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TWI461372B - Processing method and processing device containing organic matter drainage - Google Patents

Processing method and processing device containing organic matter drainage Download PDF

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Publication number
TWI461372B
TWI461372B TW096106787A TW96106787A TWI461372B TW I461372 B TWI461372 B TW I461372B TW 096106787 A TW096106787 A TW 096106787A TW 96106787 A TW96106787 A TW 96106787A TW I461372 B TWI461372 B TW I461372B
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organic matter
water
scale inhibitor
drainage
oxidation treatment
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TW096106787A
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Chinese (zh)
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TW200740704A (en
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Taeko Ushiyama
Nozomu Ikuno
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Kurita Water Ind Ltd
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    • CCHEMISTRY; METALLURGY
    • C02TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02FTREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00Treatment of water, waste water, or sewage
    • C02F1/72Treatment of water, waste water, or sewage by oxidation
    • C02F1/78Treatment of water, waste water, or sewage by oxidation with ozone
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D61/00Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
    • B01D61/02Reverse osmosis; Hyperfiltration ; Nanofiltration
    • B01D61/025Reverse osmosis; Hyperfiltration
    • CCHEMISTRY; METALLURGY
    • C02TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02FTREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00Treatment of water, waste water, or sewage
    • C02F1/44Treatment of water, waste water, or sewage by dialysis, osmosis or reverse osmosis
    • C02F1/441Treatment of water, waste water, or sewage by dialysis, osmosis or reverse osmosis by reverse osmosis
    • CCHEMISTRY; METALLURGY
    • C02TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02FTREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00Treatment of water, waste water, or sewage
    • C02F1/66Treatment of water, waste water, or sewage by neutralisation; pH adjustment
    • CCHEMISTRY; METALLURGY
    • C02TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02FTREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F2201/00Apparatus for treatment of water, waste water or sewage
    • C02F2201/002Construction details of the apparatus
    • CCHEMISTRY; METALLURGY
    • C02TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02FTREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F2209/00Controlling or monitoring parameters in water treatment
    • C02F2209/06Controlling or monitoring parameters in water treatment pH

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  • Water Supply & Treatment (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Environmental & Geological Engineering (AREA)
  • Hydrology & Water Resources (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Nanotechnology (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
  • Treatment Of Water By Oxidation Or Reduction (AREA)
  • Removal Of Specific Substances (AREA)
  • Water Treatment By Sorption (AREA)
  • Treatment Of Water By Ion Exchange (AREA)

Description

含有機物排水的處理方法以及處理裝置Processing method and processing device containing organic matter drainage

本發明關於將從電子設備製造工廠等排出的含有高濃度至低濃度有機物(TOC)的排水用反滲透(RO)膜分離裝置進行處理、回收時,防止RO膜分離裝置內因有機物在膜面吸附所導致的通量降低、或生物污染而長期進行穩定的處理,並且,有效地降低水中TOC濃度而得到高水質的處理水,此外,還容易且有效地處理RO膜分離裝置的濃縮水的含有機物排水的處理方法以及處理裝置。In the present invention, when a reverse osmosis (RO) membrane separation apparatus for wastewater containing high to low concentrations of organic matter (TOC) discharged from an electronic equipment manufacturing plant or the like is treated and recovered, the organic membrane is prevented from being adsorbed on the membrane surface by the RO membrane separation device. The resulting reduced flux or biological contamination is stably treated for a long period of time, and the TOC concentration in the water is effectively reduced to obtain treated water having high water quality. Further, the content of concentrated water in the RO membrane separation device is easily and efficiently treated. Method for treating organic matter drainage and processing device.

近年,環境基準及水質基準有越來越嚴格的傾向,對於排放水也希望進行高度的淨化。另一方面,從消除水不足的目的出發,為了回收各種排水進行再利用,也希望開發高度的水處理技術。In recent years, environmental standards and water quality standards have become more and more strict, and high levels of purification are also desired for discharged water. On the other hand, in order to eliminate the shortage of water, it is also desired to develop a highly water treatment technology in order to recycle various types of drainage.

在這樣的狀況下,由於RO膜分離處理能將水中的雜質(離子類、有機物、微粒子等)有效地除去,所以近年來在很多領域中被使用。例如,廣泛採用如下方法:將從半導體製造過程排出的含有丙酮、異丙醇等的含高濃度TOC或者低濃度TOC的排水回收進行再利用時,首先對其進行生物處理,除去TOC成分,並對生物處理水進行RO膜處理,來進行淨化的方法(例如,特開2002-336886號公報)。Under such circumstances, since the RO membrane separation treatment can effectively remove impurities (ions, organic substances, fine particles, and the like) in water, it has been used in many fields in recent years. For example, a method in which a wastewater containing a high concentration TOC or a low concentration TOC containing acetone, isopropyl alcohol or the like discharged from a semiconductor manufacturing process is recovered and reused is first subjected to biological treatment to remove the TOC component, and A method of performing RO treatment on a biological treatment water by RO membrane treatment (for example, JP-A-2002-336886).

但是,近年來,如下問題開始明顯化:將生物處理排水通水到RO膜分離裝置時,由於藉由微生物進行的有機物分解產生生物代謝物,其使RO膜的膜面堵塞、導致通量降低。However, in recent years, the following problems have begun to become apparent: when the biological treatment drainage water is passed to the RO membrane separation device, biodegradation is generated by decomposition of organic matter by microorganisms, which causes the membrane surface of the RO membrane to clog, resulting in a decrease in flux. .

另一方面,在不使用生物處理、將這些含有TOC的排水直接通水到RO膜分離裝置的情況下,由於流入RO膜分離裝置的TOC濃度高,所以在RO膜分離裝置內形成微生物容易繁殖的環境。因此,從抑制RO膜分離裝置內的生物污染的目的出發,通常向含有TOC的排水中添加大量的黏泥控制劑(slime control agent),但是由於黏泥控制劑價格高,所以尋求更便宜的抑制生物污染的方法。On the other hand, in the case where the TOC-containing drainage water is directly supplied to the RO membrane separation device without using biological treatment, since the TOC concentration flowing into the RO membrane separation device is high, microorganisms are easily formed in the RO membrane separation device. environment of. Therefore, from the purpose of suppressing biological contamination in the RO membrane separation device, a large amount of slime control agent is usually added to the wastewater containing TOC, but since the price of the slime control agent is high, it is sought to be cheaper. A method of inhibiting biological contamination.

另外,在從電子設備製造工廠排出的排水中,吸附於RO膜分離裝置的膜面、有可能使通量降低的非離子性界面活性劑有時會混入,以往,對於這樣的含有非離子性界面活性劑的排水,不能應用RO膜分離處理。In addition, in the drainage discharged from the electronic equipment manufacturing plant, the non-ionic surfactant which is adsorbed on the membrane surface of the RO membrane separation device and may have a reduced flux may be mixed. Conventionally, such non-ionic content is contained. The drainage of surfactants cannot be treated by RO membrane separation.

為了解決這樣的問題,將從電子設備製造工廠、其他各種領域排出的含有高濃度至低濃度有機物的排水用RO膜分離裝置進行處理、回收時,在防止RO膜分離裝置內因有機物在膜面吸附所導致的通量降低、生物污染而長期進行穩定處理的同時,將水中TOC濃度有效地降低而獲得高水質的處理水,作為這樣的技術,本發明人提出了如下方案:首先,在含有機物排水中添加該含有機物排水中的鈣離子5倍重量以上的結垢防止劑,並且在添加結垢防止劑之前、之後或者同時,向含有機物排水中添加鹼試劑,將pH調整到9.5以上,然後進行RO分離處理的方法以及裝置(特開2005-169372號公報)。In order to solve such a problem, when the RO membrane separation apparatus containing high-concentration to low-concentration organic matter discharged from an electronic equipment manufacturing plant or other various fields is treated and recovered, the organic membrane is adsorbed on the membrane surface in the RO membrane separation device. The inventors have proposed the following schemes by first reducing the TOC concentration in the water while obtaining a long-term stable treatment due to a decrease in flux and bio-contamination, and as such a technique, the inventors have proposed the following scheme: To the drain, the scale inhibitor is added in an amount of not less than 5 times by weight of the calcium ions in the organic matter drainage, and before, after or simultaneously with the addition of the scale inhibitor, an alkali reagent is added to the organic-containing wastewater to adjust the pH to 9.5 or more. Then, a method and a device for performing the RO separation treatment are disclosed (JP-A-2005-169372).

這樣,藉由在導入到RO膜分離裝置的被處理水(以下有時稱「RO給水」)中添加規定量的結垢防止劑,並將pH調整到9.5以上後向RO膜分離裝置通水,可以獲得如下的作用效果:防止RO膜分離裝置內因有機物在膜面吸附所導致的通量降低或生物污染而長期進行穩定處理的同時,將水中的TOC濃度有效地降低,從而可以得到高水質的處理水。In this way, a predetermined amount of the scale inhibitor is added to the water to be treated (hereinafter sometimes referred to as "RO feed water") introduced into the RO membrane separation device, and the pH is adjusted to 9.5 or more, and then the water is supplied to the RO membrane separation device. The following effects can be obtained by preventing the long-term stable treatment of the flux reduction or biological contamination caused by the adsorption of organic substances on the membrane surface in the RO membrane separation device, and effectively reducing the TOC concentration in the water, thereby obtaining high water quality. Treatment of water.

