TWI336081B - System and method for operating non-volatile memory using temperature compensation of voltages of unselected word lines and select gates - Google Patents
System and method for operating non-volatile memory using temperature compensation of voltages of unselected word lines and select gates Download PDFInfo
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C16/00—Erasable programmable read-only memories
- G11C16/02—Erasable programmable read-only memories electrically programmable
- G11C16/04—Erasable programmable read-only memories electrically programmable using variable threshold transistors, e.g. FAMOS
- G11C16/0483—Erasable programmable read-only memories electrically programmable using variable threshold transistors, e.g. FAMOS comprising cells having several storage transistors connected in series
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C11/56—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using storage elements with more than two stable states represented by steps, e.g. of voltage, current, phase, frequency
- G11C11/5621—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using storage elements with more than two stable states represented by steps, e.g. of voltage, current, phase, frequency using charge storage in a floating gate
- G11C11/5642—Sensing or reading circuits; Data output circuits
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C16/00—Erasable programmable read-only memories
- G11C16/02—Erasable programmable read-only memories electrically programmable
- G11C16/06—Auxiliary circuits, e.g. for writing into memory
- G11C16/26—Sensing or reading circuits; Data output circuits
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C16/00—Erasable programmable read-only memories
- G11C16/02—Erasable programmable read-only memories electrically programmable
- G11C16/06—Auxiliary circuits, e.g. for writing into memory
- G11C16/34—Determination of programming status, e.g. threshold voltage, overprogramming or underprogramming, retention
- G11C16/3418—Disturbance prevention or evaluation; Refreshing of disturbed memory data
- G11C16/3427—Circuits or methods to prevent or reduce disturbance of the state of a memory cell when neighbouring cells are read or written
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C16/00—Erasable programmable read-only memories
- G11C16/02—Erasable programmable read-only memories electrically programmable
- G11C16/06—Auxiliary circuits, e.g. for writing into memory
- G11C16/34—Determination of programming status, e.g. threshold voltage, overprogramming or underprogramming, retention
- G11C16/3436—Arrangements for verifying correct programming or erasure
- G11C16/3454—Arrangements for verifying correct programming or for detecting overprogrammed cells
- G11C16/3459—Circuits or methods to verify correct programming of nonvolatile memory cells
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C7/00—Arrangements for writing information into, or reading information out from, a digital store
- G11C7/04—Arrangements for writing information into, or reading information out from, a digital store with means for avoiding disturbances due to temperature effects
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C16/00—Erasable programmable read-only memories
- G11C16/02—Erasable programmable read-only memories electrically programmable
- G11C16/06—Auxiliary circuits, e.g. for writing into memory
- G11C16/34—Determination of programming status, e.g. threshold voltage, overprogramming or underprogramming, retention
- G11C16/3418—Disturbance prevention or evaluation; Refreshing of disturbed memory data
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C2211/00—Indexing scheme relating to digital stores characterized by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C2211/56—Indexing scheme relating to G11C11/56 and sub-groups for features not covered by these groups
- G11C2211/562—Multilevel memory programming aspects
- G11C2211/5621—Multilevel programming verification
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Description
1336081 九、發明說明: 【發明所屬之技術領域】 ’ 本發明係關於非揮發性記憶體技術。 【先前技術】1336081 IX. Description of the invention: [Technical field to which the invention pertains] The present invention relates to non-volatile memory technology. [Prior Art]
半導體記憶體愈來愈普遍地用於各種電子裝置中。舉例 而言,非揮發性半導體記憶體可詩蜂巢式電話、數㈣ 機、個人數位助理、移動計算裝置、非移動計算裝置或其 他裝置中。電可擦可程式化唯讀記憶體(eepr〇m)及快閃 記憶體便是最受歡迎的非揮發性半導體記憶體之一。 EEPROM及快閃記憶體兩者皆使用一浮動間㉟,該浮動 閘極定位於-半導體基板中之溝道區上方並與該溝道區絕 緣。該浮動閘極定位於源極區與汲極區之間。_控制閘極 設置於該浮動閘極上方,並與該浮動閘極絕緣。電晶體之 臨限電壓受浮動閘極上所保持之電荷量控制。亦即,必須 在導通該電晶體以容許其源極與汲極之間導電之前施加至 控制閘極之最小電壓量係由該浮動閘極上之電荷位準控 制。 當程式化一 EEPROM或快閃記憶體裝置(例如一 NAND快 閃記憶體裝置)時,通常對控制閘極施加一程式化電壓且 將位元線接地。來自溝道之電子注入至浮動閘極内。當電 子在浮動閘極中積聚時,浮動閘極變成帶負電荷且儲存元 件之臨限電壓升高,從而使儲存元件處於程式化狀態。更 多關於程式化之資訊可在標稱為"s〇urce side self Boosting Technique for N〇n_v〇Utile Mem〇ry"之美國專利 121185.doc 1336081 M59,397 中及標稱為"Detect Over Programmed Memory"之 美國專利6,917,542中找到,以上兩個專利皆以全文引用的 方式併入本文中。 某些EEPROM及快閃記憶體裝置具有一用於儲存兩個電 荷範圍之浮動閘極,且因此,可在兩種狀態(例如一擦除 狀態與一程式化狀態)之間程式化/擦除儲存元件。此種快 閃記憶體裝置有時稱作二進製快閃記憶體裝置。 多狀態快閃記憶體裝置係藉由識別由各禁止範圍分開之 多個不同之容許/有效程式化臨限電壓範圍所構建。每一 不同之臨限電壓範圍均對應於在該記憶體裝置中所編碼之 資料位元集合之一預定值。 在當前的非揮發性記憶體裝置(例如NAND快閃記憶體裝 置)中’溫度變化會導致各種關於讀取及寫入資料之問 題。記憶體裝置基於其所處環境而經受變化之溫度。舉例 而s ’某些現有s己憶體裝置被認定為應在-40。與+85 0C之 間使用。工業、軍事甚至消費者應用中之裝置可經歷顯著 之溫度變化。溫度影響諸多電晶體參數,其中最主要者為 Ss限電壓。特定而言,溫度變化可導致讀取錯誤並使非揮 發性儲存元件之不同狀態之臨限電壓分佈變寬。當前,藉 由以下方式補该溫度變化.以一計及選擇儲存元件之臨限 電壓之溫度變化之方式’改變施加至選擇字線之讀取/驗 證電壓。此方法至多能解決儲存元件之臨限電壓分佈之平 均偏移問題’為了簡明起見,假定臨限電壓皆處於相同之 資料狀態。然而,需要一種經改良之技術,以便進一步減 (S :) 121185.doc 1J36081 J因咖度變化所致之每一狀態之臨限電壓分佈之擴展。 【發明内容】 本發明藉由提供—種用於操作非揮發性儲存器之系統與 方法來解決上述及其他問題,其中將經溫度補償之電壓施 加至非選擇非揮發性儲存元件及/或選擇閘極。本發明達 成各種益處’包括經改良之讀取及寫入效能。 於實施例中’藉由下述方式來操作非揮發性儲存器:Semiconductor memory is increasingly used in a variety of electronic devices. For example, non-volatile semiconductor memory can be found in poetic cellular telephones, digital (four) computers, personal digital assistants, mobile computing devices, non-mobile computing devices, or other devices. Electrically erasable and programmable memory (eepr〇m) and flash memory are among the most popular non-volatile semiconductor memories. Both the EEPROM and the flash memory use a floating gate 35 that is positioned above and instasis of the channel region in the semiconductor substrate. The floating gate is positioned between the source region and the drain region. The _ control gate is disposed above the floating gate and insulated from the floating gate. The threshold voltage of the transistor is controlled by the amount of charge held on the floating gate. That is, the minimum amount of voltage that must be applied to the control gate before the transistor is turned on to allow conduction between its source and drain is controlled by the charge level on the floating gate. When programming an EEPROM or flash memory device (such as a NAND flash memory device), a stylized voltage is typically applied to the control gate and the bit line is grounded. Electrons from the channel are injected into the floating gate. When an electron accumulates in the floating gate, the floating gate becomes negatively charged and the threshold voltage of the storage element rises, thereby causing the storage element to be in a stylized state. More information about stylization can be found in the US Patent No. 121185.doc 1336081 M59, 397, and "Detect Over, "s〇urce side self Boosting Technique for N〇n_v〇Utile Mem〇ry" U.S. Patent No. 6,917,542, the disclosure of which is hereby incorporated by reference in its entirety in its entirety in its entirety in its entirety in its entirety in Some EEPROM and flash memory devices have a floating gate for storing two charge ranges and, therefore, can be programmed/erased between two states, such as an erased state and a stylized state. Store components. Such flash memory devices are sometimes referred to as binary flash memory devices. Multi-state flash memory devices are constructed by identifying a plurality of different allowed/validized threshold voltage ranges separated by respective forbidden ranges. Each of the different threshold voltage ranges corresponds to a predetermined value of a set of data bits encoded in the memory device. In current non-volatile memory devices (e. g., NAND flash memory devices), temperature changes can cause various problems with reading and writing data. The memory device is subject to varying temperatures based on its environment. For example, some existing s-resonance devices are considered to be at -40. Used between +85 0C. Devices in industrial, military, and even consumer applications can experience significant temperature changes. Temperature affects many transistor parameters, the most important of which is the Ss limit voltage. In particular, temperature changes can result in read errors and widen the threshold voltage distribution of different states of the non-volatile storage element. Currently, the temperature change is compensated for by changing the read/verify voltage applied to the selected word line in a manner that selects the temperature change of the threshold voltage of the storage element. This method can solve at most the problem of the average offset of the threshold voltage distribution of the storage element. For the sake of simplicity, it is assumed that the threshold voltages are all in the same data state. However, there is a need for an improved technique to further reduce (S:) 121185.doc 1J36081 J by the extension of the threshold voltage distribution for each state due to a change in the degree of coffee. SUMMARY OF THE INVENTION The present invention addresses the above and other problems by providing a system and method for operating a non-volatile memory in which a temperature compensated voltage is applied to a non-selective non-volatile storage element and/or selection Gate. The present invention achieves various benefits' including improved read and write performance. In an embodiment, the non-volatile storage is operated by:
將第一電壓(例如,一讀取或驗證電壓)施加至-選擇字 線來確&與該選擇字線相關聯之第—非揮發性儲存元件 之权式化狀態。該第-非揮發性儲存元件設置於一組非揮 發性儲存70件中。例如,該第__電壓可係—讀取電壓,其 用於讀取第-非揮發性儲存元件在其程式化後之程式化狀 .。或者該第冑塵可係_驗證電壓,其用於驗證該第 -非揮發性儲存元件是否達到了所期望之程式化狀態。例 如’此種驗證電壓可施加於一系列此類脈動之個別程式化A first voltage (e.g., a read or verify voltage) is applied to the -select word line to determine & the weighted state of the first non-volatile storage element associated with the selected word line. The first non-volatile storage element is disposed in a set of 70 pieces of non-volatile storage. For example, the __ voltage can be a read voltage that is used to read the stylized state of the first non-volatile storage element after its stylization. Alternatively, the dust may be a verification voltage that is used to verify that the first non-volatile storage element has reached the desired stylized state. For example, 'this verification voltage can be applied to a series of such stylized individual stylizations
脈動之間。而且’在施加該第一電壓之同肖,將一經溫度 補償之電Μ施加至-個或多個與該非揮發性儲存元件組相 關聯之非選擇字線。 於-種方法中,將相同之經溫度補償電壓施加至該等与 選擇字線中之每一者。於另—種方 裡々次〒將不同之經溫Ζ 補償電壓施加至不同之非選擇字線。於再-種方法中," 個或兩個直接鄰近該選擇字線之非選擇字線接收—未^ 度補償或經溫度補償-減小之量(相對於施加至其他㈣ 擇字線之經溫度補償電壓而言)之電壓。亦可將'_ 121185.doc 1336081 補償之電壓施加至源極及/或汲極選,擇閘極,例如當所選 擇之非揮發性儲存元件處於一NAND串中時。亦可對該第 一電壓進行溫度補償。 於另—實施例中,藉由下述方式來操作非揮發性儲存 器:將一第一電壓施加至一選擇字線以確定一與該選擇字 線相關聯之第一非揮發性儲存元件之程式化狀態。該第一 . 非揮發性儲存元件設置於一組非揮發性儲存元件中。另 外,根據該選擇字線在複數個與該組非揮發性儲存元件相 關聯之字線中的一相對位置來對該第一電壓進行溫度補 償》舉例而言,當該選擇字線相對於包括複數個字線之塊 之源極更接近於汲極時,可使用一更大之溫度補償量值。 ·· 於另一實施例中,藉由下述方式來操作非揮發性儲存 / 器·將一第一電壓施加至一選擇字線以確定一與該選擇字 線相關聯之第一非揮發性儲存元件之程式化狀態,其中該 第一非揮發性儲存元件設置於一組非揮發性儲存元件中。 • 在施加該第一電壓之同時,將一經溫度補償之電壓施加至 至少一與該組非揮發性儲存元件相關聯之第一非選擇字 線。另外,在施加該第一電壓之同時,將一未經溫度補償 或經溫度補償一減小之量(相對於施加至該第一非選擇字 線之經溫度補償電壓)之電壓施加至至少一與該組非揮發 性儲存元件相關聯之第二非選擇字線。於一種方法中該 至少一第一非選擇字線不直接鄰近該選擇字線,而該至少 一第二非選擇字線直接鄰近該選擇字線。 於再-實施例中,藉由下述方式來操作非揮發性儲存 121185.doc •9- OR . ° ’將一第一電壓施加至一選擇字線以確定一與該選擇字 線相關聯之第一非揮發性儲存元件之程式化狀態,其中該 第—非揮發性儲存元件設置於一組非揮發性儲存元件中。 田該第一非揮發性儲存元件不直接鄰近該選擇閘極時,在 施加該第一電壓之同時,將一第一經溫度補償電壓施加至 與第一非揮發性儲存元件相關聯之選擇閘極。當該第一 揮發〖生儲存元件直接鄰近該選擇閘極時,在施加該第一 壓之同時,將一未經溫度補償或經溫度補償一減小之量 (相對於該第一經溫度補償電壓)之電壓施加至該選擇閘 極。該選擇閘極及該第一非揮發性儲存元件可設置於一 NANE> _中,其中該選擇閘極處於該NAND串之一源極或 ί及極側。 提供用於操作非揮發性儲存器及非揮發性儲存系統之對 應方法。料非揮發性料彡統包括—組非㈣性儲存元 -及個或多個如本文中所述用於操作該非揮發性儲存 元件組之電路。 【實施方式】 本發明提供一種用於以-改良讀取及寫入效能之方式摔 作非揮發性儲存器之系統與 方式操 經π声〃、万法。經改良之效能係藉由將 、.-i,血度補償之電壓施加至 選 擇非揮發性儲存元件及/或 選擇閘極而達成。具體益處 式化狀態之間的減小之冗Γ 咸…取干擾、程 ^ ^ Λ ^ 格、因較大程式化步長之使用而 而=:及/或藉由將狀態壓縮得更靠近在-起 而減小之操作窗口。 121185.docBetween the pulsations. Moreover, a temperature compensated power is applied to one or more non-selected word lines associated with the non-volatile storage element group upon application of the first voltage. In one method, the same temperature compensated voltage is applied to each of the selected word lines. In the other way, different temperature compensation voltages are applied to different non-selected word lines. In the re-method, " or two non-selected word lines directly adjacent to the selected word line receive - the amount of compensation or temperature compensation - the amount of reduction (relative to the application to other (four) word lines) The voltage of the temperature compensated voltage). The compensated voltage of '_121185.doc 1336081 can also be applied to the source and/or drain to select the gate, for example when the selected non-volatile storage element is in a NAND string. The first voltage can also be temperature compensated. In another embodiment, the non-volatile memory is operated by applying a first voltage to a selected word line to determine a first non-volatile storage element associated with the selected word line. Stylized state. The first non-volatile storage element is disposed in a set of non-volatile storage elements. Additionally, the first voltage is temperature compensated according to a relative position of the selected word line in a plurality of word lines associated with the set of non-volatile storage elements, eg, when the selected word line is included When the source of a plurality of word lines is closer to the drain, a larger temperature compensation value can be used. In another embodiment, the non-volatile memory is operated by applying a first voltage to a selected word line to determine a first non-volatile associated with the selected word line. A stylized state of the storage element, wherein the first non-volatile storage element is disposed in a set of non-volatile storage elements. • Applying a temperature compensated voltage to at least one first unselected word line associated with the set of non-volatile storage elements while applying the first voltage. In addition, while applying the first voltage, applying a voltage that is not temperature compensated or temperature compensated by a decrease (relative to a temperature compensated voltage applied to the first unselected word line) is applied to at least one A second unselected word line associated with the set of non-volatile storage elements. In one method, the at least one first unselected word line is not directly adjacent to the selected word line, and the at least one second unselected word line is directly adjacent to the selected word line. In a further embodiment, the non-volatile storage 121185.doc •9-OR .° is applied by a method of applying a first voltage to a selected word line to determine a associated word line. A stylized state of the first non-volatile storage element, wherein the first non-volatile storage element is disposed in a set of non-volatile storage elements. When the first non-volatile storage element is not directly adjacent to the selection gate, applying a first temperature-compensated voltage to the selection gate associated with the first non-volatile storage element while applying the first voltage pole. When the first volatile storage element is directly adjacent to the selection gate, an amount that is not temperature compensated or temperature compensated is reduced (with respect to the first temperature compensation) while the first pressure is applied The voltage of the voltage) is applied to the selection gate. The select gate and the first non-volatile storage element can be disposed in a NANE>, wherein the select gate is at one of the source or the NMOS side of the NAND string. Provides a method for operating non-volatile storage and non-volatile storage systems. The non-volatile charge system includes a set of non-(four) storage elements - and one or more circuits for operating the non-volatile storage element set as described herein. [Embodiment] The present invention provides a system and method for operating a non-volatile memory in a manner that improves read and write performance, and operates π sonar and 10,000 methods. The improved performance is achieved by applying a voltage of .-i, hematocrit compensation to the selection of non-volatile storage elements and/or selection of gates. The tedious reduction between the specific benefits of the state of the state is salty...the interference, the ^^ Λ ^ lattice, due to the use of the larger stylized step size =: and / or by compressing the state closer - The operating window that is reduced. 121185.doc
