200819762 九、發明說明： 【發明所屬之技術領域】 本發明有關一種用於檢查呈多列配置的導電圖案 (pattern)的圖案檢查裝置。 # 【先前技術】 在液晶面板中，將被稱為閘極線及Cs線的導電圖案 主多列配置的第一層、以及被稱為源極線的導電圖案呈多 列配置的第二層進行疊層。此時，源極線與閑極線及α 線交叉配置。在第-層和第二層之間設置有絕緣層，防止 源極線與閘極線及Cs線的電性連接。但是，在製造過程 中，在絕緣層會產生微小的孔，即產生所謂的ς孔^ hole) ’故源極線與閘極線及Cs線有時會產生電性連接（短 路）。在上述不同層之間的導電圖案的短路也稱為交又短 路，從而導致液晶面板動作不良和故障的原因。另外，在 父叉短路以外，有時也會產生鄰接的導線圖案電性連接的 普通短路、以及導線圖案在中間斷路的缺陷。上述的缺陷 在製造過程中需要明確判定並進行修理。 因此’至今為止，有提出過一些用於判定這些缺陷的 技術。但是’大多數都是將電極直接接觸到導電圖幸 用信號的結構。在所述的結構中，由於物理性 接觸笔極料㈣案，因此會導致導電隸 生灰塵等問題。 销W及產 人因此，在下述專利文獻！中，揭示有—種利用靜電叙 口末判疋導電圖案有無缺陷及其位置的技術。在該專利文 319637 5 200819762 獻l t，無須使電極接觸到導電圖案，即 .供交流電屢，同時檢查作為檢查對象的導電圓=電圖案提 交流電壓。依據上述結# θ木所產生的 ，及產生灰塵。 “防止¥電圖案的損傷以 專利文獻1 :日本特開細_24518號公 【發明内容】 敎 (發明所欲解決之課題） · 但是’在該專利文獻！中，關於所述 路办 置判定沒有具體的記載，另外，在專 講的位 案的判定以及判定其斷路位置時，極個斷路圖 交流電壓的供電電極固定在預定的位置。此；二 電極、供電電極與斷路位置之間的位置關係：不= 當地檢查出斷路。 、有寸不月匕恰 本發明第一目的在於提供一種不必使電極接觸 圖7^可㈣定交叉短路位置的圖案檢查裝置。 另外，本發明的第二目的在於提供一種可進一步提言 V電圖案的檢查精確度的圖案檢查裝置。 ^ (解決課題的手段） 本發明的圖幸檢杳奘罟，3h 雷円安v 疋判定呈多列配置的第-導 與第一導電圖案交又的方向呈多列配置的 立:®*電性連接的交又短路位置的圖案檢查裝置， 第=於安具備有:供電電極，係與產生有交：短路的 圖安2圖案即交叉圖案之間保持微小的空間並沿該交又 圖木私動’而藉由隔著上述微小空間的靜電輛合，向交叉 319637 6 200819762 圖案施加交流電麗；檢查電極，係電 ^ 交又圖案平行的方向移動 4極連動，在與 ‘靜電搞合而接受來自該第二導:兵對向的第二導電圖案 ^及护制部，俜妒栌^入^ 一¥电圖案交流電壓的感應，♦以 判定交叉短路的位置。^乂机书壓值的變化而 在較佳的態樣中，將供 個，將檢查電極在通過上述兩個“;==接設置兩 線上鄰接設置兩個。在另一 rn徂直的 電極，係执w於徂 乂土悲樣中，還具備有輔助 Γ並電電極旁邊，且與該供電電極連動而移 «相==Γ案施加舆供電電極所施加的交流電 π位丰而相位相差180。的第二交流電壓。 本發明另-種的圖案檢絲置 配置的導電圖案的狀態的圖案檢查裝置= 第-供電電極，係與基板之間保持微=二動具 要疋向對向的導電圖案施加第一 極’係與第-供電電極連動而移動?:= = = 圖=與弟一交流電壓相同位準而相位相差的】 =父^壓；檢查電極’係與兩個供電電極連動而移動 亚對應對向的導電圖案感應產 岸；⑽；以及控制部，係根據檢查電桎所残 …彳乂机電壓值的變化而判斷導電圖案的狀能。& 旁邊==中，兩個供電電極係在導電㈣的端部 的；邊:1ίΤ動;檢查電極係分別在兩個供電電極 方k各叹置一個，與該供電電極連動而移動；控制部係 319637 7 200819762 根據檢查電極職應產生的交流電黯的變化，⑽多個 導電圖案中判定產生斷路的斷路圖案。 在另較么的您樣中，在產生有斷路的導電圖案即斷 圖案的長度方向上依序配置第—供電電極、檢查電極、 ▲第二供電電極，並使這三個電極沿著所述斷路圖案移動， 且控制部係根據檢查電極所感應產生的交流錢值的變 化’而判定存在於斯路圖案上之斷路的位置。 在另一較佳的態樣中，當將呈多列配置的第一導電圖 馨案、以及在與第一導電圖案交叉的方向呈多列配置的第二 導電圖案隔著絕緣層進行疊層時，在第一導電圖案的配置 方向依序配置第一供電電極、檢查電極、第二供電電極， 並使這三個電極沿著所述配置方向移動，且控制部係根據 $查電極所感應產生的交流電壓值的變化，而判定與第二 v電圖案开>成短路的第一導電圖案即交叉圖案。 [發明效果] ♦ 八 _ 在本發明的圖案檢查裝置中，電極與導電圖案係藉由 ^電耦口而電性連接。因此無須使電極接觸導電圖案而可 判定交叉短路的位置。 ㊆另外，在本發明的另一種圖案檢查裝置中，同時向導 ^ θ木施加互相反相的交流電壓。因此，由於面板整體的 电位大致％定為〇,故可進一步提高導電圖案的檢查精確 度。 【實施方式】 以下麥知、圖示說明本發明的實施形態。在以下的說 8 319637 200819762 明中，將用於液晶面板等而在玻璃基板上呈多列配置的導 電圖案作為檢查對象。但是，只要是呈多列配置的導電圖 …案，也可以將用於液晶面板以外的裝置的導電圖案作為檢 • i對象。 第1圖是本發明的第一實施形態的圖案檢查裝置1〇 -的概略俯視圖。另外，第2圖是圖案檢查裝置1〇的概略侧 視圖。該圖案檢查裝置10是適用於判定交叉短路位置情況 的圖案檢查裝置。在此，在對該圖案檢查裝置10進行詳細 _說明之前，先對交叉短路進行簡單說明。 一般的液晶面板50等，是由將被稱為閘極線52的導 包圖案呈多列配置的第一層、以及被稱為源極線54的導電 圖案呈多列配置的第二層進行疊層而構成。第一層的閘極 線52與第二層的源極線54係相互交叉配置。在該第一層 和第二層之間設置有絕緣層56，以防止源極線54與閘極 線52的電性連接（短路）。但是，由於種種原因，在絕緣層 瞻56會產生微小的孔（針孔），通過這些針孔，源極線μ與閘 極線52會有產生電性連接的情況。該閘極線52和源極線 54的電性連接稱為交叉短路。該交叉短路成為液晶面板％ 動作不良和故障的原因。因此，在液晶面板5〇製造過程的 步驟中，必須要明確判定該交叉短路並進行修理。 在判疋上述父叉短路時，首先，從多條源極線54中判 疋存在父叉短路CS的源極線54，作為交叉線（交叉圖 木）54a接著，從已經判定的交叉線上判定存在交叉 短路cs的位置。本實施形態的圖案檢查裝置係構成為 319637 9 200819762 ’=定交叉線54a後，判定存在於該交又線…上的 又又短路c s的位i。另外，關於交又線5 '因為後^做詳細說明，在這裏省略詳細說明m (叉短的Γ案檢查裝置10具有可以沿著存在交 又短路CS的父又、線54a移動的感測器12。 12的移動機構，可利用衆所周知的機構，例如由馬達和^ 杆=構成的移動機構。感測器12的移動量或者是移動位晋 係藉由未圖示的控制裝置取得並儲存。 兩们仏包电極14、16及兩個檢查電極18、2〇 十字狀設置於感測器12。也就是說，兩個供電電極ml200819762 IX. Description of the Invention: [Technical Field] The present invention relates to a pattern inspecting apparatus for inspecting a conductive pattern in a multi-column configuration. # [Prior Art] In the liquid crystal panel, a first layer in which a plurality of conductive patterns of a conductive pattern called a gate line and a Cs line are arranged, and a second layer in which a conductive pattern called a source line is arranged in a plurality of columns Lamination is performed. At this time, the source line is arranged to cross the idle line and the alpha line. An insulating layer is disposed between the first layer and the second layer to prevent electrical connection between the source line and the gate line and the Cs line. However, in the manufacturing process, minute holes are formed in the insulating layer, that is, so-called boring holes are formed. Therefore, the source line and the gate line and the Cs line may be electrically connected (short-circuit). The short circuit of the conductive pattern between the above different layers is also referred to as a short circuit and a short circuit, resulting in malfunction of the liquid crystal panel and causes of malfunction. Further, in addition to the short circuit of the parent fork, a normal short circuit in which the adjacent wire patterns are electrically connected and a defect in which the wire pattern is broken in the middle may occur. The above defects need to be clearly determined and repaired during the manufacturing process. Therefore, so far, some techniques for determining these defects have been proposed. But most of them are structures that directly contact the electrodes to the conductive map. In the above-mentioned structure, since the physical contact with the pen electrode (4) case causes problems such as conduction of dust. Sales and production, therefore, in the following patent documents! Among them, there is a technique for judging whether or not a conductive pattern has a defect and its position by using an electrostatic narration. In the patent document 319637 5 200819762, it is not necessary to make the electrode contact the conductive pattern, that is, to supply alternating current, and to check the conductive circle=electric pattern as the inspection object to raise the alternating voltage. According to the above-mentioned knot # θ wood produced, and produced dust. "Immediately, the problem of the invention is to prevent the damage of the electric pattern." [Patent Document 1: JP-A-24518] There is no specific description. In addition, when the position of the lecture is judged and the position of the disconnection is determined, the power supply electrode of the extreme disconnection diagram AC voltage is fixed at a predetermined position. This is between the two electrodes, the power supply electrode and the disconnection position. Positional relationship: no = local inspection of the open circuit. The first object of the present invention is to provide a pattern inspection device that does not require the electrode to be in contact with the position of the crossover of the figure (4). In addition, the second aspect of the present invention It is an object of the invention to provide a pattern inspection device which can further improve the inspection accuracy of a V-electric pattern. ^ (Means for Solving the Problem) The map of the present invention is fortunately examined, and the 3h Thunderan 疋 is determined to be in a multi-column configuration - A pattern inspection device that is arranged in a plurality of rows in a direction in which the first conductive pattern is intersected with each other: a ** electrically connected pattern inspection device at the position of the short-circuited position, the second is provided with: a power supply electrode, and There is a cross: the pattern of the short-circuited figure 2, that is, the tiny space between the intersecting patterns, and the static electricity between the intersecting and the other, and the alternating current through the tiny space, the alternating current is applied to the pattern of the intersection 319637 6 200819762 Li; check the electrode, the electric and the parallel movement of the pattern