TWI497051B - An evaluation apparatus for a surface condition of a metallic material, a visibility evaluation apparatus for a transparent substrate, an evaluation program thereof, and a computer-readable recording medium on which a recording medium is recorded, and a method of detecting the same - Google Patents
An evaluation apparatus for a surface condition of a metallic material, a visibility evaluation apparatus for a transparent substrate, an evaluation program thereof, and a computer-readable recording medium on which a recording medium is recorded, and a method of detecting the same Download PDFInfo
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- G—PHYSICS
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- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
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- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
- G01N21/95684—Patterns showing highly reflecting parts, e.g. metallic elements
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- G—PHYSICS
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
- G01N2021/95638—Inspecting patterns on the surface of objects for PCB's
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Description
本發明係關於一種金屬材料之表面狀態之評價裝置、透明基材之視認性評價裝置、其評價程式及記錄有其之電腦可讀取記錄媒體。The present invention relates to an apparatus for evaluating the surface state of a metal material, a visibility evaluation apparatus for a transparent substrate, an evaluation program thereof, and a computer readable recording medium recorded thereon.
於智慧型手機或平板PC等小型電子機器中,由於配線之容易性或輕量性,而採用可撓性印刷配線板(以下,記作FPC)。近年來,藉由該等電子機器之高功能化,訊號傳輸速度之高速化取得進展,於FPC中阻抗(impedance)匹配亦成為重要之要素。作為對於訊號容量增加之阻抗匹配之對策,不斷推進成為FPC之基底之樹脂絕緣層(例如,聚醯亞胺)之厚層化。另一方面,FPC雖被實施朝液晶基材之接合或IC晶片之搭載等加工,但此時之位置對準係經由透過於對銅箔與樹脂絕緣層之積層板中之銅箔進行蝕刻後殘留之樹脂絕緣層而視認之定位圖案來進行,因此,樹脂絕緣層之視認性及對其產生影響之積層於樹脂絕緣層之銅箔之表面狀態變得重要。In a small electronic device such as a smart phone or a tablet PC, a flexible printed wiring board (hereinafter referred to as FPC) is used because of the ease of wiring or the light weight. In recent years, with the high functionality of these electronic devices, the speed of signal transmission has progressed, and impedance matching in FPC has become an important factor. As a countermeasure against the impedance matching of the increase in the signal capacity, the thickening of the resin insulating layer (for example, polyimine) which becomes the base of the FPC is continually advanced. On the other hand, the FPC is processed by bonding to a liquid crystal substrate or mounting of an IC wafer, but the alignment is performed by etching a copper foil in a laminate of a copper foil and a resin insulating layer. Since the remaining resin insulating layer is formed by visually recognizing the positioning pattern, the visibility of the resin insulating layer and the surface state of the copper foil laminated on the resin insulating layer which are affected by the resin insulating layer become important.
作為此種樹脂絕緣層之視認性之評價方法,於專利文獻1中係觀察藉由CCD(charge-coupled device,電荷耦合器件)相機隔著樹脂絕緣層而拍攝之圖像進行評價。又,於專利文獻2中,評價於利用CCD相機自相對於評價對象之樹脂絕緣層之水平面呈30°之角度拍攝到之圖像中測試 圖案是否產生應變而映出。In the method of evaluating the visibility of the resin insulating layer, Patent Document 1 observes an image taken by a CCD (charge-coupled device) camera with a resin insulating layer interposed therebetween. Further, in Patent Document 2, it is evaluated in an image photographed at an angle of 30° with respect to the horizontal plane of the resin insulating layer of the evaluation object by a CCD camera. Whether the pattern is strained and reflected.
[先前技術文獻][Previous Technical Literature]
[專利文獻][Patent Literature]
[專利文獻1]日本特開2003-309336號公報[Patent Document 1] Japanese Patent Laid-Open Publication No. 2003-309336
[專利文獻2]日本特開2006-001056號公報[Patent Document 2] Japanese Patent Laid-Open Publication No. 2006-001056
然而,事實上,若如專利文獻1般利用CCD相機觀察而單純地觀察圖像,則視認性評價之精度有限,若不於生產線上實際地製作,則無法判斷是否可隔著透明基材視認為了進行位置對準等而設置之標記,於製造成本方面存在問題。即便為如專利文獻2般評價於該圖像中測試圖案是否產生應變而映出之方法,該情況亦同樣。而且,若視認性評價之精度如此低,則積層於樹脂絕緣層之銅箔之表面狀態之評價之精度亦變低。However, in fact, if the image is simply observed by the CCD camera as in Patent Document 1, the accuracy of the visibility evaluation is limited, and if it is not actually produced on the production line, it is impossible to determine whether or not the transparent substrate can be visually recognized. A mark provided for positioning or the like has a problem in terms of manufacturing cost. This is the same even in the case of evaluating whether or not the test pattern is strained in the image as in Patent Document 2. Further, if the accuracy of the visibility evaluation is so low, the accuracy of the evaluation of the surface state of the copper foil laminated on the resin insulating layer is also lowered.
本發明提供一種可高效率且準確地評價金屬材料之表面狀態之金屬材料之表面狀態之評價裝置、透明基材之視認性評價裝置、其評價程式及記錄有其之電腦可讀取記錄媒體。The present invention provides an apparatus for evaluating the surface state of a metal material which can efficiently and accurately evaluate the surface state of a metal material, a visibility evaluation apparatus for a transparent substrate, an evaluation program thereof, and a computer readable recording medium recorded thereon.
本發明者等人經過反覆銳意研究,結果發現,於將金屬材料貼合於透明基材之至少一面之後,藉由蝕刻去除金屬材料,並隔著透明基材拍攝藉由蝕刻而去除該金屬材料後存在於透明基材之下方之標記,著眼於自該標記部分之圖像獲得之觀察地點-亮度曲線圖中所描繪之標記端部附近之亮度曲線,對該亮度曲線進行評價,藉此可不受透明基材之種類或透明基材之厚度之影響而高效率且準確地評價透明基材之視認性,藉此,可 高效率且準確地評價積層於透明基材之金屬材料之表面狀態。The inventors of the present invention have conducted intensive research and found that after the metal material is bonded to at least one side of the transparent substrate, the metal material is removed by etching, and the metal material is removed by etching through a transparent substrate. The mark that exists behind the transparent substrate, focusing on the brightness curve near the end of the mark depicted in the observation point-luminance curve obtained from the image of the marked portion, evaluates the brightness curve, thereby not Efficiently and accurately evaluate the visibility of the transparent substrate by the type of the transparent substrate or the thickness of the transparent substrate, thereby The surface state of the metal material laminated on the transparent substrate is evaluated with high efficiency and accuracy.
基於以上見解而完成之本發明於一態樣中係一種金屬材料之表面狀態之評價裝置,該裝置具備以下手段:攝影手段,其於將金屬材料之表面貼合於透明基材之至少一面之後,藉由蝕刻去除上述金屬材料之至少一部分,並隔著上述透明基材拍攝於藉由蝕刻而去除該金屬材料後存在於上述透明基材之下方之標記;觀察地點-亮度曲線圖製作手段,其對於藉由上述拍攝而獲得之圖像,沿著橫穿所觀察到之上述標記之方向測定每個觀察地點之亮度而製作觀察地點-亮度曲線圖;及金屬材料表面狀態評價手段,其於上述觀察地點-亮度曲線圖中,根據自上述標記之端部起至無上述標記之部分產生之亮度曲線之斜率評價上述透明基材之視認性,並基於上述視認性之評價結果評價金屬材料之表面狀態;上述金屬材料表面狀態評價手段將自上述標記之端部起至無上述標記之部分產生之亮度曲線之頂部平均值Bt與底部平均值Bb之差設為△B(△B=Bt-Bb),使用Sv進行透明基材之視認性之評價,並基於上述透明基材之視認性之評價結果評價金屬材料之表面狀態,上述Sv係於在上述觀察地點-亮度曲線圖中,將表示亮度曲線與Bt之交點中最接近於上述標記之交點之位置之值設為t1,將表示於自亮度曲線與Bt之交點至以Bt為基準0.1△B為止之深度範圍內,亮度曲線與0.1△B之交點中最接近於上述標記之交點之位置之值設為t2時,由下述(1)式進行定義。The present invention, which is completed based on the above findings, is an apparatus for evaluating the surface state of a metal material, and the apparatus has the following means: a photographing means after attaching the surface of the metal material to at least one side of the transparent substrate And removing at least a part of the metal material by etching, and capturing a mark existing under the transparent substrate after the metal material is removed by etching through the transparent substrate; and observing the location-brightness curve drawing means, For the image obtained by the above-mentioned photographing, the observation point-brightness curve is prepared along the direction of the observed mark across the observed direction of the mark; and the surface condition evaluation means of the metal material is In the observation point-luminance graph, the visibility of the transparent substrate is evaluated based on the slope of the luminance curve generated from the end portion of the mark to the portion without the mark, and the metal material is evaluated based on the evaluation result of the visibility. Surface state; the above-mentioned metal material surface state evaluation means will be from the end of the above mark to the absence of the above-mentioned standard The difference between the top average Bt and the bottom average Bb of the luminance curve generated in part is ΔB (ΔB=Bt-Bb), and the visibility of the transparent substrate is evaluated using Sv, and based on the transparent substrate described above. The surface state of the metal material is evaluated by the evaluation result of the visibility, and the Sv is set to a value t1 indicating the position of the intersection of the brightness curve and Bt closest to the mark in the observation point-luminance curve. When the value from the intersection of the luminance curve and Bt to the depth of 0.1 ΔB based on Bt is set, the value of the position closest to the intersection of the above marks among the intersections of the luminance curve and 0.1 ΔB is t2, It is defined by the following formula (1).
Sv=(△B×0.1)/(t1-t2) (1)Sv=(△B×0.1)/(t1-t2) (1)
本發明於另一態樣中係一種金屬材料之表面狀態之評價裝置,該裝置具備以下手段:攝影手段,其於將金屬材料之經表面處理之表面側貼合於透明基材之至少一面之後,藉由蝕刻去除上述金屬材料之至少一部分,並隔著上述透明基材拍攝於藉由蝕刻而去除該金屬材料後存在於上述透明基材之下方之標記;觀察地點-亮度曲線圖製作手段,其對於藉由 上述拍攝而獲得之圖像,沿著橫穿所觀察到之上述標記之方向測定每個觀察地點之亮度而製作觀察地點-亮度曲線圖;及金屬材料表面狀態評價手段,其於上述觀察地點-亮度曲線圖中,根據自上述標記之端部起至無上述標記之部分產生之亮度曲線之斜率評價上述透明基材之視認性,並基於上述視認性之評價結果評價金屬材料之表面狀態;上述金屬材料表面狀態評價手段使用△B(△B=Bt-Bb)及Sv進行透明基材之視認性之評價,並基於上述透明基材之視認性之評價結果對金屬材料之表面狀態進行評價,上述△B(△B=Bt-Bb)係自上述標記之端部起至無上述標記之部分產生之亮度曲線之頂部平均值Bt與底部平均值Bb之差,上述Sv係於在上述觀察地點-亮度曲線圖中,將表示亮度曲線與Bt之交點中最接近於上述標記之交點之位置之值設為t1,將表示於自亮度曲線與Bt之交點至以Bt為基準0.1△B為止之深度範圍內,亮度曲線與0.1△B之交點中最接近於上述標記之交點之位置之值設為t2時,由下述(1)式進行定義。In another aspect, the present invention provides an apparatus for evaluating the surface state of a metal material, the apparatus having the following means: a photographing means for attaching the surface side of the surface of the metal material to at least one side of the transparent substrate And removing at least a part of the metal material by etching, and capturing a mark existing under the transparent substrate after the metal material is removed by etching through the transparent substrate; and observing the location-brightness curve drawing means, For The image obtained by the above-mentioned photographing is measured by measuring the brightness of each observation point in the direction across the observed mark to create an observation point-luminance curve; and a metal material surface state evaluation means at the above observation point - In the luminance graph, the visibility of the transparent substrate is evaluated based on the slope of the luminance curve generated from the end portion of the mark to the portion without the mark, and the surface state of the metal material is evaluated based on the evaluation result of the visibility; The surface condition evaluation means of the metal material uses ΔB (ΔB=Bt-Bb) and Sv to evaluate the visibility of the transparent substrate, and evaluates the surface state of the metal material based on the evaluation result of the visibility of the transparent substrate. The above ΔB (ΔB=Bt-Bb) is the difference between the top average value Bt and the bottom average value Bb of the luminance curve generated from the end portion of the mark to the portion without the mark, and the Sv is at the observation point - In the luminance graph, the value indicating the position of the intersection of the luminance curve and Bt closest to the above-mentioned mark is set to t1, which will be expressed at the intersection of the self-luminance curve and Bt. In the depth range up to 0.1 ΔB based on Bt, when the value of the position closest to the intersection of the above marks among the intersections of the luminance curve and 0.1 ΔB is t2, it is defined by the following formula (1).
Sv=(△B×0.1)/(t1-t2) (1)Sv=(△B×0.1)/(t1-t2) (1)
本發明於又一態樣中係一種用以使電腦作為本發明之金屬材料之表面狀態之評價裝置而發揮功能之程式。In still another aspect, the present invention is a program for causing a computer to function as an evaluation device for the surface state of the metal material of the present invention.
本發明於又一態樣中係一種記錄有本發明之程式之電腦可讀取記錄媒體。In another aspect, the invention is a computer readable recording medium on which the program of the invention is recorded.
本發明於又一態樣中係一種金屬材料之表面狀態之評價方法,該方法係於將金屬材料之表面貼合於透明基材之至少一面之後,藉由蝕刻去除上述金屬材料之至少一部分,並隔著上述透明基材拍攝於藉由蝕刻而去除該金屬材料後存在於上述透明基材之下方之標記,對於藉由上述拍攝而獲得之圖像,沿著橫穿所觀察到之上述標記之方向測定每個觀察地點之亮度而製作觀察地點-亮度曲線圖,於上述觀察地點-亮度曲線圖中,根據自上述標記之端部起至無上述標記之部分產生之亮度曲線之斜率評價上 述透明基材之視認性,並基於上述視認性之評價結果對金屬材料之表面狀態進行評價;上述金屬材料之表面狀態之評價係將自上述標記之端部起至無上述標記之部分產生之亮度曲線之頂部平均值Bt與底部平均值Bb之差設為△B(△B=Bt-Bb),使用Sv進行透明基材之視認性之評價,並基於上述透明基材之視認性之評價結果對金屬材料之表面狀態進行評價,上述Sv係於在上述觀察地點-亮度曲線圖中,將表示亮度曲線與Bt之交點中最接近於上述標記之交點之位置之值設為t1,將表示於自亮度曲線與Bt之交點至以Bt為基準0.1△B為止之深度範圍內,亮度曲線與0.1△B之交點中最接近於上述標記之交點之位置之值設為t2時,由下述(1)式進行定義。In another aspect, the present invention is a method for evaluating the surface state of a metal material by bonding at least a portion of the metal material by etching after bonding the surface of the metal material to at least one side of the transparent substrate. And marking the underside of the transparent substrate after the metal material is removed by etching through the transparent substrate, and the image obtained by the above-mentioned photographing is observed along the traverse. The direction is measured by measuring the brightness of each observation point to create an observation point-brightness curve. In the above observation point-luminance curve, the slope of the brightness curve generated from the end portion of the mark to the portion without the mark is evaluated. Determining the visibility of the transparent substrate, and evaluating the surface state of the metal material based on the evaluation result of the visibility; the surface state of the metal material is evaluated from the end of the mark to the portion without the mark The difference between the top average value Bt of the luminance curve and the bottom average value Bb is ΔB (ΔB = Bt - Bb), and the visibility of the transparent substrate is evaluated using Sv, and based on the evaluation of the visibility of the transparent substrate described above. As a result, the surface state of the metal material was evaluated. The Sv is expressed in the observation point-luminance curve, and the value indicating the position closest to the intersection of the mark among the intersections of the brightness curve and Bt is t1, which indicates In the depth range from the intersection of the luminance curve and Bt to the depth of 0.1 ΔB based on Bt, when the value of the position closest to the intersection of the above marks in the intersection of the luminance curve and 0.1 ΔB is t2, (1) Formula is defined.
Sv=(△B×0.1)/(t1-t2) (1)Sv=(△B×0.1)/(t1-t2) (1)
本發明於又一態樣中係一種金屬材料之表面狀態之評價方法,該方法係於將金屬材料之經表面處理之表面側貼合於透明基材之至少一面之後,藉由蝕刻去除上述金屬材料之至少一部分,並隔著上述透明基材拍攝於藉由蝕刻而去除該金屬材料後存在於上述透明基材之下方之標記,對於藉由上述拍攝而獲得之圖像,沿著橫穿所觀察到之上述標記之方向測定每個觀察地點之亮度而製作觀察地點-亮度曲線圖,於上述觀察地點-亮度曲線圖中,根據自上述標記之端部起至無上述標記之部分產生之亮度曲線之斜率評價上述透明基材之視認性,並基於上述視認性之評價結果對金屬材料之表面狀態進行評價;上述金屬材料之表面狀態之評價係使用△B(△B=Bt-Bb)及Sv進行透明基材之視認性之評價,並基於上述透明基材之視認性之評價結果對金屬材料之表面狀態進行評價,上述△B(△B=Bt-Bb)係自上述標記之端部起至無上述標記之部分產生之亮度曲線之頂部平均值Bt與底部平均值Bb之差,上述Sv係於在上述觀察地點-亮度曲線圖中,將表示亮度曲線與Bt之交點中最接近於上述標記之交點之位置之值設為t1,將表示於自亮度曲線與Bt之交點至以Bt為基準0.1△B為止之深度 範圍內,亮度曲線與0.1△B之交點中最接近於上述標記之交點之位置之值設為t2時,由下述(1)式進行定義。In another aspect, the present invention is a method for evaluating the surface state of a metal material by adhering the surface side of the surface of the metal material to at least one side of the transparent substrate, and removing the metal by etching. At least a portion of the material is captured by the transparent substrate along a mark that is present under the transparent substrate after the metal material is removed by etching, and the image obtained by the above-mentioned photographing is traversed Observing the brightness of each observation point in the direction of the above-mentioned mark to prepare an observation point-brightness curve, in the above-mentioned observation place-brightness curve, the brightness generated from the end portion of the mark to the portion without the mark The slope of the curve is used to evaluate the visibility of the transparent substrate, and the surface state of the metal material is evaluated based on the evaluation result of the visibility; the surface state of the metal material is evaluated by using ΔB (ΔB=Bt-Bb) and Sv performs evaluation of the visibility of the transparent substrate, and evaluates the surface state of the metal material based on the evaluation result of the visibility of the transparent substrate The above ΔB (ΔB=Bt-Bb) is the difference between the top average value Bt and the bottom average value Bb of the luminance curve generated from the end portion of the mark to the portion without the mark, and the Sv is at the observation point - In the luminance graph, the value indicating the position closest to the intersection of the above-mentioned marks in the intersection of the luminance curve and Bt is t1, which is expressed from the intersection of the self-luminance curve and Bt to 0.1 ΔB based on Bt. depth In the range, when the value of the position closest to the intersection of the above-mentioned marks among the intersections of the luminance curve and 0.1 ΔB is t2, it is defined by the following formula (1).
Sv=(△B×0.1)/(t1-t2) (1)Sv=(△B×0.1)/(t1-t2) (1)
本發明於又一態樣中係一種透明基材之視認性評價裝置,該裝置具備以下手段:攝影手段,其隔著上述透明基材拍攝存在於透明基材之下方之標記;觀察地點-亮度曲線圖製作手段,其對於藉由上述拍攝而獲得之圖像,沿著橫穿所觀察到之上述標記之方向測定每個觀察地點之亮度而製作觀察地點-亮度曲線圖;及視認性評價手段,其於上述觀察地點-亮度曲線圖中,根據自上述標記之端部起至無上述標記之部分產生之亮度曲線之斜率評價上述透明基材之視認性;上述視認性評價手段將自上述標記之端部起至無上述標記之部分產生之亮度曲線之頂部平均值Bt與底部平均值Bb之差設為△B(△B=Bt-Bb),使用Sv進行視認性之評價,上述Sv係於在上述觀察地點-亮度曲線圖中,將表示亮度曲線與Bt之交點中最接近於上述標記之交點之位置之值設為t1,將表示於自亮度曲線與Bt之交點至以Bt為基準0.1△B為止之深度範圍內,亮度曲線與0.1△B之交點中最接近於上述標記之交點之位置之值設為t2時,由下述(1)式進行定義。In another aspect, the present invention provides a visual substrate evaluation device for a transparent substrate, the device comprising: a photographing means for photographing a mark existing under the transparent substrate via the transparent substrate; a graph creating means for producing an observation point-luminance curve by measuring the brightness of each observation point in a direction crossing the observed mark in the image obtained by the above-mentioned photographing; and a visual evaluation means In the above-mentioned observation point-brightness graph, the visibility of the transparent substrate is evaluated based on the slope of the brightness curve generated from the end portion of the mark to the portion without the mark; the visibility evaluation means will be from the mark The difference between the top average value Bt and the bottom average value Bb of the luminance curve generated from the end portion to the portion without the above-mentioned mark is ΔB (ΔB = Bt - Bb), and the visibility is evaluated using Sv, and the above Sv system is used. In the above-mentioned observation point-luminance curve, the value indicating the position of the intersection of the brightness curve and Bt closest to the above-mentioned mark is set to t1, which will be expressed in the self-brightness curve. In the depth range from Bt to Bt as the reference 0.1 ΔB, when the value of the position closest to the intersection of the above marks in the intersection of the luminance curve and 0.1 ΔB is t2, the following formula (1) Make a definition.
Sv=(△B×0.1)/(t1-t2) (1)Sv=(△B×0.1)/(t1-t2) (1)
本發明於又一態樣中係一種透明基材之視認性評價裝置,該裝置具備以下手段:攝影手段,其隔著上述透明基材拍攝存在於透明基材之下方之標記;觀察地點-亮度曲線圖製作手段,其對於藉由上述拍攝而獲得之圖像,沿著橫穿所觀察到之上述標記之方向測定每個觀察地點之亮度而製作觀察地點-亮度曲線圖;及視認性評價手段,其於上述觀察地點-亮度曲線圖中,根據自上述標記之端部起至無上述標記之部分產生之亮度曲線之斜率評價上述透明基材之視認性;上述視認性評價手段使用△B(△B=Bt-Bb)及Sv進行視認性之評價,上述△B(△B=Bt-Bb)係自上述標記之 端部起至無上述標記之部分產生之亮度曲線之頂部平均值Bt與底部平均值Bb之差,上述Sv係於在上述觀察地點-亮度曲線圖中,將表示亮度曲線與Bt之交點中最接近於上述標記之交點之位置之值設為t1,將表示於自亮度曲線與Bt之交點至以Bt為基準0.1△B為止之深度範圍內,亮度曲線與0.1△B之交點中最接近於上述標記之交點之位置之值設為t2時,由下述(1)式進行定義。In another aspect, the present invention provides a visual substrate evaluation device for a transparent substrate, the device comprising: a photographing means for photographing a mark existing under the transparent substrate via the transparent substrate; a graph creating means for producing an observation point-luminance curve by measuring the brightness of each observation point in a direction crossing the observed mark in the image obtained by the above-mentioned photographing; and a visual evaluation means In the above-mentioned observation site-brightness graph, the visibility of the transparent substrate is evaluated based on the slope of the luminance curve generated from the end portion of the mark to the portion without the mark; the visibility evaluation means uses ΔB ( ΔB=Bt-Bb) and Sv are evaluated for visibility, and the above ΔB (ΔB=Bt-Bb) is derived from the above-mentioned mark The difference between the top average value Bt and the bottom average value Bb of the brightness curve generated from the end portion to the portion without the above-mentioned mark, the above Sv is in the above-mentioned observation point-brightness graph, and will represent the most intersection of the brightness curve and the Bt. The value of the position close to the intersection of the above marks is set to t1, which is expressed in the depth range from the intersection of the brightness curve and Bt to the base of 0.1 ΔB, and the closest to the intersection of the brightness curve and 0.1 ΔB. When the value of the position of the intersection of the above marks is t2, it is defined by the following formula (1).
Sv=(△B×0.1)/(t1-t2) (1)Sv=(△B×0.1)/(t1-t2) (1)
本發明於又一態樣中係一種用以使電腦作為本發明之透明基材之視認性評價裝置而發揮功能之程式。In still another aspect, the present invention is a program for causing a computer to function as a visibility evaluation device for a transparent substrate of the present invention.
本發明於又一態樣中係一種電腦可讀取記錄媒體,其記錄有用以使電腦作為本發明之透明基材之視認性評價裝置而發揮功能之程式。In still another aspect of the invention, a computer readable recording medium recording a program for causing a computer to function as a visibility evaluation device for a transparent substrate of the present invention.
本發明於又一態樣中係一種積層體之定位裝置,該裝置係用以進行金屬與透明基材之積層體之定位者;具備以下手段:攝影手段,其對於具有標記之上述金屬與透明基材之積層體,隔著上述透明基材拍攝上述標記;觀察地點-亮度曲線圖製作手段,其對於藉由上述拍攝而獲得之圖像,沿著橫穿所觀察到之上述標記之方向測定每個觀察地點之亮度而製作觀察地點-亮度曲線圖;及定位手段,其於上述觀察地點-亮度曲線圖中,根據自上述標記之端部起至無上述標記之部分產生之亮度曲線之斜率決定上述積層體之位置;上述定位手段於將自上述標記之端部起至無上述標記之部分產生之亮度曲線之頂部平均值Bt與底部平均值Bb之差設為△B(△B=Bt-Bb),於在上述觀察地點-亮度曲線圖中,將表示亮度曲線與Bt之交點中最接近於上述標記之交點之位置之值設為t1,將表示於自亮度曲線與Bt之交點至以Bt為基準0.1△B為止之深度範圍內,亮度曲線與0.1△B之交點中最接近於上述標記之交點之位置之值設為t2時,由下述(1)式定義之Sv成為特定值以上之情形時,基於測定出上述Sv之位置檢測上述標記 之位置,並基於上述所檢測出之標記之位置進行金屬與透明基材之積層體之定位。In another aspect, the present invention is a positioning device for a laminate, which is used for positioning a laminate of a metal and a transparent substrate; and has the following means: a photographic means for the above-mentioned metal and transparent with a mark a laminated body of a substrate, the mark is imaged through the transparent substrate; and an observation point-brightness curve creating means for measuring an image obtained by the above-described photographing along a direction crossing the observed mark Observing the position-brightness curve for each brightness of the observation point; and positioning means for the slope of the brightness curve generated from the end of the mark to the portion without the mark in the observation point-luminance curve Determining the position of the laminated body; the positioning means sets the difference between the top average value Bt and the bottom average value Bb of the brightness curve generated from the end portion of the mark to the portion without the mark as ΔB (ΔB=Bt -Bb), in the above-mentioned observation point-brightness graph, the value indicating the position of the intersection of the brightness curve and Bt closest to the above-mentioned mark is set to t1, It is shown in the depth range from the intersection of the brightness curve and Bt to the range of 0.1 ΔB from Bt. When the value of the position of the intersection of the brightness curve and 0.1 ΔB closest to the intersection of the above marks is set to t2, When the Sv defined by the formula (1) is equal to or greater than a specific value, the mark is detected based on the position at which the Sv is measured. The position of the laminate of the metal and the transparent substrate is performed based on the position of the mark detected as described above.
Sv=(△B×0.1)/(t1-t2) (1)Sv=(△B×0.1)/(t1-t2) (1)
本發明於又一態樣中係一種積層體之定位裝置,該裝置係用以進行金屬與透明基材之積層體之定位者;具備以下手段:攝影手段,其對於具有標記之上述金屬與透明基材之積層體,隔著上述透明基材拍攝上述標記;觀察地點-亮度曲線圖製作手段,其對於藉由上述拍攝而獲得之圖像,沿著橫穿所觀察到之上述標記之方向測定每個觀察地點之亮度而製作觀察地點-亮度曲線圖;及定位手段,其於上述觀察地點-亮度曲線圖中,根據自上述標記之端部起至無上述標記之部分產生之亮度曲線之斜率決定上述積層體之位置;上述定位手段使用△B(△B=Bt-Bb)及Sv,於△B及Sv成為特定值以上之情形時,基於測定出上述Sv之位置檢測上述標記之位置,並基於上述所檢測出之標記之位置進行金屬與透明基材之積層體之定位,上述△B(△B=Bt-Bb)係自上述標記之端部起至無上述標記之部分產生之亮度曲線之頂部平均值Bt與底部平均值Bb之差,上述Sv係於在上述觀察地點-亮度曲線圖中,將表示亮度曲線與Bt之交點中最接近於上述標記之交點之位置之值設為t1,將表示於自亮度曲線與Bt之交點至以Bt為基準0.1△B為止之深度範圍內,亮度曲線與0.1△B之交點中最接近於上述標記之交點之位置之值設為t2時,由下述(1)式進行定義。In another aspect, the present invention is a positioning device for a laminate, which is used for positioning a laminate of a metal and a transparent substrate; and has the following means: a photographic means for the above-mentioned metal and transparent with a mark a laminated body of a substrate, the mark is imaged through the transparent substrate; and an observation point-brightness curve creating means for measuring an image obtained by the above-described photographing along a direction crossing the observed mark Observing the position-brightness curve for each brightness of the observation point; and positioning means for the slope of the brightness curve generated from the end of the mark to the portion without the mark in the observation point-luminance curve The position of the layered body is determined. The positioning means uses ΔB (ΔB=Bt-Bb) and Sv. When ΔB and Sv are equal to or greater than a specific value, the position of the mark is detected based on the position at which the Sv is measured. And positioning the laminated body of the metal and the transparent substrate based on the position of the mark detected as described above, wherein the ΔB (ΔB=Bt-Bb) is from the end of the mark to the absence of the above The difference between the top average value Bt of the brightness curve generated by the portion and the bottom average value Bb, wherein the Sv is in the above-mentioned observation point-brightness graph, and will represent the intersection of the brightness curve and the Bt closest to the above mark. The value of the position is set to t1, which is expressed in the depth range from the intersection of the brightness curve and Bt to the range of 0.1 ΔB based on Bt, and the position of the intersection of the brightness curve and 0.1 ΔB closest to the intersection of the above marks. When the value is set to t2, it is defined by the following formula (1).
Sv=(△B×0.1)/(t1-t2) (1)Sv=(△B×0.1)/(t1-t2) (1)
本發明於又一態樣中係一種用以使電腦作為本發明之積層體之定位裝置而發揮功能之程式。In still another aspect, the present invention is a program for causing a computer to function as a positioning device of the laminated body of the present invention.
本發明於又一態樣中係一種電腦可讀取記錄媒體,其記錄有用以使電腦作為本發明之積層體之定位裝置而發揮功能之程式。In still another aspect, the present invention is a computer readable recording medium which records a program for causing a computer to function as a positioning device of the laminated body of the present invention.
本發明於又一態樣中係一種印刷配線板之製造方法,該方法 包含以下步驟:使用本發明之定位裝置進行印刷配線板之定位,於經定位之上述印刷配線板安裝零件。In another aspect, the invention is a method of manufacturing a printed wiring board, the method The method comprises the steps of: positioning the printed wiring board using the positioning device of the present invention, and mounting the component on the printed wiring board positioned.
本發明於又一態樣中係一種判定金屬與透明基材之積層體所具有之標記是否存在之裝置,該裝置具備以下手段:攝影手段,其對於具有標記之上述金屬與透明基材之積層體,隔著上述透明基材拍攝上述標記;觀察地點-亮度曲線圖製作手段,其對於藉由上述拍攝而獲得之圖像,沿著橫穿所觀察到之上述標記之方向測定每個觀察地點之亮度而製作觀察地點-亮度曲線圖;及判定手段,其於上述觀察地點-亮度曲線圖中,根據自上述標記之端部起至無上述標記之部分產生之亮度曲線之斜率判定標記是否存在;上述判定手段於將自上述標記之端部起至無上述標記之部分產生之亮度曲線之頂部平均值Bt與底部平均值Bb之差設為△B(△B=Bt-Bb),於在上述觀察地點-亮度曲線圖中,將表示亮度曲線與Bt之交點中最接近於上述標記之交點之位置之值設為t1,將表示於自亮度曲線與Bt之交點至以Bt為基準0.1△B為止之深度範圍內,亮度曲線與0.1△B之交點中最接近於上述標記之交點之位置之值設為t2時,由下述(1)式定義之Sv成為特定值以上之情形時,判定為上述標記存在。In another aspect, the present invention is a device for determining the presence or absence of a mark on a laminate of a metal and a transparent substrate, the device having the following means: a photographic means for laminating the metal and the transparent substrate having the mark a body, the mark is photographed through the transparent substrate; and an observation point-brightness curve creating means for measuring each of the observation points in a direction crossing the observed mark for the image obtained by the photographing described above Obtaining an observation point-brightness curve; and determining means for determining whether a mark exists according to a slope of a brightness curve generated from an end portion of the mark to a portion without the mark in the observation point-luminance curve The determination means sets the difference between the top average value Bt and the bottom average value Bb of the luminance curve generated from the end portion of the mark to the portion without the mark as ΔB (ΔB=Bt-Bb). In the above-mentioned observation point-luminance graph, the value indicating the position of the intersection of the brightness curve and Bt closest to the intersection of the above marks is set to t1, which will be expressed in the self-luminance When the intersection of the curve and Bt reaches the depth range of 0.1 ΔB based on Bt, the value of the position closest to the intersection of the above marks among the intersections of the luminance curve and 0.1 ΔB is t2, and the following (1) When the Sv defined by the equation is equal to or greater than a specific value, it is determined that the above-mentioned flag exists.
Sv=(△B×0.1)/(t1-t2) (1)Sv=(△B×0.1)/(t1-t2) (1)
本發明於又一態樣中係一種判定金屬與透明基材之積層體所具有之標記是否存在之裝置,該裝置具備以下手段:攝影手段,其對於具有標記之上述金屬與透明基材之積層體,隔著上述透明基材拍攝上述標記;觀察地點-亮度曲線圖製作手段,其對於藉由上述拍攝而獲得之圖像,沿著橫穿所觀察到之上述標記之方向測定每個觀察地點之亮度而製作觀察地點-亮度曲線圖;及判定手段,其於上述觀察地點-亮度曲線圖中,根據自上述標記之端部起至無上述標記之部分產生之亮度曲線之斜率判定標記是否存在;上述判定手段使用△B(△B=Bt-Bb)及Sv,於△B及Sv成為 特定值以上之情形時,判定為上述標記存在,上述△B(△B=Bt-Bb)係自上述標記之端部起至無上述標記之部分產生之亮度曲線之頂部平均值Bt與底部平均值Bb之差,上述Sv係於在上述觀察地點-亮度曲線圖中,將表示亮度曲線與Bt之交點中最接近於上述標記之交點之位置之值設為t1,將表示於自亮度曲線與Bt之交點至以Bt為基準0.1△B為止之深度範圍內,亮度曲線與0.1△B之交點中最接近於上述標記之交點之位置之值設為t2時,由下述(1)式進行定義。In another aspect, the present invention is a device for determining the presence or absence of a mark on a laminate of a metal and a transparent substrate, the device having the following means: a photographic means for laminating the metal and the transparent substrate having the mark a body, the mark is photographed through the transparent substrate; and an observation point-brightness curve creating means for measuring each of the observation points in a direction crossing the observed mark for the image obtained by the photographing described above Obtaining an observation point-brightness curve; and determining means for determining whether a mark exists according to a slope of a brightness curve generated from an end portion of the mark to a portion without the mark in the observation point-luminance curve The above determination means uses ΔB (ΔB=Bt-Bb) and Sv, and becomes ΔB and Sv. When the specific value is equal to or greater than the specific value, it is determined that the mark is present, and the ΔB (ΔB = Bt - Bb) is the top average Bt and the bottom average of the brightness curve generated from the end of the mark to the portion without the mark. The difference between the values Bb and the Sv is in the observation point-luminance graph, and the value indicating the position of the intersection of the brightness curve and the Bt closest to the mark is set to t1, which is expressed in the self-luminance curve and When the value of the position of Bt is 0.1 ΔB based on Bt, and the value of the position of the intersection of the brightness curve and 0.1 ΔB closest to the intersection of the above marks is t2, the following formula (1) is performed. definition.
Sv=(△B×0.1)/(t1-t2) (1)Sv=(△B×0.1)/(t1-t2) (1)
本發明於又一態樣中係一種用以使電腦作為本發明所記載之判定裝置而發揮功能之程式。In still another aspect, the present invention is a program for causing a computer to function as a determination device described in the present invention.
本發明於又一態樣中係一種電腦可讀取記錄媒體,其記錄有用以使電腦作為本發明所記載之判定裝置而發揮功能之程式。In still another aspect, the present invention is a computer readable recording medium recording a program for causing a computer to function as a determination device described in the present invention.
本發明於又一態樣中係一種檢測金屬與透明基材之積層體所具有之標記之位置之裝置,該裝置具備以下手段:攝影手段,其對於具有標記之上述金屬與透明基材之積層體,隔著上述透明基材拍攝上述標記;觀察地點-亮度曲線圖製作手段,其對於藉由上述拍攝而獲得之圖像,沿著橫穿所觀察到之上述標記之方向測定每個觀察地點之亮度而製作觀察地點-亮度曲線圖;及檢測手段,其於上述觀察地點-亮度曲線圖中,根據自上述標記之端部起至無上述標記之部分產生之亮度曲線之斜率檢測標記之位置;上述檢測手段於將自上述標記之端部起至無上述標記之部分產生之亮度曲線之頂部平均值Bt與底部平均值Bb之差設為△B(△B=Bt-Bb),於在上述觀察地點-亮度曲線圖中,將表示亮度曲線與Bt之交點中最接近於上述標記之交點之位置之值設為t1,將表示於自亮度曲線與Bt之交點至以Bt為基準0.1△B為止之深度範圍內,亮度曲線與0.1△B之交點中最接近於上述標記之交點之位置之值設為t2時,由下述(1)式定義之Sv成為特定 值以上之情形時,基於測定出上述Sv之位置檢測上述標記之位置。In another aspect, the present invention is a device for detecting the position of a mark of a laminate of a metal and a transparent substrate, the device having the following means: a photographic means for laminating the metal and the transparent substrate having the mark a body, the mark is photographed through the transparent substrate; and an observation point-brightness curve creating means for measuring each of the observation points in a direction crossing the observed mark for the image obtained by the photographing described above Observing the position-brightness curve; and detecting means for detecting the position of the slope of the brightness curve generated from the end portion of the mark to the portion without the mark in the observation point-luminance curve The detection means sets the difference between the top average value Bt and the bottom average value Bb of the luminance curve generated from the end portion of the mark to the portion without the mark as ΔB (ΔB=Bt-Bb). In the above-mentioned observation point-brightness graph, the value indicating the position of the intersection of the brightness curve and Bt closest to the above-mentioned mark is set to t1, which will be expressed in the self-luminance curve. In the depth range from Bt to Bt as the reference 0.1 ΔB, when the value of the position closest to the intersection of the above marks in the intersection of the luminance curve and 0.1 ΔB is t2, the following formula (1) The defined Sv becomes specific When the value is equal to or greater than the value, the position of the mark is detected based on the position at which the Sv is measured.
Sv=(△B×0.1)/(t1-t2) (1)Sv=(△B×0.1)/(t1-t2) (1)
本發明於又一態樣中係一種檢測金屬與透明基材之積層體所具有之標記之位置之裝置,該裝置具備以下手段:攝影手段,其對於具有標記之上述金屬與透明基材之積層體,隔著上述透明基材拍攝上述標記;觀察地點-亮度曲線圖製作手段,其對於藉由上述拍攝而獲得之圖像,沿著橫穿所觀察到之上述標記之方向測定每個觀察地點之亮度而製作觀察地點-亮度曲線圖;及檢測手段,其於上述觀察地點-亮度曲線圖中,根據自上述標記之端部起至無上述標記之部分產生之亮度曲線之斜率檢測上述標記之位置;上述檢測手段使用△B(△B=Bt-Bb)及Sv,於△B及Sv成為特定值以上之情形時,基於測定出上述Sv之位置檢測上述標記之位置,上述△B(△B=Bt-Bb)係自上述標記之端部起至無上述標記之部分產生之亮度曲線之頂部平均值Bt與底部平均值Bb之差,上述Sv係於在上述觀察地點-亮度曲線圖中,將表示亮度曲線與Bt之交點中最接近於上述標記之交點之位置之值設為t1,將表示於自亮度曲線與Bt之交點至以Bt為基準0.1△B為止之深度範圍內,亮度曲線與0.1△B之交點中最接近於上述標記之交點之位置之值設為t2時,由下述(1)式進行定義。In another aspect, the present invention is a device for detecting the position of a mark of a laminate of a metal and a transparent substrate, the device having the following means: a photographic means for laminating the metal and the transparent substrate having the mark a body, the mark is photographed through the transparent substrate; and an observation point-brightness curve creating means for measuring each of the observation points in a direction crossing the observed mark for the image obtained by the photographing described above Observing a position-brightness curve; and detecting means for detecting the mark according to a slope of a brightness curve generated from an end portion of the mark to a portion without the mark in the observation point-luminance curve Position: The detection means uses ΔB (ΔB = Bt - Bb) and Sv. When ΔB and Sv are equal to or greater than a specific value, the position of the mark is detected based on the position at which the Sv is measured, and the ΔB (Δ) B=Bt-Bb) is the difference between the top average Bt and the bottom average Bb of the luminance curve generated from the end of the mark to the portion without the mark, and the above Sv is in the above view In the location-brightness graph, the value indicating the position of the intersection of the luminance curve and Bt closest to the above-mentioned mark is set to t1, which is expressed from the intersection of the self-luminance curve and Bt to the base of 0.1 ΔB based on Bt. In the depth range, when the value of the position closest to the intersection of the above marks among the intersections of the luminance curve and 0.1 ΔB is t2, it is defined by the following formula (1).
Sv=(△B×0.1)/(t1-t2) (1)Sv=(△B×0.1)/(t1-t2) (1)
本發明於又一態樣中係一種用以使電腦作為本發明之檢測裝置而發揮功能之程式。In still another aspect, the present invention is a program for causing a computer to function as a detecting device of the present invention.
本發明於又一態樣中係一種電腦可讀取記錄媒體,其記錄有用以使電腦作為本發明之檢測裝置而發揮功能之程式。In still another aspect, the present invention is a computer readable recording medium recording a program for causing a computer to function as a detecting device of the present invention.
本發明於又一態樣中係一種透明基材之視認性評價方法,該方法係於透明基材之下方設置標記,並利用攝影手段隔著上述透明基材拍攝上述標記,對於藉由上述拍攝而獲得之圖像,沿著橫穿所觀察到之上述 標記之方向測定每個觀察地點之亮度而製作觀察地點-亮度曲線圖,於上述觀察地點-亮度曲線圖中,根據自上述標記之端部起至無上述標記之部分產生之亮度曲線之斜率評價上述透明基材之視認性;將自上述標記之端部起至無上述標記之部分產生之亮度曲線之頂部平均值Bt與底部平均值Bb之差設為△B(△B=Bt-Bb),使用Sv進行透明基材之視認性評價,上述Sv係於在上述觀察地點-亮度曲線圖中,將表示亮度曲線與Bt之交點中最接近於上述標記之交點之位置之值設為t1,將表示於自亮度曲線與Bt之交點至以Bt為基準0.1△B為止之深度範圍內,亮度曲線與0.1△B之交點中最接近於上述標記之交點之位置之值設為t2時,由下述(1)式進行定義。In another aspect, the present invention is a method for evaluating the visibility of a transparent substrate, wherein the method is provided with a mark under the transparent substrate, and the mark is photographed by the photographic means across the transparent substrate, and the above-mentioned mark is taken by the above-mentioned transparent substrate. And the obtained image, along the above observed The direction of the mark is measured to determine the brightness of each observation point, and an observation point-brightness curve is prepared. In the above observation place-brightness curve, the slope of the brightness curve generated from the end portion of the mark to the portion without the mark is evaluated. The visibility of the transparent substrate; the difference between the top average Bt and the bottom average Bb of the brightness curve generated from the end of the mark to the portion without the mark is ΔB (ΔB=Bt-Bb) The Sv is used for the visibility evaluation of the transparent substrate, and the Sv is set to a value t1 indicating the position of the intersection of the brightness curve and the Bt closest to the mark in the observation point-luminance curve. When the value from the intersection of the luminance curve and Bt to the depth of 0.1 ΔB based on Bt is set, the value of the position closest to the intersection of the above marks among the intersections of the luminance curve and 0.1 ΔB is t2, It is defined by the following formula (1).
Sv=(△B×0.1)/(t1-t2) (1)Sv=(△B×0.1)/(t1-t2) (1)
本發明於又一態樣中係一種透明基材之視認性評價方法,該方法係於透明基材之下方設置標記,並利用攝影手段隔著上述透明基材拍攝上述標記,對於藉由上述拍攝而獲得之圖像,沿著橫穿所觀察到之上述標記之方向測定每個觀察地點之亮度而製作觀察地點-亮度曲線圖,於上述觀察地點-亮度曲線圖中,根據自上述標記之端部起至無上述標記之部分產生之亮度曲線之斜率評價上述透明基材之視認性;使用△B(△B=Bt-Bb)及Sv進行透明基材之視認性之評價,上述△B(△B=Bt-Bb)係自上述標記之端部起至無上述標記之部分產生之亮度曲線之頂部平均值Bt與底部平均值Bb之差,上述Sv係於在上述觀察地點-亮度曲線圖中,將表示亮度曲線與Bt之交點中最接近於上述標記之交點之位置之值設為t1,將表示於自亮度曲線與Bt之交點至以Bt為基準0.1△B為止之深度範圍內,亮度曲線與0.1△B之交點中最接近於上述標記之交點之位置之值設為t2時,由下述(1)式進行定義。In another aspect, the present invention is a method for evaluating the visibility of a transparent substrate, wherein the method is provided with a mark under the transparent substrate, and the mark is photographed by the photographic means across the transparent substrate, and the above-mentioned mark is taken by the above-mentioned transparent substrate. And obtaining the image, measuring the brightness of each observation point along the direction of the observed mark, and creating an observation point-luminance curve in the above-mentioned observation point-luminance curve according to the end from the above mark The slope of the brightness curve generated from the portion from the portion to the mark without the above-mentioned mark is evaluated for the visibility of the transparent substrate; the evaluation of the visibility of the transparent substrate is performed using ΔB (ΔB = Bt - Bb) and Sv, the above ΔB ( ΔB=Bt-Bb) is the difference between the top average value Bt and the bottom average value Bb of the luminance curve generated from the end portion of the mark to the portion without the mark, and the Sv is at the above-mentioned observation point-luminance curve In the middle, the value indicating the position of the intersection of the brightness curve and Bt closest to the intersection of the marks is set to t1, and is expressed in the depth range from the intersection of the brightness curve and Bt to the reference point of 0.1 ΔB from Bt. brightness When the value of the position closest to the intersection of the above marks in the intersection of the curve and 0.1 ΔB is t2, it is defined by the following formula (1).
