TWI590362B - Pickup device - Google Patents

Description

Pickup device

The present invention relates to a method of picking up electronic parts from a sheet.

In the process of using a product of an electronic component, generally, the electronic component is supplied in a state of being attached to the sheet, and is used by peeling off the sheet by means of picking up the electronic component. In a general device, while absorbing the electronic component by the suction nozzle, the electronic component is peeled off from the back of the sheet by the jacking pin, and the electronic component is sucked by the suction nozzle. The parts are transferred to the working position.

Patent Document 1 describes an example of a jacking device for picking up electronic components from a wafer sheet.

[Previous Technical Literature] [Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open Publication No. 2014-197697

With the device as described above, the electronic component attached to the sheet is lifted from the bottom up with the jacking pin, and if the sheet is broken and the component is picked up, there is an adhesive remaining at the front end of the pin which breaks the sheet or One of the sheets may adhere to the back side of the electronic component and remains a problem.

As a problem to be solved by the present invention, the above contents can be cited as an example. An object of the present invention is to pick up an electronic component from a sheet so that an adhesive or the like does not remain on the back surface of the electronic component.

According to a first aspect of the invention, a pickup device includes: a first stage on which a sheet to which an element is attached is placed, and an opening; and a second stage that is disposed inside the opening and has the above a small mounting surface of the element, and supporting the element from a lower side of the sheet; a pressure applying means for applying pressure to the sheet; and a suction nozzle for absorbing the element while applying pressure to the sheet Pick up.

1, 1a‧‧‧ picking device

2‧‧‧ frame

3‧‧‧ chamber

4‧‧‧Exhaust device

5‧‧‧Sucking nozzle

7‧‧‧Top pin

8‧‧‧hair dryer

9‧‧‧Cylinder

10, 10a, 10b, 10c‧‧‧ suction platform

11, 11a, 11b, 11c‧‧‧ picking department

12‧‧‧ openings

12e‧‧‧The outer periphery

12ex‧‧‧ outer peripheral part

13‧‧‧Support

13a‧‧‧through hole

13b‧‧‧Support

14‧‧‧through holes

15‧‧‧ peripherals

20‧‧‧Sheet

21‧‧‧ wafer ring

25‧‧‧Electronic parts (components)

40‧‧‧dotted line

51~54, 57~59‧‧‧ arrows

Fig. 1 is a view showing the schematic configuration of a pickup device of a first embodiment.

2(A) and (B) schematically show the state of the suction platform viewed from above.

3(A) to (C) show the construction of the pickup portion of the suction platform.

Fig. 4 is a view showing the operation of the pickup device of the first embodiment.

Fig. 5 is a view showing an example of a state in which an element is placed on a pickup unit.

Fig. 6 (A) and (B) show the configuration of the pickup device of the second embodiment.

Fig. 7 is a view showing the operation of the pickup device of the second embodiment.

Fig. 8 is a view showing the configuration of a sorption platform of Modification 1.

9(A) and (B) show the structure of the absorbing platform of the second modification.

10(A) and (B) show an example of the pick-up device of Modification 3.

In a preferred embodiment of the present invention, the pick-up device is provided with: first a table on which a sheet to which an element is attached is placed and has an opening; and a second stage provided inside the opening, having a mounting surface smaller than the above-mentioned element, and supporting the above from the lower side of the sheet a pressure applying means for applying pressure to the sheet; and a suction nozzle for sucking the element in a state where pressure is applied to the sheet to pick up.

In the above pickup device, the sheet is placed on the first stage such that the element is positioned on the opening, and the element is supported by the second stage from the lower side of the sheet. Since the mounting surface of the second stage is smaller than the element, one of the components is supported by the second stage, and the area other than the above part is not supported. Moreover, pressure is applied to the sheet and the element is picked up by sucking the nozzle.

In one aspect of the pick-up device, the pressure applying means peels the sheet toward the opening side by applying pressure to the sheet, and the absorbing nozzle is partially peeled off from the sheet by the member. In the state, the above components are sucked and picked up. In this aspect, the sheet is partially peeled from the component by the pressure applied to the sheet. The sheet from which the element is peeled off extends toward the opening direction of the first stage and the second stage without being attached to the element again. In this state, the suction nozzle picks up the component and picks it up. Since a strong pressure is applied to the sheet, the sheet is detached from the element after being peeled off from the element in a region other than the area supported by the second stage, so that the element can be easily peeled off, thereby preventing the adhesive or the like from remaining. From the element where the sheet is peeled off. Further, even under the condition that one of the sheets is not peeled off, since the sheet is sucked with a strong force, the element can be easily peeled off.

