TWI568693B - Retainer unit and scribing device - Google Patents

Description

Holder unit and scoring device

The present invention relates to a holder unit and a scoring apparatus for forming a score line on a surface of a brittle material substrate. More specifically, the present invention relates to a holder unit in which a holder is integrated with a scoring wheel and a pin, and a scribing device provided with a joint portion that can detach the holder unit.

In the breaking of a brittle material substrate such as a glass substrate, a scribing wheel is generally used. Specifically, the scribing wheel is pressed and rotated on the glass substrate to form a scribe line on the surface of the substrate, whereby cracks are generated from the surface of the substrate in the vertical direction (scratching step), and then the substrate is stressed to apply the stress. The vertical crack grows to the back surface of the substrate (cracking step), thereby breaking the brittle material substrate.

When a score line is formed on the surface of the substrate, the front end of the edge of the scoring wheel will gradually wear out. Once the front end of the blade is worn, it is necessary to replace the scoring wheel. However, since the outer diameter of the scribed wheel train is about 1.0 to 5.0 mm, when the wheel supported by the front end of the holder is taken out, it is necessary to pull out a very small pin for supporting the wheel, etc. The replacement workability is very poor.

Therefore, for example, a cutter wheel holder disclosed in Patent Document 1 is known as a holder unit for improving the workability of the scribe wheel.

The cutter wheel holder has a holder, a scoring wheel and a pin. More specifically, the cutter wheel holder is rotatably held by the pin in the holding groove of the holder and becomes The combination of integrated holders, scoring wheels and pins. Further, the cutter wheel holder can be easily attached and detached with respect to the holder joint in which the magnet is embedded.

However, in the case where the scoring wheel has to be replaced, it is not necessary to specifically take out the scribing wheel from the holder, and only the cutter wheel holder can be replaced, so that the replacement workability of the scoring wheel becomes very good.

As described above, the cutter wheel holder disclosed in Patent Document 1 has a configuration in which the cutter wheel holder is replaced when the score wheel has to be replaced. Therefore, after the cutter wheel holder is assembled, it is not necessary to take it out from the holder. Mark the wheel and pin. Therefore, the cutter wheel holder disclosed in Patent Document 1 has a configuration in which the pin is fixed to the pin hole of the holder so as not to be taken out.

Patent Document 1: Japanese Laid-Open Patent Publication No. 2012-995

However, in the glass substrate after the division, the desired end face strength is high. In particular, since the display panel is continuously thinned, the glass substrate constituting the display panel is also gradually made thinner. According to the display panel using such a thin glass substrate, when the end surface strength of the glass substrate is weak, when an external force is applied to the display surface, the glass substrate is easily broken. Therefore, it is strongly required to increase the end face strength of the fractured brittle material substrate.

An object of the present invention is to provide a holder unit and a scoring device in which a holder and a scoring wheel and a pin are integrated, and the holder unit and the scoring device can improve the passage of the brittle material substrate. The end face strength of the broken brittle material substrate.

In order to achieve the above object, the holder unit of the present invention comprises: a scoring wheel for forming a score line; a pin for holding the scoring wheel to be rotatable; and a holder having a forming arrangement for the scribing a pair of support portions for holding the groove of the wheel, and being disposed on the pair of support portions a pin hole for arranging the pin; and a holder unit for holding the scribe wheel on a pin disposed in the pin hole, wherein the pin is in the pin hole to be between the holder and the holder Configured with a gap.

According to the holder unit of the present invention, since the pin is disposed in the pin hole so as to have a gap between the holder and the holder, the rotation can be performed. Thereby, the holder unit of the present invention can improve the end surface strength of the fractured brittle material substrate as compared with the holder unit in which the pin is disposed so as not to be rotatable.

Further, in order to achieve the above object, the scoring device of the present invention includes a holder unit and a joint portion detachably attaching the holder unit, wherein the holder unit includes a scoring wheel for forming a scoring a pin; the pin is held in a rotatable manner; and the holder has a pair of support portions forming a retaining groove for arranging the scribing wheel, and the pair of support portions are provided with the pin a pin hole; and the pin is disposed in the pin hole so as to provide a gap between the holder and the holder.

