JP2014117848A - Pin for scribing wheel, holder unit, scribe device, and manufacturing method of pin for scribing wheel - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a holder which improves the abrasion resistance of a pin for a scribing wheel and reduces the sliding resistance between itself and the scribing wheel thereby reducing the number of replacement of the scribing wheel and the pin, and to provide a scribe device and a manufacturing method of the pin for the scribing wheel which improves the abrasion resistance of the pin for the scribing wheel.SOLUTION: A scribing wheel positioned in a holding groove of a holder included in a scribe device is rotatably held by a pin 50 inserted into a pin hole and a surface of the pin 50 is covered by a diamond film 51.

Description

  The present invention relates to a pin for a scribing wheel that rotatably holds a scribing wheel for forming a scribe line on a brittle material substrate such as a glass substrate, a pin and a holder for the scribing wheel, and a holder unit including the scribing wheel. The present invention relates to a scribing device and a method for manufacturing a scribing wheel pin.

  For example, Patent Document 1 discloses that a surface of a pin for a scribing wheel that rotatably holds the scribing wheel is covered with a diamond-like carbon (hereinafter referred to as DLC) film. The support shaft (scribing wheel pin) for the cutting blade (scribing wheel) described in Patent Document 1 is coated with a DLC film on the surface, whereby friction of the contact surface between the cutting blade and the support shaft is achieved. The coefficient is decreased to extend the life of the cutting blade and the support shaft (for example, paragraph 0024).

Japanese Patent Laid-Open No. 10-72224

  However, the scribing of the brittle material substrate using the scribing wheel pin and the scribing wheel whose surface is coated with the DLC film is not very effective in extending the life of the scribing wheel and the pin. That is, since the inner surface of the pin hole of the scribing wheel is in contact with the surface of the pin, the DLC film is immediately worn and the inner surface of the pin hole and the surface of the pin are shaved.

  When this reason is examined, since the film thickness of the DLC film is generally about 1 to 2 μm, it is considered that the DLC film is immediately worn by contact with the inner surface of the pin hole at this film thickness. Moreover, since the pin is not normally fixed to the holder for the scribing wheel, the pin itself rotates or does not rotate during scribing. Therefore, when the pin is not rotating, the inner surface of the pin hole of the rotating scribing wheel is always in contact with the same position on the surface of the pin. In this position, wear of the DLC film further proceeds, and the DLC film may be peeled off from that point.

  The DLC film is suitable as a coating film for the pin surface in that it has a low friction coefficient and reduces the friction between the pin hole inner surface and the pin surface. In general, it is known that the coefficient of friction of the DLC film decreases as the hydrogen content increases. However, the hardness of the DLC film decreases conversely with an increase in the hydrogen content. For this reason, if the DLC film is coated only in consideration of the reduction of the friction coefficient, the wear of the DLC film further proceeds from the specific position as described above, or the DLC film is peeled off. .

  Accordingly, an object of the present invention is to further improve the wear resistance of the scribing wheel pin. In addition, the present invention improves the wear resistance of the pin for the scribing wheel and reduces the sliding resistance with the scribing wheel, thereby preventing the scribing wheel from being worn and the scribing wheel and the pin from being seized. The purpose is to provide a holder unit and a scribing device in which the number of exchanges of pins and pins is reduced. Furthermore, this invention aims at provision of the manufacturing method of the pin for scribing wheel which improves the abrasion resistance of the pin for scribing wheel.

  In order to achieve the above object, the scribing wheel pin of the present invention is a scribing wheel pin that is inserted into a pin hole formed in the scribing wheel and rotatably holds the scribing wheel, and has a diamond film on the surface. Is characterized by being coated.

  According to the present invention, since the diamond film is coated on the surface of the pin, the wear resistance of the pin can be improved. In particular, compared with the DLC film coated on the pin surface described in Patent Document 1, the diamond film is very hard and can be easily made thick. Therefore, the wear resistance of the scribing wheel pin can be further enhanced.

  The holder unit of the present invention includes a scribing wheel, a holder for holding the scribing wheel, and a pin for a scribing wheel that is inserted into a pin hole formed in the scribing wheel and rotatably holds the scribing wheel in the holder. And a scribing wheel pin having a surface coated with a diamond film.

