[go: up one dir, main page]

TWI563270B - DETECTING DEVICE HAVING A XYθZ ALIGNMENT STAGE AND DETECTING DEVICE HAVING A MULTI-DIMENSION ALIGNMENT STAGE - Google Patents

DETECTING DEVICE HAVING A XYθZ ALIGNMENT STAGE AND DETECTING DEVICE HAVING A MULTI-DIMENSION ALIGNMENT STAGE

Info

Publication number
TWI563270B
TWI563270B TW104142416A TW104142416A TWI563270B TW I563270 B TWI563270 B TW I563270B TW 104142416 A TW104142416 A TW 104142416A TW 104142416 A TW104142416 A TW 104142416A TW I563270 B TWI563270 B TW I563270B
Authority
TW
Taiwan
Prior art keywords
detecting device
alignment stage
xyθz
dimension
stage
Prior art date
Application number
TW104142416A
Other languages
Chinese (zh)
Other versions
TW201723506A (en
Inventor
Mau Hsiang Wu
Original Assignee
Mau Hsiang Wu
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mau Hsiang Wu filed Critical Mau Hsiang Wu
Priority to TW104142416A priority Critical patent/TWI563270B/en
Application granted granted Critical
Publication of TWI563270B publication Critical patent/TWI563270B/en
Publication of TW201723506A publication Critical patent/TW201723506A/en

Links

TW104142416A 2015-12-16 2015-12-16 DETECTING DEVICE HAVING A XYθZ ALIGNMENT STAGE AND DETECTING DEVICE HAVING A MULTI-DIMENSION ALIGNMENT STAGE TWI563270B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW104142416A TWI563270B (en) 2015-12-16 2015-12-16 DETECTING DEVICE HAVING A XYθZ ALIGNMENT STAGE AND DETECTING DEVICE HAVING A MULTI-DIMENSION ALIGNMENT STAGE

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW104142416A TWI563270B (en) 2015-12-16 2015-12-16 DETECTING DEVICE HAVING A XYθZ ALIGNMENT STAGE AND DETECTING DEVICE HAVING A MULTI-DIMENSION ALIGNMENT STAGE

Publications (2)

Publication Number Publication Date
TWI563270B true TWI563270B (en) 2016-12-21
TW201723506A TW201723506A (en) 2017-07-01

Family

ID=58227446

Family Applications (1)

Application Number Title Priority Date Filing Date
TW104142416A TWI563270B (en) 2015-12-16 2015-12-16 DETECTING DEVICE HAVING A XYθZ ALIGNMENT STAGE AND DETECTING DEVICE HAVING A MULTI-DIMENSION ALIGNMENT STAGE

Country Status (1)

Country Link
TW (1) TWI563270B (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110763975A (en) * 2018-07-27 2020-02-07 吴茂祥 Detection device
US12138586B2 (en) 2012-08-30 2024-11-12 Element 1 Corp Hydrogen purification devices
US12187612B2 (en) 2021-06-15 2025-01-07 Element 1 Corp Hydrogen generation assemblies

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWM461282U (en) * 2013-02-27 2013-09-01 Tripod Technology Corp Printed circuit board shaping apparatus
TW201447325A (en) * 2013-04-23 2014-12-16 Seiko Epson Corp Processor and inspection device
TW201505120A (en) * 2013-07-23 2015-02-01 Seiko Epson Corp Electronic parts conveying apparatus, electronic parts inspection apparatus and cooling system
TWM512575U (en) * 2015-06-24 2015-11-21 Chip Right Corp Wafer testing machine

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWM461282U (en) * 2013-02-27 2013-09-01 Tripod Technology Corp Printed circuit board shaping apparatus
TW201447325A (en) * 2013-04-23 2014-12-16 Seiko Epson Corp Processor and inspection device
TW201505120A (en) * 2013-07-23 2015-02-01 Seiko Epson Corp Electronic parts conveying apparatus, electronic parts inspection apparatus and cooling system
TWM512575U (en) * 2015-06-24 2015-11-21 Chip Right Corp Wafer testing machine

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12138586B2 (en) 2012-08-30 2024-11-12 Element 1 Corp Hydrogen purification devices
CN110763975A (en) * 2018-07-27 2020-02-07 吴茂祥 Detection device
US12187612B2 (en) 2021-06-15 2025-01-07 Element 1 Corp Hydrogen generation assemblies

Also Published As

Publication number Publication date
TW201723506A (en) 2017-07-01

Similar Documents

Publication Publication Date Title
ZA201802754B (en) A connection device
GB201612742D0 (en) A goal and shelter device
GB2521854B (en) Aligning Device
GB201514579D0 (en) A device
TWI563270B (en) DETECTING DEVICE HAVING A XYθZ ALIGNMENT STAGE AND DETECTING DEVICE HAVING A MULTI-DIMENSION ALIGNMENT STAGE
EP3200011A4 (en) Alignment device and aligning method
GB201519364D0 (en) End-to-end loT device
GB201519733D0 (en) A device
GB201516985D0 (en) A device
GB2528311B (en) Frame clamp and apparatus having a frame clamp
GB201614886D0 (en) A device
GB2539872B (en) A fluid-metering device
GB2535974B (en) A fixing alignment device
GB201615587D0 (en) Alignment device
GB201512337D0 (en) A system and device
GB201514045D0 (en) A system and devices
GB201521761D0 (en) A device
GB201521743D0 (en) A device
GB201520147D0 (en) A device
GB201519601D0 (en) A device
GB201518618D0 (en) A device
GB201517645D0 (en) A device
GB201517154D0 (en) A device
GB201517077D0 (en) A device
GB201515681D0 (en) A device