TWI412768B - Inspection fixture for substrate inspection and detecting device using the inspection fixture - Google Patents

Abstract

PURPOSE: A fixture for inspecting a substrate is provided to contact the leading tip of an inspection probe with the preset position of an inspection point by supporting the leading tip of the inspection probe at an accurate position. CONSTITUTION: A fixture includes a head plate(11), a base plate, a pole, and a support rod(13). A plurality of penetration holes are formed on the head plate made of insulation materials. The leading tip of the probe is inserted into the penetration hole. The leading tip of the support rod is comprised of a first position settling unit(13a), a second position settling unit(13c), and a guide unit(13b) which connects the first position settling unit to the second position settling unit.

Description

Inspection jig for substrate inspection and measuring device using the same

The present invention relates to an inspection jig that electrically connects both a check point set in advance on an inspection target portion of an object to be inspected and an inspection device.

The inspection jig is used for supplying an electric current or an electric signal to a predetermined inspection position from the inspection device via the contact or probe, and detecting an electrical signal from the inspection target portion, thereby performing inspection on the inspection target portion of the inspection object. Detection of electrical signals in the target unit, implementation of an operation test, and the like.

Examples of the object to be inspected include a printed circuit board, a flexible substrate, a ceramic multilayer wiring board, an electrode plate for a liquid crystal display or a plasma display, and various substrates such as a package substrate or a film carrier for semiconductor packaging, or a semiconductor crystal. A semiconductor device such as a circle, a semiconductor wafer, or a CSP (Chip size package).

In the present specification, the object to be inspected is collectively referred to as "object to be inspected", and the portion to be inspected formed on the object to be inspected is referred to as "target portion".

For example, when the object to be inspected is a substrate and has an electrical or electronic component such as a semiconductor circuit such as an IC (integrated circuit) mounted on the substrate or a resistor, the target portion formed on the substrate is a wiring or an electrode. In this case, in order to ensure that the wiring of the target part can accurately convey the electrical signal to the parts, between the predetermined checkpoints on the wiring formed on the printed circuit board, liquid crystal display or plasma display panel before the installation of electrical and electronic parts The electrical characteristics such as the resistance value are detected to determine whether the wiring is good or not.

Specifically, the determination of the quality of the wiring is performed by abutting the front end of the current supply terminal and/or the voltage measuring probe against each of the inspection points, and supplying the detection current from the current supply terminal of the probe. At the checkpoint, the voltage generated by the wiring between the probe tips abutting the checkpoint is measured, and then the resistance value of the wiring between the predetermined checkpoints is calculated from the supplied current and the measured voltage. .

Further, when the inspection substrate is inspected by the substrate inspection device, the control device is moved such that the inspection probe (contact pin) of the substrate inspection jig is in contact with the contact portion of the inspection substrate. Thereby, a predetermined inspection is performed, and when the inspection is completed, the jig moving mechanism is moved to move the inspection jig away from the inspection substrate.

Patent Document 1 discloses an inspection jig including a support plate on an electronic component side to be inspected by a support and a support plate on the inspection device side, and the end portion of the inspection jig is fixed to the inspection device side. The support plate of the inspection probe is inserted through the support plate on the side of the electronic component.

The test probe has elasticity, and when the inspection point of the electronic component to be inspected comes into contact with the front end surface of the test probe before the test head is strongly pushed against, the test probe will be flexed to a recoverable degree due to elasticity. .

[Patent Document 1] Japanese Patent Laid-Open Publication No. 2008-197009

In recent years, the substrate to be inspected has been continuously complicated or miniaturized, and the inspection dots set on the substrate have been formed to be finer or smaller, so that the diameter of the inspection probe is also formed smaller. Then, when the jig moving mechanism moves the inspection probe of the inspection jig to the inspection point of the inspection substrate, the front end of the inspection probe is displaced, shakes or vibrates, and the front end may be difficult to be made. Accurately reach the established checkpoint.

In Patent Document 1, the test head of the inspection probe protrudes from the support plate on the electronic component side, and the inspection point of the electronic component is brought into contact with the front end surface of the test head of the inspection probe to strongly abut against the test head to push the electronic component into the electronic component. In the side support plate, the inspection probe is deflected by elasticity.

Therefore, the inspection probe is held through the through hole provided in the test head plate, but when the inspection probe is pushed to the inspection point, the amount of the inspection probe from the through hole of the test head plate is protruded (protrusion The amount) changes, so the force change at the end of the probe is pressed to check the check point, so that the front end of the test head of the test probe sometimes does not accurately touch the check point of the electronic part, or the electronic part will be inspected. The front end of the test head of the needle is pressed down until the electronic part abuts between the support plates on the side of the electronic component, and sometimes the front end face of the test head is deviated from the check point. Further, due to the above operation, the inspection probe is slid between the side wall of the through hole of the test head plate, and the plating peeling or the surface scratch of the probe surface is inspected, which is a problem.

