201041075 六、發明說明： 【發明所屬之技術領域】 本發明是有關於-種氣浮平台，特別是指_種利用氣 壓而能吸附工件呈懸吊狀態的懸吊式氣浮工作平台。 【先前技術】 在現代科技的產品製程中，諸多電子零組件是容易因 觸碰而受損的’例如：用於液晶顯示器（LCD)製程之玻璃基 板、用於ic晶片製程之晶圓或者是可廣泛應用的印刷電路 〇 板（PCB)等，因此’在加工或檢測的過程中必須十分小心， 要避免觸碰而造成電子零組件的損害。 有鑑於此，參閱圖1，目前已發展出一種氣浮式平台^ ，疋可以將欲處理之物件91懸空地撐於氣浮式平台丨上方 ，以非接觸的方式進行加工或檢測，氣浮式平台丨包括一 本體11、-形成在本體U „之氣室12、複數形成本體 η上且與氣室12連通之吹氣孔13及_連通氣室12之送氣 孔14並搭配一連接於送氣孔14之正壓輸出機92,藉由 ◎正壓輸出機92經由送氣孔14將氣體送入氣室12，再由氣 至12將氣體分配至連通的吹氣孔14，進而產生向上之吹力 支撐物件9卜使得物件91懸空地被撐於氣浮式平台】上方 〇 【發明内容】 ”因此，本發明之目的，即在提供一種懸吊式氣浮工作201041075 VI. Description of the Invention: [Technical Field] The present invention relates to a type of air floating platform, and more particularly to a suspended air floating working platform capable of adsorbing a workpiece in a suspended state by using a gas pressure. [Prior Art] In the modern technology product process, many electronic components are easily damaged by touches, for example, a glass substrate for a liquid crystal display (LCD) process, a wafer for an ic wafer process, or It can be widely used in printed circuit boards (PCBs), etc., so 'make careful care during processing or inspection to avoid damage to electronic components caused by touch. In view of this, referring to FIG. 1, an air floating platform has been developed, and the object to be processed 91 can be suspended above the air floating platform to be processed or detected in a non-contact manner. The platform platform includes a body 11 , a gas chamber 12 formed on the body U „ , a plurality of air blowing holes 13 formed on the body η and communicating with the air chamber 12 , and a gas supply hole 14 connected to the air chamber 12 The positive pressure output device 92 of the air hole 14 sends the gas into the air chamber 12 through the air supply hole 14 through the positive pressure output machine 92, and then distributes the gas to the communicating air blowing hole 14 from the air to 12, thereby generating an upward blowing force. The support member 9 causes the object 91 to be suspended above the air floating platform. [Inventive content] Therefore, the object of the present invention is to provide a suspended air floatation work.
平台，懸吊式氣浮工作平台能將一工件間隔地吸附於平台 下方而使工件呈懸吊狀態。 Q 201041075 於疋’本發明懸吊式氣浮工作平台適於連接一正壓源 與一負壓源，用以將一工件吸附於平台下方。懸吊式氣浮 工作平台包含一底板及一氣室座。底板包括一底板本體、 複數上下貫穿底板本體之第一氣孔及第二氣孔，底板本體 具有一底板本體頂面及一底板本體底面，而氣室座疊置於 底板本體頂面並且可供該正壓源及負壓源連接。氣室座形 成一連通第一氣孔與正壓源之正壓氣室及一連通第二氣孔 與負壓源之負壓氣室，藉由負壓源提供之負壓，能於底板 本體底面之第二氣孔產生吸附工件之負壓，以及藉正壓源 提供之正壓，能於底板本體底面之第一氣孔產生正壓，使 工件與底板本體底面懸空地保持一間隔。 本發明懸吊式氣浮工作平台的一特點在於第一氣孔於 底板本體底面之孔徑小於第二氣孔於底板本體底面之孔徑 〇 本發明懸吊式氣浮工作平台的一特點在於氣室座包括 一蓋板及一氣流分配板’藉由蓋板、氣流分配板及底板由 上而下相互疊置，而於蓋板與氣流分配板間界定出一負壓 氣室，氣流分配板與底板間界定出一正壓氣室，並且負壓 氣室與正壓氣室互不連通。 本發明之功效在於藉由氣室座與底板的氣室配置以及 孔洞的配合，而能在平台的底板底面產生能吸附工件的負 壓力以及小於負壓力的正壓力，其中，負壓力能使工件被 吸附在平台的底板底面，以便於能在工件下方進行檢測或 加工等作業’而正壓力則能將工件推離底板底面，使工件 201041075 與底板底面之間仍留有間隔，避免工件表面直接與底板底 面接觸而造成刮傷。 【實施方式】 有關本發明之前述及其他技術内容、特點與功效，在 以下配合參考圖式之一個較佳實施例的詳細說明中，將可 清楚的呈現。 參閱圖2與圖3 ’本發明懸吊式氣浮工作平台2適用於 連接一正壓源21與一負壓源22(圖未示），用以將一工件8 吸附於平台2下方，本發明之較佳實施例包含一底板3及 一氣室座4，氣室座4疊置於底板3上且供連接正壓源21( 如打氣幫浦）及負壓源22(如鼓風機），而且，藉由底板3與 氣室座4相互配合形成一正壓氣室23與一負壓氣室24,使 得底板3底面產生負壓及正壓，而其他詳細構造說明如下 〇 在本實施例中，懸吊式氣浮工作平台2係架設於一支 撐架6上，用以使平台2之底板3下方形成一操作空間， 該操作空間可供被平台2吸附之工件8進行加工或檢測， 但該平台2之架設並不以該支撐架6為限，懸吊式氣浮工 作平台2亦可與其他製程平台或機具裝置結合而進行加工 或檢測。 參閱圖4與圖5，底板3包括一大致呈方形的底板本體 31複數第一氣孔32及複數第一氣孔33，底板本體31具 有一底板本體頂面311及一底板本體底面312，第一氣孔32 與第二氣孔33上下貫穿底板本體31的頂面311與底面312 5 201041075 且均勻間隔分佈於底板本體31上。 亂至座4包括一蓋板41及一氣流分配板42。蓋板41 疊置於氣流分配板42上’參閱圖6與圖7，蓋板41包括一 頂壁411、一圍繞壁412、複數導氣管段415、複數貫穿頂 壁411的輸氣孔416與一抽氣孔417。