TWI443857B - Solid state light emitting elements with photonic crystals - Google Patents
Solid state light emitting elements with photonic crystals Download PDFInfo
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- 239000004038 photonic crystal Substances 0.000 title claims description 156
- 239000007787 solid Substances 0.000 title claims description 15
- 239000004065 semiconductor Substances 0.000 claims description 41
- 230000005693 optoelectronics Effects 0.000 claims description 35
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- 238000003491 array Methods 0.000 claims description 6
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- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 229910052594 sapphire Inorganic materials 0.000 description 2
- 239000010980 sapphire Substances 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
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Description
本發明是有關於一種固態發光元件(solid-state light emitting device),特別是指一種具光子晶體(photonic crystal;簡稱PCs)的固態發光元件。The present invention relates to a solid-state light emitting device, and more particularly to a solid-state light emitting device having photonic crystals (PCs).
於固態發光元件相關領域中,發光二極體(LED)因具備有體積小、重量輕、反應速度快等優點,而使得其逐漸地取代傳統的鎢絲燈(incandescent)及螢光燈(fluorescent)等光源並作為照明設備使用。目前常見的應用可見有大型戶外顯示看板、交通指示燈號,以及液晶顯示器背光源等。In the field of solid-state light-emitting elements, light-emitting diodes (LEDs) are gradually replacing the traditional incandescent lamps and fluorescent lamps because of their small size, light weight, and fast reaction speed. ) and other light sources are used as lighting equipment. At present, common applications include large outdoor display billboards, traffic indicator numbers, and LCD backlights.
而為了實現如汽車車燈、投影機用光源等更高亮度需求的應用,常見的改善方式,可見有藉由粗化出光面的技術手段,亦或藉由在背光面形成分散式布拉格反射鏡(distribution Bragg reflector;簡稱DBR)或一維光子晶體等技術手段,以增加LED之出光面的光取出率(extraction efficiency)並提昇其發光亮度。In order to achieve higher brightness requirements such as automotive lights, projectors, etc., the common improvement methods can be seen by the technique of roughening the light surface, or by forming a decentralized Bragg mirror on the backlight surface. (distribution Bragg reflector; referred to as DBR) or one-dimensional photonic crystal and other technical means to increase the light extraction efficiency of the LED light-emitting surface and enhance its luminous brightness.
參閱圖1,Aurelien David等人於APPLIED PHYSICS LETTERS88 ,133514(2006)的Photonic crystal laser lift-off GaN light-emitting diodes一文中,揭示出一種具有二維光子晶體(two-dimensional photonic crystal;簡稱2DPCs)的藍光發光二極體1。該發光二極體1之製作方法是簡單地說明於下。Referring to Figure 1, Aurelien David et al., in APPLIED PHYSICS LETTERS 88 , 133514 (2006), Photonic crystal laser lift-off GaN light-emitting diodes, reveals a two-dimensional photonic crystal (2DPCs). ) blue light emitting diode 1 . The manufacturing method of the light-emitting diode 1 is simply described below.
在一形成於一藍寶石(sapphire)基板(圖未示)上之以 GaN為主並具有正負接面(p-n junction)的磊晶膜11上,依序形成複數由RuO2 /Ni/Ag所構成並相間隔設置的p-電極12、一圍繞該等p-電極12的SiO2 層13,及一形成於該SiO2 層13上的金(Au)層14;後續,將該金層14轉貼到一AlN陶瓷基板15上並利用雷射剝離法(laser lift-off,簡稱LLO)將該磊晶膜11自該藍寶石基板(圖未示)移除;進一步地,利用反應式離子蝕刻法(reactive ionic etching,簡稱RIE)於該磊晶膜11上形成一二維光子晶體16;最後,於該二維光子晶體16上形成一n-電極17以完成該發光二極體1。On a epitaxial film 11 formed of a GaN-based sapphire substrate (not shown) and having a positive-negative junction (p-n junction), a plurality of RuO 2 /Ni/Ag are sequentially formed. a p-electrode 12 configured to be spaced apart from each other, an SiO 2 layer 13 surrounding the p-electrodes 12, and a gold (Au) layer 14 formed on the SiO 2 layer 13; subsequently, the gold layer 14 is transferred onto an AlN ceramic substrate 15 and the epitaxial film 11 is removed from the sapphire substrate (not shown) by a laser lift-off (LLO); further, reactive ion etching is utilized. A two-dimensional photonic crystal 16 is formed on the epitaxial film 11 by a reactive ionic etching (RIE). Finally, an n-electrode 17 is formed on the two-dimensional photonic crystal 16 to complete the light-emitting diode 1.
該二維光子晶體16是一呈六邊形排列的圓形凹槽陣列,且該發光二極體1的發光波長約430 nm。該二維光子晶體16的晶格常數(lattice constant,簡稱a)為215 nm,填充率(filling factor,簡稱f)為0.38(即,凹槽直徑為81 nm;相鄰凹槽間距為134 nm)。The two-dimensional photonic crystal 16 is a circular groove array arranged in a hexagonal shape, and the light-emitting diode 1 has an emission wavelength of about 430 nm. The two-dimensional photonic crystal 16 has a lattice constant (abbreviated as a) of 215 nm and a filling factor (f) of 0.38 (ie, the groove diameter is 81 nm; the adjacent groove pitch is 134 nm). ).
雖然該發光二極體1可利用該二維光子晶體16控制場型與發散角的變化,藉以提高整體發光二極體之輸出的發光亮度。然而,Aurlien David等人所揭示的二維光子晶體16只能控制場型與增加光輸出功率,卻無法降低發光光源之光譜訊號峰的半高寬。Although the light-emitting diode 1 can control the variation of the field type and the divergence angle by using the two-dimensional photonic crystal 16, the luminance of the output of the overall light-emitting diode can be improved. However, Aur The two-dimensional photonic crystal 16 disclosed by Lien David et al. can only control the field type and increase the optical output power, but cannot reduce the full width at half maximum of the spectral signal peak of the illuminating light source.
