TWI428301B - Scribing wheel and its manufacturing method - Google Patents

Description

Scribing wheel and manufacturing method thereof

The present invention relates to a scribing wheel for scribing a substrate of a brittle material such as a glass plate, and a method of manufacturing the same.

Conventionally, in the case of breaking a brittle material substrate such as a glass plate or a ceramic substrate, the substrate is formed with a scribe line along a desired line, and the scribe line is cut along the scribe line. The scribing wheel used for scribing is, for example, a disk-shaped shape as shown in Patent Document 1, and an outer peripheral portion thereof is an abacus bead shape which is cut into a tapered shape on both sides. Fig. 1(A) shows a front view of this example. At this time, the row wheel 100 has a through hole at the center portion in which the pin 101 is inserted as a shaft.

Further, Patent Documents 2, 3, and 4 also show a scribing wheel formed by integrating a shaft and a scribing wheel body portion. Fig. 1(B) shows a front view of this example. The scribing wheel 110 has a shape in which the bottom surfaces of the two conical members are tapered in a rhombic shape, and both end portions are held by the cutter holder and used.

Patent Document 1: Japanese Patent No. 4219945

Patent Document 2: International Publication WO2003/51784

Patent Document 3: Japanese Shikai Kai 4-4028

Patent Document 4: Japanese Laid-Open Patent Publication No. 223799

However, in Patent Document 1, the thickness of the leading edge portion of the blade is the same as the thickness of the scoring wheel, and since the pin must be inserted into the central axis of the scoring wheel without deviation, the axis and the pin of the scoring wheel are also scribing. It must be consistent, so it is difficult to make the thickness of the leading edge portion of the blade thin.

Further, in the scriber wheels of Patent Documents 2 to 4 in which the shaft and the wheel are integrated, the degree of freedom of manufacture is small, and the angle of the ridge line portion of the leading edge of the blade or the distance between the axes is large, so that the blade cannot be arbitrarily selected. The problem of the thickness of the leading edge portion. Therefore, as shown in Fig. 2 (a) and (b), in any case, when the wafer 111 is mounted on the substrate 111, the narrow gap between the wafer components of the substrate cannot be scribed, and the interval between the wafer components must be increased. Wide, has the disadvantage of creating excess space around the substrate after the break.

Further, as shown in Fig. 1(b), the angle ? of the leading edge portion of the blade and the angle ? of the tapered portion on both sides of the contact portion with the bearing are individually defined as α to 110 to 130 °, β in Patent Document 3 It is 50 to 70°. However, the total value of α and β is 180°, and the combination in the range exceeding 180° in total is not shown.

In the case of the patent document 3, after the front edge portion and the tapered portion are formed as continuous outer peripheral surfaces, a cut-off of the outer circumference of the outer peripheral surface is formed between the leading edge portion and the tapered portion of the blade (support portion). Therefore, in the manufacturing method, the total value of α and β is limited to 180°. Further, in Patent Document 4, the angle α of the base portion of the blade leading edge portion and the angle β of the tapered portion are both 90°, and are not shown with respect to other angle ranges. Further, although the ridgeline of the leading edge portion of the blade is ground in two stages, the specific angle is not shown.

The present invention has been made in view of such a conventional problem, and it is possible to provide a scriber wheel of a pin-integrated type, which can reduce the thickness of the leading edge of the blade, and can also scribe a narrow portion of the attached component on the substrate, and The scribe wheel and the manufacturing method thereof which can be easily manufactured with high precision without any deviation can be used.

In order to solve the above problems, the scribing wheel of the present invention includes: a disk-shaped wheel body portion formed of sintered diamond having a circular ridge line in a plane at the center; and a diamond-plated layer on the left and right sides of the wheel body portion a cylindrical shaft portion formed by coaxially, comprising: a tapered portion formed coaxially at an outer end portion of each of the cylindrical shaft portions at a predetermined angle; and a apex angle of the ridge line portion of the wheel main body portion is formed at a predetermined angle The leading edge of the blade.

Here, the wheel main body portion may have at least two tapered surfaces, and may be formed by polishing only the tapered surface forming the ridge line of the blade leading edge portion.

Here, the blade leading edge portion may have a groove having a predetermined shape formed on the ridge line.

Here, the thickness of the leading edge portion of the blade may be 0.4 mm or less.

Here, only the portion of the wheel main body portion which is constituted by one of the ridge lines and the tapered surface is the blade leading edge portion, and the thickness of the blade leading edge portion may be 0.03 mm or more.

Here, the blade leading edge portion may have a circular plate portion provided at the center of the wheel main body portion and a tapered surface portion at the front end of the disc portion.

