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TWI404833B - Electroplate system and method for using the same - Google Patents

Electroplate system and method for using the same Download PDF

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TWI404833B
TWI404833B TW100102749A TW100102749A TWI404833B TW I404833 B TWI404833 B TW I404833B TW 100102749 A TW100102749 A TW 100102749A TW 100102749 A TW100102749 A TW 100102749A TW I404833 B TWI404833 B TW I404833B
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circuit board
plating
cover
anode
auxiliary cathode
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TW100102749A
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Chinese (zh)
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TW201231735A (en
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Chien Pang Cheng
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Zhen Ding Technology Co Ltd
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Abstract

An electroplate system includes a plating tank, a power supply, an anode rod, an anode, a cathode rod, a plating rack, an auxiliary cathode rod, and an auxiliary cover. The anode rod, the cathode rod and the auxiliary cathode rod are all connected with the power supply. The anode is fixed to the anode rod. The plating rack is fixed to the cathode. The plating rack has a plurality of electrically conductive pins. The auxiliary cathode cover is fixed to the auxiliary cathode rod, and is arranged between the plating rack and the anode. The auxiliary cathode cover has a cover opposite to a printed circuit board. The cover has a peripheral portion and a central portion. The electrically conductive pins are opposite to the peripheral portion. The peripheral portion defines a number of first through holes, the central portion defines a second through hole. The first through holes and the second through are used to control the density distribution of the metal ion released by the anode after running through the auxiliary cathode cover. A plating method using the above electroplate system is also provided.

Description

電鍍系統及電鍍方法Plating system and plating method

本發明涉及電鍍技術,特別涉及一種電鍍系統及電鍍方法。The invention relates to electroplating technology, in particular to an electroplating system and a plating method.

隨著電子產業之飛速發展,作為電子產品基本構件之電路板之製作技術顯得愈來愈重要。電路板一般由覆銅基板經裁切、鑽孔、電鍍、曝光、顯影、蝕刻、壓合、印刷、成型等一系列製程製作而成。具體可參閱C.H. Steer等人在Proceedings of the IEEE, Vol.39, No.2 (2002年8月)中發表之“Dielectric characterization of printed circuit board substrates”一文。With the rapid development of the electronics industry, the production technology of circuit boards, which are the basic components of electronic products, is becoming more and more important. The circuit board is generally fabricated by a series of processes such as cutting, drilling, electroplating, exposure, development, etching, pressing, printing, molding, and the like. For details, see "Dielectric characterization of printed circuit board substrates" by C. H. Steer et al., Proceedings of the IEEE, Vol. 39, No. 2 (August 2002).

其中,電鍍係電路板製作之重要製程,其主要使用電鍍系統對電路板表面進行選擇性鍍銅以及在通孔孔壁鍍銅。先前之電鍍系統包括一個電鍍槽、供電裝置、陽極桿、電鍍陽極、陰極桿與掛架。蝕刻槽內裝載有電鍍液,用於對電路板進行電鍍。供電裝置之正負極分別與陽極桿與陰極桿電連接。電鍍陽極連接於陽極桿,掛架連接於陰極桿。電鍍陽極與掛架均設置在電鍍槽內且浸入電鍍槽之電鍍液中。電鍍陽極分別與掛架之相對。掛架用於懸掛固定待電鍍之電路板,從而使電路板之表面與該電鍍陽極相對。供電裝置通電後,電鍍陽極析出之金屬離子在電流作用下沈積鍍覆在該電路板上,此時,該電路板相當於陰極。然而,由於電路板之電流係藉由掛架之導電夾點導入,因此造成待鍍電路板靠近導電夾點之兩個邊緣區域電流密度較高,而遠離導電夾點之電路板之中心區域之電流密度較低。並且,由於金屬離子之沈積量與電流密度成正比,從而使電路板與導電夾點連接之兩個邊緣區域沈積之金屬較厚,而電路板之中心區域沈積之金屬較薄,造成金屬沈積之厚度不均,影響電鍍品質。Among them, the electroplating system is an important process for the production of circuit boards, which mainly uses an electroplating system to selectively plate copper on the surface of the circuit board and copper plating on the through hole walls. Previous plating systems included a plating bath, power supply, anode rod, plated anode, cathode rod and pylon. A plating solution is placed in the etching bath for plating the board. The positive and negative poles of the power supply device are electrically connected to the anode rod and the cathode rod, respectively. The electroplated anode is connected to the anode rod, and the hanger is connected to the cathode rod. The electroplated anode and the pylon are both disposed in the plating bath and immersed in the plating bath of the plating bath. The electroplated anodes are respectively opposed to the pylons. The pylon is used to suspend the circuit board to be plated so that the surface of the board is opposite to the plated anode. After the power supply device is energized, the metal ions deposited by the electroplating anode are deposited and plated on the circuit board under the action of a current. At this time, the circuit board is equivalent to the cathode. However, since the current of the circuit board is introduced by the conductive pinch of the pylon, the current density of the two edge regions of the circuit board to be plated close to the conductive pinch is higher, and the central area of the circuit board far from the conductive pinch is The current density is low. Moreover, since the deposition amount of the metal ions is proportional to the current density, the metal deposited on the two edge regions of the circuit board and the conductive pinch is thicker, and the metal deposited in the central region of the circuit board is thinner, causing metal deposition. Uneven thickness affects plating quality.

有鑑於此,針對上述問題,提供一種可提高電鍍時電路板之金屬沈積厚度均勻性,從而提升電鍍品質之電鍍系統及電鍍方法實屬必要。In view of the above, in view of the above problems, it is necessary to provide an electroplating system and a plating method which can improve the uniformity of metal deposition thickness of a circuit board during electroplating, thereby improving plating quality.

下面將以具體實施例說明一種電鍍系統及電鍍方法。An electroplating system and a plating method will be described below by way of specific examples.

一種電鍍系統,用於對至少一個電路板進行電鍍。該電鍍系統包括電鍍槽、供電裝置、陽極桿、電鍍陽極、陰極桿、掛架、一個輔助陰極桿與一個輔助陰極罩。該電鍍槽裝載有電鍍液。該供電裝置具有正極與負極。該陽極桿連接於該正極,該陰極桿連接於該負極。該電鍍陽極與掛架均設置在該電鍍槽內且浸入電鍍液中。該電鍍陽極固定在該陽極桿,該電鍍陽極用於供應電路板電鍍所需之金屬離子。該掛架固定在該陰極桿且與該電鍍陽極相對,該掛架具有複數導電夾點。該複數導電夾點用於夾持固定該至少一個電路板並給該至少一個電路板供電以進行電鍍。該輔助陰極桿連接於該負極。該輔助陰極罩固定在該輔助陰極桿。該輔助陰極罩與該掛架相對且位於該掛架與該電鍍陽極之間。該輔助陰極罩包括至少一個罩體,該至少一個罩體與該至少一個電路板正對。該至少一個罩體包括第一邊緣區、第二邊緣區與中心區,該中心區位於第一邊緣區與第二邊緣區之間。該掛架之複數導電夾點與該第一邊緣區與第二邊緣區相對。該至少一個罩體之第一邊緣區與第二邊緣區均開設有複數第一通孔。該複數第一通孔之口徑隨著與中心區距離之減小而增大。該至少一個罩體之中心區開設有一個第二通孔,該第二通孔之口徑大於任一第一通孔之口徑。An electroplating system for electroplating at least one circuit board. The electroplating system includes a plating bath, a power supply device, an anode rod, a plated anode, a cathode rod, a pylon, an auxiliary cathode rod and an auxiliary cathode cover. The plating bath is loaded with a plating solution. The power supply device has a positive electrode and a negative electrode. The anode rod is connected to the anode, and the cathode rod is connected to the anode. The electroplated anode and the pylon are both disposed in the plating bath and immersed in the plating solution. The plated anode is fixed to the anode rod, and the plated anode is used to supply metal ions required for plating of the circuit board. The pylon is fixed to the cathode rod and opposite the plated anode, the pylon having a plurality of conductive pinch points. The plurality of conductive clips are used to clamp the at least one circuit board and power the at least one circuit board for electroplating. The auxiliary cathode rod is connected to the negative electrode. The auxiliary cathode cover is fixed to the auxiliary cathode rod. The auxiliary cathode cover is opposite to the hanger and located between the hanger and the plating anode. The auxiliary cathode cover includes at least one cover opposite the at least one circuit board. The at least one cover includes a first edge region, a second edge region, and a central region, the central region being located between the first edge region and the second edge region. The plurality of conductive clips of the pylon are opposite the first edge region and the second edge region. The first edge region and the second edge region of the at least one cover are respectively provided with a plurality of first through holes. The diameter of the plurality of first through holes increases as the distance from the central portion decreases. A central portion of the at least one cover is provided with a second through hole, and the second through hole has a larger diameter than any of the first through holes.