In another aspect of the picking device described above, the opening is larger than the component. Thereby, the sheet can be peeled off from the outer peripheral side of the element.

In another aspect of the pick-up device, a through hole is provided in an opening of the first table, and the pressure applying means is an exhaust device that sucks air inside the opening through the through hole. In this aspect, the sheet is stripped from the element by applying a suction force to a portion located within the opening of the sheet.

In a preferred example, the through hole is provided in the vicinity of the outer circumference of the opening, and the pressure applying means peels the sheet from the end side of the element.

In another aspect of the above pickup device, the pressure applying means is means for applying air pressure to the sheet from above the sheet. In this aspect, the air pressure is applied from above the sheet by blowing or the like, and the sheet is peeled off from the element.

In another aspect of the pick-up device, the pressure applying means is a mechanism for giving a pressing force for pushing the sheet partially toward the opening side from above the sheet. In this aspect, the sheet is stripped from the element by applying a pressing force to the object abutting the sheet.

In another aspect of the above pickup device, the outer periphery of the opening has an obtuse cross-sectional shape. In this aspect, it is possible to prevent the sheet portion abutting against the periphery of the opening from being deformed.

As a preferred example, a plurality of second stages are provided in the pickup device. By providing a plurality of second stages, even if the area of each of the second stages is small, the elements can be stably supported.

In another aspect of the pick-up device, the second table is provided with a hole through which the jacking pin passes, and a top portion for moving the jacking pin up and down to push the element through the hole. Starting the institution. In this aspect, the peeling of the sheet from the component can be promoted by the jacking mechanism.

[Examples]

Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings.

[First Embodiment]

Fig. 1 is a cross-sectional view showing a schematic configuration of a pick-up device of a first embodiment. In the pick-up device 1, a plurality of electronic components or electronic components (hereinafter simply referred to as "components") 25 arranged on a dicing sheet (hereinafter simply referred to as "slice") 20 are picked up one by one, and moved to a predetermined one. The location. Furthermore, in FIG. 1, the wafer ring 21 is provided in the outer periphery of the sheet 20.

The pickup device 1 includes a housing (main body) 2, an exhaust device 4, a suction nozzle 5, and a suction platform 10. The casing 2 has a cylindrical shape and serves as a susceptor for placing the sheet 20. A disk-shaped suction platform 10 is disposed on the upper portion of the frame 2, and the sheet 20 is disposed on the suction platform 10.

Inside the casing 2, a chamber (space) 3 is formed by the inner wall of the casing 2 and the suction platform 10. Further, an exhaust device 4 is attached to the side wall of the casing 2. The exhaust device 4 decompresses the inside of the chamber 3 by discharging the air in the chamber 3 to the outside. As will be described later, the suction platform 10 is provided with a plurality of through holes communicating with the chamber 3, and the air inside the chamber 3 is discharged to the outside by driving the exhaust device 4, thereby generating suction force. The sheet 20 is sucked onto the suction platform 10.

The suction nozzle 5 is moved up and down to pick up the component 25 on the sheet 20. Specifically, in a state where the target element 25 is positioned directly below, the suction nozzle 5 is lowered to suck the element 25. Then, the suction nozzle 5 is raised, and after the horizontal movement is performed to transport the element 25 to a predetermined position, the suction/release element 25 is stopped and placed at a predetermined position.

The sheet 20 is moved in the horizontal direction by a horizontal moving mechanism not shown. move. Thereby, the elements 25 attached to the sheet 20 are sequentially moved one at a time to the pickup position in the center of the suction platform 10. That is, if the absorbing nozzle 5 picks up one element 25, the sheet 20 moves horizontally to move the next element 25 to the pickup position, and the absorbing nozzle 5 picks up the next element 25. By repeating the above operation, the plurality of elements 25 on the sheet 20 are sequentially moved to a predetermined position.

