TW201706558A - Optical inspection equipment - Google Patents
Optical inspection equipment Download PDFInfo
- Publication number
- TW201706558A TW201706558A TW104125636A TW104125636A TW201706558A TW 201706558 A TW201706558 A TW 201706558A TW 104125636 A TW104125636 A TW 104125636A TW 104125636 A TW104125636 A TW 104125636A TW 201706558 A TW201706558 A TW 201706558A
- Authority
- TW
- Taiwan
- Prior art keywords
- beam splitter
- filter
- color light
- measured
- detecting device
- Prior art date
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Measurement Of Optical Distance (AREA)
Abstract
一種光學檢測設備，其應用於檢測一被測定物的傾斜角度及位移偏差，包括一第一發光部、一第一準直鏡、一第一分光鏡、一第二分光鏡、一第一聚焦透鏡、一第一感光部、一第一濾光片、一第二準直鏡、一第二發光部、一第二濾光片、一第二聚焦透鏡以及一第二感光部。本發明提供的光學檢測設備具有較高的穩定度及容易校正的優勢。An optical detecting device for detecting an inclination angle and a displacement deviation of an object to be measured, comprising a first light emitting portion, a first collimating mirror, a first beam splitter, a second beam splitter, and a first focus a lens, a first photosensitive portion, a first filter, a second collimating mirror, a second emitting portion, a second filter, a second focusing lens, and a second photosensitive portion. The optical detecting device provided by the invention has the advantages of high stability and easy correction.
Description
本發明是關於一種光學檢測設備，且特別是一種具有兩個不同波長光源的光學檢測設備。The present invention relates to an optical detecting device, and more particularly to an optical detecting device having two different wavelength light sources.
全球智慧型手機(Smartphone)市場快速成長，除了蘋果、宏達電、三星電子出貨主流進到800~1200萬畫素鏡頭時代。並且，華為等大陸品牌業者也積極在低價智慧型手機上採用500萬畫素的相機模組。如此一來，該相機模組內用以自動對焦(AF)的音圈馬達(VCM)零組件便需求大增。然而，音圈馬達在移動時所產生的傾斜角度及位移偏差會直接間接影響到該相機模組的成像品質。因此，在組裝相機模組之前，有必要對音圈馬達的傾斜角度及位移偏差進行測量，以判斷該音圈馬達是否符合要求。現今台灣對於音圈馬達的傾斜角度及位移偏差的測量大多使用一位移傾角二合一檢測設備10(請參閱圖1)進行量測。The global smart phone market is growing rapidly, with the exception of Apple, HTC and Samsung Electronics, which are shipping into the mainstream of 800 to 12 million pixels. Moreover, mainland brands such as Huawei are also actively adopting 5 million pixel camera modules on low-cost smart phones. As a result, the demand for voice coil motor (VCM) components for autofocus (AF) in the camera module is increasing. However, the tilt angle and displacement deviation generated by the voice coil motor directly affect the imaging quality of the camera module directly and indirectly. Therefore, before assembling the camera module, it is necessary to measure the tilt angle and displacement deviation of the voice coil motor to determine whether the voice coil motor meets the requirements. Today, Taiwan's measurement of the tilt angle and displacement deviation of the voice coil motor is mostly measured using a displacement tilt two-in-one detecting device 10 (see Fig. 1).
請再參閱圖1，圖1所繪示為日本特許第5330114號的位移傾角二合一檢測設備1。由於的二合一檢測設備1是只使用一個雷射光源11去測量音圈馬達的傾斜角度及位移偏差。因此，該傾斜角度及該位移偏差變成相互依賴的變數，所以二合一檢測設備1的校正變得較為複雜，其需要做到三維校正。這樣一來，二合一檢測設備1的校正時間通常長達7~8小時，且校正後的穩定度並不高。Referring to FIG. 1 again, FIG. 1 shows a displacement tilt two-in-one detecting device 1 of Japanese Patent No. 5330114. Since the 2-in-1 detecting device 1 uses only one laser light source 11 to measure the tilt angle and displacement deviation of the voice coil motor. Therefore, the inclination angle and the displacement deviation become interdependent variables, so the correction of the 2-in-1 detecting device 1 becomes complicated, and it is necessary to perform three-dimensional correction. In this way, the calibration time of the 2-in-1 detection device 1 is usually as long as 7 to 8 hours, and the stability after correction is not high.
因此，如何設計一個穩定度高及容易校正的位移及傾角的光學檢測設備，便是本領域具有通常知識者值得去思量地。Therefore, how to design an optical detection device with high stability and easy to correct displacement and tilt angle is worthy of consideration in the field.