Therefore, an object of the present invention is to provide an inspection jig for substrate inspection which is held at an accurate position by moving the front end portion of the inspection probe without deviation, so that the front end of the inspection probe can accurately reach Connected to a given location of a small checkpoint.

Moreover, an object of the present invention is to provide an inspection jig for inspection of a substrate which can maintain a state in which the front end of the inspection probe is accurately brought into contact with the inspection point of the inspection substrate.

Moreover, an object of the present invention is to provide an inspection jig for inspection of a substrate, which does not deviate from the inspection portion when the front end of the inspection probe is strongly pressed against the inspection portion.

Further, an object of the present invention is to provide an inspection jig for inspection of a substrate, which can prevent the front end of the inspection probe from being bent or bent when the front end of the inspection probe is brought into contact with the inspection substrate portion. The deformation.

The inspection jig according to the present invention is used in a measuring device for measuring the electrical characteristics of an object to be inspected. According to the above problem, the inspecting jig includes: a plurality of probes respectively for contacting the to-be-inspected a front end portion of the predetermined target portion of the object and a rear end portion electrically connected to the measuring device; the test head plate having a hole portion through which the front end portion of the plurality of probes penetrates; and a bottom plate having a plurality of The rear end portion of the probe is electrically connected to the electrode of the measuring device; and the support rod has a position determining mechanism; wherein the position determining mechanism is disposed between the test head plate and the bottom plate, so that the test head plate can be The first position is moved to the second position along the axial direction, and the test head plate is held at a predetermined position at least at the first position.

The inspection jig may have a complementary shape in which the test head plate and the support bar are fitted to each other when the test head plate is held in the first position.

The inspection jig may have a complementary shape in which the test head plate and the support bar are fitted to each other when the test head plate is held in the second position.

The complementary shape of the inspection jig is such that the support bar is formed with a truncated cone shape having a large circle as a base and a small circle as a lower base, and a truncated cone shape can be formed on the test head plate. The hole portion has a truncated cone shape corresponding to the shape of the conical surface of the truncated cone, and the large circle is the upper bottom and the small circle is the lower bottom.

The complementary shape of the inspection jig is such that the support bar is formed with a truncated cone shape having a large circle as a lower bottom and a small circle as an upper bottom, and a truncated cone shape can be formed on the test head plate. The hole portion has a truncated cone shape corresponding to the shape of the conical surface of the truncated cone, and the large circle is the lower bottom and the small circle is the upper bottom.

In the inspection jig, a spring portion is provided around the support rod, and the spring portion may be formed to bias the test head plate in a direction away from the bottom plate.

In the inspection jig, the test head plate is formed with a concave portion, and the front end portion of the probe may slightly protrude from a bottom surface forming the concave portion.

In the inspection jig for substrate inspection, at least a portion of the probe that does not penetrate through the hole portion of the test head plate may be formed with a large diameter larger than a diameter of the hole portion of the test head plate a portion such that the large diameter portion is locked to the test head plate.

Further, the measuring apparatus for determining the electrical characteristics of the object to be inspected according to the present invention is characterized in that it comprises an inspection jig and a signal control processing device; wherein the inspection jig comprises: a plurality of probes each having a contact for a front end portion of the predetermined target portion of the object to be inspected and a rear end portion electrically connected to the measuring device; the test head plate has a hole portion through which the front end portion of the plurality of probes penetrates; the bottom plate has a The rear end portion of the plurality of probes is electrically connected to the electrode of the measuring device; and the support rod has a position determining mechanism; and the position determining mechanism is disposed between the test head plate and the bottom plate to enable the test head The flat plate is movable from the first position along the axial direction to the second position, and the test head plate is held at a predetermined position at least at the first position; and the signal control processing device is electrically connected to the test of the inspection jig The electrode of the head plate is controlled and processed for signals used to determine the electrical characteristics of the object to be inspected.

Here, "protruding from the bottom surface" means "slightly protruding from the bottom surface". The upper and lower limits of "slightly" are design items that can be changed according to the environment to the level of the person skilled in the art. Hereinafter, the same applies to this specification.

According to the present invention, the front end of the test probe can be accurately brought into contact with the predetermined position of the minute check point by holding the front end portion of the test probe at an accurate position.

According to the present invention, it is possible to maintain a state in which the front end of the inspection probe is accurately brought into contact with the inspection point of the inspection substrate.