in the direction of the parallel movement of the 4 poles, in conjunction with the 'electrostatic charge and accept the second conductive pattern from the second guide: the soldier opposite the armor and the protective part, 俜妒栌^Into a ^ electric pattern AC voltage induction, ♦ to determine the position of the cross short circuit. ^ 乂 machine book pressure value changes in the preferred aspect, will be provided, will check the electrode in the above two ;== Connect two sets of two adjacent lines. In another rn-straight electrode, it is carried out in the blight of the bauxite, and is also provided with an auxiliary Γ and the electric electrode next to it, and is moved in conjunction with the power supply electrode to move the «phase == Γ case application 舆 power supply electrode applied The alternating current π is abundant and the phase is 180 different. The second AC voltage. Another pattern checking device of the state of the conductive pattern in which the pattern detecting wire is disposed is the first-power supply electrode, and the micro-two-actuator is held between the substrate and the first conductive electrode is applied to the opposite conductive pattern. Moves in conjunction with the first-supply electrode?:= = = Figure = the same level as the AC voltage and the phase difference] = the parent voltage; the inspection electrode' is linked to the two power supply electrodes and moves the sub-corresponding direction The conductive pattern senses the production shore; (10); and the control unit determines the shape energy of the conductive pattern according to the change of the voltage value of the residual electric machine. & next to ==, the two power supply electrodes are at the end of the conductive (four); the side: 1ίΤ; the inspection electrode system is sighed one at each of the two power supply electrodes, and moves in conjunction with the power supply electrode; Department Department 319637 7 200819762 According to the change of the AC power generated by the inspection electrode position, (10) a disconnection pattern for determining an open circuit among the plurality of conductive patterns. In another example, the first power supply electrode, the inspection electrode, and the second power supply electrode are sequentially disposed in the longitudinal direction of the break pattern in which the open conductive pattern is generated, and the three electrodes are along the The disconnection pattern moves, and the control unit determines the position of the disconnection existing on the path pattern based on the change in the exchange money value sensed by the inspection electrode. In another preferred aspect, the first conductive pattern disposed in a plurality of columns and the second conductive pattern disposed in a plurality of columns in a direction crossing the first conductive pattern are laminated via an insulating layer Disposing the first power supply electrode, the inspection electrode, and the second power supply electrode in the arrangement direction of the first conductive pattern, and moving the three electrodes along the arrangement direction, and the control unit senses according to the A change in the generated AC voltage value is determined, and a first conductive pattern that is short-circuited with the second v-electric pattern is judged to be a cross pattern. [Effect of the Invention] ♦ 八 In the pattern inspection device of the present invention, the electrode and the conductive pattern are electrically connected by an electric coupling. Therefore, it is possible to determine the position of the cross short circuit without contacting the electrode with the conductive pattern. Further, in another pattern inspecting apparatus of the present invention, the alternating voltages which are mutually inverted are applied at the same time as the guide θ wood. Therefore, since the potential of the entire panel is approximately 〇, the inspection accuracy of the conductive pattern can be further improved. [Embodiment] Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the following description, a conductive pattern for a liquid crystal panel or the like and arranged in a plurality of rows on a glass substrate is used as an inspection object. However, as long as it is a conductive pattern arranged in a plurality of columns, a conductive pattern for a device other than the liquid crystal panel may be used as a detection target. Fig. 1 is a schematic plan view of a pattern inspection device 1A according to a first embodiment of the present invention. In addition, Fig. 2 is a schematic side view of the pattern inspection device 1A. The pattern inspection device 10 is a pattern inspection device suitable for determining the position of a cross short circuit. Here, before the detailed description of the pattern inspection device 10, the cross short circuit will be briefly described. A general liquid crystal panel 50 or the like is a first layer in which a guide pattern called a gate line 52 is arranged in a plurality of rows, and a second layer in which a conductive pattern called a source line 54 is arranged in a plurality of rows. Laminated to form. The gate line 52 of the first layer and the source line 54 of the second layer are arranged to cross each other. An insulating layer 56 is disposed between the first layer and the second layer to prevent electrical connection (short circuit) of the source line 54 and the gate line 52. However, for various reasons, minute holes (pinholes) are generated in the insulating layer 56, and the source lines μ and the gate lines 52 are electrically connected through these pin holes. The electrical connection of the gate line 52 and the source line 54 is referred to as a cross short circuit. This cross short circuit causes the LCD panel to malfunction and malfunction. Therefore, in the step of the manufacturing process of the liquid crystal panel 5, it is necessary to clearly determine the cross short circuit and perform repair. When it is determined that the parent fork is short-circuited, first, the source line 54 of the parent-fork short-circuit CS is judged from the plurality of source lines 54 as a cross line (cross-ply) 54a, and then judged from the already determined cross line. There is a position of the cross short circuit cs. The pattern inspection device of the present embodiment is configured as 319637 9 200819762'= after the intersection line 54a is determined, and it is determined that the bit i of the short circuit cs exists on the intersection line... In addition, as for the intersection and the line 5', the details are omitted here, and the detailed description m is omitted here (the short-cut inspection apparatus 10 has a sensor that can move along the parent line 54a where the short-circuit CS exists. 12. The moving mechanism of 12 can use a well-known mechanism such as a moving mechanism composed of a motor and a lever. The amount of movement of the sensor 12 or the movement position is obtained by a control device not shown. The two electrode electrodes 14, 16 and the two inspection electrodes 18, 2 are arranged in a cross shape on the sensor 12. That is, the two power supply electrodes ml
