TWI562266B - Apparatus for handling semiconductor packages and method of acquiring location information of semiconductor packages using the same - Google Patents
Apparatus for handling semiconductor packages and method of acquiring location information of semiconductor packages using the sameInfo
- Publication number
- TWI562266B TWI562266B TW104134762A TW104134762A TWI562266B TW I562266 B TWI562266 B TW I562266B TW 104134762 A TW104134762 A TW 104134762A TW 104134762 A TW104134762 A TW 104134762A TW I562266 B TWI562266 B TW I562266B
- Authority
- TW
- Taiwan
- Prior art keywords
- semiconductor packages
- location information
- same
- acquiring location
- handling
- Prior art date
Links
Classifications
-
- H10P72/78—
-
- H10P74/00—
-
- H10P72/50—
-
- H10P72/70—
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020140144755A KR101704124B1 (en) | 2014-10-24 | 2014-10-24 | Apparatus for handling semiconductor devices and method of acquiring location information of the semiconductor devices using the same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201616591A TW201616591A (en) | 2016-05-01 |
| TWI562266B true TWI562266B (en) | 2016-12-11 |
Family
ID=55831118
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW104134762A TWI562266B (en) | 2014-10-24 | 2015-10-23 | Apparatus for handling semiconductor packages and method of acquiring location information of semiconductor packages using the same |
Country Status (3)
| Country | Link |
|---|---|
| KR (1) | KR101704124B1 (en) |
| CN (1) | CN105552015B (en) |
| TW (1) | TWI562266B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108811327A (en) * | 2017-05-05 | 2018-11-13 | 苏州微影激光技术有限公司 | A kind of vacuum absorption device of PCB, method and PCB exposure machines |
| US11123845B2 (en) * | 2017-06-21 | 2021-09-21 | Hp Indigo B.V. | Vacuum tables |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20040200064A1 (en) * | 2003-04-14 | 2004-10-14 | Iszharudin Hassan | Semiconductor chip pick and place process and equipment |
| US20050095100A1 (en) * | 2002-11-11 | 2005-05-05 | Cheol-Joon Yoo | Method and apparatus for picking up a semiconductor chip, method and apparatus for removing a semiconductor chip from a dicing tape, and a method of forming a perforated dicing tape |
| US20060003491A1 (en) * | 2004-07-05 | 2006-01-05 | Goon-Woo Kim | Apparatus for ejecting relatively thin IC chip from semiconductor wafer |
| US20110290427A1 (en) * | 2007-06-19 | 2011-12-01 | Hiroshi Maki | Manufacturing method for semiconductor integrated device |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100835977B1 (en) * | 2007-02-28 | 2008-06-09 | 주식회사 고려반도체시스템 | Chuck table for wafer cutting device and its control method |
| KR101195827B1 (en) * | 2009-04-23 | 2012-11-05 | 세크론 주식회사 | Edge detecting method of semiconductor chip package |
| KR101074458B1 (en) * | 2009-06-11 | 2011-10-18 | 세메스 주식회사 | Substrate heating unit and substrate treating apparatus including the unit |
| KR101117256B1 (en) * | 2009-09-28 | 2012-03-16 | 송인직 | A Variable Type Vacuum Table |
| KR20110138879A (en) * | 2010-06-22 | 2011-12-28 | 삼성전기주식회사 | Processing error correction method using optical pickup |
| JP5927490B2 (en) * | 2012-02-23 | 2016-06-01 | パナソニックIpマネジメント株式会社 | Electronic component mounting method |
-
2014
- 2014-10-24 KR KR1020140144755A patent/KR101704124B1/en active Active
-
2015
- 2015-10-23 TW TW104134762A patent/TWI562266B/en active
- 2015-10-23 CN CN201510696789.3A patent/CN105552015B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20050095100A1 (en) * | 2002-11-11 | 2005-05-05 | Cheol-Joon Yoo | Method and apparatus for picking up a semiconductor chip, method and apparatus for removing a semiconductor chip from a dicing tape, and a method of forming a perforated dicing tape |
| US20040200064A1 (en) * | 2003-04-14 | 2004-10-14 | Iszharudin Hassan | Semiconductor chip pick and place process and equipment |
| US20060003491A1 (en) * | 2004-07-05 | 2006-01-05 | Goon-Woo Kim | Apparatus for ejecting relatively thin IC chip from semiconductor wafer |
| US20110290427A1 (en) * | 2007-06-19 | 2011-12-01 | Hiroshi Maki | Manufacturing method for semiconductor integrated device |
| US20130299098A1 (en) * | 2007-06-19 | 2013-11-14 | Renesas Electronics Corporation | Manufacturing method for semiconductor integrated device |
Also Published As
| Publication number | Publication date |
|---|---|
| TW201616591A (en) | 2016-05-01 |
| KR101704124B1 (en) | 2017-02-07 |
| CN105552015A (en) | 2016-05-04 |
| KR20160048370A (en) | 2016-05-04 |
| CN105552015B (en) | 2018-06-01 |
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