Here, the thickness of the disc portion is in the range of 0.4 to 0.03 mm.

Here, the wheel main body portion may be a tapered portion having a tapered shape with the cylindrical shaft portion.

Here, the inclined portion of the wheel main body portion may be curved to be continuous with the cylindrical shaft portion.

Here, the apex angle α of the ridge line portion of the blade leading edge portion and the angle β of the tapered portion are as follows 185°≦α+β≦290°; the apex angle α of the ridge line is 75°≦α≦170°; the angle β of the taper portion may satisfy 60°≦β≦120°.

Here, the angle β of the tapered portion may satisfy the following formula: 90°≦β≦120°.

Here, the outer diameter D of the wheel main body portion may satisfy the following formula: 1 mm ≦ D ≦ 6 mm.

Here, the outer diameter D of the wheel main body portion may satisfy the following formula: 1 mm ≦ D ≦ 2.5 mm.

Here, the outer diameter D of the wheel main body portion and the length C of the cylindrical shaft portion may satisfy the following formula C<D.

15. The scriber wheel of claim 12, wherein the outer diameter D of the wheel body portion and the length C of the cylindrical shaft portion satisfy the following formula C<D.

16. The scriber of claim 13, wherein the outer diameter D of the wheel body portion and the length C of the cylindrical shaft portion satisfy the following formula C<D.

In order to solve the above problems, the manufacturing method of the scribing wheel of the present invention is used for forming a cylindrical processing material having a cylindrical portion of a sintered diamond layer coaxially with one end of a cylindrical member formed of a super-hard alloy; and maintaining the superhard alloy The cylindrical portion is simultaneously rotated, and the wire-cut electric discharge machining is performed on the sintered diamond layer portion to form a pair of coaxial cylindrical shaft portions and the wheel body portion sandwiched between the cylindrical shaft portions; while maintaining the cylindrical portion of the super-hard alloy while rotating, the foregoing The outer end portions of the cylindrical shaft portions are formed into a tapered shape by grinding; while the cylindrical portion of the superhard alloy is held and rotated, the ridge portion of the wheel main body portion is ground to a predetermined angle to form a leading edge The part is manufactured by cutting the sintered diamond layer and the aforementioned superhard alloy.

Here, when the cylindrical shaft portion and the wheel body portion of the wire cutting electric discharge machining are used, a taper portion is simultaneously formed on the outer side of the cylindrical shaft portion; when the taper portion of the cylindrical shaft portion is ground, the wire cut discharge is performed. The altered layer of the surface produced by the processing may be removed.

By using the scribing wheel of the present invention having such a feature, the thickness of the cylindrical shaft portion can be arbitrarily selected by appropriately changing the distance between the processing line (the traveling path of the wire of the wire-cut electric discharge machine (machined portion)) and the central axis. . Further, the interval between the cylindrical shaft portions, the thickness of the wheel body portion, and the angle of the leading edge portion of the blade can be arbitrarily selected. In the conventional side surface in which the shaft and the wheel body are integrated, the diamond wheel has a rhombic shape, and the angle of the tapered surface of the blade front edge portion, the angle or interval of the tapered surface of the cylindrical shaft portion, and the outer diameter of the blade leading edge portion cannot be Freely set, but in the present invention, these can be independently set arbitrarily. Further, by grinding only the tapered portion and the leading edge portion of the end portion of the cylindrical shaft which requires high precision, the other portions are maintained in the state of electric discharge machining, and the desired stroke can be achieved with a minimum of processing steps and costs.

By making the thickness of the leading edge portion of the blade 0.4 mm or less, it is possible to scribe along a narrow line of a substrate on which a wafer component or the like is mounted. Further, if the inclined portion is formed on both sides of the wheel main body portion, sufficient strength can be maintained even if the thickness of the leading edge portion of the blade is reduced. Therefore, by reducing the thickness of the leading edge portion of the blade, it is possible to scribe along a narrow line of a substrate on which a wafer component or the like is mounted.

In addition, the angle α of the leading edge portion of the blade can select the most appropriate angle at the leading edge portion of the blade, for example, 75° to 170°, whereby the horizontal crack or the peeling generated along the score line is not easily generated, and the brittle material can be improved. Characterization performance. Further, the angle β of the tapered portion can be set to an appropriate angle with α alone, for example, 60° to 120°, and the sliding resistance with the bearing is reduced. In addition, it is also possible to obtain an effect that the depression formed by the bearing is shallow.

