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TWI400762B - Method of inspecting film and integrated circuit - Google Patents

Method of inspecting film and integrated circuit Download PDF

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Publication number
TWI400762B
TWI400762B TW98125081A TW98125081A TWI400762B TW I400762 B TWI400762 B TW I400762B TW 98125081 A TW98125081 A TW 98125081A TW 98125081 A TW98125081 A TW 98125081A TW I400762 B TWI400762 B TW I400762B
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edge
integrated circuit
frame
detection
region
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TW98125081A
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Chinese (zh)
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TW201104772A (en
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zhi-sheng Zhang
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Au Optronics Xiamen Corp
Au Optronics Corp
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Priority to TW98125081A priority Critical patent/TWI400762B/en
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Publication of TWI400762B publication Critical patent/TWI400762B/en

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Description

膠材以及積體電路之檢測方法Rubber and integrated circuit detection method

本發明係關於一種膠材以及積體電路之檢測方法,尤其是一種膠材貼附狀況以及積體電路破損狀況之檢測方法。The invention relates to a method for detecting a glue material and an integrated circuit, in particular to a method for detecting the adhesion state of the glue material and the damage condition of the integrated circuit.

在液晶顯示面板中,驅動積體電路(Integrated Circuit,IC)之作用為輸出所需電壓至圖元(Pixel),控制液晶分子之扭轉程度。因此驅動積體電路與液晶顯示面板中其他電路是否能有良好的電性連接,將會影響液晶顯示面板甚钜。In the liquid crystal display panel, an integrated circuit (IC) is used to output a desired voltage to a pixel (Pixel) to control the degree of twist of the liquid crystal molecules. Therefore, whether the integrated integrated circuit and other circuits in the liquid crystal display panel can have a good electrical connection will affect the liquid crystal display panel.

目前液晶顯示面板的製程中,常用的驅動積體電路封裝技術為玻璃覆晶(Chip On Glass,COG)。玻璃覆晶是將驅動積體電路直接設置於玻璃基板上,與早期將驅動積體電路設置於印刷電路板(Printed Circuit Board,PCB)後再與玻璃基板電性連接比較,具有使液晶顯示面板更加輕薄、減少材料使用及降低成本的優點,因此玻璃覆晶為目前主要的驅動積體電路封裝技術。At present, in the process of liquid crystal display panel, the commonly used driving integrated circuit packaging technology is Chip On Glass (COG). The glass flip chip is to directly mount the driving integrated circuit on the glass substrate, and the liquid crystal display panel is compared with the early mounting of the integrated circuit on the printed circuit board (PCB) and then electrically connected to the glass substrate. The advantages of thinner and lighter, reduced material use and lower cost, therefore, glass flip chip is currently the main driver integrated circuit packaging technology.

在玻璃覆晶的封裝技術中,驅動積體電路透過異方性導電膜(Anisotropic Conductive Film,ACF)與玻璃基板作垂直方向的電性連接。玻璃覆晶的製程大致上如下:貼附異方性導電膜在玻璃基板上、將驅動積體電路預壓在異方性導電膜上及將驅動積體電路進行本壓。In the glass flip chip packaging technology, the drive integrated circuit is electrically connected to the glass substrate through an anisotropic conductive film (ACF) in a vertical direction. The process of the glass flip chip is roughly as follows: the anisotropic conductive film is attached to the glass substrate, the driving integrated circuit is pre-compressed on the anisotropic conductive film, and the driving integrated circuit is subjected to the present pressing.

請同時參閱第1圖以及第2圖,係繪示習知技術中檢測異方性導電膜150貼附狀況之示意圖。習知檢測方法是在異方性導電膜150貼附在玻璃基板110後進行檢測,藉由檢測框120內之灰階(Gray-Level)圖案判斷異方性導電膜150之貼附狀況。首先,將玻璃基板110放置於機台130上。接著將機台130移動至電荷耦合元件(Charge Coupled Device,CCD)140下方,使電荷耦合元件140涵蓋範圍包含待檢測區域。電荷耦合元件140之檢測框120所拍攝之圖案如第2圖所示,利用灰階處理後判斷檢測框120內的異方性導電膜貼附狀況是否良好。Referring to FIG. 1 and FIG. 2 together, a schematic diagram of detecting the attachment state of the anisotropic conductive film 150 in the prior art is shown. The conventional detection method is performed after the anisotropic conductive film 150 is attached to the glass substrate 110, and the adhesion state of the anisotropic conductive film 150 is determined by the Gray-Level pattern in the detection frame 120. First, the glass substrate 110 is placed on the machine table 130. The machine 130 is then moved under a Charge Coupled Device (CCD) 140 such that the charge coupled element 140 covers the area to be detected. As shown in FIG. 2, the pattern captured by the detection frame 120 of the charge coupled device 140 determines whether the adhesion of the anisotropic conductive film in the detection frame 120 is good by the gray scale processing.

