TWI328249B - - Google Patents

Description

IX. Description of the Invention: [Technical Field of the Invention] This is a process information management of process information for controlling information such as a semiconductor manufacturing device, a liquid, a panel manufacturing device, and the like. Device, etc. [Prior Art] There is a control line for controlling the overall maintenance of the manufacturing system to control the processing of the substrate to be processed, such as the semiconductor wafer JU, and to improve the overall maintenance of the manufacturing system (see Patent Document). The AGC (High T Group Controller) is connected to the control material and the system. The AGC is based on the centralized management of the processing device (process bar value) or the process control of each processing device based on the prescription. The analysis processing of all the process data obtained by each processing device, and the analysis of the analysis result or the process (4), the monitoring of the statistical results, and the statistical results are reflected in the prescription. In this control system, all the process data obtained from each processing device or its analysis result can be found, and the abnormality or deterioration state of the processing device is found in more detail and early. The information management device (for example, the feeding device device of the group management system constituting the process of managing the complex half-k device) of the conductor Hesheng sells, and = indicates the steps in the steps of (10) or more constituting the two prescriptions. Features. In recent years, with the large-scale manufacturing system of semiconductor wafers or liquid crystal panels, the processing of such as _ ',,,,,,,,,,,,,,,,,,,,,,,, The requirements of most processing devices such as processing (process) are indispensable for the management of up to dozens of devices and control devices. [Patent Document 1] Japan特开平1丨_丨6 7 9 7 public pole (etc.) only, the first picture [invention content] [invented to solve the problem]

In addition, in order to make the processing device operate correctly, it is necessary to check the main prescription on the side of the process information management device included in the control system: the difference between the certain protection level and the other prescriptions. However, in the prior device, there is a problem that when the difference between the prescriptions of the main prescription and the prescription is presented, only the steps (10) or more constituting the two prescriptions are the same or different. Therefore, the user of the Process Information Management Department ################################################################################## Specifically, for example, in the previous control system, it is possible to compare

Wherever the plurality of control devices are connected, the control device is connected at the time and exists on the control device, and can access the control device from the process information management device. However, although the focus is not on the comparison object, the previous control The system cannot know the reason for the inability to compare (the control device is offline, the control device is connected but the prescription does not exist, or there is no access to the control device, etc.). In addition, it is possible to simultaneously compare the two points of the representation to two, and to manage up to dozens of processing sensors in a single unit, it is not yet possible to know at the same time that the main prescription is beneficial to the one being used by other control devices. . [Technical means to solve the problem] 120409.doc 1328249 The process information management of the present invention is the same as that of the human plus. The device includes: more than 4 prescriptions in the prescription storage unit, which will control more than 1 J. And the storage is the standard prescription, and the main prescription of the card is stored. The control of the above-mentioned ones or more is performed on one or more of the special treatments of the substrate to be processed. Controlling the similarity and dissatisfaction information acquisition unit held by the control device held by the control device on the treatment device of the 4th position of the dream, the pendulum μ, +, , 7, and .丨 就 就 就 虚 虚 虚 虚 虚 虚 虚 虚 虚 虚 虚 虚 虚 虚 虚 虚 虚 虚 虚 虚 虚 虚 虚 虚 虚 虚 虚 虚 虚 虚 虚 虚 虚

The information on the similarities and differences of prescriptions is related to the same kind of similarities and differences between the three types of L · β s π — ', η # # in the 1 ... similarities and tributes to the round of the 'more than the above two The mother's prescription will be taken from the Chengkegu s η^ 乂 肘 上 上 上 上 上 上 上 上 上 上 上 上 上 上 上 上 上 上 上 上 上Ding <Wu Wen's Poverty [Embodiment] In the following, the process information management device % Ba $ + clothing is applied to the form of the process. In the embodiment, the same components are denoted by the same reference numerals, and the description thereof will be omitted. Figure 1 is a conceptual diagram of a control system of the present embodiment. The control system is a system for manufacturing a device such as a control conductor t-making device or a liquid crystal panel manufacturing device. Further, the control system has (10) or more of the processing device 11 (from the processing device 11 (1) to the processing device u (4)), and the Hgl or higher control device! The control device 12(1) to the control device 12(n)) and the process information management device 13 are taken. The processing device 11 is a device that performs a specific process for the substrate to be processed. More specifically, the processing device U is a manufacturing device such as a semiconductor manufacturing device or a liquid crystal panel manufacturing device. The processing device π performs various processes on the substrate to be processed, such as a film forming process, a dicing process, and a thermal oxidation process. The processing apparatus ^ 120409.doc 1328249 is an example of a device manufacturing apparatus for a composite process type semiconductor wafer manufacturing apparatus. As shown in Fig. 4, this is not the case. The semiconductor wafer manufacturing equipment is equipped with the h τ part and is composed of: 'for film processing, surname processing, etc.' Such as 3) process room, 2, 3. storage d, emulsification treatment, etc. (such as the round box w1, C2 combination - spoon storage multiple pieces (such as 500 animal husbandry) crystal wind to 4 '5' and in the process The chambers 1, 2, and 3, and the transfer of the wafer W are carried out between the chambers 5 and 5, and the main valleys are connected to each other via the gate valve G. The transfer chamber 6 has the flexing and extending motion and the rotating motion. For example, the multi-joint type transfer arm 7 is used to carry the crystal 0W between the chambers by the transfer arm 7. The boxes C1 and C2 are reversed when they are taken into the respective 4th Shishida to the 4th and 5th. At 90 degrees, at the same time, the wafer insertion/removal σ of the cassettes d and C2 is rotated so as to be oriented toward the center of the transfer chamber 6 to be able to carry in and out of the transfer arm 7 (4). Further, the control device is a device for controlling the processing device. Usually, the tooling (10) should be set. The control device 12 stores information about the special process of the substrate to be processed (usually a collection of process condition values). The treatment device (4) is controlled by the prescription. The control device 12 includes, for example, an ECC control unit that is a higher-level control system of each processing device 11, and an MC (machine controller) that is a lower-level control system of each processing device u. In these cases, the ecc control is For example, the logical interface mechanism of the process information management device unit 13 is: Remote Agent Prosess, and the RAp transmits and receives various data between the process information management device and the process information management device! 3. Further, the processing device h and the control device 12 can be integrated or separated. The process management device 13 is, for example, a servo device constituting a so-called group management system. I20409.doc 1328249 - Fig.: A block diagram showing the composition of the process information management device. The hole management device 13 includes an accepting unit 131, a user information storage unit (1)' prescription error storage unit 133, a prescription similarity information acquisition unit (3), a similar and identical information output 135, a control device information storage unit m, a prescription receiving unit (1), and a prescription. The storage unit 138 and the detailed output unit 〖3 9: The owed party, the same information acquisition unit 134 has the similarity and acquisition unit U41, and the absence of the Beixun payment mechanism 1342 The information acquisition organization ^, can not output the information acquisition agency 1344. . . , the Ministry of Arts and Sciences 13 accepts the user from the user. 4t ^ day or user information. The instruction of the second prescription is the prescription designation: no similar information The indications are the same or different information output indications. When two or more outputs are used to indicate different meanings, the details used for the same point are thousands of gp疰* Μ山^U is not a single output instruction, etc. The prescription designation instruction and The right prescription identifier can also be used. In this case, the position is 8 ^ a ^ , and the prescription heart is marked as 已 /, with the same prescription identifier, work? The location of the second system and the φ virtual square. In addition, the prescription designation instruction can also be used for this product. There are more than two prescription identifiers. Under this "prescription, the prescription designation instruction is the two or more prescription identifiers that have been designated... 曰... 2 以 仃 之 士 士 士 识别 识别 识别 识别 识别 识别 识别 识别 识别 识别 识别 识别 识别 识别The group of passwords. The detailed output refers to the instructions of the user, for example, the user or the user. In this case, 钤τ匕3, for example, the main prescription and one prescription, The main prescription and the heart-shaped 4 input mechanism can be transmitted from the external device by means of a digital key, a keyboard, a mouse or a face-to-face, etc. The receiving unit 131 has a receiving mechanism of 120409.doc 1328249. The receiving unit 13 is driven by a device driver such as a digital key or a keyboard, and a function #蚩; -& λ. The user's information storage department, user information, etc., of the control software or communication mechanism. The user's capital accepts the ... hole storage ° Ρ 132 suitable for use in RAM and other volatilization