Fig. 2(A) schematically shows the state of the periphery of the sorption platform 10 as viewed from above in Fig. 1. In addition, FIG. 2(A) omits the sheet 20 for the convenience of illustration. As shown in FIG. 2(A), a plurality of elements 25 are disposed on the suction platform 10.

Fig. 2(B) is a plan view showing the state in which the sheet 20 is not placed in Fig. 2(A), that is, the state in which the element 25 is not present. As shown by the broken line 40, a portion (structure) 11 for picking up the component 25 by the suction nozzle 5 is provided at the pickup position at the center of the suction platform 10. Hereinafter, this portion 11 will be referred to as a "pickup portion". The suction nozzle 5 is lowered from the upper portion of the pickup portion 11 to suck the member 25 on the sheet 20. In the suction platform 10, a portion that is outside the pickup portion 11 is referred to as a "peripheral portion 15".

Next, the structure of the pickup unit 11 of the suction platform 10 will be described. FIG. 3(A) is a perspective view of the pickup unit 11. Further, Fig. 3(A) is an enlarged view of the inside of the broken line 40 in Fig. 2(B).

As shown in the figure, a rectangular opening (concave portion) 12 is formed in the pickup portion 11. The bottom surface of the opening 12 is in a state of being recessed downward as compared with the portion outside the opening 12, that is, the peripheral portion 15. On the other hand, in the suction platform 10, the peripheral portion 15 which is the outer side of the opening 12 is a plane which is highly uniform.

An island-shaped support portion 13 is provided near the center of the opening 12. The support portion 13 has a function of supporting the sheet 20 from below and the member 25 attached thereto. The height of the upper surface of the support portion 13 coincides with the height of the peripheral portion 15. In addition, A plurality of through holes 14 are formed in the bottom surface of the opening 12.

Fig. 3(B) shows the position of the element 25 in the pickup unit 11 by a broken line. As shown, the upper surface of the support portion 13 is smaller than the area of the element 25. Furthermore, the opening 12 is larger than the area of the element 25. Thereby, the element 25 is housed inside the opening 12 while being supported by the support portion 13. Further, since the support portion 13 is smaller than the element 25, the vicinity of the center of the element 25 is supported by the support portion 13, but the vicinity of the outer periphery of the element 25 is not supported by the support portion 13.

Fig. 3(C) is a cross-sectional view taken along line A-A' of Fig. 3(B) showing a state in which the sheet 20 is placed on the suction platform 10. In a state where the sheet 20 is placed on the absorbing platform 10, the lower surface of the sheet 20 is abutted against the peripheral portion 15 and the support portion 13 and supported by the same. More specifically, on the inner side of the opening 12, the lower surface of the sheet 20 abuts only on the upper surface of the support portion 13, and an area other than the support portion 13 is abutted on the inner side, and an opening is formed below the sheet 20. 12 depth space.

A plurality of through holes 14 are formed in the bottom surface of the opening 12. The through hole 14 passes through the suction platform 10 and communicates with the chamber 3 shown in FIG. Thereby, when the exhaust device 4 is driven, the air existing in the space between the sheet 20 and the opening 12 is discharged through the through hole 14 toward the chamber 3. Thereby, a suction force for pulling the sheet 20 downward is generated in the opening 12. Although the details are as described later, the sheet 20 can be partially peeled off from the lower surface of the member 25 by the suction force.

Further, in the above configuration, the peripheral portion 15 of the suction platform 10 corresponds to the first table of the present invention, and the support portion 13 corresponds to the second table of the present invention. Further, the exhaust device 4, the chamber 3, and the through hole 14 correspond to the pressure applying means of the present invention.

Next, the operation of the pickup device 1 will be described. Figure 4 shows the loan The step of picking up one element 25 by the pickup device 1. Further, as a premise, the sheet 20 is placed on the suction platform 10, and the element 25 to be picked up is placed on the pickup unit 11 of the suction platform 10.

First, in step 1, as indicated by an arrow 51, the suction nozzle 5 is lowered to attract the upper surface of the target member 25.

Next, in step 2, the exhaust device 4 operates to decompress the chamber 3 below the suction platform 10. As indicated by the arrow 52, the air in the opening 12 is discharged through the through hole 14 toward the chamber 3. Thereby, the suction force indicated by the arrow 53 is applied to the sheet 20 at the peripheral portion of the element 25.

