[go: up one dir, main page]

TWI408731B - 基板搬運裝置及基板搬運方法 - Google Patents

基板搬運裝置及基板搬運方法 Download PDF

Info

Publication number
TWI408731B
TWI408731B TW098135075A TW98135075A TWI408731B TW I408731 B TWI408731 B TW I408731B TW 098135075 A TW098135075 A TW 098135075A TW 98135075 A TW98135075 A TW 98135075A TW I408731 B TWI408731 B TW I408731B
Authority
TW
Taiwan
Prior art keywords
substrate
processed
holding member
transfer device
unit
Prior art date
Application number
TW098135075A
Other languages
English (en)
Chinese (zh)
Other versions
TW201021092A (en
Inventor
太田義治
元田公男
篠崎賢哉
Original Assignee
東京威力科創股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 東京威力科創股份有限公司 filed Critical 東京威力科創股份有限公司
Publication of TW201021092A publication Critical patent/TW201021092A/zh
Application granted granted Critical
Publication of TWI408731B publication Critical patent/TWI408731B/zh

Links

Classifications

    • H10P72/36—
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90—Devices for picking-up and depositing articles or materials
    • B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
    • B65G47/911—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers with air blasts producing partial vacuum
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Nonlinear Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
TW098135075A 2008-10-16 2009-10-16 基板搬運裝置及基板搬運方法 TWI408731B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008267621A JP2010098125A (ja) 2008-10-16 2008-10-16 基板搬送装置及び基板搬送方法

Publications (2)

Publication Number Publication Date
TW201021092A TW201021092A (en) 2010-06-01
TWI408731B true TWI408731B (zh) 2013-09-11

Family

ID=42217921

Family Applications (1)

Application Number Title Priority Date Filing Date
TW098135075A TWI408731B (zh) 2008-10-16 2009-10-16 基板搬運裝置及基板搬運方法

Country Status (3)

Country Link
JP (1) JP2010098125A (ja)
KR (1) KR20100042586A (ja)
TW (1) TWI408731B (ja)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5445863B2 (ja) * 2010-08-04 2014-03-19 株式会社ダイフク 板状体搬送装置
JP5978937B2 (ja) * 2012-11-13 2016-08-24 旭硝子株式会社 基板搬送用ハンド及び基板搬送方法
TWI521082B (zh) 2014-04-15 2016-02-11 友達光電股份有限公司 操作裝置及其操作方法
KR102218382B1 (ko) * 2014-08-21 2021-02-23 세메스 주식회사 반송 유닛, 이를 포함하는 기판 처리 장치 및 방법
JP6651392B2 (ja) * 2016-03-22 2020-02-19 東レエンジニアリング株式会社 基板浮上搬送装置
JP6754266B2 (ja) * 2016-10-14 2020-09-09 株式会社日本製鋼所 レーザ照射装置、レーザ照射方法、及び半導体装置の製造方法
KR101901421B1 (ko) * 2018-04-11 2018-09-21 (주)휴인텍 욕실 천정재 가공용 원판 얼라인장치
CN109650015A (zh) * 2018-12-13 2019-04-19 烽禾升医疗设备（昆山）有限公司 一种载具移栽定位机构
JP7299790B2 (ja) * 2019-08-05 2023-06-28 東レエンジニアリング株式会社 基板浮上搬送装置及び基板浮上搬送装置の基板位置補正方法
CN112390014B (zh) * 2019-08-19 2025-02-07 爱丽家居科技股份有限公司 一种物料整合设备
JP2022188851A (ja) * 2021-06-10 2022-12-22 東京エレクトロン株式会社 基板搬送装置、塗布処理装置、基板搬送方法および基板搬送プログラム

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007150280A (ja) * 2005-11-04 2007-06-14 Dainippon Printing Co Ltd 基板支持装置、基板支持方法、基板加工装置、基板加工方法、表示装置構成部材の製造方法
TW200730261A (en) * 2005-10-13 2007-08-16 Tokyo Electron Ltd Coating apparatus and coating method
JP2008132422A (ja) * 2006-11-28 2008-06-12 Tokyo Electron Ltd 塗布方法及び塗布装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000136024A (ja) * 1998-10-30 2000-05-16 Daiichi Shisetsu Kogyo Kk 浮上装置
JP2008147291A (ja) * 2006-12-07 2008-06-26 Dainippon Printing Co Ltd 基板支持装置、基板支持方法、基板加工装置、基板加工方法、表示装置構成部材の製造方法
JP4882726B2 (ja) * 2006-12-20 2012-02-22 凸版印刷株式会社 枚葉基板搬送方法及び枚葉基板搬送装置
JP2008166348A (ja) * 2006-12-27 2008-07-17 Olympus Corp 基板搬送装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200730261A (en) * 2005-10-13 2007-08-16 Tokyo Electron Ltd Coating apparatus and coating method
JP2007150280A (ja) * 2005-11-04 2007-06-14 Dainippon Printing Co Ltd 基板支持装置、基板支持方法、基板加工装置、基板加工方法、表示装置構成部材の製造方法
JP2008132422A (ja) * 2006-11-28 2008-06-12 Tokyo Electron Ltd 塗布方法及び塗布装置

Also Published As

Publication number Publication date
JP2010098125A (ja) 2010-04-30
TW201021092A (en) 2010-06-01
KR20100042586A (ko) 2010-04-26

Similar Documents

Publication Publication Date Title
TWI408731B (zh) 基板搬運裝置及基板搬運方法
TWI294639B (en) Stage equipment and coating processing equipment
KR101603343B1 (ko) 기판 반송 처리 장치
JP4049751B2 (ja) 塗布膜形成装置
JP4305918B2 (ja) 浮上式基板搬送処理装置
CN102005402B (zh) 基板输送装置以及基板输送方法
JP4896236B2 (ja) 基板搬送装置及び基板搬送方法
CN1277299C (zh) 基板校准装置，基板处理装置及基板搬运装置
JP4175988B2 (ja) 基板アライメント装置及び基板処理装置及び基板搬送装置
JP7196222B2 (ja) 露光方法
JP5771432B2 (ja) 塗布装置
JP2012044052A (ja) 塗布装置
JP5912403B2 (ja) 塗布処理装置
JP5711961B2 (ja) 塗布装置及び塗布方法
JP5550882B2 (ja) 塗布装置
JP6364274B2 (ja) 除去方法、除去装置および印刷システム
TWI311633B (en) Decompression drier
JP4541396B2 (ja) 塗布膜形成装置、基板搬送方法及び記憶媒体
JP5091654B2 (ja) チャックテーブル機構
KR101859279B1 (ko) 기판 처리 장치 및 기판 처리 방법
JP2007112626A (ja) 基板搬送装置及び基板検査装置並びに基板搬送方法
JP5244445B2 (ja) 塗布装置
JP4353530B2 (ja) 基板処理方法及び基板処理装置
JP2004179513A (ja) 基板保持装置及び基板処理装置
TW201325813A (zh) 處理載置台裝置及使用其之塗布處理裝置

Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees