TWI488249B - - Google Patents
Info
- Publication number
- TWI488249B TWI488249B TW101129379A TW101129379A TWI488249B TW I488249 B TWI488249 B TW I488249B TW 101129379 A TW101129379 A TW 101129379A TW 101129379 A TW101129379 A TW 101129379A TW I488249 B TWI488249 B TW I488249B
- Authority
- TW
- Taiwan
Links
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201110282861 CN102345112B (en) | 2011-09-22 | 2011-09-22 | Semiconductor processing device and gas spray head cooling plate thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201316435A TW201316435A (en) | 2013-04-16 |
| TWI488249B true TWI488249B (en) | 2015-06-11 |
Family
ID=45544176
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW101129379A TW201316435A (en) | 2011-09-22 | 2012-08-14 | Semiconductor processing device and gas spray head cooling plate thereof |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN102345112B (en) |
| TW (1) | TW201316435A (en) |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103367510A (en) * | 2012-03-30 | 2013-10-23 | 生阳新材料科技有限公司 | Cooling plate |
| CN103276371B (en) * | 2013-03-26 | 2015-12-09 | 中晟光电设备（上海）有限公司 | The diffuser of CVD equipment, refrigerating unit and method of cooling |
| TW201623681A (en) * | 2014-12-26 | 2016-07-01 | Advanced Micro Fab Equip Inc | Gas spraying head and deposition device |
| JP6675272B2 (en) * | 2016-06-07 | 2020-04-01 | 日本発條株式会社 | Cooling unit and method of manufacturing cooling unit |
| CN108054245A (en) * | 2018-01-11 | 2018-05-18 | 常州比太黑硅科技有限公司 | A kind of dry method etching device technological reaction chamber |
| CN207987325U (en) * | 2018-02-28 | 2018-10-19 | 北京铂阳顶荣光伏科技有限公司 | A kind of cooling system |
| CN110914971B (en) * | 2018-04-05 | 2023-04-28 | 朗姆研究公司 | Electrostatic chuck with cooling gas region and corresponding grooves and monopolar electrostatic clamping electrode mode |
| CN110310909B (en) * | 2019-07-15 | 2021-12-17 | 北京北方华创微电子装备有限公司 | Cooling device and heat treatment device |
| CN120933200A (en) | 2020-08-18 | 2025-11-11 | 玛特森技术公司 | Rapid thermal processing system with cooling system |
| CN112665261A (en) * | 2020-12-17 | 2021-04-16 | 湖南新中意食品有限公司 | A sterilizing equipment for jelly production |
| CN114040636A (en) * | 2021-10-13 | 2022-02-11 | 宁波安信数控技术有限公司 | Cooling plate structure of liquid cooling driver |
| CN114171437B (en) * | 2021-12-01 | 2025-05-23 | 北京北方华创微电子装备有限公司 | Cooling device for semiconductor process chamber and semiconductor process chamber |
| CN114043302B (en) * | 2021-12-06 | 2022-07-01 | 东莞市巨冈机械工业有限公司 | Five-axis machine tool rotary table with damping structure |
| CN114893477A (en) * | 2022-06-01 | 2022-08-12 | 北京北方华创微电子装备有限公司 | Semiconductor process equipment and gas homogenizing device thereof |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20100021631A1 (en) * | 2008-07-24 | 2010-01-28 | Yoshikazu Moriyama | Coating apparatus and coating method |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08218171A (en) * | 1995-02-08 | 1996-08-27 | Nippon Sanso Kk | Shower head type CVD equipment |
| KR101062462B1 (en) * | 2009-07-28 | 2011-09-05 | 엘아이지에이디피 주식회사 | Shower head and chemical vapor deposition apparatus comprising the same |
-
2011
- 2011-09-22 CN CN 201110282861 patent/CN102345112B/en active Active
-
2012
- 2012-08-14 TW TW101129379A patent/TW201316435A/en unknown
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20100021631A1 (en) * | 2008-07-24 | 2010-01-28 | Yoshikazu Moriyama | Coating apparatus and coating method |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102345112B (en) | 2013-08-21 |
| TW201316435A (en) | 2013-04-16 |
| CN102345112A (en) | 2012-02-08 |