(1)藉由將RO給水的pH調整到9.5以上,可以取得如下的效果。(1) By adjusting the pH of the RO feed water to 9.5 or more, the following effects can be obtained.

微生物在鹼性環境下不能生存。因此,藉由將RO給水的pH調整到9.5以上,在RO膜分離裝置內,雖然有營養源,但可以創造出微生物不能生存的環境,沒有必要像以往那樣添加昂貴的黏泥控制劑,可以抑制RO膜分離裝置中的生物污染。Microorganisms cannot survive in an alkaline environment. Therefore, by adjusting the pH of the RO feed water to 9.5 or more, in the RO membrane separation device, although there is a nutrient source, it is possible to create an environment in which microorganisms cannot survive, and it is not necessary to add an expensive slime control agent as in the past. The biological contamination in the RO membrane separation device is suppressed.

另外,已知有可能使通量降低的非離子性界面活性劑在鹼性環境下從膜面脫附,藉由將RO給水的pH調整到9.5以上,可以抑制這些成分向RO膜面的吸附。Further, it is known that a nonionic surfactant having a reduced flux can be desorbed from the film surface in an alkaline environment, and by adjusting the pH of the RO feed water to 9.5 or more, adsorption of these components to the RO membrane surface can be suppressed. .

(2)藉由向RO給水中添加結垢防止劑,其量為RO給水中的鈣離子5倍重量以上,可以取得如下的效果。從電子設備製造工廠等排出的含有TOC的排水中,極少存在成為結垢原因的鈣離子等混入的情況。在將RO給水的pH調整到9.5以上的高pH的RO工作條件下,即使極微量的鈣離子混入,也能生成碳酸鈣等結垢,導致RO膜直接堵塞。因此,從抑制由這樣的結垢導致膜面堵塞的目的出發,向RO給水中添加結垢防止劑,其量為RO給水中的鈣離子的5倍重量以上,以防止結垢的生成。(2) By adding a scale inhibitor to the RO feed water in an amount of 5 times or more by weight of calcium ions in the RO feed water, the following effects can be obtained. In the TOC-containing wastewater discharged from an electronic equipment manufacturing plant or the like, calcium ions or the like which cause scaling are rarely mixed. When the pH of the RO feed water is adjusted to a high pH of RO of 9.5 or more, even if a very small amount of calcium ions are mixed, scale formation such as calcium carbonate can be generated, and the RO membrane is directly clogged. Therefore, from the viewpoint of suppressing clogging of the membrane surface due to such fouling, a scale inhibitor is added to the RO feed water in an amount of 5 times or more by weight of calcium ions in the RO feed water to prevent scale formation.

專利文獻1:特開2002-336886號公報專利文獻2:特開2005-169372號公報Patent Document 1: JP-A-2002-336886 Patent Document 2: JP-A-2005-169372

根據特開2005-169372號公報記載的技術,將從電子設備製造工廠、其他各種領域排出的含有高濃度至低濃度有機物的排水、特別是含有非離子性界面活性劑的排水用RO膜分離裝置進行處理、回收時,在防止RO膜分離裝置內因有機物在膜面吸附而導致的通量降低、生物污染而長期進行穩定處理的同時,可以有效地降低水中TOC濃度,得到高水質的處理水,但是存在下述不良情況。According to the technique described in Japanese Laid-Open Patent Publication No. 2005-169372, a wastewater containing a high concentration to a low concentration of organic matter discharged from an electronic equipment manufacturing plant and various other fields, particularly a RO membrane separation device for drainage containing a nonionic surfactant In the RO membrane separation device, the ROC separation device prevents the flux from being adsorbed on the membrane surface due to the adsorption of organic matter on the membrane surface, and the biochemical contamination is stabilized for a long period of time. The TOC concentration in the water can be effectively reduced, and the treated water having high water quality can be obtained. However, the following problems exist.

即,根據特開2005-169372號公報記載的技術,對於向RO給水中添加結垢防止劑後進行RO膜分離處理而得到的濃縮水(以下有時稱“RO濃縮水”)來說,由於所添加的結垢防止劑被濃縮,所以變為含有大量作為COD成分的結垢防止劑。即,由於結垢防止劑不能透過RO膜而在濃縮水側被濃縮。特別是,根據特開2005-169372號公報的技術,添加大量結垢防止劑,其量為RO給水中的鈣離子5倍重量以上,對其進行RO膜分離處理,在所得到的RO濃縮水中含有大量的結垢防止劑。In the concentrated water (hereinafter sometimes referred to as "RO concentrated water") obtained by adding the anti-fouling agent to the RO feed water and then performing the RO membrane separation treatment, the technique described in JP-A-2005-169372 Since the added scale inhibitor is concentrated, it becomes a scale inhibitor which contains a large amount as a COD component. That is, since the scale inhibitor is not permeable to the RO membrane, it is concentrated on the concentrated water side. In particular, according to the technique of JP-A-2005-169372, a large amount of scale inhibitor is added in an amount of 5 times or more by weight of calcium ions in the RO feed water, and RO membrane separation treatment is performed thereon, and the obtained RO concentrated water is obtained. Contains a large amount of scale inhibitor.

通常,將RO濃縮水送到排水處理製程,經過生物處理和凝聚沉澱處理後排放,但是一般來說,結垢防止劑是難以藉由凝聚沉澱處理和生物處理除去的,除此之外,結垢防止劑也是阻礙凝聚反應的物質。因此,如果這樣將含有大量結垢防止劑的RO濃縮水送到排水處理製程,則除了排水處理製程的負荷增大以外,還有可能使排放水中的COD值增加等、使水質降低。Usually, the RO concentrated water is sent to a wastewater treatment process, and is discharged after biological treatment and coagulation sedimentation treatment, but in general, the scale inhibitor is difficult to remove by coagulation sedimentation treatment and biological treatment, in addition, the knot is The scale inhibitor is also a substance that hinders the aggregation reaction. Therefore, if the RO concentrated water containing a large amount of the scale inhibitor is sent to the wastewater treatment process in this way, in addition to the increase in the load of the wastewater treatment process, the COD value in the discharged water may be increased to lower the water quality.

因此,本發明目的在於,提供將這種RO濃縮水的包括COD值的TOC值有效地降低,防止RO濃縮水對排水處理等的不良影響的含有機物排水的處理方法以及處理裝置。In view of the above, it is an object of the present invention to provide a method and a processing apparatus for containing organic matter drainage which effectively reduce the TOC value including the COD value of such RO concentrated water and prevent adverse effects of RO concentrated water on drainage treatment and the like.

本發明(第1項)的含有機物排水的處理方法,其特徵在於,包含以下製程:向含有機物排水中添加結垢防止劑的結垢防止劑添加製程;將添加了該結垢防止劑的含有機物排水供給到反滲透膜分離裝置,分離成透過水和濃縮水的反滲透膜分離製程;將供給到該反滲透膜分離裝置的含有機物排水的pH調整到9.5以上的pH調整製程;其中,具有向所述濃縮水中添加臭氧來氧化處理該濃縮水的氧化處理製程。The method for treating organic matter-containing wastewater according to the first aspect of the invention includes the following process: a process for adding a scale inhibitor to a scale containing an organic matter, and a scale addition preventing agent; a reverse osmosis membrane separation process comprising the organic matter drainage supply to the reverse osmosis membrane separation device, separated into permeate water and concentrated water; and a pH adjustment process for adjusting the pH of the organic wastewater supplied to the reverse osmosis membrane separation device to 9.5 or more; There is an oxidation treatment process in which ozone is added to the concentrated water to oxidize the concentrated water.

第2項的含有機物排水的處理方法,其特徵在於,在第1項中,所述氧化處理製程是並用臭氧和過氧化氫的促進氧化處理製程。The method for treating organic matter-containing wastewater according to Item 2, characterized in that in the first aspect, the oxidation treatment process is a process for promoting oxidation treatment using ozone and hydrogen peroxide in combination.

第3項的含有機物排水的處理方法,其特徵在於,在第1項或者第2項中,所述氧化處理製程的處理水的pH為5.6~8.6。The method for treating organic matter-containing wastewater according to the third aspect, wherein in the first or second aspect, the pH of the treated water in the oxidation treatment process is 5.6 to 8.6.

第4項的含有機物排水的處理方法,其特徵在於,在第1項或者第2項中,具有向所述濃縮水中添加鹼試劑、使得所述氧化處理製程中的水的pH達到9.8~11的鹼添加製程。According to a fourth aspect of the invention, in the first aspect or the second aspect, the alkali reagent is added to the concentrated water so that the pH of the water in the oxidation treatment process reaches 9.8 to 11 Alkali addition process.

第5項的含有機物排水的處理方法,其特徵在於,在第1~4項的任一項中,具有使所述氧化處理製程的處理水與活性碳接觸的活性碳處理製程。The method of treating organic matter containing water according to the fifth aspect of the invention, characterized in that, in any one of items 1 to 4, the activated carbon treatment process for bringing the treated water in the oxidation treatment process into contact with the activated carbon.

