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TWI546006B - Method of manufacturing print circuit board - Google Patents

Method of manufacturing print circuit board Download PDF

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Publication number
TWI546006B
TWI546006B TW101102469A TW101102469A TWI546006B TW I546006 B TWI546006 B TW I546006B TW 101102469 A TW101102469 A TW 101102469A TW 101102469 A TW101102469 A TW 101102469A TW I546006 B TWI546006 B TW I546006B
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TW
Taiwan
Prior art keywords
printed wiring
wiring board
resin
heating step
board according
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TW101102469A
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Chinese (zh)
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TW201236531A (en
Inventor
田中伸樹
金田研一
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住友電木股份有限公司
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Publication of TW201236531A publication Critical patent/TW201236531A/en
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Publication of TWI546006B publication Critical patent/TWI546006B/en

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    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/10Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/18Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/10Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/108Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern by semi-additive methods; masks therefor
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/38Improvement of the adhesion between the insulating substrate and the metal
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/11Treatments characterised by their effect, e.g. heating, cooling, roughening
    • H05K2203/1105Heating or thermal processing not related to soldering, firing, curing or laminating, e.g. for shaping the substrate or during finish plating

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing Of Printed Wiring (AREA)
  • Production Of Multi-Layered Print Wiring Board (AREA)
  • Printing Elements For Providing Electric Connections Between Printed Circuits (AREA)

Description

印刷佈線板之製造方法 Printed wiring board manufacturing method

本發明係關於印刷佈線板之製造方法。 The present invention relates to a method of manufacturing a printed wiring board.

伴隨著電子機器之高機能化等的要求,電子零件之高密度積體化、甚至是高密度安裝化等持續發展中。因此,在使用於電子零件之高密度安裝對應之印刷佈線板等方面,亦較先前技術增加地,小型薄型化、高密度化及多層化持續發展。 With the demand for high functionality of electronic equipment, high-density integration of electronic components and even high-density mounting have continued to develop. For this reason, in terms of a printed wiring board for high-density mounting of electronic components, etc., the size, thickness, density, and multilayering have been increasing as compared with the prior art.

作為在印刷佈線板之基板上以高密度有效形成圖案精度高之導體電路層,係已開始進行半加成法(SAP法)。 As a conductor circuit layer having high pattern precision at a high density on a substrate of a printed wiring board, a semi-additive method (SAP method) has been started.

依SAP法之電路的形成係例如依下述說明進行。首先,針對核心基板或層間絕緣層之樹脂表面進行粗化處理。其次,於經粗化處理過之樹脂表面上,形成為基底之無電解鍍覆層。接著,藉由鍍覆光阻保護非電路形成部,並藉由電鍍而針對電路形成部進行電鍍層之增厚。其後,去除光阻,透過閃蝕將上述電路形成部以外之無電解鍍覆層去除,藉以在樹脂表面上形成電路。 The formation of the circuit according to the SAP method is carried out, for example, according to the following description. First, the surface of the resin of the core substrate or the interlayer insulating layer is roughened. Next, an electroless plating layer of the substrate is formed on the surface of the roughened resin. Next, the non-circuit forming portion is protected by plating a photoresist, and the plating portion is thickened by plating. Thereafter, the photoresist is removed, and the electroless plating layer other than the circuit formation portion is removed by flash etching to form a circuit on the surface of the resin.

若根據SAP法,則可將積層在樹脂表面上之金屬層予以薄膜化。因此,可形成更細微之電路佈線。 According to the SAP method, the metal layer laminated on the surface of the resin can be thinned. Therefore, a finer circuit wiring can be formed.

然而,於先前技術之針對核心基板或層間絕緣層之樹脂表面進行SAP法之情形下,在導體電路層與樹脂表面之間並未獲得充分的密接性,且有導體電路層之剝離強度降低之情 形。此時,於例如高溫高濕條件下曝曬印刷佈線板時,會產生導體電路層剝離、發生加濕膨脹或損害連接可靠性等問題。 However, in the case of the SAP method of the resin surface of the prior art for the core substrate or the interlayer insulating layer, sufficient adhesion is not obtained between the conductor circuit layer and the resin surface, and the peeling strength of the conductor circuit layer is lowered. situation shape. At this time, when the printed wiring board is exposed to high-temperature and high-humidity conditions, for example, problems such as peeling of the conductor circuit layer, occurrence of humidification expansion, or deterioration of connection reliability occur.

此外,近年來為了兼具封裝基板之薄型化與低反翹,而有以基板之高剛性、低熱膨脹化為目的之高度填充填充材料之情形。此時,依SAP法之導體電路層與樹脂表面之密接性問題會明顯化。此係於鍍覆或去除毛邊等而進行化學藥劑處理時,受到填充材料之影響為一原因。 In addition, in recent years, in order to achieve both a reduction in thickness and a low warpage of the package substrate, there is a case where the filler is highly filled for the purpose of high rigidity of the substrate and low thermal expansion. At this time, the problem of the adhesion between the conductor circuit layer and the resin surface according to the SAP method is conspicuous. This is due to the influence of the filler material when chemical treatment is performed by plating or removing burrs or the like.

為了提高樹脂表面與導體電路層之密接性,例如,揭示於專利文獻1、2之SAP法係依樹脂表面之凹凸成為1~7μm之方式針對樹脂表面施以粗化處理。 In order to improve the adhesion between the resin surface and the conductor circuit layer, for example, the SAP method disclosed in Patent Documents 1 and 2 applies a roughening treatment to the surface of the resin so that the unevenness of the surface of the resin is 1 to 7 μm.

又,在專利文獻3中,記載有:將矽烷偶合劑層積層於未施以粗化處理之銅箔,並於其上進一步積層極薄底面樹脂層而獲得之附有極薄接著劑層之銅箔係與基材樹脂之接著強度優異的主旨。 Further, Patent Document 3 discloses a method in which a ruthenium coupling agent is laminated on a copper foil which is not subjected to roughening treatment, and an extremely thin undercoat layer is further laminated thereon to obtain an extremely thin adhesive layer. The copper foil is excellent in adhesion strength to the base resin.

[先前技術文獻] [Previous Technical Literature] [專利文獻] [Patent Literature]

專利文獻1:日本專利特開2003-69218號公報 Patent Document 1: Japanese Patent Laid-Open Publication No. 2003-69218

專利文獻2:日本專利特開2003-60341號公報 Patent Document 2: Japanese Patent Laid-Open Publication No. 2003-60341

專利文獻3:日本專利特開2005-053218號公報 Patent Document 3: Japanese Patent Laid-Open Publication No. 2005-053218

本發明之目的係在於:透過半加成法而對核心基板或層間 絕緣層之樹脂表面形成密接性高之導體電路層,而獲得導體電路層之剝離強度高之印刷佈線板。 The object of the present invention is to pass through a semi-additive method on a core substrate or interlayer The surface of the resin of the insulating layer forms a conductor circuit layer having high adhesion, and a printed wiring board having a high peeling strength of the conductor circuit layer is obtained.

若根據本發明,則可提供一種印刷佈線板之製造方法,其係具備有:在表面為由樹脂組成物所構成之基板之上述表面上,藉由無電解鍍覆形成無電解鍍覆層之步驟;在上述無電解鍍覆層上形成具有開口之光阻遮罩之步驟;在上述開口內,藉由電鍍形成電鍍層之步驟;去除上述光阻遮罩之步驟;及於上述無電解鍍覆層中,藉由蝕刻選擇性去除依平面視為與上述電鍍層未重疊之部分之步驟;在上述形成無電解鍍覆層之步驟後、上述形成電鍍層之步驟前,具有加熱上述基板之第一加熱步驟,及/或在上述形成電鍍層後,具有加熱上述基板之第二加熱步驟。 According to the present invention, there is provided a method of producing a printed wiring board comprising: forming an electroless plating layer by electroless plating on the surface of the substrate having a resin composition; a step of forming a photoresist mask having an opening on the electroless plating layer; a step of forming a plating layer by electroplating in the opening; a step of removing the photoresist mask; and the electroless plating described above In the coating, the step of removing the portion which is not overlapped with the plating layer by etching is selectively removed by etching; after the step of forming the electroless plating layer, before the step of forming the plating layer, heating the substrate The first heating step, and/or after forming the plating layer described above, has a second heating step of heating the substrate.

若根據本發明,則可透過半加成法而對核心基板或層間絕緣層之樹脂表面形成密接性高之導體電路層,而獲得導體電路層之剝離強度高之印刷佈線板。 According to the present invention, a conductor circuit layer having high adhesion can be formed on the surface of the resin of the core substrate or the interlayer insulating layer by a semi-additive method, and a printed wiring board having a high peeling strength of the conductor circuit layer can be obtained.

上述目的及其他目的、特徵及優點係可依據以下所說明之較佳實施形態及隨附之下述圖式而進一步了解。 The above and other objects, features, and advantages will be apparent from the description of the preferred embodiments illustrated in the appended claims.

以下,係針對本發明之實施形態使用圖式進行說明。另外,於所有圖式中,係賦予同樣的構成要件相同的元件符 號,並適當省略說明。 Hereinafter, embodiments of the present invention will be described using a schematic diagram. In addition, in all the drawings, the same component elements are given the same constituent elements. No., and the description is omitted as appropriate.

圖1係說明本實施形態之印刷佈線板之製造方法例的示意圖。圖2係說明本實施形態之印刷佈線板之製造方法例的流程圖。 Fig. 1 is a schematic view showing an example of a method of manufacturing a printed wiring board of the embodiment. Fig. 2 is a flow chart showing an example of a method of manufacturing the printed wiring board of the embodiment.

本實施形態之印刷佈線板之製造方法係具備有:在表面為由樹脂組成物所構成之印刷佈線板用基板1之該表面上,藉由無電解鍍覆形成無電解鍍覆層2之步驟;在無電解鍍覆層2上形成具有開口之光阻遮罩3之步驟;在光阻遮罩3之開口內,藉由電鍍形成電鍍層4之步驟;去除光阻遮罩3之步驟;於無電解鍍覆層2中,藉由蝕刻選擇性去除依平面視為與電鍍層4未重疊之部分之步驟。又,本實施形態之印刷佈線板之製造方法係在形成無電解鍍覆層2之步驟後、形成電鍍層4之步驟前,具有加熱印刷佈線板用基板1之第一加熱步驟,及/或在形成電鍍層4後,具有加熱印刷佈線板用基板1之第二加熱步驟。 The method of manufacturing a printed wiring board according to the present embodiment includes the step of forming an electroless plating layer 2 by electroless plating on the surface of the substrate 1 for a printed wiring board having a resin composition. a step of forming a photoresist mask 3 having an opening on the electroless plating layer 2; a step of forming a plating layer 4 by electroplating in the opening of the photoresist mask 3; and a step of removing the photoresist mask 3; In the electroless plating layer 2, the step of treating the portion which is not overlapped with the plating layer 4 by etching is selectively removed by etching. Further, the method of manufacturing a printed wiring board according to the present embodiment has a first heating step of heating the substrate 1 for a printed wiring board, and/or a step of forming the plating layer 4 after the step of forming the electroless plating layer 2, and/or After the plating layer 4 is formed, there is a second heating step of heating the substrate 1 for printed wiring boards.

若根據本實施形態,則可以提高印刷佈線板用基板與導體電路層之密接性。因此,可提升依本實施形態所獲得之構成印刷佈線板之導體電路層的剝離強度。 According to this embodiment, the adhesion between the substrate for a printed wiring board and the conductor circuit layer can be improved. Therefore, the peel strength of the conductor circuit layer constituting the printed wiring board obtained in the present embodiment can be improved.

第二加熱步驟係可在形成電鍍層4之步驟與去除光阻遮罩3之步驟之間、去除光阻遮罩3之步驟與選擇性去除無電解鍍覆層2之步驟之間或選擇性去除無電解鍍覆層2之步驟之後進行。於在選擇性去除無電解鍍覆層2之步驟之後進行 第二加熱步驟時,於選擇性去除無電解鍍覆層2之後,進行根據第二加熱步驟之加熱處理,而電路層形成階段結束。 The second heating step may be between the step of forming the plating layer 4 and the step of removing the photoresist mask 3, the step of removing the photoresist mask 3, and the step of selectively removing the electroless plating layer 2 or the selective This is carried out after the step of removing the electroless plating layer 2. After the step of selectively removing the electroless plating layer 2 In the second heating step, after the electroless plating layer 2 is selectively removed, the heat treatment according to the second heating step is performed, and the circuit layer forming phase ends.

