TW201217795A - preventing scratches on the thin film to be measured, because the thin film to be measured will be will be continuously rubbed against the flat peripheral surface of the contact elements - Google Patents

Abstract

A thin film electrical measurement apparatus comprises a measurement unit and a reading unit. The measurement unit comprises two cylindrical contact elements spaced from each other , and each contact element has a flat peripheral surface which is electrically conductive. A thin film to be measured is continuously contacted and electrically connected with the peripheral surfaces of the two contact elements, and the section of the thin film to be measured located between the two contact elements is defined as a section to be measured. The reading unit is electrically connected with the two contact elements of the measurement unit to measure the electrical characteristics for the section to be measured of the thin film to be measured. Because the thin film to be measured will be continuously rolled, that is, the thin film to be measured will be continuously rubbed against the peripheral surface of the contact elements, the flat peripheral surface is able to effectively prevent scratches on the thin film to be measured.

Description

201217795 VI. Description of the Invention: [Technical Field] The present invention relates to an electrical measuring device, and more particularly to a thin film electrical measuring device. [Prior Art] Referring to Figure 1, a conventional thin film electrical measuring device 11 includes a rotatable roller 111, a plurality of metal rings 112 circumferentially spaced from each other on the roller U1, and a plurality of electrical connections to each of the two. An electric resistance meter 113 on the metal ring 112. In the actual measurement, a film 12 to be tested that is continuously rolled is brought into contact with the metal ring 112, and the surface resistance of the film 12 to be tested is measured by the metal ring 112. In order to be able to actually contact the film sheet 12 to be tested, it will slightly protrude from the circumferential surface of the roller magazine. Then, the resistance value of each section of the film sheet 12 to be tested is measured by the corresponding resistance meter 113, thereby confirming whether the resistance value of each section of the film sheet 12 to be tested is uniform.

/ However, since the metal ring 112 protrudes from the roller m, and the film piece 12 to be tested is continuously rolled, the metal ring 112 continuously rubs and scratches the film piece 12 to be tested. After the measurement, scratches and indentations are often left on the film sheet 12 to be tested, thereby affecting the quality of the product. Therefore, how to improve the above disadvantages has been an important goal of the continuous efforts of the technical field. SUMMARY OF THE INVENTION Accordingly, it is an object of the present invention to provide a thin film electrical measuring device that is less likely to scratch a thin film to be tested. 201217795

Thus, the film of the present invention is electrically rolled, the film to be tested, the early element' and a reading unit. Section. The measuring unit comprises two spaced-apart and cylindrical contact members, each of the contact members having an electrically conductive and flat circumferential surface, the film to be tested being continuously contacted and electrically connected to the two a section on the circumferential surface of the contact member and defining a portion of the film to be tested between the two contacts is defined as a second contact member to be tested to be electrically connected to the measuring unit The electrical characteristics of the section to be tested of the film to be tested are measured. The effect of the present invention is that the film to be tested is contacted by the circumferential surface of the contact member, and the electrical characteristics of the film to be tested are measured by the reading unit. Since the film piece to be tested is continuously rolled, that is to say, the film piece to be tested is continuously rubbed against the circumferential surface of the contact piece, the film to be tested can be effectively avoided by the flat circumferential surface. The piece is wounded. The above and other technical contents, features and effects of the present invention will be apparent from the following detailed description of the preferred embodiments of the drawings. Before the present invention is described in detail, it is to be noted that in the following description, similar elements are denoted by the same reference numerals. Referring to Figures 2 and 3, a first preferred embodiment of the thin film electrical measuring device of the present invention comprises a measuring unit 3 and a reading unit 4. The measuring unit 3 includes a contact piece 31 which is disposed on a fixed object 6 at two intervals and has a cylindrical shape in 201217795. Each of the contacts 31 has a circumferential surface 311 which is electrically conductive and flat. Contacting the film 2 to be tested that is continuously scrolled onto the circumferential surface 311 of the two contacts 31 to electrically connect the film 2 to be tested to the circumference s 311 ± of the two contacts 31, and A section in which the thin film 2 to be tested is located between the two contacts 31 is defined as a section to be tested n. The reading unit 4 is electrically connected to the two contacts 31 of the measuring unit 3 to measure the electrical characteristics of the section 21 to be tested of the film sheet 2 to be tested. In the preferred embodiment, the number of the contact members 31 is two. Of course, more than two contact members 31 may be provided, so that the effect of repeating the measurement is not limited thereto.