Sv=(△B×0.1)/(t1-t2) (1)Sv=(△B×0.1)/(t1-t2) (1)
本發明於又一態樣中係一種透明基材之視認性評價方法,該方法係於將至少一表面經處理之表面處理銅箔自處理表面側貼合於透明基材之兩面之後,藉由蝕刻去除上述兩面之銅箔,將印刷有標記之印刷物鋪設於露出之上述透明基材之下方,並利用攝影手段隔著上述透明基材拍攝上述印刷物,對於藉由上述拍攝而獲得之圖像,沿著橫穿所觀察到之上述標記之方向測定每個觀察地點之亮度而製作觀察地點-亮度曲線圖,於上述觀察地點-亮度曲線圖中,根據自上述標記之端部起至無上述標記之部分產生之亮度曲線之斜率評價上述透明基材之視認性;使用△B(△B=Bt-Bb)及Sv進行透明基材之視認性之評價,上述△B(△B=Bt-Bb)係自上述標記之端部起至無上述標記之部分產生之亮度曲線之頂部平均值Bt與底部平均值Bb之差,上述Sv係於在上述觀察地點-亮度曲線圖中,將表示亮度曲線與Bt之交點中最接近於上述標記之交點之位置之值設為t1,將表示於自亮度曲線與Bt之交點至以Bt為基準0.1△B為止之深度範圍內,亮度曲線與0.1△B之交點中最接近於上述標記之交點之位置之值設為t2時,由下述(1)式進行定義。In another aspect, the present invention provides a method for evaluating the visibility of a transparent substrate by adhering at least one surface-treated surface-treated copper foil to the two sides of the transparent substrate from the side of the treated substrate. Etching and removing the copper foil on both sides, and printing the printed printed matter on the underside of the exposed transparent substrate, and photographing the printed matter through the transparent substrate by a photographing means, and obtaining an image obtained by the above-mentioned photographing by the photographing means An observation point-brightness curve is prepared by measuring the brightness of each observation point across the direction of the observed mark, and in the above-mentioned observation point-luminance curve, from the end of the mark to the absence of the above mark The slope of the brightness curve generated by the part is evaluated for the visibility of the transparent substrate; the visibility of the transparent substrate is evaluated by using ΔB (ΔB=Bt-Bb) and Sv, and the above ΔB (ΔB=Bt-Bb) Is the difference between the top average value Bt and the bottom average value Bb of the brightness curve generated from the end of the mark to the portion without the mark, and the Sv is in the above-mentioned observation point-brightness graph, The value indicating the position of the intersection of the brightness curve and Bt closest to the intersection of the above marks is set to t1, which is expressed in the depth range from the intersection of the brightness curve and Bt to the reference point of 0.1 ΔB from Bt, and the brightness curve and When the value of the position closest to the intersection of the above marks among the intersections of 0.1 ΔB is t2, it is defined by the following formula (1).
Sv=(△B×0.1)/(t1-t2) (1)Sv=(△B×0.1)/(t1-t2) (1)
本發明於又一態樣中係一種積層體之定位方法,該方法係進行金屬與透明基材之積層體之定位者,上述金屬與透明基材之積層體具有標記,利用攝影手段隔著上述透明基材拍攝上述標記,對於藉由上述拍攝而獲得之圖像,沿著橫穿所觀察到之上述標記之方向測定每個觀察地點之亮度而製作觀察地點-亮度曲線圖;於將自上述標記之端部起至無上述標記之部分產生之亮度曲線之頂部平均值Bt與底部平均值Bb之差設為△B(△B=Bt-Bb),於在上述觀察地點-亮度曲線圖中,將表示亮度曲線與Bt之交點中最接近於上述標記之交點之位置之值設為t1,將表示於自亮度曲線與Bt之交點至以Bt為基準0.1△B為止之深度範圍內,亮度曲線與0.1△B之 交點中最接近於上述標記之交點之位置之值設為t2時,由下述(1)式定義之Sv成為特定值以上之情形時,基於測定出上述Sv之位置檢測上述標記之位置,並基於上述所檢測出之標記之位置進行金屬與透明基材之積層體之定位。In another aspect, the present invention provides a method for positioning a laminated body, wherein the method is to position a laminate of a metal and a transparent substrate, and the laminated body of the metal and the transparent substrate has a mark, and is separated by a photographing means. The transparent substrate captures the mark, and for the image obtained by the above-mentioned photographing, the brightness of each observation point is measured along the direction of the observed mark to create an observation point-luminance curve; The difference between the top average value Bt and the bottom average value Bb of the brightness curve generated from the end portion of the mark to the portion without the above mark is set to ΔB (ΔB=Bt-Bb) in the above-mentioned observation point-brightness graph. The value indicating the position of the intersection of the brightness curve and Bt closest to the intersection of the above marks is t1, and is expressed in the depth range from the intersection of the brightness curve and Bt to the reference point of 0.1 ΔB from Bt. Curve and 0.1△B When the value of the position closest to the intersection of the above-mentioned marks is t2, when the Sv defined by the following formula (1) is equal to or greater than a specific value, the position of the mark is detected based on the position at which the Sv is measured, and The positioning of the laminate of the metal and the transparent substrate is performed based on the position of the mark detected as described above.
Sv=(△B×0.1)/(t1-t2) (1)Sv=(△B×0.1)/(t1-t2) (1)
本發明於又一態樣中係一種積層體之定位方法,該方法係進行金屬與透明基材之積層體之定位者,上述金屬與透明基材之積層體具有標記,利用攝影手段隔著上述透明基材拍攝上述標記,對於藉由上述拍攝而獲得之圖像,沿著橫穿所觀察到之上述標記之方向測定每個觀察地點之亮度而製作觀察地點-亮度曲線圖;使用△B(△B=Bt-Bb)及Sv,於△B及Sv成為特定值以上之情形時,基於測定出上述Sv之位置檢測上述標記之位置,並基於上述所檢測出之標記之位置進行金屬與透明基材之積層體之定位,上述△B(△B=Bt-Bb)係自上述標記之端部起至無上述標記之部分產生之亮度曲線之頂部平均值Bt與底部平均值Bb之差,上述Sv係於在上述觀察地點-亮度曲線圖中,將表示亮度曲線與Bt之交點中最接近於上述標記之交點之位置之值設為t1,將表示於自亮度曲線與Bt之交點至以Bt為基準0.1△B為止之深度範圍內,亮度曲線與0.1△B之交點中最接近於上述標記之交點之位置之值設為t2時,由下述(1)式進行定義。In another aspect, the present invention provides a method for positioning a laminated body, wherein the method is to position a laminate of a metal and a transparent substrate, and the laminated body of the metal and the transparent substrate has a mark, and is separated by a photographing means. The transparent substrate captures the mark, and for the image obtained by the above-mentioned photographing, the brightness of each observation point is measured along the direction of the observed mark to create an observation point-luminance curve; using ΔB ( ΔB=Bt-Bb) and Sv, when ΔB and Sv are equal to or greater than a specific value, the position of the mark is detected based on the position at which the Sv is measured, and the metal is transparent based on the position of the detected mark. The positioning of the laminate of the substrate, the above ΔB (ΔB=Bt-Bb) is the difference between the top average Bt and the bottom average Bb of the brightness curve generated from the end of the mark to the portion without the mark, The Sv is set in the observation point-luminance graph, and the value indicating the position closest to the intersection of the mark among the intersections of the brightness curve and Bt is t1, and is expressed at the intersection of the self-luminance curve and Bt. Bt In the depth range from the reference of 0.1 ΔB, when the value of the position closest to the intersection of the above marks among the intersections of the luminance curve and 0.1 ΔB is t2, it is defined by the following formula (1).
Sv=(△B×0.1)/(t1-t2) (1)Sv=(△B×0.1)/(t1-t2) (1)
本發明於又一態樣中係一種印刷配線板之定位方法,該方法係進行具有絕緣樹脂板、及設置於上述絕緣樹脂板上之電路之印刷配線板之定位者,利用攝影手段隔著上述樹脂拍攝上述電路,對於藉由上述拍攝而獲得之圖像,沿著橫穿所觀察到之上述電路之方向測定每個觀察地點之亮度而製作觀察地點-亮度曲線圖;於將自上述電路之端部起至無上述電路之部分產生之亮度曲線之頂部平均值Bt與底部平均值Bb之差設為△B(△B =Bt-Bb),於在上述觀察地點-亮度曲線圖中,將表示亮度曲線與Bt之交點中最接近於上述電路之交點之位置之值設為t1,將表示於自亮度曲線與Bt之交點至以Bt為基準0.1△B為止之深度範圍內,亮度曲線與0.1△B之交點中最接近於上述電路之交點之位置之值設為t2時,由下述(1)式定義之Sv成為特定值以上之情形時,基於測定出上述Sv之位置檢測上述電路之位置,並基於上述所檢測出之電路之位置進行印刷配線板之定位。In another aspect, the present invention provides a method of locating a printed wiring board, wherein the method is to position a printed wiring board having an insulating resin board and a circuit provided on the insulating resin board, and the above is interposed by a photographing means The resin captures the above-mentioned circuit, and for the image obtained by the above-mentioned photographing, the brightness of each observation point is measured along the direction of the observed circuit, thereby producing an observation point-luminance curve; The difference between the top average value Bt and the bottom average value Bb of the luminance curve generated from the end portion to the portion without the above circuit is set to ΔB (ΔB) =Bt-Bb), in the above-mentioned observation point-brightness graph, the value indicating the position of the intersection of the brightness curve and Bt closest to the above-mentioned circuit is set to t1, which will be expressed in the self-luminance curve and Bt. When the value of the intersection to the position where the intersection of the luminance curve and 0.1 ΔB is closest to the intersection of the above-mentioned circuits is t2, the SV is defined by the following formula (1). When the value is equal to or greater than a specific value, the position of the circuit is detected based on the position at which the Sv is measured, and the position of the printed wiring board is performed based on the position of the detected circuit.
Sv=(△B×0.1)/(t1-t2) (1)Sv=(△B×0.1)/(t1-t2) (1)
本發明於又一態樣中係一種印刷配線板之定位方法,該方法係進行具有絕緣樹脂板、及設置於上述絕緣樹脂板上之電路之印刷配線板之定位者,利用攝影手段隔著上述樹脂拍攝上述電路,對於藉由上述拍攝而獲得之圖像,沿著橫穿所觀察到之上述電路之方向測定每個觀察地點之亮度而製作觀察地點-亮度曲線圖;使用△B(△B=Bt-Bb)及Sv,於△B及Sv成為特定值以上之情形時,基於測定出上述Sv之位置檢測上述電路之位置,並基於上述所檢測出之電路之位置進行印刷配線板之定位,上述△B(△B=Bt-Bb)係自上述電路之端部起至無上述電路之部分產生之亮度曲線之頂部平均值Bt與底部平均值Bb之差,上述Sv係於在上述觀察地點-亮度曲線圖中,將表示亮度曲線與Bt之交點中最接近於上述電路之交點之位置之值設為t1,將表示於自亮度曲線與Bt之交點至以Bt為基準0.1△B為止之深度範圍內,亮度曲線與0.1△B之交點中最接近於上述電路之交點之位置之值設為t2時,由下述(1)式進行定義。In another aspect, the present invention provides a method of locating a printed wiring board, wherein the method is to position a printed wiring board having an insulating resin board and a circuit provided on the insulating resin board, and the above is interposed by a photographing means Resin photographing the above-mentioned circuit, and measuring the brightness of each observation point along the direction of the above-mentioned circuit across the image obtained by the above-mentioned photographing to produce an observation point-luminance curve; using ΔB (ΔB) =Bt-Bb) and Sv, when ΔB and Sv are equal to or greater than a specific value, the position of the circuit is detected based on the position at which the Sv is measured, and the position of the printed wiring board is determined based on the position of the detected circuit. The above-mentioned ΔB (ΔB=Bt-Bb) is the difference between the top average value Bt and the bottom average value Bb of the luminance curve generated from the end portion of the above circuit to the portion without the above-mentioned circuit, and the above Sv is in the above observation In the location-brightness graph, the value indicating the position of the intersection of the luminance curve and Bt closest to the above circuit is set to t1, which will be expressed from the intersection of the self-luminance curve and Bt to the reference of Bt 0.1 ΔB. Within the depth stop, the brightness curve and the intersection of the 0.1 △ B value closest to the position of the intersection point of the circuit is set to t2, is defined by the following formula (1).
Sv=(△B×0.1)/(t1-t2) (1)Sv=(△B×0.1)/(t1-t2) (1)
本發明於又一態樣中係一種判定金屬與透明基材之積層體所具有之標記是否存在之方法,該方法係上述金屬與透明基材之積層體具有標記,利用攝影手段隔著上述透明基材拍攝上述標記,對於藉由上述拍攝而獲得之圖像,沿著橫穿所觀察到之上述標記之方向測定每個觀察地點 之亮度而製作觀察地點-亮度曲線圖;於將自上述標記之端部起至無上述標記之部分產生之亮度曲線之頂部平均值Bt與底部平均值Bb之差設為△B(△B=Bt-Bb),於在上述觀察地點-亮度曲線圖中,將表示亮度曲線與Bt之交點中最接近於上述標記之交點之位置之值設為t1,將表示於自亮度曲線與Bt之交點至以Bt為基準0.1△B為止之深度範圍內,亮度曲線與0.1△B之交點中最接近於上述標記之交點之位置之值設為t2時,由下述(1)式定義之Sv成為特定值以上之情形時,判定為上述標記存在。In another aspect of the invention, there is provided a method for determining whether a mark of a layer of a metal and a transparent substrate is present, wherein the layer of the metal and the transparent substrate has a mark, and the transparent layer is separated by a photographing means The substrate is photographed with the above-mentioned marks, and for the image obtained by the above-described photographing, each observation point is measured along the direction crossing the observed mark. Observing the position-brightness curve of the brightness; the difference between the top average Bt and the bottom average Bb of the brightness curve generated from the end of the mark to the portion without the mark is set to ΔB (ΔB= Bt-Bb), in the above-mentioned observation point-brightness graph, the value indicating the position of the intersection of the brightness curve and Bt closest to the above-mentioned mark is set to t1, which will be expressed at the intersection of the self-luminance curve and Bt. When the value of the position closest to the intersection of the above marks in the intersection of the luminance curve and 0.1 ΔB is t2 in the depth range from 0.1 ΔB to Bt, the Sv defined by the following formula (1) becomes When the value is equal to or greater than the specific value, it is determined that the above-mentioned flag exists.
Sv=(△B×0.1)/(t1-t2) (1)Sv=(△B×0.1)/(t1-t2) (1)
本發明於又一態樣中係一種判定金屬與透明基材之積層體所具有之標記是否存在之方法,該方法係上述金屬與透明基材之積層體具有標記,利用攝影手段隔著上述透明基材拍攝上述標記,對於藉由上述拍攝而獲得之圖像,沿著橫穿所觀察到之上述標記之方向測定每個觀察地點之亮度而製作觀察地點-亮度曲線圖;使用△B(△B=Bt-Bb)及Sv,於△B及Sv成為特定值以上之情形時,判定為上述標記存在,上述△B(△B=Bt-Bb)係自上述標記之端部起至無上述標記之部分產生之亮度曲線之頂部平均值Bt與底部平均值Bb之差,上述Sv係於在上述觀察地點-亮度曲線圖中,將表示亮度曲線與Bt之交點中最接近於上述標記之交點之位置之值設為t1,將表示於自亮度曲線與Bt之交點至以Bt為基準0.1△B為止之深度範圍內,亮度曲線與0.1△B之交點中最接近於上述標記之交點之位置之值設為t2時,由下述(1)式進行定義。In another aspect of the invention, there is provided a method for determining whether a mark of a layer of a metal and a transparent substrate is present, wherein the layer of the metal and the transparent substrate has a mark, and the transparent layer is separated by a photographing means The substrate is photographed with the above-mentioned mark, and for the image obtained by the above-mentioned photographing, the observation point-brightness curve is prepared by measuring the brightness of each observation point in the direction across the observed mark; using ΔB (Δ) B=Bt-Bb) and Sv, when ΔB and Sv are equal to or greater than a specific value, it is determined that the mark exists, and the ΔB (ΔB=Bt-Bb) is from the end of the mark to the absence of the above The difference between the top average value Bt of the brightness curve generated by the portion of the mark and the bottom average value Bb, wherein the Sv is in the above-mentioned observation point-brightness graph, and will represent the intersection of the brightness curve and the Bt closest to the above mark. The value of the position is set to t1, which is expressed in the depth range from the intersection of the brightness curve and Bt to the range of 0.1 ΔB based on Bt, and the position of the intersection of the brightness curve and 0.1 ΔB closest to the intersection of the above marks. Value setting When it is t2, it is defined by the following formula (1).
Sv=(△B×0.1)/(t1-t2) (1)Sv=(△B×0.1)/(t1-t2) (1)
本發明於又一態樣中係一種檢測方法,該方法係檢測金屬與透明基材之積層體所具有之標記之位置者,上述金屬與透明基材之積層體具有標記,利用攝影手段隔著上述透明基材拍攝上述標記,對於藉由上述拍攝而獲得之圖像,沿著橫穿所觀察到之上述標記之方向測定每個觀察地 點之亮度而製作觀察地點-亮度曲線圖;於將自上述標記之端部起至無上述標記之部分產生之亮度曲線之頂部平均值Bt與底部平均值Bb之差設為△B(△B=Bt-Bb),於在上述觀察地點-亮度曲線圖中,將表示亮度曲線與Bt之交點中最接近於上述標記之交點之位置之值設為t1,將表示於自亮度曲線與Bt之交點至以Bt為基準0.1△B為止之深度範圍內,亮度曲線與0.1△B之交點中最接近於上述標記之交點之位置之值設為t2時,由下述(1)式定義之Sv成為特定值以上之情形時,基於測定出上述Sv之位置檢測上述標記之位置。In another aspect, the present invention is a detection method for detecting a position of a mark of a metal and a transparent substrate, wherein the laminated body of the metal and the transparent substrate has a mark and is separated by a photographic means. The transparent substrate captures the mark, and for each image obtained by the above-mentioned photographing, each observation is measured along a direction crossing the observed mark The observation point-brightness curve is produced by the brightness of the dots; the difference between the top average value Bt and the bottom average value Bb of the luminance curve generated from the end portion of the mark to the portion without the above mark is set to ΔB (ΔB) =Bt-Bb), in the above-mentioned observation point-brightness graph, the value indicating the position of the intersection of the brightness curve and Bt closest to the above-mentioned mark is set to t1, which will be expressed in the self-luminance curve and Bt When the intersection point is in the depth range from 0.1 ΔB based on Bt, and the value of the position closest to the intersection of the above marks among the intersections of the luminance curve and 0.1 ΔB is t2, the Sv defined by the following formula (1) When the value is equal to or greater than the specific value, the position of the mark is detected based on the position at which the Sv is measured.
Sv=(△B×0.1)/(t1-t2) (1)Sv=(△B×0.1)/(t1-t2) (1)
本發明於又一態樣中係一種檢測方法,該方法係檢測金屬與透明基材之積層體所具有之標記之位置者,上述金屬與透明基材之積層體具有標記,利用攝影手段隔著上述透明基材拍攝上述標記,對於藉由上述拍攝而獲得之圖像,沿著橫穿所觀察到之上述標記之方向測定每個觀察地點之亮度而製作觀察地點-亮度曲線圖;使用△B(△B=Bt-Bb)及Sv,於△B及Sv成為特定值以上之情形時,基於測定出上述Sv之位置檢測上述標記之位置,上述△B(△B=Bt-Bb)係自上述標記之端部起至無上述標記之部分產生之亮度曲線之頂部平均值Bt與底部平均值Bb之差,上述Sv係於在上述觀察地點-亮度曲線圖中,將表示亮度曲線與Bt之交點中最接近於上述標記之交點之位置之值設為t1,將表示於自亮度曲線與Bt之交點至以Bt為基準0.1△B為止之深度範圍內,亮度曲線與0.1△B之交點中最接近於上述標記之交點之位置之值設為t2時,由下述(1)式進行定義。In another aspect, the present invention is a detection method for detecting a position of a mark of a metal and a transparent substrate, wherein the laminated body of the metal and the transparent substrate has a mark and is separated by a photographic means. The transparent substrate captures the mark, and for the image obtained by the above-mentioned photographing, the brightness of each observation point is measured along the direction of the observed mark to create an observation point-luminance curve; using ΔB (ΔB=Bt-Bb) and Sv, when ΔB and Sv are equal to or greater than a specific value, the position of the mark is detected based on the position at which the Sv is measured, and the ΔB (ΔB=Bt-Bb) is The difference between the top mean value Bt and the bottom mean value Bb of the brightness curve generated by the end portion of the mark from the portion not marked, the Sv is expressed in the above-mentioned observation point-brightness graph, and the brightness curve and Bt are indicated. The value of the position of the intersection point closest to the intersection of the above marks is set to t1, which is expressed in the depth range from the intersection of the brightness curve and Bt to the range of 0.1 ΔB based on Bt, and the intersection of the brightness curve and 0.1 ΔB. Closest to The position of the intersection point of the value of said set of labeled t2, a defined by the following formula (1).
Sv=(△B×0.1)/(t1-t2) (1)Sv=(△B×0.1)/(t1-t2) (1)
根據本發明,可高效率且準確地評價金屬材料之表面狀態。According to the present invention, the surface state of the metal material can be evaluated with high efficiency and accuracy.
10‧‧‧銅箔之表面狀態之評價裝置10‧‧‧Evaluation device for the surface state of copper foil
11‧‧‧攝影手段11‧‧‧Photography
12‧‧‧電腦(觀察地點-亮度曲線圖製作手段、銅箔之表面狀態評價手段、平滑化處理手段)12‧‧‧Computer (observation location - means for producing brightness curve, means for evaluating surface state of copper foil, smoothing means)
13‧‧‧顯示手段13‧‧‧ Display means
14‧‧‧照明手段14‧‧‧Lighting means
15‧‧‧平台15‧‧‧ platform
16‧‧‧標記16‧‧‧ mark
17‧‧‧透明基材17‧‧‧Transparent substrate
20‧‧‧積層體之定位裝置20‧‧‧Layer-positioning device
21‧‧‧攝影手段21‧‧‧Photography
22‧‧‧電腦(觀察地點-亮度曲線圖製作手段、定位手段、平滑化處理手段)22‧‧‧Computer (observation location - means of brightness curve creation, positioning means, smoothing means)
23‧‧‧顯示手段23‧‧‧ Display means
24‧‧‧照明手段24‧‧‧Lighting means
25‧‧‧平台25‧‧‧ platform
26‧‧‧標記26‧‧‧ mark
27‧‧‧積層體27‧‧‧Layer
圖1係本發明之實施形態之銅箔之表面狀態之評價裝置之模式圖。Fig. 1 is a schematic view showing an apparatus for evaluating the surface state of a copper foil according to an embodiment of the present invention.
