TWI470251B - Photoelectric detection system - Google Patents
Photoelectric detection system Download PDFInfo
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- TWI470251B TWI470251B TW102137250A TW102137250A TWI470251B TW I470251 B TWI470251 B TW I470251B TW 102137250 A TW102137250 A TW 102137250A TW 102137250 A TW102137250 A TW 102137250A TW I470251 B TWI470251 B TW I470251B
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Description
本揭露關於一種光電檢測系統。The present disclosure relates to a photodetection system.
隨著薄膜太陽能電池、觸控面板和軟性顯示器等產業日益興盛,在產品製作過程中,皆需經過檢測以確保其產品品質。過去是利用探針接觸式電性檢測設備,以抽檢的方式作為品管機制;但隨著產品製作尺寸越來越大,製程速度越來越快,製程的線寬越來越小的需求,高速之影像式檢測設備需求也越來越被重視。As thin-film solar cells, touch panels, and flexible displays continue to thrive, they must be tested to ensure product quality during product manufacturing. In the past, the probe contact type electrical detection equipment was used, and the sampling inspection method was adopted as the quality control mechanism; however, as the production size of the product became larger and larger, the processing speed became faster and faster, and the line width of the process became smaller and smaller, The demand for high-speed image detection equipment is also receiving more and more attention.
上述產品製造過程中,其中一道製程是透明的導電圖案之雷射蝕刻製程,如果蝕刻不完全,畫素會形成壞點,造成良率下降。在雷射蝕刻製程中,透明的導電圖案亦可能產生線路的短/斷路、刮傷與雜質等缺陷問題。由於導電圖案為透明,習知的光電檢測系統並無法得透明導電膜圖案(如ITO或AZO)的蝕刻狀況。習知的非接觸式光電檢測系統僅適用於單張(Sheet by Sheet)的製程檢測,並不適用於捲式(Roll to Roll)的製程檢測。如何直接經由外觀做缺陷檢測,並提供捲式製程更佳精密快速正確的量測品質,這將是光電檢測系統未來需要解決的問題。In the manufacturing process of the above products, one of the processes is a laser etching process of transparent conductive patterns. If the etching is incomplete, the pixels will form a dead pixel, resulting in a decrease in yield. In the laser etching process, transparent conductive patterns may also cause defects such as short/open circuits, scratches, and impurities. Since the conductive pattern is transparent, the conventional photodetection system cannot obtain an etching condition of a transparent conductive film pattern such as ITO or AZO. The conventional non-contact photodetection system is only suitable for single sheet (Sheet by Sheet) process inspection and is not suitable for roll to roll process inspection. How to directly perform defect detection through appearance and provide better precision, fast and accurate measurement quality of the roll process, which will be a problem that the photoelectric detection system needs to solve in the future.
因此,有鑑於上述問題,本揭露提供一種光電檢 測方法,適用於捲式製程之透明導電圖案的缺陷檢測。Therefore, in view of the above problems, the present disclosure provides a photoelectric inspection The measurement method is suitable for defect detection of a transparent conductive pattern of a roll process.
本揭露提供一種光電檢測系統,包括:電路旋轉連接器和光電檢測滾輪。電路旋轉連接器包括一外固定部和一內旋轉部,並通過外固定部由一外部電源所供應之電源。內旋轉部與外固定部透過一旋轉軸承相連接,並且內旋轉部隨著光電檢測滾輪轉動而轉動,內旋轉部具有一第一端子和一第二端子。光電感測滾輪包括一滾軸、一光電層以及至少一導電環。滾軸之外側包覆著與第一端子電性連接之一金屬層。光電層包覆於金屬層之外側,且光電層與金屬層接觸之一側係藉由金屬層被施加一第一電壓。導電環設置於光電感測滾輪之軸向外側,並且與具有一第二電壓之第二端子電性連接。第一電壓與第二電壓具有一既定電壓差,並且當一待測膜片貼合在光電感測滾輪上時,導電環將第二電壓施加至待測膜片上之一導電圖案,使得光電層根據導電圖案與金屬層間之電壓差,控制光電層對應於導電圖案之部分的透光性。The present disclosure provides a photodetection system comprising: a circuit rotary connector and a photodetection roller. The circuit rotary connector includes an external fixing portion and an inner rotating portion, and is supplied with power from an external power source through the external fixing portion. The inner rotating portion and the outer fixing portion are connected through a rotary bearing, and the inner rotating portion rotates as the photodetecting roller rotates, and the inner rotating portion has a first terminal and a second terminal. The photo-sensing roller includes a roller, a photoelectric layer and at least one conductive ring. The outer side of the roller is covered with a metal layer electrically connected to the first terminal. The photovoltaic layer is coated on the outer side of the metal layer, and a side of the photovoltaic layer and the metal layer is applied with a first voltage by the metal layer. The conductive ring is disposed on an axial outer side of the photo-sensing roller and electrically connected to the second terminal having a second voltage. The first voltage and the second voltage have a predetermined voltage difference, and when a film to be tested is attached to the photo-sensing roller, the conductive ring applies a second voltage to one of the conductive patterns on the film to be tested, so that the photoelectric The layer controls the light transmittance of the photoelectric layer corresponding to a portion of the conductive pattern according to a voltage difference between the conductive pattern and the metal layer.
