TWI420098B - A defect inspection apparatus and method using the image data for defect inspection, a method for manufacturing the same, and a recording medium - Google Patents
A defect inspection apparatus and method using the image data for defect inspection, a method for manufacturing the same, and a recording medium Download PDFInfo
- Publication number
- TWI420098B TWI420098B TW98124293A TW98124293A TWI420098B TW I420098 B TWI420098 B TW I420098B TW 98124293 A TW98124293 A TW 98124293A TW 98124293 A TW98124293 A TW 98124293A TW I420098 B TWI420098 B TW I420098B
- Authority
- TW
- Taiwan
- Prior art keywords
- defect
- frequency
- interval
- defect candidate
- image
- Prior art date
Links
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- 238000007689 inspection Methods 0.000 title claims description 180
- 238000000034 method Methods 0.000 title claims description 69
- 238000004519 manufacturing process Methods 0.000 title claims description 27
- 238000012545 processing Methods 0.000 claims description 107
- 230000000737 periodic effect Effects 0.000 claims description 73
- 238000009826 distribution Methods 0.000 claims description 70
- 230000032258 transport Effects 0.000 claims description 42
- 238000003672 processing method Methods 0.000 claims description 28
- 238000000605 extraction Methods 0.000 claims description 18
- 238000011156 evaluation Methods 0.000 claims description 15
- 230000008859 change Effects 0.000 claims description 6
- 239000000284 extract Substances 0.000 claims description 6
- 238000005520 cutting process Methods 0.000 claims description 4
- 230000001678 irradiating effect Effects 0.000 claims 1
- 230000001568 sexual effect Effects 0.000 claims 1
- 239000011521 glass Substances 0.000 description 100
- 238000012546 transfer Methods 0.000 description 11
- 238000005259 measurement Methods 0.000 description 8
- 238000001514 detection method Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 5
- 230000006870 function Effects 0.000 description 5
- 238000012423 maintenance Methods 0.000 description 5
- 230000008569 process Effects 0.000 description 4
- 238000004088 simulation Methods 0.000 description 4
- 238000007726 management method Methods 0.000 description 3
- 238000013528 artificial neural network Methods 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 230000002950 deficient Effects 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 229910052736 halogen Inorganic materials 0.000 description 2
- 150000002367 halogens Chemical class 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 210000000746 body region Anatomy 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
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- 239000003245 coal Substances 0.000 description 1
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- 238000010924 continuous production Methods 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 239000005357 flat glass Substances 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
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- 238000000926 separation method Methods 0.000 description 1
- 239000002893 slag Substances 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
- 238000013316 zoning Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
- G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