圍繞壁412係由頂壁 411邊緣向下延伸形成，且圍繞壁412與頂壁411相互配合 形成一氣室空間413，而導氣管段415係呈中空管狀由頂壁 411底面對應輸氣孔416地往下延伸而連通輸氣孔416，輸 氣孔416供連接正壓源21，而抽氣孔417供連接負壓源22 f ，此外’蓋板41更包括複數由頂壁411底面往下延伸且連 接圍繞壁412的肋片414,該等肋片414縱橫向地交錯連結 而能使得整個蓋板41具有較佳結構強度，在本實施例中， 該抽氣孔417設置於該頂壁411中央而該等輸氣孔416圍繞 該抽氣孔417而設置，當然輸氣孔416與抽氣孔417設置 位置與數量不以此為限，亦可僅設置一輸氣孔416與一抽 氣孔417即可，而抽氣孔417上設置一抽氣管座7，以便於 連接負壓源22。 《 氣流分配板42疊置於蓋板41下方而介於蓋板41與底 板3之間。參閱圖8與圖9，氣流分配板42具有一板體 420、複數導氣槽421、複數第一通氣孔422及複數第二通 氣孔423，板體420具有一板體頂面426及一板體底面427 ’導氣槽421係由板體底面427凹陷形成，並且具有複數 第一槽道424及複數第二槽道425，第一槽道424與第二槽 道425設計成相互垂直連通且均勻地分佈於板體底面427， 6 201041075 而第一通氣孔422及第二通氣孔423貫穿板體420，且第二 1 通氣孔423底端係連通導氣槽421。 參閱圖10與圖11，當蓋板41、氣流分配板42及底板 3由上而下相互疊置時，在蓋板41與氣流分配板42之間， 蓋板41之氣室空間413與氣流分配板42之板體頂面426 形成負壓氣室24’而蓋板41頂壁411的抽氣孔417則是藉 由負壓氣室24與氣流分配板42的第一通氣孔422相連通 ，而氣流分配板42的第一通氣孔422是與底板3之第二氣 孔33相連通。在氣流分配板42與底板3之間，氣流分配 板42之導氣槽421與底板3之底板本體頂面311形成正壓 氣室23 ’蓋板41的導氣管段415底端分別對應連通氣流分 配板42的第二通氣孔423，因而使得蓋板41頂壁‘η的輸 氣孔416藉由導氣管段415與氣流分配板42的第二通氣孔 423相連通，而藉由氣流分配板42的第二通氣孔423連通 導氣槽423，使得正壓氣室23與底板3的第一氣孔32相連 通。 當正壓源21與負壓源22設置在氣室座4並且被啟動 時，負壓源22所提供的負壓經由負壓氣室24連通氣流分 配板42之第一通氣孔422，再經由第一通氣孔422連通底 板3之第一氣孔33，因而於底板3的第二氣孔33產生具有 吸附力的負壓力，因此，便能將卫件8吸附在底板3下方 ，而正壓源21提供的正壓，則經由蓋板41之導氣管段415 連通氣流分配板42之第二通氣孔423,再經由第二通氣孔 423連通正壓氣至23及底板3的第—氣孔”，因而於底板 7 201041075 3的第一氣孔32產生吹齑的. 人乳的正壓力，在工件8被吸附在底 板3底面的同時對工件8吹氣，將工件8推離底板本 體底面312 ’使件8與底板3底面之間懸空地保持一間隔 〇 如上所述，利用設計蓋板41、氣流分配板42以及底板 3相互疊置形成互不干擾的正壓氣室23與負壓氣室24，使 得第一氣孔32能產生正壓並且不干擾第二氣孔33產生負 壓’將可以使平台2保持一間隔地吸附設置於平台2下方 之工件8。 值得注意的是’為了使得工件8能間隔地被吸附於平 台2下方，本發明設計蓋板41與氣流分配板42之板體頂 面426形成的負壓氣室容積大於氣流分配板42之導氣槽 421與底板本體頂面311形成的正壓氣室容積，以及抽氣孔 417之孔徑大於輪氣孔416之孔徑，不僅如此，第一氣孔 32與第二氣孔33位在底板本體頂面311的孔徑是設計成相 同的’而位在底板本體底面312的孔徑是設計成第一氣孔 32之孔徑小於第二氣孔33之孔徑，都是用以使正壓小於負 壓，達成工件8能間隔地被吸附於平台2下方。 此外，參閱圖4〜9，懸吊式氣浮工作平台2由上而下於 蓋板41、氣流分配板42以及底板3設置複數相對應連通的 連接孔5’再藉由複數能與連接孔5配合的鎖栓件（圖未示） ，用以連接蓋板41、氣流分配板42以及底板3，在本實施 例中，使用許多尺寸不同的連接孔5，且廣泛相對應地分佈 於蓋板41、氣流分配板42以及底板3，將使得蓋板41、氣 8 201041075 流分配板42以及底板3緊密連接，當懸吊式氣浮工作平台 2使用時，將不易發生漏氣的情形。 附帶說明的是，在本實施例中，正壓氣室23是位在負 壓氣室24下方，但在其他的實施態樣中，正壓氣室23與 負麗耽至24的相對位置並不以此為限’此外，該平台2在 使用時，亦可搭配其他治具或擋塊等，設置在平台2的邊 緣以供工件8靠抵或輔助定位，避免工件8被吸附於底板3 ❹ 底面時，位置游離不定，影響檢測或加工作業的進行。 綜上所述，本發明懸吊式氣浮工作平台2藉由蓋板41 、氣流分配板42以及底板3相互疊置而產生互不干擾的正 壓氣室23與負壓氣室24，能於底板本體底面312之第一氣 孔32產生正壓與第二氣孔33產生負壓，且利用設計第一 氣孔32、第二氣孔33、輪氣孔416及抽氣孔417之孔徑大 小，以及正壓氣室23與負壓氣室24之容積，調整負壓與 正壓之大小，使得工件8能與底板本體底面312保持一間 Q 隔地被吸附於底板3底面而呈懸吊狀態，以便於能在工件8 下方進行檢測或加工等作業，另一方面，藉由提供較小於 吸附之負壓力的吹氣正壓力，也能讓工件8與底板本體底 面312仍留有間隔’避免工件8表面因接觸平台2而導致 刮傷，故確實能達成本發明之目的。 惟以上所述者，僅為本發明之較佳實施例而已，去 田个 能以此限定本發明實施之範圍，即大凡依本發明申請專利 範圍及發明說明内容所作之簡單的等效變化與修飾，皆仍 屬本發明專利涵蓋之範圍内。 9 201041075 【圖式簡單說明】 圖1是一剖面示意圖，說明習知的氣浮平台； 圖2是一立體示意圖’說明本發明之懸吊式氣浮工作 平台； 圖3是一立體分解圖’說明該懸吊式氣浮工作平台之 各組件的連結關係； 圖4是一立體示意圖，說明說明底板之頂面； 圖5是一立體示意圖，說明該說明該底板之底面； 圖6是一立體示意圖，說明蓋板之頂面； 圖7是一立體示意圖，說明該蓋板之底部； 圖8是一立體示意圖，說明氣流分配板之頂面； 圖9是一立體示意圖，說明該氣流分配板之底面； 圖10是一俯視示意圖，說明該懸吊式氣浮工作平台之 頂面；及 圖U是圖10中10-10之剖面示意圖，說明該懸吊式氣 洋工作平台的孔洞連接關係。 10 201041075The platform, the suspended air floating work platform can adsorb a workpiece at a lower position to the bottom of the platform to suspend the workpiece. Q 201041075 The present invention is suitable for connecting a positive pressure source and a negative pressure source to adsorb a workpiece under the platform. The suspended air floating work platform comprises a bottom plate and a gas chamber seat. The bottom plate comprises a bottom plate body, a plurality of first air holes and a second air hole extending through the bottom plate body. The bottom plate body has a bottom surface of the bottom plate body and a bottom