(First embodiment)

The scribing wheel of the first embodiment of the present invention will be described. Fig. 3(a) is a front view of the rowing wheel at this moment, and Fig. 3(b) is a right side view thereof. As shown in the figures, the scribing wheel 1A has a disk-shaped wheel body portion 2A at the center, and the blade leading edge portion 3A is formed in the center of the wheel body portion 2A in the thickness direction to include the largest circumference included in a plane. The tapered portion of the ridgeline. Further, a cylindrical shaft portion 4 and a cylindrical shaft portion 5 are coaxially formed on the sides of both sides of the wheel main body portion 2A. A tapered portion 6 and a tapered portion 7 having the same inclination angle are respectively formed at the outer end portions of the cylindrical shaft portion 4 and the cylindrical shaft portion 5. At this moment, the rower 1A is all formed integrally with sintered diamond.

In this embodiment, the blade leading edge portion 3A and the wheel body portion 2A have the same thickness, and the thickness is assumed to be w1 as shown in Fig. 3(a). The thickness w1 is, for example, 0.4 mm or less, more preferably 0.3 mm or less, and still more preferably 0.2 mm or less. The side of the blade leading edge portion 3A is a surface perpendicular to the surface of the substrate at the time of scribing. In this way, even if the wafer parts 122 and 123 are mounted on the substrate 121 to be scribed as shown in FIGS. 4(a) and 4(b), the narrow line between the parts can be scribed. Only the leading edge of the blade is inserted between the wafer parts 122, 123 for scribing.

Here, the apex angle α of the ridge portion of the blade leading edge portion 3A can be set to the optimum angle at the blade leading edge portion 3A alone. For example, the apex angle α is in the range of 75° to 170°, more preferably in the range of 90° to 150°. If the apex angle α is an obtuse angle, the horizontal crack of the brittle material or the flaking due to the scribe line is not easily generated, and the scribe performance can be improved.

Further, the angle β of the tapered portions 6 and 7 can be set to an optimum angle at the tapered portion. Here, the angle β is 60° to 120°, more preferably 75° to 120°, and still more preferably 90° to 120°. If the angle β is large, the sliding resistance of the bearing tends to be small, and even if the recess formed by the bearing is shallow, it is sufficient. However, if the angle β is too large, the back gap will become larger. On the other hand, if the angle β is small, the sliding resistance with the bearing becomes large. On the other hand, in the present embodiment, the apex angle α of the ridge line portion of the blade leading edge portion 3A and the angle β of the tapered portions 6 and 7 can be independently set by the shape shown in Fig. 3, and each can be made specific. angle.

Further, in the present embodiment, α + β is in the range of the following.

185°≦α+β≦290°...(1)

The method of forming the tapered portion (β) corresponding to the apex of the conical shape and the leading edge portion (α) of the bottom edge corresponding to the conical shape by forming the conical outer peripheral surface on both sides of the conventional wheel is used for manufacturing. The limitation is that α + β is inevitably 180°, and it is impossible to manufacture a shaft-integrated wheel of α + β ≠ 180°.

In addition, it is assumed that the diameter of the scoring wheel is D, and the length between the two ends of the cylindrical shaft portion (the taper portion on both sides is conical, the distance between the apexes on both sides, and the taper portion is not conical) In the case of a truncated cone, etc.), the distance between the apexes of the conical surfaces on both sides of the imaginary side when the tapered portion (the contact portion with the bearing or the tangential line thereof is extended) is C. Here, if the outer diameter D is small, it is possible to realize the scribe with a small scribed load. However, if it is too small, manufacturing and handling become difficult. Therefore, the outer diameter D is 1 mm or more and 6 mm or less, and preferably 1 mm or more and 2.5 mm or less. Here, in the conventional engraving, the distance C is kept constant by the relationship with the holder, and the angle β is required to be small in order to reduce the outer diameter D. However, in the present embodiment, C and D can be set independently.

Conventionally, in order to make α 90° or more (β is 90° or less), the distance between the distance C between the apexes of the axial branches shown in Fig. 1(b) and the outer diameter D is generally the following.

C≧D...(2)

On the other hand, in the present embodiment, the angles α and β are not dependent on each other, and the relationship between the length C between the cylindrical shaft portion 4 and the cylindrical shaft portion 5 and the outer diameter D is as follows.

C<D...(3)

Thereby, the offset at the time of scribing can be suppressed.

Next, a description will be given of a manufacturing method of the scribing wheel 1A of the present embodiment. 5A to 5D are views showing a manufacturing process of the scribing wheel 1A of the present embodiment. Fig. 5A is a perspective view showing the material block 10 in which a sintered diamond layer 12 having a predetermined thickness is integrally formed on the upper portion of the cylindrical superhard alloy 11. This material block 10 is, for example, 30 mm in diameter and 16 mm in height, 3 mm in thickness of the sintered diamond layer 12, and 13 mm in thickness of the superhard alloy 11.

