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TWI456128B - 耦合裝置、流體感測器及可操作流體裝置 - Google Patents

耦合裝置、流體感測器及可操作流體裝置 Download PDF

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Publication number
TWI456128B
TWI456128B TW097142375A TW97142375A TWI456128B TW I456128 B TWI456128 B TW I456128B TW 097142375 A TW097142375 A TW 097142375A TW 97142375 A TW97142375 A TW 97142375A TW I456128 B TWI456128 B TW I456128B
Authority
TW
Taiwan
Prior art keywords
annular
sealing surface
mating portion
housing assembly
sensor
Prior art date
Application number
TW097142375A
Other languages
English (en)
Other versions
TW200936916A (en
Inventor
Thomas P Peterson
Robert K Snyder
Original Assignee
Entegris Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Entegris Inc filed Critical Entegris Inc
Publication of TW200936916A publication Critical patent/TW200936916A/zh
Application granted granted Critical
Publication of TWI456128B publication Critical patent/TWI456128B/zh

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Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16LPIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L39/00Joints or fittings for double-walled or multi-channel pipes or pipe assemblies
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16LPIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L19/00Joints in which sealing surfaces are pressed together by means of a member, e.g. a swivel nut, screwed on, or into, one of the joint parts
    • F16L19/02Pipe ends provided with collars or flanges, integral with the pipe or not, pressed together by a screwed member
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16LPIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L47/00Connecting arrangements or other fittings specially adapted to be made of plastics or to be used with pipes made of plastics
    • F16L47/04Connecting arrangements or other fittings specially adapted to be made of plastics or to be used with pipes made of plastics with a swivel nut or collar engaging the pipe
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16LPIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L49/00Connecting arrangements, e.g. joints, specially adapted for pipes of brittle material, e.g. glass, earthenware
    • F16L49/06Joints in which sealing surfaces are pressed together by means of a member, e.g. swivel nut, screwed on, or into, one of the joint parts

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Gasket Seals (AREA)
  • Measuring Fluid Pressure (AREA)
  • Joints With Pressure Members (AREA)

Claims (17)