圖2係本發明之實施形態之銅箔之表面狀態之評價方法之流程圖。Fig. 2 is a flow chart showing a method of evaluating the surface state of the copper foil according to the embodiment of the present invention.
圖3係定義標記寬度約為1.3mm之情形時之Bt及Bb之模式圖。Fig. 3 is a schematic view showing Bt and Bb when the mark width is about 1.3 mm.
圖4係定義標記寬度約為0.3mm之情形時之Bt及Bb之模式圖。Fig. 4 is a schematic view showing Bt and Bb when the mark width is about 0.3 mm.
圖5係定義k1及k2之模式圖。Figure 5 is a schematic diagram defining k1 and k2.
圖6係表示標記寬度為0.1~0.4mm之情形時之亮度曲線之斜率評價時的攝影手段之構成及亮度曲線之斜率之測定方法的模式圖。Fig. 6 is a schematic view showing a method of measuring the configuration of the photographing means and the method of measuring the slope of the luminance curve when evaluating the slope of the luminance curve when the mark width is 0.1 to 0.4 mm.
圖7係表示標記寬度為1.0~2.0mm之情形時之亮度曲線之斜率評價時的攝影手段之構成及亮度曲線之斜率之測定方法的模式圖。Fig. 7 is a schematic view showing a method of measuring the configuration of the imaging means and the slope of the luminance curve when evaluating the slope of the luminance curve when the mark width is 1.0 to 2.0 mm.
圖8係本發明之實施形態之透明基材之視認性評價方法之流程圖。Fig. 8 is a flow chart showing a method for evaluating the visibility of a transparent substrate according to an embodiment of the present invention.
圖9係本發明之實施形態之積層體之定位裝置之模式圖。Fig. 9 is a schematic view showing a positioning device for a laminated body according to an embodiment of the present invention.
圖10係本發明之實施形態之積層體之定位方法之流程圖。Fig. 10 is a flow chart showing a method of positioning a laminated body according to an embodiment of the present invention.
使用圖對本發明之金屬材料之表面狀態之評價裝置、金屬材料之表面狀態之評價方法、金屬材料之表面狀態之評價程式及記錄媒體詳細地進行說明。關於本發明中成為評價對象之金屬材料,可列舉金屬箔、金屬板、金屬條。The apparatus for evaluating the surface state of the metal material of the present invention, the method for evaluating the surface state of the metal material, the evaluation program for the surface state of the metal material, and the recording medium will be described in detail using the drawings. The metal material to be evaluated in the present invention includes a metal foil, a metal plate, and a metal strip.
又,作為金屬箔、金屬板、金屬條,例如可列舉銅箔、銅板、銅條、鋁箔、鋁板、鋁條、鋁合金箔、鋁合金板、鋁合金條、鎳箔、鎳板、鎳條、鎳合金箔、鎳合金板、鎳合金條、鋅箔、鋅板、鋅條、鋅合金箔、鋅合金板、鋅合金條、鐵箔、鐵板、鐵條、鐵合金箔、鐵合金板、鐵合金條、不鏽鋼箔、不鏽鋼板、不鏽鋼條、軟鋼箔、軟鋼板、軟鋼條、Fe-Ni合金箔、 Fe-Ni合金板、Fe-Ni合金條或鎳銀箔、鎳銀板、鎳銀條等。Moreover, examples of the metal foil, the metal plate, and the metal strip include copper foil, copper plate, copper bar, aluminum foil, aluminum plate, aluminum strip, aluminum alloy foil, aluminum alloy plate, aluminum alloy strip, nickel foil, nickel plate, and nickel strip. , nickel alloy foil, nickel alloy plate, nickel alloy strip, zinc foil, zinc plate, zinc strip, zinc alloy foil, zinc alloy plate, zinc alloy strip, iron foil, iron plate, iron bar, iron alloy foil, iron alloy plate, ferroalloy Strip, stainless steel foil, stainless steel sheet, stainless steel strip, mild steel foil, soft steel sheet, mild steel strip, Fe-Ni alloy foil, Fe-Ni alloy sheet, Fe-Ni alloy strip or nickel silver foil, nickel silver plate, nickel silver strip, and the like.
作為鋁箔、鋁板、鋁條,具體而言,可列舉JIS H4000中記載之以合金編號1085、1080、1070、1050、1100、1200、1N00、1N30為代表之Al:99.00質量%以上之鋁箔、鋁板、鋁條等。Specific examples of the aluminum foil, the aluminum plate, and the aluminum strip are aluminum foils and aluminum sheets represented by the alloy numbers 1085, 1080, 1070, 1050, 1100, 1200, 1N00, and 1N30 as described in JIS H4000: 99.00% by mass or more. , aluminum strips, etc.
作為鎳箔、鎳板、鎳條,具體而言,可列舉JIS H4551中記載之以合金編號NW2200、NW2201為代表之Ni:99.0質量%以上之鎳(Ni)箔、鎳板、鎳條等。Specific examples of the nickel foil, the nickel plate, and the nickel strip are Ni (Ni) foil, nickel plate, nickel strip, etc., which are represented by the alloy numbers NW2200 and NW2201, and Ni: 99.0 mass% or more.
作為不鏽鋼箔、不鏽鋼板、不鏽鋼條,可列舉由SUS301、SUS304、SUS316、SUS430、SUS631(均為JIS規格)中之任一者所構成之不鏽鋼箔、不鏽鋼板、不鏽鋼條等。Examples of the stainless steel foil, the stainless steel sheet, and the stainless steel strip include a stainless steel foil, a stainless steel sheet, a stainless steel strip, and the like which are composed of any of SUS301, SUS304, SUS316, SUS430, and SUS631 (both JIS specifications).
作為軟鋼箔、軟鋼板、軟鋼條,可列舉碳為0.15質量%以下之軟鋼等。又,可列舉JIS G3141中記載之由鋼板製造之軟鋼箔、軟鋼板、軟鋼條等。Examples of the soft steel foil, the soft steel sheet, and the soft steel strip include mild steel having a carbon content of 0.15% by mass or less. Further, a soft steel foil, a soft steel plate, a mild steel bar or the like which is produced from a steel sheet described in JIS G3141 can be cited.
作為Fe-Ni合金箔、Fe-Ni合金板、Fe-Ni合金條,可列舉含有35~85質量%之Ni,剩餘部分係由Fe及不可避免之雜質所構成,具體而言為JIS C2531中記載之由Fe-Ni合金製造之Fe-Ni合金箔、Fe-Ni合金板、Fe-Ni合金條等。Examples of the Fe-Ni alloy foil, the Fe-Ni alloy sheet, and the Fe-Ni alloy strip include 35 to 85% by mass of Ni, and the remainder is composed of Fe and unavoidable impurities, specifically, JIS C2531. An Fe-Ni alloy foil, an Fe-Ni alloy sheet, an Fe-Ni alloy strip, or the like, which is produced from an Fe-Ni alloy, is described.
作為銅箔、銅板、銅條,可列舉電解銅箔、電解銅板、電解銅條或軋壓銅箔、軋壓銅板、軋壓銅條、藉由蒸鍍等乾式鍍敷而製造之銅箔、銅板、銅條等。軋壓銅箔、軋壓銅板、軋壓銅條中亦包含含有一種以上之Ag、Sn、In、Ti、Zn、Zr、Fe、P、Ni、Si、Te、Cr、Nb、V、B、Co等元素之銅合金箔、銅合金板、銅合金條。存在若該等元素之濃度升高(例如合計為10質量%以上)則導電率下降之情形。軋壓銅箔、軋壓銅板、軋壓銅條之導電率為例如50%IACS以上、例如60%IACS以上、例如80%IACS以上。又,於軋壓銅箔中亦包含使用精銅(JIS H3100 C1100)或無氧銅(JIS H3100 C1020)而製造之銅箔、銅板、銅條等。Examples of the copper foil, the copper plate, and the copper strip include an electrolytic copper foil, an electrolytic copper plate, an electrolytic copper strip or a rolled copper foil, a rolled copper plate, a rolled copper strip, a copper foil produced by dry plating such as vapor deposition, or the like. Copper plate, copper strip, etc. The rolled copper foil, the rolled copper plate, and the rolled copper strip also contain more than one type of Ag, Sn, In, Ti, Zn, Zr, Fe, P, Ni, Si, Te, Cr, Nb, V, B, Copper alloy foil, copper alloy plate, and copper alloy strip of elements such as Co. When the concentration of the elements is increased (for example, the total amount is 10% by mass or more), the electrical conductivity is lowered. The electrical conductivity of the rolled copper foil, the rolled copper plate, and the rolled copper strip is, for example, 50% IACS or more, for example, 60% IACS or more, for example, 80% IACS or more. Further, a copper foil, a copper plate, a copper strip, or the like produced by using copper (JIS H3100 C1100) or oxygen-free copper (JIS H3100 C1020) is also included in the rolled copper foil.
本發明中成為評價對象之金屬材料亦可並非金屬箔、金屬板、金屬條。本發明中成為評價對象之金屬材料之厚度、寬度、大小並無特別限定,可為任何厚度、寬度、大小之金屬材料。例如,金屬材料之厚度亦可為1μm~1m。本發明中將厚度為300μm以下之金屬材料作為金屬箔,將厚度大於300μm之金屬材料作為金屬板。又,本發明中所謂金屬條係指具有一定程度之長度之金屬箔或金屬條。例如,本發明中金屬條之長度係具有例如200mm以上之長度、或500mm以上之長度。The metal material to be evaluated in the present invention may not be a metal foil, a metal plate, or a metal strip. The thickness, width, and size of the metal material to be evaluated in the present invention are not particularly limited, and may be any metal material having a thickness, a width, and a size. For example, the thickness of the metal material may be 1 μm to 1 m. In the present invention, a metal material having a thickness of 300 μm or less is used as a metal foil, and a metal material having a thickness of more than 300 μm is used as a metal plate. Further, the term "metal strip" as used in the present invention means a metal foil or a metal strip having a certain length. For example, in the present invention, the length of the metal strip has a length of, for example, 200 mm or more, or a length of 500 mm or more.
於本實施形態中,以使用銅箔作為評價對象之金屬材料之情形為例進行列舉,以下,對銅箔之表面狀態之評價裝置、銅箔之表面狀態之評價方法、銅箔之表面狀態之評價程式及記錄媒體詳細地進行說明。In the present embodiment, a case where a copper foil is used as a metal material to be evaluated is exemplified. Hereinafter, an evaluation device for the surface state of the copper foil, a method for evaluating the surface state of the copper foil, and a surface state of the copper foil are used. The evaluation program and the recording medium are explained in detail.
(銅箔之表面狀態之評價裝置、銅箔之表面狀態之評價方法、銅箔之表面狀態之評價程式及記錄媒體)(Evaluation device for surface state of copper foil, evaluation method of surface state of copper foil, evaluation program of surface state of copper foil, and recording medium)
圖1係本發明之實施形態之銅箔之表面狀態之評價裝置10之模式圖。本發明之實施形態之銅箔之表面狀態之評價裝置10具備:攝影手段11,其隔著透明基材17拍攝存在於設置在平台15上之透明基材17之下方之標記16;電腦12,其基於來自攝影手段11之圖像訊號進行各種處理;顯示手段13,其基於來自電腦12之各種訊號顯示特定之圖像等;及照明手段14,其對平台上之透明基材17及標記16照射光。透明基材17並無特別限定,只要為透明,則亦可為玻璃製或聚醯亞胺等樹脂製基材。再者,本發明中所謂透明亦包括具有透光性。Fig. 1 is a schematic view showing an apparatus 10 for evaluating the surface state of a copper foil according to an embodiment of the present invention. The apparatus 10 for evaluating the surface state of the copper foil according to the embodiment of the present invention includes: the photographing means 11 for photographing the mark 16 existing under the transparent substrate 17 provided on the stage 15 via the transparent substrate 17, and the computer 12, It performs various processing based on the image signal from the photographing means 11; the display means 13 displays a specific image based on various signals from the computer 12, and the illumination means 14, which are transparent substrates 17 and marks 16 on the platform. Irradiation light. The transparent substrate 17 is not particularly limited, and may be a resin substrate such as glass or polyimide. Further, the term "transparent" as used in the present invention also includes light transmissivity.
再者,本發明中之標記亦可為印刷至紙等印刷物之記號,只要為成為標記之記號,則可為任何形態。又,標記亦可為藉由蝕刻而成形之金屬材料之一部分。具體而言,例如,於金屬材料為銅箔之情形時,亦可為藉由蝕刻而形成之銅配線。又,所謂標記既可為印刷物,亦可為金屬,既可為無機物,亦可為有機物,只要為成為標記者即可。進而,標記亦可 為印刷配線板之電路及/或零件。標記若為線狀,則容易對於藉由拍攝而獲得之圖像,沿著橫穿所觀察到之標記之方向測定每個觀察地點之亮度而製作觀察地點-亮度曲線圖,從而較佳。又,線狀之標記例如可藉由以下方式而設置:於將銅箔與透明基材17貼合之後,藉由蝕刻使該銅箔成為線狀。Further, the mark in the present invention may be a mark printed on a printed matter such as paper, and may be in any form as long as it is a mark to be marked. Further, the mark may be a part of a metal material formed by etching. Specifically, for example, when the metal material is a copper foil, it may be a copper wiring formed by etching. Further, the mark may be a printed matter or a metal, and may be an inorganic substance or an organic substance as long as it is a mark. Furthermore, the mark can also It is a circuit and/or a part of a printed wiring board. If the mark is linear, it is easy to produce an observation point-luminance curve by measuring the brightness of each observation point in the direction across the observed mark for the image obtained by photographing, which is preferable. Further, the linear mark can be provided, for example, by bonding the copper foil to the transparent substrate 17, and then etching the copper foil into a linear shape.
可撓性印刷配線板(FPC)雖被實施朝液晶基材之接合或IC晶片之搭載等加工,但此時之位置對準係經由透過對覆銅積層板之銅箔進行蝕刻之後殘留之樹脂絕緣層而視認之定位圖案而進行,因此,樹脂絕緣層之視認性變得重要。而且,必須進行對此種樹脂絕緣層之視認性產生影響之銅箔之表面狀態之評價。為了進行此種樹脂絕緣層之高效率且準確之視認性評價及銅箔之表面狀態之評價,透明基材係於將銅箔貼合於透明基材之至少一表面之後藉由蝕刻去除上述銅箔之至少一部分而製作。再者,透明基材亦可於將銅箔貼合於透明基材之至少一表面之後,藉由蝕刻去除上述銅箔之全部而製作。又,於銅箔為表面處理銅箔之情形時係於將至少一表面經粗化處理等表面處理之表面處理銅箔自經粗化處理等表面處理之表面側貼合於透明基材之至少一表面之後,藉由蝕刻去除上述銅箔之至少一部分而製作。再者,透明基材亦可於將上述銅箔貼合於透明基材之至少一表面之後,藉由蝕刻去除上述銅箔之全部而製作。此處,透明基材之厚度較佳為10~1000μm、15~500μm、20~300μm、25~70μm、25~50μm。The flexible printed wiring board (FPC) is processed by bonding to a liquid crystal substrate or mounting of an IC chip, but the positional alignment at this time is a resin remaining after being etched through the copper foil that has passed through the copper clad laminate. Since the insulating layer is formed by visually recognizing the positioning pattern, the visibility of the resin insulating layer becomes important. Further, it is necessary to evaluate the surface state of the copper foil which affects the visibility of the resin insulating layer. In order to perform high-efficiency and accurate visual evaluation of the resin insulating layer and evaluation of the surface state of the copper foil, the transparent substrate is obtained by etching the copper foil after bonding the copper foil to at least one surface of the transparent substrate. Made from at least a portion of the foil. Further, the transparent substrate may be formed by bonding the copper foil to at least one surface of the transparent substrate and then removing all of the copper foil by etching. Further, in the case where the copper foil is a surface-treated copper foil, the surface-treated copper foil obtained by subjecting at least one surface to a surface treatment such as roughening treatment is bonded to the transparent substrate from at least the surface side of the surface treatment such as roughening treatment. After a surface, it is produced by etching at least a part of the copper foil. Further, the transparent substrate may be formed by bonding the copper foil to at least one surface of the transparent substrate and then removing all of the copper foil by etching. Here, the thickness of the transparent substrate is preferably 10 to 1000 μm, 15 to 500 μm, 20 to 300 μm, 25 to 70 μm, and 25 to 50 μm.
攝影手段11具備攝像元件、由輸入攝像元件之輸出之圖像處理電路等構成之圖像處理部、由控制圖像處理部等之控制電路等構成之控制部、及由透鏡等構成之光學系統等。作為攝影手段11,例如可使用CCD相機等。攝影手段11隔著透明基材17拍攝存在於設置在平台15上之透明基材17之下方之標記16而取得圖像。The imaging device 11 includes an image processing unit including an image pickup device, an image processing circuit that outputs an image pickup device, and a control unit including a control circuit such as a control image processing unit, and an optical system including a lens or the like. Wait. As the photographing means 11, for example, a CCD camera or the like can be used. The photographing means 11 takes an image of the mark 16 existing under the transparent substrate 17 provided on the stage 15 via the transparent substrate 17 to obtain an image.
電腦12基於來自攝影手段11之圖像訊號進行各種處理。電 腦12具備:觀察地點-亮度曲線圖製作手段,其對於來自攝影手段11之圖像訊號,沿著橫穿所觀察到之標記16之方向測定每個觀察地點之亮度而製作觀察地點-亮度曲線圖;及銅箔表面狀態評價手段,其於觀察地點-亮度曲線圖中,根據自標記16之端部起至無標記16之部分產生之亮度曲線之斜率評價透明基材17之視認性,並基於該視認性之評價結果評價銅箔之表面狀態。The computer 12 performs various processes based on the image signals from the photographing means 11. Electricity The brain 12 is provided with an observation point-luminance curve creation means for making an observation point-luminance curve by measuring the brightness of each observation point in a direction crossing the observed mark 16 with respect to the image signal from the photographing means 11. And a copper foil surface state evaluation means for evaluating the visibility of the transparent substrate 17 based on the slope of the luminance curve generated from the end portion of the mark 16 to the portion without the mark 16 in the observation point-luminance curve, and The surface state of the copper foil was evaluated based on the evaluation result of the visibility.
再者,於本發明中,「橫穿標記之方向」亦可為與標記延伸之方向交叉之方向。又,觀察地點-亮度曲線圖亦可沿著與所觀察到之上述標記延伸之方向垂直之方向測定每個觀察地點之亮度而製作。於觀察地點-亮度曲線圖係沿著與所觀察到之上述標記延伸之方向垂直之方向測定每個觀察地點之亮度而製作之情形時,自存在標記之部分至不存在標記之部分之亮度之值更急遽地變化,因此,可更良好地評價銅箔之表面狀態。此處,所謂標記延伸之方向係指於標記為直線狀之情形時與該直線狀之標記大致平行或平行之方向。又,所謂標記延伸之方向係指於標記並非直線狀之情形時,於畫有與標記之外緣相切之直線之情形時,與該直線大致平行或平行之方向。Furthermore, in the present invention, the "direction across the mark" may be a direction crossing the direction in which the mark extends. Further, the observation point-luminance curve can also be produced by measuring the brightness of each observation point in a direction perpendicular to the direction in which the observed mark extends. In the case where the observation point-luminance curve is produced by measuring the brightness of each observation point in a direction perpendicular to the direction in which the above-mentioned mark is extended, the brightness from the portion where the mark exists to the portion where the mark does not exist The value changes more violently, and therefore, the surface state of the copper foil can be evaluated more satisfactorily. Here, the direction in which the mark extends is a direction substantially parallel or parallel to the linear mark when the mark is linear. Further, the direction in which the mark is extended refers to a direction substantially parallel or parallel to the straight line when the mark is not linear, when a straight line tangential to the outer edge of the mark is drawn.
電腦12亦可進而具備平滑化處理手段,該平滑化處理手段對於藉由利用攝影手段11之拍攝而獲得之圖像使亮度不均緩和,觀察地點-亮度曲線圖製作手段使用平滑化處理後之亮度製作觀察地點-亮度曲線圖。Further, the computer 12 may further include a smoothing processing means for alleviating luminance unevenness with respect to an image obtained by imaging by the photographing means 11, and the observation point-luminance graph generating means using smoothing processing Brightness production observation point - brightness curve.
又,亦可為存在於透明基材17之下方之標記16係印刷至鋪設於透明基材17之下方之印刷物之線狀之標記16,觀察地點-亮度曲線圖製作手段對於藉由拍攝而獲得之圖像,沿著橫穿所觀察到之線狀之標記16之方向測定每個觀察地點之亮度而製作觀察地點-亮度曲線圖。Further, the mark 16 existing under the transparent substrate 17 may be printed on the linear mark 16 of the printed matter laid under the transparent substrate 17, and the observation point-brightness curve drawing means is obtained by photographing. The image is measured by measuring the brightness of each observation point in a direction transverse to the observed line-like mark 16 to produce an observation point-luminance curve.
電腦12具備作為記憶手段之記憶體。於該記憶體中分別以電腦可讀取之方式記錄(所謂保存)有經數位化之來自攝影手段11之圖像、觀察地點-亮度曲線圖製作式、視認性評價式、銅箔之表面狀態之評價式、 及各階段中之評價值等。The computer 12 has a memory as a means of memory. Recorded in the memory in a computer-readable manner (so-called storage), the image obtained from the photographing means 11 by digitization, the observation point-brightness curve pattern creation formula, the visibility evaluation formula, and the surface state of the copper foil Evaluation formula, And evaluation values in each stage, etc.
顯示手段13基於來自電腦12之各種訊號顯示觀察地點-亮度曲線圖、視認性評價結果、銅箔之表面狀態之評價結果等特定之圖像或數值等。The display means 13 displays a specific image or numerical value such as an observation point-luminance curve, a visibility evaluation result, and an evaluation result of the surface state of the copper foil based on various signals from the computer 12.
其次,參照圖2所示之流程圖,對使用有上述實施形態之銅箔之表面狀態之評價裝置10的銅箔之表面狀態之評價方法進行說明。再者,圖2所示之流程圖係使用有本發明之銅箔之表面狀態之評價裝置10的銅箔之表面狀態之評價方法之一實施形態,能以本發明之銅箔之表面狀態之評價裝置10實現之評價方法並不限定於圖2之流程圖中所示者。尤其是,平滑化處理於圖2中係於製作觀察地點-亮度曲線圖之前對藉由拍攝而獲得之圖像進行,但並不限定於此,例如,亦可於製作觀察地點-亮度曲線圖之後進行。Next, a method of evaluating the surface state of the copper foil using the evaluation apparatus 10 of the surface state of the copper foil of the above-described embodiment will be described with reference to the flowchart shown in FIG. In addition, the flow chart shown in FIG. 2 is an embodiment in which the surface state of the copper foil of the evaluation apparatus 10 of the surface state of the copper foil of the present invention is used, and the surface state of the copper foil of the present invention can be used. The evaluation method implemented by the evaluation device 10 is not limited to that shown in the flowchart of FIG. 2. In particular, the smoothing process is performed on the image obtained by photographing before the observation point-brightness graph is produced in FIG. 2, but is not limited thereto. For example, the observation point-brightness graph can also be produced. After that.