經上述說明可知,降低發光光源之發光訊號峰的半高寬值以提昇發光亮度,是固態發光元件相關領域者所待突破的課題。It can be seen from the above description that reducing the half-height value of the illuminating signal peak of the illuminating light source to enhance the illuminating brightness is a subject to be solved by the related fields of the solid-state illuminating element.
本發明主要是選擇二維光子晶體結構及類光子晶體(photonic quasi crystal;簡稱PQC)結構其中一者,來與一維光子晶體(one-dimensional photonic crystal;簡稱1DPCs)搭配使用,藉以降低光譜訊號峰的半高寬。其主要原因在於,利用具備有較寬的角度、較窄的波長與無吸收問題等優點的一維光子晶體作為反射鏡,同時配合具備有控制場型之特點的二維光子晶體及類光子晶體其中一者的輔助,可有效地達到窄化發光訊號峰之半高寬的目的。The invention mainly selects one of a two-dimensional photonic crystal structure and a photonic quasi crystal (PQC) structure to be used together with a one-dimensional photonic crystal (1DPCs) to reduce spectral signals. The full width and width of the peak. The main reason is to use a one-dimensional photonic crystal having a wide angle, a narrow wavelength, and no absorption problem as a mirror, and a two-dimensional photonic crystal and a photonic crystal having a control field type. The assistance of one of them can effectively achieve the purpose of narrowing the half-height of the peak of the illuminating signal.
因此,本發明之目的,即在提供一種具光子晶體的固態發光元件。Accordingly, it is an object of the present invention to provide a solid state light emitting device having a photonic crystal.
於是,本發明具光子晶體的固態發光元件,包含:一基板、一形成於該基板並產生一預定波段的光電半導體磊晶膜、一連結於該光電半導體磊晶膜之電極單元,及一供該電極單元電性導通的複合式反射鏡。該光電半導體磊晶膜具有一出光面、一相反於該出光面並與該基板連接的背光面,及一形成於該出光面與背光面之間的正負接面。該光電半導體磊晶膜於該出光面形成有一光子晶體。該光子晶體是一二維光子晶體及一類光子晶體其中一者。該電極單元供該光電半導體磊晶膜的電子與電洞於該正負接面產生電子電洞對復合。該複合式反射鏡具有一夾置於該光電半導體磊晶膜與該基板之間的一維光子晶體。Therefore, the solid-state light-emitting element with a photonic crystal of the present invention comprises: a substrate, an optoelectronic semiconductor epitaxial film formed on the substrate and generating a predetermined wavelength band, an electrode unit coupled to the epitaxial film of the optoelectronic semiconductor, and a supply The composite mirror in which the electrode unit is electrically conductive. The optoelectronic semiconductor epitaxial film has a light emitting surface, a backlight surface opposite to the light emitting surface and connected to the substrate, and a positive and negative junction formed between the light emitting surface and the backlight surface. The optoelectronic semiconductor epitaxial film forms a photonic crystal on the light exiting surface. The photonic crystal is one of a two-dimensional photonic crystal and a type of photonic crystal. The electrode unit is configured to combine electrons and holes of the epitaxial film of the optoelectronic semiconductor to form an electron hole pair on the positive and negative junctions. The composite mirror has a one-dimensional photonic crystal sandwiched between the epitaxial film of the optoelectronic semiconductor and the substrate.
本發明之功效在於,藉由一維光子晶體,與二維光子晶體及類光子晶體其中一者的整合,適當地降低發光光譜 訊號峰的半高寬值,並提昇固態發光元件的發光亮度。The effect of the present invention is to appropriately reduce the luminescence spectrum by integrating one-dimensional photonic crystal with one of two-dimensional photonic crystals and photonic crystals. The half-height value of the signal peak and the brightness of the solid-state light-emitting element.
有關本發明之前述及其他技術內容、特點與功效,在以下配合參考圖式之十二個較佳實施例的詳細說明中,將可清楚的呈現。The above and other technical contents, features and advantages of the present invention will be apparent from the following detailed description of the preferred embodiments.
在本發明被詳細描述之前,要注意的是,在以下的說明內容中,類似的元件是以相同的編號來表示。Before the present invention is described in detail, it is noted that in the following description, similar elements are denoted by the same reference numerals.
參閱圖2,本發明具光子晶體的固態發光元件之一第一較佳實施例,包含:一基板2、一形成於該基板2並產生一預定波段的光電半導體磊晶膜3、一連結於該光電半導體磊晶膜3的電極單元5,及一供該電極單元5電性導通的複合式反射鏡(composite reflector)6。Referring to FIG. 2, a first preferred embodiment of a solid-state light-emitting device with a photonic crystal of the present invention comprises: a substrate 2, an optoelectronic semiconductor epitaxial film 3 formed on the substrate 2 and generating a predetermined wavelength band, and a The electrode unit 5 of the optoelectronic semiconductor epitaxial film 3 and a composite reflector 6 for electrically conducting the electrode unit 5.
在本發明之具光子晶體的固態發光元件中,該第一較佳實施例是一經由基板分離(lift-off)技術與晶圓鍵合技術(wafer bonding)所構成之垂直導通式(vertical feedthrough)的發光二極體;因此,該基板2是一經摻雜的矽(Si)基板。相關於基板分離技術與晶圓鍵合技術並非本發明之技術特徵,於此不再多加贅述。In the solid-state light-emitting element with a photonic crystal of the present invention, the first preferred embodiment is a vertical feedthrough formed by a wafer-based lift-off technique and wafer bonding. The light emitting diode; therefore, the substrate 2 is a doped germanium (Si) substrate. The technology related to the substrate separation technology and the wafer bonding technology are not the technical features of the present invention, and will not be further described herein.
