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TWI425681B - Method for manufacturing led - Google Patents

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Publication number
TWI425681B
TWI425681B TW99139129A TW99139129A TWI425681B TW I425681 B TWI425681 B TW I425681B TW 99139129 A TW99139129 A TW 99139129A TW 99139129 A TW99139129 A TW 99139129A TW I425681 B TWI425681 B TW I425681B
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Taiwan
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metal
light
layer
metal layer
emitting diode
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TW99139129A
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Chinese (zh)
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TW201220558A (en
Inventor
Chao Hsiung Chang
Chieh Ling Chang
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Advanced Optoelectronic Tech
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Priority to TW99139129A priority Critical patent/TWI425681B/en
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Publication of TWI425681B publication Critical patent/TWI425681B/en

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Description

發光二極體製造方法 Light-emitting diode manufacturing method

本發明涉及一種二極體製造方法,特別是指一種發光二極體製造方法。 The invention relates to a method for manufacturing a diode, in particular to a method for manufacturing a light-emitting diode.

發光二極體憑藉其高光效、低能耗、無污染等優點,已被應用於越來越多的場合之中,大有取代傳統光源的趨勢。 Light-emitting diodes have been used in more and more occasions due to their high luminous efficiency, low energy consumption, and no pollution. They have a tendency to replace traditional light sources.

習知的單個發光二極體通常是通過切割一整塊發光二極體基材得到的。發光二極體基材是由上下表面設有金屬電極的基板、固定在基板表面的發光晶片及覆蓋晶片的封裝體所組成的。基板上開設有多個貫穿上下金屬電極的孔洞,並在孔洞的上方覆蓋一層抵接上金屬電極的絕緣材料(通常為綠漆)。設置該絕緣材料的目的在於在後續的封裝體成型過程中對封裝體起到承載作用,防止其落入孔洞內而影響後續對孔洞的切割。 Conventional single light-emitting diodes are typically obtained by cutting a single piece of light-emitting diode substrate. The light-emitting diode substrate is composed of a substrate provided with metal electrodes on the upper and lower surfaces, a light-emitting chip fixed on the surface of the substrate, and a package covering the wafer. A plurality of holes penetrating the upper and lower metal electrodes are formed on the substrate, and an insulating material (usually green paint) abutting the metal electrodes is covered over the holes. The purpose of the insulating material is to support the package during the subsequent molding process, preventing it from falling into the hole and affecting the subsequent cutting of the hole.

然而,習知的該種絕緣材料由於直接形成於上金屬電極表面,其需佔據相當部分的上金屬電極面積,導致餘留的可供打線的面積較少,給後續的金線打線過程造成困擾。並且,絕緣材料的反射率較低,發光晶片照射到絕緣材料表面的光線不能有效地被反射,直接影響到發光二極體的出光亮度。此外,此種絕緣材料的機械強度有限,在封裝體成型過程中仍有可能會發生塌陷而導致封 裝體落入孔洞內,進而影響產品良率。 However, the conventional insulating material is formed directly on the surface of the upper metal electrode, and it needs to occupy a considerable portion of the upper metal electrode area, resulting in less remaining area for wire bonding, which causes trouble for the subsequent gold wire bonding process. . Moreover, the reflectivity of the insulating material is low, and the light that is irradiated onto the surface of the insulating material by the light-emitting chip cannot be effectively reflected, which directly affects the light-emitting brightness of the light-emitting diode. In addition, the mechanical strength of such an insulating material is limited, and it may still collapse during the molding process of the package to cause sealing. The body falls into the hole, which affects the product yield.

因此,有必要提供一發光二極體製造方法,其產品良率較高。 Therefore, it is necessary to provide a method for manufacturing a light-emitting diode, which has a high product yield.