A plurality of cylindrical members are cut parallel to the central axis of the material block 10 by wire-cut electrical discharge machining. Thereby, as shown in FIG. 5B, for example, 40 to 50 elongated processing materials 20 can be obtained. The processed material 20 is a cylindrical member having a diameter that fits the outer diameter D of the final scoring wheel, for example, 2.0 to 6.5 mm and a length of 16 mm. The processed material 20 is also composed of a super-hard alloy layer 21 and a sintered diamond layer 22.

(Wire cutting electrical discharge machining)

Next, in FIG. 5C, the left side portion of the superhard alloy layer 21 of the processed material 20 is fixed by a chuck and rotated at a high speed centering on the central axis of the cylinder displayed by a chain line, and discharged by a wire-cut electric discharge machine, such as A portion of the superhard alloy layer 21 and the sintered diamond layer 22 is cut as shown in Fig. 5C. Here, the trajectories of the electric discharge machining are shown by the processing lines 30 to 39. The processing line 30 is cut at a predetermined angle with respect to the central axis of the cylinder displayed by the dotted line. The processing line 31 is parallel to the central axis, and the processing line 32 is formed such that the tapered line is slightly thicker than this. The processing line 33 is parallel to the central axis, and the processing line 34 is a processing line formed by forming a tapered surface after the processing line 33 is completed. The processing line 35 is formed to have a tapered surface portion of the blade leading edge portion 3A in the wheel body portion 2A, and the processing line 36 also has a tapered portion which is oppositely inclined. Further, the processing line 37 is a line for reducing the diameter, the processing line 38 is a processing line which is symmetrical with the processing line 33 and has the same thickness parallel to the center line, and the processing line 39 has a processing which is inclined symmetrically with the processing line 32. line. All of the processing lines 31 to 39 are formed in the sintered diamond layer 22. Further, the processing lines 32 and 39 are set to be slightly larger than the inclined surfaces of the tapered portion 6 and the tapered portion 7, and chips for polishing processing to be described later remain. Further, the processing lines 35, 36, and 39 are set to be slightly larger than the slope of the blade leading edge portion 3A, and chips for polishing processing to be described later remain.

Thereafter, after the end of the wire-cut electric discharge machining, as shown in Fig. 5D, the sintered diamond layer 22 is substantially a rotating body of the shape of the scribing wheel 1A. The right side view is substantially the same as FIG. 3(b).

(thick shape forming (grinding) step)

Next, the description will be given for the rough shape forming (grinding) step. In the case of the wire-cut electric discharge machining, since the surface is in a high temperature state, a work-affected layer is formed, and the surface is tens of μm from the surface to the inside. Therefore, high precision cannot be maintained when used in the state of on-line cutting and electric discharge machining. In particular, since the tapered portion 6 and the tapered portion 7 shown in Fig. 3(a) are in direct contact with the bearing, it is necessary to remove the processed altered layer to form a correct tapered surface. Here, after the electric discharge machining is cut along the processing lines 32 and 39, the polishing process is performed in order to increase the crystallinity of the surface. In the grinding step and the wire-cut electrical discharge machining, the left portion of the super-hard alloy layer 21 is fixed by a chuck and rotated around the central axis of the cylinder to grind the surface of the tapered surface. By this polishing, the altered layer formed during the processing of the processing lines 32 and 39 is removed, and the angles of the left and right cylindrical shaft portions 4, the front end tapered portion 6 of the cylindrical shaft portion 5, and the tapered portion of the tapered portion 7 can be accurately formed. .

The same polishing process is performed on the blade leading edge portion 3A of the wheel main body portion 2A. In particular, the blade leading edge portion 3A shown in Fig. 3(a) is in direct contact with the glass plate or the like which is the object of scribing, so that it is necessary to form a correct surface. Here, in order to remove the altered layer formed along the processing lines 35, 36, the left side portion of the cemented carbide layer 21 is fixed by a chuck and the rotation is performed centering on the central axis of the cylinder. The altered layer can be removed by grinding and the angle of the sharp edge front edge portion 3A is correctly set. The angle of the blade leading edge portion 3A is as described above in the range of 75 to 170, more preferably in the range of 90 to 150.

(cutting step)

By cutting away from the portion of the sintered diamond layer 22 on the side of the superhard alloy layer 21 shown by a dotted line in FIG. 5D, the wheel body portion 2A, the cylindrical shaft portion 4, and the cylindrical shaft portion 5 can be obtained as shown in FIG. The scoring wheel 1A is composed entirely of the sintered diamond layer 22. In this case, the cut surface may be polished to be bilaterally symmetrical. However, since the tapered front end portion enters the through hole of the bearing during use, the front end of the tapered portion 6 may be slightly left as shown in FIG. It can also be omitted.

