1327735 九、發明說明： 【發明所屬之技術領域】 本發明係涉及一種陽極裝置及其製造方法，尤其涉及 一種具有透明導電膜的陽極裝置及其製造方法。 【先前技術】 按’陽極裝置於陰極射線管（CRT)、場發射顯示（1?肋） 透射電子顯微鏡（TEM)、場發射照明光源等器件中有著肩 泛的應用’該陽極裝置储由陰極裝置發射的電子爲= 置於其上的螢絲層而發光。傳朗陽極裝置包括一透^ 玻璃元件、於透明玻璃元件表面形成的透明導電膜以及友 透明導電膜上沈積形成的螢光粉層。其巾，透料電膜夺 通過磁控賤射的方法於玻璃表面蒸鑛氧化銦锡㈤^ Tin (bade，ITO)膜而形成，該方法雖可大批量生產陽相 裝置’惟其所需的生産材料及製備過程的成本均較高。 有馨於此，财必要提供—種製備過程較為簡單、致 率較高、成本較低的陽極裝置之製造方如 造的陽極裝置。 表 【發明内容】 下面將藉由實施例進—步詳細說明—種陽極裳置及1 製造方法，觸縣置之製造方法㈣備過_單、易^ 刼作、成本較低且具有較高的效率。 一種陽極裝置之製造方法，包括： 製備奈米碳管漿料； 提供—玻璃元件，將褽備後的奈米碳管漿料於玻璃元 7 1327735 件的表面形成一奈米碳管衆料層； 將奈米碳管漿料層烘乾； 於奈米碳管漿料層上形成一螢光粉層，以及 將形成有奈米碳管漿料層及螢光粉層的玻璃元件於氮 氣或惰性氣體的保護下加熱至300〜50(rc並保溫—定的時 間，再降至室溫’從而於玻璃元件的表面形成奈米碳管透 明導電膜及螢光粉層進而得到陽極裝置。 與先前技術相比較，本發明陽極裝置之製造方法中藉 由不米石厌官漿料與玻璃表面間吸附作用於玻璃元件上形成 奈米碳管漿料層並將其加熱從而於玻璃元件上形成所需的 奈米碳管透明導電膜，製備過程簡單、易於操作、成本較 低且具有較高的致率；同時，本實關陽極裝置的 電膜由奈米碳管薄膜形成，因奈米碳管具有良好的導 性’故而·料賴具錄好的導電性能 陽極裝置的使用性能。 9加5亥 【實施方式】 下面將結合附圖對本發明陽極裂置及其製造方法 一步之詳細說明。 下進 、請參閱圖1 ’本實施例陽極裝置之製造方法係主要勺 括以下步驟： 匕 步驟（一），製備奈米碳管製料。 内的主要包含有機載體及分散於有機載體 内’轉米碳管轉之製備方法包括以下 製備有機載體； 8 1327735 ㈤該有機載體爲混合劑，包括作爲溶劑的松油醇、作爲 的少夏鄰本一甲酸二丁酯及作爲穩定劑的少量乙基 ^維素。錢韻之製㈣料：於祕加熱及攪拌的條 件下將乙基纖維素溶解到松油醇中；以及，加人鄰苯二甲 酸-丁酿於同樣油浴加熱的條件下持續娜—定時間即可 ϋ到有機載體。其中，優選地，松油醇、乙基纖維素及鄰 本一甲酸二了 g|於混合劑中的質量百分比分麟爲繁、 及5% ;加熱溫度爲80〜110°C，最優加熱溫度爲HHTC ; 持續__爲闕怖最優持續祕時間爲24小時。 將粉末狀奈米碳管於二氣乙院溶液中用破碎機分散後 再進行超聲分散形成奈米碳管溶液； 、其中，奈米碳管可預先通過化學氣相沈積法、電弧放 電法或鐳賴發法等傳統技術製備，奈米碳管長度優選爲。 卜100微米，最優地’長度約爲1G微米；奈米碳管直徑優 選爲H00納米。奈米石炭管與二氣乙烧的比例優選爲：每 ，米碳管需要約500毫升的二氣乙烷。破碎機分散的 ,優選爲5〜30分鐘，最優時間爲2〇分鐘；超聲分散的 時間優選爲10〜40分鐘，最優時間爲3〇分鐘。 過濾奈米碳管溶液； 其中，奈米碳管溶液可選用篩網過濾，最優地，選用 4〇〇目的篩網過濾奈米碳管溶液從而可得到具有優選直徑 及長度的奈米碳管的溶液^ 將過濾後的奈米碳管溶液加入有機載體中並充分分1327735 IX. Description of the Invention: The present invention relates to an anode device and a method of manufacturing the same, and more particularly to an anode device having a transparent conductive film and a method of manufacturing the same. [Prior Art] According to the 'anode device' in the cathode ray tube (CRT), field emission display (1? rib) transmission electron microscope (TEM), field emission illumination source and other devices have shoulder-panel applications 'the anode device is stored by the cathode The electrons emitted by the device are = the layer of the filament placed thereon to emit light. The radiant anode device comprises a transparent glass member, a transparent conductive film formed on the surface of the transparent glass member, and a phosphor powder layer deposited on the transparent conductive film. The towel, the dielectric film is formed by vaporizing the indium tin oxide (B)^ Tin (bade, ITO) film on the surface of the glass by a magnetron sputtering method, and the method can produce a positive phase device in large quantities. The cost of producing materials and preparation processes is high. In this case, it is necessary to provide an anode device such as an anode device which has a relatively simple preparation process, a high yield, and a low cost. Table [Summary of the Invention] The following is a detailed description of the embodiment by the embodiment - a kind of anode skirting and 1 manufacturing method, the manufacturing method of the county is (4) prepared for _ single, easy ^ 刼, lower cost and higher s efficiency. A method for manufacturing an anode device, comprising: preparing a carbon nanotube slurry; providing a glass element, forming a carbon nanotube bulk layer on the surface of the glass element 7 1327735 after preparing the carbon nanotube slurry; Drying the carbon nanotube slurry layer; forming a phosphor layer on the carbon nanotube slurry layer, and forming the glass element forming the carbon