TW201723506A - Detecting device having a xy[theta]z alignment stage and detecting device having a multi-dimension alignment stage - Google Patents
Detecting device having a xy[theta]z alignment stage and detecting device having a multi-dimension alignment stage Download PDFInfo
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Abstract
Description
本發明係與測試機有關,特別是有關於一種具xy θ z對位機構之檢測裝置及具多維對位機構之檢測裝置。 The invention relates to a testing machine, in particular to a detecting device with an xy θ z aligning mechanism and a detecting device with a multi-dimensional aligning mechanism.
按,現今電子產品基於小型化及容積空間之考量,皆朝向輕薄短小的趨勢發展,其中電路板可密集的配置電路結構,並亦可依照空間改變形狀做成立體配線減少電子產品體積,因此電路板為常被採用之方式之一。 According to the considerations of miniaturization and volume space, electronic products are moving toward a light and short trend. The circuit board can be densely arranged with a circuit structure, and the three-dimensional wiring can be made according to the shape of the space to reduce the volume of the electronic product. Boards are one of the ways that are often used.
通常,電路板在製造完成之後,例如在設置被動元件如電容、電感、電阻或晶片等電子元件之後,會進行電性檢測,以確認電路板是否能正常地運作,從而將檢測結果為正常的電路板篩選出來,並淘汰檢測結果為異常的電路板,藉此可以減少誤用不良電路板的機率,以確保產品的良率。 Usually, after the manufacturing of the circuit board, for example, after setting electronic components such as capacitors, inductors, resistors or chips, electrical detection is performed to confirm whether the circuit board can operate normally, so that the detection result is normal. The board is screened out and the board with abnormal detection results is eliminated, which can reduce the chance of misuse of the bad board to ensure the yield of the product.
一般習知測試機台,例如TWI343481所揭露者,其係透過將測試針板滑設於機台上的四支滑桿,藉以達到該測試針板可上下移動來進行電路板測試。此類習知測試針板之配置方式僅能進行Z軸方向之移動, 然而,一般電路板之電路結構眾多且日趨微小,且在製造過程中可能會產生一些位置偏差,因此只有Z軸方向移動能力之測試機台即無法精確對位及有效地進行檢測。 A conventional test machine, such as that disclosed in TWI 343 481, utilizes four slide bars that slide the test pin plate on the machine table to achieve that the test pin plate can be moved up and down for board testing. Such conventional test needle plates can only be configured to move in the Z-axis direction. However, the circuit structure of a general circuit board is numerous and increasingly small, and some positional deviation may occur during the manufacturing process. Therefore, the test machine having only the Z-axis direction moving capability cannot accurately detect and effectively detect.
因此,有必要提供一種新穎且具有進步性之具xy θ z對位機構之檢測裝置及具多維對位機構之檢測裝置,以解決上述之問題。 Therefore, it is necessary to provide a novel and progressive detection device having an xy θ z alignment mechanism and a detection device having a multi-dimensional alignment mechanism to solve the above problems.
本發明之主要目的在於提供一種具xy θ z對位機構之檢測裝置及具多維對位機構之檢測裝置,其可實現xy θ z、高自由度、高精度、快速之檢測作業。 The main object of the present invention is to provide a detecting device with a xy θ z aligning mechanism and a detecting device with a multi-dimensional aligning mechanism, which can realize xy θ z, high degree of freedom, high precision, and fast detection operation.
為達成上述目的,本發明提供一種具xy θ z對位機構之檢測裝置,包括:一機台,包括一第一基座,該第一基座設有一供置放一電路板之承載部,該承載部所在平面定義一XY平面,且定義一垂直於該XY平面之Z軸方向;一第一xy θ z對位機構,設於該機台且位於該第一基座相對上方,可沿該Z軸方向移動及可平行於該XY平面而移動;一第一檢測模組,設於該第一xy θ z對位機構,供檢測置放於該承載部上之電路板。 In order to achieve the above object, the present invention provides a detecting device with an xy θ z aligning mechanism, comprising: a machine base comprising a first pedestal, wherein the first pedestal is provided with a carrying portion for placing a circuit board, The plane of the carrying portion defines an XY plane, and defines a Z-axis direction perpendicular to the XY plane; a first xy θ z aligning mechanism is disposed on the machine and located opposite the first pedestal, along the The Z-axis direction moves and can move parallel to the XY plane; a first detecting module is disposed on the first xy θ z aligning mechanism for detecting a circuit board placed on the carrying portion.
