TW201316435A - Semiconductor processing device and gas spray head cooling plate thereof - Google Patents

Abstract

The invention discloses a gas spray head cooling plate comprising a cover plate and a base body, wherein the base body comprises a soleplate and a side wall; multiple cooling liquid separation devices are arranged on the soleplate at intervals; a cooling liquid channel used for passing cooling liquid is respectively formed between the adjacent cooling liquid separation devices; and a hole suitable for passing gas is respectively arranged on the cooling liquid separation devices so that the gas is evenly cooled by the gas spray head cooling plate. The invention also discloses a semiconductor processing device which comprises the gas spray head cooling plate.

Description

Semiconductor processing equipment and gas shower head cooling plate thereof

The present invention relates to a semiconductor device using a gas processing device, and more particularly to a gas shower head cooling plate capable of cooling a gas and a semiconductor processing apparatus including the gas shower head cooling plate.

Gas showerheads are used to provide the desired one or more gases to a variety of manufacturing processes such as chemical vapor deposition (CVD), metal organic vapor phase deposition (MOCVD). In many cases, the gas showerhead must be cooled in order to avoid possible chemical reactions in the gas inside the gas showerhead. Patent document US Pat. No. 6,100,170, 438 discloses a gas showerhead, as shown in Fig. 1, which comprises an upper part 1, a lower gas distributor part 2, wherein the lower gas distributor part 2 is composed of a plurality of structured thicknesses of 1 mm The disc consists of a structured disc placed on the other such that a plurality of stacked structured mats are finally joined together by high temperature and high pressure diffusion bonding. As shown in Fig. 2, the lower gas distributor component 2 comprises a gas outlet channel 7 connected to the gas volume 8, a gas outlet channel 10 connected to the gas volume 9, and a cooling water chamber 14, wherein the gas outlet channel 7 is structured by a plurality of The etched apertures on the disk are cumulatively formed with a distribution density of 10-20 cells per square centimeter on the surface of the lower gas distributor component, and the gas volume 9 is connected by a structured plate on the disk in the B zone (not shown) Between the space composition, the web is formed by etching, and the gas outlet channel 10 is formed by the accumulation of holes in the etched annular disk on the plurality of structured disks, the cooling water chamber 14 being in the D region. A space is formed between the connecting plates (not shown) on the structured disk, which is formed by etching.

As can be seen from the above, the gas shower head includes a gas distribution device and a gas cooling device, and the two are welded together. Once the damage can only be replaced as a whole, some parts cannot be replaced or repaired; the structure of the gas shower head is very complicated. Many of the internal structures need to be formed by an etching process, which increases the manufacturing cost; the plurality of structured disks are connected together by high temperature and high pressure diffusion welding, which is time consuming and complicated, and on the other hand, There are multiple welds in the gas outlet passage and the cooling water chamber of the gas shower head, and the distribution density of the gas outlet passage is very large. Once the coolant leaks, the cooling function cannot be achieved.

The object of the present invention is to provide a gas shower head cooling plate which is simple in structure, convenient in manufacture and good in cooling effect, and can be installed on a gas shower head to cool the gas once the gas shower head or the gas shower head is cooled. If the board is damaged, partial replacement or repair can be achieved without the entire device being scrapped.

In order to achieve the above object, the present invention provides a gas shower head cooling plate, comprising: a bottom plate; a side wall, the side wall is connected with the bottom plate to form a first space; and a plurality of coolants are arranged on the bottom plate in the first space. The partitioning means forms a coolant passage between the adjacent coolant separating means, and the coolant separating means is provided with a through hole perpendicular to the bottom plate and adapted to pass the gas.

Optionally, the gas shower head cooling plate comprises a base body and a cover plate, the base body comprises a bottom plate and a side wall, and the cover plate is adapted to cooperate with the base body to seal the first space.

Optionally, the upper surface of the cover plate or the side wall is provided with a coolant inlet and a coolant outlet adapted to open to the first space.

Optionally, the cover plate is provided with a slot equal to the coolant separating device and extending through the upper surface of the cover plate and the lower surface of the cover plate, and the coolant separating device is nested and installed in the slot. .