度方向(第1圖中的x方向)，兩個檢 查电極18、20係設在源極線54的配置方向（第！圖中的γ =向)：分別鄰接。從第2圖可得知，該感測器ΐ2隔著— 疋的空間’位於液晶面板5〇的上侧。從該感測器Η到 晶50的距離為設置在該感測器&的四個電極μ、a 2〇和源極線54及閘極線52能夠靜電輕合的距離。、 兩個供電電極14、16是用於向交叉線％施加交 Μ的電極，且連接在交流電源22。在判定交叉短路L =，為了使這兩個供電電極14、16對向於 J 進仃感測8丨2的位置調整。由於交 ^心-目對向，兩者靜電麵合。而且，由 電極14、16向交叉線54a的施加交流電壓。 屯 兩们k查包極18、20是用於檢查由閘極線52 生的交流電壓的電極。這兩個檢查電極1δ、2〇藉由= 319637 10 200819762 的閘極線52的靜電輕合，對應該間極線^感應產生的交 流電Μ值而感應產生相應大小的交流㈣。由檢查電極 18、20感應產生的交流電M通過放大器％而放大，作為 檢出電壓而被取得。控制部將該檢出電麼值與感測器η 的位置貧簡加關聯並儲存。並且，㈣部根據所取 檢出電壓值的變化來判定交叉短路CS的位置。 :具體地於判定交叉短路„的位置的情況的過 各。另外，弟1圖下側係圖示伴隨感卿12的移動 電壓值的變化情況。 在判定交叉短路CS的位置時，為了將兩個供電電極 16 &位在父又線54a的延長線上，而確定感測 :位置’使感測器12沿著該交叉線仏移動。換言 ^電極保持為接近交叉線54a而移動。^ 電電又線54a之間的空間作為電容而發揮： 者該工間在交叉線…感應產生交流電壓。感應產 =的交流電壓經由交又短路es也會感絲生在^ 線54a產生有交又短路的閘極線52a。 又又 另一方面，在沒有和交又線54a產生交叉短甘 :閘極線52’由於藉由絕緣層兄而與交叉線絕緣，敌美 上應產生交流電壓。因此，隨著感測 η的： 置，:20即使移動到接近其他閘極線52的位 电β 20也不會接受從其他的閛極線& 的交流電壓。於是，結果是檢出電壓值大致為〇。另：方、 面，隨著感測器12的#私 H 万 U的私動，檢查電極18、2〇在接近和交 319637 11 200819762 m 叉線54a產生有父叉短路的閘極線52a時.，換言之接近經 由父又短路cs而被施加交流信號的閘極線52a時，經由 與該閘極線52a之間產生的電容（空間），會由檢查電極 ’ 18、20感應產生較大的交流電壓。也就是說，只要感測器 12移動到交叉短路cs旁邊，檢出電壓值就會急劇的上 控制部將該檢查電壓值急劇上升時的感測器12位置判 定為交叉短路CS的位置。 從以上的說明可得知，依據本實施形態，不使電極物 =的接觸到源極線5 4和閘極、線5 2等導電圖案就可以判 定^又短路CS的位置。結果，既能防止物理接觸產生的 塵埃和導電圖案損傷等，又可以簡單的判定交又短路的位 另外，在本實施形態中，兩個供電電極14、16以及兩 個檢查電極18、2〇呈大致十字狀配置。結果，交叉短路 I7使存在於$電圖案的端部旁邊，也能準確的判定其位 置。例如，考慮交叉短路CS存在於源極線54 旁邊。 】日’為了檢查出交叉短路cs的位£，有必要使檢杳、 ==〇移_該交叉短路cs的旁邊。這時’如本實施 =右將四個電極14、16、18、20呈大致十字狀配 难然兩個供電電極14、16 Φ 5/1、 士士， 以外的位置之Γ人一1 方有位於交叉線54a 位置^ 吳，但另方位於能夠向交叉線54a供電的 檢出二上所述’在交又短路cs旁邊產生急劇的 cs的，且能夠簡單而且正確㈣定交叉短路 另外，考慮交又短路CS在閘極線52的端部 319637 12 200819762 黻 旁邊的情況。這種情況下，為了檢查出交叉短路cs的位 置有必要使;k查電極！ 8、2〇移動到該閑極線％的端部 -旁邊。這時，如本實施形態，若將四個電極ΐ4、Μ、Μ、 2〇呈大致十字狀配置時，雖'然兩個檢查電極18、20至少 -方有位於閘極線52以外的位置之虞，但另一方停留在能 夠與問極線52產生靜電柄合的位置。結果，還是能夠簡單 而且正確的判定交又短路cs的位置。也就是說，如本實 施形態，使四個電極14、16、18、2G呈大致十字狀配置、， 鼸藉此即使在導電圖案的端部旁邊產生有交叉短W.s，也能 準確的檢查出其值置。 不過，在這裏說㈣感測器12的構成態樣只是一個例 子，當然也可以採用其他的構成態#。例如，如帛3圖㈧ 所不’也可以由單一的供電電極14和兩個檢查電極Μ、 2〇來構成感測器⑴料，最好是將單—的供電電極μ 沿行進方向形成長條形狀，將檢查_ 18、2g配置在該供 私電電極U的兩側。另外，相反的，如第3圖⑻所示，可 ^采用單-的檢查電極18，將供電電極14、16配置在該 早一的檢查電極1 8的兩側。 可是，如上所述，當檢查電極18、2G接近沒有和交叉 產生短路的其他閑極線52時’檢出電壓值應該大致 :〇。但是’從第！圖下側所示的檢出電屢值明顯可以看 =檢出電壓值不是0,時常會有微小的變化。這基於以 下幾個理由。 由供電電極14、16提供的交流電壓實際上不只是通過 319637 13 200819762 轤 相對向的交叉線54a，而且通過與該交叉線54&鄰接的其 他的源極線54b、父又線54a和閑極線52的交點的寄生電 -容’遍佈整個液晶面板50,提高液晶面板5〇整體的電位。 :由於液晶面板的寄生電容會因位置而變化，所以液晶面板 •的電位也會因位置而有微妙的不同。並且，在所述電位不 均勻的液晶面板50相對向的檢查電極18、2〇所檢查出的 檢出電壓值雖然低但是也會變動。有時所述的電壓檢出電 壓值㈣動會成為交叉短路cs位置判定精確度下降等的 響原因。 第4圖是可解決所述問題，且提高交叉短路cs位置 判疋精確度的本發明第二實施形態所述的圖案檢查裝置 10的概略俯視圖。該圖案檢查裝置10和第一實施形態相 同，具備有可以沿著交又線54a移動的感測器12。感測器 12的移動位置以及後述的檢出電壓值被附加相互關聯，且 儲存在沒有圖示的控制部。 • 該感測器12設有兩個供電電極14、16以及兩個檢查 電極18、20。但是，本實施形態與第一實施形態不同，兩 個供電電極14、16鄰接配置在源極線54的配置方向。另 外，兩個檢查電極18、20配置在源極線54的配置方向， 而夾著這兩個供電電極14、16。 丄B兩個供電電極14、16連接於相位相反的交流電源。也 就是說，在第一供電電極14施加相位為〇。的交流電壓。 另外，在第二供電電極16施加與施加於第一供電電極 的书壓相同位準且相位相差〗8〇。的交流電壓。在判定交叉 319637 14 200819762 短路cs位置㈣候’以使第一供電電極14能夠在交叉線 54a的正上方移動的方式調整感測器12整體的位置。 • 兩個檢查電極18、20與第一實施形態相同，是用於檢 /查由閘極線52感應產生的交流電壓值的電極。藉由與閑極 線52的靜電_合而由兩個檢查電極18、2()感應產生的交 流電壓係經由放大器26而放大，作為檢出電壓值而 得。In the degree direction (x direction in Fig. 1), the two inspection electrodes 18 and 20 are arranged in the direction in which the source lines 54 are arranged (γ = direction in the Fig. Fig.): adjacent to each other. As can be seen from Fig. 2, the sensor ΐ2 is located above the liquid crystal panel 5A via the space —. The distance from the sensor Η to the crystal 50 is the distance at which the four electrodes μ, a 2 〇 and the source line 54 and the gate line 52 of the sensor & The two power supply electrodes 14, 16 are electrodes for applying an intersection to the cross line %, and are connected to the AC power source 22. In the determination of the cross short circuit L = , in order to make the two power supply electrodes 14, 16 oppose the position of the J 仃 sensing 8 丨 2 . Due to the intersection of the heart and the eye, the two sides are electrostatically combined. Further, an alternating voltage is applied to the intersecting line 54a by the electrodes 14, 16.屯 Both of them check the poles 18 and 20 which are electrodes for inspecting the alternating voltage generated by the gate line 52. The two inspection electrodes 1δ, 2〇 are electrostatically coupled by the gate line 52 of = 319637 10 200819762, and induce an alternating current (four) corresponding to the alternating current induced by the interpole line. The alternating current M induced by the inspection electrodes 18 and 20 is amplified by the amplifier % and obtained as the detected voltage. The control unit associates the detected power value with the position of the sensor η and stores it. Further, the (four) portion determines the position of the cross short circuit CS based on the change in the detected voltage value. : Specifically, it is determined that the position of the cross-short circuit is changed. In addition, the lower side of the figure 1 shows the change of the moving voltage value accompanying the sensory 12. When determining the position of the cross-short CS, in order to The power supply electrodes 16 & are located on the extension line of the parent and line 54a, and determine the sensing: the position 'move the sensor 12 to move along the intersection line. In other words, the electrode remains moving close to the intersection line 54a. The space between the further lines 54a functions as a capacitor: the intersection of the work chamber generates an AC voltage at the cross line. The AC voltage of the induction output = via the short circuit and the short circuit es also causes the wire to be generated at the line 54a. The gate line 52a. On the other hand, there is no intersection with the intersection line 54a. The gate line 52' is insulated from the intersection line by the insulator layer, and the AC voltage should be generated on the enemy side. With the sense η: set, :20 does not accept the AC voltage from the other bungee wire & even if it moves to the bit power β 20 close to the other gate line 52. Thus, the result is the detected voltage value. Roughly 〇. Another: square, face, with sensing The private movement of #私H万U of 12, check the electrodes 18, 2〇 when approaching and paying 319637 11 200819762 m when the fork line 54a generates the gate line 52a with the short-circuit of the parent fork. In other words, it is close to the cs by the parent. When the gate line 52a of the AC signal is applied, a large AC voltage is induced by the inspection electrodes '18, 20 via the capacitance (space) generated between the gate line 52a. That is, as long as the sensor 12 is moved to the side of the cross-short cs, and the position of the sensor 12 when the detected voltage value is sharply increased by the upper control unit is determined as the position of the cross-short CS. As can be seen from the above description, In the present embodiment, the position of the short-circuit CS can be determined without causing the electrode material to contact the source line 54 and the conductive pattern such as the gate or the line 52. As a result, it is possible to prevent dust and conductive patterns generated by physical contact. In addition, in the present embodiment, the two power supply electrodes 14 and 16 and the two inspection electrodes 18 and 2 are arranged in a substantially cross shape. As a result, the cross short circuit I7 is present. On $electrogram Next to the end, it is also possible to accurately determine its position. For example, consider that the cross-short CS exists next to the source line 54. 