一種發光二極體製造方法,包括步驟:提供上下表面分別形成有第一金屬層及第二金屬層的基板,第一金屬層及第二金屬層均被多條溝槽分割為多個獨立的區域,基板具有多個貫穿各第一金屬層及第二金屬層的通孔,各通孔內壁面形成連接第一金屬層及第二金屬層的金屬連接層;在各通孔內填設絕緣材料;在各絕緣材料表面形成金屬強化層;提供多個發光晶片,將各發光晶片電連接至二相鄰的第一金屬層;在這些金屬強化層表面形成覆蓋發光晶片的連續的封裝體;沿各通孔切割基板而形成多個獨立的發光二極體。 A method for manufacturing a light emitting diode includes the steps of: providing a substrate having a first metal layer and a second metal layer respectively formed on the upper and lower surfaces, wherein the first metal layer and the second metal layer are each divided into a plurality of independent trenches by a plurality of trenches The substrate has a plurality of through holes penetrating through the first metal layer and the second metal layer, and the inner wall surface of each of the through holes forms a metal connection layer connecting the first metal layer and the second metal layer; and the insulation is filled in each through hole a material; forming a metal strengthening layer on each surface of the insulating material; providing a plurality of light emitting wafers, electrically connecting the respective light emitting wafers to two adjacent first metal layers; forming a continuous package covering the light emitting wafers on the surface of the metal strengthening layers; A plurality of independent light-emitting diodes are formed by cutting the substrate along each of the through holes.

由於在通孔的絕緣材料表面形成有金屬強化層,其機械強度可得到增強,因此在形成封裝體時不會出現絕緣材料塌陷的情形,從而提升產品的良率。 Since the metal reinforcing layer is formed on the surface of the insulating material of the through hole, the mechanical strength can be enhanced, so that the insulating material does not collapse when the package is formed, thereby improving the yield of the product.

10‧‧‧基板 10‧‧‧Substrate

100‧‧‧溝槽 100‧‧‧ trench

12‧‧‧通孔 12‧‧‧through hole

20‧‧‧第一金屬層 20‧‧‧First metal layer

30‧‧‧第二金屬層 30‧‧‧Second metal layer

40‧‧‧金屬連接層 40‧‧‧Metal connection layer

50‧‧‧絕緣材料 50‧‧‧Insulation materials

60‧‧‧金屬強化層 60‧‧‧Metal strengthening layer

70‧‧‧發光晶片 70‧‧‧Lighting chip

80‧‧‧金線 80‧‧‧ Gold wire

90‧‧‧封裝體 90‧‧‧Package

圖1示出了製造本發明發光二極體的第一個步驟。 Figure 1 shows the first step in the fabrication of the light-emitting diode of the present invention.

圖2示出了製造本發明發光二極體的第二個步驟。 Figure 2 shows the second step in the fabrication of the light-emitting diode of the present invention.

圖3示出了製造本發明發光二極體的第三個步驟。 Figure 3 shows the third step in the fabrication of the light-emitting diode of the present invention.

圖4為圖3的俯視圖。 Figure 4 is a plan view of Figure 3.

圖5示出了製造本發明發光二極體的第四個步驟。 Figure 5 shows the fourth step in the fabrication of the light-emitting diode of the present invention.

圖6為圖5的俯視圖。 Figure 6 is a plan view of Figure 5.

圖7示出了製造本發明發光二極體的第五個步驟。 Figure 7 shows the fifth step in the fabrication of the light-emitting diode of the present invention.

圖8示出了製造本發明發光二極體的第六個步驟。 Figure 8 shows the sixth step in the fabrication of the light-emitting diode of the present invention.

圖9示出了製造本發明發光二極體的第七個步驟。 Figure 9 shows the seventh step in the fabrication of the light-emitting diode of the present invention.

圖10示出了製造本發明發光二極體的第八個步驟。 Figure 10 shows the eighth step in the fabrication of the light-emitting diode of the present invention.

本發明公開了一種發光二極體的製造方法,其步驟如下:首先,如圖1所示提供一基板10。該基板10可以由塑膠、矽或陶瓷等材料所製成,其具有平整的頂面及底面。 The invention discloses a method for manufacturing a light-emitting diode, the steps of which are as follows: First, a substrate 10 is provided as shown in FIG. The substrate 10 can be made of a material such as plastic, tantalum or ceramic, and has a flat top surface and a bottom surface.

然後,如圖2所示在基板10的頂面及底面上通過電鍍或蒸鍍分別形成一第一金屬層20及一第二金屬層30。該第一金屬層20及第二金屬層30分別覆蓋基板10的整個頂面及底面,且二者互相平行。第一金屬層20及第二金屬層30的材料可選自鋁、銅、銀等導電能力較佳的金屬材料。 Then, as shown in FIG. 2, a first metal layer 20 and a second metal layer 30 are respectively formed on the top surface and the bottom surface of the substrate 10 by electroplating or evaporation. The first metal layer 20 and the second metal layer 30 respectively cover the entire top surface and the bottom surface of the substrate 10, and the two are parallel to each other. The material of the first metal layer 20 and the second metal layer 30 may be selected from metal materials having better conductivity such as aluminum, copper, and silver.

