TWI472065B - Resin sealing device - Google Patents
Resin sealing device Download PDFInfo
- Publication number
- TWI472065B TWI472065B TW101128271A TW101128271A TWI472065B TW I472065 B TWI472065 B TW I472065B TW 101128271 A TW101128271 A TW 101128271A TW 101128271 A TW101128271 A TW 101128271A TW I472065 B TWI472065 B TW I472065B
- Authority
- TW
- Taiwan
- Prior art keywords
- mold
- film
- resin
- substrate
- sealing device
- Prior art date
Links
Classifications
-
- H10P72/0441—
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
-
- H10P72/78—
-
- H10W70/40—
Landscapes
- Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
- Injection Moulding Of Plastics Or The Like (AREA)
- Moulds For Moulding Plastics Or The Like (AREA)
- Led Device Packages (AREA)
Description
本發明係一種樹脂密封裝置,其係用樹脂材料將已安裝於基板之半導體元件等之電子零件加以密封,特別是具有薄膜供給單元者。The present invention relates to a resin sealing device which seals an electronic component such as a semiconductor element mounted on a substrate with a resin material, in particular, a film supply unit.
以往,樹脂密封裝置係例如對樹脂密封模具供給離型薄膜之離型薄膜供給機構,而該離型薄膜供給機構特徵在於:具有將捲繞成圓柱狀之前述離型薄膜切斷成預定長度之短條狀薄膜的切斷裝置,該切斷裝置具有將捲繞成圓柱狀之前述離型薄膜送出之送出部、引導該送出之離型薄膜之導板、及可將送出至該導板上之離型薄膜從前述捲繞成圓柱狀之前述離型薄膜切離的切斷器部,又,前述導板之表面具有可朝向前述送出之離型薄膜噴出空氣之空氣噴出機構者(參照專利文獻1)。Conventionally, the resin sealing device is, for example, a release film supply mechanism that supplies a release film to a resin sealing mold, and the release film supply mechanism is characterized in that the release film wound into a cylindrical shape is cut into a predetermined length. A cutting device for a short strip film having a delivery portion for feeding the release film wound in a cylindrical shape, a guide for guiding the delivered release film, and feeding to the guide plate The release film is cut from the cutter portion that is wound away from the cylindrical release film, and the surface of the guide plate has an air ejection mechanism that can discharge air toward the discharged release film (refer to the patent) Document 1).
[專利文獻1]特開2008-302550號公報[Patent Document 1] JP-A-2008-302550
然而,前述樹脂密封裝置成為使切成短條狀之 薄膜與薄膜搬運機構(基板用裝載器、卸載器)進入上下模具之間並將前述薄膜供給至下模具之機構。故,需要前述薄膜搬運機構,且控制裝置、控制系統複雜化,招致成本上升。However, the aforementioned resin sealing device is formed into a short strip shape. The film and film transport mechanism (substrate loader, unloader) enters between the upper and lower molds and supplies the film to the lower mold. Therefore, the above-described film transport mechanism is required, and the control device and the control system are complicated, resulting in an increase in cost.
又,由於為了使用薄膜搬運機構,下模具與上模具之間需要很大的作業空間,因此會有裝置整體之高度尺寸加大,無法小型化之問題點。Moreover, since a large working space is required between the lower mold and the upper mold in order to use the film transport mechanism, there is a problem that the overall height of the device is increased and the size cannot be reduced.
因此,本發明之目的在於提供一種樹脂密封裝置,其係具有薄膜供給單元,並為簡單構造且便宜小型者。Accordingly, an object of the present invention is to provide a resin sealing device which has a film supply unit and is simple in construction and inexpensive.
本發明之樹脂密封裝置係係至少具有上模具與下模具,在前述上模具與前述下模具之間將基板與薄膜包夾,並利用已充填於前述基板與薄膜之間的樹脂材料,將已安裝於基板的電子零件加以樹脂密封者,並構造成具有:移送機構,係將前述下模具移送至與前述上模具對向之成形位置、位於前述上模具之一側之側面且位於供給前述薄膜之薄膜供給單元之正下方的薄膜供給位置、及位於前述上模具之另一側之側面的基板供給位置者;及控制機構,係可將前述下模具移送至薄膜供給位置,並可移送至基板供給位置者。The resin sealing device of the present invention has at least an upper mold and a lower mold, and the substrate and the film are sandwiched between the upper mold and the lower mold, and the resin material which has been filled between the substrate and the film is used. The electronic component mounted on the substrate is sealed with a resin, and is configured to have a transfer mechanism for transferring the lower mold to a forming position opposed to the upper mold, a side surface on one side of the upper mold, and supplying the film. a film supply position directly below the film supply unit and a substrate supply position on a side of the other side of the upper mold; and a control mechanism for transferring the lower mold to the film supply position and transferring the substrate to the substrate Supply location.
根據本發明,將下模具移送至薄膜供給單元之正下方,並供給薄膜。故,不需要如習知例之薄膜搬運機 構,且可獲得構造、控制系統簡單且便宜之樹脂密封裝置。According to the invention, the lower mold is transferred directly below the film supply unit and supplied to the film. Therefore, there is no need for a film transporter as in the conventional example. A resin sealing device which is simple and inexpensive in construction and control system can be obtained.
又,可將下模具獨自地移送至位於上模具之一側之側面之薄膜供給位置的正下方並供給薄膜。故,在上模具與下模具之間不需要很大的作業空間,可獲得高度尺寸較小之小型樹脂密封裝置,並可縮小上模具與下模具之開模量。故,可獲得可將模具之驅動機構小型化,並可削減生產成本,且縮短上模具與下模具之開關所需時間,縮短樹脂密封裝置整體之循環時間,生產効率較高之樹脂密封裝置。Further, the lower mold can be separately transferred to the film supply position on the side of the one side of the upper mold and supplied to the film. Therefore, a large working space is not required between the upper mold and the lower mold, a small resin sealing device having a small height and a small size can be obtained, and the mold opening amount of the upper mold and the lower mold can be reduced. Therefore, it is possible to obtain a resin sealing device which can reduce the production cost of the mold, reduce the production cost, shorten the time required for the switching of the upper mold and the lower mold, shorten the cycle time of the entire resin sealing device, and achieve high production efficiency.
作為本發明之實施形態,可構造成具有上模具、具有貫通孔之中間模具、及與前述上模具將前述中間模具包夾之下模具,並利用前述上模具與前述中間模具來將安裝有電子零件之基板包夾,且利用前述中間模具與前述下模具將薄膜包夾,另一方面,利用充填於前述中間模具與前述薄膜之間的樹脂材料,將已配置於前述中間模具之貫通孔內之前述電子零件加以樹脂密封。According to an embodiment of the present invention, an upper mold, an intermediate mold having a through hole, and a mold in which the intermediate mold is sandwiched by the upper mold may be configured, and the upper mold and the intermediate mold may be used to mount the electronic mold. The substrate of the component is sandwiched, and the film is sandwiched by the intermediate mold and the lower mold, and the resin material filled between the intermediate mold and the film is disposed in the through hole of the intermediate mold. The aforementioned electronic components are sealed with a resin.
根據本實施形態,即使為具有上中下之3片模具之樹脂密封裝置,亦可獲得構造、控制系統簡單且便宜之小型樹脂密封裝置。According to the present embodiment, even in the case of a resin sealing device having three upper and lower molds, a small resin sealing device having a simple structure and a simple control system can be obtained.
作為本發明之其他實施形態,其中薄膜供給單元亦可將拉出之長形樹脂薄膜吸附、保持於吸附板的下面,且,將已切斷為預定長度而獲得之樹脂薄膜,供給至已移動到正下方之下模具的上面。According to another embodiment of the present invention, the film supply unit may adsorb and hold the drawn elongated resin film on the lower surface of the adsorption plate, and supply the resin film which has been cut to a predetermined length to the moved film. Go directly below the mold below.
根據本實施形態,由於可將從長形之樹脂薄膜切出之 預定長度的樹脂薄膜加以連續、自動地供給,因此可獲得生產性較高之樹脂密封裝置。According to this embodiment, since the elongated resin film can be cut out The resin film of a predetermined length is continuously and automatically supplied, so that a resin sealing device having high productivity can be obtained.
作為本發明之其他實施形態,亦可具有複數片吸附板。As another embodiment of the present invention, a plurality of adsorption plates may be provided.
根據本實施形態,下模具可分割成複數,且,即使各個下模具之高度位置不均,可藉由調整每個吸附板之位置來將該不均吸收,而可有良好之薄膜供給。According to the present embodiment, the lower mold can be divided into a plurality of pieces, and even if the height positions of the respective lower molds are not uniform, the unevenness can be absorbed by adjusting the position of each of the adsorption plates, and a good film supply can be obtained.
又,由於配合需要薄膜之區域來將薄膜切斷成最適合之大小,因此可供給所需最低限度之薄膜,藉此削減薄膜之浪費。Further, since the film is cut to an optimum size in accordance with the area where the film is required, the film having the minimum necessary amount can be supplied, thereby reducing the waste of the film.
作為本發明之不同實施形態,基板亦可為引線框,又,電子零件亦可為LED。As a different embodiment of the present invention, the substrate may be a lead frame, and the electronic component may also be an LED.
根據本實施形態,會有可獲得能將各式各樣之基板、電子零件加以樹脂密封之樹脂密封裝置的効果。According to this embodiment, there is an effect that a resin sealing device capable of resin-sealing various types of substrates and electronic components can be obtained.
圖1係顯示本申請發明中全自動樹脂密封裝置之第1實施形態的平面圖。Fig. 1 is a plan view showing a first embodiment of the fully automatic resin sealing device of the invention of the present application.
圖2係圖1所示之樹脂密封裝置的正面圖。Fig. 2 is a front elevational view showing the resin sealing device shown in Fig. 1.