】Day in order to check the position of the cross-short cs, it is necessary to make the check, == shift _This cross is shorted to the side of cs. At this time, as in this embodiment = right, the four electrodes 14, 16, 18, 20 are arranged in a substantially cross shape, and the two power supply electrodes 14, 16 Φ 5/1, other than the sergeant The location of the person 1 is located at the intersection 54a position ^ Wu, but the other is located on the detection line capable of supplying power to the intersection 54a. The above-mentioned 'synchronous cs is generated next to the cross-circuit cs, and can be simple and Correct (four) fixed cross short circuit In addition, consider the case where the short circuit CS is next to the end of the gate line 52 319637 12 200819762 黻. In this case, it is necessary to check the position of the cross-short cs; k check the electrode! 8, 2 〇 move to the end of the idle line % - next to it. At this time, in the present embodiment, when the four electrodes ΐ4, Μ, Μ, and 2〇 are arranged in a substantially cross shape, the two inspection electrodes 18 and 20 are at least at positions other than the gate line 52. Oh, but the other side stays in a position where it can be combined with the polarity line 52 to create an electrostatic shank. As a result, it is still possible to easily and correctly determine the position of the short and short cs. In other words, according to the present embodiment, the four electrodes 14, 16, 18, and 2G are arranged in a substantially cross shape, whereby the cross-short Ws can be accurately detected even if the end portion of the conductive pattern is formed. Its value is set. However, it is said here that (4) the configuration of the sensor 12 is only an example, and of course, other constituent states # may be employed. For example, as shown in FIG. 3 (8), the sensor (1) may be formed by a single power supply electrode 14 and two inspection electrodes Μ, 2, preferably, the single-supply electrode μ is formed long along the traveling direction. In the shape of the strip, the inspection _ 18, 2g is arranged on both sides of the private electrode U. Further, conversely, as shown in Fig. 3 (8), the single-inspection electrode 18 can be used, and the power supply electrodes 14, 16 are disposed on both sides of the early inspection electrode 18. However, as described above, when the inspection electrodes 18, 2G are close to other idle lines 52 which are not short-circuited and crossed, the detected voltage value should be approximately 〇. But 'from the first! The detected power value shown on the lower side of the figure is obviously visible. = The detected voltage value is not 0, and there are often slight changes. This is based on several reasons. The AC voltage supplied by the supply electrodes 14, 16 does not actually pass through the opposite crossing line 54a of 319637 13 200819762, but also passes through the other source line 54b, the parent line 54a and the idle pole adjacent to the intersection line 54& The parasitic capacitance of the intersection of the lines 52 spreads over the entire liquid crystal panel 50, increasing the potential of the liquid crystal panel 5 as a whole. : Since the parasitic capacitance of the liquid crystal panel changes depending on the position, the potential of the liquid crystal panel will be subtly different depending on the position. Further, the detected voltage values detected by the inspection electrodes 18 and 2 facing the liquid crystal panel 50 having the uneven potential are low but vary. In some cases, the voltage detection voltage value (4) described above may cause a decrease in the accuracy of the cross-short cs position determination. Fig. 4 is a schematic plan view of the pattern inspecting apparatus 10 according to the second embodiment of the present invention which can solve the above problem and improve the accuracy of the cross-short cs position. The pattern inspection device 10 is the same as the first embodiment, and includes a sensor 12 that is movable along the line 54a. The movement position of the sensor 12 and the detected voltage value to be described later are additionally associated with each other and stored in a control unit (not shown). • The sensor 12 is provided with two supply electrodes 14, 16 and two inspection electrodes 18, 20. However, in the present embodiment, unlike the first embodiment, the two power supply electrodes 14 and 16 are arranged adjacent to each other in the direction in which the source lines 54 are arranged. Further, the two inspection electrodes 18, 20 are arranged in the direction in which the source lines 54 are arranged, and the two supply electrodes 14, 16 are sandwiched.丄B Two power supply electrodes 14, 16 are connected to an AC power source of opposite phase. That is, the phase applied to the first power supply electrode 14 is 〇. AC voltage. Further, the second power supply electrode 16 is applied with the same level as the book pressure applied to the first power supply electrode, and the phase difference is "8". AC voltage. The position of the entire sensor 12 is adjusted in such a manner as to judge the intersection 319637 14 200819762 short-circuit cs position (four) to adjust the first power supply electrode 14 to move directly above the intersection line 54a. The two inspection electrodes 18, 20 are the same as the first embodiment, and are electrodes for detecting/checking the value of the alternating voltage induced by the gate line 52. The AC voltage induced by the two inspection electrodes 18, 2 () by the electrostatic discharge with the idle line 52 is amplified by the amplifier 26 as a detected voltage value.
接著，說明關於在該圖案檢查裝置1〇的交叉短路cS :立置·的過程。另外’第4圖的下侧係圖示隨著感測器 的移動，檢出電壓值的變化。 处在f定父叉短路CS的位置時，以使第一供電電極Μ 能夠在交叉線54a的正上方移動的方式調整感測器整體 =位置後’使該感測器12沿著該交叉線％移動。這時， 第一供電電極14和交叉線54a之間產生的空間作為電容而 發揮作用，在交叉線54a施加相位為〇。的交流電遂。施加 的該交流電㈣、經由交叉短路cs也感應產生在該閘極線 52a。另外從第—供電電極14提供的相位為q。的交流電屋 通過寄生電容，也被施加在整個液晶面板5〇。 另方面，舆第一供電電才圣14鄰接配置的第二供電電 極=係與鄰接於交叉線％的源極線糾接近並移動。 弟二供電電極16係在該鄰接的源極線5仆施加相位 為的交流電麗。料，通過不均勻存在的寄生電容， =會在液晶面板50整體施加相位為m。的很小的交流電 319637 15 200819762 、在這裏，第二供電電極16對交叉線54a的影響與接近 亚對向於交叉線54a的第-供電電極14對交叉線54a的影 響㈣是非常小的。因此，在交又線54a以及與該交叉線 5ja父又短路的閘極線52a感應產生的相位為〇。的交流電 壓’不會與相位為180。的交流電壓抵消，而維持相當高的 位準。另一方面，液晶面板5〇的整體，同時被第一供電電 極14施加相位為〇。的相同位準的交流電壓以及被第二供 電電極16知加相位為18〇。的相同位準的交流電壓。這種 同時施加的相位相反的交流電㈣互相抵消。因此，作為 液晶面板50整體的電位大致為〇。 —結果’隨著感測器12移動’檢出電壓值的位準會穩 定。也就是說，如第4圖的下側所示，當檢查電極18、2〇 從交又短路CS位置離開時，相對向的源極線54和閘極線 位大致是〇,由檢查電極1δ、2。感應產生的交流二 堡也大致敎為G。另-方面，#檢查電極18、2()位 =cs旁！時’藉由和交又線54a產生有交叉短路的 生的盘門2σ之由相位為G的較高的交流電壓感應產 ^的與閘極線52a)的靜電輕合，檢查電極18、2g會❹ 的交流電屢。控制部係根據隨時取得的檢出 ::置。'點㈣感測器位置’來判定交又短路《 從以上的說明中可得知，根據本實施形態於 反相的交流電壓同時施加到液日社 、相 妓眇夜日日面板5〇整體，所以在沒有 心的朽的檢出電隸的位準大致穩Μ 〇。而且，其 319637 16 200819762 結果能夠更準確的判定交叉短路cs的位置。 士予但是，在本實施形態中，利用藉由同時施加反相的交 /爪电C而使檢出電壓值穩定這項技術來判定交叉短路cs 存在的位置，這項技術也能應用於其他的圖案檢查。 第5圖疋本發明第三實施形態的圖案檢查裝置的概 略=視圖。該圖案檢查裝置1〇是一種適用於判定產生斷線 的¥书圖案（以下稱為「斷路圖案」）的檢查裝置。 、該圖案檢查裝置10的感測器12可以沿著導電圖案6〇 勺配置方向（第5圖中的γ方向）移動。該感測器12設置有 兩個供電電極14、16以及兩個檢查電極18、2〇。感測器 :2係以所搭载的四個電極14、16、18、⑼與相對向的導 γ圖木60此夠產生靜電耦合的距離配置在液晶面板％的 式為了使兩個供電電極14、16分別在導電圖案6〇的兩 位置’隔著預定間隔排列在導電圖案6〇的延伸設置 六弟5圖中的X方向）。