之後,如圖3-4所示在基板10上通過鑽孔或以其他方式形成多個呈矩陣式分佈的通孔12。這些通孔12均垂直貫穿第一金屬層20及第二金屬層30。 Thereafter, a plurality of through-holes 12 distributed in a matrix are formed on the substrate 10 by drilling or otherwise as shown in FIGS. 3-4. The through holes 12 all penetrate the first metal layer 20 and the second metal layer 30 vertically.

隨後,如圖5-6所示在第一金屬層20及第二金屬層30上開設多道平行的溝槽100,使第一金屬層20及第二金屬層30均被這些溝槽100分割為多條獨立的條狀區域。每一溝槽100位於兩行相鄰的通孔12之間,並暴露出基板10的頂面。同時,在各個通孔12的內壁面上形成一連接第一金屬層20及第二金屬層30的金屬連接層40。由於金屬連接層40的連接,每一通孔12左側的第一金屬層20、第二金屬層30及金屬連接層40共同形成一第一引腳(圖未標),右側的第一金屬層20、第二金屬層30及金屬連接層40共同形成一第二引腳(圖未標)。 Subsequently, as shown in FIG. 5-6, a plurality of parallel trenches 100 are formed on the first metal layer 20 and the second metal layer 30, so that the first metal layer 20 and the second metal layer 30 are both divided by the trenches 100. For multiple independent strips. Each trench 100 is located between two adjacent vias 12 and exposes the top surface of the substrate 10. At the same time, a metal connection layer 40 connecting the first metal layer 20 and the second metal layer 30 is formed on the inner wall surface of each of the through holes 12. Due to the connection of the metal connection layer 40, the first metal layer 20, the second metal layer 30 and the metal connection layer 40 on the left side of each via hole 12 together form a first pin (not labeled), and the first metal layer 20 on the right side. The second metal layer 30 and the metal connection layer 40 together form a second pin (not shown).

然後,如圖7所示在各個通孔12內填充絕緣材料50。該絕緣材料50可為綠漆(green mask)或者其他合適的絕緣材料。絕緣材料50僅填充通孔12的上部而餘留出通孔12下部,以方便後續的切割制程。絕緣材料50的頂面與第一金屬層20的頂面齊平,底面高於基板10的底面。 Then, the insulating material 50 is filled in each of the through holes 12 as shown in FIG. The insulating material 50 can be a green mask or other suitable insulating material. The insulating material 50 fills only the upper portion of the through hole 12 and leaves the lower portion of the through hole 12 to facilitate the subsequent cutting process. The top surface of the insulating material 50 is flush with the top surface of the first metal layer 20, and the bottom surface is higher than the bottom surface of the substrate 10.

之後,如圖8所示在各絕緣材料50及第一金屬層20的頂面形成一金屬強化層60。該金屬強化層60可由金、銀、銅、鋁等材料所製成,本實施例中優選為金,以保護第一金屬層20以起到防氧化作用。該金屬強化層60完全覆蓋絕緣材料50頂面並部分覆蓋第一金屬層20頂面,相鄰的金屬強化層60通過溝槽100隔開以避免短接。第一金屬層20頂面由於部分被金屬強化層60所覆蓋而僅暴露出臨近溝槽100的部分區域。 Thereafter, a metal reinforcing layer 60 is formed on each of the insulating material 50 and the top surface of the first metal layer 20 as shown in FIG. The metal strengthening layer 60 may be made of a material such as gold, silver, copper, aluminum, or the like, and is preferably gold in this embodiment to protect the first metal layer 20 from oxidation. The metal strengthening layer 60 completely covers the top surface of the insulating material 50 and partially covers the top surface of the first metal layer 20. The adjacent metal strengthening layers 60 are separated by the trenches 100 to avoid shorting. The top surface of the first metal layer 20 is only partially exposed to a portion of the adjacent trench 100 due to being partially covered by the metal strengthening layer 60.