第6項的含有機物排水的處理方法,其特徵在於,對於第1~5項中的任一項,在所述結垢防止劑添加製程中,向所述含有機物排水中添加結垢防止劑,其量為該含有機物排水中的鈣離子的5倍重量以上。According to a sixth aspect of the present invention, in the method of adding the scale preventing agent, the scale preventing agent is added to the organic matter draining water in any one of the items 1 to 5. The amount is 5 times or more by weight of the calcium ions contained in the organic matter drainage.

第7項的含有機物排水的處理方法,其特徵在於,對於第6項,在所述結垢防止劑添加製程中,向所述含有機物排水中添加結垢防止劑,其量為該含有機物排水中的鈣離子的5~50倍重量。According to a seventh aspect of the invention, in the method of the present invention, in the sixth aspect, in the scale inhibitor preparation process, a scale inhibitor is added to the organic matter-containing drain, and the amount is the organic matter. 5 to 50 times the weight of calcium ions in the drainage.

第8項的含有機物排水的處理方法,其特徵在於,在第1~7項的任一項中,所述反滲透膜分離裝置的反滲透膜是具有在1.47MPa、25℃、pH為7的條件下對1500mg/L的食鹽水進行反滲透膜分離處理時的鹽排除率為95%以上的脫鹽性能的聚乙烯醇系低污染用反滲透膜。The method of claim 8, wherein the reverse osmosis membrane of the reverse osmosis membrane separation apparatus has a reverse osmosis membrane at 1.47 MPa, 25 ° C, and a pH of 7 Under the conditions of the reverse osmosis membrane separation treatment of the 1500 mg/L saline solution, the salt rejection rate is 95% or more, and the polyvinyl alcohol-based low-pollution reverse osmosis membrane having a desalination property.

第9項的含有機物排水的處理方法,其特徵在於,對於第1~8項中的任一項,在所述pH調整製程中,將所述含有機物排水的pH調整到10.5~12。According to a ninth aspect of the invention, in the method of any one of the first to eighth aspects, the pH of the organic-containing water drain is adjusted to 10.5 to 12 in the pH adjustment process.

第10項的含有機物排水的處理方法,其特徵在於,對於第1~9項中的任一項,在添加所述結垢防止劑之前,對所述含有機物排水進行陽離子交換處理。The method of treating organic matter-containing wastewater according to claim 10, wherein, in any one of items 1 to 9, the organic matter-containing drainage is subjected to a cation exchange treatment before the addition of the scale inhibitor.

本發明(第11項)的含有機物排水的處理裝置,其特徵在於,具有:向含有機物排水中添加結垢防止劑的結垢防止劑添加單元;將添加了該結垢防止劑的含有機物排水分離成透過水和濃縮水的反滲透膜分離裝置;將供給到該反滲透膜分離裝置的含有機物排水的pH調整到9.5以上的pH調整單元;其中,具有向所述濃縮水中添加臭氧來氧化處理該濃縮水的氧化處理單元。The apparatus for treating organic matter-containing water according to the eleventh aspect of the present invention, comprising: a scale inhibitor preparation unit that adds a scale inhibitor to the organic matter drain; and an organic matter to which the scale inhibitor is added a reverse osmosis membrane separation device that separates the water into a permeated water and concentrated water; and a pH adjustment unit that adjusts the pH of the organic wastewater supplied to the reverse osmosis membrane separation device to 9.5 or more; wherein the ozone is added to the concentrated water An oxidation treatment unit for oxidizing the concentrated water.

第12項的含有機物排水的處理裝置,其特徵在於,在第11項中,所述氧化處理單元是並用臭氧和過氧化氫的促進氧化處理單元。The apparatus for treating organic matter drainage according to Item 12, characterized in that in the eleventh aspect, the oxidation treatment unit is an oxidation-oxidation treatment unit in which ozone and hydrogen peroxide are used in combination.

第13項的含有機物排水的處理裝置,其特徵在於,在第11或12項中,所述氧化處理單元的處理水的pH為5.6~8.6。The apparatus for treating organic matter drainage according to Item 13, wherein the pH of the treated water in the oxidation treatment unit is 5.6 to 8.6.

第14項的含有機物排水的處理裝置,其特徵在於,在第11或12項中,具有向所述濃縮水中添加鹼試劑、使得所述氧化處理單元中水的pH達到9.8~11的鹼添加單元。The apparatus for treating organic matter according to Item 14, wherein the item 11 or 12 has an alkali addition agent added to the concentrated water so that the pH of the water in the oxidation treatment unit reaches 9.8 to 11. unit.

第15項的含有機物排水的處理裝置,其特徵在於,在第11~14項的任一項中,具有導入所述氧化處理單元的處理水的活性碳塔。The apparatus for treating organic matter according to any one of items 11 to 14, wherein the activated carbon column is introduced into the treated water of the oxidation treatment unit.

第16項的含有機物排水的處理裝置,其特徵在於,對於第11~15項中的任一項,在所述結垢防止劑添加單元中,向所述含有機物排水中添加結垢防止劑,其量為該含有機物排水中的鈣離子的5倍重量以上。The apparatus for treating organic matter according to any one of the items 11 to 15, wherein the scale inhibitor preparation unit adds a scale inhibitor to the organic matter drain. The amount is 5 times or more by weight of the calcium ions contained in the organic matter drainage.

第17項的含有機物排水的處理裝置,其特徵在於,對於第16項,在所述結垢防止劑添加單元中,向所述含有機物排水中添加結垢防止劑,其量為該含有機物排水中的鈣離子的5~50倍重量。According to a sixth aspect of the invention, in the fouling preventing agent adding unit, the scale preventing agent is added to the organic matter draining water in an amount of the organic matter. 5 to 50 times the weight of calcium ions in the drainage.

第18項的含有機物排水的處理裝置,其特徵在於,在第11~17項的任一項中,所述反滲透膜分離裝置的反滲透膜是具有在1.47MPa、25℃、pH為7的條件下將1500mg/L的食鹽水進行反滲透膜分離處理時的鹽排除率為95%以上的脫鹽性能的聚乙烯醇系低污染用反滲透膜。The apparatus of claim 18, wherein the reverse osmosis membrane of the reverse osmosis membrane separation apparatus has a reverse osmosis membrane at 1.47 MPa, 25 ° C, and a pH of 7 The polyvinyl alcohol-based low-pollution reverse osmosis membrane having a desalination performance of 95% or more in the case of performing reverse osmosis membrane separation treatment of 1500 mg/L of saline solution under the conditions of the reverse osmosis membrane.

第19項的含有機物排水的處理裝置,其特徵在於,對於第11~18項中的任一項,在所述pH調整單元中,將所述含有機物排水的pH調整到10.5~12。The apparatus for treating organic matter according to any one of items 11 to 18, wherein the pH of the organic matter-containing water is adjusted to 10.5 to 12 in the pH adjusting unit.

第20項的含有機物排水的處理裝置,其特徵在於,在第11~19項的任一項中,裝備將供給到所述結垢防止劑添加單元的含有機物排水進行陽離子交換處理的陽離子交換塔。According to a ninth aspect of the present invention, in the apparatus of claim 11, the cation exchange for the cation exchange treatment of the organic matter drainage supplied to the scale inhibitor addition unit tower.

根據本發明的含有機物排水的處理方法以及處理裝置,將從電子設備製造工廠、其他各種領域排出的含有高濃度至低濃度有機物的排水、特別是含有非離子性界面活性劑的排水用RO膜分離裝置進行處理、回收時,防止RO膜分離裝置內因有機物在膜面吸附所導致的通量降低、生物污染而長期進行穩定處理的同時,可以將水中TOC濃度有效地降低而得到高水質的處理水。並且,還可以容易且有效地處理RO濃縮水中包括結垢防止劑的有機物質,來減輕對後續排水處理製程的負荷。According to the method and the apparatus for treating organic matter-containing water according to the present invention, the wastewater containing the high-concentration to low-concentration organic matter discharged from the electronic equipment manufacturing plant and various other fields, particularly the RO membrane for drainage containing the nonionic surfactant When the separation device performs the treatment and recovery, the RO membrane separation device can prevent the flux from being lowered due to the adsorption of organic substances on the membrane surface, and the bio-contamination can be stably treated for a long period of time, and the TOC concentration in the water can be effectively reduced to obtain a high-quality treatment. water. Moreover, it is also possible to easily and efficiently treat the organic substance including the scale inhibitor in the RO concentrated water to reduce the load on the subsequent drainage treatment process.

即,在本發明中,由於向RO給水中添加結垢防止劑、並將pH調整到9.5以上之後向RO膜分離裝置通水,如前所述,可以抑制RO膜分離裝置中的生物污染、並抑制因結垢導致的膜面堵塞。In other words, in the present invention, since the scale inhibitor is added to the RO feed water and the pH is adjusted to 9.5 or more, water is supplied to the RO membrane separation device, and as described above, the biological contamination in the RO membrane separation device can be suppressed. And inhibit the membrane surface blockage caused by scaling.

