TWI563240B - Optical inspection apparatus - Google Patents

Optical inspection apparatus

Info

Publication number: TWI563240B
Authority: TW; Taiwan
Prior art keywords: inspection apparatus; optical inspection; optical; inspection
Prior art date: 2015-08-06

Application number

TW104125636A

Other languages

Chinese (zh)

Other versions

TW201706558A (en

Inventor

Shu Hao Lioa

Yasunori Koyama

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2015-08-06

Filing date

2015-08-06

Publication date

2016-12-21

2015-08-06 Application filed filed Critical

2015-08-06 Priority to TW104125636A priority Critical patent/TWI563240B/en

2016-12-21 Application granted granted Critical

2016-12-21 Publication of TWI563240B publication Critical patent/TWI563240B/en

2017-02-16 Publication of TW201706558A publication Critical patent/TW201706558A/en

Links

TW104125636A 2015-08-06 2015-08-06 Optical inspection apparatus TWI563240B (en)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
TW104125636A TWI563240B (en)	2015-08-06	2015-08-06	Optical inspection apparatus

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
TW104125636A TWI563240B (en)	2015-08-06	2015-08-06	Optical inspection apparatus

Publications (2)

Publication Number	Publication Date
TWI563240B true TWI563240B (en)	2016-12-21
TW201706558A TW201706558A (en)	2017-02-16

Family

ID=58227440

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
TW104125636A TWI563240B (en)	2015-08-06	2015-08-06	Optical inspection apparatus

Country Status (1)

Country	Link
TW (1)	TWI563240B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
TWI634309B (en) *	2017-05-12	2018-09-01	翊鼎光電股份有限公司	Optical inspection apparatus

Citations (8)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US20010006419A1 (en) *	1999-12-27	2001-07-05	Klaus Hallmeyer	Optical measurement arrangement and method for inclination measurement
CN1550754A (en) *	2003-03-20	2004-12-01	株式会社其恩斯	Displacement meter and displacement measuring method
TWI274139B (en) *	2006-03-14	2007-02-21	Univ Nat Formosa	Optical measurement unit for real-time measuring angular error of platform and the method thereof
TWM387986U (en) *	2010-04-30	2010-09-01	Univ Nat Taiwan	Optical angular measuring apparatus
CN102575926A (en) *	2009-09-10	2012-07-11	卡尔蔡司股份公司	Devices and methods for determining positions and measuring surfaces
TWI438393B (en) *	2011-12-14	2014-05-21	Zygo Corp	Non-contact surface characterization using modulated illumination
TWM490574U (en) *	2012-06-19	2014-11-21	Ardic Instr Co	Vibrometer
WO2015087575A1 (en) *	2013-12-09	2015-06-18	パナソニックデバイスＳｕｎｘ株式会社	Displacement sensor

2015
- 2015-08-06 TW TW104125636A patent/TWI563240B/en not_active IP Right Cessation

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US20010006419A1 (en) *	1999-12-27	2001-07-05	Klaus Hallmeyer	Optical measurement arrangement and method for inclination measurement
CN1550754A (en) *	2003-03-20	2004-12-01	株式会社其恩斯	Displacement meter and displacement measuring method
TWI274139B (en) *	2006-03-14	2007-02-21	Univ Nat Formosa	Optical measurement unit for real-time measuring angular error of platform and the method thereof
CN102575926A (en) *	2009-09-10	2012-07-11	卡尔蔡司股份公司	Devices and methods for determining positions and measuring surfaces
TWM387986U (en) *	2010-04-30	2010-09-01	Univ Nat Taiwan	Optical angular measuring apparatus
TWI438393B (en) *	2011-12-14	2014-05-21	Zygo Corp	Non-contact surface characterization using modulated illumination
TWM490574U (en) *	2012-06-19	2014-11-21	Ardic Instr Co	Vibrometer
WO2015087575A1 (en) *	2013-12-09	2015-06-18	パナソニックデバイスＳｕｎｘ株式会社	Displacement sensor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
TWI634309B (en) *	2017-05-12	2018-09-01	翊鼎光電股份有限公司	Optical inspection apparatus

Also Published As

Publication number	Publication date
TW201706558A (en)	2017-02-16

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Legal Events

Date	Code	Title	Description
2025-09-21	MM4A	Annulment or lapse of patent due to non-payment of fees