藉由第一加熱步驟及第二加熱步驟均進行,則可進一步提高印刷佈線板用基板與導體電路層之密接性。 By performing both the first heating step and the second heating step, the adhesion between the printed wiring board substrate and the conductor circuit layer can be further improved.

以下,根據圖1及圖2說明本發明之印刷佈線板之製造方法例。圖1及圖2所示印刷佈線板之製造方法係包含藉由依序進行準備印刷佈線板用基板1之步驟(步驟(a))、形成無電解鍍覆層2之步驟(步驟(b))、形成光阻遮罩3之步驟(步驟(c))、形成電鍍層4之步驟(步驟(d))、去除光阻遮罩3之步驟(步驟(e))及選擇性去除無電解鍍覆層2之步驟(步驟(f))之各個步驟而形成導體電路層的電路層形成階段。第一加熱步驟係在步驟(b)與步驟(c)之間進行。第二加熱步驟係在步驟(f)之後進行。 Hereinafter, an example of a method of manufacturing the printed wiring board of the present invention will be described with reference to Figs. 1 and 2 . The manufacturing method of the printed wiring board shown in FIG. 1 and FIG. 2 includes the step (step (a)) of preparing the printed wiring board substrate 1 in sequence, and the step of forming the electroless plating layer 2 (step (b)). a step of forming a photoresist mask 3 (step (c)), a step of forming a plating layer 4 (step (d)), a step of removing the photoresist mask 3 (step (e)), and selectively removing electroless plating The steps of the step of coating 2 (step (f)) form a circuit layer forming phase of the conductor circuit layer. The first heating step is carried out between step (b) and step (c). The second heating step is carried out after step (f).

另外,本實施形態之印刷佈線板之製造方法並未限定於上述方法。第一加熱步驟係可在步驟(b)與步驟(c)之間或步驟(c)與步驟(d)之間進行。又,第二加熱步驟係可在步驟(d)與步驟(e)之間、步驟(e)與步驟(f)之間或步驟(f)之後進行。另外,可進行第一加熱步驟與第二加熱步驟兩者,亦可僅進行其中一者,較佳為進行第一加熱步驟與第二加熱步驟兩者。 Further, the method of manufacturing the printed wiring board of the present embodiment is not limited to the above method. The first heating step can be carried out between step (b) and step (c) or between step (c) and step (d). Further, the second heating step may be carried out between step (d) and step (e), between step (e) and step (f) or after step (f). Further, both the first heating step and the second heating step may be performed, or only one of them may be performed, and preferably both the first heating step and the second heating step are performed.

首先,如圖1(a)所示般,在步驟(a)中,準備印刷佈線板用基板1。 First, as shown in FIG. 1(a), in the step (a), the printed wiring board substrate 1 is prepared.

作為印刷佈線板用基板1,並沒有特別限定,例如可使用 由積層體或金屬張貼積層板等所構成之核心基板,或具有將內層電路予以覆蓋之絕緣層的多層化基板等。本實施形態之印刷佈線板之製造方法係透過SAP法將導體電路層形成在由絕緣性樹脂組成物所構成之表面的情形時,則可以應用。本實施形態之印刷佈線板之製造方法係例如可應用在形成核心基板上之導體電路層、或多層印刷佈線板之內層電路或外層電路的情形。 The substrate 1 for a printed wiring board is not particularly limited and can be used, for example. A core substrate composed of a laminate or a metal-clad laminate or the like, or a multilayer substrate having an insulating layer covering the inner layer circuit. The method for producing a printed wiring board according to the present embodiment can be applied when the conductor circuit layer is formed on the surface of the insulating resin composition by the SAP method. The method for manufacturing a printed wiring board according to the present embodiment can be applied, for example, to a conductor circuit layer formed on a core substrate or an inner layer circuit or an outer layer circuit of a multilayer printed wiring board.

作為構成核心基板之上述積層體,例如可使用複數片重疊有預浸體者等。預浸體係沒有特別限定,可藉由公知方法而獲得。預浸體係例如可藉由將含浸有含有熱硬化性樹脂、硬化劑及填充劑等之樹脂組成物之清漆的玻璃織布等基材予以加熱乾燥而形成。 As the laminated body constituting the core substrate, for example, a plurality of prepregs may be used in a plurality of sheets. The prepreg system is not particularly limited and can be obtained by a known method. The prepreg system can be formed, for example, by heating and drying a substrate such as a glass woven fabric impregnated with a varnish containing a resin composition such as a thermosetting resin, a curing agent, and a filler.

作為構成核心基板之上述金屬張貼積層板,例如可使用將金屬箔重疊於預浸體或上述積層體之至少一面,並進行加熱加壓成形者等。另外,在將金屬張貼積層板當作為印刷佈線板用基板1使用時,可採用透過蝕刻等方法將設置在表面之金屬箔予以去除的金屬張貼積層板。藉此,則印刷佈線板用基板1之表面係成為由樹脂組成物所構成。 For the metal-clad laminate which constitutes the core substrate, for example, a metal foil may be laminated on at least one surface of the prepreg or the laminate, and may be formed by heat and pressure molding. In addition, when the metal-clad laminate is used as the substrate 1 for a printed wiring board, a metal-clad laminate in which the metal foil provided on the surface is removed by etching or the like can be used. Thereby, the surface of the printed wiring board substrate 1 is composed of a resin composition.

作為多層化基板,例如可使用透過鍍覆通孔法或疊層法等,經由層間絕緣層將成為內層電路之導體電路層積層在核心基板上,並進行多層佈線化途中之積層體,其係於最表面積層有層間絕緣層者等。上述層間絕緣層係沒有特別限定, 例如可藉由未含有預浸體或基材之樹脂組成物等而構成。 As the multilayered substrate, for example, a layered body in which a conductor circuit which is an inner layer circuit is laminated on a core substrate via an interlayer insulating layer and a multilayer wiring is formed by using a via plating method or a lamination method can be used. It is based on the interlayer insulating layer in the most surface area layer. The above interlayer insulating layer is not particularly limited. For example, it can be comprised by the resin composition which does not contain a prepreg or a base material, etc..

上述成為內層電路之導體電路層係可藉由於例如依SAP法之電路形成階段中,以進行第一加熱步驟為特徵之本實施形態之電路形成方法而形成。藉此,可提高成為內層電路之導體電路層的剝離強度。另外,成為內層電路之導體電路層係可藉由先前所習知之電路形成方法而形成。 The conductor circuit layer which becomes the inner layer circuit can be formed by, for example, a circuit formation method of the present embodiment which is characterized by the first heating step in the circuit formation stage by the SAP method. Thereby, the peeling strength of the conductor circuit layer which becomes an inner layer circuit can be improved. Further, the conductor circuit layer which becomes the inner layer circuit can be formed by a conventional circuit formation method.

又,設置在由上述積層體或上述金屬張貼積層板所構成之核心基板之兩面的導體電路層,係例如可藉由鑽孔加工或雷射加工等而將鍍覆層等形成於核心基板上所形成之通孔內,並藉以可互相電性連接。 Further, the conductor circuit layer provided on both surfaces of the core substrate formed of the laminate or the metal-clad laminate may be formed on the core substrate by, for example, drilling or laser processing. The through holes are formed and electrically connected to each other.

成為導體電路層之支撐體的印刷佈線板用基板1係具有由絕緣性樹脂組成物所構成之表面。構成印刷佈線板用基板1之表面的樹脂組成物係沒有特別限定,例如可為至少含有熱硬化性樹脂之樹脂組成物。作為上述熱硬化性樹脂,例如可列舉出脲(尿素)樹脂、三聚氰胺樹脂、順丁烯二醯亞胺化合物聚胺基甲酸酯樹脂、不飽和聚酯樹脂、具有苯并環之樹脂、雙烯丙基二醯亞胺化合物、乙烯基苄基樹脂、乙烯基苄基醚樹脂、苯并環丁烯樹脂、氰酸酯樹脂、環氧樹脂等。熱硬化性樹脂係以該等中之玻璃轉移溫度可成為200℃以上之組合為佳。該等之中,較佳的是熱硬化性樹脂為玻璃轉移溫度可成為200℃以上之組合。因此,作為熱硬化性樹脂,較佳的是使用例如含有螺旋環、雜環式、三羥甲基型、 聯苯基型、萘型、蒽型、酚醛清漆型之2或3官能以上的環氧樹脂;氰酸酯樹脂(包含氰酸酯樹脂之預聚物)、順丁烯二醯亞胺化合物、苯并環丁烯樹脂、具有苯并環之樹脂。 The printed wiring board substrate 1 which is a support of the conductor circuit layer has a surface made of an insulating resin composition. The resin composition constituting the surface of the substrate 1 for a printed wiring board is not particularly limited, and may be, for example, a resin composition containing at least a thermosetting resin. Examples of the thermosetting resin include urea (urea) resin, melamine resin, maleimide compound polyurethane resin, unsaturated polyester resin, and benzoic acid. Ring resin, bisallyl diimide compound, vinyl benzyl resin, vinyl benzyl ether resin, benzocyclobutene resin, cyanate resin, epoxy resin, and the like. The thermosetting resin is preferably a combination of a glass transition temperature of 200 ° C or higher. Among these, it is preferred that the thermosetting resin has a glass transition temperature of 200 ° C or higher. Therefore, as the thermosetting resin, for example, a ring containing a spiral ring, a heterocyclic formula, a trimethylol type, a biphenyl type, a naphthalene type, a fluorene type, or a novolac type is preferably used. Oxygen resin; cyanate resin (prepolymer containing cyanate resin), maleimide compound, benzocyclobutene resin, with benzoic acid Ring resin.

透過使用環氧樹脂及/或氰酸酯樹脂來作為熱硬化性樹脂,則樹脂組成物之線膨脹小,且可明顯提升樹脂組成物之耐熱性。又,藉由將環氧樹脂及/或氰酸酯樹脂與高填充量之填充材料組合,則可以獲得難燃性、耐熱性、耐衝擊性、高剛性及電氣特性(低介電係數、低介電正切)優越的樹脂組成物。 By using an epoxy resin and/or a cyanate resin as a thermosetting resin, the linear expansion of the resin composition is small, and the heat resistance of the resin composition can be remarkably improved. Moreover, by combining an epoxy resin and/or a cyanate resin with a filler material having a high filling amount, flame retardancy, heat resistance, impact resistance, high rigidity, and electrical properties (low dielectric constant, low) can be obtained. Dielectric tangent) superior resin composition.

於此,耐熱性之提升係可認為是起因於下述原因:硬化反應後之熱硬化性樹脂之玻璃轉移溫度成為200℃以上、硬化後之樹脂組成物之熱分解溫度變高、於250℃以上之反應殘渣等低分子量成分減少。 Here, the improvement of the heat resistance is considered to be due to the fact that the glass transition temperature of the thermosetting resin after the curing reaction is 200° C. or higher, and the thermal decomposition temperature of the resin composition after curing becomes high at 250° C. The low molecular weight component such as the above reaction residue is reduced.

又,難燃性之提升係可認為是起因於:在構造上苯環比例高之芳香族系熱硬化性樹脂中,苯環容易碳化(石墨化)而產生碳化部分。 In addition, in the aromatic thermosetting resin having a high ratio of a benzene ring in the structure, the benzene ring is easily carbonized (graphitized) to form a carbonized portion.