1‧‧‧光電檢測系統1‧‧‧Photoelectric detection system
2‧‧‧電路旋轉連接器2‧‧‧Circuit Rotating Connector
3‧‧‧光電檢測滾輪3‧‧‧Photoelectric detection wheel
4‧‧‧外部電源4‧‧‧External power supply
5‧‧‧膜片5‧‧‧ diaphragm
6‧‧‧導電圖案6‧‧‧ conductive pattern
7‧‧‧端電極7‧‧‧ terminal electrode
8‧‧‧引線8‧‧‧ lead
9‧‧‧ITO電極9‧‧‧ITO electrodes
10‧‧‧相機10‧‧‧ camera
11‧‧‧電子計算機11‧‧‧Electronic computer
12‧‧‧光源12‧‧‧Light source
BS‧‧‧分光器BS‧‧‧beam splitter
21‧‧‧外固定部21‧‧‧ External fixation
22‧‧‧內旋轉部22‧‧‧Internal rotation
31‧‧‧滾軸31‧‧‧roller
32‧‧‧黑色金屬鍍層32‧‧‧Black metal plating
32’‧‧‧金屬反射層32'‧‧‧Metal reflector
33‧‧‧光電層33‧‧‧Photoelectric layer
34‧‧‧透明覆蓋面34‧‧‧Transparent coverage
35‧‧‧導電環35‧‧‧ Conductive ring
36‧‧‧絕緣環36‧‧‧Insulation ring
本揭露之實施例現在將參照所附示意圖式來更詳細敘述,其中:Embodiments of the present disclosure will now be described in more detail with reference to the accompanying schematic drawings in which:
第1A圖和第1B圖說明本揭露光電檢測系統的檢測原理。1A and 1B illustrate the detection principle of the photodetection system of the present disclosure.
第2A圖是本揭露光電檢測系統之實施例的示意圖。2A is a schematic diagram of an embodiment of the photodetection system of the present disclosure.
第2B圖是本揭露光電檢測系統之另一實施例的示意圖。2B is a schematic diagram of another embodiment of the photodetection system of the present disclosure.
第3A圖為本揭露光電檢測系統之實施例的y軸方向視圖。Figure 3A is a y-axis view of an embodiment of the photodetection system of the present disclosure.
第3B圖為本揭露光電檢測系統之實施例的x軸方向視圖(a-a’連線)。Figure 3B is a view of the x-axis direction (a-a' connection) of an embodiment of the photodetection system of the present disclosure.
第3C圖為本揭露光電檢測系統之實施例的x軸方向視圖(c-c’連線)。Figure 3C is an x-axis view (c-c' connection) of an embodiment of the photodetection system of the present disclosure.
第3D圖為本揭露光電檢測系統之實施例的x軸方向視圖(b-b’連線)。Figure 3D is an x-axis view (b-b' connection) of an embodiment of the photodetection system of the present disclosure.
第3E圖為本揭露光電檢測系統之實施例的z軸方向視圖。Figure 3E is a z-axis view of an embodiment of the photodetection system of the present disclosure.
第3F圖為本揭露光電檢測系統之實施例的x軸方向視圖(b-b’連線)。Figure 3F is an x-axis view (b-b' connection) of an embodiment of the photodetection system of the present disclosure.
第3G圖為本揭露光電檢測系統之實施例的z軸方向視圖。Figure 3G is a z-axis view of an embodiment of the photodetection system of the present disclosure.
第4圖為本揭露光電檢測系統之另一實施例的示意圖。Figure 4 is a schematic view of another embodiment of the photodetection system of the present disclosure.
本揭露將搭配所附圖式說明如下。The disclosure will be described below in conjunction with the drawings.
當相關技術的詳細描述能避免非必要地混淆本發明的主題事項時,其描述將被省略。此外,下列術語,其定義考慮本揭露的功能,這取決於使用者的意圖或司法判例時,術語可能會被改變。因此,基於本說明書的全部公開內容,每個術語的含義應當被解釋。When the detailed description of the related art can avoid unnecessary confusion of the subject matter of the present invention, the description thereof will be omitted. In addition, the following terms, whose definitions take into account the functions disclosed herein, may vary depending on the user's intention or judicial precedent. Therefore, the meaning of each term should be interpreted based on the entire disclosure of this specification.
第1A圖和第1B圖說明本揭露光電檢測系統的檢測原理。第2A圖是本揭露光電檢測系統之實施例的示意圖。第2B圖是本揭露光電檢測系統之另一實施例的示意圖。第3A圖至第3E圖分別為本揭露光電檢測系統之實施例的三視圖。第4圖為本揭露光電檢測系統之另一實施例的示意圖。1A and 1B illustrate the detection principle of the photodetection system of the present disclosure. 2A is a schematic diagram of an embodiment of the photodetection system of the present disclosure. 2B is a schematic diagram of another embodiment of the photodetection system of the present disclosure. 3A to 3E are respectively three views of an embodiment of the photodetection system of the present disclosure. Figure 4 is a schematic view of another embodiment of the photodetection system of the present disclosure.
參考第1A圖,膜層構造表示部分的光電感測滾輪,膜層構造由下而上分別為黑色金屬鍍層32、光電層33、透明覆蓋面34,以及透明的ITO電極9,其中ITO電極9不連 續的部分為斷路部分。透明覆蓋面34位於黑色金屬鍍層32之對側並用於保護光電層33。本揭露光電層33為聚合物分散液晶(polymer dispersed liquid crystal,PDLC)。當PDLC兩側被施加電壓時,PDLC和摻雜其中的高分子材料,兩者折射率相近,因此PDLC呈現透明。當PDLC兩側並未施加電壓(或低於驅動電壓)時,PDLC因為其中液晶分子散射光線而呈現乳白色。Referring to FIG. 1A, the film structure represents a portion of the photo-sensing roller, and the film layer structure is a black metal plating layer 32, a photovoltaic layer 33, a transparent covering surface 34, and a transparent ITO electrode 9 from bottom to top, wherein the ITO electrode 9 is not even The continuation part is the disconnection part. The transparent cover 34 is located on the opposite side of the black metal plating 32 and serves to protect the photovoltaic layer 33. The photo-electric layer 33 is a polymer dispersed liquid crystal (PDLC). When a voltage is applied to both sides of the PDLC, the PDLC and the polymer material doped therein have similar refractive indices, so the PDLC is transparent. When no voltage is applied to both sides of the PDLC (or below the driving voltage), the PDLC appears milky white because the liquid crystal molecules scatter light.