  According to the present invention, the wear resistance of the pin for the scribing wheel can be improved, and the sliding resistance with the scribing wheel can be lowered, so that the holder can be reduced in the number of replacements of the scribing wheel and the pin.

  The scribing device according to the present invention includes a scribing wheel, a holder for holding the scribing wheel, and a pin for a scribing wheel that is inserted into a pin hole formed in the scribing wheel and rotatably holds the scribing wheel in the holder. And a scribing wheel pin whose surface is coated with a diamond film.

  According to the present invention, since the wear resistance of the pin for the scribing wheel can be improved and the sliding resistance with the scribing wheel can be lowered, the scribing device can reduce the number of times the scribing wheel and the pin are replaced.

  Further, the manufacturing method of a pin for a scribing wheel of the present invention is a pin for a scribing wheel that is inserted into a pin hole formed in the scribing wheel and rotatably holds the scribing wheel, and the surface is coated with a diamond film. A method for manufacturing a pin for a scribing wheel, wherein the surface of the base material is coated with a diamond film by a CVD method, and then the base material is cut into a plurality of parts.

  According to the present invention, a plurality of scribing wheel pins whose surfaces are coated with a diamond film can be efficiently manufactured.

  Further, the manufacturing method of a pin for a scribing wheel of the present invention is a pin for a scribing wheel that is inserted into a pin hole formed in the scribing wheel and rotatably holds the scribing wheel, and the surface is coated with a diamond film. A method for manufacturing a pin for a scribing wheel, wherein the substrate is cut into a plurality of cutting members, and then the surface of the cutting member is coated with a diamond film by a CVD method. To do.

  According to the present invention, since the base material is cut into a plurality of members before the diamond film is coated, a cutting method such as electric discharge machining can be easily employed when cutting the base material.

It is a schematic diagram of a scribing device in an embodiment. It is a front view of the holder joint which the scribe device in an embodiment has. It is a perspective view of the holder unit in an embodiment. It is a partially expanded view of the holder unit in the embodiment. It is a side view of the scribing wheel in an embodiment. It is a side view of the pin in an embodiment. It is a side view of the modification of the pin in an embodiment.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. However, the embodiment described below shows an example for embodying the technical idea of the present invention. It is not intended that the present invention be limited to this embodiment. The invention is also applicable to other embodiments within the scope of the claims.

  A schematic diagram of a scribing apparatus 10 according to the embodiment is shown in FIG. The scribing apparatus 10 includes a moving table 11. The moving table 11 is screwed with the ball screw 13 and can be moved in the y-axis direction along the pair of guide rails 12a and 12b by rotating the ball screw 13 by driving the motor 14. ing.

  A motor 15 is installed on the upper surface of the movable table 11. This motor 15 is for rotating the table 16 located in the upper part on an xy plane and positioning it at a predetermined angle. The brittle material substrate 17 is placed on the table 16 and held by a vacuum suction means (not shown). The brittle material substrate 17 to be scribed is a glass substrate, a ceramic substrate made of low-temperature fired ceramics or high-temperature fired ceramics, a silicon substrate, a compound semiconductor substrate, a sapphire substrate, a quartz substrate, or the like. Further, the brittle material substrate 17 may be a substrate in which a thin film or a semiconductor material is attached or included on the surface or inside of the substrate. Further, the brittle material substrate 17 may have a thin film or the like not corresponding to the brittle material attached to the surface thereof.

  The scribing apparatus 10 includes two CCD cameras 18 that image the alignment marks formed on the surface of the brittle material substrate 17 above the brittle material substrate 17. And in the scribe device 10, the bridge 19 is constructed by the support | pillars 20a and 20b along the x-axis direction so that the movable stand 11 and the table 16 of the upper part may be straddled.

  A guide 22 is attached to the bridge 19, and a scribe head 21 is movably installed along the guide 22 along the x-axis direction. A holder unit 60 is attached to the scribe head 21 via a holder joint 23.

  FIG. 2 shows a front view of the holder joint 23 to which the holder unit 60 is attached. 3 is a perspective view of the holder unit 60. FIG. 4 shows an enlarged view of a part of the side surface of the holder unit 60 observed from the direction A in FIG.