Optionally, the method further includes a first water baffle and a second water baffle disposed at the intersection of the bottom plate, and the height of the first water baffle and the second water baffle extends to the lower surface of the cover plate. The first water baffle and the second water baffle divide the first space into a first edge cooling zone, a second edge cooling zone, and a second space located at a center, wherein the coolant partitioning device is distributed in the first In the two spaces, the opposite ends of the second space respectively have a total coolant inlet connected to the first edge cooling zone and a total coolant outlet connected to the second edge cooling zone.

Optionally, each column of the coolant partitioning device comprises at least one segment of separation unit, and a gap exists between the two adjacent sections of the partitioning unit along the direction of the coolant channel.

Optionally, the coolant partitioning device is distributed on the bottom plate along the coolant inlet and the coolant outlet array direction, and the coolant channel from the middle to the coolant channel on both sides, the coolant The width of the channel increases in turn.

Optionally, a gap is formed between the side wall and the end of the coolant separating device for passing the coolant, and the slit is sized to equal the flow of the coolant through each of the coolant channels.

Optionally, the coolant separating device is distributed on the bottom plate along the direction of the total coolant inlet and the total outlet of the coolant, and the coolant channel from the middle to the coolant channel on both sides, The width of the coolant passage is sequentially increased, and a gap suitable for passing the coolant is formed between the first flap, the second flap and the end of the coolant partition, the size of the slit being The coolant flow through each coolant channel is equal.

Optionally, from the middle of the coolant separating device to the coolant separating device on both sides, the length of the coolant separating device is sequentially decreased, and the coolant inlet, the coolant outlet or the total coolant The inlet and coolant outlets are located at the ends of the longest coolant separator.

Optionally, the coolant inlet is located at an end of the first edge cooling zone remote from the total coolant inlet, and the coolant outlet is located at a distance from the total coolant outlet of the second edge cooling zone. One end.

Optionally, the sidewall comprises a step structure on an inner surface of the sidewall and extending in a thickness direction of the sidewall, the height of the step structure extending to a lower surface of the cover.

Optionally, the coolant separating device comprises a first platform and a second platform which are connected in a similar shape, the longitudinal section of the first platform is larger than the longitudinal section of the second platform, and the first The second platform is located at a centered position above the first platform; the height of the first platform extends to a lower surface of the cover.

Optionally, a solder joint is connected between the base body and the cover plate.

Optionally, the through holes are evenly distributed on the coolant separator.

Optionally, the coolant separating device is integrally formed with the bottom plate.

Based on the gas shower head cooling plate described above, the present invention further provides a semiconductor processing apparatus comprising: a processing chamber; a susceptor located in the processing chamber for supporting a workpiece to be processed; a gas shower head, The gas shower head includes a plurality of gas nozzles adapted to spray the reaction gas into the processing chamber; the gas shower head cooling plate as described above is mounted on the gas shower head, and the gas shower head cooling plate is Facing the pedestal, wherein the cold The through hole in the liquid separation device corresponds to the gas nozzle of the gas shower head.

Compared with the prior art, the present invention has the following advantages: 1. The gas shower head cooling plate can be installed on the gas shower head to achieve cooling of the gas. Since the two are formed separately, once the entire device is damaged, it can be replaced or repaired. The partial components do not cause the entire device to be scrapped, which saves the cost; Second, all the structures of the gas shower head cooling plate can be formed by a mechanical processing process, the process is mature and the cost is low; Third, the cooling structure of the gas shower head cooling plate is simple, The cooling effect is good, and includes a cover plate and a base body, and a plurality of spaced-apart coolant liquid separation devices are disposed in the base body to form a coolant passage suitable for passing the coolant, and the coolant separation device is provided with a gas suitable for the gas Passing through holes, thereby achieving uniform cooling of the gas shower head cooling plate; Fourth, there is no weld at the air hole of the gas shower head cooling plate, eliminating the potential leakage of the air hole, and the cover plate and the bottom plate The welding process is mature, the processing process is mature, the processing process is simple, and the coolant leakage can be repaired. The specific embodiments of the present invention will be further described by the following examples and the accompanying drawings.

The invention provides a gas shower head cooling plate which can be installed on a gas shower head to cool the gas. Once the gas shower head or the gas shower head cooling plate is damaged, partial replacement or maintenance can be realized without the whole The device is scrapped.

The gas shower head cooling plate of the present invention comprises a cover plate and a base body, and the cover plate and the base body form a closed space, and a plurality of spaced apart cooling liquid separating devices are arranged in the base body to form a cooling suitable for passing the cooling liquid. a liquid passage, and a coolant partitioning device is provided with a passage suitable for passing gas The hole, thereby achieving the gas cooling function of the gas shower head cooling plate.

