TWI466225B - Suspended air float working platform - Google Patents

Description

Suspended air floating work platform

The invention relates to an air floating platform, in particular to a suspended air floating working platform capable of adsorbing a workpiece in a suspended state by using air pressure.

In the modern technology product process, many electronic components are easily damaged by touch, such as glass substrates for liquid crystal display (LCD) processes, wafers for IC wafer processes, or widely used. Printed circuit boards (PCBs), etc., therefore, care must be taken during processing or inspection to avoid damage to electronic components caused by touch.

In view of this, referring to FIG. 1 , an air floating platform 1 has been developed, which can suspend the object to be processed 91 above the air floating platform 1 and process or detect it in a non-contact manner. The platform 1 includes a body 11 , a gas chamber 12 formed inside the body 11 , a plurality of air blowing holes 13 forming the body 11 and communicating with the air chamber 12 , and a gas supply hole 14 connecting the air chamber 12 , and being connected with the air supply hole 14 The positive pressure output device 92 of the air hole 14 feeds the gas into the air chamber 12 through the air supply hole 14 through the positive pressure output machine 94, and then distributes the gas to the communicating air blowing hole 14 through the air chamber 12, thereby generating an upward blowing force support. The object 91 is such that the object 91 is suspended above the air floating platform 1 in a suspended manner.

Therefore, the object of the present invention is to provide a suspended air floating working platform capable of absorbing a workpiece at a position below the platform to suspend the workpiece.

Therefore, the suspended air floating working platform of the present invention is adapted to connect a positive pressure source and a negative pressure source for adsorbing a workpiece under the platform. The suspended air floating work platform comprises a bottom plate and a gas chamber seat. The bottom plate comprises a bottom plate body, a plurality of first air holes and a second air hole extending through the bottom plate body. The bottom plate body has a bottom surface of the bottom plate body and a bottom surface of the bottom plate body, and the air chamber seat is stacked on the top surface of the bottom plate body and is available for the positive The pressure source and the negative pressure source are connected. The gas chamber seat forms a positive pressure air chamber connecting the first air hole and the positive pressure source and a negative pressure air chamber connecting the second air hole and the negative pressure source, and the negative pressure provided by the negative pressure source can be on the bottom surface of the bottom plate body The two pores generate a negative pressure for adsorbing the workpiece, and the positive pressure provided by the positive pressure source can generate a positive pressure on the first air hole of the bottom surface of the bottom plate body, so that the workpiece and the bottom surface of the bottom plate body are suspended at a distance.

A feature of the suspended air-floating working platform of the present invention is that the aperture of the first air hole on the bottom surface of the bottom plate body is smaller than the aperture of the second air hole on the bottom surface of the bottom plate body.

A feature of the suspended air floating working platform of the present invention is that the air chamber seat comprises a cover plate and an air distribution plate, and the cover plate, the air distribution plate and the bottom plate are superposed on each other from top to bottom, and the cover plate and the air flow are A negative pressure air chamber is defined between the distribution plates, a positive pressure air chamber is defined between the air distribution plate and the bottom plate, and the negative pressure air chamber and the positive pressure air chamber are not in communication with each other.

The effect of the invention is that by the air chamber arrangement of the air chamber seat and the bottom plate and the cooperation of the holes, a negative pressure capable of adsorbing the workpiece and a positive pressure lower than the negative pressure can be generated on the bottom surface of the bottom plate of the platform, wherein the negative pressure can make the workpiece It is adsorbed on the bottom surface of the bottom plate of the platform so that it can be tested or processed under the workpiece, while the positive pressure can push the workpiece away from the bottom surface of the bottom plate, leaving a gap between the workpiece and the bottom surface of the bottom plate to avoid direct contact with the surface of the workpiece. The bottom surface of the bottom plate is in contact with it and causes scratches.

The above and other technical contents, features and advantages of the present invention will be apparent from the following detailed description of the preferred embodiments.