Sex recording media, but @L 虚士 " Dish 4 non-volatile recording media can also be achieved. The prescription storage unit 133 stores the main prescription and one or more prescriptions (non-master prescriptions). The prescription refers to the information on the spears of the spears held by the control device 12 above 1 m ^ ^ ^, the specificity of the above one or more of the substrates... ♦ the two-unit device 12 controls the execution of the processed handles 11 By. Here, the prescription is process information in the command string for controlling the process other than the prescription. In the prescription storage unit 13 3, the prescriptions are stored separately.舲冰 ^ The prescription knife is stored corresponding to the control device 12

Heart: The prescription can be information that is desired by the person corresponding to one of the control devices 12. In addition, the main prescription may not be fixed. It can also be prescribed by the creator #日疋. It is suitable for non-volatile recording, -, but it can also be realized by volatile recording media. = square ^ poor news acquisition department 134! 2 or more of each place ==: About the main prescription and - (heart about! The similarities and differences of information. In addition, the prescription ^ in the news is more than one of each prescription in the same capital: the acquisition department 134 Applicable to the main prescription and the control device information storage information described later corresponds to more than one of the two or more control devices in the system of one or more of the first-order devices. Get the heart is J Song test connected to the network

12〇4〇9.dOI 1328249 More than m control devices, and take information on each of the above prescriptions. The above-mentioned similarities and differences information is about the similarities and differences between the main prescription and the prescription of the above (10) control I. The above similarities and differences ^ ^ in the information about a similarity and similarity. The similarity and dissatisfaction information may take 3 _, 汛 '王μ工I value 〇 3 以上 or more value refers to any of the following information: the same information that is the same side of the comparison is the same information (such as the value "〇"), indicating that it is compared The different information of the prescription is different information (such as value %), non-existent information indicating that the compared party does not exist (for example, the value "2"), indicating that it corresponds to the compared party, and the process information management The device 13 is in a state of useless communication (for example, the value "3") in a state in which communication is impossible, and indicates that the information cannot be obtained and the information cannot be output (for example, the value "4"). Similarities and differences information usually ^ = ask Beixun, different information. More than three types of similarities and differences are the same information and one or more other similarities and differences. The other one or more similarities and differences have to be accepted:::; The prescription similarity information acquisition unit 134 usually takes the same prescription as the main prescription other than the prescription, and the similarity and the same information that has been accepted or not specified by the main prescription. In addition, do not ask for 2 prescriptions everywhere::: break method. The prescription similarity information acquisition unit 134 generally compares the details (contents) of one or more steps of the two prescriptions, and judges that the two prescriptions are the same, and that even one of the process conditions is not prescribed. Same information as different information (as a prescription). In addition, the prescription: the pupil-receiving section 134 does not compare the contents of the prescription, but compares two of the same items, (update date or updater, etc.), even if the attribute value has one value, the reference is similar. Information as a different piece of information. By comparing the situation of the similarity and the same information, it is possible to speed up the processing. The prescription is different from 20409. (100 1^528249 = 2 parts 134 can usually be realized from MPU or memory, etc. The processing procedure of the software 2 acquisition unit 134 is usually realized by software, and the body 6 has been recorded in ROM and the like. In the media, it is, (dedicated circuit) to achieve... can also compare the main prescription content with the main prescription by hardware = ΓΙ_1341 (for example, the value "〇', :=:: is the same or different, Obtaining the same information often has one::Second (for example, the value of the step on the prescription overnight refers to the set of the process conditions value „ 枉剌α 枉剌 processing device 11 dry value. The similarity acquisition mechanism 1341 recall The processing procedure for obtaining the molybdenum s threshold, the hanging j攸^^1, or the § software, and the silver similarity obtaining mechanism 1341 is usually recorded in a recording medium such as a ROM by the software 5. However, The method is implemented by hardware (dedicated circuit). No = information acquisition unit 1342 determines that the similarities and differences are not in existence. 1 · η pa fine + δ δ ί1 withdrawal mechanism 342, for example, when accepting two prescription acceptance instructions, 'judgment and Identifying the prescription designation means not including If there is a faulty part 133 in the corresponding place of the square identifier, when it is judged that there is no existence; if the value is "2"), the old stocking unit 133 is obtained, and the non-existent information obtaining means 1342 is obtained through the MPU or the memory. The body is not realized. The processing of the private order of the information acquisition unit 1342 is usually wrongly performed by the software. However, it can also be recorded by the H body in a recording medium such as a surface. The circuit can be implemented. Unable to pass the "Information Acquisition Agency" 3 4 丨 _~ ^ A.... Is the communication with the control device 12 available for the month & s..., when communicating with the law, when the communication is obtained by one (four) method, it is accused When the control device is set to 2 or the control device 12 is not connected, i20409.doc -J3 - 1328249 is connected to the network, etc. The communication can be judged by the well-known technology, so the detailed description is omitted. The communication information acquisition mechanism (10) cannot be obtained from the MPU or the memory, etc. The processing program of the communication information acquisition unit U43 cannot be realized by software, and is also used in a recording medium such as a ROM. ' Implementation. ww 1 basket (disgrace circuit) is not available. The information acquisition unit 1344 determines the user of the process information device 13 by using the user information stored in the user information storage unit 132 by the receiving unit 1343. If it is a user who cannot obtain the similarity and dissipation information = the user who obtains the similarity and dissence information, 'can't output the information. ^The