本發明之目的在於提供一光學檢測設備，該光學檢測設備主要檢測智慧型手機內的音圈馬達在移動時產生的傾斜角度及位移偏差。並且，光學檢測設備具有較高的穩定度及容易校正的優勢。It is an object of the present invention to provide an optical detecting apparatus that mainly detects tilt angles and displacement deviations generated by a voice coil motor in a smart phone when moving. Moreover, the optical detecting device has the advantages of high stability and easy correction.
本發明之目的在於提供一種光學檢測設備，其應用於檢測一被測定物的傾斜角度及位移偏差，光學檢測設備包括一第一發光部、一第一準直鏡、一第一分光鏡、一第二分光鏡、一第一聚焦透鏡、一第一感光部、一第一濾光片、一第二準直鏡、一第二發光部、一第二濾光片、一第二聚焦透鏡以及一第二感光部。第一發光部產生一向下投射的第一色光，第一準直鏡位於第一發光部的下方處，第一分光鏡是位於第一準直鏡的下方處，第二分光鏡是位於第一分光鏡的右側方，第一聚焦透鏡位於第一分光鏡的左側方，第一感光部位於第一聚焦透鏡的左側方，且第一分光鏡、第二分光鏡、第一聚焦透鏡及第一感光部排列呈直線式，並將第一分光鏡、第二分光鏡、第一聚焦透鏡及第一感光部形成的直線式定義為一第一虛擬直線。另外，第一濾光片是位於第二分光鏡的下方處，被測定物是位於第一濾光片的下方處，第二準直鏡是位於第二分光鏡的正上方處，第二發光部是位於第二準直鏡的正上方處，第二發光部能產生一向下投射的第二色光，且第二發光部、第二準直鏡、第二分光鏡及被測定物排列呈直線式，並將第二發光部、第二準直鏡、第二分光鏡及被測定物形成的直線式定義為一第二虛擬直線。此外，第二濾光片是位於被測定物的上方處，第二聚焦透鏡是位於第二濾光片的上方處，第二感光部是位於第二聚焦透鏡的上方處，且被測定物、第二濾光片、第二聚焦透鏡及第二感光部排列呈直線式排列，並將被測定物、第二濾光片、第二聚焦透鏡及第二感光部形成的直線式定義為一第三虛擬直線。其中，第一虛擬直線垂直於第二虛擬直線，第二虛擬直線與三虛擬直線之間會具有一夾角，且第一色光的波長範圍不同於第二色光的波長範圍。An object of the present invention is to provide an optical detecting device for detecting an inclination angle and a displacement deviation of an object to be measured, the optical detecting device comprising a first light emitting portion, a first collimating mirror, a first beam splitter, and a a second beam splitter, a first focusing lens, a first photosensitive portion, a first filter, a second collimating mirror, a second emitting portion, a second filter, a second focusing lens, and a second photosensitive portion. The first light emitting portion generates a downwardly projected first color light, the first collimating mirror is located below the first light emitting portion, the first beam splitter is located below the first collimating mirror, and the second beam splitter is located at the On the right side of a beam splitter, the first focus lens is located on the left side of the first beam splitter, the first light sensitive portion is located on the left side of the first focus lens, and the first beam splitter, the second beam splitter, the first focus lens and the first A photosensitive portion is arranged in a linear shape, and a straight line formed by the first beam splitter, the second beam splitter, the first focusing lens and the first photosensitive portion is defined as a first virtual straight line. In addition, the first filter is located below the second beam splitter, the object to be measured is located below the first filter, and the second collimating mirror is located directly above the second beam splitter, and the second light is emitted. The portion is located directly above the second collimating mirror, the second illuminating portion is capable of generating a second color light that is projected downward, and the second illuminating portion, the second collimating mirror, the second dichroic mirror, and the object to be measured are arranged in a straight line. A straight line formed by the second light-emitting portion, the second collimating mirror, the second beam splitter, and the object to be measured is defined as a second virtual straight line. Further, the second filter is located above the object to be measured, the second focus lens is located above the second filter, and the second photosensitive portion is located above the second focus lens, and the object to be measured, The second filter, the second focusing lens, and the second photosensitive portion are arranged in a line, and the linear form formed by the object to be measured, the second filter, the second focusing lens, and the second photosensitive portion is defined as a first Three virtual straight lines. The first virtual straight line is perpendicular to the second virtual straight line, and the second virtual straight line and the three virtual straight lines have an angle, and the wavelength range of the first color light is different from the wavelength range of the second color light.
在上述之光學檢測設備，其中第一發光部及第二發光部皆為一雷射二極體。In the above optical detecting device, the first light emitting portion and the second light emitting portion are each a laser diode.