Thus, as shown in step 3, the sheet 20 is pulled down in the opening 12 as indicated by the arrow 54, and the lower surface of the element 25 is peeled off. Here, as described with reference to FIG. 3(B), since the support portion 13 is smaller than the element 25, the sheet 20 is gradually peeled off from the outer peripheral side of the element 25. Then, as shown in step N, the sheet 20 leaves only the area supported by the support portion 13, and the lower surface of the element 25 is peeled off. Further, in this state, the pulling force indicated by the arrow 54 is substantially horizontal in the region supported by the support portion 13 of the sheet 20.

Thus, if the sheet 20 is peeled off from the lower surface of the element 25 except for the area in contact with the support portion 13, the suction nozzle 5 rises as indicated by the arrow 51 in steps X to Y, and the element is moved. 25 is peeled off from the sheet 20 to be picked up. At this time, as shown in the step N, since the element 25 has been peeled off from the sheet 20 at a position other than the region abutting on the support portion 13, even if the suction force of the suction nozzle 5 is not large, the member 25 can be easily picked up. . Further, in step Y, after the suction nozzle 5 picks up the component 25, the exhaust device 4 is stopped.

Thus, in the pickup device 1 of the first embodiment, by utilizing The suction force generated by the exhaust device 4 can peel the sheet 20 from the lower surface of the element 25 in a region other than the region abutting on the support portion 13, so that even if the suction force of the suction nozzle 5 is small, it is easy. The component 25 is picked up from the sheet 20. Further, since the lower surface of the member 25 is peeled off from the sheet 20 in the region of the support portion 13 by the rise of the suction nozzle 5, it is possible to prevent the pickup member from being attached to the lower surface of the member 25 while the adhesive or the like is attached. 25.

Next, the size of the support portion 13 (the area of the upper surface) is reviewed. As described above, since the sheet 20 is peeled off from the lower surface of the member 25 in a region other than the region abutting on the support portion 13 by the suction force generated by the exhaust device 4, the support portion 13 is When the area of the upper surface is smaller, a large area of the sheet 20 can be peeled off from the element 25 before being picked up by the suction nozzle 5. On the other hand, since the support portion 13 has the function of supporting the sheet 20 and the member 25 thereon, if the area thereof is made too small, the support of the member 25 by the support portion 13 is unstable, and there is a pair of suction. The possibility that the suction operation by the nozzle 5 is hindered is caused. Therefore, the area of the support portion 13 is preferably as small as possible within a range that can ensure the stability necessary for the suction operation by the suction nozzle 5.

Next, the through hole 14 is reviewed. The through holes 14 are preferably provided in a plurality of substantially equal intervals in the opening 12. The number and position of the through holes 14 and the size of each of the through holes 14 are adjusted so that the suction force required to peel the sheet 20 from the lower surface of the element 25 can be obtained. Further, in order to gradually peel the sheet 20 from the outer peripheral side of the element 25 as described above, it is preferable to form the through hole 14 at a position corresponding to the outer circumference of the element 25, that is, near the outer circumference of the opening 12.

Furthermore, in the above embodiment, the size of the opening 12 is made larger than the element 25. Specifically, as shown in FIG. 3(B), the length of the opening 12 is longer than the rectangle. The length of the element 25 is long and horizontal, and the outer circumference of the element 25 can be accommodated inside the opening 12. However, the size of the opening 12 may be made larger than the element 25 only in either of the vertical and horizontal directions. Fig. 5 shows an example of this case. The rectangular element 25a has a length in the longitudinal direction that is shorter than the opening 12, but the length in the lateral direction is longer than the opening 12, and the element 25a extends beyond the opening 12 in the lateral direction. In this case, even if the suction force is applied by the exhaust device 4, the sheet 20 cannot be peeled off from the element 25 at the left and right end portions of the element 25, but the sheet 20 can be self-assembled at the upper and lower ends. 25 peeled off. Further, even in the lateral direction of the element 25, although the area on the peripheral portion 15 cannot peel the sheet 20 from the element 25, the area on the inner side, that is, the area inside the opening 12, can be suctioned. The force reduces the adhesion of the sheet 20. Therefore, the entire element 25 need not be sized to be accommodated inside the opening 12, and the effect of peeling the sheet 20 from the element 25 can be obtained by the suction force of the exhaust device 4.