The technical solutions in the embodiments of the present invention are clearly and completely described in the following with reference to the accompanying drawings in the embodiments of the present invention. It is obvious that the described embodiments are only a part of the embodiments of the present invention, but not all embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without creative efforts are within the scope of the present invention.

The shape of the gas shower head cooling plate 10' of the present invention is any shape that is convenient for processing and suitable for use with a gas shower head. Specifically, the gas shower head cooling plate 10' is generally cylindrical in shape; in addition, the entire gas shower head cooling plate 10' can be formed by a machining process.

As shown in FIG. 3, FIG. 7, and FIG. 8, the gas shower head cooling plate 10' includes a cover plate 11 and a base body 21, wherein the cover plate 11 is provided with a plurality of through cover upper surface 12 and a cover lower surface 13 The tank 17 is provided with a plurality of coolant separating devices 30. When the cover plate 11 is fitted with the base body 21, the coolant separating device 30 is nested in the groove 17, that is, the shape and arrangement of the grooves 17 and the coolant are required. The partitioning device 30 is kept in agreement, and the cover plate 11 is connected to the base body 21 to form a closed space. Specifically, the cover 11 and the base 21 are connected together by welding, and the welding process may be conventional argon arc welding, electron beam welding, laser welding, brazing, and the like.

As shown in FIG. 8, the base body 21 includes a bottom plate 22 and side walls 20, and the side walls 20 are connected to the bottom plate 22 to form a first space. Specifically, as shown in FIG. 6, the bottom plate 22 and the side wall 20 of the base 21 may be integrally formed. The side wall 20 includes a step structure 201 on the inner surface of the side wall 20 (shown in the drawing) and extending in the thickness direction of the side wall 20 of the connecting bottom plate 22, the height of the step structure 201 extending to the lower surface 13 of the cover plate, such a structure makes the step structure 201 supports the cover plate 11 together with the first water baffle 24 and the second water baffle 25, increasing the strength of the entire gas shower head cooling plate 10', and facilitating the cover plate 11 Welding is performed with the base body 21.

As shown in FIG. 8 and FIG. 9, the first space on the bottom plate 22 is provided with a first water deflector 24 perpendicular to the bottom plate 22 and extending to the lower surface 13 of the gas shower head cooling plate 10' cover. The second water flap 25 is provided. The first water baffle 24 and the second water baffle 25 divide the first space into a first edge cooling zone 28, a second edge cooling zone 29, and a second space located at the center. Specifically, one end of the first water baffle 24 and the second water baffle 25 are fixedly connected to the side wall 20, and the bottom plate 22, the first water baffle 24 and a portion of the side wall 20 opposite to the first water baffle 24 form a first edge. The cooling zone 28; the bottom plate 22, the second water baffle 25 and a portion of the side wall 20 opposite to the second water baffle 25 form a second edge cooling zone 29; the first water baffle 24, the second baffle 25 and the bottom plate 22 Forming a second space, and the opposite ends of the space have two openings as a total coolant inlet 26 communicating with the first edge cooling zone 28 and a total coolant outlet 27 communicating with the second edge cooling zone 29, ie, The coolant flows in the first edge cooling zone 28 and under the blocking action of the first baffle 24, the coolant flows to the coolant total inlet 26, after which the coolant flows through the coolant separator 30 and is in the first baffle 24. The cooling liquid is discharged into the total coolant outlet 27 by the blocking action of the second water retaining plate 25. Since the first water baffle 24 and the second water baffle 25 are in close contact with the lower surface 13 of the cover plate, the coolant of the first edge cooling zone 28 and the second edge cooling zone 29 does not leak to other areas, thereby achieving better performance. Cooling effect.

As shown in FIG. 7 and FIG. 8, the second space on the bottom plate 22 is provided with a coolant separation device 30 having the same number as the number of the grooves 17. The shape of the coolant separation device 30 is similar to the shape of the groove 17, and both There is a gap therebetween so that the coolant separator 30 can be embedded in the groove 17 and welded. The shape of the tank 17 and the coolant separator 30 is any shape suitable for machining, but considering the coolant separator The connection between the 30 and the groove 17 is a welded connection. According to the welding process characteristics, the weld of the two welded parts should not contain sharp corners, and the ends of the groove 17 and the coolant separating device 30 are semicircular, and the middle is rectangle. Of course, the shape of the groove 17 and the coolant partitioning device 30 may be other shapes that do not contain sharp corners.