另外,這樣,藉由將向RO給水中添加結垢防止劑而得到的RO濃縮水進行臭氧處理,可以有效地氧化分解除去包括來自於RO濃縮水中結垢防止劑的COD成分的、濃縮水中的有機物質(TOC)。並且,與生物處理比較,利用臭氧進行的氧化處理的反應速度快,所以可以將裝置小型化,可以使裝置的設置空間減小。In addition, by performing ozone treatment on the RO concentrated water obtained by adding the scale inhibitor to the RO water supply, the oxidative decomposition and removal of the concentrated water including the COD component derived from the scale inhibitor in the RO concentrated water can be effectively carried out. Organic matter (TOC). Further, since the reaction speed by the oxidation treatment by ozone is faster than that of the biological treatment, the apparatus can be downsized, and the installation space of the apparatus can be reduced.

本發明所述的臭氧氧化處理,可以是並用臭氧和過氧化氫的促進氧化處理(第2,11項)。The ozone oxidation treatment according to the present invention may be a combined oxidation treatment with ozone and hydrogen peroxide (Items 2 and 11).

在臭氧氧化處理、或者並用臭氧和過氧化氫的促進氧化處理中,濃縮水中的TOC與來自於臭氧或過氧化氫的羥基自由基反應,首先變成有機酸那樣的氧化合物。由於生成有機酸而引起被處理水的pH降低,所以在該pH降低的狀態下即使繼續直接添加臭氧等,臭氧等的反應性也降低。因此,為了進一步將TOC分解除去,必須添加大量的臭氧。因此,為了防止這樣的因pH降低而導致的反應性降低,通常,需要向臭氧氧化處理的原水中添加鹼試劑,使pH呈鹼性。In the ozone oxidation treatment or the combined oxidation treatment of ozone and hydrogen peroxide, the TOC in the concentrated water reacts with a hydroxyl radical derived from ozone or hydrogen peroxide to first become an oxygen compound such as an organic acid. Since the pH of the water to be treated is lowered by the formation of the organic acid, the reactivity of ozone or the like is lowered even if ozone or the like is continuously added in a state where the pH is lowered. Therefore, in order to further decompose and remove the TOC, it is necessary to add a large amount of ozone. Therefore, in order to prevent such a decrease in reactivity due to a decrease in pH, it is usually necessary to add an alkali reagent to the raw water of the ozone oxidation treatment to make the pH alkaline.

在本發明中,對於將調整到pH 9.5以上的高pH值的含有機物排水用RO膜分離處理而得到的高pH的RO濃縮水來說,由於應用這種臭氧氧化處理或者促進氧化處理,所以可以不需要添加用於防止這樣的因生成有機酸所導致的pH降低而導致的反應性降低的鹼試劑。In the present invention, the high-concentration RO concentrated water obtained by separating and treating the high-pH organic membrane-containing RO membrane adjusted to a pH of 9.5 or higher is subjected to such ozone oxidation treatment or oxidation treatment. It is not necessary to add an alkali reagent for preventing such a decrease in reactivity due to a decrease in pH caused by the formation of an organic acid.

但是,該pH鹼性的濃縮水,在臭氧氧化處理或者促進氧化處理中,因生成有機酸而導致pH降低,pH達到5.6~8.6左右的pH中性範圍時,由於反應難以進行,所以pH不會進一步降低,結果可以穩定地得到中性的處理水。該pH中性的處理水可以不進行pH調整,直接排放(第3,13項)。However, in the ozone-concentrated concentrated water, in the ozone oxidation treatment or the oxidation-promoting treatment, the pH is lowered by the formation of the organic acid, and when the pH reaches a pH neutral range of about 5.6 to 8.6, the reaction is difficult to proceed, so the pH is not It will be further reduced, and as a result, neutral treated water can be stably obtained. The pH-neutral treated water can be directly discharged without pH adjustment (items 3 and 13).

但是,在本發明中,對於臭氧氧化處理或者促進氧化處理中的水的pH來說,即使生成有機酸pH也不降低,在臭氧氧化處理或者促進氧化處理之前,向濃縮水中添加鹼試劑,使得達到臭氧或羥基自由基的反應性高的、pH9.8~11左右的鹼性範圍,由此可以促進氧化反應,使用少量臭氧就可以有效地分解除去TOC(第4,14項)。However, in the present invention, the pH of the water in the ozone oxidation treatment or the oxidation treatment is not lowered even if the pH of the organic acid is formed, and the alkali reagent is added to the concentrated water before the ozone oxidation treatment or the oxidation treatment is promoted. When the ozone or hydroxyl radical is highly reactive and has a basic pH of about 9.8 to 11, the oxidation reaction can be promoted, and the TOC can be efficiently decomposed and removed using a small amount of ozone (items 4 and 14).

這樣的臭氧氧化處理或者促進氧化處理後,藉由將氧化處理水用活性碳處理,可以除去處理水中殘留的氧化劑(臭氧、過氧化氫)(第5,15項)。藉由這種活性碳處理,也可以除去殘留於水中的TOC。After such an ozone oxidation treatment or an oxidation treatment is promoted, the oxidizing agent (ozone, hydrogen peroxide) remaining in the treated water can be removed by treating the oxidized water with activated carbon (Items 5 and 15). The TOC remaining in water can also be removed by this activated carbon treatment.

在本發明中,向含有機物排水中添加結垢防止劑的量過少時,則得不到充分的結垢防止效果,因此向含有機物排水中添加結垢防止劑的量較佳為RO給水中的鈣離子的5倍重量以上(第6,16項)。In the present invention, when the amount of the scale inhibitor added to the organic-containing wastewater is too small, a sufficient scale preventing effect cannot be obtained. Therefore, the amount of the scale-preventing agent added to the organic-containing wastewater is preferably RO water supply. More than 5 times the weight of calcium ions (items 6, 16).

另外,在本發明中,即使在該結垢防止劑是鈉鹽等鹽的情況下,結垢防止劑的添加量也是以酸的形式換算得到的值。In the present invention, even when the scale inhibitor is a salt such as a sodium salt, the amount of the scale inhibitor added is a value obtained by converting the acid.

另外,在本發明中,特別是作為RO膜,較佳使用如下的RO膜進行RO膜分離處理:具有在1.47MPa、25℃、pH為7的條件下將1500mg/L的食鹽水進行RO膜分離處理時的鹽排除率(以下簡稱「鹽排除率」)為95%以上的脫鹽性能的聚乙烯醇系低污染用RO膜(第8,18項)。較佳使用這樣的低污染用RO膜的理由如下。Further, in the present invention, in particular, as the RO membrane, it is preferred to carry out an RO membrane separation treatment using an RO membrane having an RO membrane of 1500 mg/L of saline at 1.47 MPa, 25 ° C, and pH 7; The salt rejection rate (hereinafter referred to as "salt elimination rate") at the time of the separation treatment is a polyvinyl alcohol-based low-pollution RO membrane having a desalting performance of 95% or more (Items 8 and 18). The reason why such a low-pollution RO membrane is preferably used is as follows.

即,上述低污染用RO膜與通常使用的芳香族聚醯胺膜相比,由於消除膜表面的帶電性,使親水性提高,因而在耐污染性方面非常優異。但是,相對含有大量非離子性界面活性劑的水,其耐污染性效果降低,隨著時間推移通量降低。In other words, the RO film for low-pollution is superior in the anti-contamination property because the chargeability of the surface of the film is improved and the hydrophilicity is improved as compared with the aromatic polyimide film which is generally used. However, the water-repellent effect is reduced with respect to water containing a large amount of nonionic surfactant, and the flux decreases with time.

另一方面,在本發明中,藉由將RO給水的pH調整到9.5以上,有可能使RO膜通量降低的非離子性界面活性劑從膜面脫附,所以即使在使用通常使用的芳香族聚醯胺膜的情況下,也可以抑制通量的極度降低。但是,RO給水中的非離子性界面活性劑濃度高時,其效果降低,長期使用導致通量降低。On the other hand, in the present invention, by adjusting the pH of the RO feed water to 9.5 or more, it is possible to desorb the nonionic surfactant having a reduced RO membrane flux from the film surface, so even if the commonly used aroma is used In the case of a polyamide membrane, it is also possible to suppress an extreme decrease in flux. However, when the concentration of the nonionic surfactant in the RO feed water is high, the effect is lowered, and the long-term use causes a decrease in the flux.

因此,在本發明中,為了解決這樣的問題,較佳組合上述具有特定脫鹽性能的聚乙烯醇系低污染用RO膜、和將RO給水的pH調整到9.5以上進行通水的條件,由此,即使對於含有高濃度非離子性界面活性劑的RO給水,也不引起通量降低,可以長期進行穩定的工作。Therefore, in the present invention, in order to solve such a problem, it is preferable to combine the above-described polyvinyl alcohol-based low-pore RO membrane having specific desalting performance and the condition that the pH of the RO feed water is adjusted to 9.5 or more to pass water. Even for RO feed water containing a high concentration of nonionic surfactant, it does not cause a decrease in flux, and stable operation can be performed for a long period of time.

在本發明中,為了進行更有效的處理,較佳採用以下條件。In the present invention, in order to perform more efficient processing, the following conditions are preferably employed.