在本實施例中,吾人假設ITO電極9被施加正電壓,而黑色金屬鍍層32被施加負電壓。由於介於黑色金屬層32與ITO電極9之間的光電層33其兩側被施加電壓,所以光電層33呈現透明而能讓入射光穿透。當入射光穿過透明的光電層33後,黑色金屬鍍層32完全吸收入射光,所以沒有反射光。當ITO電極9具有斷路時,由於ITO電極9斷路部分下方的光電層並未被施加正電壓,所以光電層33呈現乳白色並部分反射入射光。因為自光電層33反射回來的反射光(亮部),其輪廓與ITO電極9之斷路部分的輪廓相同。此外,沒有反射光的部分(暗部),其輪廓亦與ITO電極9的輪廓相同。換言之,不論是ITO電極9或其斷路部分,其反射光的輪廓均與ITO電極9相同,其差異僅在於暗部表示ITO電極9,而亮部表示ITO電極9的斷路部分。所以在膜層上方設置相機(即一成相模組)和電子計算機分別接收並紀錄自光電層33反射回來的反射光,即可得到ITO電極9的輪廓影像。此外,根據ITO電極9之輪廓影像的亮暗,可以判斷ITO電極9是否具有斷路部分。在本實施例中,暗部代表具有ITO電極9的部分,亮部代表不 具有ITO電極9的部分(即斷路部分)。換言之,當光電層33呈現透明時,黑色金屬鍍層32會完全吸收入射光,所以此時反射率為第一反射率(例如為零)。當光電層33呈現乳白色時,光電層33會反射部分的入射光,故此時反射率為高於第一反射率之一第二反射率。In the present embodiment, it is assumed that the ITO electrode 9 is applied with a positive voltage, and the ferrous metal layer 32 is applied with a negative voltage. Since the photovoltaic layer 33 interposed between the ferrous metal layer 32 and the ITO electrode 9 is applied with voltage on both sides, the photovoltaic layer 33 is transparent to allow incident light to penetrate. When the incident light passes through the transparent photovoltaic layer 33, the black metal plating layer 32 completely absorbs the incident light, so there is no reflected light. When the ITO electrode 9 has an open circuit, since the photovoltaic layer under the disconnected portion of the ITO electrode 9 is not applied with a positive voltage, the photovoltaic layer 33 appears milky white and partially reflects the incident light. The reflected light (bright portion) reflected from the photovoltaic layer 33 has the same contour as that of the broken portion of the ITO electrode 9. Further, the portion (dark portion) where no light is reflected has the same contour as that of the ITO electrode 9. In other words, the outline of the reflected light of the ITO electrode 9 or its disconnected portion is the same as that of the ITO electrode 9, and the difference is only that the dark portion indicates the ITO electrode 9, and the bright portion indicates the broken portion of the ITO electrode 9. Therefore, a camera (ie, a phase module) is disposed above the film layer and an electronic computer respectively receives and records the reflected light reflected from the photoelectric layer 33, thereby obtaining a contour image of the ITO electrode 9. Further, it is possible to judge whether or not the ITO electrode 9 has a disconnecting portion based on the brightness and darkness of the contour image of the ITO electrode 9. In the present embodiment, the dark portion represents the portion having the ITO electrode 9, and the bright portion represents no A portion having an ITO electrode 9 (i.e., a broken portion). In other words, when the photovoltaic layer 33 is rendered transparent, the black metal plating 32 will completely absorb the incident light, so the reflectance at this time is the first reflectance (for example, zero). When the photovoltaic layer 33 exhibits a milky white color, the photovoltaic layer 33 reflects a portion of the incident light, and thus the reflectance is higher than the second reflectance of the first reflectance.
參考第1B圖,膜層構造表示部分的光電感測滾輪,膜層構造由下而上分別為金屬反射層32'、光電層33、透明覆蓋面34,以及透明的ITO電極9,其中ITO電極9不連續的部分為斷路部分。透明覆蓋面34位於金屬反射層32'之對側並用於保護光電層33。如上所述,光電層33為PDLC。Referring to FIG. 1B, the film layer structure represents a portion of the photo-sensing roller, and the film layer structure is a metal reflective layer 32', a photovoltaic layer 33, a transparent cover surface 34, and a transparent ITO electrode 9, respectively, from bottom to top, wherein the ITO electrode 9 The discontinuous part is the disconnected part. The transparent cover 34 is located on the opposite side of the metal reflective layer 32' and serves to protect the photovoltaic layer 33. As described above, the photovoltaic layer 33 is a PDLC.
在本實施例中,吾人假設ITO電極9被施加正電壓,而金屬反射層32'被施加負電壓。由於介於金屬反射層32'與ITO電極9之間的光電層33其兩側被施加電壓,所以光電層33呈現透明而能讓入射光穿透。當入射光穿過透明的光電層33後,金屬反射層32'完全反射入射光。當ITO電極9具有斷路時,由於ITO電極9斷路部分下方的光電層並未被施加正電壓,所以光電層33呈現乳白色並部分反射入射光。與第1A圖不同的是,因為將黑色金屬鍍層32置換為金屬反射層32',所以不論是ITO電極9或是其斷路部分,均有反射光。ITO電極9由於入射光完全被金屬反射層32'反射,所以反射光較強。ITO電極9斷路部分由於入射光僅部分被光電層33反射,所以反射光較弱。較強的反射光定義為亮部,較弱的反射光定義為暗部。所以在膜層上方設置相機和電子計算機分別接收並紀錄自光電層33反射回來的反射光,即可得到ITO電極9的輪 廓影像。此外,根據ITO電極9之輪廓影像的亮暗,可以判斷ITO電極9是否具有斷路部分。在本實施例中,反射光較弱之暗部代表不具有ITO電極9的部分(即斷路部分),反射光較強之亮部代表具有ITO電極9的部分。換言之,當光電層33呈現透明時,金屬反射層32'會完全反射入射光,所以此時反射率為第一反射率。當光電層33呈現乳白色時,光電層33僅會反射部分的入射光,故此時反射率為低於第一反射率之一第二反射率。In the present embodiment, we assume that the ITO electrode 9 is applied with a positive voltage and the metal reflective layer 32' is applied with a negative voltage. Since the photovoltaic layer 33 interposed between the metal reflective layer 32' and the ITO electrode 9 is applied with voltage on both sides, the photovoltaic layer 33 is transparent to allow incident light to penetrate. When the incident light passes through the transparent photovoltaic layer 33, the metallic reflective layer 32' completely reflects the incident light. When the ITO electrode 9 has an open circuit, since the photovoltaic layer under the disconnected portion of the ITO electrode 9 is not applied with a positive voltage, the photovoltaic layer 33 appears milky white and partially reflects the incident light. The difference from Fig. 1A is that since the ferrous metal layer 32 is replaced by the metal reflection layer 32', there is reflected light regardless of the ITO electrode 9 or the disconnected portion. Since the incident light is completely reflected by the metal reflective layer 32', the ITO electrode 9 has a strong reflected light. Since the incident portion of the ITO electrode 9 is only partially reflected by the photovoltaic layer 33, the reflected light is weak. Strong reflected light is defined as a bright portion, and weak reflected light is defined as a dark portion. Therefore, a camera and an electronic computer are disposed above the film layer to respectively receive and record the reflected light reflected from the photoelectric layer 33, thereby obtaining the wheel of the ITO electrode 9. Profile image. Further, it is possible to judge whether or not the ITO electrode 9 has a disconnecting portion based on the brightness and darkness of the contour image of the ITO electrode 9. In the present embodiment, the dark portion where the reflected light is weak represents the portion having no ITO electrode 9 (i.e., the broken portion), and the bright portion where the reflected light is strong represents the portion having the ITO electrode 9. In other words, when the photovoltaic layer 33 is transparent, the metal reflective layer 32' will completely reflect the incident light, so the reflectance at this time is the first reflectance. When the photovoltaic layer 33 exhibits a milky white color, the photovoltaic layer 33 reflects only a portion of the incident light, and thus the reflectance is lower than the second reflectance of the first reflectance.