Specifically, as shown in FIG. 8 , the coolant partitioning device 30 includes a first platform 311 and a second platform 312 which are connected in a similar shape, and the longitudinal section of the first platform 311 is larger than the longitudinal section of the second platform 312 . And the second platform 312 is located at a centered position above the first platform 311, and the height of the first platform 311 extends to the lower surface 13 of the cover plate. As shown in FIG. 6, such a structure enables the first platform 311 to be combined with the first water deflector. 24. The second water deflector 25 together supports the cover plate 11 thereon, increasing the strength of the entire gas shower head cooling plate 10', and facilitating the groove 17 in the cover plate 11 and the coolant separating device 30 in the base body 21. Welding between them.

As shown in FIG. 8, a coolant passage 31 is formed between the adjacent coolant partitioning devices 30 so that the coolant can flow between the coolant passages 31. The distribution of the coolant separator 30 on the bottom plate 22 is any form suitable for achieving uniform cooling of the gas. Specifically, the coolant separating device 30 is distributed on the bottom plate 22 along the cooling total inlet 26 and the cooling liquid total outlet 27, and from the intermediate coolant separating device 30 to the coolant separating devices 30 on both sides, the coolant separating device The length of 30 is sequentially decreased, that is, from the coolant partitioning device 30 on the leftmost or rightmost side (shown in the drawing) to the coolant separator 30 in the middle (shown in the drawing), the length of the coolant separator 30 In order to achieve uniform cooling, the total coolant inlet 26 and the total coolant outlet 27 are respectively disposed at both ends of the longest coolant separator 30. In order to make the coolant more energy from the coolant located in the edge region of the second space By means of the passage 31 to achieve uniform cooling, two means can be used. On the one hand, in all the coolant passages 31, from the intermediate coolant passage 31 to the coolant passages 31 on both sides, the width of the coolant passage 31 is sequentially increased, that is, from The coolant channel 31 on the leftmost or rightmost side (shown in the figure) to the coolant channel 31 in the middle (shown in the figure), the width of the coolant channel 31 is sequentially decreased; on the other hand, each column of coolant The partitioning device 30 may include a plurality of partitioning units having the same structure, that is, each column of the coolant separating device 30 may be continuous or intermittent (not shown), and each of the columns of the coolant separating device 30 There is a gap between the separation units to allow the coolant to form a coolant split at this gap to allow the coolant to flow in multiple directions. It should be noted that the size of the spacing between adjacent coolant passages 31 is not limited by the drawings.

As shown in FIGS. 8 and 9, a gap exists between the first water baffle 24, the second water baffle 25, and the end of the coolant separator 30 so that the coolant can flow through the slit to the coolant passage 31. Therefore, the shape of the first water baffle plate 24 and the second water baffle plate 25 is preferably a sickle shape with respect to the arrangement of the above-described coolant partitioning device 30. Specifically, the portion opposite to the coolant separating device 30 is curved so that there is a gap between the end of the coolant separating device 30 and the first water blocking plate 24 and the second water blocking plate 25, and the side wall of the bottom plate 22 The 20 connected parts are linear. In order to achieve uniform cooling of the gas distributor, the gap is sized such that the flow of coolant through each of the coolant passages 31 is equal. Specifically, the size of the slit can be obtained by calculation and experiment.

The layout between the first water baffle 24, the second water baffle 25 and the coolant partitioning device 30 is given in the above embodiments and the drawings, but this does not limit the scope of protection of the present invention, any coolant There is a gap between the partitioning device 30 and the water deflector and the coolant is uniformly flowed The layout of the amount through the gap is within the scope of the present invention.

As shown in FIGS. 3, 8, and 9, the coolant separator 30 is provided with a through hole 32 adapted to pass a gas, and the through hole 32 is formed by drilling. In order to allow the gas to be uniformly cooled, in particular, the through holes 32 are evenly distributed on the coolant separator 30.

As shown in FIG. 5, the bottom plate 22 is provided with a gas hole 33 at a position corresponding to the through hole 32. Specifically, as shown in FIG. 6, the air hole 33 may be formed in the same processing step as the through hole 32.