一種電鍍方法,包括步驟:提供至少一個電路板及如上所述之電鍍系統,該至少一個電路板具有待電鍍之第一表面;利用複數導電夾點將該至少一個電路板夾持固定至掛架並浸入電鍍槽之電鍍液中,使第一表面與該輔助陰極罩相對;以及供電裝置給電鍍陽極、掛架與輔助陰極罩供電,以使電鍍陽極析出金屬離子,電鍍陽極析出之金屬離子穿過輔助陰極罩之複數第一通孔及一個第二通孔並還原沈積在第一表面以對該至少一個電路板進行電鍍。An electroplating method comprising the steps of: providing at least one circuit board and a plating system as described above, the at least one circuit board having a first surface to be plated; clamping the at least one circuit board to the pylon with a plurality of conductive pinch points and Immersing in the plating solution of the plating bath, so that the first surface is opposite to the auxiliary cathode cover; and the power supply device supplies power to the plating anode, the pylon and the auxiliary cathode cover, so that the metal ions are precipitated in the plating anode, and the metal ions deposited by the plating anode pass through A plurality of first via holes and a second via hole of the auxiliary cathode cover are reduced and deposited on the first surface to plate the at least one circuit board.

一種電鍍系統,用於對至少一個電路板進行電鍍。該電鍍系統包括電鍍槽、供電裝置、陽極桿、電鍍陽極、陰極桿、掛架、兩個輔助陰極桿與兩個輔助陰極罩。該電鍍槽裝載有電鍍液。該供電裝置具有正極與負極。該陽極桿連接於該正極,該陰極桿連接於該負極。該電鍍陽極與掛架均設置在該電鍍槽內且浸入電鍍液中。該電鍍陽極固定在該陽極桿,該電鍍陽極用於供應電路板電鍍所需之金屬離子。該掛架固定在該陰極桿且與該電鍍陽極相對。該掛架具有複數導電夾點,該複數導電夾點用於夾持固定該至少一個電路板並給該至少一個電路板供電以進行電鍍。該兩個輔助陰極桿分別連接於該負極。該兩個輔助陰極罩分別固定在該兩個輔助陰極桿。該電鍍陽極之數目為兩個,該兩個電鍍陽極分別設置在該掛架之相對兩側。該兩個輔助陰極罩分別設置在該掛架之相對兩側,且每一個輔助陰極罩位於該掛架與一個電鍍陽極之間。每一個輔助陰極罩包括至少一個罩體,該至少一個罩體與該至少一個電路板正對。該至少一個罩體包括第一邊緣區、第二邊緣區與中心區,該中心區位於第一邊緣區與第二邊緣區之間。該掛架之複數導電夾點與該第一邊緣區與第二邊緣區相對。該至少一個罩體之第一邊緣區與第二邊緣區均開設有複數第一通孔。該複數第一通孔之口徑隨著與中心區距離之減小而增大。該至少一個罩體之中心區開設有一個第二通孔,該第二通孔之口徑大於任一第一通孔之口徑。An electroplating system for electroplating at least one circuit board. The electroplating system includes a plating bath, a power supply device, an anode rod, a plated anode, a cathode rod, a pylon, two auxiliary cathode rods, and two auxiliary cathode hoods. The plating bath is loaded with a plating solution. The power supply device has a positive electrode and a negative electrode. The anode rod is connected to the anode, and the cathode rod is connected to the anode. The electroplated anode and the pylon are both disposed in the plating bath and immersed in the plating solution. The plated anode is fixed to the anode rod, and the plated anode is used to supply metal ions required for plating of the circuit board. The pylon is fixed to the cathode rod and opposite the plating anode. The pylon has a plurality of conductive clips for clamping and securing the at least one circuit board and powering the at least one circuit board for electroplating. The two auxiliary cathode rods are respectively connected to the negative electrode. The two auxiliary cathode covers are respectively fixed to the two auxiliary cathode rods. The number of the plated anodes is two, and the two plated anodes are respectively disposed on opposite sides of the hanger. The two auxiliary cathode covers are respectively disposed on opposite sides of the hanger, and each auxiliary cathode cover is located between the hanger and a plating anode. Each of the auxiliary cathode covers includes at least one cover opposite the at least one circuit board. The at least one cover includes a first edge region, a second edge region, and a central region, the central region being located between the first edge region and the second edge region. The plurality of conductive clips of the pylon are opposite the first edge region and the second edge region. The first edge region and the second edge region of the at least one cover are respectively provided with a plurality of first through holes. The diameter of the plurality of first through holes increases as the distance from the central portion decreases. A central portion of the at least one cover is provided with a second through hole, and the second through hole has a larger diameter than any of the first through holes.

一種電鍍方法,包括步驟:提供至少一個電路板及如上所述之電鍍系統,該至少一個電路板具有待電鍍之第一表面與第二表面;利用複數導電夾點將該至少一個電路板夾持固定至掛架並浸入電鍍槽之電鍍液中,使第一表面與第二表面分別與該兩個輔助陰極罩相對;以及供電裝置給兩個電鍍陽極、掛架與兩個輔助陰極罩供電,以使該兩個電鍍陽極析出金屬離子,電鍍陽極析出之金屬離子穿過該兩個輔助陰極罩之複數第一通孔及一個第二通孔並還原沈積在第一表面與第二表面以對該至少一個電路板進行電鍍。An electroplating method comprising the steps of: providing at least one circuit board and a plating system as described above, the at least one circuit board having a first surface and a second surface to be plated; clamping the at least one circuit board by a plurality of conductive pinch points And immersing in the electroplating bath of the electroplating bath, so that the first surface and the second surface are respectively opposite to the two auxiliary cathode covers; and the power supply device supplies power to the two electroplating anodes, the pylon and the two auxiliary cathode covers, And causing the two electroplating anodes to precipitate metal ions, and the metal ions deposited by the electroplating anode pass through the plurality of first through holes and the second through holes of the two auxiliary cathode covers and are reduced and deposited on the first surface and the second surface to At least one of the boards is plated.

一種電鍍系統,用於對至少一個電路板進行電鍍。該電鍍系統包括電鍍槽、供電裝置、陽極桿、電鍍陽極、陰極桿、掛架、輔助陰極桿與輔助陰極罩。該電鍍槽裝載有電鍍液。該供電裝置具有正極與負極。該陽極桿連接於該正極,該陰極桿連接於該負極。該電鍍陽極與掛架均設置在該電鍍槽內且浸入電鍍液中。該電鍍陽極固定在該陽極桿,該電鍍陽極用於供應電路板電鍍所需之金屬離子。該掛架固定在該陰極桿且與該電鍍陽極相對。該掛架具有複數導電夾點。該複數導電夾點用於夾持固定該至少一個電路板並給該至少一個電路板供電以進行電鍍。該輔助陰極桿連接於該負極,該輔助陰極罩固定在該輔助陰極桿。該輔助陰極罩位於該掛架與該電鍍陽極之間。該輔助陰極罩包括至少一個罩體,該至少一個罩體與該至少一個電路板正對。該至少一個罩體包括周邊區與中心區,該周邊區與該掛架之複數導電夾點相對。該至少一個罩體之周邊區開設有複數第一通孔,該複數第一通孔之口徑隨著與中心區距離之增大而減小。該中心區開設複數第二通孔,該複數第二通孔之橫截面積之加總占該中心區之橫截面積之比例大於複數第一通孔之橫截面積之加總占該周邊區之橫截面積之比例。An electroplating system for electroplating at least one circuit board. The electroplating system includes a plating tank, a power supply device, an anode rod, a plated anode, a cathode rod, a pylon, an auxiliary cathode rod, and an auxiliary cathode cover. The plating bath is loaded with a plating solution. The power supply device has a positive electrode and a negative electrode. The anode rod is connected to the anode, and the cathode rod is connected to the anode. The electroplated anode and the pylon are both disposed in the plating bath and immersed in the plating solution. The plated anode is fixed to the anode rod, and the plated anode is used to supply metal ions required for plating of the circuit board. The pylon is fixed to the cathode rod and opposite the plating anode. The pylon has a plurality of conductive pinch points. The plurality of conductive clips are used to clamp the at least one circuit board and power the at least one circuit board for electroplating. The auxiliary cathode rod is connected to the anode, and the auxiliary cathode cover is fixed to the auxiliary cathode rod. The auxiliary cathode cover is located between the hanger and the plating anode. The auxiliary cathode cover includes at least one cover opposite the at least one circuit board. The at least one cover includes a peripheral zone and a central zone that is opposite the plurality of conductive pinch points of the pylon. The peripheral portion of the at least one cover is provided with a plurality of first through holes, and the diameter of the plurality of first through holes decreases as the distance from the central portion increases. The central area defines a plurality of second through holes, wherein the sum of the cross-sectional areas of the plurality of second through holes occupies a larger proportion of the cross-sectional area of the central area than the cross-sectional area of the plurality of first through holes occupies the peripheral area The ratio of the cross-sectional area.