於使用銅箔之表面狀態之評價裝置10的銅箔之表面狀態之評價方法中,首先,準備於將銅箔貼合於透明基材之至少一表面之後,藉由蝕刻去除上述銅箔之至少一部分而製作成之透明基材17。再者,亦可準備藉由上述蝕刻去除上述銅箔之全部而製作成之透明基材17。又,於銅箔為表面處理銅箔之情形時,準備於將至少一表面經粗化處理等表面處理之表面處理銅箔自經粗化處理等表面處理之表面側貼合於透明基材之至少一表面之後,藉由蝕刻去除上述銅箔之至少一部分而製作成之透明基材17。再者,亦可準備藉由上述蝕刻去除上述銅箔之全部而製作成之透明基材17。其次,藉由攝影手段11隔著透明基材17拍攝存在於透明基材17之下方之標記16。由攝影手段11拍攝之圖像之訊號被送向電腦12。電腦12之觀察地點-亮度曲線圖製作手段對於來自攝影手段11之圖像訊號,沿著橫穿所觀察到之標記16之方向測定每個觀察地點之亮度而製作觀察地點-亮度曲線圖。電腦12之銅箔之表面狀態評價手段於該觀察地點-亮度曲線圖中,根據 自標記16之端部起至無標記16之部分產生之亮度曲線之斜率評價透明基材17之視認性,並基於該視認性之評價結果對貼合於透明基材17之銅箔之表面狀態進行評價。先前,若不於生產線上實際製作,則無法判斷是否可隔著透明基材視認為了進行位置對準等而設置之標記,於製造成本方面存在問題。然而,若使用本發明之銅箔之表面狀態之評價裝置10,則藉由上述構成,即便僅於實驗室中亦可容易且高效率地準確評價透明基材17之視認性,藉此,可高效率且準確地進行銅箔之表面狀態之評價。例如,可將透明基材17之視認性之評價結果為良好之情形直接評價為銅箔之表面狀態良好。In the method for evaluating the surface state of the copper foil of the evaluation device 10 using the surface state of the copper foil, first, after the copper foil is bonded to at least one surface of the transparent substrate, at least the copper foil is removed by etching. A part of the transparent substrate 17 is produced. Further, a transparent substrate 17 which is formed by removing all of the copper foil by the above etching may be prepared. In the case where the copper foil is a surface-treated copper foil, the surface-treated copper foil prepared by subjecting at least one surface to a surface treatment such as roughening treatment is attached to the transparent substrate from the surface side of the surface treatment such as roughening treatment. After at least one surface, the transparent substrate 17 is formed by etching to remove at least a portion of the copper foil. Further, a transparent substrate 17 which is formed by removing all of the copper foil by the above etching may be prepared. Next, the mark 16 existing under the transparent substrate 17 is imaged by the photographing means 11 via the transparent substrate 17. The signal of the image taken by the photographing means 11 is sent to the computer 12. Observation Point of the Computer 12 - Luminance Profile Creation means For the image signal from the photographing means 11, the brightness of each observation point is measured along the direction across the observed mark 16 to create an observation point-luminance curve. The surface state evaluation means of the copper foil of the computer 12 is in the observation point-luminance curve diagram, according to The slope of the luminance curve generated from the end portion of the mark 16 to the portion without the mark 16 evaluates the visibility of the transparent substrate 17, and based on the evaluation result of the visibility, the surface state of the copper foil bonded to the transparent substrate 17 Conduct an evaluation. In the past, if it was not actually produced on the production line, it was impossible to determine whether or not the mark which is considered to be placed in alignment with the transparent substrate was considered to have a problem in terms of manufacturing cost. However, according to the above configuration, the visibility of the transparent substrate 17 can be easily and efficiently evaluated in the laboratory, and the visibility of the transparent substrate 17 can be easily and efficiently evaluated. The surface state of the copper foil was evaluated efficiently and accurately. For example, the evaluation result of the visibility of the transparent substrate 17 can be directly evaluated as a good surface condition of the copper foil.
電腦12之銅箔之表面狀態評價手段將自標記16之端部起至無標記16之部分產生之亮度曲線之頂部平均值Bt與底部平均值Bb之差設為△B(△B=Bt-Bb),並使用Sv進行視認性之評價,並使用該評價結果進行銅箔之表面狀態之評價,上述Sv係於在觀察地點-亮度曲線圖中,將表示亮度曲線與Bt之交點中最接近於標記16之交點之位置之值(上述觀察地點-亮度曲線圖之橫軸之值)設為t1,將表示於自亮度曲線與Bt之交點至以Bt為基準0.1△B為止之深度範圍內,亮度曲線與0.1△B之交點中最接近於標記之交點之位置之值(上述觀察地點-亮度曲線圖之橫軸之值)設為t2時,由下述(1)式進行定義。The surface state evaluation means of the copper foil of the computer 12 sets the difference between the top average value Bt and the bottom average value Bb of the luminance curve generated from the end portion of the mark 16 to the portion without the mark 16 as ΔB (ΔB = Bt - Bb), and the evaluation of the visibility is performed using Sv, and the surface state of the copper foil is evaluated using the evaluation result, and the Sv is the closest to the intersection of the brightness curve and the Bt in the observation point-luminance curve. The value at the position of the intersection of the marks 16 (the value of the above-mentioned observation point - the horizontal axis of the luminance graph) is set to t1, and is expressed in the depth range from the intersection of the luminance curve and Bt to the reference of 0.1 ΔB from Bt. When the value of the position of the intersection of the brightness curve and 0.1 ΔB closest to the intersection of the mark (the value of the observation point-the horizontal axis of the brightness curve) is t2, it is defined by the following formula (1).
Sv=(△B×0.1)/(t1-t2) (1)Sv=(△B×0.1)/(t1-t2) (1)
先前,若不於生產線上實際製作,則無法判斷是否可隔著透明基材視認為了進行位置對準等而設置之標記,於製造成本方面存在問題。然而,若使用本發明之銅箔之表面狀態之評價裝置10,則藉由上述構成,即便僅於實驗室中亦可容易且高效率地準確評價透明基材17之視認性,藉此,可高效率且準確地進行銅箔之表面狀態之評價。例如,可將透明基材17之視認性之評價結果為良好之情形直接評價為銅箔之表面狀態良好。再者,於 上述觀察地點-亮度曲線圖中,橫軸表示位置資訊(像素×0.1),縱軸表示亮度(灰階)之值。In the past, if it was not actually produced on the production line, it was impossible to determine whether or not the mark which is considered to be placed in alignment with the transparent substrate was considered to have a problem in terms of manufacturing cost. However, according to the above configuration, the visibility of the transparent substrate 17 can be easily and efficiently evaluated in the laboratory, and the visibility of the transparent substrate 17 can be easily and efficiently evaluated. The surface state of the copper foil was evaluated efficiently and accurately. For example, the evaluation result of the visibility of the transparent substrate 17 can be directly evaluated as a good surface condition of the copper foil. Furthermore, In the above observation point-luminance graph, the horizontal axis represents position information (pixel × 0.1), and the vertical axis represents the value of brightness (gray scale).
又,電腦12之銅箔之表面狀態評價手段使用△B(△B=Bt-Bb)及Sv進行透明基材17之視認性之評價,並使用該評價結果進行銅箔之表面狀態之評價,上述△B(△B=Bt-Bb)係自標記16之端部起至無標記16之部分產生之亮度曲線之頂部平均值Bt與底部平均值Bb之差,上述Sv係於在觀察地點-亮度曲線圖中,將表示亮度曲線與Bt之交點中最接近於標記16之交點之位置之值(上述觀察地點-亮度曲線圖之橫軸之值)設為t1,將表示於自亮度曲線與Bt之交點至以Bt為基準0.1△B為止之深度範圍內,亮度曲線與0.1△B之交點中最接近於標記之交點之位置之值(上述觀察地點-亮度曲線圖之橫軸之值)設為t2時,由下述(1)式進行定義。In addition, the surface state evaluation means of the copper foil of the computer 12 evaluates the visibility of the transparent substrate 17 using ΔB (ΔB = Bt - Bb) and Sv, and evaluates the surface state of the copper foil using the evaluation result. The above ΔB (ΔB=Bt-Bb) is the difference between the top average value Bt and the bottom average value Bb of the luminance curve generated from the end portion of the mark 16 to the portion without the mark 16, and the above Sv is at the observation point - In the brightness graph, the value indicating the position of the intersection of the brightness curve and Bt closest to the mark 16 (the value of the above-mentioned observation point - the horizontal axis of the brightness curve) is set to t1, which will be expressed in the self-luminance curve and The value of the position closest to the intersection of the mark in the intersection of the brightness curve and 0.1 ΔB in the depth range from Bt to 0.1 ΔB (the value of the horizontal axis of the above observation point-luminance curve) When it is set to t2, it is defined by the following formula (1).
Sv=(△B×0.1)/(t1-t2) (1)Sv=(△B×0.1)/(t1-t2) (1)
根據此種構成,即便僅於實驗室中亦可容易且高效率地準確評價透明基材17之視認性,藉此,可高效率且準確地進行銅箔之表面狀態之評價。According to this configuration, the visibility of the transparent substrate 17 can be easily and efficiently evaluated in the laboratory, and the surface state of the copper foil can be evaluated efficiently and accurately.
較佳為電腦12進而具備平滑化處理手段,該平滑化處理手段對於藉由利用攝影手段11之拍攝而獲得之圖像,使亮度之不均緩和,觀察地點-亮度曲線圖製作手段使用平滑化處理後之亮度製作觀察地點-亮度曲線圖。對自藉由利用攝影手段11之拍攝而獲得之圖像獲得之亮度之包含雜訊之資料(原波形)進行利用平滑化處理手段之平滑化處理,藉此,該亮度之不均緩和,因此,可更準確地評價透明基材17之視認性,藉此,可高效率且準確地進行銅箔之表面狀態之評價。作為利用平滑化處理手段之平滑化處理,可利用各種平滑化程式進行,例如,可使用藉由2、3次多項式配適法之平滑化處理、藉由傅立葉變換之平滑化處理、或藉由移動平均法之平滑化處理等。再者,平滑化處理亦可使用公知之各種平滑化程式進行。又,亮度資料之平滑化處理既可對有標記16之部分、及無標記16之部 分之兩者進行,亦可對有標記16之部分進行,或亦可對無標記16之部分進行,或亦可局部地進行。Preferably, the computer 12 further includes a smoothing processing means for smoothing the unevenness of the brightness of the image obtained by the imaging by the photographing means 11, and using the smoothing of the observation point-luminance graph creation means The processed brightness is used to create an observation point-brightness curve. The data including the noise (original waveform) obtained by the image obtained by the photographing by the photographing means 11 is smoothed by the smoothing processing means, whereby the unevenness of the brightness is alleviated, The visibility of the transparent substrate 17 can be more accurately evaluated, whereby the surface state of the copper foil can be evaluated with high efficiency and accuracy. As the smoothing processing by the smoothing processing means, various smoothing programs can be used. For example, smoothing processing by a 2nd and 3rd order polynomial matching method, smoothing processing by Fourier transform, or moving can be used. Smoothing of the average method, etc. Furthermore, the smoothing process can also be performed using various known smoothing programs. Moreover, the smoothing processing of the luminance data can be performed on the portion having the mark 16 and the portion having no mark 16 The two parts may be carried out either on the portion having the mark 16 or on the portion having no mark 16, or may be performed locally.
再者,對於藉由利用攝影手段11之拍攝而獲得之圖像,亦可於進行該亮度之平滑化處理之前,預先進行該亮度之包含雜訊之資料(原波形)之觀察地點-亮度曲線圖製作。Further, for the image obtained by the photographing by the photographing means 11, the observation point-luminance curve of the data (original waveform) containing the noise may be performed in advance before the smoothing of the brightness is performed. Figure production.
又,銅箔表面狀態評價手段於在透明基材17之視認性評價中僅基於上述Sv值評價視認性之情形時,亦可將自標記16之端部起至無標記16之部分產生之亮度曲線之頂部平均值Bt與底部平均值Bb之差設為△B(△B=Bt-Bb),於在觀察地點-亮度曲線圖中,將表示亮度曲線與Bt之交點中最接近於標記之交點之位置之值(上述觀察地點-亮度曲線圖之橫軸之值)設為t1,將表示於自亮度曲線與Bt之交點至以Bt為基準0.1△B為止之深度範圍內,亮度曲線與0.1△B之交點中最接近於標記16之交點之位置之值(上述觀察地點-亮度曲線圖之橫軸之值)設為t2時,將Sv成為3.5以上之情形判定為銅箔之表面狀態良好。Further, in the case where the visibility of the transparent substrate 17 is evaluated based on the Sv value alone, the copper foil surface state evaluation means may also produce brightness from the end of the mark 16 to the portion without the mark 16. The difference between the top mean Bt of the curve and the bottom mean Bb is set to ΔB (ΔB=Bt-Bb), which is the closest to the mark in the intersection of the brightness curve and Bt in the observation point-brightness graph. The value of the position of the intersection point (the value of the above observation point - the horizontal axis of the luminance curve) is set to t1, and is expressed in the depth range from the intersection of the luminance curve and Bt to the reference point of 0.1 ΔB from Bt. When the value of the position closest to the intersection of the marks 16 in the intersection of 0.1 ΔB (the value of the horizontal axis of the observation point-luminance graph) is t2, the case where Sv is 3.5 or more is determined as the surface state of the copper foil. good.
進而,銅箔表面狀態評價手段於在透明基材17之視認性評價中基於上述Sv值及△B值評價視認性之情形時,亦可將自標記16之端部起至無標記16之部分產生之亮度曲線之頂部平均值Bt與底部平均值Bb之差△B(△B=Bt-Bb)為40以上,於在觀察地點-亮度曲線圖中,將表示亮度曲線與Bt之交點中最接近於標記之交點之位置之值(上述觀察地點-亮度曲線圖之橫軸之值)設為t1,將表示於自亮度曲線與Bt之交點至以Bt為基準0.1△B為止之深度範圍內,亮度曲線與0.1△B之交點中最接近於標記16之交點之位置之值(上述觀察地點-亮度曲線圖之橫軸之值)設為t2時,Sv成為3.5以上之情形判定為銅箔之表面狀態良好。Further, in the case where the visibility of the transparent substrate 17 is evaluated based on the Sv value and the ΔB value in the visibility evaluation of the transparent substrate 17, the end portion from the mark 16 to the portion without the mark 16 may be used. The difference ΔB (ΔB=Bt-Bb) between the top average Bt and the bottom average Bb of the generated luminance curve is 40 or more, and in the observation point-luminance curve, it will represent the most intersection of the brightness curve and Bt. The value of the position close to the intersection of the mark (the above-mentioned observation point - the value of the horizontal axis of the brightness curve) is set to t1, and will be expressed in the depth range from the intersection of the brightness curve and Bt to the base of 0.1 ΔB based on Bt. When the value of the position of the intersection of the brightness curve and the 0.1 ΔB closest to the intersection of the marks 16 (the value of the horizontal axis of the observation point-luminance curve) is t2, the case where Sv is 3.5 or more is determined as copper foil. The surface is in good condition.
更佳為將Sv成為3.9以上、較佳為4.5以上、較佳為5.0以上、更佳為5.5以上之情形判定為視認性良好、且銅箔之表面狀態良好。又,Sv之上限 無需特別限定,例如為70以下、30以下、15以下、10以下。More preferably, when Sv is 3.9 or more, preferably 4.5 or more, preferably 5.0 or more, and more preferably 5.5 or more, it is judged that the visibility is good and the surface state of the copper foil is good. Again, the upper limit of Sv It is not particularly limited, and is, for example, 70 or less, 30 or less, 15 or less, or 10 or less.
較佳為於△B(△B=Bt-Bb)為50以上之情形時判定為視認性良好、且銅箔之表面狀態良好,更佳為於60以上之情形時判定為視認性良好,且銅箔之表面狀態良好。△B之上限無需特別限定,例如為100以下、或80以下、或70以下。根據此種評價,可高效率地且更準確地評價透明基材17之視認性,藉此,可更高效率地且準確地進行銅箔之表面狀態之評價。When ΔB (ΔB=Bt-Bb) is 50 or more, it is determined that the visibility is good and the surface state of the copper foil is good, and more preferably 60 or more, it is judged that the visibility is good, and The surface of the copper foil is in good condition. The upper limit of ΔB is not particularly limited, and is, for example, 100 or less, or 80 or less, or 70 or less. According to such evaluation, the visibility of the transparent substrate 17 can be evaluated efficiently and more accurately, whereby the surface state of the copper foil can be evaluated more efficiently and accurately.
此處,使用圖對「亮度曲線之頂部平均值Bt」、「亮度曲線之底部平均值Bb」、及下述「t1」、「t2」、「Sv」進行說明。又,關於「亮度曲線之底部平均值Bb」,於增大標記之寬度(例如標記之寬度為0.7mm以上、例如0.8mm以上、例如5mm以下、4mm以下,例如可設為約1.3mm)者、及縮小標記之寬度(例如標記之寬度為0.01mm以上、0.05mm以上、0.1mm以上、0.8mm以下、0.7mm以下、0.6mm以下,例如可設為0.3mm)者中,規定不同,故而對各者之情形進行說明。Here, the "top average value Bt of the luminance curve", the "bottom average value Bb of the luminance curve", and the following "t1", "t2", and "Sv" will be described using the map. Further, the "bottom average value Bb of the luminance curve" is increased by the width of the mark (for example, the width of the mark is 0.7 mm or more, for example, 0.8 mm or more, for example, 5 mm or less, 4 mm or less, for example, about 1.3 mm). And the width of the narrowing mark (for example, the width of the mark is 0.01 mm or more, 0.05 mm or more, 0.1 mm or more, 0.8 mm or less, 0.7 mm or less, 0.6 mm or less, for example, 0.3 mm), and the regulations are different. Explain the situation of each person.
於圖3中表示定義增大標記之寬度(設為約1.3mm)之情形時之Bt及Bb之模式圖。圖3之「標記」表示於藉由上述CCD相機之拍攝而獲得之圖像中觀察到之印刷物之線狀之標記(寬度約1.3mm)。以重疊於該標記之方式描繪之曲線於上述觀察地點-亮度曲線圖中,表示自標記之端部起至無標記之部分產生之亮度曲線。如圖3所示,「亮度曲線之頂部平均值Bt」表示自離標記之兩側之端部位置100μm之位置起以30μm間隔測定5個部位(兩側合計10個部位)時之亮度的平均值。「亮度曲線之底部平均值Bb」表示從自標記之端部位置向內側進入100μm之位置起以100μm間隔測定11個部位時之亮度之平均值。再者,用以測定亮度之平均值之觀察地點之間隔可根據亮度曲線之形狀而適當地於1μm~500μm之範圍內採用。為了避免觀察地點之偏差,觀察地點之間隔較佳為大致等間隔或等間隔。再者,觀察地點之間隔亦可並非大致等間隔,或亦可並非等間隔。又,認為 測定間隔越寬,則越能排除特定之觀察地點之影響,且越能減輕因觀察地點導致之誤差。A schematic diagram of Bt and Bb when the width of the mark is increased (set to about 1.3 mm) is shown in FIG. The "mark" in Fig. 3 indicates a linear mark (a width of about 1.3 mm) of the printed matter observed in the image obtained by the above-described CCD camera. The curve drawn in such a manner as to overlap the mark indicates the brightness curve generated from the end of the mark to the unmarked portion in the above-mentioned observation point-luminance curve. As shown in Fig. 3, the "top average value Bt of the brightness curve" indicates the average of the brightness when measuring five places (10 parts on both sides) at intervals of 30 μm from the position of the end position of the both sides of the mark from the position of 100 μm. value. The "bottom average value Bb of the luminance curve" indicates the average value of the luminance when 11 portions are measured at intervals of 100 μm from the position where the end portion of the mark enters the inside of 100 μm. Further, the interval between the observation points for measuring the average value of the luminance may be appropriately selected from the range of 1 μm to 500 μm in accordance with the shape of the luminance curve. In order to avoid deviations in the observation sites, the intervals of the observation sites are preferably substantially equally spaced or equally spaced. Furthermore, the intervals of the observation locations may not be substantially equally spaced, or may not be equally spaced. Also, think The wider the measurement interval, the more the influence of the specific observation site can be excluded, and the error due to the observation site can be alleviated.
於圖4(a)及圖4(b)中表示定義將標記之寬度設為約0.3mm之情形時之Bt及Bb之模式圖。於將標記之寬度設為約0.3mm之情形時,存在如圖4(a)所示般成為V型之亮度曲線之情形、及如圖4(b)所示般成為與約1.3mm之情形同樣地具有底部之亮度曲線之情形。於任一情形時,「亮度曲線之頂部平均值Bt」皆表示自離標記之兩側之端部位置50μm之位置起與將標記之寬度設為約1.3mm之情形同樣地以30μm間隔測定5個部位(兩側合計10個部位)時的亮度之平均值。另一方面,「亮度曲線之底部平均值Bb」於亮度曲線如圖4(a)所示般成為V型之情形時,表示該V字之谷之前端部之亮度之最低值,於圖4(b)之具有底部之情形時,表示約0.3mm之中心部之值。再者,用以測定亮度之平均值之觀察地點之間隔可根據亮度曲線之形狀適當地於1μm~500μm之範圍內採用。為了避免觀察地點之偏差,觀察地點之間隔較佳為大致等間隔或等間隔。再者,觀察地點之間隔亦可並非大致等間隔,或亦可並非等間隔。又,認為測定間隔越寬,則越能排除特定之觀察地點之影響,且越能減輕因觀測地點導致之誤差。4(a) and 4(b) are schematic diagrams showing the definitions of Bt and Bb when the width of the mark is set to about 0.3 mm. When the width of the mark is set to about 0.3 mm, there is a case where a V-shaped luminance curve is formed as shown in FIG. 4(a), and a case of about 1.3 mm as shown in FIG. 4(b). The same is true for the case of the brightness curve at the bottom. In either case, the "top average value Bt of the brightness curve" indicates that the position is 50 μm from the position of the end portion on both sides of the mark, and the width of the mark is set to be about 1.3 mm. The average of the brightness at the time of each part (the total of 10 parts on both sides). On the other hand, the "base value Bb of the brightness curve" indicates the lowest value of the brightness of the front end portion of the V-shaped valley when the brightness curve is V-shaped as shown in Fig. 4(a). (b) In the case of having a bottom, it means a value of a center portion of about 0.3 mm. Further, the interval between the observation points for measuring the average value of the brightness may be appropriately selected from the range of 1 μm to 500 μm in accordance with the shape of the luminance curve. In order to avoid deviations in the observation sites, the intervals of the observation sites are preferably substantially equally spaced or equally spaced. Furthermore, the intervals of the observation locations may not be substantially equally spaced, or may not be equally spaced. Further, it is considered that the wider the measurement interval, the more the influence of the specific observation point can be excluded, and the error due to the observation location can be alleviated.
於圖5中表示定義t1、t2及Sv之模式圖。「t1(像素×0.1)」表示亮度曲線與Bt之交點中最接近於上述線狀標記之交點及表示該交點之位置之值(上述觀察地點-亮度曲線圖之橫軸之值)。「t2(像素×0.1)」表示於自亮度曲線與Bt之交點至以Bt為基準0.1△B為止之深度範圍內,亮度曲線與0.1△B之交點中最接近於上述線狀標記之交點及表示該交點之位置之值(上述觀察地點-亮度曲線圖之橫軸之值)。此時,對於連結t1及t2之線所表示之亮度曲線之斜率,以利用y軸方向上為0.1△B、x軸方向上為(t1-t2)計算之Sv(灰階/像素×0.1)進行定義。再者,橫軸之1像素相當於10μm長度。又,Sv係測定標記之兩側,採用較小之值。進而,於亮度曲線之形狀不穩 定而存在複數個上述「亮度曲線與Bt之交點」之情形時,採用最接近於標記之交點。A pattern diagram defining t1, t2, and Sv is shown in FIG. "t1 (pixel × 0.1)" indicates the intersection of the brightness curve and Bt closest to the above-mentioned linear mark and the value indicating the position of the intersection (the above-mentioned observation point - the value of the horizontal axis of the luminance graph). "t2 (pixel × 0.1)" is expressed in the range from the intersection of the luminance curve and Bt to the depth of 0.1 ΔB based on Bt, and the intersection of the luminance curve and 0.1 ΔB is closest to the intersection of the above-mentioned linear marks and The value indicating the position of the intersection (the above observation point - the value of the horizontal axis of the luminance graph). At this time, the slope of the luminance curve indicated by the line connecting t1 and t2 is Sv (gray scale/pixel × 0.1) calculated by using ΔA in the y-axis direction and (t1-t2) in the x-axis direction. Make a definition. Furthermore, one pixel on the horizontal axis corresponds to a length of 10 μm. Further, the Sv system is measured on both sides of the mark, and a smaller value is used. Furthermore, the shape of the brightness curve is unstable When there are a plurality of the above-mentioned "the intersection of the brightness curve and the Bt", the intersection closest to the mark is adopted.
於利用攝影手段11拍攝到之上述圖像中,未附有標記之部分成為高亮度,但到達至標記端部時亮度突然降低。若透明基材17之視認性良好,則可明確地觀察此種亮度之降低狀態。另一方面,若透明基材17之視認性不良,則亮度於標記端部附近並非一下子自「高」向「低」突然下降,而係降低之狀態緩慢,亮度之降低狀態變得不明確。Among the images captured by the photographing means 11, the portion not marked with the mark is high in brightness, but the brightness is suddenly lowered when reaching the end portion of the mark. When the visibility of the transparent substrate 17 is good, the state of the brightness reduction can be clearly observed. On the other hand, if the visibility of the transparent substrate 17 is poor, the brightness does not suddenly drop from "high" to "low" in the vicinity of the end portion of the mark, but the state of the decrease is slow, and the state of decrease in brightness becomes unclear. .
本發明基於此種見解,對透明基材17,例如將附有標記之印刷物置於下方,控制於自利用攝影手段11隔著透明基材17拍攝到之上述標記部分之圖像獲得之觀察地點-亮度曲線圖中所描繪之標記端部附近之亮度曲線之斜率。更詳細而言,將亮度曲線之頂部平均值Bt與底部平均值Bb之差△B(△B=Bt-Bb)設為40以上,評價於在觀察地點-亮度曲線圖中,將表示亮度曲線與Bt之交點中最接近於上述線狀標記之交點之位置之值(上述觀察地點-亮度曲線圖之橫軸之值)設為t1,將表示於自亮度曲線與Bt之交點至以Bt為基準0.1△B為止之深度範圍內亮度曲線與0.1△B之交點中最接近於標記之交點之位置之值(上述觀察地點-亮度曲線圖之橫軸之值)設為t2時,由下述(1)式定義之Sv,藉此可進行準確之透明基板之視認性評價。較佳為將Sv成為3.5以上之情形判定為視認性良好。更佳為將Sv成為3.9以上、較佳為4.5以上、較佳為5.0以上、更佳為5.5以上之情形判定為視認性良好。又,△B較佳為50以上,較佳為60以上。△B之上限無需特別限定,例如為100以下、或80以下、或70以下。又,Sv之上限無需特別限定,例如為70以下、30以下、15以下、10以下。根據此種構成,標記與非標記之部分之交界變得更明確,定位精度提高,標記圖像辨識之誤差減少,可更準確地進行位置對準。由此,於Sv、△B之值為上述Sv、△B之值之範圍內之情形時,亦可判定為銅箔之表面狀態良好。According to the present invention, the transparent substrate 17 is placed, for example, under the printed matter with the mark, and is controlled at an observation point obtained from the image of the mark portion photographed by the photographing means 11 via the transparent substrate 17. - the slope of the luminance curve near the end of the mark depicted in the luminance graph. More specifically, the difference ΔB (ΔB=Bt-Bb) between the top average value Bt of the luminance curve and the bottom average value Bb is set to 40 or more, and is evaluated in the observation point-luminance graph, which indicates the luminance curve. The value of the position closest to the intersection of the above-mentioned linear marks in the intersection with Bt (the value of the above-mentioned observation point - the horizontal axis of the luminance curve) is set to t1, which will be expressed at the intersection of the self-luminance curve and Bt to Bt. When the value of the position closest to the intersection of the mark in the depth range of 0.1 ΔB and the point of 0.1 ΔB (the value of the horizontal axis of the observation point-luminance curve) is t2, the following (1) The Sv defined by the formula, whereby the visibility of the transparent substrate can be accurately evaluated. It is preferable that the case where Sv is 3.5 or more is judged to be good in visibility. More preferably, it is determined that the Sv is 3.9 or more, preferably 4.5 or more, preferably 5.0 or more, and more preferably 5.5 or more. Further, ΔB is preferably 50 or more, and preferably 60 or more. The upper limit of ΔB is not particularly limited, and is, for example, 100 or less, or 80 or less, or 70 or less. Further, the upper limit of Sv is not particularly limited, and is, for example, 70 or less, 30 or less, 15 or less, or 10 or less. According to this configuration, the boundary between the mark and the non-marked portion becomes clearer, the positioning accuracy is improved, the error of the mark image recognition is reduced, and the positional alignment can be performed more accurately. Therefore, when the values of Sv and ΔB are within the range of the values of Sv and ΔB, it can be determined that the surface state of the copper foil is good.
又,藉由將如上所述之處理程序作為程式使電腦執行,可高效率且準確地評價銅箔之表面狀態。Further, by executing the processing program as described above as a program, the surface state of the copper foil can be evaluated efficiently and accurately.
進而,藉由將該程式以電腦可讀取之方式記錄於光學、或磁碟等記錄媒體而使用,即便其他電腦亦可實現該程式,可獲得與上述處理程序相同之作用效果。Further, by using the program to be recorded on a recording medium such as an optical or a magnetic disk in a computer readable manner, even if another computer can implement the program, the same effects as those of the above processing program can be obtained.
(透明基材之視認性評價裝置、視認性評價方法、視認性評價程式及記錄媒體)(Visual recognition device for transparent substrate, visual evaluation method, visual evaluation program, and recording medium)
作為本發明之實施形態之透明基材之視認性評價裝置,可直接使用如對上述銅箔之表面狀態之評價裝置進行說明之圖1所示之構成之裝置。即,「透明基材之視認性評價裝置」具備:攝影手段11,其隔著透明基材17拍攝存在於設置在平台15上之透明基材17之下方之標記16;電腦12,其基於來自攝影手段11之圖像訊號進行各種處理;顯示手段13,其基於來自電腦12之各種訊號顯示特定之圖像等;及照明手段14,其對平台上之透明基材17及標記16照射光。本發明中設為評價之對象之透明基材17並無特別限定,只要透明則亦可為玻璃製或樹脂製基材。再者,於本發明中所謂透明亦包括具有透光性之情況。再者,本發明中之標記既可為印刷至紙等印刷物之記號,亦可為銅配線或金屬,既可為無機物,亦可為有機物,只要為成為標記之記號則可為任何形態。As the visibility evaluation device for the transparent substrate of the embodiment of the present invention, a device having the configuration shown in Fig. 1 for explaining the surface state evaluation device of the copper foil can be used as it is. That is, the "visibility evaluation device for a transparent substrate" includes an imaging device 11 that captures a mark 16 existing under the transparent substrate 17 provided on the stage 15 via the transparent substrate 17, and a computer 12 based on The image signal of the photographing means 11 performs various processes; the display means 13 displays a specific image based on various signals from the computer 12, and the illumination means 14 which illuminates the transparent substrate 17 and the mark 16 on the stage. The transparent substrate 17 to be evaluated in the present invention is not particularly limited, and may be a glass substrate or a resin substrate as long as it is transparent. Further, in the present invention, the term "transparent" also includes the case of having light transmittance. Further, the mark in the present invention may be a mark printed on a printed matter such as paper, or may be a copper wire or a metal, and may be an inorganic substance or an organic substance, and may be in any form as long as it is a mark.
於此情形時,電腦12基於來自攝影手段11之圖像訊號進行各種處理。電腦12具備:觀察地點-亮度曲線圖製作手段,其對於來自攝影手段11之圖像訊號,沿著橫穿所觀察到之標記16之方向測定每個觀察地點之亮度而製作觀察地點-亮度曲線圖;及視認性評價手段,其於觀察地點-亮度曲線圖中,根據自標記16之端部起至無標記16之部分產生之亮度曲線之斜率評價透明基材17之視認性。In this case, the computer 12 performs various processes based on the image signals from the photographing means 11. The computer 12 is provided with an observation point-luminance curve generating means for producing an observation point-luminance curve by measuring the brightness of each observation point in a direction crossing the observed mark 16 with respect to the image signal from the photographing means 11. In the observation point-brightness graph, the visibility of the transparent substrate 17 is evaluated based on the slope of the luminance curve generated from the end portion of the mark 16 to the portion without the mark 16.
再者,於本發明中,「橫穿標記之方向」亦可為與標記延伸之方向交叉 之方向。又,觀察地點-亮度曲線圖亦可沿著與所觀察到之上述標記延伸之方向垂直之方向測定每個觀察地點之亮度而製作。於觀察地點-亮度曲線圖係沿著與所觀察到之上述標記延伸之方向垂直之方向測定每個觀察地點之亮度而製作之情形時,自存在標記之部分至不存在標記之部分之亮度之值更急遽地變化,因此可更良好地評價銅箔之表面狀態。此處,於標記為直線狀之情形時,所謂標記延伸之方向係指與該直線狀之標記大致平行或平行之方向。又,於標記並非直線狀之情形時,所謂標記延伸之方向係指於畫有與標記之外緣相切之直線之情形時與該直線大致平行或平行之方向。Furthermore, in the present invention, the "crossing direction of the mark" may also be in the direction of extending the mark. The direction. Further, the observation point-luminance curve can also be produced by measuring the brightness of each observation point in a direction perpendicular to the direction in which the observed mark extends. In the case where the observation point-luminance curve is produced by measuring the brightness of each observation point in a direction perpendicular to the direction in which the above-mentioned mark is extended, the brightness from the portion where the mark exists to the portion where the mark does not exist The value changes more violently, so that the surface state of the copper foil can be evaluated more satisfactorily. Here, in the case where the mark is linear, the direction in which the mark extends is a direction substantially parallel or parallel to the linear mark. Further, in the case where the mark is not linear, the direction in which the mark extends is a direction substantially parallel or parallel to the straight line when a straight line tangential to the outer edge of the mark is drawn.
其次,參照圖8所示之流程圖,對使用上述實施形態之透明基材之視認性評價裝置之視認性評價方法進行說明。再者,圖8所示之流程圖係使用本發明之透明基材之視認性評價裝置之視認性評價方法之一實施形態,能以本發明之視認性評價裝置實現之評價方法並不限定於圖8之流程圖中所示者。尤其是,平滑化處理於圖8中係於製作觀察地點-亮度曲線圖之前對藉由拍攝而獲得之圖像進行,但並不限定於此,例如,亦可於製作觀察地點-亮度曲線圖之後進行。Next, a visibility evaluation method using the visibility evaluation device of the transparent substrate of the above embodiment will be described with reference to a flowchart shown in FIG. In addition, the flow chart shown in FIG. 8 is one embodiment of the visibility evaluation method using the visibility evaluation device of the transparent substrate of the present invention, and the evaluation method which can be realized by the visibility evaluation device of the present invention is not limited to The one shown in the flowchart of FIG. In particular, the smoothing process is performed on the image obtained by photographing before the observation point-brightness graph is created in FIG. 8, but is not limited thereto. For example, the observation point-brightness graph may be produced. After that.
於使用透明基材之視認性評價裝置之視認性評價方法中,首先,藉由攝影手段隔著透明基材拍攝存在於透明基材之下方之標記。由攝影手段拍攝之圖像之訊號被送向電腦。電腦之觀察地點-亮度曲線圖製作手段對於來自攝影手段之圖像訊號,沿著橫穿所觀察到之標記之方向測定每個觀察地點之亮度而製作觀察地點-亮度曲線圖。電腦之視認性評價手段於該觀察地點-亮度曲線圖中,根據自標記之端部起至無標記之部分產生之亮度曲線之斜率評價透明基材之視認性。In the visibility evaluation method of the visibility evaluation device using a transparent substrate, first, a mark existing under the transparent substrate is imaged by a photographing means via a transparent substrate. The signal of the image taken by the means of photography is sent to the computer. The observation point of the computer - the brightness curve drawing means creates an observation point-luminance curve for measuring the brightness of each observation point in the direction across the observed mark for the image signal from the photographing means. The visibility evaluation means of the computer evaluates the visibility of the transparent substrate based on the slope of the luminance curve generated from the end portion of the mark to the unmarked portion in the observation point-luminance curve.
電腦之視認性評價手段將自標記之端部起至無標記之部分產生之亮度曲線之頂部平均值Bt與底部平均值Bb之差設為△B(△B=Bt-Bb),使用Sv進行視認性之評價,上述Sv係於在觀察地點-亮度曲線圖 中,將表示亮度曲線與Bt之交點中最接近於標記16之交點之位置之值(上述觀察地點-亮度曲線圖之橫軸之值)設為t1,將表示於自亮度曲線與Bt之交點至以Bt為基準0.1△B為止之深度範圍內,亮度曲線與0.1△B之交點中最接近於標記之交點之位置之值(上述觀察地點-亮度曲線圖之橫軸之值)設為t2時,由下述(1)式進行定義。The visual evaluation method of the computer sets the difference between the top average value Bt and the bottom average value Bb of the luminance curve generated from the end portion of the mark to the unmarked portion as ΔB (ΔB=Bt-Bb), and performs the use of Sv. According to the evaluation of visibility, the above Sv is based on the observation point - brightness curve In the middle, the value indicating the position of the intersection of the brightness curve and Bt closest to the intersection of the marks 16 (the value of the above-mentioned observation point - the horizontal axis of the brightness graph) is set to t1, which will be expressed at the intersection of the self-luminance curve and Bt. In the depth range up to 0.1 ΔB based on Bt, the value of the position closest to the intersection of the mark in the intersection of the brightness curve and 0.1 ΔB (the value of the horizontal axis of the above-mentioned observation point-luminance curve) is set to t2. The time is defined by the following formula (1).
Sv=(△B×0.1)/(t1-t2) (1)Sv=(△B×0.1)/(t1-t2) (1)
先前,若不於生產線上實際製作,則無法判斷是否可隔著透明基材視認為了進行位置對準等而設置之標記,於製造成本方面存在問題。然而,若使用本發明之透明基材之視認性評價裝置,則藉由上述構成,即便僅於實驗室中亦可容易且高效率地準確評價透明基材之視認性。再者,於上述觀察地點-亮度曲線圖中,橫軸表示位置資訊(像素×0.1),縱軸表示亮度(灰階)之值。In the past, if it was not actually produced on the production line, it was impossible to determine whether or not the mark which is considered to be placed in alignment with the transparent substrate was considered to have a problem in terms of manufacturing cost. However, according to the visibility evaluation device of the transparent substrate of the present invention, the visibility of the transparent substrate can be easily and efficiently evaluated in the laboratory easily and efficiently. Furthermore, in the above-mentioned observation point-luminance graph, the horizontal axis represents position information (pixel × 0.1), and the vertical axis represents the value of luminance (gray scale).
又,電腦之視認性評價手段使用△B(△B=Bt-Bb)及Sv進行視認性之評價,上述△B(△B=Bt-Bb)係自標記之端部起至無標記之部分產生之亮度曲線之頂部平均值Bt與底部平均值Bb之差,上述Sv係於在觀察地點-亮度曲線圖中,將表示亮度曲線與Bt之交點中最接近於標記之交點之位置之值(上述觀察地點-亮度曲線圖之橫軸之值)設為t1,將表示於自亮度曲線與Bt之交點至以Bt為基準0.1△B為止之深度範圍內,亮度曲線與0.1△B之交點中最接近於標記之交點之位置之值(上述觀察地點-亮度曲線圖之橫軸之值)設為t2時,由下述(1)式進行定義。Further, the visibility evaluation method of the computer uses ΔB (ΔB=Bt-Bb) and Sv to evaluate the visibility, and the above ΔB (ΔB=Bt-Bb) is from the end of the mark to the unmarked portion. The difference between the top average value Bt of the generated brightness curve and the bottom average value Bb, which is the value of the position closest to the intersection of the mark in the intersection of the brightness curve and Bt in the observation point-luminance curve ( The observation point-value of the horizontal axis of the brightness curve is set to t1, and is expressed in the depth range from the intersection of the brightness curve and Bt to the depth of 0.1 ΔB based on Bt, and the intersection of the brightness curve and 0.1 ΔB. The value closest to the position of the intersection of the marks (the value of the above-mentioned observation point - the horizontal axis of the luminance graph) is t2, and is defined by the following formula (1).
Sv=(△B×0.1)/(t1-t2) (1)Sv=(△B×0.1)/(t1-t2) (1)
根據此種構成,即便僅於實驗室中亦可容易且高效率地更準確地評價透明基材之視認性。According to this configuration, the visibility of the transparent substrate can be evaluated more easily and efficiently, even in the laboratory.
較佳為電腦進而具備平滑化處理手段,該平滑化處理手段對於藉由利用攝影手段之拍攝而獲得之圖像,使亮度之不均緩和,觀察地點- 亮度曲線圖製作手段使用平滑化處理後之亮度製作觀察地點-亮度曲線圖。對自藉由利用攝影手段之拍攝而獲得之圖像獲得之亮度之包含雜訊之資料(原波形)進行利用平滑化處理手段之平滑化處理,藉此,該亮度之不均緩和,因此,可更準確地評價透明基材之視認性。作為利用平滑化處理手段之平滑化處理,可利用各種平滑化程式進行,例如,可使用藉由2、3次多項式配適法之平滑化處理、藉由傅立葉變換之平滑化處理、或藉由移動平均法之平滑化處理等。再者,平滑化處理亦可使用公知之各種平滑化程式進行。又,亮度資料之平滑化處理既可對有標記之部分、無標記之部分之兩者進行,亦可對有標記之部分進行,亦可對無標記之部分進行,或亦可局部地進行。Preferably, the computer further includes a smoothing processing means for easing the unevenness of the brightness of the image obtained by the photographing by the photographing means, and observing the spot - The brightness graph creation means creates an observation point-luminance curve using the brightness after the smoothing process. The data (including the original waveform) including the noise obtained by the image obtained by the photographing by the photographing means is smoothed by the smoothing processing means, whereby the unevenness of the brightness is alleviated, and therefore, The visibility of the transparent substrate can be more accurately evaluated. As the smoothing processing by the smoothing processing means, various smoothing programs can be used. For example, smoothing processing by a 2nd and 3rd order polynomial matching method, smoothing processing by Fourier transform, or moving can be used. Smoothing of the average method, etc. Furthermore, the smoothing process can also be performed using various known smoothing programs. Moreover, the smoothing process of the brightness data may be performed on both the marked portion and the unmarked portion, or on the marked portion, or on the unmarked portion, or locally.
再者,對於藉由利用攝影手段之拍攝而獲得之圖像,亦可於進行該亮度之平滑化處理之前,預先進行該亮度之包含雜訊之資料(原波形)之觀察地點-亮度曲線圖製作。Further, for an image obtained by photographing by means of photographing, an observation point-luminance graph of data (original waveform) including noise of the luminance may be performed in advance before the smoothing of the luminance is performed. Production.
又,於在利用視認性評價手段之視認性評價中僅基於上述Sv值評價視認性之情形時,亦可將自標記之端部起至無標記之部分產生之亮度曲線之頂部平均值Bt與底部平均值Bb之差設為△B(△B=Bt-Bb),於在觀察地點-亮度曲線圖中,將表示亮度曲線與Bt之交點中最接近於標記之交點之位置之值(上述觀察地點-亮度曲線圖之橫軸之值)設為t1,將表示於自亮度曲線與Bt之交點至以Bt為基準0.1△B為止之深度範圍內,亮度曲線與0.1△B之交點中最接近於標記之交點之位置之值(上述觀察地點-亮度曲線圖之橫軸之值)設為t2時,將Sv成為3.5以上之情形判定為良好。Further, when the visibility is evaluated based on the Sv value only in the visibility evaluation by the visibility evaluation means, the top average Bt of the luminance curve generated from the end portion of the mark to the unmarked portion may be The difference between the bottom mean values Bb is set to ΔB (ΔB=Bt-Bb), and in the observation point-brightness graph, the value of the position closest to the intersection of the marks among the intersections of the brightness curve and Bt will be indicated (the above) The observation point - the value of the horizontal axis of the brightness graph) is set to t1, which is expressed in the depth range from the intersection of the brightness curve and Bt to the reference point of 0.1 ΔB from Bt, and the intersection of the brightness curve and 0.1 ΔB. When the value of the position close to the intersection of the mark (the value of the observation point - the horizontal axis of the brightness graph) is t2, it is judged that Sv is 3.5 or more.
進而,於在利用視認性評價手段之視認性評價中基於上述Sv值及△B值評價視認性之情形時,亦可將自標記之端部起至無標記之部分產生之亮度曲線之頂部平均值Bt與底部平均值Bb之差△B(△B=Bt-Bb)為40以上,於在觀察地點-亮度曲線圖中,將表示亮度曲線與Bt之交點中最接近 於標記之交點之位置之值(上述觀察地點-亮度曲線圖之橫軸之值)設為t1,將表示於自亮度曲線與Bt之交點至以Bt為基準0.1△B為止之深度範圍內亮度曲線與0.1△B之交點中最接近於標記之交點之位置之值(上述觀察地點-亮度曲線圖之橫軸之值)設為t2時,Sv成為3.5以上之情形判定為良好。Further, when the visibility is evaluated based on the Sv value and the ΔB value in the visibility evaluation by the visibility evaluation means, the top of the luminance curve generated from the end portion of the mark to the unmarked portion may be averaged. The difference ΔB (ΔB=Bt-Bb) between the value Bt and the bottom average value Bb is 40 or more, which is the closest among the intersections of the brightness curve and Bt in the observation point-luminance curve. The value at the position of the intersection of the mark (the value of the above-mentioned observation point - the horizontal axis of the brightness curve) is set to t1, and will be expressed in the depth range from the intersection of the brightness curve and Bt to the depth of the range of 0.1 ΔB from Bt. When the value of the position closest to the intersection of the mark in the intersection of the curve and 0.1 ΔB (the value of the observation point-the horizontal axis of the luminance curve) is t2, it is judged that Sv is 3.5 or more.
更佳為將Sv成為3.9以上、較佳為4.5以上、較佳為5.0以上、更佳為5.5以上之情形判定為視認性良好。又,Sv之上限無需特別限定,例如為70以下、30以下、15以下、10以下。More preferably, it is determined that the Sv is 3.9 or more, preferably 4.5 or more, preferably 5.0 or more, and more preferably 5.5 or more. Further, the upper limit of Sv is not particularly limited, and is, for example, 70 or less, 30 or less, 15 or less, or 10 or less.