  The holder joint 23 has a substantially cylindrical shape, and includes a rotation shaft portion 23a and a joint portion 23b. In a state where the holder joint 23 is attached to the scribe head 21, two bearings 24a and 24b for rotatably holding the holder joint 23 are provided on the rotary shaft portion 23a via a cylindrical spacer 24c. It is attached. FIG. 2 shows a front view of the holder joint 23 and also shows a sectional view of the bearings 24a and 24b and the spacer 24c attached to the rotary shaft portion 23a.

  The cylindrical joint portion 23b is provided with an internal space 26 having a circular opening 25 on the lower end side. A magnet 27 is embedded in the upper portion of the internal space 26. A holder 30 detachable by a magnet 27 is inserted into the internal space 26 and attached.

  As shown in FIG. 3, the holder 30 has a substantially cylindrical shape and is made of a magnetic metal. A positioning attachment 31 is provided on the upper portion of the holder 30. The attachment portion 31 is formed by cutting out the upper portion of the holder 30 and includes an inclined portion 31a and a flat portion 31b.

  Then, the attachment portion 31 side of the holder 30 is inserted into the internal space 26 through the opening 25. At that time, the upper end side of the holder 30 is attracted by the magnet 27, and the inclined portion 31a of the mounting portion 31 comes into contact with the parallel pin 28 passing through the inner space 26, whereby the holder unit 60 is positioned and fixed with respect to the holder joint 23. . Further, when removing the holder unit 60 from the holder joint 23, it can be easily removed by pulling the holder 30 downward.

  A holding groove 32 formed by cutting out the holder 30 is provided in the lower portion of the holder 30. The support portions 33a and 33b are located below the holder 30 cut out to provide the holding groove 32 with the holding groove 31 interposed therebetween. A scribing wheel 40 is rotatably disposed in the holding groove 32. The support portions 33a and 33b are respectively formed with support holes 34a and 34b for supporting the pins 50 for holding the scribing wheel 40 freely during rotation.

  As shown in FIG. 4, the pin 50 is passed through the pin hole 42 of the scribing wheel 40 and both ends of the pin 50 are installed in the support holes 34 a and 34 b, so that the scribing wheel 40 rotates with respect to the holder 30. It can be attached freely. The support hole 34a has a stepped portion inside, and the hole diameter of the opening on the holding groove 32 side is larger than the hole diameter of the opening on the other side.

  In the present embodiment, after the scribing wheel 40 is attached to the holder 30, the holder 30, the scribing wheel 40 and the pin 50 are handled as a holder unit 60 integrated.

  Next, the details of the scribing wheel 40 will be described. FIG. 5 shows a side view of the scribing wheel 40 attached to the tip of the holder 24.

  The scribing wheel 40 mainly includes a disk-shaped base 41, pin holes 42 for penetrating pins 50 formed substantially at the center of the base 41, and both ends of the circumferential portion of the base 41. And a blade portion 43 formed by shaving.

  The base material 41 is a disk-shaped member made of a hard material such as cemented carbide, stainless steel, ceramics, sintered diamond, or the like. In particular, a cemented carbide or sintered diamond having conductivity and relatively high hardness is preferable. Also in this embodiment, a cemented carbide is used as the base material of the scribing wheel 40. In addition, the cemented carbide used what mixed and sintered tungsten carbide (tungsten carbide) and cobalt (Co) which is a binder (binder). In this case, titanium carbide (TiC), tantalum carbide (TaC), or the like is added depending on the application. The pin hole 42 is formed by cutting the substantial center of the base material 41 into a circle.

  The blade portion 43 includes a ridge line 44 formed by cutting both ends of the circumferential portion of the disk-shaped base material 41, and inclined surfaces 45 on both sides of the ridge line 44.

  Next, the dimension of the scribing wheel 40 will be described. The outer diameter of the scribing wheel 40 is 1.0 to 10.0 mm, preferably 1.0 to 5.0 mm. When the outer diameter of the scribing wheel 40 is smaller than 1.0 mm, the handleability of the scribing wheel 40 is lowered. On the other hand, when the outer diameter of the scribing wheel 40 is larger than 10.0 mm, the vertical crack at the time of scribing may not be formed deeply with respect to the brittle material substrate 17. And in this embodiment, the scribing wheel 40 whose outer diameter is 2.5 mm is used.