為達成上述目的,本發明另提供一種具多維對位機構之檢測裝置,包括:一機台,包括一第一基座,該第一基座設有一供置放一電路板之承載部,該承載部所在平面定義一XY平面,且定義一垂直於該XY平面之Z軸方向;一第一多維對位機構,設於該機台且位於該第一基座相對上方,可沿該Z軸方向移動及可平行於該XY平面而移動;一第一檢測模組,設於該第一多維對位機構,供檢測置放於該承載部上之電路板。 In order to achieve the above object, the present invention further provides a detecting device with a multi-dimensional alignment mechanism, comprising: a machine base comprising a first base, the first base being provided with a carrying portion for placing a circuit board, The plane of the carrying portion defines an XY plane, and defines a Z-axis direction perpendicular to the XY plane; a first multi-dimensional alignment mechanism is disposed on the machine and located opposite the first base, along the Z The axis direction moves and can move parallel to the XY plane; a first detecting module is disposed in the first multi-dimensional alignment mechanism for detecting a circuit board placed on the carrying portion.
1‧‧‧具多維對位機構之檢測裝置 1‧‧‧Detecting device with multi-dimensional registration mechanism
10‧‧‧機台 10‧‧‧ machine
11‧‧‧第一基座 11‧‧‧First base
12‧‧‧承載部 12‧‧‧Loading Department
13‧‧‧第二基座 13‧‧‧Second base
20‧‧‧第一多維對位機構 20‧‧‧First multidimensional registration agency
21‧‧‧第一移動平台 21‧‧‧First mobile platform
22‧‧‧第一多維對位平台 22‧‧‧The first multidimensional mapping platform
51‧‧‧第二移動平台 51‧‧‧Second mobile platform
52‧‧‧第二多維對位平台 52‧‧‧Second multidimensional registration platform
53‧‧‧第二換模機構 53‧‧‧Second changing mechanism
60‧‧‧取送機構 60‧‧‧Sending agency
61‧‧‧供料裝置 61‧‧‧Feeding device
62‧‧‧輸送裝置 62‧‧‧Conveyor
621‧‧‧第一載料平台 621‧‧‧First loading platform
622‧‧‧第二載料平台 622‧‧‧Second loading platform
221‧‧‧第一平台 221‧‧‧ first platform
222‧‧‧第二平台 222‧‧‧ Second platform
223‧‧‧第三平台 223‧‧‧ Third platform
224‧‧‧第四平台 224‧‧‧fourth platform
23‧‧‧第一換模機構 23‧‧‧First die change mechanism
231‧‧‧架體 231‧‧‧ ‧ frame
232‧‧‧固定件 232‧‧‧Fixed parts
30‧‧‧第一檢測模組 30‧‧‧First detection module
40‧‧‧第二多維對位機構 40‧‧‧Second multidimensional counter mechanism
50‧‧‧第二檢測模組 50‧‧‧Second test module
63‧‧‧第一取料手臂 63‧‧‧First take-up arm
64‧‧‧第三取料手臂 64‧‧‧ Third take-up arm
70‧‧‧取像機構 70‧‧‧Image agency
80‧‧‧軌道 80‧‧‧ Track
90‧‧‧第二取料手臂 90‧‧‧Second reclaim arm
100‧‧‧清潔裝置 100‧‧‧ cleaning device
110‧‧‧收料機構 110‧‧‧Receiving agency
111‧‧‧第三取料手臂 111‧‧‧ Third take-up arm
112‧‧‧置放架 112‧‧‧Place rack
200‧‧‧電路板 200‧‧‧ boards
圖1為本發明一較佳實施例之立體圖。 1 is a perspective view of a preferred embodiment of the present invention.
圖2為本發明一較佳實施之側視圖。 Figure 2 is a side elevational view of a preferred embodiment of the present invention.
圖3為本發明一較佳實施例之多維對位機構示意圖。 3 is a schematic diagram of a multi-dimensional alignment mechanism according to a preferred embodiment of the present invention.
以下僅以實施例說明本發明可能之實施態樣,然並非用以限制本發明所欲保護之範疇,合先敘明。 The following is a description of the possible embodiments of the present invention, and is not intended to limit the scope of the invention as claimed.