然而上述檢測過程存在下述缺點;第一,檢測框120為一定點式的檢測框,當電荷耦合元件140或機台130晃動時,檢測框120對應至異方性導電膜150會產生偏移,即無法正常包含異方性導電膜150,存在漏檢問題,因而影響檢測判定;第二,理論上驅動積體電路壓合區域必須涵蓋異方性導電膜150,由於檢測框120的設定並無基準,無法得知驅動積體電路壓合區域位置,因此可能造成後續驅動積體電路壓合區域未涵蓋異方性導電膜150,造成漏檢問題。However, the above detection process has the following disadvantages. First, the detection frame 120 is a fixed-point detection frame. When the charge-coupled element 140 or the machine 130 is shaken, the detection frame 120 is offset to the anisotropic conductive film 150. That is, the anisotropic conductive film 150 cannot be normally included, and there is a problem of missing detection, thereby affecting the detection determination. Second, the theoretically driving the integrated circuit nip area must cover the anisotropic conductive film 150 due to the setting of the detection frame 120. Without the reference, it is impossible to know the position of the nip area of the driving integrated circuit, and thus the kinetic area of the subsequent driving integrated circuit may not cover the anisotropic conductive film 150, causing a problem of missing detection.

因此需要對上述問題提出一種解決方法。Therefore, it is necessary to propose a solution to the above problems.

本發明之一目的在於提供一種膠材以及積體電路之檢測方法,能夠檢測膠材之貼附狀況及積體電路是否有破損的情況。An object of the present invention is to provide a method for detecting a glue material and an integrated circuit, which can detect the adhesion state of the glue material and whether the integrated circuit is damaged.

根據本發明之膠材以及積體電路之檢測方法,包含以下步驟:The method for detecting a rubber material and an integrated circuit according to the present invention comprises the following steps:

(1)定義一第一基準框,其包含積體電路相對的部份第一邊緣以及部份第二邊緣、連接於部份第一邊緣以及部份第二邊緣之間的第三邊緣和第一基準框之一邊緣所圍成具有部份積體電路的第一區域,以及鄰接於第一區域的部份第一邊緣、部份第二邊緣和第三邊緣之第二區域;(1) defining a first reference frame including a first portion of the opposite side of the integrated circuit and a portion of the second edge, a third edge connected between the portion of the first edge and a portion of the second edge An edge of one of the reference frames is surrounded by a first region having a partial integrated circuit, and a portion of the first edge, a portion of the second edge, and a second region adjacent to the first region;

(2)儲存第一基準框內之灰階圖案;(2) storing a gray scale pattern in the first reference frame;

(3)定義一第一檢測框,其中第一檢測框對應於積體電路的部份第一邊緣、部份第二邊緣以及第三邊緣;以及(3) defining a first detection frame, wherein the first detection frame corresponds to a portion of the first edge, a portion of the second edge, and the third edge of the integrated circuit;

(4)檢測第一檢測框內之灰階圖案是否與第一基準框內之灰階圖案相符合,判斷積體電路以及膠材的貼附狀況。(4) Detecting whether the gray scale pattern in the first detection frame conforms to the gray scale pattern in the first reference frame, and judging the attachment state of the integrated circuit and the glue material.

本發明之一實施例中,當積體電路以及膠材貼附正常時,該檢測方法更包含:In an embodiment of the present invention, when the integrated circuit and the glue are attached normally, the detecting method further comprises:

(5)藉由檢測第一檢測框內之灰階圖案對應於第一區域之積體電路之邊緣判斷該積體電路是否破損。(5) determining whether the integrated circuit is broken by detecting that the gray scale pattern in the first detection frame corresponds to the edge of the integrated circuit of the first region.

本發明之又一實施例中,該檢測方法更包含:In still another embodiment of the present invention, the detecting method further comprises:

(6)定義一第二基準框相對於第一基準框,第二基準框中包含積體電路相對的另一部份第一邊緣以及另一部份第二邊緣、連接於另一部份第一邊緣以及另一部份第二邊緣之間的第四邊緣和第二基準框之一邊緣所圍成且具有另一部份積體電路,以及鄰接於第三區域的另一部份第一邊緣、另一部份第二邊緣和第四邊緣之第四區域;(6) defining a second reference frame relative to the first reference frame, the second reference frame including another portion of the first edge opposite the integrated circuit and another portion of the second edge, connected to the other portion a fourth edge between one edge and another portion of the second edge and one edge of the second reference frame are enclosed and have another partial integrated circuit, and another portion adjacent to the third region is first a fourth region of the edge, another portion of the second edge, and the fourth edge;

(7)儲存第二基準框內之灰階圖案;(7) storing a gray scale pattern in the second reference frame;

(8)定義一第二檢測框,其中第二檢測框對應於積體電路的另一部份第一邊緣、另一部份第二邊緣以及第四邊緣;(8) defining a second detection frame, wherein the second detection frame corresponds to another portion of the first edge, another portion of the second edge, and the fourth edge of the integrated circuit;