Since the scribing wheel 1A thus completed holds the left portion of the super-hard alloy layer 21 by the chuck, and the rotation is performed by wire-cut electric discharge machining or cutting, the wheel main body portion 2A, the cylindrical shaft portion 4, and the cylindrical shaft portion can be made. The axis of 5 is correctly matched. Further, the thickness of the cylindrical shaft portion 4 and the cylindrical shaft portion 5 can be arbitrarily selected by appropriately changing the distance between the processing lines 33 and 38 and the central axis. The interval between the cylindrical shaft portion 4 and the cylindrical shaft portion 5 and the thickness of the wheel main body portion 2A can be arbitrarily selected by changing the interval between the processing lines 34, 37, and the width of the leading edge portion 3A can be separated by the processing lines 34, 37. Optionally, the angle of the leading edge portion 3A can be arbitrarily selected by the angle of the processing lines 35, 36. Since the wheel main body 2A is integrated with the cylindrical shaft portions 4 and 5 at this time, the sufficient strength can be ensured even if the thickness of the blade leading edge portion 3A is reduced.

In the conventional side, the side surface of the shaft and the wheel body is a diamond-shaped scoring wheel. The angle of the tapered surface of the leading edge portion of the blade, the angle or interval of the tapered surface of the cylindrical shaft portion, and the angle of the leading edge portion of the blade cannot be freely set. However, in the present embodiment, these boundaries can be independently set independently. Further, by grinding only the tapered portion and the leading edge portion of the cylindrical shaft portion which require high precision, the other portions are maintained in the state of electric discharge machining, and the desired number of strokes can be achieved with a minimum of processing steps and costs.

(Second embodiment)

Next, a second embodiment of the present invention will be described with reference to Fig. 7 . The scribing wheel 1B of the second embodiment is the same as the first embodiment except for the wheel main body portion 2B and the blade leading edge portion 3B. At this time, the wheel body 1B is such that the wheel body portion 2B is a two-stage tapered surface as shown in Fig. 7(a). The other structure is the same as that of the first embodiment. Further, the polishing of the right and left tapered portions 6 and the tapered portions 7 is the same as that of the first embodiment. It is sufficient that the polishing of the wheel main body portion 2B is performed by grinding the left and right inclined surfaces of the inclined portion of the blade leading edge portion 3B. In this case, the angle of the polishing process can be appropriately selected only by the blade leading edge portion 3B. Thereafter, the scribing wheel 1B is completed by cutting at the front end of the tapered portion 6.

In this embodiment, it is assumed that the thickness of the wheel main body portion 2B is w2a, and the thickness of the blade leading edge portion 3B is w2b. In this case, the thickness w2b of the blade leading edge portion 3B is also, for example, 0.4 mm or less, more preferably 0.3 mm or less, more preferably 0.2 mm or less. In this case, since the thickness of the wheel main body portion 2B is independent of the thickness of the blade leading edge portion 3B, the thickness of the blade leading edge portion 3B can be determined by the thickness of the substrate to be scribed or the mounting density of the component. In order to enlarge the application range of the scribing wheel 1B, it is preferable to make the thickness w2b thinner, for example, 0.05 mm or less. Further, the lower limit of the thickness w2b of the blade leading edge portion 3B is determined by the required strength, and is preferably 0.03 mm or more. In the case where a thin member made of a brittle material such as a glass plate or a semiconductor substrate having a thickness of 0.7 mm or less is used to mount a fine member at a high density, the scribing wheel having the thin edge leading edge portion described above is used. effective.

(Third embodiment)

Next, a third embodiment of the present invention will be described with reference to Fig. 8 . The scribe wheel 1C of the third embodiment is the same as the first embodiment except for the wheel main body portion 2C and the blade leading edge portion 3C. At this time, the wheel 1C is such that the wheel main body portion 2C is a tapered surface having two inclined portions 41 and 42. The other structure is the same as that of the first embodiment. It is sufficient that the polishing of the wheel main body portion 2C is a grinding process of the left and right inclined surfaces of the inclined portion near the blade leading edge portion 3C. In this case, the angle of the polishing process can be appropriately selected only by the blade leading edge portion 3C. Thereafter, the scribing wheel 1C is completed by cutting at the front end of the tapered portion 6.

