TWI478810B - An insulating resin sheet, and a multilayer printed circuit board using the same - Google Patents
An insulating resin sheet, and a multilayer printed circuit board using the same Download PDFInfo
- Publication number
- TWI478810B TWI478810B TW098109532A TW98109532A TWI478810B TW I478810 B TWI478810 B TW I478810B TW 098109532 A TW098109532 A TW 098109532A TW 98109532 A TW98109532 A TW 98109532A TW I478810 B TWI478810 B TW I478810B
- Authority
- TW
- Taiwan
- Prior art keywords
- layer
- insulating resin
- resin sheet
- insulating
- sheet
- Prior art date
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- 229920005989 resin Polymers 0.000 title claims description 147
- 239000011347 resin Substances 0.000 title claims description 147
- 239000011342 resin composition Substances 0.000 claims description 95
- 229920001187 thermosetting polymer Polymers 0.000 claims description 85
- 238000009499 grossing Methods 0.000 claims description 34
- 239000000758 substrate Substances 0.000 claims description 33
- 238000007747 plating Methods 0.000 claims description 28
- 238000000034 method Methods 0.000 claims description 27
- 239000004020 conductor Substances 0.000 claims description 25
- 238000004519 manufacturing process Methods 0.000 claims description 23
- 238000003475 lamination Methods 0.000 claims description 22
- 229910052751 metal Inorganic materials 0.000 claims description 22
- 239000002184 metal Substances 0.000 claims description 22
- 238000010030 laminating Methods 0.000 claims description 21
- 238000010438 heat treatment Methods 0.000 claims description 17
- 238000007788 roughening Methods 0.000 claims description 16
- 239000002985 plastic film Substances 0.000 claims description 11
- 229920006255 plastic film Polymers 0.000 claims description 11
- 230000001681 protective effect Effects 0.000 claims description 8
- 239000013013 elastic material Substances 0.000 claims description 6
- 238000004080 punching Methods 0.000 claims description 5
- 238000003825 pressing Methods 0.000 claims description 2
- 239000010410 layer Substances 0.000 description 197
- 229920000647 polyepoxide Polymers 0.000 description 40
- 239000003822 epoxy resin Substances 0.000 description 38
- 239000000047 product Substances 0.000 description 32
- 238000001723 curing Methods 0.000 description 31
- 230000009477 glass transition Effects 0.000 description 29
- 239000003795 chemical substances by application Substances 0.000 description 28
- 239000004744 fabric Substances 0.000 description 24
- 239000011521 glass Substances 0.000 description 19
- -1 vinyl benzyl Chemical group 0.000 description 19
- 239000000463 material Substances 0.000 description 18
- 239000002966 varnish Substances 0.000 description 18
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 17
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N phenol group Chemical group C1(=CC=CC=C1)O ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 16
- 239000003960 organic solvent Substances 0.000 description 15
- 229910052802 copper Inorganic materials 0.000 description 14
- 239000010949 copper Substances 0.000 description 14
- 239000000243 solution Substances 0.000 description 14
- XLJMAIOERFSOGZ-UHFFFAOYSA-M cyanate Chemical compound [O-]C#N XLJMAIOERFSOGZ-UHFFFAOYSA-M 0.000 description 13
- 235000013824 polyphenols Nutrition 0.000 description 13
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 11
- 206010042674 Swelling Diseases 0.000 description 11
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 11
- 230000008961 swelling Effects 0.000 description 11
- UFWIBTONFRDIAS-UHFFFAOYSA-N Naphthalene Chemical compound C1=CC=CC2=CC=CC=C21 UFWIBTONFRDIAS-UHFFFAOYSA-N 0.000 description 10
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 10
- 230000000052 comparative effect Effects 0.000 description 10
- 238000001035 drying Methods 0.000 description 10
- 238000005259 measurement Methods 0.000 description 9
- KJCVRFUGPWSIIH-UHFFFAOYSA-N 1-naphthol Chemical compound C1=CC=C2C(O)=CC=CC2=C1 KJCVRFUGPWSIIH-UHFFFAOYSA-N 0.000 description 8
- 229920002799 BoPET Polymers 0.000 description 8
- RAXXELZNTBOGNW-UHFFFAOYSA-N imidazole Natural products C1=CNC=N1 RAXXELZNTBOGNW-UHFFFAOYSA-N 0.000 description 8
- 239000000203 mixture Substances 0.000 description 8
- 239000002253 acid Substances 0.000 description 7
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 6
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 6
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 description 6
- 230000015572 biosynthetic process Effects 0.000 description 6
- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 description 6
- ZUOUZKKEUPVFJK-UHFFFAOYSA-N diphenyl Chemical compound C1=CC=CC=C1C1=CC=CC=C1 ZUOUZKKEUPVFJK-UHFFFAOYSA-N 0.000 description 6
- 238000007772 electroless plating Methods 0.000 description 6
- 239000000126 substance Substances 0.000 description 6
- 239000004593 Epoxy Substances 0.000 description 5
- 229920001971 elastomer Polymers 0.000 description 5
- LNEPOXFFQSENCJ-UHFFFAOYSA-N haloperidol Chemical compound C1CC(O)(C=2C=CC(Cl)=CC=2)CCN1CCCC(=O)C1=CC=C(F)C=C1 LNEPOXFFQSENCJ-UHFFFAOYSA-N 0.000 description 5
- 239000007788 liquid Substances 0.000 description 5
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- 229920005992 thermoplastic resin Polymers 0.000 description 5
- 239000004743 Polypropylene Substances 0.000 description 4
- DIOQZVSQGTUSAI-UHFFFAOYSA-N decane Chemical compound CCCCCCCCCC DIOQZVSQGTUSAI-UHFFFAOYSA-N 0.000 description 4
- 238000009713 electroplating Methods 0.000 description 4
- 238000005530 etching Methods 0.000 description 4
- 239000000835 fiber Substances 0.000 description 4
- 239000011888 foil Substances 0.000 description 4
- 239000011256 inorganic filler Substances 0.000 description 4
- 229910003475 inorganic filler Inorganic materials 0.000 description 4
- 239000011229 interlayer Substances 0.000 description 4
- 150000002902 organometallic compounds Chemical class 0.000 description 4
- 239000003973 paint Substances 0.000 description 4
- 229920002037 poly(vinyl butyral) polymer Polymers 0.000 description 4
- 229920000139 polyethylene terephthalate Polymers 0.000 description 4
- 239000005020 polyethylene terephthalate Substances 0.000 description 4
- 229920001155 polypropylene Polymers 0.000 description 4
- 239000000843 powder Substances 0.000 description 4
- 239000002904 solvent Substances 0.000 description 4
- DHKHKXVYLBGOIT-UHFFFAOYSA-N 1,1-Diethoxyethane Chemical compound CCOC(C)OCC DHKHKXVYLBGOIT-UHFFFAOYSA-N 0.000 description 3
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 3
- 239000004721 Polyphenylene oxide Substances 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 239000011354 acetal resin Substances 0.000 description 3
- 229920000180 alkyd Polymers 0.000 description 3
- 239000007864 aqueous solution Substances 0.000 description 3
- 239000004305 biphenyl Substances 0.000 description 3
- 235000010290 biphenyl Nutrition 0.000 description 3
- KAKZBPTYRLMSJV-UHFFFAOYSA-N butadiene group Chemical group C=CC=C KAKZBPTYRLMSJV-UHFFFAOYSA-N 0.000 description 3
- 239000003054 catalyst Substances 0.000 description 3
- 229910000420 cerium oxide Inorganic materials 0.000 description 3
- 239000013065 commercial product Substances 0.000 description 3
- 239000011889 copper foil Substances 0.000 description 3
- 238000000354 decomposition reaction Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000004745 nonwoven fabric Substances 0.000 description 3
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 description 3
- 229910052698 phosphorus Inorganic materials 0.000 description 3
- 239000011574 phosphorus Substances 0.000 description 3
- 229920000728 polyester Polymers 0.000 description 3
- 229920000570 polyether Polymers 0.000 description 3
- 229920006324 polyoxymethylene Polymers 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- 230000000930 thermomechanical effect Effects 0.000 description 3
- 229920002554 vinyl polymer Polymers 0.000 description 3
- RNFJDJUURJAICM-UHFFFAOYSA-N 2,2,4,4,6,6-hexaphenoxy-1,3,5-triaza-2$l^{5},4$l^{5},6$l^{5}-triphosphacyclohexa-1,3,5-triene Chemical compound N=1P(OC=2C=CC=CC=2)(OC=2C=CC=CC=2)=NP(OC=2C=CC=CC=2)(OC=2C=CC=CC=2)=NP=1(OC=1C=CC=CC=1)OC1=CC=CC=C1 RNFJDJUURJAICM-UHFFFAOYSA-N 0.000 description 2
- OAYXUHPQHDHDDZ-UHFFFAOYSA-N 2-(2-butoxyethoxy)ethanol Chemical compound CCCCOCCOCCO OAYXUHPQHDHDDZ-UHFFFAOYSA-N 0.000 description 2
- FPZWZCWUIYYYBU-UHFFFAOYSA-N 2-(2-ethoxyethoxy)ethyl acetate Chemical compound CCOCCOCCOC(C)=O FPZWZCWUIYYYBU-UHFFFAOYSA-N 0.000 description 2
- ZNQVEEAIQZEUHB-UHFFFAOYSA-N 2-ethoxyethanol Chemical compound CCOCCO ZNQVEEAIQZEUHB-UHFFFAOYSA-N 0.000 description 2
- SVONRAPFKPVNKG-UHFFFAOYSA-N 2-ethoxyethyl acetate Chemical compound CCOCCOC(C)=O SVONRAPFKPVNKG-UHFFFAOYSA-N 0.000 description 2
- QTBSBXVTEAMEQO-UHFFFAOYSA-M Acetate Chemical compound CC([O-])=O QTBSBXVTEAMEQO-UHFFFAOYSA-M 0.000 description 2
- 229920000178 Acrylic resin Polymers 0.000 description 2
- 239000004925 Acrylic resin Substances 0.000 description 2
- DKPFZGUDAPQIHT-UHFFFAOYSA-N Butyl acetate Natural products CCCCOC(C)=O DKPFZGUDAPQIHT-UHFFFAOYSA-N 0.000 description 2
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 2
- 229920000106 Liquid crystal polymer Polymers 0.000 description 2
- 239000004977 Liquid-crystal polymers (LCPs) Substances 0.000 description 2
- SECXISVLQFMRJM-UHFFFAOYSA-N N-Methylpyrrolidone Chemical compound CN1CCCC1=O SECXISVLQFMRJM-UHFFFAOYSA-N 0.000 description 2
- 239000004677 Nylon Substances 0.000 description 2
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 2
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 2
- UCKMPCXJQFINFW-UHFFFAOYSA-N Sulphide Chemical compound [S-2] UCKMPCXJQFINFW-UHFFFAOYSA-N 0.000 description 2
- AHZMUXQJTGRNHT-UHFFFAOYSA-N [4-[2-(4-cyanatophenyl)propan-2-yl]phenyl] cyanate Chemical compound C=1C=C(OC#N)C=CC=1C(C)(C)C1=CC=C(OC#N)C=C1 AHZMUXQJTGRNHT-UHFFFAOYSA-N 0.000 description 2
- 150000008065 acid anhydrides Chemical class 0.000 description 2
- 239000000654 additive Substances 0.000 description 2
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- TZCXTZWJZNENPQ-UHFFFAOYSA-L barium sulfate Chemical compound [Ba+2].[O-]S([O-])(=O)=O TZCXTZWJZNENPQ-UHFFFAOYSA-L 0.000 description 2
- 230000001588 bifunctional effect Effects 0.000 description 2
- PXKLMJQFEQBVLD-UHFFFAOYSA-N bisphenol F Chemical compound C1=CC(O)=CC=C1CC1=CC=C(O)C=C1 PXKLMJQFEQBVLD-UHFFFAOYSA-N 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 239000010941 cobalt Substances 0.000 description 2
- 229910017052 cobalt Inorganic materials 0.000 description 2
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 2
- 239000013256 coordination polymer Substances 0.000 description 2
- GYZLOYUZLJXAJU-UHFFFAOYSA-N diglycidyl ether Chemical compound C1OC1COCC1CO1 GYZLOYUZLJXAJU-UHFFFAOYSA-N 0.000 description 2
- KPUWHANPEXNPJT-UHFFFAOYSA-N disiloxane Chemical class [SiH3]O[SiH3] KPUWHANPEXNPJT-UHFFFAOYSA-N 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 239000003063 flame retardant Substances 0.000 description 2
- 239000003365 glass fiber Substances 0.000 description 2
- FUZZWVXGSFPDMH-UHFFFAOYSA-N hexanoic acid Chemical compound CCCCCC(O)=O FUZZWVXGSFPDMH-UHFFFAOYSA-N 0.000 description 2
- 239000012943 hotmelt Substances 0.000 description 2
- 238000003780 insertion Methods 0.000 description 2
- 230000037431 insertion Effects 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 150000002576 ketones Chemical class 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- 239000010445 mica Substances 0.000 description 2
- 229910052618 mica group Inorganic materials 0.000 description 2
- 229920001778 nylon Polymers 0.000 description 2
- 239000007800 oxidant agent Substances 0.000 description 2
- 150000002923 oximes Chemical class 0.000 description 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- IEQIEDJGQAUEQZ-UHFFFAOYSA-N phthalocyanine Chemical compound N1C(N=C2C3=CC=CC=C3C(N=C3C4=CC=CC=C4C(=N4)N3)=N2)=C(C=CC=C2)C2=C1N=C1C2=CC=CC=C2C4=N1 IEQIEDJGQAUEQZ-UHFFFAOYSA-N 0.000 description 2
- 229920002312 polyamide-imide Polymers 0.000 description 2
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- 229920000642 polymer Polymers 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 230000002265 prevention Effects 0.000 description 2
- ODLMAHJVESYWTB-UHFFFAOYSA-N propylbenzene Chemical compound CCCC1=CC=CC=C1 ODLMAHJVESYWTB-UHFFFAOYSA-N 0.000 description 2
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- 239000007787 solid Substances 0.000 description 2
- RIOQSEWOXXDEQQ-UHFFFAOYSA-N triphenylphosphine Chemical compound C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1 RIOQSEWOXXDEQQ-UHFFFAOYSA-N 0.000 description 2
- 239000008096 xylene Substances 0.000 description 2
- NSEZUSFKACELMB-UHFFFAOYSA-N (2,6-dimethylphenyl) cyanate Chemical compound CC1=CC=CC(C)=C1OC#N NSEZUSFKACELMB-UHFFFAOYSA-N 0.000 description 1
- JYEUMXHLPRZUAT-UHFFFAOYSA-N 1,2,3-triazine Chemical compound C1=CN=NN=C1 JYEUMXHLPRZUAT-UHFFFAOYSA-N 0.000 description 1
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- LXBGSDVWAMZHDD-UHFFFAOYSA-N 2-methyl-1h-imidazole Chemical compound CC1=NC=CN1 LXBGSDVWAMZHDD-UHFFFAOYSA-N 0.000 description 1
- QTWJRLJHJPIABL-UHFFFAOYSA-N 2-methylphenol;3-methylphenol;4-methylphenol Chemical compound CC1=CC=C(O)C=C1.CC1=CC=CC(O)=C1.CC1=CC=CC=C1O QTWJRLJHJPIABL-UHFFFAOYSA-N 0.000 description 1
- ILJXIWRDZSPWPF-UHFFFAOYSA-N 3,4-dimethyl-1H-indol-2-amine Chemical compound CC1=C2C(=C(NC2=CC=C1)N)C ILJXIWRDZSPWPF-UHFFFAOYSA-N 0.000 description 1
- JYLNVJYYQQXNEK-UHFFFAOYSA-N 3-amino-2-(4-chlorophenyl)-1-propanesulfonic acid Chemical compound OS(=O)(=O)CC(CN)C1=CC=C(Cl)C=C1 JYLNVJYYQQXNEK-UHFFFAOYSA-N 0.000 description 1
- VPWNQTHUCYMVMZ-UHFFFAOYSA-N 4,4'-sulfonyldiphenol Chemical compound C1=CC(O)=CC=C1S(=O)(=O)C1=CC=C(O)C=C1 VPWNQTHUCYMVMZ-UHFFFAOYSA-N 0.000 description 1
- 229930185605 Bisphenol Natural products 0.000 description 1
- ZTQSAGDEMFDKMZ-UHFFFAOYSA-N Butyraldehyde Chemical compound CCCC=O ZTQSAGDEMFDKMZ-UHFFFAOYSA-N 0.000 description 1
- YOLBDZDJZUNKDL-UHFFFAOYSA-N CC(=O)C.C(C)(=N)N.[Co+2] Chemical compound CC(=O)C.C(C)(=N)N.[Co+2] YOLBDZDJZUNKDL-UHFFFAOYSA-N 0.000 description 1
- COZYNCXUDMDECW-UHFFFAOYSA-N CC(=O)C.C(C)(=N)N.[Co+3] Chemical compound CC(=O)C.C(C)(=N)N.[Co+3] COZYNCXUDMDECW-UHFFFAOYSA-N 0.000 description 1
