200902997 九、發明說明： 【發明所屬之技術領域】 本發明係關於用以測試ic元件之一種的TCp(Tape Carrier Package)或 C0F(Chip 0n Film)(以下將由 Τ(：ρ、 COF、及 TAB(Tape Automated Bonding)封裝技術所封裝的 元件統稱之為「TCP」），所使用之捲帶式封裝管控裝置。 【先前技術】 η在1C元件等的電子元件製造過程中，必須使用用以測 試最終製造出的電子元件或其中間階段的元件等的性能或 功能的測試之電子元件測試裝置，在Tcp的情況下係使用 TCP用的測試裝置。 TCP測試裝置—般係由下列構成：測試本體、測試頭、 及捲帶式封裝管控裝置（以下亦簡稱為捲帶式封裝處理 器）。該捲帶式封裝處理器’能夠運送在捲帶（亦包含膜片 的概念’以下亦同）上形成複數TCP的搬運帶，將搬運帶遂 到電氣連接於測試頭的探針卡的探針，使TCP的測試塾和 探針電連接’並依序執行複數Tcp的測試。 但疋，當重複執行上述的測試時，TCP的測試 屬移到探針上，而在的遂 膜，而導致抑測試塾和探針的接薄 即使試塾和探針接觸，也無法正確地進行:試。 这之TCP的測試墊和探針的 而必須要清潔探針。過去…^、主s P 觸不良’ 為了要b %探針，必須把探針 2192-9455-PF;Ahddub ς 200902997 卡卸下，在操作台上研磨 ^ ^ 呵厲探針，在推進器上裝設研磨材料 並使該研磨材料和探針接觸。 抖 【發明内容】 發明欲解決的問題 但是，在過去的清省古 穿置'、 /中，具有在捲帶式封裝管押 衣置貧際運作中（測試 ^ 卸探針卡和研磨料，·“㈣題，以及在裝 研磨材W時需要耗時耗力的問題。 本發明係有鑑於上述急 挺其快壯班 这現象’其目的在於提供捲帶式封 裝官控裝置，其即#力 巾巧封 也f㈣置實際運作時， 肊夠谷易地、;月潔測定部的連接端子。 用以解決課題的手段 為&成上述目的，本發明一册 罟，甘及m 種捲τ式封裝管控梦 著且…以搬運形成複數TCP的搬運帶’將該搬運帶對 者具有電性連結於測試頭的連接端子的測定部按厂堅，= 使該抑的外部端子和該測定部㈣ = 測試TCP，其包括··清 ㈣而依序 定部之Η，… ' 插入於該搬運帶和該测 8此Π清潔該測定部的連接端子（發明〗）。 依據上述發明（發明υ，盔 5» , ,. „ ，，將測疋部卸下或在推進 益上褒設研磨材料， 運 中㈠^ U、 P使在捲V式封裝管控農置實際運作 中（測试批次中），也能夠 子。A去产士 才门円今易地清潔連接端 作[ 明書中，在捲帶式封裝管控裝置正在運 订測減時，暫時中斷的狀態也包含於「實際運作中」。 在上述發明（發明丨）中 β為兀件也可以裝設於移 2l92-9455-PF;Ahddub 6 200902997 其能夠使得該清潔元件插入及退出該搬運帶及 山 、牛接近及遠離該測定部的連接 戈而子，並且使清潔元件向 幻连接 尖端邻所# + 者忒測疋部之複數個連接端子的 “所形成之面的方向移動(發 明(發明1)中，該捲帶式封#在上述發 』技g控裝置也可以設古徭 置，其插入該搬運帶及該測6却 叹有攝衫裝 όΑ ^ ^ ^ '疋。卩之間，能夠拍攝該搬運帶 的特疋部位以及該測定部 冲 移動事置上i^寸疋4位；該攝影裝置裝設於 、，4夠使得該攝影裝置插人及退出 及該測定部之間，·使該攝 ^出该搬h 接端子，並且使該攝影掌置^近及遂離該測定部的連 子的尖端部所形成之面的 ^按而 _攝$ # D移動，該清潔元件係裝設於 4攝衫裝置之任一部位（發明3)。 依據上述發明(發明2、3)，藉由 件得以自動移動，而能夠更容易地清潔連接料月Μ 在上述發明（發明2 可以包括推進裝置，其能夠式封裝管技裝置也 子，該移動裝置係依據該推:部的連接端 量’ :一_ 件―接 ―+欠 月為兀件對於連接端子的接觸虔力。 料二上5 :(發明該清潔元件可以為研磨材 罐明5)，也可以是刷子（發明6)。在清潔元件 的6 >兄下’該捲帶式封裝管控裝 、’” 裝置，其將清潔液供肩㈠”有^絜液供應 .、應、，。邊刷子或該連接端子（ 2192-9455-PF/Ahddub 7 200902997 依據該發明，能夠有效地去除連接端子上的髒污， a 而月b夠 使連接端子變乾淨。 在上述發明（發明1〜7)中’該捲帶式封裝營控事置 可以具有吹風機或真空機’其可以裝設於該 /月你7〇件或該 測定部的連接端子附近。依據該發明，可以除去由生潔Λ 件從連接端子取下的辦污或異物，而不會殘留在&巧_ 和連接端子附近。 、件 在上述發明（發明1〜8)中，於該捲帶式封裝管控裝 實際運作中由該清潔元件對該測定部之連接端子的清^ 4 作之執行，係可以被測試之TCP和該連接端子的接^錯^ 或接觸率降低為指標（發明9)，也可以測試次數為指 期為之（發明1 〇)。 θ π定 發明的效果 依據本發明的捲帶式封裝管控裝置，即使在捲帶弋圭 裝管控裝置實際運作中日夺’也能狗容易地清測 端子。 逻赉 【實施方式】 下文配合圖式，說明本發明之實施型態。 第1圖顯示使用本發明-實施型態之捲帶式封裝广 器之TCP測試裝置之正面圖， 、处 弟2圖為同貫施型態的捲 式封I處理器之推進單元、清 月4早兀及如針卡之側面圖 TCP測試裝置1由下列播士 _ J構成：圖未顯示的測試本砰 和測試本體電氣連結的測試 版 叫A碩1 〇 '設於測試頭丨〇 2192-9455-PF;Ahddub 8 200902997 捲帶式封裝處理器2。捲帶式封袋 運帶5上的複數個益2係將形成於搬 再者’在本實施型態中200902997 IX. Description of the Invention: [Technical Field of the Invention] The present invention relates to a TCp (Tape Carrier Package) or a COF (Chip 0n Film) for testing one of the ic elements (hereinafter, Τ(:ρ, COF, and TAB) (Tape Automated Bonding) The packaged components are collectively referred to as "TCP", and the tape and reel package control device used. [Prior Art] η must be used for testing in the manufacturing of electronic components such as 1C components. The electronic component testing device for testing the performance or function of the finally manufactured electronic component or its intermediate stage component or the like uses a test device for TCP in the case of Tcp. The TCP test device generally consists of the following: test body , test head, and tape and reel package control device (hereinafter also referred to as tape and reel package processor). The tape and reel package processor can be transported on the tape (also including the concept of the diaphragm) Forming a multi-TCP carrier tape, staking the carrier tape to the probe of the probe card electrically connected to the test head, electrically connecting the test 塾 and the probe of the TCP' and executing the plural in sequence Tcp test. However, when the above test is repeated, the TCP test is moved to the probe, and the film is on the sputum, which causes the test 塾 and the probe to be thinned even if the test is in contact with the probe. It can't be done correctly: try. This TCP test pad and probe must be cleaned. In the past...