-10- < S 1336081 適用於構建本發明之記憶體系統之一實例使用NAND 快閃έ己憶體結構,纟包括將多個電晶體串聯佈置於兩個選 擇閘極之間。該等串聯電晶體及該等選擇閘極稱作一 NAND串。圖1係一顯示一個NAND串之俯視圖。圖2係該 NAND串之一等效電路。圖丨及2中所繪示之nand串包括 串聯並夹於第一選擇閘極120與第二選擇閘極122之間的四 個電晶體100、102、1〇4及1〇6。選擇閘極120將NAND串連 接選通至位元線126。選擇閘極122將NAND串連接選通至 源極線128。選擇閘極12〇藉由對控制閘極12〇Cg施加適宜 之電壓來加以控制。選擇閘極122藉由對控制閘極122CG 施加適宜之電壓來加以控制。電晶體1〇〇、1〇2、1〇4及1〇6 中之每一者皆具有一控制閘極及一浮動閘極。電晶體100 具有控制閘極100CG及浮動閘極i〇〇FG。電晶體1〇2包括控 制閘極102CG及浮動閘極102FG。電晶體1〇4包括控制閘極 104CG及浮動閘極i〇4FG。電晶體1〇6包括控制閘極i〇6CG 及浮動閘極106FG。控制閘極i〇〇CG連接至(或係)字線 WL3 ’控制閘極i〇2CG連接至字線WL2,控制閘極104CG 連接至字線WL1,且控制閘極i〇6CG連接至字線WL0。在 一實施例中,電晶體1〇〇、1〇2、1〇4及1〇6皆為儲存元件, 亦稱作記憶體單元。在其他實施例中,儲存元件可包括多 個電晶體’或者可不同於圖1及2中所繪示。選擇閘極120 連接至選擇線SGD。選擇閘極122連接至選擇線SGS。 圖3提供上述NAND串之剖視圖。如圖3中所繪示, N AND串中之電晶體形成於p井區140中。每一電晶體皆包 121185.doc 1336081 括一由控制閘極(100CG、102CG、104CG及106CG)及一浮 動閘極(100FG、102FG、104FG及106FG)組成之堆疊閘極 結構。該等控制閘極及浮動閘極通常藉由沈積多晶矽層而 形成。該等浮動閘極形成於一氧化物膜或其他介電膜頂部 上之P-井表面上。控制閘極位於浮動閘極上方,其中一中 間多晶矽介電層將控制閘極與浮動閘極相分離。儲存元件 - (100、102、1 及106)之控制閘極形成字線。N+摻雜擴散 籲· 區13〇、132、134、130及138共享於鄰近儲存元件之間, 藉此使該等儲存元件相互串聯連接以形成一 NAND串。該 等N+摻雜區形成儲存元件中之每一者之源極及汲極。舉例 而吕’ N+摻雜區13〇用作電晶體122之汲極及電晶體1〇6之 • 源極’ N+摻雜區132用作電晶體1〇6之汲極及電晶體104之 / 源極’ N+摻雜區134用作電晶體1〇4之汲極及電晶體102之 源極’ N+摻雜區136用作電晶體1〇2之汲極及電晶體ι〇〇之 源極,而N+摻雜區138用作電晶體1〇〇之汲極及電晶體丄之❽ # 之源極。N+摻雜區126連接至NAND串之位元線,同時 摻雜區128連接至多個NAND串之一共用源極線。 '主’各,雖然圖1 _3顯示NAND串中之四個儲存元件,但使 用四個雷曰胁汾 曰9體僅作為一實例。用於本文中所述技術之— NAND 串可 | 士 1 具有少於四個儲存元件或多於四個儲存元件。 舉例而言,甘 系些NAND串將包括8個、16個、32個或64個健 存元件等。士〜 ^ 不文之論述並非侷限於一 NAND串中任何特〜 數量之儲存元件。 疋 每儲存疋件均可儲存以類比形式或數位形式表示之資 121185.doc 12 料。當儲存一個位元之數位資料時,·將儲存元件的可能之 臨限電壓範圍劃分成兩個範圍’肖兩個範圍被指派給邏輯 t料"1"及"0”。於一 NAND型快閃記憶體之實例中在擦 除儲存元件後該臨限電壓為負並被定義為邏輯"而於 程式化操作後臨限電壓為正並定義為邏輯"〇"。當臨限 電壓為負並藉由向控制閘極施加〇伏來嘗試一讀取時,儲 存元件將導通α指示正儲存邏輯1。而當臨限電壓為正且 藉由向控制閘極施加〇伏來嘗試一讀取操作時,儲存元件 將不會導通,此指示儲存邏輯〇。 一儲存元件亦可儲存多種狀態,由此儲存多個數位資料 位元。在儲存多個資料狀態之情形下,臨限電壓窗口被劃 分成多種狀態。例如,若使用四種狀態,則將有四個臨限 電壓範圍指派給資料值"11”、"10"、"01"及,,〇〇"。在— NAND型記憶體的一個實例中’在擦除操作後臨限電壓為 負並焱定義為"11”。對狀態"10"、”01"及"〇〇”使用正臨限 電壓。於某些實施方案中,係使用一格雷碼指派方案將資 料值(例如邏輯狀態)指派給臨限值範圍,以使若一浮動閘 極之臨限電壓錯誤地偏移至其相鄰物理狀態,則僅會影響 一個位元。程式化至儲存元件中之資料與儲存元件之臨限 電壓範圍之間的具體關係相依於儲存元件所採用之資料編 碼方案。舉例而言,美國專利第6,222,762號及於2003年6 月 13 曰申請且標稱為"Traeking Cells For A Memory System"之美國專利申請案第1〇/461,244號闡述各種用於多 狀態快閃儲存元件之資料編碼方案,二者皆以全文引用的 121185.doc 13 方式併入本文中β 、下美國專利/專利n案中提供nand型快閃記憶體 、其操作之相關㈣,所有此等美國專利/專财請案皆 、文引用的方式併入本文中:美國專利第5 57〇31 5號; 、、國專利第5,774,397號;$國專利第6,〇46,935號;美國專 利第5,38M22號;美國專利第M56,528號及美國專第 6,522,號。除議〇快閃記憶體外,本發明亦可使用其 他類型之非揮發性記憶體。 適用於快閃EEPR〇M系統的另一種類型之儲存元件利用 非導電性介電材料取代導電性浮動閘極以便以非易失性 方式儲存電荷。此種儲存元件闡述於一篇由Chan等人所著 的文早 A True Single-Transistor Oxide-Nitride-Oxide eepr〇m Device)"(IEEE Ε1_〇η Device L_rs,第 edl_8 卷,No.3,1987年3月,第93-95頁)中。一由氧化矽、氮化 夕及氧化石夕('0N0")形成之三層介電質夾於一導電性控制 閘極與儲存元件溝道上方的一半導電性基板之表面之間。 該儲存元件藉由將電子自儲存元件溝道注入至氮化物内而 程式化,其中電子陷獲並儲存於一有限區中。然後,所儲 存之電荷以一可偵測方式改變儲存元件溝道之一部分之臨 限電壓。該儲存元件係藉由將熱電洞注入氮化物内來進行 擦除。亦參見由Nozaki等人所著之於"a l_Mb EEPROM with MONOS Memory Cell for Semiconductor Disk-10- < S 1336081 An example of a memory system suitable for use in constructing the present invention uses a NAND flash memory structure comprising a plurality of transistors arranged in series between two select gates. The series transistors and the select gates are referred to as a NAND string. Figure 1 is a top plan view showing a NAND string. Figure 2 is an equivalent circuit of the NAND string. The nand string illustrated in Figures 2 and 2 includes four transistors 100, 102, 1〇4, and 1〇6 connected in series and sandwiched between a first selection gate 120 and a second selection gate 122. Select gate 120 strobes the NAND string connections to bit line 126. Select gate 122 strobes the NAND string connection to source line 128. The selection gate 12 is controlled by applying a suitable voltage to the control gate 12 〇 Cg. The selection gate 122 is controlled by applying a suitable voltage to the control gate 122CG. Each of the transistors 1〇〇, 1〇2, 1〇4, and 1〇6 has a control gate and a floating gate. The transistor 100 has a control gate 100CG and a floating gate i〇〇FG. The transistor 1〇2 includes a control gate 102CG and a floating gate 102FG. The transistor 1〇4 includes a control gate 104CG and a floating gate i〇4FG. The transistor 1〇6 includes a control gate i〇6CG and a floating gate 106FG. The control gate i〇〇CG is connected to (or is) the word line WL3'. The control gate i〇2CG is connected to the word line WL2, the control gate 104CG is connected to the word line WL1, and the control gate i〇6CG is connected to the word line. WL0. In one embodiment, the transistors 1〇〇, 1〇2, 1〇4, and 1〇6 are all storage elements, also referred to as memory cells. In other embodiments, the storage element may comprise a plurality of transistors ' or may be different than that depicted in Figures 1 and 2. The selection gate 120 is connected to the selection line SGD. The selection gate 122 is connected to the selection line SGS. Figure 3 provides a cross-sectional view of the above NAND string. As illustrated in FIG. 3, the transistors in the N AND string are formed in the p-well region 140. Each transistor is packaged 121185.doc 1336081 includes a stacked gate structure consisting of control gates (100CG, 102CG, 104CG, and 106CG) and a floating gate (100FG, 102FG, 104FG, and 106FG). The control gates and floating gates are typically formed by depositing a polysilicon layer. The floating gates are formed on the surface of the P-well on top of an oxide film or other dielectric film. The control gate is located above the floating gate, and an intermediate polysilicon dielectric layer separates the control gate from the floating gate. Storage Element - The control gates of (100, 102, 1, and 106) form a word line. The N+ doped diffusion regions 13, 132, 134, 130, and 138 are shared between adjacent storage elements, whereby the storage elements are connected in series to each other to form a NAND string. The N+ doped regions form the source and drain of each of the storage elements. For example, the L'N+ doped region 13 is used as the drain of the transistor 122 and the transistor 1〇6. The source 'N+ doped region 132 is used as the drain of the transistor 1〇6 and the transistor 104/ The source 'N+ doping region 134 is used as the drain of the transistor 1〇4 and the source of the transistor 102. The N+ doping region 136 is used as the drain of the transistor 1〇2 and the source of the transistor ι〇〇. And the N+ doping region 138 is used as the source of the drain of the transistor 1 and the gate of the transistor. N+ doped region 126 is coupled to the bit line of the NAND string while doped region 128 is coupled to one of the plurality of NAND strings to share the source line. 'Main', although Figure 1_3 shows four storage elements in the NAND string, the use of four Thunderbolt 曰9 bodies is only an example. For the techniques described herein - NAND strings can have less than four storage elements or more than four storage elements. For example, some NAND strings will include 8, 16, 32, or 64 memory elements.士~ ^ The discussion of the text is not limited to any special ~ quantity of storage elements in a NAND string.疋 Each storage element can be stored in analogy or in digital form. When storing a bit of digital data, the possible threshold voltage range of the storage component is divided into two ranges 'Shaw two ranges are assigned to logical materials "1" and "0. In an example of a flash memory, the threshold voltage is negative after the erased storage element and is defined as a logical " and after the stylization operation, the threshold voltage is positive and defined as a logical "〇" When the voltage limit is negative and a read is attempted by applying a stagnation to the control gate, the storage element will turn on a to indicate that the logic 1 is being stored. When the threshold voltage is positive and the stagnation is applied to the control gate When a read operation is attempted, the storage element will not be turned on, and the indication stores the logical volume. A storage element can also store multiple states, thereby storing a plurality of digital data bits. In the case of storing multiple data states, The voltage-limited window is divided into multiple states. For example, if four states are used, four threshold voltage ranges will be assigned to the data values "11", "10", "01" and, 〇〇" ; In an example of a NAND-type memory, 'the threshold voltage is negative after the erase operation and is defined as "11." Use positive thresholds for states "10", 01", and "〇〇 Voltage. In some embodiments, a Gray code assignment scheme is used to assign a data value (eg, a logic state) to a threshold range such that if a threshold voltage of a floating gate is erroneously offset to its neighbor The physical state affects only one bit. The specific relationship between the data stored in the storage element and the threshold voltage range of the storage element depends on the data encoding scheme used by the storage element. For example, US Patent No. U.S. Patent Application Serial No. 1/461,244, filed on Jun. The schemes are both incorporated herein by reference in the form of 121185.doc 13 in full text, and the nand-type flash memory is provided in the next US patent/patent n case, and its operation is related (4), all such US patents/ The details of the patent application are hereby incorporated by reference: U.S. Patent No. 5,57,31, 5, US Patent No. 5,774,397; US Patent No. 6, 〇46,935; U.S. Patent No. 5,38M22 U.S. Patent No. M56,528 and U.S. Patent No. 6,522. Other types of non-volatile memory can be used in the present invention in addition to flash memory. Another type of flash EEPR〇M system The storage element utilizes a non-conductive dielectric material in place of the conductive floating gate to store the charge in a non-volatile manner. Such a storage element is described in an article by True et al. Nitride-Oxide eepr〇m Device)" (IEEE Ε1_〇η Device L_rs, edl_8, No. 3, March 1987, pp. 93-95). One by yttrium oxide, yttrium oxide and oxidation The three layers of dielectric formed by Shi Xi ('0N0") are sandwiched between a conductive control gate and a surface of a semi-conductive substrate above the channel of the storage element. The storage element is channeled by an electron self-storing element Stylized by injection into the nitride, where the electrons are trapped Stored in a finite area. The stored charge then changes the threshold voltage of a portion of the channel of the storage element in a detectable manner. The storage element is erased by injecting a thermal cavity into the nitride. See by Nozaki et al. "a l_Mb EEPROM with MONOS Memory Cell for Semiconductor Disk
Application" (IEEE Journal of Solid-State Circuits)第 26 卷,No_4,1991年4月,第497-501頁),其闡述了一種具有 121185.doc 1336081 分裂閘極構造至類似儲存元件,其中一經穆雜之多晶石夕閉 極延伸於儲存元件溝道之一部分上方以形成-分離選擇電 晶體。以上兩篇文章皆以全文引用的方式併入本文中。在Application" (IEEE Journal of Solid-State Circuits, Vol. 26, No. 4, April 1991, pp. 497-501), which describes a split gate structure having 121185.doc 1336081 to a similar storage element, one of which The heteropolylithic elliptical pole extends over a portion of the channel of the storage element to form a separate-selective transistor. Both of the above articles are incorporated herein by reference in their entirety. in
William D. Brown及 jGe E Brewer所編輯之"N_〇latile Semiconductor Memory Technology- (IEEE Press, 1998)1.2 邰刀中所提及之程式化技術亦於彼部分中描述為適用於介 ' 電電荷陷獲裝置,該文章以引用的方式併人本文中。本發 φ. 8月亦可使用本段所描述之儲存元件。因此,本文所描述之 技術亦適用於不同儲存元件之介電區之間的耦合。 用於在每一儲存元件中儲存兩個位元之另一種方法已由 Eitan等人闡述於"NR0M: a N〇vel L〇caHzed Trapping,2_ • Bit Nonvolatile Memory Cell)» (IEEE Electron Device ·- Letters),第 21 卷,第 11 號,2〇〇〇 年 j i 月,第 543·545 頁) 中。一 ΟΝΟ介電層延伸跨越源極擴散區與汲極擴散區之間 的溝道。一個資料位元之電荷局部化於毗鄰汲極之介電層 φ 中,而另一資料位元之電荷則局部化於毗鄰源極之介電層 中。多狀態資料儲存係藉由分別讀取介電質内在空間上分 離之電荷儲存區之二進製狀態來實現。本發明亦可使用本 段所描述之储存元件。 圖4圖解說明一例如圖丨_3中所示彼等之NAND儲存元件 陣列之實例。沿每一行,一位元線206耦合至NAND串150 之没極選擇閘極之汲極端子126。沿NAND串之每一列,一 源極線204可連接該等NAND串之源極選擇閘極的所有源極 端子128。在美國專利第5,570,315號、第5,774,397號及第 121185.doc •15- 1336081 M46,935號,可找到一 Na 統一部分之操作之實例。.苹歹J及其作為記憶體系 該儲存元件陣列被劃分成大㈣存元㈣ 閃贿0Μ系統而言’塊即為擦除單位》亦即丄塊: :::干:口除的最小數量之健存元件塊通常被劃 刀為右干個頁面。頁面係程式化單位。於一 :頁面劃分成多個段,且該等段可含有作為一基本程 次寫人之最少數量之儲存元件。在-列健存元 心儲存一個或多個資料頁面…頁面可儲存-個或 多^扇區。一扇區包括使用者資料及開銷資料。開銷資料 通常包括依據該扇區之使用者資料計算出的一糾錯碼 (聊)。控制器(下文所述)之—部分在資料正程式化至該 陣列中時計算ECC,且亦在正自該陣列讀取資料時檢查 ECC。或者’將Ecc及/或其他開銷資料儲存於與其所從屬 之使用者資料不同之頁面甚至不同之塊中。 -使用者資料扇區通常為512個位元組,其相當於磁碟 驅動器内-扇區之大小。開銷資料通常為_附加之ι㈣ 個位元組。大量頁面形成一個塊,例如自8個頁面(舉例而 言)至多達32個、64個、128個或更多個頁面不等。於某些 實施例中,一列NAND串包括一塊。 於一實施例中,藉由在源極線及位元線浮動之同時將ρ· 井升高至—擦除電壓(例如20伏)達一充足之時間週期並將 一選擇塊之字線接地來擦除記憶體儲存元件。由於電容性 耦口非選擇字線、位元線、選擇線及c源極亦被升高至The stylized technique mentioned in Williams Brown and JGe E Brewer, edited by N.〇latile Semiconductor Memory Technology- (IEEE Press, 1998) 1.2, is also described in the section as applicable to Charge trapping device, the article is incorporated by reference herein. This symbol φ. August can also use the storage components described in this paragraph. Therefore, the techniques described herein are also applicable to the coupling between dielectric regions of different storage elements. Another method for storing two bits in each storage element has been described by Eitan et al. "NR0M: a N〇vel L〇caHzed Trapping, 2_ • Bit Nonvolatile Memory Cell)» (IEEE Electron Device - Letters), Volume 21, No. 11, 2 ji ji, pp. 543·545). A dielectric layer extends across the channel between the source diffusion region and the drain diffusion region. The charge of one data bit is localized in the dielectric layer φ adjacent to the drain, and the charge of the other data bit is localized in the dielectric layer adjacent to the source. Multi-state data storage is achieved by separately reading the binary states of the charge storage regions that are spatially separated within the dielectric. The storage elements described in this paragraph can also be used in the present invention. Figure 4 illustrates an example of an example of their NAND storage element array as shown in Figure _3. Along each row, a bit line 206 is coupled to the NMOS terminal 126 of the NAND string 150. Along each column of the NAND string, a source line 204 can connect all of the source terminals 128 of the source select gates of the NAND strings. An example of the operation of a uniform portion of Na can be found in U.S. Patent Nos. 5,570,315, 5,774,397, and 121,185, doc, 15-1336081, M46,935.歹 歹 J and its memory system is divided into large (four) deposits (four) flash bribe 0 Μ system for the 'block is the erase unit' is also the block: ::: dry: the minimum number of vents The health component block is usually slashed to the right page. The page is a stylized unit. The first page is divided into a plurality of segments, and the segments may contain a minimum number of storage elements as a basic process. Store one or more data pages in the - column health card... page to store - one or more ^ sectors. One sector includes user data and overhead data. The overhead data usually includes an error correction code (talking) calculated from the user data of the sector. The controller (described below) calculates the ECC when the data is being programmed into the array and also checks the ECC while reading data from the array. Or 'store Ecc and/or other overhead data on a different page than the user data to which it belongs. - The user data sector is typically 512 bytes, which is equivalent to the size of the sector-sector in the disk drive. The overhead data is usually _additional ι (four) bytes. A large number of pages form a block, for example from 8 pages (for example) to as many as 32, 64, 128 or more pages. In some embodiments, a column of NAND strings includes one block. In one embodiment, the ρ·well is raised to an erase voltage (eg, 20 volts) for a sufficient period of time while the source line and the bit line are floating, and the word line of a selected block is grounded. To erase the memory storage element. Since the capacitive coupling non-selected word line, bit line, select line and c source are also raised to
I21l85.doc -16- S 1336081 擦除電壓之-很小部分。由此將—強.電場施加至選擇儲存 元件之隨道氧化㈣,且在通常藉由FQwier_N。秦^随 道化機制將浮動閘極之電子發射至基板側時,選擇儲存元 件之資料被擦除。當電子自浮動閘極傳送至p井區時,一 選擇儲存元件之臨限電祕低q對整個記㈣陣列、單 獨的塢、或另一單元之儲存元件實施擦除。I21l85.doc -16- S 1336081 Erasing voltage - a small part. Thus, a strong. electric field is applied to the channel oxidation of the selected storage element (4), and is typically by FQwier_N. When the Qin^ channelization mechanism transmits the electrons of the floating gate to the substrate side, the data of the selected storage element is erased. When the electrons are transferred from the floating gate to the p-well region, a storage element is selected to erase the entire (four) array, the individual dock, or another unit of storage elements.