According to the invention, when the front end of the test probe is strongly pressed against the inspection portion, the front end can be prevented from being displaced from the inspection portion.

Moreover, according to the present invention, when the front end of the test probe is brought into contact with the test substrate portion, deformation of the front end of the test probe such as bending or bending can be prevented.

Further, according to the present invention, after the inspection probe front end is brought into contact with the inspection substrate portion and inspected, the oxide film fragments or solder chips adhering to the front end of the inspection probe can be easily removed. Or, the dirt can be easily detached from the test probe.

(Best form of implementing the invention)

[Overview of inspection jig]

Fig. 1 is a schematic side view showing a part of a cross section of an inspection jig 10 according to an embodiment of the present invention. Moreover, in order to facilitate understanding, the thickness, the length, the shape, the interval between the members, the gap, and the like of the respective members in the full drawing are appropriately enlarged, reduced, deformed, simplified, and the like. In addition, the expression of the top, bottom, left and right in the drawing will be described, and the positional relationship in the state of the figure will be shown.

The inspection jig 10 includes a test head plate 11, a bottom plate 14, a base 15, and a support rod 13. The test head flat plate 11, the bottom plate 14, and the base 15 are plate-like members made of an insulating material such as a resin material. The rear end of the support rod 13 passes through the bottom plate 14 and is fixed to the base 15. The front end of the support rod 13 is attached to the test head plate 11 in such a manner that the test head plate 11 can be moved along the support bar 13 as will be described later. Further, the surrounding support bar 13 is provided with the spring member 12, and the test head plate 11 is biased toward the upper side of FIG. 1 along the axis of the support bar 13.

As for the test head plate 11, a plurality of through holes 11h are formed, and the through holes 11h are inserted into the front end portion 17a of the probe 17, and the front end portion 17a is guided to the substrate by the through holes as will be described later. Check the checkpoint of the object. However, the distal end portion 17a protrudes from the through hole 11h as will be described later, but preferably does not protrude from the top surface of the test head flat plate 11, but is held at a position retracted from the top surface.

As shown in FIG. 1, the test head flat plate 11 is composed of three sheets 11a, 11b, and 11c, and the sheets 11a, 11b, and 11c are fixed to each other. Further, as will be described later, the above-mentioned sheets are formed with through holes 11ah, 11bh, and 11ch constituting the through holes 11h.

Through holes 14h and 15h are formed in the bottom plate 14 and the base 15 respectively. The probe rear end portion 17b is inserted into the through hole 14h of the bottom plate 14, and the electrode 15b is embedded in the through hole 15h of the base 15. The electrode 15b is electrically connected to the end portion 17b of the probe 17. Further, the electrode 15b is connected to the electric wire 16, which is wired through the susceptor 15, and is electrically connected to a scanner (not shown) for performing inspections such as electrical characteristics. Although the bottom plate and the pedestal are described as individual members, the electrodes may be provided on the bottom plate to omit the susceptor.

The probe 17 has a diameter of, for example, about 40 to 60 μm, and the probe 17 can use, for example, an elastic piano wire or tungsten (W) made of stainless steel, and is preferably a circumference other than the front end portion and the rear end portion. The surface is covered with insulation.

In particular, although not shown, the diameter of the probe 17 in which the insulating coating portion is formed is preferably larger than at least one of the through holes 11ah, 11bh, and 11ch. By doing so, the probe 17 is surely locked in the through hole. Further, as shown in Fig. 1, since the probe 17 is bent and held, the probe 17 can be locked and fixed to the side wall of the through hole 11h. For example, a protruding portion may be formed in the portion of the probe 17, or the diameter of the portion may be increased, or the thickness of the insulating coating of the portion may be increased.

As described above, since the probe 17 is fixed to the through hole 11h by the locking, the amount of protrusion from the through hole 11h is at least not larger than the amount of protrusion at the time of locking. Therefore, the pressing force can be kept constant.

At the time of substrate inspection, the probe 17 can be bent in the space between the test head plate 11 and the bottom plate 14, and by virtue of the tendency to return to a linear biasing force, the front end of the probe 17 can be appropriately pressurized. Abut against a predetermined check point (object portion), the end portion of the probe 17 can be made to abut against the electrode 15b with an appropriate pressure.

Figure 2A is a front elevational view (including a partial cross-sectional view) of the position enclosed by the dashed line 20 in Figure 1. Fig. 2B is only the support rod 13 taken out from Fig. 2A. Fig. 2C is a view for explaining the state when the test head plate 11 is moved.