According to the scribing device of the present invention, in the scribing device including the holder unit in which the scoring wheel and the pin are integrated with the holder, and the joint portion in which the holder unit is detachable, the pin is placed in the Since the gap is disposed so as to be rotatable between the holders, it is possible to manufacture a partitioned brittle material substrate having improved end surface strength.

10‧‧‧ scoring device

11‧‧‧Mobile Station

12a, 12b‧‧‧ Guide rails

13‧‧‧Ball screw

14, 15‧‧ ‧ motor

16‧‧‧ platform

17‧‧‧Battery material substrate

18‧‧‧CCD camera

19‧‧‧ Bridge

20a, 20b‧‧ ‧ pillar

21‧‧‧Scratch

22‧‧‧ Guides

23, 123‧‧‧ Keep the joint

23a‧‧‧Rotary shaft

23b, 123b‧‧‧ joints

24a, 24b‧‧‧ bearing

24c‧‧‧ spacer

25, 124‧‧‧ openings

26, 125‧‧‧ internal space

27‧‧‧ magnet

28‧‧‧ parallel sales

30, 130‧‧‧Holding unit

31, 131‧‧‧ Keeping

32‧‧‧Installation Department

32a‧‧‧ inclined section

32b‧‧‧flat

132‧‧‧Operator

33, 134‧‧‧ Keep the groove

34a, 34b, 135a, 135b‧ ‧ support

35a, 35b, 136a, 136b‧‧ pin holes

36, 138‧‧‧ claws

40, 140‧‧‧ marking wheel

41‧‧‧Substrate

42‧‧ ‧ pinhole

43‧‧‧Knife

44‧‧‧ ridgeline

45‧‧‧Sloping surface

50, 150‧‧ ‧ sales

126‧‧‧ rods into the groove

127‧‧‧Flexible components

133‧‧‧ recess

137‧‧ ‧ baffle

Fig. 1 is a schematic view showing a scribing apparatus in the first embodiment.

Fig. 2 is a front elevational view of the holder joint of the scoring apparatus of the first embodiment.

Fig. 3 is a perspective view of the holder unit in the first embodiment.

Fig. 4 is a partial enlarged view of a holder unit in the first embodiment.

Fig. 5 is a side view of the scoring wheel in the first embodiment.

Fig. 6 is a schematic view showing a method of measuring the end face strength of the test piece.

Fig. 7(a) is a view showing the measurement results of the end face strength in the case where the pin-rotatable holder unit is used; and Fig. 7(b) shows the measurement result of the end face strength in the case where the holder unit in which the pin cannot rotate is used. Figure.

Fig. 8 is a partially enlarged perspective view showing a state in which the holder unit is attached to the joint portion in the second embodiment.

Fig. 9 is a cross-sectional view showing a state in which the holder unit is attached to the joint portion in the second embodiment.

Fig. 10 is a front view of the holder unit in the second embodiment.

Hereinafter, embodiments of the present invention will be described using the drawings. However, the embodiments shown below are merely examples of the technical idea for embodying the present invention, and the present invention is not intended to be specific to the embodiment. The invention is also applicable to other embodiments included in the scope of the patent application.

[Embodiment 1] A schematic view of a scoring device 10 according to Embodiment 1 is shown in Fig. 1 . The scoring device 10 is provided with a mobile station 11. Further, the moving table 11 is screwed to the ball screw 13, and the ball screw 13 is rotated by the driving of the motor 14, so that it can be moved in the y-axis direction along the pair of guiding rails 12a and 12b.

Above the mobile station 11, a motor 15 is provided. The motor 15 is used to rotate the platform 16 located at the upper portion in the xy plane to be positioned at a predetermined angle. The brittle material substrate 17 is placed on the stage 16 and held by a vacuum suction means or the like (not shown). In addition, become a scribe The brittle material substrate 17 to be used is, for example, a glass substrate, a ceramic substrate, a sapphire substrate, a ruthenium substrate or the like.

The scribing device 10 is provided with two CCD cameras 18 for photographing alignment marks formed on the surface of the brittle material substrate 17 above the brittle material substrate 17. Further, in the scoring apparatus 10, the bridge 19 is erected in the x-axis direction by the struts 20a, 20b so as to straddle the platform 16 of the movable table 11 and its upper portion.

The bridge 19 is mounted with a guide member 22, and the scribing head 21 is disposed to be movable along the guide member 22 in the x-axis direction. Further, the holder head 30 is attached to the scribe head 21 through the holder joint 23, and the holder unit 30 is attached.