圖3係圖2所示之模具組的擴大正面圖。Figure 3 is an enlarged front elevational view of the mold set shown in Figure 2.
圖4係圖3所示之模具組的平面圖。Figure 4 is a plan view of the mold set shown in Figure 3.
圖5係圖2所示之模具組的側面圖。Figure 5 is a side elevational view of the mold set shown in Figure 2.
圖6係圖3所示之模具組的VI-VI部分斷面圖。Figure 6 is a cross-sectional view of the VI-VI portion of the mold set shown in Figure 3.
圖7係顯示本申請發明中中間模具保持單元位於最下位並開啟上鉗構件之狀態之圖4的VII-VII線部分斷面圖。Fig. 7 is a partial cross-sectional view taken along line VII-VII of Fig. 4 showing a state in which the intermediate mold holding unit is at the lowermost position and the upper jaw member is opened in the present invention.
圖8係顯示本申請發明中中間模具保持單元從最下位上升至中間位置並關閉上鉗構件之途中的部分斷面圖。Fig. 8 is a partial cross-sectional view showing the intermediate mold holding unit of the present invention in the middle of raising from the lowermost position to the intermediate position and closing the upper jaw member.
圖9係顯示本申請發明中中間模具保持單元位於中間位置並已關閉上鉗構件之狀態的部分斷面圖。Fig. 9 is a partial cross-sectional view showing a state in which the intermediate mold holding unit is in the intermediate position and the upper jaw member is closed in the invention of the present application.
圖10係顯示本申請發明中中間模具保持單元位於最上位並已關閉上鉗構件之狀態的部分斷面圖。Fig. 10 is a partial cross-sectional view showing a state in which the intermediate mold holding unit is at the uppermost position and the upper jaw member is closed in the invention of the present application.
圖11係顯示本申請發明中中間模具保持單元、下模具位於最上位並已關閉上鉗構件之狀態的部分斷面圖。Fig. 11 is a partial cross-sectional view showing a state in which the intermediate mold holding unit and the lower mold are at the uppermost position and the upper jaw member is closed in the invention of the present application.
圖12係圖1所示之薄膜供給單元的平面圖。Figure 12 is a plan view of the film supply unit shown in Figure 1.
圖13係圖12所圖示之薄膜供給單元的正面圖。Figure 13 is a front elevational view of the film supply unit illustrated in Figure 12 .
圖14係圖13之XIV-XIV線斷面圖。Figure 14 is a sectional view taken along line XIV-XIV of Figure 13.
圖15係圖12所圖示之薄膜供給單元的右側面。Figure 15 is a right side view of the film supply unit illustrated in Figure 12 .
圖16係圖13之XVI-XVI線斷面圖。Figure 16 is a sectional view taken along line XVI-XVI of Figure 13.
圖17係用以說明圖1所示之薄膜供給單元之動作之圖13的XVII-XVII線斷面圖。Fig. 17 is a sectional view taken along line XVII-XVII of Fig. 13 for explaining the operation of the film supply unit shown in Fig. 1.
圖18係接續用以說明圖1所示之薄膜供給單元之動作之圖17的斷面圖。Fig. 18 is a cross-sectional view of Fig. 17 for explaining the operation of the film supply unit shown in Fig. 1.
圖19係接續用以說明圖1所示之薄膜供給單元之動作之圖18的斷面圖。Fig. 19 is a cross-sectional view of Fig. 18 for explaining the operation of the film supply unit shown in Fig. 1.
圖20係接續用以說明圖1所示之薄膜供給單元之動作之圖19的斷面圖。Figure 20 is a cross-sectional view of Figure 19 for explaining the operation of the film supply unit shown in Figure 1.
圖21係接續用以說明圖1所示之薄膜供給單元之動作之圖20的斷面圖。Fig. 21 is a cross-sectional view of Fig. 20 for explaining the operation of the film supply unit shown in Fig. 1.
圖22係接續用以說明圖1所示之薄膜供給單元之動作 之圖21的斷面圖。Figure 22 is a continuation of the action of the film supply unit shown in Figure 1 Figure 21 is a cross-sectional view.
圖23係係接續用以說明圖1所示之薄膜供給單元之動作之圖22的斷面圖。Figure 23 is a cross-sectional view of Figure 22 for explaining the operation of the film supply unit shown in Figure 1.
圖24係顯示本申請發明中半自動樹脂密封裝置之第2實施形態的平面圖。Fig. 24 is a plan view showing a second embodiment of the semi-automatic resin sealing device of the present invention.
圖25係顯示本申請發明中樹脂密封裝置之第3實施形態的部分斷面擴大圖。Fig. 25 is a partially enlarged sectional view showing a third embodiment of the resin sealing device of the present invention.
如圖1與圖2所示,第1實施形態中樹脂密封裝置大略具有供給單元1、成形單元2、及排出單元3。而,便於說明各圖式的情況下,概略地來圖示。As shown in FIG. 1 and FIG. 2, in the first embodiment, the resin sealing device roughly has a supply unit 1, a molding unit 2, and a discharge unit 3. In the case where each of the drawings is easily explained, it is schematically illustrated.
如圖1與圖2所示,供給單元1具有基板供給裝置10、配列裝置11、載入器12、及樹脂供給裝置13。As shown in FIGS. 1 and 2, the supply unit 1 includes a substrate supply device 10, an array device 11, a loader 12, and a resin supply device 13.
前述基板供給裝置10係將以堆疊之狀態來收納複數片基板4之匣14從位置A移送至位置B。且,用未圖示之拉出單元,從位置B之匣14將基板4每次1片地朝位置C之配列裝置11拉出。前述配列裝置11係用內藏之加熱器(未圖示)將基板4預熱,並從位置C沿著導軌15移動至位置D之後,在位置D將基板4遞給載入器12。前述載入器12具有可保持前述基板4之兩端的夾頭(未圖示),將在位置D收到之基板4於成形單元2之基板供給位置E朝待機之中間模具22搬運。The substrate supply device 10 transfers the crucible 14 that accommodates the plurality of substrates 4 in a stacked state from the position A to the position B. Then, the substrate 4 is pulled out one by one from the position B to the alignment device 11 at the position C by a pull-out unit (not shown). The arraying device 11 preheats the substrate 4 with a built-in heater (not shown), and moves the substrate 4 from the position C to the position D along the guide rail 15, and then transfers the substrate 4 to the loader 12 at the position D. The loader 12 has a chuck (not shown) that can hold both ends of the substrate 4, and transports the substrate 4 received at the position D to the intermediate mold 22 in standby at the substrate supply position E of the molding unit 2.
而,前述載入器12將樹脂供給裝置13合併設 置,並從設於前述樹脂供給裝置13內之2個供料槽(未圖示)於後述之下模具23之坩鍋23a(圖23)將不同之液狀樹脂材料混合並供給。Moreover, the aforementioned loader 12 combines the resin supply devices 13 The two liquid supply tanks (not shown) provided in the resin supply device 13 are mixed and supplied with different liquid resin materials in the crucible 23a (Fig. 23) of the mold 23, which will be described later.
成形單元2具有上模具21、由中間模具22與下模具23構成之模具組20、薄膜供給單元30、及清潔器31。The forming unit 2 has an upper mold 21, a mold set 20 composed of an intermediate mold 22 and a lower mold 23, a film supply unit 30, and a cleaner 31.
前述模具組20之上模具21係固定在橫跨架設於繫桿33上端部之上平台34的下面,而該繫桿33係直立設置於平面為方形之下平台32(圖6)角落。且,如圖3、4所圖示,透過安裝於前述上平台34之對向兩側面的導軌35、35,將中間模具保持單元40安裝成可上下活動。The mold 21 above the mold set 20 is fixed to the underside of the platform 34 spanning over the upper end of the tie bar 33, and the tie bar 33 is erected at the corner of the platform 32 (Fig. 6) below the square. Further, as shown in Figs. 3 and 4, the intermediate mold holding unit 40 is mounted to be movable up and down by the guide rails 35, 35 attached to the opposite sides of the upper stage 34.
前述中間模具保持單元40係由一對斷面大致為L字形狀之安裝板41、41構成,而前述安裝板41、41係安裝成沿著前述上平台34之導軌35可上下滑動。又,前述安裝板41、41之上端部係用連結桿42來連結,而前述連結桿42係利用配置於前述上平台34之上面中央的上下驅動用汽缸43來支持成可上下活動。The intermediate mold holding unit 40 is constituted by a pair of mounting plates 41 and 41 having a substantially L-shaped cross section, and the mounting plates 41 and 41 are attached so as to be vertically slidable along the guide rails 35 of the upper stage 34. Further, the upper end portions of the attachment plates 41 and 41 are coupled by a connecting rod 42, and the connecting rod 42 is supported by the vertical driving cylinder 43 disposed at the center of the upper surface of the upper deck 34 so as to be movable up and down.
另一方面,對前述安裝板41之外側面將鉗用汽缸44之一端部安裝成可轉動,並將組裝入前述鉗用汽缸44之活塞45之前端,對不同形狀之上鉗構件46之一端部安裝成可轉動。且,將前述上鉗構件46之另一端部於前述安裝板41加以鉸合支持。進而,前述安裝板41之下端部係突出設置有與前述上鉗構件46之卡合爪46a將中間模具22包夾的下鉗部47。前述下鉗部47係突出設置有用以定位中間模具22之定位銷47a。On the other hand, one end of the clamp cylinder 44 is rotatably mounted to the outer side of the aforementioned mounting plate 41, and is assembled into the front end of the piston 45 of the aforementioned clamp cylinder 44, and one end of the jaw member 46 of a different shape. The part is mounted to be rotatable. Further, the other end portion of the upper jaw member 46 is hingedly supported by the mounting plate 41. Further, a lower jaw portion 47 that sandwiches the intermediate die 22 with the engaging claw 46a of the upper jaw member 46 is protruded from the lower end portion of the attachment plate 41. The lower jaw portion 47 is provided with a positioning pin 47a for positioning the intermediate mold 22.