該光電半導體磊晶膜3具有一出光面31、一相反於該出光面31並與該基板2連接的背光面32,及一形成於該出光面31與背光面32之間的正負接面33。The optoelectronic semiconductor epitaxial film 3 has a light emitting surface 31, a backlight surface 32 opposite to the light emitting surface 31 and connected to the substrate 2, and a positive and negative junction 33 formed between the light emitting surface 31 and the backlight surface 32. .
該光電半導體磊晶膜3於該出光面31形成有一光子晶體4,該光子晶體4是一二維光子晶體(2D PCs)及一類光子 晶體(PQC)其中一者;在本發明該第一較佳實施例中,該光子晶體4是一二維光子晶體。該二維光子晶體是一呈正六邊形(hexagonal)排列或正四邊形(square)排列(如附件1所示)的圓形凹槽41陣列,亦可是一呈蜂巢狀排列的圓形凹槽陣列(如附件2所示);在本發明該第一較佳實施例中,該二維光子晶體是一呈正六邊形排列的圓形凹槽41陣列。此處值得一提的是,當填充率過大時,發光源的場形雖然有變窄的現象,但電特性效果較差;反之,當填充率過小時,不僅發光源的場型會變寬,且光特性效果也較差。因此,較佳地,該二維光子晶體的填充率是介於0.10~0.90之間;更佳地,該二維光子晶體是一呈正六邊形排列的圓形凹槽41陣列,該二維光子晶體的填充率是介於0.40~0.70之間;又更佳地,該二維光子晶體的填充率是介於0.50~0.60之間;該光電半導體磊晶膜3所產生的預定波段是介於630 nm~700 nm之間。The photo-semiconductor epitaxial film 3 is formed on the light-emitting surface 31 with a photonic crystal 4, which is a two-dimensional photonic crystal (2D PCs) and a photon. One of the crystals (PQC); in the first preferred embodiment of the invention, the photonic crystal 4 is a two-dimensional photonic crystal. The two-dimensional photonic crystal is an array of circular grooves 41 in a hexagonal arrangement or a square arrangement (as shown in Annex 1), or a circular groove array arranged in a honeycomb shape. (As shown in Annex 2); In the first preferred embodiment of the invention, the two-dimensional photonic crystal is an array of circular grooves 41 arranged in a regular hexagon. It is worth mentioning here that when the filling rate is too large, although the field shape of the illuminating source is narrowed, the electrical characteristic effect is poor; conversely, when the filling rate is too small, not only the field type of the illuminating source is widened, And the light characteristics are also poor. Therefore, preferably, the filling rate of the two-dimensional photonic crystal is between 0.10 and 0.90; more preferably, the two-dimensional photonic crystal is an array of circular grooves 41 arranged in a regular hexagon, the two-dimensional The filling rate of the photonic crystal is between 0.40 and 0.70; more preferably, the filling rate of the two-dimensional photonic crystal is between 0.50 and 0.60; the predetermined wavelength band generated by the epitaxial film 3 of the optoelectronic semiconductor is Between 630 nm and 700 nm.
值得一提的是,在設計二維光子晶體時所需考量的晶格常數(a)值,主要是以光源的預定波段做為參考基礎;即,二維光子晶體的a值必須小於λ0 /n,且a值與λ0 /n同量級,λ0 是該預定波段,n是光子晶體本身材質的折射率(refractive index)。因此,較佳地,本發明該第一較佳實施例之二維光子晶體的晶格常數是介於50 nm~900 nm之間。在本發明該第一較佳實施例中,該光電半導體磊晶膜3所產生的預定波段是650 nm;該二維光子晶體的a值是200.0 nm且填充率是0.52;即,每一圓形凹槽41的直徑是 104.0 nm,每兩相鄰圓形凹槽41之間的間距是96.0 nm。It is worth mentioning that the lattice constant (a) value to be considered when designing a two-dimensional photonic crystal is mainly based on the predetermined wavelength band of the light source; that is, the a value of the two-dimensional photonic crystal must be smaller than λ 0 /n, and the value of a is the same magnitude as λ 0 /n, λ 0 is the predetermined wavelength band, and n is the refractive index of the material of the photonic crystal itself. Therefore, preferably, the lattice constant of the two-dimensional photonic crystal of the first preferred embodiment of the present invention is between 50 nm and 900 nm. In the first preferred embodiment of the present invention, the predetermined wavelength band generated by the optoelectronic semiconductor epitaxial film 3 is 650 nm; the a value of the two-dimensional photonic crystal is 200.0 nm and the filling ratio is 0.52; that is, each circle The diameter of the shaped groove 41 is 104.0 nm, and the spacing between each two adjacent circular grooves 41 is 96.0 nm.
該電極單元5供該光電半導體磊晶膜3的電子與電洞於該正負接面33產生電子電洞對復合(recombination),並具有一形成於該出光面31的第一電極51及一形成於該基板2之一下表面的第二電極52。The electrode unit 5 is configured to recombine the electrons and holes of the optoelectronic semiconductor epitaxial film 3 on the positive and negative junctions 33, and has a first electrode 51 formed on the light exit surface 31 and formed. a second electrode 52 on a lower surface of one of the substrates 2.