在上述之光學檢測設備，其中第一色光為一綠色的雷射光束，第二色光為一紅色的雷射光束。In the above optical detecting apparatus, the first color light is a green laser beam, and the second color light is a red laser beam.
在上述之光學檢測設備，其中被測定物為一音圈馬達。In the above optical detecting apparatus, the object to be measured is a voice coil motor.
在上述之之光學檢測設備，其中夾角為一銳角。In the above optical detecting apparatus, the angle is an acute angle.
在上述之之光學檢測設備，其中第一濾光片會過濾掉從被測定物反射回來的第二色光。In the above optical detecting apparatus, the first filter filters out the second color light reflected from the object to be measured.
在上述之之光學檢測設備，其中第二濾光片會過濾掉從被測定物反射回來的第一色光。In the above optical detecting apparatus, the second filter filters out the first color light reflected from the object to be measured.
為讓本之上述特徵和優點能更明顯易懂，下文特舉較佳實施例，並配合所附圖式，作詳細說明如下。The above described features and advantages will be more apparent from the following description.
1‧‧‧位移傾角二合一檢測設備1‧‧‧Displacement tilt two-in-one detection equipment
11‧‧‧雷射光源11‧‧‧Laser light source
2‧‧‧光學檢測設備2‧‧‧Optical testing equipment
21‧‧‧第一發光部21‧‧‧ first light department
22‧‧‧第一準直鏡22‧‧‧First collimating mirror
23‧‧‧第一分光鏡23‧‧‧First Beamsplitter
24‧‧‧第二分光鏡24‧‧‧Second beam splitter
25‧‧‧第一聚焦透鏡25‧‧‧First Focusing Lens
26‧‧‧第一感光部26‧‧‧First Photosensitive Department
27‧‧‧第一濾光片27‧‧‧First filter
28‧‧‧被測定物28‧‧‧Measured objects
29‧‧‧第二準直鏡29‧‧‧Second collimating mirror
30‧‧‧第二發光部30‧‧‧Second light department
31‧‧‧第二濾光片31‧‧‧Second filter
32‧‧‧第二聚焦透鏡32‧‧‧Second focusing lens
33‧‧‧第二感光部33‧‧‧Second Photosensitive Department
34‧‧‧第一虛擬直線34‧‧‧The first virtual straight line
35‧‧‧第二虛擬直線35‧‧‧Second virtual straight line
36‧‧‧第三虛擬直線36‧‧‧The third virtual straight line
θ‧‧‧夾角Θ‧‧‧ angle
圖1所繪示為位移傾角二合一檢測設備1。FIG. 1 illustrates a displacement tilt two-in-one detecting device 1.
圖2所繪示為本實施例之一種光學檢測設備2。FIG. 2 illustrates an optical detecting device 2 of the present embodiment.
圖3所繪示為第一色光的移動路徑的示意圖。FIG. 3 is a schematic diagram showing a moving path of the first color light.
圖4所繪示為第二色光的移動路徑的示意圖。FIG. 4 is a schematic diagram showing a moving path of the second color light.
圖5所繪示為第一色光及第二色光的移動路徑的示意圖。FIG. 5 is a schematic diagram showing a movement path of the first color light and the second color light.
請參閱圖2，圖2所繪示為本實施例之一種光學檢測設備2，光學檢測設備2應用於檢測一被測定物28的傾斜角度及位移偏差，光學檢測設備2包括一第一發光部21、一第一準直鏡22、一第一分光鏡23、一第二分光鏡24、一第一聚焦透鏡25、一第一感光部26、一第一濾光片27、一第二準直鏡29、一第二發光部30、一第二濾光片31、一第二聚焦透鏡32、及一第二感光部33。其中，第一發光部21會產生一向下投射的第一色光，第二發光部30能會產生一向下投射的第二色光，第一發光部21及該第二發光部30皆為一雷射二極體，且第一色光的波長範圍是不同於第二色光的波長範圍，在本實施例中，第一色光為一綠色的雷射光束，第二色光為一紅色的雷射光束。另外，第一準直鏡22位於該第一發光部21的正下方處，而第一分光鏡23是位於該第一準直鏡22的正下方處。並且，第二分光鏡24是位於該第一分光鏡23的右側方，第一聚焦透鏡25是位於第一分光鏡23的左側方，而第一感光部26位於該第一聚焦透鏡25的左側方。上述中，第一分光鏡23、第二分光鏡24、第一聚焦透鏡25及第一感光部26是排列呈直線式。詳細來說，第一分光鏡23、第二分光鏡24、第一聚焦透鏡25及第一感光部26形成的直線式在此先定義為一第一虛擬直線34。此外，第一濾光片27是位於第二分光鏡24的下方處，第二準直鏡29是位於該第二分光鏡24的正上方處，而被測定物28是位於第一濾光片27的下方處，被測定物28例如為一音圈馬達。並且，第二發光部30是位於該第二準直鏡29的正上方處，該第二發光部30能產生一向下投射的第二色光，第二發光部30、第二準直鏡29、第二分光鏡24及被測定物28排列呈直線式排列。詳細來說，第二發光部30、第二準直鏡29、第二分光鏡24及被測定物28所形成的直線式在此先定義為一第二虛擬直線35。另外，第二濾光片31是位於被測定物28的上方處，第二聚焦透鏡32是位於該第二濾光片31的上方處，第二感光部33是位於該第二聚焦透鏡32的上方處。並且，被測定物28、第二濾光片31、第二聚焦透鏡32及第二感光部33排列呈直線式。詳細來說，被測定物28、該第二濾光片31、第二聚焦透鏡32及第二感光部33所形成的直線式在此先定義為為一第三虛擬直線36。其中，第一虛擬直線34會垂直於該第二虛擬直線35，且第二虛擬直線35與三虛擬直線之間會具有一夾角θ，夾角θ為一銳角。Referring to FIG. 2, FIG. 2 illustrates an optical detecting device 2 of the present embodiment. The optical detecting device 2 is applied to detect an inclination angle and a displacement deviation of an object 28, and the optical detecting device 2 includes a first light emitting portion. 