中間模具22係於其上面設置可定位基板、引線框等之定位銷(未圖示),並在與後述之下模具23之模穴對應之位置設置有可配置已安裝於前述基板、引線框之LED、電子零件等的貫通孔。The intermediate mold 22 is provided with a positioning pin (not shown) on which a substrate, a lead frame or the like can be positioned, and is provided at a position corresponding to a cavity of the mold 23 to be described later, and is detachably mounted on the substrate and the lead frame. Through holes for LEDs, electronic components, etc.
下模具23係於其上面配置複數模穴、澆道、澆口(未圖示),並於前述模穴透過澆道、澆口,形成有連通之坩鍋23a(圖23)。且,將前述下模具23透過導軌37配置成可往復移動於基板供給位置E與薄膜供給位置F之間。The lower mold 23 is provided with a plurality of cavities, runners, and gates (not shown) on the upper mold, and the crucibles 23a (Fig. 23) are formed by passing through the runners and gates in the cavities. Further, the lower mold 23 is disposed through the guide rail 37 so as to be reciprocally movable between the substrate supply position E and the film supply position F.
如圖12至圖14所示,薄膜供給單元30可防止成形品之離型性的提升、樹脂漏失、模具髒污,並具有支持成可於斷面H字形狀之基座60的一端側轉動之薄膜輥70、及安裝於前述基座60之外側面的薄膜拉出塊件80。As shown in FIGS. 12 to 14, the film supply unit 30 can prevent the lift-off property of the molded article from being lifted, the resin is lost, the mold is dirty, and has one end side supported to support the base 60 of the H-shaped cross section. The film roll 70 and the film attached to the outer side of the susceptor 60 pull out the block member 80.
前述薄膜供給單元30係在前述薄膜供給位置F對下模具23之上面供給後述之薄膜71(圖13),並具有對下模具23之坩鍋23a內押入前述薄膜而塑出押入模的押入用銷69(圖17)。而,前述薄膜供給單元30係可從圖1所示位置往左側往復移動。The film supply unit 30 supplies a film 71 (FIG. 13) to be described later to the upper surface of the lower mold 23 at the film supply position F, and has a film for inserting the film into the crucible 23a of the lower mold 23 to be molded into the mold. Pin 69 (Figure 17). Further, the film supply unit 30 can be reciprocated to the left side from the position shown in FIG.
如圖13所示,前述基座60係在其大致中央處安裝押壓汽缸61,從前述押壓汽缸61到伸縮之押壓活塞62之前端安裝押壓板63。前述押壓板63係利用插通於前述基座60之4根第1導軸64來支持。另一方面,前述押壓板63係於其下面透過第2導軸65,將一對框狀第1、第2吸附板66、67組裝成可於厚度方向出入。進而,前述押壓板63與框狀第1、第2吸附板66、67之間設置有用以將前述框狀第1、第2 吸附板66、67對下方側賦予動能的螺旋彈簧68。又,前述押壓板63之下面將押入銷69以預定節距來植入設置。且,如圖17所示,前述框狀第1、第2吸附板66、67係將沿著其下面並相互連通之吸附孔66a、67a以預定節距來設置,並沿著同一方向側之一邊的下面來設置凹溝66b、67b。As shown in Fig. 13, the base 60 is provided with a pressing cylinder 61 at a substantially central portion thereof, and a pressing plate 63 is attached from the pressing cylinder 61 to the front end of the telescopic pressing piston 62. The pressing plate 63 is supported by the four first guide shafts 64 that are inserted into the base 60. On the other hand, the pressing plate 63 is passed through the second guide shaft 65 on the lower surface thereof, and the pair of frame-shaped first and second suction plates 66 and 67 are assembled to be able to enter and exit in the thickness direction. Further, the pressing plate 63 and the frame-shaped first and second suction plates 66 and 67 are provided to be used to form the first and second frames. The suction plates 66 and 67 give a kinetic energy coil spring 68 to the lower side. Further, the lower side of the aforementioned pressing plate 63 is inserted into the pin 69 at a predetermined pitch. Further, as shown in Fig. 17, the frame-shaped first and second suction plates 66 and 67 are disposed at predetermined pitches along the suction holes 66a and 67a which communicate with each other along the lower surface thereof, and are along the same direction side. Grooves 66b and 67b are provided on the lower side of one side.
如圖13所示,前述薄膜輥70係將長形之樹脂薄膜71捲繞,透過薄膜輥用馬達72與正時皮帶73(圖17),可調整轉動量。且,從前述薄膜輥70拉出之樹脂薄膜71係透過張力輥74與導輥75,供給至後述之薄膜拉出塊件80。前述導輥75係透過圖15所圖示之導輥用汽缸76來上下活動。又,張力輥74藉由利用自身重量朝圖中下方將樹脂薄膜71押下,來防止樹脂薄膜71之鬆弛。As shown in Fig. 13, the film roll 70 winds the elongated resin film 71 and passes through the film roll motor 72 and the timing belt 73 (Fig. 17) to adjust the amount of rotation. Further, the resin film 71 pulled out from the film roll 70 is transmitted through the tension roller 74 and the guide roller 75, and is supplied to a film drawing block member 80 which will be described later. The guide roller 75 is moved up and down through the guide roller cylinder 76 illustrated in Fig. 15 . Further, the tension roller 74 prevents the resin film 71 from being slack by lowering the resin film 71 toward the lower side in the drawing by its own weight.
薄膜拉出塊件80係組裝於設於前述基座60之外側面之導軌81,且透過拉出塊件用馬達82、滑輪83a、83b、及正時皮帶84,可使其沿著前述導軌81往復移動。The film pull-out block member 80 is assembled on the guide rail 81 provided on the outer surface of the base 60, and is passed through the pull-out block motor 82, the pulleys 83a and 83b, and the timing belt 84 so as to be along the guide rail. 81 reciprocating movement.
且,如圖14所示,沿著設於前述薄膜拉出塊件80之滑輪83b側之側面的導軌80a,將拉出臂部85支持成可上下活動,拉出臂部85係透過拉出臂用汽缸80b來上下活動。且,前述拉出臂部85係將用以將樹脂薄膜71吸附之吸附孔85a以預定節距來設置。又,前述拉出臂部85係將用以將樹脂薄膜71切斷之切斷器86,透過切斷器用汽缸87,安裝成可往復移動。Further, as shown in Fig. 14, the pull-out arm portion 85 is supported to be movable up and down along the guide rail 80a provided on the side of the pulley 83b side of the film drawing block member 80, and the pull-out arm portion 85 is pulled out and pulled out. The arm is moved up and down by the cylinder 80b. Further, the drawing arm portion 85 is provided with a suction hole 85a for adsorbing the resin film 71 at a predetermined pitch. Further, the pull-out arm portion 85 is configured to be reciprocally movable by passing the cutter 86 for cutting the resin film 71 through the cutter cylinder 87.
而,前述薄膜供給單元30係合併設置有清潔器31(圖1)。前述清潔器31係用以將旋轉動作之掃除用刷押壓 到中間模具22之下面,並將殘留於模具表面之樹脂渣除去、吸引者。且,可與前述薄膜供給單元30一同地從圖1所示位置往左側移動並在導軌37上方停止之後,可沿著前述導軌37到上平台34之正下方往復移動。Further, the film supply unit 30 is provided with a cleaner 31 (FIG. 1). The cleaner 31 is used for sweeping the rotating motion The resin mold residue remaining on the surface of the mold is removed and attracted to the lower surface of the intermediate mold 22. Further, after moving from the position shown in FIG. 1 to the left side and stopping above the guide rail 37 together with the film supply unit 30, it is possible to reciprocate directly along the guide rail 37 to the upper stage 34.
如圖1與圖2所示,排出單元3係具有卸載器50、接收裝置51、及將匣52收納之基板排出裝置53,並配置有控制裝置54。As shown in FIGS. 1 and 2, the discharge unit 3 includes an unloader 50, a receiving device 51, and a substrate discharge device 53 that houses the crucible 52, and a control device 54 is disposed.
卸載器50係與前述載入器12相同地具有保持基板4之夾頭,並具有用以將使用完畢之薄膜吸引、除去之吸引保持裝置。又,前述卸載器50係可在成形單元2之基板供給位置E與排出單元3之位置G之間往復移動,並在成形單元2之基板供給位置E將成形品之基板4從中間模具22接收,朝排出單元3之位置G移動。且,前述卸載器50係將成形品載置於透過導軌55移動來到位置G之接收裝置51。前述接收裝置51係透過導軌55移動至位置H之後,利用未圖示之推動器,將成形完畢之成形品之前述基板4收納於基板排出裝置53的匣52。接著,當前述匣52裝滿時,前述匣52就移動至位置J。The unloader 50 has a chuck for holding the substrate 4 in the same manner as the loader 12 described above, and has a suction holding device for sucking and removing the used film. Further, the unloader 50 is reciprocally movable between the substrate supply position E of the forming unit 2 and the position G of the discharge unit 3, and the substrate 4 of the molded article is received from the intermediate mold 22 at the substrate supply position E of the forming unit 2. Move toward the position G of the discharge unit 3. Further, the unloader 50 mounts the molded article on the receiving device 51 that has moved to the position G through the guide rail 55. After the receiving device 51 is moved to the position H via the guide rail 55, the substrate 4 of the molded article that has been molded is stored in the crucible 52 of the substrate discharge device 53 by a pusher (not shown). Then, when the aforementioned cymbal 52 is full, the aforementioned cymbal 52 is moved to the position J.
