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TWI479120B - Surface shape measuring device - Google Patents

Surface shape measuring device Download PDF

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Publication number
TWI479120B
TWI479120B TW096146305A TW96146305A TWI479120B TW I479120 B TWI479120 B TW I479120B TW 096146305 A TW096146305 A TW 096146305A TW 96146305 A TW96146305 A TW 96146305A TW I479120 B TWI479120 B TW I479120B
Authority
TW
Taiwan
Prior art keywords
data
surface shape
gas
data processing
processing unit
Prior art date
Application number
TW096146305A
Other languages
English (en)
Chinese (zh)
Other versions
TW200840990A (en
Inventor
Mitsunori Toba
Noriyuki Takahashi
Norio Uetake
Tadashi Takahashi
Original Assignee
Nippon Electric Glass Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Glass Co filed Critical Nippon Electric Glass Co
Publication of TW200840990A publication Critical patent/TW200840990A/zh
Application granted granted Critical
Publication of TWI479120B publication Critical patent/TWI479120B/zh

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B13/00—Measuring arrangements characterised by the use of fluids
    • G01B13/16—Measuring arrangements characterised by the use of fluids for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B13/00—Measuring arrangements characterised by the use of fluids
    • G01B13/22—Measuring arrangements characterised by the use of fluids for measuring roughness or irregularity of surfaces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D11/00—Component parts of measuring arrangements not specially adapted for a specific variable
    • G01D11/30—Supports specially adapted for an instrument; Supports specially adapted for a set of instruments
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M5/00—Investigating the elasticity of structures, e.g. deflection of bridges or air-craft wings
    • G01M5/0033—Investigating the elasticity of structures, e.g. deflection of bridges or air-craft wings by determining damage, crack or wear
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/38—Concrete; Lime; Mortar; Gypsum; Bricks; Ceramics; Glass
    • G01N33/386—Glass

Landscapes

  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Food Science & Technology (AREA)
  • Ceramic Engineering (AREA)
  • Aviation & Aerospace Engineering (AREA)
  • Medicinal Chemistry (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Measuring Arrangements Characterized By The Use Of Fluids (AREA)
  • Length Measuring Devices By Optical Means (AREA)
TW096146305A 2006-12-05 2007-12-05 Surface shape measuring device TWI479120B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006328597A JP5343314B2 (ja) 2006-12-05 2006-12-05 表面形状測定装置

Publications (2)

Publication Number Publication Date
TW200840990A TW200840990A (en) 2008-10-16
TWI479120B true TWI479120B (zh) 2015-04-01

Family

ID=39546942

Family Applications (1)

Application Number Title Priority Date Filing Date
TW096146305A TWI479120B (zh) 2006-12-05 2007-12-05 Surface shape measuring device

Country Status (4)

Country Link
JP (1) JP5343314B2 (ja)
KR (1) KR20080052410A (ja)
CN (1) CN101196391B (ja)
TW (1) TWI479120B (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI412613B (ja) * 2009-11-11 2013-10-21

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101160466B1 (ko) 2010-12-27 2012-06-28 (주)에스티아이 잉크젯 헤드 구동방법
JP5907429B2 (ja) 2012-07-24 2016-04-26 日本電気硝子株式会社 板状体の反り検査装置及びその反り検査方法
JP6171048B1 (ja) * 2016-04-28 2017-07-26 株式会社ディスコ 研削装置
CN106017352B (zh) * 2016-07-22 2019-10-29 大连理工大学 一种蜂窝芯面形的测量方法
CN106017353B (zh) * 2016-07-22 2019-07-16 大连理工大学 一种蜂窝芯面形测量装置
CN106403840A (zh) * 2016-09-09 2017-02-15 蚌埠中建材信息显示材料有限公司 一种超薄浮法玻璃弯曲度检测方法
CZ2020113A3 (cs) * 2020-03-05 2020-10-21 FOR G, s.r.o. Způsob bezkontaktního zjišťování geometrické přesnosti tvaru transparentního tvarovaného plošného výrobku ze skla nebo plastu a zařízení k jeho provádění

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JP2005017386A (ja) * 2003-06-23 2005-01-20 V Technology Co Ltd 平板状ワークの検査、修正装置
CN2682381Y (zh) * 2004-02-16 2005-03-02 洪雄善 产品外观尺寸自动扫描检测机
US20060156878A1 (en) * 2004-12-30 2006-07-20 David Faires Portioning apparatus and method

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JPH06307820A (ja) * 1993-04-22 1994-11-04 Daido Steel Co Ltd 形状検査装置
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JPH09126745A (ja) * 1995-10-31 1997-05-16 Mitsubishi Heavy Ind Ltd ガラス基板の平面度測定装置
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CN2506976Y (zh) * 2001-09-30 2002-08-21 西安交通大学 微轮廓测量仪
JP2003280738A (ja) * 2002-03-26 2003-10-02 Kawasaki Heavy Ind Ltd 障害物認識方法および障害物認識装置
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Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5616853A (en) * 1995-03-29 1997-04-01 Kyocera Corporation Measuring machine for measuring object
JP2005017386A (ja) * 2003-06-23 2005-01-20 V Technology Co Ltd 平板状ワークの検査、修正装置
CN2682381Y (zh) * 2004-02-16 2005-03-02 洪雄善 产品外观尺寸自动扫描检测机
US20060156878A1 (en) * 2004-12-30 2006-07-20 David Faires Portioning apparatus and method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI412613B (ja) * 2009-11-11 2013-10-21

Also Published As

Publication number Publication date
CN101196391B (zh) 2012-07-04
KR20080052410A (ko) 2008-06-11
TW200840990A (en) 2008-10-16
CN101196391A (zh) 2008-06-11
JP2008139268A (ja) 2008-06-19
JP5343314B2 (ja) 2013-11-13

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