2 is a front view of the holder joint 23 to which the holder unit 30 is mounted. In addition, FIG. 3 is a perspective view of the holder unit 30. Further, Fig. 4 is a view enlarging a portion of the side surface of the holder unit 30 as viewed from the direction A of Fig. 3.

The holder joint 23 has a substantially columnar shape, and includes a rotating shaft portion 23a and a joint portion 23b. In the state in which the holder 21 is attached to the scribing head 21, two spacers 24c are attached to the rotating shaft portion 23a to hold the holder joint 23 in a rotatable manner. Bearings 24a, 24b. 2 is a front view showing the holder joint 23, and a cross-sectional view of the bearings 24a and 24b and the spacer 24c attached to the rotating shaft portion 23a is also shown.

The cylindrical joint portion 23b is provided with an inner space 26 having a circular opening 25 on the lower end side. A magnet 27 is embedded in the upper portion of the internal space 26. Further, the holder unit 30, which is detachably attached to the magnet 27, is attached to the internal space 26.

The holder unit 30 is configured to include the holder 31 and the scoring wheel 40 and the pin 50. That is, the holder unit 30 integrates the holder 31 with the scoring wheel 40 and the pin 50. Become the creator.

The holder 31 is substantially cylindrical as shown in FIG. 3 and is formed of a magnetic metal. Further, on the upper portion of the holder 31, a mounting portion 32 for positioning is provided. The mounting portion 32 is formed by cutting the upper portion of the holder 31, and includes an inclined portion 32a and a flat portion 32b.

Further, the side of the mounting portion 32 of the holder 31 is inserted into the internal space 26 through the opening 25. At this time, the upper end side of the holder 31 is attracted by the magnet 27, and the positioning of the holder unit 30 with respect to the holder joint 23 is performed by the inclined portion 32a of the mounting portion 32 coming into contact with the parallel pin 28 passing through the internal space 26. With fixed. Further, when the holder unit 30 is taken out from the holder joint 23, the holder unit 30 can be easily taken out by pulling it downward.

At the lower portion of the holder 31, a holding groove 33 formed by cutting the holder 31 is provided. Further, the lower portion of the holder 31 which is cut in order to provide the holding groove 33 is provided with support portions 34a and 34b so as to sandwich the holding groove 33. In the holding groove 33, the scribing wheel 40 is arranged to be rotatable. Further, pin holes 35a and 35b for supporting the pins 50 for holding the scribing wheel 40 in a rotatable manner are formed in the support portions 34a and 34b, respectively. Further, the pin hole 35a has a step inside, and the aperture of the opening on the side of the holding groove 33 is larger than the aperture of the opening on the other side.

Next, the details of the scoring wheel 40 will be described using FIG. Figure 5 is a side view of the scribe wheel 40 mounted to the front end of the holder 31.

The scribing wheel 40 is formed of a base material 41. Further, in the base material 41, a through hole 42 through which the pin 50 passes is formed substantially at the center of the base material 41, and a blade portion 43 formed by cutting both ends of the circumferential portion of the base material 41 is formed.

The base material 41 is, for example, a disk-shaped member made of a hard material such as a cemented carbide, a sintered diamond (hereinafter referred to as PCD), stainless steel or ceramic. this Further, the through hole 42 is formed by cutting a substantially center of the base material 41 into a circular shape.

The blade portion 43 includes a ridge line 44 formed by cutting both ends of the circumferential portion of the disk-shaped base material 41, and an inclined surface 45 on both sides of the ridge line 44. The rake angle of the blade portion 43 is generally an obtuse angle and is in the range of 90 to 160 degrees, preferably in the range of 90 to 140 degrees. Further, the specific angle of the rake angle can be appropriately set depending on the material, thickness, and the like of the brittle material substrate 17 to be cut.

Next, the size of the scribing wheel 40 will be described. The outer diameter of the scoring wheel 40 is in the range of 1.0 to 10.0 mm, preferably in the range of 1.0 to 5.0 mm, more preferably in the range of 1.0 to 3.0 mm. In the case where the outer diameter of the scoring wheel 40 is less than 1.0 mm, the handleability of the scoring wheel 40 is lowered. On the other hand, in the case where the outer diameter of the scribing wheel 40 is larger than 10.0 mm, there is a case where a deep vertical crack cannot be formed on the brittle material substrate 17 at the time of scribing.