前述構成之樹脂密封裝置係利用控制裝置54來控制供給單元1、成型單元2、排出單元3。The resin sealing device having the above configuration controls the supply unit 1, the molding unit 2, and the discharge unit 3 by the control device 54.
接著,針對由前述構成而成之樹脂密封裝置之動作來說明。Next, the operation of the resin sealing device having the above configuration will be described.
將配列裝置11在位置C先加熱到所預定之温度。The dispensing device 11 is first heated at position C to a predetermined temperature.
又,在成形單元2,將中間模具22之兩側緣部以上鉗構件46與下鉗部47包夾,並將上下驅動用汽缸43驅動,藉此預先於上模具21之下面使前述中間模具22接觸並保持。另一方面,預先將下模具23移送至位於薄膜供給單元30之正下方的薄膜供給位置F。Further, in the molding unit 2, the jaw members 46 and the lower jaw portion 47 are sandwiched between the both side edges of the intermediate mold 22, and the upper and lower driving cylinders 43 are driven, whereby the intermediate mold is previously formed on the lower surface of the upper mold 21. 22 contact and keep. On the other hand, the lower mold 23 is previously transferred to the film supply position F located directly below the film supply unit 30.
進而,在排出單元3預先將接收裝置51移送至位置G。Further, the discharge unit 3 transfers the receiving device 51 to the position G in advance.
如圖17至圖23所示,薄膜供給單元30係對第1、第2吸附板66、67分別供給樹脂薄膜71。As shown in FIGS. 17 to 23, the film supply unit 30 supplies the resin film 71 to each of the first and second adsorption plates 66 and 67.
即,從薄膜輥70透過張力輥74與導輥75,將已拉出之樹脂薄膜71之前端緣部於薄膜拉出塊件80之拉出臂部85之吸附孔85a吸附、保持(圖17)。此時,藉由控制輥用馬達72,又,利用張力輥74,樹脂薄膜71就不會鬆弛。In other words, the film roll 70 is transmitted through the tension roller 74 and the guide roller 75, and the leading edge portion of the resin film 71 that has been pulled out is sucked and held by the suction hole 85a of the drawing arm portion 85 of the film drawing block member 80 (Fig. 17). ). At this time, by controlling the roller motor 72, the resin film 71 is not slack by the tension roller 74.
且,如圖12所示,透過拉出塊件用馬達82、滑輪83a、83b與正時皮帶84使拉出塊件80沿著導軌81滑動。藉此,如圖18所示,將吸附、保持於拉出臂部85之樹脂薄膜71拉出直到圖中左側裝滿。進而,將導輥用汽缸76與拉出臂用汽缸80b驅動,使導輥75與拉出臂部85上昇。接著,透過第1、第2吸附板66、67之吸附孔66a、67a將樹脂薄膜71吸附、保持之後,將拉出臂部85之吸附、保持解除。進而,將拉出臂用汽缸80b驅動,使前述拉出臂部85沿著導軌80a下降,並將導輥用汽缸76驅動使導輥75下降。之後,將拉出塊件用馬達82驅動,切斷器86就可沿著導軌81滑動至與第1吸附板66之凹溝66b對應之位置。且,使拉出臂部85上昇(圖19),用該吸附孔85a將前述樹脂薄膜71之中間部吸 附、保持。接著,將切斷器用汽缸87驅動,使切斷器86沿著凹溝66b移動,藉此將樹脂薄膜71切斷。Further, as shown in FIG. 12, the pull-out block member 80 is slid along the guide rail 81 by the pull-out block motor 82, the pulleys 83a and 83b, and the timing belt 84. Thereby, as shown in Fig. 18, the resin film 71 adsorbed and held by the drawing arm portion 85 is pulled out until the left side of the drawing is full. Further, the guide roller cylinder 76 and the pull-out arm cylinder 80b are driven to raise the guide roller 75 and the pull-out arm portion 85. Then, after the resin film 71 is sucked and held by the adsorption holes 66a and 67a of the first and second adsorption plates 66 and 67, the suction and holding of the pull-out arm portion 85 are released. Further, the pull-out arm cylinder 80b is driven to lower the pull-out arm portion 85 along the guide rail 80a, and the guide roller cylinder 76 is driven to lower the guide roller 75. Thereafter, the pull-out piece is driven by the motor 82, and the cutter 86 is slid along the guide rail 81 to a position corresponding to the groove 66b of the first suction plate 66. Further, the pull-out arm portion 85 is raised (FIG. 19), and the intermediate portion of the resin film 71 is sucked by the suction hole 85a. Attached, kept. Next, the cutter is driven by the cylinder 87, and the cutter 86 is moved along the groove 66b, whereby the resin film 71 is cut.
接著,將第2吸附板67之吸附解除之後,使拉出臂部85與導輥75下降,使拉出臂部85移動至與第2吸附板67之一邊之下面正下方對應的位置之後,使其上昇(圖20),藉此使樹脂薄膜71之前端緣部吸附、保持於第2吸附板67之吸附孔67a。藉此,可不浪費地使用樹脂薄膜71。而,此時利用張力輥74,樹脂薄膜71就不會鬆弛。After the adsorption of the second adsorption plate 67 is released, the pull-out arm portion 85 and the guide roller 75 are lowered, and the pull-out arm portion 85 is moved to a position corresponding to the lower side of the lower side of one of the second suction plates 67. By raising this (FIG. 20), the front edge part of the resin film 71 is adsorb|sucked and hold|maintained in the adsorption hole 67a of the 2nd adsorption-plate 67. Thereby, the resin film 71 can be used without waste. On the other hand, at this time, the resin film 71 is not slack by the tension roller 74.
且,如圖21所圖示,將前述拉出臂部85之吸附解除之後,使拉出塊件80下降,並於第2吸附板67之凹溝67b使前述拉出塊件80沿著導軌81移動至切斷器86所對應之位置。接著,使前述拉出臂部85上昇,將切斷器86沿著凹溝67b滑行,藉此將樹脂薄膜71切斷。此時,拉出臂部85將樹脂薄膜71維持吸附、保持之狀態,利用張力輥74,樹脂薄膜71就不會鬆弛。進而,如圖22所圖示,將拉出臂部85移動到導輥75附近,將導輥用汽缸76與拉出臂用汽缸80b驅動,使導輥75與拉出臂部85下降。As shown in Fig. 21, after the suction of the pull-out arm portion 85 is released, the pull-out block member 80 is lowered, and the pull-out block member 80 is placed along the guide rail in the groove 67b of the second suction plate 67. 81 moves to the position corresponding to the cutter 86. Next, the drawing arm portion 85 is raised, and the cutter 86 is slid along the groove 67b, whereby the resin film 71 is cut. At this time, the drawing arm portion 85 maintains the state in which the resin film 71 is adsorbed and held, and the resin film 71 is not slack by the tension roller 74. Further, as shown in FIG. 22, the pull-out arm portion 85 is moved to the vicinity of the guide roller 75, and the guide roller cylinder 76 and the pull-out arm cylinder 80b are driven to lower the guide roller 75 and the pull-out arm portion 85.
且,如圖23所示,下模具23移動至成形單元2之薄膜供給位置F。之後,將押壓用汽缸61驅動,透過押壓活塞62,押壓板63與第1、第2吸附板66、67下降,於前述下模具23之上面接觸樹脂薄膜71。故,將樹脂薄膜71係利用下模具23與第1、第2吸附板66、67來包夾。進而,當押壓活塞62伸張,押壓板63被押壓時,螺旋彈簧68就被壓縮,並將押 入銷69押入下模具23之坩鍋23a內,形成將樹脂薄膜71押入且樹脂囤積之凹處。接著,將對第1、第2吸附板66、67之樹脂薄膜71吸附、保持加以解除,另一方面,下模具23之吸附孔(未圖示)將樹脂薄膜71吸附、保持。之後,將押壓活塞62拉升,第1、第2吸附板66、67從樹脂薄膜71分離,藉此樹脂薄膜71之供給作業完成。之後,藉由重複相同之作業,可連續地供給樹脂薄膜71。Further, as shown in FIG. 23, the lower mold 23 is moved to the film supply position F of the forming unit 2. Thereafter, the pressing cylinder 61 is driven, the pressing piston 62 is passed, the pressing plate 63 is lowered by the first and second adsorption plates 66 and 67, and the resin film 71 is contacted on the upper surface of the lower mold 23. Therefore, the resin film 71 is sandwiched by the lower mold 23 and the first and second adsorption plates 66 and 67. Further, when the pressing piston 62 is extended and the pressing plate 63 is pressed, the coil spring 68 is compressed and will be pressed. The insertion pin 69 is pushed into the crucible 23a of the lower mold 23 to form a recess in which the resin film 71 is pushed in and the resin is accumulated. Then, the resin film 71 of the first and second adsorption plates 66 and 67 is adsorbed and held, and the resin film 71 is adsorbed and held by the adsorption holes (not shown) of the lower mold 23. Thereafter, the pressing piston 62 is pulled up, and the first and second suction plates 66 and 67 are separated from the resin film 71, whereby the supply operation of the resin film 71 is completed. Thereafter, the resin film 71 can be continuously supplied by repeating the same operation.