參考第2A圖,其顯示本揭露光電檢測系統之實施例的示意圖。光電檢測系統1包括電路旋轉連接器(rotating electrical connector)2以及光電感測滾輪3。電路旋轉連接器2藉由外部電源4供應的電源帶動光電感測滾輪3轉動。第2B圖顯示本揭露光電檢測系統之另一實施例的示意圖。第2B圖與第2A圖的差異在於膜片5上之端電極7和引線8僅設置於膜片之一側(膜片左側),而膜片之另一側(膜片右側)並未設置端電極7和引線8。因此光電檢測滾輪3之中,設置端電極7和引線8之一側(膜片左側)對應地設置導電環以及絕緣環,而未設置端電極7和引線8之該側(膜片右側)對應地未設置導電環以及絕緣環。Referring to Figure 2A, a schematic diagram of an embodiment of the present photodetection system is shown. The photodetection system 1 includes a rotating electrical connector 2 and a photo-sensing roller 3. The circuit rotary connector 2 drives the photo-sensing roller 3 to rotate by the power supplied from the external power source 4. Figure 2B shows a schematic diagram of another embodiment of the photodetection system of the present disclosure. The difference between FIG. 2B and FIG. 2A is that the terminal electrode 7 and the lead 8 on the diaphragm 5 are disposed only on one side of the diaphragm (left side of the diaphragm), and the other side of the diaphragm (on the right side of the diaphragm) is not provided. Terminal electrode 7 and lead 8. Therefore, among the photodetecting roller 3, the terminal electrode 7 and one side of the lead 8 (the left side of the diaphragm) are disposed correspondingly with a conductive ring and an insulating ring, and the side of the terminal electrode 7 and the lead 8 (the right side of the diaphragm) are not provided. The conductive ring and the insulating ring are not provided.
光電感測滾輪3為圓柱狀,其與電路旋轉連接器2接合並藉由電路旋轉連接器2的帶動而繞著轉軸旋轉。膜片5為可撓性的PE塑膠,其上鍍有導電圖案6。導電圖案6包括端電極7、引線8以及透明的ITO(Indium-tin oxide electrode)電極9。當膜片5貼合在光電感測滾輪3的表面而滾動時,導 電圖案6與光電感測滾輪3之徑向外側接觸。The photo-sensing measuring roller 3 has a cylindrical shape and is engaged with the circuit rotary connector 2 and rotated about the rotating shaft by the rotation of the circuit rotating connector 2. The diaphragm 5 is a flexible PE plastic having a conductive pattern 6 plated thereon. The conductive pattern 6 includes a terminal electrode 7, a lead 8, and a transparent ITO (Indium-tin oxide electrode) electrode 9. When the diaphragm 5 is attached to the surface of the photo-sensing roller 3 and rolls, The electric pattern 6 is in contact with the radially outer side of the photo-sensing roller 3.
光電檢測系統1更包括相機10和電子計算機11。在某些實施例中,相機10可視為一成像模組,用以將光電層所反射的光束轉換成影像信號。舉例而言,相機10可為線掃瞄相機,當反射光自黑色金屬層32或反射金屬層32'反射出來時,相機10接收線形區域的反射光。電子計算機11耦接於相機10,並紀錄相機10接收之反射光,以得到ITO之輪廓影像。此外,吾人能根據電子計算機10中ITO電極9之輪廓影像的亮暗,判斷ITO電極9是否具有斷路部分。The photodetection system 1 further includes a camera 10 and an electronic computer 11. In some embodiments, camera 10 can be viewed as an imaging module for converting a beam of light reflected by a photovoltaic layer into an image signal. For example, camera 10 can be a line scan camera that receives reflected light from a linear region when reflected light is reflected from ferrous metal layer 32 or reflective metal layer 32'. The computer 11 is coupled to the camera 10 and records the reflected light received by the camera 10 to obtain a contour image of the ITO. Further, it is possible to judge whether or not the ITO electrode 9 has a disconnected portion based on the brightness and darkness of the outline image of the ITO electrode 9 in the electronic computer 10.