nanotube slurry layer and the phosphor layer in nitrogen or inert Under the protection of the gas, it is heated to 300~50 (rc and kept for a certain period of time and then lowered to room temperature) to form a carbon nanotube transparent conductive film and a phosphor powder layer on the surface of the glass element to obtain an anode device. According to the technique, in the method for manufacturing an anode device of the present invention, a carbon nanotube slurry layer is formed on a glass member by adsorption between a non-stone anisotropic slurry and a glass surface, and heated to form a glass member. The required carbon nanotube transparent conductive film has simple preparation process, easy operation, low cost and high yield; meanwhile, the electric film of the anode device is formed by a carbon nanotube film, and the carbon nanotubes are formed. Has a good guide The performance of the anode device of the conductive performance is recorded. 9 plus 5 hai [Embodiment] The anodic cracking of the present invention and the manufacturing method thereof will be described in detail below with reference to the accompanying drawings. Fig. 1 'The manufacturing method of the anode device of the present embodiment mainly comprises the following steps: 匕Step (1), preparing a nano carbon control material. The inner part mainly comprises an organic carrier and is dispersed in an organic carrier. The preparation method comprises the following preparation of an organic vehicle; 8 1327735 (5) The organic vehicle is a mixture comprising terpineol as a solvent, dibutyl phthalate as a minor and a small amount of ethyl sulphate as a stabilizer. Qian Yun's system (4): Dissolve ethyl cellulose into terpineol under the conditions of secret heating and stirring; and, add phthalic acid-butyl to the same oil bath to heat the condition The organic carrier can be obtained in a time. Among them, preferably, the mass percentage of terpineol, ethyl cellulose and ortho-formic acid di-g in the mixture is 5%, and the heating temperature is 80. ~110° C, the optimal heating temperature is HHTC; the continuous __ is the optimal duration of stagnation for 24 hours. The powdered carbon nanotubes are dispersed in the Erqiyiyuan solution by a crusher and then ultrasonically dispersed to form a nanometer. The carbon tube solution; wherein, the carbon nanotube tube can be prepared by a conventional technique such as chemical vapor deposition, arc discharge or radium ray, and the length of the carbon nanotube is preferably 100 μm, optimally 'length It is about 1G micron; the diameter of the carbon nanotube is preferably H00 nanometer. The ratio of the carboniferous tube to the second gas is preferably about 500 ml of di-ethane per meter of carbon nanotubes. 5 to 30 minutes, the optimum time is 2〇 minutes; the time of ultrasonic dispersion is preferably 10~40 minutes, and the optimal time is 3〇 minutes. Filtering the carbon nanotube solution; wherein the carbon nanotube solution can be sieved Net filtration, optimally, a 4 mesh screen is used to filter the carbon nanotube solution to obtain a solution of a carbon nanotube having a preferred diameter and length. The filtered carbon nanotube solution is added to the organic vehicle and Full score