進而,使前述下模具23沿著導軌37移動至上平台34之正下方。接著,將上下驅動用汽缸43驅動,使連結桿42下降,並將中間模具22載置於下模具23之後,將鉗用汽缸44驅動,將前述上鉗構件46開啟,將中間模具22之保持狀態加以解除。此時,中間模具22之貫通孔與下模具23之模穴透過薄膜71而分別對向。進而,將前述上下驅動用汽缸43驅動,使中間模具保持單元40下降至最下位(圖7)。Further, the lower mold 23 is moved along the guide rail 37 directly below the upper stage 34. Next, the upper and lower driving cylinders 43 are driven to lower the connecting rod 42 and the intermediate mold 22 is placed on the lower mold 23, and the clamp cylinder 44 is driven to open the upper jaw member 46 to hold the intermediate mold 22 The status is released. At this time, the through holes of the intermediate mold 22 and the cavity of the lower mold 23 pass through the film 71 to face each other. Further, the upper and lower driving cylinders 43 are driven to lower the intermediate mold holding unit 40 to the lowest position (FIG. 7).
進而,將載置前述中間模具22之前述下模具23沿著導軌37移送至基板供給位置E。Further, the lower mold 23 on which the intermediate mold 22 is placed is transferred to the substrate supply position E along the guide rail 37.
另一方面,如圖1所示,在供給單元1將位置A之匣14移送至位置B,用未圖示之拉出單元將收納於位置B之匣14的基板4每次1片地拉出,並載置於位於位置C之配列裝置11。且,利用前述配列裝置11將基板4加熱,將前述配列裝置11透過導軌15移送至位置D。On the other hand, as shown in FIG. 1, the supply unit 1 transfers the crucible 14 of the position A to the position B, and pulls the substrate 4 accommodated in the crucible 14 of the position B one by one by a drawing unit (not shown). It is placed and placed in the arrangement device 11 at position C. Then, the substrate 4 is heated by the arrangement device 11, and the arrangement device 11 is transferred to the position D through the guide rail 15.
從到達位置D之前述配列裝置11將基板4利用載入器12之夾頭來保持,與樹脂供給裝置13一同地將載入器12移送至成形單元2之基板供給位置E,定位於前述中間模 具22之上方。The substrate 4 is held by the chuck of the loader 12 from the sorting device 11 at the position D, and the loader 12 is transferred to the substrate supply position E of the forming unit 2 together with the resin supply device 13, and positioned in the middle mold With 22 above.
且,藉由控制載入器12,將該夾頭開啟,並將基板4載置、定位於中間模具22之上面的凹處,藉此將已安裝於前述基板4之LED等電子零件(未圖示)定位於貫通孔內。因此,前述電子零件位於中間模具22之貫通孔內,並透過薄膜71與下模具23之模穴對向。And, by controlling the loader 12, the chuck is opened, and the substrate 4 is placed and positioned in a recess above the intermediate mold 22, thereby electronic components such as LEDs mounted on the substrate 4 (not The figure is positioned in the through hole. Therefore, the electronic component is located in the through hole of the intermediate mold 22 and is opposed to the cavity of the lower mold 23 through the film 71.
接著,將前述下模具23沿著導軌37搬運至上平台34之正下方。且,將上下驅動用汽缸43驅動,並將連結桿42拉升,用下鉗部47將中間模具21之緣部卡止(圖8),並將鉗用汽缸44驅動,將中間模具22之兩側緣部,利用上鉗構件46與下鉗部47來包夾(圖9)。進而,將前述上下驅動用汽缸43驅動,使中間模具保持單元40上昇,藉此利用上模具21之下面與中間模具22之上面來將基板4包夾(圖10)。Next, the lower mold 23 is conveyed along the guide rail 37 directly below the upper stage 34. Further, the upper and lower drive cylinders 43 are driven, the connecting rod 42 is pulled up, the edge portion of the intermediate mold 21 is locked by the lower jaw portion 47 (FIG. 8), and the clamp cylinder 44 is driven to move the intermediate mold 22 Both side edges are sandwiched by the upper jaw member 46 and the lower jaw portion 47 (Fig. 9). Further, the upper and lower driving cylinders 43 are driven to raise the intermediate mold holding unit 40, whereby the substrate 4 is sandwiched by the lower surface of the upper mold 21 and the upper surface of the intermediate mold 22 (FIG. 10).
而,由於不單可將中間模具22以載置於下模具23之狀態來移動至側邊,更可將基板4載置於前述中間模具22,因此在上模具21與中間模具22之間不需要很大的作業空間。故,由於上下驅動用汽缸43衝程較短,即,可採用小型者,因此有可削減成本之優點。Further, since the intermediate mold 22 can be moved to the side without being placed in the lower mold 23, the substrate 4 can be placed on the intermediate mold 22, so that it is not required between the upper mold 21 and the intermediate mold 22. Great working space. Therefore, since the upper and lower driving cylinders 43 have a short stroke, that is, a small size can be employed, there is an advantage that cost can be reduced.
另一方面,只將下模具23沿著導軌37移送至基板供給位置E,定位於事前移送且待機之樹脂供給單元13之正下方之後,將液狀樹脂注入前述下模具23之坩鍋23a。且,將前述下模具23透過導軌37移送至上平台34之正下方,將前述下模具23推升,並與上模具21一起將中間模具22合模(圖11)。此時,安裝於基板4之電子零件係透過薄膜 71與下模具23之模穴對向。On the other hand, only the lower mold 23 is transferred to the substrate supply position E along the guide rail 37, and positioned immediately below the resin supply unit 13 that has been transferred beforehand, and the liquid resin is injected into the crucible 23a of the lower mold 23. Then, the lower mold 23 is transferred to the directly below the upper stage 34 through the guide rails 37, the lower mold 23 is pushed up, and the intermediate mold 22 is clamped together with the upper mold 21 (FIG. 11). At this time, the electronic component mounted on the substrate 4 is transmitted through the film. 71 is opposite to the cavity of the lower mold 23.
且,將模具組20內之空氣吸引,成為真空狀態,並藉由將下模具23之坩鍋23a內的柱塞推升,將前述坩鍋23a內之液狀樹脂透過薄膜71推升。藉此,液狀樹脂沿著薄膜71之上面推出,通過澆道、澆口,流入並充填至下模具23之模穴。故,液狀樹脂使被覆各模穴之薄膜71的一部分於下模具23之模穴側膨脹,並將前述電子零件加以樹脂密封。Then, the air in the mold set 20 is sucked to a vacuum state, and the liquid resin in the crucible 23a is pushed up by the push-up of the plunger in the crucible 23a of the lower mold 23. Thereby, the liquid resin is pushed out along the upper surface of the film 71, and flows into and fills the cavity of the lower mold 23 through the runner and the gate. Therefore, the liquid resin expands a part of the film 71 covering the respective cavity portions on the cavity side of the lower mold 23, and the electronic component is resin-sealed.
且,前述液狀樹脂硬化之後,使下模具23下降進行澆口制動,再次,使下模具23上昇並接觸中間模具22。且,將上鉗構件46開啟之後,使中間模具保持單元40下降至最下位,另一方面,使中間模具22與下模具23同時下降。且,將前述下模具23與中間模具22一起沿著導軌37移送至基板供給位置E。After the liquid resin is cured, the lower mold 23 is lowered to perform gate braking, and the lower mold 23 is again raised to contact the intermediate mold 22. Further, after the upper jaw member 46 is opened, the intermediate mold holding unit 40 is lowered to the lowest position, and on the other hand, the intermediate mold 22 and the lower mold 23 are simultaneously lowered. Further, the lower mold 23 is transferred together with the intermediate mold 22 along the guide rail 37 to the substrate supply position E.
而,斷開澆口的情況下,以將中間模具22保持於上模具21之狀態使下模具23下降時,中間模具22會被下模具23以大力拉扯。但,中間模具22因下鉗部47而保持於上模具21。故,由於強大的拉張力並無直接作用於鉗用汽缸44,因此可將鉗用汽缸44作成小型者,並有可單元之小型化、成本之削減的優點。On the other hand, in the case where the gate is broken, when the lower mold 23 is lowered in a state where the intermediate mold 22 is held by the upper mold 21, the intermediate mold 22 is strongly pulled by the lower mold 23. However, the intermediate mold 22 is held by the upper mold 21 by the lower jaw portion 47. Therefore, since the strong tension is not directly applied to the clamp cylinder 44, the clamp cylinder 44 can be made small, and the unit can be miniaturized and the cost can be reduced.
接著,將排出單元3之卸載器50移送至成形單元2之基板供給位置E,並定位於前述中間模具22之上方。且,利用前述卸載器50之夾頭將成形品之基板4的兩側緣部卡合並上提,從中間模具22將成形品分離之後,將前述卸載器50搬運至排出單元3之位置G。進而,開啟卸載器50之夾 頭並將移送至位置G之成形品載置於接收裝置51。Next, the unloader 50 of the discharge unit 3 is transferred to the substrate supply position E of the forming unit 2, and positioned above the intermediate mold 22. Then, the both side edges of the substrate 4 of the molded article are jammed by the chuck of the unloader 50, and after the molded article is separated from the intermediate mold 22, the unloader 50 is transported to the position G of the discharge unit 3. Further, opening the folder of the unloader 50 The head and the molded article transferred to the position G are placed on the receiving device 51.
載置於前述接收裝置51之基板4的成形品透過導軌55移動至位置H之後,每次1片地收納於基板排出裝置53內之匣52。且,前述匣52裝滿之後將前述匣52移送至位置J,並與空匣(未圖示)交換。The molded article placed on the substrate 4 of the receiving device 51 is moved to the position H through the guide rail 55, and then stored in the crucible 52 in the substrate discharge device 53 one at a time. Further, after the cassette 52 is full, the cassette 52 is transferred to the position J and exchanged with the space (not shown).
