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TWI590369B - A transfer device, an electronic device forming method, and an element forming device - Google Patents

A transfer device, an electronic device forming method, and an element forming device Download PDF

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Publication number
TWI590369B
TWI590369B TW101146357A TW101146357A TWI590369B TW I590369 B TWI590369 B TW I590369B TW 101146357 A TW101146357 A TW 101146357A TW 101146357 A TW101146357 A TW 101146357A TW I590369 B TWI590369 B TW I590369B
Authority
TW
Taiwan
Prior art keywords
substrate
support member
longitudinal direction
back surface
holes
Prior art date
Application number
TW101146357A
Other languages
English (en)
Chinese (zh)
Other versions
TW201351555A (zh
Inventor
鈴木智也
Original Assignee
尼康股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 尼康股份有限公司 filed Critical 尼康股份有限公司
Publication of TW201351555A publication Critical patent/TW201351555A/zh
Application granted granted Critical
Publication of TWI590369B publication Critical patent/TWI590369B/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0214—Articles of special size, shape or weigh
    • B65G2201/022—Flat
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2812/00—Indexing codes relating to the kind or type of conveyors
    • B65G2812/16—Pneumatic conveyors

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Electroluminescent Light Sources (AREA)
  • Coating Apparatus (AREA)
  • Advancing Webs (AREA)
  • Registering, Tensioning, Guiding Webs, And Rollers Therefor (AREA)
  • Controlling Rewinding, Feeding, Winding, Or Abnormalities Of Webs (AREA)
  • Liquid Crystal (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Handling Of Sheets (AREA)
  • Delivering By Means Of Belts And Rollers (AREA)
  • Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
TW101146357A 2012-04-03 2012-12-10 A transfer device, an electronic device forming method, and an element forming device TWI590369B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012084819 2012-04-03

Publications (2)

Publication Number Publication Date
TW201351555A TW201351555A (zh) 2013-12-16
TWI590369B true TWI590369B (zh) 2017-07-01

Family

ID=49300192

Family Applications (3)

Application Number Title Priority Date Filing Date
TW101146357A TWI590369B (zh) 2012-04-03 2012-12-10 A transfer device, an electronic device forming method, and an element forming device
TW108112908A TWI674645B (zh) 2012-04-03 2012-12-10 圖案形成裝置
TW106117184A TWI660449B (zh) 2012-04-03 2012-12-10 Pattern forming device

Family Applications After (2)

Application Number Title Priority Date Filing Date
TW108112908A TWI674645B (zh) 2012-04-03 2012-12-10 圖案形成裝置
TW106117184A TWI660449B (zh) 2012-04-03 2012-12-10 Pattern forming device

Country Status (6)

Country Link
JP (3) JP6137171B2 (ja)
KR (5) KR101879162B1 (ja)
CN (2) CN104203779B (ja)
HK (1) HK1203183A1 (ja)
TW (3) TWI590369B (ja)
WO (1) WO2013150677A1 (ja)

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JP6829814B2 (ja) * 2017-03-13 2021-02-17 日本電気硝子株式会社 ガラスフィルムの製造方法
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CN107032163B (zh) * 2017-04-22 2019-01-29 广州明森科技股份有限公司 一种纸带输送装置
CN107010449B (zh) * 2017-04-22 2019-01-29 广州明森科技股份有限公司 一种电子票证前段加工设备
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CN108480135A (zh) * 2018-05-24 2018-09-04 陈鸿奇 一种成卷膜基材涂布用的涂布装置
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Also Published As

Publication number Publication date
KR102000430B1 (ko) 2019-07-15
TW201836046A (zh) 2018-10-01
JP6137171B2 (ja) 2017-05-31
CN105752686B (zh) 2018-09-21
JP6593507B2 (ja) 2019-10-23
CN104203779B (zh) 2016-04-20
JP2017144433A (ja) 2017-08-24
KR101854959B1 (ko) 2018-05-04
HK1224264A1 (zh) 2017-08-18
KR101809001B1 (ko) 2017-12-13
KR20180038071A (ko) 2018-04-13
TWI674645B (zh) 2019-10-11
JP6414270B2 (ja) 2018-10-31
KR101962083B1 (ko) 2019-03-25
TWI660449B (zh) 2019-05-21
KR20180072871A (ko) 2018-06-29
CN105752686A (zh) 2016-07-13
TW201351555A (zh) 2013-12-16
CN104203779A (zh) 2014-12-10
JP2018199580A (ja) 2018-12-20
KR20170095395A (ko) 2017-08-22
TW201929139A (zh) 2019-07-16
KR20150000476A (ko) 2015-01-02
JPWO2013150677A1 (ja) 2015-12-17
WO2013150677A1 (ja) 2013-10-10
KR20190010732A (ko) 2019-01-30
HK1203183A1 (en) 2015-10-23
KR101879162B1 (ko) 2018-07-16

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