- QMENSXDXGCOYIM-UHFFFAOYSA-N CC(=O)C.C(C)(=N)N.[Cu+2] Chemical compound CC(=O)C.C(C)(=N)N.[Cu+2] QMENSXDXGCOYIM-UHFFFAOYSA-N 0.000 description 1
- YMYMVTAQUPRSFZ-UHFFFAOYSA-N CC(=O)C.C(C)(=N)N.[Zn+2] Chemical compound CC(=O)C.C(C)(=N)N.[Zn+2] YMYMVTAQUPRSFZ-UHFFFAOYSA-N 0.000 description 1
- 239000005749 Copper compound Substances 0.000 description 1
- FEWJPZIEWOKRBE-JCYAYHJZSA-N Dextrotartaric acid Chemical compound OC(=O)[C@H](O)[C@@H](O)C(O)=O FEWJPZIEWOKRBE-JCYAYHJZSA-N 0.000 description 1
- 229920002121 Hydroxyl-terminated polybutadiene Polymers 0.000 description 1
- FXHOOIRPVKKKFG-UHFFFAOYSA-N N,N-Dimethylacetamide Chemical compound CN(C)C(C)=O FXHOOIRPVKKKFG-UHFFFAOYSA-N 0.000 description 1
- XYFCBTPGUUZFHI-UHFFFAOYSA-N Phosphine Natural products P XYFCBTPGUUZFHI-UHFFFAOYSA-N 0.000 description 1
- 101100410148 Pinus taeda PT30 gene Proteins 0.000 description 1
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- 206010036790 Productive cough Diseases 0.000 description 1
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- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- INHGSGHLQLYYND-UHFFFAOYSA-N [4-[2-(4-cyanatophenyl)-1,1,1,3,3,3-hexafluoropropan-2-yl]phenyl] cyanate Chemical compound C=1C=C(OC#N)C=CC=1C(C(F)(F)F)(C(F)(F)F)C1=CC=C(OC#N)C=C1 INHGSGHLQLYYND-UHFFFAOYSA-N 0.000 description 1
- UHCNCKOCZQCYRV-UHFFFAOYSA-N [4-[2-(4-cyanatophenyl)ethyl]phenyl] cyanate Chemical compound C1=CC(OC#N)=CC=C1CCC1=CC=C(OC#N)C=C1 UHCNCKOCZQCYRV-UHFFFAOYSA-N 0.000 description 1
- 239000012190 activator Substances 0.000 description 1
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- 125000002723 alicyclic group Chemical group 0.000 description 1
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- 229910052782 aluminium Inorganic materials 0.000 description 1
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- 150000001412 amines Chemical class 0.000 description 1
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- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 238000001354 calcination Methods 0.000 description 1
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- 239000001569 carbon dioxide Substances 0.000 description 1
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- CETPSERCERDGAM-UHFFFAOYSA-N ceric oxide Chemical compound O=[Ce]=O CETPSERCERDGAM-UHFFFAOYSA-N 0.000 description 1
- 229910000422 cerium(IV) oxide Inorganic materials 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 150000001869 cobalt compounds Chemical class 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 150000001880 copper compounds Chemical class 0.000 description 1
- 229910000365 copper sulfate Inorganic materials 0.000 description 1
- ARUVKPQLZAKDPS-UHFFFAOYSA-L copper(II) sulfate Chemical compound [Cu+2].[O-][S+2]([O-])([O-])[O-] ARUVKPQLZAKDPS-UHFFFAOYSA-L 0.000 description 1
- 238000003851 corona treatment Methods 0.000 description 1
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- 239000004643 cyanate ester Substances 0.000 description 1
- 125000004122 cyclic group Chemical group 0.000 description 1
- FHIVAFMUCKRCQO-UHFFFAOYSA-N diazinon Chemical compound CCOP(=S)(OCC)OC1=CC(C)=NC(C(C)C)=N1 FHIVAFMUCKRCQO-UHFFFAOYSA-N 0.000 description 1
- 238000007607 die coating method Methods 0.000 description 1
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- XMHIUKTWLZUKEX-UHFFFAOYSA-N hexacosanoic acid Chemical class CCCCCCCCCCCCCCCCCCCCCCCCCC(O)=O XMHIUKTWLZUKEX-UHFFFAOYSA-N 0.000 description 1
- 150000004678 hydrides Chemical class 0.000 description 1
- 125000000879 imine group Chemical group 0.000 description 1
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- 238000005470 impregnation Methods 0.000 description 1
- PNDPGZBMCMUPRI-UHFFFAOYSA-N iodine Chemical compound II PNDPGZBMCMUPRI-UHFFFAOYSA-N 0.000 description 1
- 229910052746 lanthanum Inorganic materials 0.000 description 1
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 description 1
- VTHJTEIRLNZDEV-UHFFFAOYSA-L magnesium dihydroxide Chemical compound [OH-].[OH-].[Mg+2] VTHJTEIRLNZDEV-UHFFFAOYSA-L 0.000 description 1
- 239000000347 magnesium hydroxide Substances 0.000 description 1
- 229910001862 magnesium hydroxide Inorganic materials 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 229910000000 metal hydroxide Inorganic materials 0.000 description 1
- 150000004692 metal hydroxides Chemical class 0.000 description 1
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- 229910017464 nitrogen compound Inorganic materials 0.000 description 1
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- 229910052763 palladium Inorganic materials 0.000 description 1
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- 239000005011 phenolic resin Substances 0.000 description 1
- 239000013034 phenoxy resin Substances 0.000 description 1
- 229920006287 phenoxy resin Polymers 0.000 description 1
- 229910000073 phosphorus hydride Inorganic materials 0.000 description 1
- 229920001643 poly(ether ketone) Polymers 0.000 description 1
- 229920003207 poly(ethylene-2,6-naphthalate) Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 239000011112 polyethylene naphthalate Substances 0.000 description 1
- 229920006290 polyethylene naphthalate film Polymers 0.000 description 1
- 229920002098 polyfluorene Polymers 0.000 description 1
- 239000004848 polyfunctional curative Substances 0.000 description 1
- 239000009719 polyimide resin Substances 0.000 description 1
- 229920000098 polyolefin Polymers 0.000 description 1
- 229920001955 polyphenylene ether Polymers 0.000 description 1
- 239000012286 potassium permanganate Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 230000003014 reinforcing effect Effects 0.000 description 1
- 239000013557 residual solvent Substances 0.000 description 1
- 210000003802 sputum Anatomy 0.000 description 1
- 208000024794 sputum Diseases 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- BDHFUVZGWQCTTF-UHFFFAOYSA-M sulfonate Chemical compound [O-]S(=O)=O BDHFUVZGWQCTTF-UHFFFAOYSA-M 0.000 description 1
- 229940095064 tartrate Drugs 0.000 description 1
- 229920001897 terpolymer Polymers 0.000 description 1
- 238000001029 thermal curing Methods 0.000 description 1
- 238000009823 thermal lamination Methods 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
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- 150000003752 zinc compounds Chemical class 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/46—Manufacturing multilayer circuits
- H05K3/4644—Manufacturing multilayer circuits by building the multilayer layer by layer, i.e. build-up multilayer circuits
- H05K3/4661—Adding a circuit layer by direct wet plating, e.g. electroless plating; insulating materials adapted therefor
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/46—Manufacturing multilayer circuits
- H05K3/4611—Manufacturing multilayer circuits by laminating two or more circuit boards
- H05K3/4626—Manufacturing multilayer circuits by laminating two or more circuit boards characterised by the insulating layers or materials
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/14—Related to the order of processing steps
- H05K2203/1476—Same or similar kind of process performed in phases, e.g. coarse patterning followed by fine patterning
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/38—Improvement of the adhesion between the insulating substrate and the metal
- H05K3/381—Improvement of the adhesion between the insulating substrate and the metal by special treatment of the substrate
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Production Of Multi-Layered Print Wiring Board (AREA)
- Laminated Bodies (AREA)
- Insulating Bodies (AREA)
- Non-Insulated Conductors (AREA)
- Reinforced Plastic Materials (AREA)
Description
本發明係關於對多層印刷電路板之絕緣層形成有用的絕緣樹脂薄片、及使用該絕緣樹脂薄片的多層印刷電路板之製造方法。The present invention relates to an insulating resin sheet useful for forming an insulating layer of a multilayer printed wiring board, and a method of manufacturing a multilayer printed wiring board using the insulating resin sheet.
過去作為多層印刷電路板之製造技術,已知於核心基板上將絕緣層與導體層以交互重疊組合方式的製造方法。絕緣層形成中,主要使用於塑質薄膜上形成熱硬化性樹脂層的接著薄膜,將接著薄膜於內層電路基板進行層合,將塑質薄膜剝離後,藉由使熱硬化性樹脂進行熱硬化,形成絕緣層。另一方面,近年來因電子機器或電子零件的小型化之需求,於多層印刷電路板中,例如要求核心基板之薄型化或省略化等有著逐漸薄型化之傾向。欲達到如此多層印刷電路板之薄型化中,欲維持多層印刷電路板之機械強度,作為形成層間絕緣層之材料,認為使用預浸體可有效地達成。In the past, as a manufacturing technique of a multilayer printed wiring board, a manufacturing method in which an insulating layer and a conductor layer are alternately overlapped on a core substrate is known. In the formation of the insulating layer, the adhesive film is mainly used for forming a film of a thermosetting resin layer on the plastic film, and the film is laminated on the inner layer circuit board to peel off the plastic film, and then the thermosetting resin is heated. Hardened to form an insulating layer. On the other hand, in recent years, in the multilayer printed circuit board, for the miniaturization of the electronic device or the electronic component, for example, it is required to gradually reduce the thickness of the core substrate or to omit it. In order to achieve the thinning of such a multilayer printed circuit board, in order to maintain the mechanical strength of the multilayer printed circuit board, it is considered that the use of the prepreg can be effectively achieved as a material for forming the interlayer insulating layer.
例如,專利文獻1及專利文獻2中揭示於預浸體之單面上形成加成用樹脂組成物層的B階段樹脂組成物薄片。For example, Patent Document 1 and Patent Document 2 disclose a B-stage resin composition sheet in which a resin composition layer for addition is formed on one surface of a prepreg.
[專利文獻1]特開2003-249764號公報[Patent Document 1] JP-A-2003-249764
[專利文獻2]特開2003-313324號公報[Patent Document 2] JP-A-2003-313324
將預浸體使用於層間絕緣層時,經對內層電路基板之層合或熱硬化步驟,藉由含浸於預浸體中的樹脂組成物之流動或玻璃布之膨脹,使預浸體表面的樹脂組成物層變薄。因此藉由鍍敷使導體層形成時,將絕緣層表面以氧化劑等進行粗糙化處理之情況,會有預浸體中之纖維狀薄片基材露出之問題。於此本發明者們藉由構築方式之多層印刷電路板的製法上,嘗試使用上述專利文獻1及2所記載之熱硬化性樹脂組成物層於預浸體單面上經層合的絕緣樹脂薄片。即,將該絕緣樹脂薄片於內層電路基板藉由真空層壓機進行層合後,發現於內層電路基板之電路凹凸上,絕緣樹脂薄片可充分追隨,電路凹凸的鑲入性亦良好。另一方面,發現經層合之絕緣樹脂薄片為反映內層電路基板之電路凹凸,使該表面成為凹凸狀。因此欲使絕緣樹脂薄片表面平滑化,常壓下藉由金屬板使絕緣樹脂薄片進行加熱及加壓,當使表面平滑化時,絕緣樹脂薄片表面的熱硬化性樹脂組成物層會流動,反映電路凹凸,一部份的熱硬化性樹脂組成物層之厚度會有變薄之顯像。又,發現將絕緣樹脂薄片經熱硬化形成絕緣層後,使絕緣層表面粗糙化,藉由鍍敷形成導體層時,由厚度變薄的部分,露出預浸體之纖維狀薄片基材,產生對導體層形成不當之情況。When the prepreg is used for the interlayer insulating layer, the prepreg surface is formed by laminating or thermally hardening the inner layer circuit substrate by the flow of the resin composition impregnated in the prepreg or the expansion of the glass cloth. The resin composition layer is thinned. Therefore, when the conductor layer is formed by plating, the surface of the insulating layer is roughened by an oxidizing agent or the like, and the fibrous sheet substrate in the prepreg is exposed. In the method of manufacturing a multilayer printed wiring board of the construction method, the present inventors attempted to use the thermosetting resin composition layer described in Patent Documents 1 and 2 to laminate the insulating resin on one side of the prepreg. Sheet. In other words, when the insulating resin sheet is laminated on the inner layer circuit board by a vacuum laminator, it is found that the insulating resin sheet can sufficiently follow the circuit unevenness of the inner layer circuit board, and the mounting property of the circuit unevenness is also good. On the other hand, it has been found that the laminated insulating resin sheet reflects the unevenness of the circuit of the inner layer circuit board, and the surface is formed into an uneven shape. Therefore, in order to smooth the surface of the insulating resin sheet, the insulating resin sheet is heated and pressurized by a metal plate under normal pressure, and when the surface is smoothed, the thermosetting resin composition layer on the surface of the insulating resin sheet flows, reflecting The unevenness of the circuit causes a thinning of the thickness of a part of the thermosetting resin composition layer. Further, it has been found that after the insulating resin sheet is thermally cured to form an insulating layer, the surface of the insulating layer is roughened, and when the conductor layer is formed by plating, the fibrous sheet substrate of the prepreg is exposed by the portion having a reduced thickness. Improper formation of the conductor layer.
因此,本願發明之課題為提供一種使用此製造多層印刷電路板時,不會產生如上述之纖維狀薄片基材的露出問題之具有纖維狀薄片基材的絕緣樹脂薄片。Therefore, an object of the present invention is to provide an insulating resin sheet having a fibrous sheet substrate which does not cause the problem of the above-mentioned fibrous sheet substrate to be exposed when the multilayer printed wiring board is produced.
本發明者們,欲解決上述課題而進行詳細研究結果,發現將由熱硬化性樹脂組成物的硬化物層與預浸體層所成之絕緣樹脂薄片使用於多層印刷電路板之製造時,即使使絕緣層表面粗糙化之情況下,可抑制如上述之纖維狀薄片基材的露出,而完成本發明。The inventors of the present invention have found that the insulating resin sheet made of the cured layer of the thermosetting resin composition and the prepreg layer is used for the production of a multilayer printed wiring board, even if it is insulated. In the case where the surface of the layer is roughened, the exposure of the fibrous sheet substrate as described above can be suppressed, and the present invention has been completed.
即,本發明為含有以下內容者。That is, the present invention is intended to contain the following.
〔1〕一種於預浸體單面上具有熱硬化性樹脂組成物之硬化物層的絕緣樹脂薄片。[1] An insulating resin sheet having a cured layer of a thermosetting resin composition on one side of a prepreg.
〔2〕於硬化物層上進一步具有支持體層之上述〔1〕記載的絕緣樹脂薄片。[2] The insulating resin sheet according to the above [1], further comprising a support layer on the cured layer.
〔3〕將於支持體上形成熱硬化性樹脂組成物的硬化物層之硬化物薄片接著於預浸體的單面上而得之上述〔2〕記載的絕緣樹脂薄片。[3] The cured product sheet of the cured layer of the thermosetting resin composition is formed on the support, and the insulating resin sheet according to the above [2] is obtained on one surface of the prepreg.
〔4〕支持體層之硬化物層側經脫模處理的上述〔2〕或〔3〕所記載之絕緣樹脂薄片。[4] The insulating resin sheet according to the above [2] or [3], which is subjected to release treatment on the side of the cured layer of the support layer.
〔5〕支持體層為塑質薄膜之上述〔2〕~〔4〕中任一項所記載的絕緣樹脂薄片。[5] The insulating resin sheet according to any one of the above [2] to [4], wherein the support layer is a plastic film.
〔6〕絕緣樹脂薄片之預浸體面係以保護薄膜而保護之上述〔1〕~〔5〕中任一項所記載的絕緣樹脂薄片。[6] The insulating resin sheet according to any one of the above [1] to [5], wherein the prepreg surface of the insulating resin sheet is protected by a protective film.
