1329621 九、發明說明： 【發明所屬之技術領域】 : 本發明係有關於一種模造玻璃（Molding Glass)之模仁 (Molding Die)」尤指一種保護膜為利用鈕（Ta)與釕（Ru)金屬 合金製作成之高精度或高軟化點玻璃模造鏡片使用的模仁者。 【先前技術】 按，高精度玻璃模造較為完整的實施，最早揭示於1974年 Eastman Kodak公司之美國專利第3, 833, 347號，而經過20多年 罾的研發歷程中，模仁之使用因應各種材f之開發及製程之成熟 化，約略可區分出幾個世代，由最早的非晶質碳、碳化石夕（Si i i⑽ Carbide ’ SiC)與氮化矽（SiliC0n Nitride ; 硬質陶瓷、 金屬、貴金屬材料、各種薄膜應用，乃至類鑽石薄膜（Diam〇ndLike Carbon，DLC)、硼化物陶瓷等。 又，模仁之適用性基本上須考慮到下列幾點：離型性，以 避免與玻璃產生反應、黏附現象；（2)足夠的硬度與機械強度，以 成形玻璃並避免表面刮傷；（3)高溫穩定性，以避免在模造氣氛中 φ發生分解現象與氣氛反應；（4)耐熱衝擊性，以忍受模造過程中的 …、4盾環，（5)可加工性，以加工形成特定光學面並考慮加工時間與 成本；（6)模仁壽命，延長模仁壽命可降低成本。 人而習知模造玻璃之模仁至少包括底材與其上一層保護膜之組 合結構，或是包括底材、一中介層⑽ffer Layer)與保護膜之組 合結構，其中’底材之材質包括不銹鋼、碳化矽和碳化鎢(Tungsten yarbide，WC)等，而增加一層中介層結構主耍係用以增加附著性， 或為求加工或成形容易；而保護膜之材質包括：非晶質碳，或破 化矽、氮化矽等硬質陶瓷，或貴金屬鍍膜等；其中，貴金屬鍍膜 又包括：以鉑銥合金（Pt-Ir)系列之貴金屬合金，或以銥 5 ③ 1329621 (Iridium，Ir)或釘（Ruthenium，Ru)為合金成份的貴金屬合 金，或在銥銖合金、銥釕合金系列之貴金屬保護膜中再添如氮化 • 鉻(CrN)、氮化組(Tantalum Nitride，TaN)、其他氮化物或氧化 紹等陶瓷成分。而上述各種模仁結構及技術係分別揭示於：美國 專利US 5, 538, 528，及中華民國公告編號345535、427957、 445242、457219及506946等專利案中，如：公告編號427957開 發鉑銥(Pt-Ir)合金，可以在57(rc使用2〇〇〇次以上；公告編號 445242、506946則使用含氮化鉻(〇ΓΝ)、氮化鈕(TaN)、其他氮化 物或乳化紹等陶瓷成分之鉉銖（Ir-Re)合金或銀釕（ir-Ru)合 9金，可以在6401使用3000次、Y〇〇〇c使用2000次。 〇 惟，實際製作時，因上述習知模仁結構皆具有一層含貴金屬 成^之保護膜，且其製程係使用濺鍍法製作，致所用靶材乃為價 格高昂之貴金屬，造成製作成本提高甚多，極不利於市場競爭。 【發明内容】 本發明之目的在於提供一種模造玻璃之模仁，其中該模仁係 於底材表面以濺鍍法濺鍍一層耐高溫的鈕（Ta)與釕（Ru)合金 籲來作為保護膜，藉以取代習用保護膜之貴金屬合金，以達到降低 模仁之製作成本’但仍可符合高精度或高軟化點玻璃模造鏡片所 使用之模仁要求者。 為達上述目的，本發明係提供一種模造玻璃之模仁，包括： -底材，以及位於該底材上之一保護膜，該保護膜之材質為组（Ta) 與釕（Ru)金屬合金且具有模造面，由模造面㈣出模造凹槽， 以作為模造玻璃之用。 較佳地，該底材之材質包括碳化鎢（WC)合金。 較佳地，該保護膜之鈕（Ta)與釕（Ru)合金中钽（τ&)為 ⑧ 1329621 較佳地，該保護膜之厚度為0.5〜1.0微米（vm) β 較佳地，該底材及該保護膜之間更設有一中介層。 較佳地，該中介層係由鉻(Cr)所製成。 較佳地主該中介層之厚度為0.1〜0. 2微米（_)。 為使貴審查委員對於本發明之結構目的和功 之了解與認同，魏合®示詳細說明如后。 【貫施方式】 術手照隨附之圖式來描述本發明為達成目的所使用的技 二而以下圖式所列舉之實施例僅為輔助說明，以利 貝審查委_解，但本案之技術手段並不限於所列舉圖式。 示第圖把财綱之模—賴，其係顯 之保護膜Γ〇。，、，壯1係依序包括—底材1G與堆疊於其上 底材=/=====研馳光，其中該 太撇〜7狄 (RU)金屬合金保護膜，其幢（Ta) 占，〜73%，且該保護膜2〇之厚度 :（Ta) 之間。該保護膜20上具有一模造面21，由該面0 ^ 模造凹=22，以作為模造玻璃之用。由AW 21疋義出- 素圖再其細示本㈣之模造_之模㈣剖面示 ^ ，、係為第二實施例。於圖二中，各 丁 同，故於此不再多加費述。盘第 虎句與圖-相 底姑1田〇f作時，首先將該底材10的表面研磨拋光，苴由 ⑧ 7 材10表面上形成一 t介層30,該尹介層3〇 ，議鍍之鉻⑹金屬，其厚度可為〇 可為以 1介層3〇之目的係在於增加該保_2 形成一保_ 2〇，該保護膜2G之材料係例如=加之上係 纽（Ta)與釕⑽金屬合金保護膜，盆中；法賤鍍之 膜2〇上具有-模造面21，由該 ^ °該保護 以作為模造_之用。 々面21疋義出-模造凹槽22， 或之保護⑽的模仁1 際壓造時之熱循環，每次1或2上，_ 測試期間保贱氣氣氛避持約130秒後降溫， 顯反應如霧化或掉膜。可得=之保護膜表面是否有明 NO. 1 43 NO. 2 58 NO. 3 38 NO. 4 27 NO. 5 62 NO. 6 43 NO. 7 43 保護膜 成分百分比厚度 釕钽微米 57 0.79 42 0.63 62 0.70 73 0.78 38 〇.68 5? 0.79 57 0.79 、測試條件 成分厚度60(TC，L-LAL13模造測試 鉻 鉻 路 鉻 鉻 鉻 微米 〇. 15 ~ 15 15 15 15 生命 >600 次 >1200 次 >600 次 >300 次 >600 次 >1800 次 <300 次 ⑧ 用乾果可知’本判愧仁表面㈣德護膜所使 2合金製成，但在触應U，本個敝之使“命m) 可達，本需求社，可大量降低製造縣，' η夺付σ同精度或南軟化點玻觀造鏡片所使用之模仁的要 "同技術領域中需推動量產時，確具可行性及競爭力。 …ί以上所述者’僅為本發明之最佳實補而已，當不能以之 發明所實施之範圍。即大凡依本發明申請專利範圍所作之 與修娜，皆應仍屬於本發明專利涵蓋之範圍β，謹請貴 審一委員明鐘，並祈惠准，是所至禱。 1329621 【圖式簡單說明】 圖一係繪示依照本發明模造玻璃之模仁的剖面示意圖，其係 . 顯示第一實施例；以及 圖二係繪示依照本發明模造玻璃之模仁的剖面示意圖，其係 " 顯示第二實施例。 【主要元件符號說明】 卜模仁 2-模仁 • 10-底材 20- 保護膜 21- 模造面 22- 模造凹槽 30-中介層1329621 IX. Description of the invention: [Technical field to which the invention pertains]: The present invention relates to a mold of Molding Glass, in particular to a protective film which utilizes a button (Ta) and a ruthenium (Ru). Metal alloys are made of high precision or high softening point glass molded lenses. [Prior Art] According to the relatively complete implementation of high-precision glass molding, it was first disclosed in US Patent No. 3, 833, 347 of Eastman Kodak Company in 1974. After more than 20 years of research and development, the use of mold cores has been adapted to various materials. The development of f and the maturity of the process can be roughly divided into several generations, from the earliest amorphous carbon, carbon monoxide (Si i i(10) Carbide ' SiC) and tantalum nitride (SiliC0n Nitride; hard ceramics, metals, precious metals Materials, various film applications, and even diamond-like films (Diam〇ndLike Carbon, DLC), boride ceramics, etc. Also, the applicability of the mold must basically take into account the following: release properties to avoid reaction with glass, Adhesion phenomenon; (2) sufficient hardness and mechanical strength to form glass and avoid surface scratching; (3) high temperature stability to avoid decomposition of φ in the molding atmosphere and atmosphere reaction; (4) thermal shock resistance, To endure the molding process, 4 shield ring, (5) processability, to form a specific optical surface and consider processing time and cost; (6) mold life, extend the mold Life can reduce the cost. It is known that the mold core of the molded glass includes at least a combination structure of the substrate and the upper protective film, or a combination structure including a substrate, a dielectric layer and a protective film, wherein the substrate is The material includes stainless steel, tantalum carbide and tungsten carbide (WC), etc., and an intermediate layer structure is added to increase the adhesion, or is easy to process or form; and the material of the protective film includes: amorphous Carbon, or hard ceramics such as ruthenium or tantalum nitride, or noble metal coatings; among them, precious metal coatings include: precious metal alloys in the platinum-ruthenium alloy (Pt-Ir) series, or 铱5 3 1329621 (Iridium, Ir) or nail (Ruthenium, Ru) is a precious metal alloy of alloy composition, or added to the precious metal protective film of bismuth alloy and bismuth alloy series, such as nitriding • chromium (CrN), nitrided group (Tantalum Nitride, TaN) ), other nitride or oxide ceramics. The above various mold structure and technology are disclosed in US Patent No. 5, 538, 528, and in the Republic of China Bulletin Nos. 345535, 427957, 445242, 457219, and 506946, such as: Announcement No. 427957 Pt-Ir) alloy can be used in 57 (rc is used more than 2 times; announcement number 445242, 506946 uses ceramics containing chromium nitride (〇ΓΝ), nitride button (TaN), other nitrides or emulsified Ingredients (Ir-Re) alloy or silver iridium (ir-Ru) and 9 gold can be used 3000 times in 6401 and 2000 times in Y〇〇〇c. 〇,, in actual production, due to the above-mentioned conventional mold structure Each has a protective film containing precious metal, and the process is made by sputtering method, so that the target used is expensive precious metal, which causes the production cost to increase greatly, which is extremely unfavorable to market competition. The object of the invention is to provide a mold for molding glass, wherein the mold core is sputtered on the surface of the substrate by sputtering a high temperature resistant button (Ta) and ruthenium (Ru) alloy as a protective film, thereby replacing the conventional use. Precious metal alloy for protective film In order to achieve the cost of reducing the manufacturing cost of the mold core, but still meet the requirements of the mold used for high precision or high softening point glass molded lenses. To achieve the above object, the present invention provides a molded glass mold comprising: - a substrate And a protective film on the substrate, the protective film is made of a group (Ta) and a ruthenium (Ru) metal alloy and has a molded surface, and the mold surface (4) is molded into a groove for use as a mold glass. Preferably, the material of the substrate comprises a tungsten carbide (WC) alloy. Preferably, the button (Ta) and the ruthenium (Ru) alloy of the protective film have a 钽 (τ &) of 8 1329621. Preferably, the protection The film has a thickness of 0.5 to 1.0 μm (vm) β. Preferably, an interposer is further disposed between the substrate and the protective film. Preferably, the interposer is made of chromium (Cr). The thickness of the interposer of the landlord is 0.1~0. 