(1)RO給水的pH較佳調整到10.5以上,特別是調整到10.5~12(第9,19項)。(1) The pH of the RO feed water is preferably adjusted to above 10.5, especially to 10.5~12 (Items 9, 19).

(2)結垢防止劑的添加量為鈣離子濃度的5~50倍量(第7,17項)。(2) The amount of the scale inhibitor is 5 to 50 times the calcium ion concentration (items 7, 17).

(3)RO給水的鈣離子濃度高時,作為添加結垢防止劑的前處理,進行陽離子交換處理,除去鈣(第10,20項)。(3) When the calcium ion concentration of the RO feed water is high, as a pretreatment for adding a scale inhibitor, a cation exchange treatment is performed to remove calcium (Items 10 and 20).

以下參照附圖詳細說明本發明的含有機物排水的處理方法以及處理裝置的實施方式。Hereinafter, embodiments of the method and apparatus for treating organic matter containing water of the present invention will be described in detail with reference to the accompanying drawings.

圖1是表示本發明的含有機物排水的處理方法以及處理裝置的實施方式的系統圖。圖中,P1 、P2 、P3 是泵。Fig. 1 is a system diagram showing an embodiment of a method and a processing apparatus for containing organic matter drainage according to the present invention. In the figure, P 1 , P 2 , and P 3 are pumps.

在圖1中,向經原水槽1導入的原水(含有機物排水)中添加結垢防止劑後,添加鹼試劑將pH調整到9.5以上,然後,導入到RO膜分離裝置2進行RO膜分離處理。In Fig. 1, after the scale inhibitor is added to the raw water (containing the organic matter drain) introduced through the raw water tank 1, the pH is adjusted to 9.5 or more by adding an alkali reagent, and then introduced into the RO membrane separation device 2 for RO membrane separation treatment. .

作為向原水中添加的結垢防止劑,較佳使用在鹼範圍解離後容易與金屬離子形成錯合物的乙二胺四乙酸(EDTA)或氨三乙酸(NTA)等螯合類結垢防止劑,但是,除此之外,還可以使用(甲基)丙烯酸聚合物及其鹽、馬來酸聚合物及其鹽等低分子量聚合物,乙二胺四亞甲基膦酸及其鹽、羥基亞乙基二膦酸及其鹽、次氮基三亞甲基膦酸及其鹽、膦醯基丁烷三羧酸及其鹽等的膦酸以及膦酸鹽,六偏磷酸及其鹽、三聚磷酸及其鹽等的無機聚合磷酸以及無機聚合磷酸鹽等。這些結垢防止劑可以單獨使用1種,也可以並用2種以上。As a scale inhibitor which is added to raw water, it is preferable to use a chelate-type scale inhibitor such as ethylenediaminetetraacetic acid (EDTA) or ammonia triacetic acid (NTA) which easily forms a complex with metal ions after dissociation in the alkali range. However, in addition to this, it is also possible to use (meth)acrylic acid polymers and salts thereof, low molecular weight polymers such as maleic acid polymers and salts thereof, ethylenediaminetetramethylenephosphonic acid and salts thereof, and hydroxyl groups. Phosphonic acid and phosphonates of ethylene diphosphonic acid and its salts, nitrilotrimethylene phosphonic acid and its salts, phosphinium butane tricarboxylic acid and its salts, hexametaphosphoric acid and its salts, three Inorganic polymeric phosphoric acid such as polyphosphoric acid and its salt, and inorganic polymeric phosphate. These scale inhibitors may be used alone or in combination of two or more.

在本發明中,結垢防止劑的添加量較佳為原水(添加有結垢防止劑的水)中的鈣離子濃度的5倍重量以上。結垢防止劑的添加量不足原水中的鈣離子濃度的5倍重量時,不能充分獲得結垢防止劑的添加效果。由於過量添加結垢防止劑從藥劑的成本方面考慮較為不佳,所以較佳為原水中的鈣離子濃度的5~50倍重量。In the present invention, the amount of the scale inhibitor to be added is preferably 5 times or more by weight of the calcium ion in the raw water (water to which the scale inhibitor is added). When the amount of the scale inhibitor is less than 5 times the weight of the calcium ion in the raw water, the effect of adding the scale inhibitor cannot be sufficiently obtained. Since the excessive addition of the scale inhibitor is not preferable from the viewpoint of the cost of the medicament, it is preferably 5 to 50 times the weight of the calcium ion in the raw water.

添加了結垢防止劑的原水,接著添加鹼試劑將pH調整到9.5以上,較佳為10以上,更佳為10.5~12,例如將pH調整到10.5~11後,導入到RO膜分離裝置2。作為在此使用的鹼試劑,是氫氧化鈉、氫氧化鉀等,只要是能將原水的pH調整到9.5以上的無機系鹼試劑就可以,沒有特別的限定。The raw water to which the scale inhibitor is added is added, and then the pH is adjusted to 9.5 or more, preferably 10 or more, more preferably 10.5 to 12 by adding an alkali reagent. For example, after adjusting the pH to 10.5 to 11, the membrane is introduced into the RO membrane separation device 2 . The alkali reagent to be used herein is, for example, sodium hydroxide, potassium hydroxide or the like, and is not particularly limited as long as it can adjust the pH of the raw water to 9.5 or more.

作為RO膜分離裝置2的RO膜是具有耐鹼性的物質,例如,可以舉出聚醚醯胺複合膜、聚乙烯醇複合膜、芳香族聚醯胺膜等,但是,根據前述的理由,較佳使用鹽排除率為95%以上的聚乙烯醇系低污染用RO膜。該RO膜可以是螺旋型、中空絲型、管狀型等任意型式的膜。The RO membrane as the RO membrane separation device 2 is a substance having alkali resistance, and examples thereof include a polyether guanamine composite membrane, a polyvinyl alcohol composite membrane, and an aromatic polyamide membrane. However, for the reasons described above, It is preferable to use a polyvinyl alcohol-based low-pore RO membrane having a salt rejection of 95% or more. The RO membrane may be any type of membrane such as a spiral type, a hollow fiber type, or a tubular type.

對於RO膜分離裝置2的透過水,接著添加酸將pH調整到4~8,根據需要進一步實施活性碳處理等之後,被再利用或者排放。作為在此使用的酸,沒用特別的限定,可以舉出鹽酸、硫酸等無機酸。The permeated water of the RO membrane separation device 2 is adjusted to pH 4 to 8 by adding an acid, and if it is further subjected to activated carbon treatment or the like as needed, it is reused or discharged. The acid to be used herein is not particularly limited, and examples thereof include inorganic acids such as hydrochloric acid and sulfuric acid.

另一方面,RO膜分離裝置2的濃縮水被儲存在RO濃縮水槽3中之後,根據需要添加過氧化氫(H2 O2 )和/或鹼試劑之後,送到臭氧反應塔4進行氧化處理。On the other hand, after the concentrated water of the RO membrane separation device 2 is stored in the RO concentration tank 3, hydrogen peroxide (H 2 O 2 ) and/or an alkali reagent are added as needed, and then sent to the ozone reaction tower 4 for oxidation treatment. .

不一定必須向濃縮水添加過氧化氫,但是,藉由添加過氧化氫,可以利用產生比臭氧的氧化力更強的羥基自由基來提高氧化分解效率,可以實現臭氧添加量的進一步減少,所以較佳添加過氧化氫。It is not always necessary to add hydrogen peroxide to the concentrated water. However, by adding hydrogen peroxide, it is possible to increase the oxidative decomposition efficiency by generating a hydroxyl radical which is stronger than the oxidizing power of ozone, and it is possible to further reduce the amount of ozone added. Hydrogen peroxide is preferably added.

過氧化氫添加的位置,可以在濃縮水與臭氧接觸之前,也可以在鹼試劑的添加之後。過氧化氫的添加如圖1所示,較佳向濃縮水的輸送管道進行管線注入,但是,在這種情況下,較佳設置管線攪拌器(line mixer)那樣的攪拌單元。The position at which hydrogen peroxide is added may be either before the concentrated water is contacted with ozone or after the addition of the alkali reagent. The addition of hydrogen peroxide is preferably carried out in a line to the concentrated water delivery line as shown in Fig. 1. However, in this case, a stirring unit such as a line mixer is preferably provided.

另外,關於過氧化氫的添加量沒有特別的限制,根據濃縮水的水質、所要求的處理水水質等進行適當決定,通常相對於濃縮水中的TOC為1~10倍重量左右。In addition, the amount of the hydrogen peroxide to be added is not particularly limited, and is appropriately determined depending on the water quality of the concentrated water, the required treated water quality, and the like, and is usually about 1 to 10 times the weight of the TOC in the concentrated water.