作為上述環氧樹脂,例如可列舉出雙酚A型環氧樹脂、雙酚F型環氧樹脂、苯酚酚醛清漆型環氧樹脂、甲酚酚醛清漆型環氧樹脂、雙酚A酚醛清漆型環氧樹脂、聯苯基酚醛清漆型環氧樹脂、蒽型環氧樹脂、二氫蒽型環氧樹脂、3官能苯酚型環氧樹脂、4官能苯酚型環氧樹脂、萘型環氧樹脂、聯苯型環氧樹脂、芳烷基型環氧樹脂、脂環式環氧樹脂、 多醇型環氧樹脂、縮水甘油基胺、縮水甘油基醚、丁二烯等將雙重鍵結予以環氧化之化合物、由含有羥基之聚矽氧樹脂類與表氯醇之反應所獲得之化合物等。該等之中,環氧樹脂係以萘型、或芳基伸烷基型環氧樹脂為佳。藉由使用萘型、或芳基伸烷基型環氧樹脂,則可提高所獲得之積層板之吸濕焊錫耐熱性(吸濕後之焊錫耐熱性)及難燃性。作為萘型環氧樹脂,可列舉出DIC(股)製之HP-4700、HP-4770、HP-4032D、HP-5000、日本化藥(股)製之NC-7300L、新日鐵化學(股)製之ESN-375等。又,作為芳基伸烷基型環氧樹脂,可列舉出日本化藥(股)製之NC-3000、NC-3000L、NC-3000-FH、日本化藥(股)製之NC-7300L、新日鐵化學(股)製之ESN-375等。所謂的芳基伸烷基型環氧樹脂係指重覆單位中含有一個以上芳香族基與亞甲基等之伸烷基的組合之環氧樹脂,耐熱性、難燃性及機械性強度優異。 Examples of the epoxy resin include a bisphenol A epoxy resin, a bisphenol F epoxy resin, a phenol novolak epoxy resin, a cresol novolak epoxy resin, and a bisphenol A novolak ring. Oxygen resin, biphenyl novolac type epoxy resin, fluorene type epoxy resin, indoline type epoxy resin, trifunctional phenol type epoxy resin, tetrafunctional phenol type epoxy resin, naphthalene type epoxy resin, joint Benzene type epoxy resin, aralkyl type epoxy resin, alicyclic epoxy resin, a compound obtained by epoxidizing a double bond, such as a polyol epoxy resin, glycidylamine, glycidyl ether, butadiene, or a compound obtained by reacting a hydroxyl group-containing polyoxyl resin with epichlorohydrin Wait. Among these, the epoxy resin is preferably a naphthalene type or an arylalkylene type epoxy resin. By using a naphthalene type or an arylalkylene type epoxy resin, the moisture absorption solder heat resistance (solder heat resistance after moisture absorption) and flame retardancy of the obtained laminated board can be improved. Examples of the naphthalene type epoxy resin include HP-4700, HP-4770, HP-4032D, HP-5000, Nippon Chemical Co., Ltd., NC-7300L, and Nippon Steel Chemical Co., Ltd. ) ESN-375 and so on. Further, examples of the arylalkylene-based epoxy resin include NC-3000, NC-3000L, NC-3000-FH, and Nippon Chemical Co., Ltd., NC-7300L, manufactured by Nippon Kayaku Co., Ltd. ESN-375, etc. manufactured by Nippon Steel Chemical Co., Ltd. The arylalkylene-type epoxy resin is an epoxy resin having a combination of one or more aromatic groups and an alkylene group such as a methylene group in a repeating unit, and is excellent in heat resistance, flame retardancy, and mechanical strength.

上述氰酸酯樹脂係例如可藉由使鹵化氰化合物與苯酚類進行反應而獲得。作為氰酸酯樹脂之具體例,例如可列舉出苯酚酚醛清漆型氰酸酯樹脂、甲酚酚醛清漆型氰酸酯樹脂等之酚醛清漆型氰酸酯樹脂、萘酚芳烷基型氰酸酯樹脂、二環戊二烯型氰酸酯樹脂、聯苯型氰酸酯樹脂、雙酚A型氰酸酯樹脂、雙酚AD型氰酸酯樹脂、四甲基雙酚F型氰酸酯樹脂等雙酚型氰酸酯樹脂等。 The cyanate resin can be obtained, for example, by reacting a halogenated cyanide compound with a phenol. Specific examples of the cyanate resin include a novolak type cyanate resin such as a phenol novolak type cyanate resin, a cresol novolac type cyanate resin, and a naphthol aralkyl type cyanate. Resin, dicyclopentadiene type cyanate resin, biphenyl type cyanate resin, bisphenol A type cyanate resin, bisphenol AD type cyanate resin, tetramethyl bisphenol F type cyanate resin A bisphenol type cyanate resin or the like.

該等之中,尤其是以包含酚醛清漆型氰酸酯樹脂、萘酚芳 烷基型氰酸酯樹脂、二環戊二烯型氰酸酯樹脂、或雙酚型氰酸酯樹脂為佳。此外,較佳的是將上述氰酸酯樹脂於樹脂組成物之全固形分中含有10重量%以上。藉此,則可提升預浸體之耐熱性(玻璃轉移溫度、熱分解溫度)。又,可降低預浸體之熱膨脹係數(尤其是預浸體在厚度方向之熱膨脹係數)。透過使預浸體在厚度方向之熱膨脹係數降低,則可減輕多層印刷佈線之應力應變。此外,在具有細微層間連接部之多層印刷佈線板中,可大幅提高其連接可靠性。 Among these, especially the novolac type cyanate resin, naphthol aryl An alkyl type cyanate resin, a dicyclopentadiene type cyanate resin, or a bisphenol type cyanate resin is preferred. Further, it is preferred that the cyanate resin is contained in an amount of 10% by weight or more based on the total solid content of the resin composition. Thereby, the heat resistance (glass transition temperature, thermal decomposition temperature) of the prepreg can be improved. Further, the coefficient of thermal expansion of the prepreg (especially the coefficient of thermal expansion of the prepreg in the thickness direction) can be lowered. By reducing the coefficient of thermal expansion of the prepreg in the thickness direction, the stress strain of the multilayer printed wiring can be alleviated. Further, in the multilayer printed wiring board having the fine interlayer connection portion, the connection reliability can be greatly improved.

作為酚醛清漆型氰酸酯樹脂中之較佳者,可舉出有以下述式(1)所示之酚醛清漆型氰酸酯樹脂。此情形下,較佳的是使用重量平均分子量大之酚醛清漆型氰酸酯樹脂與重量平均分子量小之酚醛清漆型氰酸酯樹脂的組合。重量平均分子量大之酚醛清漆型氰酸酯樹脂之重量平均分子量係以2000以上為佳,以2000~10,000更佳,以2,200~3,500再更佳。又,重量平均分子量小之酚醛清漆型氰酸酯樹脂之重量平均分子量係以1500以下為佳,以200~1300更佳。另外,本實施形態之重量平均分子量係藉由聚苯乙烯換算之凝膠層析法進行測量之數值。 The preferred one of the novolac type cyanate resins is a novolac type cyanate resin represented by the following formula (1). In this case, it is preferred to use a combination of a novolac type cyanate resin having a large weight average molecular weight and a novolak type cyanate resin having a small weight average molecular weight. The weight average molecular weight of the novolac type cyanate resin having a large weight average molecular weight is preferably 2,000 or more, more preferably from 2,000 to 10,000, still more preferably from 2,200 to 3,500. Further, the weight average molecular weight of the novolac type cyanate resin having a small weight average molecular weight is preferably 1,500 or less, more preferably 200 to 1300. Further, the weight average molecular weight of the present embodiment is a value measured by gel chromatography in terms of polystyrene.

式(1)中,n係表示0以上之整數。 In the formula (1), n represents an integer of 0 or more.

又,作為氰酸酯樹脂,亦可適當使用以下述一般式(2)所示之氰酸酯樹脂。以下述一般式(2)所示之氰酸酯樹脂係將依α-萘酚、β-萘酚等萘酚類與對荏二醇、α,α’-二甲氧基-對二甲苯、1,4-二(2-羥基-2-丙基)苯等之反應所獲得之萘酚芳烷基樹脂與氰酸予以縮合而獲得者。一般式(2)之n係1以上,進一步以10以下為佳。於n為10以下時,因為樹脂黏度不會增加,對基材之含浸性良好,故而不會使作為積層板之性能降低。又,於合成時不易引起分子內聚合,可提升水洗時之分液性,可防止產量降低。 Further, as the cyanate resin, a cyanate resin represented by the following general formula (2) can be suitably used. The cyanate resin represented by the following general formula (2) is a naphthol such as α-naphthol or β-naphthol and p-nonanediol, α,α'-dimethoxy-p-xylene, The naphthol aralkyl resin obtained by the reaction of 1,4-bis(2-hydroxy-2-propyl)benzene or the like is obtained by condensation with cyanic acid. The n of the general formula (2) is 1 or more, and more preferably 10 or less. When n is 10 or less, since the resin viscosity does not increase and the impregnation property to the substrate is good, the performance as a laminate is not lowered. Further, it is less likely to cause intramolecular polymerization during the synthesis, and the liquid separation property at the time of washing can be improved, and the yield can be prevented from being lowered.

式(2)中,R係表示氫原子或甲基,n係表示1以上之整數。 In the formula (2), R represents a hydrogen atom or a methyl group, and n represents an integer of 1 or more.

此外,作為氰酸酯樹脂,亦可適當使用以下述式(3)所示之二環戊二烯型氰酸酯樹脂。 Further, as the cyanate resin, a dicyclopentadiene type cyanate resin represented by the following formula (3) can be suitably used.

式(3)中,n係表示0~8之整數。 In the formula (3), n represents an integer of 0 to 8.

又,就耐熱性之觀點而言,亦可於上述熱硬化性樹脂組成 物中含有順丁烯二醯亞胺化合物。順丁烯二醯亞胺化合物係一分子中具有一個以上順丁烯二醯亞胺基之化合物,則沒有特別限定。作為其具體例,係可列舉有N-苯基順丁烯二醯亞胺、N-羥基苯基順丁烯二醯亞胺、雙(4-順丁烯二醯亞胺基苯基)甲烷、2,2-雙{4-(4-順丁烯二醯亞胺基苯氧基)-苯基}丙烷、雙(3,5-二甲基-4-順丁烯二醯亞胺基苯基)甲烷、雙(3-乙基-5-甲基-4-順丁烯二醯亞胺基苯基)甲烷、雙(3,5-二乙基-4-順丁烯二醯亞胺基苯基)甲烷、聚苯基甲烷順丁烯二醯亞胺、該等順丁烯二醯亞胺化合物之預聚物或順丁烯二醯亞胺化合物與胺化合物之預聚物等。 Further, in terms of heat resistance, it may also be composed of the above thermosetting resin. The product contains a maleimide compound. The maleimide compound is not particularly limited as long as it has one or more maleimide groups in one molecule. Specific examples thereof include N-phenyl maleimide, N-hydroxyphenyl maleimide, and bis(4-maleoximineiphenyl)methane. , 2,2-bis{4-(4-maleoximineiminophenoxy)-phenyl}propane, bis(3,5-dimethyl-4-northenylenediamine Phenyl)methane, bis(3-ethyl-5-methyl-4-maleimidoiminophenyl)methane, bis(3,5-diethyl-4-s-butenylene) Aminophenyl)methane, polyphenylmethane maleimide, a prepolymer of the maleimide compound or a prepolymer of a maleimide compound and an amine compound, etc. .

又,就與金屬箔之密接性觀點而言,亦可於上述熱硬化性樹脂組成物中含有聚醯亞胺樹脂、聚醯胺樹脂、聚醯胺醯亞胺樹脂或苯氧基樹脂。 Moreover, in view of the adhesion to the metal foil, the thermosetting resin composition may contain a polyimide resin, a polyamide resin, a polyamide resin, or a phenoxy resin.

樹脂組成物中之熱硬化性樹脂的量係在樹脂組成物之全固形分中,以10~90重量%為佳,以20~70重量%更佳,以25~50重量%再更佳。另外,樹脂組成物中之熱硬化性樹脂的量係可因應其目的而適當調整,沒有特別限定。 The amount of the thermosetting resin in the resin composition is preferably from 10 to 90% by weight, more preferably from 20 to 70% by weight, still more preferably from 25 to 50% by weight, based on the total solid content of the resin composition. In addition, the amount of the thermosetting resin in the resin composition can be appropriately adjusted depending on the purpose, and is not particularly limited.

又,於使用環氧樹脂及/或氰酸酯樹脂作為熱硬化性樹脂之情形下,環氧樹脂之含有量係於樹脂組成物之全固形分中,以5~50重量%為佳,以5~25重量%更佳。又,氰酸酯樹脂之含有量係於樹脂組成物之全固形分中,以5~50重量%為佳,以10~25重量%更佳。 Further, in the case where an epoxy resin and/or a cyanate resin is used as the thermosetting resin, the content of the epoxy resin is in the total solid content of the resin composition, preferably 5 to 50% by weight, 5~25% by weight is better. Further, the content of the cyanate resin is in the total solid content of the resin composition, preferably 5 to 50% by weight, more preferably 10 to 25% by weight.