2 micrometers (_). In order to make the reviewer's understanding and approval of the structural purpose and merits of the present invention, Weihe® is described in detail as follows. The technique used in the present invention to achieve the purpose is described in the accompanying drawings. The embodiments listed in the following figures are only supplementary explanations, and the Libe review committee _ solution, but the technical means of the case is not limited to the listed figures. The figure shows the model of the financial system - the protection of the system Membrane Γ〇,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,, The building (Ta) occupies, ～73%, and the thickness of the protective film is 2: (Ta). The protective film 20 has a molding surface 21, and the surface is 0 ^ die concave = 22, as a molding For glass. It is represented by AW 21 - the prime diagram and the model (4) of the mold (4) are shown as ^, and the second embodiment is shown. In Figure 2, each is the same, so there is no need to add more details. When the first sentence of the plate and the figure-phase 姑1 1 〇 〇 f, the surface of the substrate 10 is first ground and polished, and a t-layer 30 is formed on the surface of the 8 material 10, and the yin layer is 3 〇, The plated chromium (6) metal may have a thickness of 〇. The purpose of the layer may be to increase the amount of _2 to form a _ 2 〇. The material of the protective film 2G is, for example, Ta) and bismuth (10) metal alloy protective film, in the pot; the ruthenium-plated film 2 has a mold-forming surface 21, which is protected by the mold for use as a mold. 々 疋 21 疋 模 模 模 模 模 模 模 模 模 模 模 模 模 模 模 模 模 模 模 模 模 模 模 模 模 模 模 模 模 模 模 模 模 模 模 模 模 模 模 模 模 22 22 22 22 22 22 22 22 22 22 Significant reactions such as atomization or film loss. Can be obtained = the surface of the protective film is clear NO. 1 43 NO. 2 58 NO. 3 38 NO. 4 27 NO. 5 62 NO. 6 43 NO. 7 43 protective film composition percentage thickness 钌钽 micron 57 0.79 42 0.63 62 0.70 73 0.78 38 〇.68 5? 0.79 57 0.79, Test condition Component thickness 60 (TC, L-LAL13 mould test chrome-chrome road chrome-chromium-chromium micron 〇. 15 ~ 15 15 15 15 Life > 600 times > 1200 times >600 times >300 times > 600 times > 1800 times < 300 times 8 With dried fruit, we know that 'the surface of the 愧 愧 ( 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 2 2 2 2 2 2 2 2 The "life m" is reachable, the demand society can greatly reduce the manufacturing county, 'η 夺 σ 同 同 同 或 南 南 南 南 南 南 南 南 南 南 南 南 南 南 南 南 南 南 南 南 南 南The production time is indeed feasible and competitive. The above is only the best practice of the present invention, and cannot be used to invent the scope of the invention. Xia Na, should still belong to the scope of the patent covered by the invention, β, I would like to ask a member of the Ming Dynasty, and pray for the right, is the prayer BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic cross-sectional view showing a mold core for molding glass according to the present invention, showing a first embodiment; and FIG. 2 is a schematic cross-sectional view showing a mold core for molding glass according to the present invention. , the system " shows the second embodiment. [Main component symbol description] Bu Moren 2-mold • 10-substrate 20 - protective film 21 - molded surface 22 - molded groove 30 - interposer