As clearly shown in Fig. 2B, the front end portion of the support rod 13 is composed of the first portion: the first position determining portion 13a has a truncated cone shape, and is arranged such that the large circle is the upper base and the small circle is the lower base; the second position is determined. The portion 13c has a truncated cone shape, and is arranged such that the small circle is the upper base and the large circle is the lower base. The guide portion 13b has a columnar shape and connects both the first position determining portion 13a and the second position determining portion 13c.

Further, as shown in FIG. 2A, the plate piece 11a of the test head plate 11 is formed with a hole portion whose shape corresponds to the shape of a conical surface between the upper bottom and the lower bottom of the first position determining portion 13a; The plate piece 11c of the head plate 11 is also formed with a hole portion whose shape corresponds to the shape of a conical surface between the upper bottom and the lower bottom of the second position determining portion 13c. Therefore, when the first position determining portion 13a is fitted into the hole portion of the sheet piece 11a, the position of the sheet piece 11a is determined at a certain position; and as shown in Fig. 2C, when the sheet piece 11c is lowered, the second position determining portion 13c When the hole portion of the sheet piece 11c is fitted, the position of the sheet piece 11c is determined at a certain position. By the determination of the positions, the end portion 17a of the probe 17 held by the test head plate 11 is surely held in a predetermined position in each case. That is, the front end portion 17a of the probe 17 can be accurately placed at a predetermined position.

Further, the plate 11b of the test head plate 11 is formed with a conical hole portion having a conical shape corresponding to the outer peripheral surface of the guide portion 13b so that the guide portion 13b can be inside the hole portion. Move in the direction of the axis. Further, when the gap between the outer peripheral surface of the guide portion 13b and the surface on which the hole portion is formed is large, when the sheet piece 11b moves along the guide portion 13b, the sheet may be shaken by the distance of the gap. Due to this shaking, the position of the end portion 17a of the probe 17 held by the test head flat plate 11 is largely shaken by the size of the gap, and therefore the gap is preferably a small gap.

The first position determining portion 13a of the support rod 13 and the hole portion of the test head plate 11 having the complementary shape corresponding to the position determining portion 13a are used, and the second position determining portion 13c of the support rod 13 is used, and the test is performed. The head plate 11 has both complementary hole portions corresponding to the position determining portion 13c, and constitutes a position determining mechanism.

As shown in FIG. 2A and FIG. 2C, the top surface of the plate 11a of the test head plate 11 is fixed with a substrate holding portion 11u on which a portion of the inspection substrate 40 is placed; and as shown in FIG. 2C, along with the inspection substrate 40 Pressing down, the test head plate 11 is pressed down together. Therefore, the second position determining portion 13c of the support rod 13 is fitted into the hole portion of the plate piece 11c, and the position of the plate piece 11c is determined at a predetermined position. Further, since the test head plate 11 is pressed downward and the spring portion 12 is pressed downward to contract, the spring portion 12 has a biasing force for pushing the test head plate 11 back.

That is, the test head plate 11 can reciprocate between the position (first position) of FIG. 2A and the position (second position) of FIG. 2C. At this time, if it is the position of FIG. 2A, the predetermined inspection point of the inspection substrate 40 does not contact the front end portion 17a of the probe 17, or is in a state of being contacted only without being pressed. Further, in the position of Fig. 2C, the test head flat plate 11 is most pressed downward, and the front end portion 17a of the probe 17 is in a state of being pressed to the proper position of the inspection point of the inspection substrate 40 with the most appropriate pressing force.

As shown in FIG. 2A, as a method of attaching the support rod 13 to the test head flat plate 11, a method in which the first position determining portion 13a such as the support rod 13 is integrally formed with the guide portion 13b can be used. For example, the external thread is attached to the first position specifying portion 13a, and the internal thread is fitted to the guide portion 13b. The support rod 13 is supported by the guide portion 13b in a state where the first position specifying portion 13a is not attached. The through hole 11h of the test head plate 11 is inserted, and the external thread of the first position specifying portion 13a is locked into the internal thread of the guide portion 13b to fix the first position specifying portion 13a to the guide portion 13b.

Fig. 3 is a front elevational view (including a partial cross-sectional view) showing an enlarged portion of the inspection jig 10 for inspection of the substrate of Fig. 1 by a dashed line 30. As shown in FIG. 3, the sheets 11a, 11b, and 11c of the test head flat plate 11 are formed with through holes 11ah, 11bh, and 11ch, respectively. The holes are aligned, and the holes 17 are inserted through the holes. The diameter of the through holes may be any size within a range of, for example, about 40 to 100 μm.

Further, as shown in FIG. 3, the plates 11a, 11b, and 11c are formed with large-diameter preliminary holes 22, 23, and 24, respectively. The large-diameter preliminary holes 22, 23, and 24 are such that the plates have a thickness to ensure a certain strength, and on the other hand, the through holes 11ah, 11bh, and 11ch are easily formed. Therefore, the preliminary holes are not formed according to the thickness of the plate. Necessary to form.