Landscapes
- Engineering & Computer Science (AREA)
- Textile Engineering (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008187450 | 2008-07-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201009328A TW201009328A (en) | 2010-03-01 |
| TWI420098B true TWI420098B (zh) | 2013-12-21 |
Family
ID=41550467
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW98124293A TWI420098B (zh) | 2008-07-18 | 2009-07-17 | A defect inspection apparatus and method using the image data for defect inspection, a method for manufacturing the same, and a recording medium |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP5263291B2 (ja) |
| KR (1) | KR101609007B1 (ja) |
| CN (1) | CN102099672B (ja) |
| TW (1) | TWI420098B (ja) |
| WO (1) | WO2010008067A1 (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI693397B (zh) * | 2018-04-20 | 2020-05-11 | 日商歐姆龍股份有限公司 | 檢查管理系統、檢查管理裝置以及檢查管理方法 |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102011083405A1 (de) * | 2010-12-21 | 2012-06-21 | Sms Siemag Ag | Verfahren und Vorrichtung zur Oberflächeninspektion von Bandstücken |
| JP5796430B2 (ja) * | 2011-09-15 | 2015-10-21 | 日本電気硝子株式会社 | 板ガラス検査装置、板ガラス検査方法、板ガラス製造装置、及び板ガラス製造方法 |
| JP5862522B2 (ja) * | 2012-09-06 | 2016-02-16 | 株式会社島津製作所 | 検査装置 |
| JP6358002B2 (ja) * | 2014-09-16 | 2018-07-18 | 旭硝子株式会社 | 不具合搬送用ロールの特定方法、およびガラスリボンにおける疵発生防止方法 |
| KR101733017B1 (ko) * | 2015-02-25 | 2017-05-24 | 동우 화인켐 주식회사 | 광학 필름의 불량 검출 장치 및 방법 |
| JP6723633B2 (ja) * | 2015-12-10 | 2020-07-15 | 株式会社ディスコ | 検査装置 |
| CN105572143B (zh) * | 2015-12-17 | 2018-05-25 | 湖北第二师范学院 | 压延过程中压延材料表面周期性缺陷的检测方法 |
| CN105548211B (zh) * | 2015-12-29 | 2019-02-19 | 芜湖东旭光电科技有限公司 | 玻璃基板划伤缺陷的产生位置的查找方法 |
| JP6743492B2 (ja) * | 2016-06-01 | 2020-08-19 | 住友ゴム工業株式会社 | 生タイヤの異物付着判別方法 |
| KR102475056B1 (ko) * | 2017-03-03 | 2022-12-06 | 스미또모 가가꾸 가부시키가이샤 | 결함 마킹 방법 및 결함 마킹 장치, 원반의 제조 방법 및 원반, 그리고 시트의 제조 방법 및 시트 |
| CN106959296A (zh) * | 2017-03-22 | 2017-07-18 | 东旭科技集团有限公司 | 玻璃基板生产用牵引辊缺陷检测方法 |
| JP6918583B2 (ja) * | 2017-06-08 | 2021-08-11 | Juki株式会社 | 検査装置、実装装置、検査方法 |
| FR3076618B1 (fr) * | 2018-01-05 | 2023-11-24 | Unity Semiconductor | Procede et systeme d'inspection optique d'un substrat |
| JP2019129514A (ja) * | 2018-01-26 | 2019-08-01 | 株式会社リコー | 画像読取装置、画像形成装置および濃度補正方法 |
| JP7098111B2 (ja) * | 2018-06-12 | 2022-07-11 | 国立大学法人東海国立大学機構 | 表面検査装置および表面検査方法 |
| JP7302599B2 (ja) * | 2018-06-22 | 2023-07-04 | コニカミノルタ株式会社 | 欠陥判別方法、欠陥判別装置、欠陥判別プログラム及び記録媒体 |
| CN109959666B (zh) * | 2019-04-11 | 2021-08-03 | 京东方科技集团股份有限公司 | 一种阵列基板缺陷判定方法、处理器及判定系统 |
| JP6756417B1 (ja) * | 2019-10-02 | 2020-09-16 | コニカミノルタ株式会社 | ワークの表面欠陥検出装置及び検出方法、ワークの表面検査システム並びにプログラム |
| CN112710669A (zh) * | 2020-12-09 | 2021-04-27 | 北方华锦化学工业股份有限公司 | 一种快速评价均聚聚丙烯锂电池硬弹性隔膜晶点的方法 |
| CN112986259B (zh) * | 2021-02-09 | 2022-05-24 | 清华大学 | 智能终端oled面板制造工艺的缺陷检测方法以及装置 |
| CN113744252A (zh) * | 2021-09-07 | 2021-12-03 | 全芯智造技术有限公司 | 用于标记和检测缺陷的方法、设备、存储介质和程序产品 |
| CN115100208B (zh) * | 2022-08-26 | 2024-01-12 | 山东蓝海晶体科技有限公司 | 一种基于直方图和动态光源的薄膜表面缺陷评估方法 |
| KR102541925B1 (ko) * | 2022-12-23 | 2023-06-13 | 성균관대학교산학협력단 | 파라미터 설정 없이 결함 데이터에서 노이즈 결함을 추출하는 방법 및 장치 |
| CN119866439A (zh) * | 2023-03-22 | 2025-04-22 | 株式会社Lg新能源 | 二次电池制造设备和使用该二次电池制造设备的二次电池制造方法 |
| CN119027378B (zh) * | 2024-07-30 | 2025-03-21 | 武汉攀升鼎承科技有限公司 | 星闪主板焊接质量检测方法及系统 |
| CN121027132A (zh) * | 2025-10-28 | 2025-11-28 | 曼巴驱动技术(苏州)有限公司 | 一种金属辊筒反光圆柱表面缺陷检测设备 |