該複合式反射鏡6具有一夾置於該光電半導體磊晶膜3與該基板2之間的一維光子晶體62、一夾置於該光電半導體磊晶膜3與該一維光子晶體62之間的電流散佈層61、一夾置於該一維光子晶體62與該基板2之間的晶圓鍵合層63,及複數相間隔地設置於該一維光子晶體62並夾置於該電流散佈層61與該晶圓鍵合層63之間的導電柱64。在本發明該第一較佳實施例中,該一維光子晶體62是由14對的TiO2 /SiO2 介電層對(dielectric layer pair)所構成,且TiO2 與SiO2 的厚度分別是87 nm與105 nm。本發明之複合式反射鏡6主要是藉由該電流散佈層61、該等導電柱64及該一維光子晶體62,以同時提供電流垂直注入(vertical injection)及光源反射的作用。The composite mirror 6 has a one-dimensional photonic crystal 62 interposed between the optoelectronic semiconductor epitaxial film 3 and the substrate 2, and is sandwiched between the optoelectronic semiconductor epitaxial film 3 and the one-dimensional photonic crystal 62. a current spreading layer 61, a wafer bonding layer 63 interposed between the one-dimensional photonic crystal 62 and the substrate 2, and a plurality of spaced-apart photonic crystals 62 disposed therebetween and interposed therebetween A conductive pillar 64 is interposed between the layer 61 and the wafer bonding layer 63. In the first preferred embodiment of the present invention, the one-dimensional photonic crystal 62 is composed of 14 pairs of TiO 2 /SiO 2 dielectric layer pairs, and the thicknesses of TiO 2 and SiO 2 are respectively 87 nm and 105 nm. The composite mirror 6 of the present invention mainly uses the current spreading layer 61, the conductive pillars 64 and the one-dimensional photonic crystal 62 to simultaneously provide a vertical injection of current and a reflection of the light source.
再參閱圖2,本發明具光子晶體的固態發光元件之一第二較佳實施例大致上是相同於該第一較佳實施例,其不同處是在於,該一維光子晶體62的細部條件及該光電半導體磊晶膜3所產生的預定波段是介於480 nm~550 nm之間。在該本發明該第二較佳實施例中,該光電半導體磊晶膜3所產生的預定波段是530 nm,該一維光子晶體62之TiO2 與SiO2 的厚度分別是67.95 nm與83.05 nm。Referring to FIG. 2, a second preferred embodiment of the solid state light emitting device with photonic crystal of the present invention is substantially the same as the first preferred embodiment, except that the detail condition of the one-dimensional photonic crystal 62 is And the predetermined wavelength band generated by the optoelectronic semiconductor epitaxial film 3 is between 480 nm and 550 nm. In the second preferred embodiment of the present invention, the predetermined wavelength band generated by the optoelectronic semiconductor epitaxial film 3 is 530 nm, and the thicknesses of the TiO 2 and SiO 2 of the one-dimensional photonic crystal 62 are 67.95 nm and 83.05 nm, respectively. .
再參閱圖2,本發明具光子晶體的固態發光元件之一第三較佳實施例大致上是相同於該第一較佳實施例,其不同處是在於,該一維光子晶體62的細部條件、該光電半導體磊晶膜3所產生的預定波段,及該二維光子晶體的晶格常數。Referring to FIG. 2, a third preferred embodiment of the solid state light emitting device with photonic crystal of the present invention is substantially the same as the first preferred embodiment, except that the detail condition of the one-dimensional photonic crystal 62 is a predetermined wavelength band generated by the optoelectronic semiconductor epitaxial film 3, and a lattice constant of the two-dimensional photonic crystal.
較佳地,該光電半導體磊晶膜3所產生的預定波段是介於420 nm~480 nm之間;該二維光子晶體的晶格常數是介於50 nm~900 nm之間。Preferably, the predetermined wavelength band generated by the optoelectronic semiconductor epitaxial film 3 is between 420 nm and 480 nm; and the lattice constant of the two-dimensional photonic crystal is between 50 nm and 900 nm.
在本發明該第三較佳實施例中,該光電半導體磊晶膜3的膜層結構是n-GaN/(InGaN/GaN)/p-GaN,其中,n-GaN、InGaN、GaN及p-GaN的厚度分別是230 nm、3 nm、7 nm及230 nm,且該光電半導體磊晶膜3所產生的預定波段是433 nm;該二維光子晶體的晶格常數是209.1 nm;該第一電極51是Ti/Al/Ni/Au,該第二電極52是Ti/Pt/Au;該電流散佈層61是厚度300 nm的氧化銦錫(ITO);該一維光子晶體62之TiO2 與SiO2 在430 nm處的折射率分別是2.52與1.48,且TiO2 與SiO2 的厚度分別是58.96 nm與75.04 nm,該一維光子晶體62是在417 nm~450 nm之波段內形成一全方位光帶隙(band gap)以將該第三較佳實施例所產生的光源反射回該出光面31;該晶圓鍵合層63是Au/Ti;每一導電柱64是一直徑為50 μm且高度為7 μm的Cr/Au。In the third preferred embodiment of the present invention, the film structure of the optoelectronic semiconductor epitaxial film 3 is n-GaN/(InGaN/GaN)/p-GaN, wherein n-GaN, InGaN, GaN, and p- The thickness of GaN is 230 nm, 3 nm, 7 nm, and 230 nm, respectively, and the predetermined wavelength band generated by the optoelectronic semiconductor epitaxial film 3 is 433 nm; the lattice constant of the two-dimensional photonic crystal is 209.1 nm; The electrode 51 is Ti/Al/Ni/Au, the second electrode 52 is Ti/Pt/Au; the current spreading layer 61 is indium tin oxide (ITO) having a thickness of 300 nm; the TiO 2 of the one-dimensional photonic crystal 62 is The refractive indices of SiO 2 at 430 nm are 2.52 and 1.48, respectively, and the thicknesses of TiO 2 and SiO 2 are 58.96 nm and 75.04 nm, respectively. The one-dimensional photonic crystal 62 forms a whole in the band of 417 nm to 450 nm. A light source gap is formed by reflecting the light source generated by the third preferred embodiment back to the light exit surface 31; the wafer bonding layer 63 is Au/Ti; each conductive pillar 64 is a diameter of 50 Cr/Au of μm and height of 7 μm.