^, the main s P touch bad ' In order to b% probe, the probe must be 2192-9455- PF; Ahddub ς 200902997 The card is unloaded, and it is ground on the console. ^ ^ Squeeze the probe, install the abrasive material on the propeller and make the abrasive material and the probe contact. [Content of the invention] In the past, the ancient province of Qing dynasty ', /, has a poor operation in the tape-and-reel packaging tube (test ^ unloading probe card and abrasive material, · "four" questions, and in the loading of abrasive materials W The problem is time-consuming and labor-intensive. The present invention is in view of the above-mentioned phenomenon of rushing its fast-moving class. The purpose of the present invention is to provide a tape-and-reel packaged official control device, that is, when the force wiper is also used, the f (four) is actually operated.肊 谷 谷 谷 谷 谷 谷 谷 谷 谷 谷 谷 谷 谷 谷 谷 谷 谷 谷 谷The means is & for the above purpose, the present invention is a booklet, and the m-type package τ-style package is controlled and...the carrier belt for carrying the complex TCP is electrically connected to the test head. The measuring unit of the connection terminal is factory-stabilized, = the external terminal of the suppression terminal and the measuring unit (4) = test TCP, which includes ··clear (4) and sequentially, ... 'inserted into the carrying belt and the test 8 Then, the connection terminal (invention) of the measuring unit is cleaned. According to the above invention (invention, helmet 5», ,. „ , the measuring unit is removed or the abrasive material is placed on the pusher, and the machine is transported (1)^ U, P can also be used in the actual operation of the V-package control plant (in the test batch). A to the birth of the sergeant 才 円 円 易 易 易 易 易 易 易 易 [ [ [ [ [ [ [ [ [ [ [ [ [ [ [ [ [ [ [ [ [ [ [ [ [ [ [ [ [ [ [ [ [ [ [ [ [ [ [ [ [ [ [ [ [ [ [ [ [ [ [ [ [ [ [ [ [ [ [ [ [ [ [ [ [ [ In the above invention (invention), β is a member which can also be attached to the movement 2l92-9455-PF; Ahddub 6 200902997, which enables the cleaning element to be inserted into and out of the carrying belt and the mountain, the cow approaching and away from the measuring portion. Connecting the genius, and causing the cleaning element to move toward the phantom connection tip neighboring #+ 忒 复 之 之 之 之 之 之 “ ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( In the above-mentioned technology, the control device can also be provided with an ancient device, which is inserted into the carrying belt and the test 6 is smashed with a camera frame όΑ ^ ^ ^ '疋. 卩, the special portion of the carrying belt can be photographed. And the measuring unit is placed in the position of 4 inches; the photographing device is installed at 4, so that the photographing device is inserted and exited between the measuring unit, and the photographing unit is moved. Connecting the terminal, and moving the photographic palm closer to and away from the surface formed by the tip end portion of the connecting portion of the measuring portion, and moving the cleaning member to the 4 camera device Any part (Invention 3). According to the above invention (Inventions 2, 3), the piece is automatically moved, and The invention can be more easily cleaned. In the above invention (Invention 2 may include a propulsion device capable of encapsulating a tubular device, the mobile device being based on the amount of the connection portion of the push portion: a piece of ―+ 欠月 is the contact force of the connecting piece for the connecting terminal. Material 2 is 5: (The cleaning element can be made of abrasive material can 5), or it can be a brush (Invention 6). 