隨後,如圖9所示在每一金屬強化層60的頂面固定一發光晶片70。該發光晶片70可採用氮化鎵、氮化銦鎵、氮化鋁銦鎵、磷化鎵 等半導體發光材料所製成。發光晶片70通過黏膠(圖未示)固定在金屬強化層60上對應於第一引腳的位置處。發光晶片70通過二金線80分別連接至相鄰的二金屬強化層60,其中一金線80與發光晶片70所處的金屬強化層60上對應第一引腳的位置連接,另一金線80與相鄰的金屬強化層60上對應第二引腳的位置連接。 Subsequently, an illuminating wafer 70 is attached to the top surface of each of the metal reinforced layers 60 as shown in FIG. The luminescent wafer 70 can adopt gallium nitride, indium gallium nitride, aluminum indium gallium nitride, gallium phosphide Made of semiconductor luminescent materials. The luminescent wafer 70 is fixed to the metal reinforced layer 60 at a position corresponding to the first pin by an adhesive (not shown). The illuminating wafers 70 are respectively connected to the adjacent two metal reinforced layers 60 through the two gold wires 80. One of the gold wires 80 is connected to the position of the corresponding first pin on the metal reinforced layer 60 where the luminescent wafer 70 is located, and the other gold wire is connected. 80 is connected to the position of the corresponding second pin on the adjacent metal strengthening layer 60.

然後,在基板10上成型封裝體90。該封裝體90由環氧樹脂、聚碳酸酯、聚甲基丙烯酸甲酯等透明材料製成。封裝體90內可摻雜有螢光粉(圖未示),以改變發光晶片70的出光顏色。該螢光粉可由釔鋁石榴石、矽酸鹽化合物、氮化物、氮氧化物等螢光材料所製成,具體取決於實際需求。該封裝體90覆蓋金屬強化層60頂面、暴露出來的第一金屬層20及基板10頂面,從而將發光晶片70與外界環境隔絕開。由於金屬強化層60的支撐,絕緣材料50的抗壓能力增強,從而不易在成型封裝體90的過程中發生塌陷。並且,由於絕緣材料50是填充在通孔12內部,其厚度相比於習知技術中接合於上金屬層的絕緣材料的厚度更大,可進一步提升其機械強度。 Then, the package 90 is formed on the substrate 10. The package 90 is made of a transparent material such as epoxy resin, polycarbonate, or polymethyl methacrylate. The package body 90 may be doped with phosphor powder (not shown) to change the color of the light emitted from the light-emitting wafer 70. The phosphor powder can be made of a fluorinated material such as yttrium aluminum garnet, phthalate compound, nitride, oxynitride, etc., depending on actual needs. The package body 90 covers the top surface of the metal strengthening layer 60, the exposed first metal layer 20, and the top surface of the substrate 10, thereby isolating the luminescent wafer 70 from the external environment. Due to the support of the metal strengthening layer 60, the pressure resistance of the insulating material 50 is enhanced, so that it is difficult to collapse during the molding of the package 90. Further, since the insulating material 50 is filled inside the through hole 12, the thickness thereof is larger than that of the insulating material bonded to the upper metal layer in the prior art, and the mechanical strength thereof can be further improved.

最後,沿每一通孔12的內壁面對基板10進行切割,使之分離為多個如圖10所示的獨立的發光二極體。 Finally, the substrate 10 is cut along the inner wall of each of the through holes 12 to be separated into a plurality of independent light-emitting diodes as shown in FIG.

由於金屬強化層60本身即可導電,金線80可直接打在金屬強化層60上,從而不會出現由於打線面積過小而導致打線不便的問題。並且,金屬強化層60較高的反射率可有效地對發光晶片70發出的光線進行反射,進而提升發光二極體的出光亮度。 Since the metal strengthening layer 60 itself can conduct electricity, the gold wire 80 can be directly struck on the metal strengthening layer 60, so that the problem that the wire bonding is inconvenient due to the too small wire bonding area does not occur. Moreover, the higher reflectivity of the metal strengthening layer 60 can effectively reflect the light emitted by the light-emitting chip 70, thereby improving the light-emitting brightness of the light-emitting diode.