另一方面,將前述下模具23與中間模具22同時移送至上平台34之正下方之後,將上下驅動用汽缸43驅動,將下鉗部47卡止於中間模具22之兩側緣部,利用上鉗構件46與下鉗部47將中間模具22包夾並上提。之後,將下模具23沿著導軌37移動至基板供給位置E,並解除朝殘存於下模具22上面之使用完畢的薄膜71之吸附,並利用卸載器50吸引、保持。接著,將前述卸載器50移動至排出單元3側,從設於成形單元2與排出單元3之邊界附近之廢棄孔36,將使用完畢之薄膜71廢棄。On the other hand, after the lower mold 23 and the intermediate mold 22 are simultaneously transferred to the immediately below the upper stage 34, the upper and lower driving cylinders 43 are driven, and the lower jaw portion 47 is locked to both side edges of the intermediate mold 22, and the upper mold portion 47 is used. The jaw member 46 and the lower jaw portion 47 sandwich the intermediate mold 22 and lift it up. Thereafter, the lower mold 23 is moved along the guide rail 37 to the substrate supply position E, and the adsorption to the used film 71 remaining on the upper surface of the lower mold 22 is released, and is sucked and held by the unloader 50. Next, the unloader 50 is moved to the discharge unit 3 side, and the used film 71 is discarded from the disposal hole 36 provided near the boundary between the molding unit 2 and the discharge unit 3.
又,將使用完畢之薄膜71廢棄時,與前述薄膜供給單元30一起將前述清潔器31往左側移動並在導軌37之上部停止之後,將前述清潔器31沿著導軌37移動至上平台34之正下方,用前述清潔器31之旋轉的刷子摩擦中間模具22的下面,將殘留之樹脂渣吸引、除去。且,使薄膜供給單元30、清潔器31歸位至預定位置之後,將前述下模具23透過導軌37移動至薄膜供給位置F,從薄膜供給單元30與前述相同地對下模具23供給薄膜71。之後,將前述下模具23移送至上平台34之正下方,將上下驅動用汽缸43驅動,使中間模具22下降並載置於前述下模具23,並開啟上鉗構件 46,且使中間模具保持單元40下降至最下位。Further, when the used film 71 is discarded, the cleaner 31 is moved to the left side together with the film supply unit 30, and after the upper portion of the guide rail 37 is stopped, the cleaner 31 is moved along the guide rail 37 to the upper stage 34. Next, the lower surface of the intermediate mold 22 is rubbed by the brush rotating by the cleaner 31, and the remaining resin slag is sucked and removed. After the film supply unit 30 and the cleaner 31 are returned to the predetermined position, the lower mold 23 is moved to the film supply position F through the guide rail 37, and the film 71 is supplied from the film supply unit 30 to the lower mold 23 in the same manner as described above. Thereafter, the lower mold 23 is transferred to directly below the upper stage 34, the upper and lower driving cylinders 43 are driven, the intermediate mold 22 is lowered and placed on the lower mold 23, and the upper jaw member is opened. 46, and the intermediate mold holding unit 40 is lowered to the lowest position.
之後,藉由重覆與前述相同之動作,可將已安裝於基板4之電子零件連續地樹脂密封。Thereafter, the electronic component mounted on the substrate 4 can be continuously resin-sealed by repeating the same operation as described above.
根據本實施形態,可利用沿著下模具23之導軌37進行之往復移動、與利用中間模具保持單元40之上下驅動用汽缸43之上下移動、及利用鉗用汽缸44之開關動作,來進行成形作業。故,由於構造簡單且不需要複雜之控制,因此可減低成本。According to the present embodiment, the reciprocating movement along the guide rail 37 of the lower mold 23, the up-and-down movement of the upper and lower driving cylinders 43 by the intermediate mold holding unit 40, and the switching operation by the clamp cylinder 44 can be performed. operation. Therefore, since the structure is simple and complicated control is not required, the cost can be reduced.
又,由於在上模具21與下模具23之間不需要很大的作業空間,因此可獲得高度低之小型的樹脂密封裝置,可縮小上模具與下模具之開模量。故,可將模具之驅動機構小型化,並可削減生產成本,且由於可縮短上模具與下模具之開關所需之時間,縮短樹脂密封裝置整體之循環時間,因此會有生產効率較高之優點。Further, since a large working space is not required between the upper mold 21 and the lower mold 23, a small resin sealing device having a low height can be obtained, and the mold opening amount of the upper mold and the lower mold can be reduced. Therefore, the driving mechanism of the mold can be miniaturized, the production cost can be reduced, and the time required for switching the upper mold and the lower mold can be shortened, and the cycle time of the entire resin sealing device can be shortened, so that the production efficiency is high. advantage.
如圖24所圖示,第2實施形態係相對於前述之實施形態適用於全自動樹脂密封裝置之情況,適用於半自動樹脂密封裝置之情況。As shown in Fig. 24, the second embodiment is applied to a fully automatic resin sealing device as compared with the above-described embodiment, and is applied to a semi-automatic resin sealing device.
即,利用薄膜供給裝置30對下模具23自動供給薄膜,並利用樹脂供給裝置13自動供給液狀樹脂。另一方面,朝中間模具之基板4之供給、成形品之取出、使用完畢之薄膜之廢棄與模具之清掃係由作業員來進行。而,供給單元1之樹脂供給裝置13可往復移動至成形單元2之基板供給位置E。That is, the film is automatically supplied to the lower mold 23 by the film supply device 30, and the liquid resin is automatically supplied by the resin supply device 13. On the other hand, the supply of the substrate 4 to the intermediate mold, the take-out of the molded article, the disposal of the used film, and the cleaning of the mold are performed by the operator. Further, the resin supply device 13 of the supply unit 1 can be reciprocated to the substrate supply position E of the forming unit 2.
由於其他與前述第1實施形態相同,因此對相同部分賦 予相同編號且省略說明。Since the other is the same as the first embodiment described above, the same portion is assigned The same reference numerals are given and the description is omitted.
根據本實施形態,有可獲得設置面積很小且適合多品種少量生產之樹脂密封裝置之優點。According to the present embodiment, there is an advantage that a resin sealing device having a small installation area and suitable for a small number of types of production can be obtained.
如圖25所圖示,第3實施形態係適用於2片模具之樹脂密封裝置之情況。As shown in Fig. 25, the third embodiment is applied to a resin sealing device of two molds.
即,將上模具21固定於4根繫桿33所支持之上平台34的下面,另一方面,將下模具23配置成可於水平方向滑動。That is, the upper mold 21 is fixed to the lower surface of the upper platform 34 supported by the four tie bars 33, and the lower mold 23 is disposed to be slidable in the horizontal direction.
前述上模具21係構造成可將已安裝電子零件5之基板4吸附保持於其下面。另一方面,前述下模具23在設於其上面之模穴23b角落設置吸附孔23c,並在前述模穴23b之開口緣部設置用以吸附保持薄膜71之緣部的吸附孔23d。The upper mold 21 is configured to adsorb and hold the substrate 4 on which the electronic component 5 is mounted. On the other hand, the lower mold 23 is provided with an adsorption hole 23c at a corner of the cavity 23b provided on the upper mold 23, and an adsorption hole 23d for sucking and holding the edge of the film 71 is provided at the opening edge of the cavity 23b.
由於切斷成預定長度之薄膜71與前述第1實施形態相同地用薄膜供給單元30來供給,因此省略詳細之說明。Since the film 71 cut into a predetermined length is supplied by the film supply unit 30 as in the first embodiment, detailed description thereof will be omitted.
在本實施形態,藉由用下模具23之吸附孔23c、23d來吸引薄膜71,來將薄膜71密接於模穴23b之內周面之後,對坩鍋23a(圖23参照)供給液狀樹脂。接著,藉由使下模具23上昇,利用前述下模具23與前述上模具21將基板4與薄膜71包夾之後,將前述坩鍋23a內之未圖示的柱塞突出,且將坩鍋23a內之液狀樹脂透過薄膜71推升。藉此,將前述液狀樹脂沿著薄膜71之上面推出,通過未圖示之澆道、澆口,朝前述模穴23b內流入並充填、加壓,將前述電子零件5加以樹脂密封。且,將下模具23下降,並將樹脂密封之基板4從模穴23h取出,切斷成一個個,藉此可使用晶片化之電子零件5。In the present embodiment, the film 71 is sucked by the adsorption holes 23c and 23d of the lower mold 23, and the film 71 is adhered to the inner peripheral surface of the cavity 23b, and then the liquid resin is supplied to the crucible 23a (see FIG. 23). . Then, the lower mold 23 is raised, and the lower mold 23 and the upper mold 21 are used to sandwich the substrate 4 and the film 71, and then the plunger (not shown) in the crucible 23a is protruded, and the crucible 23a is placed. The liquid resin inside is pushed up through the film 71. Thereby, the liquid resin is pushed out along the upper surface of the film 71, and flows into the cavity 23b by a runner or a gate (not shown), and is filled and pressurized, and the electronic component 5 is resin-sealed. Further, the lower mold 23 is lowered, and the resin-sealed substrate 4 is taken out from the cavity 23h, and cut into individual pieces, whereby the wafer-formed electronic component 5 can be used.
而,樹脂密封作業不只有前述作業步驟,例如,亦可用下模具23之吸附孔23c、23d將薄膜71吸引,藉此將薄膜71密接於模穴23b之內周面之後,對被覆前述模穴23b之薄膜71之上面供給液狀樹脂。接著,使下模具23上昇,利用前述下模具23與前述上模具21將基板4與薄膜71包夾,藉此將前述電子零件5加以樹脂密封。Further, the resin sealing operation is not limited to the above-described working steps. For example, the film 71 can be sucked by the suction holes 23c and 23d of the lower mold 23, whereby the film 71 is adhered to the inner peripheral surface of the cavity 23b, and the cavity is covered. A liquid resin is supplied on the upper surface of the film 71 of 23b. Next, the lower mold 23 is raised, and the lower mold 23 and the upper mold 21 are used to sandwich the substrate 4 and the film 71, whereby the electronic component 5 is resin-sealed.