△B(△B=Bt-Bb)較佳為50以上,更佳為60以上。△B之上限無需特別限定,例如為100以下、或80以下、或70以下。根據此種評價,可高效率地且更準確地評價透明基材之視認性。ΔB (ΔB = Bt - Bb) is preferably 50 or more, more preferably 60 or more. The upper limit of ΔB is not particularly limited, and is, for example, 100 or less, or 80 or less, or 70 or less. According to such evaluation, the visibility of the transparent substrate can be evaluated efficiently and more accurately.
又,藉由將如上所述之處理程序作為程式使電腦執行,可高效率地且準確地評價透明基材之視認性。Further, by executing the processing program as described above as a program, the visibility of the transparent substrate can be evaluated efficiently and accurately.
進而,藉由使光學、或磁碟等記錄媒體以電腦可讀取之方式記錄該程式而使用,即便其他電腦亦可實現該程式,而可獲得與上述處理程序相同之作用效果。Further, by using a recording medium such as an optical or a magnetic disk to record the program in a computer readable manner, the program can be realized by other computers, and the same effects as those of the above processing program can be obtained.
(積層體之定位裝置、積層體之定位方法、積層體之定位程式及記錄媒體)(Positioning device of laminated body, positioning method of laminated body, positioning program of laminated body, and recording medium)
圖9係本發明之實施形態之積層體之定位裝置20之模式圖。本發明之實施形態之積層體之定位裝置20具備:攝影手段21,其隔著透明基材拍攝存在於設置在平台25上之金屬與透明基材之積層體27中之標記26;電腦22,其基於來自攝影手段21之圖像訊號進行各種處理;顯示手段23,其基於來自電腦22之各種訊號顯示特定之圖像等;及照明手段24,其對平台上之積層體27照射光。以下,作為透明基材,列舉樹脂為例進行說明。再者,於本發明中,所謂「金屬」,其形態並無特別限定,例如,亦可為作為金屬箔、金屬板或金屬條之金屬材料。Fig. 9 is a schematic view showing a positioning device 20 of a laminated body according to an embodiment of the present invention. The positioning device 20 of the laminated body according to the embodiment of the present invention includes: a photographing means 21 for photographing the mark 26 existing in the laminated body 27 of the metal and the transparent substrate provided on the stage 25 via the transparent substrate; the computer 22, It performs various processes based on the image signal from the photographing means 21; the display means 23 displays a specific image based on various signals from the computer 22, and the illumination means 24 which irradiates light to the laminated body 27 on the platform. Hereinafter, a resin will be described as an example of a transparent substrate. In the present invention, the form of the "metal" is not particularly limited, and may be, for example, a metal material such as a metal foil, a metal plate or a metal strip.
作為金屬與樹脂之積層體27,只要為對樹脂貼合金屬而構成者,則形態並無特別限定。作為本發明中之金屬與樹脂之積層體27之具體例,可列舉以下積層體,該積層體係於由本體基板及附屬之電路基板、以及用以將該等電性連接之於聚醯亞胺等樹脂之至少一表面形成有銅等金屬配線之可撓性印刷基板所構成之電子機器中,準確地定位可撓性印刷基板並壓接於該本體基板及附屬之電路基板之配線端部而製作之積層體。即,若為該情形,則積層體27成為可撓性印刷基板及本體基板之配線端部藉由壓接而貼合之積層體、或可撓性印刷基板及電路基板之配線端部藉由壓接而貼合之積層體。積層體27具有由該金屬配線之一部分或其他材料形成之標記。對於標記之位置,只要為可利用CCD相機等攝影手段21隔著構成該積層體27之樹脂進行拍攝之位置則並無特別限定。The layered body 27 of the metal and the resin is not particularly limited as long as it is formed by laminating a metal to the resin. Specific examples of the layered body 27 of the metal and the resin in the present invention include a laminate in which the main substrate and the attached circuit board are electrically connected to the polyimine. In an electronic device including a flexible printed circuit board in which at least one surface of the resin is formed with a metal wiring such as copper, the flexible printed circuit board is accurately positioned and pressed against the wiring end portion of the main substrate and the attached circuit substrate. The layered body produced. In other words, in this case, the laminated body 27 is a laminated body in which the wiring end portions of the flexible printed circuit board and the main substrate are bonded by pressure bonding, or the wiring ends of the flexible printed circuit board and the circuit board are used. A laminated body that is crimped and attached. The laminate 27 has indicia formed of a portion of the metal wiring or other material. The position of the mark is not particularly limited as long as it can be imaged by the image forming means 21 such as a CCD camera through the resin constituting the laminated body 27.
攝影手段21具備攝像元件、由輸入攝像元件之輸出之圖像處理電路等所構成之圖像處理部、由控制圖像處理部等之控制電路等構成之控制部、及由透鏡等構成之光學系統等。作為攝影手段21,例如可使用CCD相機等。攝影手段21隔著積層體之樹脂拍攝存在於設置在平台25上之積層體27中之標記26而取得圖像。The imaging device 21 includes an image processing unit including an image pickup device, an image processing circuit that outputs an image pickup device, a control unit including a control circuit such as a control image processing unit, and the like, and an optical unit including a lens or the like. System, etc. As the photographing means 21, for example, a CCD camera or the like can be used. The photographing means 21 captures the mark 26 existing in the laminated body 27 provided on the stage 25 via the resin of the laminated body, and acquires an image.
電腦12基於來自攝影手段21之圖像訊號進行各種處理。電腦22具備:觀察地點-亮度曲線圖製作手段,其對於來自攝影手段21之圖像訊號,沿著橫穿所觀察到之標記26之方向測定每個觀察地點之亮度而製作觀察地點-亮度曲線圖;及定位手段,其於觀察地點-亮度曲線圖中,根據自標記26之端部起至無標記26之部分產生之亮度曲線之斜率決定積層體27之位置。The computer 12 performs various processes based on the image signals from the photographing means 21. The computer 22 is provided with an observation point-luminance graph creating means for measuring the brightness of each observation point in the direction across the observed mark 26 for the image signal from the photographing means 21 to create an observation point-luminance curve. And a positioning means for determining the position of the laminated body 27 based on the slope of the luminance curve generated from the end of the mark 26 to the portion without the mark 26 in the observation point-luminance curve.
再者,於本發明中,「橫穿標記之方向」亦可為與標記延伸之方向交叉之方向。又,觀察地點-亮度曲線圖亦可沿著與所觀察到之上述標記延伸之方向垂直之方向測定每個觀察地點之亮度而製作。於觀察地點-亮度曲線圖 係沿著與所觀察到之上述標記延伸之方向垂直之方向測定每個觀察地點之亮度而製作之情形時,自存在標記之部分至不存在標記之部分之亮度之值更急遽地變化,因此,可更良好地評價銅箔之表面狀態。此處,於標記為直線狀之情形時,所謂標記延伸之方向係指與該直線狀之標記大致平行或平行之方向。又,於標記並非直線狀之情形時,標記延伸之方向係指於畫有與標記之外緣相切之直線之情形時,與該直線大致平行或平行之方向。Furthermore, in the present invention, the "direction across the mark" may be a direction crossing the direction in which the mark extends. Further, the observation point-luminance curve can also be produced by measuring the brightness of each observation point in a direction perpendicular to the direction in which the observed mark extends. At the observation site - brightness curve When the brightness of each observation point is measured in a direction perpendicular to the direction in which the above-mentioned mark is extended, the value of the brightness from the portion where the mark exists to the portion where the mark does not exist changes more drastically, so The surface state of the copper foil can be evaluated more satisfactorily. Here, in the case where the mark is linear, the direction in which the mark extends is a direction substantially parallel or parallel to the linear mark. Further, in the case where the mark is not linear, the direction in which the mark extends is a direction substantially parallel or parallel to the straight line when a straight line tangential to the outer edge of the mark is drawn.
電腦22亦可進而具備平滑化處理手段,該平滑化處理手段對於藉由利用攝影手段21之拍攝而獲得之圖像,使亮度之不均緩和,觀察地點-亮度曲線圖製作手段使用平滑化處理後之亮度製作觀察地點-亮度曲線圖。Further, the computer 22 may further include a smoothing processing means for alleviating the unevenness of the brightness of the image obtained by the imaging by the photographing means 21, and using the smoothing processing for the observation point-luminance graph creation means. The brightness is then used to create an observation point-brightness graph.
電腦22具備作為記憶手段之記憶體。於該記憶體中,以電腦可讀取之方式分別記錄(所謂保存)有經數位化之來自攝影手段21之圖像、觀察地點-亮度曲線圖製作式、定位式、及各階段中之評價值等。The computer 22 has a memory as a means of memory. In the memory, the image from the photographing means 21, the observation point-brightness curve pattern creation form, the positioning type, and the evaluation in each stage are separately recorded (so-called stored) in a computer readable manner. Value, etc.
顯示手段23基於來自電腦22之各種訊號顯示觀察地點-亮度曲線圖、位置評價結果等特定之圖像或數值等。The display means 23 displays a specific image or numerical value such as an observation point-luminance graph, a position evaluation result, and the like based on various signals from the computer 22.
其次,參照圖10所示之流程圖對使用上述實施形態之積層體之定位裝置20之定位方法進行說明。再者,圖10所示之流程圖係使用本發明之積層體之定位裝置20之定位方法之一實施形態,能以本發明之定位裝置20實現之評價方法並不限定於圖10之流程圖中所示者。尤其是,平滑化處理於圖10中係於製作觀察地點-亮度曲線圖之前對藉由拍攝而獲得之圖像進行,但並不限定於此,例如,亦可於製作觀察地點-亮度曲線圖之後進行。Next, a positioning method using the positioning device 20 of the laminated body of the above-described embodiment will be described with reference to a flowchart shown in FIG. Furthermore, the flowchart shown in FIG. 10 is an embodiment of the positioning method using the positioning device 20 of the laminated body of the present invention, and the evaluation method that can be realized by the positioning device 20 of the present invention is not limited to the flowchart of FIG. Shown in it. In particular, the smoothing process is performed on the image obtained by photographing before the observation point-brightness graph is created in FIG. 10, but is not limited thereto. For example, it is also possible to create an observation point-brightness graph. After that.
使用積層體之定位裝置20之定位方法係藉由攝影手段21隔著樹脂拍攝存在於設置在平台25上之金屬與樹脂之積層體27中之標記26。由攝影 手段21拍攝之圖像之訊號被送向電腦22。電腦22之觀察地點-亮度曲線圖製作手段對於來自攝影手段21之圖像訊號,沿著橫穿所觀察到之標記26之方向測定每個觀察地點之亮度而製作觀察地點-亮度曲線圖。電腦22之定位手段於該觀察地點-亮度曲線圖中,根據自標記26之端部起至無標記26之部分產生之亮度曲線之斜率評價積層體27之位置。The positioning method using the positioning device 20 of the laminated body is to mark the mark 26 existing in the laminated body 27 of the metal and the resin provided on the stage 25 by the photographing means 21 via the resin. By photography The signal of the image taken by means 21 is sent to computer 22. Observation Point of the Computer 22 - Luminance Profile Creation means For the image signal from the photographing means 21, the brightness of each observation point is measured along the direction across the observed mark 26 to create an observation point-luminance curve. The positioning means of the computer 22 evaluates the position of the laminated body 27 based on the slope of the luminance curve generated from the end of the mark 26 to the portion without the mark 26 in the observation point-luminance graph.
電腦22之定位手段將自標記26之端部起至無標記26之部分產生之亮度曲線之頂部平均值Bt與底部平均值Bb之差設為△B(△B=Bt-Bb),使用Sv檢測標記26之位置,並基於所檢測出之標記26之位置進行金屬與樹脂之積層體27之定位,上述Sv係於在觀察地點-亮度曲線圖中,將表示亮度曲線與Bt之交點中最接近於標記26之交點之位置之值(上述觀察地點-亮度曲線圖之橫軸之值)設為t1,將表示於自亮度曲線與Bt之交點至以Bt為基準0.1△B為止之深度範圍內,亮度曲線與0.1△B之交點中最接近於標記之交點之位置之值(上述觀察地點-亮度曲線圖之橫軸之值)設為t2時,由下述(1)式進行定義。The positioning means of the computer 22 sets the difference between the top average Bt and the bottom average Bb of the luminance curve generated from the end of the mark 26 to the portion without the mark 26 as ΔB (ΔB = Bt - Bb), using Sv The position of the mark 26 is detected, and the position of the metal-resin laminate 27 is performed based on the detected position of the mark 26, and the above Sv is expressed in the observation point-brightness graph, which represents the most intersection of the brightness curve and the Bt. The value of the position close to the intersection of the mark 26 (the value of the above-mentioned observation point - the horizontal axis of the brightness curve) is set to t1, and will be expressed in the depth range from the intersection of the brightness curve and Bt to the base of 0.1 ΔB based on Bt. When the value of the position closest to the intersection of the mark (the observation point - the value of the horizontal axis of the brightness graph) in the intersection of the brightness curve and 0.1 ΔB is t2, it is defined by the following formula (1).
Sv=(△B×0.1)/(t1-t2) (1)Sv=(△B×0.1)/(t1-t2) (1)
又,電腦22之定位手段亦可使用△B(△B=Bt-Bb)及Sv檢測標記26之位置,並基於所檢測出之標記26之位置進行金屬與樹脂之積層體27之定位,上述△B(△B=Bt-Bb)係自標記26之端部起至無標記26之部分產生之亮度曲線之頂部平均值Bt與底部平均值Bb之差,上述Sv係於在觀察地點-亮度曲線圖中,將表示亮度曲線與Bt之交點中最接近於標記26之交點之位置之值(上述觀察地點-亮度曲線圖之橫軸之值)設為t1,將表示於自亮度曲線與Bt之交點至以Bt為基準0.1△B為止之深度範圍內,亮度曲線與0.1△B之交點中最接近於標記之交點之位置之值(上述觀察地點-亮度曲線圖之橫軸之值)設為t2時,由下述(1)式進行定義。Moreover, the positioning means of the computer 22 can also use the position of the ΔB (ΔB=Bt-Bb) and the Sv detection mark 26, and the positioning of the metal-resin laminate 27 based on the detected position of the mark 26, ΔB (ΔB=Bt-Bb) is the difference between the top average Bt and the bottom average Bb of the luminance curve generated from the end of the mark 26 to the portion without the mark 26, and the above Sv is at the observation point-brightness In the graph, the value indicating the position of the intersection of the brightness curve and Bt closest to the intersection of the marks 26 (the value of the above-mentioned observation point - the horizontal axis of the brightness curve) is set to t1, which will be expressed in the self-luminance curve and Bt. The intersection point to the depth range of 0.1 ΔB based on Bt, the value of the position closest to the intersection of the mark in the intersection of the brightness curve and 0.1 ΔB (the value of the horizontal axis of the above-mentioned observation point-luminance curve) is set. When it is t2, it is defined by the following formula (1).
Sv=(△B×0.1)/(t1-t2) (1)Sv=(△B×0.1)/(t1-t2) (1)
Bt、Bb、t1及t2之定義係如上述透明基材之視認性評價中所說明般,根據此種定位方法,標記26與並非標記26之部分之交界變得明確,定位精度提高,標記圖像辨識之誤差減少,從而可更準確地進行位置對準。例如,於Sv、△B之值為特定值以上之情形時,檢測位置之裝置可進行標記26存在於該位置之判定。具體而言,例如,於僅以Sv值進行判定之情形時,當Sv為3.5以上時,檢測位置之裝置可進行標記存在於該位置之判定,或於以Sv值及△B值進行判定之情形時,當Sv為3.5以上且△B為40以上時,檢測位置之裝置可進行標記存在於該位置之判定。The definitions of Bt, Bb, t1, and t2 are as described in the visibility evaluation of the transparent substrate described above, and according to such a positioning method, the boundary between the mark 26 and the portion other than the mark 26 becomes clear, and the positioning accuracy is improved, and the mark pattern is improved. The error in recognition is reduced, so that the alignment can be performed more accurately. For example, when the values of Sv and ΔB are equal to or greater than a specific value, the device for detecting the position can determine that the mark 26 exists at the position. Specifically, for example, when the determination is made only by the Sv value, when Sv is 3.5 or more, the device that detects the position can perform the determination that the mark exists at the position, or the Sv value and the ΔB value. In the case, when Sv is 3.5 or more and ΔB is 40 or more, the device for detecting the position can perform the determination that the mark exists at the position.
較佳為電腦22進而具備平滑化處理手段,該平滑化處理手段對於藉由利用攝影手段21之拍攝而獲得之圖像,使亮度之不均緩和,觀察地點-亮度曲線圖製作手段使用平滑化處理後之亮度製作觀察地點-亮度曲線圖。對自藉由利用攝影手段21之拍攝而獲得之圖像獲得之亮度之包含雜訊之資料(原波形)進行利用平滑化處理手段之平滑化處理,藉此,該亮度之不均緩和,因此,可更準確地評價積層體27之位置。作為利用平滑化處理手段之平滑化處理,可藉由各種平滑化程式進行,例如,可使用藉由2、3次多項式配適法之平滑化處理、藉由傅立葉變換之平滑化處理、或藉由移動平均法之平滑化處理等。Preferably, the computer 22 further includes a smoothing processing means for smoothing the unevenness of the brightness of the image obtained by the imaging by the photographing means 21, and using the smoothing of the observation point-luminance graph creation means. The processed brightness is used to create an observation point-brightness curve. The data including the noise (the original waveform) obtained by the image obtained by the photographing by the photographing means 21 is smoothed by the smoothing processing means, whereby the unevenness of the brightness is alleviated, The position of the laminated body 27 can be more accurately evaluated. As the smoothing processing by the smoothing processing means, it can be performed by various smoothing programs, for example, smoothing processing by a 2nd and 3rd order polynomial fitting method, smoothing processing by Fourier transform, or by Smoothing of moving average method, etc.
再者,亦可於對藉由利用攝影手段21之拍攝而獲得之圖像進行該亮度之平滑化處理之前,預先進行該亮度之包含雜訊之資料(原波形)之觀察地點-亮度曲線圖製作。Further, before the smoothing of the brightness of the image obtained by the photographing by the photographing means 21, the observation point-luminance curve of the data (original waveform) including the noise may be performed in advance. Production.
再者,藉由將如上所述之處理程序作為程式使電腦執行,可高效率且準確地評價積層體之定位。Furthermore, by executing the processing program as described above as a program, the positioning of the laminated body can be evaluated efficiently and accurately.
進而,藉由使光學、或磁碟等記錄媒體以電腦可讀取之方式記錄該程式而使用,即便其他電腦亦可實現該程式,可獲得與上述處理程序相同之作用效果。Further, by using a recording medium such as an optical or a magnetic disk to record the program in a computer readable manner, the program can be realized by other computers, and the same effects as those of the above processing program can be obtained.
若使用本發明之實施形態之程式或定位裝置進行印刷配線板之定位,則可更準確地進行印刷配線板之定位。因此,認為於將一個印刷配線板與另一個印刷配線板連接時或於一個印刷配線板安裝零件時,連接不良減少,且良率提高。再者,使用該程式進行印刷配線板之定位亦可於在焊接或經由各向異性導電膜(Anisotropic Conductive Film,ACF)之連接、經由各向異性導電膏(Anisotropic Conductive Paste,ACP)之連接或經由具有導電性之接著劑之連接等公知之連接方法中將一個印刷配線板與另一個印刷配線板連接時或於一個印刷配線板安裝零件時應用。When the positioning of the printed wiring board is performed using the program or the positioning device according to the embodiment of the present invention, the positioning of the printed wiring board can be performed more accurately. Therefore, it is considered that when one printed wiring board is connected to another printed wiring board or when a component is mounted on one printed wiring board, connection failure is reduced and the yield is improved. Furthermore, the positioning of the printed wiring board using the program may be performed by soldering or connection via an anisotropic conductive film (ACF), via an anisotropic conductive paste (ACP) or It is applied when a printed wiring board is connected to another printed wiring board by a known connection method such as connection of a conductive adhesive or when a printed wiring board is mounted on a part.
再者,本發明之實施形態之積層體之定位裝置20亦可進而具備使已決定位置之積層體移動而進行積層體之位置對準之位置對準手段(未圖示)。作為位置對準手段,既可使用例如帶式輸送機或鏈式輸送機等輸送機,亦可使用具備臂機構之移動裝置,亦可使用藉由使用氣體使積層體浮動而使其移動之移動裝置或移動手段,亦可使用使大致圓筒形等之物體旋轉而使積層體移動之移動裝置或移動手段(包含輥或軸承等)、以油壓為動力源之移動裝置或移動手段、以氣壓為動力源之移動裝置或移動手段、以馬達為動力源之移動裝置或移動手段、及具有高架(gantry)移動型線性導軌平台、高架移動型空氣導向器平台、堆疊型線性導軌平台、線性馬達驅動平台等平台之移動裝置或移動手段等。又,亦可使用公知之移動手段。Further, the positioning device 20 of the laminated body according to the embodiment of the present invention may further include a positioning means (not shown) for moving the laminated body at the determined position to position the laminated body. As the position aligning means, a conveyor such as a belt conveyor or a chain conveyor may be used, or a moving device having an arm mechanism may be used, or a movement in which the laminated body is floated by using a gas may be used. The apparatus or the moving means may be a moving device or a moving means (including a roller or a bearing) that rotates an object such as a substantially cylindrical shape to move the laminated body, a moving device or a moving means using a hydraulic pressure as a power source, or Air moving device or moving means for power source, mobile device or moving means with motor as power source, and gantry mobile linear guide platform, overhead moving air guide platform, stacked linear guide platform, linear A mobile device or a moving means of a platform such as a motor drive platform. Further, a known moving means can also be used.
於本發明中,所謂積層體包含銅與透明基材之積層體或印刷配線板。上述印刷配線板亦可為具有絕緣樹脂板、及設置於上述絕緣樹脂板上之電路之印刷配線板。In the present invention, the laminate includes a laminate of copper and a transparent substrate or a printed wiring board. The printed wiring board may be a printed wiring board having an insulating resin board and a circuit provided on the insulating resin board.
再者,本發明之實施形態之定位裝置20亦可具有表面安裝機或貼片機(chip mounter),或亦可於表面安裝機或貼片機設置本發明之實施形態之定位裝置。Furthermore, the positioning device 20 according to the embodiment of the present invention may have a surface mounter or a chip mounter, or a positioning device according to an embodiment of the present invention may be provided in a surface mounter or a mounter.
又,本發明之實施形態之定位裝置之上述金屬與透明基材之積層體亦 可為具有透明基材之板及設置於上述透明基材之板上之電路之印刷配線板。又,於此情形時,上述標記亦可為上述電路。Moreover, the laminated body of the metal and the transparent substrate of the positioning device according to the embodiment of the present invention is also It may be a printed wiring board having a transparent substrate and a circuit provided on the substrate of the transparent substrate. Moreover, in this case, the above-mentioned mark may be the above circuit.