第3A圖為本揭露光電檢測系統之實施例的y軸方向視圖。第3A圖顯示光電檢測滾輪徑向的截面方向。如第3A圖所示,膜片5上具有ITO電極9。當膜片5貼合於光電檢測滾輪3表面滾動時,ITO電極9會與透明覆蓋面34接觸。在本實施例中,為了簡化說明,假設ITO電極9被施加正電壓,黑色金屬鍍層32被施加負電壓。由於介於黑色金屬層32與ITO電極9之間的光電層33其兩側被施加電壓,所以光電層33呈現透明而能讓入射光穿透。當入射光穿過透明的光電層33後,黑色金屬鍍層32完全吸收入射光,所以膜片5上具有ITO電極9的部分因為沒有反射光而成為暗部。當膜片5滾動至膜片5上不具有ITO電極9的部分時(例如陰影部分),由於膜片5上不具有ITO電極9的部分,其下方的光電層並未被施加正電壓,光電層33呈現乳白色並部分反射入射光,所以膜片5上具有ITO電極9的部分因為具有反射光而成為亮部。根據相機(此處未圖示)接收之影像,其明暗與否,即可判斷膜片上是否 具有ITO電極。Figure 3A is a y-axis view of an embodiment of the photodetection system of the present disclosure. Fig. 3A shows the cross-sectional direction of the photodetecting roller in the radial direction. As shown in Fig. 3A, the diaphragm 5 has an ITO electrode 9. When the diaphragm 5 is attached to the surface of the photodetecting roller 3, the ITO electrode 9 is in contact with the transparent covering surface 34. In the present embodiment, in order to simplify the explanation, it is assumed that the ITO electrode 9 is applied with a positive voltage, and the ferrous metal layer 32 is applied with a negative voltage. Since the photovoltaic layer 33 interposed between the ferrous metal layer 32 and the ITO electrode 9 is applied with voltage on both sides, the photovoltaic layer 33 is transparent to allow incident light to penetrate. When the incident light passes through the transparent photovoltaic layer 33, the black metal plating layer 32 completely absorbs the incident light, so that the portion of the diaphragm 5 having the ITO electrode 9 becomes a dark portion because there is no reflected light. When the diaphragm 5 rolls to a portion of the diaphragm 5 that does not have the ITO electrode 9 (for example, a hatched portion), since the portion of the diaphragm 5 that does not have the ITO electrode 9 is not subjected to a positive voltage, the photovoltaic layer is not applied thereto. The layer 33 is milky white and partially reflects the incident light, so that the portion of the film 5 having the ITO electrode 9 becomes a bright portion because it has reflected light. According to the image received by the camera (not shown here), whether it is light or dark, it can be judged whether the film is on the film. It has an ITO electrode.
第3B圖為本揭露光電檢測系統之實施例的x軸方向視圖(從x軸方向看a-a’連線)。第3B圖顯示光電檢測滾輪軸向的截面方向。如第3B圖所示,電路旋轉連接器2包括外固定部21和內旋轉部22,電路旋轉連接器2通過外固定部21由外部電源4供應電源。內旋轉部22與外固定部21透過旋轉軸承相連接,並且內旋轉部22係隨著光電檢測滾輪3轉動而轉動。內旋轉部22具有正極端子(+)和負極端子(-)。在某些實施例中,負極端子(-)係可視為一第一端子,而正極端子(+)可視為一第二端子,但並非限定於此。在某些實施例中,內旋轉部22藉由外部電源4所供應之電源而轉動。Fig. 3B is a view of the x-axis direction of the embodiment of the photodetection system of the present invention (a-a' line seen from the x-axis direction). Fig. 3B shows the cross-sectional direction of the photodetecting roller in the axial direction. As shown in FIG. 3B, the circuit rotary connector 2 includes an outer fixing portion 21 and an inner rotating portion 22, and the circuit rotary connector 2 is supplied with power from the external power source 4 through the outer fixing portion 21. The inner rotating portion 22 is connected to the outer fixing portion 21 through the rotary bearing, and the inner rotating portion 22 is rotated in accordance with the rotation of the photodetecting roller 3. The inner rotating portion 22 has a positive terminal (+) and a negative terminal (-). In some embodiments, the negative terminal (-) can be regarded as a first terminal, and the positive terminal (+) can be regarded as a second terminal, but is not limited thereto. In some embodiments, the inner rotating portion 22 is rotated by a power source supplied from the external power source 4.
參考第3B圖,光電檢測滾輪3包括滾軸31、黑色金屬鍍層32、光電層33、透明覆蓋面34、導電環35,以及絕緣環36。滾軸31作為光電檢測滾輪繞軸心轉動的中心軸,其外側包覆黑色金屬鍍層32,其中黑色金屬鍍層32與內旋轉部22的負極端子(-)電性連接,並能夠導電並吸收入射光。光電層33包覆於黑色金屬鍍層32外側,且光電層33與黑色金屬鍍層32接觸之一側藉由黑色金屬鍍層32被施加負電壓。透明覆蓋面34覆蓋於光電層33不與黑色金屬鍍層32接觸之另一側並保護光電層33。Referring to FIG. 3B, the photodetecting roller 3 includes a roller 31, a black metal plating layer 32, a photovoltaic layer 33, a transparent covering surface 34, a conductive ring 35, and an insulating ring 36. The roller 31 serves as a central axis of the photoelectric detecting roller about the axis of rotation, and the outer side thereof is covered with a black metal plating layer 32. The black metal plating layer 32 is electrically connected to the negative terminal (-) of the inner rotating portion 22, and is capable of conducting and absorbing incident. Light. The photovoltaic layer 33 is coated on the outer side of the ferrous plating layer 32, and a side of the photovoltaic layer 33 in contact with the ferrous metal plating layer 32 is applied with a negative voltage by the ferrous metal plating layer 32. The transparent cover 34 covers the other side of the photovoltaic layer 33 that is not in contact with the black metal plating 32 and protects the photovoltaic layer 33.
導電環32設置於光電桿測滾輪3之軸向兩端,並與正極端子(+)電性連接。絕緣環36設置於每一個導電環35與光電檢測滾輪3之間,並將每一個導電環35與光電檢測滾輪3之光電層33電性絕緣。The conductive ring 32 is disposed at both axial ends of the photoelectric rod measuring roller 3, and is electrically connected to the positive terminal (+). An insulating ring 36 is disposed between each of the conductive rings 35 and the photodetecting roller 3, and electrically insulates each of the conductive rings 35 from the photovoltaic layer 33 of the photodetecting roller 3.