參圖3,由本發明該第三較佳實施例之掃描式電子顯微 鏡(SEM)影像顯示可知,該二維光子晶體的晶格常數是209.1 nm。Referring to Figure 3, the scanning electron microscope of the third preferred embodiment of the present invention The mirror (SEM) image shows that the lattice constant of the two-dimensional photonic crystal is 209.1 nm.
再參閱圖2,本發明具光子晶體的固態發光元件之一第四較佳實施例大致上是相同於該第一較佳實施例,其不同處是在於,該一維光子晶體62的細部條件、該光電半導體磊晶膜3所產生的預定波段,及該二維光子晶體的適用範圍。Referring to FIG. 2, a fourth preferred embodiment of the solid state light emitting device with photonic crystal of the present invention is substantially the same as the first preferred embodiment, except that the detail condition of the one-dimensional photonic crystal 62 is a predetermined wavelength band generated by the optoelectronic semiconductor epitaxial film 3, and a range of application of the two-dimensional photonic crystal.
較佳地,本發明該第四較佳實施例之光電半導體磊晶膜3所產生的預定波段是介於380 nm~420 nm之間;該二維光子晶體的晶格常數是介於50 nm~900 nm之間。在該本發明該第四較佳實施例中,該光電半導體磊晶膜3所產生的預定波段是400 nm,該一維光子晶體62之TiO2 與SiO2 的厚度分別是46.20 nm與63.80 nm。Preferably, the predetermined wavelength band produced by the optoelectronic semiconductor epitaxial film 3 of the fourth preferred embodiment of the present invention is between 380 nm and 420 nm; the lattice constant of the two-dimensional photonic crystal is between 50 nm. Between ~900 nm. In the fourth preferred embodiment of the present invention, the predetermined wavelength band generated by the optoelectronic semiconductor epitaxial film 3 is 400 nm, and the thickness of the TiO 2 and SiO 2 of the one-dimensional photonic crystal 62 is 46.20 nm and 63.80 nm, respectively. .
本發明該第一~四較佳實施例之光子晶體(2DPCs)4與一維光子晶體(1DPCs)62之細部條件,是簡單地整理於下列表1.中。The detailed conditions of the photonic crystals (2DPCs) 4 and the one-dimensional photonic crystals (1DPCs) 62 of the first to fourth preferred embodiments of the present invention are simply summarized in the following Table 1.
參閱圖4與圖5,本發明具光子晶體的固態發光元件之一第五較佳實施例大致上是相同於該第二較佳實施例。其不同處在於,該光子晶體4是一類光子晶體(PQC)。該類光子晶體是一呈正四邊形與正三邊形交錯排列、串齒輪(pinwheel)排列(如附件3所示)或太陽花(fibonacci)排列(如附件4所示)的正四邊形凹槽42陣列;在本發明該第五較佳實施例中,該類光子晶體是一呈正四邊形與正三邊形交錯排列的正四邊形凹槽42陣列。較佳地,該類光子晶體的填充率是介於0.10~0.90之間;該類光子晶體的晶格常數是介於300 nm~800 nm之間。Referring to Figures 4 and 5, a fifth preferred embodiment of the solid state light-emitting device of the present invention having a photonic crystal is substantially identical to the second preferred embodiment. The difference is that the photonic crystal 4 is a type of photonic crystal (PQC). The photonic crystal is an array of regular quadrangular grooves 42 which are staggered in a regular quadrilateral and a regular triangular shape, arranged in a pinwheel arrangement (as shown in Annex 3) or in a fibonacci arrangement (as shown in Annex 4); In the fifth preferred embodiment of the present invention, the photonic crystal is an array of regular quadrangular grooves 42 which are staggered in a regular quadrilateral and a regular triangular shape. Preferably, the filling rate of the photonic crystal is between 0.10 and 0.90; the lattice constant of the photonic crystal is between 300 nm and 800 nm.
該正四邊形凹槽42陣列具有複數陣列單元420;且每三彼此相鄰接的陣列單元420是共用三正四邊形凹槽42(如圖5所示)。每一陣列單元420具有一第一陣列組421與一第二陣列組422(如圖4所示)。每一第一陣列組421是由六個呈正三邊形排列之凹槽陣列所構成以形成一呈正六邊形排列之凹槽陣列組(圖4是未顯示出正四邊形凹槽42)。每一第二陣列組422是由六個相間隔設置之呈正四邊形排列的凹槽陣列與六個呈正三邊形排列的凹槽陣列所構成(圖4是未顯示出正四邊形凹槽42)。每一陣列單元420的第二陣列組422是圍繞其第一陣列組421。The array of regular quadrilateral grooves 42 has a plurality of array elements 420; and each of the array cells 420 adjacent to each other is a common three regular quadrangular groove 42 (as shown in FIG. 5). Each array unit 420 has a first array group 421 and a second array group 422 (shown in FIG. 4). Each of the first array groups 421 is formed by six arrays of grooves arranged in a regular triangular shape to form a groove array group arranged in a regular hexagon (FIG. 4 is a square-shaped groove 42 not shown). Each of the second array groups 422 is composed of six arrays of grooves arranged in a regular quadrilateral arrangement and six arrays of grooves arranged in a regular triangular shape (FIG. 4 shows a regular quadrilateral groove 42 not shown). The second array set 422 of each array unit 420 is around its first array set 421.