相較於先前技術,本技術方案之電鍍系統及電鍍方法,其可利用輔助陰極罩控制穿過第一通孔與第二通孔之金屬離子之數量,使金屬離子經過該輔助陰極罩後之密度分佈較為均勻,提高沈積在電路板上之金屬層厚度之均勻性,從而提升電路板之電鍍品質。Compared with the prior art, the electroplating system and the electroplating method of the present technical solution can utilize an auxiliary cathode cover to control the amount of metal ions passing through the first through hole and the second through hole, so that the metal ions pass through the auxiliary cathode cover. The density distribution is relatively uniform, which improves the uniformity of the thickness of the metal layer deposited on the circuit board, thereby improving the plating quality of the circuit board.

下面將結合附圖與實施例對本技術方案之電鍍系統及電鍍方法作進一步詳細說明。The electroplating system and the electroplating method of the present technical solution will be further described in detail below with reference to the accompanying drawings and embodiments.

請參閱圖1至圖2,本技術方案第一實施例提供一種電鍍系統10,用於對至少一個電路板20進行電鍍。該電鍍系統10包括電鍍槽11、供電裝置12、陽極桿13、電鍍陽極14、陰極桿15、掛架16、輔助陰極桿17與輔助陰極罩18。該電鍍陽極14、掛架16與輔助陰極罩18均設置在電鍍槽11內。該輔助陰極罩18位於該電鍍陽極14與該掛架16之間。Referring to FIG. 1 to FIG. 2 , the first embodiment of the present technical solution provides an electroplating system 10 for electroplating at least one circuit board 20 . The plating system 10 includes a plating tank 11, a power supply device 12, an anode rod 13, a plating anode 14, a cathode rod 15, a pylon 16, an auxiliary cathode rod 17, and an auxiliary cathode cover 18. The plating anode 14, the pylon 16 and the auxiliary cathode cover 18 are both disposed in the plating tank 11. The auxiliary cathode cover 18 is located between the plating anode 14 and the hanger 16.

具體地,該電鍍槽11具有底壁111、第一側壁112與第二側壁113。該第一側壁112與第二側壁113分別垂直連接於該底壁111。該第一側壁112與第二側壁113平行相對。該電鍍槽11裝載有電鍍液101。Specifically, the plating tank 11 has a bottom wall 111, a first side wall 112, and a second side wall 113. The first sidewall 112 and the second sidewall 113 are perpendicularly connected to the bottom wall 111, respectively. The first sidewall 112 is parallel to the second sidewall 113. The plating bath 11 is loaded with a plating solution 101.

該供電裝置12具有正極121與負極122。該供電裝置12用於提供電路板20電鍍所需之直流電。The power supply device 12 has a positive electrode 121 and a negative electrode 122. The power supply device 12 is used to provide the direct current required for the plating of the circuit board 20.

該陽極桿13連接於該供電裝置12之正極121。該陰極桿15與該輔助陰極桿17均連接於該供電裝置12之負極122。The anode rod 13 is connected to the positive electrode 121 of the power supply device 12. The cathode rod 15 and the auxiliary cathode rod 17 are both connected to the negative electrode 122 of the power supply device 12.

該電鍍陽極14固定在該陽極桿13,從而供電裝置12可藉由陽極桿13給電鍍陽極14供電。該電鍍陽極14浸入電鍍槽11之電鍍液101中。該電鍍陽極14用於供應電路板20電鍍所需之金屬離子,例如銅離子。本實施例中,電鍍陽極14之數目為兩個,該兩個電鍍陽極14分別與電鍍槽11之第一側壁112與第二側壁113平行相對。此外,當僅需對電路板20之一個表面進行電鍍時,該電鍍陽極14之數目亦可為一個,該一個電鍍陽極14與電鍍槽11之第一側壁112相對。The plating anode 14 is fixed to the anode rod 13 so that the power supply unit 12 can supply the plating anode 14 with the anode rod 13. The plating anode 14 is immersed in the plating solution 101 of the plating bath 11. The plated anode 14 is used to supply metal ions, such as copper ions, required for plating of the circuit board 20. In this embodiment, the number of the plating anodes 14 is two, and the two plating anodes 14 are respectively parallel to the first side wall 112 and the second side wall 113 of the plating tank 11. In addition, when only one surface of the circuit board 20 needs to be plated, the number of the plating anodes 14 may be one, and the one plating anode 14 is opposed to the first side wall 112 of the plating tank 11.

該掛架16固定在該陰極桿15且與該電鍍陽極14相對,該供電裝置12可藉由陰極桿15給掛架16供電。該掛架16位於該電鍍陽極14與該電鍍槽11之第二側壁113之間。該掛架16浸入該電鍍槽11之電鍍液101中。本實施例中,該兩個電鍍陽極14分別設置在該掛架16之相對兩側。The pylon 16 is fixed to the cathode rod 15 and opposite to the plating anode 14. The power supply device 12 can supply power to the pylon 16 by the cathode rod 15. The pylon 16 is located between the plating anode 14 and the second sidewall 113 of the plating tank 11. The pylon 16 is immersed in the plating solution 101 of the plating tank 11. In this embodiment, the two plating anodes 14 are respectively disposed on opposite sides of the hanger 16.

該掛架16包括兩根豎桿161、兩根橫桿162、掛鈎163與複數導電夾點164。該兩根豎桿161相互平行,該兩根橫桿162相互平行且分別活動連接在該兩根豎桿161之兩端,以使得該兩根豎桿161之間距可藉由該兩根橫桿162進行調節,從而夾持具有不同尺寸之電路板20。該掛鈎163可連接在該豎桿161或者橫桿162。本實施例中,掛鈎163之數目為兩個,該兩個掛鈎163分別固定連接於該兩根豎桿161。該複數導電夾點164設置在該兩根豎桿161上。該複數導電夾點164用於夾持固定該至少一個電路板20並給該至少一個電路板20供電以進行電鍍。The pylon 16 includes two vertical bars 161, two cross bars 162, hooks 163 and a plurality of conductive clips 164. The two vertical rods 161 are parallel to each other, and the two horizontal rods 162 are parallel to each other and are respectively movably connected to the two ends of the two vertical rods 161, so that the distance between the two vertical rods 161 can be separated by the two horizontal rods The 162 is adjusted to clamp the circuit board 20 having different sizes. The hook 163 can be attached to the vertical rod 161 or the crossbar 162. In this embodiment, the number of the hooks 163 is two, and the two hooks 163 are fixedly connected to the two vertical rods 161, respectively. The plurality of conductive clips 164 are disposed on the two vertical rods 161. The plurality of conductive clips 164 are used to clamp the at least one circuit board 20 and power the at least one circuit board 20 for electroplating.

該輔助陰極罩18固定在該輔助陰極桿17。該輔助陰極罩18與該掛架16相對且位於該掛架16與該電鍍陽極14之間。該輔助陰極桿17、該輔助陰極罩18之數目均可為一個或兩個。本實施例中,該輔助陰極桿17、該輔助陰極罩18之數目為兩個,該兩個輔助陰極罩18分別固定在該兩個輔助陰極桿17。該兩個輔助陰極罩18分別設置在該掛架16之相對兩側,且每一個輔助陰極罩18位於該掛架16與一個電鍍陽極14之間。The auxiliary cathode cover 18 is fixed to the auxiliary cathode rod 17. The auxiliary cathode cover 18 is opposite the pylon 16 and is located between the pylon 16 and the plating anode 14. The number of the auxiliary cathode rod 17 and the auxiliary cathode cover 18 may be one or two. In this embodiment, the number of the auxiliary cathode rods 17 and the auxiliary cathode cover 18 is two, and the two auxiliary cathode covers 18 are respectively fixed to the two auxiliary cathode rods 17. The two auxiliary cathode covers 18 are respectively disposed on opposite sides of the pylon 16, and each auxiliary cathode cover 18 is located between the pylon 16 and a plating anode 14.

請一併參閱圖3及圖4,每一個輔助陰極罩18包括至少一個罩體182。該至少一個罩體182與該至少一個電路板20正對。該罩體182之形狀與電路板20之形狀相對應,該至少一個罩體182包括第一邊緣區1821、第二邊緣區1822與中心區1825。該中心區1825位於第一邊緣區1821與第二邊緣區1822之間。該掛架16之兩根豎桿161分別與該第一邊緣區1821、第二邊緣區1822相對,亦即,該掛架16之複數導電夾點164分別與該第一邊緣區1821、第二邊緣區1822相對。本實施例中,該罩體182之形狀為矩形。Referring to FIGS. 3 and 4 together, each of the auxiliary cathode covers 18 includes at least one cover 182. The at least one cover 182 is opposite the at least one circuit board 20. The shape of the cover 182 corresponds to the shape of the circuit board 20, and the at least one cover 182 includes a first edge region 1821, a second edge region 1822, and a central region 1825. The central zone 1825 is located between the first edge zone 1821 and the second edge zone 1822. The two vertical rods 161 of the pylon 16 are respectively opposite to the first edge area 1821 and the second edge area 1822, that is, the plurality of conductive clips 164 of the pylon 16 and the first edge area 1821 and the second The edge regions 1822 are opposite. In this embodiment, the cover 182 has a rectangular shape.