  The thickness of the scribing wheel 40 is 0.4 to 1.2 mm, preferably 0.4 to 1.1 mm. When the thickness of the scribing wheel 40 is smaller than 0.4 mm, workability and handleability may deteriorate. On the other hand, when the thickness of the scribing wheel 40 is greater than 1.2 mm, the material for the scribing wheel 40 and the cost for manufacturing increase. In this embodiment, a scribing wheel 40 having a thickness of 0.65 mm is used. The width of the holding groove 32 of the holder 30 (the distance between the support portion 33a and the support portion 33b) is slightly larger than the thickness of the scribing wheel 40. For example, the thickness of the scribing wheel 40 is 0. In the case of .65 mm, the width of the holding groove 32 is approximately 0.67 mm.

  Moreover, the hole diameter of the pin hole 42 of the scribing wheel 40 is 0.8 mm in this embodiment.

  Moreover, the edge angle of the blade part 43 is usually an obtuse angle, and is in the range of 90 to 160 °, preferably 90 to 140 °. Note that the specific angle of the blade edge angle is appropriately set based on the material, thickness, and the like of the brittle material substrate 17 to be cut.

  Next, the pin 50 will be described. The pin 50 is a cylindrical member, and one end has a pointed shape as shown in FIG. And the scribing wheel 40 is hold | maintained by inserting the pin 50 into the support hole 34b from the peak-shaped side, penetrating the pin hole 42, and a point-shaped part contacting the step part of the support part 34a.

  As the material of the pin 50, a hard material such as cemented carbide, stainless steel, ceramics, sintered diamond (hereinafter referred to as PCD) is used in the same manner as the base material 41 of the scribing hole 40. In the present embodiment, a cemented carbide is used as the material of the pin 50.

  When the brittle material substrate 17 is scribed with the scribing device 10 using the holder 30 that holds the scribing wheel 40 through the pin 50 as it is, the inner surface 42a of the pin hole 42 and the pin 50 surfaces come into contact and wear occurs. Therefore, the scribing wheel 40 and the pin 50 need to be replaced.

  Therefore, in this embodiment, the surface of the pin 50 is covered with the diamond film 51 instead of the DLC film as in the prior art, thereby improving the wear resistance of the pin 50 and at the same time the inner surface 42a of the pin hole 42. This reduces the sliding resistance and makes it difficult to cause wear. Further, the holder 30 including the scribing wheel 40 and the pin 50 covered with the diamond film 51 and the scribing device 10 including such a holder 30 can reduce the replacement work due to the life of the scribing wheel 40 and the pin 50. it can

  Specifically, as shown in FIG. 6, the diamond film 51 covered on the surface of the pin 50 is formed in a region other than the point-shaped region of the pin 50 (region indicated by oblique lines). A method for coating the diamond film 51 will be described.

  The coating of the diamond film 51 is performed by, for example, a chemical vapor deposition method (CVD method). Specifically, first, pretreatment is performed to facilitate the formation of diamond nuclei on the surface of an elongated columnar cemented carbide substrate that is the basis of the pin 50. As the pre-processing, there are a scratching process, a bias process, a seeding process, and the like.

  Next, the pretreated base material is placed in the chamber and the surface temperature of the base material is increased to 800 ° C. to 1000 ° C., and a mixed gas is sent into the chamber to cause a chemical reaction. On the other hand, the diamond film 51 is coated. At this time, as the mixed gas, a mixture of methane gas and hydrogen gas can be used. The chemical reaction is performed using heat, plasma, or the like. If the film thickness of the diamond film 51 is about 5 to 20 μm, it can be easily formed. In this embodiment, the diamond film 51 is 5 to 10 μm. Generally, as the film thickness increases, the surface roughness of the diamond film increases. Therefore, in order to reduce the sliding resistance by forming the diamond film, the film thickness is preferably 5 to 10 μm. Therefore, compared with the DLC film having a film thickness of about 1 μm as in the prior art, the diamond film 51 can be easily and thickly coated on the substrate by using the CVD method. Moreover, the diamond film 51 becomes very difficult to peel off by setting the film thickness to about 5 to 20 μm. In general, diamond is an insulator, but conductive diamond can also be formed by further mixing boron into a mixed gas used to form the diamond film.