兩個供電電極14、16分別連接 言、，电^ 22、24，亚被施加互相反相的交流電壓。也就是 :徂ί, 一供電電極14施加相位為〇。的交流電壓，在第 相:电ι極16施加與在第—供電電極14施加的交流電壓 5位準且相位相差180。的交流電壓。 邊，2將第—檢查電極18配置在第一供電電極14旁 、卑二檢查電極20配置在第二供電電極16的旁邊。 合。Γ檢查^極18/20係和相對向的導電圖案60靜電搞 且，藉由該靜電輕合，在檢查電極18、20會感應產 319637 17 200819762 生與在該導電圖案60感應產生的交流電壓呈比例大小 交流電壓。各個檢查電極18、2〇感應引起的交流電壓係紘 •:…26、28放大，從而作為第一檢出電屢和第二檢出 ®疋而被取彳·f •。控制部係將這兩個檢出電慶值和感測器 移動位置附加關聯並儲存。 "" 二著:說，關於採用該圖案檢查農置ι〇的斷路圖案 广1過程。另外’第5圖的右側係圖示隨著感測器12 的移動’第一檢出電壓值（實绫） 的變化。 （，線）以及弟一檢出電餘（虛線） 在從多個導電圖案60中判定產生斷路〇的斷路圖案 白=下’以使四個電極14、16、18、2〇位於導電圖 方式調整感測器12的位置後，使該感測器u 7置方向移動。這時’控制部係將感測器12的 和檢出電壓值附加關聯並隨時儲存。 常導當感測器12與沒有產生斷路0和短路的正 、电圖木60相對向時，兩個供電電極14、 導電圖案60靜電耦合，並施加 . 吊 筮—似_ 上他加又/瓜电壓。此時，同時施加 電電極14的相位為〇。的交流電壓以及第二供電電 二:\的相位為1δ〇。的交流電壓至-個導電圖案60。由： 圖反㈣互相抵消’所以結果是該導電 感應產生的交流電壓大致為Q。在供電電極.Μ =的導電圖案6。靜電箱合的情況下，與該供電電極 6連動而移動的檢查電極18、2〇也與該Next, a description will be given of a process in which the cross-circuit short circuit cS of the pattern inspection device 1 is placed upright. Further, the lower side of Fig. 4 shows a change in the detected voltage value as the sensor moves. When the position of the short-circuit CS is fixed, the sensor 12 is adjusted along the cross line so that the first power supply electrode 移动 can be moved directly above the cross line 54a. %mobile. At this time, a space generated between the first power supply electrode 14 and the intersection line 54a functions as a capacitance, and a phase is applied to the intersection line 54a. AC power. The applied alternating current (4) is also induced in the gate line 52a via the cross short circuit cs. Further, the phase supplied from the first power supply electrode 14 is q. The AC house through parasitic capacitance is also applied to the entire LCD panel 5〇. On the other hand, the second power supply electrode disposed adjacent to the first power supply node 14 is close to and moved from the source line adjacent to the cross line %. The second power supply electrode 16 is connected to the adjacent source line 5 to apply a phase alternating current. It is assumed that the phase is m applied to the entire liquid crystal panel 50 by the uneven parasitic capacitance. Very small alternating current 319637 15 200819762 Here, the influence of the second power supply electrode 16 on the intersection line 54a and the influence of the first power supply electrode 14 adjacent to the intersection line 54a on the intersection line 54a (4) are very small. Therefore, the phase induced in the line 54a and the gate line 52a which is short-circuited with the line 5ja is 〇. The AC voltage 'will not be 180 with phase. The AC voltage is offset while maintaining a fairly high level. On the other hand, the entire liquid crystal panel 5 is simultaneously applied with the phase 〇 by the first power supply electrode 14. The AC voltage of the same level and the phase of the second power supply electrode 16 are 18 〇. The same level of AC voltage. This simultaneous application of opposite phase alternating currents (4) cancels each other out. Therefore, the potential of the entire liquid crystal panel 50 is substantially 〇. - The result 'has stabilized as the sensor 12 moves' the value of the detected voltage value. That is, as shown in the lower side of FIG. 4, when the inspection electrodes 18, 2 离开 are separated from the intersection and the short-circuit CS position, the opposing source line 54 and the gate line position are substantially 〇, by the inspection electrode 1δ ,2. The AC bus generated by induction is also roughly classified as G. Another-side, #check electrode 18, 2 () bit = cs next! At the same time, the electrostatic opening of the gate 2σ having the cross-short is generated by the cross-connection 54a, and the high-voltage voltage of the phase G is coupled with the static electricity of the gate line 52a), and the electrodes 18 and 2g are inspected. The exchange of electricity will be repeated. The control department is based on the detection that is obtained at any time. 'Point (four) sensor position' to determine the intersection and short circuit" From the above description, it can be seen that the reversed alternating voltage is simultaneously applied to the liquid Japanese society and the day and night day panel 5〇 according to the present embodiment. Therefore, in the absence of heart, the level of the detection of the electric syllabus is generally stable. Moreover, its result of 319637 16 200819762 can more accurately determine the position of the cross short circuit cs. However, in the present embodiment, the technique of determining the position of the cross-short cs by using the technique of simultaneously applying the inverted cross-claw power C to stabilize the detected voltage value is also applicable to the other technique. Pattern check. Fig. 5 is a schematic view of a pattern inspection device according to a third embodiment of the present invention. The pattern inspection device 1A is an inspection device suitable for determining a book pattern (hereinafter referred to as a "breaking pattern") in which a disconnection is generated. The sensor 12 of the pattern inspection device 10 can be moved along the arrangement direction of the conductive pattern 6 (the γ direction in Fig. 5). The sensor 12 is provided with two supply electrodes 14, 16 and two inspection electrodes 18, 2A. Sensor: 2 is a type in which the four electrodes 14 , 16 , 18 , and ( 9 ) mounted on the opposite side of the conductive gamma tree 60 are electrostatically coupled to each other in the liquid crystal panel % in order to make the two power supply electrodes 14 And 16 are respectively arranged at two positions of the conductive pattern 6〇 at a predetermined interval in the X direction in the extension of the conductive pattern 6〇 in the figure of the sixth brother. The two supply electrodes 14, 16 are respectively connected, and the electrodes 22, 24 are applied with alternating voltages which are mutually inverted. That is, 徂ί, a power supply electrode 14 is applied with a phase of 〇. The alternating voltage is applied to the phase: the voltage ι 16 and the alternating voltage applied to the first supply electrode 14 to a level of 180 and a phase difference of 180. AC voltage. On the side, the first inspection electrode 18 is disposed beside the first power supply electrode 14, and the second inspection electrode 20 is disposed beside the second power supply electrode 16. Hehe. ΓChecking the electrode 18/20 system and the opposite conductive pattern 60 electrostatically, and by the electrostatic coupling, the test electrodes 18, 20 are inductively produced 319637 17 200819762 and the alternating voltage induced in the conductive pattern 60 Proportional size AC voltage. The AC voltage system :::...26, 28 induced by each of the inspection electrodes 18, 2〇 is amplified, and is taken as the first detection power and the second detection 疋·f. The control unit additionally associates and stores the two detected power values and the sensor moving position. "" Two: said, about the use of the pattern to check the open circuit pattern of the farmer's 〇 1 wide process. Further, the right side of Fig. 5 shows a change in the first detected voltage value (actual value) with the movement of the sensor 12. (, line) and the first one detect the