此,上述硬化性脂組可就不及明之效果的範圍含有難燃劑,而由環境觀點而言,則是以非鹵素系難燃劑為佳。作為難燃劑,例如可列舉出有機磷系難燃劑、有機系含氮磷化合物、氮化合物、聚矽氧系難燃劑、或金屬氫氧化物等。作為有機磷系難燃劑,可列舉有三光(股)製之HCA、HCAHQ、HCA-NQ等膦化合物、clariant(股)製之OP930、大八化學(股)製之PX200等磷酸酯化合物、東都化成(股)製之FX289等含磷環氧樹脂或東都化成(股)製之ERF001等含磷苯氧樹脂等。作為有機系含氮磷化合物,可列舉有大塚化學(股)製之SPB100、SPE100等磷氮基(phosphazene)化合物等。作為金屬氫氧化物,可列舉有住友化學(股)製之CL310、昭和電工(股)製之HP-350等氫氧化鋁等。 Therefore, the curable lipid group may contain a flame retardant in a range that does not have the effect, and from the environmental viewpoint, a non-halogen flame retardant is preferred. Examples of the flame retardant include an organic phosphorus-based flame retardant, an organic nitrogen-containing phosphorus compound, a nitrogen compound, a polyoxygenated flame retardant, or a metal hydroxide. Examples of the organophosphorus-based flame retardant include a phosphine compound such as HCA, HCAHQ, and HCA-NQ manufactured by Sanko Co., Ltd., OP930 manufactured by Clariant Co., Ltd., and a phosphate compound such as PX200 manufactured by Daiha Chemical Co., Ltd. A phosphorus-containing epoxy resin such as FX289 manufactured by Dongdu Chemicals Co., Ltd. or a phosphorus-containing phenoxy resin such as ERF001 manufactured by Tosho Kasei Co., Ltd. Examples of the organic nitrogen-containing phosphorus compound include phosphazene compounds such as SPB100 and SPE100 manufactured by Otsuka Chemical Co., Ltd. Examples of the metal hydroxides include CL310 manufactured by Sumitomo Chemical Co., Ltd., and aluminum hydroxide such as HP-350 manufactured by Showa Denko.

另外,亦可以於熱硬化性樹脂組成物中並用硬化劑。例如,若熱硬化性樹脂為環氧樹脂或氰酸酯樹脂,則可使用苯酚樹脂、或環氧樹脂或氰酸酯樹脂之硬化促進劑。上述苯酚樹脂並沒有特別限定,例如可列舉有苯酚酚醛清漆樹脂、甲酚酚醛清漆樹脂、雙酚A酚醛清漆樹脂、芳基伸烷基型酚醛清漆樹脂等酚醛清漆型苯酚樹脂、未改質之可溶酚醛苯酚樹脂、桐油、亞麻油、核桃油等經改質之油改質可溶酚醛苯酚樹脂等可溶酚醛型苯酚樹脂等。作為上述苯酚樹脂,較佳的是苯酚酚醛清漆樹脂或甲酚酚醛清漆樹脂。其中,就吸濕 焊錫耐熱性之觀點而言,較佳的是聯苯基芳烷基改質苯酚酚醛清漆樹脂。 Further, a curing agent may be used in combination with the thermosetting resin composition. For example, if the thermosetting resin is an epoxy resin or a cyanate resin, a curing accelerator for a phenol resin or an epoxy resin or a cyanate resin can be used. The phenol resin is not particularly limited, and examples thereof include a phenol novolak resin, a cresol novolak resin, a bisphenol A novolak resin, and an aryl acetal phenol resin such as a novolac type phenol resin, which are not modified. A resol-type phenol resin such as a phenolic phenol resin, a tung oil, a linseed oil or a walnut oil, which is modified by a modified phenolic phenol resin. As the phenol resin, a phenol novolak resin or a cresol novolak resin is preferred. Among them, moisture absorption From the viewpoint of solder heat resistance, a biphenyl aralkyl modified phenol novolak resin is preferred.

可單獨使用該等中之一種,或並用具有相異重量平均分子量之兩種以上,或亦可並用一種或兩種以上與該等之預聚物。 One of these may be used singly or in combination of two or more kinds having different weight average molecular weights, or one or two or more kinds of the prepolymers may be used in combination.

上述硬化促進劑係沒有特別限定,例如可列舉有環烷酸鋅等之有機金屬鹽、二吖聯環[2,2,2]辛烷等之3級胺類、2-乙基-4-乙基咪唑等咪唑類、壬基酚等苯酚化合物、對甲苯磺酸等有機酸、鎓(onium)鹽化合物等或其混合物。包含該等中之衍生物,係可單獨使用一種,包含該等中之衍生物,係亦可並用兩種以上。 The hardening accelerator is not particularly limited, and examples thereof include an organic metal salt such as zinc naphthenate, a tertiary amine such as di-bicyclo[2,2,2]octane, and 2-ethyl-4-. An imidazole such as ethyl imidazole or a phenol compound such as nonylphenol; an organic acid such as p-toluenesulfonic acid, an onium salt compound or the like or a mixture thereof. The derivative may be used alone or in combination of two or more of them.

就低熱膨脹與機械強度之觀點而言,較佳的是於樹脂組成物中含有無機填充材料。無機填充材料並沒有特別限定,例如可列舉有滑石、燒成黏土、未燒成黏土、雲母、玻璃等矽酸鹽、氧化鈦、氧化鋁、二氧化矽、熔融二氧化矽等氧化物、碳酸鈣、碳酸鎂、水滑石等碳酸鹽、氫氧化鋁、水鋁土(AlO(OH),一般稱為[擬]水鋁土之水鋁土(亦即,Al2O3.xH2O,此處之x=1至2))、氫氧化鎂、氫氧化鈣等金屬氫氧化物、硫酸鋇、硫酸鈣、亞硫酸鈣等硫酸鹽或亞硫酸鹽、硼酸鋅、甲基硼酸鋇、硼酸鋁、硼酸鈣、硼酸鈉等硼酸鹽、氮化鋁、氮化硼、氮化矽、氮化碳等氮化物、鈦酸鍶、鈦酸鋇等鈦酸鹽等。可單獨使用該等中之一種,亦可並用兩 種以上。 From the viewpoint of low thermal expansion and mechanical strength, it is preferred to contain an inorganic filler in the resin composition. The inorganic filler is not particularly limited, and examples thereof include talc, calcined clay, uncalcined clay, mica, glass, and the like, titanium oxide, aluminum oxide, cerium oxide, molten cerium oxide, and the like. Carbonate such as calcium, magnesium carbonate, hydrotalcite, aluminum hydroxide, bauxite (AlO(OH), commonly known as bauxite of bauxite) (ie, Al 2 O 3 .xH 2 O, Here, x=1 to 2)), a metal hydroxide such as magnesium hydroxide or calcium hydroxide, a sulfate or sulfite such as barium sulfate, calcium sulfate or calcium sulfite, zinc borate, barium methylborate or boric acid. A borate such as aluminum, calcium borate or sodium borate; a nitride such as aluminum nitride, boron nitride, tantalum nitride or carbon nitride; or a titanate such as barium titanate or barium titanate. One of these may be used alone, or two or more types may be used in combination.

該等之中,較佳的是氫氧化鎂、氫氧化鋁、水鋁土、二氧化矽、熔融二氧化矽、滑石、燒成滑石、氧化鋁。就低熱膨脹性及絕緣可靠性之觀點而言,特別以二氧化矽為佳,而球狀熔融二氧化矽更佳。又,就耐燃性之觀點而言,較佳的是氫氧化鋁。於樹脂組成物中高濃度填充有無機填充材料之情形下,鑽孔磨耗性會惡化,而藉由使用水鋁土作為無機填充材料,則鑽孔磨耗性變得良好。 Among these, magnesium hydroxide, aluminum hydroxide, bauxite, cerium oxide, molten cerium oxide, talc, calcined talc, and alumina are preferred. From the viewpoint of low thermal expansion property and insulation reliability, in particular, cerium oxide is preferred, and spherical molten cerium oxide is more preferable. Further, from the viewpoint of flame resistance, aluminum hydroxide is preferred. In the case where the resin composition is filled with the inorganic filler at a high concentration, the drilling wearability is deteriorated, and by using the alumina as the inorganic filler, the drilling wearability is improved.

無機填充材料之粒徑並沒有特別限定,可使用平均粒徑為單分散之無機填充材料,亦可使用平均粒徑為多分散之無機填充材料。此外,也可以並用平均粒徑為單分散及/或多分散之無機填充材料一種或兩種以上。另外,本案說明書中,所謂的平均粒徑為單分散係意指粒徑之標準偏差在10%以下者。又,所謂的平均粒徑為多分散係意指粒徑之標準偏差在10%以上者。 The particle diameter of the inorganic filler is not particularly limited, and an inorganic filler having an average particle diameter of monodisperse may be used, or an inorganic filler having an average particle diameter of polydisperse may be used. Further, one type or two or more types of inorganic fillers having an average particle diameter of monodisperse and/or polydisperse may be used in combination. Further, in the present specification, the term "average particle diameter" as a monodisperse system means that the standard deviation of the particle diameter is 10% or less. Further, the fact that the average particle diameter is a polydisperse means that the standard deviation of the particle diameter is 10% or more.

上述無機填充材料之平均粒徑係沒有特別限定,較佳的是0.1μm~5.0μm,特佳的是0.1μm~3.0μm。經由將無機填充材料之粒徑作成上述下限值以上,則可抑制樹脂組成物之黏度變高,可使預浸體製作時之作業性良好。又,透過將無機填充材料之粒徑作成上述上限值以下,則可抑制在樹脂組成物中引起無機填充材料之沉降等現象。另外,平均粒徑係可使用雷射繞射/散亂式粒度分布測量裝置(島津製作所 SALD-7000等一般性機器)進行測量。 The average particle diameter of the inorganic filler is not particularly limited, but is preferably 0.1 μm to 5.0 μm, and particularly preferably 0.1 μm to 3.0 μm. When the particle diameter of the inorganic filler is at least the above lower limit value, the viscosity of the resin composition can be suppressed from increasing, and the workability at the time of preparation of the prepreg can be improved. In addition, when the particle diameter of the inorganic filler is not more than the above upper limit, it is possible to suppress the phenomenon of sedimentation of the inorganic filler in the resin composition. In addition, the average particle size can be a laser diffraction/scatter type particle size distribution measuring device (Shimadzu Corporation) Measurements are performed on general machines such as SALD-7000.

上述無機填充材料之含有量係沒有特別限定,較佳的是於樹脂組成物之全固形分中為10~90重量%,更佳的是30~80重量%,再更佳的是50~75重量%。於樹脂組成物中含有氰酸酯樹脂及/或其預聚物時,上述無機填充材料之含有量較佳的是於樹脂組成物之全固形分中為50~75重量%。藉由將無機填充材料之含有量作成上述上限值以下,則可使樹脂組成物之流動性良好。又,透過將無機填充材料之含有量作成上述下限值以上,則可充分提高由樹脂組成物所構成之絕緣層的強度。 The content of the inorganic filler is not particularly limited, but is preferably from 10 to 90% by weight, more preferably from 30 to 80% by weight, even more preferably from 50 to 75, in the total solid content of the resin composition. weight%. When the cyanate resin and/or its prepolymer is contained in the resin composition, the content of the inorganic filler is preferably from 50 to 75% by weight based on the total solid content of the resin composition. When the content of the inorganic filler is not more than the above upper limit, the fluidity of the resin composition can be improved. In addition, when the content of the inorganic filler is at least the above lower limit value, the strength of the insulating layer composed of the resin composition can be sufficiently increased.

在樹脂組成物中,亦可進一步含有偶合劑。偶合劑係為了提升熱硬化性樹脂與無機填充材料之界面的濕潤性而加以調配。藉由提升熱硬化性樹脂與無機填充材料之界面的濕潤性,則可使樹脂及無機填充材料相對於基材而均勻固定,可改良耐熱性,尤其是吸濕後之焊錫耐熱性。 Further, a coupling agent may be further contained in the resin composition. The coupling agent is formulated to improve the wettability of the interface between the thermosetting resin and the inorganic filler. By improving the wettability at the interface between the thermosetting resin and the inorganic filler, the resin and the inorganic filler can be uniformly fixed to the substrate, and the heat resistance, particularly the solder heat resistance after moisture absorption, can be improved.

上述偶合劑並沒有特別限定,例如可列舉有環氧矽烷偶合劑、陽離子性矽烷偶合劑、胺基矽烷偶合劑、鈦酸酯系偶合劑、聚矽氧油型偶合劑等。藉由使用該等作為偶合劑,則可提高與無機填充材料之界面的濕潤性。因此,可進一步提升樹脂組成物之耐熱性。 The coupling agent is not particularly limited, and examples thereof include an epoxy decane coupling agent, a cationic decane coupling agent, an amino decane coupling agent, a titanate coupling agent, and a polyasoxy oil type coupling agent. By using these as a coupling agent, the wettability at the interface with the inorganic filler can be improved. Therefore, the heat resistance of the resin composition can be further improved.

