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TWI545081B - 氬氣之純化方法及純化裝置 - Google Patents

氬氣之純化方法及純化裝置 Download PDF

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Publication number
TWI545081B
TWI545081B TW101145489A TW101145489A TWI545081B TW I545081 B TWI545081 B TW I545081B TW 101145489 A TW101145489 A TW 101145489A TW 101145489 A TW101145489 A TW 101145489A TW I545081 B TWI545081 B TW I545081B
Authority
TW
Taiwan
Prior art keywords
argon gas
oxygen
adsorption
reactor
carbon monoxide
Prior art date
Application number
TW101145489A
Other languages
English (en)
Chinese (zh)
Other versions
TW201332886A (zh
Inventor
山本守彥
中谷光利
岸井充
志摩康一
Original Assignee
住友精化股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 住友精化股份有限公司 filed Critical 住友精化股份有限公司
Publication of TW201332886A publication Critical patent/TW201332886A/zh
Application granted granted Critical
Publication of TWI545081B publication Critical patent/TWI545081B/zh

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B7/00—Halogens; Halogen acids
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/24—Stationary reactors without moving elements inside
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J20/00—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof
    • B01J20/02—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof comprising inorganic material
    • B01J20/10—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof comprising inorganic material comprising silica or silicate
    • B01J20/16—Alumino-silicates
    • B01J20/18—Synthetic zeolitic molecular sieves
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B9/00—General methods of preparing halides
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P20/00—Technologies relating to chemical industry
    • Y02P20/50—Improvements relating to the production of bulk chemicals

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Separation Of Gases By Adsorption (AREA)
  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
  • Drying Of Gases (AREA)
  • Catalysts (AREA)
TW101145489A 2012-01-31 2012-12-04 氬氣之純化方法及純化裝置 TWI545081B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012018178A JP5745434B2 (ja) 2012-01-31 2012-01-31 アルゴンガスの精製方法および精製装置

Publications (2)

Publication Number Publication Date
TW201332886A TW201332886A (zh) 2013-08-16
TWI545081B true TWI545081B (zh) 2016-08-11

Family

ID=48834905

Family Applications (1)

Application Number Title Priority Date Filing Date
TW101145489A TWI545081B (zh) 2012-01-31 2012-12-04 氬氣之純化方法及純化裝置

Country Status (4)

Country Link
JP (1) JP5745434B2 (ja)
KR (1) KR101909291B1 (ja)
CN (1) CN103224225B (ja)
TW (1) TWI545081B (ja)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5991330B2 (ja) * 2014-01-29 2016-09-14 信越半導体株式会社 シリコン単結晶製造装置からのアルゴンガス回収精製方法及びアルゴンガス回収精製装置
JP6304089B2 (ja) * 2015-03-24 2018-04-04 信越半導体株式会社 アルゴンガスの精製方法及びアルゴンガスの回収精製装置
CN105498368A (zh) * 2015-11-26 2016-04-20 王琳 一种变压吸附制氧机净化器
EP4300097A1 (de) * 2022-06-27 2024-01-03 C. Gerhardt GmbH & Co. KG Ventilvorrichtung, adsorptionsvorrichtung und verfahren zum betrieb einer adsorptionsvorrichtung

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60122709A (ja) * 1983-12-07 1985-07-01 Hitachi Ltd アルゴンの回収方法
JPS61163106A (ja) * 1985-01-11 1986-07-23 Hitachi Ltd 不活性ガスの回収方法および装置
JPH06234511A (ja) * 1993-01-06 1994-08-23 Praxair Technol Inc 圧縮熱を使用する精製方法及び装置
JP2869525B2 (ja) * 1996-08-29 1999-03-10 社団法人日本造船研究協会 改質ガス中の一酸化炭素除去方法及び装置
JPH1183309A (ja) * 1997-09-04 1999-03-26 Nippon Air Rikiide Kk アルゴン精製方法及び装置
JP2000072419A (ja) * 1998-08-20 2000-03-07 Japan Pionics Co Ltd 希ガスの回収方法
JP2000088455A (ja) * 1998-09-14 2000-03-31 Nippon Sanso Kk アルゴンの回収精製方法及び装置
JP3884328B2 (ja) * 2002-06-03 2007-02-21 大陽日酸株式会社 圧力変動吸着分離用吸着筒の設計方法及び圧力変動吸着分離装置
US7862645B2 (en) * 2008-02-01 2011-01-04 Air Products And Chemicals, Inc. Removal of gaseous contaminants from argon
TWI476038B (zh) * 2010-02-10 2015-03-11 Sumitomo Seika Chemicals 氬氣之純化方法及純化裝置
JP5403685B2 (ja) * 2010-02-25 2014-01-29 住友精化株式会社 アルゴンガスの精製方法および精製装置

Also Published As

Publication number Publication date
JP5745434B2 (ja) 2015-07-08
KR20130088728A (ko) 2013-08-08
TW201332886A (zh) 2013-08-16
CN103224225A (zh) 2013-07-31
KR101909291B1 (ko) 2018-10-17
JP2013155091A (ja) 2013-08-15
CN103224225B (zh) 2016-04-27

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