remaining power (dotted line). The breaking pattern for determining the occurrence of the breaking yoke from the plurality of conductive patterns 60 is white = lower 'to make the four electrodes 14, 16, 18, 2 〇 in the conductive pattern manner After adjusting the position of the sensor 12, the sensor u 7 is moved in the direction. At this time, the control unit associates the detected voltage value of the sensor 12 with the detected voltage value and stores it at any time. Normally, when the sensor 12 is opposed to the positive and electric wood 60 which does not generate the open circuit 0 and the short circuit, the two power supply electrodes 14 and the conductive pattern 60 are electrostatically coupled and applied. Melon voltage. At this time, the phase of the electric electrode 14 is simultaneously applied as 〇. The AC voltage and the second power supply 2: \ phase is 1δ〇. The alternating voltage is applied to a conductive pattern 60. From: Figure (4) cancels each other', so the result is that the AC voltage generated by the conduction is approximately Q. At the power supply electrode. Μ = conductive pattern 6. When the electrostatic cases are combined, the inspection electrodes 18 and 2 that move in conjunction with the power supply electrode 6 are also
圖案6〇靜電輕合。但是’該正常的導電圖案60由於L 319637 18 200819762 的交流電壓的相互抵消而使電位為〇。因此，在檢查電極 18、20感應產生的交流電M的值也大致為q，第一^: 壓值以及弟一檢出電壓值都大致為〇。 ^ ; 另一方面，當感測器12移動到產生斷路0的斷路圖 :案62的正上方時，藉由斷路〇阻止所述的交流電壓的相 互抵消。因此，由各個供電電極14、16施加到斷路圖安 62的交流電壓變強。結果，兩個檢查電極18、中二 方會感應產生〇。的交流信號，另一方會感應產生18『的交 =號^這裏，當將G。及⑽。的交流予以同步檢波時， 、白、乂μ電堡會作為正的直流電塵，18〇。的交流電屢會作 為負的直流電壓而檢出。 ” 根據本實施形態，如第5圖右側所示，在感測 ^ 位於所路圖案62旁邊的時候取得高位準的檢出電麗 12遠離斷路圖案62的時候取得大致為〇的 欢抑。'[值控制部係根據取得高位準的檢出電塵值時感 測器12的位置來判定斷路圖案62。 " 、、“的°兄月中可知’由於本實施形態為同時施加反 义抓’电塾的構成’使得在缺陷以外處的檢出電麼值大致 穩定為〇。結果，能狗提高斷路圖案62的判定精確度。另 =’在本貫施形態中’檢查電極既可以是兩個也可以是一 說明關於第四實施形態。“圖是本發明第四 "4的圖案檢查農置1()的概略俯視圖。 置10是-種適用於料存在㈣路圖案上的斷路的= 319637 19 200819762 的裝置。 設置在該圖案檢查裝置10的感測器12可以沿著斷路 .圖案62移動。第一供電電極14、檢查電極、第二供電 -電極16沿斷路圖案62的長度方向而排列配置於感測器 η。並且，感測器12係以這三個電極14、i8、16與對向 的斷路圖案62隔著能夠產生靜電搞合的距離配置在液晶 面板50的上側。 在兩個供電電極14、16施加互相反相的交流電壓。在 •本實施形態中’在配置在感測器移動方向前方侧的第一供 電電極施加相位為〇。的交流電壓，在配置在感測器的移動 ^向後方側的第二供電電極】6施加相位為⑽。的交流電 [祆查电極18感應產生的交流電壓係經過放大器26玫 大，作為檢出電壓值而被取得。 ^說明關於採用該圖案檢查裝置1〇的斷路0的位置判 疋迻私第6圖下側係圖示隨著感測器的移動檢出電壓值 _的變化。 在判疋fef路〇的位置時，使感測器12從斷路圖案a 的一端移動到另一端。該感測器1.2開始移動後，也就是 說，只有第二供電電極16以及檢查電極18位於斷路圖案 的正上方，且第一供電電極14位於斷路圖案62的端部的 二側的時候，在斷路圖案62只施加相位為180。的交流電 壓因此，感測器12開始移動後，不會發生所述交流電壓 互相抵肩，檢出電壓值變為負方向的高位準。但是，繼續 移動感測器12，當三個電極14、18、16全部移動到斷^ 319637 20 200819762 圖案62的正上方時，第一供電電極14的相位為以及第 二供電電極丨6相位為18〇。的交流電壓會同時施加到該斷 路圖案62。而且，由於施加的這兩種交流電壓互相抵消，The pattern 6 is electrostatically light. However, the normal conductive pattern 60 has a potential of 〇 due to the mutual cancellation of the alternating voltages of L 319637 18 200819762. Therefore, the value of the alternating current M induced by the inspection electrodes 18, 20 is also substantially q, and the first and second detected voltage values are substantially 〇. On the other hand, when the sensor 12 moves to the open circuit diagram that generates the open circuit 0: directly above the case 62, the alternating voltages are prevented from canceling each other by the open circuit. Therefore, the AC voltage applied to the disconnection diagram 62 by the respective power supply electrodes 14, 16 becomes strong. As a result, the two inspection electrodes 18, the middle two of them induce the generation of erbium. The AC signal, the other side will sense the 18" of the intersection = number ^ here, when G will be. And (10). When the communication is synchronized, the white, 乂μ电堡 will act as a positive DC dust, 18 〇. The AC power is repeatedly detected as a negative DC voltage. According to the present embodiment, as shown in the right side of Fig. 5, when the sense electrode is located next to the road pattern 62, the high-level detection of the electric discharge 12 is obtained from the disconnection pattern 62. [The value control unit determines the disconnection pattern 62 based on the position of the sensor 12 when the high-level detected electric dust value is obtained. ", and "the brothers and the moons are known" because this embodiment is to apply anti-sense simultaneously The 'construction of the electric raft' makes the value of the detected electricity outside the defect substantially stable to 〇. As a result, the dog can improve the determination accuracy of the breaking pattern 62. In addition, the 'inspection electrode' may be two or one in the present embodiment. "The figure is a schematic plan view of the pattern inspection agricultural plant 1 () of the fourth "4 of the present invention. The device is applied to the device in which the material is present in the (four) road pattern = 319637 19 200819762. The sensor 12 of the device 10 can be moved along the open circuit pattern 62. The first power supply electrode 14, the inspection electrode, and the second power supply-electrode 16 are arranged in the longitudinal direction of the disconnection pattern 62 in the sensor η. The detector 12 is disposed on the upper side of the liquid crystal panel 50 with the distance between the three electrodes 14, i8, and 16 facing the disconnection pattern 62. The two supply electrodes 14 and 16 are mutually inverted. In the present embodiment, the AC voltage applied to the first power supply electrode disposed on the front side in the moving direction of the sensor is applied to the second side of the sensor. The power supply electrode 6 is an alternating current whose phase is (10). [The AC voltage induced by the electrode 18 is amplified by the amplifier 26 and is obtained as the detected voltage value. ^ Describes the disconnection using the pattern inspection device 1 0 The lower side of the figure is shown as a change in the detected voltage value _ with the movement of the sensor. When the position of the fef path is determined, the sensor 12 is moved from one end of the breaking pattern a To the other end, after the sensor 1.2 starts moving, that is, only the second power supply electrode 16 and the inspection electrode 18 are located directly above the circuit breaker pattern, and the first power supply electrode 14 is located on both sides of the end portion of the circuit breaker pattern 62. At the time of the application, only the AC voltage having a phase of 180 is applied to the circuit breaker pattern 62. Therefore, after the sensor 12 starts moving, the AC voltage does not abut against each other, and the detected voltage value becomes a high level in the negative direction. And continuing to move the sensor 12, when all the three electrodes 14, 18, 16 are moved directly above the pattern 62 of the 319637 20 200819762, the phase of the first power supply electrode 14 and the phase of the second power supply electrode 丨 6 are 18 An alternating voltage is applied to the open circuit pattern 62 at the same time. Moreover, since the two alternating voltages applied cancel each other,
故k/f路圖案62的雷位大致變发。m I 曰7电伹大玫夂為〇。因此，經由檢查電極18 檢查出的檢出電壓值也大致穩定為〇。Therefore, the lightning position of the k/f road pattern 62 is substantially changed. m I 曰7 electric 伹 夂 夂 〇 〇. Therefore, the detected voltage value detected through the inspection electrode 18 is also substantially stabilized.
