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TWI560901B - Epitaxial structure - Google Patents

Epitaxial structure

Info

Publication number
TWI560901B
TWI560901B TW101115891A TW101115891A TWI560901B TW I560901 B TWI560901 B TW I560901B TW 101115891 A TW101115891 A TW 101115891A TW 101115891 A TW101115891 A TW 101115891A TW I560901 B TWI560901 B TW I560901B
Authority
TW
Taiwan
Prior art keywords
epitaxial structure
epitaxial
Prior art date
Application number
TW101115891A
Other languages
English (en)
Other versions
TW201344946A (zh
Inventor
Yang Wei
Shou-Shan Fan
Original Assignee
Hon Hai Prec Ind Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hon Hai Prec Ind Co Ltd filed Critical Hon Hai Prec Ind Co Ltd
Publication of TW201344946A publication Critical patent/TW201344946A/zh
Application granted granted Critical
Publication of TWI560901B publication Critical patent/TWI560901B/zh

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/80Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials
    • H10D62/82Heterojunctions
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/80Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials
    • H10D62/881Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials being a two-dimensional material
    • H10D62/882Graphene
    • H10P14/2901
    • H10P14/3202
    • H10P14/3206
    • H10P14/3248
    • H10P14/3256
    • H10P14/3402
    • H10P14/36
TW101115891A 2012-04-25 2012-05-04 Epitaxial structure TWI560901B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201210122545.0A CN103378239B (zh) 2012-04-25 2012-04-25 外延结构体

Publications (2)

Publication Number Publication Date
TW201344946A TW201344946A (zh) 2013-11-01
TWI560901B true TWI560901B (en) 2016-12-01

Family

ID=49463077

Family Applications (1)

Application Number Title Priority Date Filing Date
TW101115891A TWI560901B (en) 2012-04-25 2012-05-04 Epitaxial structure

Country Status (3)

Country Link
US (1) US9231060B2 (zh)
CN (1) CN103378239B (zh)
TW (1) TWI560901B (zh)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015126139A1 (en) * 2014-02-19 2015-08-27 Samsung Electronics Co., Ltd. Wiring structure and electronic device employing the same
KR102809444B1 (ko) 2015-09-08 2025-05-19 메사추세츠 인스티튜트 오브 테크놀로지 그래핀-기반 층 전달 시스템 및 방법
JP2020500424A (ja) * 2016-11-08 2020-01-09 マサチューセッツ インスティテュート オブ テクノロジー 層転写のための転位フィルタ処理のためのシステムおよび方法
US10825952B2 (en) 2017-01-16 2020-11-03 Apple Inc. Combining light-emitting elements of differing divergence on the same substrate
US11381060B2 (en) 2017-04-04 2022-07-05 Apple Inc. VCSELs with improved optical and electrical confinement
CN107083540B (zh) * 2017-04-18 2019-04-16 大连理工大学 一种柔性聚酰亚胺衬底上的氮化镓基薄膜及其制备方法
US20200286786A1 (en) * 2017-11-14 2020-09-10 Massachusetts Institute Of Technology Epitaxial growth and transfer via patterned two-dimensional (2d) layers
EP3496131B1 (en) * 2017-12-05 2023-06-21 IMEC vzw Method for forming a semiconductor structure and a semiconductor structure manufactured thereof
US20210125826A1 (en) 2018-06-22 2021-04-29 Massachusetts Institute Of Technology Systems and methods for growth of silicon carbide over a layer comprising graphene and/or hexagonal boron nitride and related articles
CN119050806A (zh) 2019-02-21 2024-11-29 苹果公司 具有电介质dbr的磷化铟vcsel
CN113711450B (zh) 2019-04-01 2025-02-18 苹果公司 具有紧密节距和高效率的vcsel阵列
US11374381B1 (en) 2019-06-10 2022-06-28 Apple Inc. Integrated laser module
WO2021026751A1 (zh) * 2019-08-13 2021-02-18 苏州晶湛半导体有限公司 氮化物半导体衬底的制作方法
CN111613697B (zh) * 2020-05-22 2020-11-27 山西穿越光电科技有限责任公司 一种含有石墨烯插层的GaN/AlGaN超晶格薄膜及其制备方法
DE102020128628A1 (de) 2020-05-28 2021-12-02 Taiwan Semiconductor Manufacturing Co. Ltd. Halbleiterbauelement mit zweidimensionalen materialien
US12494618B2 (en) 2022-09-14 2025-12-09 Apple Inc. Vertical emitters with integrated final-stage transistor switch

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200532776A (en) * 2004-03-17 2005-10-01 Sumitomo Electric Industries Method of manufacturing single-crystal GaN substrate, and single-crystal GaN substrate
TW201133832A (en) * 2009-11-10 2011-10-01 jian-min Song Substantially lattice matched semiconductor materials and associated methods
WO2012057517A2 (ko) * 2010-10-26 2012-05-03 주식회사 엘지실트론 화합물 반도체 장치 및 화합물 반도체 제조방법

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8368118B2 (en) 2008-12-16 2013-02-05 Hewlett-Packard Development Company, L.P. Semiconductor structure having an ELOG on a thermally and electrically conductive mask
US8409366B2 (en) * 2009-06-23 2013-04-02 Oki Data Corporation Separation method of nitride semiconductor layer, semiconductor device, manufacturing method thereof, semiconductor wafer, and manufacturing method thereof
US8404588B2 (en) * 2010-10-06 2013-03-26 Electronics And Telecommunications Research Institute Method of manufacturing via electrode
CN102683209B (zh) * 2011-03-18 2015-01-21 中国科学院微电子研究所 一种半导体器件及其制造方法
CN102201503A (zh) * 2011-03-30 2011-09-28 苏州纳维科技有限公司 一种iii族氮化物衬底的生长方法、衬底以及led

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200532776A (en) * 2004-03-17 2005-10-01 Sumitomo Electric Industries Method of manufacturing single-crystal GaN substrate, and single-crystal GaN substrate
TW201133832A (en) * 2009-11-10 2011-10-01 jian-min Song Substantially lattice matched semiconductor materials and associated methods
WO2012057517A2 (ko) * 2010-10-26 2012-05-03 주식회사 엘지실트론 화합물 반도체 장치 및 화합물 반도체 제조방법

Also Published As

Publication number Publication date
US20130285115A1 (en) 2013-10-31
US9231060B2 (en) 2016-01-05
CN103378239B (zh) 2016-06-08
TW201344946A (zh) 2013-11-01
CN103378239A (zh) 2013-10-30

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