可以理解地,金屬強化層60也可僅覆蓋每一絕緣材料50表面而完全暴露出第一金屬層20頂面,此時發光晶片70可直接固定於第一金屬層20上並將金線80打在相鄰的第一金屬層20上。當然,金屬強化層60也可完全覆蓋每一絕緣材料50及第一金屬層20頂面,其發光晶片70及打線位置與前述部分覆蓋的情況相同。另外,發光晶片70也可直接固定在基板10暴露於溝槽100內的頂面上,再通過金線80與第一引腳及第二引腳連接。當然,發光晶片70還可以通過倒裝(flip-chip)的方式直接固定於第一引腳及第二引腳的表面,從而避免使用金線80。 It can be understood that the metal strengthening layer 60 can also cover only the surface of each insulating material 50 to completely expose the top surface of the first metal layer 20, and the light emitting wafer 70 can be directly fixed on the first metal layer 20 and the gold wire 80 is It is struck on the adjacent first metal layer 20. Of course, the metal strengthening layer 60 can also completely cover the top surface of each of the insulating material 50 and the first metal layer 20. The light-emitting chip 70 and the wire bonding position are the same as those of the foregoing partial covering. In addition, the light-emitting chip 70 can also be directly fixed on the top surface of the substrate 10 exposed in the trench 100, and then connected to the first pin and the second pin through the gold wire 80. Of course, the light-emitting chip 70 can also be directly fixed to the surfaces of the first pin and the second pin by flip-chip, thereby avoiding the use of the gold wire 80.

綜上所述,本發明符合發明專利要件,爰依法提出專利申請。惟,以上所述者僅為本發明之較佳實施例,舉凡熟悉本案技藝之人士,在爰依本發明精神所作之等效修飾或變化,皆應涵蓋於以下之申請專利範圍內。 In summary, the present invention complies with the requirements of the invention patent and submits a patent application according to law. The above description is only the preferred embodiment of the present invention, and equivalent modifications or variations made by those skilled in the art will be included in the following claims.

10‧‧‧基板 10‧‧‧Substrate

100‧‧‧溝槽 100‧‧‧ trench

12‧‧‧通孔 12‧‧‧through hole

20‧‧‧第一金屬層 20‧‧‧First metal layer

30‧‧‧第二金屬層 30‧‧‧Second metal layer

40‧‧‧金屬連接層 40‧‧‧Metal connection layer

50‧‧‧絕緣材料 50‧‧‧Insulation materials

60‧‧‧金屬強化層 60‧‧‧Metal strengthening layer

70‧‧‧發光晶片 70‧‧‧Lighting chip

80‧‧‧金線 80‧‧‧ Gold wire

90‧‧‧封裝體 90‧‧‧Package

Claims (10)