當膜片5貼合於光電檢測滾輪3表面之透明覆蓋面34而滾動時,端電極7與導電環35接觸,並透過引線8使得ITO電極9被施加正電壓。第3B圖所示者為不具有斷路部分之ITO電極,由於光電層33上下兩側分別被施加正負電壓,光電層33呈現透明並使得入射光被黑色金屬鍍層32完全吸收,所以在相機成像的線形區域中不會有反射光。換言之,當ITO電極9完整且沒有斷路時,透過相機成像,吾人能夠在電子計算機中觀察到線形的暗部。在某些實施例中,負電壓係可視為一第一電壓,而正電壓可視為一第二電壓,並且正負電壓之間具有一既定電壓差,但並非限定於此。When the diaphragm 5 is rolled against the transparent cover surface 34 of the surface of the photodetecting roller 3, the terminal electrode 7 is in contact with the conductive ring 35, and the lead 8 is transmitted through the lead 8 so that the ITO electrode 9 is applied with a positive voltage. The image shown in Fig. 3B is an ITO electrode having no disconnecting portion. Since the positive and negative voltages are applied to the upper and lower sides of the photovoltaic layer 33, the photovoltaic layer 33 is transparent and the incident light is completely absorbed by the black metal plating layer 32, so that it is imaged by the camera. There is no reflected light in the linear area. In other words, when the ITO electrode 9 is intact and there is no open circuit, the image can be imaged by the camera, and we can observe the dark portion of the line in the electronic computer. In some embodiments, the negative voltage can be regarded as a first voltage, and the positive voltage can be regarded as a second voltage, and there is a predetermined voltage difference between the positive and negative voltages, but is not limited thereto.
第3C圖亦為本揭露光電檢測系統之實施例的x軸方向視圖(沿x軸方向看c-c’連線)。第3C圖所示之光電檢測滾輪和電路旋轉連接器與第3B圖所示者完全相同,為了簡化說明,在此不再贅述。不同於第3B圖,第3C圖顯示不具有ITO電極的膜片5。由於光電層33上方不具有ITO電極,光電層33僅在與黑色金屬鍍層32接觸之一側施加負電壓,所以光電層33呈現乳白色並將入射光反射,且在相機成像的線形區域中具有反射光。換言之,當膜片5上完全不具有ITO電極時,透過相機成像,吾人能夠在電子計算機中觀察到線形的亮部。Figure 3C is also a view of the x-axis direction of the embodiment of the photodetection system (viewing the c-c' line in the x-axis direction). The photodetection roller and the circuit rotary connector shown in FIG. 3C are identical to those shown in FIG. 3B, and will not be described again for simplification of the description. Unlike FIG. 3B, FIG. 3C shows the diaphragm 5 without the ITO electrode. Since the photovoltaic layer 33 does not have an ITO electrode thereon, the photovoltaic layer 33 applies a negative voltage only on one side of the contact with the black metal plating 32, so the photovoltaic layer 33 appears milky white and reflects incident light, and has reflection in a linear region imaged by the camera. Light. In other words, when the diaphragm 5 has no ITO electrode at all, through the camera imaging, we can observe the bright portion of the line in the electronic computer.
第3D圖為本揭露光電檢測系統之實施例的x軸方向視圖(沿x軸方向看b-b’連線)。不同於第3B圖,第3C圖顯示具有ITO電極9及斷路部分(斜線部分)的膜片5。由前述說明可知,當光電層33上方具有ITO電極9且兩側被施加正負電壓時,光電層33呈現透明,並且黑色金屬鍍層32完全吸收 入射光。因此,在相機成像的線形區域中不會有反射光而呈現暗部。此外,當光電33層上方不具有ITO電極9且僅與黑色金屬鍍層32接觸之一側施加負電壓時,光電層33呈現乳白色並且部分反射入射光。因此,在相機成像的線形區域中具有反射光而呈現亮部。Fig. 3D is a view of the x-axis direction of the embodiment of the photodetection system of the present disclosure (viewing the b-b' line in the x-axis direction). Unlike FIG. 3B, FIG. 3C shows the diaphragm 5 having the ITO electrode 9 and the breaking portion (hatched portion). It can be seen from the foregoing description that when the ITO electrode 9 is provided above the photovoltaic layer 33 and positive and negative voltages are applied to both sides, the photovoltaic layer 33 is transparent, and the black metal plating layer 32 is completely absorbed. Incident light. Therefore, there is no reflected light in the linear region imaged by the camera to present a dark portion. Further, when a negative voltage is applied to the side of the photovoltaic 33 layer which does not have the ITO electrode 9 and is only in contact with the black metal plating layer 32, the photovoltaic layer 33 exhibits a milky white color and partially reflects the incident light. Therefore, there is reflected light in the linear region imaged by the camera to present a bright portion.