圖5圖解說明一根據本發明之一實施例具有用於並行讀 取及程式化儲存元件之一頁面之讀取/寫入電路之記憶體 裝置296。記憶體裝置296可包括一個或多個記憶體晶粒 298。記憶體晶粒298包括一二維儲存元件陣列3〇〇、控制 電路310、及讀取/寫入電路365。於某些實施例中,該儲 存元件陣列可為三維。記憶體陣列3〇〇可由字線藉由列解 碼器330及由位元線藉由一行解碼器36〇來定址。讀取/寫 入電路365包括多個感測塊4〇〇,且允許並行讀取或程式化 儲存兀件之一頁面。通常,一控制器35〇以一個或多個記 憶體晶粒298形式包括於同一記憶體裝置296(例如一可抽 換式儲存卡)中。命令及資料藉由線32〇在主機與控制器 350之間且藉由線318在控制器與一個或多個記憶體晶粒 298之間傳送。 控制電路310與讀取/寫入電路365配合,以對記憶體陣 列300實施記憶體操作。控制電路310包括一狀態機312、 一晶片上位址解碼器314、一溫度補償控制315及一功率控 制模組3 1 6。下文將特別結合圖丨4來進一步闡述溫度補償 控制315。狀態機312提供對記憶體操作晶片級控制。晶片 121l85.doc •17· 1336081 上位址解碼器3 14在主機或記憶體控制器所用位址與解碼 器330及360所用硬體位址之間提供一位址介面。功率控制 模組3 16控制在記憶體操作期間供給字線及位元線之功率 及電壓。 在某些實施方案中,可組合圖5之某些組件。於不同設 計中,可將除儲存元件陣列3〇〇以外的圖5之一個或多個组 ' 件(單獨地或組合地)視為一管理電路。舉例而言,一個或 _ 多個管理電路可包括控制電路310、狀態機312、解碼器 314/360、功率控制316、感測塊4〇〇、讀取/寫入電路刊卜 控制1§350專中的任一者或其一組合。 圖ό圖解說明圖5中所示記憶體裝置296之另一佈置。各 • 種周邊電路對記憶體陣列3〇〇之存取係以對稱形式在該陣 . 列之對置側上實施,由此將每一側上之存取線及電路之密 度減半。因此’列解碼器分裂為列解碼器33〇a及33〇Β, 行解碼器分裂為行解碼器360Α及360Β。類似地,讀取/寫 • 入電路分裂為自陣列3〇〇底部連接至位元線之讀取/寫入電 路365Α及自陣列300頂部連接至位元線之讀取/寫入電路 365Β。以此方式,該等讀取/寫入模組之密度實質上減 半。圖6之裝置亦可包括一如上文關於圖5之裝置所述之控 制器。 圖7係一個別感測塊4 0 0之方塊圖’該感測塊被分區成一 稱作感測模組380之核心部分及一共用部分39〇。於一實施 例中’每一位元線將具有一單獨感測模組38〇及—組多個 感測模組380將具有一個共用部分390。於一實例中,一感Figure 5 illustrates a memory device 296 having read/write circuits for reading and programming one of the pages of a storage element in parallel, in accordance with one embodiment of the present invention. Memory device 296 can include one or more memory dies 298. The memory die 298 includes a two-dimensional array of storage elements 3, a control circuit 310, and a read/write circuit 365. In some embodiments, the array of storage elements can be three dimensional. The memory array 3 can be addressed by the word line by the column decoder 330 and by the bit line by a row of decoders 36A. The read/write circuit 365 includes a plurality of sensing blocks 4 and allows one of the pages of the memory to be read or programmed in parallel. Typically, a controller 35 is included in the same memory device 296 (e.g., a removable memory card) in the form of one or more memory die 298. Commands and data are transferred between the host and controller 350 via line 32 and between the controller and one or more memory dies 298 via line 318. Control circuit 310 cooperates with read/write circuit 365 to perform memory operations on memory array 300. The control circuit 310 includes a state machine 312, an on-chip address decoder 314, a temperature compensation control 315, and a power control module 316. Temperature compensation control 315 will be further elaborated below in particular in conjunction with Figure 4. State machine 312 provides wafer level control of memory operations. Wafer 121l85.doc • 17· 1336081 The upper address decoder 3 14 provides an address interface between the address used by the host or memory controller and the hardware address used by decoders 330 and 360. Power control module 3 16 controls the power and voltage supplied to the word lines and bit lines during memory operation. In some embodiments, certain components of Figure 5 can be combined. In a different design, one or more of the groups (individually or in combination) of Figure 5 other than the array of storage elements 3A can be considered a management circuit. For example, one or more management circuits may include control circuit 310, state machine 312, decoder 314/360, power control 316, sensing block 4, read/write circuit, and control 1 § 350 Any one of the specialties or a combination thereof. Figure ό illustrates another arrangement of the memory device 296 shown in Figure 5. The access of each of the peripheral circuits to the memory array 3 is implemented in a symmetrical form on the opposite side of the array, thereby halving the density of the access lines and circuits on each side. Therefore, the column decoder is split into column decoders 33A and 33A, and the row decoder is split into row decoders 360A and 360A. Similarly, the read/write circuit is split into a read/write circuit 365A connected from the bottom of the array to the bit line and a read/write circuit 365A connected from the top of the array 300 to the bit line. In this way, the density of the read/write modules is substantially halved. The apparatus of Figure 6 can also include a controller as described above with respect to the apparatus of Figure 5. Figure 7 is a block diagram of a different sensing block 400. The sensing block is partitioned into a core portion called a sensing module 380 and a common portion 39A. In one embodiment, each bit line will have a single sensing module 38 and a plurality of sensing modules 380 will have a common portion 390. In an instance, a sense
121185.doc • 18 · (S 1336081 測塊將包括一共用部分390及8個感測模組380。一群組中 之每一感測模組皆藉由一資料匯流排3 72與相關聯之共用 部分通信。關於其他細節,可參考20 04年12月29曰申請且 標稱為"Non-Volatile Memory & Method with Shared121185.doc • 18 · (S 1336081 The test block will include a shared portion 390 and 8 sensing modules 380. Each of the sensing modules in a group is associated with a data bus 3 72 Sharing part of the communication. For other details, please refer to the application on December 29, 2004, and the name is "Non-Volatile Memory & Method with Shared
Processing for an Aggregate of Sense Amplifiers"之美國 專利申請案1 1/026,536,該申請案以全文引用的方式併入 本文中。U.S. Patent Application Serial No. 1/026,536, the disclosure of which is incorporated herein by reference.
感測模组380包括感測電路370,該電路確定一所連接位 元線.中之導電電流是高於還是低於一預定臨限位準。感測 模組380亦包括一位元線鎖存器382,該鎖存器用於設定所 連接位7L線上之一電壓狀態。舉例而言,鎖存於位元線鎖 存器382中之一預定狀態將會導致所連接位元線被拉至一 指定程式化禁止之狀態(例如Vdd)。Sensing module 380 includes a sensing circuit 370 that determines whether the conductive current in a connected bit line is above or below a predetermined threshold level. Sensing module 380 also includes a bit line latch 382 for setting a voltage state on the connected bit 7L. For example, latching in a predetermined state in bit line latch 382 will cause the connected bit line to be pulled to a specified stylized inhibit state (e.g., Vdd).
共用部分390包括一處理器392、一組資料鎖存器”斗及 一耦合於資料鎖存器394組與資料匯流排32〇之間的i7〇介 = 396。處理器392實施計算。舉例而言,其功能之一係確 疋儲存於所感測儲存元件中之資料並將經確定之資料儲存 於資料鎖存H組中。資料鎖存器394組用於儲存在讀取操 作期間由處理器392確定之資料位元。其亦用於儲存在程 j化操作期間自資料匯流排32〇輸入之資料位元。輸入之 貧料位元表示欲程式化至記憶體内之寫人資料。1/0介面 396在資料鎖存器394與f料匯流排32()之間提供一介面。 在“或感測期m统之操作處於狀態機312控制 下’該狀態機控制將不同之控制閘極㈣供給已定址之 121185.doc -19· ,:S ) 1336081 儲存元件》當感測模組380步進穿過各種對應於由記憶體 所支援之各種記憶體狀態之預定控制閘極電壓時,其可在 此等電壓之一下跳閘且藉由匯流排372將一輸出自感測模 組38〇提供至處理器M2。此時,處理器392藉由慮及感測 模組之跳閘事件及關於自狀態機藉由由輸入線393所施加 之控制閘極電壓之資訊來確定結果記憶體狀態。然後其將 计算該記憶體狀態之一二進製編碼並將該結 存至資料鎖存器394中。於核心部分之另一實施例中1 兀線鎖存器382具有雙重作用,即可充當一用於鎖存感測 模組則之輸出之鎖存器亦可充當一如上文所述之位元線 鎖存器。 預,某些實施方案將包括多個處理器392。於—實施例 中母處理益392皆將包括一輸出線(其未緣示於圖了中) 以使該等輪出線中之每—者皆經連線"或••在—起。於某些 貫施例中,在連接至經連線之"或”線前反轉該等輸出線。 =造能夠在程式化驗證過程期間作出一程式化過程何時 =之快逮確定’此乃因接收經連線"或,,之狀態機可確定 一:被程式化之位元何時達到所期望之位準。舉例而 皆達到其所期望之位準時,該位元之-邏 =資:經連線之”或"線(或反轉資料…當所有位元 化過程。由於每—處理器皆2狀態機知曉終止程式 狀態機需要對經連線之"㈣二感8測模,因此該 器392添加邏輯以 關^仃L人讀取,或者向處理 '、 聯位元線之結果以使狀態機僅 121185.docThe shared portion 390 includes a processor 392, a set of data latches, and an i7 interface 396 coupled between the data latch 394 and the data bus 32. The processor 392 performs the calculation. One of its functions is to verify the data stored in the sensed storage element and store the determined data in the data latch H group. The data latch 394 group is used to store the processor during the read operation. 392. The data bit is also used to store the data bit input from the data bus 32 during the process. The input poor bit indicates the data to be programmed into the memory. The /0 interface 396 provides an interface between the data latch 394 and the f-bus 32 (). In the "or sensing period, the operation is under the control of the state machine 312", the state machine control will have different control gates. Pole (4) Supply Addressed 121185.doc -19· , :S ) 1336081 Storage Element 》 When the sensing module 380 steps through various predetermined control gate voltages corresponding to various memory states supported by the memory , which can trip under one of these voltages and Stream 372 provides an output self-sensing module 38A to processor M2. At this time, the processor 392 determines the result memory state by taking into account the trip event of the sense module and the information about the control gate voltage applied by the state line 393 from the state machine. It will then calculate one of the binary states of the memory state and store the result in data latch 394. In another embodiment of the core portion, the 1-wire latch 382 has a dual function, that is, a latch for latching the output of the sensing module can also function as a bit as described above. Line latch. It is anticipated that certain embodiments will include multiple processors 392. In the embodiment, the parent treatment benefit 392 will include an output line (which is not shown in the figure) so that each of the rounds is connected by " or •. In some embodiments, the output lines are inverted before connecting to the "wire" of the connected line. = Build a stylization process during the stylization verification process. The state machine that receives the connection " or, can determine: when the stylized bit reaches the desired level. For example, when it reaches the desired level, the bit-logic = Capital: "Connected" or "quote" (or reverse data... when all bitization process. Since each - processor is 2 state machine known to terminate the program state machine needs to be connected to the "four" sense 8 Mice, so the device 392 adds logic to read the L, or to process the result of the ', the bit line to make the state machine only 121185.doc
•20- S 1336081 吊對、’呈連線之••或"線進行一次讀取。類似地,藉由正確選 擇邏輯位準’全局狀.態機可偵測第—位元何時改變其狀態 並相應地改變演算法。 在程式化或驗證期間,欲程式化之資料自資料匯流排 320儲存於資料鎖存器394組中。在狀態機控制下,程式化 操作包含將一系列程式化電壓脈動施加至已定址儲存元件 之控制問極上。在每一程式脈動之後進行讀回(驗證),以 確定該儲存元件是否已程式化成所期望之記憶體狀態。處 理器392監控相對於所期望之記憶體狀態讀回之記憶體狀 態。當兩者一致時’處理器222設定位元線鎖存器214,以 將該位元線拉至_指定程式化禁止之狀態。由此禁止耦合 至該位元線之儲存元件進一步程式化,即使在程式化脈動 出現在其控制閘極上時亦如此。於其他實施例中,該處理 器最初載入位元線鎖存器382且該感測電路在驗證過程期 間將該鎖存器設定至一禁止值。 資料鎖存器堆疊394包含一對應於感測模組之資料鎖存 器堆豐。於一實施例中’每一感測模組3 8 0具有三個資料 鎖存器。於某些實施方案(但並非所需)中,將資料鎖存器 實施為一移位暫存器以便將其中所儲存之並行資料轉換成 資料匯流排320之串行資料,反之亦然。在該較佳實施例 中’可將對應於m個儲存元件之讀取/寫入塊的所有資料鎖 存器鏈接在一起以形成一塊移位寄存器,以便可藉由串行 傳送來輸入或輸出一資料塊。特定而言,採用r個讀取/寫 入模組之排’以使其資料鎖存器組中的每一者依序將資料 121185.doc -21 -• 20-S 1336081 Hanging, 'wired•• or " line for one reading. Similarly, by correctly selecting the logical level 'global state', the state can detect when the first bit changes its state and change the algorithm accordingly. During stylization or verification, the data to be stylized is stored in the data latch 394 from the data bus 320. Under state machine control, the stylization operation involves applying a series of programmed voltage ripples to the control poles of the addressed storage element. Readback (verification) is performed after each program pulsation to determine if the storage element has been programmed into the desired memory state. The processor 392 monitors the memory state read back relative to the desired memory state. When the two match, the processor 222 sets the bit line latch 214 to pull the bit line to the _specified stabilizing state. This prevents the storage elements coupled to the bit line from further stylizing, even when stylized pulsations appear on their control gates. In other embodiments, the processor initially loads bit line latch 382 and the sense circuit sets the latch to a disable value during the verify process. The data latch stack 394 includes a data latch stack corresponding to the sense module. In one embodiment, each sensing module 380 has three data latches. In some embodiments, but not required, the data latch is implemented as a shift register to convert the parallel data stored therein into serial data of the data bus 320 and vice versa. In the preferred embodiment, all of the data latches corresponding to the read/write blocks of the m storage elements can be linked together to form a shift register for input or output by serial transfer. A data block. Specifically, r reads/write blocks are used to have each of the data latch groups sequentially in the data 121185.doc -21 -
:S 1336081 移入或移出資料匯流排,仿佛其係·一用於整個讀取/寫入 塊之移位寄存器之一部分一般。:S 1336081 Moves in or out of the data bus as if it were part of a shift register for the entire read/write block.
