TWI457180B - Showerhead - Google Patents

Description

Gas nozzle

This invention relates to a semiconductor device, and more particularly to a gas showerhead.

Semiconductor devices are commonly used in the production of semiconductor devices. A semiconductor device usually has a reaction chamber. The process gas required for the semiconductor process can flow into the reaction chamber through a gas nozzle of the reaction chamber. The first figure shows a schematic view of a conventional gas jet head 100. The conventional gas jet head 100 includes a first space 110, a second space 120, a plurality of coolant channels 130, a plurality of first gas passages 111, and a plurality of second gas passages 121.

The first space 110 is connected to the first gas channels 111; the second space 120 is connected to the second gas channels 121, wherein the process gases flowing into the first space 110 and the second space 120 respectively pass through the first gases The channel 111 and the second gas channels 121 flow into the interior of the reaction chamber. The coolant flowing into the coolant passage 130 is used to control the temperature of the conventional gas nozzle 100, thereby further controlling the temperature of the process gas passing through the first gas passages 111 and the second gas passages 121.

As shown in the first figure, the coolant channel 130, the first gas channel 111, and the second gas channel 121 are arranged in parallel, and the flow direction of the coolant and the process gas Both are perpendicular to the drawing. Therefore, when the operation is performed, the flow direction of the process gas and the flow direction of the coolant are also arranged in parallel. In addition, as shown in the first figure, the first gas passage 111 or the second gas passage 121 can only be cooled by the coolant passage 130 disposed on one side, resulting in poor cooling effect, thereby affecting the process result.

In view of the shortcomings of the prior art described above, it is necessary to provide a gas jet head which has better cooling performance for process gases.

The problem to be solved by the present invention is to provide a gas jet head which has better cooling performance for process gases.

In order to solve the above problems, the present invention provides a gas jet head comprising a body, a cover plate and a bottom plate. The cover plate is attached to the upper part of the body, and the cover plate and the body form a cooling liquid flow space; the bottom plate is attached to the lower side of the body, and the bottom plate forms a gas flow space with the body, wherein the coolant flows through the coolant flow space, and the process The gas flows through the gas flow space, and the flow direction of the coolant is substantially perpendicular to the flow direction of the process gas.

According to the gas nozzle of the present invention, the flow direction of the coolant is substantially perpendicular to the flow direction of the process gas, and the coolant flow space is located above and on both sides of the gas flow space of the process gas, and the coolant can sufficiently cool the process gas. The gas nozzle of the invention has better cooling performance for process gases.

100‧‧‧Traditional gas nozzle

110‧‧‧First space

111‧‧‧First gas passage

120‧‧‧Second space

121‧‧‧Second gas channel

130‧‧‧Solution channel

200‧‧‧ gas nozzle

210‧‧‧ body

211‧‧‧First groove

212‧‧‧First gas passage

213‧‧‧Second gas channel

214‧‧‧ Third gas passage

215‧‧‧ hole opening

217‧‧‧second groove

220‧‧‧ cover

221‧‧‧First Guide Board

230‧‧‧floor

231‧‧‧Part 1

232‧‧‧Part II

233‧‧‧Part III

280‧‧‧Coolant flow space

290‧‧‧ gas flow space

291‧‧‧First gas flow space

292‧‧‧Second gas flow space

293‧‧‧ Third gas flow space

A‧‧‧flow direction of coolant

The first figure shows a schematic view of a conventional gas nozzle.

Figure 2A is a perspective exploded view of a gas jet head in accordance with a preferred embodiment of the present invention.

Figure 2B shows a side cross-sectional view of the gas jet head in Figure 2A.

The second C diagram shows another exploded view of the gas jet head in the second A diagram.

The second D diagram shows the bottom view of the body in the second A diagram.

The second E diagram shows a top view of the body in the second A diagram.

The second F diagram shows a perspective view of the cover plate in the second A diagram.

