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TWI561651B - Depositing device and method for manufacturing organic light emitting diode display using the same - Google Patents

Depositing device and method for manufacturing organic light emitting diode display using the same

Info

Publication number
TWI561651B
TWI561651B TW101138158A TW101138158A TWI561651B TW I561651 B TWI561651 B TW I561651B TW 101138158 A TW101138158 A TW 101138158A TW 101138158 A TW101138158 A TW 101138158A TW I561651 B TWI561651 B TW I561651B
Authority
TW
Taiwan
Prior art keywords
light emitting
emitting diode
organic light
same
diode display
Prior art date
Application number
TW101138158A
Other languages
English (en)
Other versions
TW201335399A (zh
Inventor
Sang-Woo Lee
Original Assignee
Samsung Display Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Samsung Display Co Ltd filed Critical Samsung Display Co Ltd
Publication of TW201335399A publication Critical patent/TW201335399A/zh
Application granted granted Critical
Publication of TWI561651B publication Critical patent/TWI561651B/zh

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • H10P14/6334—
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • General Chemical & Material Sciences (AREA)
  • Electroluminescent Light Sources (AREA)
  • Physical Vapour Deposition (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
TW101138158A 2012-02-21 2012-10-17 Depositing device and method for manufacturing organic light emitting diode display using the same TWI561651B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020120017419A KR101906358B1 (ko) 2012-02-21 2012-02-21 증착 장치 및 이를 이용한 유기 발광 표시장치의 제조방법

Publications (2)

Publication Number Publication Date
TW201335399A TW201335399A (zh) 2013-09-01
TWI561651B true TWI561651B (en) 2016-12-11

Family

ID=48959571

Family Applications (1)

Application Number Title Priority Date Filing Date
TW101138158A TWI561651B (en) 2012-02-21 2012-10-17 Depositing device and method for manufacturing organic light emitting diode display using the same

Country Status (4)

Country Link
US (1) US8889551B2 (zh)
KR (1) KR101906358B1 (zh)
CN (1) CN103255370B (zh)
TW (1) TWI561651B (zh)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5677785B2 (ja) 2009-08-27 2015-02-25 三星ディスプレイ株式會社Ｓａｍｓｕｎｇ Ｄｉｓｐｌａｙ Ｃｏ．，Ｌｔｄ． 薄膜蒸着装置及びこれを利用した有機発光表示装置の製造方法
KR20130004830A (ko) 2011-07-04 2013-01-14 삼성디스플레이 주식회사 유기층 증착 장치 및 이를 이용한 유기 발광 표시 장치의 제조 방법
KR101971199B1 (ko) * 2012-09-21 2019-08-14 삼성디스플레이 주식회사 유기층 증착 장치, 유기 발광 표시 장치 및 유기 발광 표시 장치 제조 방법
KR102081284B1 (ko) 2013-04-18 2020-02-26 삼성디스플레이 주식회사 증착장치, 이를 이용한 유기발광 디스플레이 장치 제조 방법 및 유기발광 디스플레이 장치
KR102175820B1 (ko) * 2013-09-12 2020-11-09 삼성디스플레이 주식회사 증착원 반송 장치
KR102369676B1 (ko) * 2017-04-10 2022-03-04 삼성디스플레이 주식회사 표시 장치의 제조장치 및 표시 장치의 제조방법
CN109234683B (zh) * 2018-09-04 2020-08-07 京东方科技集团股份有限公司 用于蒸镀的辅助装置、方法及蒸镀系统
KR102528282B1 (ko) * 2021-05-13 2023-05-03 (주)데포랩 증발원
JP7794643B2 (ja) * 2022-01-12 2026-01-06 株式会社ジャパンディスプレイ 蒸着装置及び蒸着方法
JP7797212B2 (ja) * 2022-01-12 2026-01-13 株式会社Magnolia White 蒸着装置及び蒸着方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100143587A1 (en) * 2008-12-08 2010-06-10 Lee Joo-Hyeon Vapor deposition apparatus and vapor deposition method
TW201100576A (en) * 2009-05-04 2011-01-01 Samsung Mobile Display Co Ltd Apparatus for depositing organic material and depositing method thereof

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100623730B1 (ko) * 2005-03-07 2006-09-14 삼성에스디아이 주식회사 증발원 어셈블리 및 이를 구비한 증착 장치
KR100730172B1 (ko) 2005-11-24 2007-06-19 삼성에스디아이 주식회사 유기박막 증착장치
JP5064810B2 (ja) 2006-01-27 2012-10-31 キヤノン株式会社 蒸着装置および蒸着方法
KR100762683B1 (ko) * 2006-05-11 2007-10-01 삼성에스디아이 주식회사 유기 증발 증착원 및 이를 포함한 유기 증발 증착장치
KR100964224B1 (ko) 2008-02-28 2010-06-17 삼성모바일디스플레이주식회사 증착 장치 및 박막 형성 방법
KR101108151B1 (ko) 2009-04-30 2012-01-31 삼성모바일디스플레이주식회사 증착 장치
CN101565813B (zh) * 2009-05-18 2012-08-08 南京华显高科有限公司 MgO薄膜电子束蒸发制备方法及装置
TWI475124B (zh) * 2009-05-22 2015-03-01 Samsung Display Co Ltd 薄膜沉積設備
CN103443324B (zh) * 2011-03-29 2015-09-02 松下电器产业株式会社 成膜装置及成膜方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100143587A1 (en) * 2008-12-08 2010-06-10 Lee Joo-Hyeon Vapor deposition apparatus and vapor deposition method
TW201100576A (en) * 2009-05-04 2011-01-01 Samsung Mobile Display Co Ltd Apparatus for depositing organic material and depositing method thereof

Also Published As

Publication number Publication date
CN103255370B (zh) 2017-03-01
US20130217158A1 (en) 2013-08-22
TW201335399A (zh) 2013-09-01
US8889551B2 (en) 2014-11-18
KR20130095969A (ko) 2013-08-29
CN103255370A (zh) 2013-08-21
KR101906358B1 (ko) 2018-10-11

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