第3E圖為本揭露光電檢測系統之實施例的Z軸方向視圖。當膜片5貼合於光電檢測滾輪3表面滾動時,導電圖案6的端電極7與導電環35接觸而被施加正電壓,然後ITO電極9透過引線8而被施加正電壓。以滾軸外側為黑色金屬鍍層32為例,當光電層33兩側被施加正負電壓(光電層上方具有ITO電極)且ITO電極9完整沒有斷路時,吾人應能觀察到完整的線形暗部。當ITO電極9具有斷路部分時,吾人觀察到的ITO輪廓影像應為線形暗部,但是其間具有局部的亮部,其中暗部代表膜片5具有ITO電極9,亮部代表膜片5不具有ITO電極9(斷路部分)。以滾軸外側為金屬反射層32’為例,當光電層33兩側被施加正負電壓(光電層上方具有ITO電極)且ITO電極9完整沒有斷路時,吾人應能觀察到完整的線形亮部。當ITO電極9具有斷路部分時,吾人觀察到的ITO輪廓影像應為線形亮部,但是其間具有局部的暗部,其中亮部代表膜片5具有ITO電極9,暗部代表膜片5不具有ITO電極9(斷路部分)。簡言之,當一待測膜片貼合在光電感測滾輪3上時,導電環35將正電壓(第二電壓)施加至該待測膜片上之導電圖案6,使得光電層33根據導電圖案6與金屬層(即黑色金屬鍍層32或金屬反射層32’)間之電壓差,控制光電層33對應於導電圖案6 之部分的透光性。Figure 3E is a Z-axis direction view of an embodiment of the photodetection system of the present disclosure. When the diaphragm 5 is attached to the surface of the photodetecting roller 3, the terminal electrode 7 of the conductive pattern 6 is brought into contact with the conductive ring 35 to be applied with a positive voltage, and then the ITO electrode 9 is applied with a positive voltage by the lead 8. Taking the black metal plating layer 32 on the outer side of the roller as an example, when both positive and negative voltages are applied to both sides of the photovoltaic layer 33 (the ITO electrode is provided above the photovoltaic layer) and the ITO electrode 9 is completely open, we should be able to observe the complete linear dark portion. When the ITO electrode 9 has a disconnecting portion, the ITO contour image observed by us should be a linear dark portion, but with a partial bright portion therebetween, wherein the dark portion represents the diaphragm 5 having the ITO electrode 9, and the bright portion represents that the diaphragm 5 does not have the ITO electrode. 9 (breaking part). Taking the outer side of the roller as the metal reflective layer 32' as an example, when both positive and negative voltages are applied on both sides of the photovoltaic layer 33 (the ITO electrode is present on the photovoltaic layer) and the ITO electrode 9 is completely open, we should be able to observe the complete linear bright portion. . When the ITO electrode 9 has a broken portion, the ITO contour image observed by us should be a linear bright portion, but with a partial dark portion therebetween, wherein the bright portion represents the diaphragm 5 having the ITO electrode 9, and the dark portion represents the diaphragm 5 having no ITO electrode. 9 (breaking part). In short, when a film to be tested is attached to the photo-sensing roller 3, the conductive ring 35 applies a positive voltage (second voltage) to the conductive pattern 6 on the film to be tested, so that the photo-electric layer 33 is a voltage difference between the conductive pattern 6 and the metal layer (ie, the black metal plating layer 32 or the metal reflective layer 32'), and the control photoelectric layer 33 corresponds to the conductive pattern 6 Part of the light transmission.
如第2B圖實施例說明之所述,在一些實施例中,端電極7和引線8僅設置於膜片之一側,而膜片之另一側並未設置端電極7和引線8。在第3F圖所示之實施例中,其顯示具有斷路部分之ITO電極9,以及光電檢測滾輪3僅在設置端電極7和引線8之一側設置導電環35以及絕緣環36。在本實施例中,藉由端電極7和引線8之電性耦接,ITO電極9帶有正電。此外,黑色金屬鍍層32帶有負電,因此,ITO電極9右側所對應的ITO輪廓影像為暗部。由於ITO電極斷路部分不帶電,無法與其下之黑色鍍層形成足夠電壓差,因此ITO電極9之斷路部分所對應的ITO輪廓影像為亮部。此外,雖然ITO電極9斷路部分之左側(ITO電極左側)仍具有ITO電極,但因未與端電極7和引線8電性耦接,所以ITO電極左側對應的ITO輪廓影像為亮部。藉由上述方式,吾人能由ITO電極的輪廓影像,得知ITO電極具有斷路部分以及斷路部分開始的位置(即ITO電極右側與斷路部分交界處),這是因為在實際應用上,通常僅需得知ITO電極是否具有斷路以及斷路位置。As described in the embodiment of Fig. 2B, in some embodiments, the terminal electrode 7 and the lead 8 are disposed only on one side of the diaphragm, and the other side of the diaphragm is not provided with the terminal electrode 7 and the lead 8. In the embodiment shown in Fig. 3F, the ITO electrode 9 having the disconnecting portion is shown, and the photodetecting roller 3 is provided with the conductive ring 35 and the insulating ring 36 only on one side where the terminal electrode 7 and the lead 8 are disposed. In the present embodiment, the ITO electrode 9 is positively charged by the electrical coupling of the terminal electrode 7 and the lead 8. Further, the ferrous metal plating layer 32 is negatively charged, and therefore, the ITO contour image corresponding to the right side of the ITO electrode 9 is a dark portion. Since the ITO electrode disconnection portion is not charged, a sufficient voltage difference cannot be formed with the black plating layer under it, and therefore the ITO contour image corresponding to the disconnection portion of the ITO electrode 9 is a bright portion. Further, although the left side of the ITO electrode 9 (the left side of the ITO electrode) still has an ITO electrode, since it is not electrically coupled to the terminal electrode 7 and the lead 8, the corresponding ITO contour image on the left side of the ITO electrode is a bright portion. By the above method, we can know from the contour image of the ITO electrode that the ITO electrode has a disconnected portion and a position at which the disconnected portion starts (ie, the junction between the right side of the ITO electrode and the disconnected portion), because in practical applications, usually only It is known whether the ITO electrode has an open circuit and a disconnected position.
第3G圖為本揭露光電檢測系統之實施例的Z軸方向視圖。在第3G圖所示之實施例中,端電極7和引線8僅設置於膜片之一側,而膜片之另一側並未設置端電極7和引線8。光電檢測滾輪3之中,未設置端電極7和引線8之該側對應地未設置導電環以及絕緣環。Figure 3G is a Z-axis view of an embodiment of the photodetection system of the present disclosure. In the embodiment shown in Fig. 3G, the terminal electrode 7 and the lead 8 are disposed only on one side of the diaphragm, and the other side of the diaphragm is not provided with the terminal electrode 7 and the lead 8. Among the photodetecting rollers 3, the side of the terminal electrode 7 and the lead 8 are not provided, and the conductive ring and the insulating ring are not provided correspondingly.
第4圖為本揭露光電檢測系統之另一實施例的示意圖。不同於第2A圖(或第2B圖)所示之光電檢測系統,第4 圖所示之光電檢測系統1包括複數光電檢測滾輪3,光電檢測系統1之其他構成元件與第2A圖(或第2B圖)所示之光電檢測系統相同,在此不再贅述。如第4圖所示,當膜片5在複數光電檢測滾輪3滾動時,光源12產生光線,經分光器BS分光之後,形成射入光電層之入射光,反射光穿透分光器BS之後,相機10接收反射光並形成ITO電極的輪廓影像。Figure 4 is a schematic view of another embodiment of the photodetection system of the present disclosure. Photodetection system different from Figure 2A (or Figure 2B), 4th The photodetection system 1 shown in the figure includes a plurality of photodetection rollers 3, and other constituent elements of the photodetection system 1 are the same as those of the photodetection system shown in FIG. 2A (or FIG. 2B), and are not described herein again. As shown in FIG. 4, when the diaphragm 5 rolls over the plurality of photodetecting rollers 3, the light source 12 generates light, and after being split by the beam splitter BS, incident light incident on the photovoltaic layer is formed, and after the reflected light passes through the beam splitter BS, Camera 10 receives the reflected light and forms a contour image of the ITO electrode.