  1. 一種用於密封地連接組件之耦合裝置,該耦合裝置包含:一第一聚合物構件,包含一第一配合部,該第一配合部具有一軸線、一可操作地連接至一組件之遠端、一近端,其中該近端包含一周緣、一相對於該軸線垂直定位之環形軸向面、一延伸貫穿該第一聚合物構件且定位於該環形軸向面中之居中定位之流體導管,以及沿軸向延伸於該環形軸向面之表面上之至少一環形彎曲凸脊;以及一第二構件,具有一第二配合部,該第二配合部包含一可操作地連接至另一組件之遠端、以及一近端,其中該近端包含一周緣及一軸向面;其中當該第一配合部之該環形軸向面與該第二配合部之該軸向面承受一軸向壓縮力時,該至少一環形彎曲凸脊係可抵靠該第二配合部之該軸向面密封地變形,俾形成一流體密封,該環形彎曲凸脊係沿切向嚙合於實質垂直於該軸線之一平面中;其中該第二構件係可操作地連接至一閥門與一流量控制器(flow controller)其中之一。
  2. 如請求項1所述之耦合裝置,其中複數環形彎曲凸脊係同心地定位於該第一配合部之該環形軸向面上。
  3. 如請求項2所述之耦合裝置,其中該等相鄰環形彎曲凸脊係藉由該第一配合部之該環形軸向面之一表面隔開。
  4. 如請求項1所述之耦合裝置,更包含一彈簧墊圈(spring washer),其中該彈簧墊圈係可與該第一聚合物構件與該第二構件其中之一貼靠嚙合,以提供連續之壓縮力而將該第一 配合部之該環形軸向面與該第二配合部之該軸向面推靠於一起,進而維持該流體密封。
  5. 如請求項4所述之耦合裝置,更包含一緊固螺帽,其中該緊固螺帽係在該第一配合部處與該第一聚合物構件相嚙合,以及在該第二配合部處與該第二構件相嚙合。
  6. 如請求項5所述之耦合裝置,其中該螺帽所施加之一壓力將該彈簧墊圈推靠於該第二構件上,且更將該第一配合部之該環形軸向面壓靠於該第二配合部之該軸向面上。
  7. 如請求項1所述之耦合裝置,其中至少一組件包含一歧管(manifold)。
  8. 一種用於一嚴酷環境中之流體感測器,該感測器包含:一含氟聚合物(fluoropolymer)外殼體,包含具有一流體流動導管之一殼體組件;一隔膜,定位於該殼體組件中;該隔膜呈現一密封面;以及該殼體組件呈現一密封面,該密封面圍繞該流體流動導管延伸並與該隔膜之該密封面相嚙合,其中該殼體組件之該密封面包含定位於該殼體組件之該密封面上之至少一環形彎曲凸脊,該凸脊係與該殼體組件一體成型並被壓靠於該隔膜密封面上。
  9. 如請求項8所述之感測器,更包含鄰設於該隔膜之一墊板(backing plate);一適可結合至該墊板及該隔膜之玻璃層;以及一電路。
  10. 如請求項8所述之感測器,其中該殼體組件之該密封面係與 該隔膜之該密封面貼靠嚙合,且當該殼體組件之該密封面與該隔膜之該密封面承受一壓縮力時,該至少一環形彎曲凸脊係可貼靠該隔膜之該密封面變形。
  11. 如請求項8所述之感測器,其中該殼體組件之該密封面包含複數同心定向之環形彎曲凸脊,其中相鄰環形彎曲凸脊具有設置於該等同心定向之環形彎曲凸脊間之該殼體組件之該密封面。
  12. 如請求項9所述之感測器,其中一槽係定位於至少二相鄰環形彎曲凸脊之間,且該槽係通往該殼體組件之外部。
  13. 如請求項10所述之感測器,其中延伸至該殼體組件外部之一排氣口係定位於至少二相鄰環形彎曲凸脊之間。
  14. 如請求項8所述之感測器,更包含一壓緊螺帽(compression nut),其中該壓緊螺帽係適可與該感測器之組件相嚙合。
  15. 如請求項14所述之感測器,更包含一彈簧墊圈,該彈簧墊圈與該壓緊螺帽可操作地相嚙合,該壓緊螺帽推壓該彈簧墊圈,以維持該殼體組件之該密封面之可變形的該等環形彎曲凸脊與該隔膜之該密封面間之壓力。
  16. 一種可操作流體裝置,具有一軸線,且包含:一第一構件,包含一含氟聚合物本體殼體組件,具有一環形密封面,該環形密封面係實質垂直於該軸線且其中具有一流體流動導管;一第二構件,包含一含氟聚合物材料且具有一環形流體流動導管,該環形流體流動導管具有一軸向面,該軸向面具有自該軸向面沿軸向突出之一環形圓凸脊,該含氟聚合物材 料經潛變(creep),該環形圓凸脊圍繞一流體流動導管延伸;以及一壓縮加載裝置,用於將該第二構件之該軸向面與該第一構件之該環形密封面推靠於一起,以使該環形圓凸脊被壓入該環形密封面內,且當該第二構件潛變時,該壓縮加載裝置維持一實質恆定之加載;其中,該可操作流體裝置更包含一閥門構件、一感測器構件以及一過濾器構件其中之一。
  17. 如請求項16所述之可操作流體裝置,其中該壓縮加載裝置包含一彈簧墊圈。
TW097142375A 2007-11-02 2008-11-03 耦合裝置、流體感測器及可操作流體裝置 TWI456128B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US98510307P 2007-11-02 2007-11-02

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TW200936916A TW200936916A (en) 2009-09-01
TWI456128B true TWI456128B (zh) 2014-10-11

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TW097142375A TWI456128B (zh) 2007-11-02 2008-11-03 耦合裝置、流體感測器及可操作流體裝置
TW097142374A TW200934973A (en) 2007-11-02 2008-11-03 O-ringless seal couplings

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TW097142374A TW200934973A (en) 2007-11-02 2008-11-03 O-ringless seal couplings

Country Status (7)

Country Link
US (2) US20110163540A1 (zh)
EP (1) EP2212606A2 (zh)
JP (2) JP2011503450A (zh)
KR (1) KR20100092951A (zh)
CN (1) CN101918746A (zh)
TW (2) TWI456128B (zh)
WO (2) WO2009059326A2 (zh)

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JP2011503449A (ja) 2011-01-27
WO2009059324A4 (en) 2010-03-04
CN101918746A (zh) 2010-12-15
TW200934973A (en) 2009-08-16
TW200936916A (en) 2009-09-01
WO2009059324A3 (en) 2009-12-17
WO2009059326A2 (en) 2009-05-07
WO2009059324A2 (en) 2009-05-07
JP2011503450A (ja) 2011-01-27
EP2212606A2 (en) 2010-08-04
KR20100092951A (ko) 2010-08-23
WO2009059326A3 (en) 2010-03-04

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