output information obtaining unit 1344 stores, for example, the user information that can obtain the similarity or more 1 'determine the storage (10) The information is stored in the user information storage unit 132. If the user information is not present, the product cannot be output because the information cannot be output (for example, the value $). The information acquisition unit U44, for example, stores sufficient information for each prescription or control device to store the information and uses the eclipse. One or more users of the beta hole judge the information and the user information received, the user, (10)... the flight control device transmits the similarity and the same information to the user who cannot be identified by the user information. Information will be displayed when the user of the news is poor. Unable to take out the information acquisition agency. From the ~ method, etc., it can be realized from the MPU or the memory. Unable to output information is often achieved by software. The software records: = 344 program pass Yes, it can also be recorded in R〇M and other recording media. Hunting is also implemented by hardware (dedicated circuit). I204Q9.doc • 14. Similarities and Differences Information Roundup 卬.丨135 is the mother's prescription, and the prescriptions obtained by the prescription department 134 and the door are acquired. Do not ask for similar information. Regarding the similarities and identities, the rounds of the situation are here: 'Outputs include the back force'. ,,······························································ The transmission of the sound and the recording to the recording media. The similarity and output of the information of Qiu M ^ Accumulation 4 can not be considered to include the display 芎 _ b, can also be considered not to enter the s π robbery wheel out of the installation 3. The similarity and the same information output unit 135 can be configured to drive the software, and the wheel 3 is driven by the driving software and output of the wheeled output device. The control device information storage unit 136 stores information about the device. More than one control device information. Control device information = identification control device 12 or (4) device 12. The control device information storage unit 136 is suitable for using non-volatile recording media, but can also be used for secondary recording media. The J 7 error is received by the prescription receiving unit 137 from the control device 12. The prescription receiving unit (7) receives the prescription from the control device U at the timing when the respective control devices 12 update the prescription. In this case, the control device 12 includes: Prescription a prescription update receiving unit; an update prescription update unit; a prescription update update detection unit; and a prescription update detection unit that transmits the prescription to the process information management device when the prescription update is detected. Further, the control device 12 Of course, the control unit based on the prescription control processing device is provided. However, the prescription receiving unit m can also periodically communicate with the control device 12 to obtain a prescription, etc. That is, the prescription receiving unit 137 does not ask for the timing of receiving the prescription. The prescription receiving unit 137 usually borrows It is realized by a wireless or wired communication mechanism, but it can also be realized by a mechanism for receiving broadcasts. The prescription storage unit 38 stores the place where the prescription receiving unit m accepts in the prescription storage unit and the prescription storage unit. 138-pass f corresponds to the delivery of the prescription: = 12' is stored in the prescription storage unit 137 where the prescription is stored in the prescription 2: 2 corresponds to the control device 12 where the accumulation 'means, for example, the control of the H-device Device information and prescriptions are paired and accumulated. Prescription a sub-WM38 can usually be realized from MPU or memory, etc. Prescription ΓοΓ, etc. The processing program is usually implemented by software. The software is recorded on the current 4 recording medium. However, the hardware (dedicated circuit) can also be used to obtain and output the specified information in the real output unit 139. Different information, that is, different information in steps. No step = information output form. The processing of the detailed output unit 139 is implemented by software. The software is recorded on a dirty recording medium: the display includes a display to the display, a nematic The concept of the printing of the printing machine, the outward 139, and the storage to the recording medium, etc. The detailed output unit may be included as an output device such as a display, and may not be included. The detailed wheeling unit 139 may be provided by the output device. It is realized by driving the software, or outputting the moving software and outputting the skirt. The device 2 is the process information management device from the flowcharts of Figs. 4 to 6 (step S401). The accepting unit 131 determines whether or not the rounding has been accepted. If the input is accepted, the process proceeds to step S4〇2, and if the input is not accepted, the process proceeds to step state (step 84〇2). The fork unit 131 determines whether the input accepted in step S401 is 120409.doc •16·1328249 is the user. News. If it is user information, then step (4) is passed, and if it is not user information, then step S404 is reached. (Step S403) The accepting unit 131 stores the user information 2 accepted in step 〇1 in the user information storage unit 132. In addition, it can also be used by the user to perform authentication processing. In addition, detailed descriptions are omitted because of the well-known techniques of the certification office. Returning Step (Step 4) The accepting unit 131 determines whether or not the input accepted in the step (4) is a prescription specifying instruction. If the instruction is specified for the prescription, the process proceeds to step S, and if the prescription is not specified, the process proceeds to step S4. (Step S405) The output means (not shown) acquires and temporarily stores the prescription identifier. The output mechanism change not shown in the figure f is represented by, for example, the identifier of the place identifier identified by the step identifier. Example _ Get the square identifier to indicate that it is compared with the other two, and it is expressed in a conspicuous manner (aggregation). In addition, it is assumed that the input prescription designation means that , , , and are lists of other identifiers. In addition, for example, two or more pieces of information indicating that one or more pieces of control device registered can be read by the device in step S405 are not shown in the figure. The symbol list loses the "identifier" to output the illusion. Go back to step S401. (Step S407) The accepting unit 131 determines whether or not the round-trip information output finger-to-acceptance rounding is S4〇8, and if it is not the same as the round-up output, the processing proceeds to step S409. J20409.doc 1328249