As shown in FIG. 7, the gas shower head cooling plate 10' further includes a coolant inlet 15 and a coolant outlet 16 leading to the base 21, and the coolant flows in through the coolant inlet 15, and is cooled by the coolant passage 31. The coolant flows out through the coolant outlet 16. Both may be provided on the upper surface 12 of the cover or on the side wall 20 of the base 21, and the specific embodiment is dependent on the gas shower used in conjunction with the gas shower head cooling plate 10'. Specifically, the coolant inlet 15 and the coolant outlet 16 are disposed on the upper surface 12 of the cover.

The structure of the coolant inlet 15 and the coolant outlet 16 can be set according to the actual application conditions, i.e., the gas shower head fitted to the gas shower head cooling plate 10'. Specifically, the structure of the coolant inlet 15 and the coolant outlet 16 is a hollow tube.

As shown in FIG. 9, the coolant inlet 15 and the coolant outlet 16 lead to the first edge cooling zone 28 and the second edge cooling zone 29 of the base 21, respectively. Thus, the coolant flows from the coolant inlet 15 to the first edge cooling zone 28, then through the coolant channel 31 to the second edge cooling zone 29, and finally out of the coolant outlet 16. More specifically, the coolant inlet 15 and the coolant outlet 16 are located at the end of the first edge cooling zone 28, the second edge cooling zone 29 away from the total coolant inlet 26, and the total coolant outlet 27 for better cooling. . Of course, according to the gas sprinkler In the practical application of the cooling plate 10', the positions of the coolant inlet 15 and the coolant outlet 16 can be adjusted accordingly.

It should be noted that, due to the welded connection between the cover 11 and the base 21, in order to make the weld formed between the cover 11 and the base 21 have greater strength, the thickness of the cover 11 and the side wall 20 should be based on the welding used. Depending on the process, it meets the welding process requirements.

In summary, as shown in FIG. 9, the gas cooling principle of the gas shower head cooling plate 10' in the present invention is as follows: the coolant flows in from the coolant inlet 15, under the blocking action of the first water deflector 24, The coolant flows in the first edge cooling zone 28 to cool the first edge cooling zone 28; subsequently, the coolant enters the coolant total inlet 26 and is separated from the coolant by the first baffle 24 and the second baffle 25. The gap between the ends of the device 30 flows to the coolant passage 31 formed between the coolant separators 30, the gap being sized such that the coolant flow rate of each coolant passage 31 is equal, when each column of the coolant separator 30 includes a plurality of sections When the unit is separated, the coolant passes through the coolant passage 31 to form a split between the gaps between the partitioning units, and flows in a plurality of directions, so that the gas in the gas shower head cooling plate 10' is uniformly cooled; flowing through the coolant passage The cooling liquid of 31 flows into the total coolant outlet 27, and flows along the second edge cooling zone 29 under the blocking action of the second water deflector 25, so that the second edge cooling zone 29 is cooled, and finally, the cooling liquid flows to the cooling. Liquid outflow 16 and flows out from the cooling liquid outlet 16. At this point, the cooling process of the entire gas is over.

The first water baffle 24 and the second water baffle 25 are disposed in the base 21 of the gas shower head cooling plate 10' in the above embodiment, and the side wall 20 and the cover plate 11 may form a first edge cooling zone 28 and a second The edge cooling zone 29 cools the edge region of the gas showerhead cooling plate 10' for better cooling.

The gas shower head cooling plate 10' of the present invention can also be constructed by the following structure, and can solve the technical problem to be solved by the above-described gas shower head cooling plate.

It differs from the gas shower head cooling plate described above in that the first water baffle 24 and the second water baffle 25 are not disposed in the base body 21. Correspondingly, there is a gap between the side wall 20 and the end of the coolant separating device 30 for allowing the coolant to pass through, the gap being sized such that the flow rate of the coolant passing through each of the coolant channels 31 is equal, and the coolant separating device 30 is along The coolant inlet 15 and the coolant outlet 16 are arranged in the direction of the bottom plate 22, and the width of the coolant passage 31 is sequentially increased from the intermediate coolant passage 31 to the coolant passages 31 on both sides, and the coolant separation device 30 from the middle The lengths of the coolant separators 30 to the coolant partitioning devices 30 on both sides are sequentially decreased, and in order to achieve uniform cooling, the corresponding coolant inlets 15 and coolant outlets 16 are directly disposed near the ends of the longest coolant separators 30.