6 in cleaning element Brother under the 'reel-packaged tube control, '" device, which supplies the cleaning fluid to the shoulder (1)" 絜 供应 supply., should,,. Side brush or the connection terminal ( 2192-9455-PF/Ahddub 7 200902997 According to the invention, it is possible to effectively remove the dirt on the connection terminal, and a month b is sufficient to make the connection terminal clean. In the above invention (Inventions 1 to 7), the tape-and-reel package control device may have a hair dryer or The vacuum machine' can be installed in the vicinity of the terminal or the connection terminal of the measuring portion. According to the invention, the dirt or foreign matter removed from the connecting terminal by the raw cleaning member can be removed without remaining Near & _ and the connection terminal. In the invention (Inventions 1 to 8), in the actual operation of the tape-and-reel package control, the cleaning element performs the cleaning of the connection terminal of the measuring unit, and the TCP and the connection terminal which can be tested are The error is reduced or the contact rate is reduced to the index (Invention 9), and the number of tests can be referred to as the index period (Invention 1). θ π The effect of the invention According to the tape and tape package control device of the present invention, even in the volume In the actual operation of the control device, the dog can easily clear the terminal. Logic [Embodiment] Hereinafter, the embodiment of the present invention will be described with reference to the drawings. Fig. 1 shows the use of the present invention-implementation type The front view of the TCP test device of the tape-and-reel package, and the picture of the brother 2 are the propulsion unit of the coherent type of roll-type I processor, the clear moon 4 and the side view of the needle card The TCP test device 1 consists of the following broadcaster _J: the test version not shown in the figure and the test version of the test body electrical connection is called A Shuo 1 〇 'located in the test head 丨〇 2192-9455-PF; Ahddub 8 200902997 Package 2 processor. Tape and Reel Sealing Bags A plurality of Benefits 2 Series on the belt 5 will be formed in the moving container.
軸係表示測試頭1η μ 帶式封裝處理器2中，X 為左右方二 運帶5的搬運方向(在第1圖中 為左右方向），Υ軸係表示在 弟 φ] (Α ^ , 曲上和X軸垂直相交的方 在第1圖中為貫穿紙面的 (± ^ 1 rgn ° ，而Ζ軸表示垂直方向 (在弟1圖中為上下方向）。 捲帶式封裴處理1¾ 2 捲出捲轴21上捲m二 轴21及捲取捲轴22, .91 ^ &7測^的搬運帶5。搬運帶5從捲出捲 轴21捲出，在測試後再捲«取_ 22上。 捲出捲軸21和捲取捲軸22之間設有3個間隔滚輪 a、饥、23C’用以將從搬運帶5剝離的保護帶51從捲 出捲軸21跨越到捲取捲軸22。各間隔滾輪23a、23b、23。 分別可以上下移動，以調整保護帶51的張力。 、在捲出捲軸21的下方設有：捲帶導執2切、捲出限制 滾輪25a、内側次鍊輪25b及内側導軌滾輪25c，從捲出捲 軸2i捲出的搬運帶5’ 一邊由捲帶導執—導軌，同時經 由捲出限制滾輪25a、内側次鍊輪25b及内側導執滚輪25〇 送往推進單元3。 再者’在捲取捲轴22的下方也設有捲帶導軌24b、捲 取限制滾輪25f、外側次鍊輪25e及外側導轨滾輪25d，交 付測試後的搬運帶5，經過外側導軌滾輪25d、外侧次鍊輪 25e及捲取限制滾輪25f，一邊由捲帶導軌24b導軌著，一 邊捲到捲取捲轴22上。 2192-9455-PF;Ahddub 9 200902997 在内側導軌滾輪25c和外側導執滾輪25d之間，設有 推進早兀3，在推進單元3的前段側（第ι圖中的左側）設 有第1 U 6a ’在推進單元3的下側（後述之探針卡平 台7的内側）設有第2攝影機6b，在推進單元3的後段側（第 1圖中的右側）設有第3攝影機6c。 在推進單7L 3和第3攝影機6c之間，設有標示打孔器 26a及退出打孔器26b。標示打孔器⑽依據測試結果，在 該ΚΡ的特定位置開出1個或複數個孔，退出打孔器26b 在測试中被判斷為不良品的Tcp打孔。 各攝影機6a、6b、6c連接於圖未顯示的影像處理裝 置，第1攝影機6a及第3攝影機6c，係為用以判斷在搬 運帶5上有無TCP或由標示打孔器心打的孔之位置或數 ΐ，第2攝影機6b係用以取得搬運帶5上之Tcp和探針之 間的位置偏移資料。 如第1圖所示，在推進單元3的框(推進框)36，藉由 托木361 β又置夠使滾珠螺桿犯回轉的伺服馬達Μ，並 且藉由2支Z軸方向的直線運動導執（以下稱之為μ導 軌)37而設置和滾珠螺桿32螺合的推進本體部3弘該推進 本體部33 ’藉由使伺服馬達31驅動’在由直線運動導軌 3?導軌的同時可以在Z軸方向移動。 在推進本體部33的下端部，設有吸附板34，其藉由 吸取空氣而能夠吸附保持著搬運帶5。 在推進本體部33的前段側（第〗圖中的左側），設有張 力鍊輪35a，在推進本體部33的後段側（第i圖中的右側） 2192-9455-PF;Ahddub 200902997 設有主鍊輪35b。 A + 1所不’在推進框36的背面側，設置了推進平 ;二：由推進平台4’能夠使得推進單元…轴方向、 ::方向及繞著Z軸方向移動。