surface of the bottom plate body, and the air chamber seat is stacked on the top surface of the bottom plate body and is available for the positive The pressure source and the negative pressure source are connected. The gas chamber seat forms a positive pressure air chamber connecting the first air hole and the positive pressure source and a negative pressure air chamber connecting the second air hole and the negative pressure source, and the negative pressure provided by the negative pressure source can be on the bottom surface of the bottom plate body The two pores generate a negative pressure for adsorbing the workpiece, and the positive pressure provided by the positive pressure source can generate a positive pressure on the first air hole of the bottom surface of the bottom plate body, so that the workpiece and the bottom surface of the bottom plate body are suspended at a distance. A feature of the suspended air-floating working platform of the present invention is that the aperture of the first air hole on the bottom surface of the bottom plate body is smaller than the aperture of the second air hole on the bottom surface of the bottom plate body. A feature of the suspended air floating working platform of the present invention is that the air chamber seat comprises A cover plate and a gas distribution plate 'are stacked from top to bottom by the cover plate, the air distribution plate and the bottom plate, and define a negative pressure air chamber between the cover plate and the air distribution plate, between the air distribution plate and the bottom plate A positive pressure chamber is defined, and the negative pressure chamber and the positive pressure chamber are not in communication with each other. The effect of the invention is that by the air chamber arrangement of the air chamber seat and the bottom plate and the cooperation of the holes, a negative pressure capable of adsorbing the workpiece and a positive pressure lower than the negative pressure can be generated on the bottom surface of the bottom plate of the platform, wherein the negative pressure can make the workpiece It is adsorbed on the bottom surface of the bottom plate of the platform so that it can be tested or processed under the workpiece. The positive pressure can push the workpiece away from the bottom surface of the bottom plate, leaving a gap between the workpiece 201041075 and the bottom surface of the bottom plate to avoid direct surface of the workpiece. Contact with the bottom surface of the bottom plate to cause scratches. The above and other technical contents, features, and advantages of the present invention will be apparent from the following detailed description of the preferred embodiments. Referring to FIG. 2 and FIG. 3, the suspended air floating working platform 2 of the present invention is adapted to connect a positive pressure source 21 and a negative pressure source 22 (not shown) for adsorbing a workpiece 8 under the platform 2, The preferred embodiment of the invention comprises a bottom plate 3 and a gas chamber seat 4, which are stacked on the bottom plate 3 and connected to a positive pressure source 21 (such as a gas pump) and a negative pressure source 22 (such as a blower), and The bottom plate 3 and the air chamber base 4 cooperate to form a positive pressure air chamber 23 and a negative pressure air chamber 24, so that the bottom surface