(Step S4〇8) The prescription is different from the caution 1 A The poor reception unit 134 and the similarity and the same information output unit 5 perform the similarity and the same information output processing. The similarity and the same information output processing will be described later using the flowchart of Fig. 5. Go back to step s4〇i. (Step S409) The receiving unit 13] main „ '1 1 31 determines whether the input accepted in step S401 is a detailed output instruction. If the detailed output instruction is in step (4), if the instruction is not detailed, the process proceeds to step S4. 〇1. /Step S41〇) The detailed output unit 139 performs detailed output processing. The detailed=output processing will be described later using the flowchart of Fig. 6. The returning step (Step S4(1) The prescription receiving unit 137 determines whether or not the control device n is connected. If the prescription is received, the process proceeds to step S412. If the process is not received, the process proceeds to step S401. (Step S412) The prescription storage unit 138 integrates the location of the storage unit Π3. The prescription accumulation unit 138 generally corresponds to In order to identify the control (four) information received by the control device 12 of one party, the prescription is accumulated. Return to the step IS 4 〇 1 〇 In addition, in the flow circle of FIG. 4, for example, user information can be accepted, and authentication processing is performed for authentication. At the time of permission, the user information is temporarily stored, and (10) the above control device information is read out from the control device information material portion 136, and the party identifier and the main prescription corresponding to the read one or more control device information are provided. The identifier is displayed in the form of a list. Further, the prescription designation instruction has two or more prescription identifiers of two or more prescription identifiers (including identifiers) outputted in the list form. In the two or more prescription identifiers outputted in the form of a list, two J20409.doc -18-1328249 or more prescription identifiers are indicated by a mouse or the like. Further, in the flowchart of Fig. 4, 'by power off or insertion processing Finally, the processing is terminated. Next, the similarity information output processing of step 84〇8 will be described using the flowchart of Fig. 5. (Step S501) The prescription similarity information obtaining unit 134 performs initial processing. The initial processing refers to, for example, information from the control device. The storage unit 136 reads out the processing of the control device information, and the control device information retains the location identified by the location identifier in step $. In addition, the initial processing also includes the generation of the counter 1i. In addition, when the prescription identifier is not taken in step S405, the step-gm-under, m acquisition unit 134 can also read out all prescriptions of the control device Beixun storage unit 136. The system ST and the ST prescription similarity information acquisition unit 134 determines whether or not the first prescription (the first control (four) setting information) exists. If S 503 'If the third party does not save the oyster, the step ##盥主_t to Step S524. In addition, the i-th prescription of the i-th prescription J is in the square of the object (step S503), and the user can read the user from the user's caution storage unit 132. Information. The user's resource storage wheel::::: one use is one of the bad to the i-th prescription =: the use identified by taking the user information (step S505) if the step "(9) in S508, if not If the access is sufficient, the process proceeds to step S506. (Step S506) Unable to lose the information acquisition mechanism (10) can not output information by using the similarity and dissimilar information as J20409.doc 1328249. Specifically, it is not possible to output the information obtaining means (10), for example, to substitute the variable "similar and identical information" for the information that cannot be rotated. (Step (10)) The prescription acquisition unit (10) counts (4) plus}, and returns to step S502. (Step S508) The communication information cannot be obtained. The navigation device 1343 obtains the control device information corresponding to the i-th prescription. (Step S509) The communication information can be obtained from the control device information obtained in step S508, and the control device and process information management identified by the information of the Dingjitian control device are acquired and 罟η, x, 展, exhibition The communication state obtaining unit 1 343 issues a "Di τρ T Plng ΙΡ address" command, for example, and obtains a communication value of the control device and the process information management device 13 by obtaining a return value. (Step S510) The communication information acquisition unit 1343 determines whether or not the communication state acquired in the step (for example, the return value of step S5〇9) is in an uncommunicable state. If the communication is not possible, the process goes to step S5, and if the communication is not possible, the process goes to step S512. (Step S511) The communication information acquisition unit 1343 cannot use the similarity and the like information as the communication information. Specifically, the communication information acquisition unit 1343, for example, substitutes the variable "similar and identical information" with the information that cannot be communicated. Go to step 85 〇 <^ (step S512) The non-existing information obtaining unit 1342 reads the second prescription. (Step S513) The non-existence information obtaining unit 1342 determines whether or not the second prescription exists. If the first prescription exists, the process goes to step S515, and if the i-th prescription does not exist, the process goes to step S514. (Step S5 14) The non-existence information obtaining means 1342 regards the similarity and dissimilarity information as non-existence information. Specifically, the non-existing information obtaining means 1342 is, for example, changed to 120409.doc -20, -, and is funded. Fl" substitution does not exist information. Go to step 85〇7. (Step S5 15) The similarity obtaining means 1341 reads out the main prescription identifier of the main prescription from the prescription storage unit 133, and the main prescription identifier is included in the prescription designation. (V-S516) The similarity obtaining means 1341 substitutes the counter for the counter (step S517). The difference obtaining means 1341 determines whether or not the J/th is present in the first prescription. If there is a jth step on the right, then go to the step "Η, if there is no step", then go to step S522. ^Step S5 18) the similarity obtaining mechanism 1341 reads the "step" in the prescription and corresponds to the step (having The second step of the main prescription of the same step identifier) compares the information of the two steps. Further, when the step corresponding to the main prescription of the jth step does not exist, the comparison result is that the comparison result in the step "Μ is different. I step S519) the difference obtaining mechanism (9) determines whether the comparison result in the step s5i8 is the same If it is phase@', then to step S520, if not, the process goes to step S521. (Step S520) The similarity obtaining means increments the count^, and returns to step S517 (step S521). 〗                                 Go to step S5〇7. ’, . G kicks S522) The similarity obtaining mechanism 1341 determines whether there is a step of comparing the difference between the prescription or the master prescription. If there are steps that are not similar, then step 8521, there is no step that is not similar in the right, then to step I20409.doc 21 S523. : (Step S523) The similarity obtaining means 1341 uses the similar and identical information as the same information. Specifically, the similarity obtaining means 1341 substitutes, for example, the same information to the variable "similarity". Go to step §5〇7. (Step S524) The exclusive @information output unit 135 rotates the difference between the main prescription and the compared η on the prescription to the one or more prescriptions. Go back to the upper function. Can: In addition, in the flow chart of Figure 5, do not ask for the output of the similarities and differences of prescriptions. In addition, the processing procedure when obtaining five kinds of similarities and differences information is not limited to the above processing private order. However, the above processing procedure is preferred. The reason is that the above-described processing private sequence is a judging procedure for speeding up processing. The detailed round-off processing of step 10 will be described next using the flowchart of Fig. 6. (Step S601) The detailed output unit j ^: hour factory, /, upper _ (step S602) The detailed output unit 139 determines whether or not the indicated place is the first step. Right with the first! If yes, go to step MM and return to the upper function if there is no step. One step (Step S603) The detailed output unit 139 reads the first indicated portion and the Mu i corresponding to the main prescription of the step (step S6G4). The detailed output unit 139 determines that the information of the two steps is the same. The right two are the same' to step S6〇5 / S606. ~ To step 120409.doc • 22-1328249 (step S606) The detailed output unit 139 performs the rounding out in a different manner from the step of displaying the _ gamma and the step i of the no-spot. (Step S607) The detailed output unit 139 will count the hammer s6Q2. . ^ Plus 1. Returning step In addition, in the flowchart of Fig. 6, it is the same. Regardless of the similarities and differences of the steps of the rounding, in addition, in the flow chart from Fig. 4 to Fig. 6, the borrowing is specified by the prescription.