因此，… 本體部33在由吸附板34 進 、隹。 次咐者也運帶5的狀態下，使推 進早7L 3如上所述般移動， 動猎此，使得搬運帶5在X輛方 向、Y軸方向及繞著2軸方向，私 u ^ ^ 万^矛夕動，而能夠執行搬運帶5 上的TCP和探針81的位置對準。 另方面’如第1圖所示， — ,,_s t Λ 在推進早兀3的下方，測 減碩10的上部，設置承載 6戰了探針卡8的探針卡平台7。 由揼針卡平台7 ’可以使得接料本0丄 ^ — ’十卡8在X軸方向一Υ軸方向 私動及繞著Ζ轴方向移動。 探針卡8具有複數支探針81， ]η 各抓針81透過測試頭 1 〇和測試本體電性連結。 項 如第1圖及第2圖所示，在推 _ „ 隹推進早兀3和探針卡8 間，設有清潔單元9。清潔覃矛〇 ' a ，月你早凡9包含：清潔平台91、执 於從清潔平台91延伸之臂92之尖 〇又 鳊°卩下側的凊潔元件93。 清潔平台91係内建有仞翻哭 堤有促動為’以使得臂92在X軸方 °、γ軸方向及繞著z轴方向移動n 一 # 由清潔平台91的驅動，可以在χ軸 硪兀 93藉 以在χ轴方向、Υ軸方向及繞著 ζ抽方向移動。 清潔元件93可以為挫刀(例如沙紙等)的 可以為刷子，只要能夠不損 ，也 个狽壞铋針81，而能.夠去 尖端部的髒污或異物等即可，並無特別限定。 2192-9455-PF;Ahddub 11 200902997 也可以具^193為刷子的情況T，捲帶式封裝處理器2 該刷子或探^液供應裝置，其將如酒精等清潔液供應給 給刷子或_ 從該清潔液供應裝置將清潔液供應 能夠使探針81 @ %夠有效地去除#針81上的辦污，而 子或探針。噴：二清潔液的供應方法係可以為向著刷 、射或滴下，或者將刷子浸潰均可。 再者，捲帶式封裝處理器2也可以具有吹風 機，其可以妒执#生± 八百人風機或真空 以將導管二:;ί元件93或探針81附近。例如，可 開口部向著、、1=早元9㈣92的下端，並使該導管的 機。再者，：風機：真9二而使得能夠裝設吹風機或真空 側。萨由卜，或真 也可以設置在探針卡8的- 曰 述吹風機或真空機， ^ 81取得的污物或異物除去，，潔件93從探針 探針81周圍。物除去，叩个會殘留在清潔元件93或 在此，說明清潔單元9的動作。在平常時 圖所示，清潔元件93係位於清 第2(a) 33和探針卡8之間退出。…91附近，從本體部 在清潔時，如第2(a)〜㈤圖所示， 92在X軸方向及γ軸 π办千口 91使臂 體部33和探針卡8 ::位使清潔元件93插入於本 方繼之“ 於探針81的尖端部之上 …:"二“、平台91使臂92在2轴負方向移動，使、生 潔兀件93和探針81的尖端部接 使- 台9"吏臂92在X轴方向及/ 在此狀，“，清潔平 π汉/ :¾ γ軸方向往返移動， 兀件93摩擦探針81的尖端，而將探針μ尖端部的髒 2192-9455-PF;Ahddub 12 200902997 異物等去除。 :者，由清潔平台91造成之清潔元件一轴方向 的移動量（下端位置）以基於 "於相對於本體部33的探針81的 移動量（下端位置）來決定為佳。 ,,01 耜此，清泳兀件Θ3對於探 的接觸壓’可以為對於探針以不造成損害的適當大The shaft system indicates the test head 1 η μ in the tape package processor 2, where X is the transport direction of the left and right side belts 5 (the left and right direction in Fig. 1), and the Υ axis system indicates the younger brother φ] (Α ^ , 曲The upper side perpendicular to the X-axis intersects the paper surface in the first figure (± ^ 1 rgn ° , and the x-axis shows the vertical direction (up and down in the middle 1). Tape and Reel Processing 13⁄4 2 The take-up reel 21 is wound with the m-axis 21 and the take-up reel 22, .91 ^ & 7 of the handling belt 5. The carrying belt 5 is unwound from the unwinding reel 21, and is rolled again after the test. 22. Three spacer rollers a and hunger 23C are provided between the take-up reel 21 and the take-up reel 22 to circumvent the protective tape 51 peeled off from the conveyance belt 5 from the unwinding reel 21 to the take-up reel 22. Each of the spacer rollers 23a, 23b, and 23 is movable up and down to adjust the tension of the protective tape 51. Below the unwinding reel 21, there are provided: a tape guide 2 cut, a take-up restricting roller 25a, and an inner secondary sprocket 25b and the inner guide roller 25c, the conveyance belt 5' unwound from the take-up reel 2i is guided by the take-up guide rail, and simultaneously passes through the take-up restricting roller 25a and the inner secondary sprocket 2 5b and the inner guide roller 25〇 are sent to the propulsion unit 3. Further, 'the reel spool 22 is provided below the take-up reel 22b, the take-up restricting roller 25f, the outer sub-sprocket 25e, and the outer rail roller 25d. The conveyance belt 5 after the delivery test passes through the outer guide roller 25d, the outer secondary sprocket 25e, and the take-up restriction roller 25f, and is guided by the take-up guide rail 24b, and is wound onto the take-up reel 22. 2192-9455- PF; Ahddub 9 200902997 Between the inner guide roller 25c and the outer guide roller 25d, there is a push forward 3, and the first U 6a is provided on the front side of the propulsion unit 3 (the left side in the first figure). The second camera 6b is provided on the lower side of the unit 3 (the inside of the probe card stage 7 to be described later), and the third camera 6c is provided on the rear side (the right side in the first drawing) of the propulsion unit 3. On the push unit 7L 3 Between the third camera 6c and the third camera 6c, a marking punch 26a and an exit punch 26b are provided. The marking punch (10) opens one or more holes at a specific position of the cymbal according to the test result, and exits the puncher. 