該至少一個罩體182之第一邊緣區1821與第二邊緣區1822均開設有複數第一通孔102。該複數第一通孔102之口徑隨著與中心區1825距離之減小而增大,即位於第一邊緣區1821與第二邊緣區1822中間之第一通孔102之口徑最大。並且,該至少一個罩體182之中心區1825開設有一個第二通孔103。本實施例中,該第二通孔103位於中心區1825之中心。該第二通孔103之口徑大於任一第一通孔102之口徑。該第一通孔102與第二通孔103之形狀均可為圓形、橢圓形、方形、矩形、多邊形或者其他不規則形狀。The first edge region 1821 and the second edge region 1822 of the at least one cover 182 are each provided with a plurality of first through holes 102. The diameter of the plurality of first through holes 102 increases as the distance from the central portion 1825 decreases, that is, the diameter of the first through holes 102 located between the first edge region 1821 and the second edge region 1822 is the largest. Moreover, a central portion 1825 of the at least one cover 182 defines a second through hole 103. In this embodiment, the second through hole 103 is located at the center of the central area 1825. The diameter of the second through hole 103 is larger than the diameter of any of the first through holes 102. The shapes of the first through hole 102 and the second through hole 103 may be circular, elliptical, square, rectangular, polygonal or other irregular shapes.

本實施例中,該第一通孔102與第二通孔103之形狀均為圓形。該第一通孔102之直徑之一種設置方式如下:設該罩體182在垂直於掛架16之豎桿161之方向為X方向,在平行於豎桿161之方向為Y方向。該罩體182在X方向之長度為X0 ,在Y方向之長度為Y0 。將該罩體182在X方向之長度均分為五等份,每份之長度X1 為X0 /5。該罩體182開設有平行於X方向之九行第一通孔102。每一行之第一通孔102有九個。該九個第一通孔102中位於第一邊緣區1821與第二邊緣區1822最外側之兩個第一通孔102之直徑為A1,自該直徑為A1之兩個第一通孔102向內之三對第一通孔102之直徑依次為A2、A3與A4,中間之一個第一通孔102之孔徑為A5,且A1=0.2X1 ,A2=1.2A1,A3=1.2A2,A4=1.2A3,A5=1.2A4。In this embodiment, the shape of the first through hole 102 and the second through hole 103 are both circular. One of the diameters of the first through holes 102 is arranged as follows: the cover 182 is disposed in the X direction in a direction perpendicular to the vertical rod 161 of the pylon 16, and in the Y direction in a direction parallel to the vertical rod 161. The cover body 182 has a length X 0 in the X direction and a Y 0 length in the Y direction. The length of the cover 182 in the X direction is divided into five equal portions, and the length X 1 of each portion is X 0 /5. The cover 182 is provided with nine rows of first through holes 102 parallel to the X direction. There are nine first through holes 102 in each row. The two first through holes 102 of the nine first through holes 102 located at the outermost sides of the first edge region 1821 and the second edge region 1822 have a diameter A1, and the two first through holes 102 having the diameter A1 are oriented. The diameters of the three pairs of first through holes 102 are A2, A3 and A4, and the diameter of the first one of the first through holes 102 is A5, and A1=0.2X 1 , A2=1.2A1, A3=1.2A2, A4 =1.2A3, A5=1.2A4.

進一步地,該罩體182還包括相對之第三邊緣區1823與第四邊緣區1824。該第一邊緣區1821、第三邊緣區1823、第二邊緣區1822與第四邊緣區1824依次連接,且圍繞該中心區1825。該第一邊緣區1821、第二邊緣區1822、第三邊緣區1823與第四邊緣區1824之材質為金屬,該中心區1825之材質為非金屬。該中心區1825之形狀為圓形。該圓形之中心區1825與電路板20之距離逐漸變化,且中心區1825之圓周與電路板20之距離小於中心區1825之圓心與電路板20之距離。Further, the cover 182 further includes an opposite third edge region 1823 and a fourth edge region 1824. The first edge region 1821, the third edge region 1823, the second edge region 1822 and the fourth edge region 1824 are sequentially connected and surround the central region 1825. The material of the first edge region 1821, the second edge region 1822, the third edge region 1823 and the fourth edge region 1824 is made of metal, and the material of the central region 1825 is non-metal. The central area 1825 is circular in shape. The distance between the central portion 1825 of the circle and the circuit board 20 gradually changes, and the distance between the circumference of the central portion 1825 and the circuit board 20 is smaller than the distance between the center of the central portion 1825 and the circuit board 20.

優選地,該輔助陰極罩18為矩形,該輔助陰極罩18之四周邊緣分別向靠近電路板20之方向延伸形成一個彎折部184。該彎折部184之延伸長度為10毫米至20毫米。該彎折部184與待電鍍之電路板20之距離為2毫米至5毫米。本實施例中,該彎折部184之延伸長度為15毫米。該彎折部184與待電鍍之電路板20之距離為5毫米。Preferably, the auxiliary cathode cover 18 has a rectangular shape, and the peripheral edges of the auxiliary cathode cover 18 respectively extend toward the circuit board 20 to form a bent portion 184. The bent portion 184 has an extension length of 10 mm to 20 mm. The distance between the bent portion 184 and the circuit board 20 to be plated is 2 mm to 5 mm. In this embodiment, the bent portion 184 has an extension length of 15 mm. The distance between the bent portion 184 and the circuit board 20 to be plated is 5 mm.

此外,在其他實施方式中,該輔助陰極罩還可以設計成其他結構。具體如下:Moreover, in other embodiments, the auxiliary cathode cover can also be designed in other configurations. details as follows:

在第二實施例中,請參閱圖5,輔助陰極罩28包括至少一個罩體282。該罩體282與第一實施例中之罩體182之區別在於,該罩體282與電路板之距離逐漸變化,且第一邊緣區2821、第二邊緣區2822、第三邊緣區2823與第四邊緣區2824與電路板之距離小於中心區2825與電路板之距離。In a second embodiment, referring to FIG. 5, the auxiliary cathode cover 28 includes at least one cover 282. The cover 282 is different from the cover 182 of the first embodiment in that the distance between the cover 282 and the circuit board is gradually changed, and the first edge region 2821, the second edge region 2822, and the third edge region 2823 and The distance between the four edge regions 2824 and the circuit board is less than the distance between the central region 2825 and the circuit board.

在第三實施例中,請參閱圖6,輔助陰極罩38包括至少一個罩體382。該罩體382與第一實施例中之罩體182之區別在於,該罩體382與電路板之距離逐漸變化,且第一邊緣區3821、第二邊緣區3822與電路板之距離小於中心區3825與電路板之距離。In a third embodiment, referring to FIG. 6, the auxiliary cathode cover 38 includes at least one cover 382. The cover 382 is different from the cover 182 in the first embodiment in that the distance between the cover 382 and the circuit board is gradually changed, and the distance between the first edge region 3821 and the second edge region 3822 and the circuit board is smaller than the central region. The distance between the 3825 and the board.

在第四實施例中,請參閱圖7,輔助陰極罩48包括至少一個罩體482。該罩體482與第一實施例中之罩體182之區別在於,該罩體482包括周邊區4821與中心區4825。該周邊區4821與掛架之複數導電夾點相對。該罩體482之周邊區4821開設有複數第一通孔402。該複數第一通孔402之口徑隨著與中心區4825距離之增大而減小。該罩體482之中心區4825為平板狀。該中心區4825開設複數第二通孔403。該複數第二通孔403之橫截面積之加總占該中心區4825之橫截面積之比例大於複數第一通孔402之橫截面積之加總占該周邊區4821之橫截面積之比例。In the fourth embodiment, referring to FIG. 7, the auxiliary cathode cover 48 includes at least one cover 482. The cover 482 differs from the cover 182 of the first embodiment in that the cover 482 includes a peripheral zone 4821 and a central zone 4825. The peripheral zone 4821 is opposite the plurality of conductive pinch points of the pylon. The peripheral portion 4482 of the cover 482 is provided with a plurality of first through holes 402. The diameter of the plurality of first through holes 402 decreases as the distance from the central portion 4825 increases. The central portion 4825 of the cover 482 has a flat shape. The central area 4825 defines a plurality of second through holes 403. The ratio of the total cross-sectional area of the plurality of second through holes 403 to the cross-sectional area of the central portion 4825 is greater than the ratio of the cross-sectional area of the plurality of first through holes 402 to the cross-sectional area of the peripheral portion 4821. .