The thickness of the scoring wheel 40 is in the range of 0.4 to 1.2 mm, preferably in the range of 0.4 to 1.1 mm. In the case where the thickness of the scoring wheel 40 is less than 0.4 mm, there is a case where workability and handleability are lowered. On the other hand, in the case where the thickness of the scoring wheel 40 is larger than 1.2 mm, the material of the scribing wheel 40 and the cost for manufacturing are made high. Further, the width of the holding groove 33 of the holder 31 (the distance between the support portion 34a and the support portion 34b) is slightly larger than the thickness of the scribing wheel 40. In the first embodiment, the holding groove 33 is opposed to 0.65. The mm wheel has a width of about 0.67 mm and is provided with a gap of about 0.02 mm.

The hole diameter of the through hole 42 of the scribing wheel 40 is about 0.8 to 1.5 mm.

Next, the pin 50 will be described. The pin 50 is a cylindrical member, and as shown by a broken line in Fig. 4, one end thereof has a pointed shape.

As the material of the pin 50, similarly to the base material 41 of the scoring wheel 40, a hard material such as cemented carbide, PCD, stainless steel, or ceramic can be used. In addition, in other respects, pin 50, phase For a cylindrical member formed of a cemented carbide or the like, a plated film containing hard particles may be formed on the surface thereof. Thus, by forming a plating film containing hard particles on the surface, it is possible to reduce the wear of the pin 50 caused by the rotation of the scoring wheel 40. Further, as the hard particles, for example, a hard material such as a single crystal diamond, a polycrystalline diamond, or a cubic crystal boron nitride is used. Further, as the plating film, for example, a nickel film or the like is applied.

Moreover, the holder 31 is constructed using the holder 31 and the scoring wheel 40 and the pin 50 as described above. Specifically, the holder unit 30, as shown in FIG. 4, passes the pin 50 through the through hole 42 of the scribing wheel 40, and positions both ends of the pin 50 in the pin holes 35a, 35b, and the scoring wheel 40 It is configured to be rotatable relative to the holder 31.

According to the holder unit 30 of the first embodiment, if it is necessary to replace the scribing wheel 40, the holder unit 30 can be replaced without taking out the scoring wheel 40. Therefore, after the holder 31 is integrated with the scribing wheel 40 and the pin 50, since it is not necessary to specifically take out the scribing wheel 40 from the holder 31, it is not necessary to take out the pin 50 from the pin holes 35a, 35b. Therefore, in the conventional integrated type holder unit, the pin 50 is fixed to the pin holes 35a, 35b and is configured to be non-rotatable.

However, in the holder unit 30 of the first embodiment, the pin 50 is rotatably disposed in the pin holes 35a and 35b.

Specifically, the pin 50 provided in the pin holes 35a and 35b is provided with a gap of about 0.025 to 0.055 mm between the holder 31 and the holder 31. By providing such a gap, the pin 50 provided in the pin hole can be rotated together with the scoring wheel 40 when the scoring wheel 40 rotates. Further, when the gap is less than 0.025 mm, the rotation of the pin 50 is lowered, and if the gap is larger than 0.055 mm, it is easy to cause the debris generated by the scribe to enter the gap, and the rotatability of the pin 50 is rather lowered. In addition, engraved The gap between the scribe wheel 40 and the pin 50 in the through hole 42 of the trajectory 40 is set to 0.035 to 0.065 mm.

Further, in the holder unit 30 of the first embodiment, as shown in FIG. 3 or FIG. 4, the claw portion 36 is formed at four locations on the pin hole 35b side so as to swallow the wall of the pin hole 35b, and The pin 50 is configured not to fall off from the pin hole 35b. Further, on the pin hole 35a side, there is a step inside, so that the aperture of the opening on the side of the holding groove 33 is larger than the aperture of the opening on the other side. By forming the pin receiving portion by the step portion, the pin 50 does not fall off from the pin hole 35a.

With such a configuration, the holder unit 30 can rotate the pin 50 disposed in the pin holes 35a and 35b. Further, in the first embodiment, the claw portions 36 are formed at four locations, but may be less than or more than four portions. Further, even on the pin hole 35a side, the wall of the swaging pin hole 35a may be formed to form the claw portion similarly to the pin hole 35b side.

