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TWI456212B - Ｔｃｐ測試裝置 - Google Patents

Ｔｃｐ測試裝置 Download PDF

Info

Publication number
TWI456212B
TWI456212B TW100117556A TW100117556A TWI456212B TW I456212 B TWI456212 B TW I456212B TW 100117556 A TW100117556 A TW 100117556A TW 100117556 A TW100117556 A TW 100117556A TW I456212 B TWI456212 B TW I456212B
Authority
TW
Taiwan
Prior art keywords
tcp
probe
contact end
pusher
pad
Prior art date
Application number
TW100117556A
Other languages
English (en)
Chinese (zh)
Other versions
TW201213819A (en
Inventor
Eiji Otsuka
Original Assignee
Tesec Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=45913312&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=TWI456212(B) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Tesec Kk filed Critical Tesec Kk
Publication of TW201213819A publication Critical patent/TW201213819A/zh
Application granted granted Critical
Publication of TWI456212B publication Critical patent/TWI456212B/zh

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2887—Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
    • G01R31/2865—Holding devices, e.g. chucks; Handlers or transport devices
    • G01R31/2867—Handlers or transport devices, e.g. loaders, carriers, trays
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N7/00—Television systems
    • H04N7/18—Closed-circuit television [CCTV] systems, i.e. systems in which the video signal is not broadcast
    • H04N7/181—Closed-circuit television [CCTV] systems, i.e. systems in which the video signal is not broadcast for receiving images from a plurality of remote sources

Landscapes

  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Environmental & Geological Engineering (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Tests Of Electronic Circuits (AREA)
TW100117556A 2010-09-21 2011-05-19 Ｔｃｐ測試裝置 TWI456212B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010210578A JP2012068032A (ja) 2010-09-21 2010-09-21 Ｔｃｐ試験装置

Publications (2)

Publication Number Publication Date
TW201213819A TW201213819A (en) 2012-04-01
TWI456212B true TWI456212B (zh) 2014-10-11

Family

ID=45913312

Family Applications (1)

Application Number Title Priority Date Filing Date
TW100117556A TWI456212B (zh) 2010-09-21 2011-05-19 Ｔｃｐ測試裝置

Country Status (4)

Country Link
JP (1) JP2012068032A (ja)
KR (1) KR101238397B1 (ja)
CN (1) CN102411122B (ja)
TW (1) TWI456212B (ja)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6001292B2 (ja) 2012-03-23 2016-10-05 株式会社日立ハイテクサイエンス エミッタの作製方法
CN103713205B (zh) * 2012-09-28 2016-10-26 名硕电脑(苏州)有限公司 电容触摸屏自动测试方法
KR101759470B1 (ko) * 2016-11-23 2017-07-19 주식회사 디이엔티 패널 점등 검사 장치
KR20220002101A (ko) * 2020-06-30 2022-01-06 도쿄엘렉트론가부시키가이샤 검사 장치 및 검사 방법
CN114088979B (zh) * 2021-12-20 2025-01-10 百及纳米科技(上海)有限公司 探针校准方法、表面测量方法以及探针控制设备

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002181889A (ja) * 2000-12-13 2002-06-26 Ando Electric Co Ltd プローブカードとｔａｂの位置決め装置
TWI247122B (en) * 2003-01-31 2006-01-11 Japan Engineering Co Ltd TCP handling device and positional deviation correcting method for the same
CN101030549A (zh) * 2006-03-03 2007-09-05 株式会社爱德万测试 Tcp处理设备以及tcp处理设备的不良冲除孔的检测方法
TW200903683A (en) * 2007-03-29 2009-01-16 Advantest Corp TCP handling apparatus
TW200902997A (en) * 2007-03-29 2009-01-16 Advantest Corp TCP handling apparatus

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4036554B2 (ja) * 1999-01-13 2008-01-23 富士通株式会社 半導体装置およびその試験方法、および半導体集積回路
JP2002107438A (ja) * 2000-09-29 2002-04-10 Ando Electric Co Ltd 半導体試験装置のキャリブレーション装置
JP4480253B2 (ja) * 2000-10-27 2010-06-16 株式会社アドバンテスト 電子部品試験用押圧装置、電子部品試験装置およびその制御方法
NL1019775C2 (nl) * 2002-01-18 2003-07-21 Integrated Production And Test Inrichting voor het testen van elektronische schakelingen, alsmede een naaldenbed voor toepassing in een dergelijke inrichting.
CN101263395A (zh) * 2005-09-15 2008-09-10 株式会社爱德万测试 Tcp处理装置
JPWO2008126173A1 (ja) * 2007-03-13 2010-07-15 株式会社アドバンテスト Ｔｃｐハンドリング装置
JP5358138B2 (ja) * 2008-07-31 2013-12-04 東京エレクトロン株式会社 検査装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002181889A (ja) * 2000-12-13 2002-06-26 Ando Electric Co Ltd プローブカードとｔａｂの位置決め装置
TWI247122B (en) * 2003-01-31 2006-01-11 Japan Engineering Co Ltd TCP handling device and positional deviation correcting method for the same
CN101030549A (zh) * 2006-03-03 2007-09-05 株式会社爱德万测试 Tcp处理设备以及tcp处理设备的不良冲除孔的检测方法
TW200903683A (en) * 2007-03-29 2009-01-16 Advantest Corp TCP handling apparatus
TW200902997A (en) * 2007-03-29 2009-01-16 Advantest Corp TCP handling apparatus

Also Published As

Publication number Publication date
TW201213819A (en) 2012-04-01
CN102411122B (zh) 2015-07-22
JP2012068032A (ja) 2012-04-05
KR101238397B1 (ko) 2013-02-28
CN102411122A (zh) 2012-04-11
KR20120030927A (ko) 2012-03-29

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