更佳地,該光電半導體磊晶膜3所產生的預定波段是介於480 nm~550 nm之間;該類光子晶體的填充率是介於0.40~0.70之間;又更佳地,該類光子晶體的填充率是介於 0.60~0.70之間。在本發明該第五較佳實施例中,該類光子晶體的晶格常數、正四邊形凹槽42寬度、正四邊形凹槽42間距與填充率分別是350 nm、220 nm、130 nm與0.63。More preferably, the predetermined wavelength band produced by the optoelectronic semiconductor epitaxial film 3 is between 480 nm and 550 nm; the filling rate of the photonic crystal is between 0.40 and 0.70; and more preferably, the class The filling rate of photonic crystals is between Between 0.60 and 0.70. In the fifth preferred embodiment of the present invention, the lattice constant of the photonic crystal, the width of the regular quadrangular groove 42 and the pitch and filling ratio of the regular quadrilateral groove 42 are 350 nm, 220 nm, 130 nm and 0.63, respectively.
再參閱圖5,本發具光子晶體的固態發光元件之一第六較佳實施例大致上是相同於該第五較佳實施例。其不同處在於,該類光子晶體的晶格常數、正四邊形凹槽42寬度、正四邊形凹槽42間距與填充率分別是450 nm、280 nm、170 nm與0.62。Referring again to FIG. 5, a sixth preferred embodiment of the solid state light emitting device of the present photonic crystal is substantially identical to the fifth preferred embodiment. The difference is that the lattice constant of the photonic crystal, the width of the regular quadrilateral groove 42, the pitch and filling ratio of the regular quadrilateral groove 42 are 450 nm, 280 nm, 170 nm and 0.62, respectively.
再參閱圖5,本發明具光子晶體的固態發光元件之一第七較佳實施例大致上是相同於該第五較佳實施例。其不同處在於,該類光子晶體的晶格常數、正四邊形凹槽42寬度、正四邊形凹槽42間距與填充率分別是550 nm、330 nm、220 nm與0.60。Referring again to Figure 5, a seventh preferred embodiment of a solid state light emitting device having a photonic crystal of the present invention is substantially identical to the fifth preferred embodiment. The difference is that the lattice constant of the photonic crystal, the width of the regular quadrilateral groove 42, the pitch and filling ratio of the regular quadrilateral groove 42 are 550 nm, 330 nm, 220 nm and 0.60, respectively.
再參閱圖5,本發明具光子晶體的固態發光元件之一第八較佳實施例大致上是相同於該第五較佳實施例。其不同處在於,該類光子晶體的晶格常數、正四邊形凹槽42寬度、正四邊形凹槽42間距與填充率分別是750 nm、450 nm、300 nm與0.60。Referring again to Figure 5, an eighth preferred embodiment of the solid state light emitting device of the present invention having a photonic crystal is substantially identical to the fifth preferred embodiment. The difference is that the lattice constant of the photonic crystal, the width of the regular quadrangular groove 42, the pitch and filling ratio of the regular quadrilateral groove 42 are 750 nm, 450 nm, 300 nm and 0.60, respectively.
本發明該第五~八較佳實施例之類光子晶體(PQC)4的細部條件,是簡單地整理於下列表2.中。The detailed conditions of the photonic crystal (PQC) 4 of the fifth to eighth preferred embodiments of the present invention are simply summarized in the following Table 2.
表2.
再參閱圖5,本發明具光子晶體的固態發光元件之一第九較佳實施例大致上是相同於該第五較佳實施例。其不同處在於,該光電半導體磊晶膜3所產生的預定波段是介於420 nm~480 nm之間;該類光子晶體的填充率是介於0.40~0.70之間;又更佳地,該類光子晶體的填充率是介於0.50~0.60之間。Referring again to Figure 5, a ninth preferred embodiment of a solid state light emitting device having a photonic crystal of the present invention is substantially identical to the fifth preferred embodiment. The difference is that the predetermined wavelength band generated by the optoelectronic semiconductor epitaxial film 3 is between 420 nm and 480 nm; the filling rate of the photonic crystal is between 0.40 and 0.70; and more preferably, the The filling rate of photonic crystals is between 0.50 and 0.60.
在本發明該第九較佳實施例中,該類光子晶體的晶格常數、正四邊形凹槽42寬度、正四邊形凹槽42間距與填充率分別是350 nm、203 nm、147 nm與0.58。In the ninth preferred embodiment of the present invention, the lattice constant of the photonic crystal, the width of the regular quadrangular groove 42 and the pitch and filling ratio of the regular quadrilateral groove 42 are 350 nm, 203 nm, 147 nm and 0.58, respectively.
再參閱圖5,本發明具光子晶體的固態發光元件之一第十較佳實施例大致上是相同於該第九較佳實施例。其不同處在於,該類光子晶體的晶格常數、正四邊形凹槽42寬度、正四邊形凹槽42間距與填充率分別是450 nm、264 nm、186 nm與0.57。Referring again to Figure 5, a tenth preferred embodiment of a solid state light emitting device having a photonic crystal of the present invention is substantially identical to the ninth preferred embodiment. The difference is that the lattice constant of the photonic crystal, the width of the regular quadrilateral groove 42, the pitch and filling ratio of the regular quadrilateral groove 42 are 450 nm, 264 nm, 186 nm and 0.57, respectively.
再參閱圖5,本發明具光子晶體的固態發光元件之一第十一較佳實施例大致上是相同於該第九較佳實施例。其不同處在於,該類光子晶體的晶格常數、正四邊形凹槽42寬 度、正四邊形凹槽42間距與填充率分別是550 nm、305 nm、245 nm與0.55。Referring again to Figure 5, an eleventh preferred embodiment of the solid state light emitting device of the present invention having a photonic crystal is substantially identical to the ninth preferred embodiment. The difference is that the lattice constant of the photonic crystal and the regular quadrangular groove 42 are wide. The pitch and fill ratio of the square and regular quadrilateral grooves 42 are 550 nm, 305 nm, 245 nm, and 0.55, respectively.