[Second Embodiment]

Next, a second embodiment of the present invention will be described. In addition to the features of the first embodiment, the second embodiment has the feature of using the jacking pin 7.

Fig. 6(A) is a cross-sectional view showing the configuration of the pickup device 1a of the second embodiment. In the pick-up device 1a of the second embodiment, in addition to the pick-up device 1 of the first embodiment, a jacking pin 7 is disposed inside the casing 2. The jacking pin 7 is moved up and down as indicated by an arrow 57 by a mechanism (not shown).

Fig. 6(A) is a perspective view of the pickup portion 11a of the suction platform 10a of the pickup device 1a. As can be seen from comparison with FIG. 3(A), in the pick-up portion 11a of the second embodiment, a through hole 13a is formed substantially at the center of the support portion 13. The through hole 13a passes through the suction platform 11a and communicates with the chamber 3 inside the casing 2. The jacking pin 7 is located below the through hole 13a. When picking up the component 25 from the sheet 20, the jacking pin 7 will rise, and The lower surface of the element 25 is pushed upward by the through hole 13a. Thereby, the element 25 is lifted up and becomes easily peeled off from the sheet 20. That is, the rise of the jacking pin 7 promotes the peeling of the sheet 20 from the element 25. In addition to the above configuration, the pickup device 1a of the second embodiment is the same as the pickup device 1 of the first embodiment.

Fig. 7 shows the step of picking up one element 25 by the pickup device 1a. Further, as a premise, the sheet 20 is placed on the suction platform 10a, and the element 25 to be picked up is disposed on the pickup unit 11a of the suction platform 10a.

First, in step 1, as indicated by an arrow 51, the suction nozzle 5 is lowered to attract the upper surface of the target member 25.

Next, in step 2, the exhaust device 4 operates to cause the air in the opening 12 to be discharged toward the chamber 3 through the through hole 14 as indicated by the arrow 52, and the sheet 20 is applied to the peripheral portion of the member 25. Suction force. Further, the jacking pin 7 is raised to abut against the lower surface of the sheet 20.

In step 3, the sheet 20 is pulled down within the opening 12 and is peeled off from the lower surface of the element 25. In addition to this, the lower surface of the sheet 20 is lifted by raising the jacking pin 7 to promote peeling of the sheet 20.

Thus, if the sheet 20 is peeled off from the lower surface of the element 25 except for the region of the support portion 13, in the step X to the step Y, the suction nozzle 5 is raised as indicated by the arrow 51, and the nozzle 5 is sucked. Element 25 is peeled from sheet 20 and picked up. In step Y, after the suction nozzle 5 picks up the component 25, the exhaust device 4 is stopped.

As described above, in the second embodiment, peeling of the sheet 20 from the element 25 can be promoted by lifting the sheet 20 upward by the jacking pin 7. Thereby, it is possible to prevent the adhesive or the like from remaining on the picked-up element 25.

[Modification] (Modification 1)

In the first and second embodiments, one support portion 13 is provided in the opening 12 of the pickup unit 11, but a plurality of support portions may be provided instead. Fig. 8 shows the pickup portion 11b of the absorbing platform 10b of the first modification. In the example of Fig. 8, four support portions 13b are provided in the opening 12. Similarly to the support portions 13 of the first and second embodiments, the four support portions 13b support the sheet 20 and the element 25 from below. Further, a plurality of through holes 14 are provided between the four support portions 13b. With this configuration, the sheet 20 can be peeled off from the lower surface of the element 25 in a region other than the four support portions 13b by the suction force generated by the exhaust device 4.

Further, in the example of Fig. 8, although four support portions 13 are provided, the number of the support portions 13 may be any number. By providing a plurality of support portions 13, even if the area of each support portion 13 is small, the components can be stably supported. Further, by providing the through holes 14 around the plurality of support portions 13, the peeling of the sheets 20 can be promoted.