上述偶合劑之添加量並沒有特別限定,相對於無機填充材料100重量份,以0.05~3重量份為佳,特別以0.1~2重量 份為佳。透過將偶合劑之含有量設在上述下限值以上,則可充分覆蓋無機填充材料,而得以充分獲得提升耐熱性之效果。又,透過將偶合劑之含有量設在上述上限值以下,則可抑制對反應給予影響。藉此,可抑制彎曲強度等之降低。 The amount of the coupling agent to be added is not particularly limited, and is preferably 0.05 to 3 parts by weight, particularly 0.1 to 2 parts by weight based on 100 parts by weight of the inorganic filler. It is better. When the content of the coupling agent is at least the above lower limit value, the inorganic filler can be sufficiently covered, and the effect of improving heat resistance can be sufficiently obtained. Moreover, by setting the content of the coupling agent to be equal to or lower than the above upper limit value, it is possible to suppress the influence on the reaction. Thereby, the reduction in bending strength or the like can be suppressed.

於樹脂組成物中,因應需要亦可以添加消泡劑、勻平劑、紫外線吸收劑、發泡劑、抗氧化劑、難燃劑、聚矽氧粉末等難燃輔助劑、離子捕捉劑等上述成分以外之添加物。 In the resin composition, an antifoaming agent, a leveling agent, a UV absorber, a foaming agent, an antioxidant, a flame retardant, a flame retardant auxiliary agent such as a polyfluorene oxide powder, an ion trapping agent, and the like may be added as needed. Additions other than those.

樹脂組成物係就可輕易實現預浸體之低線膨脹化、高剛性化及高耐熱化之觀點而言,較佳的是至少含有環氧樹脂、氰酸酯樹脂及無機填充材料。其中,在樹脂組成物之固形分中,較佳的是含有環氧樹脂5~50重量%、氰酸酯樹脂5~50重量%及無機填充材料10~90重量%,更佳的是環氧樹脂5~25重量%、氰酸酯樹脂10~25重量%及無機填充材料30~80重量%。 The resin composition preferably contains at least an epoxy resin, a cyanate resin, and an inorganic filler from the viewpoint of easily achieving low-line expansion, high rigidity, and high heat resistance of the prepreg. Among them, in the solid content of the resin composition, it is preferably 5 to 50% by weight of the epoxy resin, 5 to 50% by weight of the cyanate resin, and 10 to 90% by weight of the inorganic filler, more preferably epoxy. The resin is 5 to 25% by weight, the cyanate resin is 10 to 25% by weight, and the inorganic filler is 30 to 80% by weight.

針對印刷佈線板用基板1之表面,可進行去渣處理。藉此,可去除產生於印刷佈線板用基板1之表面的殘渣。去渣處理並沒有特別限定,係可藉由使用具有有機物分解作用之氧化劑溶液等的濕式法、或針對成為對象物者照射直接氧化作用強之活性種(電漿、自由基等)而去除有機物殘渣的電漿法等乾式法等公知方法而進行。 The surface of the substrate 1 for printed wiring boards can be subjected to slag removal treatment. Thereby, the residue generated on the surface of the printed wiring board substrate 1 can be removed. The slag-removing treatment is not particularly limited, and it can be removed by a wet method using an oxidizing agent solution having an organic decomposition action or an active species (plasma, radical, etc.) which is irradiated with a direct oxidation effect to a target object. The organic method is carried out by a known method such as a plasma method such as a plasma method.

濕式法之去渣處理係例如依下述進行。首先,對樹脂表面施以膨潤處理。其次,進行依鹼處理之蝕刻。其後,對樹脂 表面施以中和處理。 The wet slag treatment is carried out, for example, as follows. First, the surface of the resin is subjected to a swelling treatment. Next, etching by alkali treatment is performed. Thereafter, the resin The surface is treated with neutralization.

接著,如圖1(b)所示般,於步驟(b)中,在表面為由樹脂組成物所構成之印刷佈線板用基板1之該表面上進行無電解鍍覆,而形成無電解鍍覆層2。無電解鍍覆係在附著有鈀等觸媒之鍍覆對象物的表面,可藉由使接觸含有進行鍍覆金屬離子之電解液(鍍覆液)的化學鍍覆法等公知方法而進行。於本實施形態中,作為無電解鍍覆,例如可進行無電解銅鍍覆。 Next, as shown in FIG. 1(b), in the step (b), electroless plating is performed on the surface of the substrate 1 for a printed wiring board having a resin composition, and electroless plating is formed. Cladding 2. The electroless plating is performed on a surface of a plating target to which a catalyst such as palladium is adhered, by a known method such as an electroless plating method in which an electrolytic solution (plating solution) for plating metal ions is contacted. In the present embodiment, as the electroless plating, for example, electroless copper plating can be performed.

無電解鍍覆層2之厚度並沒有特別限定,以0.1μm以上且2μm以下為佳。透過將無電解鍍覆層2之厚度設為0.1μm以上,則可輕易進行下述電鍍步驟。又,透過將無電解鍍覆層2之厚度設為2μm以下,則成為可短時間下進行無電解鍍覆層2之形成。藉此,可圖謀作業效率的提升。 The thickness of the electroless plating layer 2 is not particularly limited, and is preferably 0.1 μm or more and 2 μm or less. By setting the thickness of the electroless plating layer 2 to 0.1 μm or more, the following plating step can be easily performed. Moreover, when the thickness of the electroless plating layer 2 is 2 μm or less, the formation of the electroless plating layer 2 can be performed in a short time. Thereby, the efficiency of the work can be improved.

接下來,進行第一加熱步驟。另外,第一加熱步驟係沒有限定在步驟(b)與步驟(c)之間進行,也可以在步驟(c)與步驟(d)之間進行。就將依下述順序所形成之導體電路層5之剝離強度進一步提升之觀點而言,第一加熱步驟係以於步驟(b)與步驟(c)之間進行為佳。 Next, a first heating step is performed. Further, the first heating step is not limited to the step (b) and the step (c), and may be carried out between the step (c) and the step (d). The first heating step is preferably carried out between step (b) and step (c) from the viewpoint of further improving the peel strength of the conductor circuit layer 5 formed in the following order.

第一加熱步驟之加熱處理的加熱溫度係以130~280℃為佳,以140~230℃為更佳。藉由加熱溫度在此範圍內,則可提升導體電路層5之剝離強度。 The heating temperature of the heat treatment in the first heating step is preferably 130 to 280 ° C, more preferably 140 to 230 ° C. By the heating temperature being within this range, the peel strength of the conductor circuit layer 5 can be improved.

第一加熱步驟之加熱處理並沒有特別限定,例如可藉由潔 淨烤爐等可導入氮(N2)之公知裝置進行。 The heat treatment in the first heating step is not particularly limited, and can be carried out, for example, by a known apparatus capable of introducing nitrogen (N 2 ), such as a clean oven.

第一加熱步驟之加熱處理係以於氧(O2)濃度為1000ppm以下之環境下進行為佳,以於氧(O2)濃度為500ppm以下之環境下進行為更佳。藉此,可防止構成導體電路層5之銅的氧化,而可提升導體電路層5之剝離強度。 The heat treatment in the first heating step is preferably carried out in an environment having an oxygen (O 2 ) concentration of 1000 ppm or less, and more preferably in an environment having an oxygen (O 2 ) concentration of 500 ppm or less. Thereby, oxidation of copper constituting the conductor circuit layer 5 can be prevented, and peeling strength of the conductor circuit layer 5 can be improved.

第一加熱步驟之加熱處理係進一步以於氮(N2)濃度為78%以上之環境下進行為佳,以於氮(N2)濃度為85%以上之環境下進行為更佳。藉此,可進一步提升導體電路層5之剝離強度。 The heat treatment in the first heating step is preferably carried out in an environment having a nitrogen (N 2 ) concentration of 78% or more, and more preferably in an environment having a nitrogen (N 2 ) concentration of 85% or more. Thereby, the peeling strength of the conductor circuit layer 5 can be further improved.

又,第一加熱步驟之加熱處理係可以在大氣壓下進行,也可以在減壓下進行。例如,於空氣環境下,藉由在3torr以下之減壓下進行加熱處理,則可減低氧濃度至1000ppm以下。又,於以氮取代空氣而在經提高氮濃度之環境下進行減壓之情形中,即便是在3torr以上,亦可以減低氧濃度至1000ppm以下。因此,可防止構成導體電路層5之銅的氧化,而可提升導體電路層之剝離強度。 Further, the heat treatment in the first heating step may be carried out under atmospheric pressure or under reduced pressure. For example, in an air atmosphere, by performing heat treatment under a reduced pressure of 3 torr or less, the oxygen concentration can be reduced to 1000 ppm or less. Further, in the case where the air is depressurized by replacing the air with nitrogen, the oxygen concentration can be reduced to 1000 ppm or less even at 3 torr or more. Therefore, the oxidation of the copper constituting the conductor circuit layer 5 can be prevented, and the peel strength of the conductor circuit layer can be improved.

此外,在第一加熱步驟中,將印刷佈線板用基板1予以加熱處理之時間係以30分鐘以上且300分鐘以下為佳。於進行加熱處理之時間在30分鐘以上之情形下,可充分獲得使導體電路層5之剝離強度提升的效果。又,於進行加熱處理之時間在300分鐘以下之情形下,則可實現良好的作業效率。 Further, in the first heating step, the time for heat-treating the printed wiring board substrate 1 is preferably 30 minutes or longer and 300 minutes or shorter. When the heat treatment time is 30 minutes or longer, the effect of improving the peel strength of the conductor circuit layer 5 can be sufficiently obtained. Moreover, in the case where the heat treatment time is 300 minutes or less, good work efficiency can be achieved.

再來,如圖1(c)所示般,在步驟(c)中,將具有開口之光阻遮罩3形成於無電解鍍覆層2上。 Further, as shown in FIG. 1(c), in step (c), a photoresist mask 3 having an opening is formed on the electroless plating layer 2.

藉由光阻遮罩3,而將無電解鍍覆層2中未形成有導體電路之區域予以遮罩。亦即,光阻遮罩3之開口內成為形成導體電路之區域。 The region of the electroless plating layer 2 where the conductor circuit is not formed is masked by the photoresist mask 3. That is, the inside of the opening of the photoresist mask 3 becomes a region where the conductor circuit is formed.

作為光阻遮罩3,並沒有特別限定。可使用公知材料。光阻遮罩3係例如可藉由感光性乾式薄膜等而構成。於使用感光性乾式薄膜作為光阻遮罩3之情形下,光阻遮罩3之形成係例如依下述進行。首先,將感光性乾式薄膜積層於無電解鍍覆層2。其次,於感光性乾式薄膜中,針對位於未形成導體電路之區域的部分予以曝光而進行光硬化。接著,利用顯影液將感光性乾式薄膜中之未曝光部予以溶解/去除。此時,殘存在無電解鍍覆層2上之已硬化的感光性乾式薄膜成為光阻遮罩3。 The photoresist mask 3 is not particularly limited. Known materials can be used. The photoresist mask 3 can be formed, for example, by a photosensitive dry film or the like. In the case where a photosensitive dry film is used as the photoresist mask 3, the formation of the photoresist mask 3 is performed, for example, as follows. First, a photosensitive dry film is laminated on the electroless plating layer 2. Next, in the photosensitive dry film, the portion which is located in a region where the conductor circuit is not formed is exposed to light hardening. Next, the unexposed portion of the photosensitive dry film is dissolved/removed by the developer. At this time, the cured photosensitive dry film remaining on the electroless plating layer 2 becomes the photoresist mask 3.

接著,如圖1(d)所示般,於步驟(d)中,針對光阻遮罩3之開口內施以厚厚的電鍍,藉以形成電鍍層4在電路形成部。 Next, as shown in FIG. 1(d), in step (d), thick plating is applied to the opening of the photoresist mask 3, whereby the plating layer 4 is formed in the circuit forming portion.

電鍍係可藉由將鍍覆對象物浸漬於鍍覆液中,並通以電流等公知方法而進行。 The plating can be carried out by immersing the object to be plated in the plating solution and applying a known method such as a current.

再來,如圖1(e)所示般,於步驟(e)中,去除光阻遮罩3。 Further, as shown in FIG. 1(e), in the step (e), the photoresist mask 3 is removed.