of the bottom plate 3 generates negative pressure and positive pressure, and other detailed configurations are as follows. The suspended air-floating working platform 2 is mounted on a support frame 6 for forming an operation space below the bottom plate 3 of the platform 2, and the operation space can be processed or detected by the workpiece 8 adsorbed by the platform 2, but The erection of the platform 2 is not limited to the support frame 6, and the suspended air floating work platform 2 can also be processed or detected in combination with other process platforms or implement devices. Referring to FIG. 4 and FIG. 5, the bottom plate 3 includes a substantially square bottom plate body 31 and a plurality of first air holes 32 and a plurality of first air holes 33. The bottom plate body 31 has a bottom plate body top surface 311 and a bottom plate body bottom surface 312, the first air hole. 32 and the second air hole 33 penetrate the top surface 311 and the bottom surface 312 5 201041075 of the bottom plate body 31 up and down and are evenly spaced on the bottom plate body 31. The messy seat 4 includes a cover 41 and an air distribution plate 42. The cover plate 41 is stacked on the air distribution plate 42. Referring to FIG. 6 and FIG. 7, the cover plate 41 includes a top wall 411, a surrounding wall 412, a plurality of air guiding tube segments 415, and a plurality of air holes 416 extending through the top wall 411. A suction hole 417. The surrounding wall 412 is formed by extending downward from the edge of the top wall 411, and the surrounding wall 412 and the top wall 411 cooperate to form a plenum space 413, and the air guiding tube section 415 is hollow tubular. The bottom surface of the top wall 411 corresponds to the air vent 416. The cover hole 416 is connected to connect the positive pressure source 21, and the air suction hole 417 is connected to the negative pressure source 22f. Further, the cover plate 41 further includes a plurality of bottom surfaces extending from the bottom surface of the top wall 411. The ribs 414 are connected to the wall 412. The ribs 414 are vertically and laterally connected to each other so that the entire cover plate 41 has a better structural strength. In the embodiment, the air vent 417 is disposed at the center of the top wall 411. The air vents 416 are disposed around the air venting holes 417. The position and number of the air venting holes 416 and the air venting holes 417 are not limited thereto, and only one air venting hole 416 and one air venting hole 417 may be disposed. A suction tube seat 7 is disposed on the air suction hole 417 to facilitate connection of the negative pressure source 22. The air distribution plate 42 is stacked under the cover 41 between the cover 41 and the bottom plate 3. Referring to FIG. 8 and FIG. 9, the air distribution plate 42 has a plate body 420, a plurality of air guiding slots 421, a plurality of first ventilation holes 422, and a plurality of second ventilation holes 423. The plate body 420 has a plate top surface 426 and a plate. The bottom surface 427 ′′ of the air guiding groove 421 is formed by the bottom surface 427 of the plate body, and has a plurality of first channels 424 and a plurality of second channels 425. The first channel 424 and the second channel 425 are designed to communicate with each other vertically. The first vent hole 422 and the second