再參閱圖5,本發明具光子晶體的固態發光元件之一第十二較佳實施例大致上是相同於該第九較佳實施例。其不同處在於,該類光子晶體的晶格常數、正四邊形凹槽42寬度、正四邊形凹槽42間距與填充率分別是750 nm、424 nm、326 nm與0.57。Referring again to Figure 5, a twelfth preferred embodiment of a solid state light emitting device having a photonic crystal of the present invention is substantially identical to the ninth preferred embodiment. The difference is that the lattice constant of the photonic crystal, the width of the regular quadrilateral groove 42, the pitch and filling ratio of the regular quadrilateral groove 42 are 750 nm, 424 nm, 326 nm and 0.57, respectively.
本發明該第九~十二較佳實施例之光子晶體(PQC)4的細部條件,是簡單地整理於下列表3.中。The detailed conditions of the photonic crystal (PQC) 4 of the ninth to twelfth preferred embodiments of the present invention are simply summarized in the following Table 3.
<分析數據> 參閱圖6,由本發明該第三較佳實施例之頻率對波向量(wave vector)與頻率對光子狀態密度(density of state,簡稱DOS)分析數據可知,圖6之左圖所顯示的三角形、圓形與正方形曲線分別代表圖6之右圖的三個能階模態。由圖6的左圖觀之,可看到頻率位在0.523 a/λ~0.445 a/λ之間(即,波長介於399.81 nm~469.89 nm之間)的三個能階模態,在對應到圖6的右圖之後,三個能階模態在頻率介於0.49 a/λ~0.47 a/λ之間(即,426.73 nm~444.89 nm波段內)的光 子狀態密度增加;因此,該第三較佳實施例之二維光子晶體4在0.523 a/λ~0.445 a/λ的頻段內為光子提供共振腔的作用,因而增加了其光外出效率。<Analysis data> Referring to FIG. 6, according to the frequency-pair wave vector and the frequency-to-photon state density (DOS) analysis data of the third preferred embodiment of the present invention, the triangle shown in the left figure of FIG. 6 is The circular and square curves represent the three energy level modes of the right image of Figure 6, respectively. From the left diagram of Figure 6, we can see the three energy modes of the frequency between 0.523 a/λ~0.445 a/λ (that is, the wavelength is between 399.81 nm and 469.89 nm). After the right diagram of Figure 6, the three energy modes are in the range of light between 0.49 a / λ ~ 0.47 a / λ (ie, in the 426.73 nm ~ 444.89 nm band) The sub-state density is increased; therefore, the two-dimensional photonic crystal 4 of the third preferred embodiment provides a photonic cavity for the photon in the frequency band of 0.523 a/λ~0.445 a/λ, thereby increasing its light outgoing efficiency.
另,參圖7,由本發明該第三較佳實施例的光譜圖可知,該第三較佳實施例之光譜訊號峰的半高寬僅約5 nm,而未使用有二維光子晶體的發光二極體(LED)之光譜訊號的半高寬卻高達30 nm,顯見本發明該第三較佳實施例因使用有該一維光子晶體62作為一高反射率的反射鏡,配合該光子晶體(即,二維光子晶體)4改變光在半導體波導內傳播的行為,形成一類似共振腔的光導,大幅降低光譜訊號峰的半高寬。本發明所提供的固態光源,具有更純的光譜訊號峰,在配合使用螢光粉以封裝構成白光光源的貢獻上,可大幅地改善其亮度及良率。In addition, referring to FIG. 7, the spectrum of the third preferred embodiment of the present invention shows that the full width at half maximum of the spectral signal peak of the third preferred embodiment is only about 5 nm, and the illuminating without the two-dimensional photonic crystal is not used. The half-height of the spectral signal of the diode (LED) is as high as 30 nm. It is apparent that the third preferred embodiment of the present invention uses the one-dimensional photonic crystal 62 as a mirror with high reflectivity, and the photonic crystal is matched. (ie, two-dimensional photonic crystal) 4 changes the behavior of light propagating within the semiconductor waveguide, forming a light guide similar to the resonant cavity, greatly reducing the full width at half maximum of the spectral signal peak. The solid-state light source provided by the invention has a purer spectral signal peak, and the brightness and yield can be greatly improved by using the fluorescent powder to encapsulate the contribution of the white light source.
參圖8,由本發明該第三較佳實施例的光輸出功率對注入電流(injection current)曲線圖可知,與未使用有二維光子晶體的LED相比較下,本發明該第三較佳實施例的光輸出功率相對增加10%,顯見本發明該第三較佳實施例可同時提升整體的光輸出功率。因此,更進一步提升利用本發明之固態發光元件並配合使用螢光粉所封裝成之白光光源的亮度。Referring to FIG. 8, the optical output power versus injection current graph of the third preferred embodiment of the present invention shows that the third preferred embodiment of the present invention is compared with an LED that does not use a two-dimensional photonic crystal. For example, the optical output power is relatively increased by 10%. It is apparent that the third preferred embodiment of the present invention can simultaneously increase the overall optical output power. Therefore, the brightness of the white light source packaged by the solid-state light-emitting element of the present invention and used in combination with the phosphor powder is further improved.
綜上所述,本發明具光子晶體的固態發光元件,利用具備有較寬的角度、較窄的波長與無吸收問題等優點的一維光子晶體作為反射鏡,同時配合具備有控制場型之特點的二維光子晶體及類光子晶體其中一者的輔助,可有效地 達到窄化發光訊號峰之半高寬並提昇固態發光元件的發光亮度,確實達到本發明之目的。In summary, the solid-state light-emitting element with photonic crystal of the present invention utilizes a one-dimensional photonic crystal having a wide angle, a narrow wavelength, and no absorption problem as a mirror, and is equipped with a control field type. Assisted by one of two-dimensional photonic crystals and photonic crystals, effectively It is the object of the present invention to achieve the half-height width of the narrowed luminescence signal peak and to increase the luminance of the solid-state light-emitting element.