^ In addition, the reading unit A 4 is a resistance meter, and thereby measuring the resistance value of the area to be tested 21, of course, the reading unit 4 can also use other instruments to measure the film 2 to be tested. The capacitance value or other electrical characteristics are not limited to the disclosure of the preferred embodiment. When the film sheet 2 to be tested is continuously rolled to move in the direction of the arrow as shown in FIG. 2, the contact member 31 can continuously contact the film sheet 2 to be tested, thereby continuously measuring The film 2 to be tested is located in a phantom electrical characteristic of the region to be tested (in the preferred embodiment, a resistance value), thereby confirming whether the overall electrical characteristics of the film sheet 2 to be tested are uniform. In the preferred embodiment, by the flat design of the circumferential surface 311 of the contact member 31, it is possible to prevent the 4-phase film sheet 2 from rubbing and causing scratches when it comes into contact with the contact member. Referring to FIG. 4 and FIG. 5, a second preferred embodiment of the thin film electrical measuring device of the present invention is substantially similar to the first preferred embodiment, except that the preferred embodiment further includes a tension adjustment. Unit 5. The tension adjustment sheet 201217795 兀5 〇 — — — — — — — — 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 And a tension detector that is in contact with the film 2 to be tested to detect the tension of the film 2 to be tested, and is electrically connected to the tension detector 53 and the driving roller 51. A speed controller that adjusts the rotational speed of each of the driving rollers 51. Each of the I wheels 52 is adapted to cooperate with the corresponding active roller 51 to press against the rolling film 2, thereby moving the film 2 to be tested toward the arrow of FIG. 4 to move the ft 4 to the active roller 5 i The adjacent contact piece η defines the to-be-formed diaphragm 2 as a trailing section 22 between the active roller 5! and the adjacent contact piece ^. In addition, the two-contact member 31 of the measuring unit 3 can be selected as a rotatable roller. In the preferred embodiment, the contact member 31 of the measuring unit 3 is a rotatable passive roller. The contact piece 31 can be rotated as the film piece 2 to be tested is interlocked, so that the frictional force can be further reduced to avoid abrasion of the film piece 2 to be tested. In other applications, the contact 31 can be the active roller' and can rotate at the same speed as the film sheet 2 to be tested. The measuring unit 3 further includes two rotary joints 32 respectively electrically connected to each of the contacts 31. The reading unit 4 is electrically connected to the workpiece through the two rotary joints 32. Of course, the reading unit 4 can also be rescued by the elastic piece (the figure is not shown/other structures are electrically connected to the contact piece 31 i, and the example is disclosed). The active roller: position, so that the film piece 2 to be tested can be closely contacted with the household (4). As shown in FIG. 4, the to-be-tested section of the film 2 to be tested: 201217795 and Ren-Haoyi District The segment 22 is formed with a refreshing angle of less than 18 degrees, because if the angle 0 is greater than 180 angstroms, it is difficult to ensure that the film sheet 2 to be tested can surely come into contact with the contact member 31. In the embodiment, the aspect in which the to-be-tested section 21 and the two-scraping section 22 form the same angle 0 is described. Of course, the to-be-tested section 21 can also be respectively associated with the towed section. 22 is formed at different angles (less than 18 degrees), and is not limited to the disclosure of the preferred embodiment. Referring to Figure 6, each of the contacts 31 of the preferred embodiment further has a