vent hole 423 penetrate the plate body 420, and the bottom end of the second 1 vent hole 423 communicates with the air guiding groove 421. Referring to FIG. 10 and FIG. 11, when the cover 41, the air distribution plate 42 and the bottom plate 3 are stacked from top to bottom, between the cover 41 and the air distribution plate 42, the air chamber space 413 and the air flow of the cover 41 The plate top surface 426 of the distribution plate 42 forms a negative pressure air chamber 24', and the air suction hole 417 of the top wall 411 of the cover plate 41 communicates with the first ventilation hole 422 of the air distribution plate 42 through the negative pressure air chamber 24. The first venting opening 422 of the air distribution plate 42 is in communication with the second air hole 33 of the bottom plate 3. Between the air distribution plate 42 and the bottom plate 3, the air guiding groove 421 of the air distribution plate 42 and the bottom surface 311 of the bottom plate 3 form a positive pressure air chamber 23. The bottom end of the air guiding tube portion 415 of the cover plate 41 respectively corresponds to the communication airflow distribution. The second venting opening 423 of the plate 42 thus causes the air venting opening 416 of the top wall 'n of the cover plate 41 to communicate with the second venting opening 423 of the air distribution plate 42 by the air guiding tube section 415, and by the air distribution plate 42 The second venting hole 423 communicates with the air guiding groove 423 such that the positive pressure plenum 23 communicates with the first air hole 32 of the bottom plate 3. When the positive pressure source 21 and the negative pressure source 22 are disposed in the chamber 4 and are activated, the negative pressure provided by the negative pressure source 22 communicates with the first vent 422 of the air distribution plate 42 via the negative pressure plenum 24, and then The first vent hole 422 communicates with the first air hole 33 of the bottom plate 3, so that the second air hole 33 of the bottom plate 3 generates a negative pressure having an adsorption force, so that the guard 8 can be adsorbed under the bottom plate 3, and the positive pressure source 21 The positive pressure is supplied to the second venting hole 423 of the air distribution plate 42 via the air guiding pipe section 415 of the cover plate 41, and the positive pressure gas is connected to the first air hole of the bottom plate 3 via the second venting hole 423, thereby The first air hole 32 of the bottom plate 7 201041075 3 generates a positive pressure of the human milk, and the workpiece 8 is blown while the workpiece 8 is adsorbed on the bottom surface of the bottom plate 3, and the workpiece 8 is pushed away from the bottom surface 312 of the bottom plate body to make the piece 8 Maintaining a space between the bottom surface of the bottom plate 3 and the bottom surface of the bottom plate 3, as described above, the design cover plate 41, the air distribution plate 42 and the bottom plate 3 are stacked on each other to form a positive pressure air chamber 23 and a negative pressure air chamber 24 which do not interfere with each other, so that An air hole 32 can generate a positive pressure and does not interfere with the second air hole 33 to generate a negative 'It will be possible to keep the platform 2 adsorbing the workpiece 8 disposed