請進一步參閱圖8,本技術方案實施例還提供一種利用上述之電鍍系統10對電路板20進行電鍍之電鍍方法,當該電路板20僅需電鍍其中一個表面時,該電鍍方法包括以下步驟:Referring to FIG. 8 , an embodiment of the present technical solution further provides an electroplating method for electroplating the circuit board 20 by using the electroplating system 10 described above. When the circuit board 20 only needs to electroplate one surface, the electroplating method includes the following steps:

步驟110,提供至少一個電路板20及如上所述之電鍍系統10,該至少一個電路板20具有待電鍍之第一表面21。Step 110, providing at least one circuit board 20 and an electroplating system 10 as described above, the at least one circuit board 20 having a first surface 21 to be electroplated.

具體地,每一個電路板20具有相對之第一表面21與第二表面22。其中,該第一表面21為待電鍍之表面。此時,該電鍍系統10可僅包括一個電鍍陽極14、一個輔助陰極桿17與一個輔助陰極罩18即可。Specifically, each of the circuit boards 20 has a first surface 21 and a second surface 22 opposite thereto. Wherein, the first surface 21 is a surface to be plated. At this time, the plating system 10 may include only one plating anode 14, one auxiliary cathode rod 17, and one auxiliary cathode cover 18.

步驟120,利用複數導電夾點164將該至少一個電路板20夾持固定至掛架16並浸入電鍍槽11之電鍍液101中,使第一表面21與該輔助陰極罩18相對。In step 120, the at least one circuit board 20 is clamped and fixed to the pylon 16 by the plurality of conductive clips 164 and immersed in the plating solution 101 of the plating bath 11, so that the first surface 21 is opposed to the auxiliary cathode cover 18.

具體地,可先將該至少一個電路板20藉由導電夾點164夾持固定至掛架16;接著,將輔助陰極罩18固定在輔助陰極桿17上,該輔助陰極罩18與該至少一個電路板20之第一表面21相對;然後,將該掛架16、至少一個電路板20與輔助陰極罩18浸入電鍍槽11之電鍍液101中。此時,該輔助陰極罩18與電鍍陽極14相對,且該輔助陰極罩18位於該電鍍陽極14與該掛架16之間。Specifically, the at least one circuit board 20 can be first fixed to the pylon 16 by the conductive pinch 164; then, the auxiliary cathode cover 18 is fixed on the auxiliary cathode rod 17, the auxiliary cathode cover 18 and the at least one The first surface 21 of the circuit board 20 is opposed; then, the pylon 16, the at least one circuit board 20 and the auxiliary cathode cover 18 are immersed in the plating solution 101 of the plating bath 11. At this time, the auxiliary cathode cover 18 is opposed to the plating anode 14 , and the auxiliary cathode cover 18 is located between the plating anode 14 and the hanger 16 .

步驟130,供電裝置12給電鍍陽極14、掛架16與輔助陰極罩18供電,以使電鍍陽極14析出金屬離子,電鍍陽極14析出之金屬離子穿過輔助陰極罩18之複數第一通孔102及一個第二通孔103並還原沈積在第一表面21以對該至少一個電路板20進行電鍍。In step 130, the power supply device 12 supplies power to the plating anode 14, the pylon 16 and the auxiliary cathode cover 18 to cause metal ions to be deposited in the plating anode 14. The metal ions deposited by the plating anode 14 pass through the plurality of first through holes 102 of the auxiliary cathode cover 18. And a second via 103 and is deposited on the first surface 21 to plate the at least one circuit board 20.

具體地,供電裝置12之正極121給電鍍陽極14通入正電,負極122給掛架16與輔助陰極罩18通入負電。電鍍陽極14浸在電鍍液101中並析出金屬離子,金屬離子在電流之作用下從電鍍陽極14向輔助陰極罩18與掛架16方向移動。金屬離子隨電鍍液101穿過輔助陰極罩18之第一通孔102及第二通孔103,然後沈積在電路板20之第一表面21形成電鍍層。Specifically, the positive electrode 121 of the power supply device 12 is positively charged to the plating anode 14, and the negative electrode 122 is negatively charged to the pylon 16 and the auxiliary cathode cover 18. The plating anode 14 is immersed in the plating solution 101 to deposit metal ions, and the metal ions move from the plating anode 14 to the auxiliary cathode cover 18 and the pylon 16 by the action of current. The metal ions are passed through the first through hole 102 and the second through hole 103 of the auxiliary cathode cover 18 with the plating solution 101, and then deposited on the first surface 21 of the circuit board 20 to form a plating layer.

電鍍完成後,便可將該至少一個電路板20從電鍍槽11中取出。具體地,將掛架16及固定在掛架16上之至少一個電路板20從電鍍槽11中取出,然後,再將該至少一個電路板20從該掛架16上取下來,該電路板20便完成電鍍。電鍍完成後,電路板20進入下一道製作流程繼續進行製作。After the plating is completed, the at least one circuit board 20 can be taken out of the plating tank 11. Specifically, the pylon 16 and at least one circuit board 20 fixed on the pylon 16 are taken out from the plating tank 11, and then the at least one circuit board 20 is removed from the pylon 16, the circuit board 20 The plating is completed. After the plating is completed, the circuit board 20 proceeds to the next production process to continue production.

請進一步參閱圖9,本技術方案實施例還提供第二種利用上述之電鍍系統10對電路板20進行電鍍之電鍍方法,當該電路板20相對之兩個表面均需要進行電鍍時,該電鍍方法包括以下步驟:Referring to FIG. 9 , an embodiment of the present technical solution further provides a second plating method for plating the circuit board 20 by using the electroplating system 10 described above. When the opposite surfaces of the circuit board 20 need to be electroplated, the electroplating is performed. The method includes the following steps:

步驟210,提供至少一個電路板20及如上所述之電鍍系統10,該至少一個電路板20具有待電鍍之第一表面21與第二表面22。Step 210, providing at least one circuit board 20 and an electroplating system 10 as described above, the at least one circuit board 20 having a first surface 21 and a second surface 22 to be electroplated.

具體地,每一個電路板20具有相對之第一表面21與第二表面22。其中,該第一表面21與第二表面22均為待電鍍之表面。此時,該電鍍系統10包括兩個電鍍陽極14、兩個輔助陰極桿17與兩個輔助陰極罩18。Specifically, each of the circuit boards 20 has a first surface 21 and a second surface 22 opposite thereto. Wherein, the first surface 21 and the second surface 22 are surfaces to be plated. At this time, the plating system 10 includes two plated anodes 14, two auxiliary cathode rods 17, and two auxiliary cathode covers 18.

步驟220,利用複數導電夾點164將該至少一個電路板20夾持固定至掛架16並浸入電鍍槽11之電鍍液101中,使第一表面21與第二表面22分別與該兩個輔助陰極罩18相對。Step 220, the at least one circuit board 20 is clamped and fixed to the pylon 16 by the plurality of conductive clips 164 and immersed in the plating solution 101 of the plating bath 11, so that the first surface 21 and the second surface 22 respectively and the two auxiliary The cathode cover 18 is opposite.

具體地,可先將該至少一個電路板20藉由導電夾點164夾持固定至掛架16;接著,將該兩個輔助陰極罩18分別固定在該兩個輔助陰極桿17上,該兩個輔助陰極罩18分別與該至少一個電路板20之第一表面21與第二表面22相對;然後,將該掛架16、至少一個電路板20與兩個輔助陰極罩18浸入電鍍槽11之電鍍液101中。此時,該兩個輔助陰極罩18分別與該兩個電鍍陽極14相對,且該每一個輔助陰極罩18位於一個電鍍陽極14與該掛架16之間。Specifically, the at least one circuit board 20 can be first fixed to the pylon 16 by the conductive pinch 164; then, the two auxiliary cathode hoods 18 are respectively fixed on the two auxiliary cathode rods 17, respectively. The auxiliary cathode cover 18 is respectively opposite to the first surface 21 and the second surface 22 of the at least one circuit board 20; then, the hanger 16, the at least one circuit board 20 and the two auxiliary cathode covers 18 are immersed in the plating tank 11 In the plating solution 101. At this time, the two auxiliary cathode covers 18 are respectively opposed to the two plating anodes 14, and each of the auxiliary cathode covers 18 is located between the plating anode 14 and the hanger 16.

步驟230,供電裝置12給兩個電鍍陽極14、掛架16與兩個輔助陰極罩18供電,以使該兩個電鍍陽極14析出金屬離子,電鍍陽極14析出之金屬離子分別穿過兩個輔助陰極罩18之複數第一通孔102及一個第二通孔103並還原沈積在第一表面21與第二表面22以對該至少一個電路板20進行電鍍。Step 230, the power supply device 12 supplies power to the two electroplating anodes 14, the pylons 16, and the two auxiliary cathode hoods 18, so that the two electroplating anodes 14 deposit metal ions, and the metal ions deposited by the electroplating anode 14 pass through two auxiliary The plurality of first vias 102 and one of the second vias 103 of the cathode cover 18 are reduced and deposited on the first surface 21 and the second surface 22 to plate the at least one circuit board 20.