作為臭氧反應塔4,只要能維持臭氧或羥基自由基的反應性高的鹼性範圍、並使濃縮水有效地吸收臭氧而使反應進行,就沒有特別的限定,可以是如圖1所示,從設置在反應塔4上部的散水板5散佈濃縮水,將從臭氧產生機6輸送的臭氧通過塔下部的散氣管7散氣的型式,除此之外,還可以是具有機械式攪拌機的開放水槽。另外,還可以是設置在管道的管線攪拌器或渦流泵那樣的流路內臭氧供給單元。但是,為了使臭氧和濃縮水充分接觸,使濃縮水中的TOC高度地氧化反應,較佳設置反應槽。The ozone reaction column 4 is not particularly limited as long as it can maintain the alkaline range in which the reactivity of ozone or hydroxyl radicals is high, and the concentrated water absorbs ozone efficiently, and the reaction proceeds, as shown in FIG. The concentrated water is dispersed from the water-spreading plate 5 provided in the upper portion of the reaction tower 4, and the ozone transported from the ozone generator 6 is diffused through the diffusing pipe 7 at the lower portion of the tower, and may be opened by a mechanical mixer. sink. Further, it may be an in-flow ozone supply unit such as a line agitator or a vortex pump provided in the pipe. However, in order to bring the ozone and the concentrated water into contact sufficiently to cause the TOC in the concentrated water to be highly oxidized, it is preferred to provide a reaction vessel.

在本發明中,藉由向導入到臭氧反應塔4的RO濃縮水或者向臭氧反應塔4中添加鹼試劑,使得該臭氧反應塔4內的水或者臭氧反應塔4的流出水的pH達到9~12、更較佳達到9.8~11,由此可以促進利用臭氧進行的氧化反應。該調整的pH值不足9時,不能充分獲得因添加鹼試劑所致的提高氧化分解效率的效果。然而,該pH值過高時,處理水的pH變高,對於其後的生物處理或者排放都是較為不佳的。In the present invention, the pH of the water in the ozone reaction column 4 or the effluent water of the ozone reaction column 4 reaches 9 by the addition of the alkali reagent to the RO concentrated water introduced into the ozone reaction column 4 or to the ozone reaction column 4. ~12, more preferably 9.8~11, thereby promoting the oxidation reaction using ozone. When the adjusted pH value is less than 9, the effect of improving the oxidative decomposition efficiency due to the addition of the alkali reagent cannot be sufficiently obtained. However, when the pH is too high, the pH of the treated water becomes high, which is relatively unfavorable for subsequent biological treatment or discharge.

作為用於調整該pH的鹼試劑,可以使用氫氧化鈉、氫氧化鉀等無機類鹼試劑。As the alkali reagent for adjusting the pH, an inorganic base reagent such as sodium hydroxide or potassium hydroxide can be used.

但是,該鹼試劑不一定必須添加,如前所述,由於本發明所述的RO濃縮水通常為pH10~12左右的高pH值,即使將其直接供給於臭氧氧化處理或者促進氧化處理,也能得到充分的反應效率。於是,在這種情況下,得到pH為5.6~8.6左右的中性的處理水,該處理水可以直接排放,或者即使是後續有生物處理製程的情況,也不特別對其進行pH調整,可以直接供於生物處理。However, the alkali reagent is not necessarily required to be added. As described above, the RO concentrated water of the present invention usually has a high pH of about pH 10 to 12, and even if it is directly supplied to the ozone oxidation treatment or the oxidation treatment, Can get sufficient reaction efficiency. Therefore, in this case, a neutral treatment water having a pH of about 5.6 to 8.6 is obtained, and the treated water can be directly discharged, or even in the case of a subsequent biological treatment process, the pH adjustment is not particularly performed. Directly for biological treatment.

作為臭氧的添加方法也沒有特別的限定,如圖1所示,可以依照如下方法進行:將來自臭氧產生機6的臭氧在臭氧反應塔4內通過散氣管7散氣的方法或用噴射器注入的方法等常用方法。另外,也可以使用RO透過水等將臭氧溶解於其中,作為臭氧水來添加。The method of adding ozone is not particularly limited, and as shown in FIG. 1, it can be carried out in such a manner that ozone from the ozone generator 6 is diffused in the ozone reaction column 4 through the diffusing pipe 7 or injected by an ejector. Common methods such as methods. Further, it is also possible to use ozone to dissolve ozone therein by water or the like, and to add it as ozone water.

臭氧的添加量,根據濃縮水的水質、有無並用過氧化氫及其添加量的不同而異,但是,通常相對於濃縮水的TOC,為1~50倍重量左右。The amount of ozone added varies depending on the quality of the concentrated water and the amount of hydrogen peroxide added thereto, and is usually about 1 to 50 times the weight of the TOC of the concentrated water.

在圖1中,來自於臭氧反應塔4的排放水被導入到活性碳塔8,將殘留的臭氧或過氧化氫除去後,作為處理水排出到系統外,排放或者進一步進行生物處理。該活性碳塔8中的處理條件,根據臭氧反應塔4的流出水中臭氧或過氧化氫的殘留量進行適當決定。藉由該活性碳處理,可以將殘留在臭氧處理水中的TOC進一步除去。In Fig. 1, the discharged water from the ozone reaction column 4 is introduced into the activated carbon column 8, and after the residual ozone or hydrogen peroxide is removed, it is discharged as treated water to the outside of the system, discharged or further subjected to biological treatment. The treatment conditions in the activated carbon column 8 are appropriately determined depending on the residual amount of ozone or hydrogen peroxide in the effluent water of the ozone reaction column 4. The TOC remaining in the ozone-treated water can be further removed by the activated carbon treatment.

如此得到的處理水,在TOC濃度被充分降低的情況下,可以直接或者根據需要添加酸調整pH後排放。另外,在處理水的TOC沒有被充分降低的情況下,可以與其他排水混合後送到排水處理製程進行處理,或者可以將其向去離子裝置通水而進一步將TOC除去。The treated water thus obtained can be discharged after adjusting the pH directly or as needed, in the case where the TOC concentration is sufficiently lowered. Further, in the case where the TOC of the treated water is not sufficiently lowered, it may be mixed with other drains and sent to a wastewater treatment process for treatment, or it may be passed to the deionization apparatus to further remove the TOC.

在圖1中,設置離子交換塔9作為去離子裝置。作為去離子裝置,可以使用離子交換裝置、反滲透膜裝置、電再生式去離子裝置等。作為離子交換裝置可以是以混合狀態填充有陽離子交換樹脂和陰離子交換樹脂的混床式離子交換塔,也可以是將兩種樹脂填充於各塔的2床3塔式、4床5塔式脫鹽裝置。將活性碳塔流出水向去離子裝置通水,則水中的離子性TOC被除去,可以得到幾乎不含TOC的處理水。可以將該處理水排放,也可以回收再使用。In Fig. 1, an ion exchange column 9 is provided as a deionization device. As the deionization device, an ion exchange device, a reverse osmosis membrane device, an electric regenerative deionization device, or the like can be used. The ion exchange apparatus may be a mixed bed type ion exchange column in which a cation exchange resin and an anion exchange resin are mixed in a mixed state, or a 2 bed 3 column type, 4 bed 5 column type desalination in which two kinds of resins are filled in each column. Device. When the water flowing out of the activated carbon column is passed to the deionization apparatus, the ionic TOC in the water is removed, and treated water containing almost no TOC can be obtained. The treated water can be discharged or recycled.

根據本發明,如圖1所示,藉由向原水中添加規定量的結垢防止劑,並將pH調整到9.5以上後進行RO膜分離處理,可以不引起RO膜分離裝置中的通量降低,可以長期進行穩定的處理,得到TOC被高度除去的高水質處理水。另外,將藉由該RO膜分離處理而得到的RO濃縮水進行臭氧氧化處理或者促進氧化處理,從而可以將濃縮水中的有機物質高度地氧化分解除去。According to the present invention, as shown in Fig. 1, by adding a predetermined amount of the scale inhibitor to the raw water and adjusting the pH to 9.5 or more and then performing the RO membrane separation treatment, the flux in the RO membrane separation device can be prevented from being lowered. The stable treatment can be carried out for a long period of time, and high-quality water treated with highly removed TOC is obtained. Further, the RO concentrated water obtained by the RO membrane separation treatment is subjected to ozone oxidation treatment or oxidation treatment, whereby the organic substance in the concentrated water can be highly oxidatively decomposed and removed.

圖1是表示本發明實施方式的一個例子,只要不超過本發明的宗旨,不限於任何圖示的方式。在圖1中,向原水中添加結垢防止劑之後,添加鹼試劑來進行pH調整,但是,也可以向原水添加鹼試劑進行pH調整之後,添加結垢防止劑,另外,還可以同時進行pH調整和結垢防止劑的添加。此外,用RO膜分離裝置的處理不限於1段處理,可以是2段以上的多段處理。另外,對於從電子設備製造工廠排出的含有TOC的排水等來說,基本上很少有成為結垢原因的鈣離子等混入的情況,但是原水中混入鈣離子等時,可以在添加結垢防止劑之前,設置除去鈣離子的陽離子交換塔,預先除去鈣。進而,可以設置用於調整pH或添加結垢防止劑的混合槽。Fig. 1 shows an example of an embodiment of the present invention, and is not limited to any of the illustrated embodiments as long as it does not exceed the gist of the present invention. In Fig. 1, after adding a scale inhibitor to raw water, an alkali reagent is added to adjust the pH. However, an alkali agent may be added to the raw water to adjust the pH, and then a scale inhibitor may be added, and pH adjustment may be simultaneously performed. And the addition of scale inhibitors. Further, the treatment by the RO membrane separation device is not limited to one-stage treatment, and may be two-stage or more multi-stage treatment. In addition, in the case of the TOC-containing drain or the like discharged from the electronic equipment manufacturing plant, there are few cases in which calcium ions or the like which cause scaling are mixed. However, when calcium ions or the like are mixed in the raw water, scaling prevention can be added. Before the agent, a cation exchange column for removing calcium ions is provided to remove calcium in advance. Further, a mixing tank for adjusting the pH or adding a scale inhibitor may be provided.