below the platform 2 at an interval. It is worth noting that in order to allow the workpiece 8 to be adsorbed under the platform 2 at intervals, the present invention designs the cover 41 and the air distribution plate 42. The volume of the negative pressure chamber formed by the top surface 426 of the plate body is larger than the volume of the positive pressure chamber formed by the air guiding groove 421 of the air distribution plate 42 and the top surface 311 of the bottom plate body, and the hole diameter of the air discharging hole 417 is larger than the diameter of the air hole 416 of the wheel. Thus, the apertures of the first air hole 32 and the second air hole 33 on the top surface 311 of the bottom plate body are designed to be the same', and the apertures located on the bottom surface 312 of the bottom plate body are designed such that the aperture of the first air hole 32 is smaller than that of the second air hole 33. The apertures are both used to make the positive pressure smaller than the negative pressure, so that the workpiece 8 can be adsorbed under the platform 2 at intervals. Further, referring to Figures 4 to 9, the suspended air floating work platform 2 is placed from the top to the bottom of the cover plate 41. The air distribution plate 42 and the bottom plate 3 are provided with a plurality of correspondingly connected connecting holes 5', and are connected to the cover plate 41, the air distribution plate 42 by a plurality of locking members (not shown) that can be engaged with the connecting holes 5. Base plate 3, in this real In the embodiment, a plurality of connection holes 5 of different sizes are used, and are widely distributed correspondingly to the cover plate 41, the air distribution plate 42 and the bottom plate 3, so that the cover plate 41, the gas 8 201041075 flow distribution plate 42 and the bottom plate 3 are tightly connected. When the suspended air floating work platform 2 is used, air leakage will not easily occur. Incidentally, in the present embodiment, the positive pressure air chamber 23 is located below the negative pressure air chamber 24, but in other In the embodiment, the relative positions of the positive pressure air chamber 23 and the negative pressure chamber 24 are not limited thereto. In addition, when the platform 2 is used, it can be matched with other fixtures or blocks, etc., and is disposed on the platform 2. The edge is used for the workpiece 8 to abut or assist the positioning, so as to prevent the workpiece 8 from being adsorbed on the bottom surface of the bottom plate 3, the position is undefined, which affects the detection or processing operation. In summary, the suspended air floating work platform 2 of the present invention is formed by stacking the cover plate 41, the air distribution plate 42 and the bottom plate 3 to each other to generate a positive pressure air chamber 23 and a negative pressure air chamber 24 which do not interfere with each other. The first air hole 32 of the bottom surface 312 of the bottom plate body generates a positive pressure and a negative pressure generated by the second air hole 33, and the aperture sizes of the first air hole 32, the second air hole 33, the wheel air hole 416 and the air hole 417 are designed, and the positive pressure air chamber 23 is used. And the volume of the negative pressure gas chamber 24, the magnitude of the negative