(9)檢測第二檢測框內之灰階圖案是否與第二基準框內之灰階圖案相符合,判斷積體電路以及膠材的貼附狀況;以及(9) detecting whether the gray scale pattern in the second detection frame is consistent with the gray scale pattern in the second reference frame, and judging the attachment state of the integrated circuit and the glue material;

(10)計算第一檢測框內之灰階圖案對應於第一區域之第三邊緣的中心,以及第二檢測框內之灰階圖案對應於第三區域之第四邊緣的中心,以作為定位基準。(10) calculating that the grayscale pattern in the first detection frame corresponds to the center of the third edge of the first region, and the grayscale pattern in the second detection frame corresponds to the center of the fourth edge of the third region as a positioning Benchmark.

本發明與習知技術相比,具有下述優點:(1)第一檢測框及第二檢測框的定義可為動態式,不會受電荷耦合元件或機台晃動影響;(2)由於定義的第一基準框及第二基準框包含積體電路邊緣,因此能藉由第一檢測框及第二檢測框之灰階圖案判斷積體電路壓合區域是否包含膠材;(3)第一區域之邊緣包含積體電路的邊緣,因此可檢測出積體電路的邊緣是否有破損的情況發生;以及(4)藉由計算積體電路兩相對的邊緣中心後,兩邊緣中心可作為後續本壓定位標示(Mark),能省略設計本壓定位標示的步驟,簡化玻璃覆晶製程的流程。Compared with the prior art, the present invention has the following advantages: (1) the definition of the first detection frame and the second detection frame can be dynamic, and is not affected by charge coupling elements or machine shaking; (2) due to definition The first reference frame and the second reference frame include the edge of the integrated circuit, so that the gray-scale pattern of the first detection frame and the second detection frame can be used to determine whether the nip area of the integrated circuit includes the glue material; (3) the first The edge of the region includes the edge of the integrated circuit, so that the edge of the integrated circuit can be detected to be damaged; and (4) by calculating the opposite edge centers of the integrated circuit, the center of the two edges can be used as a follow-up The pressure positioning mark (Mark) can omit the step of designing the pressure positioning mark and simplify the flow of the glass flip chip process.

以下將參照所附圖式詳細說明本發明之技術內容。The technical contents of the present invention will be described in detail below with reference to the accompanying drawings.

請同時參閱第3圖以及第4圖,第3圖係繪示依據本發明第一實施例之膠材400以及積體電路450之檢測方法之流程圖,第4圖係繪示依據本發明第一實施例之膠材400以及積體電路450之間壓合狀況是否良好之檢測方法之示意圖。本發明之膠材以及積體電路之檢測方法是在積體電路450預壓在膠材400上再開始進行檢測,以下將詳述該檢測方法之各步驟。Please refer to FIG. 3 and FIG. 4 at the same time. FIG. 3 is a flow chart showing the method for detecting the rubber material 400 and the integrated circuit 450 according to the first embodiment of the present invention, and FIG. 4 is a diagram showing the method according to the present invention. A schematic diagram of a method of detecting whether the press-fit condition between the glue material 400 and the integrated circuit 450 of one embodiment is good. The method for detecting the glue material and the integrated circuit of the present invention is to perform the detection by pre-pressing the integrated circuit 450 on the adhesive material 400. The steps of the detection method will be described in detail below.

步驟(1)中,定義一第一基準框402,作為後續判斷的標準,第一基準框402中包含由積體電路450相對的部份第一邊緣452以及部份第二邊緣454、連接於部份第一邊緣452以及部份第二邊緣454之間的第三邊緣456和第一基準框402之一邊緣472所圍成具有部份積體電路450的第一區域458,以及鄰接於第一區域458的部份第一邊緣452、部份第二邊緣454和第三邊緣456之第二區域460,即,第一基準框402包含第一區域458以及第二區域460,且第二區域460位於第一區域458外側。其中第一區域458及第二區域460各具有不同的灰度,即積體電路450及膠材400各具有不同的灰度。此外,第一基準框402之大小能視檢測需要調整。In the step (1), a first reference frame 402 is defined as a criterion for subsequent determination. The first reference frame 402 includes a portion of the first edge 452 and a portion of the second edge 454 opposite to the integrated circuit 450. A third edge 456 between a portion of the first edge 452 and a portion of the second edge 454 and an edge 472 of the first reference frame 402 enclose a first region 458 having a partial integrated circuit 450, and adjacent to the first a portion of the first edge 452 of a region 458, a portion of the second edge 454, and a second region 460 of the third edge 456, ie, the first reference frame 402 includes a first region 458 and a second region 460, and the second region 460 is located outside of the first region 458. The first region 458 and the second region 460 each have different gradations, that is, the integrated circuit 450 and the glue 400 each have different gradations. In addition, the size of the first reference frame 402 can be adjusted as needed for detection.