另外,處理RO濃縮水時,在用RO膜分離裝置進行2段以上的多段處理的情況下,可以只對第1段的RO膜分離裝置的RO濃縮水進行如此的氧化處理,也可以對其他RO濃縮水進行同樣的處理。Further, when the RO concentrated water is treated, when the RO membrane separation apparatus performs the multistage treatment of two or more stages, the RO concentrated water of the RO membrane separation apparatus of the first stage may be subjected to such oxidation treatment, or may be used for other treatments. The RO concentrated water was subjected to the same treatment.

另外,除去在臭氧氧化處理或者促進氧化處理中殘留的臭氧或過氧化氫不限於活性碳塔,可以藉由添加亞硫酸氫鈉等還原劑來進行。但是,在能除去殘留TOC方面,較佳為活性碳處理。Further, the ozone or hydrogen peroxide remaining in the ozone oxidation treatment or the oxidation treatment is not limited to the activated carbon column, and may be carried out by adding a reducing agent such as sodium hydrogen sulfite. However, in terms of removing residual TOC, activated carbon treatment is preferred.

在本發明中,供給於臭氧氧化處理或者促進氧化處理的RO濃縮水,較佳含有難以生物降解的結垢防止劑或界面活性劑等TOC,本發明的臭氧氧化處理或者促進氧化處理有效地發揮作用。但是,也可以含有容易生物降解的結垢防止劑,還可以含有結垢防止劑以外的有機物,無論哪一種情況,藉由臭氧將它們氧化分解,可以減輕後續生物處理的負荷,使曝氣槽的設置面積減少。或者可以得到水質良好的排放水。In the present invention, the RO concentrated water supplied to the ozone oxidation treatment or the oxidation-promoting treatment preferably contains a TOC which is a biodegradable scale inhibitor or a surfactant, and the ozone oxidation treatment or the oxidation treatment of the present invention is effectively exerted. effect. However, it may contain a scale inhibitor which is easily biodegradable, and may contain organic substances other than the scale inhibitor. In either case, they are oxidatively decomposed by ozone, thereby reducing the load of subsequent biological treatment and making the aeration tank The set area is reduced. Or you can get good water discharge.

【實施例】[Examples]

以下舉出實施例更具體地說明本發明。The invention will be more specifically described below by way of examples.

實施例1Example 1

把以界面活性劑為主體的TOC濃度為5mg/L、鈣離子濃度為10mg/L的排水作為原水,用圖1所示的裝置進行處理。首先,向原水中添加EDTA系結垢防止劑(乙二胺四乙酸鈉鹽),其量為原水的鈣離子濃度的5倍重量,然後,添加NaOH使pH達到10.5,用RO膜分離裝置(日東電工制的低壓芳香族聚醯胺型RO膜「ES-10」)在通水量80L/h、回收率75%的條件下進行RO膜分離處理。The drainage having a TOC concentration of 5 mg/L and a calcium ion concentration of 10 mg/L mainly composed of a surfactant was used as raw water, and was treated by the apparatus shown in Fig. 1 . First, an EDTA-based scale inhibitor (ethylenediaminetetraacetic acid sodium salt) is added to the raw water in an amount of 5 times the calcium ion concentration of the raw water, and then NaOH is added to bring the pH to 10.5, using an RO membrane separation device (Nitto The low-pressure aromatic polyamine type RO membrane "ES-10" manufactured by the electrician was subjected to RO membrane separation treatment under the conditions of a water flow rate of 80 L/h and a recovery rate of 75%.

向藉由該RO膜分離處理而得到的RO濃縮水中添加相對於TOC為1.2倍量的過氧化氫後,添加相對於TOC為10倍量的臭氧。然後,在通水SV10/h的條件下向活性碳塔通水,進而在通水SV20m/h的條件下將活性碳塔的流出水向離子交換塔通水,得到處理水,所述離子交換塔以1:1(重量比)混合填充有作為陽離子交換樹脂的DIAION SKlB(三菱化學株式會社製品)和作為陰離子交換樹脂的Lewatit M500(BAYER公司製品)。To the RO concentrated water obtained by the RO membrane separation treatment, hydrogen peroxide was added in an amount of 1.2 times the TOC, and then ozone was added in an amount of 10 times the TOC. Then, water is passed through the activated carbon column under the condition of passing water SV10/h, and the effluent water of the activated carbon column is passed through the ion exchange column under the condition of flowing water SV20m/h to obtain treated water, and the ion exchange is performed. The column was mixed with DIAION SK1B (product of Mitsubishi Chemical Corporation) as a cation exchange resin and Lewatit M500 (product of BAYER Co., Ltd.) as an anion exchange resin in a 1:1 (by weight) mixture.

研究該處理中RO濃縮水的pH及TOC濃度,和臭氧處理水(臭氧反應塔的流出水)的pH、TOC濃度及TOC除去率,及活性碳塔流出水的pH、TOC濃度及TOC除去率,以及處理水(離子交換塔的流出水)的pH、TOC濃度、TOC除去率,結果表示在表1中。The pH, TOC concentration of the RO concentrated water and the pH, TOC concentration and TOC removal rate of the ozone treated water (the effluent water of the ozone reaction tower), and the pH, TOC concentration and TOC removal rate of the effluent water of the activated carbon column were studied. The pH, TOC concentration, and TOC removal rate of the treated water (the effluent water of the ion exchange column) were shown in Table 1.

實施例2Example 2

除了不向RO濃縮水添加過氧化氫以外,其餘與實施例1相同地進行處理,研究臭氧處理水(臭氧反應塔的流出水)的pH、TOC濃度及TOC除去率,和活性碳塔的流出水的pH、TOC濃度及TOC除去率,以及處理水(離子交換塔的流出水)的pH、TOC濃度、TOC除去率,結果表示在表1中。The treatment was carried out in the same manner as in Example 1 except that hydrogen peroxide was not added to the RO concentrated water, and the pH, TOC concentration, and TOC removal rate of the ozone-treated water (outflow water of the ozone reaction column) and the outflow of the activated carbon column were examined. The pH, TOC concentration, and TOC removal rate of water, and the pH, TOC concentration, and TOC removal rate of treated water (exit water of the ion exchange column) are shown in Table 1.

實施例3Example 3

除了增加鹼的添加量以使臭氧處理水的pH達到10以外,其餘與實施例1相同地進行處理,研究臭氧處理水(臭氧反應塔的流出水)的pH、TOC濃度及TOC除去率,和活性碳塔的流出水的pH、TOC濃度及TOC除去率,以及處理水(離子交換塔的流出水)的pH、TOC濃度、TOC除去率,結果表示在表1中。The pH, TOC concentration, and TOC removal rate of the ozone-treated water (outflow water of the ozone reaction column) were examined in the same manner as in Example 1 except that the amount of the alkali added was increased so that the pH of the ozone-treated water reached 10, and The pH, TOC concentration, and TOC removal rate of the effluent water of the activated carbon column, and the pH, TOC concentration, and TOC removal rate of the treated water (the effluent water of the ion exchange column) are shown in Table 1.

由表1可知,根據本發明,可以將RO濃縮水中的TOC高度地除去。As apparent from Table 1, according to the present invention, the TOC in the RO concentrated water can be highly removed.

工業上應用的可能性Industrial application possibilities

本發明可有效用於從電子設備製造領域、半導體製造領域、其他各種產業領域排出的含有高濃度至低濃度TOC的排水的排放或者回收、再利用的水處理。The present invention can be effectively applied to water treatment for discharge or recovery and reuse of drainage water containing high-concentration to low-concentration TOC discharged from the field of electronic device manufacturing, semiconductor manufacturing, and various other industrial fields.

1...原水槽1. . . Original sink

2...RO膜分離裝置2. . . RO membrane separation device

3...RO濃縮水槽3. . . RO concentrated sink

4...臭氧反應塔4. . . Ozone reaction tower

5...散水板5. . . Water board

6...臭氧產生機6. . . Ozone generator

7...散氣管7. . . Air pipe

8...活性碳塔8. . . Activated carbon tower

9...離子交換塔9. . . Ion exchange tower

P1 、P2 、P3 ...泵P 1 , P 2 , P 3 . . . Pump

圖1是表示本發明的含有機物排水的處理方法以及處理裝置的實施方式的系統圖。Fig. 1 is a system diagram showing an embodiment of a method and a processing apparatus for containing organic matter drainage according to the present invention.