請參考圖1至3,其顯示本發明之一較佳實施例,本發明之具多維對位機構之檢測裝置1包括一機台10、一第一多維對位機構20及一第一檢測模組30。在本實施例中,該具多維對位機構之檢測裝置1為具xy θ z對位機構之檢測裝置。 Referring to FIGS. 1 to 3, there is shown a preferred embodiment of the present invention. The detecting device 1 of the multi-dimensional alignment mechanism of the present invention comprises a machine table 10, a first multi-dimensional alignment mechanism 20 and a first detection. Module 30. In the present embodiment, the detecting device 1 having the multi-dimensional alignment mechanism is a detecting device having an xy θ z registration mechanism.
該機台10包括一第一基座11,該第一基座11設有一供置放一電路板200之承載部12,該承載部12所在平面定義一XY平面,且定義一垂直於該XY平面之Z軸方向。該第一多維對位機構20設於該機台10且位於該第一基座11相對上方,該第一多維對位機構20可沿該Z軸方向移動及可平行於該XY平面而移動(例如繞該Z軸方向沿一θ方向移動、沿X或/及Y軸方向移動)。該第一檢測模組30設於該第一多維對位機構20,供檢測置放於該承載部12上之電路板200。藉此,該第一多維對位機構20即可進行XY θ Z四軸精確對位,無需調整該承載部12、該第一檢測模組30、待測電路板200或其等之相對位置,檢測方便、快速。 The machine base 10 includes a first base 11 , and the first base 11 is provided with a carrying portion 12 for placing a circuit board 200 . The plane of the carrying portion 12 defines an XY plane and defines a perpendicular to the XY. The Z-axis direction of the plane. The first multi-dimensional alignment mechanism 20 is disposed on the machine table 10 and located above the first base 11 . The first multi-dimensional alignment mechanism 20 is movable along the Z-axis direction and can be parallel to the XY plane. Movement (for example, moving in the direction of θ around the Z-axis direction, moving in the X or / and Y-axis directions). The first detecting module 30 is disposed on the first multi-dimensional alignment mechanism 20 for detecting the circuit board 200 placed on the carrying portion 12. Thereby, the first multi-dimensional alignment mechanism 20 can perform XY θ Z four-axis precise alignment without adjusting the relative positions of the carrying portion 12, the first detecting module 30, the circuit board 200 to be tested, or the like. The detection is convenient and fast.
詳細地說,該機台10另包括一與該第一基座11間隔設置之第二基座13,該第一多維對位機構20包括一設於該第一與第二基座11,13 之間且可沿該Z軸方向移動的第一移動平台21、一設於該第一移動平台21且可平行於該XY平面而移動之第一多維對位平台22、以及一設於該第一多維對位平台22之第一換模機構23,該第一檢測模組30被固定於該第一換模機構23上。該第一多維對位平台22包括一設於該第一移動平台21之第一平台221、一可沿一X軸方向移動地設於該第一平台221上之第二平台222、一可沿一Y軸方向移動地設於該第二平台222上之第三平台223、以及一可平行於該XY平面轉動地設於該第三平台223上之第四平台224,該第一換模機構設於該第四平台224。在本實施例中,該第一多維對位機構20為第一xy θ z對位機構,該第一多維對位平台22為第一xy θ z對位平台。當然,該第一多維對位機構亦可為由多數平台、多數驅動裝置(如伺服馬達)及多數滑軌所組成。 In detail, the machine 10 further includes a second base 13 spaced apart from the first base 11 . The first multi-dimensional alignment mechanism 20 includes a first base and a second base 11 . a first moving platform 21 between 13 and movable in the Z-axis direction, a first multi-dimensional alignment platform 22 disposed on the first moving platform 21 and movable parallel to the XY plane, and a first The first mold changing mechanism 23 of the first multi-dimensional alignment platform 22 is fixed to the first mold changing mechanism 23. The first multi-dimensional alignment platform 22 includes a first platform 221 disposed on the first mobile platform 21, and a second platform 222 disposed on the first platform 221 so as to be movable along an X-axis direction. a third platform 223 disposed on the second platform 222 along a Y-axis direction, and a fourth platform 224 rotatably disposed on the third platform 223 parallel to the XY plane, the first die-changing The institution is located on the fourth platform 224. In this embodiment, the first multi-dimensional alignment mechanism 20 is a first xy θ z alignment mechanism, and the first multi-dimensional alignment platform 22 is a first xy θ z alignment platform. Of course, the first multi-dimensional alignment mechanism may also be composed of a majority of platforms, a plurality of driving devices (such as servo motors), and most of the sliding rails.