步驟(2)中,儲存第一基準框402內之灰階圖案,由於第一區域458及第二區域460各具有不同的灰度,因此儲存的灰階圖案包含第一區域458之灰階圖案及第二區域460之灰階圖案。In step (2), the gray scale pattern in the first reference frame 402 is stored. Since the first region 458 and the second region 460 each have different gray scales, the stored gray scale pattern includes the gray scale pattern of the first region 458. And a gray scale pattern of the second region 460.

步驟(3)中,定義一第一檢測框404,其小於或等於第一基準框402,且該第一檢測框404對應於積體電路450的部份第一邊緣452、部份第二邊緣454以及連接於兩者之間的第三邊緣456。由於實際檢測時,是以一影像擷取裝置(未圖示)例如電荷耦合元件拍攝玻璃基板(未圖示),即使在機臺和電荷耦合元件晃動時,該第一檢測框404仍可動態調整以對應於積體電路450的部份第一邊緣452、部份第二邊緣454以及連接於兩者之間的第三邊緣456的位置,進而提高檢測之準確度。In the step (3), a first detection frame 404 is defined, which is smaller than or equal to the first reference frame 402, and the first detection frame 404 corresponds to a portion of the first edge 452 and a portion of the second edge of the integrated circuit 450. 454 and a third edge 456 connected between the two. Since the glass substrate (not shown) is photographed by an image capturing device (not shown) such as a charge coupled device during actual detection, the first detecting frame 404 can be dynamic even when the machine and the charge coupled device are shaken. The adjustment is performed to correspond to a portion of the first edge 452 of the integrated circuit 450, a portion of the second edge 454, and a position of the third edge 456 connected therebetween, thereby improving the accuracy of the detection.

步驟(4)中,檢測第一檢測框404內之灰階圖案是否與第一基準框402內之灰階圖案相符合,判斷積體電路450以及膠材400的貼附狀況。由於第一基準框402儲存的灰階圖案可被視為正常的貼附範例,因此當第一檢測框404的灰階圖案與第一基準框402的灰階圖案相同時,代表膠材400與積體電路450的貼附正常。In step (4), it is detected whether the gray scale pattern in the first detection frame 404 matches the gray scale pattern in the first reference frame 402, and the attachment state of the integrated circuit 450 and the glue 400 is determined. Since the gray scale pattern stored by the first reference frame 402 can be regarded as a normal attachment example, when the gray scale pattern of the first detection frame 404 is the same as the gray scale pattern of the first reference frame 402, the representative glue 400 is The attachment of the integrated circuit 450 is normal.

請參閱第5圖,係繪示膠材400短貼情況的示意圖。當膠材400短貼時,即積體電路450之周圍未被膠材400環繞時,第一檢測框404的灰階圖案與第4圖之第一基準框402的灰階圖案不同,因此可判斷出膠材400與積體電路450的貼附不正常。Please refer to FIG. 5, which is a schematic diagram showing the shortness of the adhesive material 400. When the glue 400 is short-circuited, that is, when the circumference of the integrated circuit 450 is not surrounded by the glue 400, the gray-scale pattern of the first detection frame 404 is different from the gray-scale pattern of the first reference frame 402 of FIG. 4, and thus It is judged that the attachment of the glue material 400 and the integrated circuit 450 is abnormal.

請參閱第6圖,係繪示積體電路450破損的示意圖。當積體電路450以及膠材400貼附正常時,本發明之檢測方法更包含:步驟(5)中,藉由檢測第一檢測框404內之灰階圖案對應於第一區域458之積體電路450之邊緣判斷積體電路450是否破損。從第6圖中可知積體電路450之部份第一邊緣452有不平整的情況,部份第二邊緣454及第三邊緣456則為平整的情況。因此檢測時,可藉由第一檢測框404之灰階圖案檢測出部份第一邊緣452不平整,代表積體電路450有破損的情況。Please refer to FIG. 6 , which is a schematic diagram showing the damage of the integrated circuit 450 . When the integrated circuit 450 and the adhesive material 400 are attached normally, the detecting method of the present invention further includes: in step (5), detecting that the gray scale pattern in the first detecting frame 404 corresponds to the integrated body of the first region 458. The edge of the circuit 450 determines whether the integrated circuit 450 is broken. It can be seen from Fig. 6 that part of the first edge 452 of the integrated circuit 450 is uneven, and some of the second edge 454 and the third edge 456 are flat. Therefore, when the detection is performed, a portion of the first edge 452 may be unevenly detected by the gray scale pattern of the first detection frame 404, indicating that the integrated circuit 450 is damaged.