Referring to FIG. 2 and FIG. 3, the suspended air floating working platform 2 of the present invention is adapted to connect a positive pressure source 21 and a negative pressure source 22 (not shown) for adsorbing a workpiece 8 under the platform 2, The preferred embodiment of the invention comprises a bottom plate 3 and a gas chamber seat 4, and the gas chamber seat 4 is stacked on the bottom plate 3 for connecting a positive pressure source 21 (such as a gas pump) and a negative pressure source 22 (such as a blower), and The bottom plate 3 and the air chamber seat 4 cooperate to form a positive pressure air chamber 23 and a negative pressure air chamber 24, so that the bottom surface of the bottom plate 3 generates negative pressure and positive pressure, and other detailed configurations are as follows.

In the present embodiment, the suspended air floating work platform 2 is mounted on a support frame 6 for forming an operation space below the bottom plate 3 of the platform 2, and the operation space is available for the workpiece 8 adsorbed by the platform 2. Processing or testing, but the erection of the platform 2 is not limited to the support frame 6, and the suspended air floating work platform 2 can also be processed or detected in combination with other process platforms or implement devices.

Referring to FIG. 4 and FIG. 5, the bottom plate 3 includes a substantially square bottom plate body 31, a plurality of first air holes 32, and a plurality of second air holes 33. The bottom plate body 31 has a bottom plate body top surface 311 and a bottom plate body bottom surface 312. The air hole 32 and the second air hole 33 penetrate the top surface 311 and the bottom surface 312 of the bottom plate body 31 up and down and are evenly spaced on the bottom plate body 31.

The air chamber seat 4 includes a cover plate 41 and an air distribution plate 42. The cover plate 41 is stacked on the air distribution plate 42. Referring to FIG. 6 and FIG. 7, the cover plate 41 includes a top wall 411, a surrounding wall 412, a plurality of air guiding tube segments 415, and a plurality of air holes 416 extending through the top wall 411. A suction hole 417. The surrounding wall 412 is formed by extending downward from the edge of the top wall 411, and the surrounding wall 412 and the top wall 411 cooperate to form a plenum space 413, and the air guiding tube section 415 is hollow tubular. The bottom surface of the top wall 411 corresponds to the air vent 416. The cover hole 416 extends downwardly, and the air supply hole 416 is connected to the positive pressure source 21, and the air suction hole 417 is connected to the negative pressure source 22. In addition, the cover plate 41 further includes a plurality of bottom surfaces extending from the bottom surface of the top wall 411 and connected. Around the ribs 414 of the wall 412, the ribs 414 are vertically and horizontally staggered to provide a better structural strength of the entire cover plate 41. In the present embodiment, the air venting holes 417 are disposed at the center of the top wall 411. The air vent 416 is disposed around the air vent 417. The position and number of the air vent 416 and the air vent 417 are not limited thereto, and only one air vent 416 and one air vent 417 may be disposed. An exhaust pipe socket 7 is disposed on the air suction hole 417 to facilitate connection of the negative pressure source 22.

The air distribution plate 42 is stacked under the cover plate 41 between the cover plate 41 and the bottom plate 3. Referring to FIG. 8 and FIG. 9, the air distribution plate 42 has a plate body 420, a plurality of air guiding slots 421, a plurality of first ventilation holes 422, and a plurality of second ventilation holes 423. The plate body 420 has a plate top surface 426 and a plate. The bottom surface 427 of the body is formed by the bottom surface 427 of the plate body, and has a plurality of first channels 424 and a plurality of second channels 425. The first channel 424 and the second channel 425 are designed to communicate with each other vertically. The first vent hole 422 and the second vent hole 423 penetrate the plate body 420, and the bottom end of the second vent hole 423 communicates with the air guiding groove 421.