接下來,如圖1(f)所示般,於步驟(f)中,利用閃蝕將無電解鍍覆層2中之依平面視為與電鍍層4未重疊之部分予以選 擇性去除。亦即,去除掉位於未形成有導體電路之區域的無電解鍍覆層2。藉此,可使印刷佈線板用基板1上形成有導體電路層5。另外,閃蝕係可以藉由將過硫酸鈉等蝕刻液依噴霧等進行局部性蝕刻等公知方法而進行。 Next, as shown in FIG. 1(f), in the step (f), the plane in the electroless plating layer 2 is regarded as a portion which is not overlapped with the plating layer 4 by flash etching. Selective removal. That is, the electroless plating layer 2 located in a region where the conductor circuit is not formed is removed. Thereby, the conductor circuit layer 5 can be formed on the substrate 1 for printed wiring boards. Further, the flash etching can be carried out by a known method such as partial etching using an etching solution such as sodium persulfate by spraying or the like.

以下,亦將該步驟(f)稱為圖案狀蝕刻步驟。 Hereinafter, this step (f) is also referred to as a pattern etching step.

接著,進行第二加熱步驟。另外,第二加熱步驟係未限定在步驟(f)之後進行,亦可以於步驟(d)與步驟(e)之間或步驟(e)與步驟(f)之間進行。就可更提升導體電路層5之剝離強度之觀點而言,第二加熱步驟係以於步驟(f)之後進行為佳。 Next, a second heating step is performed. Further, the second heating step is not limited to be performed after the step (f), and may be carried out between the step (d) and the step (e) or between the step (e) and the step (f). From the viewpoint of further increasing the peel strength of the conductor circuit layer 5, the second heating step is preferably performed after the step (f).

第二加熱步驟之加熱處理的加熱溫度係以130~280℃為佳,以140~230℃為更佳。藉由加熱溫度在此範圍內,則可提升導體電路層5之剝離強度。 The heating temperature of the heat treatment in the second heating step is preferably 130 to 280 ° C, more preferably 140 to 230 ° C. By the heating temperature being within this range, the peel strength of the conductor circuit layer 5 can be improved.

第二加熱步驟之加熱處理並沒有特別限定,可與上述第一加熱步驟之加熱處理同樣地進行。 The heat treatment in the second heating step is not particularly limited, and can be carried out in the same manner as the heat treatment in the first heating step.

第二加熱步驟之加熱處理係以於氧(O2)濃度為1000ppm以下之環境下進行為佳,以於氧(O2)濃度為500ppm以下之環境下進行為更佳。藉此,可防止構成導體電路層5之銅的氧化,而可提升導體電路層5之剝離強度。 The heat treatment in the second heating step is preferably carried out in an environment having an oxygen (O 2 ) concentration of 1000 ppm or less, and more preferably in an environment having an oxygen (O 2 ) concentration of 500 ppm or less. Thereby, oxidation of copper constituting the conductor circuit layer 5 can be prevented, and peeling strength of the conductor circuit layer 5 can be improved.

第二加熱步驟之加熱處理係進一步以於氮(N2)濃度為78%以上之環境下進行為佳,以於氮(N2)濃度為85%以上之環境下進行為更佳。藉此,可進一步提升導體電路層5之剝離強度。 The heat treatment in the second heating step is preferably carried out in an environment having a nitrogen (N 2 ) concentration of 78% or more, and more preferably in an environment having a nitrogen (N 2 ) concentration of 85% or more. Thereby, the peeling strength of the conductor circuit layer 5 can be further improved.

又,第二加熱步驟之加熱處理係可以在大氣壓下進行,也可以在減壓下進行。例如,於空氣環境下,藉由在3torr以下之減壓下進行加熱處理,則可減低氧濃度至1000ppm以下。又,於以氮取代空氣而在經提高氮濃度之環境下進行減壓之情形中,即便是在3torr以上,亦可以減低氧濃度至1000ppm以下。因此,可防止構成導體電路層5之銅的氧化,而可提升導體電路層之剝離強度。 Further, the heat treatment in the second heating step may be carried out under atmospheric pressure or under reduced pressure. For example, in an air atmosphere, by performing heat treatment under a reduced pressure of 3 torr or less, the oxygen concentration can be reduced to 1000 ppm or less. Further, in the case where the air is depressurized by replacing the air with nitrogen, the oxygen concentration can be reduced to 1000 ppm or less even at 3 torr or more. Therefore, the oxidation of the copper constituting the conductor circuit layer 5 can be prevented, and the peel strength of the conductor circuit layer can be improved.

此外,在第二加熱步驟中,將印刷佈線板用基板1予以加熱處理之時間係以30分鐘以上且300分鐘以下為佳。於進行加熱處理之時間在30分鐘以上之情形下,可充分獲得使導體電路層5之剝離強度提升的效果。又,於進行加熱處理之時間在300分鐘以下之情形下,則可實現良好的作業效率。 Further, in the second heating step, the time for heat-treating the substrate 1 for a printed wiring board is preferably 30 minutes or longer and 300 minutes or shorter. When the heat treatment time is 30 minutes or longer, the effect of improving the peel strength of the conductor circuit layer 5 can be sufficiently obtained. Moreover, in the case where the heat treatment time is 300 minutes or less, good work efficiency can be achieved.

本實施形態之印刷佈線板之製造方法係如圖1所示般,不僅可適用在形成導體電路層於印刷佈線板用基板1之兩面的情形,亦可適用於僅在印刷佈線板用基板1之單面形成導體電路層。因此,根據本實施形態之印刷佈線板之製造方法,則可以製造單面印刷佈線板、兩面印刷佈線板及多層印刷佈線板之任一者。 As shown in FIG. 1, the method of manufacturing the printed wiring board of the present embodiment can be applied not only to the case where the conductor circuit layer is formed on both surfaces of the printed wiring board substrate 1, but also to the printed wiring board substrate 1 only. The conductor circuit layer is formed on one side. Therefore, according to the method of manufacturing a printed wiring board of the present embodiment, any of a single-sided printed wiring board, a double-sided printed wiring board, and a multilayer printed wiring board can be manufactured.

(實施例) (Example)

以下,根據實施例及比較例詳細說明本發明,但是本發明並不限定於此。 Hereinafter, the present invention will be described in detail based on examples and comparative examples, but the present invention is not limited thereto.

(積層板之製造例1) (Manufacturing Example 1 of laminated board)

將作為環氧樹脂之萘改質甲酚酚醛清漆環氧樹脂(DIC公司製,HP-5000)8.5重量份、作為苯酚硬化劑之聯苯基芳烷基型苯酚樹脂(明和化成股份有限公司,MEH7851-4H)8.5重量份、苯酚酚醛清漆型氰酸酯樹脂(LONZA公司製,Primaset PT-30)17重量份、球狀熔融二氧化矽(Admatechs公司製,SO-25R,平均粒徑0.5μm)65.5重量份、環氧矽烷(信越化學工業公司製,KBM-403)0.5重量份混合溶解於甲基乙基酮。其次,藉由使用高速攪拌裝置進行攪拌,並以不揮發成分(固形分)成為70重量%之方式調製樹脂清漆。 8.5 parts by weight of a naphthalene-modified cresol novolac epoxy resin (HP-5000, manufactured by DIC Corporation), and a biphenyl aralkyl type phenol resin (Minghe Chemical Co., Ltd.) as a phenol curing agent MEH7851-4H) 8.5 parts by weight, phenol novolac type cyanate resin (Primaset PT-30, manufactured by LONZA Co., Ltd.), 17 parts by weight, spherical molten cerium oxide (SO-25R, Admatechs, average particle diameter 0.5 μm) 65.5 parts by weight of epoxy decane (KBM-403, manufactured by Shin-Etsu Chemical Co., Ltd.) was mixed and dissolved in methyl ethyl ketone. Next, the resin varnish was prepared by stirring using a high-speed stirring device and making the nonvolatile content (solid content) 70% by weight.

接著,在將上述樹脂清漆含浸於玻璃織布(厚度87μm,日東紡製E玻璃織布,WEA-2116)之後,於150℃的加熱爐中進行乾燥2分鐘。藉此,獲得預浸體中之清漆固形分約50重量%之預浸體。 Then, the resin varnish was impregnated into a glass woven fabric (thickness: 87 μm, E-glass woven fabric manufactured by Nitto Bose, WEA-2116), and then dried in a heating furnace at 150 ° C for 2 minutes. Thereby, a prepreg having a solid content of the varnish in the prepreg of about 50% by weight was obtained.

接下來,於將上述預浸體重疊兩片而成之積層體的兩面上,重疊12μm銅箔(三井金屬礦業公司製,3EC-VLP箔),並於壓力3MPa、溫度220℃下進行加熱加壓成形2小時。藉此,獲得厚度0.20mm之絕緣層兩面上具有銅箔之積層板。 Next, 12 μm of copper foil (3EC-VLP foil, manufactured by Mitsui Mining and Mining Co., Ltd.) was superposed on both sides of the laminate in which the prepreg was superposed on two sheets, and heated at a pressure of 3 MPa and a temperature of 220 °C. Press forming for 2 hours. Thereby, a laminate having copper foil on both sides of the insulating layer having a thickness of 0.20 mm was obtained.

(積層板之製造例2) (Manufacturing Example 2 of laminated board)

將作為環氧樹脂之聯苯基芳烷基型環氧樹脂(日本化藥公司製,NC-3000)11重量份、雙順丁烯二醯亞胺化合物(KI化成工業公司製,BMI-70)20重量份、4,4’-二胺基二苯基甲 烷3.5重量份、氫氧化鋁(昭和電工製HP-360)65重量份、環氧矽烷(信越化學工業公司製,KBM-403)0.5重量份混合/溶解於甲基乙基酮中。其次,藉由使用高速攪拌裝置進行攪拌,並以不揮發成分(固形分)成為70重量%之方式調製樹脂清漆。 11 parts by weight of a biphenyl aralkyl type epoxy resin (NC-3000, manufactured by Nippon Kayaku Co., Ltd.) as an epoxy resin, and a bis-butylene diimide compound (BMI-70, manufactured by KI Chemical Industry Co., Ltd.) 20 parts by weight of 4,4'-diaminodiphenyl 3.5 parts by weight of alkane, 65 parts by weight of aluminum hydroxide (HP-360 manufactured by Showa Denko), and 0.5 parts by weight of epoxy decane (KBM-403, manufactured by Shin-Etsu Chemical Co., Ltd.) were mixed/dissolved in methyl ethyl ketone. Next, the resin varnish was prepared by stirring using a high-speed stirring device and making the nonvolatile content (solid content) 70% by weight.

接著,在將上述樹脂清漆含浸於玻璃織布(厚度87μm,日東紡製E玻璃織布,WEA-2116)之後,於150℃的加熱爐中進行乾燥2分鐘。藉此,獲得預浸體中之清漆固形分約50重量%之預浸體。 Then, the resin varnish was impregnated into a glass woven fabric (thickness: 87 μm, E-glass woven fabric manufactured by Nitto Bose, WEA-2116), and then dried in a heating furnace at 150 ° C for 2 minutes. Thereby, a prepreg having a solid content of the varnish in the prepreg of about 50% by weight was obtained.

接下來,於將上述預浸體重疊兩片而成之積層體的兩面,重疊12μm銅箔(三井金屬礦業公司製,3EC-VLP箔),並於壓力3MPa、溫度220℃下進行加熱加壓成形2小時。藉此,獲得厚度0.20mm之絕緣層兩面具有銅箔之積層板。 Next, 12 μm of copper foil (3EC-VLP foil, manufactured by Mitsui Mining and Mining Co., Ltd.) was superposed on both sides of the laminate in which the prepreg was superposed on two sheets, and heated and pressurized at a pressure of 3 MPa and a temperature of 220 °C. Formed for 2 hours. Thereby, a laminate having copper foil on both sides of the insulating layer having a thickness of 0.20 mm was obtained.