請同時參閱第7圖至第9圖,第7圖以及第8圖係繪示依據本發明第二實施例之膠材400以及積體電路450之檢測方法之流程圖,第9圖係繪示依據本發明第二實施例之膠材400以及積體電路450之間壓合狀況是否良好之檢測方法之示意圖。該檢測方法包含下述步驟。Please refer to FIG. 7 to FIG. 9 at the same time. FIG. 7 and FIG. 8 are flowcharts showing the method for detecting the rubber material 400 and the integrated circuit 450 according to the second embodiment of the present invention, and FIG. 9 is a schematic diagram showing A schematic diagram of a method for detecting whether the press-fit condition between the rubber material 400 and the integrated circuit 450 is good according to the second embodiment of the present invention. The detection method comprises the following steps.

步驟(1)中,定義一第一基準框402,作為後續判斷的標準,第一基準框402中包含積體電路450相對的部份第一邊緣452以及部份第二邊緣454、連接於部份第一邊緣452以及部份第二邊緣454之間的第三邊緣456和第一基準框402之一邊緣472所圍成具有部份積體電路450的第一區域458,以及鄰接於第一區域458的部份第一邊緣452、部份第二邊緣454和第三邊緣456之第二區域460,其中第一區域458及第二區域460各具有不同的灰度,即積體電路450及膠材400各具有不同的灰度。In the step (1), a first reference frame 402 is defined as a criterion for subsequent determination. The first reference frame 402 includes a portion of the first edge 452 and a portion of the second edge 454 of the integrated circuit 450. The first edge 452 and the third edge 456 between the partial second edge 454 and one edge 472 of the first reference frame 402 enclose a first region 458 having a partial integrated circuit 450, and adjacent to the first a portion of the first edge 452, a portion of the second edge 454, and a second region 460 of the third edge 456, wherein the first region 458 and the second region 460 each have a different gray level, that is, the integrated circuit 450 and The glues 400 each have a different gray scale.

步驟(2)中,儲存第一基準框402內之灰階圖案,由於第一區域458及第二區域460各具有不同的灰度,因此儲存的灰階圖案包含第一區域458之灰階圖案及第二區域460之灰階圖案。In step (2), the gray scale pattern in the first reference frame 402 is stored. Since the first region 458 and the second region 460 each have different gray scales, the stored gray scale pattern includes the gray scale pattern of the first region 458. And a gray scale pattern of the second region 460.

步驟(3)中,定義一第一檢測框404,其小於或等於第一基準框402,且該第一檢測框404對應於積體電路450的部份第一邊緣452、部份第二邊緣454以及連接於兩者之間的第三邊緣456。In the step (3), a first detection frame 404 is defined, which is smaller than or equal to the first reference frame 402, and the first detection frame 404 corresponds to a portion of the first edge 452 and a portion of the second edge of the integrated circuit 450. 454 and a third edge 456 connected between the two.

步驟(4)中,檢測第一檢測框404內之灰階圖案是否與第一基準框402內之灰階圖案相符合,判斷積體電路450以及膠材400的貼附狀況,例如,可藉由計算機通過一圖案識別軟體,檢測第一檢測框404內之灰階圖案是否與第一基準框402內之灰階圖案相符合。由於第一基準框402儲存的灰階圖案可被視為正常的貼附範例,因此當第一檢測框404的灰階圖案與第一基準框402的灰階圖案相同時,代表膠材400與積體電路450的貼附正常。In step (4), it is detected whether the gray scale pattern in the first detection frame 404 matches the gray scale pattern in the first reference frame 402, and the attachment state of the integrated circuit 450 and the glue 400 is determined, for example, A pattern recognition software is detected by the computer to detect whether the gray scale pattern in the first detection frame 404 matches the gray scale pattern in the first reference frame 402. Since the gray scale pattern stored by the first reference frame 402 can be regarded as a normal attachment example, when the gray scale pattern of the first detection frame 404 is the same as the gray scale pattern of the first reference frame 402, the representative glue 400 is The attachment of the integrated circuit 450 is normal.

步驟(6)中,定義一第二基準框412,與第一基準框402同樣作為後續判斷的標準,第二基準框412相對於第一基準框402且包含由積體電路450相對的另一部份第一邊緣462以及另一部份第二邊緣464、連接於另一部份第一邊緣462以及另一部份第二邊緣464之間的第四邊緣466和第二基準框412之一邊緣474所圍成具有另一部份積體電路450的第三區域468,以及鄰接第三區域468的另一部份第一邊緣462、另一部份第二邊緣464和第四邊緣466之第四區域470,其中第三區域468及第四區域470各具有不同的灰度,即積體電路450及膠材400具有不同的灰度。In step (6), a second reference frame 412 is defined, which is the same as the first reference frame 402, and the second reference frame 412 is opposite to the first reference frame 402 and includes another one opposite to the integrated circuit 450. One of the first edge 462 and the other portion of the second edge 464, the fourth edge 466 and the second reference frame 412 connected between the other portion of the first edge 462 and the other portion of the second edge 464 The edge 474 encloses a third region 468 having another partial integrated circuit 450, and another portion of the first edge 462 adjacent the third region 468, another portion of the second edge 464 and the fourth edge 466 The fourth region 470, wherein the third region 468 and the fourth region 470 each have different gray levels, that is, the integrated circuit 450 and the glue 400 have different gray levels.