〔7〕預浸體的厚度為10~70μm之上述〔1〕~〔6〕中任一項所記載的絕緣樹脂薄片。[7] The insulating resin sheet according to any one of the above [1] to [6], wherein the thickness of the prepreg is from 10 to 70 μm.
〔8〕熱硬化性樹脂組成物的硬化物層為1~30μm之上述〔1〕~〔7〕中任一項所記載的絕緣樹脂薄片。[8] The insulating resin sheet according to any one of the above [1] to [7], wherein the hardened layer of the thermosetting resin composition is 1 to 30 μm.
〔9〕使用於含有(1)將絕緣樹脂薄片設置於電路基板下銜接於電路基板的雙面或單面,藉由減壓下介著彈性材進行加熱及加壓,於電路基板上進行層合之層合步驟、(2)將經層合的絕緣樹脂薄片藉由金屬板或金屬輥之加熱及加壓,使絕緣樹脂薄片平滑化的平滑化步驟、及(3)將經平滑化之絕緣樹脂薄片進行熱硬化之熱硬化步驟的多層印刷電路板之製造方法的上述〔1〕~〔8〕中任一項所記載的絕緣樹脂薄片。[9] It is used for (1) mounting an insulating resin sheet on a double-sided or single-sided surface of a circuit board under a circuit board, and heating and pressurizing the elastic material under pressure reduction to perform lamination on the circuit board. a step of laminating, (2) a step of smoothing the insulating resin sheet by heating and pressurizing the laminated insulating resin sheet by a metal plate or a metal roll, and (3) smoothing the smoothed The insulating resin sheet according to any one of the above [1] to [8], wherein the insulating resin sheet is subjected to a heat-hardening step.
〔10〕熱硬化性樹脂組成物之硬化物層於層合步驟及平滑化步驟中,實質上不具有流動性之上述〔9〕所記載之絕緣樹脂薄片。[10] The insulating resin sheet according to the above [9], which has substantially no fluidity in the layering step and the smoothing step of the cured layer of the thermosetting resin composition.
〔11〕藉由上述〔1〕~〔10〕中任一項所記載的絕緣樹脂薄片形成絕緣層之多層印刷電路板。[11] A multilayer printed wiring board in which an insulating layer is formed of the insulating resin sheet according to any one of the above [1] to [10].
〔12〕含有(1)將上述〔1〕~〔10〕中任一項所記載的絕緣樹脂薄片設置於內層電路基板下,使預浸體層銜接於內層電路基板的雙面或單面,藉由減壓下介著彈性材進行加熱及加壓,於內層電路基板上進行層合之層合步驟、(2)將經層合的絕緣樹脂薄片藉由金屬板或金屬輥進行加熱及加壓之平滑化步驟、及(3)將經平滑化的絕緣樹脂薄片進行熱硬化之熱硬化步驟的多層印刷電路板之製造方法。[12] The insulating resin sheet according to any one of the above [1] to [10] is provided on the inner layer circuit board, and the prepreg layer is bonded to the double-sided or single-sided side of the inner layer circuit board. a step of laminating the inner layer circuit substrate by heating and pressurizing the elastic material under reduced pressure, and (2) heating the laminated insulating resin sheet by a metal plate or a metal roll And a step of smoothing the pressurization step and (3) a method of producing a multilayer printed wiring board in which the smoothed insulating resin sheet is thermally hardened.
〔13〕層合步驟及平滑化步驟之絕緣樹脂薄片的加熱及加壓係由支持體層上進行之上述〔12〕所記載之方法。[13] The heating and pressurization of the insulating resin sheet in the laminating step and the smoothing step is the method described in the above [12] on the support layer.
〔14〕進一步含有於絕緣層打洞之打洞步驟、將該絕緣層進行粗糙化處理之粗糙化步驟、於經粗糙化之絕緣層表面上藉由鍍敷形成導體層之鍍敷步驟、及於導體層形成電路之電路形成步驟的上述〔12〕或〔13〕所記載之方法。[14] further comprising a step of punching holes in the insulating layer, a roughening step of roughening the insulating layer, a plating step of forming a conductor layer on the surface of the roughened insulating layer by plating, and The method described in the above [12] or [13] of the circuit forming step of the conductor layer forming circuit.
本發明之絕緣樹脂薄片為,即使藉由真空層壓機於內層電路基板進行層合之情況下,於內層電路基板之電路凹凸,絕緣樹脂薄片可充分追隨,電路凹凸之鑲入性亦良好。又,層合後將絕緣樹脂薄片表面平滑化時,亦可反映電路凹凸而抑制樹脂組成物層之厚度變薄的現象。因此,藉由熱硬化形成絕緣層後,即使將絕緣層表面進行粗糙化,預浸體的纖維基材不會露出,可順利地進行經鍍敷之導體層形成,製造出信賴性高之多層印刷電路板。In the case where the insulating resin sheet of the present invention is laminated on the inner layer circuit board by a vacuum laminator, the insulating resin sheet can sufficiently follow the unevenness of the circuit on the inner layer circuit board, and the inlay of the circuit unevenness is also good. Moreover, when the surface of the insulating resin sheet is smoothed after lamination, the unevenness of the circuit can be reflected to suppress the thickness of the resin composition layer from becoming thin. Therefore, after the insulating layer is formed by thermal curing, even if the surface of the insulating layer is roughened, the fiber base material of the prepreg is not exposed, and the formed conductor layer can be smoothly formed, thereby producing a multilayer having high reliability. A printed circuit board.
以下,以較佳的實施形態詳細說明本發明。Hereinafter, the present invention will be described in detail by way of preferred embodiments.
本發明所使用的預浸體為,於薄片狀纖維基材含浸熱硬化性樹脂組成物,再經加熱乾燥後可得。The prepreg used in the present invention is obtained by impregnating a sheet-like fibrous base material with a thermosetting resin composition and drying it by heating.
熱硬化性樹脂組成物僅可適用於多層印刷電路板之絕緣層者即可,並無特別限定,作為該熱硬化性樹脂組成物之具體例,可舉出含有環氧樹脂、氰酸酯樹脂、酚樹脂、雙馬來酸酐縮亞胺-三嗪樹脂、聚醯亞胺樹脂、丙烯酸樹脂、乙烯基苯甲基樹脂等熱硬化性樹脂與少量其硬化劑之組成物。彼等中,作為熱硬化性樹脂含有環氧樹脂之組成物為佳,例如以含有環氧樹脂、熱可塑性樹脂及硬化劑之組成物為佳。The thermosetting resin composition is not particularly limited as long as it can be applied to an insulating layer of a multilayer printed wiring board, and specific examples of the thermosetting resin composition include epoxy resin and cyanate resin. A composition of a thermosetting resin such as a phenol resin, a bismaleimide-imide-triazine resin, a polyimide resin, an acrylic resin, or a vinyl benzyl resin, and a small amount of a curing agent thereof. Among them, a composition containing an epoxy resin as the thermosetting resin is preferable, and for example, a composition containing an epoxy resin, a thermoplastic resin, and a curing agent is preferable.
作為環氧樹脂,例如可舉出雙酚A型環氧樹脂、聯苯基型環氧樹脂、萘酚型環氧樹脂、萘型環氧樹脂、雙酚F型環氧樹脂、含磷的環氧樹脂、雙酚S型環氧樹脂、脂環式環氧樹脂、脂肪族鏈狀環氧樹脂、酚漆用酚醛型環氧樹脂、甲酚漆用酚醛型環氧樹脂、雙酚A漆用酚醛型環氧樹脂、具有丁二烯結構之環氧樹脂、雙酚之二環氧丙醚化物、萘二醇之二環氧丙醚化物、酚類之環氧丙基醚化物、及醇類之二環氧丙醚化物、以及彼等環氧樹脂的烷基取代體、鹵化物及氫化物等。這些環氧樹脂可僅使用任何1種、或亦可混合2種以上使用。Examples of the epoxy resin include bisphenol A type epoxy resin, biphenyl type epoxy resin, naphthol type epoxy resin, naphthalene type epoxy resin, bisphenol F type epoxy resin, and phosphorus containing ring. Oxygen resin, bisphenol S type epoxy resin, alicyclic epoxy resin, aliphatic chain epoxy resin, phenolic epoxy resin for phenol paint, phenolic epoxy resin for cresol paint, bisphenol A paint Phenolic epoxy resin, epoxy resin having a butadiene structure, diglycidyl ether of bisphenol, diglycidyl ether of naphthalenediol, epoxypropyl etherate of phenol, and alcohol The bis-epoxypropyl etherate, and alkyl substituents, halides, and hydrides of the epoxy resins. These epoxy resins may be used alone or in combination of two or more.
環氧樹脂於彼等中,由耐熱性、絕緣信賴性、與金屬膜之密著性的觀點來看,以雙酚A型環氧樹脂、萘酚型環氧樹脂、萘型環氧樹脂、聯苯基型環氧樹脂、具有丁二烯結構之環氧樹脂為佳。作為該環氧樹脂之具體例,可舉出液狀雙酚A型環氧樹脂(Japan Epoxy Resins(股)製「Epikote828EL」)、萘型2官能環氧樹脂(大日本油墨化學工業(股)製「HP4032」、「HP4032D」)、萘型4官能環氧樹脂(大日本油墨化學工業(股)製「HP4700」)、萘酚型環氧樹脂(東部化成(股)製「ESN-475V」)、具有丁二烯結構之環氧樹脂(daicel化學工業(股)製「PB-3600」)、具有聯苯基結構之環氧樹脂(日本化藥(股)製「NC3000H」、「NC3000L」、Japan Epoxy Resins(股)製「YX4000」)等。Among the epoxy resins, bisphenol A type epoxy resin, naphthol type epoxy resin, naphthalene type epoxy resin, and the like, from the viewpoints of heat resistance, insulation reliability, and adhesion to a metal film, A biphenyl type epoxy resin or an epoxy resin having a butadiene structure is preferred. Specific examples of the epoxy resin include liquid bisphenol A type epoxy resin ("Epikote 828EL" manufactured by Japan Epoxy Resins Co., Ltd.) and naphthalene type bifunctional epoxy resin (Daily Ink Chemical Industry Co., Ltd.) "HP4032" and "HP4032D"), naphthalene type 4-functional epoxy resin ("HP4700" manufactured by Dainippon Ink Chemicals Co., Ltd.), and naphthol type epoxy resin (ESN-475V manufactured by Eastern Chemicals Co., Ltd.) ), epoxy resin having a butadiene structure ("PB-3600" manufactured by Daicel Chemical Industry Co., Ltd.), epoxy resin having a biphenyl structure ("NC3000H" and "NC3000L" manufactured by Nippon Kayaku Co., Ltd. , Japan Epoxy Resins (shares) "YX4000").
熱硬化性樹脂組成物中,將對於硬化後的樹脂組成物賦予適度可撓性等作為目的,可添加熱可塑性樹脂。作為該熱可塑性樹脂,例如可舉出苯氧基樹脂、聚乙烯基縮醛樹脂、聚醯亞胺、聚醯胺醯亞胺基、聚醚碸、聚碸等。這些熱可塑性樹脂可單獨僅使用任1種、或亦可併用2種以上。該熱可塑性樹脂中將熱硬化性樹脂組成物的不揮發成分作為100質量%時,以0.5~60質量%之比率下配合為佳,以3~50質量%之比率下配合為較佳。In the thermosetting resin composition, for the purpose of imparting appropriate flexibility to the resin composition after curing, a thermoplastic resin may be added. Examples of the thermoplastic resin include a phenoxy resin, a polyvinyl acetal resin, a polyimine, a polyamidoximine group, a polyether oxime, and a polyfluorene. These thermoplastic resins may be used alone or in combination of two or more. In the thermoplastic resin, when the non-volatile component of the thermosetting resin composition is 100% by mass, it is preferably blended at a ratio of 0.5 to 60% by mass, preferably at a ratio of 3 to 50% by mass.
作為苯氧基樹脂之販賣品,例如可舉出東都化成(股)製FX280、FX293、Japan Epoxy Resins(股)製YX8100、YL6954、YL6974等。For example, FX280, FX293, Japan Epoxy Resins, YX8100, YL6954, YL6974, etc., which are manufactured by Toho Kasei Co., Ltd., may be mentioned.
作為聚乙烯基縮醛樹脂,以聚乙烯基丁縮醛樹脂為佳,作為該聚乙烯基縮醛樹脂之販賣品,例如可舉出電氣化學工業(股)製、電化丁縮醛4000-2、5000-A、6000-C、6000-EP、積水化學工業(股)製S-LECBH系列、BX系列、KS系列、BL系列、BM系列等。As the polyvinyl acetal resin, a polyvinyl butyral resin is preferable, and as a commercial product of the polyvinyl acetal resin, for example, an electro-chemical industry (s), an electrochemical butyral 4000-2 , 5000-A, 6000-C, 6000-EP, Sekisui Chemical Industry Co., Ltd. S-LECBH series, BX series, KS series, BL series, BM series, etc.
作為聚醯亞胺之販賣品,例如可舉出新日本理化(股)製之聚醯亞胺「里卡克特SN20」及「里卡克特PN20」。又,將2官能性羥基末端聚丁二烯、二異氰酸酯化合物及四鹼酸酐進行反應所得之線狀聚醯亞胺(特開2006-37083號公報所記載者)、含有聚矽氧烷骨架之聚醯亞胺(特開2002-12667號公報、特開2000-319386號公報等所記載者)等變性聚醯亞胺。As a commercial product of polyimine, for example, the poly-imine of the Japanese physicochemical company, "Ricaket SN20" and "Ricaker PN20" are mentioned. Further, a linear polyimine obtained by reacting a bifunctional hydroxyl-terminated polybutadiene, a diisocyanate compound, and a tetrabasic acid anhydride (described in JP-A-2006-37083) contains a polyoxane skeleton. Denatured polyimine, such as those described in JP-A-2002-12667, JP-A-2000-319386, and the like.
作為聚醯胺亞胺基之販賣品,例如可舉出東洋紡績(股) 製之聚醯胺亞胺基「VYLOMAXHR11NN」、「VYLOMAXHR16NN」等。又,可舉出日立化成工業(股)製之含有聚矽氧烷骨架的聚醯胺亞胺基「KS9100」、「KS9300」等變性聚醯胺醯亞胺基。As a commercial product of a polyamidimide group, for example, Toyobo Co., Ltd. The polyamidimide group "VYLOMAXHR11NN" and "VYLOMAXHR16NN". Further, a denatured polyamidoquinone imine group such as a polyamidolimine group "KS9100" or "KS9300" containing a polyoxyalkylene skeleton manufactured by Hitachi Chemical Co., Ltd. can be used.
作為聚醚碸之販賣品,例如可舉出住友化學(股)製之聚醚碸「PES5003P」等。For example, a polyether oxime "PES5003P" manufactured by Sumitomo Chemical Co., Ltd., etc., may be mentioned.
作為聚碸之販賣品,例如可舉出solvenadvancedpolymers(股)製之聚碸「P1700」、「P3500」等。For example, the "P1700" and "P3500" manufactured by Solenadvanced Polymers Co., Ltd. may be mentioned as the sale of the sputum.
作為硬化劑,例如可舉出胺系硬化劑、胍系硬化劑、咪唑系硬化劑、酚系硬化劑、萘酚系硬化劑、酸酐系硬化劑或彼等環氧加成物或微膠囊化者、氰酸酯樹脂等。彼等中亦以酚系硬化劑、萘酚系硬化劑、氰酸酯樹脂為佳。這些硬化劑可單獨僅使用1種、或亦可併用2種以上。Examples of the curing agent include an amine curing agent, an lanthanum curing agent, an imidazole curing agent, a phenol curing agent, a naphthol curing agent, an acid anhydride curing agent, or an epoxy addition product or microencapsulation thereof. , cyanate resin, and the like. Among them, a phenolic curing agent, a naphthol-based curing agent, and a cyanate resin are preferred. These hardeners may be used alone or in combination of two or more.
作為酚系硬化劑、萘酚系硬化劑之販賣品,例如可舉出MEH-7700、MEH-7810、MEH-7851(明和化成(股)製)、NHN、CBN、GPH(日本化藥(股)製)、SN170、SN180、SN190、SN475、SN485、SN495、SN375、SN395(東都化成(股)製)、LA7052、LA7054、LA3018、LA1356(大日本油墨化學工業(股)製)等。Examples of the phenolic curing agent and the naphthol-based curing agent include MEH-7700, MEH-7810, MEH-7851 (made by Megumi Kasei Co., Ltd.), NHN, CBN, and GPH (Nippon Chemicals Co., Ltd.) )), SN170, SN180, SN190, SN475, SN485, SN495, SN375, SN395 (manufactured by Tohto Kasei Co., Ltd.), LA7052, LA7054, LA3018, LA1356 (manufactured by Dainippon Ink Chemical Industry Co., Ltd.).