(實施例1) (Example 1)

將製造例1所獲得之積層板所具有之銅箔予以全面蝕刻而去除,依目標膜厚1μm形成無電解鍍覆層(上村工業公司製,Through-copper PEA製程)於已露出之樹脂表面。接下來,於空氣環境下(氧濃度約21%,氮濃度約78%,大氣壓)、150℃下加熱處理30分鐘,藉以進行第一加熱步驟。第一加熱步驟後,藉由熱滾筒層合機將厚度25μm之紫外線感光性乾式薄膜(旭化成公司製,Sunfort UFG-255)貼附在該無電解鍍覆層之表面。接著,進行描繪有最小線寬度/線 間為20/20μm及10mm×150mm(剝離強度測量部位)之圖案之玻璃遮罩(TOPIC公司製)的位置照合。再者,使用該剝離遮罩藉由曝光裝置(小野測器EV-0800)將紫外線感光性乾式薄膜予以曝光。接著,將已曝光之紫外線感光性乾式薄膜利用碳酸蘇打水溶液進行顯影。藉此,形成光阻遮罩。 The copper foil of the laminated board obtained in the manufacturing example 1 was completely etched and removed, and an electroless plating layer (Tough-copper PEA process manufactured by Uemura Kogyo Co., Ltd.) was formed on the surface of the exposed resin in accordance with the target film thickness of 1 μm. Next, the first heating step was carried out by heating in an air atmosphere (oxygen concentration: about 21%, nitrogen concentration: about 78%, atmospheric pressure) at 150 ° C for 30 minutes. After the first heating step, an ultraviolet photosensitive dry film (Sunfort UFG-255, manufactured by Asahi Kasei Co., Ltd.) having a thickness of 25 μm was attached to the surface of the electroless plating layer by a hot roll laminator. Next, draw the minimum line width/line The position of the glass mask (manufactured by TOPIC Corporation) of the pattern of 20/20 μm and 10 mm × 150 mm (peeling strength measurement site) was taken. Further, the ultraviolet photosensitive dry film was exposed by an exposure apparatus (Ono EV-0800) using the peeling mask. Next, the exposed ultraviolet photosensitive dry film was developed with an aqueous solution of soda carbonate. Thereby, a photoresist mask is formed.

接下來,將無電解鍍覆層作為給電層電極,依3A/dm2條件下進行電解銅鍍覆(奧野製藥公司製81-HL)25分鐘,形成厚度約20μm之銅佈線的圖案。再者,使用剝離機,藉由單乙醇胺溶液(三菱氣體化學公司製R-100)將上述光阻遮罩予以剝離。然後,將屬於給電層之無電解鍍覆層予以閃蝕(荏原電產公司製SAC-702M與SAC-701R35之純水溶液)而加以去除,形成(圖案狀蝕刻步驟)L/S=20/20μm及10mm×150mm(剝離強度測量部位)之圖案,獲得印刷佈線板。 Next, an electroless plating layer was used as an electrode layer electrode, and electrolytic copper plating (81-HL manufactured by Okuno Chemical Co., Ltd.) was carried out for 25 minutes under conditions of 3 A/dm 2 to form a pattern of a copper wiring having a thickness of about 20 μm. Further, the photoresist mask was peeled off by a monoethanolamine solution (R-100, manufactured by Mitsubishi Gas Chemical Co., Ltd.) using a peeling machine. Then, the electroless plating layer belonging to the power supply layer is subjected to flash etching (a pure aqueous solution of SAC-702M and SAC-701R35 manufactured by Ebara Electric Co., Ltd.) to be removed, and formed (pattern etching step) L/S=20/20 μm. And a pattern of 10 mm × 150 mm (peeling strength measurement portion) to obtain a printed wiring board.

(實施例2) (Example 2)

將製造例1所獲得之積層板所具有之銅箔予以全面蝕刻而去除,依目標膜厚1μm形成無電解鍍覆層(上村工業公司製,Through-copper PEA製程)於已露出之樹脂表面。接下來,進行作為樹脂表面膨潤處理(SW處理)之將上述積層板於液溫60℃之市售氫氧化鈉與乙二醇系溶劑含有液(Atotech公司製,Swelling Dip Securiganth P建浴液)之混合液(pH12)浸漬2分鐘並水洗3次。接著,進行作為鹼性處理 (ME處理)之將上述積層板於液溫60℃之過錳酸鈉含有粗化處理液(Atotech公司製,Concentrate Compact CP建浴液)浸漬5分鐘並水洗3次。再者,進行作為中和處理(Re處理),將上述積層板於液溫40℃之中和處理液(Atotech公司製,Reduction Securiganth P500建浴液)浸漬3分鐘後,進行水洗3次。然後,於空氣環境下(氧濃度約21%,氮濃度約78%)、150℃下進行加熱處理30分鐘,藉以進行第一加熱步驟。第一加熱步驟後,與實施例1相同地進行處理,獲得印刷佈線板。 The copper foil of the laminated board obtained in the manufacturing example 1 was completely etched and removed, and an electroless plating layer (Tough-copper PEA process manufactured by Uemura Kogyo Co., Ltd.) was formed on the surface of the exposed resin in accordance with the target film thickness of 1 μm. Next, a commercially available sodium hydroxide and ethylene glycol-based solvent-containing liquid (available from Atotech Co., Ltd., Swelling Dip Securiganth P bath) prepared as a resin surface swelling treatment (SW treatment) at a liquid temperature of 60 ° C was used. The mixture (pH 12) was immersed for 2 minutes and washed 3 times with water. Then, as an alkaline treatment (ME treatment) The laminate was immersed in a roughening treatment liquid (Concentrate Compact CP bath solution manufactured by Atotech Co., Ltd.) at a liquid temperature of 60 ° C for 5 minutes and washed with water three times. In addition, as a neutralization treatment (Re treatment), the laminate was immersed in a treatment liquid (Reduction Securiganth P500 bath solution manufactured by Atotech Co., Ltd.) at a liquid temperature of 40 ° C for 3 minutes, and then washed with water three times. Then, heat treatment was carried out for 30 minutes in an air atmosphere (oxygen concentration: about 21%, nitrogen concentration: about 78%) at 150 ° C, whereby the first heating step was performed. After the first heating step, the same treatment as in Example 1 was carried out to obtain a printed wiring board.

(實施例3) (Example 3)

於依閃蝕之圖案狀蝕刻步驟之後,於空氣環境下(氧濃度約21%,氮濃度約78%,大氣壓)、220℃下進行加熱處理60分鐘,藉以進行第二加熱步驟。除此以外,與實施例1相同地進行處理,獲得印刷佈線板。 After the pattern etching process according to flashing, heat treatment was performed for 60 minutes in an air atmosphere (oxygen concentration: about 21%, nitrogen concentration: about 78%, atmospheric pressure) at 220 ° C, thereby performing a second heating step. Otherwise, the same treatment as in Example 1 was carried out to obtain a printed wiring board.

(實施例4) (Example 4)

於依閃蝕之圖案狀蝕刻步驟之後,於空氣環境下(氧濃度約21%,氮濃度約78%,大氣壓)、220℃下進行加熱處理60分鐘,藉以進行第二加熱步驟。除此以外,與實施例2相同地進行處理,獲得印刷佈線板。 After the pattern etching process according to flashing, heat treatment was performed for 60 minutes in an air atmosphere (oxygen concentration: about 21%, nitrogen concentration: about 78%, atmospheric pressure) at 220 ° C, thereby performing a second heating step. Otherwise, the same treatment as in Example 2 was carried out to obtain a printed wiring board.

(實施例5) (Example 5)

將第一加熱步驟藉由氮環境下(氧濃度450ppm,氮濃度約99%,大氣壓)、220℃下進行加熱處理60分鐘而進行。除 此以外,與實施例1相同地進行處理,獲得印刷佈線板。 The first heating step was carried out by heat treatment at 220 ° C for 60 minutes in a nitrogen atmosphere (oxygen concentration: 450 ppm, nitrogen concentration: about 99%, atmospheric pressure). except Otherwise, the treatment was carried out in the same manner as in Example 1 to obtain a printed wiring board.

(實施例6) (Example 6)

將製造例1所獲得之積層板所具有之銅箔予以全面蝕刻而去除,依目標膜厚1μm形成無電解鍍覆層(上村工業公司製,Through-copper PEA製程)於已露出之樹脂表面。接著,進行作為中和處理(Re處理),將上述積層板於液溫50℃之中和處理液(Atotech公司製,Reduction Securiganth P500建浴液)浸漬5分鐘後,進行水洗3次。再者,依氮環境下(氧濃度450ppm,氮濃度約99%,大氣壓)、220℃下進行加熱處理60分鐘,藉以進行第一加熱步驟。第一加熱步驟後,與實施例1相同地進行處理,獲得印刷佈線板。 The copper foil of the laminated board obtained in the manufacturing example 1 was completely etched and removed, and an electroless plating layer (Tough-copper PEA process manufactured by Uemura Kogyo Co., Ltd.) was formed on the surface of the exposed resin in accordance with the target film thickness of 1 μm. Then, as a neutralization treatment (Re treatment), the laminate was immersed in a treatment liquid (Reduction Securiganth P500 bath solution manufactured by Atotech Co., Ltd.) at a liquid temperature of 50 ° C for 5 minutes, and then washed with water three times. Further, the first heating step was carried out by heat treatment at 60 ° C for 60 minutes in a nitrogen atmosphere (oxygen concentration: 450 ppm, nitrogen concentration: about 99%, atmospheric pressure). After the first heating step, the same treatment as in Example 1 was carried out to obtain a printed wiring board.

(實施例7) (Example 7)

將第一加熱步驟藉由氮環境下(氧濃度450ppm,氮濃度約99%,大氣壓)、220℃下進行加熱處理60分鐘而進行。除此以外,與實施例2相同地進行處理,獲得印刷佈線板。 The first heating step was carried out by heat treatment at 220 ° C for 60 minutes in a nitrogen atmosphere (oxygen concentration: 450 ppm, nitrogen concentration: about 99%, atmospheric pressure). Otherwise, the same treatment as in Example 2 was carried out to obtain a printed wiring board.

(實施例8) (Example 8)

於依閃蝕之圖案狀蝕刻步驟之後,於空氣環境下(氧濃度約21%,氮濃度約78%,大氣壓)、220℃下進行加熱處理60分鐘,藉以進行第二加熱步驟。除此以外,與實施例5相同地進行處理,獲得印刷佈線板。 After the pattern etching process according to flashing, heat treatment was performed for 60 minutes in an air atmosphere (oxygen concentration: about 21%, nitrogen concentration: about 78%, atmospheric pressure) at 220 ° C, thereby performing a second heating step. Otherwise, the same treatment as in Example 5 was carried out to obtain a printed wiring board.

(實施例9) (Example 9)

於依閃蝕之圖案狀蝕刻步驟之後,於空氣環境下(氧濃度 約21%,氮濃度約78%,大氣壓)、220℃下進行加熱處理60分鐘,藉以進行第二加熱步驟。除此以外,與實施例6相同地進行處理,獲得印刷佈線板。 After the pattern etching process according to flashing, in an air environment (oxygen concentration) About 21%, a nitrogen concentration of about 78%, atmospheric pressure, and heat treatment at 220 ° C for 60 minutes, thereby performing a second heating step. Otherwise, the same treatment as in Example 6 was carried out to obtain a printed wiring board.

(實施例10) (Embodiment 10)

於依閃蝕之圖案狀蝕刻步驟之後,於空氣環境下(氧濃度約21%,氮濃度約78%,大氣壓)、220℃下進行加熱處理60分鐘,藉以進行第二加熱步驟。除此以外,與實施例7相同地進行處理,獲得印刷佈線板。 After the pattern etching process according to flashing, heat treatment was performed for 60 minutes in an air atmosphere (oxygen concentration: about 21%, nitrogen concentration: about 78%, atmospheric pressure) at 220 ° C, thereby performing a second heating step. Otherwise, the same treatment as in Example 7 was carried out to obtain a printed wiring board.

(實施例11) (Example 11)

將第二加熱步驟藉由氮環境下(氧濃度450ppm,氮濃度約99%,大氣壓)、220℃下進行加熱處理60分鐘而進行。除此以外,與實施例8相同地進行處理,獲得印刷佈線板。 The second heating step was carried out by heat treatment at 220 ° C for 60 minutes in a nitrogen atmosphere (oxygen concentration: 450 ppm, nitrogen concentration: about 99%, atmospheric pressure). Otherwise, the same treatment as in Example 8 was carried out to obtain a printed wiring board.

(實施例12) (Embodiment 12)

將第二加熱步驟藉由氮環境下(氧濃度450ppm,氮濃度約99%,大氣壓)、220℃下進行加熱處理60分鐘而進行。除此以外,與實施例9相同地進行處理,獲得印刷佈線板。 The second heating step was carried out by heat treatment at 220 ° C for 60 minutes in a nitrogen atmosphere (oxygen concentration: 450 ppm, nitrogen concentration: about 99%, atmospheric pressure). Otherwise, the same treatment as in Example 9 was carried out to obtain a printed wiring board.

(實施例13) (Example 13)

將第二加熱步驟藉由氮環境下(氧濃度450ppm,氮濃度約99%,大氣壓)、220℃下進行加熱處理60分鐘而進行。除此以外,與實施例10相同地進行處理,獲得印刷佈線板。 The second heating step was carried out by heat treatment at 220 ° C for 60 minutes in a nitrogen atmosphere (oxygen concentration: 450 ppm, nitrogen concentration: about 99%, atmospheric pressure). Otherwise, the same treatment as in Example 10 was carried out to obtain a printed wiring board.

