TWI335842B - Method of applying adhesive to inside surface of pellicle frame - Google Patents
Method of applying adhesive to inside surface of pellicle frame Download PDFInfo
- Publication number
- TWI335842B TWI335842B TW97101600A TW97101600A TWI335842B TW I335842 B TWI335842 B TW I335842B TW 97101600 A TW97101600 A TW 97101600A TW 97101600 A TW97101600 A TW 97101600A TW I335842 B TWI335842 B TW I335842B
- Authority
- TW
- Taiwan
- Prior art keywords
- coating
- frame
- protective film
- application
- adhesive
- Prior art date
Links
- 239000000853 adhesive Substances 0.000 title claims description 13
- 230000001070 adhesive effect Effects 0.000 title claims description 13
- 238000000034 method Methods 0.000 title claims description 12
- 238000000576 coating method Methods 0.000 claims description 35
- 239000011248 coating agent Substances 0.000 claims description 31
- 230000001681 protective effect Effects 0.000 claims description 27
- 239000002904 solvent Substances 0.000 claims description 5
- 239000011230 binding agent Substances 0.000 claims description 4
- 238000012360 testing method Methods 0.000 claims description 4
- 239000002689 soil Substances 0.000 claims description 2
- 239000003795 chemical substances by application Substances 0.000 description 9
- 238000004519 manufacturing process Methods 0.000 description 7
- 239000004744 fabric Substances 0.000 description 6
- 239000007788 liquid Substances 0.000 description 6
- 239000000243 solution Substances 0.000 description 6
- 239000007921 spray Substances 0.000 description 5
- 238000012546 transfer Methods 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 3
- 239000000428 dust Substances 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 2
- 239000010410 layer Substances 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 238000001459 lithography Methods 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 230000002265 prevention Effects 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 241000345998 Calamus manan Species 0.000 description 1
- 229910052684 Cerium Inorganic materials 0.000 description 1
- 239000002313 adhesive film Substances 0.000 description 1
- 239000012790 adhesive layer Substances 0.000 description 1
- SHGAZHPCJJPHSC-YCNIQYBTSA-N all-trans-retinoic acid Chemical compound OC(=O)\C=C(/C)\C=C\C=C(/C)\C=C\C1=C(C)CCCC1(C)C SHGAZHPCJJPHSC-YCNIQYBTSA-N 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- GWXLDORMOJMVQZ-UHFFFAOYSA-N cerium Chemical compound [Ce] GWXLDORMOJMVQZ-UHFFFAOYSA-N 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000012895 dilution Substances 0.000 description 1
- 238000010790 dilution Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 238000001548 drop coating Methods 0.000 description 1
- 238000004880 explosion Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 239000006210 lotion Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 235000012950 rattan cane Nutrition 0.000 description 1
- 229930002330 retinoic acid Natural products 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 229960001727 tretinoin Drugs 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/62—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof
- G03F1/64—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof characterised by the frames, e.g. structure or material, including bonding means therefor
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Health & Medical Sciences (AREA)
- Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Epidemiology (AREA)
- Public Health (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007006903A JP4889510B2 (ja) | 2007-01-16 | 2007-01-16 | ペリクルフレーム内面への粘着剤の塗布方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200831196A TW200831196A (en) | 2008-08-01 |
| TWI335842B true TWI335842B (en) | 2011-01-11 |
Family
ID=39702969
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW97101600A TWI335842B (en) | 2007-01-16 | 2008-01-16 | Method of applying adhesive to inside surface of pellicle frame |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP4889510B2 (ja) |
| KR (1) | KR101339746B1 (ja) |
| CN (1) | CN101224456A (ja) |
| TW (1) | TWI335842B (ja) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011034020A (ja) * | 2009-08-06 | 2011-02-17 | Shin-Etsu Chemical Co Ltd | ペリクル収納容器 |
| JP5411666B2 (ja) * | 2009-11-19 | 2014-02-12 | 信越化学工業株式会社 | リソグラフィ用ペリクル |
| JP5314631B2 (ja) * | 2010-04-20 | 2013-10-16 | 信越化学工業株式会社 | ペリクルフレームの通気孔内壁に粘着剤を塗布する方法 |
| JP5743450B2 (ja) * | 2010-07-28 | 2015-07-01 | 株式会社東芝 | レチクルチャッククリーナー |
| JP5432855B2 (ja) * | 2010-08-04 | 2014-03-05 | 信越化学工業株式会社 | ペリクルの製造方法および装置 |
| JP5455871B2 (ja) * | 2010-11-17 | 2014-03-26 | 信越化学工業株式会社 | ペリクルの製造方法 |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61137948U (ja) * | 1985-02-19 | 1986-08-27 | ||
| JP2642637B2 (ja) * | 1987-08-18 | 1997-08-20 | 三井石油化学工業 株式会社 | 防塵膜 |
| JP3415683B2 (ja) * | 1994-09-05 | 2003-06-09 | 三井化学株式会社 | マスク保護装置のペリクル枠への保護膜の塗布方法 |
| JPH08173891A (ja) * | 1994-12-26 | 1996-07-09 | Toray Ind Inc | 塗膜の製造方法 |
| JPH09239976A (ja) * | 1996-03-05 | 1997-09-16 | Ricoh Co Ltd | インクジェットヘッドの接着剤塗布装置 |
| JP3115236B2 (ja) * | 1996-09-02 | 2000-12-04 | ホーヤ株式会社 | マスク保護部材の装着方法及びマスク保護部材付きマスク部材 |
| TW337002B (en) * | 1996-11-19 | 1998-07-21 | Mitsui Kagaku Kk | Pellicle |
| JP2001222100A (ja) * | 1999-12-03 | 2001-08-17 | Mitsui Chemicals Inc | ペリクル |
| JP4195550B2 (ja) * | 2000-12-27 | 2008-12-10 | 三井化学株式会社 | ペリクル |
-
2007
- 2007-01-16 JP JP2007006903A patent/JP4889510B2/ja not_active Expired - Fee Related
- 2007-11-28 KR KR1020070122173A patent/KR101339746B1/ko not_active Expired - Fee Related
-
2008
- 2008-01-16 TW TW97101600A patent/TWI335842B/zh not_active IP Right Cessation
- 2008-01-16 CN CN 200810002088 patent/CN101224456A/zh active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| KR20080067564A (ko) | 2008-07-21 |
| JP2008175874A (ja) | 2008-07-31 |
| TW200831196A (en) | 2008-08-01 |
| KR101339746B1 (ko) | 2013-12-11 |
| CN101224456A (zh) | 2008-07-23 |
| JP4889510B2 (ja) | 2012-03-07 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GD4A | Issue of patent certificate for granted invention patent | ||
| MM4A | Annulment or lapse of patent due to non-payment of fees |