關於非揮發性記憶體裝置各種實施例之結構及/或操作 之附加資訊可在以下專利中找到:(1)2004年3月25曰公開 的第2004/0057287號美國專利公開申請案"Non-Volatile Memory And Method With Reduced Source Line Bias Errors ; (2)2004年6月10日公開的第2004/0109357號美國公 開專利申請案"Non-Volatile Memory And Method with Improved Sensing" ; (3)2004 年 12 月 16 日申請的標稱為 "Improved Memory Sensing Circuit And Method For Low Voltage Operation”之第11/015,199號美國專利申請案,發 明者為Raul-Adrian Cernea; (4)2005年4月5日申請的標稱為 "Compensating for Coupling During Read Operations of Non-Volatile Memory"之第11/099,133號美國專利申請案, 發明者為Jian Chen ;及(5)2005年12月28曰申請的標稱為 "Reference Sense Amplifier For Non-Volatile Memory"之第 11/321,953號美國專利申請案,發明者為Siu Lung Chan及 Raul-Adrian Cernea。上文剛剛列出之所有五個專利文獻 皆以全文引用的方式併入本文中》 參見圖8,闡述儲存元件陣列300之一實例性結構。作為 一實例,闡述一分區成1,〇24個塊之NAND快閃EEPROM。 可同時擦除儲存於每一塊中之資料。在一實施例中,該塊 係同時受到擦除之儲存元件之最小單位。於每一塊中,於 此實例中,存在8,512個對應於位元線BL0、 121185.doc -22- 1336081 LMll之行。於一稱作所有位元線(abl)架構之 實施例中,可在讀取及程式化操作期間同時選擇一塊之所 有位元線。可同時程式化沿一共用字線並連接至任一位元 線之儲存元件。 圖8顯示四個串聯連接以形成一勵〇串之儲存元件。雖 然圖中顯示每一 N娜串中包括四個儲存元件,但也可使 .-用多於:少於四個儲存元件(例如,16個、32個、64個或 另數里)該NAND串的一個端子藉由一汲極選擇閘極 (其連接至選擇閘極汲極線SGD)連接至一對應位元線,而 另-個端子藉由-源極選擇閘極(其連接至選擇間極源極 線S G S)連接至c源極。 • 於無作奇偶架構之另一實施例中,如圖9中所示,將位 元線劃分成偶數位元線及奇數位元線。圖9圖解說明一將 一記憶體陣列組織成一奇偶記憶體架構之塊之實例。於一 奇數/偶數位兀線架構中,同時程式化沿一共用字線並連 • 接至奇數位兀線之儲存元件,而在另一時間程式化沿一共 用字線並連接至偶數位元線之儲存元件。可將資料程式化 至不同之塊中並可自不同之塊同時讀取資料。在每一塊 中,在此實例中,存在8,512個劃分成偶數行及奇數行之 行。位元線亦劃分成偶數位元線(BLe)及奇數位元線 (BLo) »於此實例中,顯示四個串聯連接以形成一 nand串 之儲存元件。儘管圖中顯示在每一 NAND _中包括四個儲 存元件,然而,亦可使用多於或少於四個儲存元件。 在項取及程式化操作之一構造期間,同時選擇4,256個 121185.doc •23· 1336081 儲存兀件。所選擇之儲存元件具有相同之字線及相同種類 之位7G線(例如,偶數位元線或奇數位元線)。因此,可同 時明取或程式化532個資料位元組(其形成一邏輯頁面),而 一個記憶體塊可儲存至少8個邏輯頁面(四個字線,每一個 皆具有奇數邏輯頁面與偶數邏輯頁面對於多狀態儲存 70件,當每一儲存元件儲存兩個資料位元,其中該兩個位 兀之每一個皆儲存於一不同頁面中時,一個塊儲存16個邏 輯頁面。亦可使用其他尺寸之塊及頁面。 對於ABL或奇偶架構’儲存元件可藉由將p_井升高至一 擦除電壓(例如,20伏)並將一選擇塊之字線接地來加以擦 除。源極線及位元線浮動。可對整個記憶體陣列、單獨塊 : 或該記憶體裝in分之儲存元件之另一卩元實施擦 : & °電子自儲存元件之浮動閘極傳送至ρ·井區以使儲存元 件之VTH變為負。 於讀取及驗證操作中,選擇閘極(SGD及SGS)連接至一 • 介於2.5伏至4·5伏範圍内之電壓且非選擇字線(例如當WL2 係選擇字線時,其為WL0、购及乳3)升高至一讀取通過 電壓(通常為-介於4 5伏至6伏範圍内之電愿)以使電晶體 運作為傳遞閘極。選擇字線WL2連接至―轉,該電愿之 料係針對每—讀取及驗證操作而規定,以便確定相關儲 存7L件之VTH是高於還是低於此位準。舉例而言,於一針 對兩位準儲存元件之讀取操作中,可將選擇字線接 地’以❹iVTd否高於〇伏。於—針對兩位準儲存元件之 驗證操作中’可將選擇字線WL2連接至(舉例而言)08伏, I21185.docAdditional information regarding the structure and/or operation of various embodiments of the non-volatile memory device can be found in the following patents: (1) U.S. Patent Application Serial No. 2004/0057287, issued March 25, 2004, "Non -Volatile Memory And Method With Reduced Source Line Bias Errors; (2) US Published Patent Application No. 2004/0109357, published on Jun. 10, 2004, "Non-Volatile Memory And Method with Improved Sensing"; (3) 2004 U.S. Patent Application Serial No. 11/015,199, the entire disclosure of which is incorporated herein by reference to the entire entire entire entire entire entire entire entire entire entire entire entire entire entire content The US patent application No. 11/099, 133, filed by the Japanese Patent Application No. 11/099, 133, the inventor is Jian Chen; and (5) the application filed on December 28, 2005 U.S. Patent Application Serial No. 11/321,953, entitled "Reference Sense Amplifier For Non-Volatile Memory", invented by Siu Lung Chan and Raul-Adrian Cernea. All of the five patent documents just listed are incorporated herein by reference in their entirety. NAND flash EEPROM. The data stored in each block can be erased simultaneously. In one embodiment, the block is the smallest unit of the erased storage element at the same time. In each block, there are 8,512 in this example. Corresponding to the bit line BL0, 121185.doc -22- 1336081 LM11. In an embodiment called all bit line (abl) architecture, all bits of a block can be selected simultaneously during read and program operations. A line can simultaneously program a storage element along a common word line and connected to any bit line. Figure 8 shows four storage elements connected in series to form a excitation string. Although the figure shows each N-string Included in the four storage elements, but can also use more than: less than four storage elements (for example, 16, 32, 64 or other) one terminal of the NAND string by a drain Select the gate (which is connected to the selected gate drain line S GD) is connected to a corresponding bit line, and the other terminal is connected to the c source by a source-selective gate connected to the selected inter-source line S G S . • In another embodiment of the no-parity architecture, as shown in Figure 9, the bit lines are divided into even bit lines and odd bit lines. Figure 9 illustrates an example of organizing a memory array into blocks of an even memory structure. In an odd-numbered/even-numbered twisted-line architecture, the memory elements are connected in parallel along a common word line to the odd-numbered lines, and at another time along a common word line and connected to even-numbered bits. Line storage component. The data can be programmed into different blocks and the data can be read simultaneously from different blocks. In each block, in this example, there are 8,512 rows divided into even rows and odd rows. The bit lines are also divided into even bit lines (BLe) and odd bit lines (BLo). In this example, four storage elements are shown connected in series to form a nand string. Although the figure shows that four storage elements are included in each NAND_, more or less than four storage elements can be used. During the construction of one of the item fetching and stylization operations, select 4,256 121185.doc •23· 1336081 storage conditions. The selected storage elements have the same word line and a 7G line of the same type (e.g., an even bit line or an odd bit line). Therefore, 532 data bytes can be explicitly fetched or programmed (which form a logical page), and a memory block can store at least 8 logical pages (four word lines, each with odd logical pages and even numbers) The logical page stores 70 pieces for multi-state. When each storage element stores two data bits, wherein each of the two bits is stored in a different page, one block stores 16 logical pages. Blocks and pages of other sizes. For ABL or parity architecture 'storage elements can be erased by raising the p_ well to an erase voltage (eg, 20 volts) and grounding the word line of a select block. The pole line and the bit line float. The wiper can be applied to the entire memory array, a separate block: or another element of the memory component in which the memory is loaded: & ° The floating gate of the electronic self-storing component is transferred to ρ • Well area to make the VTH of the storage element negative. In the read and verify operation, select the gate (SGD and SGS) to connect to a voltage ranging from 2.5 volts to 4.5 volts and non-selected words Line (eg when WL2 is selected) When it is WL0, purchase and milk 3) rise to a read pass voltage (usually - within the range of 45 volts to 6 volts) to make the transistor operate as a transfer gate. Select word line WL2 is connected to "turn", which is specified for each read and verify operation to determine whether the VTH of the associated 7L piece is above or below this level. For example, one for two bits In the read operation of the quasi-storage element, the selected word line can be grounded 'to ❹iVTd is higher than 〇V. In the verification operation for the two quasi-storage elements, the selected word line WL2 can be connected to (for example) 08 volts, I21185.doc
-24· C S 1336081 狐否已達到至少0.8伏。雜及Ρ·井處於〇伏下。 將=擇位線(假定為偶數位元線⑺㈣)預充電至一(舉例 而5 )〇·7伏之位準。若%高於該字線上之讀取或驗證位 準則與所關;主儲存元件相關聯之位元 準因非導電性儲存元件而維持高位準。另—方面,若該 TH低於4取或驗證位準,則相關位元線之潛在位準 會因導電性儲存元件使位元線放電而降至—例如低於〇 $-24· C S 1336081 The fox has reached at least 0.8 volts. Miscellaneous and Ρ well is in the dormant. The = bit line (assumed to be an even bit line (7) (4)) is precharged to a level of (for example, 5) 〇·7 volts. If % is higher than the read or verify bit on the word line, the criteria associated with the primary storage element are maintained at a high level due to the non-conductive storage element. On the other hand, if the TH is lower than the 4 or verify level, the potential level of the associated bit line will be reduced by the discharge of the bit line by the conductive storage element - for example, less than 〇 $
伏之低位準。因此,儲存元件之狀態係由一連接至位元線 之電壓比較感測放大器來偵測。 根據此項技術中之習知之技術實施上述擦除、讀取及驗 也操作因此,热習此項技術者可改變所解釋之許多細 節。亦可制此項技術Μ知之其他擦除、.讀取及驗證技 術。 圖Η)圖解說明當每一儲存元件儲存兩個資料位元時,該 儲存元件㈣之實例性臨限㈣分佈。提供經擦除儲存元 件之-第-臨限電壓分佈Ε。料示經程式化儲存元件之 三個臨限電壓分佈Α、BACe於一實施例中,卜分佈中之 臨限電壓為負’而A、BAC分佈中之臨限電壓為正。 每一不㈤臨⑯電壓制介對應於該址資料位元之預定 值。程式化至儲存元件中之資料與該儲存元件之臨限電壓 位準之間的具體關係相餘針對儲存元件所採用之 碼方案》舉例而t: ’美國專利第6,222,762號及2〇〇4年^月 16日公開的美國專利公開申請案第2謝/()255_號閣述各 種用於多狀態快閃儲存元件之資料編碼方案, 此兩個申請 121185.doc -25· 1336081 案皆以全文引用的方式併入本文中。於一實施例中,使用 一格雷碼指派方案來為臨限電壓範圍指派資料值,以便若 —浮動閘極之臨限電壓錯誤地偏移至其相鄰物理狀態,則 僅會影響一個位元《—個實例給臨限電壓範圍Ε(狀態£)指 派"11",給臨限電壓範圍Α(狀態Α)指派"1〇",給臨限電壓 範圍B(狀態B)指派”〇〇”,並給臨限電壓範圍c(狀態c)指派 〇1 。然而,在其他實施例中,不使用格雷碼。雖然顯示 四種狀態,但本發明亦可用於其他多態結構,包括彼等包 括多於或少於四種狀態之結構。 提供三個讀取參考電壓Vra、Vrb及Vrc以自儲存元件讀 取資料。藉由測試一既定儲存元件之臨限電壓是高於還是 低於Vra、Vrb及Vrc,該系統可確定該儲存元件處於何種 狀態。 此外,還提供三個驗證參考電壓Vva、Vvb及Vvc。當將 儲存元件程式化至狀態A時,該系統將測試彼等儲存元件 疋具有一大於Vva還是一等於vva之臨限電壓。當將儲存 凡件程式化至狀態B時,該系統將測試該等儲存元件是具 有大於還是等於Vvb之臨限電壓。當將儲存元件程式化至 狀態C時’該系、、统將測試儲存元件是具有大於還是等於 Vvc之臨限電屋。 於-稱作全序列程式化之實施例巾,可將儲存元件自擦 除狀態E直接程式化至程式化狀態a、8或匚中之任—者。 牛幻而α可首先擦除一欲程式化之儲存元件群體,以使 該群體中的所有儲存元件皆處於擦除狀態』、然後,將使 121185.doc -26· 1336081 用一系列諸如由圖13之控制閘極電壓序列所繪示之程式化 脈動將儲存元件直接程式化成狀態A、B或C。當某些儲存 元件正自狀態E程式化至狀態A時,其他儲存元件正自狀 態E程式化至狀態B及/或自狀態E程式化至狀態C。當在 WLn上自狀態E程式化至狀態C時,可最大化耦合至WLn-1 下方毗鄰浮動閘極之寄生耦合量,此乃因與自狀態E程式 -. 化至狀態A或自狀態E程式化至狀態B時之電壓變化相比, WLn下方浮動閘極上之電荷量變化最大。當自狀態e程式 · 化至狀態B時,耦合至毗鄰浮動閘極之耦合量減小但仍很 而。當自狀態E程式化至狀態A時,該輕合量更進一步減 小。因此,隨後讀取WLn-丨之每一狀態所需之校正量將端 ; 視WLn上之毗鄰儲存元件之狀態而異。 ; 圖11圖解說明一程式化多狀態儲存元件之兩遍技術之實 例,該多狀態儲存元件儲存有兩個不同頁面(一下頁面及 一上頁面)之資料。所繪示之四種狀態係:狀態e(ii卜狀 • 態A(1〇)、狀態B(00)、狀態C(〇l)。對於狀態E,兩個頁面 白儲存1 »對於狀態A,下頁面儲存一”〇,,而上頁面儲 存一 "1"。對於狀態B ,兩個頁面皆儲存"〇"。對於狀態C, 下頁面儲存”1”而上頁面儲在"n"。立 1 貝面储存0 。注意,雖然給該等狀態 之每一者指派了料定相;在 〜 将疋位70圖案,但亦可指派不同之位元圖 於一::遍程式化中’根據欲程式化至下邏輯頁面中之 位元來没疋該储存元件之臨限雷壓办准 夺 ^ , 匕限電壓位準。若彼位元係一玀 輯"1",則該臨限電麼會 、 會由於其處於因先前受到擦除而得 I21I85.doc -27- 1336081 到之適宜狀態中而不會發生改變。然而,若欲程式化之位 元為一邏輯’則該儲存元件之臨限位準增加而成為狀 態A ’如箭頭11〇〇所示。此會終止該第一遍程式化。 於一第二遍程式化中’根據正程式化至上邏輯頁面中之 位70來設定該儲存元件之臨限電壓位準。若上邏輯頁面位 元欲儲存一邏輯"1",則不會發生程式化,此乃因該儲存 • 凡件係端視對下頁面位元之程式化而處於狀態E或A(其兩 φ. 者皆攜帶一上頁面位元"1")之一者中。若上邏輯頁面位元 欲成為一邏輯"0",則該臨限電壓偏移。若該第一遍使儲 存元件保持處於擦除狀態Ε中,則於該第二階段中,該儲 存元件被程式化,以使該臨限電壓增加而處於狀態c中, ·· 如箭頭1120所繪示。若作為第一遍程式化之結果該儲存元 ; 件已被程式化成狀態A,則該儲存元件在該第二遍中被進 一步程式化,以使該臨限電壓增加而處於狀態8中,如箭 頭1110所繪示。第二遍之結果係欲將該儲存元件程式化成 • 指定用來儲存上頁面之一邏輯"0"而不改變下頁面之資料 之狀態。於圖10及圖11兩者中,耦合至毗鄰字線上之浮動 閘極之耦合量取決於最終狀態。 於一實施例中,若欲寫入足以填滿一整個頁面之資料, • 料設置—系統來實施完全序列寫人。若無足夠之資料寫 入-整個頁面’則該程式化過程可以所接收之資料來程式 化下頁面。當接收到後續資料時,系統則程式化上頁面。 於再-實施例中,該系統可開始以程式化下頁面之模式進 行寫入且若隨後接收到足以填滿一字線之儲存元件之全部 12I185.doc -28· 1336081 或大部之資料時’則轉換成完全序列程式化模式。此實施 例之更多細節揭示於發明者Sergy A. Gorobets及Yan Li於 2004年12月14日提出申請的標稱為"Pipe lined Programming of Non-Volatile Memories Using Early Data"之第 11/013,125號美國專利申請案中,該申請案以全文引用的 方式併入本文中。Low level of volts. Therefore, the state of the storage element is detected by a voltage comparison sense amplifier connected to the bit line. The above-described erasing, reading, and inspection operations are performed in accordance with the techniques of the prior art, and thus many of the details explained can be changed by those skilled in the art. Other erasure, reading and verification techniques known to the art can be made. Figure Η illustrates an exemplary threshold (four) distribution of the storage element (4) when each storage element stores two data bits. The -th-threshold voltage distribution 经 of the erased storage element is provided. The three threshold voltage distributions of the programmed storage elements, BACe, in one embodiment, the threshold voltage in the distribution is negative and the threshold voltage in the A, BAC distribution is positive. Each of the five (5) Pro 16 voltages corresponds to a predetermined value of the data bit at that location. The specific relationship between the data stylized into the storage element and the threshold voltage level of the storage element is the same as the code scheme used for the storage element. t: 'US Patent Nos. 6,222,762 and 2〇〇4 U.S. Patent Application Publication No. 2/, No. 255, filed on Jan. 16, the disclosure of which is incorporated herein by reference. The manner of full reference is incorporated herein. In one embodiment, a Gray code assignment scheme is used to assign a data value to the threshold voltage range so that if the threshold voltage of the floating gate is erroneously shifted to its neighboring physical state, only one bit is affected. "An instance assigns a threshold voltage range 状态 (state £) "11", assigns a threshold voltage range Α (status Α) "1〇", assigns a threshold voltage range B (state B)" 〇〇”, and assign 〇1 to the threshold voltage range c (state c). However, in other embodiments, the Gray code is not used. Although four states are shown, the invention is also applicable to other polymorphic structures, including those that include more or less than four states. Three read reference voltages Vra, Vrb, and Vrc are provided to read data from the storage element. By testing whether the threshold voltage of a given storage element is above or below Vra, Vrb, and Vrc, the system can determine what state the storage element is in. In addition, three verification reference voltages Vva, Vvb, and Vvc are also provided. When the storage elements are programmed to state A, the system will test whether their storage elements have a threshold voltage greater than Vva or equal to vva. When the storage unit is programmed to state B, the system will test whether the storage elements have a threshold voltage greater than or equal to Vvb. When the storage element is programmed to state C, the system will test the storage element to be a limited power house with greater than or equal to Vvc. The embodiment is referred to as a full sequence stylized embodiment towel, and the storage element can be directly programmed from the erase state E to the stylized state a, 8 or 匚. Niu illusion and α can first erase a group of staging storage elements so that all storage elements in the group are in an erased state, and then, will make 121185.doc -26· 1336081 with a series of graphs The stylized pulsation depicted by the control gate voltage sequence of 13 directly programs the storage element into state A, B or C. When some of the storage elements are being programmed from state E to state A, the other storage elements are programmed from state E to state B and/or from state E to state C. When staging from state E to state C on WLn, the parasitic coupling amount coupled to the adjacent floating gate below WLn-1 can be maximized, and the self-state E is programmed to state A or self-state E. The amount of charge on the floating gate below WLn varies the most as compared to the voltage change when stylized to state B. When the state e is programmed to state B, the amount of coupling coupled to the adjacent floating gate is reduced but still very good. When the state E is programmed to the state A, the light combination is further reduced. Therefore, the amount of correction required to subsequently read each state of WLn-丨 will vary depending on the state of the adjacent storage elements on WLn. Figure 11 illustrates an example of a two-pass technique for a stylized multi-state storage element that stores data for two different pages (the next page and an upper page). The four states shown are: state e (ii) state A (1〇), state B (00), state C (〇l). For state E, two pages are stored white 1 » for state A The next page stores a "〇,, and the previous page stores a "1". For state B, both pages store "〇". For state C, the next page stores "1" and the upper page is stored in ";n". 1 1 Babe storage 0. Note that although each of these states is assigned a phase; in the ~ will be 70 patterns, but can also assign a different bitmap in one:: program In the middle of the process, according to the bit to be programmed into the next logical page, there is no limit to the thunder of the storage component, and the voltage level is limited. If the bit is a series, "1" Then, the power limit will not change because it is in the appropriate state of I21I85.doc -27-1336081 due to previous erasure. However, if the bit to be programmed is a logic ' Then the threshold level of the storage element is increased to become the state A' as indicated by the arrow 11〇〇. This terminates the first pass stylization. In a second pass stylization, 'set the threshold voltage level of the storage element according to bit 70 in the normalized upper logical page. If the upper logical page bit wants to store a logical "1" Stylized, this is due to the fact that the store is in the state E or A (the two φ. both carry a page bit "1") If the upper logical page bit is to be a logical "0", then the threshold voltage offset. If the first pass keeps the storage element in the erased state, then in the second phase, The storage element is stylized such that the threshold voltage is increased to be in state c, as indicated by arrow 1120. If the storage element is programmed as a result of the first pass, the piece has been programmed into state A, then The storage element is further programmed in the second pass to increase the threshold voltage to be in state 8, as depicted by arrow 1110. The result of the second pass is to program the storage element into a designated To store one of the pages on the logic "0" The state of the data of the page is changed. In both of Figures 10 and 11, the amount of coupling of the floating gates coupled to adjacent word lines depends on the final state. In one embodiment, if writing is sufficient to fill an entire Information on the page, • Material settings—the system to implement a full sequence of writers. If there is not enough data to write to the entire page, then the stylization process can program the page with the received data. When receiving subsequent data, The system then stylizes the page. In the re-implementation, the system can begin writing in the stylized page mode and if it subsequently receives all of the storage elements sufficient to fill a word line, 12I185.doc -28· 1336081 or most of the data 'is converted to full sequence stylized mode. Further details of this embodiment are disclosed in the inventor Sergy A. Gorobets and Yan Li, filed on December 14, 2004, "Pipe lined Programming of Non-Volatile Memories Using Early Data" 11/013, 125 In U.S. Patent Application, the entire disclosure of which is incorporated herein by reference.