26b Tcp punched into a defective product during the test. Each camera 6a, 6b, 6c is connected In the video processing device not shown, the first camera 6a and the third camera 6c are used to determine the presence or absence of TCP on the transport belt 5 or the position or number of holes marked by the puncher, the second camera. 6b is used to obtain the positional shift data between the Tcp and the probe on the transport belt 5. As shown in Fig. 1, the frame (pushing frame) 36 of the propulsion unit 3 is again set by the pallet 361 The servo motor of the ball screw is rotated, and the propulsion body portion 3 that is screwed to the ball screw 32 is provided by two linear motion guides (hereinafter referred to as μ rails) 37 in the Z-axis direction. 33 'By driving the servo motor 31', it is possible to move in the Z-axis direction while being linearly moving the guide rail 3 to the guide rail. At the lower end portion of the propulsion main body portion 33, an adsorption plate 34 is provided which is capable of sucking and holding the conveyance belt 5 by sucking air. On the front side (the left side in the drawing) of the propulsion main body portion 33, a tension sprocket 35a is provided on the rear side of the propulsion main body portion 33 (the right side in the first drawing) 2192-9455-PF; Ahddub 200902997 is provided Main sprocket 35b. A + 1 does not have a push flat on the back side of the push frame 36. Second, the pusher unit 4' can move the propulsion unit ... in the axial direction, the :: direction, and around the Z-axis direction. Therefore, the main body portion 33 is advanced and sucked by the suction plate 34. In the state where the second leader is also carrying the belt 5, the advancement 7L 3 is moved as described above, and the hunting belt 5 is moved in the X direction, the Y-axis direction, and the 2-axis direction, privately. The spear is moved, and the alignment of the TCP and the probe 81 on the carrying belt 5 can be performed. On the other hand, as shown in Fig. 1, -, _s t Λ under the advancement of the early raft 3, the upper portion of the stalk 10 is measured, and the probe card platform 7 carrying the probe card 8 is placed. Since the needle card platform 7' can make the receiving member 0丄^-'the ten card 8 move in the direction of the x-axis and move in the direction of the x-axis. The probe card 8 has a plurality of probes 81, and each of the grippers 81 is electrically connected to the test body through the test head 1 . As shown in Fig. 1 and Fig. 2, there is a cleaning unit 9 between the push _ 隹 push premature 兀 3 and the probe card 8. The cleaning 覃 spear 〇 a, the month you are 9 include: cleaning platform 91. The cleaning element 93 is attached to the lower side of the arm 92 extending from the cleaning platform 91. The cleaning platform 91 has a built-in smashing shovel and is actuated as 'to make the arm 92 on the X axis. The square, the γ-axis direction, and the movement around the z-axis direction n by the cleaning platform 91 can be moved in the y-axis direction, the y-axis direction, and the squeezing direction in the χ axis 。 