步驟(7)中,儲存第二基準框412內之灰階圖案,由於第三區域468及第四區域470各具有不同的灰度,因此儲存的灰階圖案包含第三區域468之灰階圖案及第四區域470之灰階圖案。In step (7), the gray scale pattern in the second reference frame 412 is stored. Since the third region 468 and the fourth region 470 each have different gray scales, the stored gray scale pattern includes the gray scale pattern of the third region 468. And a grayscale pattern of the fourth region 470.

步驟(8)中,定義一第二檢測框414,其小於或等於第二基準框412,且該第二檢測框414對應於積體電路450的另一部份第一邊緣462、另一部份第二邊緣464以及連接於兩者之間的第四邊緣466。In the step (8), a second detection frame 414 is defined, which is smaller than or equal to the second reference frame 412, and the second detection frame 414 corresponds to another portion of the first edge 462 of the integrated circuit 450 and another portion. A second edge 464 and a fourth edge 466 connected therebetween.

步驟(9)中,檢測第二檢測框414內之灰階圖案是否與第二基準框412內之灰階圖案相符合,例如,可藉由計算機通過一圖案識別軟體,檢測第二檢測框414內之灰階圖案是否與第二基準框412內之灰階圖案相符合,判斷積體電路450以及膠材400的貼附狀況。由於第二基準框412儲存的灰階圖案可被視為正常的貼附範例,因此當第二檢測框414的灰階圖案與第二基準框412的灰階圖案相同時,代表膠材400與積體電路450的貼附正常。In step (9), it is detected whether the grayscale pattern in the second detection frame 414 matches the grayscale pattern in the second reference frame 412. For example, the second detection frame 414 can be detected by a computer through a pattern recognition software. Whether the gray scale pattern in the interior matches the gray scale pattern in the second reference frame 412 determines the attachment state of the integrated circuit 450 and the glue 400. Since the gray scale pattern stored by the second reference frame 412 can be regarded as a normal attachment example, when the gray scale pattern of the second detection frame 414 is the same as the gray scale pattern of the second reference frame 412, the representative glue 400 is The attachment of the integrated circuit 450 is normal.

步驟(10)中,計算第一檢測框404內之灰階圖案對應於第一區域458之第三邊緣456的中心,以及第二檢測框414內之灰階圖案對應於第三區域468之第四邊緣466的中心。第三邊緣456的中心以及第四邊緣466的中心可被視為後續本壓定位標示,以作為定位基準。藉此,能省略另外設計本壓定位標示的步驟,簡化玻璃覆晶製程的流程。In step (10), the grayscale pattern in the first detection frame 404 is calculated to correspond to the center of the third edge 456 of the first region 458, and the grayscale pattern in the second detection frame 414 corresponds to the third region 468. The center of the four edges 466. The center of the third edge 456 and the center of the fourth edge 466 can be considered as a subsequent local pressure positioning indicator as a positioning reference. Thereby, the step of additionally designing the pressure positioning mark can be omitted, and the flow of the glass flip chip process can be simplified.

要特別說明的是,膠材之一較佳實施例為異方性導電膜,由於異方性導電膜與積體電路具有不同的灰度,因此能以本發明之圖案匹配的方法判斷貼附狀況,舉凡其他與積體電路具有灰度差異之膠材亦可利用本發明達成檢測的目的。It should be particularly noted that one preferred embodiment of the rubber material is an anisotropic conductive film. Since the anisotropic conductive film and the integrated circuit have different gradations, the pattern matching method of the present invention can be used to judge the attachment. In the case, other materials having a gray scale difference from the integrated circuit can also be used for the purpose of detection by the present invention.

雖然本發明已以實施例揭露如上,然其並非用以限定本發明,任何具有本發明所屬技術領域之通常知識者,在不脫離本發明之精神和範圍內,當可作各種更動與潤飾,並可思揣其他不同的實施例,因此本發明之保護範圍當視後附申請專利範圍所界定者為準。While the present invention has been described above by way of example, it is not intended to limit the invention, and the invention may be modified and modified without departing from the spirit and scope of the invention. Other different embodiments are contemplated, and the scope of the present invention is defined by the scope of the appended claims.