  In addition, the pin 50 is not fixed to the holder 30 but is rotatable. Therefore, when scribing, the pin 50 itself rotates or does not rotate. When the pin 50 is not rotating, the inner surface 42a of the rotating scribing wheel 40 is always in contact with the same position on the surface of the pin 50. However, if the film thickness of the diamond film 51 is 5 μm or more, the diamond film 51 is hardly worn even in such a situation.

  In addition, since the DLC film is usually a laminated film and has a relatively flat surface, the friction coefficient is low. However, the entire layer is easily peeled off at a time, and the DLC film itself is easily peeled off. On the other hand, the diamond film 51 is formed by growing diamond nuclei and bonding each other's diamonds. Therefore, each diamond is only worn by friction, and the diamond film 51 itself is hardly peeled off.

  Next, the elongate columnar base material is cut into a predetermined length to form a plurality of columnar cutting members. And the pin 50 is completed by shaving one end side of each cylindrical cutting member into a pointed shape. Using the elongated cylindrical base material as described above, the base material is coated with the diamond film 51 by the CVD method, and then divided into a plurality of cutting members to complete the pin 50, thereby completing the plurality of pins. 50 can be manufactured efficiently. Moreover, it becomes easy to make the film thickness of the pin 50 uniform by covering the diamond film 51 in the state of the base material. Further, by covering the conductive diamond film doped with boron, the diamond film 51 can be easily cut by electric discharge machining.

  Alternatively, the pin 50 may be manufactured by covering the diamond film 51 after first cutting the elongated cylindrical base material into a plurality of cutting members. Since the surface becomes an insulating member by covering the diamond film 51 which is an insulator, it becomes difficult to cut the cylindrical substrate by electric discharge machining after the diamond film 51 is coated. However, such a problem does not occur if the elongated cylindrical base material is first cut by electric discharge machining, and then the diamond film 51 is coated on each of the cutting members.

  Further, in the present embodiment, when a cemented carbide or sintered diamond is used as the material of the scribing wheel 40, a cemented carbide is used as the material of the pin 50. In the case of such a combination of the material of the scribing wheel 40 and the material of the pin 50, the effect of covering the surface of the pin 50 with the diamond film 51 is further enhanced.

  This point will be described. Normally, it is known that cemented carbide is inferior in hardness because it is cheaper than PCD. Therefore, when the PCD pin 50 is inserted into the pin hole 42 of the cemented carbide scribing wheel 40 and scribing is performed, the pin 50 scrapes the inner surface 42a of the pin hole 42, and the pin hole 42 expands steadily. It will end up. However, by forming the diamond film 51 on the surface of the pin 50 made of cemented carbide, the friction coefficient of the surface of the pin 50 is lowered and the sliding resistance with the inner surface 42a is lowered. The inner surface 42a of the wheel 40 is difficult to be cut. Further, although a PCD pin is normally used for a PCD scribing wheel, the sliding resistance between the scribing wheel and the pin can be lowered by using the pin 50 coated with the diamond film 51. .

  In addition, the pin 50 coated with the diamond film 51 usually has a larger surface roughness than the pin coated with the DLC film as in the prior art. Therefore, after the pin 50 is coated with the diamond film 51, the surface of the diamond film 51 may be polished to reduce the roughness. In this way, by polishing the surface of the diamond film 51, the rotational resistance of the scribing wheel 40 can be further reduced, and the inner surface 42a of the scribing wheel 40 becomes difficult to be scraped. 50 replacement times can be reduced. In this case, the diamond film may be formed so that the thickness of the film after polishing is about 5 to 20 μm.

[Modification 1]
Next, a pin 50A, which is a modification of the pin 50 covered with the diamond film 51, will be described with reference to the drawings. As shown in FIG. 6, the pin 50 of the above-described embodiment was covered with the diamond film 51 over the entire cylindrical region (other than the pointed region) indicated by the oblique lines. On the other hand, as shown in FIG. 7, in the pin 50A, the diamond film 51 is coated on the contact area with the inner surface 42a of the pin hole 42, and the diamond film 51 is not coated outside the contact area with the inner surface 42a. A region is formed.

  Specifically, the pin 50 </ b> A includes regions 52 where the diamond film 51 is not covered at both ends installed in the support holes 34 a and 34 b of the holder 30. Thus, by not covering the both ends 52 of the pin 50A with the diamond film 51, the cemented carbide, which is the material of the pin 50A, is exposed at both ends 52. When the PCDs at both ends 52 of the pin 50A come into contact with the inner surfaces of the support holes 34a and 34b of the holder 30, the rotation of the pin 50A is regulated by friction.