圖12A-C揭示另一用於程式化非揮發性 對於任一特定儲存元件,其藉由在針對先前頁面寫入毗鄰 儲存元件後相關於一特定頁面寫入至彼特定儲存元件來減 小浮動閘極至浮動閘極之耦合效應。於一實例性實施方案 中,非揮發性儲存元件使用四種資料狀態來針對每一儲存 π件儲存兩個資料位元。舉例而言,假定狀態E係擦除狀 態,而狀態A、Β及C係程式化狀態。狀態Ε儲存資料u ^ 狀態A儲存資料01。狀態B儲存資料1〇。狀態〇儲存資料 00。此係一非格雷編碼之實例,此乃因兩個位元皆在毗鄰 狀態A與B之間變化。亦可使用資料狀態至物理資料狀態 之其他編碼。每一儲存元件儲存兩個資料頁面。出於參考 之目的,將此等資料頁面稱作上頁面及下頁面;然而亦可 賦予其其他標記。對於狀態A,上頁面儲存位元〇而下頁面 儲存位元!。對於狀態B,上頁面儲存位元】而下頁面健存 位元0對於狀態C,兩個頁面皆儲存位元資料〇。 該程式化過程係一兩步驟式過程。於第一步驟中,裎式 化下頁面。若下頁面欲保持處於資料i,則該儲存元: 態保持處於狀態Εβ若該資料欲被程式化至0,則該儲存元 121185.doc12A-C disclose another method for staging non-volatile for any particular storage element that reduces floating by writing to a particular storage element associated with a particular page after writing an adjacent storage element for a previous page. The coupling effect of the gate to the floating gate. In an exemplary embodiment, the non-volatile storage element uses four data states to store two data bits for each storage π piece. For example, assume that state E is the erased state and states A, Β, and C are stylized. Status Ε Save Data u ^ Status A Stores Data 01. State B stores data 1〇. Status 〇 Save data 00. This is an example of a non-Gray code, since both bits are between adjacent states A and B. Other codes for data status to physical data status can also be used. Each storage element stores two data pages. For the purposes of this reference, these data pages are referred to as the upper page and the lower page; however, other markings may be assigned thereto. For state A, the upper page stores the bit and the next page stores the bit! . For state B, the upper page stores the bit] and the next page stores the bit 0. For state C, both pages store the bit data. This stylized process is a two-step process. In the first step, the page is compressed. If the next page is to remain in the data i, the storage element: the state remains in the state Εβ. If the data is to be programmed to 0, the storage element 121185.doc
-29* 1336081 件之臨限電壓升高,以將該儲存元件程式化至狀態B,。因 此,圖12A顯示儲存元件自狀態E至狀態B,之程式化。狀態 B·係一中間狀態B,因此’將驗證點繪示成Vvb,,Vvb,低 於 Vvb。 於一實施例中,在一儲存元件自狀態E程式化至狀態B, 後,該NAND串中的其鄰近儲存元件(WLn+1)則將相關於 其下頁面來程式化。舉例而言,重新參見圖2,在程式化The threshold voltage of -29* 1336081 is increased to program the storage element to state B. Thus, Figure 12A shows the stylization of the storage element from state E to state B. State B is an intermediate state B, so 'the verification point is shown as Vvb, Vvb, lower than Vvb. In one embodiment, after a storage element is programmed from state E to state B, its neighboring storage elements (WLn+1) in the NAND string will be programmed with respect to its lower page. For example, see Figure 2 again, in stylized
儲存元件106之下頁面後,將程式化儲存元件1〇4之下頁 面。在程式化儲存元件1〇4後,若儲存元件ι〇4具有一自狀 態E升高至狀態B,之臨限電壓,則浮動閘極至浮動閘極之 耦合效應將升向儲存元件106之視在臨限電壓。此將具有 使狀態B,之臨限電壓分佈變寬至圖12B之臨限電壓分佈 1250所繪示之臨限電壓分佈之效應。當程式化上頁面時, 該臨限電壓分佈之視在變寬將得以糾正。After storing the page below element 106, the page below the program storage element 1〇4 will be programmed. After the stylized storage element 1〇4, if the storage element ι4 has a threshold voltage from state E to state B, the coupling effect of the floating gate to the floating gate will rise to the storage element 106. Apparent threshold voltage. This will have the effect of widening the threshold voltage distribution of state B to the threshold voltage distribution depicted by the threshold voltage distribution 1250 of Figure 12B. When the page is stylized, the apparent widening of the threshold voltage distribution will be corrected.
圖12(:繪示程式化上頁面之過程。若該儲存元件處於擦 除狀態E且上頁面保持處於丄’則該儲存元件將保持處於狀 ㈣。若該儲存元件處於狀態E,且其上頁面資料欲被程式 化至0 ’則該儲存元件之臨限電壓將升高,以使該儲存天 件處於狀態A。右該儲存元件處於中間臨限電壓分佈us丨 中,且上頁面資料欲保持處於1,則該健存元件將被㈣ 化至最'狀,i B。右該儲存元件處於中間臨限電壓分伸 1250中’且上頁面資料欲變為資料0,則該儲存元件之睦 限電麼將升南,以接琴神六- 便該儲存兀件處於狀態C。圖12A-C所 繪示之過程減小了浮動胡Λ +勖閘極至汙動閘極之耦合效應,此乃 121185.doc •30· 1336081 因僅鄰近儲存元件之上頁面程式化對一既定儲存元件之視 在臨限電壓有影響。一替代狀態編碼之一實例係當上頁面 資料係1時,自分佈1250移至狀態c,且當上頁面資料為〇 時移至狀態B。 雖然圓12A-C提供一關於四種資料狀態及兩個資料頁面 之實例,但圖12 A-C所教示之概念亦可應用於具有多於或 少於四種狀態及不同於兩個頁面之其他實施方案。 圖13顯示一電壓波形1300,其包括一系列施加至一經選 擇用於程式化之字線之程式化脈動131〇、132〇、133〇、 1340、1350、…。於一實施例中,該等程式化脈動具有一 電壓Vpgm,該電壓始於12伏並針對每一連續程式化脈動 增加例如0.5伏之增量,直至達到為2〇伏之最大值為止。 在該等程式化脈動之間係驗證脈動組1312、1322、1332、 1342、1352、…·。於某些實施例中,每一資料正程式化成 之狀態皆可具有一驗證脈動。於其他實施例中,可具有更 多或更少驗證脈動。每一組中之驗證脈動皆可具有例如 Vva、Vvb及Vvc之幅值(圖1〇)。 於一實施例中,資料係沿一共用字線程式化至儲存元 件。因此,在施加該等程式脈動前,選擇該等字線中之一 者供進行程式化。該字線將稱作選擇字線。一塊中之剩餘 字線稱作非選擇字線。it擇字線可具有一個&兩個鄰近字 線。若選擇字線具有兩個鄰近字線,則汲極側上之鄰近字 線稱作汲極側鄰近字線且源極侧上之鄰近字線稱作源極Z 鄰近字線。舉例而言’若圖2之WL2係選擇字線,則心 121185.docFigure 12 (: shows the process of stylizing the page. If the storage element is in the erased state E and the upper page remains in the 丄' then the storage element will remain in shape (4). If the storage element is in state E, and on it If the page data is to be programmed to 0', the threshold voltage of the storage element will be raised so that the storage unit is in state A. The right storage element is in the middle threshold voltage distribution, and the upper page information is desired. Keeping at 1, the memory component will be (four) to the most 'shape, i B. The right storage element is in the middle threshold voltage extension 1250' and the upper page data is to be changed to data 0, then the storage element is睦 睦 么 么 , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , This is 121185.doc •30· 1336081 because the page stylization on the adjacent storage element only affects the apparent threshold voltage of a given storage element. An example of an alternative status code is when the page data system 1 is Move from distribution 1250 to state c, and when the previous page data is Time shifts to state B. Although circle 12A-C provides an example of four data states and two data pages, the concept taught by AC in Fig. 12 can also be applied to have more or less than four states and different Other embodiments of the two pages. Figure 13 shows a voltage waveform 1300 comprising a series of stylized pulses 131, 132, 133, 1340, 1350, ... applied to a word line selected for programming. In one embodiment, the programmed pulsations have a voltage Vpgm that begins at 12 volts and is incremented by, for example, 0.5 volts for each successive stylized pulsation until a maximum of 2 volts is reached. The programmed pulsations are between the verification pulsation groups 1312, 1322, 1332, 1342, 1352, .... In some embodiments, each data can be programmed to have a verification pulse. In other embodiments There may be more or less verification pulsations. The verification pulsations in each group may have amplitudes such as Vva, Vvb, and Vvc (Fig. 1A). In one embodiment, the data is along a common word line. Stylized to a storage component. Thus, one of the word lines is selected for programming prior to applying the program pulsations. The word line will be referred to as a selected word line. The remaining word lines in a block are referred to as unselected word lines. The line may have one & two adjacent word lines. If the selected word line has two adjacent word lines, the adjacent word lines on the drain side are referred to as the drain side adjacent word lines and the adjacent word lines on the source side As the source Z is adjacent to the word line. For example, if the WL2 of Figure 2 selects the word line, then the heart is 121185.doc
-31- :S 1336081 為源極側鄰近字線而WL3係汲極側鄰近字線。 每一儲存元件塊皆包括一組形成行之位元線及一組形成 列之字線。。於一實施例中,該等位元線係劃分成奇數位 元線及偶數位元線。同時程式化沿一共用字線並連接至奇 數位元線之儲存元件’而在另一時間程式化沿一共用字線 並連接至偶數位元線之儲存元件(,,奇數/偶數程式化")。在 另一實施例中’針對該塊中的所有位元線,沿一字線程式 化儲存元件(”所有位元線程式化”)。於其他實施例中,可 將位元線或塊分解成其他群組(例如左及右群組、多於兩 個群組等等)。 圖14圖解說明一臨限電壓隨溫度及字線位置之變化。線 14 10表示溫度係數對字線位置之關係。線142〇表示臨限電 壓變化與溫度變化之比率(Δντ/<^ )對字線位置,其中vread 係對施加至非選擇字線之電壓之溫度補償。在此種情況 下’溫度相依性量值減小’雖然一字線位置相依性減小, 但該字線位置相依性相依性仍然存在。線1430表示(Δντ/ c)對子線位置之關係’其中Vread係對施加至非選擇字線 之電壓之溫度補償而Vcgr係對施加至選擇宇線之電壓之溫 度補償。在此種情況下,溫度相依性之量值相對於線142〇 進一步減小’而字線位置相依性仍然存在。線144〇表示 (△vT/°c)對字線位置之關係,其中Vread係對施加至非選擇 子線之電壓之溫度補償且因進一步字線位置相依性為 Vcgr ’故對施加至選擇字線之電壓實施為Vcgri溫度補 償。在此種情況下,相對於線143〇之情形,實質上移除了 121185.doc •32- [:S ) 字線位置相依性 擇字線。 字線相依性亦可藉由Vread施加至非選 :而° 6觀察到非揮發性儲存元件之臨⑯電壓隨溫 又 '曰加而降低。相對於溫度變化之電壓變化可以一溫度係 數⑻來表不’其通常約為·2 。該溫度係數相依於記 隱體裝置之各種特徵,例如摻雜、佈局等等。此外,預期 該溫度係數將隨記憶體尺寸之減小而在量值上增力”該溫 度係數可識別電壓或電流變化與溫度變化之比率。例如, 對於-40 C至+85 C之操作範圍,臨限電壓可變化約(85_ (·40))χ(·2)=250 mV。因此,可藉由根據溫度偏置施加至 一選擇子線之讀取或驗證電壓來改良一個或多個與該選擇 字線相關聯之選擇儲存元件之讀取或驗證操作準確度。此 外,當不使用相依於字線之溫度補償時,該溫度係數可根 據字線位置而異,如線141〇所指示。舉例而言,假定一塊 中具有32個字線,則線1410可在WL〇(源極側字線)處具有 一約為-1.9 mVrc之值且在WL31(汲極側字線)處具有一約 為-2 _ 1 mV/ C之值β因此,在一可能之設計中,溫度係數 跨越字線之變化為〇,2 mV。自一 70 nm ABL架構晶片獲得 之實驗性資料顯示基於字線位址之約15 %之平均頁面溫度 係數變化,其中WL3 1 (其串聯電阻完全處於其源極側上)因 其源極側上之溫度感應串聯電阻變化而遭受更多損害,從 而比一亦經歷串聯電阻變化(但僅在其汲極側處)之WL〇頁 面,導致附加之體效應。 已知各種技術可用於將經溫度補償之讀取電壓提供至選 121185.doc -33- 1336081 擇字線。大部分此等技術不依賴於獲得一實際溫度量測, 但此方法亦可能。舉例而言’標稱為"v〇ltage Generati〇n-31- :S 1336081 is the source side adjacent word line and the WL3 system is on the drain side adjacent to the word line. Each of the storage element blocks includes a set of bit lines forming a row and a set of word lines forming a column. . In one embodiment, the bit line is divided into odd bit lines and even bit lines. Simultaneously staging a storage element along a common word line and connected to an odd bit line' while staging a storage element along a common word line and connected to an even bit line at another time (, odd/even stylized " ;). In another embodiment, the storage elements ("all bits are threaded") are threaded along a word for all bit lines in the block. In other embodiments, the bit lines or blocks may be decomposed into other groups (e.g., left and right groups, more than two groups, etc.). Figure 14 illustrates a threshold voltage as a function of temperature and word line position. Line 14 10 represents the relationship of temperature coefficient to word line position. Line 142 〇 represents the ratio of the threshold voltage change to the temperature change (Δντ/<^) versus the word line position, where vread is the temperature compensation for the voltage applied to the unselected word line. In this case, the 'temperature dependency magnitude decreases' although the word line position dependence decreases, but the word line position dependency dependence still exists. Line 1430 represents the relationship of (Δντ/c) to the position of the sub-wire where Vread is the temperature compensation for the voltage applied to the unselected word line and Vcgr is the temperature compensation for the voltage applied to the selected U-line. In this case, the magnitude of the temperature dependence is further reduced relative to line 142' and the word line position dependence still exists. Line 144 〇 represents the relationship of (ΔvT/°c) to the position of the word line, where Vread is temperature compensated for the voltage applied to the non-selected sub-line and is applied to the selected word due to further word line position dependence Vcgr ' The voltage of the line is implemented as Vcgri temperature compensation. In this case, the 121185.doc •32-[:S ) word line position dependency word line is substantially removed relative to the line 143〇. The word line dependence can also be applied to the non-selection by Vread: while the 6th voltage of the non-volatile storage element is observed to decrease with temperature. The voltage change with respect to temperature change can be expressed by a temperature coefficient (8), which is usually about . The temperature coefficient is dependent on various features of the stealth device, such as doping, layout, and the like. In addition, it is expected that the temperature coefficient will increase in magnitude as the memory size decreases. The temperature coefficient identifies the ratio of voltage or current change to temperature change. For example, for an operating range of -40 C to +85 C The threshold voltage can vary by approximately (85_(·40))χ(·2)=250 mV. Therefore, one or more can be improved by reading or verifying the voltage applied to a selected sub-line according to the temperature bias. The read or verify operation accuracy of the selected storage element associated with the selected word line. Further, when temperature compensation dependent on the word line is not used, the temperature coefficient may vary depending on the word line position, such as line 141 For example, assuming that there are 32 word lines in a block, line 1410 can have a value of about -1.9 mVrc at WL〇 (source side word line) and at WL31 (bungee side word line) Has a value of approximately -2 _ 1 mV/C. Therefore, in a possible design, the temperature coefficient varies across the word line to 〇, 2 mV. Experimental data obtained from a 70 nm ABL architecture wafer is based on Approximately 15% of the average page temperature coefficient of the word line address, where WL3 1 (which The junction resistor is completely on its source side. It suffers more damage due to temperature-induced series resistance changes on its source side, and thus experiences a series resistance change (but only at its drain side). , resulting in additional body effects. Various techniques are known for providing temperature compensated read voltages to select 121185.doc -33-1336081 word lines. Most of these techniques do not rely on obtaining an actual temperature measurement. But this method is also possible. For example, 'nominal' "v〇ltage Generati〇n