1-10‧‧‧步驟1-10‧‧‧Steps

110‧‧‧玻璃基板110‧‧‧ glass substrate

120‧‧‧檢測框120‧‧‧Check box

130‧‧‧機台130‧‧‧ machine

140‧‧‧電荷耦合元件140‧‧‧Charge-coupled components

150‧‧‧異方性導電膜150‧‧‧ anisotropic conductive film

400‧‧‧膠材400‧‧‧Stained materials

402‧‧‧第一基準框402‧‧‧First reference frame

404‧‧‧第一檢測框404‧‧‧First detection frame

412‧‧‧第二基準框412‧‧‧ second reference frame

414‧‧‧第二檢測框414‧‧‧second detection frame

450‧‧‧積體電路450‧‧‧Integrated circuit

452‧‧‧部份第一邊緣452‧‧‧ part of the first edge

454‧‧‧部份第二邊緣454‧‧‧ part of the second edge

456‧‧‧第三邊緣456‧‧‧ third edge

458‧‧‧第一區域458‧‧‧First area

460‧‧‧第二區域460‧‧‧Second area

462‧‧‧另一部份第一邊緣462‧‧‧ another part of the first edge

464‧‧‧另一部份第二邊緣464‧‧‧ another part of the second edge

466‧‧‧第四邊緣466‧‧‧ fourth edge

468...第三區域468. . . Third area

470...第四區域470. . . Fourth area

472、474...邊緣472, 474. . . edge

第1圖以及第2圖係繪示習知技術中檢測異方性導電膜貼附狀況之示意圖;第3圖係繪示依據本發明第一實施例之膠材以及積體電路之檢測方法之流程圖;第4圖係繪示依據本發明第一實施例之膠材以及積體電路之間壓合狀況是否良好之檢測方法之示意圖;第5圖係繪示膠材短貼情況的示意圖;第6圖係繪示積體電路破損的示意圖;第7圖以及第8圖係繪示依據本發明第二實施例之膠材以及積體電路之檢測方法之流程圖;以及第9圖係繪示依據本發明第二實施例之膠材以及積體電路之間壓合狀況是否良好之檢測方法之示意圖。1 and 2 are schematic views showing the detection of the attachment state of the anisotropic conductive film in the prior art; and FIG. 3 is a view showing the detection method of the rubber material and the integrated circuit according to the first embodiment of the present invention. FIG. 4 is a schematic view showing a method for detecting whether the press-fit condition between the glue material and the integrated circuit is good according to the first embodiment of the present invention; FIG. 5 is a schematic view showing the short stick condition of the glue material; 6 is a schematic diagram showing damage of an integrated circuit; FIGS. 7 and 8 are flowcharts showing a method for detecting a rubber material and an integrated circuit according to a second embodiment of the present invention; and FIG. A schematic view showing a method of detecting whether the press-fit condition between the glue material and the integrated circuit according to the second embodiment of the present invention is good.

1-5...步驟1-5. . . step

Claims (14)