  That is, the pin 50 </ b> A lowers the coefficient of friction with the inner surface 42 a of the scribing wheel 40 at the position where the diamond film 51 is coated, thereby facilitating the rotation of the scribing wheel 40. On the other hand, at a position where the diamond film 51 is not covered, the pin 50 </ b> A itself is difficult to rotate with respect to the support holes 34 a and 34 b of the holder 30. Therefore, when the scribing wheel 40 and the pin 50A rotate together, it is possible to reduce the state where the rotation of the scribing wheel 40 becomes unstable.

  As a method for coating the diamond film 51 such as the pin 50A, for example, a masking is performed on an uncovered region, and the diamond film 51 is coated by the CVD method in the same manner as the pin 50, and then the masking portion is removed. Etc.

  As described above, wear resistance as a pin for a scribing wheel can be improved by using the pin 50 or the pin 50 </ b> A whose surface is coated with the diamond film 51. Further, by using the pin 50 or the pin 50A, it is possible to provide a holder or a scribe device in which the sliding resistance with respect to the inner surface 42a of the pin hole 42 of the scribing wheel 40 is reduced and the number of times of exchanging the pin or scribing wheel is reduced.

  Note that the scribing wheel 40 and the pins 50 and 50A are consumables and therefore need to be replaced periodically. In the present embodiment, the holder unit 60 is mounted on the scribe head 21 via the holder joint 23. Therefore, since the holder unit 60 can be easily attached and detached, the scribing wheel 40 and the holder 30 are integrated into the holder unit 60 without removing the scribing wheel 40 from the holder 30 when exchanging consumables. It is possible to handle and replace the holder unit 60 itself. Therefore, the exchanging operation of the scribing wheel 40 can be performed very easily. The present invention is also applicable to a scribing device in which the holder 30 is directly fixed to the scribing head without using the holder joint 23 and the pin and the scribing wheel are exchanged for the holder. It is.

DESCRIPTION OF SYMBOLS 10 ... Scribing device 11 ... Moving stand 12a, 12b ... Guide rail 13 ... Hall screw 14, 15 ... Motor 16 ... Table 17 ... Brittle material substrate 18 ... CCD camera 19 ... Bridge 20a, 20b ... Post 21 ... Scribe head 22 ... Guide 23 ... Holder joint 23a ... Rotating shaft part 23b ... Joint parts 24a, 24b ... Bearing 24c ... Spacer 25 ... Opening 26 ... Internal space 27 ... Magnet 28 ... Parallel pin 30 ... Holder 31 ... Mounting part 31a ... Inclined part 31b ... Flat part 32 ... Holding groove 33a, 33b ... Support part 34a, 34b ... Support hole 40 ... Scribing wheel 41 ... Base material 42 ... Pin hole 42a ... Inner surface 43 ... Blade part 44 ... Ridge line 45 ... Inclined surface 50, 50A ... Pin 51 ... Diamond film 52 ... (Diamond film is formed No) Area 60 ... Holder unit

Claims (8)

A pin for a scribing wheel that is inserted into a pin hole formed in the scribing wheel and holds the scribing wheel rotatably,
Scribing wheel pin with diamond film coated on the surface.   The scribing wheel pin according to claim 1, wherein the diamond film has a thickness of 5 to 20 μm.   The pin for the scribing wheel according to claim 1 or 2, wherein a region not covered with the diamond film is formed outside a contact region with the inner surface of the pin hole. A scribing wheel pin according to any one of claims 1 to 3,
A scribing wheel,
A holder unit for holding the scribing wheel. The material of the scribing wheel pin is a cemented carbide,
The holder unit according to claim 4, wherein a material of the scribing wheel is cemented carbide or sintered diamond.   A scribing device comprising the holder unit according to claim 4.   The method for manufacturing a pin for a scribing wheel according to any one of claims 1 to 3, wherein the surface of the base material is manufactured by coating a diamond film by a CVD method and then cutting the base material into a plurality of parts. .   The pin for a scribing wheel according to any one of claims 1 to 3, wherein a plurality of cutting members are formed by cutting a base material, and then a surface of the cutting member is coated with a diamond film by a CVD method. Manufacturing method.

Images