惟以上所述者,僅為本發明之較佳實施例而已,當不能以此限定本發明實施之範圍,即大凡依本發明申請專利範圍及發明說明內容所作之簡單的等效變化與修飾,皆仍屬本發明專利涵蓋之範圍內。The above is only the preferred embodiment of the present invention, and the scope of the invention is not limited thereto, that is, the simple equivalent changes and modifications made by the scope of the invention and the description of the invention are All remain within the scope of the invention patent.
2‧‧‧基板2‧‧‧Substrate
3‧‧‧光電半導體磊晶膜3‧‧‧Photoelectric semiconductor epitaxial film
31‧‧‧出光面31‧‧‧Glossy
32‧‧‧背光面32‧‧‧ Backlit surface
33‧‧‧正負接面33‧‧‧ positive and negative junction
4‧‧‧光子晶體4‧‧‧Photonic crystal
41‧‧‧圓形凹槽41‧‧‧Circular groove
42‧‧‧正四邊形凹槽42‧‧‧French quadrilateral groove
420‧‧‧陣列單元420‧‧‧Array unit
421‧‧‧第一陣列組421‧‧‧First array group
422‧‧‧第二陣列組422‧‧‧Second array group
5‧‧‧電極單元5‧‧‧Electrode unit
51‧‧‧第一電極51‧‧‧First electrode
52‧‧‧第二電極52‧‧‧second electrode
6‧‧‧複合式反射鏡6‧‧‧Composite mirror
61‧‧‧電流散佈層61‧‧‧current distribution layer
62‧‧‧一維光子晶體62‧‧‧One-dimensional photonic crystal
63‧‧‧晶圓鍵合層63‧‧‧ wafer bonding layer
64‧‧‧導電柱64‧‧‧conductive column
圖1是一正視示意圖,說明Aurlien David等人所揭示之具有二維光子晶體的藍光發光二極體;圖2是一正視示意圖,說明本發明具光子晶體的固態發光元件之一第一較佳實施例;圖3是一SEM影像圖,說明本發明之一第三較佳實施例之二維光子晶體;圖4是一示意圖,說明本發明之一第五較佳實施例的一類光子晶體;圖5是一示意圖,說明本發明之該第五較佳實施例之類光子晶體之正四邊形凹槽陣列;圖6是一頻率對波向量與頻率對光子狀態密度(DOS)分析數據圖,說明本發明該第三較佳實施例之光子的能階模態;圖7是一光譜圖,說明本發明該第三較佳實施例的光譜之場形;及圖8是本發明該第三較佳實施例之光輸出功率對注入電流曲線圖。Figure 1 is a front elevational view showing Aur A blue light emitting diode having a two-dimensional photonic crystal disclosed by Lien David et al.; FIG. 2 is a front elevational view showing a first preferred embodiment of a solid state light emitting device having a photonic crystal of the present invention; FIG. 3 is a SEM FIG. 4 is a schematic view showing a photonic crystal of a fifth preferred embodiment of the present invention; FIG. 5 is a schematic view showing the present invention; The positive quadrilateral groove array of the photonic crystal of the fifth preferred embodiment of the invention; FIG. 6 is a frequency versus wave vector and frequency versus photon state density (DOS) analysis data, illustrating the third preferred embodiment of the present invention. For example, the energy level mode of the photon; FIG. 7 is a spectrum diagram illustrating the field shape of the spectrum of the third preferred embodiment of the present invention; and FIG. 8 is a light output power pair of the third preferred embodiment of the present invention. Injection current graph.
附件1:呈正四邊形排列的圓形凹槽陣列之二維光子晶體。Annex 1: Two-dimensional photonic crystals of a circular groove array arranged in a regular quadrilateral.
附件2:呈蜂巢狀排列的圓形凹槽陣列之二維光子晶體。Annex 2: Two-dimensional photonic crystals in a circular groove array arranged in a honeycomb shape.
附件3:呈串齒輪排列的正四邊形凹槽陣列之類光子晶體。Attachment 3: Photonic crystals such as a regular quadrilateral groove array arranged in a string of gears.
附件4:呈太陽花排列的正四邊形凹槽陣列之類光子晶體。Annex 4: Photonic crystals such as a regular quadrilateral groove array arranged in the arrangement of sunflowers.
2‧‧‧基板2‧‧‧Substrate
3‧‧‧光電半導體磊晶膜3‧‧‧Photoelectric semiconductor epitaxial film
31‧‧‧出光面31‧‧‧Glossy
32‧‧‧背光面32‧‧‧ Backlit surface
33‧‧‧正負接面33‧‧‧ positive and negative junction
4‧‧‧光子晶體4‧‧‧Photonic crystal
41‧‧‧圓形凹槽41‧‧‧Circular groove
42‧‧‧正四邊形凹槽42‧‧‧French quadrilateral groove
5‧‧‧電極單元5‧‧‧Electrode unit
51‧‧‧第一電極51‧‧‧First electrode
52‧‧‧第二電極52‧‧‧second electrode
6‧‧‧複合式反射鏡6‧‧‧Composite mirror
61‧‧‧電流散佈層61‧‧‧current distribution layer
62‧‧‧一維光子晶體62‧‧‧One-dimensional photonic crystal
63‧‧‧晶圓鍵合層63‧‧‧ wafer bonding layer
64‧‧‧導電柱64‧‧‧conductive column
Claims (11)
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