21, a first collimating mirror 22, a first dichroic mirror 23, a second dichroic mirror 24, a first focusing lens 25, a first photosensitive portion 26, a first filter 27, a second standard The straight mirror 29, a second light emitting portion 30, a second filter 31, a second focusing lens 32, and a second photosensitive portion 33. The first light-emitting portion 21 generates a first color light that is projected downward, and the second light-emitting portion 30 generates a second color light that is projected downward. The first light-emitting portion 21 and the second light-emitting portion 30 are both a second polarizer, and the wavelength range of the first color light is different from the wavelength range of the second color light. In this embodiment, the first color light is a green laser beam, and the second color light is a red laser beam. beam. In addition, the first collimating mirror 22 is located directly below the first light emitting portion 21, and the first dichroic mirror 23 is located directly below the first collimating mirror 22. Further, the second dichroic mirror 24 is located on the right side of the first dichroic mirror 23, the first focusing lens 25 is located on the left side of the first dichroic mirror 23, and the first photosensitive portion 26 is located on the left side of the first dichroic mirror 25. square. In the above, the first dichroic mirror 23, the second dichroic mirror 24, the first focusing lens 25, and the first photosensitive portion 26 are arranged in a straight line. In detail, the linear form formed by the first dichroic mirror 23, the second dichroic mirror 24, the first focusing lens 25, and the first photosensitive portion 26 is first defined as a first virtual straight line 34. In addition, the first filter 27 is located below the second beam splitter 24, the second collimating mirror 29 is located directly above the second beam splitter 24, and the object 28 is located at the first filter. Below the 27, the object 28 to be measured is, for example, a voice coil motor. Moreover, the second light emitting portion 30 is located directly above the second collimating mirror 29, and the second light emitting portion 30 can generate a second color light that is projected downward, the second light emitting portion 30, the second collimating mirror 29, The second beam splitter 24 and the object 28 are arranged in a line. In detail, the linear form formed by the second light-emitting portion 30, the second collimating mirror 29, the second dichroic mirror 24, and the object 28 is defined as a second virtual straight line 35. In addition, the second filter 31 is located above the object 28, the second focus lens 32 is located above the second filter 31, and the second photosensitive portion 33 is located at the second focus lens 32. Above. Further, the object 28, the second filter 31, the second focus lens 32, and the second light receiving portion 33 are arranged in a straight line. In detail, the straight line formed by the object 28, the second filter 31, the second focus lens 32, and the second light-receiving portion 33 is first defined as a third virtual straight line 36. The first virtual line 34 is perpendicular to the second virtual line 35, and the second virtual line 35 and the three virtual lines have an angle θ, and the angle θ is an acute angle.