Referring to FIG. 10 and FIG. 11, when the cover 41, the air distribution plate 42 and the bottom plate 3 are stacked from top to bottom, between the cover 41 and the air distribution plate 42, the air chamber space 413 and the air flow of the cover 41 The plate top surface 426 of the distribution plate 42 forms a negative pressure air chamber 24, and the air suction hole 417 of the top wall 411 of the cover plate 41 communicates with the first ventilation hole 422 of the air distribution plate 42 through the negative pressure air chamber 24. The first venting opening 422 of the air distribution plate 42 is in communication with the second air hole 33 of the bottom plate 3. Between the air distribution plate 42 and the bottom plate 3, the air guiding groove 421 of the air distribution plate 42 and the bottom surface 311 of the bottom plate 3 form a positive pressure air chamber 23, and the bottom end of the air guiding tube portion 415 of the cover plate 41 respectively correspond to the communication airflow distribution. The second venting opening 423 of the plate 42 thus causes the air venting opening 416 of the top wall 411 of the cover plate 41 to communicate with the second venting opening 423 of the air distribution plate 42 by the air guiding tube section 415, and by the air distribution plate 42 The second vent hole 423 communicates with the air guiding groove 423 such that the positive pressure air chamber 23 communicates with the first air hole 32 of the bottom plate 3.

When the positive pressure source 21 and the negative pressure source 22 are disposed in the chamber 4 and are activated, the negative pressure provided by the negative pressure source 22 communicates with the first vent 422 of the air distribution plate 42 via the negative pressure plenum 24, and then The first vent hole 422 communicates with the second air hole 33 of the bottom plate 3, so that the second air hole 33 of the bottom plate 3 generates a negative pressure having an adsorption force, so that the workpiece 8 can be adsorbed under the bottom plate 3, and the positive pressure source 21 provides The positive pressure is connected to the second venting hole 423 of the air distribution plate 42 via the air guiding tube section 415 of the cover plate 41, and then communicates with the positive pressure plenum 23 and the first air hole 32 of the bottom plate 3 via the second venting hole 423, thereby being on the bottom plate. The first air hole 32 of 3 generates a positive pressure of blowing, and while the workpiece 8 is adsorbed on the bottom surface of the bottom plate 3, the workpiece 8 can be blown, and the workpiece 8 is pushed away from the bottom surface 312 of the bottom plate body, so that the workpiece 8 and the bottom surface of the bottom plate 3 are Keep a gap between the open spaces.

As described above, the design cover plate 41, the air distribution plate 42 and the bottom plate 3 are stacked on each other to form a positive pressure air chamber 23 and a negative pressure air chamber 24 which do not interfere with each other, so that the first air hole 32 can generate positive pressure and does not interfere with the second. The vent 33 creates a negative pressure that will allow the platform 2 to adsorb the workpiece 8 disposed below the platform 2 at an interval.

It should be noted that in order to allow the workpiece 8 to be adsorbed under the platform 2 at intervals, the negative pressure chamber volume formed by the cover plate 41 of the present invention and the plate top surface 426 of the air distribution plate 42 is larger than that of the air distribution plate 42. The volume of the positive pressure chamber formed by the gas groove 421 and the top surface 311 of the bottom plate body, and the diameter of the suction hole 417 are larger than the diameter of the gas transmission hole 416. Moreover, the first gas hole 32 and the second gas hole 33 are located on the top surface 311 of the bottom plate body. The apertures are designed to be the same, and the apertures located on the bottom surface 312 of the bottom plate body are designed such that the apertures of the first air holes 32 are smaller than the apertures of the second air holes 33, and are used to make the positive pressure smaller than the negative pressure, so that the workpiece 8 can be spaced apart. It is adsorbed below the platform 2.

In addition, referring to FIGS. 4-9, the suspended air-floating work platform 2 is provided with a plurality of corresponding connecting holes 5 from the top to the bottom of the cover plate 41, the air distribution plate 42 and the bottom plate 3, and by the plurality of energy and the connecting holes. 5 mating latching members (not shown) for connecting the cover plate 41, the air distribution plate 42 and the bottom plate 3. In the present embodiment, a plurality of connecting holes 5 of different sizes are used, and are widely distributed correspondingly to the cover. The plate 41, the air distribution plate 42 and the bottom plate 3 will closely connect the cover plate 41, the air distribution plate 42 and the bottom plate 3. When the suspended air floating work platform 2 is used, air leakage will not easily occur.