根據本實施形態,藉由下模具23於水平方向移動,可利用薄膜供給單元30直接地供給薄膜71。故,不需要薄膜搬運機構,有可獲得構造、控制系統簡單且小型之樹脂密封裝置的優點。According to the present embodiment, the film 71 can be directly supplied to the film 71 by the film supply unit 30 by the lower mold 23 moving in the horizontal direction. Therefore, there is no need for a film transport mechanism, and there is an advantage that a resin seal device having a simple structure and a small control system can be obtained.
本發明之樹脂密封裝置不限於前述實施形態,理所當然地可適用於其他將安裝於之電子零件加以樹脂密封者。The resin sealing device of the present invention is not limited to the above embodiment, and can be suitably applied to other resin-sealed electronic components.
1‧‧‧供給單元1‧‧‧Supply unit
2‧‧‧成形單元2‧‧‧forming unit
3‧‧‧排出單元3‧‧‧Draining unit
4‧‧‧基板4‧‧‧Substrate
5‧‧‧電子零件5‧‧‧Electronic parts
10‧‧‧基板供給裝置10‧‧‧Substrate supply device
11‧‧‧配列裝置11‧‧‧Arrangement device
12‧‧‧載入器12‧‧‧Loader
13‧‧‧樹脂供給裝置13‧‧‧Resin supply device
14‧‧‧匣14‧‧‧匣
15‧‧‧導軌15‧‧‧rail
20‧‧‧模具組20‧‧‧Mold group
21‧‧‧上模具21‧‧‧Upper mold
22‧‧‧中間模具22‧‧‧Intermediate mould
23‧‧‧下模具23‧‧‧ Lower mold
23a‧‧‧罐部23a‧‧‧ cans
23b‧‧‧模穴23b‧‧‧ cavity
23c、23d‧‧‧吸附孔23c, 23d‧‧‧Adsorption holes
30‧‧‧薄膜供給單元30‧‧‧film supply unit
31‧‧‧清潔器31‧‧‧cleaner
32‧‧‧下平台32‧‧‧Under platform
33‧‧‧繫桿33‧‧‧ tied
34‧‧‧上平台34‧‧‧Upper platform
35‧‧‧導軌35‧‧‧rails
36‧‧‧廢棄孔36‧‧‧Abandoned holes
37‧‧‧導軌37‧‧‧rails
40‧‧‧中間模具保持單元40‧‧‧Intermediate mold holding unit
41‧‧‧安裝板41‧‧‧Installation board
42‧‧‧連結桿42‧‧‧ Connecting rod
43‧‧‧上下驅動用汽缸43‧‧‧Upper and lower drive cylinders
44‧‧‧鉗用汽缸44‧‧‧Clamp cylinder
45‧‧‧活塞45‧‧‧Piston
46‧‧‧上鉗構件46‧‧‧Upper jaw members
46a‧‧‧卡合爪46a‧‧‧Card claws
47‧‧‧下鉗部47‧‧‧ lower jaw
47a‧‧‧定位銷47a‧‧‧Locating pin
50‧‧‧卸載器50‧‧‧ Unloader
51‧‧‧接收裝置51‧‧‧ Receiving device
52‧‧‧匣52‧‧‧匣
53‧‧‧基板排出裝置53‧‧‧Substrate discharge device
54‧‧‧控制裝置54‧‧‧Control device
55‧‧‧導軌55‧‧‧rail
60‧‧‧基座60‧‧‧Base
61‧‧‧押壓汽缸61‧‧‧Pushing cylinder
62‧‧‧押壓活塞62‧‧‧Pushing piston
63‧‧‧押壓板63‧‧‧Pressing plate
64‧‧‧第1導軸64‧‧‧1st guide shaft
65‧‧‧第2導軸65‧‧‧2nd guide shaft
66‧‧‧第1吸附板66‧‧‧1st adsorption plate
67‧‧‧第2吸附板67‧‧‧2nd adsorption plate
66a、67a‧‧‧吸附孔66a, 67a‧‧‧Adsorption holes
66b、67b‧‧‧凹溝66b, 67b‧‧‧ groove
68‧‧‧螺旋彈簧68‧‧‧Coil spring
69‧‧‧押入銷69‧‧‧Admission
70‧‧‧輥70‧‧‧roll
71‧‧‧樹脂薄膜71‧‧‧Resin film
72‧‧‧薄膜輥用馬達72‧‧‧film roller motor
73‧‧‧正時皮帶73‧‧‧ Timing belt
74‧‧‧張力輥74‧‧‧ Tension roller
75‧‧‧導輥75‧‧‧guide roller
76‧‧‧導輥用汽缸76‧‧‧Guide roller
80‧‧‧薄膜拉出塊件80‧‧‧film pull out pieces
80b‧‧‧拉出臂用汽缸80b‧‧‧ Pull out the cylinder for the arm
81‧‧‧導軌81‧‧‧rail
82‧‧‧塊件用馬達82‧‧‧Block motor
83a、83b‧‧‧滑輪83a, 83b‧‧‧ pulley
84‧‧‧正時皮帶84‧‧‧ Timing belt
85‧‧‧拉出臂部85‧‧‧ Pull out the arm
85a‧‧‧吸附孔85a‧‧‧Adsorption holes
86‧‧‧切斷器86‧‧‧Cut cutter
87‧‧‧切斷器汽缸87‧‧‧Cut cylinder
A~D、G~J‧‧‧位置A~D, G~J‧‧‧Location
E‧‧‧基板供給位置E‧‧‧Substrate supply location
F‧‧‧薄膜供給位置F‧‧‧ film supply location
圖1係顯示本申請發明中全自動樹脂密封裝置之第1實施形態的平面圖。Fig. 1 is a plan view showing a first embodiment of the fully automatic resin sealing device of the invention of the present application.
圖2係圖1所示之樹脂密封裝置的正面圖。Fig. 2 is a front elevational view showing the resin sealing device shown in Fig. 1.
圖3係圖2所示之模具組的擴大正面圖。Figure 3 is an enlarged front elevational view of the mold set shown in Figure 2.
圖4係圖3所示之模具組的平面圖。Figure 4 is a plan view of the mold set shown in Figure 3.
圖5係圖2所示之模具組的側面圖。Figure 5 is a side elevational view of the mold set shown in Figure 2.
圖6係圖3所示之模具組的VI-VI部分斷面圖。Figure 6 is a cross-sectional view of the VI-VI portion of the mold set shown in Figure 3.
圖7係顯示本申請發明中中間模具保持單元位於最下位並開啟上鉗構件之狀態之圖4的VII-VII線部分斷面圖。Fig. 7 is a partial cross-sectional view taken along line VII-VII of Fig. 4 showing a state in which the intermediate mold holding unit is at the lowermost position and the upper jaw member is opened in the present invention.
圖8係顯示本申請發明中中間模具保持單元從最下位上升至中間位置並關閉上鉗構件之途中的部分斷面圖。Fig. 8 is a partial cross-sectional view showing the intermediate mold holding unit of the present invention in the middle of raising from the lowermost position to the intermediate position and closing the upper jaw member.
圖9係顯示本申請發明中中間模具保持單元位於中間位置並已關閉上鉗構件之狀態的部分斷面圖。Fig. 9 is a partial cross-sectional view showing a state in which the intermediate mold holding unit is in the intermediate position and the upper jaw member is closed in the invention of the present application.
圖10係顯示本申請發明中中間模具保持單元位於最上位並已關閉上鉗構件之狀態的部分斷面圖。Fig. 10 is a partial cross-sectional view showing a state in which the intermediate mold holding unit is at the uppermost position and the upper jaw member is closed in the invention of the present application.
圖11係顯示本申請發明中中間模具保持單元、下模具位於最上位並已關閉上鉗構件之狀態的部分斷面圖。Fig. 11 is a partial cross-sectional view showing a state in which the intermediate mold holding unit and the lower mold are at the uppermost position and the upper jaw member is closed in the invention of the present application.
圖12係圖1所示之薄膜供給單元的平面圖。Figure 12 is a plan view of the film supply unit shown in Figure 1.
圖13係圖12所圖示之薄膜供給單元的正面圖。Figure 13 is a front elevational view of the film supply unit illustrated in Figure 12 .
圖14係圖13之XIV-XIV線斷面圖。Figure 14 is a sectional view taken along line XIV-XIV of Figure 13.
圖15係圖12所圖示之薄膜供給單元的右側面。Figure 15 is a right side view of the film supply unit illustrated in Figure 12 .
圖16係圖13之XVI-XVI線斷面圖。Figure 16 is a sectional view taken along line XVI-XVI of Figure 13.
圖17係用以說明圖1所示之薄膜供給單元之動作之圖13的XVII-XVII線斷面圖。Fig. 17 is a sectional view taken along line XVII-XVII of Fig. 13 for explaining the operation of the film supply unit shown in Fig. 1.
圖18係接續用以說明圖1所示之薄膜供給單元之動作之圖17的斷面圖。Fig. 18 is a cross-sectional view of Fig. 17 for explaining the operation of the film supply unit shown in Fig. 1.
圖19係接續用以說明圖1所示之薄膜供給單元之動作之圖18的斷面圖。Fig. 19 is a cross-sectional view of Fig. 18 for explaining the operation of the film supply unit shown in Fig. 1.
圖20係接續用以說明圖1所示之薄膜供給單元之動作之圖19的斷面圖。Figure 20 is a cross-sectional view of Figure 19 for explaining the operation of the film supply unit shown in Figure 1.
圖21係接續用以說明圖1所示之薄膜供給單元之動作之圖20的斷面圖。Fig. 21 is a cross-sectional view of Fig. 20 for explaining the operation of the film supply unit shown in Fig. 1.