請參閱圖3，圖3所繪示為第一色光的移動路徑的示意圖。光學檢測設備2測量被測定物28(音圈馬達)的傾斜角度的方法如下：首先，第一發光部21發出第一色光(綠色的雷射光束)至第一準直鏡22，第一準直鏡22會使第一色光的前進達到近乎平行的呈度，以避免第一色光發散導致光能量的損耗。之後，平行前進的第一色光經由第一分光鏡23反射至第二分光鏡24。之後，第二分光鏡24再將第一色光反射至第一濾光片27。之後，被第二分光鏡24所反射的第一色光會直接通過第一濾光片27至被測定物28上。之後，第一色光會從被測定物28上正反射穿過第一濾光片27。之後，穿過第一濾光片27的第一色光會回到第二分光鏡24，並從第二分光鏡24反射至第一分光鏡23。之後，第一色光穿過第一分光鏡23至第一聚焦透鏡25，第一聚焦透鏡25會再將第一色光聚焦在第一感光部26的表面上。上述中，由於被測定物28移動前及移動後會導致第一色光聚焦在第一感光部26的不同位置上。因此，光學檢測設備2依據第一色光聚焦點的位置差距便能計算出被測定物28移動時的傾斜角度。Please refer to FIG. 3 , which is a schematic diagram of a moving path of the first color light. The optical detecting device 2 measures the tilt angle of the object 28 (voice coil motor) as follows: First, the first light emitting portion 21 emits a first color light (green laser beam) to the first collimating mirror 22, first The collimating mirror 22 causes the advancement of the first color of light to a nearly parallel representation to avoid loss of optical energy due to divergence of the first color of light. Thereafter, the first color light that proceeds in parallel is reflected to the second beam splitter 24 via the first beam splitter 23. Thereafter, the second dichroic mirror 24 reflects the first color light to the first color filter 27. Thereafter, the first color light reflected by the second beam splitter 24 passes directly through the first filter 27 to the object 28 to be measured. Thereafter, the first color light is positively reflected from the object 28 to pass through the first filter 27. Thereafter, the first color light passing through the first filter 27 returns to the second beam splitter 24 and is reflected from the second beam splitter 24 to the first beam splitter 23. Thereafter, the first color light passes through the first dichroic mirror 23 to the first focusing lens 25, and the first focusing lens 25 focuses the first color light on the surface of the first photosensitive portion 26. In the above, the first color light is focused on different positions of the first photosensitive portion 26 before and after the movement of the object 28. Therefore, the optical detecting device 2 can calculate the tilt angle when the object 28 is moved according to the position difference of the first color light focusing point.
請參閱圖4，圖4所繪示為第二色光的移動路徑的示意圖。光學檢測設備2測量被測定物28(音圈馬達)的位移偏差的方法如下：首先，第二發光部30發出第二色光(紅色的雷射光束)至第二準直鏡29，第二準直鏡29會讓第二色光的前進達到近乎平行的呈度，以避免第二色光發散導致光能量的損耗。之後，平行的第二色光會穿過第一濾光片27照射至被測定物28上。之後，第二色光會從被測定物28上漫反射至第二濾光片31，且第二色光會穿過第二濾光片31至第二聚焦透鏡32上。之後，第二聚焦透鏡32會再將第二色光聚焦在第二感光部33的表面上。上述中，由於被測定物28移動前及移動後會導致第二色光聚焦在第二感光部33的不同位置上。因此，光學檢測設備2依據第二色光聚焦點的位置差距便能計算出被測定物28移動時的位移偏差。Please refer to FIG. 4 , which is a schematic diagram of a moving path of the second color light. The optical detecting device 2 measures the displacement deviation of the measured object 28 (voice coil motor) as follows: First, the second light emitting portion 30 emits a second color light (red laser beam) to the second collimating lens 29, the second standard The straight mirror 29 causes the second color light to advance to a nearly parallel degree to avoid loss of light energy due to divergence of the second color light. Thereafter, the parallel second color light is irradiated onto the object 28 through the first filter 27. Thereafter, the second color light is diffusely reflected from the object 28 to the second filter 31, and the second color light passes through the second filter 31 to the second focus lens 32. Thereafter, the second focus lens 32 focuses the second color light on the surface of the second photosensitive portion 33. In the above, the second color light is focused on different positions of the second photosensitive portion 33 before and after the movement of the object 28 to be measured. Therefore, the optical detecting device 2 can calculate the displacement deviation when the object 28 is moved based on the positional difference of the second color light focusing point.