A shaft 312 made of a lightweight material, and a flat metal surface 313' wrapped around the surface of the shaft buckle are formed on the outer surface of the metal layer 313. In the preferred embodiment, the axis 312 is illustrated by the hollow tube. However, it is not limited thereto, and may be a solid cylinder. The metal layer 3U is coated on the shaft 312. The metal forged layer, but not limited to ^, may also be a metal thin-walled tube that is looped over the shaft 312. Preferably, the metal is selected from the group consisting of low-impedance metals or alloys such as gold, silver, copper, and the like, and alloys containing the above elements. Preferably, the circumferential surface 3U is subjected to a mirror polishing treatment to reduce the abrasion of the film to be tested 42. In the preferred embodiment, the axis, 312 is made of a metal alloy, and the metal layer 313 is a chrome plate formed by plating, which has the advantages of light weight, high strength and low strength. Referring to FIG. 4 and FIG. 5', during the measurement, the speed controller 54 can adjust the rotational speeds of the two active rollers 51, thereby changing the tension values of the to-be-measured section and the _ section 22 of the film to be tested. Of course, the main purpose is to make the 21-dimensional (four) tension of the section to be tested to ensure the amount of money (the electrical characteristics will vary depending on the tension of 201217795). Since the dragging section 22 and the to-be-tested section 21_force will coincide, when the tension predator detects that the tension value of the corresponding towed section 22 is lower than the preset tension value, It is indicated that the force of the section to be tested 21 (four) has been reduced, and the speed controller 54 adjusts and causes the speed of the active roller 5 ι on the right side of FIG. 4 to be higher than that of the left side of the active roller 51, thereby increasing the section 21 to be tested and The overall tension value of the section 22 is dragged. Conversely, when the tension detector 53 detects that the tension of the corresponding drag section 22 is higher than the preset tension value, the speed controller 54 adjusts and lowers the speed of the active roller 51 located on the right side of FIG. In the case of the active roller 51 on the left side, the tension value of the section 21 to be tested and the tow section 22 is thereby reduced. In addition to the advantages of the first preferred embodiment, the preferred embodiment of the present invention can also maintain the preset portion of the film to be tested 2 in the preset by the tension adjusting unit 5 The tension value is used to maintain the measured stable February t* by the rotatable contact member 3 i to further reduce the friction between the film to be tested and the contact member 31 to reduce the scratch The situation of the film sheet 2 to be tested is produced. Referring to FIG. 7 and the following, a third embodiment of the thin film electrical measuring device of the present invention is substantially similar to the second preferred embodiment. The difference is that the preferred embodiment further includes a The vacuum chamber 8 for accommodating the measuring unit 3 and the film sheet 2 and forming a vacuum environment therein is accommodated. In the preferred embodiment, the end of each of the contact members 31 is passed through the cavity 8 and extended to the atmosphere side by the rotary mechanical guide 2 member 81 (refer to the Taiwan Patent Publication No. 1247555). The rotary mechanical introduction element 201217795: an 81 can maintain the vacuum in the vacuum chamber 8 without leaking, and then connect one end of a rotary joint 32 to each of the contacts 31 on the atmospheric side, each of which is- The other end of the rotary joint 32 is connected to the reading unit 4. Further, in the tension adjusting unit 5, it is disposed therein - on the active roller 51 = the torque detector 55 replaces the tension detector 53 (see Fig. 4). When the moving film 5 is rolling the film 2 to be tested, the film 2 to be tested also generates a relative force 7' in the opposite direction with respect to the driving roller 51. The torque in the active roller 51 on the right side of the 7 t is used to detect the relative force 7 applied to the active roller 51, and the relative force 7 is maintained at a fixed value. The tension value of the film sheet 2 to be tested is kept constant. Therefore, in the preferred embodiment, the detection mode is different from that of the second preferred embodiment, but the rotation speed difference of the driving roller 51 is adjusted by the speed controller 54 to maintain the waiting. The tension value of the section 21 to be tested of the film sheet 2 is measured. In addition to the advantages of the first preferred embodiment and the second preferred embodiment, the preferred embodiment can perform on-line measurement of electrical characteristics in a vacuum environment to avoid measurement errors caused by environmental pollution. It is to be noted that the first preferred embodiment and the second preferred embodiment can also be disposed in the true cavity 8, which is not limited by the preferred embodiment. According to the design described above, the thin film electrical measuring device of the present invention has the following advantages in practical use: (1) the film sheet 2 to be tested is not easily scratched: due to the circumferential surface 311 of the contact member 31 The design of the flat shape can reduce the friction between the contact piece 31 and the film 2 of the film 2117795 to be tested to avoid scratching the film piece 2 to be tested. (2) Measuring stability is good: The tension adjusting unit 5 is configured to enable the test section 21 of the diaphragm 2 to be maintained at a preset tension value to maintain the stability of the measurement. (3) It can be applied to a vacuum environment: the measuring unit 3 and the thin sheet 2 to be tested can be disposed in the vacuum chamber 8, thereby enabling on-line measurement in a vacuum environment to avoid environmental pollution Measuring error. In summary, the thin film electrical device of the present invention is in contact with the film 2 to be tested by the circumferential surface 311 of the contact member 31 and utilizes the electrical characteristics of the reading unit 4 = the paste 2 to be used. Since the film piece 2 to be tested is rolled up ‘that is, the thin film 2 to be tested will continue to be