該第一換模機構23包括至少一承接該第一檢測模組30之架體231及至少一可調整地設於該至少一架體231之固定件232,該至少一固定件232固定該第一檢測模組30。該至少一架體231例如為一供承接該第一檢測模組30之框件,該至少一固定件232例如包括複數螺設於該框件而可螺動抵固於該第一檢測模組30,藉此可快速拆組、或依據不同檢測物件或程序拆換該第一檢測模組30。 The first die changing mechanism 23 includes at least one frame 231 that receives the first detecting module 30 and at least one fixing member 232 that is adjustably disposed on the at least one frame 231. The at least one fixing member 232 fixes the first portion. A detection module 30. The at least one frame 231 is, for example, a frame member for receiving the first detecting module 30. The at least one fixing member 232 includes, for example, a plurality of screws spliced to the frame member to be screwed to the first detecting module. 30, whereby the first detecting module 30 can be quickly disassembled or replaced according to different detecting objects or programs.
較佳地,於該第一基座11另設有一第二多維對位機構40,該第二多維對位機構40為第二xy θ z對位機構,可沿該Z軸方向移動及可平行於該XY平面而移動。於該第二多維對位機構40上另設有一第二檢測模組50,該第一及第二檢測模組30,50供相互配合地檢測該電路板200。該第二多維對位機構40包括一設於該第一多維對位機構20與該第一基座11 之間且可沿該Z軸方向移動的第二移動平台51、一設於該第二移動平台51且可平行於該XY平面而移動之第二多維對位平台52、以及一設於該第二多維對位平台52之第二換模機構53,該第二檢測模組50被固定於該第二換模機構53上。該第二多維對位平台52可為與該第一多維對位平台22相同結構(如圖3)或不同結構。 Preferably, the first pedestal 11 is further provided with a second multi-dimensional aligning mechanism 40, and the second multi-dimensional aligning mechanism 40 is a second xy θ z aligning mechanism movable along the Z-axis direction. It can move parallel to the XY plane. A second detecting module 50 is further disposed on the second multi-dimensional alignment mechanism 40, and the first and second detecting modules 30, 50 are configured to detect the circuit board 200 in cooperation with each other. The second multi-dimensional aligning mechanism 40 includes a second moving platform 51 disposed between the first multi-dimensional aligning mechanism 20 and the first pedestal 11 and movable along the Z-axis direction. a second moving platform 51 and a second multi-dimensional alignment platform 52 movable parallel to the XY plane, and a second mold changing mechanism 53 disposed on the second multi-dimensional alignment platform 52, the second detecting mode The set 50 is fixed to the second die change mechanism 53. The second multi-dimensional alignment platform 52 can be the same structure (as in FIG. 3) or a different structure as the first multi-dimensional alignment platform 22.