1...原水槽1. . . Original sink

2...RO膜分離裝置2. . . RO membrane separation device

3...RO濃縮水槽3. . . RO concentrated sink

4...臭氧反應塔4. . . Ozone reaction tower

5...散水板5. . . Water board

6...臭氧產生機6. . . Ozone generator

7...散氣管7. . . Air pipe

8...活性碳塔8. . . Activated carbon tower

9...離子交換塔9. . . Ion exchange tower

P1 、P2 、P3 ...泵P 1 , P 2 , P 3 . . . Pump

Claims (16)

一種含有機物排水的處理方法,其特徵在於,包含以下製程:向含有機物排水中添加結垢防止劑的結垢防止劑添加製程;將添加了該結垢防止劑的含有機物排水供給到反滲透膜分離裝置,分離成透過水和濃縮水的反滲透膜分離製程;以及將供給到該反滲透膜分離裝置的含有機物排水的pH調整到9.5以上的pH調整製程;其中,具有向所述濃縮水中添加臭氧來氧化處理該濃縮水的氧化處理製程,所述氧化處理製程是並用臭氧和過氧化氫的促進氧化處理製程,其中所述過氧化氫於氧化處理之前加入所述濃縮水中,並具有向所述濃縮水中添加鹼試劑、使得所述氧化處理製程中的水的pH達到9.8~11的鹼添加製程。 A method for treating organic matter drainage, comprising the steps of: adding a scale inhibitor to a scale containing agent to the organic matter drain; and supplying the organic matter drain to which the scale inhibitor is added to the reverse osmosis a membrane separation device, which is separated into a reverse osmosis membrane separation process of permeated water and concentrated water; and a pH adjustment process for adjusting the pH of the organic-containing drainage supplied to the reverse osmosis membrane separation device to 9.5 or more; wherein An oxidation treatment process for oxidizing the concentrated water by adding ozone to the water, the oxidation treatment process is a combined oxidation treatment process using ozone and hydrogen peroxide, wherein the hydrogen peroxide is added to the concentrated water before the oxidation treatment, and has An alkali addition process is carried out by adding an alkali reagent to the concentrated water so that the pH of the water in the oxidation treatment process reaches 9.8-11. 如申請專利範圍第1項所述的含有機物排水的處理方法,其特徵在於,所述氧化處理製程的處理水的pH為5.6~8.6。 The method for treating organic matter drainage according to claim 1, wherein the pH of the treated water in the oxidation treatment process is 5.6 to 8.6. 如申請專利範圍第1項所述的含有機物排水的處理方法,其特徵在於,具有使所述氧化處理製程的處理水與活性碳接觸的活性碳處理製程。 The method for treating organic matter-containing wastewater according to claim 1, characterized in that the activated carbon treatment process for bringing the treated water of the oxidation treatment process into contact with activated carbon is provided. 如申請專利範圍第1項所述的含有機物排水的處理 方法,其特徵在於,在所述結垢防止劑添加製程中,向所述含有機物排水中添加該含有機物排水中的鈣離子5倍重量以上的結垢防止劑。 Treatment of organic matter-containing drainage as described in item 1 of the patent application scope In the method for adding a scale inhibitor, the scale inhibitor is added to the organic wastewater to be contained in an amount of 5 times by weight or more of calcium ions in the organic wastewater. 如申請專利範圍第4項所述的含有機物排水的處理方法,其特徵在於,在所述結垢防止劑添加製程中,向所述含有機物排水中添加該含有機物排水中的鈣離子5~50倍重量的結垢防止劑。 The method for treating organic matter drainage according to claim 4, wherein in the scale inhibitor preparation process, calcium ions in the organic matter-containing drainage are added to the organic-containing wastewater. 50 times the weight of the scale inhibitor. 如申請專利範圍第1項所述的含有機物排水的處理方法,其特徵在於,所述反滲透膜分離裝置的反滲透膜是具有在1.47MPa、25℃、pH為7的條件下將1500mg/L的食鹽水進行反滲透膜分離處理時的鹽排除率為95%以上的脫鹽性能的聚乙烯醇系低污染用反滲透膜。 The method for treating organic matter drainage according to claim 1, wherein the reverse osmosis membrane of the reverse osmosis membrane separation device has a pressure of 1500 mg/at at 1.47 MPa, 25 ° C, and pH 7. The sodium chloride-based low-pollution reverse osmosis membrane having a desalination performance of 95% or more in the case of the reverse osmosis membrane separation treatment of the aqueous solution of L. 如申請專利範圍第1項所述的含有機物排水的處理方法,其特徵在於,在所述pH調整製程中,將所述含有機物排水的pH調整到10.5~12。 The method for treating organic matter drainage according to claim 1, wherein in the pH adjustment process, the pH of the organic-containing drainage is adjusted to 10.5 to 12. 如申請專利範圍第1項所述的含有機物排水的處理方法,其特徵在於,在添加所述結垢防止劑之前,將所述含有機物排水進行陽離子交換處理。 The method for treating organic matter-containing wastewater according to claim 1, wherein the organic matter-containing drainage is subjected to a cation exchange treatment before the addition of the scale inhibitor. 一種含有機物排水的處理裝置,其特徵在於,具有:向含有機物排水中添加結垢防止劑的結垢防止劑添加單元;將添加了該結垢防止劑的含有機物排水分離成透過水和濃縮水的反滲透膜分離裝置;以及將供給到該反滲透膜分離裝置的含有機物排水的pH 調整到9.5以上的pH調整單元;其中,具有向所述濃縮水中添加臭氧來氧化處理該濃縮水的氧化處理單元,所述氧化處理單元是並用臭氧和過氧化氫的促進氧化處理單元,其中所述過氧化氫於氧化處理之前加入所述濃縮水中,並具有向所述濃縮水中添加鹼試劑、使得所述氧化處理單元中水的pH達到9.8~11的鹼添加單元。 A treatment device containing organic matter drainage, comprising: a scale inhibitor preparation unit for adding a scale inhibitor to an organic matter drain; and separating the organic matter drain to which the scale inhibitor is added to permeate water and concentrating a reverse osmosis membrane separation device for water; and a pH containing organic matter supplied to the reverse osmosis membrane separation device a pH adjustment unit adjusted to 9.5 or more; wherein, there is an oxidation treatment unit that adds ozone to the concentrated water to oxidize the concentrated water, and the oxidation treatment unit is a combined oxidation treatment unit using ozone and hydrogen peroxide, wherein The hydrogen peroxide is added to the concentrated water before the oxidation treatment, and has an alkali addition unit that adds an alkali reagent to the concentrated water so that the pH of the water in the oxidation treatment unit reaches 9.8 to 11. 如申請專利範圍第9項所述的含有機物排水的處理裝置,其特徵在於,所述氧化處理單元的處理水的pH為5.6~8.6。 The apparatus for treating organic matter drainage according to claim 9, wherein the pH of the treated water in the oxidation treatment unit is 5.6 to 8.6. 如申請專利範圍第9項所述的含有機物排水的處理裝置,其特徵在於,具有導入所述氧化處理單元的處理水的活性碳塔。 The apparatus for treating organic matter drainage according to claim 9, which is characterized in that the activated carbon column is provided with treated water introduced into the oxidation treatment unit. 如申請專利範圍第9項所述的含有機物排水的處理裝置,其特徵在於,在所述結垢防止劑添加單元中,向所述含有機物排水中添加該含有機物排水中的鈣離子5倍重量以上的結垢防止劑。 The apparatus for treating organic matter drainage according to claim 9, wherein the scale inhibitor addition unit adds 5 times of calcium ions in the organic-containing drainage to the organic-containing wastewater. A scale inhibitor above the weight. 如申請專利範圍第12項所述的含有機物排水的處理裝置,其特徵在於,在所述結垢防止劑添加單元中,向所述含有機物排水中添加該含有機物排水中的鈣離子5~50倍重量的結垢防止劑。 The apparatus for treating organic matter drainage according to claim 12, wherein the scale inhibitor preparation unit adds calcium ions in the organic matter-containing drainage to the organic-containing wastewater. 50 times the weight of the scale inhibitor. 如申請專利範圍第9項所述的含有機物排水的處理裝置,其特徵在於,所述反滲透膜分離裝置的反滲透膜是具有在1.47MPa、25℃、pH為7的條件下將1500mg/L 的食鹽水進行反滲透膜分離處理時的鹽排除率為95%以上的脫鹽性能的聚乙烯醇系低污染用反滲透膜。 The apparatus for treating organic matter drainage according to claim 9, wherein the reverse osmosis membrane of the reverse osmosis membrane separation device has a pressure of 1500 mg/at 1.47 MPa, 25 ° C, and pH 7. L The salt water having a desalination performance of 95% or more in the reverse osmosis membrane separation treatment is a polyvinyl alcohol-based low-pollution reverse osmosis membrane. 如申請專利範圍第9項所述的含有機物排水的處理裝置,其特徵在於,在所述pH調整單元中,將所述含有機物排水的pH調整到10.5~12。 The apparatus for treating organic matter drainage according to claim 9, wherein the pH adjusting unit adjusts the pH of the organic-containing drainage to 10.5 to 12. 如申請專利範圍第9項所述的含有機物排水的處理裝置,其特徵在於,裝備將被供給到所述結垢防止劑添加單元中的含有機物排水進行陽離子交換處理的陽離子交換塔。 The apparatus for treating organic matter drainage according to claim 9, wherein the cation exchange column containing the organic matter drainage and cation exchange treatment is supplied to the scale inhibitor addition unit.
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