Some embodiments of the invention are described in detail below. However, the present invention may be widely practiced in other embodiments than the following description, and the scope of the present invention is not limited by the examples, which are subject to the scope of the following patents. Further, in order to provide a clearer description and a better understanding of the present invention, the various parts of the drawings are not drawn according to their relative dimensions, and some dimensions have been exaggerated compared to other related dimensions; the irrelevant details are not fully drawn. Out, in order to make the schema simple.

Figure 2A is a perspective exploded view of a gas showerhead 200 in accordance with a preferred embodiment of the present invention. The gas nozzle 200 includes a body 210, a cover 220, and a bottom plate 230.

Figure 2B shows a side cross-sectional view of the gas jet head 200 in Figure 2A. As shown in FIG. 2B, the cover plate 220 is fitted over the body 210, and the cover plate 220 and the body 210 form a coolant flow space 280, wherein the coolant flows through the coolant flow space 280. The bottom plate 230 is attached to the lower side of the body 210. The bottom plate 230 forms a gas flow space 290 with the body 210, and the process gas flows through the gas flow space 290.

According to the embodiment, the flow direction A of the coolant is as indicated by the direction of the arrow. The flow direction of the process gas is perpendicular to the plane of the drawing, and the flow direction of the coolant is substantially perpendicular to the flow direction of the process gas. In addition, in this embodiment, the coolant flow space 280 is located above and on both sides of the gas flow space 290, and the coolant can sufficiently cool the process gas. Therefore, the gas nozzle of the present invention has better cooling performance for the process gas.

The second C diagram shows another exploded view of the gas jet head 200 in the second A diagram. In order to clearly show the structure of the gas jet head 200, the cover plate 220 is separated from the body 210. The second D diagram shows the bottom view of the body 210 in the second A diagram. As shown in the second D, the body 210 includes a first gas passage 212, a second gas passage 213, and a third gas passage 214, wherein a first gas passage 212, a second gas passage 213, and a first The three gas passages 214 are disposed under the body 210, and the plurality of openings 215 are disposed in the first gas passage 212, the second gas passage 213, and the third gas passage 214, and the process gas can enter the first through the plurality of openings 215, respectively. A gas passage 212, a second gas passage 213, and a third gas passage 214.

According to the embodiment, the first gas passage 212 and the second gas passage 213 respectively have a comb-like outer shape, and the first gas passage 212 and the second gas passage 213 respectively have a plurality of curved passages, and the curved passages of the first gas passage 212 and The curved passages of the second gas passage 213 are staggered, and the third gas passage 214 surrounds the first gas passage 212 and the second gas passage 213.

As shown in FIG. 2A, FIG. 2C, and FIG. 2D, in the embodiment, the bottom plate 230 includes a first portion 231, a second portion 232, and a third portion 233. The first portion 231 has the first portion. The gas passage 212 has a corresponding comb shape, the first portion 231 and the first gas passage 212 together form a first gas flow space 291; the second portion 232 has a comb shape corresponding to the second gas passage 213, and the second portion 232 Formed together with the second gas passage 213 The second gas flow space 292; the third portion 233 has a shape corresponding to the third gas passage 214, and the third portion 233 and the third gas passage 214 together form a third gas flow space 293. In addition, in the embodiment, the first portion 231, the second portion 232, and the third portion 233 of the bottom plate 230 can be processed by the same piece of material. Therefore, the bottom plate 230 of the embodiment has the advantages of saving materials and being easy to manufacture.

The second E diagram shows a top view of the body 210 in the second A diagram. As shown in FIG. E, the body 210 includes a plurality of first grooves 211, wherein the first grooves 211 are disposed above the body 210. In this embodiment, the first grooves 211 have a shape corresponding to the first gas passage 212 and the second gas passage 213, wherein the first grooves 211 have a curved shape to increase the disturbance of the coolant. . In addition, according to the embodiment, the body 210 may further include a plurality of second grooves 217, and the second grooves 217 have a shape corresponding to the third gas passage 214.