Specify the main prescription for the decision at the same time, but you can also use . In this case, the main prescription has been predetermined in advance in response to the prescription. Hereinafter, the specific operation of the process information management device in the present embodiment will be described. Fig. 7 is a conceptual diagram of a control system including a process information management device. The control system includes a process information management device 13, a client terminal 101, control devices (El, E2, E3, E4, E5, and E6) and processing devices (from 卩丨 to %) corresponding to the respective control devices. In this control system, control unit E3 is not currently connected to the network.

Further, the location storage unit n3 of the private information management device 13 holds the location management table shown in FIG. The prescription management table has attributes such as "m", "prescription identifier", "control device information", "prescription group", "editor", "update date" and "version". "ID" is the information that identifies the record and exists for the record management in the table. The "prescription identifier" is here the prescription name. "Control device information" is the name of the control device that the prescription is used for. In addition, one prescription is specified by "prescription identifier" and "control device information". The "prescription group" is the attribute value of the prescription, indicating the group. The "Editor" is the information identifying the last editor's information "Update Period" is the last period of the last update prescription, "Version 120409.doc -23 · 1328249" indicates the version number of the prescription. Further, although not shown in Fig. #133, the step of storing the 蕤Α+-prescription storage 畀with the prescription identifier and the "special designation of the control device S" is performed. The body of the prescription. Further, the prescription assumption includes a control pack management table stored in the control device information storage unit 136 in Fig. 9. Control device information management table and the property of Beixun's name "has iD" control installation information. "Control Device Information" is the name of the control device that the prescription is used for. Further, the control device information stored in the control device information storage unit 136 can be regarded as the attribute value "control device information" of Fig. 8. In addition, FIG. 10 is a management information management table that cannot be rotated by the information acquisition mechanism (10). User (4) f management table intention M = person's process # 信管理装置13's boarding permission ^ permission time. In addition, the user authentication information management table is used to determine the location corresponding to the control device that the user can access. The user authentication information management table has the attributes "m" "user identifier", "password" and "control device information". "Make User ID" is the username. The "password" "user identifier" is used together to determine the login permission/non-permission (authentication processing) to the process information management device 13. The "control device information" is control device information corresponding to the user who can be output by the user identified by the "user identifier". The "control device information" may be referred to as information indicating that the user identified by the "user identifier" can output, or may be referred to as information corresponding to the control device capable of outputting. It is assumed that in this case, the user of the client terminal 1-1 substitutes the user identifier "Tanaka" and the password "〇912", and attempts to log in to the process information management device 120409.doc '24· 1328249 1 3, and then the process information The accepting unit 131 of the management device 13 receives the user information (user identifier "Tanaka", password "〇912"), and then the process information processing device 13 performs the level card processing and determines the mechanism by a mechanism (not shown). For the approval of the license, the license is posted from the client terminal 101 to the control device 13. This is the information management user information (user identifier "Tanaka", password "〇912") from Figure 1G. In addition,

The program information management device 暂时3 temporarily stores the user information (user identifier "T_ka", password "0912") in the user information store 132. Then, the process information management device 13 reads out the "prescription identifier" of the location management table of Fig. 8 and performs unique processing to obtain a non-repeating _: location identifier. On the other hand, in the case of "1", the process information management device " has a list of one or more prescription identifiers that are not heavy: to the client terminal ι〇ι, and the client terminal 101 displays the prescription list as shown in FIG.