In this embodiment, it is assumed that the thickness of the wheel main body portion 2C is w3a, and the thickness of the blade leading edge portion 3C is w3b. In this case, the thickness w3b of the blade leading edge portion 3C is also, for example, 0.4 mm or less, more preferably 0.3 mm or less, more preferably 0.2 mm or less. In this case, since the thickness of the wheel main body portion 2C is independent of the thickness of the blade leading edge portion 3C, the thickness of the blade leading edge portion 3C can be determined by the thickness of the substrate to be scribed or the mounting density of the component. In order to increase the range of application of the scoring wheel 1C, it is preferable to make the thickness w3b thinner, for example, 0.05 mm or less. Further, the lower limit of the thickness w3b of the blade leading edge portion 3C is determined by the required strength, and is preferably 0.03 mm or more. In the case where a thin member made of a brittle material such as a glass plate or a semiconductor substrate having a thickness of 0.7 mm or less is used to mount a fine member at a high density, the scribing wheel having the thin edge leading edge portion described above is used. effective.

(Fourth embodiment)

Next, a fourth embodiment of the present invention will be described with reference to Fig. 9 . The scribe wheel 1D of the fourth embodiment is the same as the first embodiment except for the wheel main body portion 2D and the blade leading edge portion 3D. At this moment, the rowing wheel 1D is such that the wheel body portion 2D is a three-stage tapered surface. In other words, the inclined portions 41 and 42 are replaced by the inclined portions 43 and 44 of the three stages, and the blade leading edge portion 3D is formed in the center. The other structure is the same as that of the first embodiment. Further, the polishing of the right and left tapered portions 6 and the tapered portions 7 is the same as that of the first embodiment. It is sufficient that the polishing of the wheel main body portion 2D is a grinding process of the left and right inclined surfaces of the inclined portion near the blade leading edge portion 3D. In this case, the angle of the polishing process can be appropriately selected only by the blade leading edge portion 3D. Thereafter, the scribing wheel 1C is completed by cutting at the front end of the tapered portion 6. In addition, the inclined portions 43, 44 may be formed between the cylindrical shaft portion 4, the cylindrical shaft portion 5, and the central portion of the inclined portions 43, 44 to form a so-called R-face that is curved to be continuously inclined. In this case, the wire-cut electrical discharge machining is performed. easily.

In this embodiment, it is assumed that the thickness of the wheel main body portion 2D is w4a, and the thickness of the blade leading edge portion 3D is w4b. In this case, the thickness w4b of the blade leading edge portion 3D is also, for example, 0.4 mm or less, more preferably 0.3 mm or less, more preferably 0.2 mm or less. In this case, since the thickness of the wheel main body portion 2D is independent of the thickness of the blade leading edge portion 3D, the thickness of the blade leading edge portion 3D can be determined by the thickness of the substrate to be scribed or the mounting density of the component. In order to increase the range of application of the scoring wheel 1D, it is preferable to make the thickness w4b thinner, for example, 0.05 mm or less. Further, the lower limit of the thickness w4b of the blade leading edge portion 3D is determined by the required strength, and is preferably 0.03 mm or more. In the case where a thin member made of a brittle material such as a glass plate or a semiconductor substrate having a thickness of 0.7 mm or less is used to mount a fine member at a high density, the scribing wheel having the thin edge leading edge portion described above is used. effective.

(Fifth Embodiment)

Next, a fifth embodiment of the present invention will be described with reference to Fig. 10 . The scribe wheel 1E of the fifth embodiment differs only in the wheel main body portion 2E and the blade leading edge portion 3E, and the other portions are the same as those in the first embodiment. In the engraved wheel 1E of the fifth embodiment, as shown in a partially enlarged view of Figs. 10 and 11, the blade leading edge portion 3E has a circular plate portion 40 provided at the center of the wheel main body portion 2E, and the ridge line is formed as a cone. The front edge of the face blade. The thickness of the disc portion 40 is the thickness of the blade leading edge portion 3E, so that it is w5b. Conical inclined portions 46, 47, 48, and 49 are formed on both sides of the disc portion 40. Thus, even if the thickness w5b of the disc portion 40 is reduced, the strength is maintained by the inclined portions 46 to 49. Further, the polishing of the right and left tapered portions 6 and the tapered portions 7 is the same as that of the first embodiment. It is sufficient that the polishing of the wheel main body portion 2E is a grinding process of the left and right inclined surfaces of the inclined portion of the blade leading edge portion 3E. In this case, the angle of the polishing process can be appropriately selected only by the blade leading edge portion 3E. Thereafter, the scribing wheel 1E is completed by cutting at the front end of the tapered portion 6. In addition, the inclined portions 46 to 49 may be formed between the cylindrical shaft portion 4 and the cylindrical shaft portion 5 and between the inclined portions 46 and 47, 48 and 49 so as to form a so-called R-face which is curved to be continuous in a gentle oblique direction. EDM is easier to process.