With the above design, the first gas channel 212, the second gas channel 213, and the third gas channel 214 are disposed under the body 210. The first groove 211 and the second groove 217 are disposed above the body 210, and the body has been utilized as much as possible. 210 all the space. Since the body 210 can be processed by the same piece of material, the body 210 of the embodiment has the advantages of simple structure and easy manufacture.

The second F diagram shows a perspective view of the cover plate 220 in the second A diagram. As shown in FIG. 2F and FIG. 2C, the cover plate 220 includes a plurality of first guiding plates 221, and the first guiding plates 221 may extend to the first grooves 211 of the body 210. In this embodiment, the guiding plates 221 have a curved outer shape, and the first guiding plates 221 have a shape corresponding to the first grooves 211. In addition, as shown in the second B and second F, the first guiding plates 221 can The coolant has a horizontal and vertical flow direction, and the first guide plates 221 have a staggered arrangement to increase the disturbance of the coolant.

With the gas jet head of the present invention, the flow direction of the coolant is substantially perpendicular to the flow direction of the process gas, and the coolant flow space 280 is located above and on both sides of the gas flow space 290 of the process gas, and the coolant can sufficiently cool the process gas. The gas nozzle of the present invention has better cooling performance for process gases.

The embodiments of the present invention are merely illustrative of the technical spirit and characteristics of the present invention, and the objects of the present invention can be understood by those skilled in the art, and the scope of the present invention cannot be limited thereto. All other equivalents and modifications of the inventions which are made without departing from the spirit of the invention are intended to be included within the scope of the invention.

200‧‧‧ gas nozzle

210‧‧‧ body

211‧‧‧First groove

217‧‧‧second groove

220‧‧‧ cover

221‧‧‧First Guide Board

230‧‧‧floor

231‧‧‧Part 1

232‧‧‧Part II

233‧‧‧Part III

Claims (13)

A gas nozzle comprises: a body; a cover plate attached to the body, the cover plate forms a coolant flow space with the body; and a bottom plate attached to the bottom of the body The bottom plate forms a gas flow space with the body; wherein a coolant flows through the coolant flow space, at least one process gas flows through the gas flow space, and the coolant flow space is located above the gas flow space and Side, and the flow direction of the coolant is substantially perpendicular to the flow direction of the process gas. The gas nozzle of claim 1, wherein the body comprises a first gas passage disposed below the body, the first gas passage having a comb shape. The gas nozzle of claim 2, wherein the body further comprises a second gas passage, wherein the second gas passage has a comb shape, and the first gas passage is interlaced with the second gas passage arrangement. The gas jet head of claim 2, wherein the bottom plate comprises a first portion having a comb-like shape corresponding to the first gas passage. The gas nozzle of claim 3, wherein the bottom plate comprises a first portion and a second portion, the first portion having a comb-shaped outer shape corresponding to the first gas passage, the second portion having The second gas passage has a corresponding comb shape. The gas nozzle of claim 3, wherein the body comprises a plurality of a first groove, the first grooves are disposed above the body, and the first grooves have a shape corresponding to the first gas channel and the second gas channel. The gas jet head of claim 6, wherein the cover plate comprises a plurality of guide plates extending to the first grooves. The gas jet head of claim 7, wherein the first guide sheets have a staggered arrangement to increase the disturbance of the coolant. The gas nozzle of claim 3, wherein the body further comprises a plurality of openings, the openings are disposed in the first gas passage and the second gas passage, and the process gas can be opened by the same The aperture enters the first gas passage and the second gas passage. The gas nozzle of claim 3, wherein the body further comprises a third gas passage surrounding the first gas passage and the second gas passage. The gas nozzle of claim 3, wherein the first gas channel and the second gas channel respectively have a plurality of curved channels, the curved channels of the first gas channel and the second gas channel The curved channels are staggered. The gas nozzle of claim 11, wherein the body comprises a plurality of first grooves, the first grooves are disposed above the body, and the first grooves have a curved shape, thereby Increase the disturbance of the coolant. The gas nozzle of claim 12, wherein the cover plate comprises a plurality of guide plates extending to the first grooves, the first guide plates having a staggered arrangement The configuration is to increase the disturbance of the coolant.