Incidentally, in the present embodiment, the positive pressure air chamber 23 is located below the negative pressure air chamber 24, but in other embodiments, the relative positions of the positive pressure air chamber 23 and the negative pressure air chamber 24 are not In addition, when the platform 2 is in use, it can be matched with other jigs or stoppers, etc., and is disposed at the edge of the platform 2 for the workpiece 8 to abut or assist the positioning, so as to prevent the workpiece 8 from being adsorbed on the bottom surface of the bottom plate 3 The position is erratic, affecting the progress of inspection or processing operations.

In summary, the suspended air floating work platform 2 of the present invention is formed by stacking the cover plate 41, the air distribution plate 42 and the bottom plate 3 to each other to generate a positive pressure air chamber 23 and a negative pressure air chamber 24 which do not interfere with each other. The first air hole 32 of the bottom surface 312 of the bottom plate body generates a positive pressure and a negative pressure generated by the second air hole 33, and the aperture sizes of the first air hole 32, the second air hole 33, the air hole 416 and the air suction hole 417 are designed, and the positive pressure air chamber is used. 23 and the volume of the negative pressure gas chamber 24, the negative pressure and the positive pressure are adjusted, so that the workpiece 8 can be adsorbed on the bottom surface of the bottom plate 3 at a distance from the bottom surface 312 of the bottom plate body to be suspended, so that the workpiece 8 can be suspended. The operation of detecting or processing is performed below, and on the other hand, by providing a positive blowing pressure which is smaller than the negative pressure of adsorption, the workpiece 8 and the bottom surface 312 of the bottom plate body are still spaced apart to prevent the surface of the workpiece 8 from contacting the platform. 2, resulting in scratching, it is indeed possible to achieve the object of the present invention.

The above is only the preferred embodiment of the present invention, and the scope of the invention is not limited thereto, that is, the simple equivalent changes and modifications made by the scope of the invention and the description of the invention are All remain within the scope of the invention patent.

2. . . Suspended air floating work platform

twenty one. . . Positive pressure source

twenty two. . . Negative pressure source

twenty three. . . Positive pressure chamber

twenty four. . . Negative pressure chamber

3. . . Bottom plate

31. . . Base plate body

311. . . Top surface of the bottom plate body

312. . . Bottom plate body

32. . . First vent

33. . . Second air hole

4. . . Gas chamber seat

41. . . Cover

411. . . Top wall

412. . . Around the wall

413. . . Air chamber space

414. . . Rib

415. . . Air duct segment

416. . . Air hole

417. . . Venting hole

42. . . Air distribution plate

420. . . Plate body

421. . . Air guide

422. . . First vent

423. . . Second vent

424. . . First channel

425. . . Second channel

426. . . Top surface of the plate

427. . . Bottom of the plate

5. . . Connection hole

6. . . Support frame

7. . . Pumping socket

8. . . Workpiece

Figure 1 is a schematic cross-sectional view showing a conventional air floating platform;

Figure 2 is a perspective view showing the suspended air floating working platform of the present invention;

Figure 3 is an exploded perspective view showing the connection relationship of the components of the suspended air floating work platform;

Figure 4 is a perspective view showing the top surface of the bottom plate;

Figure 5 is a perspective view showing the bottom surface of the bottom plate;

Figure 6 is a perspective view showing the top surface of the cover;

Figure 7 is a perspective view showing the bottom of the cover;

Figure 8 is a perspective view showing the top surface of the air distribution plate;

Figure 9 is a perspective view showing the bottom surface of the air distribution plate;

Figure 10 is a top plan view showing the top surface of the suspended air floating work platform;

Figure 11 is a cross-sectional view taken along line 10-10 of Figure 10, illustrating the hole connection relationship of the suspended air floating work platform.

