 回路パターン検査装置及びパターン検査方法
CN1720458B (zh) * 2002-11-30 2010-06-23 Oht株式会社 电路图案检查装置及电路图案检查方法
JP2004264272A (ja) * 2003-02-28 2004-09-24 Oht Inc 導電体検査装置及び導電体検査方法
CN1566975A (zh) * 2003-06-23 2005-01-19 Oht株式会社 检查装置和检查方法
JP4730904B2 (ja) * 2006-04-28 2011-07-20 日本電産リード株式会社 基板検査装置及び基板検査方法
JP5387818B2 (ja) * 2008-12-11 2014-01-15 オー・エイチ・ティー株式会社 回路パターン検査装置
JP4644745B2 (ja) * 2009-08-04 2011-03-02 オー・エイチ・ティー株式会社 回路パターン検査装置
JP5305111B2 (ja) * 2011-01-21 2013-10-02 オー・エイチ・ティー株式会社 回路パターン検査装置
JP2013210247A (ja) * 2012-03-30 2013-10-10 Nidec-Read Corp 絶縁検査装置及び絶縁検査方法
JP5433876B1 (ja) 2013-03-26 2014-03-05 オー・エイチ・ティー株式会社 回路パターン検査装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1645609A (zh) * 2004-01-20 2005-07-27 三星电子株式会社 半导体器件的测试图案及利用其的测试方法
JP2008026320A (ja) * 2006-07-20 2008-02-07 Microinspection Inc 非接触シングルサイドプローブ及び、これを用いたパターン電極の断線・短絡検査装置及びその方法
JP2008076187A (ja) * 2006-09-20 2008-04-03 Oht Inc 回路パターン検査装置
TW200819762A (en) * 2006-10-19 2008-05-01 Tokyo Cathode Lab Pattern inspection device
TW201132996A (en) * 2009-08-17 2011-10-01 Fcom Corp Detecting device of conductive pattern and detecting method

Also Published As

Publication number Publication date
JP6014950B1 (ja) 2016-10-26
CN107064706A (zh) 2017-08-18
JP2017116331A (ja) 2017-06-29
KR20170074748A (ko) 2017-06-30
CN107064706B (zh) 2019-07-30
KR101763535B1 (ko) 2017-07-31
TW201812331A (zh) 2018-04-01

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