93. Cleaning element 93 The brush which can be a knives (for example, a sandpaper or the like) can be a brush, and it is not particularly limited as long as it can damage the sputum needle 81 without damaging the sputum needle 81, and can remove the dirt or foreign matter at the tip end portion. -9455-PF; Ahddub 11 200902997 can also have the case of ^193 as a brush T, the tape and reel package processor 2 the brush or the liquid supply device, which supplies a cleaning liquid such as alcohol to the brush or _ from the The cleaning fluid supply device enables the cleaning fluid supply to enable the probe 81 @ % to effectively remove the contamination on the # needle 81, while the probe or probe. The cleaning liquid can be supplied to the brush, spray or drip, or the brush can be impregnated. Further, the tape and reel package processor 2 can also have a hair dryer, which can be used to generate a ±100-person fan. Or vacuum to bring the catheter to the vicinity of the element 93 or the probe 81. For example, the openable portion may face, the lower end of 1 = early 9 (four) 92, and the machine of the catheter. Further, the fan: true 9 It is possible to install a blower or vacuum side. Sabu, or can also be set in the probe card 8 - a description of the blower or vacuum machine, ^ 81 to get the dirt or foreign matter removed, the cleaning piece 93 from the probe probe Around the 81. The object is removed, and one of them remains in the cleaning member 93 or here, and the operation of the cleaning unit 9 is explained. As shown in the usual diagram, the cleaning member 93 is located in the second (a) 33 and the probe card 8. Exiting....near 91, when cleaning from the main body, as shown in the second (a) to (f), 92 in the X-axis direction and the γ-axis π to make the arm portion 33 and the probe card 8: The position causes the cleaning element 93 to be inserted by the party "above the tip end of the probe 81...:&"2", the platform 91 makes 92 moves in the negative direction of the 2 axes, so that the tip end portions of the raw and cleaned members 93 and the probe 81 are connected to the table 9 " the arm 92 in the X-axis direction and/or in this shape, ", clean flat π / / 3⁄4 The γ-axis direction reciprocates, and the cymbal 93 rubs the tip end of the probe 81 to remove the dirt 2192-9455-PF, Ahddub 12 200902997 foreign matter, etc. at the tip end of the probe μ. The amount of movement (lower end position) of the cleaning element in the axial direction by the cleaning platform 91 is preferably determined based on the amount of movement (lower end position) of the probe 81 with respect to the main body portion 33. ,, 01, the contact pressure of the cleaning element Θ3 for the probe can be appropriately large for the probe without causing damage.
小 D 上？的清潔結束之後，清潔平台91使臂92在Z轴正 7之在X軸方向及γ軸方向移動，使清潔元件93回 到第2 (a)圖所示之平常的狀態。 、在此，、因為探針81的配置隨著TCP的種類不同而異， — ㈣母-種TGP ’事先館存其清 件93的標準位置’亦即’由清潔…造成之X軸 M'y㈣方向㈣動量，對應於被測試似 的種類而讀取資料，依據該資 準位置為佳。 4使侍…件Μ移動到標 如上述的清潔，可以在捲帶式封裝處理器2的實際運 :中發生接觸錯誤時，或接觸率低時執行，也可以用二式 二人數作為指標而定期執行。在前者的情 可二 地不中斷測試就以，所以能夠維持高測試效率。二： 面’在後者的情況下，士鈐热吉 低。 &月"夠事先防止接觸肖誤或接觸率 依據本貫施型態之浩、、智置 、 ，月為早70 9，不需要把探針卡8知 下或是將研磨材裝到推進單元 ^ 9 即使在捲T式封裝處理 ^運作W (批次測試中），也能夠在短時間内容易地 2192-9455-PF;Ahddub 13 200902997 清潔探針81。 在上述的實施例中，清潔元件93係設置於清潔單元 9，但本發明並不以此為限，清潔元件93也可以設置於插 入搬運帶5和探針81之間的攝影機。 、 在第3(a)及㈦圖所示之例中’第2攝影機肋係設置 於從裝在推進平台4和探針卡8之間的攝影機平台62延伸 之臂63的前端部。在筮 在弟2攝影機6b上設有托架94，而 潔元件93設置在托架94的下面。 攝影機平台6 2之*接、生4 i * 卞口 bZ之構以和凊潔平台91相同，藉由内建 的促動器，透過臂β q @ 使第2攝影機扑可以在χ軸方向、 Υ軸方向及繞著Ζ軸方向移動。 口此，帛2攝影機心可以插入搬運帶5和探針δ1之 間’也可以從搬運帶5Q彳 aa 機6b在X站古a ’十81之間退出。藉由第2攝影 :和T P轴方向移動，第2攝影機此能夠拍攝 卡8互相之位置的複數個測試塾及位於和探針 卞ΰ互相離之位罟沾On the small D? After the cleaning is completed, the cleaning stage 91 moves the arm 92 in the X-axis direction and the γ-axis direction in the Z-axis positive direction 7, and returns the cleaning element 93 to the normal state shown in Fig. 2(a). Here, since the configuration of the probe 81 varies depending on the type of TCP, - (4) the mother-type TGP 'pre-stores the standard position of the clearing piece 93', that is, the X-axis M' caused by the cleaning... y (four) direction (four) momentum, corresponding to the type of test to read the data, according to the position of the standard is preferred. 