圖22係接續用以說明圖1所示之薄膜供給單元之動作 之圖21的斷面圖。Figure 22 is a continuation of the action of the film supply unit shown in Figure 1 Figure 21 is a cross-sectional view.
圖23係係接續用以說明圖1所示之薄膜供給單元之動作之圖22的斷面圖。Figure 23 is a cross-sectional view of Figure 22 for explaining the operation of the film supply unit shown in Figure 1.
圖24係顯示本申請發明中半自動樹脂密封裝置之第2實施形態的平面圖。Fig. 24 is a plan view showing a second embodiment of the semi-automatic resin sealing device of the present invention.
圖25係顯示本申請發明中樹脂密封裝置之第3實施形態的部分斷面擴大圖。Fig. 25 is a partially enlarged sectional view showing a third embodiment of the resin sealing device of the present invention.
1‧‧‧供給單元1‧‧‧Supply unit
2‧‧‧成形單元2‧‧‧forming unit
3‧‧‧排出單元3‧‧‧Draining unit
10‧‧‧基板供給裝置10‧‧‧Substrate supply device
11‧‧‧配列裝置11‧‧‧Arrangement device
12‧‧‧載入器12‧‧‧Loader
13‧‧‧樹脂供給裝置13‧‧‧Resin supply device
14‧‧‧匣14‧‧‧匣
15‧‧‧導軌15‧‧‧rail
20‧‧‧模具組20‧‧‧Mold group
21‧‧‧上模具21‧‧‧Upper mold
30‧‧‧薄膜供給單元30‧‧‧film supply unit
31‧‧‧清潔器31‧‧‧cleaner
33‧‧‧繫桿33‧‧‧ tied
34‧‧‧上平台34‧‧‧Upper platform
36‧‧‧廢棄孔36‧‧‧Abandoned holes
37‧‧‧導軌37‧‧‧rails
40‧‧‧中間模具保持單元40‧‧‧Intermediate mold holding unit
50‧‧‧卸載器50‧‧‧ Unloader
51‧‧‧接收裝置51‧‧‧ Receiving device
52‧‧‧匣52‧‧‧匣
53‧‧‧基板排出裝置53‧‧‧Substrate discharge device
54‧‧‧控制裝置54‧‧‧Control device
55‧‧‧導軌55‧‧‧rail
A~D、G~J‧‧‧位置A~D, G~J‧‧‧Location
E‧‧‧基板供給位置E‧‧‧Substrate supply location
F‧‧‧薄膜供給位置F‧‧‧ film supply location
Claims (6)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011222722A JP5387646B2 (en) | 2011-10-07 | 2011-10-07 | Resin sealing device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201316559A TW201316559A (en) | 2013-04-16 |
| TWI472065B true TWI472065B (en) | 2015-02-01 |
Family
ID=48022317
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW101128271A TWI472065B (en) | 2011-10-07 | 2012-08-06 | Resin sealing device |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP5387646B2 (en) |
| KR (1) | KR101417329B1 (en) |
| CN (1) | CN103035537B (en) |
| TW (1) | TWI472065B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI814088B (en) * | 2020-11-25 | 2023-09-01 | 日商山田尖端科技股份有限公司 | Resin-sealing apparatus and resin-sealing method |
| TWI853274B (en) * | 2021-10-14 | 2024-08-21 | 日商山田尖端科技股份有限公司 | Compression molding device |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6104787B2 (en) * | 2013-12-18 | 2017-03-29 | Towa株式会社 | Resin molding apparatus and resin molding method |
| JP6560498B2 (en) * | 2015-01-27 | 2019-08-14 | Towa株式会社 | Resin sealing method and resin molded product manufacturing method |
| KR101690108B1 (en) * | 2015-10-19 | 2016-12-28 | 한미반도체 주식회사 | Apparatus of Compression Molding |
| JP7175869B2 (en) * | 2019-10-03 | 2022-11-21 | Towa株式会社 | Resin molding apparatus and resin molding method |
| JP7377189B2 (en) * | 2020-12-14 | 2023-11-09 | Towa株式会社 | Conveyance device, resin molding device, and method for manufacturing resin molded products |
| CN120356861B (en) * | 2025-06-23 | 2025-09-23 | 环诚智能装备(成都)有限公司 | Alignment mechanism for vacuum chamber and wafer alignment system |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI251885B (en) * | 2003-10-30 | 2006-03-21 | Dai Ichi Seiko Co Ltd | Resin sealing molding apparatus |
| TW200842994A (en) * | 2007-03-19 | 2008-11-01 | Fujitsu Ltd | Resin sealing method, mold for resin sealing, and resin sealing apparatus |
| TWI338613B (en) * | 2007-06-19 | 2011-03-11 | Dai Ichi Seiko Co Ltd | Resin sealing apparatus, moving member, and resin sealing method |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW410194B (en) * | 1996-08-20 | 2000-11-01 | Apic Yamada Kk | Resin molding machine |
| JP2001291731A (en) * | 2000-04-10 | 2001-10-19 | Mitsubishi Electric Corp | Resin sealing mold, semiconductor manufacturing apparatus, and semiconductor device manufacturing method |
| JP3967551B2 (en) * | 2001-02-08 | 2007-08-29 | 本田技研工業株式会社 | Electric double layer capacitor container lid |
| JP4204221B2 (en) * | 2001-11-30 | 2009-01-07 | アピックヤマダ株式会社 | Compression molding equipment |
| JP4971862B2 (en) * | 2007-04-16 | 2012-07-11 | 第一精工株式会社 | Resin sealing device and resin sealing method |
| JP5038783B2 (en) * | 2007-06-06 | 2012-10-03 | 住友重機械工業株式会社 | Film supply mechanism |
| JP4954012B2 (en) * | 2007-10-05 | 2012-06-13 | Towa株式会社 | Mold for resin sealing molding of electronic parts |
| KR100920335B1 (en) * | 2009-04-29 | 2009-10-07 | 우리마이크론(주) | Semiconductor Molding Device |
| JP4885260B2 (en) * | 2009-07-08 | 2012-02-29 | 第一精工株式会社 | Resin sealing device and resin sealing method |
| JP5403012B2 (en) * | 2011-08-11 | 2014-01-29 | 第一精工株式会社 | Resin sealing device |
-
2011
- 2011-10-07 JP JP2011222722A patent/JP5387646B2/en not_active Expired - Fee Related
-
2012
- 2012-08-06 TW TW101128271A patent/TWI472065B/en not_active IP Right Cessation
- 2012-08-28 KR KR1020120094139A patent/KR101417329B1/en not_active Expired - Fee Related
- 2012-09-19 CN CN201210351761.2A patent/CN103035537B/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI251885B (en) * | 2003-10-30 | 2006-03-21 | Dai Ichi Seiko Co Ltd | Resin sealing molding apparatus |
| TW200842994A (en) * | 2007-03-19 | 2008-11-01 | Fujitsu Ltd | Resin sealing method, mold for resin sealing, and resin sealing apparatus |
| TWI338613B (en) * | 2007-06-19 | 2011-03-11 | Dai Ichi Seiko Co Ltd | Resin sealing apparatus, moving member, and resin sealing method |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI814088B (en) * | 2020-11-25 | 2023-09-01 | 日商山田尖端科技股份有限公司 | Resin-sealing apparatus and resin-sealing method |
| US12409586B2 (en) | 2020-11-25 | 2025-09-09 | Apic Yamada Corporation | Resin-sealing apparatus and resin-sealing method |
| TWI853274B (en) * | 2021-10-14 | 2024-08-21 | 日商山田尖端科技股份有限公司 | Compression molding device |
Also Published As
| Publication number | Publication date |
|---|---|
| KR101417329B1 (en) | 2014-07-08 |
| CN103035537A (en) | 2013-04-10 |
| TW201316559A (en) | 2013-04-16 |
| JP2013084709A (en) | 2013-05-09 |
| JP5387646B2 (en) | 2014-01-15 |
| KR20130038135A (en) | 2013-04-17 |
| CN103035537B (en) | 2015-06-24 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| TWI472065B (en) | Resin sealing device | |
| JP5312897B2 (en) | Compression molding equipment | |
| CN110549092A (en) | An automatic fastening device for lid and spoon | |
| JP5403012B2 (en) | Resin sealing device | |
| WO2018150670A1 (en) | Resin sealing method and resin sealing device | |
| TWI442484B (en) | Modular molding assembly for electronic devices | |
| KR101842002B1 (en) | Solder preform cutting apparatus | |
| JP4204221B2 (en) | Compression molding equipment | |
| JP3609824B1 (en) | Resin sealing molding equipment | |
| CN103021917B (en) | Material system | |
| CN119092447B (en) | Resin feeding device for chip substrate packaging | |
| JP4153769B2 (en) | Resin sealing device | |
| CN112706342A (en) | Resin supply mechanism, resin molding device, and method for manufacturing resin molded article | |
| JP7644497B2 (en) | Resin sealing equipment and sealing mold | |
| CN117293057A (en) | A display panel packaging system and process | |
| JP4886344B2 (en) | Resin sealing molding equipment for electronic parts | |
| KR100264239B1 (en) | Lead frame molding system and its molding method | |
| CN203055880U (en) | Material system | |
| JP2013187312A (en) | Lead wire connecting device and connecting method of semiconductor cell | |
| JP4885260B2 (en) | Resin sealing device and resin sealing method | |
| CN114474564A (en) | Resin sealing device and workpiece conveying method | |
| KR102381073B1 (en) | Stamping and inserting device for manufacturing insect repellent | |
| CN221367786U (en) | Bag sucking and reciprocating equipment | |
| KR100514975B1 (en) | Method for manufacturing semiconductor package and device for manufacturing the same | |
| JP7799149B2 (en) | Degating device, resin sealing device, and degating method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | Annulment or lapse of patent due to non-payment of fees |