具體地,供電裝置12之正極121給該兩個電鍍陽極14通入正電,負極122給該掛架16與該兩個輔助陰極罩18通入負電。該兩個電鍍陽極14浸在電鍍液101中並析出金屬離子,金屬離子在電流之作用下從兩個電鍍陽極14分別向兩個輔助陰極罩18方向移動。金屬離子隨電鍍液101穿過兩個輔助陰極罩18之第一通孔102及第二通孔103,然後分別沈積在電路板20之第一表面21與第二表面22形成電鍍層。Specifically, the positive electrode 121 of the power supply device 12 is positively charged to the two plating anodes 14, and the negative electrode 122 is negatively charged to the pylon 16 and the two auxiliary cathode covers 18. The two plating anodes 14 are immersed in the plating solution 101 to deposit metal ions, and the metal ions are moved from the two plating anodes 14 to the two auxiliary cathode covers 18 by the action of current. The metal ions are passed through the first through holes 102 and the second through holes 103 of the two auxiliary cathode covers 18 with the plating solution 101, and then deposited on the first surface 21 and the second surface 22 of the circuit board 20 to form a plating layer, respectively.

電鍍完成後,將電鍍後之至少一個電路板20從電鍍槽11中取出。具體地,將掛架16及固定在掛架16上之至少一個電路板20從電鍍槽11中取出,然後,再將該至少一個電路板20從該掛架16上取下來,該電路板20便完成電鍍。電鍍完成後,電路板20進入下一道製作流程繼續進行製作。After the plating is completed, at least one of the circuit boards 20 after plating is taken out from the plating tank 11. Specifically, the pylon 16 and at least one circuit board 20 fixed on the pylon 16 are taken out from the plating tank 11, and then the at least one circuit board 20 is removed from the pylon 16, the circuit board 20 The plating is completed. After the plating is completed, the circuit board 20 proceeds to the next production process to continue production.

相較於先前技術,本技術方案之電鍍系統及電鍍方法,其可利用輔助陰極罩控制穿過第一通孔與第二通孔之金屬離子之數量,使金屬離子經過該輔助陰極罩後之密度分佈較為均勻,提高沈積在電路板上之金屬層厚度之均勻性,從而提升電路板之電鍍品質。Compared with the prior art, the electroplating system and the electroplating method of the present technical solution can utilize an auxiliary cathode cover to control the amount of metal ions passing through the first through hole and the second through hole, so that the metal ions pass through the auxiliary cathode cover. The density distribution is relatively uniform, which improves the uniformity of the thickness of the metal layer deposited on the circuit board, thereby improving the plating quality of the circuit board.

綜上所述,本發明確已符合發明專利之要件,遂依法提出專利申請。先前技術,以上所述者僅為本發明之較佳實施方式,自不能以此限制本案之申請專利範圍。舉凡熟悉本案技藝之人士援依本發明之精神所作之等效修飾或變化,皆應涵蓋於以下申請專利範圍內。In summary, the present invention has indeed met the requirements of the invention patent, and has filed a patent application according to law. In the prior art, the above description is only a preferred embodiment of the present invention, and the scope of the patent application of the present invention cannot be limited thereby. Equivalent modifications or variations made by persons skilled in the art in light of the spirit of the invention are intended to be included within the scope of the following claims.

10‧‧‧電鍍系統10‧‧‧Electroplating system

11‧‧‧電鍍槽11‧‧‧ plating bath

12‧‧‧供電裝置12‧‧‧Power supply unit

13‧‧‧陽極桿13‧‧‧Anode rod

14‧‧‧電鍍陽極14‧‧‧Electroplating anode

15‧‧‧陰極桿15‧‧‧ cathode rod

16‧‧‧掛架16‧‧‧ hanging rack

17‧‧‧輔助陰極桿17‧‧‧Auxiliary cathode rod

18、28、38、48‧‧‧輔助陰極罩18, 28, 38, 48‧‧‧Auxiliary cathode cover

111‧‧‧底壁111‧‧‧ bottom wall

112‧‧‧第一側壁112‧‧‧First side wall

113‧‧‧第二側壁113‧‧‧ second side wall

101‧‧‧電鍍液101‧‧‧ plating solution

121‧‧‧正極121‧‧‧ positive

122‧‧‧負極122‧‧‧negative

161‧‧‧豎桿161‧‧‧ Vertical rod

162‧‧‧橫桿162‧‧‧crossbar

163‧‧‧掛鈎163‧‧‧ hook

164‧‧‧導電夾點164‧‧‧conductive pinch

182、282、382、482‧‧‧罩體182, 282, 382, 482 ‧ ‧ cover

184‧‧‧彎折部184‧‧‧Bend

1821、2821、3821‧‧‧第一邊緣區1821, 2821, 3821‧‧‧ first marginal zone

1822、2822、3822‧‧‧第二邊緣區1822, 2822, 3822‧‧‧ second marginal zone

1823、2823、4823‧‧‧第三邊緣區1823, 2823, 4823‧‧‧ third marginal zone

1834、2824‧‧‧第四邊緣區1834, 2824‧‧‧ fourth marginal zone

1825、2825、3825、4825‧‧‧中心區1825, 2825, 3825, 4825‧‧‧ central area

4821‧‧‧周邊區4821‧‧‧The surrounding area

102、402‧‧‧第一通孔102, 402‧‧‧ first through hole

103、403‧‧‧第二通孔103, 403‧‧‧ second through hole

20‧‧‧電路板20‧‧‧ boards

21‧‧‧第一表面21‧‧‧ first surface

22‧‧‧第二表面22‧‧‧ second surface

圖1係本技術方案第一實施例提供之電鍍系統之示意圖。1 is a schematic view of an electroplating system provided by a first embodiment of the present technical solution.

圖2係本技術方案第一實施例提供之電鍍系統之掛架之示意圖。2 is a schematic view of a rack of an electroplating system according to a first embodiment of the present technical solution.

圖3係本技術方案第一實施例提供之電鍍系統之輔助陰極罩之示意圖。3 is a schematic view of an auxiliary cathode cover of the electroplating system provided by the first embodiment of the present technical solution.

圖4係圖3之輔助陰極罩沿IV-IV方向之剖視圖。Figure 4 is a cross-sectional view of the auxiliary cathode cover of Figure 3 taken along the line IV-IV.

圖5係本技術方案第二實施例提供之電鍍系統之輔助陰極罩之示意圖。FIG. 5 is a schematic diagram of an auxiliary cathode cover of an electroplating system according to a second embodiment of the present technical solution.

圖6係本技術方案第三實施例提供之電鍍系統之輔助陰極罩之示意圖。6 is a schematic diagram of an auxiliary cathode cover of a plating system provided by a third embodiment of the present technical solution.

圖7係本技術方案第四實施例提供之電鍍系統之輔助陰極罩之示意圖。FIG. 7 is a schematic diagram of an auxiliary cathode cover of an electroplating system according to a fourth embodiment of the present technical solution.

圖8係本技術方案第一實施例提供之電鍍方法之流程圖。FIG. 8 is a flow chart of a plating method provided by the first embodiment of the present technical solution.

圖9係本技術方案第二實施例提供之電鍍方法之流程圖。FIG. 9 is a flow chart of a plating method provided by a second embodiment of the present technical solution.

10‧‧‧電鍍系統 10‧‧‧Electroplating system

11‧‧‧電鍍槽 11‧‧‧ plating bath

12‧‧‧供電裝置 12‧‧‧Power supply unit

13‧‧‧陽極桿 13‧‧‧Anode rod

14‧‧‧電鍍陽極 14‧‧‧Electroplating anode

15‧‧‧陰極桿 15‧‧‧ cathode rod

16‧‧‧掛架 16‧‧‧ hanging rack

17‧‧‧輔助陰極桿 17‧‧‧Auxiliary cathode rod

18‧‧‧輔助陰極罩 18‧‧‧Auxiliary cathode cover

111‧‧‧底壁 111‧‧‧ bottom wall

112‧‧‧第一側壁 112‧‧‧First side wall

113‧‧‧第二側壁 113‧‧‧ second side wall

101‧‧‧電鍍液 101‧‧‧ plating solution

121‧‧‧正極 121‧‧‧ positive

122‧‧‧負極 122‧‧‧negative

20‧‧‧電路板 20‧‧‧ boards

21‧‧‧第一表面 21‧‧‧ first surface

22‧‧‧第二表面 22‧‧‧ second surface

Claims (15)