4 moving the ... Μ Μ to the cleaning as described above, may be performed when the contact error occurs in the actual operation of the tape and reel type package processor 2, or when the contact rate is low, or the number of two persons may be used as an indicator. Performed regularly. In the former case, the test can be performed without interruption, so that high test efficiency can be maintained. Two: Faces In the latter case, the gentry is hot and low. & month " enough to prevent contact errors or contact rates in advance according to the stipulations of the mode, wise, and the month is early 70, do not need to know the probe card 8 or put the abrasive material into The propulsion unit ^ 9 can easily clean the probe 81 in a short time, even in the roll T-packaging process ^ (batch test), 2192-9455-PF; Ahddub 13 200902997. In the above embodiment, the cleaning member 93 is provided to the cleaning unit 9, but the invention is not limited thereto, and the cleaning member 93 may be provided to the camera inserted between the carrier belt 5 and the probe 81. In the example shown in Figs. 3(a) and (7), the second camera rib is provided at the front end portion of the arm 63 extending from the camera platform 62 mounted between the propulsion platform 4 and the probe card 8. A bracket 94 is provided on the camera 2b of the brother 2, and the cleaning member 93 is disposed under the bracket 94. The camera platform 6 2 is connected to the original 4 i * The mouth bZ is configured in the same manner as the cleaning platform 91. With the built-in actuator, the second camera can be moved in the x-axis direction by the arm β q @ The direction of the x-axis and the direction around the x-axis. Thus, the 摄影2 camera core can be inserted between the carrier belt 5 and the probe δ1', and can also be withdrawn from the transport belt 5Q彳aa machine 6b between the X stations and the old ones. By the second photography: moving in the direction of the T P axis, the second camera can capture a plurality of test files of the positions of the cards 8 and the positions of the probes and the probes.
因此能夠精確地取得TCP 才刼針卡8的位置偏移量。 第2攝影機6b係能夠Therefore, it is possible to accurately obtain the positional shift amount of the TCP card 8 . The second camera 6b is capable of
3(b L 插入搬運帶5和探針 θ不’虽第2攝影機6b 同時拍攝時，能夠藉由第2攝影機6b， 丨J f拍攝TCP的測試墊或對準 由上述第探針81的尖端部。藉 、第2攝衫機6b，能夠直接拍 針81的小#加^ …凌從下方拍攝的探 的大鳊邛（和測試墊的接觸面） 取得禊料β 1 ΛΑ , 厅以月匕夠非常精確地 、十81的尖端部的位置資 行香’因為可以在近處 2l92-9455-PF；Ahddub 14 200902997 拍攝TCP的測試墊或對準標 甘/ f h 所以此夠更精確地取得 其位置賢訊（座標資料）。 寸 在清潔時’如第3 (a )〜（h)岡痛-αχ ()圖所不，攝影機平台62使3 (b L insertion conveyance belt 5 and probe θ not] When the second camera 6b is simultaneously photographed, the TCP test head can be photographed by the second camera 6b, 丨J f or aligned with the tip end of the first probe 81 Part. Borrowing, 2nd photo machine 6b, can directly shoot the small 81 of the needle 81. Ling from the bottom of the probe (the contact surface with the test pad) to obtain the material β 1 ΛΑ, the hall for the month Sufficiently accurate, the position of the tip of the ten 81 is fragrant 'because it can be taken near 2l92-9455-PF; Ahddub 14 200902997 to shoot the test pad of TCP or align with the standard / fh so this is more accurate Its position is good (coordinate data). In the case of cleaning, as in the 3rd (a) ~ (h) Gang pain - αχ () map, the camera platform 62 makes