Next, the result of measuring the cross-sectional strength of the separated brittle material substrate 17 by actually dicing the holder unit 30 in a state in which the pin 50 disposed in the pin holes 35a and 35b is rotatable is actually described.

First, the scribing wheel 40 actually used has a substrate 41 made of a PCD. In addition, the pin 50 is also a PCD manufacturer.

In addition, PCD is a mixture of fine diamond particles (particle diameter of 0.5 to 2.0 μm), additives (ultrafine particle carbides such as tungsten, titanium, tantalum, niobium) and binders (iron-based elements such as cobalt, nickel, and iron). And the diamond is made into a thermodynamically stable high temperature and ultra high pressure, and the mixture is sintered and manufactured.

Further, the reason why the PCD is used as the pin 50 is to make the pin 50 easier to rotate more smoothly. One of the reasons is due to the fact that three types of pins made of PCD, pins made of super-hard alloy, and pins coated with a coating film containing hard particles are formed on the surface. Under the observation of the surface roughness, it was found that the pins made of PCD and the pins made of superhard alloy were superior in surface roughness. Further, in the case of obtaining the arithmetic mean roughness (Ra) which is one of the parameters indicating the surface roughness, PCD is 0.062 μm, the superhard alloy is 0.024 μm, and the plating film containing the hard particles is 0.954 μm. In addition, regarding the coefficient of friction, PCD has a lower coefficient of friction than superhard alloy.

Moreover, in order to perform comparison with the holder unit 30, the holder unit C for comparison is prepared. Similarly to the holder unit 30, the holder unit C includes the holder 31, the scoring wheel 40, and the pin 50, and is integrated.

Further, the difference between the holder unit C and the holder unit 30 is that the pin 50 disposed in the pin holes 35a and 35b is fixed in a state in which it cannot be rotated. Specifically, the holder unit C is configured to fix the pin 50 so as not to be rotatable by pressing the pin 50 into the pin hole 35a. Further, the fixing of the pin 50 in the holder unit C for comparison is used, and a method such as an adhesive may be used.

The scribing wheel 40 has an outer diameter of 3.0 mm, a thickness of 0.65 mm, a hole diameter of the through hole 42 of 0.8 mm, and a blade rake angle of the blade portion 43 of 110 degrees.

Further, the holder unit 30 and the holder unit C for comparison are respectively attached to the holder joint 23 of the scoring device 10, and the brittle material substrate 17 is separated to form a test piece, and the cross-sectional strength of the test piece is performed. Determination.

In addition, the conditions for the preparation of the test piece are as follows: Scribe device: Scratch device manufactured by Samsung Diamond Industry Co., Ltd. (MS type)

Cutting speed: 300mm/sec

Cutting amount: 0.1mm

Brittle material substrate: Glass substrate made by Nippon Electric Glass Co., Ltd., thickness 0.3mm, 360mm × 460mm, OA-10 (trade name)

Test piece size: 40mm × 50mm

In addition, the end face strength is on a straight line that is separated from the center line (two lines of 40 mm × 25 mm) on one side of each test piece, and is separated from the two sides by 5 mm on both sides, and the opposite side (back side). The upper center line (the line opposite to the center line of the surface) leaves two straight lines of 10 mm on both sides, and applies a pressure F to the test piece from the vertical direction, and measures the stress at the time of destruction, thereby obtaining 4 Flexural strength of each part (unit: N). In addition, the outline of the measuring method of the bending strength of each test piece is shown in FIG. Further, the four-part bending tester used was Ez Test/CE manufactured by Shimadzu Corporation, and measured at a test speed of 1 mm/min.

Further, the bending strengths of the four portions of the 20 test pieces which were separated by using the holder unit 30 and the holder unit C, respectively, were measured. Fig. 7(a) is a view showing measurement results in a case where the pin 50 is a rotatable holder unit 30, and Fig. 7(b) is a measurement result in a case where the pin 50 is a non-rotatable holder unit C. Figure. In addition, the measurement is performed using three different pins 50, and the same pin 50 is used for n=1 in FIGS. 7(a) and 7(b), and the n=2 and n=3 systems are respectively in the holder unit. 30 uses the same pin 50 as the holder unit C.