一種膠材以及積體電路之檢測方法,包含:(1)定義一第一基準框,該第一基準框中包含該積體電路相對的部份第一邊緣以及部份第二邊緣、連接於該部份第一邊緣以及該部份第二邊緣之間的第三邊緣和該第一基準框之一邊緣所圍成具有部份積體電路的第一區域,以及鄰接於該第一區域的該部份第一邊緣、該部份第二邊緣和該第三邊緣之第二區域;(2)儲存該第一基準框內之灰階圖案;(3)定義一第一檢測框,該第一檢測框對應於該積體電路的該部份第一邊緣、該部份第二邊緣以及該第三邊緣;以及(4)檢測該第一檢測框內之灰階圖案是否與該第一基準框內之灰階圖案相符合,判斷該積體電路以及該膠材的貼附狀況。A method for detecting a rubber material and an integrated circuit includes: (1) defining a first reference frame, the first reference frame including a first portion of the opposite side of the integrated circuit and a portion of the second edge, connected to a third edge between the first edge and the second edge of the portion and an edge of the first reference frame enclosing a first region having a partial integrated circuit, and adjacent to the first region a portion of the first edge, the second portion of the portion, and the second region of the third edge; (2) storing a grayscale pattern in the first reference frame; (3) defining a first detection frame, the first a detection frame corresponding to the portion of the first edge of the integrated circuit, the portion of the second edge, and the third edge; and (4) detecting whether the grayscale pattern in the first detection frame is related to the first reference The gray scale pattern in the frame is matched, and the integrated circuit and the attached state of the glue are judged. 如申請專利範圍第1項所述之檢測方法,其中該第一區域以及該第二區域各具有不同的灰度。The detection method of claim 1, wherein the first region and the second region each have a different gray scale. 如申請專利範圍第1項所述之檢測方法,當該積體電路以及該膠材貼附正常時,該檢測方法更包含:(5)藉由檢測該第一檢測框內之灰階圖案對應於該第一區域之該積體電路之邊緣判斷該積體電路是否破損。The detection method according to the first aspect of the invention, wherein the detection method further comprises: (5) detecting a gray scale pattern corresponding to the first detection frame when the integrated circuit and the glue are attached normally; Whether the integrated circuit is damaged is determined at the edge of the integrated circuit of the first region. 如申請專利範圍第1項所述之檢測方法,其中在步驟(3)中,該第一檢測框之位置能被動態調整。The detection method of claim 1, wherein in the step (3), the position of the first detection frame can be dynamically adjusted. 如申請專利範圍第1項所述之檢測方法,其中在步驟(3)中,該第一檢測框小於或等於該第一基準框。The detection method of claim 1, wherein in the step (3), the first detection frame is less than or equal to the first reference frame. 如申請專利範圍第1項所述之檢測方法,其中在步驟(4)中,該判斷方法是對該第一檢測框和該第一基準框內的灰階圖案進行比對,如果相同,則定義該積體電路貼附正常。The detection method of claim 1, wherein in the step (4), the determining method is: comparing the first detection frame and the grayscale pattern in the first reference frame, if they are the same, Define the integrated circuit to be attached properly. 如申請專利範圍第6項所述之檢測方法,其中該比對是由計算機通過一圖案識別軟體完成的。The detection method of claim 6, wherein the comparison is performed by a computer through a pattern recognition software. 如申請專利範圍第1項所述之檢測方法,更包含:(6)定義一第二基準框,該第二基準框相對於該第一基準框,該第二基準框中包含該積體電路相對的另一部份第一邊緣以及另一部份第二邊緣、連接於該另一部份第一邊緣以及該另一部份第二邊緣之間的第四邊緣和該第二基準框之一邊緣所圍成具有另一部份積體電路所圍成的第三區域,以及鄰接於該第三區域的該另一部份第一邊緣、該另一部份第二邊緣和該第四邊緣之第四區域;(7)儲存該第二基準框內之灰階圖案;(8)定義一第二檢測框,該第二檢測框對應於該積體電路的該另一部份第一邊緣、該另一部份第二邊緣以及該第四邊緣;(9)檢測該第二檢測框內之灰階圖案是否與該第二基準框內之灰階圖案相符合,判斷該積體電路以及該膠材的貼附狀況;以及(10)計算該第一檢測框內之灰階圖案對應於該第一區域之該第三邊緣的中心,以及該第二檢測框內之灰階圖案對應於該第三區域之該第四邊緣的中心,以作為定位基準。The detection method of claim 1, further comprising: (6) defining a second reference frame, the second reference frame is opposite to the first reference frame, and the second reference frame includes the integrated circuit a further portion of the first edge and another portion of the second edge, a fourth edge connected between the other portion of the first edge and the second portion of the other portion, and the second reference frame An edge enclosing a third region surrounded by another portion of the integrated circuit, and the other portion of the first edge adjacent to the third region, the other portion of the second edge, and the fourth a fourth region of the edge; (7) storing a grayscale pattern in the second reference frame; (8) defining a second detection frame, the second detection frame corresponding to the other portion of the integrated circuit first The edge, the other portion of the second edge, and the fourth edge; (9) detecting whether the grayscale pattern in the second detection frame matches the grayscale pattern in the second reference frame, and determining the integrated circuit And the attaching condition of the glue; and (10) calculating a gray scale pattern in the first detection frame corresponding to the first area The center of the third edge, and the second frame detection pattern corresponding to the gray level of the center of the fourth edge of the third area, as a positioning reference. 如申請專利範圍第8項所述之檢測方法,其中該第三區域以及該第四區域各具有不同的灰度。The detection method of claim 8, wherein the third region and the fourth region each have a different gray scale. 如申請專利範圍第8項所述之檢測方法,其中在步驟(8)中,該第二檢測框之位置能被動態調整。The detection method of claim 8, wherein in the step (8), the position of the second detection frame can be dynamically adjusted. 如申請專利範圍第8項所述之檢測方法,其中在步驟(8)中,該第二檢測框小於或等於該第二基準框。The detection method of claim 8, wherein in the step (8), the second detection frame is less than or equal to the second reference frame. 如申請專利範圍第8項所述之檢測方法,其中在步驟(9)中,該判斷方法是對該第二檢測框和該第而基準框內的灰階圖案進行比對,如果相同,則定義該積體電路貼附正常。The detection method of claim 8, wherein in the step (9), the judging method compares the second detection frame with the gray scale pattern in the first reference frame, and if they are the same, Define the integrated circuit to be attached properly. 如申請專利範圍第12項所述之檢測方法,其中該比對是由計算機通過一圖案識別軟體完成的。The detection method of claim 12, wherein the comparison is performed by a computer through a pattern recognition software. 如申請專利範圍第1項所述之檢測方法,其中該膠材為異方性導電膜。The detection method according to claim 1, wherein the rubber material is an anisotropic conductive film.
TW98125081A 2009-07-24 2009-07-24 Method of inspecting film and integrated circuit TWI400762B (en)

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TW200839216A (en) * 2007-03-20 2008-10-01 Au Optronics Corp Method of inspecting film and inspection device using the same

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TW200839216A (en) * 2007-03-20 2008-10-01 Au Optronics Corp Method of inspecting film and inspection device using the same

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