請參閱圖5，圖5所繪示為第一色光及第二色光的移動路徑的示意圖。在圖2中，光學檢測設備2利用第一色光在被測定物28的正反射便能測得被測定物28的傾斜角度。並且，在圖3中，光學檢測設備2利用第二色光在被測定物28的漫反射便能測得被測定物28的位移偏差。然而，在光學檢測設備2實際檢測被測定物28的運作中，光學檢測設備2是同時應用第一色光及第二色光投射在被測定物28上。如此一來，光學檢測設備2便能在同一時間內測得被測定物28的傾斜角度及位移偏差。相較於習知的位移傾角二合一檢測設備10，本實施例之光學檢測設備2使用兩個不同波長光源的雷射光束去測量被測定物28 (音圈馬達)的傾斜角度及位移偏差。因此，該傾斜角度及該位移偏差不屬於相互依賴的變數，所以光學檢測設備2的校正變得較為簡單，無須做到三維校正。這樣一來，光學檢測設備2能縮短校正時間，且校正後的穩定度也提高。此外，當第二色光照射至被測定物28上時，第二色光也會從被測定物28上正反射回到第一濾光片27。然而，第一濾光片27會過濾掉從該被測定物28反射回來的第二色光。如此一來，第一濾光片27只會讓第一色光穿過，以使第一色光聚焦在第一感光部26。另外，類似的方法，當第一色光照射至被測定物28上時，第一色光也會從被測定物28上漫反射到第二濾光片31。然而，第二濾光片31會過濾掉從該被測定物28反射回來的第一色光。如此一來，第一濾光片27只會讓第二色光穿過，以使第二色光聚焦在第二感光部33。Please refer to FIG. 5. FIG. 5 is a schematic diagram showing a moving path of the first color light and the second color light. In FIG. 2, the optical detecting device 2 can measure the tilt angle of the object 28 by the regular reflection of the first color light on the object 28 to be measured. Further, in FIG. 3, the optical detecting device 2 can measure the displacement deviation of the object 28 by the diffuse reflection of the second color light on the object 28 to be measured. However, in the operation in which the optical detecting device 2 actually detects the object 28 to be measured, the optical detecting device 2 applies the first color light and the second color light to the object 28 to be simultaneously applied. In this way, the optical detecting device 2 can measure the tilt angle and the displacement deviation of the object 28 at the same time. Compared with the conventional displacement tilt two-in-one detecting device 10, the optical detecting device 2 of the present embodiment uses two laser beams of different wavelengths to measure the tilt angle and displacement deviation of the object 28 (voice coil motor). . Therefore, the inclination angle and the displacement deviation do not belong to mutually dependent variables, so the correction of the optical detecting device 2 becomes simpler, and it is not necessary to perform three-dimensional correction. In this way, the optical detecting device 2 can shorten the correction time and the stability after the correction is also improved. Further, when the second color light is irradiated onto the object 28, the second color light is also reflected back from the object 28 to the first filter 27. However, the first filter 27 filters out the second color light reflected from the object 28 to be measured. In this way, the first filter 27 only passes the first color light to focus the first color light on the first photosensitive portion 26. Further, in a similar manner, when the first color light is irradiated onto the object 28, the first color light is also diffused from the object 28 to the second filter 31. However, the second filter 31 filters out the first color light reflected from the object 28 to be measured. In this way, the first filter 27 only passes the second color light to focus the second color light on the second photosensitive portion 33.
雖然本發明已以較佳實施例揭露如上，然其並非用以限定本發明，任何所屬技術領域中具有通常知識者，在不脫離本發明之精神和範圍內，當可作些許之更動與潤飾，因此本發明之保護範圍當視後附之申請專利範圍所界定者為準。Although the present invention has been disclosed in the above preferred embodiments, it is not intended to limit the invention, and any one of ordinary skill in the art can make some modifications and refinements without departing from the spirit and scope of the invention. Therefore, the scope of the invention is defined by the scope of the appended claims.