The gas shower head cooling plate 10' of the present invention can be applied to the field of semiconductor processing, such as chemical vapor deposition (CVD), metal organic chemical vapor deposition (MOCVD), etc., and it can also be applied to other applications requiring gas spraying. The head and the area where the gas needs to be cooled.

Further, the present invention also provides a semiconductor processing apparatus comprising: a processing chamber, a susceptor located in the processing chamber for supporting a workpiece to be processed, a gas shower head cooling plate 10' as described above, It is mounted to the gas shower head with the gas shower head cooling plate 10' facing the base, wherein the through holes 32 in the coolant separator correspond to the gas nozzles of the gas shower head.

The above description of the disclosed embodiments enables those skilled in the art to make or use the invention. Various modifications to these embodiments will be apparent to those skilled in the art, in this context. The general principles defined may be implemented in other embodiments without departing from the spirit or scope of the invention. Therefore, the present invention is not to be limited to the embodiments shown herein, but the scope of the invention is to be accorded

1‧‧‧ upper

2‧‧‧ gas distributor parts

7‧‧‧ gas export channel

8‧‧‧ gas volume

9‧‧‧ gas volume

10‧‧‧ gas export channel

10'‧‧‧ gas sprinkler cooling plate

11‧‧‧ Cover

12‧‧‧ Upper surface of the cover

13‧‧‧ Cover lower surface

14‧‧‧Cooling water chamber

15‧‧‧Coolant inlet

16‧‧‧ Coolant outlet

17‧‧‧ slots

20‧‧‧ side wall

201‧‧‧step structure

21‧‧‧ base

22‧‧‧floor

24‧‧‧First flap

25‧‧‧ second baffle

26‧‧‧Total coolant inlet

27‧‧‧Total coolant outlet

28‧‧‧First edge cooling zone

29‧‧‧Second edge cooling zone

30‧‧‧Cooling separator

31‧‧‧Solution channel

311‧‧‧ first platform

312‧‧‧ Second platform

32‧‧‧through hole

33‧‧‧ stomata

BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 is a cross-sectional view showing a gas shower head of the prior art.

Fig. 2 is a partial enlarged view of Fig. 1;

3 is a top plan view of a gas shower head cooling plate in the embodiment of the gas shower head cooling plate provided by the present invention.

4 is a side view of a gas shower head cooling plate in the embodiment of the gas shower head cooling plate provided by the present invention.

Figure 5 is a bottom plan view of the gas shower head cooling plate of the gas shower head cooling plate embodiment provided by the present invention.

Figure 6 is a partial cross-sectional view of the gas shower head cooling plate of Figure 3 taken along the line A-A.

Figure 7 is a perspective view of the cover plate in the exploded view of the gas shower head cooling plate of Figure 3.

Figure 8 is a perspective view of the base body in the exploded view of the gas shower head cooling plate of Figure 3.

Figure 9 is a schematic view showing the cooling of the gas shower head cooling plate shown in Figure 3.

15‧‧‧Coolant inlet

16‧‧‧ Coolant outlet

24‧‧‧First flap

25‧‧‧ second baffle

26‧‧‧Total coolant inlet

27‧‧‧Total coolant outlet

28‧‧‧First edge cooling zone

29‧‧‧Second edge cooling zone

30‧‧‧Cooling separator

31‧‧‧Solution channel

32‧‧‧through hole

Claims (17)