一種發光二極體製造方法,包括步驟:提供上下表面分別形成第一金屬層及第二金屬層的基板,第一金屬層及第二金屬層均通過溝槽分割為多個獨立的區域,基板開設貫穿第一金屬層及第二金屬層的多個通孔,並在各通孔內壁面形成連接第一金屬層及第二金屬層的金屬連接層;在各通孔內分別填充絕緣材料;在各絕緣材料表面形成金屬強化層,相鄰的金屬強化層通過溝槽隔開;提供多個發光晶片,將各發光晶片電連接至相鄰的二第一金屬層;在金屬強化層上形成覆蓋發光晶片的連續的封裝體;沿通孔切割基板而形成多個獨立的發光二極體。 A method for manufacturing a light emitting diode includes the steps of: providing a substrate on which upper and lower surfaces respectively form a first metal layer and a second metal layer, wherein the first metal layer and the second metal layer are each divided into a plurality of independent regions by a trench, and the substrate a plurality of through holes penetrating through the first metal layer and the second metal layer are formed, and a metal connection layer connecting the first metal layer and the second metal layer is formed on the inner wall surface of each of the through holes; and each of the through holes is filled with an insulating material; Forming a metal strengthening layer on the surface of each insulating material, the adjacent metal strengthening layers are separated by the grooves; providing a plurality of light emitting chips, electrically connecting the respective light emitting chips to the adjacent two first metal layers; forming on the metal strengthening layer A continuous package covering the light-emitting wafer; the substrate is cut along the through hole to form a plurality of independent light-emitting diodes. 如申請專利範圍第1項所述之發光二極體製造方法,其中絕緣材料的頂面與第一金屬層的頂面齊平。 The method of manufacturing a light-emitting diode according to claim 1, wherein a top surface of the insulating material is flush with a top surface of the first metal layer. 如申請專利範圍第2項所述之發光二極體製造方法,其中絕緣材料的底面高於基板的底面。 The method of manufacturing a light-emitting diode according to claim 2, wherein the bottom surface of the insulating material is higher than the bottom surface of the substrate. 如申請專利範圍第1項所述之發光二極體製造方法,其中金屬強化層還覆蓋第一金屬層。 The method of manufacturing a light-emitting diode according to claim 1, wherein the metal strengthening layer further covers the first metal layer. 如申請專利範圍第1至4任一項所述之發光二極體製造方法,其中發光晶片固定於金屬強化層上。 The method for producing a light-emitting diode according to any one of claims 1 to 4, wherein the light-emitting wafer is fixed on the metal reinforcing layer. 如申請專利範圍第1至4任一項所述之發光二極體製造方法,其中 各發光晶片通過二金線連接至相鄰的二金屬強化層。 A method of manufacturing a light-emitting diode according to any one of claims 1 to 4, wherein Each of the light-emitting wafers is connected to an adjacent two metal-reinforced layer by a two gold wire. 如申請專利範圍第1至4任一項所述之發光二極體製造方法,其中通孔與溝槽交替分佈於基板上。 The method for manufacturing a light-emitting diode according to any one of claims 1 to 4, wherein the through holes and the grooves are alternately distributed on the substrate. 如申請專利範圍第1至4任一項所述之發光二極體製造方法,其中絕緣材料包含綠漆。 The method of manufacturing a light-emitting diode according to any one of claims 1 to 4, wherein the insulating material comprises green lacquer. 如申請專利範圍第1至4任一項所述之發光二極體製造方法,其中金屬強化層由金所製成。 The method for producing a light-emitting diode according to any one of claims 1 to 4, wherein the metal strengthening layer is made of gold. 一種發光二極體製造方法,包括步驟:提供上下表面分別形成第一金屬層及第二金屬層的基板,第一金屬層及第二金屬層均通過溝槽分割為多個獨立的區域,基板開設貫穿第一金屬層及第二金屬層的多個通孔,並在各通孔內壁面形成連接第一金屬層及第二金屬層的金屬連接層;在各通孔內分別填充絕緣材料;在各絕緣材料表面形成金屬強化層,金屬強化層還覆蓋第一金屬層;提供多個發光晶片,將各發光晶片電連接至相鄰的二第一金屬層;在金屬強化層上形成覆蓋發光晶片的連續的封裝體;沿通孔切割基板而形成多個獨立的發光二極體。 A method for manufacturing a light emitting diode includes the steps of: providing a substrate on which upper and lower surfaces respectively form a first metal layer and a second metal layer, wherein the first metal layer and the second metal layer are each divided into a plurality of independent regions by a trench, and the substrate a plurality of through holes penetrating through the first metal layer and the second metal layer are formed, and a metal connection layer connecting the first metal layer and the second metal layer is formed on the inner wall surface of each of the through holes; and each of the through holes is filled with an insulating material; Forming a metal strengthening layer on the surface of each insulating material, the metal strengthening layer further covering the first metal layer; providing a plurality of light emitting chips, electrically connecting each of the light emitting chips to the adjacent two first metal layers; forming a cover light on the metal strengthening layer a continuous package of the wafer; the substrate is cut along the through hole to form a plurality of independent light emitting diodes.
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Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW457671B (en) * 2000-07-25 2001-10-01 Phoenix Prec Technology Corp Processing for via in pad of BGA substrate
TW200302527A (en) * 2002-01-22 2003-08-01 Canon Kk Semiconductor device and method of manufacturing semiconductor device
US6872590B2 (en) * 2002-12-30 2005-03-29 Samsung Electro-Mechanics Co., Ltd Package substrate for electrolytic leadless plating and manufacturing method thereof
TW200824058A (en) * 2005-02-23 2008-06-01 Almt Corp Semiconductor element mounting member, semiconductor device, imaging device, light emitting diode constituting member, and light emitting diode
WO2007094221A1 (en) * 2006-02-16 2007-08-23 Tokuyama Corporation Metallized ceramic board incorporating lead and package
TW200952589A (en) * 2008-06-04 2009-12-16 Phoenix Prec Technology Corp Package substrate having double-sided circuits and fabrication method thereof
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