A concave portion 21 is formed on the top surface of the sheet 11a of the test head flat plate 11. The front end portion 17a of the probe 17 inserted into the hole portion of the plate piece 11a protrudes from the bottom surface on which the concave portion 21 is formed, but is located below the top surface of the opposite piece 11a. The depth of the concave portion 21 is, for example, 100 to 200 μm, and as will be described later, the concave portion can be entered by the bump 42 (Fig. 4) of the inspection point of the inspection substrate 40. Moreover, the distance from the bottom surface of the concave portion 21 to the front end surface of the distal end portion 17a of the probe 17 is, for example, 50 to 100 μm.

To illustrate the relationship between the test head plate 11 and the probe 17, FIGS. 4A and 4B are front views (including partial cross-sectional views) which are extracted from a portion shown in FIG.

In Fig. 4A, the inspection substrate 40 is brought close to the sheet 11a of the test head flat plate 11, but has not yet been in contact therewith, and the inspection jig 10 is in a state to be inspected. Further, as shown in the figure, the top surface of the plate piece 11a is formed with a concave portion 21, and the front end portion 17a of the probe 17 protrudes only slightly from the bottom surface of the concave portion 21 to a slight length. In this state, both the test head plate 11 and the support rod 13 form the positional relationship shown in Fig. 2A. That is, since the sheet piece 11a is held at the determined position, the front end portion 17a of the probe 17 is in a state of being accurately held at a predetermined position.

Further, although not shown in Fig. 4A, the probe 17 is located at a portion below the hole portion of the plate piece 11c, and a large diameter portion larger than the diameter of the hole portion is formed.

In Fig. 4B, the front end portion 17a of the probe 17 abuts against the bump 42 of the wiring pattern on the inspection substrate 40, and as the inspection substrate 40 is lowered, the test head flat plate 11 is pressed downward by a proper distance S. At this time, as shown in FIG. 2C, the position determining portion 13c of the support rod 13 is fitted to the hole portion of the truncated cone shape of the plate piece 11c.

At this time, although the distance S between the test head plate 11 and the bottom plate 14 is shortened, since the large diameter portion is locked to the bottom surface side of the plate 11c of the test head flat plate 11, the probe 17 is bent to absorb the amount of change in the distance S. . On the other hand, after the end portion 17a of the probe 17 abuts against the bump 42, as described above, since the large diameter portion is locked to the bottom surface side of the plate piece 11c, the front end portion 17a of the probe 17 is from the concave portion 21 The amount of protrusion of the bottom surface does not change. Then, when the distal end portion 17a is pressed and moved by the projection, it is possible to prevent the distal end portion 17a from being displaced from a predetermined position on the surface of the projection or the like.

In the state shown in FIG. 4B, the inspection signal is selectively supplied to the plurality of bumps 42 sequentially from the scanner (not shown) via the plurality of probes 17, and the inspection is received from the bumps 42. The signal can be used to check the wiring resistance value between the plurality of bumps 42 or to determine whether or not there is conduction.

[Another embodiment]

Fig. 5 is a view showing another embodiment of the portion shown in Figs. 2A to 2C. As shown in the figure, the support rod 13-1 is composed of a position determining portion 13a-1 which has a truncated cone shape and is arranged with a large circle as an upper base and a small circle as a lower base; and a cylindrical guide portion. 13b-1; does not include the configuration of the second position determining portion 13c corresponding to the truncated cone shape of the support rod 13 of Fig. 2A.

Further, in the embodiment of Fig. 5, the test head plate 11-1 is constituted by the plates 11a-1, 11b-1, and 11c-1 which are fixed to each other. The plate 11a-1 of the test head plate 11-1 is formed with a hole portion having a shape corresponding to the shape of a conical surface between the upper bottom and the lower bottom of the position determining portion 13a-1; the plate 11b-1 And 11c-1 is also formed with a hole portion whose shape corresponds to the shape of the outer peripheral surface of the guide portion 13b-1, and the guide portion 13b-1 is movable in the hole portion.

In the embodiment of Fig. 5, although not shown, the spring portion 12 is provided around the support bar 13-1, and the test head plate 11-1 is normally biased upward as shown in the embodiment of Fig. 2A.

Further, the embodiment of Fig. 5 is the same as the embodiment of Fig. 2A, and the gap between the outer peripheral surface of the guide portion 13b-1 and the hole portions of the plates 11b-1 and 11c-1 is large due to the plate. When 11b-1 and 11c-1 move along the guiding portion 13b-1, the size of the gap is swayed so that the position of the end portion 17a of the probe 17 held by the test head plate 11-1 is greatly shaken, so that the gap is preferably For small gaps.