Further, in Fig. 7, the maximum value (Max) and the minimum value (Min) and the average value (Ave) measured for 20 test pieces are shown in the figure. Further, in the case where the holder unit 30 is used as shown in Fig. 7(a), the average intensity of three is 81.3N. Further, the average intensity of three in the case where the holder unit C is used as shown in FIG. 7(b) is 71.3 N.

From this result, it is understood that the holder unit 30 which is set in a state in which the pin 50 is rotatable is a holder piece unit C which is set in a state in which the pin 50 is not rotatable, and the test piece is glass. The strength of the end face of the substrate becomes high. Specifically, the end face strength of the holder unit 30 is about 14% higher than the end face strength of the holder unit C.

That is, in the case where the holder 31 and the holder 40 are integrally formed with the pin 50, the end face strength of the divided brittle material substrate 17 can be made by arranging the pin 50 in a rotatable state. improve.

In addition, in the holder joint of the so-called manual scribe device, the holder unit 30 and the holder unit C are respectively mounted, and when the scribe line is formed on the glass substrate, the use is maintained compared to the holder unit 30. Unit C feels blunt and heavy.

As described above, in the holder unit C in which the pin 50 is fixed, the rotational resistance of the scoring wheel 40 is increased, so that a large number of cracks are generated on the end surface, and the end surface strength is lowered.

[Embodiment 2] Next, the holder joint 123 and the holder unit 130 of the second embodiment will be described with reference to Figs. 8 to 10 . FIG. 8 is a partially enlarged perspective view showing a state in which the holder unit 130 is attached to the joint portion 123b of the holder joint 123. Fig. 9 is a cross-sectional view showing a state in which the holder unit 130 has been attached to the joint portion 123b of the holder joint 123. Figure 10 is a front view of the holder unit 130.

The holder unit 130 is formed by integrating the holder 131 with the scoring wheel 140 and the pin 150.

The holder 131 is formed of a metal or a resin in a substantially cylindrical shape. In the holder 131, in order to easily restrict the insertion direction of the joint portion 123b, it is easy to attach and detach, and the operation lever 132 protruding from the side surface is formed. Further, in the holder 131, an annular recess 133 is formed over the entire circumference.

Further, below the holder 131, a retaining groove 134 formed by cutting is provided. Further, in order to provide the holding groove 134, the lower portion of the cut holder 131 is provided with support portions 135a, 135b so as to sandwich the holding groove 134. In the holding groove 134, pin holes 136a, 136b for supporting the pin 150 for holding the scribing wheel 140 in a rotatable manner are formed, respectively. Further, the pin hole 136a has a step inside, and the aperture of the opening on the side of the groove 134 is kept larger than the aperture of the opening on the other side. Further, the scoring wheel 140 is the same as the scribing wheel 40 of the first embodiment. Further, the pin 150 is the same as the pin 50 of the first embodiment.

The joint portion 123b of the holder joint 123 is formed with an inner space 125 having an opening 124 for inserting and holding the holder unit 130, and a rod introduction groove 126 for introducing the operation rod 132 of the holder 131. Further, an elastic member 127 (see FIG. 9) such as a ball plunger or a spring member is provided in the opening 124. Further, the elastic member 127 abuts against the annular recessed portion 133 of the holder 131.

The holder unit 130 is inserted into the internal space 125 through the opening 124 while introducing the operation lever 132 into the rod introduction groove 126. Once the holder unit 130 is inserted into the internal space 125 and the operating lever 132 is lifted up in the rod introduction groove 126, the upper end of the holder 131 abuts against the top in the internal space 125. At this time, the elastic member 127 is engaged with the concave portion 133 of the holder 131, whereby the holder unit 130 is held and fixed to the joint portion 123b to be detachable. Further, since the operation lever 132 is prevented from rotating in the rotation direction by the rod introduction groove 126, the holder unit 130 is correctly positioned in the internal space 125 of the joint portion 123b. In addition, the holder 131 may include the annular recessed portion 133 not on the entire circumference of the outer peripheral surface, and may include the recessed portion 133 only at a position where the elastic member 127 abuts.