在本實施例中,該具多維對位機構之檢測裝置1另包括一取送機構60及一取像機構70,該取送機構60設於該機台10且供取送該電路板200朝該第一基座11移動,該取像機構70(如CCD取像裝置)可移動地設於該機台10,其中該取送機構60供取一該電路板200並移動該電路板200至相對於該取像機構70位置而由該取像機構70擷取一影像,以供後續檢測作業之進行。該取送機構60並供將經取像後之該電路板200移至該承載部12而供該第一檢測模組30或/及該第二檢測模組50進行檢測,該第一檢測模組30或/及該第二檢測模組50例如為測試針板。明確地說,該取送機構60包括一供置放該至少一電路板200之供料裝置61、一可移動地設於該機台10之輸送裝置62、及一設於該機台10且可移動於該供料裝置61與該輸送裝置62之間的第一取料手臂63,該第一取料手臂63供自該供料裝置61取一該電路板200並移至該輸送裝置62,該輸送裝置62供將該電路板200移至相對於該取像機構70位置、而後將經取像後之該電路板200朝該第一基座11移動。 In this embodiment, the detecting device 1 with a multi-dimensional alignment mechanism further includes a pick-up mechanism 60 and an image capturing mechanism 70. The pick-up mechanism 60 is disposed on the machine table 10 and is configured to feed the circuit board 200 toward The first pedestal 11 is moved, and the image capturing mechanism 70 (such as a CCD image capturing device) is movably disposed on the machine table 10. The picking mechanism 60 feeds the circuit board 200 and moves the circuit board 200 to An image is captured by the image capturing mechanism 70 relative to the position of the image capturing mechanism 70 for subsequent detection operations. The picking mechanism 60 is configured to move the imaged board 200 to the carrying portion 12 for detection by the first detecting module 30 or/and the second detecting module 50. The first detecting module The group 30 or/and the second detection module 50 is, for example, a test needle plate. Specifically, the feeding mechanism 60 includes a feeding device 61 for arranging the at least one circuit board 200, a conveying device 62 movably disposed on the machine table 10, and a device 10 disposed on the machine table 10. The first retracting arm 63 is movable between the feeding device 61 and the conveying device 62. The first retracting arm 63 is supplied from the feeding device 61 to the circuit board 200 and moved to the conveying device 62. The conveying device 62 is configured to move the circuit board 200 to a position relative to the image capturing mechanism 70, and then move the imaged board 200 to the first base 11 after being imaged.
較佳地,該輸送裝置62包括一第一載料平台621及二位於該取像機構70與該第一載料平台621之間的第二載料平台622,於該機台10另橫設有一軌道80,該軌道80一端鄰近於該第一載料平台621,該軌道 80之延伸範圍大於並超出該承載部12,該二第二載料平台622可沿該軌道80移動,該二第二載料平台622概平行設置且可輪流載送該電路板200至相對於該取像機構70位置、及相對於該承載部12位置。 Preferably, the conveying device 62 includes a first loading platform 621 and a second loading platform 622 between the image capturing mechanism 70 and the first loading platform 621. There is a track 80, one end of the track 80 is adjacent to the first loading platform 621, the track The extending range of 80 is greater than and beyond the carrying portion 12, and the two second loading platforms 622 are movable along the rail 80. The two second loading platforms 622 are disposed in parallel and can carry the circuit board 200 in turn to The image capturing mechanism 70 is positioned and positioned relative to the carrier portion 12.
其中,一該電路板200由一第二取料手臂90例如吸取至該第一載料平台621後,由該第一載料平台621運送朝該第二載料平台622接近,而後該第一取料手臂63自該第一載料平台621例如吸取該電路板200至該第二載料平台622,該第二載料平台622沿該軌道80依序移動至相對於該取像機構70相對位置並由該取像裝置70擷取該電路板200之影像、移動至相對於該承載部12而由該第一檢測模組30或/及第二檢測模組50進行電性檢測、再由該第一基座11位置移出。 After the second loading arm 90 is sucked to the first loading platform 621, for example, the circuit board 200 is transported by the first loading platform 621 toward the second loading platform 622, and then the first The retracting arm 63 moves from the first loading platform 621, for example, the circuit board 200 to the second loading platform 622. The second loading platform 622 is sequentially moved along the rail 80 to be opposite to the image taking mechanism 70. The image capturing device 70 captures the image of the circuit board 200 and moves to the carrier unit 12 for electrical detection by the first detecting module 30 or/and the second detecting module 50. The first pedestal 11 is moved out of position.
較佳地,於該輸送裝置62之移動路徑上另設有一結合於該機台10且供清潔該電路板200之清潔裝置100。該清潔裝置100例如包括至少一對輥桿,該至少一對輥桿之輥面較佳係設有例如具黏著能力之材質層、或具氣吹功能,如此可於檢測之前先將該電路板200之表面可能殘存之異物例如灰塵、加工碎屑、其他顆粒或其他可能影響檢測結果之物質移除,以提昇例如影像檢測等測試作業之效率、精準度及正確度。 Preferably, a cleaning device 100 coupled to the machine table 10 and for cleaning the circuit board 200 is further disposed on the moving path of the conveying device 62. The cleaning device 100 includes, for example, at least one pair of roller bars, and the roller surface of the at least one pair of roller bars is preferably provided with a layer of adhesive material, for example, or has an air blowing function, so that the circuit board can be used before detection. Foreign matter such as dust, processing debris, other particles, or other substances that may affect the test results may be removed from the surface of the 200 to improve the efficiency, accuracy, and accuracy of test operations such as image inspection.