Then, the user identified by the user identifier "Tanaka" is designated by the user to designate the prescription identifier "RCP1" from the client terminal 101, and the "similarity information rotation" button is pressed. Then, the accepting unit 131 of the process information management device 13 accepts the similarity and output information output instruction of the "RCP1". Then, the prescription similarity information acquisition unit 134 searches the record including the control device information from the location management table of FIG. 8 to obtain the temporary table of FIG. 12, wherein the control device information is recognized by the prescription identifier “Rcpi”, and In the "control device information" table 120409.doc -25- of the control device information storage unit 136, in the temporary table of Fig. 12, the prescription is different from the deer "Beet acquisition unit 134 assumes that it is known to correspond to "ID= The record of 1" is of course also available to the user. In addition, the main department then compares the prescriptions of the same information acquisition department "s Γ liver main prescription and corresponding to the record from D = 2" to the chest.

First of all, it corresponds to the "ID=2" record of the 锸 锸 step + Shi Taisi η record. In other words, the same, the same as the Beixun acquisition unit 134 corresponds to the control located by the "mountain 4 ^ : control device ...": the second is determined by the user identifier "Tanaka" Whether the identified user can access it. That is, it is judged from the user authentication information management table of the figure whether or not there is a record in which the user identifier "T_ka" is paired with the control device information "E1". Here, since the user identifier and the control device information "E1" are generated in FIG. 10, the attacking and matching information is recorded.

!34 determines that the user identified by the user identifier "Tanaka" can access the control device corresponding to the control device identified by the control device information %". Then, the prescription similarity information acquisition unit 134 determines whether or not it is possible to communicate with the control device identified by the control device information "E1". Here, in the case of FIG. 7, the prescription similarity information acquisition unit 134 determines that communication is possible. Then, the prescription similarity t-sending unit 134 determines whether or not the entity (e.g., the case) that is identified by the prescription identifier "RCP1" and the control device information "E1" exists in the prescription storage unit 133. Here, it is assumed that the entity identified by the prescription identifier "RCPlj, control device information "El" 120409.doc -26 - 1328249 exists. Then, the prescription similarity information acquisition unit 134 remunates the entity (for example, a file) of the main prescription from the prescription health department, and identifies the entity (for example, the file) by the prescription identifier "foot (3)" and the control device information "E1". Further, it is judged whether or not all the steps of the two prescriptions are the door + 丨. Here, it is assumed that the prescription exception acquisition unit 134 determines that the contents of the two prescriptions (scheduled cases) are completely the same. Further, the similarity obtaining means 1341 corresponds to the borrowing The difference between the prescription identifier RCP/" and the control device information "扪" and the identification information")"), because it is judged whether two prescriptions and prescriptions contain one or more files) is the same processing can be performed by well-known techniques However, the detailed description is omitted. Then, the processing corresponding to the record of "ID=3" is processed. Here, the similarity obtaining means 1341 substitutes the similarity and information corresponding to the identification by the prescription identifier W and the control device information %" (for example, ": 'below' corresponds to wide ID=4" Here, the user who is identified by the user identifier "Tanaka" can access the control device that is identified by the control device "p ^ /θ 任 E3j, but cannot communicate s The control device identified by the control device information "Ε3" is not connected to the network by the mechanism 1343. Further, the communication information acquisition unit 1343 is not controlled by the prescription identifier "Rcpi". The information similar to the device information "E3" is identified as "no news". In addition, since the detection of whether the device is connected to the network can be implemented by the well-known technique, the detailed description ❶ 120409.doc -27- 1328249 is omitted, and the processing corresponding to the record of "ID=5" is processed. . Here, it is assumed that the user identified by the user identifier "Tanakaj can access the control device identified by the control device information "E4j, and the control device identified by controlling the device "E4j" is connected to In addition, it is assumed that the prescription is present in the prescription storage unit 133 by the prescription identifier "RCP1 control wear" and the "E4". However, it is assumed that the similarity obtaining means 1341 determines that the prescription is different from the main prescription by the prescription identifier "R(3)" and the control device information "£4". This hypothesis is similar to the difference between the two prescriptions obtained by the agency continent. From the left, due to the difference, it is judged that the two prescriptions are different. In these cases, the similarity and acquisition mechanism calls the "different information (for example, "1") to the information corresponding to the identification of the party identifier "RCPlj, control device information "E4". Then, it corresponds to the "ID=6j record location processing. Here, it is assumed that the user identified by the user identifier "Tanaka" can access the control device by "P < - ^ . The control device identified by E5j is connected to the network by the control device identified by the control device and the information "E5". However, it is assumed that the prescription identified by the prescription identifier "RCP1" and the control device information "Μ" does not exist in the prescription storage unit 133. Under these conditions, there is no asset acquisition: the institution 1342 determines that the similarities and differences are not present and obtains no information. Also, gp, $古+: owed, the sub-information obtained by the information obtaining unit 1342 to the information corresponding to the identification by the prescription "RCP1" and the control device information "E5" is substituted for "non-existent information (for example, " 2")". Then, it is processed corresponding to the record of "ID=7". Here, the user who is not able to output the corruption obtaining unit 1344 by the user identifier 120409.doc • 28· 1328249 ―" can not control the device by the control device information "Ε6". () Access is made, so it is impossible to output Beixun. In addition, the 'unable to output f-acquisition mechanism 1344' to the information that is identified by the prescription identifier "RCP1丨, 批丨丨"" control device - Beixun E6" is substituted for "cannot output information (such as " 4")". The ...S " /, and the ^ hole output unit 135 outputs the similarity and dissatisfaction information received by the prescription similarity information acquisition unit 134 to each prescription. The output of the similarity and difference information output unit (1) is as shown in Fig. 13, for example. In Fig. 13, the result of the main 虔.Γ is "Master". In addition, in Figure 13, the words "Same" are output when the similar information is the same information, and the message "Same" is output when the information is different information.