In Fig. 5, the position of the support rod 13-1 shown by the solid line corresponds to the position of the support rod 13 in Fig. 2A, and the front end portion 17a of the probe 17 is in contact with a check point such as a bump of the inspection substrate 40, but the front end The department is in a state that has not been pressed down. At this position, the test head flat plate 11-1 is pushed up by a spring portion (not shown), so that the position determining portion 13a-1 of the support rod 13-1 is fitted into the hole portion of the plate piece 11a-1, whereby The position of the test head plate 11-1 is determined at a certain position. Therefore, the position of the front end portion 17a of the probe 17 is also determined at a predetermined position.

On the other hand, the position of the support rod 13-1 shown by the broken line corresponds to the position of the support rod 13 in Fig. 2C, and the bottom surface of the inspection substrate 40 abuts against the substrate holding portion 11u-1 while the front end of the probe 17 In a state in which the portion 17a is in contact with the bump 42 of the wiring pattern on the inspection substrate 40, the bump 42 and the inspection substrate 40 respectively apply a pressing force to the front end portion 17a of the probe 17 and the substrate holding portion 11u-1, and the test is performed. The head plate 11-1 is pressed downward. As a result, the guide portion 13b-1 moves along the hole portions of the plates 11b-1 and 11c-1.

Figure 6A is a front elevational view (including a partial cross-sectional view) showing a support rod 13-2 in accordance with another embodiment of the present invention. The support rod 13-2 includes a plunger 61 fixed to the test head flat plate 11 , a stopper portion 62 engaged with the plunger 61 , and a cylindrical body portion 63 . Fig. 6B is an enlarged view showing the stopper 62 taken out from Fig. 6A.

The stopper portion 62 is constituted by the locking portion 62a and the body portion 62b, and a through hole 62in for arbitrarily moving the plunger 61 is formed inside the stopper portion 62. The through hole 62in located at the lower end surface of the main body portion 62b has an inclined surface 62c. The inclination angle of the inclined surface 62c is, for example, as shown in Fig. 6B, and can be formed so as to intersect at an extension of the inclined surface 62c at the opposite position by about 90 degrees.

The locking portion 62a of the stopper portion 62 is locked to the upper end portion of the cylindrical body portion 63, and both the narrowed portion 63p of the cylindrical body portion 63 and the narrowed portion 62p of the stopper portion 62 are attached. For example, the caulking is performed, so that the cylindrical body portion 63 is fixed to the stopper portion 62.

The plunger 61 is composed of a coupling portion 61a, an inclined portion 61b, a guide 61c, and a protruding portion 61d. The coupling portion 61a has an outer diameter that is movably movable in the through hole 62in of the stopper portion 62, and an internal thread 61in for fixing to the test head flat plate 11 by, for example, a screw is formed inside the coupling portion 61a.

The inclined portion 61b of the plunger 61 is formed at an angle that engages with the inclined surface 62c of the through hole 62in of the stopper portion 62. Further, the guide portion 61c of the plunger 61 is movable in the through hole inside the cylindrical body portion 63.

A spring portion 63s formed in a coil shape is disposed in a through hole in the main body portion 63. The lower end portion of the spring portion 63s is locked to the protruding portion of the main body portion 63, and the upper end portion abuts against the bottom surface of the guiding portion 61c of the plunger 61. . The spring portion 63s generates a biasing force for pushing the guide portion 61c upward, so that the guide portion 61c is pushed upward, and the inclined portion 61b of the plunger 61 is engaged with the inclined surface 62c of the through hole 62in of the stopper portion 62. . Due to this engagement, the position of the plunger 61 is determined.

According to the embodiment of Fig. 6, the upper end surface of the plunger 61 is fixed to the test head flat plate 11 by screws, for example, and the inclined portion 61b of the plunger 61 is stopped by the biasing force of the spring portion 63s before the substrate inspection. The inclined surface 62c of the through hole 62in of the portion 62 is engaged. Thereby, the position of the probe tip can be maintained at a predetermined position.

At the time of inspection, when the plunger 61 is pressed downward together with the test head flat plate, the guide portion 61c presses down against the biasing force of the spring portion 63s, so that the inclined portion 61b is separated from the inclined surface 62c.

When the inspection is completed, since the test head plate returns to the original position, the guide portion 61c is pushed back by the biasing force of the spring portion 63s, and the inclined portion 61b is engaged with the inclined surface 62c. Thereby, the position of the probe tip can be again maintained at a predetermined position.