Circuitry Having Temperature Compensation"之美國專利 6,801,454闡述一種根據溫度係數將讀取電壓輸出至一非揮 發性記憶體之電壓產生電路,該專利以引用的方式併入本 文中。該電路使用一帶隙電流,該電流包括一不相依於溫 度之部分及一隨溫度增加而增加的相依於溫度之部分。標 稱為"Non-Volatile Memory With Temperature-CompensatedU.S. Patent No. 6,801,454, the disclosure of which is incorporated herein by reference in its entirety in its entirety in its entirety in the the the the the the the The circuit uses a bandgap current that includes a portion that is independent of temperature and a temperature dependent portion that increases with increasing temperature. The nominal "Non-Volatile Memory With Temperature-Compensated
Data Read"之美國專利6,560,152使用一種用於偏置施加至 資料儲存元件之源極或汲極之電壓之偏壓產生器電路,該 專利以引用的方式併入本文中。標稱為"Multi Sute EEPROM Read and Write Circuits and Techniques"之美國專 利5,172,338闡述一種使用以與資料儲存單元相同之方式且 在同一積體電路晶片上形成之參考儲存單元之溫度補償技 術,該專利以引用的方式併入本文尹。該等參考儲存單元 提供參考位準,可將選擇單元之所量測電流或電壓與該參 考位準相比較。提供溫度補償,此乃因溫度以與自資料儲 存單元讀取之值相同之方式影響參考位準。如本文中所 述,此等技術中之任一種技術以及任何其他已知技術皆可 用來為選擇字線、非選擇字線及/或選擇閘極之電壓提供 溫度補償。 因此,藉助習用技術,藉由選擇字線施加至一個或多個 選擇儲存元件之讀取或驗證電壓受到溫度補償。然而,施 加至剩餘字線之電壓(其稱作一讀取電壓心⑽幻及施加至選 121185.doc •34· (s)U.S. Patent No. 6,560,152, the disclosure of which is incorporated herein by reference in its entirety in its entirety in its entirety in the the the the the the the the the the the U.S. Patent No. 5,172,338, the entire disclosure of which is incorporated herein by reference in its entirety, the entire entire entire entire entire entire entire entire disclosure Incorporate this article by reference. The reference storage units provide reference levels for comparing the measured current or voltage of the selected unit to the reference level. Temperature compensation is provided because the temperature affects the reference level in the same way as the value read from the data storage unit. As described herein, any of these techniques, as well as any other known techniques, can be used to provide temperature compensation for selecting a word line, selecting a word line, and/or selecting a gate voltage. Thus, with conventional techniques, the read or verify voltage applied to one or more selected storage elements by the selected word line is temperature compensated. However, the voltage applied to the remaining word line (which is called a read voltage core (10) is applied to the selected 121185.doc • 34· (s)
擇閉極之電虔(其稱作選擇間極、源極之vsgs或選擇閉 極、汲極之Vsgd)尚未受到溫度補償。人們一直認為僅對 選擇儲存元件進行溫度補償^矣。特Μ言,人們一直切 為將非選擇儲存元件及選擇閘極過驅動収以超過其臨^ 電壓以使溫度變化不明顯影響其導電性即可、然而,當電 晶體按比例縮小至更小之尺寸時,其特徵降格,且飽:電 流越來越多地偏離呈一平坦輪廓,如同由汲極電流⑹對 控制閘極電壓(Vcg)之圖表中—小斜坡所表示的那樣。 為瞭解決此等問題,建議當前正被讀取的一儲存元件之 路徑中之Vread、Vsgd、Vsgs及任何其他必需的電晶體具 有施加至其閘極之經溫度補償偏壓,以使每一電晶體之導 通電流變得較少相依於溫度。藉由對此等所施加之電壓進 行溫度跟蹤,可進一步減小因溫度變化所致之每_狀態之 臨限分佈之擴展。此結果可以多種方式(其未必互斥)來加The closed-pole power (which is called the selection of the interpole, the source of the vsgs or the selection of the closed pole, and the bungee of the Vsgd) has not been temperature compensated. It has been thought that temperature compensation is only performed on selected storage elements. In particular, people have been thinking that the non-selective storage element and the selection gate are overdriven to exceed their voltage so that the temperature change does not significantly affect its conductivity, however, when the transistor is scaled down to smaller In the case of dimensions, the features are degraded, and the saturation: current is increasingly deviated from a flat profile, as indicated by the small ramp (6) versus the control gate voltage (Vcg). In order to address these issues, it is recommended that Vread, Vsgd, Vsgs, and any other necessary transistors in the path of a storage element that is currently being read have a temperature compensated bias applied to their gates, such that each The on current of the transistor becomes less dependent on temperature. By performing temperature tracking on these applied voltages, the spread of the threshold distribution per _ state due to temperature changes can be further reduced. This result can be added in a variety of ways (it is not necessarily mutually exclusive)
以利用。舉例而言,可減小Vreade因此,可減少過驅動 :!:,亦即Vread超過儲存元件之最高程式化狀態之臨限電 壓之程度’從而減少因使用高Vread值所致之相關聯讀取 干擾。 此Vread之減小對於諸多不同之讀取/驗證技術有所幫 助。該減小對於採用多個讀取操作之讀取/驗證技術特別 重要。舉例而言,由Jian Chen於20〇5年4月5曰申請且標稱 為 Compensating For Coupling During Read Operations OfTo use. For example, Vreade can be reduced, thus reducing overdrive: !:, that is, the extent to which Vread exceeds the threshold voltage of the highest programmed state of the storage element', thereby reducing associated reads due to the use of high Vread values. interference. This reduction in Vread helps with many different read/verify techniques. This reduction is especially important for read/verify techniques that employ multiple read operations. For example, applied by Jian Chen on April 5, 2015 and is called Compensating For Coupling During Read Operations Of
Non-Volatile Memory”之共同待決美國專利申請案第 11/099,133號(標案編號SAND-1040US0)闡述一種其中針對 121185.doc -35- 1336081Non-Volatile Memory, co-pending U.S. Patent Application Serial No. 11/099, No. 133 (No. SAND-1040US0), which is incorporated herein by reference.
每一程式化狀態以不同之位準對選擇儲存元件實施多個讀 取操作,該專利申請案以引用的方式併入本文中。例如, 位準之間的增量可為50-100 mV。該技術反對字線至字線 之電容性耦合效應,其中當隨後程式化一鄰近儲存元件 (通常為一汲極側鄰居)時,一先前經程式化儲存元件之臨 限電壓偏移得更高。若該偏移足夠大,則可造成一讀取萨 誤》當將該鄰近儲存元件程式化至一更高狀態(例如 態C)時,該耦合最高。為瞭解決此問題,根據在該選擇儲 存元件後程式化之鄰近字線上的鄰近儲存元件之狀態來為 每一程式化狀態選擇多個讀取操作中之一者。 在此技術之一變化形式中,如由圖13中之驗證脈動組所 不,針對選擇字線上的每一狀態使用一個讀取位準,同時 調節施加至鄰近字線之讀取電壓,此變化形式闡述於由 Nima Mokhlesi於2〇〇6年3月17日申請且標稱為"以以Each stylized state performs a plurality of read operations on selected storage elements at different levels, which is incorporated herein by reference. For example, the increment between levels can be 50-100 mV. This technique opposes the capacitive coupling effect of the word line to the word line, where the threshold voltage of a previously programmed memory element is shifted higher when a neighboring storage element (usually a drain side neighbor) is subsequently programmed. . If the offset is large enough, a read error can be caused. This coupling is highest when the adjacent storage element is programmed to a higher state (e.g., state C). To address this problem, one of a plurality of read operations is selected for each stylized state based on the state of the adjacent storage elements on the adjacent word lines that are programmed after the storage element is selected. In one variation of this technique, a read level is used for each state on the selected word line, as determined by the verify pulse group in FIG. 13, while the read voltage applied to the adjacent word line is adjusted, this change The form is stated in the application by Nima Mokhlesi on March 17, 2, and is called "
Operation For Non-Volatile Storage With Compensation For Coupling"之共同待決美國專利申請案第丨1/384,〇57號(擋案 編號SAND.1G89US2)中,該專利申請案以引用的方式併入 本文:。在以上兩種情況之任-情況下,因用於讀取相同 資料ϊ之讀取操作次數增加,受讀取干擾之影響增加。本 文中所提供之溫度補償技術可減輕此問題。 本文中所提供之溫度補償技術之再一優點在力,各種程 式化狀態(例如狀態 限罨歷分佈之間的 几裕可隨著因酿度變化減小所致每一狀態之臨限電壓分佈 之擴展而增加。另一優點在於’可藉由以下方式增加程式 12I185.doc •36- c S ; 1336081 化效能’例如’可藉由消耗各種程式化狀態之臨限電壓分 佈之門的曰加之几裕而在程式化脈動之樓梯級數中使用一 更大步長。另—優點在於,整個記憶體操作窗.口(例如, 用於將貧料儲存於儲存元件中之臨限電壓範圍)可因將程 式化狀L壓縮得更靠近在__起而減小。由此不僅減少讀取 及寫入干擾,且亦増加寫入效能,此乃因達到一所期望之 程式化狀態所需之程式化脈動將因一較小之窗口而變得更 少。The Operational Non-Volatile Storage With Compensation For Coupling " co-pending U.S. Patent Application Serial No. 1/384, filed on Jan. No. 57 (S. . In either of the above cases, the number of read operations for reading the same data increases, and the influence of read disturb increases. The temperature compensation techniques provided in this article can alleviate this problem. A further advantage of the temperature compensation technique provided herein is the force, various stylized states (eg, the margin between the state limit and the distribution of thresholds can be reduced with each state due to a decrease in the degree of brewing. The extension is increased. Another advantage is that 'the program 12I185.doc • 36- c S can be added by the following method; 1336081 performance can be increased by the threshold of the voltage distribution of various stylized states. Ample and use a larger step size in the stylized pulsating staircase series. Another advantage is that the entire memory operating window port (for example, the threshold voltage range used to store the lean material in the storage element) It can be reduced by compressing the stylized L closer to __, thereby not only reducing read and write interference, but also increasing write performance, which is required to achieve a desired stylized state. The stylized pulsations will be reduced by a smaller window.
可更進一步地藉由提供一計及選擇字線在其他非選擇字 線(其與—組非揮發性儲存元件相關聯)中-相對位置的經 ’皿度補&電壓改良準確度。該準確度改良可藉由將線1彻 與1430相比較而看到。可對選擇字線單獨地或結合非選擇 字線之溫度補償來實施此溫度補償。參見圖15卜亦可為 非選擇子線提供一字線相依性。The accuracy of the voltage correction can be further improved by providing a reference word line in the other non-selected word lines (which are associated with the set of non-volatile storage elements). This accuracy improvement can be seen by comparing line 1 to 1430. This temperature compensation can be implemented for the selected word line alone or in combination with the temperature compensation of the non-selected word line. See Figure 15 for a word line dependency for non-selected sub-lines.
圖⑸係—解釋在讀取/驗證操作期間某些波形之行為之 時序圖《中a咖度補償之電壓施加至所有非選擇字線並 ❹至兩㈣_極°—般而言,在讀取及驗證操作期 間,選擇字線或其㈣财連接至mf μ之-位 ^係針對每-讀取及驗證操作所規I以心相關儲存元 件之-臨限電廢是否已相此位準。在施加字線電壓後, 量測儲存元件之導電電流以確定該儲存元件是否已導通。 若量測到該導電電流大於某一值,則假定該儲存元件已導 ==!線之電壓大於儲存元件之臨限電壓。若量測 “導電電級不大於此某—值,則假定儲存元件未導通且 121185.docFigure (5) is a timing diagram that explains the behavior of certain waveforms during a read/verify operation. The voltage in the a-cafe compensation is applied to all non-selected word lines and to two (four) _ poles - in general, in reading During the fetch and verify operation, select the word line or its (4) financial connection to the mf μ-bit ^ for the per-read and verify operation I is concerned with the storage of the component - the limit of electricity waste has been the same level . After the word line voltage is applied, the conduction current of the storage element is measured to determine if the storage element is conductive. If the measured conduction current is greater than a certain value, it is assumed that the storage element has a voltage of ==! the line is greater than the threshold voltage of the storage element. If the measurement "conducting electrical level is not greater than this value, then the storage element is assumed to be non-conducting and 121185.doc
(S -37- 1336081 施加至字線之電壓不大於儲存元件之臨限電壓。(S -37-1336081 The voltage applied to the word line is not greater than the threshold voltage of the storage element.
存在許多種用於在讀取或驗證操作期間量測一儲存元件 之導電電流之方式。於一實例中,允許y或不允許)以包括 該儲存元件之NAND串使該位元線放電之速率來量測儲存 元件之導電電流。在一時間週期後量測該位元線上之電荷 以確定其是否已放電。於另一實施例中,選擇儲存元件之 導電允許電流在一位元線上流動或不流動,此係根據感測 放大器中一電容器是否因電流流動而充電來加以量測。上 文論述了兩個實例。There are many ways to measure the conduction current of a storage element during a read or verify operation. In one example, y or not allowed is allowed to measure the conduction current of the storage element at a rate at which the NAND string comprising the storage element discharges the bit line. The charge on the bit line is measured after a period of time to determine if it has been discharged. In another embodiment, the selection of the conduction of the storage element allows current to flow or not flow on a single bit line, which is measured based on whether a capacitor in the sense amplifier is charged due to current flow. Two examples are discussed above.