作為氰酸酯樹脂,例如可舉出雙酚A二氰酸酯、聚酚氰酸酯(寡(3-伸甲基-1,5-伸苯基氰酸酯))、4,4'-伸甲基雙(2,6-二甲基苯基氰酸酯)、4,4'-亞乙基二苯基二氰酸酯、六氟雙酚A二氰酸酯、2,2-雙(4-氰酸酯)苯基丙烷、1,1-雙(4-氰酸酯苯基甲烷)、雙(4-氰酸酯-3,5-二甲基苯基)甲烷、1,3-雙(4-氰酸酯苯基-1-(甲基亞乙基))苯、雙(4-氰酸酯苯基)硫醚、雙(4-氰酸酯苯基)醚等2官能氰酸酯樹脂、酚漆用酚醛、甲酚漆用酚醛等所衍生的多官能氰酸酯樹脂、這些氰酸酯樹脂的一部分經三嗪化的預聚物等。作為該氰酸酯樹脂之具體例,例如可舉出酚漆用酚醛型多官能氰酸酯樹脂(Lonza Japan(股)製「PT30」、氰酸酯當量124)或雙酚A二氰酸酯的一部分或全部經三嗪化成為三聚物之預聚物(Lonza Japan(股)製「BA230」、氰酸酯當量232)等。Examples of the cyanate resin include bisphenol A dicyanate, polyphenol cyanate (oligo(3-methyl-1,5-phenylene)), 4,4'- Methyl bis(2,6-dimethylphenyl cyanate), 4,4'-ethylene diphenyl dicyanate, hexafluorobisphenol A dicyanate, 2,2-double (4-cyanate) phenylpropane, 1,1-bis(4-cyanate phenylmethane), bis(4-cyanate-3,5-dimethylphenyl)methane, 1,3 - 2-functional (4-cyanate phenyl-1-(methylethylidene)) benzene, bis(4-cyanate phenyl) sulfide, bis(4-cyanate phenyl) ether A cyanate resin, a phenolic phenolic phenol, a polyfunctional cyanate resin derived from phenolic phenol or the like, a pre-polymerized triazine-based prepolymer of these cyanate resins, and the like. Specific examples of the cyanate resin include a phenolic polyfunctional cyanate resin for phenol paint ("PT30" manufactured by Lonza Japan Co., Ltd., cyanate equivalent 124) or bisphenol A dicyanate. Some or all of them are triazine-formed into a terpolymer prepolymer ("BA230" manufactured by Lonza Japan Co., Ltd., cyanate equivalent 232).
環氧樹脂與硬化劑之配合比率為,使用酚系硬化劑或萘酚系硬化劑時,對於環氧樹脂之環氧當量1而言,這些硬化劑之酚性羥基當量以成為0.4~2.0之範圍的比率為佳,較佳為成為0.5~1.0之範圍的比率。使用氰酸酯樹脂時,對於環氧當量1而言,氰酸酯當量以成為0.3~3.3之範圍的比率為佳,成為0.5~2.0之範圍的比率為較佳。When the phenolic curing agent or the naphthol-based curing agent is used, the phenolic hydroxyl equivalent of these curing agents is 0.4 to 2.0. The ratio of the range is preferably, and it is preferably a ratio in the range of 0.5 to 1.0. When the cyanate resin is used, the ratio of the cyanate ester equivalent to the range of 0.3 to 3.3 is preferably the ratio of the epoxy equivalent of 1, and the ratio of the range of 0.5 to 2.0 is preferable.
熱硬化性樹脂組成物中,除硬化劑以外,亦可進一步含有硬化促進劑。作為該硬化促進劑,例如可舉出咪唑系化合物、有機膦系化合物等,作為具體例可舉出2-甲基咪唑、三苯基膦等。使用硬化促進劑時,硬化促進劑對於環氧樹脂而言使用0.1~3.0質量%之範圍為佳。且,作為環氧樹脂硬化劑使用氰酸酯樹脂時,以縮短硬化時間為目的下,自過去併用環氧樹脂組成物與氰酸酯化合物之系統中,亦可添加作為硬化觸媒所使用的有機金屬化合物。作為如此有機金屬化合物,例如可舉出銅(II)乙醯丙酮等有機銅化合物、鋅(II)乙醯丙酮等有機鋅化合物、鈷(II)乙醯丙酮、鈷(III)乙醯丙酮等有機鈷化合物等。這些有機金屬化合物可單獨僅使用任1種、或亦可併用2種以上。有機金屬化合物之添加量對於氰酸酯樹脂而言,以金屬換算下一般為10~500ppm之範圍為佳,以25~200ppm之範圍為較佳。The thermosetting resin composition may further contain a curing accelerator in addition to the curing agent. Examples of the curing accelerator include an imidazole compound and an organic phosphine compound. Specific examples thereof include 2-methylimidazole and triphenylphosphine. When a hardening accelerator is used, it is preferable that the hardening accelerator is used in the range of 0.1 to 3.0% by mass for the epoxy resin. Further, when a cyanate resin is used as the epoxy resin curing agent, in order to shorten the curing time, a system which is used as a curing catalyst may be added to a system in which an epoxy resin composition and a cyanate compound are used in combination. Organometallic compounds. Examples of such an organometallic compound include an organic copper compound such as copper (II) acetamidine acetone, an organic zinc compound such as zinc (II) acetamidine acetone, cobalt (II) acetamidine acetone, cobalt (III) acetamidine acetone, or the like. Organic cobalt compounds, etc. These organometallic compounds may be used alone or in combination of two or more. The amount of the organometallic compound to be added is preferably in the range of 10 to 500 ppm in terms of metal, and preferably in the range of 25 to 200 ppm.
又,熱硬化性樹脂組成物中,為使硬化後的樹脂組成物之低熱膨脹化,可含有無機填充劑。作為該無機填充劑,例如可舉出二氧化矽、氧化鋁、雲母、mica、珪酸鹽、硫酸鋇、氫氧化鎂、氧化鈦等,彼等中亦以二氧化矽、氧化鋁為佳,以二氧化矽為特佳。且,無機填充劑之平均粒徑由絕緣信賴性之觀點來看,以3μm以下為佳,1.5μm以下為特佳。無機填充劑之含有量將熱硬化性樹脂組成物之不揮發成分作為100質量%時,較佳為20~60質量%,更佳為20~50質量%。Further, the thermosetting resin composition may contain an inorganic filler in order to lower the thermal expansion of the resin composition after curing. Examples of the inorganic filler include cerium oxide, aluminum oxide, mica, mica, ceric acid salt, barium sulfate, magnesium hydroxide, and titanium oxide. Among them, cerium oxide and aluminum oxide are preferred. Ceria is particularly good. Further, the average particle diameter of the inorganic filler is preferably 3 μm or less from the viewpoint of insulation reliability, and particularly preferably 1.5 μm or less. When the non-volatile content of the thermosetting resin composition is 100% by mass, the content of the inorganic filler is preferably 20 to 60% by mass, and more preferably 20 to 50% by mass.
且,熱硬化性樹脂組成物中,視必要可含有其他成分。作為其他成分,例如可舉出有機磷系難燃劑、有機系含氮磷化合物、氮化合物、矽氧烷系難燃劑、金屬氫氧化物等難燃劑;矽氧烷粉末、尼龍粉末、氟樹脂粉末等有機填充劑;Orben、潘通等增黏劑;矽氧烷系、氟樹脂系等高分子系消泡劑或塗平劑;咪唑系、噻唑系、三唑系、矽烷系偶合劑等密著性賦予劑;酞菁,藍、酞菁.綠、碘、綠、二疊氮黃、碳黑等著色劑等。Further, the thermosetting resin composition may contain other components as necessary. Examples of the other component include an organic phosphorus-based flame retardant, an organic nitrogen-containing phosphorus compound, a nitrogen compound, a siloxane-based flame retardant, and a metal hydroxide; and a siloxane powder, a nylon powder, and a nylon powder. Organic fillers such as fluororesin powder; tackifiers such as Orben and Pantone; polymer defoamers or coating agents such as siloxanes and fluororesins; imidazole, thiazole, triazole, and decane Mixing agent and other adhesion imparting agent; phthalocyanine, blue, phthalocyanine. Coloring agents such as green, iodine, green, diazide yellow, carbon black, and the like.
使用於預浸體之薄片狀纖維基材並無特別限定,例如可使用作為玻璃布、芳香族聚醯胺不織布、液晶聚合物不織布等預浸體用基材常使用者。特別為使用於多層印刷電路板之絕緣層形成時,可適用厚度為50μm以下之薄型者,特別為10~40μm者為佳。作為薄片狀纖維基材之具體例,玻璃布基材例如可舉出Asahi-Schwebel(股)製Style1027MS(經紗密度75根/25mm,緯紗密度75根/25mm,布重量20g/m2 ,厚度19μm)、Asahi-Schwebel(股)製Style1037MS(經紗密度70根/25mm,緯紗密度73根/25mm,布重量24g/m2 ,厚度28μm)、(股)有澤製作所製1037NS(經紗密度72根/25mm,緯紗密度69根/25mm,布重量23g/m2 ,厚度21μm)、(股)有澤製作所製1027NS(經紗密度75根/25mm,緯紗密度75根/25mm,布重量19.5g/m2 ,厚度16μm)、(股)有澤製作所製1015NS(經紗密度95根/25mm,緯紗密度95根/25mm,布重量17.5g/m2 ,厚度15μm)、(股)有澤製作所製1000NS(經紗密度85根/25mm,緯紗密度85根/25mm,布重量11g/m2 ,厚度10μm)等。又,作為液晶聚合物不織布,可舉出(股)Kuraray製的芳香族聚酯不織布之熔噴所得之Vecrus(基重6~15g/m2 )或Vactran等。The flaky fiber base material used for the prepreg is not particularly limited, and for example, a substrate for a prepreg such as a glass cloth, an aromatic polyamide woven fabric, or a liquid crystal polymer nonwoven fabric can be used. In particular, when it is used for forming an insulating layer of a multilayer printed wiring board, it is preferable to use a thin type having a thickness of 50 μm or less, particularly preferably 10 to 40 μm. Specific examples of the sheet-like fibrous base material include a Style 1027 MS manufactured by Asahi-Schwebel Co., Ltd. (having a warp density of 75 pieces/25 mm, a weft density of 75 pieces/25 mm, a cloth weight of 20 g/m 2 , and a thickness of 19 μm). ), Style1037MS made by Asahi-Schwebel (warp density 70 pieces / 25mm, weft density 73 pieces / 25mm, cloth weight 24g / m 2 , thickness 28μm), (stock) 1037NS made by Ozawa Manufacturing Co., Ltd. (warp density 72 pieces / 25mm , weft density 69 pieces / 25mm, cloth weight 23g / m 2 , thickness 21μm), (stock) 1027NS made by Ozawa (the warp density 75 / 25mm, weft density 75 / 25mm, cloth weight 19.5g / m 2 , thickness 16μm), (shares) 1015NS made by Ozawa Manufacturing Co., Ltd. (haze density 95 pieces / 25mm, weft density 95 pieces / 25mm, cloth weight 17.5g / m 2 , thickness 15μm), (shares) 1000NS made by Ozawa Manufacturing Co., Ltd. (warp density 85 pieces / 25 mm, weft density 85 pieces / 25 mm, cloth weight 11 g / m 2 , thickness 10 μm) and the like. Further, examples of the liquid crystal polymer nonwoven fabric include Vecrus (basis weight: 6 to 15 g/m 2 ) or Vactran obtained by melt blown of an aromatic polyester nonwoven fabric made of Kuraray.
作為薄片狀纖維基材,廣泛使用玻璃布。多層印刷電路板所使用之玻璃布,一般為將玻璃單絲以數十~數百根束的紗藉由自動織機等編織而製造,一般將紗綑綁成束時,欲防止紗之解開.起毛,而進行撚紗。因此,於預浸體,一部分的玻璃纖維未配列均等,局部存在重疊部分。該 玻璃纖維重疊部分,與其他部分比較,玻璃布之厚度較大。又,預浸體製造步驟中,因玻璃布的垂弛等,玻璃布並非預浸體之中心,而存在於表面附近。一般而言,絕緣樹脂薄片中之薄片狀纖維基材的露出,於如此薄片狀纖維基材的厚度比局所較大的部分、或薄片狀纖維基材之一部分於表面附近部分,特別顯著地呈現。Glass cloth is widely used as a sheet-like fiber base material. The glass cloth used in the multilayer printed circuit board is generally manufactured by weaving a glass monofilament with tens to hundreds of bundles of yarn by an automatic loom or the like, and generally, when the yarn is bundled into a bundle, the yarn is prevented from being unwound. Raise and crepe. Therefore, in the prepreg, a part of the glass fibers are not arranged equally, and there is a partial overlap. The The overlap of the glass fibers, compared with other parts, the thickness of the glass cloth is large. Further, in the prepreg manufacturing step, the glass cloth is not in the center of the prepreg but is present in the vicinity of the surface due to the relaxation of the glass cloth or the like. In general, the exposure of the sheet-like fibrous base material in the insulating resin sheet is particularly remarkable in that the thickness of the sheet-like fibrous base material is larger than that of the larger portion or a portion of the sheet-like fibrous base material in the vicinity of the surface. .
預浸體可藉由公知熱熔法、溶劑法等製造。熱熔法為,將樹脂組成物未溶解於有機溶劑下,於與樹脂組成物之剝離性良好的脫模紙上一旦塗佈,將此層合於薄片狀纖維基材、或藉由塑模塗佈進行直接塗佈後,製造預浸體之方法。又,溶劑法為,將樹脂組成物溶解於有機溶劑之樹脂組成物清漆中浸漬薄片狀纖維基材後,將樹脂組成物清漆含浸於薄片狀纖維基材,其後進行乾燥之方法。又,亦可將由層合於支持體上之熱硬化性樹脂組成物所成之接著薄膜自薄片狀補強基材的雙面以加熱、加壓條件下,連續地進行熱層合而調製。The prepreg can be produced by a known hot melt method, a solvent method, or the like. In the hot melt method, the resin composition is not dissolved in an organic solvent, and once applied to a release paper having good peelability from the resin composition, the laminate is applied to a sheet-like fibrous substrate or coated by a mold. A method of manufacturing a prepreg after the cloth is directly coated. In addition, the solvent method is a method in which a resin composition varnish is impregnated into a sheet-like fibrous base material by dissolving a resin composition in a resin composition varnish of an organic solvent, and then the resin composition varnish is impregnated into a sheet-like fibrous base material, followed by drying. Further, the film formed of the thermosetting resin composition laminated on the support may be prepared by continuously performing thermal lamination on both sides of the sheet-like reinforcing substrate under heating and pressurization conditions.
作為調製清漆時的有機溶劑,例如可舉出丙酮、甲基乙酮、環己酮等酮類、乙酸乙酯、乙酸丁酯、溶纖劑乙酸酯、丙二醇單甲基醚乙酸酯、卡必醇乙酸酯等乙酸酯類、溶纖劑、丁基卡必醇等卡必醇類、甲苯、二甲苯等芳香族烴類、二甲基甲醯胺、二甲基乙醯胺、N-甲基吡咯烷酮等。有機溶劑可使用1種或組合2種以上。Examples of the organic solvent in the preparation of the varnish include ketones such as acetone, methyl ethyl ketone, and cyclohexanone, ethyl acetate, butyl acetate, cellosolve acetate, and propylene glycol monomethyl ether acetate. Acetate such as carbitol acetate, cellosolve, carbitol such as butyl carbitol, aromatic hydrocarbon such as toluene or xylene, dimethylformamide, dimethylacetamide, N-methylpyrrolidone and the like. The organic solvent may be used alone or in combination of two or more.