2. . . Suspended air floating work platform

twenty three. . . Positive pressure chamber

twenty four. . . Negative pressure chamber

3. . . Bottom plate

4. . . Gas chamber seat

41. . . Cover

42. . . Air distribution plate

6. . . Support frame

7. . . Pumping socket

8. . . Workpiece

Claims (14)

A suspended air floating working platform is adapted to connect a positive pressure source and a negative pressure source for adsorbing a workpiece under the platform, the suspended air floating working platform comprises: a bottom plate, including a bottom plate body a plurality of first and second air holes extending through the bottom plate body, the bottom plate body having a bottom surface of the bottom plate body and a bottom surface of the bottom plate body; and a gas chamber seat stacked on the top surface of the bottom plate body for the positive pressure The source and the negative pressure source are connected, the gas chamber seat forms a positive pressure air chamber connecting the first air hole and the positive pressure source, and a negative pressure air chamber connecting the second air hole and the negative pressure source, the gas The chamber base includes a stack of air distribution plates disposed on a top surface of the bottom plate body and a cover plate stacked on the air distribution plate, the air distribution plate being overlapped with the cover plate to define a negative pressure air chamber. And the air distribution plate and the bottom plate are stacked to define a positive pressure air chamber; and the negative pressure provided by the negative pressure source can generate a negative pressure for adsorbing the workpiece on the second air holes of the bottom surface of the bottom plate body, and The positive pressure source provides a positive pressure and can be applied to the bottom of the bottom plate body Such positive pressure of the first hole, so that the workpiece holding a plate spaced from the floating body to the bottom surface. The suspended air-floating working platform according to claim 1, wherein the first air holes have a smaller aperture on a bottom surface of the bottom plate body than the second air holes in a bottom surface of the bottom plate body. The suspended air-floating working platform according to claim 1, wherein the air distribution plate has a plate body and a pair of air guiding grooves arranged in a first air hole, the plate body having a plate top Face and the bottom of a plate, The air guiding groove is formed by the bottom surface of the plate body, and when the air distribution plate is stacked on the top surface of the bottom plate body, the air guiding groove and the top surface of the bottom plate body define the positive pressure air chamber, and the positive air chamber The pressure chamber communicates with the first air holes. The suspended air floating working platform according to claim 3, wherein the air distribution plate further has a plurality of first vent holes penetrating the plate body up and down and corresponding to the second air hole, when the cover plate is When the air distribution plate is overlapped, the negative pressure air chamber communicates with the second air holes via the first ventilation holes. The suspended air floating working platform according to claim 4, wherein the air distribution plate further has a second vent hole penetrating the plate body from the top of the plate body and communicating with the air guiding groove. . The suspended air-floating working platform according to claim 5, wherein the air guiding groove of the air distribution plate has a plurality of first channels and a plurality of second channels connecting the first channels, The first channel is aligned with the second channel pair and the first air hole is disposed. The suspended air floating work platform according to any one of the preceding claims, wherein the cover has a top wall and a surrounding wall extending downwardly from the top wall, The top wall defines a plenum space with the surrounding wall, and the plenum space forms the negative pressure plenum when the cover plate is stacked on the air distribution plate. The suspended air-floating working platform according to the seventh aspect of the invention, wherein the cover plate further has a gas transmission hole extending through the top wall and a guide extending downward from the top wall and communicating with the gas transmission hole. Trachea segment Connected to the positive pressure source, when the cover plate is coupled to the air distribution plate, the air pipe segment communicates with the positive pressure air chamber formed between the air guide groove and the top surface of the bottom plate body via the second ventilation hole. The suspension type air floating working platform according to claim 8, wherein the cover plate further has a suction hole penetrating the top wall and communicating with the air chamber space, and the air suction hole is connected to the negative pressure source. The suspended air-floating working platform according to claim 9, wherein the air venting aperture has a larger aperture than the air venting aperture. The suspension type air floating working platform according to claim 9, wherein the volume of the negative pressure air chamber is larger than the volume of the positive pressure air chamber. The suspension type air floating working platform according to claim 9 further includes a plurality of corresponding holes formed on the bottom plate, the air distribution plate and the cover plate for connecting the bottom plate and the air distribution plate. And the cover. The suspended air-floating working platform according to claim 9, wherein the first channels and the second channels are arranged in a vertically intersecting manner. The suspended air-floating working platform according to claim 9, wherein the second air holes and the first air holes are spaced apart from each other on the bottom plate body.