2‧‧‧光學檢測設備 2‧‧‧Optical testing equipment
21‧‧‧第一發光部 21‧‧‧ first light department
22‧‧‧第一準直鏡 22‧‧‧First collimating mirror
23‧‧‧第一分光鏡 23‧‧‧First Beamsplitter
24‧‧‧第二分光鏡 24‧‧‧Second beam splitter
25‧‧‧第一聚焦透鏡 25‧‧‧First Focusing Lens
26‧‧‧第一感光部 26‧‧‧First Photosensitive Department
27‧‧‧第一濾光片 27‧‧‧First filter
28‧‧‧被測定物 28‧‧‧Measured objects
29‧‧‧第二準直鏡 29‧‧‧Second collimating mirror
30‧‧‧第二發光部 30‧‧‧Second light department
31‧‧‧第二濾光片 31‧‧‧Second filter
32‧‧‧第二聚焦透鏡 32‧‧‧Second focusing lens
33‧‧‧第二感光部 33‧‧‧Second Photosensitive Department
34‧‧‧第一虛擬直線 34‧‧‧The first virtual straight line
35‧‧‧第二虛擬直線 35‧‧‧Second virtual straight line
36‧‧‧第三虛擬直線 36‧‧‧The third virtual straight line
θ‧‧‧夾角 Θ‧‧‧ angle
Claims (7)
一種光學檢測設備，應用於檢測一被測定物，該光學檢測設備包括：
一第一發光部，其產生一向下投射的第一色光；
一第一準直鏡，該第一準直鏡位於該第一發光部的正下方處；
一第一分光鏡，該第一分光鏡是位於該第一準直鏡的正下方處；
一第二分光鏡，該第二分光鏡是位於該第一分光鏡的右側方；
一第一聚焦透鏡，該第一聚焦透鏡位於該第一分光鏡的左側方；
一第一感光部，該第一感光部位於該第一聚焦透鏡的左側方，且該第一分光鏡、該第二分光鏡、該第一聚焦透鏡及該第一感光部排列呈直線式，並將該第一分光鏡、該第二分光鏡、該第一聚焦透鏡及該第一感光部形成的直線式定義為一第一虛擬直線；
一第一濾光片，該第一濾光片是位於該第二分光鏡的下方處，且該被測定物是位於該第一濾光片的下方處；
一第二準直鏡，該第二準直鏡是位於該第二分光鏡的正上方處；
一第二發光部，該第二發光部是位於該第二準直鏡的正上方處，該第二發光部能產生一向下投射的第二色光，且該第二發光部、該第二準直鏡、該第二分光鏡及該被測定物排列呈直線式，並將該第二發光部、該第二準直鏡、該第二分光鏡及該被測定物形成的直線式定義為一第二虛擬直線；
一第二濾光片，該第二濾光片是位於該被測定物的上方處；
一第二聚焦透鏡，該第二聚焦透鏡是位於該第二濾光片的上方處；及
一第二感光部，該第二感光部是位於該第二聚焦透鏡的上方處，且該被測定物、該第二濾光片、該第二聚焦透鏡及該第二感光部排列呈直線式排列，並將該被測定物、該第二濾光片、該第二聚焦透鏡及該第二感光部形成的直線式定義為一第三虛擬直線；
其中，該第一虛擬直線垂直於該第二虛擬直線，該第二虛擬直線與該三虛擬直線之間會具有一夾角，且第一色光的波長範圍不同於第二色光的波長範圍。
An optical detecting device for detecting an object to be measured, the optical detecting device comprising:
a first light emitting portion that generates a first color light that is projected downward;
a first collimating mirror, the first collimating mirror is located directly below the first light emitting portion;
a first beam splitter, the first beam splitter is located directly below the first collimating mirror;
a second beam splitter, the second beam splitter is located on the right side of the first beam splitter;
a first focus lens, the first focus lens is located on the left side of the first beam splitter;
a first photosensitive portion, the first photosensitive portion is located on a left side of the first focusing lens, and the first beam splitter, the second beam splitter, the first focusing lens and the first photosensitive portion are arranged in a straight line. And forming a linear line formed by the first beam splitter, the second beam splitter, the first focusing lens and the first photosensitive portion as a first virtual straight line;
a first filter, the first filter is located below the second beam splitter, and the object to be measured is located below the first filter;
a second collimating mirror, the second collimating mirror is located directly above the second beam splitter;
a second light emitting portion, the second light emitting portion is located directly above the second collimating mirror, the second light emitting portion is capable of generating a second color light projected downward, and the second light emitting portion and the second light portion The straight mirror, the second beam splitter, and the object to be measured are arranged in a straight line, and the linear form formed by the second light emitting portion, the second collimating mirror, the second beam splitter, and the object to be measured is defined as one Second virtual straight line;
a second filter, the second filter is located above the object to be measured;
a second focusing lens, the second focusing lens is located above the second filter; and a second photosensitive portion, the second photosensitive portion is located above the second focusing lens, and the measured The second filter, the second focusing lens and the second photosensitive portion are arranged in a straight line, and the object to be measured, the second filter, the second focusing lens and the second photosensitive The straight line formed by the portion is defined as a third virtual straight line;
The first virtual straight line is perpendicular to the second virtual straight line, and the second virtual straight line and the three virtual straight lines have an angle, and the wavelength range of the first color light is different from the wavelength range of the second color light.
如申請專利範圍第1項之光學檢測設備，其中該第一發光部及該第二發光部皆為一雷射二極體。
The optical detecting device of claim 1, wherein the first light emitting portion and the second light emitting portion are each a laser diode.
如申請專利範圍第1項之光學檢測設備，其中該第一色光為一綠色的雷射光束，該第二色光為一紅色的雷射光束。
The optical detecting device of claim 1, wherein the first color light is a green laser beam, and the second color light is a red laser beam.
如申請專利範圍第1項之光學檢測設備，其中該被測定物為一音圈馬達。
The optical detecting device of claim 1, wherein the object to be measured is a voice coil motor.