(Modification 2)

Fig. 9(A) shows the A-A' cross section of the pickup unit 11 shown in Fig. 3(B). As shown in the figure, in the first and second embodiments and the first modification, the outer peripheral edge portion 12e of the opening 12 of the pickup portion 11 has a substantially right angle in cross section. In this case, when the ejector unit 4 is driven to suck the sheet 20 toward the chamber 3 side, the suction force is concentrated on the corner of the outer peripheral edge portion 12e, and the sheet 20 is partially extended and deformed. If the sheet 20 is partially deformed, there is a case where the sheet member 20 is horizontally moved in order to move the next member 25 toward the pickup portion 11.

Therefore, in Modification 2, as shown in FIG. 9(B), the pickup portion 11c is to be used. The cross-sectional shape of the outer peripheral edge portion 12ex is an obtuse angle, so that it has a gentle inclination. Thereby, it is possible to prevent the suction force from being locally concentrated when the sheet 20 is sucked, and the sheet 20 is locally deformed.

(Modification 3)

In the first and second embodiments and the first and second modifications, the exhaust device 4 is provided in the pickup device 1, and the sheet 20 is sucked downward in the opening 12 of the pickup portion 11, whereby the sheet 20 is self-assembled. 25 peeling. However, it is also possible to apply pressure from above the sheet 20, thereby peeling the sheet 20 from the element 25.

For example, in the example of Fig. 10(A), the blower 8 is provided on the outer circumference of the suction nozzle 5, and air is blown downward as indicated by an arrow 58, i.e., air is blown, whereby the sheet 20 is peeled off from the member 25. . The cross-sectional shape of the blower 8 is preferably a top view shape of the mating component. That is, if the element 25 has a rectangular shape in plan view, the cross-sectional shape of the blower 8 is preferably a rectangle slightly larger than the cross-sectional shape of the element 25. Further, the air blow by the blower 8 is preferably carried out in the vicinity of the outer periphery of the element 25 which is the object of picking up and is not blown to the surrounding element 25.

In the example of FIG. 10(B), the cylindrical body 9 of resin or the like is provided on the outer circumference of the suction nozzle 5. The cylindrical body 9 is lowered as shown by an arrow 59 to be pressed against the sheet 20, that is, a pressing force is applied, whereby the sheet 20 is peeled off from the element 25. In this case, the cross-sectional shape of the tubular body 9 is preferably a plan view of the mating component. If the planar shape of the component 25 is rectangular, the cross-sectional shape of the tubular body 9 is preferably slightly larger than the planar shape of the component 25. Large rectangle. Further, the cylindrical body 9 must be set to a size that does not contact the element 25 around the element 25 to be picked up.

1‧‧‧ picking device

2‧‧‧ frame

3‧‧‧ chamber

4‧‧‧Exhaust device

5‧‧‧Sucking nozzle

10‧‧‧ suction platform

20‧‧‧Sheet

21‧‧‧ wafer ring

25‧‧‧Electronic parts (components)

Claims (9)

A picking device comprising: a first stage on which a sheet to which an element is attached is placed and having an opening; and a second stage provided inside the opening and having a smaller size than the above-mentioned element a mounting surface, and supporting the element from a lower side of the sheet; a pressure applying means for applying pressure to the sheet; and a suction nozzle for sucking the element for picking up under pressure applied to the sheet Further, the second stage is provided with a hole through which the jacking pin passes, and further includes a jacking mechanism for moving the jacking pin up and down so as to push the element through the hole. The pick-up device according to claim 1, wherein the pressure applying means peels the sheet toward the opening side by applying pressure to the sheet, and the sucking nozzle is partially peeled off from the sheet by the member. In the state, the above components are sucked and picked up. The pickup device of claim 1, wherein the opening is larger than the above element. The pick-up device of claim 1, wherein a through hole is provided in an opening of the first table, and the pressure applying means is an exhaust device that sucks air inside the opening through the through hole. The pick-up device of claim 4, wherein the through hole is provided near an outer circumference of the opening, The pressure applying means peels the sheet from the end side of the element. The pick-up device of claim 1, wherein the pressure applying means is means for applying air pressure to the sheet from above the sheet. The pick-up device according to claim 1, wherein the pressure applying means is a mechanism for giving a pressing force for pushing the sheet partially toward the opening side from above the sheet. The pick-up device of claim 1, wherein the outer periphery of the opening has an obtuse cross-sectional shape. A picking device according to claim 1, wherein a plurality of said second work stations are provided.