Fig. 7 is an inspection jig 10-1 according to another embodiment of the inspection jig 10 of Fig. 1. The inspection jig 10-1 further includes a support rod 13-3 according to another embodiment, which is different from the inspection jig 10.

The support rod 13-3 includes: a body portion 13-3d; an elastic portion 13-3r arbitrarily expandable and contractible along an axial direction of the support rod; and a shaft center portion 13-3c for preventing the elastic portion 13-3r from being bent when contracted Or twist. The elastic portion 13-3r is composed of, for example, a rubber member, and when the pressing force is increased from both sides in the axial direction, the rubber member is contracted, and when the pressing force is released, the original state can be restored. Further, the upper end portion of the support rod 13-3 is fixed to the test head flat plate 11-2 composed of the mutually fixed plates 11a-2, 11b-2, and 11c-2.

According to the embodiment of Fig. 7, when the inspection substrate 40 is lowered, the bottom surface of the inspection substrate 40 abuts against the top surface of the plate 11a-2 of the test head flat plate 11-2, and at the same time, the front end portion 17a of the probe 17 abuts. The bump 42 is connected to the wiring pattern on the inspection substrate 40. At this time, since the upper end portion of the support rod 13-3 is fixed to the test head flat plate 11-2 composed of the mutually fixed plates 11a-2, 11b-2, 11c-2, the front end portion 17a of the probe 17 can be Accurately abuts the predetermined position of the bump 42.

In this state, when the inspection substrate 40 is lowered and the test head flat plate 11-2 is pushed downward, the elastic portion 13-3r is contracted along the axial center portion 13-3c. At this time, the distance between the test head plate 11-2 and the bottom plate 14 is shortened by the amount of contraction of the elastic portion 13-3r, so that the probe 17 is bent to absorb the shortening amount of the distance. By the bending restoring force of the probe, the front end portion 17a of the probe 17 can be pressed against the convex portion with an appropriate pressure, and the rear end portion 17b of the probe 17 can be brought into contact with the electrode portion 15b.

On the other hand, when the inspection substrate 40 is raised, the test head flat plate 11-2 is returned to the original position due to the elastic force of the elastic portion 13-3r.

According to the above embodiment, when the tip end of the probe is in contact with the inspection point, since the support rod 13-3 is held at a predetermined position, the test head plate does not sway, and the front end portion of the probe can abut against the inspection. The exact location of the point.

Further, even after the abutment, since the inspection point and the probe move along the axial center portion 13-3c at the same time, lateral sliding does not occur between the inspection point and the probe.

Further, in the above-described embodiment, the configuration in which the concave portion 21 is accommodated by one projection 42 has been disclosed. However, the size of the concave portion 21 is not limited thereto, and may have a size in which several projections can be accommodated.

In the above, some embodiments of the inspection jig for substrate inspection according to the present invention have been described. However, the present invention is not limited to the embodiments, and is also familiar with additions, deletions, modifications, etc. that can be easily accomplished by those skilled in the art. The invention is also included in the present invention; the technical scope of the present invention is determined in accordance with the description of the appended claims.

10, 10-1. . . Inspection tool for substrate inspection

11, 11-1, 11-2. . . Test head plate

11a, 11b, 11c. . . Plate

11a-1, 11b-1, 11c-1. . . Plate

11a-2, 11b-2, 11c-2. . . Plate

11h, 11ah, 11bh, 11ch. . . Through hole

11u, 11u-1. . . Substrate holding portion

12. . . Spring part (spring member)

13, 13-1, 13-2, 13-3. . . Support bar

13a, 13c, 13a-1. . . Position determination unit

13b, 13b-1. . . Guide

13-3c. . . Axis

13-3d. . . Body part

13-3r. . . Elastic part

14. . . Bottom plate

14h. . . Through hole

15. . . Pedestal

15b. . . electrode

15h. . . Through hole

16. . . wire

17. . . Probe

17a. . . Front end of probe 17

17b. . . End of probe 17

20, 30. . . Dash

twenty one. . . Concave

22, 23, 24. . . Preparing hole

40. . . Inspection substrate

42. . . Bump

61. . . Plunger

61a. . . Linkage

61b. . . Inclined portion

61c. . . Guide

61d. . . Protruding

61in. . . internal thread

62. . . Stop

62a. . . Clamping part

62b. . . Body part

62c. . . Inclined surface

62in. . . Through hole

62p. . . Narrowing

63. . . Body part

63p. . . Narrowing

63s. . . Spring part

S. . . The distance from which the test head plate 11 is pressed downward

BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a side view (including a partial cross-sectional view) schematically showing an inspection jig for substrate inspection according to an embodiment of the present invention.

Fig. 2A is a front view (including a partial cross-sectional view) showing an enlarged portion of the inspection jig for inspection of the substrate of Fig. 1 by a dashed line 20.