Further, the holder 131 is formed outside the pin hole 136b of the support portion 135b. The diameter of the portion side (the side opposite to the holding groove 134) is large. Further, a baffle plate 137 having a disk diameter larger than that of the pin 150 is disposed in a portion having a larger diameter. The baffle plate 137 is held by the claw portion 138 formed by the wall on the outer side of the four-part type forging pin hole 136b so as not to fall off. Further, the shutter 137 is disposed after the pin 150 is inserted from the pin hole 136b side, and is held by the claw portion 138.

Further, the holder 131 has a step inside on the pin hole 136a side, and the aperture of the opening on the side of the groove 134 is larger than the aperture of the opening on the other side. The holder 131 has a pin receiving portion formed by the step portion so that the pin 150 does not fall off from the pin hole 136a.

Further, in the same manner as the holder unit 30 of the first embodiment, the pin 150 is disposed in the holder unit 130 so as to be provided with a gap of 0.025 to 0.055 mm between the pin holes 136a and 136b and the holder 131. .

With such a configuration, the holder unit 130 can rotate the pin 150 disposed in the pin holes 136a and 136b. Therefore, similarly to the holder unit 30 of the first embodiment, in the case where the holder 131 and the holder 120 are integrated with the pin 150 and the pin 150, since the pin 150 is placed in a rotatable state, it is possible to Improve the end face strength of the fractured brittle material substrate.

Further, in the holder unit 130, the shutter 137 is held by the claw portion 138 formed by the inner peripheral wall of the outer side of the swaging pin hole 136b. Therefore, the end portion of the pin 150 on the side of the pin hole 136b does not directly contact the claw portion 138 but comes into contact with the shutter 137. Therefore, if the pin 150 directly abuts against the claw portion 138, there is a fear that the rotation of the pin 150 becomes irregular or decelerated due to the step difference of the claw portion 138. However, in the second embodiment, such a problem does not occur.

Further, the baffle 137 is formed of a steel material. In addition, since there are also holes in the pin Since the pins 150 that are not fixed in the 136a and 136b are in contact with each other, it is also possible to form a film having a DLC (diamond-like carbon film) or the like having a lower friction coefficient. Alternatively, in order to prevent wear or breakage in contact with the pin, a hard alloy having a high hardness or the like may be used.

Further, once the scribing speed becomes faster at the time of formation of the score line, the pin 150 is easily rotated together by the rotation of the scribing wheel 140, so that a large external force is applied to the pin 150. At this time, if the pin 150 is in direct contact with the claw portion 138, the pin 150 is likely to be pierced by the claw portion 130. However, in the second embodiment, since the pin 150 is in contact with the baffle 137 to disperse the external force, the pin 150 is hard to fall off.

Further, in the second embodiment, a disk-shaped object is used as the baffle plate 137. However, the baffle plate 137 may have an elliptical shape as long as it can prevent the pin 150 from coming out of the pin hole 136b. Flat plate, polygonal plate, etc.

Further, in the second embodiment, the holder 137 is held by the claw portion 138, but the holder unit 130 may be configured to hold the shutter 137 in the pin hole 136b by an adhesive or by welding. The baffle 137 is held in the pin hole 136b.

Further, the holder unit 130 may have a configuration in which the baffle 150 is also used on the side of the pin hole 136a.

33‧‧‧ Keep the groove

34a, 34b‧‧‧Support Department

35a, 35b‧‧ pin holes

36‧‧‧ claws

40‧‧‧scribed wheel

41‧‧‧Substrate

42‧‧ ‧ pinhole

43‧‧‧Knife

44‧‧‧ ridgeline

45‧‧‧Sloping surface

50‧‧ ‧ sales

Claims (5)

A holder unit having: a scoring wheel for forming a score line; a pin for holding the scoring wheel to be rotatable; and a holder having a retaining groove formed with the scoring wheel a pair of support portions, wherein the pair of support portions are provided with a pin hole for arranging the pin; and the pin is held by the pin disposed in the pin hole, wherein the pin is in the pin hole The gap is disposed between the holder and the holder, and a claw portion for preventing the pin from falling off is disposed on the outer side of the pin disposed on the pin hole. The holder unit of claim 1, wherein the gap is 0.025 to 0.055 mm. A holder unit according to claim 1, wherein a baffle is disposed between the pin and the claw. The holder unit of any one of claims 1 to 3, wherein the pin system is composed of sintered diamond. A scribing device comprising: a holder unit according to any one of claims 1 to 4; and a joint portion detachably attaching the holder unit.