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| TW500942B (en) * | 1999-09-15 | 2002-09-01 | Rainbow Displays Inc | Tiled, fiat-panel liquid crystal having compensation for edge effects, method for correcting luminance and chromaticity variation in the same and method for producing the same |
| US20040146193A1 (en) * | 2003-01-20 | 2004-07-29 | Fuji Photo Film Co., Ltd. | Prospective abnormal shadow detecting system |
| US20050157327A1 (en) * | 2003-12-26 | 2005-07-21 | Hisashi Shoji | Abnormality determining method, abnormality determining apparatus, and image forming apparatus |
| US20060038987A1 (en) * | 1998-04-21 | 2006-02-23 | Shunji Maeda | Defect inspection method and apparatus |
| US20080002876A1 (en) * | 2001-07-09 | 2008-01-03 | Takashi Hiroi | Method and its apparatus for inspecting a pattern |
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| JPH0786474B2 (ja) * | 1988-09-09 | 1995-09-20 | 富士写真フイルム株式会社 | 欠陥周期の測定方法 |
| JPH06294759A (ja) * | 1993-04-09 | 1994-10-21 | Nippon Steel Corp | 圧延工程におけるロール転写疵の検出方法 |
| JPH07198627A (ja) * | 1994-01-06 | 1995-08-01 | Nippon Steel Corp | 金属表面欠陥検査装置 |
| JP3845958B2 (ja) * | 1996-07-05 | 2006-11-15 | 東レ株式会社 | 周期欠陥検出方法および装置 |
| JP2002372499A (ja) * | 2001-06-14 | 2002-12-26 | Fuji Photo Film Co Ltd | 周期性欠陥検査方法及び装置 |
| JP4414658B2 (ja) * | 2003-02-14 | 2010-02-10 | 株式会社メック | 欠陥検査装置および欠陥検査方法 |
| JP4433824B2 (ja) * | 2004-02-25 | 2010-03-17 | Ｊｆｅスチール株式会社 | 周期性疵検出方法および装置 |
| JP4395057B2 (ja) * | 2004-11-29 | 2010-01-06 | 新日本製鐵株式会社 | 帯状体や柱状体の周期疵検出方法およびその装置 |
| JP4516884B2 (ja) * | 2005-04-28 | 2010-08-04 | 新日本製鐵株式会社 | 周期性欠陥検査方法及び装置 |
-
2009
- 2009-07-17 JP JP2010520903A patent/JP5263291B2/ja active Active
- 2009-07-17 CN CN200980128203.6A patent/CN102099672B/zh active Active
- 2009-07-17 KR KR1020117001255A patent/KR101609007B1/ko active Active
- 2009-07-17 TW TW98124293A patent/TWI420098B/zh active
- 2009-07-17 WO PCT/JP2009/062960 patent/WO2010008067A1/ja not_active Ceased
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20060038987A1 (en) * | 1998-04-21 | 2006-02-23 | Shunji Maeda | Defect inspection method and apparatus |
| TW500942B (en) * | 1999-09-15 | 2002-09-01 | Rainbow Displays Inc | Tiled, fiat-panel liquid crystal having compensation for edge effects, method for correcting luminance and chromaticity variation in the same and method for producing the same |
| US20080002876A1 (en) * | 2001-07-09 | 2008-01-03 | Takashi Hiroi | Method and its apparatus for inspecting a pattern |
| US20040146193A1 (en) * | 2003-01-20 | 2004-07-29 | Fuji Photo Film Co., Ltd. | Prospective abnormal shadow detecting system |
| US20050157327A1 (en) * | 2003-12-26 | 2005-07-21 | Hisashi Shoji | Abnormality determining method, abnormality determining apparatus, and image forming apparatus |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI693397B (zh) * | 2018-04-20 | 2020-05-11 | 日商歐姆龍股份有限公司 | 檢查管理系統、檢查管理裝置以及檢查管理方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP5263291B2 (ja) | 2013-08-14 |
| CN102099672B (zh) | 2013-01-30 |
| KR101609007B1 (ko) | 2016-04-04 |
| JPWO2010008067A1 (ja) | 2012-01-05 |
| KR20110040847A (ko) | 2011-04-20 |
| TW201009328A (en) | 2010-03-01 |
| CN102099672A (zh) | 2011-06-15 |
| WO2010008067A1 (ja) | 2010-01-21 |
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