pressure and the positive pressure are adjusted, so that the workpiece 8 can be attached to the bottom surface of the bottom plate 3 by a Q partition with the bottom surface 312 of the bottom plate body to be suspended, so as to be able to be in the workpiece 8 The operation of detecting or processing is performed below, and on the other hand, by providing a positive blowing pressure which is smaller than the negative pressure of adsorption, the workpiece 8 and the bottom surface 312 of the bottom plate body are still spaced apart to avoid the surface of the workpiece 8 from contacting the platform. 2, resulting in scratching, it is indeed possible to achieve the object of the present invention. However, the above is only a preferred embodiment of the present invention, and the scope of the present invention can be limited by the scope of the present invention, that is, the simple equivalent change of the patent application scope and the description of the invention. Modifications are still within the scope of the invention. 9 201041075 [Simplified illustration of the drawings] Fig. 1 is a schematic cross-sectional view showing a conventional air floating platform; Fig. 2 is a perspective view showing a suspended air floating working platform of the present invention; Fig. 3 is an exploded perspective view Figure 4 is a perspective view showing the top surface of the bottom plate; Figure 5 is a perspective view showing the bottom surface of the bottom plate; Figure 6 is a three-dimensional view Figure 7 is a perspective view showing the bottom of the cover plate; Figure 8 is a perspective view showing the top surface of the air distribution plate; Figure 9 is a perspective view showing the air distribution plate Figure 10 is a top plan view showing the top surface of the suspended air floating work platform; and Figure U is a cross-sectional view of 10-10 in Figure 10, illustrating the hole connection relationship of the suspended air ocean working platform . 10 201041075
【主要元件符號說明】 2 ....... …懸吊式氣浮工作 414… •…肋片 平台 415… •…導氣管段 21…… …正壓源 416… •…輸氣孔 22…… …負壓源 417… —抽氣孔 〇 Ί...... Λ1..... ^ J) …止座孔至 HZ..... ••杀L沁丨l为Θ6极 24…… …負壓氣室 420… •…板體 3 ....... …底板 421… •…導氣槽 31…… …底板本體 422… —第 通氣孔 311 ···· …底板本體頂面 423… •…第二通氣孔 312 _··. …底板本體底面 424… •…第一槽道 32…… …第一氣孔 425… •…第二槽道 33…… …第二氣孔 426… •…板體頂面 Λ ....... All ... Η....... …氣至座 枚m低面 41…… …蓋板 5…… •…連接孔 411 .··· …頂壁 6…… •…支撐架 412 ···· …圍繞壁 7…… •…抽氣管座 413 •… …氣室空間 8…… •…工件 11[Explanation of main component symbols] 2 .............suspended air flotation work 414... •...ribbed platform 415... •...air pipe section 21......positive pressure source 416... •...air hole 22 ............negative pressure source 417...——Pumping hole 〇Ί...... Λ1..... ^ J) ...stop hole to HZ..... •• Kill L沁丨l for Θ6 pole 24 ............negative pressure chamber 420... •...plate body 3............base plate 421... •...air guide groove 31......base plate body 422...-first vent hole 311 ····... Top surface 423... •... second vent 312 _··. ... bottom plate body bottom surface 424... •...first channel 32...first air hole 425.........second channel 33......second air hole 426 ... • The top surface of the board Λ ....... All ... Η....... ... gas to the seat m low side 41...... ... cover 5... •... connection hole 411. ··· ...top wall 6... •...support frame 412 ····...around wall 7... •...exhaust pipe holder 413 •...air chamber space 8... •...workpiece 11