如申請專利範圍第1項之光學檢測設備，其中該夾角為一銳角。
The optical detecting device of claim 1, wherein the included angle is an acute angle.
如申請專利範圍第1項之光學檢測設備，其中該第一濾光片會過濾掉從該被測定物反射回來的第二色光。
The optical detecting device of claim 1, wherein the first filter filters out the second color light reflected from the object to be measured.
如申請專利範圍第1項之光學檢測設備，其中該第二濾光片會過濾掉從該被測定物反射回來的第一色光。
The optical detecting device of claim 1, wherein the second filter filters out the first color light reflected from the object to be measured.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW104125636A TWI563240B (en) | 2015-08-06 | 2015-08-06 | Optical inspection apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW104125636A TWI563240B (en) | 2015-08-06 | 2015-08-06 | Optical inspection apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TWI563240B TWI563240B (en) | 2016-12-21 |
| TW201706558A true TW201706558A (en) | 2017-02-16 |
Family
ID=58227440
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW104125636A TWI563240B (en) | 2015-08-06 | 2015-08-06 | Optical inspection apparatus |
Country Status (1)
| Country | Link |
|---|---|
| TW (1) | TWI563240B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI634309B (en) * | 2017-05-12 | 2018-09-01 | 翊鼎光電股份有限公司 | Optical inspection apparatus |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19963345A1 (en) * | 1999-12-27 | 2001-07-05 | Leica Microsystems | Optical measuring arrangement and method for inclination measurement |
| JP4209709B2 (en) * | 2003-03-20 | 2009-01-14 | 株式会社キーエンス | Displacement meter |
| TWI274139B (en) * | 2006-03-14 | 2007-02-21 | Univ Nat Formosa | Optical measurement unit for real-time measuring angular error of platform and the method thereof |
| DE102009040837A1 (en) * | 2009-09-10 | 2011-03-17 | Carl Zeiss Ag | Devices and methods for position determination and surface measurement |
| TWM387986U (en) * | 2010-04-30 | 2010-09-01 | Univ Nat Taiwan | Optical angular measuring apparatus |
| TWI438393B (en) * | 2011-12-14 | 2014-05-21 | Zygo Corp | Non-contact surface characterization using modulated illumination |
| TWM490574U (en) * | 2012-06-19 | 2014-11-21 | Ardic Instr Co | Vibrometer |
| JP6335495B2 (en) * | 2013-12-09 | 2018-05-30 | パナソニック デバイスＳｕｎｘ株式会社 | Displacement sensor |
-
2015
- 2015-08-06 TW TW104125636A patent/TWI563240B/en not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| TWI563240B (en) | 2016-12-21 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| TWI406025B (en) | Automatic focusing device and method | |
| TWI464362B (en) | Apparatus for measuring a height and obtaining a focused image of and object and method thereof | |
| US9019351B2 (en) | Three-dimensional image measuring apparatus | |
| US20150292866A1 (en) | Film thickness measurement device and method | |
| US10175041B2 (en) | Measuring head and eccentricity measuring device including the same | |
| CN108646396B (en) | Automatic focusing microscope system | |
| CN103575234A (en) | Three-dimensional image measuring device | |
| TWI607253B (en) | Autofocus system, method and image detecting instrument | |
| CN207300540U (en) | Optical detection device | |
| TW201441670A (en) | Lens module testing device | |
| TW201823769A (en) | Method and apparatus for measuring errors of movable platform in multiple degrees of freedom capable of calculating the errors according to the signal of the light emitted from a light source module and reflected to an optoelectronic sensing module | |
| TW201731061A (en) | Mark position correction device and method | |
| JP2015108582A (en) | Three-dimensional measurement method and device | |
| TW201706558A (en) | Optical inspection equipment | |
| JP2016015371A (en) | Thickness measurement apparatus, thickness measurement method and exposure apparatus | |
| TWI518300B (en) | Optical callibration device and optical callibration method | |
| CN206573068U (en) | Optical Inspection Equipment | |
| CN204831214U (en) | Shape measuring device | |
| CN105675617B (en) | Method and apparatus for measuring surface particle size of flat glass | |
| CN110927921B (en) | A digital grating-assisted automatic focusing method and device | |
| JP5685961B2 (en) | Spot image position detector | |
| TWM551280U (en) | Optical inspection apparatus | |
| CN115102024B (en) | Micro lens adjusting device of semiconductor laser with visible light wave band | |
| KR101000855B1 (en) | Height measuring device of the measurement object | |
| CN119375150B (en) | Wafer detection method and wafer detection system |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | Annulment or lapse of patent due to non-payment of fees |