此外,於該機台10之一側另設有至少一收料機構110,該至少一收料機構110供置放經檢測後之該電路板200。該收料機構110包括一設於該機台10之軌道80、一可移動地設於該軌道80之第三取料手臂111、及至少一設於該機台10之置放架112,該第三取料手臂111可移動於該第一基座11與該至少一置放架112之間,該第三取料手臂111供自該第一基座11取經檢測後之該電路板200並移至一該置放架112。進一步言, 該收料機構110包括多個並排設置的置放架112,可收納較多之電路板200、或可分置不同類型、或可分置良品或不良品,然該收料機構110亦可僅包括一置放架。 In addition, at least one receiving mechanism 110 is disposed on one side of the machine table 10, and the at least one receiving mechanism 110 is provided for the printed circuit board 200 after being tested. The receiving mechanism 110 includes a track 80 disposed on the machine table 10, a third retracting arm 111 movably disposed on the track 80, and at least one placement frame 112 disposed on the machine table 10. The third retracting arm 111 is movable between the first pedestal 11 and the at least one placement frame 112. The third retracting arm 111 is supplied from the first pedestal 11 to the detected circuit board 200. Move to one of the shelves 112. Further, The receiving mechanism 110 includes a plurality of placement racks 112 arranged side by side, which can accommodate a plurality of circuit boards 200, or can be divided into different types, or can be separated into good products or defective products, but the receiving mechanism 110 can also only Includes a shelf.
綜上,本發明之該第一多維對位機構即可進行XY θ Z四軸精確對位,無需調整該承載部、該第一檢測模組、待測電路板或其等之相對位置,即可實現多維、高自由度、高精度、快速之檢測作業。 In summary, the first multi-dimensional alignment mechanism of the present invention can perform XY θ Z four-axis precise alignment without adjusting the relative positions of the carrying portion, the first detecting module, the circuit board to be tested, or the like. Multi-dimensional, high-degree-of-freedom, high-precision, and fast inspections are possible.
綜上所述,本發明之整體結構設計、實用性及效益上,確實是完全符合產業上發展所需,且所揭露之結構發明亦是具有前所未有的創新構造,所以其具有「新穎性」應無疑慮,又本發明可較之習知結構更具功效之增進,因此亦具有「進步性」,其完全符合我國專利法有關發明專利之申請要件的規定,乃依法提起專利申請,並敬請 鈞局早日審查,並給予肯定。 In summary, the overall structural design, practicability and efficiency of the present invention are indeed fully in line with the needs of industrial development, and the disclosed structural invention is also an unprecedented innovative structure, so it has "novelty" should Undoubtedly, the invention can be more effective than the conventional structure, and therefore has "progressiveness", which fully complies with the requirements of the application requirements of the invention patents of the Chinese Patent Law, and is filed according to law, and please The bureau will review it early and give it affirmation.
1‧‧‧具多維對位機構之檢測裝置 1‧‧‧Detecting device with multi-dimensional registration mechanism
10‧‧‧機台 10‧‧‧ machine
12‧‧‧承載部 12‧‧‧Loading Department
60‧‧‧取送機構 60‧‧‧Sending agency
621‧‧‧第一載料平台 621‧‧‧First loading platform
63‧‧‧第一取料手臂 63‧‧‧First take-up arm
80‧‧‧軌道 80‧‧‧ Track
90‧‧‧第二取料手臂 90‧‧‧Second reclaim arm
100‧‧‧清潔裝置 100‧‧‧ cleaning device
110‧‧‧收料機構 110‧‧‧Receiving agency
112‧‧‧置放架 112‧‧‧Place rack
200‧‧‧電路板 200‧‧‧ boards
Claims (10)
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| TW104142416A TWI563270B (en) | 2015-12-16 | 2015-12-16 | DETECTING DEVICE HAVING A XYθZ ALIGNMENT STAGE AND DETECTING DEVICE HAVING A MULTI-DIMENSION ALIGNMENT STAGE |
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| TW104142416A TWI563270B (en) | 2015-12-16 | 2015-12-16 | DETECTING DEVICE HAVING A XYθZ ALIGNMENT STAGE AND DETECTING DEVICE HAVING A MULTI-DIMENSION ALIGNMENT STAGE |
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