一種電鍍系統,用於對至少一個電路板進行電鍍,該電鍍系統包括電鍍槽、供電裝置、陽極桿、電鍍陽極、陰極桿與掛架,該電鍍槽裝載有電鍍液,該供電裝置具有正極與負極,該陽極桿連接於該正極,該陰極桿連接於該負極,該電鍍陽極與掛架均設置在該電鍍槽內且浸入電鍍液中,該電鍍陽極固定在該陽極桿,該電鍍陽極用於供應電路板電鍍所需之金屬離子,該掛架固定在該陰極桿且與該電鍍陽極相對,該掛架具有複數導電夾點,該複數導電夾點用於夾持固定該至少一個電路板並給該至少一個電路板供電以進行電鍍,其中,該電鍍系統還包括一個輔助陰極桿與一個輔助陰極罩,該輔助陰極桿連接於該負極,該輔助陰極罩固定在該輔助陰極桿,該輔助陰極罩與該掛架相對且位於該掛架與該電鍍陽極之間,該輔助陰極罩包括至少一個罩體,該至少一個罩體與該至少一個電路板正對,該至少一個罩體包括第一邊緣區、第二邊緣區與中心區,該中心區位於第一邊緣區與第二邊緣區之間,該掛架之複數導電夾點與該第一邊緣區與第二邊緣區相對,該至少一個罩體之第一邊緣區與第二邊緣區均開設有複數第一通孔,該複數第一通孔之口徑隨著與中心區距離之減小而增大,該至少一個罩體之中心區開設有一個第二通孔,該第二通孔之口徑大於任一第一通孔之口徑。An electroplating system for electroplating at least one circuit board, the electroplating system comprising a plating tank, a power supply device, an anode rod, a plating anode, a cathode rod and a hanger, the plating tank being loaded with a plating solution, the power supply device having a positive electrode and a negative electrode, the anode rod is connected to the positive electrode, the cathode rod is connected to the negative electrode, the plating anode and the pylon are disposed in the plating tank and immersed in the plating solution, the plating anode is fixed on the anode rod, and the plating anode is used Providing metal ions required for electroplating of the circuit board, the pylon is fixed on the cathode rod and opposite to the plating anode, the pylon has a plurality of conductive pin points, and the plurality of conductive pin points are used for clamping and fixing the at least one circuit board And supplying power to the at least one circuit board, wherein the plating system further includes an auxiliary cathode rod and an auxiliary cathode cover, the auxiliary cathode rod is connected to the negative electrode, and the auxiliary cathode cover is fixed to the auxiliary cathode rod, An auxiliary cathode cover is opposite to the hanger and located between the hanger and the plating anode, the auxiliary cathode cover includes at least one cover, the at least one The cover body is opposite to the at least one circuit board, and the at least one cover body comprises a first edge area, a second edge area and a central area, the central area being located between the first edge area and the second edge area, the rack The plurality of conductive pin points are opposite to the first edge area and the second edge area, and the first edge area and the second edge area of the at least one cover are respectively provided with a plurality of first through holes, and the diameter of the plurality of first through holes is The distance between the central portion and the central portion is increased. The central portion of the at least one cover is provided with a second through hole having a larger diameter than any of the first through holes. 如申請專利範圍第1項所述之電鍍系統,其中,該至少一個罩體還包括相對之第三邊緣區與第四邊緣區,該第一邊緣區、第三邊緣區、第二邊緣區與第四邊緣區依次連接,且均圍繞該中心區,該第一邊緣區、第二邊緣區、第三邊緣區與第四邊緣區之材質為金屬,該中心區之材質為非金屬。The electroplating system of claim 1, wherein the at least one cover further comprises a third edge zone and a fourth edge zone, the first edge zone, the third edge zone, and the second edge zone. The fourth edge region is connected in sequence and both surround the central region. The material of the first edge region, the second edge region, the third edge region and the fourth edge region is metal, and the material of the central region is non-metal. 如申請專利範圍第2項所述之電鍍系統,其中,該中心區之形狀為圓形,該中心區與電路板之距離逐漸變化,且中心區之圓周與電路板之距離小於中心區之圓心與電路板之距離。The electroplating system of claim 2, wherein the central area has a circular shape, the distance between the central area and the circuit board gradually changes, and the distance between the circumference of the central area and the circuit board is smaller than the center of the central area. The distance from the board. 如申請專利範圍第2項所述之電鍍系統,其中,該罩體與電路板之距離逐漸變化,且該第一邊緣區、第二邊緣區、第三邊緣區與第四邊緣區與電路板之距離小於中心區與電路板之距離。The electroplating system of claim 2, wherein the distance between the cover and the circuit board is gradually changed, and the first edge region, the second edge region, the third edge region and the fourth edge region and the circuit board The distance is less than the distance between the central area and the board. 如申請專利範圍第1項所述之電鍍系統,其中,該罩體與電路板之距離逐漸變化,且該第一邊緣區與第二邊緣區與電路板之距離小於中心區與電路板之距離。The electroplating system of claim 1, wherein the distance between the cover and the circuit board is gradually changed, and the distance between the first edge region and the second edge region and the circuit board is smaller than the distance between the central region and the circuit board. . 如申請專利範圍第1項所述之電鍍系統,其中,該輔助陰極罩為矩形,該輔助陰極罩之四周邊緣分別向靠近電路板之方向延伸形成一個彎折部。The electroplating system of claim 1, wherein the auxiliary cathode cover is rectangular, and the peripheral edges of the auxiliary cathode cover respectively extend toward the circuit board to form a bent portion. 如申請專利範圍第6項所述之電鍍系統,其中,該彎折部之延伸長度為10毫米至20毫米,該彎折部與待電鍍之電路板之間距為2毫米至5毫米。The electroplating system of claim 6, wherein the bent portion has an extension length of 10 mm to 20 mm, and the distance between the bent portion and the circuit board to be plated is 2 mm to 5 mm. 一種電鍍方法,包括步驟:
提供至少一個電路板及如申請專利範圍第1項所述之電鍍系統,該至少一個電路板具有待電鍍之第一表面;
利用複數導電夾點將該至少一個電路板夾持固定至掛架並浸入電鍍槽之電鍍液中,使第一表面與該輔助陰極罩相對;以及
供電裝置給電鍍陽極、掛架與輔助陰極罩供電,以使電鍍陽極析出金屬離子,電鍍陽極析出之金屬離子穿過輔助陰極罩之複數第一通孔及一個第二通孔並還原沈積在第一表面以對該至少一個電路板進行電鍍。
An electroplating method comprising the steps of:
Providing at least one circuit board and the electroplating system according to claim 1, wherein the at least one circuit board has a first surface to be electroplated;
The at least one circuit board is clamped and fixed to the pylon by a plurality of conductive clips and immersed in the plating solution of the plating tank so that the first surface is opposite to the auxiliary cathode cover; and the power supply device supplies power to the plating anode, the pylon and the auxiliary cathode cover In order to cause the electroplating anode to precipitate metal ions, the metal ions deposited by the electroplating anode pass through the plurality of first through holes and the second through holes of the auxiliary cathode cover and are reduced and deposited on the first surface to plate the at least one circuit board.
一種電鍍系統,用於對至少一個電路板進行電鍍,該電鍍系統包括電鍍槽、供電裝置、陽極桿、電鍍陽極、陰極桿與掛架,該電鍍槽裝載有電鍍液,該供電裝置具有正極與負極,該陽極桿連接於該正極,該陰極桿連接於該負極,該電鍍陽極與掛架均設置在該電鍍槽內且浸入電鍍液中,該電鍍陽極固定在該陽極桿,該電鍍陽極用於供應電路板電鍍所需之金屬離子,該掛架固定在該陰極桿且與該電鍍陽極相對,該掛架具有複數導電夾點,該複數導電夾點用於夾持固定該至少一個電路板並給該至少一個電路板供電以進行電鍍,其中,該電鍍系統還包括兩個輔助陰極桿與兩個輔助陰極罩,該兩個輔助陰極桿分別連接於該負極,該兩個輔助陰極罩分別固定在該兩個輔助陰極桿,該電鍍陽極之數目為兩個,該兩個電鍍陽極分別設置在該掛架之相對兩側,該兩個輔助陰極罩分別設置在該掛架之相對兩側,且每一個輔助陰極罩位於該掛架與一個電鍍陽極之間,每一個輔助陰極罩包括至少一個罩體,該至少一個罩體與該至少一個電路板正對,該至少一個罩體包括第一邊緣區、第二邊緣區與中心區,該中心區位於第一邊緣區與第二邊緣區之間,該掛架之複數導電夾點與該第一邊緣區與第二邊緣區相對,該至少一個罩體之第一邊緣區與第二邊緣區均開設有複數第一通孔,該複數第一通孔之口徑隨著與中心區距離之減小而增大,該至少一個罩體之中心區開設有一個第二通孔,該第二通孔之口徑大於任一第一通孔之口徑。