乾燥條件並無特別限定,但欲於內層電路基板進行層合,層合步驟中之溫度下熱硬化性樹脂組成物必須具有流動性(flow性)及接著性。因此,乾燥時儘可能不進行熱硬化性樹脂組成物之硬化為重要。另一方面,若於預浸體內殘留大量有機溶劑時,會成為硬化後膨脹產生的原因,一般乾燥至對於熱硬化性樹脂組成物中之有機溶劑含有比率為5質量%以下,較佳為2質量%以下。因此,由這些雙方觀點來設定乾燥條件,其條件依熱硬化性樹脂組成物之硬化性或清漆中的有機溶劑量而相異,例如對於含有30~60質量%之有機溶劑的清漆,一般可於80~180℃下進行3~13分鐘程度之乾燥。且,斯業者可藉由簡單實驗而設定適宜,且較佳乾燥條件。The drying conditions are not particularly limited. However, in order to laminate the inner layer circuit board, the thermosetting resin composition at the temperature in the laminating step must have fluidity and adhesion. Therefore, it is important to harden the hardenable resin composition as much as possible during drying. On the other hand, when a large amount of the organic solvent remains in the prepreg, it may cause swelling after hardening, and it is generally dried to a content ratio of the organic solvent in the thermosetting resin composition of 5% by mass or less, preferably 2 Below mass%. Therefore, the drying conditions are set from these two viewpoints, and the conditions vary depending on the hardenability of the thermosetting resin composition or the amount of the organic solvent in the varnish. For example, a varnish containing 30 to 60% by mass of an organic solvent is generally used. Dry at 80~180 °C for 3~13 minutes. Moreover, the manufacturer can set appropriate and simple drying conditions by simple experiments.
預浸體之厚度雖依內層電路基板的導體層厚度而相異,但導體層的厚度一般為10~30μm,預浸體之厚度一般為10~70μm之範圍,由作為玻璃布之成本及絕緣樹脂薄片的所望薄度之觀點來看,以12~50μm為較佳,12~40μm為更佳。且,預浸體之厚度越大,纖維基材之露出會有被緩和之傾向,但對於多層印刷電路板之薄型化為不利。所謂本發明之絕緣樹脂薄片,可同時達成纖維基材之露出抑制與多層印刷電路板之薄型化。且,預浸體之厚度可藉由調整熱硬化性樹脂組成物之含浸量,容易地控制。又,預浸體必須為於內層電路基板的配線部分不會形成空隙且具有可層合之流動性,最低熔融黏度以200~7000poise之範圍為佳,以400~3000poise之範圍為特佳。Although the thickness of the prepreg differs depending on the thickness of the conductor layer of the inner circuit board, the thickness of the conductor layer is generally 10 to 30 μm, and the thickness of the prepreg is generally in the range of 10 to 70 μm, which is used as the cost of the glass cloth. From the viewpoint of the desired thinness of the insulating resin sheet, it is preferably 12 to 50 μm, more preferably 12 to 40 μm. Further, the larger the thickness of the prepreg, the more likely the exposure of the fibrous base material is relaxed, but it is disadvantageous for the thickness reduction of the multilayer printed wiring board. The insulating resin sheet of the present invention can simultaneously achieve the reduction of the exposure of the fibrous base material and the reduction in thickness of the multilayer printed wiring board. Further, the thickness of the prepreg can be easily controlled by adjusting the impregnation amount of the thermosetting resin composition. Further, the prepreg must have no voids in the wiring portion of the inner layer circuit board and have laminar fluidity, and the minimum melt viscosity is preferably in the range of 200 to 7000 poise, and particularly preferably in the range of 400 to 3000 poise.
本發明中之「熱硬化性樹脂組成物的硬化物層」為,將熱硬化性樹脂組成物進行熱硬化所得者。作為熱硬化性樹脂組成物僅適合多層印刷電路板之絕緣層者即可,並無特別限定下可使用,可使用與前述說明的預浸體所使用之熱硬化性樹脂組成物的相同者。且使用於預浸體之熱硬化性樹脂組成物與使用於硬化物層之熱硬化性樹脂組成物可為相同或相異。The "hardened layer of the thermosetting resin composition" in the present invention is obtained by thermally curing a thermosetting resin composition. The thermosetting resin composition is only suitable for the insulating layer of the multilayer printed wiring board, and it can be used without particular limitation, and the same as the thermosetting resin composition used for the prepreg described above can be used. Further, the thermosetting resin composition used for the prepreg may be the same as or different from the thermosetting resin composition used for the cured layer.
本發明的絕緣樹脂薄片中之硬化物層,例如可藉由於支持體上形成熱硬化性樹脂組成物層的接著薄片之熱硬化性樹脂組成物進行熱硬化的方法而得到。即,接著薄片可由斯業者之公知方法,例如調製於有機溶劑將熱硬化性樹脂組成物進行溶解之樹脂清漆,於支持體上塗佈該樹脂清漆,藉由熱風吹等使其加熱,乾燥有機溶劑後形成熱硬化性樹脂組成物層而製造,將如此所得之接著薄片的熱硬化性樹脂組成物進行熱硬化而作為硬化物薄片,經由將此於預浸體單面上接著之步驟而得到本發明之絕緣樹脂薄片。且,接著薄片的製造中,加入於支持體上經塗佈之樹脂清漆,藉由同時或逐次進行乾燥及硬化,可得到硬化物薄片,經由將如此所得之硬化物薄片於預浸體單面接著的步驟可得到本發明之絕緣樹脂薄片。The cured material layer in the insulating resin sheet of the present invention can be obtained, for example, by a method of thermally curing a thermosetting resin composition which forms a sheet of a thermosetting resin composition layer on a support. In other words, the resin varnish in which the thermosetting resin composition is dissolved in an organic solvent can be applied to the support by a known method, for example, and the resin varnish is applied onto the support, and heated by hot air blowing to dry the organic After the solvent is formed, a thermosetting resin composition layer is formed, and the thermosetting resin composition of the subsequently obtained sheet is thermally cured to obtain a cured product sheet, which is obtained by the step of adhering to the prepreg on one side. The insulating resin sheet of the present invention. Further, in the production of the sheet, the coated resin varnish is applied to the support, and the cured sheet is obtained by simultaneous or successive drying and hardening, and the cured sheet thus obtained is applied to the prepreg by one side. The subsequent step can obtain the insulating resin sheet of the present invention.
作為樹脂清漆之調製所使用的有機溶劑,例如可舉出丙酮、甲基乙酮、環己酮等酮類、乙酸乙酯、乙酸丁酯、溶纖劑乙酸酯、丙二醇單甲基醚乙酸酯、卡必醇乙酸酯等乙酸酯類、溶纖劑、丁基卡必醇等卡必醇類、甲苯、二甲苯等芳香族烴類、二甲基甲醯胺、二甲基乙醯胺、N-甲基吡咯烷酮等。有機溶劑可組合2種以上使用。Examples of the organic solvent used for the preparation of the resin varnish include ketones such as acetone, methyl ethyl ketone, and cyclohexanone, ethyl acetate, butyl acetate, cellosolve acetate, and propylene glycol monomethyl ether. Acetate such as acid ester or carbitol acetate, cellosolve, carbitol such as butyl carbitol, aromatic hydrocarbon such as toluene or xylene, dimethylformamide, and dimethyl Indoleamine, N-methylpyrrolidone, and the like. Two or more types of organic solvents can be used in combination.
調製接著薄片時的乾燥條件並無特別限定,乾燥至對於熱硬化性樹脂組成物層之有機溶劑的含有比率一般至10質量%以下,較佳為5質量%以下。雖依樹脂清漆中的有機溶劑量而不同,但例如可將含有30~60質量%的有機溶劑之樹脂清漆以50~150℃下進行3~10分鐘程度的乾燥。將該接著薄片之熱硬化性樹脂組成物層進行逐次硬化時、或同時進行於支持體上經塗佈之樹脂清漆的乾燥與硬化時的硬化條件並無特別限定,例如對於含有30~60質量%之有機溶劑的清漆,以50~200℃程度之溫度下進行10分鐘~10小時程度的加熱後,可形成硬化物層。且,乾燥及硬化條件,斯業者可藉由簡單實驗設定出適宜、較佳條件。The drying condition in the case of preparing the sheet is not particularly limited, and the content ratio of the organic solvent to the thermosetting resin composition layer is usually 10% by mass or less, preferably 5% by mass or less. Although it varies depending on the amount of the organic solvent in the resin varnish, for example, a resin varnish containing 30 to 60% by mass of an organic solvent can be dried at 50 to 150 ° C for 3 to 10 minutes. The curing conditions in the case where the thermosetting resin composition layer of the subsequent sheet is sequentially cured or the resin varnish applied on the support is dried and hardened at the same time are not particularly limited, and for example, it contains 30 to 60 masses. The varnish of the organic solvent of % is heated at a temperature of 50 to 200 ° C for 10 minutes to 10 hours to form a cured layer. Moreover, for drying and hardening conditions, the manufacturer can set suitable and better conditions by simple experiment.
作為支持體,可使用塑質薄膜。塑質薄膜以外,亦可使用脫模紙或銅箔、鋁箔等金屬箔等作為支持體。作為塑質薄膜,可舉出聚乙烯對苯二甲酸酯(以下簡稱為「PET」。)、聚乙烯萘酸酯等聚酯、聚碳酸酯、丙烯酸樹脂、環狀聚烯烴、三乙醯纖維素、聚醚硫化物、聚醚酮、聚醯亞胺等。其中亦以聚乙烯對苯二甲酸酯薄膜、聚乙烯萘酸酯薄膜為佳,特別以便宜之聚乙烯對苯二甲酸酯薄膜為佳。對於支持體,特別使用塑質薄膜時,欲使奇可自熱硬化性樹脂組成物層的硬化物進行剝離,使用該熱硬化性樹脂組成物層的被形成面經脫模處理的具有脫模層之支持體為佳。金屬箔可藉由蝕刻溶液除去。作為使用於脫模處理之脫模劑,僅可將硬化物自支持體剝離者即可,並無特別限 定,例如可舉出矽氧烷系脫模劑、醇酸樹脂系脫模劑等。且,可使用被販賣之附有脫模層的塑質薄膜,作為較佳例子可舉出將醇酸樹脂系脫模劑作為主成分之具有脫模層的PET薄膜之Lintec(股)製SK-1、AL-5、AL-7等。又,塑質薄膜可施予消光處理、電暈處理,該處理面上可形成脫模層。又將銅箔作為支持體使用時,未剝離下可將該銅箔作為導體層利用。支持體的厚度並無特別限定,一般為10~150μm,較佳為25~50μm之範圍下使用。As the support, a plastic film can be used. In addition to the plastic film, a metal foil such as release paper, copper foil or aluminum foil may be used as the support. Examples of the plastic film include polyethylene terephthalate (hereinafter abbreviated as "PET"), polyester such as polyethylene naphthalate, polycarbonate, acrylic resin, cyclic polyolefin, and triethylene sulfonate. Cellulose, polyether sulfide, polyether ketone, polyimine, and the like. Among them, a polyethylene terephthalate film or a polyethylene naphthalate film is preferred, and an inexpensive polyethylene terephthalate film is preferred. When a plastic film is used in particular, the cured film of the odd self-hardenable resin composition layer is peeled off, and the formed surface of the thermosetting resin composition layer is subjected to mold release treatment. The support of the layer is better. The metal foil can be removed by an etching solution. As the release agent used for the release treatment, only the cured product can be peeled off from the support, and there is no particular limitation. For example, a decane-based release agent, an alkyd-based release agent, and the like can be given. In addition, a commercially available plastic film with a release layer may be used, and as a preferred example, a LIN film made of a PET film having a release layer containing an alkyd resin release agent as a main component may be used. -1, AL-5, AL-7, etc. Further, the plastic film may be subjected to a matting treatment or a corona treatment, and a release layer may be formed on the treated surface. When the copper foil is used as a support, the copper foil can be used as a conductor layer without being peeled off. The thickness of the support is not particularly limited and is generally from 10 to 150 μm, preferably from 25 to 50 μm.
對於本發明之絕緣樹脂薄片的硬化物層,熱硬化性樹脂組成物無須進行完全熱硬化,僅硬化至可發揮本發明的效果之程度即可。即,可使用於一般之層間絕緣層形成,由支持體與熱硬化性樹脂組成物層所成之接著薄片必須進行藉由對內層電路基板的層合之電路鑲入,對於必須具有充分流動性而言,本發明的絕緣樹脂薄片中之熱硬化性樹脂組成物的硬化物層,欲可抑制預浸體的薄片狀纖維基材之露出,層合步驟及平滑化步驟中幾乎不具有流動性為重要,以實質上不具有流動性者為較佳。例如,使用真空層壓機,將熱硬化性樹脂組成物的硬化物層12cm×15cm,於20cm四方且0.8mm厚度之FR4基板上,與實際層合步驟及平滑化步驟的相同條件下,進行層合與平滑化,此時的最大漏垢長度較佳為0.3mm以下,更佳為0.2mm以下,最較佳為0.1mm以下,特佳為實質上為0之硬化狀態。例如,可將以下代表條件下所測定之最大漏垢長度作為本發明所使用的較佳硬化物層的硬化度之指標。即,使用真空 層壓機,將熱硬化性樹脂組成物的硬化物層12cm×15cm(平面尺寸為12cm×15cm之矩形硬化物層),以溫度80℃進行30秒真空吸引後,於溫度80℃,壓力7.0kgf/cm2 之條件,介著耐熱橡膠進行60秒加壓而層合,再以大氣壓下,使用SUS鏡板,溫度80℃,壓力5.5kgf/cm2 的條件下進行90秒加壓而施予平滑化處理時之樹脂最大漏垢長度的測定,該最大漏垢長度較佳為0.3mm以下,更佳為0.2mm以下,特佳為0.1mm以下,特別以實質為0為佳。In the cured layer of the insulating resin sheet of the present invention, the thermosetting resin composition does not need to be completely thermally cured, and is only cured to such an extent that the effects of the present invention can be exhibited. That is, it can be used for the formation of a general interlayer insulating layer, and the subsequent sheet formed of the support and the thermosetting resin composition layer must be embedded in a circuit for laminating the inner layer circuit substrate, and must have sufficient flow. The cured layer of the thermosetting resin composition in the insulating resin sheet of the present invention is intended to suppress the exposure of the sheet-like fibrous base material of the prepreg, and has little flow in the laminating step and the smoothing step. Sex is important, and it is preferable to have no liquidity. For example, using a vacuum laminator, the cured layer of the thermosetting resin composition is 12 cm × 15 cm on the FR4 substrate having a thickness of 20 cm square and 0.8 mm, under the same conditions as the actual lamination step and the smoothing step. For lamination and smoothing, the maximum scale leakage length at this time is preferably 0.3 mm or less, more preferably 0.2 mm or less, most preferably 0.1 mm or less, and particularly preferably a hardened state of substantially 0. For example, the maximum scale length measured under the following representative conditions can be used as an index of the degree of hardening of the preferred cured layer used in the present invention. Specifically, a cured layer of a thermosetting resin composition of 12 cm × 15 cm (a rectangular cured layer having a plane size of 12 cm × 15 cm) was subjected to vacuum suction at a temperature of 80 ° C for 30 seconds using a vacuum laminator. °C, pressure 7.0kgf / cm 2 conditions, laminated with heat-resistant rubber for 60 seconds, and then used at 9.0 °C under atmospheric pressure using a SUS mirror plate at a temperature of 80 ° C and a pressure of 5.5 kgf / cm 2 The maximum scale leakage length of the resin when the smoothing treatment is applied is preferably 0.3 mm or less, more preferably 0.2 mm or less, particularly preferably 0.1 mm or less, particularly preferably substantially 0. .
熱硬化性樹脂組成物之硬化程度,亦可由玻璃轉移溫度進行評估。本願發明中,至少硬化至硬化物的玻璃轉移溫度可被觀測之程度為佳。一般使用於層間絕緣層形成的由支持體與熱硬化性樹脂組成物所成之接著薄片,具有如上述之流動性,例如即使熱硬化性樹脂組成物層為B階段,反應度顯著低,一般無法測定其玻璃轉移溫度,即使可測定,至少為室溫以下的玻璃轉移溫度。一般硬化至玻璃轉移溫度可被觀測之程度時,一般層合步驟之溫度及平滑化步驟之溫度(約70℃~140℃)範圍中,熱硬化性樹脂組成物於實質上不具有流動性、或幾乎不具有流動性。由這些點,一般接著薄片與本發明中之硬化物薄片可明確區別。硬化物之玻璃轉移溫度以80℃以上者為佳。且,玻璃轉移溫度之上限並無特別限定,一般經硬化的熱硬化性樹脂組成物之玻璃轉移溫度以限定於300℃以下的範圍為多。The degree of hardening of the thermosetting resin composition can also be evaluated by the glass transition temperature. In the present invention, the glass transition temperature at least hardened to the cured product can be observed to a good extent. The adhesive sheet formed of the support and the thermosetting resin composition which is generally used for the interlayer insulating layer has fluidity as described above. For example, even if the thermosetting resin composition layer is in the B stage, the reactivity is remarkably low. The glass transition temperature cannot be measured, and even if it is measurable, it is at least a glass transition temperature of room temperature or lower. Generally, when the temperature is hardened until the glass transition temperature can be observed, in the range of the temperature of the general lamination step and the temperature of the smoothing step (about 70 ° C to 140 ° C), the thermosetting resin composition has substantially no fluidity, Or almost no liquidity. From these points, generally the sheet is clearly distinguishable from the cured sheet of the present invention. The glass transition temperature of the cured product is preferably 80 ° C or higher. Further, the upper limit of the glass transition temperature is not particularly limited, and the glass transition temperature of the generally cured thermosetting resin composition is usually limited to a range of 300 ° C or lower.