The circumferential surface 311 of the contact member 31, M, T Αμ, is thickly rubbed against each other, and the flattened circumferential surface j 11 can effectively prevent the film (4) 2 to be tested from being damaged, so that the object of the present invention can be achieved. However, the above description is only for the preferred embodiment of the present invention, and the scope of the present invention is not limited thereto, that is, the simple equivalent change and modification of the patent application scope and the description of the invention according to the present invention. All remain within the scope of the invention patent. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a top plan view showing a conventional thin film electrical measuring device; FIG. 2 is a side view showing a first preferred embodiment of the thin film electrical measuring device 10 201217795 of the present invention; BRIEF DESCRIPTION OF THE DRAWINGS FIG. 3 is a top plan view of a thin film electrical measuring device of the present invention. FIG. 4 is a second preferred embodiment of a side view; FIG. 2 is a cross-sectional view showing the contact in the second preferred embodiment

Figure 7 is a side elevational view showing a second preferred embodiment of the thin film electrical measuring device of the present invention; and Figure 8 is a partial cross-sectional view for assistance in explaining the third preferred embodiment. 201217795 [Explanation of main component symbols] 2 ...... ...··································································矣 section 53... ...tension detector 3...... .... Measure unit 54 ... speed controller 31 ······...contact piece 55...torsion detector 311...-circumferential surface 6 ....... Fixing object 312... ---- Axis 7 . . . ... Relative force 313... - Metal layer 8 . . . ... Vacuum chamber 32... ... •... Rotary joint 81... Rotary mechanical introduction 4 .............Read unit element 5 ........ Tension adjustment unit

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Claims (1)

201217795 VII. Patent application scope: ^ A thin film electrical measuring device, suitable for measuring - continuously rolled film to be tested, the thin film electrical measuring device comprises: 7L in the test, including two-phase interval setting And the cylindrical contact member has an electrically conductive and flat circumferential surface per contact piece, and the film to be tested/film sheet is continuously contacted and electrically connected to the circumferential surface of the two contact members, and The section of the film to be tested between the two contacts is defined as a section to be tested; and the shouldering unit is electrically connected to the measuring unit to measure the section to be tested of the film to be tested. Electrical characteristics. The thin film electrical measuring device according to the above aspect of the invention, wherein the two-contact member of the measuring unit is a rotatable roller, and the measuring unit π further comprises two electrically connected to each touch. a rotary joint of the connector, the reading unit is electrically connected to the two contacts through the two rotary joints. 3. The film electrical measuring device according to claim 2, further comprising a force adjusting unit, wherein the tension adjusting unit comprises two active rollers respectively disposed on opposite sides of the measuring unit, and a setting a tension detector between the active roller and the adjacent contact member and contacting the film to be tested, and an electrical connection between the tension detector and the active roller and respectively adjusting each of the active rollers a speed controller of the speed, each active roller and an adjacent contact member define the film to be tested as a dragging section between the active roller and an adjacent contact, the speed controller enables the The two active rollers generate a rotational speed difference to adjust the tension between the to-be-tested portion of the film to be tested and the towed section. 13 201217795 4· According to the second paragraph of the patent application scope, the film electrical quantity measurement device includes a force adjustment unit, and the tension adjustment "^ 哕吾,目丨丨—4 C 早兀匕二二 respectively set in the amount Measuring the active roller on the opposite side of the 7th, the torsion detector which is disposed on the roller and can detect the relative force between the active roller and the active Tianshan k, the Ding only/guide waist piece, And - the electrical connection ... + ^ A is electrically connected to the torsion detector and the active roller and can adjust each main „The speed control of the 纟 纟 滚轮 滚轮 转速 ' 母 'Female-active roller and adjacent contact pieces define the film to be tested - the drag section between the active roller and the adjacent contact piece The two active rollers can generate a rotational speed difference to adjust the tension between the to-be-tested portion of the film to be tested and the towed section. 5. The electrical measurement of the thin film according to claim 3 or 4 The device adjusts the pressure-receiving film to be tested. The tension adjusting unit further includes two pressure rollers respectively corresponding to each of the driving rollers, and each of the pressure rollers cooperates with the corresponding driving roller to press The thin film electrical measuring device according to claim 5, further comprising a vacuum chamber for accommodating the measuring unit and the thin film to be tested and capable of forming a vacuum environment inside. 7. The thin film electrical measuring device according to claim 1, wherein the 'each-contact member further has an axial center, and a metal layer surrounding the surface of the axial center, the circumferential surface is formed. On the metal layer. The thin film electrical measuring device according to claim 7, wherein the metal layer is a metal plating layer, and the metal layer may be selected from the group consisting of gold, silver, copper, and an alloy containing the above elements. 9. The thin film electrical measuring device according to claim 7, wherein 14 201217795, the shaft is a hollow tube made of aluminum alloy, and the metal layer is a chrome bond layer formed by plating. 1 . The thin film electrical measuring device according to claim 1, wherein the reading element is an electric resistance meter. 15