亦可利用本發明之定位裝置進行印刷配線板之定位,並於經定位之印刷配線板安裝零件,藉此製造印刷配線板。進而,亦可利用本發明之印刷配線板之定位裝置進行印刷配線板之定位,進行經定位之印刷配線板之位置對準,並於經位置對準之印刷配線板安裝零件,藉此製造印刷配線板。藉此,可將電子零件等零件安裝於印刷配線板之正確之位置。The positioning device of the present invention can also be used to position the printed wiring board, and the components can be mounted on the positioned printed wiring board, thereby manufacturing the printed wiring board. Further, the positioning of the printed wiring board can be performed by using the positioning device of the printed wiring board of the present invention, and the position of the positioned printed wiring board can be aligned, and the printed wiring board can be mounted on the positionally aligned printed wiring board to manufacture the printing. Wiring board. Thereby, components such as electronic components can be mounted at the correct position on the printed wiring board.
又,亦可利用本發明之定位裝置進行印刷配線板之定位,並於經定位之印刷配線板連接另一印刷配線板,藉此製造印刷配線板。進而,亦可利用本發明之印刷配線板之定位裝置進行印刷配線板之定位,進行經定位之印刷配線板之位置對準,並於經位置對準之印刷配線板連接另一印刷配線板,藉此製造印刷配線板。藉此,可將另一印刷配線板連接於連接對象之印刷配線板上之正確之位置。此處,所謂「連接」既可為電性連接(例如焊接等),亦可為並非電性連接之利用接著材料等之連接。Moreover, the positioning of the printed wiring board can be performed by the positioning device of the present invention, and the other printed wiring board can be connected to the positioned printed wiring board, thereby manufacturing the printed wiring board. Furthermore, the positioning of the printed wiring board can be performed by using the positioning device of the printed wiring board of the present invention, the positional alignment of the positioned printed wiring board can be performed, and the printed wiring board can be connected to another printed wiring board by the positional alignment. Thereby, a printed wiring board is manufactured. Thereby, another printed wiring board can be connected to the correct position on the printed wiring board to be connected. Here, the "connection" may be an electrical connection (for example, soldering), or may be a connection using a material or the like that is not electrically connected.
再者,於本發明中,設為「印刷配線板」亦包含安裝有零件之印刷配線板及印刷基板。Furthermore, in the present invention, the "printed wiring board" also includes a printed wiring board on which components are mounted and a printed circuit board.
又,於本發明中被定位之上述金屬與透明基材之積層體亦可為具有透明基材之板及設置於上述透明基材之板上之電路之印刷配線板。又,於此情形時,上述標記亦可為上述電路。又,設為該電路亦包含配線。Further, the laminate of the metal and the transparent substrate to be positioned in the present invention may be a printed wiring board having a transparent substrate and a circuit provided on the substrate of the transparent substrate. Moreover, in this case, the above-mentioned mark may be the above circuit. Moreover, it is assumed that the circuit also includes wiring.
於本發明中,所謂「定位」包含「檢測標記或物體之位置」。又,於本發明中,所謂「位置對準」包含「於檢測出標記或物體之位置之後,基於上述所檢測出之位置使該標記或物體移動至特定之位置」。In the present invention, the "positioning" includes "detecting the position of a mark or an object". Further, in the present invention, the "positional alignment" includes "moving the mark or the object to a specific position based on the detected position after detecting the position of the mark or the object".
[實施例][Examples]
作為實施例A1~29及實施例B1~15,準備各種銅箔,於表1所記載之條件對一表面進行鍍敷處理作為粗化處理。As Examples A1 to 29 and Examples B1 to 15, various copper foils were prepared, and one surface was subjected to a plating treatment as a roughening treatment under the conditions described in Table 1.
於進行上述粗化鍍敷處理之後,對實施例A1~10、12~27、實施例B3、4、6、9~15進行以下用以形成耐熱層及防鏽層之鍍敷處理。以下表示耐熱層1之形成條件。After the above roughening plating treatment, the following plating treatments for forming the heat-resistant layer and the rust-preventing layer were carried out for Examples A1 to 10, 12 to 27, and Examples B3, 4, 6, and 9 to 15. The formation conditions of the heat-resistant layer 1 are shown below.
液體組成:鎳5~20g/L、鈷1~8g/LLiquid composition: nickel 5~20g/L, cobalt 1~8g/L
pH:2~3pH: 2~3
液溫:40~60℃Liquid temperature: 40~60°C
電流密度:5~20A/dm2 Current density: 5~20A/dm 2
庫侖量:10~20As/dm2 Coulomb amount: 10~20As/dm 2
於實施有上述耐熱層1之銅箔上形成耐熱層2。對於實施例B5、7、8,不進行粗化鍍敷處理,而於所準備之銅箔直接形成該耐熱層2。以下表示耐熱層2之形成條件。The heat-resistant layer 2 is formed on the copper foil on which the heat-resistant layer 1 described above is applied. For Examples B5, 7, and 8, the roughening plating treatment was not performed, and the heat-resistant layer 2 was directly formed on the prepared copper foil. The formation conditions of the heat-resistant layer 2 are shown below.
液體組成:鎳2~30g/L、鋅2~30g/LLiquid composition: nickel 2~30g/L, zinc 2~30g/L
pH:3~4pH: 3~4
液溫:30~50℃Liquid temperature: 30~50°C
電流密度:1~2A/dm2 Current density: 1~2A/dm 2
庫侖量:1~2As/dm2 Coulomb amount: 1~2As/dm 2
於實施有上述耐熱層1及2之銅箔上進而形成防鏽層。以下表示防鏽層之形成條件。Further, a rustproof layer is formed on the copper foil on which the heat-resistant layers 1 and 2 are applied. The conditions for forming the rustproof layer are shown below.
液體組成:重鉻酸鉀1~10g/L、鋅0~5g/LLiquid composition: potassium dichromate 1~10g/L, zinc 0~5g/L
pH:3~4pH: 3~4
液溫:50~60℃Liquid temperature: 50~60°C
電流密度:0~2A/dm2 (用於浸漬鉻酸鹽處理)Current density: 0~2A/dm 2 (for impregnation chromate treatment)
庫侖量:0~2As/dm2 (用於浸漬鉻酸鹽處理)Coulomb amount: 0~2As/dm 2 (for impregnation chromate treatment)
於實施有上述耐熱層1、2及防鏽層之銅箔上進而形成耐候性層。以下表示形成條件。A weather-resistant layer is further formed on the copper foil on which the heat-resistant layers 1 and 2 and the rust-preventing layer are applied. The formation conditions are shown below.
作為具有胺基之矽烷偶合劑,利用N-2-(胺基乙基)-3-胺基丙基三甲氧基矽烷(實施例A17、24~27)、N-2-(胺基乙基)-3-胺基丙基三乙氧基矽烷(實施例A1~16)、N-2-(胺基乙基)-3-胺基丙基甲基二甲氧基矽烷(實施例A18、28、29)、3-胺基丙基三甲氧基矽烷(實施例A19)、3-胺基丙基三乙氧基矽烷(實施例A20、21)、3-三乙氧矽基-N-(1,3-二甲基-亞丁基)丙基胺(實施例A22)、N-苯基-3-胺基丙基三甲氧基矽烷(實施例A23)進行塗佈、乾燥,而形成耐候性層。亦可以2種以上之組合使用該等矽烷偶合劑。同樣地,於實施例B1~15中,利用N-2-(胺基乙基)-3-胺基丙基三甲氧基矽烷進行塗佈、乾燥,而形成耐候性層。As a decane coupling agent having an amine group, N-2-(aminoethyl)-3-aminopropyltrimethoxydecane (Examples A17, 24-27), N-2-(aminoethyl) 3-aminopropyltriethoxydecane (Examples A1-16), N-2-(aminoethyl)-3-aminopropylmethyldimethoxydecane (Example A18, 28, 29), 3-aminopropyltrimethoxydecane (Example A19), 3-aminopropyltriethoxydecane (Examples A20, 21), 3-triethoxyindolyl-N- (1,3-Dimethyl-butylidene)propylamine (Example A22) and N-phenyl-3-aminopropyltrimethoxydecane (Example A23) were coated and dried to form a weather resistant Sex layer. These decane coupling agents may also be used in combination of two or more kinds. Similarly, in Examples B1 to 15, coating and drying were carried out using N-2-(aminoethyl)-3-aminopropyltrimethoxydecane to form a weather resistant layer.
再者,軋壓銅箔係以如下方式製造。製造表2所示之組成之銅錠,進行熱軋之後,重複進行300~800℃之連續退火線之退火及冷軋而獲得1~2mm厚之軋壓板。將該軋壓板於300~800℃之連續退火線中進行退火使其再結晶,並最終冷軋至表2之厚度為止,從而獲得銅箔。表2之「種類」一欄之「精銅」表示依據JIS H3100 C1100之精銅,「無氧銅」表示依據JIS H3100 C1020之無氧銅。又,「精銅+Ag:100ppm」意指於精銅添加有100質量ppm之Ag。Further, the rolled copper foil was produced in the following manner. A copper ingot having the composition shown in Table 2 was produced, and after hot rolling, annealing and cold rolling of a continuous annealing line of 300 to 800 ° C were repeated to obtain a rolled plate of 1 to 2 mm thick. The rolled plate was annealed in a continuous annealing line at 300 to 800 ° C to be recrystallized, and finally cold rolled to the thickness of Table 2 to obtain a copper foil. The "fine copper" in the "Category" column of Table 2 indicates the refined copper according to JIS H3100 C1100, and the "oxygen-free copper" indicates the oxygen-free copper according to JIS H3100 C1020. Further, "fine copper + Ag: 100 ppm" means that 100 parts by mass of Ag is added to the refined copper.
電解銅箔係使用JX日礦日石金屬公司製造之電解銅箔HLP箔。於進行電解研磨或化學研磨之情形時,記載有電解研磨或化學研磨後之板厚。The electrolytic copper foil was an electrolytic copper foil HLP foil manufactured by JX Nippon Mining & Metal Co., Ltd. In the case of electrolytic polishing or chemical polishing, the thickness of the plate after electrolytic polishing or chemical polishing is described.
再者,於表2中記載有表面處理前之銅箔製作步驟之要點。「高光澤軋壓」意指以記載之油膜當量之值進行最終冷軋(最終之再結晶退火後之冷軋)。「通常軋壓」意指以記載之油膜當量之值進行最終冷軋(最終之再結晶退火後之冷軋)。「化學研磨」、「電解研磨」意指於以下條件進行者。In addition, in Table 2, the point of the copper foil preparation process before surface treatment is described. "High-gloss rolling" means final cold rolling (cold rolling after final recrystallization annealing) at the value of the oil film equivalent described. "Normal rolling" means final cold rolling (cold rolling after final recrystallization annealing) at the value of the oil film equivalent described. "Chemical polishing" and "electrolytic polishing" mean those carried out under the following conditions.
「化學研磨」係使用H2 SO4 為1~3質量%、H2 O2 為0.05~0.15質量%、剩餘部分為水之蝕刻液,將研磨時間設為1小時。The "chemical polishing" is an etching solution in which H 2 SO 4 is 1 to 3% by mass, H 2 O 2 is 0.05 to 0.15 mass %, and the remainder is water, and the polishing time is 1 hour.
「電解研磨」係於磷酸67%+硫酸10%+水23%之條件,以電壓10V/cm2 且以表2中記載之時間(若進行10秒鐘之電解研磨,則研磨量成為1~2μm)進行。"Electrochemical polishing" is based on the conditions of phosphoric acid 67% + sulfuric acid 10% + water 23%, and the voltage is 10 V/cm 2 and the time shown in Table 2 (if electrolytic polishing is performed for 10 seconds, the polishing amount becomes 1~) 2 μm).
對於以上述方式製作之實施例之各試樣,使用與圖1所示者相同之構成之銅箔之表面狀態之評價裝置,如下述般進行各種評價。Each of the samples of the examples produced in the above manner was subjected to various evaluations as follows using an evaluation apparatus for the surface state of the copper foil having the same configuration as that shown in Fig. 1 .
(1)亮度曲線之斜率(1) slope of the brightness curve
將表面處理銅箔之經表面處理之側之表面貼合於聚醯亞胺膜(Kaneka製造之厚度25μm、50μm、東麗杜邦製造之厚度50μm)之兩面,藉由蝕刻(氯化鐵水溶液)去除銅箔而製作試樣膜。繼而,將印刷有線狀之黑色標記之印刷物鋪設於試樣膜之下方,並利用CCD相機隔著試樣膜拍攝印刷物。此處所使用之標記之寬度為0.1~0.4mm。其次,藉由電腦,於對於藉由拍攝而獲得之圖像沿著與所觀察到之線狀之標記延伸之方向垂直之方向測定每個觀察地點之亮度而製作之觀察地點-亮度曲線圖中,測定自標記之端部起至無標記之部分產生之亮度曲線、以及△B及t1、t2、Sv。將表示此時使用之攝影手段之構成及亮度曲線之斜率之測定方法的模式圖示於圖6。The surface of the surface-treated side of the surface-treated copper foil was bonded to both sides of a polyimide film (25 μm thick, 50 μm, thickness 50 μm manufactured by Toray DuPont) by etching (aqueous solution of ferric chloride). The copper foil was removed to prepare a sample film. Then, the print having the printed black mark was laid under the sample film, and the printed matter was imaged by the CCD camera through the sample film. The width of the mark used here is 0.1 to 0.4 mm. Next, in the observation point-luminance curve prepared by measuring the brightness of each observation point in a direction perpendicular to the direction in which the observed linear mark extends perpendicularly by the computer, the image is obtained by the computer. The brightness curve generated from the end portion of the mark to the unmarked portion, and ΔB and t1, t2, and Sv are measured. A schematic diagram showing a method of measuring the configuration of the photographing means used at this time and the slope of the luminance curve is shown in Fig. 6.
又,△B及t1、t2、Sv係如圖5所示般利用下述攝影手段進行測定。再者,橫軸之1像素相當於10μm長度。Further, ΔB and t1, t2, and Sv were measured by the following imaging means as shown in Fig. 5 . Furthermore, one pixel on the horizontal axis corresponds to a length of 10 μm.
攝影手段具備:CCD相機;平台(白色),其供放置下方設置有附有標記之紙之聚醯亞胺基板;照明用電源,其對聚醯亞胺基板之攝影部照射光;及搬送機(未圖示),其將下方設置有附有攝影對象之標記之紙之評價用聚醯亞胺基板搬送至平台上。以下表示該攝影手段之主要規格:The photographing means includes: a CCD camera; a platform (white) for placing a polyimine substrate provided with a labelled paper underneath; a lighting power source for irradiating light to a photographing portion of the polyimide substrate; and a transporter (not shown), the evaluation polyimide substrate on which the paper with the mark of the photographic subject is attached is conveyed to the platform. The main specifications of the camera are shown below:
.攝影手段:NIRECO股份有限公司製造之片材檢查裝置Mujiken. Photographic means: sheet inspection device manufactured by NIRECO Co., Ltd. Mujiken
.CCD相機:8192像素(160MHz)、1024灰階數位(10位元). CCD camera: 8192 pixels (160MHz), 1024 grayscale digits (10 bits)
.照明用電源:高頻照明電源(電源單元×2). Lighting power supply: high-frequency lighting power supply (power supply unit × 2)
.照明:螢光燈(30W). Lighting: Fluorescent (30W)
再者,對於圖6所示之亮度,0意指「黑」,亮度255意指「白」,將自「黑」至「白」之灰色之程度(黑白之濃淡、灰度)分割成256灰階而顯示。Furthermore, for the brightness shown in Figure 6, 0 means "black", brightness 255 means "white", and the degree of gray from "black" to "white" (black and white, grayscale) is divided into 256. Displayed in grayscale.
再者,由於所使用之標記之寬度小至0.1~0.4mm,故而所製作之亮度曲線成為如圖4(a)所示之V型或如圖4(b)所示之具有底部之V型。Furthermore, since the width of the mark used is as small as 0.1 to 0.4 mm, the brightness curve produced becomes a V-shape as shown in Fig. 4(a) or a V-shaped bottom as shown in Fig. 4(b). .
(2)視認性(樹脂透明性)及銅箔之表面狀態之評價;將表面處理銅箔之經表面處理之側之表面貼合於聚醯亞胺膜(Kaneka製造之厚度25μm、50μm、東麗杜邦製造之厚度50μm)之兩面,藉由蝕刻(氯化鐵水溶液)去除銅箔而製作試樣膜。再者,對於進行過粗化處理之銅箔,將銅箔之經粗化處理之面貼合於上述聚醯亞胺膜而製作上述試樣膜。於所獲得之樹脂層之一面貼附印刷物(直徑6cm之黑色之圓),並自相反面隔著樹脂層判定印刷物之視認性。將印刷物之黑色之圓之輪廓於圓周之90%以上之長度中清晰可見者評價為「◎」,將黑色之圓之輪廓於圓周之80%以上未達90%之長度中清晰可見者評價為「○」(以上為合格),將黑色之圓之輪廓於圓周之0~未達80%之長度中清晰可見者及輪廓變形者評價為「×」(不合格)。而且,將該視認性之評價直接作為銅箔表面狀態之評價。(2) Evaluation of the visibility (resin transparency) and the surface state of the copper foil; the surface of the surface-treated copper foil surface-bonded to the polyimide film (25 μm, 50 μm, east by Kaneka) On both sides of a thickness of 50 μm manufactured by Li Dubang, a copper foil was removed by etching (aqueous solution of ferric chloride) to prepare a sample film. Further, in the copper foil subjected to the roughening treatment, the roughened surface of the copper foil was bonded to the polyimide film to prepare the sample film. A printed matter (a black circle having a diameter of 6 cm) was attached to one surface of the obtained resin layer, and the visibility of the printed matter was judged from the opposite surface via a resin layer. The outline of the black circle of the printed matter is clearly visible in the length of 90% or more of the circumference as "◎", and the outline of the black circle is clearly visible in the length of 80% or more of the circumference and less than 90% of the circumference. "○" (the above is acceptable), and the silhouette of the black circle is clearly marked as "×" (failed) in the case where the length of the circle is 0 to less than 80%. Moreover, the evaluation of the visibility was directly evaluated as the surface state of the copper foil.
(3)良率(3) Yield
將表面處理銅箔之經表面處理之側之表面貼合於聚醯亞胺膜(Kaneka製造之厚度25μm、50μm、東麗杜邦製造之厚度50μm)之兩面,並對銅箔進行蝕刻(氯化鐵水溶液),而製作L/S為30μm/30μm之電路寬度之FPC。再者,對於進行過粗化處理之銅箔,將銅箔之經粗化處理之面貼合於上述聚醯亞胺膜。其後,嘗試利用CCD相機隔著聚醯亞胺檢測20μm×20μm見方之標記。於10次中可檢測到9次以上之情形時設為「◎」,於可檢測到7~8次之情形時設為「○」,於可檢測到6次之情形時設為「△」,於可檢測到5次以下之情形時設為「×」。The surface of the surface-treated side of the surface-treated copper foil was bonded to both sides of a polyimide film (25 μm thick, 50 μm, thickness 50 μm manufactured by Toray DuPont), and the copper foil was etched (chlorinated). An aqueous solution of iron was used to prepare an FPC having a circuit width of L/S of 30 μm / 30 μm. Further, in the copper foil subjected to the roughening treatment, the roughened surface of the copper foil was bonded to the polyimide film. Thereafter, an attempt was made to detect a mark of 20 μm × 20 μm square by using a CCD camera through polyimide. It is set to "◎" when 9 or more times can be detected in 10 times, "○" when 7 to 8 times can be detected, and "△" when 6 times can be detected. , set to "X" when it is possible to detect 5 or less times.
將上述各試驗之條件及評價示於表1~5中。The conditions and evaluation of each of the above tests are shown in Tables 1 to 5.
(評價結果)(Evaluation results)
對於實施例之聚醯亞胺基材,均無需於生產線上實際製造,而能以實驗室水準容易且準確地評價視認性,藉此,亦可容易且準確地對銅箔之表面狀態進行評價。銅箔表面狀態係藉由直接應用表中之視認性評價之「◎」、「○」(以上為合格)、「×」(不合格)而進行評價,藉此,亦可容易且準確地對銅箔之表面狀態進行評價。For the polyimide substrate of the embodiment, it is not necessary to actually manufacture on the production line, and the visibility can be easily and accurately evaluated at the laboratory level, whereby the surface state of the copper foil can be easily and accurately evaluated. . The surface state of the copper foil is evaluated by "◎", "○" (above the above), and "x" (failed) of the visibility evaluation in the direct application table, whereby the copper foil surface can be easily and accurately evaluated. The surface state of the copper foil was evaluated.
又,當代替上述例而使用寬度為1.0~2.0mm之較大之標記進行與上述實施例相同之試驗時,作為亮度曲線,獲得圖3所示之有底部之圖。於圖7中表示標記之寬度為1.0~2.0mm之情形時之亮度曲線之斜率評價時之表示攝影手段之構成及亮度曲線之斜率之測定方法的模式圖。於此情形時,亦獲得與上述實施例相同之結果,且與上述實施例同樣地,對於聚醯亞胺基 材,無需於生產線上實際地製造,而能以實驗室水準容易且準確地評價視認性,藉此,亦可容易且準確地對銅箔之表面狀態進行評價。Further, when the same test as in the above embodiment is carried out using a larger mark having a width of 1.0 to 2.0 mm instead of the above example, a bottom view shown in Fig. 3 is obtained as a luminance curve. FIG. 7 is a schematic view showing a method of measuring the configuration of the photographing means and the slope of the luminance curve when evaluating the slope of the luminance curve when the width of the mark is 1.0 to 2.0 mm. In this case as well, the same results as in the above examples were obtained, and similarly to the above examples, the polyimine group was used. The material can be easily and accurately evaluated on a production line, and the visibility can be easily and accurately evaluated at a laboratory level, whereby the surface state of the copper foil can be easily and accurately evaluated.
10‧‧‧銅箔之表面狀態之評價裝置10‧‧‧Evaluation device for the surface state of copper foil
11‧‧‧攝影手段11‧‧‧Photography
12‧‧‧電腦(觀察地點-亮度曲線圖製作手段、銅箔之表面狀態評價手段、平滑化處理手段)12‧‧‧Computer (observation location - means for producing brightness curve, means for evaluating surface state of copper foil, smoothing means)
13‧‧‧顯示手段13‧‧‧ Display means
14‧‧‧照明手段14‧‧‧Lighting means
15‧‧‧平台15‧‧‧ platform
16‧‧‧標記16‧‧‧ mark
17‧‧‧透明基材17‧‧‧Transparent substrate
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| JP2012270748A JP5323248B1 (en) | 2012-09-14 | 2012-12-11 | Visibility evaluation method for transparent substrate and positioning method for laminate |
| JP2012286127A JP5337907B1 (en) | 2012-10-12 | 2012-12-27 | Visibility evaluation device for transparent substrate, visibility evaluation program for transparent substrate and computer-readable recording medium on which it is recorded, positioning device for laminate, positioning program for laminate and computer-readable on which the recording is recorded Recording medium, apparatus for determining whether or not a mark of a laminate of a metal and a transparent substrate exists, a determination program, a computer-readable recording medium on which the mark is recorded, and a metal and a transparent substrate For detecting the position of a mark included in a laminate of the above, a detection program, and a computer-readable recording medium on which the same is recorded |
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|---|---|
| CN104884936B (en) | 2017-10-03 |
| KR20150053990A (en) | 2015-05-19 |
| WO2014042256A1 (en) | 2014-03-20 |
| TW201428259A (en) | 2014-07-16 |
| CN104884936A (en) | 2015-09-02 |
| KR101628643B1 (en) | 2016-06-21 |
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