於此所謂的「玻璃轉移溫度」為顯示耐熱性之值,可 依據JIS K 7179所記載之方法來決定,具體而言可使用熱機械分析(TMA)、動的機械分析(DMA)等進行測定。作為熱機械分析(TMA),例如可舉出TMA-SS6100(Seiko Instruments(股)製)、TMA-8310((股)rigaku製)等,作為動態機械分析(DMA),例如可舉出DMS-6100(Seiko Instruments(股)製)等。又,玻璃轉移溫度比分解溫度還高,實際上未觀測到玻璃轉移溫度時,可將分解溫度視為本發明中之玻璃轉移溫度。其中所謂的分解溫度為,依據JIS K 7120所記載之方法進行測定時的質量減少率成為5%之溫度。The so-called "glass transition temperature" is a value indicating heat resistance. The measurement is determined according to the method described in JIS K 7179, and specifically, it can be measured using thermomechanical analysis (TMA), dynamic mechanical analysis (DMA), or the like. Examples of the thermomechanical analysis (TMA) include TMA-SS6100 (manufactured by Seiko Instruments Co., Ltd.) and TMA-8310 (manufactured by rigaku). For dynamic mechanical analysis (DMA), for example, DMS- 6100 (Seiko Instruments Co., Ltd.) and the like. Further, the glass transition temperature is higher than the decomposition temperature, and when the glass transition temperature is not actually observed, the decomposition temperature can be regarded as the glass transition temperature in the present invention. The decomposition temperature is a temperature at which the mass reduction rate at the time of measurement according to the method described in JIS K 7120 is 5%.
熱硬化性樹脂組成物的硬化物層之厚度一般為1~30μm之範圍,以1~20μm時為較佳。過薄時,硬化物層的製造會變的困難且纖維基材之露出抑制效果會有降低之傾向。又過厚時,對於多層印刷電路板之薄型化會有不利的傾向。且,厚度可藉由調整對熱硬化性樹脂組成物之支持體的塗佈量而容易控制。The thickness of the cured layer of the thermosetting resin composition is generally in the range of 1 to 30 μm, preferably 1 to 20 μm. When it is too thin, the production of the cured layer becomes difficult, and the effect of suppressing the exposure of the fibrous base material tends to be lowered. When it is too thick, there is a disadvantage that the thickness of the multilayer printed circuit board is reduced. Further, the thickness can be easily controlled by adjusting the coating amount of the support for the thermosetting resin composition.
本發明的絕緣樹脂薄片可藉由將前述熱硬化性樹脂組成物之硬化物層與前述預浸體進行接著而得到。例如可舉出將由支持體與熱硬化性樹脂組成物之硬化物層所成之硬化物薄片,於預浸體之單面進行層合而接著之方法、將預浸體於該硬化物薄片之硬化物層進行層合而接著之方法。可將該硬化物薄片與預浸體於各滾筒進行捲取、連續式層合,又亦可裁剪滾筒兩薄片,進行葉片式層合。The insulating resin sheet of the present invention can be obtained by adhering a cured layer of the thermosetting resin composition to the prepreg. For example, a cured product sheet made of a cured layer of a support and a thermosetting resin composition may be laminated on one side of the prepreg, and the prepreg may be applied to the cured product sheet. The cured layer is laminated and then the method. The cured product sheet and the prepreg may be wound up and continuously laminated on each of the rolls, or the two sheets of the roll may be cut to perform blade type lamination.
本發明之絕緣樹脂薄片中,預浸體層及熱硬化性樹脂 組成物之硬化物層的合計厚度一般為11μm~100μm之範圍,以13~70μm之範圍為較佳,特別以13~55μm之範圍為佳。絕緣樹脂薄片的厚度過薄時,形成絕緣層時電路的鑲入有不充分之傾向,且製造亦成為有困難之傾向。又,絕緣樹脂薄片之厚度過厚時,對於多層印刷電路板之薄型化成為不利傾向。In the insulating resin sheet of the present invention, the prepreg layer and the thermosetting resin The total thickness of the cured layer of the composition is generally in the range of 11 μm to 100 μm, preferably in the range of 13 to 70 μm, particularly preferably in the range of 13 to 55 μm. When the thickness of the insulating resin sheet is too small, the insertion of the circuit tends to be insufficient when the insulating layer is formed, and the production tends to be difficult. Moreover, when the thickness of the insulating resin sheet is too thick, the thickness of the multilayer printed wiring board tends to be disadvantageous.
本發明的絕緣樹脂薄片中,於硬化物層未接著的預浸體面,以表面凹陷或傷痕的防止、異物附著防止等目的下,藉由保護薄膜加以保護為佳。保護薄膜可使用與前述支持體之說明中所記載的塑質薄膜之相同者。保護薄膜之厚度一般為1~40μm,較佳為10~30μm之範圍。In the insulating resin sheet of the present invention, the surface of the prepreg which is not adhered to the cured layer is preferably protected by a protective film for the purpose of preventing surface depression, prevention of scratches, and prevention of adhesion of foreign matter. The protective film can be the same as the plastic film described in the above description of the support. The thickness of the protective film is generally in the range of 1 to 40 μm, preferably 10 to 30 μm.
本發明的多層印刷電路板之製造方法為,含有將本發明的絕緣樹脂薄片於內層電路基板單面或雙面進行層合,硬化絕緣樹脂薄片後形成絕緣層的步驟者,一般含有以下(1)~(3)之步驟。The method for producing a multilayer printed wiring board according to the present invention includes the step of laminating the insulating resin sheet of the present invention on one or both sides of the inner layer circuit board, and curing the insulating resin sheet to form an insulating layer, and generally includes the following ( 1)~(3) steps.
(1)將絕緣樹脂薄片配置於內層電路基板,使該預浸體銜接於內層電路基板的雙面或單面,藉由減壓下,介著彈性材進行加熱及加壓,於電路基板上進行層合之層合步驟、(2)將經層合的絕緣樹脂薄片藉由金屬板或金屬輥進行加熱及加壓的平滑化步驟、及(3)將經平滑化的絕緣樹脂薄片藉由熱硬化而形成絕緣層之熱硬化步驟。(1) The insulating resin sheet is placed on the inner layer circuit board, and the prepreg is bonded to the double-sided or single-sided surface of the inner layer circuit board, and is heated and pressurized via the elastic material under reduced pressure. a lamination step of laminating on a substrate, (2) a smoothing step of heating and pressurizing the laminated insulating resin sheet by a metal plate or a metal roll, and (3) smoothing the insulating resin sheet A thermal hardening step of forming an insulating layer by thermal hardening.
其中,絕緣層之厚度,基本上包含於熱硬化性樹脂組成物的硬化物層及預浸體之合計厚度。因此,絕緣層之厚度一般為11~100μm,較佳為13~70μm,更佳為13~ 55μm。Here, the thickness of the insulating layer is basically included in the total thickness of the cured layer of the thermosetting resin composition and the prepreg. Therefore, the thickness of the insulating layer is generally 11 to 100 μm, preferably 13 to 70 μm, more preferably 13~ 55 μm.
對於層合步驟做說明。層合為一般於內層電路基板將絕緣樹脂薄片於減壓下,進行加熱及加壓,於內層電路基板層合絕緣樹脂薄片而進行。所謂減壓下為,將空氣壓減至20mmHg(26.7hPa)以下的環境下而言。層合步驟中,加熱及加壓雖可將經加熱的SUS鏡板等金屬板自支持體側進行加壓而進行,但並非將金屬板進行直接加壓,介著耐熱橡膠等彈性材進行加壓,使得於電路基板的電路凹凸上絕緣樹脂薄片可充分追隨。加壓於較佳溫度為70~140℃(更較佳為80~130℃)、較佳壓力為1~11kgf/cm2 (9.8×104 ~107.9×104 N/m2 )之範圍下進行。Explain the lamination step. In the inner layer circuit board, the insulating resin sheet is heated and pressurized under reduced pressure, and the insulating resin sheet is laminated on the inner layer circuit board. Under reduced pressure, the air pressure is reduced to an environment of 20 mmHg (26.7 hPa) or less. In the laminating step, heating and pressurization may be performed by pressurizing a metal plate such as a heated SUS mirror plate from the side of the support, but the metal plate is not directly pressurized, and is pressurized with an elastic material such as heat-resistant rubber. The insulating resin sheet on the circuit unevenness of the circuit board can be sufficiently followed. Pressurizing at a preferred temperature of 70 to 140 ° C (more preferably 80 to 130 ° C), preferably a pressure of 1 to 11 kgf / cm 2 (9.8 × 10 4 ~ 107.9 × 10 4 N / m 2 ) get on.
層合步驟後,進行經層合的絕緣樹脂薄片之平滑化。該平滑化步驟一般於常壓下(大氣壓下),藉由經加熱的SUS鏡板等金屬板或金屬輥,將絕緣樹脂薄片進行加熱及加壓下進行。平滑化係以藉由金屬板進行較佳。加熱及加壓條件可使用與上述層合步驟之同樣條件。After the laminating step, smoothing of the laminated insulating resin sheet is performed. This smoothing step is generally carried out under normal pressure (at atmospheric pressure) by heating and pressurizing the insulating resin sheet by a metal plate or a metal roll such as a heated SUS mirror plate. The smoothing is preferably performed by a metal plate. The heating and pressurizing conditions can be the same as those of the above lamination step.
本發明中之層合步驟及平滑化步驟可藉由被販賣之真空層壓機以連續方式進行。作為被販賣之真空層壓機,例如可舉出(股)名機製作所製真空加壓式層壓機、Nichigo-morton(股)製真空塗抹器等。The laminating step and the smoothing step in the present invention can be carried out in a continuous manner by a vacuum laminator being sold. Examples of the vacuum laminating machine to be sold include a vacuum press laminator manufactured by Nippon Machine Co., Ltd., and a vacuum applicator made of Nichigo-morton.
層合步驟或平滑化步驟後進行熱硬化步驟。熱硬化步驟中,將絕緣樹脂薄片進行熱硬化,形成絕緣層。熱硬化步驟中主要使預浸體層經熱硬化。熱硬化條件雖依熱硬化性樹脂組成物之種類等而不同,但一般之硬化溫度為150 ~200℃,硬化時間為15~60分鐘。The thermal hardening step is performed after the lamination step or the smoothing step. In the thermal hardening step, the insulating resin sheet is thermally cured to form an insulating layer. In the heat hardening step, the prepreg layer is mainly thermally hardened. The thermosetting conditions vary depending on the type of the thermosetting resin composition, etc., but the general curing temperature is 150. ~200 ° C, hardening time is 15 to 60 minutes.
本發明的多層印刷電路板之製造方法中,可進一步含有於絕緣層打洞之打洞步驟、將該絕緣層施予粗糙化處理的粗糙化步驟。這些步驟對於斯業者為公知,可依據使用於多層印刷電路板的製造之各種方法而進行。本發明的多層印刷電路板之製造方法中,可進一步含有自經熱硬化的絕緣樹脂薄片將支持體剝離的步驟。支持體之剝離可於熱硬化步驟後或打洞步驟後進行為佳。支持體之剝離可以手動進行剝離、或藉由自動剝離裝置進行機械性剝離。作為支持體使用金屬箔時,可藉由蝕刻溶液進行蝕刻而除去。In the method for producing a multilayer printed wiring board according to the present invention, the step of punching the hole in the insulating layer and the step of roughening the step of roughening the insulating layer may be further included. These steps are well known to those skilled in the art and can be carried out in accordance with various methods used in the manufacture of multilayer printed circuit boards. In the method for producing a multilayer printed wiring board of the present invention, the step of peeling off the support from the thermally cured insulating resin sheet may be further included. The peeling of the support may preferably be carried out after the heat hardening step or after the hole punching step. The peeling of the support can be performed by manual peeling or mechanical peeling by an automatic peeling device. When a metal foil is used as a support, it can remove by etching by an etching solution.
打洞步驟,例如可於絕緣層藉由鈷頭、碳酸氣雷射、YAG雷射等雷射、等離子等形成通道孔、穿孔等洞而進行。對於多層印刷電路板,穿孔形成一般於核心基板進行,經構築之絕緣層一般藉由通道孔而導通。且,穿孔形成一般使用機械鈷頭。The hole punching step can be performed, for example, by forming a hole such as a via hole or a through hole by a laser such as a cobalt head, a carbon dioxide laser, a YAG laser or the like in the insulating layer. For multilayer printed circuit boards, the formation of the vias is generally performed on the core substrate, and the structured insulating layer is typically turned on by the via holes. Moreover, the formation of perforations generally uses a mechanical cobalt head.
粗糙化步驟,例如可將絕緣層表面以鹼性過錳酸水溶液等氧化劑處理後進行。該粗糙化步驟有時兼具通道孔、穿孔等洞之去鑽污步驟。於鹼性過錳酸水溶液首先藉由膨潤液進行膨潤處理為佳。膨潤液例如可舉出Atotech Japan(股)製之Swelling Dip Securiganth P、Swelling Dip Securiganth SBU等。膨潤處理一般於60~80℃程度下進行加熱,並於膨潤液中使絕緣層以5~10分鐘程度下進行。鹼性過錳酸水溶液,例如可舉出於氫氧化鈉之水溶液溶解 過錳酸鉀或過錳酸鈉之溶液。藉由鹼性過錳酸水溶液之粗糙化處理,一般於60~80℃下進行10~30分鐘程度。鹼性過錳酸水溶液,作為販賣品可舉出Atotech Japan(股)製之濃縮壓縮CP、分注溶液溶脹劑P等。The roughening step can be carried out, for example, by treating the surface of the insulating layer with an oxidizing agent such as an aqueous alkaline permanganic acid solution. The roughening step sometimes has a drilling step that combines holes such as passage holes and perforations. Preferably, the aqueous alkaline permanganic acid solution is first swollen by a swelling liquid. Examples of the swelling liquid include Swelling Dip Securiganth P, Swelling Dip Securiganth SBU, and the like manufactured by Atotech Japan Co., Ltd. The swelling treatment is generally carried out at a temperature of 60 to 80 ° C, and the insulating layer is allowed to be carried out in the swelling liquid for 5 to 10 minutes. An alkaline permanganic acid aqueous solution, for example, dissolved in an aqueous solution of sodium hydroxide A solution of potassium permanganate or sodium permanganate. The roughening treatment of the aqueous alkaline permanganic acid solution is generally carried out at 60 to 80 ° C for 10 to 30 minutes. An alkaline permanganic acid aqueous solution is exemplified as a concentrated compressed CP manufactured by Atotech Japan Co., Ltd., a dispensing solution swelling agent P, and the like.
對於本發明之多層印刷電路板的製造方法,可更含有於進一步粗糙化的絕緣層表面上藉由鍍敷形成導體層之鍍敷步驟,導體層形成後,藉由加熱使電路基板進行退火(aneal)處理之步驟、及於導體層形成電路之電路形成步驟。這些步驟對於斯業者為公知,可依據使用於多層印刷電路板之製造的各種方法而進行。The method for fabricating the multilayer printed circuit board of the present invention may further comprise a plating step of forming a conductor layer by plating on the surface of the further roughened insulating layer, and after the conductor layer is formed, the circuit substrate is annealed by heating ( Aneal) a step of processing, and a circuit forming step of forming a circuit in the conductor layer. These steps are well known to those skilled in the art and can be carried out in accordance with various methods used in the manufacture of multilayer printed circuit boards.