圖 15a顯示波形 SGD、WLunselected、WLn、SGS、選擇 BL、及始於一約為0伏之穩態電壓Vss之源極。SGD代表汲 極側選擇閘極之閘極。WLunselected代表非選擇字線。 WLn係經選擇用於讀取/驗證之字線。SGS係源極側選擇閘 極之閘極。選擇BL係經選擇用於讀取/驗證之位元線。源 極係儲存元件之源極線(參見圖4)。注意,所繪示之SGS及 選擇BL存在兩種變化形式。一組此等波形SGS(選項1)及選 擇BL(選項1)繪示一針對一儲存元件陣列之讀取/驗證操 作,該讀取/驗證操作藉由確定該位元線是否已放電來量 測一儲存元件之導電電流。另一組此等波形SGS(選項2)及 選擇BL(選項2)繪示一對一儲存元件陣列之讀取/驗證操 作,該讀取/驗證操作以使該感測放大器中一專用電容器 放電之速率來量測一儲存元件之導電電流。 首先,將參照SGS(選項1)及選擇BL(選項1)來闡述藉由 確定位元線是否已放電來量測一儲存元件之導電電流中所 S ) 121185.doc •38· 牽涉的感測電路及儲存元件陣列之行為。於時間11處, SGD及SGS(選項2)分別升高至Vsgd tcA Vsgs tc,其中"tc" 表不一經溫度補償之電壓。Vsgd_tc&Vsgs係藉由針對溫度 分別偏置Vsgd及Vsgs所獲得。例如,^扣及約為3 5 伏。例如,可根據上述補償技術來施加溫度補償。使非選 擇字線升高至Vread-tc。Vread_tc係藉由針對溫度偏置 Vread所獲得。例如,Vread約為6伏。該選擇字線針對一 讀取操作升高至Vcgr-tc(控制閘極讀取電壓),例如圖1〇之 Vra、Vrb或Vrc.,或者針對一驗證操作升高至一驗證位 準,例如圖10之Vva、Vvb或Vvc。在一種方法中,將選擇 BL(選項預充電至約0.7伏。施加至非選擇字線2Vread_ tc充當一過驅動電壓,此乃因其導致非選擇儲存元件導通 並充當傳遞閘極。施加至非選擇儲存元件之過驅動電壓等 於施加至該控制閘極之電壓超過臨限電壓之量。 如所提及,將Vread選擇成一充分高於儲存元件之最高 臨限電壓之位準以確保非選擇儲存元件處於導電或導通狀 態。舉例而言,狀態E、A、B及C之臨限電壓可分別假定 為-2伏、〇伏、2伏及4伏,而乂代“在無溫度補償之情況下 可為6伏。在此種情況下,處於狀態E之儲存元件經6_ (-2)=8伏之過驅動,處於狀態a之儲存元件經6〇 = 6伏之過 驅動,處於狀態B之儲存元件經6·2=4伏之過驅動,且處於 狀態C之儲存元件被經6-2=2伏之過驅動。雖然在每一種情 形下非選擇儲存元件皆處於導電狀態,但其導電性將基於 其過驅動之程度而變化。受過驅動越高,非選擇儲存元件Figure 15a shows the waveforms SGD, WLunselected, WLn, SGS, select BL, and the source starting at a steady state voltage Vss of about 0 volts. SGD represents the gate of the gate selection gate. WLunselected represents a non-selected word line. WLn is selected for reading/verifying word lines. The gate of the gate side of the SGS system selects the gate of the gate. The bit line selected by the BL system for reading/verification is selected. The source line of the source storage element (see Figure 4). Note that there are two variations of the SGS and the selected BL. A set of such waveforms SGS (option 1) and select BL (option 1) illustrate a read/verify operation for an array of storage elements by determining whether the bit line has been discharged Measure the conduction current of a storage component. Another set of such waveforms SGS (option 2) and select BL (option 2) illustrate a read/verify operation of a one-to-one array of storage elements for discharging a dedicated capacitor in the sense amplifier The rate is used to measure the conduction current of a storage element. First, reference will be made to SGS (option 1) and selection BL (option 1) to determine the conduction current of a storage element by determining whether the bit line has been discharged. S) 121185.doc • 38· Sensing involved The behavior of the circuit and the array of storage elements. At time 11, SGD and SGS (option 2) are raised to Vsgd tcA Vsgs tc, respectively, where "tc" represents a temperature compensated voltage. Vsgd_tc & Vsgs are obtained by biasing Vsgd and Vsgs for temperature respectively. For example, ^ buckle and about 3 5 volts. For example, temperature compensation can be applied in accordance with the compensation techniques described above. Raise the non-selected word line to Vread-tc. Vread_tc is obtained by biasing Vread for temperature. For example, Vread is approximately 6 volts. The selected word line is boosted to Vcgr-tc (control gate read voltage) for a read operation, such as Vra, Vrb or Vrc. of FIG. 1, or raised to a verify level for a verify operation, such as Figure 10 is Vva, Vvb or Vvc. In one approach, BL will be selected (option precharged to about 0.7 volts. Application to unselected word line 2Vread_tc acts as an overdrive voltage because it causes the non-selected storage element to conduct and act as a transfer gate. The overdrive voltage of the selected storage element is equal to the amount of voltage applied to the control gate that exceeds the threshold voltage. As mentioned, Vread is selected to a level well above the highest threshold voltage of the storage element to ensure non-selective storage. The components are in a conducting or conducting state. For example, the threshold voltages of states E, A, B, and C can be assumed to be -2 volts, volts, 2 volts, and 4 volts, respectively, while deuterated "in the absence of temperature compensation. The lower can be 6 volts. In this case, the storage element in state E is driven by 6_(-2)=8 volts, and the storage element in state a is driven by 6〇=6 volts, in state B. The storage element is driven over 6·2 = 4 volts, and the storage element in state C is driven over 6-2 = 2 volts. Although in each case the non-selective storage element is in a conducting state, Conductivity will vary based on the degree of overdrive The higher the received drive unselected storage element
121185.doc •39- S 獨υ81 之導電性越好,此乃因其源極汲極電阻更小而電流攜載能 力更大。類似地,受過驅動越低,非選擇元件之導電性越 差,此乃因其源極汲極電阻更大而電流攜載能力更小。因 此,與選擇儲存元件處在相同NAND串中之儲存元件將根 據其程式化狀‘態而具有不同之導電性,即使其皆處於一般 導電狀態中。因此,該選擇儲存元件之讀取位準將根據其 相應程式化狀態而受非選擇儲存元件之影響。121185.doc • 39- S The better conductivity of the 81 is due to its smaller source-drain resistance and higher current carrying capacity. Similarly, the lower the drive, the worse the conductivity of the non-selected components due to their larger source-drain resistance and lower current carrying capacity. Therefore, the storage elements in the same NAND string as the selected storage elements will have different conductivities depending on their stylized state, even if they are all in a general conductive state. Therefore, the read level of the selected storage element will be affected by the non-selected storage element according to its corresponding stylized state.
假定一溫度補償為-0.2伏,Vread_tc=6_〇2K=5 8伏。例 如,出於與非選擇儲存元件類似之緣由,可對施加至選擇 閘極之電壓進行溫度補償,由此允許為伏之 / g tc或Vsgs-tc 〇非選擇字線及選擇閘極之溫度補償往 往會使對選擇字線臨限電壓之讀取更相依於溫度。由此, 每-與選擇儲存元件串聯之非選擇料元件皆對選擇儲存 元件之臨限電壓所獲得之讀取具有-小影響,例如,3 mV。雖然一個非選擇儲存元件對讀取之影響較小,但當 存在31個非選擇字線時,㈣非選㈣存元件巾之每—者 之累積影響可合計達—顯著料,例如93 mV。非選擇字 線之溫度補償效應對於具有更多字線之記憶體裝置且當使 用減小之過驅動電壓時更為明顯。 在時間t2處’ NAND串可控制位元線。同樣於時間^ 處,源㈣選擇閘極係、藉由咖(選項1}升高至^七而導 通此提#路按以耗散該位元線上之電荷。若經選擇用 於讀取之儲存元伴夕& _ & 之臨限電壓大於Vcgr或施加至選擇字線 WLn之驗證位準,則访 、 則該選擇儲存元件不會導通且該位元線 121185.docAssuming a temperature compensation of -0.2 volts, Vread_tc = 6_〇2K = 58 volts. For example, for reasons similar to non-selective storage elements, the voltage applied to the select gate can be temperature compensated, thereby allowing volts / g tc or Vsgs-tc 〇 unselected word lines and select gate temperature Compensation often results in a more dependent temperature reading of the selected word line threshold voltage. Thus, each non-selective component in series with the selected storage element has a small effect on the read obtained by selecting the threshold voltage of the storage component, for example, 3 mV. Although a non-selective storage element has less effect on reading, when there are 31 unselected word lines, the cumulative effect of each of the (4) non-selected (four) memory elements can be aggregated to a significant amount, such as 93 mV. The temperature compensation effect of the unselected word lines is more pronounced for memory devices with more word lines and when using reduced overdrive voltages. At time t2, the NAND string can control the bit line. Also at time ^, the source (4) selects the gate system, and by means of the coffee (option 1} is raised to ^7, the reference is turned on to dissipate the charge on the bit line. If selected for reading If the threshold voltage of the storage element & _ & is greater than Vcgr or the verification level applied to the selected word line WLn, then the selected storage element will not be turned on and the bit line 121185.doc
.40- S 不放電’如線1450所繪示。若經選擇用於讀取之儲存元件 中之臨限電壓低於Vcgr_tc或低於施加至選擇字線WLn之驗 證位準’則經選擇用於讀取之儲存元件將導通(導電)且該 位元線電壓將耗散’如曲線1452所繪示。在時間t2後及時 間t3前的某一點(其由特定實施方案確定)處,感測放大器 將確疋該位元線是否已耗散一充足量。在t2與t3之間,感 測放大器量測所估計之BL電壓。在時間t3處,所繪示之波 形將降低至Vss(或另一備用值或恢復值)。 下文將參照SGS(選項2)及選擇BL(選項2)來論述感測電 路及儲存元件陣列以充電感測放大器中一專用電容器充電 之速率量測儲存元件之導電電流之行為。在時間u處, SGD升高至Vsgd_tc,非選擇字線(WLunselected)升高至 Vread-tc,且選擇字線(WLn)針對一讀取操作升高至vcgr_ tc(例如Vra、Vrb或Vrc),或者針對一驗證操作升高至一驗 證位準(例如Vva、Vvb或Vvc)。在此種情況下,無論 NAND串正在做什麼,感測放大器使位元線電壓保持不 變,以便感測放大器在位元線"夹持"至彼電壓時量測流動 之電流。在時間U後及時間t3前之某一點(其由特定實施方 案確定)處,感測放大器將確定該感測放大器中之電容器 是否已耗散-充足量。在時間t3處’所繪示之波形將降低 至Vss(或另一備用值或恢復值)。注意,在其他實施例中, 可改變某些波形之定時。 圖15b緣示圖15a之時序圖,其中不同之經溫度補償電壓 係根據字線位置施加至選擇字線。如結合圖14所論述在 121185.doc ,,, 1336081 一種方法中,當該字線之位置相對於源極更接近於汲極 時,可將一較高量值之溫度補償(例如,負值更大)施加至 選擇子線。此由圖15b之時序圖加以例示,其中施加至一 更接近於源極之選擇字線(例如WL〇)之經溫度補償電壓由 一虛線顯示,而施加至更接近於汲極之選擇字線(例如 WL31)之經溫度補償電壓由一實線顯示。當選擇字線處於 源極與汲極中間時施加至其之經溫度補償電壓處於當選擇 子線處於源極侧或汲極側時施加至其之電壓的中間,例如 與距源極或汲極之距離成比例。可為施加至選擇閘極及非 選擇字線中之一者或多者之電壓提供一字線位置相依性。 可以類比方式修改圖16-18以提供一字線位置相依性。 圖16係一解釋讀取/驗證操作期間某些波形之行為之時 序圖’其中經溫度補償之電壓施加至除直接鄰近一選擇字 線之字線以外的所有非選擇字線,並施加至兩個選擇閘 極。波形SGD、SGS(選項1)及SGS(選項2)與圖i5a中相 同。選擇BL及源極波形(其未緣示)亦與圖i5a中相同。注 意’標記為WL0至WLn-2之波形代表施加至位於第一字線 WL0與子線WLn-2之間且包括第一字線WLO及字線WLn-2 之字線的經溫度補償之讀取電壓,字線WLn_2緊接著選擇 字線WLn之一源極側鄰近字線。標記為WLn 2至 WL3 1之波形代表施加至字線WLn+2(其緊接著選擇字線 WLn之一汲極側鄰近字線WLn+丨)與WL3丨(其直接鄰近汲極 側選擇閘極)之間且包括字線WLn+2及WL3 1之字線的經溫 度補償之讀取電壓。假定一]sjAND串上存在三十二個儲存.40-S does not discharge' as depicted by line 1450. If the threshold voltage in the storage element selected for reading is lower than Vcgr_tc or lower than the verify level applied to the selected word line WLn', the storage element selected for reading will be conductive (conductive) and the bit The line voltage will dissipate as shown by curve 1452. At a point before time t2, which is determined by the particular implementation, at a point before time t3, the sense amplifier will determine if the bit line has been dissipated by a sufficient amount. Between t2 and t3, the sense amplifier measures the estimated BL voltage. At time t3, the waveform depicted will be reduced to Vss (or another alternate or recovered value). The behavior of the sensing circuit and the storage element array to measure the conduction current of the storage element at a rate at which a dedicated capacitor is charged in the sense amplifier is discussed below with reference to SGS (option 2) and selection BL (option 2). At time u, SGD rises to Vsgd_tc, the unselected word line (WLunselected) rises to Vread-tc, and the selected word line (WLn) rises to vcgr_tc (eg, Vra, Vrb, or Vrc) for a read operation. Or escalate to a verification level (eg, Vva, Vvb, or Vvc) for a verification operation. In this case, regardless of what the NAND string is doing, the sense amplifier keeps the bit line voltage constant so that the sense amplifier measures the current flowing in the bit line "clamp" to the voltage. At some point after time U and before time t3, which is determined by the particular implementation, the sense amplifier will determine if the capacitor in the sense amplifier has been dissipated - a sufficient amount. The waveform depicted at time t3 will be reduced to Vss (or another alternate or recovered value). Note that in other embodiments, the timing of certain waveforms can be changed. Figure 15b illustrates the timing diagram of Figure 15a in which different temperature compensated voltages are applied to the selected word line based on the word line position. As discussed in connection with FIG. 14, in a method of 121185.doc,, 1336081, when the position of the word line is closer to the drain than the source, a higher magnitude temperature compensation (eg, a negative value) can be used. Larger) applied to the selection strand. This is illustrated by the timing diagram of Figure 15b, in which the temperature compensated voltage applied to a selected word line (e.g., WL 更) closer to the source is shown by a dashed line and applied to a selected word line that is closer to the drain. The temperature compensated voltage (e.g., WL31) is shown by a solid line. The temperature compensated voltage applied thereto when the selected word line is in the middle of the source and the drain is in the middle of the voltage applied thereto when the selected sub-line is on the source side or the drain side, for example, from the source or the drain The distance is proportional. A word line position dependency can be provided for the voltage applied to one or more of the select gate and the unselected word line. Figures 16-18 can be modified in an analogy manner to provide a word line position dependency. Figure 16 is a timing diagram illustrating the behavior of certain waveforms during a read/verify operation where the temperature compensated voltage is applied to all non-selected word lines except for the word line directly adjacent to a selected word line, and applied to both Select the gate. The waveforms SGD, SGS (option 1) and SGS (option 2) are the same as in Figure i5a. The selection of the BL and source waveforms (not shown) is also the same as in Figure i5a. Note that the waveforms labeled WL0 through WLn-2 represent temperature compensated reads applied to word lines located between the first word line WL0 and the sub-line WLn-2 and including the first word line WL0 and the word line WLn-2. Taking the voltage, the word line WLn_2 is next to the source line side adjacent to the word line WLn. The waveforms labeled WLn 2 through WL3 1 represent application to word line WLn+2 (which is followed by one of the drain side adjacent word lines WLn+丨 of the selected word line WLn) and WL3丨 (which is directly adjacent to the drain side select gate) The temperature compensated read voltage is between and including the word lines of word lines WLn+2 and WL3 1. Assume that there are thirty-two stocks on the sjAND string