本揭露較佳實施例已由說明書搭配所附圖式揭露如上,本領域具有通常知識者應能知悉,在不脫離本發明及申請專利範圍揭露之範疇及精神的前提下,當能作些許變動、增刪及替換。此外,本揭露申請專利範圍揭示之方法步驟僅用於說明本揭露之光電檢測方法,並非用於限定該方法之步驟次序,本領域具有通常知識者應能知悉,在不脫離本發明及申請專利範圍揭露之範疇及精神的前提下,當能作些許變動、增刪及替換。The present invention has been described with reference to the accompanying drawings, and it should be understood by those of ordinary skill in the art that the present invention can be modified without departing from the scope and spirit of the invention and the scope of the claims. , additions, deletions and replacements. In addition, the method steps disclosed in the scope of the disclosure are only for explaining the photodetection method of the present disclosure, and are not intended to limit the order of steps of the method, and those skilled in the art should be able to know without departing from the invention and the patent application. Under the premise of the scope and spirit of the scope, some changes, additions, deletions and replacements can be made.
1‧‧‧光電檢測系統1‧‧‧Photoelectric detection system
2‧‧‧電路旋轉連接器2‧‧‧Circuit Rotating Connector
3‧‧‧光電檢測滾輪3‧‧‧Photoelectric detection wheel
4‧‧‧外部電源4‧‧‧External power supply
5‧‧‧膜片5‧‧‧ diaphragm
6‧‧‧導電圖案6‧‧‧ conductive pattern
7‧‧‧端電極7‧‧‧ terminal electrode
8‧‧‧引線8‧‧‧ lead
9‧‧‧ITO電極9‧‧‧ITO electrodes
10‧‧‧相機10‧‧‧ camera
11‧‧‧電子計算機11‧‧‧Electronic computer
Claims (10)
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| TW102137250A TWI470251B (en) | 2013-10-16 | 2013-10-16 | Photoelectric detection system |
| CN201310583064.4A CN104569712B (en) | 2013-10-16 | 2013-11-18 | Photoelectric detection system |
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| TW102137250A TWI470251B (en) | 2013-10-16 | 2013-10-16 | Photoelectric detection system |
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| TWI470251B true TWI470251B (en) | 2015-01-21 |
| TW201516433A TW201516433A (en) | 2015-05-01 |
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| TWI648547B (en) | 2018-04-19 | 2019-01-21 | 佐臻股份有限公司 | Test equipment for millimeter wave circuit devices |
| CN108594042B (en) * | 2018-04-23 | 2021-04-02 | 张家港康得新光电材料有限公司 | Online electrification detection method and detection system for PDLC film |
| KR102784795B1 (en) * | 2022-12-22 | 2025-03-21 | 일진제강(주) | Apparatus and method for inspecting surface defects |
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| US6498597B1 (en) * | 1998-10-28 | 2002-12-24 | Fuji Photo Film Co., Ltd. | Continuously displayable scroll-type display |
| CN101876691A (en) * | 2009-11-20 | 2010-11-03 | 清华大学 | Magnetoelectric property test system and test method of multiferroic thin film material |
| TW201217795A (en) * | 2010-10-21 | 2012-05-01 | Metal Ind Res & Dev Ct | preventing scratches on the thin film to be measured, because the thin film to be measured will be will be continuously rubbed against the flat peripheral surface of the contact elements |
| CN102455365A (en) * | 2010-10-22 | 2012-05-16 | 财团法人金属工业研究发展中心 | Device for measuring the transport speed of a substrate in a roll-to-roll apparatus and method therefor |
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| US5504438A (en) * | 1991-09-10 | 1996-04-02 | Photon Dynamics, Inc. | Testing method for imaging defects in a liquid crystal display substrate |
| JP3723845B2 (en) * | 2002-03-26 | 2005-12-07 | 国立大学法人富山大学 | Method and apparatus for measuring film thickness of organic thin film used in organic electroluminescence device |
| CN1963428B (en) * | 2005-11-11 | 2010-11-03 | 财团法人工业技术研究院 | detection method and system of flexible display element |
| CN100555520C (en) * | 2007-04-26 | 2009-10-28 | 南京华显高科有限公司 | Method and device for detecting and repairing aluminum film electrode defect and broken line |
| CN202196010U (en) * | 2011-09-06 | 2012-04-18 | 南昌欧菲光科技有限公司 | Instrument provided with reference signal and used for on-line multi-point monitoring optical characteristics of thin film |
| CN102937598A (en) * | 2012-11-12 | 2013-02-20 | 广州南沙华卓化工有限公司 | Method and device for ultraviolet optic online automatic detection of indium tin oxide (ITO) membrane circuit pattern defect information |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6498597B1 (en) * | 1998-10-28 | 2002-12-24 | Fuji Photo Film Co., Ltd. | Continuously displayable scroll-type display |
| CN101876691A (en) * | 2009-11-20 | 2010-11-03 | 清华大学 | Magnetoelectric property test system and test method of multiferroic thin film material |
| TW201217795A (en) * | 2010-10-21 | 2012-05-01 | Metal Ind Res & Dev Ct | preventing scratches on the thin film to be measured, because the thin film to be measured will be will be continuously rubbed against the flat peripheral surface of the contact elements |
| CN102455365A (en) * | 2010-10-22 | 2012-05-16 | 财团法人金属工业研究发展中心 | Device for measuring the transport speed of a substrate in a roll-to-roll apparatus and method therefor |
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| CN104569712A (en) | 2015-04-29 |
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