鍍敷步驟,例如於藉由粗糙化處理形成凸凹錨的絕緣層表面上,以組合無電解鍍敷與電解鍍敷之方法形成導體層而進行。此時,於通道孔內亦形成鍍敷。作為導體層以銅鍍敷層為佳。銅鍍敷層一般雖使用組合無電解銅鍍敷與電解銅鍍敷之方法,但亦可形成與導體層為逆圖形之抗鍍敷,僅以無電解銅鍍敷形成導體層。無電解鍍敷層之厚度較佳為0.1~3μm,更佳為0.3~2μm。另一方面,作為電解鍍敷層之厚度,與無電解鍍敷層之厚度的合計以成為3~35μm厚度為佳,成為5~20μm厚度為較佳。又,通道孔可藉由鍍敷作為磁場通道而形成。The plating step is performed, for example, on the surface of the insulating layer on which the uneven anchor is formed by the roughening treatment, and the conductor layer is formed by a combination of electroless plating and electrolytic plating. At this time, plating is also formed in the via hole. As the conductor layer, a copper plating layer is preferred. Although a copper plating layer is generally used in combination with electroless copper plating and electrolytic copper plating, it is also possible to form a plating resist which is inversely patterned with a conductor layer, and to form a conductor layer only by electroless copper plating. The thickness of the electroless plating layer is preferably from 0.1 to 3 μm, more preferably from 0.3 to 2 μm. On the other hand, as the thickness of the electrolytic plating layer, the thickness of the electroless plating layer is preferably 3 to 35 μm, and preferably 5 to 20 μm. Also, the via hole can be formed by plating as a magnetic field channel.
退火處理步驟,例如經導體層形成後,將電路基板以150~200℃進行20~90分鐘加熱而進行。藉由煅燒處理,可使導體層之剝離強度進一步提高,並使其安定化。The annealing treatment step is performed, for example, after the conductor layer is formed, and the circuit board is heated at 150 to 200 ° C for 20 to 90 minutes. By the calcination treatment, the peeling strength of the conductor layer can be further improved and stabilized.
作為電路形成步驟,例如可使用減數法(subtractive method)、半添加法(Semiadditive Method)等。細線形成以半添加法為佳,於無電解鍍敷層上施予圖形光阻,形成所望厚度之電解鍍敷層後,剝離圖形光阻,將無電解鍍敷層以沖洗蝕刻除去而可形成電路。As a circuit forming step, for example, a subtractive method can be used. Method), semi-additive method (Semiadditive Method), and the like. Preferably, the thin line is formed by a semi-additive method, and a pattern resist is applied to the electroless plating layer to form an electrolytic plating layer having a desired thickness, and then the pattern resist is removed, and the electroless plating layer is removed by rinsing and etching. Circuit.
且,本發明所謂「內層電路基板」為,於玻璃環氧基板、金屬基板、聚酯基板、聚醯亞胺基板、BT械脂基板、熱硬化型聚伸苯基醚基板之單面或雙面上具有施予圖形加工(形成電路)之導體層,於製造多層印刷電路板時,進一步必須形成絕緣層及導體層之中間製造物而言。且,導體層表面藉由黑化處理等施予預先粗糙化處理者,由對絕緣層的內層電路基板之密著性的觀點來看為佳。Further, the "inner layer circuit substrate" of the present invention is a single surface of a glass epoxy substrate, a metal substrate, a polyester substrate, a polyimide substrate, a BT grease substrate, or a thermosetting polyphenylene ether substrate. A conductor layer having a patterning process (forming a circuit) on both sides is required to form an intermediate layer of an insulating layer and a conductor layer when manufacturing a multilayer printed circuit board. Further, the surface of the conductor layer is subjected to a pre-roughening treatment by a blackening treatment or the like, and it is preferable from the viewpoint of the adhesion to the inner layer circuit board of the insulating layer.
以下藉由實施例及比較例對本發明做更具體說明。The invention will be more specifically described below by way of examples and comparative examples.
且,以下記載之「份」表示「質量份」。Further, the "parts" described below indicate "parts by mass".
於乙醇與甲苯以1:1(質量比)之比率下混合的溶劑中,於60℃下將聚乙烯基丁縮醛樹脂(積水化學工業(股)製「KS-1」)溶解至固體成分為15%,得到聚乙烯基丁縮醛樹脂溶液。其次,將液狀雙酚A型環氧樹脂(環氧當量180,Japan Epoxy Resins(股)製「Epikote828EL」)28份、與萘型4官能環氧樹脂(環氧當量163,大日本油墨化學工業(股)製「HP4700」)28份,於由甲基乙酮( 以下簡稱為「MEK」。)15份及環己酮15份所成之混合溶劑中,一邊攪拌一邊進行加熱溶解。於此,混合萘酚系硬化劑(東都化成(股)製「SN-485」,酚性羥基當量215)之固體成分50%的MEK溶液110份、硬化觸媒(四國化成工業(股)製,「2E4MZ」)0.1份、球形二氧化矽(平均粒徑0.5μm,「SOC2」Admatechs公司製)70份、及前述聚乙烯基丁縮醛樹脂溶液30份,以高速轉動攪拌器使其均勻分散,製作樹脂清漆。A polyvinyl butyral resin ("KS-1" manufactured by Sekisui Chemical Co., Ltd.) was dissolved in a solid at 60 ° C in a solvent in which ethanol and toluene were mixed at a ratio of 1:1 (mass ratio). At 15%, a polyvinyl butyral resin solution was obtained. Next, 28 parts of liquid bisphenol A type epoxy resin (epoxy equivalent weight 180, "Epikote 828EL" made by Japan Epoxy Resins Co., Ltd.), and naphthalene type 4-functional epoxy resin (epoxy equivalent 163, Dainippon Ink Chemistry) Industrial (share) "HP4700") 28 parts, in methyl ethyl ketone ( Hereinafter referred to as "MEK". In a mixed solvent of 15 parts and 15 parts of cyclohexanone, the mixture was heated and dissolved while stirring. Here, a mixed naphthol-based curing agent ("SN-485" manufactured by Tohto Kasei Co., Ltd., phenolic hydroxyl equivalent 215) has a solid content of 50% of a MEK solution of 110%, and a curing catalyst (Four Nations Chemical Industry Co., Ltd.) "2E4MZ") 0.1 parts, spherical cerium oxide (average particle diameter 0.5 μm, "SOC2" manufactured by Admatech Co., Ltd.) 70 parts, and 30 parts of the polyvinyl butyral resin solution described above, and rotated at a high speed by a stirrer Disperse evenly to make a resin varnish.
於將前述樹脂清漆以醇酸系脫模劑進行處理的PET薄膜(38μm)之脫模處理面上,以塑模塗佈(die coating)均勻塗佈至乾燥後的熱硬化性樹脂組成物層之厚度為15μm,以80~120℃(平均100℃)下進行6~8分鐘乾燥,得到熱硬化性樹脂組成物層之最低熔融黏度為1300poise的接著薄片。於該接著薄片之表面,一邊貼合作為保護薄膜之厚度15μm的聚丙烯薄膜,一邊以滾筒捲取。其後,將滾筒之接著薄片縱切為寬度502mm,得到50捲之接著薄片。剝離接著薄片之保護薄膜,各於150℃下進行15分鐘,於160℃下進行15分鐘、於170℃下進行15分鐘、於180℃下進行15分鐘之熱硬化,得到熱硬化性樹脂組成物的硬化物之玻璃轉移溫度各為86℃、99℃、113℃、129℃之硬化物薄片。另一方面,以同樣方法,得到熱硬化性樹脂組成物層之厚度為10μm、5μm的滾筒之接著薄片,剝離保護薄膜後以180℃進行15分鐘熱硬化,得到熱硬化性樹脂組成物之硬化物的玻璃轉移溫度為129℃之2種硬化物薄片。The release-treated surface of the PET film (38 μm) treated with the alkyd-based release agent was uniformly applied to the dried thermosetting resin composition layer by die coating. The thickness was 15 μm, and it was dried at 80 to 120 ° C (average 100 ° C) for 6 to 8 minutes to obtain a succeeding sheet having a minimum melt viscosity of 1300 poise of the thermosetting resin composition layer. On the surface of the succeeding sheet, a polypropylene film having a thickness of 15 μm as a protective film was bonded and wound up on a roll. Thereafter, the succeeding sheet of the roll was slit into a width of 502 mm to obtain 50 rolls of the succeeding sheet. The protective film of the sheet was peeled off, and each was cured at 150 ° C for 15 minutes, at 160 ° C for 15 minutes, at 170 ° C for 15 minutes, and at 180 ° C for 15 minutes, to obtain a thermosetting resin composition. The glass transition temperatures of the cured materials were each 86 ° C, 99 ° C, 113 ° C, and 129 ° C hardened flakes. On the other hand, in the same manner, a sheet of a roll of a thermosetting resin composition layer having a thickness of 10 μm and 5 μm was obtained, and after peeling off the protective film, it was thermally cured at 180 ° C for 15 minutes to obtain a hardening of the thermosetting resin composition. The glass transition temperature of the object was two kinds of hardened flakes at 129 °C.
將樹脂清漆含浸於(股)有澤製作所製1015NS玻璃布(厚度16μm)後,乾燥至樹脂之殘存溶劑量為0.6%,得到厚度35μm之預浸體。其次,於預浸體單面上層合厚度15μm之聚丙烯薄膜,於另一面上層合38μm之PET薄膜。The resin varnish was impregnated into a 1015 NS glass cloth (thickness: 16 μm) manufactured by Azawa Seisakusho Co., Ltd., and dried to a residual solvent amount of 0.6% to obtain a prepreg having a thickness of 35 μm. Next, a polypropylene film having a thickness of 15 μm was laminated on one side of the prepreg, and a PET film of 38 μm was laminated on the other side.
於熱硬化性樹脂組成物的硬化物之玻璃轉移溫度為86℃的硬化物薄片之硬化物面,配置剝離聚丙烯薄膜的前述預浸體,使用(股)名機製作所製之真空加壓式層壓機,於溫度120℃進行30秒真空吸引後,以溫度120℃,壓力7.0kg/cm2 之條件下,由PET薄膜上介著耐熱橡膠進行30秒層合。其次於大氣壓下,使用SUS鏡板,於溫度120℃,壓力5kg/cm2 之條件下進行60秒加壓,得到絕緣樹脂薄片。The prepreg of the cured polypropylene sheet having a glass transition temperature of 86 ° C in a cured product of the thermosetting resin composition is placed on the cured surface of the cured sheet, and the vacuum prepreg is produced by using a polypropylene film. The laminator was subjected to vacuum suction at a temperature of 120 ° C for 30 seconds, and then laminated on a PET film with a heat-resistant rubber for 30 seconds under the conditions of a temperature of 120 ° C and a pressure of 7.0 kg / cm 2 . Next, under pressure at atmospheric pressure, a SUS mirror plate was used, and the mixture was pressed at a temperature of 120 ° C under a pressure of 5 kg/cm 2 for 60 seconds to obtain an insulating resin sheet.
將所得之絕緣樹脂薄片於內層電路基板(IPC MULTI-PURPOSE TESTBOARD No.IPC-B-25、導體厚18μm、0.8mm厚)之雙面進行層合。該層合使用(股)名機製作所製之真空加壓式層壓機MVLP-500,於溫度80℃下進行30秒間真空吸引後,於溫度80℃,壓力7.0kg/cm2 之條件下,自PET薄膜上介著耐熱橡膠藉由施予60秒加壓而層合。其次,大氣壓下使用SUS鏡板,於溫度80℃,壓力5.5kg/cm2 的條件下進行90秒加壓。The obtained insulating resin sheet was laminated on both sides of an inner layer circuit board (IPC MULTI-PURPOSE TESTBOARD No. IPC-B-25, conductor thickness 18 μm, 0.8 mm thick). This laminate was used in a vacuum press laminator MVLP-500 manufactured by Seiki Co., Ltd., and vacuum-sucked at a temperature of 80 ° C for 30 seconds, and then at a temperature of 80 ° C and a pressure of 7.0 kg / cm 2 . The heat-resistant rubber was laminated on the PET film by applying pressure for 60 seconds. Next, a SUS mirror plate was used under atmospheric pressure, and pressurization was carried out for 90 seconds under the conditions of a temperature of 80 ° C and a pressure of 5.5 kg / cm 2 .
自經層合之絕緣樹脂薄片剝離PET薄膜,使用熱風循環爐,以180℃、30分鐘的硬化條件下,硬化熱硬化性樹脂組成物(預浸體),形成絕緣層。藉此得到於內層電路基板之雙面形成絕緣層之層合板。The PET film was peeled off from the laminated insulating resin sheet, and the thermosetting resin composition (prepreg) was cured at 180 ° C for 30 minutes using a hot air circulating furnace to form an insulating layer. Thereby, a laminate in which an insulating layer is formed on both surfaces of the inner layer circuit board is obtained.
於所得之層合板藉由過錳酸液施予粗糙化處理。首先作為膨潤處理於Atotech Japan(股)製之swelling Dip Securiganth P,60℃中含浸5分鐘,其次作為氧化處理,於Atotech Japan(股)製之濃縮.壓縮CP與分注溶液.溶脹劑P之混合液於80℃進行20分鐘含浸,其後作為還原處理於Atotech Japan(股)製Reduction solution Securiganth P500溶液中進行40℃之5分鐘含浸。The resulting laminate was subjected to a roughening treatment by permanganic acid solution. First, as a swelling treatment, Swelling Dip Securiganth P manufactured by Atotech Japan Co., Ltd., impregnated for 5 minutes at 60 ° C, followed by oxidation treatment, and concentrated in Atotech Japan. Compress CP and dispense solution. The mixture of the swelling agent P was impregnated at 80 ° C for 20 minutes, and then subjected to reduction treatment in a reduction solution Securiganth P500 solution manufactured by Atotech Japan Co., Ltd. for 5 minutes at 40 ° C for 5 minutes.
於所得之層合板的絕緣層表面,使用含有鈀的Atotech Japan公司製之Activator Neoganth 834,進行無電解銅鍍敷之觸媒賦予後,使用含有酒石酸鹽的Atotech Japan(股)製printganth MSK-DK進行無電解鍍敷。其次,使用硫酸銅進行電解鍍敷至銅厚約20μm。其後於180℃下進行30分鐘硬化,得到多層印刷電路板。On the surface of the insulating layer of the obtained laminate, Activator Neoganth 834 manufactured by Atotech Japan Co., Ltd. containing palladium was used, and after the catalyst supply of electroless copper plating, the printganth MSK-DK made of Atotech Japan containing tartrate was used. Perform electroless plating. Next, electrolytic plating was performed using copper sulfate to a copper thickness of about 20 μm. Thereafter, it was hardened at 180 ° C for 30 minutes to obtain a multilayer printed circuit board.
作為硬化物薄片,使用硬化物之玻璃轉移溫度為99℃之硬化物薄片(熱硬化性樹脂組成物層(硬化物層)的厚度為15μm)以外,與實施例1同樣下得到多層印刷電路板。A multilayer printed wiring board was obtained in the same manner as in Example 1 except that a cured product sheet having a glass transition temperature of 99 ° C (the thickness of the thermosetting resin composition layer (hardened layer) was 15 μm) was used as the cured product sheet. .
作為硬化物薄片,使用硬化物之玻璃轉移溫度為113℃的硬化物薄片(熱硬化性樹脂組成物層(硬化物層)的厚度為15μm)以外,與實施例1同樣下得到多層印刷電路板。A multilayer printed wiring board was obtained in the same manner as in Example 1 except that the cured product sheet having a cured product having a glass transition temperature of 113 ° C (the thickness of the thermosetting resin composition layer (cured layer) was 15 μm) was used. .
使絕緣樹脂薄片對內層電路基板之層合及平滑化步驟的溫度設定為100℃以外,與實施例1同樣下得到多層印刷電路板。A multilayer printed wiring board was obtained in the same manner as in Example 1 except that the temperature of the step of laminating and smoothing the insulating resin sheet to the inner layer circuit board was set to 100 °C.
作為硬化物薄片,使用硬化物之玻璃轉移溫度為99℃之硬化物薄片(熱硬化性樹脂組成物層(硬化物層)的厚度為15μm),絕緣樹脂薄片對內層電路基板之層合及平滑化步驟的溫度為100℃以外,與實施例1同樣下得到多層印刷電路板。As the cured product sheet, a cured sheet having a glass transition temperature of 99 ° C (the thickness of the thermosetting resin composition layer (cured layer) is 15 μm), and the lamination of the insulating resin sheet to the inner layer circuit board is used. A multilayer printed wiring board was obtained in the same manner as in Example 1 except that the temperature of the smoothing step was 100 °C.
作為硬化物薄片,使用硬化物的玻璃轉移溫度為113℃之硬化物薄片(熱硬化性樹脂組成物層(硬化物層)的厚度為15μm),絕緣樹脂薄片對內層電路基板之層合及平滑化步驟的溫度為100℃以外,與實施例1同樣下得到多層印刷電路板。As the cured product sheet, a cured product sheet having a glass transition temperature of 113 ° C (the thickness of the thermosetting resin composition layer (cured layer) is 15 μm), and the lamination of the insulating resin sheet to the inner layer circuit board is used. A multilayer printed wiring board was obtained in the same manner as in Example 1 except that the temperature of the smoothing step was 100 °C.