121185.doc -42· '·: S J 1336081 元件,但亦可使用不同之數量。對於此等非選擇字線,如 所述施加溫度補償。類似地,對於選擇字線WLll,施加經 溫度補償之控制閘極讀取電壓Vcgr-tc。 對於直接鄰近該選擇字線之字線WLn-Ι及WLn+i中之任 何一者或兩者,所施加之讀取電壓未經溫度補償,或經溫 度補償一減小之量,例如,與施加至其他非選擇字線之溫 • 度補償相比一明顯減小之量。一對特定記憶體裝置之最優 φ. 補償可藉由測試來確定。合意之情形係因選擇儲存元件與 鄰近儲存元件之間的寄生電容通路而對字線WLn—i及 WLn+Ι實施不同於其他字線之處理。亦即,一施加至鄰近 儲存元件之Vread之溫度補償電壓可以電容方式耦合至選 • 擇儲存元件,從而將其臨限電壓偏移得更高。特別對於上 ,- 述針對每一程式化狀態採用多個讀取位準之讀取/驗證技 術,此可能成問題。此外,合意之情形係關於溫度補償以 彼此不同之方式來處理字線WLn-Ι及WLn+Ι。 φ 圓17係一解釋在讀取/驗證操作期間某些波形之行為之 時序圖,其甲選擇字線直接鄰近一源極側選擇閘極。波形 SGD、SGS(選項1)及SGS(選項2)與圖I5a中相同。選擇BL 及源極波形(未繪示)亦與圖15a中相同β此處,選擇字線 WL0直接鄰近源極側選擇閘極。如所提及,對於某些讀 取/驗證技術,合意之情形係不將溫度補償用於施加至鄰 近選擇儲存元件之電晶體之讀取電壓。此等鄰近電晶體在 —側上包括源極側選擇閘極而在另—側上包括與和相關 聯之儲存元件。因此,在一種可能之方法中,所施加之電 12I185.doc 1336081 壓未經溫度補償,或溫度補償一較施加至其他非選擇字線 及另一選擇閘極(其不直接鄰近選擇儲存元件之汲極側選 擇閘極)之補償為少之量。特定而言,Vsgs可施加 Vread-tc可施加至WL0及WL2至紅3 1,Vread可施加至 WL1,且Vsgd-tc可施加至SGD。 圖18係一解釋在讀取/驗證操作期間某些波形之行為之 時序圖,其令選擇字線直接鄰近一汲極侧選擇閘極。波形 SGD、SGS(選項1)及SGS(選項2)與圖15a中相同。選擇BL 及源極波形(未繒'示)亦與圖15a中相同。此處,選擇字線 WL3 1直接鄰近汲極側選擇閘極,如所提及,對於某些讀 取/驗證技術,合意之情形係不將溫度補償用於施加至鄰 近選擇儲存元件之電晶體之讀取電壓。此等鄰近電晶體在 側上包括沒極側選擇閘極而在另一側上包括WL3〇。因 此,在一種可能之方法中,所施加之電壓未經溫度補償, 或溫度補償一較施加至其他非選擇字線及另一選擇閘極 (不直接鄰近該選擇儲存元件之源極側選擇閘極)之補償為 少之量。特定而言,Vsgs-tc可施加至SGS,Vread-tc可施 加至WL0至WL39 ’ Vread可施加至WL30,且Vsgd可施加 至SGD。因此,在圖17及圖18之方法中,可分別根據鄰近 儲存元件是否經選擇或未經選擇而將施加至一個或兩個選 擇閘極之電壓設定至不同之位準,例如一未經溫度補償之 位準或經補償之位準。 圖19係一流程圖,其闡述一種用於程式化非揮發性記憶 體之方法之一實施例。於某些實施方案中,儲存元件於程 -44· 121185.doc 1336081 式化之前被擦除(以塊或其他單元為單位)。於步驟19〇〇 中,控制器發出一"資料載入,,命令而控制電路31〇接收輪 入。於步驟1905中,將指定頁面位址之位址資料自控制器 或主機輸入至解碼器3 14。於步驟191〇中,將已定址頁面 之一程式化資料頁面輸入至一資料緩衝器以供程式化。將 該資料鎖存於適宜之鎖存器組中。於步驟1915中,控制器 向狀態機312發出一"程式化"命令。 在由"程式化"命令觸發後,使用施加至適宜字線的圖13 之步階式脈動1310、1320、1330、1340、1350、…將在步 驟1910中鎖存之資料程式化至狀態機312控制之選擇儲存 兀件中。於步驟1920中,將程式化電塵Vpgm初始化成開 始脈動(例如12伏或另一值)並將狀態機312維持之程式化計 數器PC初始化成〇。於步驟1925中,將第一外帥脈動施加 至選擇字線以開始程式化與選擇字線相關聯之儲存元件。 右邏輯"0”儲存於特定資料鎖存器中,此以指示程式化對 應之儲存元件,則將對應位元線接地。另一方面,若邏輯 "1 ”儲存於該特定鎖存器中,此指示對應之儲存元件仍保 持在其當前資料狀態中,則將對應位元線連接至以禁 止程式化。 於步驟1930中,如所論述,使用經適宜溫度補償之電壓 及未經溫度補償或經溫度補償一減小之量之電壓$驗證選 擇儲存7L件之狀態。若偵測到一選擇儲存元件之目標臨限 電壓已達到該適宜位準,則將儲存於對應資料鎖存器中之 貝料改變為邏輯"1"。若偵測到該臨限電壓尚未達到該適 121185.doc -45- 1336081 宜位準,料改㈣存於該對應f料鎖存^巾之資料。以 此方式’無需程式化H儲存於其制資料鎖存器中 之邏輯”1"之位元線。當所有資料鎖存器皆儲存邏輯τ 時,該狀態機(藉由上述經連線”或"類型之機制)知曉所有 選擇健存元件皆已程式化。於步驟⑽中,檢查該等資料 鎖存器是否均儲存有邏輯T。若如此,則該程式化過程 完成且因所有選擇儲存元件皆經程式化及驗證而係成功。121185.doc -42· '·: S J 1336081 components, but different quantities are also available. For such non-selected word lines, temperature compensation is applied as described. Similarly, for the selected word line WL11, a temperature compensated control gate read voltage Vcgr-tc is applied. For any one or both of the word lines WLn-Ι and WLn+i directly adjacent to the selected word line, the applied read voltage is not temperature compensated, or is temperature compensated by a reduced amount, for example, The temperature compensation applied to other unselected word lines is significantly reduced compared to a significant amount. The optimal φ. compensation for a particular pair of memory devices can be determined by testing. It is desirable that the word lines WLn-i and WLn+1 are treated differently than other word lines by selecting a parasitic capacitance path between the storage element and the adjacent storage element. That is, a temperature compensated voltage applied to Vread adjacent to the storage element can be capacitively coupled to the optional storage element to shift its threshold voltage higher. In particular, it is possible to use multiple read level read/verify techniques for each stylized state, which can be problematic. Further, it is desirable that the word lines WLn-Ι and WLn+Ι are processed in a manner different from each other with respect to temperature compensation. φ Circle 17 is a timing diagram that illustrates the behavior of certain waveforms during a read/verify operation, with a select word line directly adjacent to a source side select gate. The waveforms SGD, SGS (option 1) and SGS (option 2) are the same as in Figure I5a. The selection of the BL and source waveforms (not shown) is also the same as in Figure 15a. Here, the selected word line WL0 is directly adjacent to the source side selection gate. As mentioned, for some read/verify techniques, it is desirable that temperature compensation is not applied to the read voltage applied to the transistor adjacent to the selected storage element. These adjacent transistors include a source side select gate on the side and a storage element associated with and on the other side. Therefore, in one possible method, the applied voltage 12I185.doc 1336081 is not temperature compensated, or the temperature compensation is applied to other unselected word lines and another select gate (which is not directly adjacent to the selected storage element) The compensation of the gate on the drain side is a small amount. In particular, Vsgs can be applied Vread-tc can be applied to WL0 and WL2 to red 3 1, Vread can be applied to WL1, and Vsgd-tc can be applied to SGD. Figure 18 is a timing diagram illustrating the behavior of certain waveforms during a read/verify operation, with the selected word line directly adjacent to a drain side select gate. Waveforms SGD, SGS (option 1) and SGS (option 2) are the same as in Figure 15a. The selection of BL and source waveforms (not shown) is also the same as in Figure 15a. Here, the selected word line WL3 1 is directly adjacent to the drain side selection gate. As mentioned, for some read/verify techniques, it is desirable not to apply temperature compensation to the transistor applied to the adjacent selected storage element. The voltage is read. These adjacent transistors include a gateless select gate on the side and WL3〇 on the other side. Therefore, in one possible method, the applied voltage is not temperature compensated, or the temperature compensation is applied to other unselected word lines and another selected gate (not directly adjacent to the source side select gate of the selected storage element) The compensation of the pole is a small amount. In particular, Vsgs-tc can be applied to SGS, Vread-tc can be applied to WL0 to WL39' Vread can be applied to WL30, and Vsgd can be applied to SGD. Therefore, in the methods of FIGS. 17 and 18, the voltage applied to one or two selection gates can be set to a different level depending on whether the adjacent storage elements are selected or not selected, for example, an un-temperature. The level of compensation or the level of compensation. Figure 19 is a flow diagram illustrating one embodiment of a method for staging non-volatile memory. In some embodiments, the storage element is erased (in blocks or other units) prior to being formatted as -44.121185.doc 1336081. In step 19, the controller issues a "data load," command and the control circuit 31 receives the round. In step 1905, the address data of the specified page address is input from the controller or host to the decoder 314. In step 191, one of the programmed pages of the addressed page is input to a data buffer for stylization. The data is latched into a suitable set of latches. In step 1915, the controller issues a "stylized" command to state machine 312. After being triggered by the "stylized" command, the data latched in step 1910 is programmed to the state using the stepped pulsations 1310, 1320, 1330, 1340, 1350, ... of Figure 13 applied to the appropriate word line. The machine 312 controls the selection in the storage element. In step 1920, the stylized electric dust Vpgm is initialized to a start pulse (e.g., 12 volts or another value) and the programmed counter PC maintained by the state machine 312 is initialized to 〇. In step 1925, a first marshal pulse is applied to the selected word line to begin programming the storage elements associated with the selected word line. The right logic "0" is stored in a specific data latch, which indicates that the corresponding storage element is stylized, and the corresponding bit line is grounded. On the other hand, if the logic "1" is stored in the specific latch If the corresponding storage element remains in its current data state, the corresponding bit line is connected to prohibit stylization. In step 1930, as discussed, the state of the stored 7L piece is verified using a suitably temperature compensated voltage and a voltage $ without temperature compensation or temperature compensated by a reduced amount. If it is detected that the target threshold voltage of a selected storage element has reached the appropriate level, the bead stored in the corresponding data latch is changed to logic "1". If it is detected that the threshold voltage has not yet reached the appropriate level of 121185.doc -45-1336081, the material change (4) is stored in the corresponding material of the material. In this way, there is no need to stylize the bit line of the logic "1" stored in its data latch. When all data latches store logic τ, the state machine (by the above-mentioned via) Or "type mechanism] know that all selected storage components are stylized. In step (10), it is checked whether the data latches are stored with logic T. If so, the stylization process is complete and the success of all selected storage components is programmed and verified.
於步驟mo中報告"通過"狀態。於一實施例中,如先前參 照圖15-18所述,步驟193〇之驗證包括將經溫度補償之電 壓提供至-個或多個非選擇字線,並提供至一個或多個選 擇閘極。Report the "pass" status in step mo. In one embodiment, as previously described with reference to Figures 15-18, the verification of step 193 includes providing a temperature compensated voltage to one or more unselected word lines and providing to one or more select gates .
右於步驟1935十確定並非所有資料鎖存器皆儲存邏輯 "1" ’則該程式化過程繼續。於步驟1945中,對照程式化 限制值PCmax檢查程式化計數器pc。程式化限制值之一實 例為二十,但亦可使用其他數量^若程式化計數Pc不小 於PCmax,則程式化過程已失敗並於步驟中報告,失 敗”狀態。若程式化計數器PC小於pCmax,則Vpgm位準增 加步長並於步驟1955中增量程式化計數器PC。於步驟1955 後,該過程循環回至步驟1925以施加下一 Vpgm脈動。 出於例證及說明之目@,上文已對本發明進行了詳細說 明。本文不帛欲包羅無遺《將本發明限制於所揭*之精確 形式。根據上文之教示亦可作出許多種修改及改變。所述 實施例之選擇曰在最佳地解釋本發明之原理及其實際應 用藉以使其他熟習此項技術者能夠以適合於所構想具體 121185.doc -46 - 1336081 應用之各種實施卿式及❹各種似來最佳地利用本發 月本發明之範缚意欲由隨附申請專利範圍來界定。 【圖式簡單說明】 圖1係一 NAND串中之俯視圖。 圖2係NAND串之等效電路圖。 圖3係NAND串之剖視圖。 圖4係一 NAND快問儲存元件陣列之方塊圖。 圖5係一非揮發性記憶體系統之方塊圖。 圖6係一非揮發性記憶體系統之方塊圖。 圖7係一繪示一感測塊之一實施例之方塊圖。 圖8圖解說明-記憶體陣列組織成所有位元線記憶體架 構之塊之組織形式之實例。 圖9圖解說明一記憶體陣列組織成奇偶記憶體架構之塊 之組織形式之實例。 圖10繪示一實例性臨限電壓分佈組。 圖11繪示一實例性臨限電壓分佈組。 圖12A-C顯示各種臨限電壓分佈並闡述一用於程式化非 揮發性記憶體之過程。 圖13係一在程式化期間施加至非揮發性儲存元件之控制 閘極之實例性波形。 圖14圖解說明一臨限電壓隨溫度及字線位置之變化。 圖15a係一解釋在讀取/驗證操作期間某些波形之行為之 時序圖,其中將經溫度補償之電壓施加至所有非選擇字線 並施加至兩個選擇閘極。 121185.doc •47· 1336081 圖15b繪不圖15a之時序圖,其中根據字線位置將不同之 經溫度補償電壓施加至選擇字線。 圖16係一解釋在讀取/驗證操作期間某些波形之行為之 時序圖,其中將經溫度補償之電壓施加至除直接鄰近選擇 子線之子線以外的所有非選擇字線,並施加至兩個選擇閘 極0 圖17係一解釋在讀取/驗證期間某些波形之行為之時序 圖’其中選擇字線直接鄰近一源極側選擇閘極。 圖18係一解釋在讀取/驗證期間某些波形之行為之時序 圖’其中選擇字線直接鄰近一汲極側選擇閘極。 圖19係一流程圖,其闡述一用於程式化非揮發性記憶體 之過程之一實施例》 【主要元件符號說明】 100 電晶體 100FG 浮動閘極 100CG 控制閘極 102 電晶體 102FG 浮動閘極 102CG 控制閘極 104 電晶體 104CG 控制閘極 104FG 浮動閘極 106 電晶體 106CG 控制閘極 121185.doc .48 1336081 106FG 浮動閘極 120 電晶體 120CG 控制閘極 122 電晶體 122CG 控制閘極 126 汲極端子 128 N+摻雜層 130 N+摻雜擴散區 132 N+摻雜擴散區 134 N+摻雜擴散區 136 N+摻雜擴散區 138 N+摻雜擴散區 140 p井區 150 NAND 串 204 源極線 206 位元線 286 記憶體裝置 298 記憶體晶粒 300 記憶體陣列 310 控制電路 312 狀態機 314 晶片上位址解碼器 315 溫度補償控制 316 功率控制模組 121185.doc -49- 1336081 318 線 320 資料匯流排 330 解碼器 330A 列解碼器 330B 列解碼器 350 控制器 360 解碼器 360A 行解碼器 360B 行解碼器 365 讀取/寫入電路 365A 讀取/寫入電路 365B 讀取/寫入電路 370 感測電路 372 匯流排 380 感測模組 382 位元線鎖存器 390 共用部分 392 處理器 393 輸入線 394 資料鎖存器 396 I/O介面 400 感測塊 1250 臨限電壓分佈 1300 波形 121185.doc -50- 1336081Right to step 1935, it is determined that not all data latches store logic "1" and the stylization process continues. In step 1945, the stylized counter pc is checked against the stylized limit value PCmax. An example of a stylized limit value is twenty, but other quantities can be used. ^ If the stylized count Pc is not less than PCmax, the stylization process has failed and is reported in the step, failure status. If the stylized counter PC is less than pCmax Then, the Vpgm level increases the step size and increments the counter PC in step 1955. After step 1955, the process loops back to step 1925 to apply the next Vpgm pulse. For illustrative purposes and description @, above The present invention has been described in detail. The invention is not limited to the precise form of the present invention. Many modifications and changes can be made in accordance with the teachings above. It is a good idea to explain the principles of the present invention and its practical application so that other skilled practitioners can make the best use of the present invention in various implementations suitable for the specific application of the specific 121185.doc -46 - 1336081 concept. The invention is intended to be defined by the scope of the accompanying claims. [Simplified Schematic] Figure 1 is a top view of a NAND string. Figure 2 is an equivalent circuit diagram of a NAND string. Figure 4 is a block diagram of a non-volatile memory system. Figure 6 is a block diagram of a non-volatile memory system. Figure 7 is a block diagram of a non-volatile memory system. A block diagram of one embodiment of a sensing block is illustrated. Figure 8 illustrates an example of an organization of memory blocks organized into blocks of all bit line memory architectures. Figure 9 illustrates a memory array organized into An example of the organization of blocks of a parity memory architecture. Figure 10 illustrates an exemplary threshold voltage distribution group. Figure 11 illustrates an exemplary threshold voltage distribution group. Figures 12A-C illustrate various threshold voltage distributions and illustrate A process for staging non-volatile memory. Figure 13 is an exemplary waveform of a control gate applied to a non-volatile storage element during stylization. Figure 14 illustrates a threshold voltage versus temperature and word line. Figure 15a is a timing diagram illustrating the behavior of certain waveforms during a read/verify operation in which a temperature compensated voltage is applied to all unselected word lines and applied to two select gates. 85.doc •47· 1336081 Figure 15b depicts a timing diagram of Figure 15a in which different temperature compensated voltages are applied to the selected word line depending on the word line position. Figure 16 is an illustration of certain waveforms during a read/verify operation. A timing diagram of the behavior in which a temperature compensated voltage is applied to all unselected word lines except for the sub-lines directly adjacent to the selected sub-line, and applied to the two select gates. FIG. 17 is an explanation for reading/verification. Timing diagram of the behavior of certain waveforms during which the selected word line is directly adjacent to a source side select gate. Figure 18 is a timing diagram explaining the behavior of certain waveforms during read/verify 'where the selected word line is directly adjacent The gate is selected on one side of the pole. Figure 19 is a flow chart illustrating an embodiment of a process for staging non-volatile memory. [Major component symbol description] 100 transistor 100FG floating gate 100CG control gate 102 transistor 102FG floating gate 102CG control gate 104 transistor 104CG control gate 104FG floating gate 106 transistor 106CG control gate 121185.doc .48 1336081 106FG floating gate 120 transistor 120CG control gate 122 transistor 122CG control gate 126 汲 terminal 128 N+ doped layer 130 N+ doped diffusion region 132 N+ doped diffusion region 134 N+ doped diffusion region 136 N+ doped diffusion region 138 N+ doped diffusion region 140 p well region 150 NAND string 204 source line 206 bit line 286 Memory Device 298 Memory Die 300 Memory Array 310 Control Circuit 312 State Machine 314 On-Chip Address Decoder 315 Temperature Compensation Control 316 Power Control Module 121185.doc -49- 1336081 318 Line 320 Data Bus 330 Decoder 330A Column Decoder 330B Column Decoder 350 Controller 360 Decoder 360A Line Decoder 360B Line Decoder 365 Read/Write Circuit 365A Read/Write Circuit 365B Read/Write Circuit 370 Sensing Circuit 372 Bus Bar 380 Sensing Module 382 Bit Line Latch 390 Common Port 392 Processor 393 Input Line 394 Data latch 396 I/O interface 400 sensing block 1250 threshold voltage distribution 1300 waveform 121185.doc -50- 1336081
1310 1312 1320 1322 1330 1332 1340 1342 1350 1352 1410 1420 1430 1440 1450 A B B' C E 共用部分 驗證脈動組 共用部分 驗證脈動組 共用部分 驗證脈動組 共用部分 驗證脈動組 共用部分 驗證脈動組 線 線 線 線 線 狀態 狀態 狀態 狀態 狀態 121185.doc •51 ·1310 1312 1320 1322 1330 1332 1340 1342 1350 1352 1410 1420 1430 1440 1450 ABB' CE Common part verification pulsation group sharing part verification pulsation group sharing part verification pulsation group sharing part verification pulsation group sharing part verification pulsation group line line line state status Status Status Status 121185.doc •51 ·
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| US11/424,812 US7342831B2 (en) | 2006-06-16 | 2006-06-16 | System for operating non-volatile memory using temperature compensation of voltages of unselected word lines and select gates |
| US11/424,800 US7391650B2 (en) | 2006-06-16 | 2006-06-16 | Method for operating non-volatile memory using temperature compensation of voltages of unselected word lines and select gates |
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