In this embodiment, it is assumed that the thickness of the wheel main body portion 2E is w5a, and the thickness of the blade leading edge portion 3E is w5b. In this case, the thickness w5b of the blade leading edge portion 3E is also, for example, 0.4 mm or less, preferably 0.3 mm or less, more preferably 0.2 mm or less. In this case, since the thickness of the wheel main body portion 2E is independent of the thickness of the blade leading edge portion 3E, the thickness of the blade leading edge portion 3E can be determined by the thickness of the substrate to be scribed or the mounting density of the component. In order to increase the range of application of the scoring wheel 1E, it is preferable to make the thickness w5b thinner, for example, 0.05 mm or less. Further, the lower limit of the thickness w5b of the blade leading edge portion 3E is determined by the required strength, and is preferably 0.03 mm or more. In the case where a thin member made of a brittle material such as a glass plate or a semiconductor substrate having a thickness of 0.7 mm or less is used to mount a fine member at a high density, the scribing wheel having the thin edge leading edge portion described above is used. effective.

In this embodiment, since the disk portion 40 having a constant thickness is provided, only the distance d shown in Fig. 11 varies depending on the degree of polishing of the blade leading edge portion 3E, and the thickness w5b of the blade leading edge portion 3E does not change.

Further, in each of the above-described embodiments, as shown in Japanese Patent No. 3074143 or WO2007/004700, a groove having a predetermined shape may be formed at a ridgeline portion of the leading edge of the blade. The predetermined shape of the groove can be, for example, a U-shaped, V-shaped, sawtooth wave or rectangular groove as shown in Figs. 12(a) to 12(d). Such a groove can be formed by forming a predetermined interval on the outer peripheral portion of the scoring wheel by hot working such as grinding, fine discharge, or laser. The pitch of the groove is, for example, 20 μm or more corresponding to the outer diameter, and the depth of the groove is, for example, 2 to 20 μm in accordance with the outer shape. By forming such a groove in advance, the brittle material substrate such as a glass substrate does not slide when the scribe line is formed, and the vertical crack can be deeply extended, so that the division after scribe is easy. Appropriate selection of the pitch and the depth of the groove can achieve a balance between the initial performance of the surface of the substrate such as glass and the ability to extend the vertical crack.

[Industrial availability]

The present invention can be used usefully in the scoring apparatus after the scribing of the brittle material substrate.

1A, 1B, 1C, 1D, 1E. . . Scoring wheel 120

2A, 2B, 2C, 2D, 2E. . . Wheel body

3A, 3B, 3C, 3D, 3E. . . Front edge

4, 5. . . Cylindrical shaft

6, 7. . . Cone

10. . . Material block

11, 21. . . Superhard alloy

12, 22. . . Sintered diamond layer

20. . . Processing material

30~39. . . Processing line

40. . . Round plate

41~49. . . Inclined portion

Fig. 1 is a view showing an example of a conventional marking wheel.

Fig. 2 is a view showing a state of scribing of a substrate using a conventional scribing wheel.

Fig. 3 is a front view and a right side view of the engraving wheel according to the first embodiment of the present invention.

Fig. 4 is a view showing a state of scribing of a substrate using the scribing wheel of the embodiment.

Fig. 5A is a perspective view showing the material block 10 used for the manufacture of the marking wheel of the embodiment.

FIG. 5B is a perspective view showing the processed material 20 cut from the material block 10.

Fig. 5C is a view showing a processing line (processed portion) of the electric discharge machining of the processed material 20.

Fig. 5D is an enlarged view showing the sintered diamond layer after the electric discharge machining.

Fig. 6 is a view showing a modification of the first embodiment.

Fig. 7 is a front view and a right side view of the engraving wheel according to the second embodiment of the present invention.

Fig. 8 is a front view and a right side view of the scribe wheel of the third embodiment of the present invention.

Fig. 9 is a front view and a right side view of the scribe wheel of the fourth embodiment of the present invention.

Fig. 10 is a front view and a right side view of the scribe wheel of the fifth embodiment of the present invention.

Fig. 11 is a partially enlarged plan view showing the leading edge of the scribing wheel of the fifth embodiment of the present invention.

Fig. 12 is a partially enlarged view showing an example of a groove of a leading edge of a scribe wheel of each embodiment of the present invention.