絕緣樹脂薄片對內層電路基板之層合及平滑化步驟的溫度為120℃以外,與實施例1同樣下得到多層印刷電路板。A multilayer printed wiring board was obtained in the same manner as in Example 1 except that the temperature of the step of laminating and smoothing the insulating resin sheet to the inner layer circuit board was 120 °C.
作為硬化物薄片,使用硬化物之玻璃轉移溫度為99℃的硬化物薄片(熱硬化性樹脂組成物層(硬化物層)的厚度為15μm),絕緣樹脂薄片對內層電路基板之層合及平滑化步驟的溫度為120℃以外,與實施例1同樣下得到多層印刷電路板。As the cured product sheet, a cured product sheet having a glass transition temperature of 99 ° C (the thickness of the thermosetting resin composition layer (cured layer) is 15 μm), and the lamination of the insulating resin sheet to the inner layer circuit board is used. A multilayer printed wiring board was obtained in the same manner as in Example 1 except that the temperature of the smoothing step was 120 °C.
作為硬化物薄片,使用硬化物之玻璃轉移溫度為113℃之硬化物薄片(熱硬化性樹脂組成物層(硬化物層)的厚度為15μm),絕緣樹脂薄片對內層電路基板之層合及平滑化步驟的溫度為120℃以外,與實施例1同樣下得到多層印刷電路板。As the cured product sheet, a cured sheet having a glass transition temperature of 113 ° C (the thickness of the thermosetting resin composition layer (hardened layer) is 15 μm) is used, and the insulating resin sheet is laminated to the inner layer circuit board. A multilayer printed wiring board was obtained in the same manner as in Example 1 except that the temperature of the smoothing step was 120 °C.
作為硬化物薄片,使用硬化物之玻璃轉移溫度為129℃之硬化物薄片(熱硬化性樹脂組成物層(硬化物層)的厚度為15μm),絕緣樹脂薄片對內層電路基板之層合及平滑化步驟的溫度為100℃以外,與實施例1同樣下得到多層印刷電路板。As the cured product sheet, a cured product sheet having a glass transition temperature of 129 ° C (the thickness of the thermosetting resin composition layer (hardened layer) is 15 μm), and the lamination of the insulating resin sheet to the inner layer circuit board is used. A multilayer printed wiring board was obtained in the same manner as in Example 1 except that the temperature of the smoothing step was 100 °C.
作為硬化物薄片,使用硬化物之玻璃轉移溫度為129℃之硬化物薄片(熱硬化性樹脂組成物層(硬化物層)的厚度為10μm),絕緣樹脂薄片對內層電路基板之層合及平滑化步驟的溫度為100℃以外,與實施例1同樣下得到多層印刷電路板。As the cured product sheet, a cured product sheet having a glass transition temperature of 129 ° C (the thickness of the thermosetting resin composition layer (cured layer) is 10 μm), and the lamination of the insulating resin sheet to the inner layer circuit board is used. A multilayer printed wiring board was obtained in the same manner as in Example 1 except that the temperature of the smoothing step was 100 °C.
作為硬化物薄片,使用硬化物之玻璃轉移溫度為129℃之硬化物薄片(熱硬化性樹脂組成物層(硬化物層)的厚度為5μm),絕緣樹脂薄片對內層電路基板之層合及平滑化步驟的溫度為100℃以外,與實施例1同樣下得到多層印刷電路板。As the cured product sheet, a cured product sheet having a glass transition temperature of 129 ° C (the thickness of the thermosetting resin composition layer (cured layer) is 5 μm), and the lamination of the insulating resin sheet to the inner layer circuit board is used. A multilayer printed wiring board was obtained in the same manner as in Example 1 except that the temperature of the smoothing step was 100 °C.
作為硬化物薄片,使用硬化物之玻璃轉移溫度為129℃之硬化物薄片(熱硬化性樹脂組成物層(硬化物層)的厚度為15μm),絕緣樹脂薄片對內層電路基板之層合及平滑化步驟的溫度為120℃以外,與實施例1同樣下得到多層印刷電路板。As the cured product sheet, a cured product sheet having a glass transition temperature of 129 ° C (the thickness of the thermosetting resin composition layer (hardened layer) is 15 μm), and the lamination of the insulating resin sheet to the inner layer circuit board is used. A multilayer printed wiring board was obtained in the same manner as in Example 1 except that the temperature of the smoothing step was 120 °C.
作為硬化物薄片,使用硬化物之玻璃轉移溫度為129℃之硬化物薄片(熱硬化性樹脂組成物層(硬化物層)的厚度為10μm),絕緣樹脂薄片對內層電路基板之層合及平滑化步驟的溫度為120℃以外,與實施例1同樣下得到多層印刷電路板。As the cured product sheet, a cured product sheet having a glass transition temperature of 129 ° C (the thickness of the thermosetting resin composition layer (cured layer) is 10 μm), and the lamination of the insulating resin sheet to the inner layer circuit board is used. A multilayer printed wiring board was obtained in the same manner as in Example 1 except that the temperature of the smoothing step was 120 °C.
作為硬化物薄片,使用硬化物之玻璃轉移溫度為129℃之硬化物薄片(熱硬化性樹脂組成物層(硬化物層)的厚度為5μm),絕緣樹脂薄片對內層電路基板之層合及平滑化步驟的溫度為120℃以外,與實施例1同樣下得到多層印刷電路板。As the cured product sheet, a cured product sheet having a glass transition temperature of 129 ° C (the thickness of the thermosetting resin composition layer (cured layer) is 5 μm), and the lamination of the insulating resin sheet to the inner layer circuit board is used. A multilayer printed wiring board was obtained in the same manner as in Example 1 except that the temperature of the smoothing step was 120 °C.
取代絕緣樹脂薄片,僅使用厚度50μm的預浸體層以外,與實施例1同樣下得到多層印刷電路板。且該厚度50μm之預浸體為,將與實施例1同樣之樹脂清漆含浸於(股)有澤製作所製1015NS玻璃布(厚度16μm)至所得之預浸體的厚度為50μm,並以80~150℃下進行10分鐘乾燥而得到。A multilayer printed wiring board was obtained in the same manner as in Example 1 except that a prepreg layer having a thickness of 50 μm was used instead of the insulating resin sheet. The prepreg having a thickness of 50 μm was obtained by impregnating a resin varnish similar to that of Example 1 into a 1015 NS glass cloth (thickness: 16 μm) manufactured by Tosawa Manufacturing Co., Ltd. to a thickness of 50 μm of the obtained prepreg, and 80 to 150. It was obtained by drying at ° C for 10 minutes.
取代硬化物薄片使用接著薄片(於實施例1中之硬化物薄片的製造所使用之接著薄片)以外,與實施例1同樣下得到多層印刷電路板。A multilayer printed wiring board was obtained in the same manner as in Example 1 except that the succeeding sheet (the succeeding sheet used in the production of the cured sheet in Example 1) was used instead of the cured sheet.
對於以上實施例及比較例所得之硬化物薄片、預浸體、絕緣樹脂薄片及多層印刷板之評估如下所述進行。其結果如下述表1所示。The evaluation of the cured sheet, the prepreg, the insulating resin sheet, and the multilayer printed board obtained in the above Examples and Comparative Examples was carried out as follows. The results are shown in Table 1 below.
使用(股)名機製作所製之真空加壓式層壓機,將硬化物薄片切成平面尺寸為12cm×15cm之矩形,將此於20cm四方的0.8mm厚度的FR4基板上,載置成同心形式,以與各實施例及比較例之相同條件下進行層合及平滑化,藉由漏垢長度來評估流動性。層合為溫度80℃下進行30秒真空吸引後,以溫度80℃,壓力7.0kg/cm2 之條件下,自PET薄膜上介著耐熱橡膠藉由60秒加壓而層合,平滑化為大氣壓下,使用SUS鏡板,於溫度80℃,壓力5.5kg/cm2 之條件下進行90秒加壓。測定加壓後自四邊所出現的樹脂最大漏垢長度。Using a vacuum press laminator manufactured by Seiki Co., Ltd., the cured sheet was cut into a rectangular shape having a plane size of 12 cm × 15 cm, and placed on a 20 cm square 0.8 mm thick FR4 substrate and placed in a concentric shape. The form was laminated and smoothed under the same conditions as in the respective examples and comparative examples, and the fluidity was evaluated by the scale of the scale. After laminating at a temperature of 80 ° C for 30 seconds, vacuum suction was carried out, and at a temperature of 80 ° C and a pressure of 7.0 kg/cm 2 , the heat-resistant rubber was laminated on the PET film by pressurization for 60 seconds, and smoothed to Under a pressure of atmospheric pressure, pressurization was carried out for 90 seconds under the conditions of a temperature of 80 ° C and a pressure of 5.5 kg/cm 2 using a SUS mirror plate. The maximum scale of the resin present from the four sides after pressurization was measured.
且漏垢長度為對於自PET薄膜端部(端邊)露出的樹脂該端部(端邊)之垂直方向的長度,可藉由CCD型顯微鏡((股)Keyence製、VH6300)之長度測定工具進行測定。The length of the scale is the length in the vertical direction of the end portion (end side) of the resin exposed from the end portion (end side) of the PET film, and can be measured by a CCD type microscope (manufactured by Keyence, VH6300). The measurement was carried out.
對於實施例及比較例所得之硬化物薄片,將熱硬化性樹脂組成物之硬化物層的小片做為樣品,作為熱機械分析裝置(DMA)使用Seiko Instruments(股)製之型式DMS-6100,以「拉伸模式」下進行測定。該測定於2℃/分之昇溫下,以25℃~240℃之範圍進行。由測定所得之貯蔵彈性率(E')與損失彈性率(E")之比所求得之損失正接(tanδ)之最大值的小數點第一位經四捨五入後的值作為玻璃轉移溫度。且未硬化下,無法測定時,稱為無法測定。For the cured sheet obtained in the examples and the comparative examples, a small piece of the cured layer of the thermosetting resin composition was used as a sample, and a type DMS-6100 manufactured by Seiko Instruments Co., Ltd. was used as a thermomechanical analyzer (DMA). The measurement was carried out in "stretch mode". The measurement was carried out at a temperature of 2 ° C / min, and in the range of 25 ° C to 240 ° C. The value obtained by rounding off the first decimal point of the maximum value of the loss positive tangent (tan δ) obtained by the ratio of the measured elastic modulus (E') to the loss elastic modulus (E") is taken as the glass transition temperature. When it is not hardened, it cannot be measured.
使用(股)UBM製之型式Rheosol-G3000,將樹脂量作為1g。又,使用直徑18mm之平行板,以測定啟始溫度60℃,昇溫速度5℃/分鐘,振動數1HZ/deg下進行測定。將最低黏度值(η)作為最低熔融黏度。The type of Rheosol-G3000 manufactured by UBM was used, and the amount of the resin was taken as 1 g. Further, a parallel plate having a diameter of 18 mm was used to measure the starting temperature at 60 ° C, the temperature increase rate at 5 ° C / min, and the number of vibrations at 1 HZ / deg. The lowest viscosity value (η) was taken as the lowest melt viscosity.
實施例及比較例所使用的預浸體層之熱硬化性樹脂組成物的最低熔融黏度約1500poise。又,實施例的硬化物層之熔融黏度為500,000poise以上而無法測定。比較例2之熱硬化性樹脂組成物層的最低熔融黏度約1600poise。The thermosetting resin composition of the prepreg layer used in the examples and the comparative examples had a minimum melt viscosity of about 1500 poise. Further, the cured layer of the Example had a melt viscosity of 500,000 poise or more and could not be measured. The thermosetting resin composition layer of Comparative Example 2 had a minimum melt viscosity of about 1600 poise.
使用接觸式膜厚計((股)Mitutoyo製,M CD-25MJ)進行測定。The measurement was carried out using a contact type film thickness meter (manufactured by Mitutoyo, M CD-25MJ).
剝開內層電路基板之P試片(coupon)上的鍍敷皮膜,使用CCD型顯微鏡(Keyence公司製,VH6300),觀察玻璃布之露出有無。且,玻璃布露出的情況為,於銅鍍敷時於此潛入鍍敷銅,而於鍍敷皮膜剝離後亦殘留鍍敷銅。The plating film on the P coupon of the inner layer circuit board was peeled off, and the presence or absence of the glass cloth was observed using a CCD type microscope (VH6300, manufactured by Keyence Corporation). Further, in the case where the glass cloth is exposed, the copper plating is immersed in the copper plating, and the copper plating remains after the plating film is peeled off.
○:玻璃布於P試片的樹脂表面未露出,且無鍍敷銅殘留。○: The surface of the resin of the glass cloth on the P test piece was not exposed, and no plating copper remained.
×:玻璃布於P試片的樹脂表面露出、或此位置上殘留鍍敷銅。X: The glass cloth was exposed on the surface of the resin of the P test piece, or plating copper remained at this position.
將所削切出之電路基板中的P試片部分之段差部分的斷面之層合板,以掃描型電子顯微鏡(SEM)進行觀察,確認於電路間是否鑲入樹脂。The laminate of the cross section of the step portion of the P test piece in the cut circuit board was observed by a scanning electron microscope (SEM) to confirm whether or not resin was embedded between the circuits.
○:電路間有樹脂鑲入。○: There is resin in between the circuits.
×:電路間殘留空隙,不完全鑲入。×: There is a residual space between the circuits, which is not completely embedded.
本發明係關於於多層印刷電路板的絕緣層形成上有用之絕緣樹脂薄片的製造方法,使用藉由該製造方法所得之絕緣樹脂薄片,即使將絕緣層表面進行粗糙化後,預浸體的纖維基材不會露出,且可製造出信賴性高之多層印刷電路板。因此,所得之多層印刷電路板,例如可作為載持半導體晶片的高密度小型印刷電路板而使用,又亦可期待作為核心基板的薄型化或經省略化的小型、輕量新穎半導體組件之構成材料使用。The present invention relates to a method for producing an insulating resin sheet useful for forming an insulating layer of a multilayer printed circuit board, using the insulating resin sheet obtained by the manufacturing method, and the fiber of the prepreg even after roughening the surface of the insulating layer The substrate is not exposed, and a highly reliable multilayer printed circuit board can be manufactured. Therefore, the obtained multilayer printed wiring board can be used, for example, as a high-density small-sized printed circuit board carrying a semiconductor wafer, and can also be expected to be a thin or simplistic small-sized, lightweight novel semiconductor component as a core substrate. Material use.
本案係以日本所申請之特願2008-078624號作為基礎案者,其內容皆包含於本說明書中。This application is based on Japanese Patent Application No. 2008-078624, the entire contents of which are incorporated herein by reference.
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2009
- 2009-03-24 TW TW098109532A patent/TWI478810B/en active
- 2009-03-24 TW TW104101310A patent/TWI611922B/en active
- 2009-03-25 CN CN201310652193.4A patent/CN103625051B/en active Active
- 2009-03-25 KR KR1020107023321A patent/KR101590780B1/en active Active
- 2009-03-25 CN CN200980110353.4A patent/CN101977765B/en active Active
- 2009-03-25 WO PCT/JP2009/055876 patent/WO2009119621A1/en not_active Ceased
- 2009-03-25 JP JP2010505695A patent/JP5678657B2/en active Active
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2015
- 2015-01-07 JP JP2015001806A patent/JP6004017B2/en active Active
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW503171B (en) * | 2001-03-13 | 2002-09-21 | Sumitomo Bakelite Co | Prepreg and process for manufacturing same |
Also Published As
| Publication number | Publication date |
|---|---|
| KR101590780B1 (en) | 2016-02-02 |
| CN101977765A (en) | 2011-02-16 |
| CN103625051A (en) | 2014-03-12 |
| JP6004017B2 (en) | 2016-10-05 |
| JP5678657B2 (en) | 2015-03-04 |
| CN103625051B (en) | 2016-01-13 |
| WO2009119621A1 (en) | 2009-10-01 |
| TW201002519A (en) | 2010-01-16 |
| JP2015111579A (en) | 2015-06-18 |
| CN101977765B (en) | 2014-07-02 |
| JPWO2009119621A1 (en) | 2011-07-28 |
| TWI611922B (en) | 2018-01-21 |
| TW201515829A (en) | 2015-05-01 |
| KR20110008044A (en) | 2011-01-25 |
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