^方面，感測裔12進一步移動，在通過斷路0位 置的前後，檢出電壓值有大的變動。具體而言，只有第二 供電電極在斷路◦後方側，只有檢查電極18以及第一供 電電極14在斷路〇前方側。這時，在斷路〇前方側的斷 路圖案62a只施加相位為〇。的交流電堡。而且，該前方側 的斷路圖案·的電位在正方向上升，在與該前方側的斷 路圖案62a靜電#合的檢查電極18感應產生q。的交流電 亚且，當感測器12移動，且只有第二供電電極16以 及檢查電極18位於斷路〇的後方側時，相反地會產生減 少。也就是說，雖然檢查電極18與斷路〇後方侧的斷路 圖案62b靜電轉合’但該後方側的斷路圖案㈣只被第二 供電電極施加相位為18〇。的交流電壓。因此，當將檢查電 極18的信號予以同步檢波時，檢出負的直流電塵。 亦即，虽感測益12通過斷路〇的時候，如第6圖下 侧所不才双出電壓值首先向正方向土曾大，之後向負方向增 大厂另一方面，在感測器12已經離開斷路0的時候，檢 出电C值基本上穩定為〇。控制部係根據檢出電壓值向 負方向大4感測裔' 12的位置來判定斷路〇的位置。 319637 21 200819762 從以上的說明中可知 62同時施加有反相的六“厂、貫把形態係在導電圖案 壓值穩定。並且，作;:果開缺陷時的檢出電 精確度。 认，果’㈣提⑨斷路〇的位置判定 能的關於第五實施形態。* 7圖是第五實施形 1〇 ° 10 :種適用於從多條導電圖案中判定 案(以下稱為短路圖案)的裝置。 W電囫 該圖木核查裝置10的感測器12可以沿著導電 ㈣置方向(第7圖中的Y方向)移動。第一供電電極⑷ 才双:包極18、第二供電電極16沿配置方向排列配置於感 測印12。與上述的實施形態相同，傳感器12係以三個電 :14、18、16與對向的導電圖案6〇隔著能夠產生靜電耦 a的距離的方式配置在基板的上侧。 斑f兩個供電電極14、16施加互相反相的交流電壓。在 馨本貝軛形怨中，在配置在感測器12移動方向前方側的第一 供包包極14施加相位為〇。的交流電壓，在配置在感測器 12^移動方向後方側的第二供電電極16施加相位為180。 勺父〃,L電壓。檢查電極1 8設置在兩個供電電極14、16之 間，用於檢出對向的導電圖案6〇感應產生的交流電壓值。 該板查電極18感應產生的交流電壓，經過放大器26放大， 作為檢出電壓值而被取得。 ϋ兒明關於採用該圖案檢查裝置10的短路圖案的判定 過私。第7圖右側係圖示隨著感測器12的移動檢出電壓值 319637 22 200819762 Μ 的變化的模揭。玄 、 12移動方&义古/ 以下5兄明為了易於理解，將感測器 動方向則方側的短路圖案64 μ -將感測器12移動方+ 知為弟一紐路圖案”， -路圖案，，。 向後方侧的短路圖帛_稱為“第二短 纟從多條導電圖案60中判斷鄰接的導 有短路的短路圖安64a 何I按的圖案和產生 的時候，將感測器12的位置 5周整到導電圖案60的媸郝A、真α 電圖荦60的坆使該感測器12沿著導 电木ου的配置方向移動。 匕守在與第一供電電極14相對向的導電pj # 位為0。的交流雷厭^ # 丁门的¥電圖案施加相 口乂/瓜電壓，在與第二供電電極16相對向的導雷 圖案施加相位為U 〇。沾>、六 ‘ V電 的寄生電的父流電屡。另外’通過不均勾存在 谷，在液晶面板5〇整體同時施加 流電壓和相位a 。从^ 1 {位為0的父 位為180的父流電壓。這種施加在 整體的兩種交流電壓，因為互相抵消，所以液： =電位大致穩定為0。因此，當感測器12位於離開短路 ^ 64a、64b的位置時’經由檢查電極 電 壓值大致穩定為〇。 码幻钿出電 另一方面，在檢查電極18通過短路 電壓值有大的變動。具體而言，第二供電電極二= 一短路圖案64b的對向位置，檢查電極18 圖…對向位置。這時，第二供電電極 =案_以及與該第二短路圖案働短路的第—短路圖案 a細加相位為180。的交流電壓。第一供電二 生電容也會在該第一嚭玫同电"— i4通過寄 ㈢隹3弟短路圖案64a、第二短路圖荦 319637 23 819762 u 加相位為0。的較小的交流電壓，但士 加的相位為t + r* /、罘一供電電極16施 伯诅马180的父流電壓相比，立 • 此，第一姜i敗岡安“ ’、 4疋非每小的。因 .r ^ 第二短路圖案64b的電位向負方 -向增大。在與該負方向電位增高的筮 罨4勹負方On the other hand, the sensory 12 moves further, and there is a large change in the detected voltage value before and after the disconnection 0 position. Specifically, only the second power supply electrode is on the rear side of the circuit breaker, and only the inspection electrode 18 and the first power supply electrode 14 are on the front side of the circuit breaker. At this time, only the phase 〇 is applied to the circuit breaker pattern 62a on the front side of the circuit breaker. The exchange of electric castles. Further, the potential of the circuit breaker pattern on the front side rises in the positive direction, and q is induced in the inspection electrode 18 which is electrically connected to the circuit pattern 62a on the front side. The alternating current is, when the sensor 12 is moved, and only the second power supply electrode 16 and the inspection electrode 18 are located on the rear side of the open circuit, the opposite is generated. That is, although the inspection electrode 18 is electrostatically turned on with the breaking pattern 62b on the rear side of the breaking port, the circuit pattern (4) on the rear side is applied only by the second power supply electrode to have a phase of 18 turns. AC voltage. Therefore, when the signal of the inspection electrode 18 is synchronously detected, a negative DC dust is detected. That is, although the sensory benefit 12 passes through the open circuit, as shown in the lower side of Fig. 6, the double voltage value first turns to the positive direction, then increases to the negative direction, and on the other hand, the sensor When 12 has left the open circuit 0, the detected C value is basically stable to 〇. The control unit determines the position of the disconnection 根据 based on the detected voltage value and the position of the sensed '4' in the negative direction. 319637 21 200819762 It can be seen from the above description that the six-factory and the morphological state in which the reverse phase is applied at the same time is stable in the value of the conductive pattern, and that the accuracy of the detection is good when the defect is opened. (4) The position determination ability of the 9-breaker is related to the fifth embodiment. * 7 is a fifth embodiment. FIG. 10: A device suitable for determining a case from a plurality of conductive patterns (hereinafter referred to as a short-circuit pattern) The sensor 12 of the wood verification device 10 can be moved along the conductive (four) direction (Y direction in Fig. 7). The first power supply electrode (4) is double: the pole 18 and the second power supply electrode 16 Arranged in the arrangement direction in the sensing print 12. In the same manner as in the above embodiment, the sensor 12 is configured such that the three electrodes: 14, 18, 16 and the opposite conductive pattern 6 are separated by a distance capable of generating the electrostatic coupling a. Arranged on the upper side of the substrate. The two supply electrodes 14 and 16 of the spot f are applied with alternating voltages which are mutually inverted. In the Xinbebe yoke, the first supply bag disposed on the front side of the moving direction of the sensor 12 The pole 14 applies an alternating voltage of phase 〇, which is disposed in the sensor 12 ^ The second power supply electrode 16 on the rear side of the moving direction is applied with a phase of 180. The scoop is L, L voltage. The inspection electrode 18 is disposed between the two power supply electrodes 14, 16 for detecting the opposite conductive pattern 6〇 The induced AC voltage value is detected by the plate, and is amplified by the amplifier 26 and obtained as a detected voltage value. The determination of the short-circuit pattern by the pattern inspection device 10 is excessive. The right side of Fig. 7 shows the change of the detected voltage value 319637 22 200819762 Μ with the movement of the sensor 12. Xuan, 12 moving party & Yigu / following 5 brothers will be sensed for easy understanding The direction of the device is the short-circuit pattern 64 μ on the square side - the sensor 12 is moved to the side + the pattern is known as the "one-way pattern", - the road pattern,,. The short-circuit pattern _ referred to the rear side is referred to as "the second short 纟 is determined from the plurality of conductive patterns 60, and the position of the sensor 12 is determined when the adjacent short-circuited short-circuit diagram 64a is generated and generated. The 坆 of the 媸 Hao A and the true 电 60 of the conductive pattern 60 for 5 weeks causes the sensor 12 to move along the arrangement direction of the conductive wood 。. The pj # bit is 0. The AC lightning ^ ^ # 丁门's ¥ electric pattern applies the phase 乂 / melon voltage, and the phase of the lightning-leading pattern opposite to the second power supply electrode 16 is U 〇. The parasitic electric current of the V electric power is repeated. In addition, the flow voltage and the phase a are simultaneously applied to the liquid crystal panel 5〇 through the uneven valley. The parent flow from the ^1 {bit 0 to the parent is 180. This voltage applied to the whole of the two alternating voltages, because they cancel each other out, so the liquid: = potential is substantially stable to 0. Therefore, when the sensor 12 is located away from the short circuit ^ 64a, 64b 'via the check electrode voltage value It is roughly stable as 〇. Code phantom power out, on the other hand, inspecting electrode 18 through short circuit There is a large variation in the voltage value. Specifically, the second power supply electrode 2 = the opposite position of the short circuit pattern 64b, the opposite position of the electrode 18 is inspected. At this time, the second power supply electrode = the case _ and the second short circuit The first short circuit pattern of the short circuit of the pattern 细 is added with an alternating voltage of 180. The first power supply secondary capacitor is also in the first 嚭 同 & — — — — — — 三 三 三 三 三 三 短路 短路 短路 短路 短路 短路 短路 短路 短路 短路 短路 短路 短路The two short circuit diagram 荦 319637 23 819762 u plus the phase of the smaller AC voltage, the phase of the singer is t + r * /, compared with the parent voltage of the power supply electrode 16 Shi Bo Ma 180, • This, the first ginger i defeated Gangan "', 4 疋 not every small. Since the potential of the .r ^ second short circuit pattern 64b increases toward the negative direction - direction. In the negative direction, the potential is increased.