在x軸方向及Y轴方向移動，使清潔元件93插入A 進本體部33和探針卡8之門 并 推 …士 十卡8之間’並且使其位於探針81 立“上方。繼之，攝影機平台62使臂…轴負 動，使清潔元件93和探針8]Uv丨、 夕 的大知部接觸。在此狀態下， 攝衫機平台62使臂63在X軸方v ± 細軸方向及/或γ軸方向往返移 動，用清潔元件93來擦拭探針 s ] 、 的大立而口p ’而除去探針 81的大i而部的髒污或異物。 在上述清潔結束之後，揾 不傻攝衫機平台62使臂63在2軸 方向、且在X軸方向及γ點古A必A 和ή… 夂Υ軸方向移動’使第2攝影機6b 和π潔7M牛93恢復到第3(a)岡％- ^ 所不之平常的狀態。 上述說明的實施型態，係 糸5己載用以協助本發明的理 解，並非記載用於限定本發明。 - 毛明因此’上述實施型態中揭 更或均等物。 續★領域中所屬的所有設計變 U例如，在清潔平台91附加振動功能，在清潔元件93 和探針81的尖端部接觸播 μ / 接觸之後，名略清潔元件93在X軸方 向及/或Υ軸方向往返移動， 去除禊抖μ I、。 而使π办兀件93震動，藉此 去除钛針81的尖端部的辦污或異物亦可。 產業上的利用性 本發明，即使在捲帶式封裝處理器2實際運作時，也 2192-9455-PF* PF*；Ahddub 15 200902997 月b夠谷易地清潔測定部的連接端子，所以可用於有效率地 執行測試。 【圖式簡單說明】 第1圓顯示使用本發明一實施型態之捲帶式封裝處理 器之rep測試裝置之正面圖。 处 第2(a)〜（b)圖為同實施型態的捲帶式封裝處 推進單元、清潔單元及探針卡之側面圖。 °°之 裝處理器 圖。 第3(a)〜（b)圖為另 之推進單元、攝影機、清 —實施型態的捲帶式封 潔單元及探針卡之側面 【主要元件符號說明】 1〜tcp測試裝置； 5〜搬運帶； 8〜探針卡（測定部）； 81〜探針（連接端子）； 9〜清潔單元； 9 3〜清潔元件； 33〜推進本體部（推進裝 6卜第2攝影機（攝影裝置） 62〜攝影機平台（移動裝置） 91~清潔平台（移動裝置）； 10〜測試頭； 置）； 2〜捲帶式封裝處理器(捲帶式封裝 管控裝置 2192-9455-PF;Ahddub 16Moving in the x-axis direction and the Y-axis direction, the cleaning element 93 is inserted into the door of the A main body portion 33 and the probe card 8 and pushed between the "seven cards 8" and placed "on the probe 81". The camera platform 62 causes the arm shaft to be negatively moved to bring the cleaning element 93 into contact with the probe 8]Uv丨, the large portion of the antenna. In this state, the camera platform 62 causes the arm 63 to be thin on the X-axis side. The axial direction and/or the γ-axis direction reciprocate, and the cleaning element 93 wipes the probe s] and the large opening p' to remove the dirt or foreign matter of the large portion of the probe 81. , 揾 傻 傻 摄 摄 62 62 62 62 62 62 62 62 62 62 62 62 62 62 62 62 62 62 62 62 62 62 62 62 62 62 62 62 62 62 62 62 62 62 62 62 62 62 62 62 62 62 62 62 62 62 62 62 62 62 62 62 62 62 62 62 62 62 62 62 62 62 62 62 62 62 62 62 62 62 62 62 62 62 62 62 62 62 62 62 62 62 62 62 62 62 62 62 62 62 62 62 62 62 3(a) 冈%-^ is not in a normal state. The embodiment described above is used to assist the understanding of the present invention, and is not intended to limit the present invention. In the above embodiments, all or the equivalents are disclosed. Continued ★ All the design changes in the field U, for example, the vibration function is added to the cleaning platform 91, After the cleaning element 93 and the tip end portion of the probe 81 are in contact with the μ/contact, the minute cleaning element 93 reciprocates in the X-axis direction and/or the Υ-axis direction to remove the μ μ μ, and the π 兀 93 93 is vibrated. Thereby, the dirt or foreign matter of the tip end portion of the titanium needle 81 can be removed. Industrial Applicability The present invention is 2192-9455-PF* PF* even when the tape and reel type package processor 2 is actually operated; Ahddub 15 200902997 Month b is easy to clean the connection terminal of the measurement unit, so it can be used to perform the test efficiently. [Simplified illustration] The first circle shows the rep of the tape and reel package processor according to an embodiment of the present invention. Front view of the test device. Sections 2(a) to (b) are side views of the push unit, cleaning unit and probe card of the tape and reel package in the same embodiment. 3(a)~(b) are the other side of the propulsion unit, camera, clear-implementation type of tape and band cleaning unit and probe card. [Main component symbol description] 1~tcp test device; 5~ handling Belt; 8 to probe card (measurement unit); 81 to probe (connection terminal); 9~cleaning unit; 9 3~cleaning element; 33~propulsion body part (propulsion device 6b second camera (photographic device) 62~ camera platform (mobile device) 91~cleaning platform (mobile device); 10~test head; 2) Tape and Reel Package Processor (Tape and Reel Package Control Device 2192-9455-PF; Ahddub 16