Diffe cuts t", when the similar information is non-existent information, it outputs "_ 告"... Tian: When the same information is unable to communicate, "Offline" is output, and the similar information is output. "Disable" is output when the message is not output. . In addition, it is assumed that the similarity and the same information output unit 135 does not output part of the attribute value of the prescription when the field "beauty is a non-existent information, cannot pass k M sfL, and cannot output the information of . . . In Fig. 13, the attribute value of "Edit ^ φ" update period "Version" is not output. This is the output of the η 讯 讯 * 存在 存在 存在 存在 存在 存在 存在 存在 存在 存在 存在 存在 存在 存在 存在 存在 存在 存在 贝 贝 贝 贝 贝 贝 贝 贝 贝 贝 贝 贝 贝 贝 贝 贝 贝 贝 贝 贝 贝 贝 贝 贝 贝 贝 贝 贝 贝The output 135 will be the information from the information wheel of Figure 12, which is not appropriate. The output of the round U is not, then, the user is assumed to be dry. Mindfulness, look at the output of Figure 13, and enter the details.砰 轮 指示 指示 控制 控制 控制 指示 指示 」 」 」 」 假设 假设 假设 假设 假设 假设 假设 假设 假设 假设 假设 假设 假设 假设 假设 假设 假设 假设 假设 假设 假设 假设 假设 假设 假设 假设 假设 假设 假设 假设 假设 假设 假设 假设 假设 假设 假设 假设 假设 假设 假设 假设 假设 假设 假设 假设 假设 假设The details of the differences between the parties to the different information (identified by E4). Then, the reception unit 131 accepts the detailed output instruction including "... After the iron, the detailed output unit 139 reads the main prescription (where the identification is confirmed by AGC_Rcp) and the similarity and dissence information is the information (the identification is made by E4) ), 2 corresponding steps, obtain and output different information of the steps. These output examples are not shown. In Figure 14, the left side of the screen is the list of steps. The column of the network line indicates that there are two steps in the recipe. In the middle, the "step C" / step 〇 is different. In addition, the process conditions of the right-hand side's step of focusing (the step value, etc. indicated by the arrow on the right side of the face) indicate that the process conditions with the network cable are specific to different process conditions. Wait. In Fig. 14, "-..." is different. According to the process information management device of the present embodiment, the user can obtain and output the same and different values of the same as the other than the other state, and the user can correctly know that the two prescriptions are not in the same place. No;:7: The user can know in more detail that the two prescription states are compared to the "master:: the control taken/Λ/multiple numerical control (four) is placed, and it is possible to know that offline access rights exist in the control. The device and the undirected control device are placed in a situation where there are dozens of control devices in the semiconductor manufacturing plant, and it is effective to protect these control devices and the processor. More specifically, the use of the line, for example, the inaccessible information, the entry or the user login (intended to obtain the registration of the rotation permit) 120409.doc -30- - A outside user's The user who has determined that the communication cannot be communicated is 'the user who has contacted the control device in order to make the control device that handles the prescription into the communication mode L' or instructs the user to activate the control device 2. In addition, the user is determination If there is no information that does not exist, for example, the latest prescription is copied. Further, the user copies the latest prescription for the different information determined to be different from the prescription. Further, in the specific example of the embodiment, the user It is of course possible to operate directly from the client terminal. The processing in this embodiment can also be implemented by software. Moreover, the software can also be downloaded by software or the like. In addition, the software may be recorded on a CD-level recording medium for transmission, and the method is also applicable to other embodiments of the present specification. Further, the software of the process information management device in the present embodiment is implemented. The program is to program the computer to store more than one location corresponding to more than one control device, and store the main prescription as the reference prescription. The substrate specifically processes the information about the process held by the above-mentioned H-solid control device of the U or more processing devices; and The following steps are performed: obtaining the similarity and similar information obtaining step for the above-mentioned one or more prescriptions, and the information of the similarity and difference is related to the difference between the main prescription and the one or more prescriptions, and there are three or more similarities and differences. The information about the L similarities and differences; and the step of outputting the similarities and differences of the information obtained by the above-mentioned prescription similarities and differences information acquisition steps. 120409.doc -31 · " (4) #式uto make the computer enter the step of accepting the prescription from the above control device, and at least part of the prescription is acceptable in the above-mentioned prescription acceptance step. In addition, the storage is about the aforementioned! For the information of more than one control device, the information of the above control device is requested, and the above-mentioned prescription similarity information in the above program is obtained by step: the main prescription and the above-mentioned (10) or more control skirt information are indicated by one or more control devices. It is better to describe one or more prescriptions for each of the one or more prescriptions of the above-mentioned prescriptions by L &; Α. = Bu, in the above program, the above-mentioned similarities and differences information can obtain the same information indicating the same information and similarities with the former ^ prescription, the different information indicating the different information of the _, Shimen, and the table is not broken. The presence information exists, indicating that the control device corresponding to the compared party and the process information management device cannot communicate... The method of communication, or the method of outputting the information of the user who is not able to transmit the information to the similarity and the like Any of the information in the information, θ Beixun, narration of the similarities and differences of the information acquisition steps to have the following steps is better: than the 'comparable side of the inside - 丨 逑 逑 逑 逑 逑 逑 逑 逑 逑 逑 逑Within the valley, it is judged that the two prescriptions are the same or different information or different information does not exist. The non-existence information of the non-existent information is judged whether it can be related to the aforementioned control device. Unable to communicate with the user's information about the operation of the user of the Rosie Counseling Management Device, based on the user's information If you are not able to get a message, you can't get a message. ^:丨Sm owes the user of the similarity and confession to the helmet. When the user of the similar information is used, ... 120409.doc -32- 1328249 The message is as follows: In addition, the program is as follows: The computer is further executed to accept the acceptance of two or more prescriptions including the main prescription. In the step of obtaining the similarity and the same information, the information of the above-mentioned designation and the above-mentioned prescriptions that have accepted the prescription are different from the one or more prescriptions other than the main prescription. In addition, in the above-mentioned various embodiments, In the above, each processing (each function) can be processed by a single device (system) in a centralized manner, or can be realized by distributed processing by a plurality of devices. In addition, in the above program, the step of receiving the transmission or receiving The steps of the information do not include processing by hardware, for example: the dream in the transmission step