(實施例14) (Example 14)

不使用製造例1所獲得之積層板,而使用製造例2所獲得 之積層板。除此以外,與實施例8相同地進行處理,獲得印刷佈線板。 The laminate obtained in Production Example 1 was not used, but was obtained using Production Example 2. Laminated board. Otherwise, the same treatment as in Example 8 was carried out to obtain a printed wiring board.

(實施例15) (Example 15)

不使用製造例1所獲得之積層板,而使用製造例2所獲得之積層板。除此以外,與實施例9相同地進行處理,獲得印刷佈線板。 The laminate obtained in Production Example 2 was used instead of the laminate obtained in Production Example 1. Otherwise, the same treatment as in Example 9 was carried out to obtain a printed wiring board.

(實施例16) (Embodiment 16)

不使用製造例1所獲得之積層板,而使用製造例2所獲得之積層板。除此以外,與實施例10相同地進行處理,獲得印刷佈線板。 The laminate obtained in Production Example 2 was used instead of the laminate obtained in Production Example 1. Otherwise, the same treatment as in Example 10 was carried out to obtain a printed wiring board.

(實施例17) (Example 17)

除了不進行第一加熱步驟以外,與實施例3相同地進行處理,獲得印刷佈線板。 The treatment was carried out in the same manner as in Example 3 except that the first heating step was not performed, and a printed wiring board was obtained.

(實施例18) (Embodiment 18)

除了不進行第一加熱步驟以外,與實施例4相同地進行處理,獲得印刷佈線板。 The treatment was carried out in the same manner as in Example 4 except that the first heating step was not performed, and a printed wiring board was obtained.

(實施例19) (Embodiment 19)

將第一加熱步驟藉由減壓環境下(氧濃度280ppm,1torr)、220℃下進行加熱處理60分鐘而進行。除此以外,與實施例1相同地進行處理,獲得印刷佈線板。 The first heating step was carried out by heat treatment at 220 ° C for 60 minutes under a reduced pressure atmosphere (oxygen concentration: 280 ppm, 1 torr). Otherwise, the same treatment as in Example 1 was carried out to obtain a printed wiring board.

(實施例20) (Embodiment 20)

將第一加熱步驟藉由減壓環境下(氧濃度280ppm, 1torr)、220℃下進行加熱處理60分鐘而進行。除此以外,與實施例2相同地進行處理,獲得印刷佈線板。 The first heating step is performed under a reduced pressure environment (oxygen concentration: 280 ppm, 1 torr) was heat-treated at 220 ° C for 60 minutes. Otherwise, the same treatment as in Example 2 was carried out to obtain a printed wiring board.

(比較例1) (Comparative Example 1)

除了不進行第一加熱步驟以外,與實施例1相同地進行處理,獲得印刷佈線板。 The treatment was carried out in the same manner as in Example 1 except that the first heating step was not performed, and a printed wiring board was obtained.

(比較例2) (Comparative Example 2)

除了不進行第一加熱步驟以外,與實施例6相同地進行處理,獲得印刷佈線板。 The treatment was carried out in the same manner as in Example 6 except that the first heating step was not performed, and a printed wiring board was obtained.

(比較例3) (Comparative Example 3)

除了不進行第一加熱步驟以外,與實施例2相同地進行處理,獲得印刷佈線板。 The treatment was carried out in the same manner as in Example 2 except that the first heating step was not performed, and a printed wiring board was obtained.

(評估) (assessment)

使用各實施例及比較例所獲得之印刷佈線板,進行導體電路層之剝離強度測量。剝離強度測量係根據JIS C6481而進行,測量25℃下寬度10mm之導體電路層之剝離強度。將測量結果示於表1。 The peeling strength measurement of the conductor circuit layer was performed using the printed wiring board obtained by each Example and the comparative example. The peel strength measurement was carried out in accordance with JIS C6481, and the peel strength of the conductor circuit layer having a width of 10 mm at 25 ° C was measured. The measurement results are shown in Table 1.

關於比較例1~3,因為未進行第一加熱步驟及第二加熱步驟,所以所獲得之印刷佈線板的導體電路層之剝離強度較低。 In Comparative Examples 1 to 3, since the first heating step and the second heating step were not performed, the peeling strength of the conductor circuit layer of the obtained printed wiring board was low.

另一方面,關於實施例1~20,因為進行第一加熱步驟及/或第二加熱步驟,故而所獲得之印刷佈線板的導體電路層之剝離強度較高。於使用依製造例1所獲得之積層板的實施例1~13中,相較於在空氣環境下進行第一加熱步驟之實施例1~4,在氮環境下進行第一加熱步驟之實施例5~13的剝離強度較高。又,實施例14~16係使用與製造例1之樹脂清漆中的成分不同之依製造例2所獲得之積層板,因為進行第一加熱步驟及第二加熱步驟,所以所獲得之印刷佈線板的導體電路層之剝離強度較高。 On the other hand, in Examples 1 to 20, since the first heating step and/or the second heating step were performed, the peeling strength of the conductor circuit layer of the obtained printed wiring board was high. In Examples 1 to 13 using the laminate obtained in Production Example 1, the first heating step was carried out in a nitrogen atmosphere as compared with Examples 1 to 4 in which the first heating step was performed in an air atmosphere. The peel strength of 5~13 is higher. Further, in Examples 14 to 16, the laminate obtained by the production example 2 was different from the composition of the resin varnish of Production Example 1, and the obtained printed wiring board was obtained by performing the first heating step and the second heating step. The conductor circuit layer has a high peel strength.

以上,參照圖式針對本發明之實施形態進行說明,該等係本發明之例示,而亦可以採用與上述以外之各種構成。 The embodiments of the present invention have been described above with reference to the drawings, and the present invention is exemplified, and various configurations other than the above may be employed.

此申請案係主張以2011年1月26日所申請之日本申請案特願2011-014105號為基礎之優先權,並將其揭示的全部內容取入至此說明書中。 The application is based on the priority of Japanese Patent Application No. 2011-014105, filed on Jan. 26, 2011, the entire disclosure of which is incorporated herein.

1‧‧‧印刷佈線板用基板 1‧‧‧Substrate for printed wiring board

2‧‧‧無電解鍍覆層 2‧‧‧ Electroless plating

3‧‧‧光阻遮罩 3‧‧‧Light-resistance mask

4‧‧‧電鍍層 4‧‧‧Electroplating

5‧‧‧導體電路層 5‧‧‧ conductor circuit layer

圖1係說明本實施形態之印刷佈線板之製造方法例的示意圖。 Fig. 1 is a schematic view showing an example of a method of manufacturing a printed wiring board of the embodiment.

圖2係說明本實施形態之印刷佈線板之製造方法例的流程圖。 Fig. 2 is a flow chart showing an example of a method of manufacturing the printed wiring board of the embodiment.

1‧‧‧印刷佈線板用基板 1‧‧‧Substrate for printed wiring board

2‧‧‧無電解鍍覆層 2‧‧‧ Electroless plating

3‧‧‧光阻遮罩 3‧‧‧Light-resistance mask

4‧‧‧電鍍層 4‧‧‧Electroplating

5‧‧‧導體電路層 5‧‧‧ conductor circuit layer

Claims (14)

一種印刷佈線板之製造方法,其係具備有:在表面為由樹脂組成物所構成之基板之上述表面上,藉由無電解鍍覆形成無電解鍍覆層之步驟;在上述無電解鍍覆層上形成具有開口之光阻遮罩之步驟;在上述開口內,藉由電鍍形成電鍍層之步驟;去除上述光阻遮罩之步驟;及於上述無電解鍍覆層中,藉由蝕刻選擇性去除依平面視為與上述電鍍層未重疊之部分之步驟;在上述形成無電解鍍覆層之步驟後、上述形成電鍍層之步驟前,具有加熱上述基板之第一加熱步驟,及/或在上述形成電鍍層後,具有加熱上述基板之第二加熱步驟。 A method for producing a printed wiring board, comprising: forming an electroless plating layer by electroless plating on the surface of the substrate composed of a resin composition; and performing the electroless plating on the surface a step of forming a photoresist mask having an opening; a step of forming a plating layer by electroplating in the opening; a step of removing the photoresist mask; and selecting by etching in the electroless plating layer The step of removing the portion which is not overlapped with the above-mentioned plating layer according to the plane; after the step of forming the electroless plating layer, before the step of forming the plating layer, having the first heating step of heating the substrate, and/or After forming the plating layer as described above, there is a second heating step of heating the substrate. 如申請專利範圍第1項之印刷佈線板之製造方法,其中,在上述第一加熱步驟中,上述基板係加熱至130~280℃之溫度。 The method of manufacturing a printed wiring board according to the first aspect of the invention, wherein in the first heating step, the substrate is heated to a temperature of 130 to 280 °C. 如申請專利範圍第1項之印刷佈線板之製造方法,其中,上述第一加熱步驟係於氧濃度為1000ppm以下之環境下進行。 The method for producing a printed wiring board according to the first aspect of the invention, wherein the first heating step is performed in an environment having an oxygen concentration of 1000 ppm or less. 如申請專利範圍第1項之印刷佈線板之製造方法,其中,上述第一加熱步驟係於氮濃度為78%以上之環境下進行。 The method for producing a printed wiring board according to the first aspect of the invention, wherein the first heating step is performed in an environment having a nitrogen concentration of 78% or more. 如申請專利範圍第1項之印刷佈線板之製造方法,其 中,上述第一加熱步驟係在減壓下進行。 A method of manufacturing a printed wiring board according to item 1 of the patent application, The first heating step described above is carried out under reduced pressure. 如申請專利範圍第1項之印刷佈線板之製造方法,其中,在上述第一加熱步驟中,將上述基板予以加熱處理之時間係30分鐘以上且300分鐘以下。 The method of manufacturing a printed wiring board according to claim 1, wherein in the first heating step, the substrate is subjected to heat treatment for 30 minutes or longer and 300 minutes or shorter. 如申請專利範圍第1項之印刷佈線板之製造方法,其中,在上述第二加熱步驟中,上述基板係加熱至130~280℃之溫度。 The method of manufacturing a printed wiring board according to claim 1, wherein in the second heating step, the substrate is heated to a temperature of 130 to 280 °C. 如申請專利範圍第1項之印刷佈線板之製造方法,其中,上述第二加熱步驟係於氧濃度為1000ppm以下之環境下進行。 The method of manufacturing a printed wiring board according to the first aspect of the invention, wherein the second heating step is performed in an environment having an oxygen concentration of 1000 ppm or less. 如申請專利範圍第1項之印刷佈線板之製造方法,其中,上述第二加熱步驟係於氮濃度為78%以上之環境下進行。 The method for producing a printed wiring board according to the first aspect of the invention, wherein the second heating step is performed in an environment having a nitrogen concentration of 78% or more. 如申請專利範圍第1項之印刷佈線板之製造方法,其中,上述第二加熱步驟係在減壓下進行。 The method of manufacturing a printed wiring board according to the first aspect of the invention, wherein the second heating step is performed under reduced pressure. 如申請專利範圍第1項之印刷佈線板之製造方法,其中,在上述第二加熱步驟中,將上述基板予以加熱處理之時間係30分鐘以上且300分鐘以下。 The method of manufacturing a printed wiring board according to claim 1, wherein in the second heating step, the substrate is subjected to heat treatment for 30 minutes or longer and 300 minutes or shorter. 如申請專利範圍第1項之印刷佈線板之製造方法,其中,上述無電解鍍覆層之層厚度為0.1μm以上且2μm以下。 The method for producing a printed wiring board according to the first aspect of the invention, wherein the electroless plating layer has a layer thickness of 0.1 μm or more and 2 μm or less. 如申請專利範圍第1項之印刷佈線板之製造方法,其 中,上述樹脂組成物係含有無機填充材料;上述無機填充材料之含有量係於上述樹脂組成物之全固形分中為50重量%以上。 A method of manufacturing a printed wiring board according to item 1 of the patent application, The resin composition contains an inorganic filler, and the content of the inorganic filler is 50% by weight or more based on the total solid content of the resin composition. 如申請專利範圍第1項之印刷佈線板之製造方法,其中,上述樹脂組成物係含有熱硬化性樹脂。 The method for producing a printed wiring board according to the first aspect of the invention, wherein the resin composition contains a thermosetting resin.
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