A gas shower head cooling plate (10'), comprising: a bottom plate (22); a side wall (20), the side wall (20) is connected with the bottom plate (22) to form a first space The bottom plate (22) in the first space is provided with a plurality of coolant separating devices (30), and a coolant channel (31) is formed between the adjacent coolant separating devices (30). The coolant partitioning device (30) is provided with a through hole (32) perpendicular to the bottom plate (22) and adapted to pass gas. The gas shower head cooling plate (10') according to claim 1, wherein the gas shower head cooling plate (10') comprises a base body (21) and a cover plate (11). The base body (21) includes the bottom plate (22) and the side wall (20), the cover plate (11) includes a cover upper surface (12) and a cover lower surface (13), the cover A plate (11) is adapted to cooperate with the base (21) to seal the first space. The gas shower head cooling plate (10') according to claim 2, wherein the upper surface (12) of the cover or the side wall (20) is provided with a passage suitable for the first a coolant inlet (15) and a coolant outlet (16) in a space. The gas shower head cooling plate (10') according to claim 2, wherein the cover plate (11) is provided with a quantity equal to the coolant separation device (30) and runs through the The cover upper surface (12), a slot (17) of the cover lower surface (13), and the coolant partitioning device (30) are nested in the slot (17). The gas shower head cooling plate (10') according to claim 2, further comprising a first water baffle (24) and a second water baffle disposed at the intersection of the bottom plate (22) (25), the first flap (24) The height of the second water baffle (25) extends to the lower surface (13) of the cover, and the first water baffle (24) and the second water baffle (25) The first space is divided into a first edge cooling zone (28), a second edge cooling zone (29) and a centrally located second space, and the coolant separating device (30) is distributed in the second space In the space, opposite ends of the second space respectively have a coolant total inlet (26) communicating with the first edge cooling zone (28) and a second communicating with the second edge cooling zone (29) Coolant total outlet (27). The gas shower head cooling plate (10') according to claim 1, wherein each of the coolant separating devices (30) includes at least one section of a partitioning unit along a coolant passage (31). There is a gap between the adjacent two sections of the separation unit. The gas shower head cooling plate (10') according to claim 3, wherein the coolant separating device (30) is along the cooling liquid inlet (15) and the cooling liquid outlet (16) Arranging directions are distributed on the bottom plate (22); from the coolant channel (31) in the middle to the coolant channel (31) on both sides, the width of the coolant channel (31) is in turn Increase. The gas shower head cooling plate (10') according to claim 7, wherein the side wall (20) and the end of the coolant separating device (30) are adapted to be cooled. The gap through which the liquid passes, the slit being sized to equal the flow of coolant through each of the coolant passages (31). The gas shower head cooling plate (10') according to claim 5, wherein the coolant separating device (30) is along the total coolant inlet (26), the total coolant outlet ( 27) an arrangement direction is distributed on the bottom plate (22), from the coolant passage (31) in the middle to the coolant passage (31) on both sides, the coolant passage The width of (31) is sequentially increased; the first flap (24), the second flap (25) and the end of the coolant partition (30) are adapted to be A gap through which the coolant passes, the slit being sized to equal the flow of coolant through each of the coolant passages (31). A gas shower head cooling plate (10') according to claim 7 or claim 9, wherein the coolant separating means (30) from the middle to the coolant separating means (30) on both sides The length of the coolant partitioning device (30) is sequentially decreased, the coolant inlet (15), the coolant outlet (16) or the coolant inlet (26), the coolant The total outlet (27) is located at the ends of the longest coolant separator (30). The gas shower head cooling plate (10') according to claim 5, wherein the coolant inlet (15) is located away from the coolant in the first edge cooling zone (28) At one end of the total inlet (26), the coolant outlet (16) is located at an end of the second edge cooling zone (29) remote from the total coolant outlet (27). The gas shower head cooling plate (10') according to claim 4, wherein the side wall (20) includes an inner surface of the side wall (20) and along the side wall (20) A step structure (201) extending in a thickness direction, the height of the step structure (201) extending to the lower surface (13) of the cover plate. The gas shower head cooling plate (10') according to claim 4, wherein the coolant separating device (30) comprises a first platform (311), a first shape connected in a similar shape. a second platform (312), the longitudinal dimension of the first platform (311) is larger than a longitudinal section of the second platform (312), and the second platform (312) is located at the first a centered position above the platform (311); the height of the first platform (311) extends to the lower surface of the cover (13). A gas shower head cooling plate (10') according to claim 2, wherein the base body (21) and the cover plate (11) are welded together. The gas shower head cooling plate (10') according to claim 1, wherein the through hole (32) is evenly distributed on the coolant partitioning device (30). A gas shower head cooling plate (10') according to claim 1, wherein the coolant separating means (30) is integrally formed with the bottom plate (22). A semiconductor processing apparatus, comprising: a processing chamber; a pedestal located in the processing chamber for supporting a workpiece to be processed; a gas shower head, the gas shower head comprising a plurality of a gas nozzle adapted to spray a reaction gas into the processing chamber; as claimed in claim 1, item 1, item 2, item 3, item 4, item 5, item 6, item 7, item The gas shower head cooling plate (10') according to any one of the eighth, the ninth, the ninth, the ninth, the ninth, the fourth, the Mounted to the gas shower head, and the gas shower head cooling plate (10') faces the base, wherein the through hole (32) on the coolant separating device and the The gas spout of the gas shower head corresponds.