1A. . . Scoring wheel 120

2A. . . Wheel body

3A. . . Front edge

4, 5. . . Cylindrical shaft

6, 7. . . Cone

C. . . Length of cylindrical shaft

D. . . Outer diameter of the wheel body

W1. . . Thickness of the leading edge of the blade and the body of the wheel

α. . . Angle of the leading edge of the blade

β. . . Angle of the cone

Claims (17)

A scribing wheel comprising: a disc-shaped wheel body portion formed by a sintered diamond having a circular ridge line in a plane; a cylindrical shaft portion coaxially formed by a sintered diamond layer on the left and right sides of the wheel body portion; a tapered portion formed coaxially at an outer end portion of each of the cylindrical shaft portions at a predetermined angle, and a blade leading edge portion formed at a predetermined angle of a ridgeline portion of the wheel body portion; the wheel body portion And having a tapered inclined portion continuous with the cylindrical shaft portion, and setting the formation angle of the inclined portion to be smaller than a vertex angle of the ridge portion. The scriber wheel of claim 1, wherein the wheel body portion has at least two tapered surfaces formed by polishing only a tapered surface forming a ridge line of the blade leading edge portion. The scriber wheel of claim 1, wherein the blade leading edge portion is formed with a groove having a predetermined shape in a ridge line. The scriber wheel of claim 1, wherein the thickness of the front edge portion of the blade is set to 0.4 mm or less. The scriber wheel of claim 1, wherein only the portion of the wheel body portion formed by one of the ridge lines is a blade leading edge portion, and the thickness of the blade leading edge portion is set to 0.03 mm. the above. For example, the marking wheel of claim 1 of the patent scope, wherein the aforementioned blade The edge portion has a circular plate portion provided at the center of the wheel main body portion, and a tapered surface portion constituting the ridge portion at the tip end of the circular plate portion. The inclined portion is provided on both sides of the disc portion. For example, in the marking wheel of claim 6, wherein the thickness of the disc portion is set in the range of 0.4 to 0.03 mm. The scriber wheel of claim 1, wherein the inclined portion of the wheel body portion is curved to be continuous with the cylindrical shaft portion. The scriber wheel of claim 1, wherein the apex angle apex of the ridge portion of the blade edge portion and the angle β of the tapered portion satisfy the following formula: 185° ≦α+β≦290°; the apex angle of the ridge line portion α is 90° ≦ α ≦ 170°; the angle β of the aforementioned taper portion satisfies 75° ≦ β ≦ 120°. The scriber wheel of claim 9, wherein the angle β of the tapered portion satisfies the following formula: 90° ≦ α ≦ 120°. The marking wheel of claim 9 or 10, wherein the outer diameter D of the wheel body portion satisfies the following formula 1 mm ≦ D ≦ 6 mm. The marking wheel of claim 9 or 10, wherein the outer diameter D of the wheel body portion satisfies the following formula 1 mm ≦ D ≦ 2.5 mm. Such as the marking of the 9th or 10th patent range, where the former The outer diameter D of the wheel body portion and the length C of the cylindrical shaft portion satisfy the following formula C<D. The scriber wheel of claim 11, wherein the outer diameter D of the wheel body portion and the length C of the cylindrical shaft portion satisfy the following formula C<D. The scriber wheel of claim 12, wherein the outer diameter D of the wheel body portion and the length C of the cylindrical shaft portion satisfy the following formula C<D. A method for manufacturing a scoring wheel, which is a cylindrical processing material in which a cylindrical portion of a sintered diamond layer is coaxially formed at one end of a cylindrical member formed of a super-hard alloy; and the cylindrical portion of the superhard alloy is maintained while rotating Forming a pair of coaxial cylindrical shaft portions and a wheel body portion sandwiched between the cylindrical shaft portions by wire-cut electrical discharge machining; maintaining the cylindrical portion of the super-hard alloy while rotating, respectively, the respective cylindrical shaft portions The outer end portion is formed into a tapered shape by grinding; while maintaining the cylindrical portion of the super-hard alloy while rotating, the ridge line portion of the wheel body portion is ground to a predetermined angle to form a blade leading edge portion; Forming a tapered inclined portion continuous with the cylindrical shaft portion, and setting an angle of formation of the inclined portion to be smaller than a vertex angle of the ridge portion; and manufacturing by cutting the sintered diamond layer and the superhard alloy . The manufacturing method of the marking wheel of claim 16, wherein the cylindrical shaft portion and the wheel body portion of the wire cutting electric discharge machining are used At the time of formation, the tapered portion is simultaneously formed on the outer side of the cylindrical shaft portion, and the surface-degraded layer generated by the wire-cut electrical discharge machining is removed during the polishing of the tapered portion of the cylindrical shaft portion.