Processing by a data machine or interface card or the like (processing by hardware only). In addition, the computer that executes the above program can be either singular or plural. That is, 'either centralized processing or distributed processing. Further, in each of the above embodiments, there are two or more of the above-described overnight devices, and of course, it is also possible to physically implement the media by one type of media. The present invention is not limited to the above embodiments, and various modifications may be made without departing from the scope of the invention. In addition, the detailed description of the Japanese Patent Application No. 2006-124733, which is filed on April 28, 2008, is not included in the scope of the patent application. It is included in this disclosure. [Industrial Applicability] As described above, the yg# 43⁄4 is a device of the present invention capable of correctly understanding the different meanings of the two prescriptions, J20409.doc • 33 - 1328249 A process information management device that can be used as a process information, that is, information on control of a processing device such as a semiconductor manufacturing device or a liquid crystal panel manufacturing device, that is, process information. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a conceptual diagram of a control system in an embodiment. Fig. 2 is a view showing an example of the semiconductor wafer manufacturing apparatus. Fig. 3 is a block diagram showing the construction of a process information management device. # Figure 4 is a flow chart for explaining the operation of the δHai process information management device. Fig. 5 is a flow chart for explaining the similarity and the same information output processing. Fig. 6 is a flow chart for explaining the detailed output processing. Figure 7 is a conceptual diagram of the control system. Fig. 8 is a view showing the prescription management table. Fig. 9 is a view showing the control device information management table. Fig. 10 is a diagram showing the user authentication information management table. Fig. 11 is a view showing the process information management device. • Figure 12 shows a diagram of the prescription management table. Fig. 13 shows a diagram of the output example. Fig. 14 is a view showing the output example. [Main component symbol description] 1, 2, 3 Process chamber 4, 5 Box chamber 6 Transfer chamber 7 Transport arm Cl ' C2 box 120409.doc • 34 - 1328249 G Gate valve W Wafer 101 Client terminal El to E6 Control device PI ~ P6 processing device 11 (1) to ll (n) processing device 12, 12 (1) to 12 (n) control device 131 receiving unit 132 user information storage unit 133 prescription storage unit 134 prescription similarity information obtaining unit 135 similar and identical information output Unit 136 Control device information storage unit 137 Prescription receiving unit 138 Prescription storage unit 139 Detailed output unit 1341 Different matching unit 1342 Non-existing information obtaining unit 1343 Unable to communicate information acquiring unit 1344 Unable to output information obtaining unit 120409.doc .35-

Claims (1)

Patent Application No. 1. A process information management device, comprising: a system for storing and storing one or more places corresponding to one or more V, storing and storing as a reference prescription The main prescription, one or more of S Hai # ^ 控制 respectively control the execution of the specific processing of the substrate to be processed, and one or more of the above-mentioned one or more control devices hold the information about the process; Directly with the information acquisition department's the above-mentioned! Each of the prescriptions has two = two similarities and is related to the above-mentioned main prescription and the above-mentioned 1 information about the similarities and differences between the two: the second series of three or more similarities and differences In the second Hi round-out section, the similarities and differences information obtained by the prescription different-door information acquisition unit is rotated for each of the aforementioned prescriptions. 2. The process information management apparatus according to 1, wherein the method further comprises: a two-party receiving unit that receives the prescription from the control device; and wherein the virtual portion of the prescription storage unit receives the prescription. At least one part of the above-mentioned prescription is received. 3. According to the process information management of claim 1, the one or more control acquisition units that store the information about the above-mentioned control device Before the main prescription*; Zou and the aforementioned prescription similarities and differences information description device information storage department: [a: control device information corresponding to the above n prescription acquisition. . Menbei, as mentioned above! More than 120409.doc For the process information management device of claim 1, the information about the similarities and differences can obtain any of the following information: The same information 'is expressed in comparison with the aforementioned main prescription The similarities and differences are the same information; different information 'its information that is different from the above-mentioned main prescriptions; there is no information 'there is no comparison between the two sides; ', ', French communication § information 'its representation Corresponding to the control device of the compared party: the process information management device is in a state in which communication is impossible; or..., the method outputs information, which is expressed as information of a user who cannot obtain similar information; And the same as the agency, which compares the content of the above-mentioned main prescription with the content of the above-mentioned comparison, and judges that the two prescriptions are the same or different, and obtains the same information or different information; The difference between the similarities and differences does not exist, the information does not exist; the communication information cannot be communicated, can't Said control means ° f left foot not take paternity communication information; ^ and use information obtaining means which receives the user information on moxibustion only poor information 'user based on the resource information of the user, is not. Is it a situation where the user who cannot obtain the information/clear to the same information cannot be obtained, such as the process information management device of claim 1, wherein 39.doc 包含 contains 8249 prescriptions for the main prescription The prescribing department of the prescribing department has obtained the prescribing and dissatisfaction information acquisition department that has accepted the above-mentioned designation of the main prescription: the “different information of the prescriptions specified by the above prescriptions.” 6. The computer-readable recording medium of the program, The program is used to make more than one or more of the control devices corresponding to the i or more control devices and store them as the main prescription of the reference prescription, and the one or more parties are to control the execution of the needles of the processed device or more, ... The special treatment of the board 1 The information of the process is processed; ... the above control unit is kept closed and the following steps are performed: 2:=:::%', each of the above prescriptions is fixed above The difference between the above-mentioned main prescription and the above-mentioned news about 1 similarity and 1 yuan. 'The relationship between the three kinds of similarities and differences ~ Beixun; and similarities and differences information output steps, 苴The same information acquiring step: on each of the said 'of the similarities and differences between the acquired information output the prescription prescription 120409.doc.