An electroplating system for electroplating at least one circuit board, the electroplating system comprising a plating tank, a power supply device, an anode rod, a plating anode, a cathode rod and a hanger, the plating tank being loaded with a plating solution, the power supply device having a positive electrode and a negative electrode, the anode rod is connected to the positive electrode, the cathode rod is connected to the negative electrode, the plating anode and the pylon are disposed in the plating tank and immersed in the plating solution, the plating anode is fixed on the anode rod, and the plating anode is used Providing metal ions required for electroplating of the circuit board, the pylon is fixed on the cathode rod and opposite to the plating anode, the pylon has a plurality of conductive pin points, and the plurality of conductive pin points are used for clamping and fixing the at least one circuit board And supplying the at least one circuit board for electroplating, wherein the electroplating system further comprises two auxiliary cathode rods and two auxiliary cathode covers, wherein the two auxiliary cathode rods are respectively connected to the negative pole, and the two auxiliary cathode covers are respectively Fixed to the two auxiliary cathode rods, the number of the electroplating anodes is two, and the two electroplating anodes are respectively disposed on opposite sides of the rack, the two A cathode hood is respectively disposed on opposite sides of the pylon, and each auxiliary cathode cover is located between the pylon and a plating anode, each auxiliary cathode cover includes at least one cover, the at least one cover and the at least one cover A circuit board is directly opposite, the at least one cover body comprises a first edge area, a second edge area and a central area, the central area is located between the first edge area and the second edge area, and the plurality of conductive pinch points of the pylon The first edge region is opposite to the second edge region, and the first edge region and the second edge region of the at least one cover are respectively provided with a plurality of first through holes, and the diameter of the plurality of first through holes is distance from the central region The central portion of the at least one cover is open with a second through hole having a larger diameter than any of the first through holes. 如申請專利範圍第9項所述之電鍍系統,其中,該至少一個罩體還包括相對之第三邊緣區與第四邊緣區,該第一邊緣區、第三邊緣區、第二邊緣區與第四邊緣區依次連接,且均圍繞該中心區,該第一邊緣區、第二邊緣區、第三邊緣區與第四邊緣區之材質為金屬,該中心區之材質為非金屬。The electroplating system of claim 9, wherein the at least one cover further comprises a third edge zone and a fourth edge zone, the first edge zone, the third edge zone, and the second edge zone. The fourth edge region is connected in sequence and both surround the central region. The material of the first edge region, the second edge region, the third edge region and the fourth edge region is metal, and the material of the central region is non-metal. 如申請專利範圍第10項所述之電鍍系統,其中,該中心區之形狀為圓形,該中心區與電路板之距離逐漸變化,且中心區之圓周與電路板之距離小於中心區之圓心與電路板之距離。The electroplating system according to claim 10, wherein the central area has a circular shape, the distance between the central area and the circuit board gradually changes, and the distance between the circumference of the central area and the circuit board is smaller than the center of the central area. The distance from the board. 如申請專利範圍第9項所述之電鍍系統,其中,該輔助陰極罩為矩形,該輔助陰極罩之四周邊緣分別向靠近電路板之方向延伸形成一個彎折部。The electroplating system of claim 9, wherein the auxiliary cathode cover is rectangular, and the peripheral edges of the auxiliary cathode cover respectively extend toward the circuit board to form a bent portion. 如申請專利範圍第12項所述之電鍍系統,其中,該彎折部之延伸長度為10毫米至20毫米,該彎折部與待電鍍之電路板之間距為2毫米至5毫米。The electroplating system of claim 12, wherein the bent portion has an extension length of 10 mm to 20 mm, and the distance between the bent portion and the circuit board to be plated is 2 mm to 5 mm. 一種電鍍方法,包括步驟:
提供至少一個電路板及如申請專利範圍第9項所述之電鍍系統,該至少一個電路板具有待電鍍之第一表面與第二表面;
利用複數導電夾點將該至少一個電路板夾持固定至掛架並浸入電鍍槽之電鍍液中,使第一表面與第二表面分別與該兩個輔助陰極罩相對;以及
供電裝置給兩個電鍍陽極、掛架與兩個輔助陰極罩供電,以使該兩個電鍍陽極析出金屬離子,電鍍陽極析出之金屬離子穿過該兩個輔助陰極罩之複數第一通孔及一個第二通孔並還原沈積在第一表面與第二表面以對該至少一個電路板進行電鍍。
An electroplating method comprising the steps of:
Providing at least one circuit board and the electroplating system according to claim 9, wherein the at least one circuit board has a first surface and a second surface to be electroplated;
Holding and fixing at least one circuit board to the pylon by using a plurality of conductive pinch points and immersing in the plating solution of the plating tank, so that the first surface and the second surface are respectively opposite to the two auxiliary cathode covers; and the power supply device gives two plating The anode, the pylon and the two auxiliary cathode covers are powered to cause metal ions to be deposited in the two electroplating anodes, and the metal ions deposited by the electroplating anode pass through the plurality of first through holes and the second through holes of the two auxiliary cathode covers. The reduction is deposited on the first surface and the second surface to plate the at least one circuit board.
一種電鍍系統,用於對至少一個電路板進行電鍍,該電鍍系統包括電鍍槽、供電裝置、陽極桿、電鍍陽極、陰極桿與掛架,該電鍍槽裝載有電鍍液,該供電裝置具有正極與負極,該陽極桿連接於該正極,該陰極桿連接於該負極,該電鍍陽極與掛架均設置在該電鍍槽內且浸入電鍍液中,該電鍍陽極固定在該陽極桿,該電鍍陽極用於供應電路板電鍍所需之金屬離子,該掛架固定在該陰極桿且與該電鍍陽極相對,該掛架具有複數導電夾點,該複數導電夾點用於夾持固定該至少一個電路板並給該至少一個電路板供電以進行電鍍,其中,該電鍍系統還包括輔助陰極桿與輔助陰極罩,該輔助陰極桿連接於該負極,該輔助陰極罩固定在該輔助陰極桿,該輔助陰極罩位於該掛架與該電鍍陽極之間,該輔助陰極罩包括至少一個罩體,該至少一個罩體與該至少一個電路板正對,該至少一個罩體包括周邊區與中心區,該周邊區與該掛架之複數導電夾點相對,該至少一個罩體之周邊區開設有複數第一通孔,該複數第一通孔之口徑隨著與中心區距離之增大而減小,該中心區開設複數第二通孔,該複數第二通孔之橫截面積之加總占該中心區之橫截面積之比例大於複數第一通孔之橫截面積之加總占該周邊區之橫截面積之比例。An electroplating system for electroplating at least one circuit board, the electroplating system comprising a plating tank, a power supply device, an anode rod, a plating anode, a cathode rod and a hanger, the plating tank being loaded with a plating solution, the power supply device having a positive electrode and a negative electrode, the anode rod is connected to the positive electrode, the cathode rod is connected to the negative electrode, the plating anode and the pylon are disposed in the plating tank and immersed in the plating solution, the plating anode is fixed on the anode rod, and the plating anode is used Providing metal ions required for electroplating of the circuit board, the pylon is fixed on the cathode rod and opposite to the plating anode, the pylon has a plurality of conductive pin points, and the plurality of conductive pin points are used for clamping and fixing the at least one circuit board And supplying power to the at least one circuit board, wherein the plating system further comprises an auxiliary cathode rod and an auxiliary cathode cover, the auxiliary cathode rod is connected to the negative electrode, and the auxiliary cathode cover is fixed to the auxiliary cathode rod, the auxiliary cathode a cover is disposed between the pylon and the plated anode, the auxiliary cathode cover includes at least one cover, the at least one cover and the at least one circuit Aligning, the at least one cover body includes a peripheral area and a central area, the peripheral area is opposite to the plurality of conductive pinch points of the pylon, and the plurality of first through holes are opened in the peripheral area of the at least one cover body, the plurality of first through holes The diameter of the hole decreases as the distance from the central area increases. The central area defines a plurality of second through holes, and the sum of the cross-sectional areas of the plurality of second through holes accounts for a larger proportion of the cross-sectional area of the central area. The sum of the cross-sectional areas of the plurality of first vias occupies a ratio of the cross-sectional area of the peripheral region.
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US6174425B1 (en) * 1997-05-14 2001-01-16 Motorola, Inc. Process for depositing a layer of material over a substrate
US6391168B1 (en) * 1999-04-06 2002-05-21 Nec Corporation Plating apparatus utilizing an auxiliary electrode
US20090068771A1 (en) * 2007-09-10 2009-03-12 Moosung Chae Electro Chemical Deposition Systems and Methods of Manufacturing Using the Same

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US6174425B1 (en) * 1997-05-14 2001-01-16 Motorola, Inc. Process for depositing a layer of material over a substrate
US6391168B1 (en) * 1999-04-06 2002-05-21 Nec Corporation Plating apparatus utilizing an auxiliary electrode
US20090068771A1 (en) * 2007-09-10 2009-03-12 Moosung Chae Electro Chemical Deposition Systems and Methods of Manufacturing Using the Same

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