Fig. 2B is a front view showing a part of the portion shown in Fig. 2A.

Figure 2C is a front view (including a partial cross-sectional view) for explaining the variation of the portion shown in Figure 2A.

Fig. 3 is a front elevational view (including a partial cross-sectional view) showing an enlarged portion of the inspection jig for inspection of the substrate of Fig. 1 by a dashed line 30.

4A and 4B are front views (including partial cross-sectional views) showing a portion of the portion shown in Fig. 3 taken out from Fig. 3 and schematically shown.

Fig. 5 is a front view (including a partial cross-sectional view) showing another embodiment of the inspection tool for substrate inspection according to the present invention, showing another embodiment of the portion shown in Fig. 2A.

6A and 6B are front views (including partial cross-sectional views) showing another embodiment of a support rod for an inspection jig for inspection of a substrate according to the present invention.

Fig. 7 is a front view (including a partial cross-sectional view) showing still another embodiment of the inspection jig for substrate inspection according to the present invention.

11. . . Test head plate

11a, 11b, 11c. . . Plate

11u. . . Substrate holding portion

12. . . Spring part

13. . . Support bar

13a. . . First position determining unit

13b. . . Guide

13c. . . Second position determining unit

20. . . Dash

Claims (7)

An inspection jig for use in an assay device for determining electrical characteristics of an object to be inspected, the test jig comprising: a plurality of probes each having a front end portion for contacting an intended object portion of the object to be inspected, and Electrically connected to a rear end portion of the measuring device; a test head plate having a hole portion through which the front end portion of the plurality of probes penetrates; and a bottom plate having a rear end portion for electrically connecting the plurality of probes to An electrode of the measuring device; and a support rod having a position determining mechanism; wherein the position determining mechanism is disposed between the test head plate and the bottom plate, so that the test head plate can be moved from the first position along the axis direction to the first 2 position, and at least the first position maintains the test head plate at a predetermined position; the inspection jig has a complementary shape: when the test head plate is held in the first position, the test head plate Compensating with the support rod; the complementary shape is: a truncated cone shape having a truncated cone shape with a large circle as a base and a small circle as a lower base formed on the support rod, and a truncated cone shape is formed on the test head plate The shape of the truncated cone portion corresponds to the shape of the conical surface of the truncated cone, and the large circle is the upper base and the small circle is the lower bottom. An inspection jig for use in an assay device for determining electrical characteristics of an object to be inspected, the test jig comprising: a plurality of probes each having a front end portion for contacting an intended object portion of the object to be inspected, and Electrically connected to a rear end portion of the measuring device; a test head plate having a hole portion through which the front end portion of the plurality of probes penetrates; and a bottom plate having a rear end portion for electrically connecting the plurality of probes to An electrode of the measuring device; and a support rod having a position determining mechanism; wherein the position determining mechanism is disposed between the test head plate and the bottom plate, so that the test head plate can be moved from the first position along the axis direction to the first 2 positions, and at least The first position maintains the test head plate at a predetermined position; the inspection jig has a complementary shape: the test head plate is embedded with the support bar when the test head plate is held in the second position The complementary shape is such that the support bar is formed with a truncated cone having a truncated cone shape with a large circle as a bottom and a small circle as an upper bottom, and a hole of a truncated cone shape is formed in the test head plate. The shape of the truncated cone corresponds to the shape of the conical surface of the truncated cone, with the large circle as the lower base and the small circle as the upper base. An inspection jig according to claim 1 or 2, wherein a spring portion is provided around the support rod, and the spring portion biases the test head plate in a direction away from the bottom plate. The inspection jig for substrate inspection according to the first aspect of the invention, wherein the test head flat plate is formed with a concave portion, and the distal end portion of the probe protrudes from a bottom surface on which the concave portion is formed. The inspection jig for substrate inspection according to the first aspect of the invention, wherein at least a portion of the probe that does not penetrate the hole portion of the test head plate is formed with the hole of the test head plate The large diameter portion of the portion is large so that the large diameter portion is locked to the test head plate. An assay device for determining an electrical characteristic of an object to be inspected, comprising: an inspection jig and a signal control processing device according to claim 1; wherein the signal control processing device is electrically connected to the test head of the inspection jig The electrode of the plate is controlled and processed for signals used to determine the electrical characteristics of the object to be inspected. An assay device for determining an electrical characteristic of an object to be inspected, comprising: an inspection jig and a signal control processing device according to claim 2; wherein the signal control processing device is electrically connected to the test head of the inspection jig The electrode of the plate is controlled and processed for signals used to determine the electrical characteristics of the object to be inspected.