，向的檢告電極1"痛：短路圖案64“目對 查電極18感應產生負的交 I 、蝴多動’當檢查電極18移動到與第 相對向驗置、第一供電電極短路圖案祕 64a ^ λλ , 私動到與第一短路圖案The inspection electrode 1" pain: short circuit pattern 64 "mesh to the detection electrode 18 to induce a negative intersection I, butterfly hyperactivity" when the inspection electrode 18 moves to the opposite direction, the first supply electrode short circuit pattern secret 64a ^ λλ , private to the first short circuit pattern
Ma相對向的位置時，這次 十 相反的現象。也就是說， 供 矛姐路圖案64a、第一 4s牧闰吞m 雷1… 弟—短路圖案6仆的電位係由第一 電电極14提供相位為〇。的 電壓而導致正方向較大， 且在核查電極18感應產生正的交流電壓。 :即’如第7圖右侧所示’當感測器12通過短路圖案 a' 4b_候’檢出電壓值首先向負方向變大，接著向 正方向變大。控制部係據檢出電壓值變的較大時感測器U 的位置來判定短路圖案64a、64b。 從以上的說明中可知，由於在本實施形態中同時施加 ^相的父流電壓，使得離開缺陷位置的檢出電壓值大致穩 疋為0。亚且，其結果提高了短路圖案的判定精確度。 2外’本實施形態的圖案檢查裝置10不僅能判定鄰接的導 電圖案的互相短路，而且能判定在互相交又的方向上延伸 的導電圖案的互相短路也就是交叉短路。 第8圖是採用本實施形態的圖案檢查裝置10，判定和 閘極線52a產生有交叉短路的源極線54a，也就是交叉線 54a時的概略俯視圖。 319637 24 200819762 在判定交叉線54a的時候，將感測器12配置到源極線 54的端部旁邊後，使該感測器Γ2沿著源極線54的配置方 •向（第8圖中的Y方向）移動。 如上所述’在本貫施形態中，同時施加有互相反相的 交流電壓。因此，在離開交叉線54a的位置上，由於通過 寄生電容施加的反相的交流電壓會互相抵消，故液晶面板 50整體的電位大致穩定為〇。因此，感測器12在離開交叉 線54a的位置時，檢查電極丨8感應產生的交流電壓也大致 _穩定為0。 另方面，甚心查電極18位於交叉線54a旁邊時，反 相的交流電壓的平衡會崩潰，使檢出電壓值有較大變動。 具體而a，當第二供電電極16位於交叉線54&的正上方 时，—供電電極16主要向交叉線54a以及和該交叉線 54a父又短路的閘極線52a，共計兩條導電圖案供電。另一 方面第彳/、電电極14主要僅向沒有產生交叉短路的一條 源極線54供電。這時，向數量多的導電圖案供電的第二供 電電極16的負荷增大，電位降低。並且，與第—供電電極 14相比’由於第二供電電極16的電位降低，故阻止所述 交=電遂的互相抵消現象。結果，在檢查電極18周圍，受 到第一供電電極j 4的影塑#吝 更 且在檢查電極18感應產 生“為〇的交流信號。感測器12繼續移動，當第一供 :Γ二4位於交又線54 a的正上方時，產生與此相反的 Γ4的電位^與第二供電電極16相比，由於第—供電電極 电“，結果在檢查電極18感應產生相位為⑽。 319637 25 200819762 的交流信號。 亦即’當感測器12通過交叉線54a時，檢出電壓值的 相位檢波的結果，首先向正方向變大，接著向負方向變大。 控制部係根據該檢出電壓值變大時感測器12的位 定交叉線54a。 按照上述說明可知，由於在本實施形態中同時施加反 相的交流電壓，而使離開缺陷位置時的檢出電壓值大致穩 定為〇。並且，其結果可以提高交叉線54a的判定精確度。 【圖式簡單說明】 第1圖是本發明的第一實施形態的圖案檢查裝置的概 略俯視圖。 第2圖是圖案檢查裝置的概略侧視圖。 第3圖（A)及（B)是顯示其它的電極配置態樣的一個示 例圖。 &弟4圖是本發明的第二實施形態的圖案檢查裝置的概 略俯視圖。 弟5圖是本發明的第三實施形態的圖案檢查震置的概 略俯視圖。 政第6圖疋本發明的第四實施形態的圖案檢查裝置的概 鸣"俯視圖。 政松^圖疋本&明的第五實施形態的圖案檢查裝置的概 略俯視圖。 干立Z圖疋、頁示使用圖案檢查裝置進行交叉線判定時的 不忍圖。 26 319637 200819762 【主要元件符號說明】 10 圖 案檢查 裝置 12 感測器 14、 16 供電電 極 18 ' 20 檢查 電極 η、 24 父流電 源 26、 28 放大 器 50 液 晶面板 52、 52a閘極 線 54、 54b 源極 線 54a 交叉線 56 絕 緣層 60 導電圖 案 62 ^ 62a、 62b 斷路圖案 64 短路圖 案 CS 交叉短路 0 斷路 27 319637The relative position of Ma is the opposite of this ten. That is to say, the potential for the spear-sister road pattern 64a, the first 4s, and the squirrel-like pattern 6 is supplied by the first electric electrode 14 to be the phase 〇. The voltage causes a positive direction to be large, and a positive AC voltage is induced at the verification electrode 18. That is, 'as shown on the right side of Fig. 7', when the sensor 12 detects the voltage value through the short-circuit pattern a' 4b_hook, it first becomes larger in the negative direction, and then becomes larger in the positive direction. The control unit determines the short-circuit patterns 64a and 64b based on the position of the sensor U when the detected voltage value becomes large. As apparent from the above description, in the present embodiment, the parent voltage of the ^ phase is simultaneously applied, so that the detected voltage value from the defect position is substantially constant at zero. The result is that the accuracy of the short-circuit pattern is improved. In the pattern inspection device 10 of the present embodiment, it is possible to determine not only mutual short-circuiting of adjacent conductive patterns, but also mutual short-circuiting of the conductive patterns extending in mutually overlapping directions, that is, cross-short. Fig. 8 is a schematic plan view showing a state in which the source line 54a which is short-circuited with the gate line 52a, that is, the cross line 54a, is formed by the pattern inspection device 10 of the present embodiment. 319637 24 200819762 When judging the intersection line 54a, after the sensor 12 is placed beside the end of the source line 54, the sensor Γ2 is placed along the source line 54 (Fig. 8) The Y direction) moves. As described above, in the present embodiment, alternating voltages which are mutually inverted are applied at the same time. Therefore, at the position away from the intersection line 54a, since the inverted AC voltages applied by the parasitic capacitance cancel each other, the potential of the entire liquid crystal panel 50 is substantially stabilized. Therefore, when the sensor 12 is away from the position of the cross line 54a, the AC voltage induced by the check electrode 8 is also substantially stabilized to zero. On the other hand, when the check electrode 18 is located next to the cross line 54a, the balance of the reverse phase AC voltage collapses, causing a large change in the detected voltage value. Specifically, a, when the second power supply electrode 16 is located directly above the intersection line 54&, the power supply electrode 16 mainly supplies power to the intersection line 54a and the gate line 52a which is short-circuited with the parent of the intersection line 54a. . On the other hand, the second electrode/electrode 14 mainly supplies power only to one source line 54 which does not cause a cross short circuit. At this time, the load of the second power supply electrode 16 that supplies a large number of conductive patterns is increased, and the potential is lowered. Further, since the potential of the second power supply electrode 16 is lowered as compared with the first power supply electrode 14, the mutual cancellation phenomenon of the intersection = power is prevented. As a result, around the inspection electrode 18, the image of the first power supply electrode j 4 is further affected and an "AC signal" is induced at the inspection electrode 18. The sensor 12 continues to move when the first supply: Γ二4 When it is located directly above the line 54a, the opposite potential of the Γ4 is generated. As compared with the second power supply electrode 16, the first supply electrode is electrically "synthesized, and the phase is induced at the inspection electrode 18 (10). 319637 25 200819762 AC signal. That is, when the sensor 12 passes the cross line 54a, the result of phase detection of the detected voltage value first increases in the positive direction and then increases in the negative direction. The control unit sets the intersecting line 54a of the sensor 12 when the detected voltage value becomes large. As apparent from the above description, in the present embodiment, the reverse voltage is applied at the same time, and the detected voltage value at the time of leaving the defect position is substantially stabilized as 〇. Moreover, as a result, the determination accuracy of the intersecting line 54a can be improved. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic plan view of a pattern inspecting apparatus according to a first embodiment of the present invention. Fig. 2 is a schematic side view of the pattern inspection device. Fig. 3 (A) and (B) are diagrams showing an example of other electrode arrangement aspects. Fig. 4 is a schematic plan view of a pattern inspecting apparatus according to a second embodiment of the present invention. Fig. 5 is a schematic plan view showing a pattern inspection shake according to a third embodiment of the present invention. (Embodiment 6) A schematic view of a pattern inspection device according to a fourth embodiment of the present invention. A schematic plan view of a pattern inspecting apparatus according to a fifth embodiment of the present invention. The dry Z-picture and the page show the unbearable picture when the cross-line determination is performed using the pattern inspection device. 26 319637 200819762 [Main component symbol description] 10 pattern inspection device 12 sensor 14, 16 power supply electrode 18 ' 20 inspection electrode η, 24 parent current power supply 26, 28 amplifier 50 liquid crystal panel 52, 52a gate line 54, 54b source Polar line 54a crossing line 56 insulating layer 60 conductive pattern 62 ^ 62a, 62b open circuit pattern 64 short circuit pattern CS cross short circuit 0 open circuit 27 319637