JtL · ， 9 1327735 其中，可_超聲震蕩將奈米碳f溶液於 時間優選爲3°分鐘。奈米碳管二 中的奈未破官與有機載體的質量比優選為15:卜 得到有奈米碳管溶液的有機載體直到 、有口適/辰度的奈米碳管漿料爲止。其中，齐来石山势 製料中奈米碳管的濃度可影響所得到的奈米碳管透明= 光性缺導電m漿射奈輕管的濃度較高 日得到的奈米碳管透明導電膜的透光率較低而導電性能 較好，反之’當漿料中奈米石炭管的濃度較低時，得到的太 t碳管透明導電_透光率較高而導電性能較弱。優ί 地’當於上述製備過程中選用2克奈米碳管、約咖毫升 的：：乳乙院及奈米碳管與有機載體的質量爲15 : 1時，於 將’昆有奈米碳管溶液的有機载體蒸發得到200 笔升的奈米碳管漿料。其中，水浴加熱溫度優選為9(TC。 =(一提供一玻璃元件，將上述製備後獲得的夺 未=漿料於玻璃元件的表面形成—奈米碳料料層，、 攄^中杜於玻璃元件表面形成奈米碳管衆料層的方法依 的形狀而不同，如，當需要於平板玻璃的一側 表面形成透料電_，軸奈米 置於敵，内;=璃 衆料中；勾速提出平板玻璃，藉 料==於重叠?璃兩相對表面各形成-奈米碳管漿 碳管“二=璃官内壁形成透明導電膜時，形成奈米 水科層的方法爲：將玻璃管一端封閉並將玻璃管的封 10 1327735 閉鈿向下豎直放置，將奈米碳管漿料倒入玻璃管内；打開 玻璃官的封閉端’奈米碳管紐藉由重力作用自然流下， 邛为奈米碳官漿料藉由吸附作用於玻璃管内壁上形成奈米 碳管漿料層。形成奈米碳管_層的過程應於潔淨的環境 内進行’優選地，環境内的灰塵度小於1000 mg/m3。 步驟（三），將奈米碳管漿料層烘乾使得奈米碳管漿料 層固定於玻璃元件表面。 步驟（四）’於奈米碳管漿料層上形成一螢光粉層。 其中’形成螢光粉層的方法可選用塗敷、沈積、絲網 印刷等傳統技術，縣粉層的材料可根據需要翻單色營 光材料或多元色營光材料。 步驟（五）’將形成有奈米碳管漿料層騎光粉層的玻 璃元件於氮氣或惰性氣體的保護下加敏3⑽:5G『c並保 溫-定的時間，再降至室溫，從而於玻璃元件的表面形成 奈米碳管透明導電膜及勞光粉層進而得觸極裝置。 其中，加熱溫度優選爲32(rc，保溫時間優 鐘。 明JtL · , 9 1327735 wherein, the ultrasonic vibration can be used to treat the nanocarbon f solution at a time of preferably 3 ° minutes. The mass ratio of the Neflon and the organic carrier in the carbon nanotubes 2 is preferably 15: The organic carrier having the carbon nanotube solution is obtained until the carbon nanotube slurry having a suitable/length of the mouth is obtained. Among them, the concentration of the carbon nanotubes in the Qilai Shishan potential material can affect the transparency of the obtained carbon nanotubes. The transparent carbon nanotube transparent conductive film obtained by the high concentration of the photoreceptor The light transmittance is lower and the conductivity is better. Conversely, when the concentration of the nano-carbon tube in the slurry is low, the obtained t-carbon tube has a transparent conductivity and a high transmittance and a weak conductivity.优 地 地 'When the above preparation process uses 2 grams of carbon nanotubes, about cc:: The quality of the milk and the carbon nanotubes and the organic carrier is 15:1, The organic carrier of the carbon tube solution was evaporated to obtain 200 pens of carbon nanotube slurry. Wherein, the water bath heating temperature is preferably 9 (TC. = (one provides a glass element, the obtained after the above preparation = the slurry is formed on the surface of the glass element - the nano carbon material layer, 摅 ^中中The method of forming the carbon nanotube bulk layer on the surface of the glass element differs depending on the shape, for example, when it is required to form a dielectric material on one side surface of the flat glass, the shaft nanometer is placed in the enemy, and inside; Hook speed to propose flat glass, borrowing material == on the opposite surface of the glass; the opposite surface of the glass is formed - the carbon nanotubes carbon tube "two = the inner wall of the glass official to form a transparent conductive film, the method of forming the nano water layer is: Close one end of the glass tube and close the glass tube seal 10 1327735 vertically, pour the nano carbon tube slurry into the glass tube; open the glass terminal's closed end 'nano carbon tube button by gravity naturally Under the flow, the nano carbon official slurry forms a carbon nanotube slurry layer by adsorption on the inner wall of the glass tube. The process of forming the carbon nanotube layer should be carried out in a clean environment. The dust degree is less than 1000 mg/m3. Step (3), the nano carbon The slurry layer is dried to fix the layer of the carbon nanotube slurry on the surface of the glass element. Step (4) 'forming a phosphor layer on the layer of the carbon nanotube slurry. The method of forming the phosphor layer can be Using traditional techniques such as coating, deposition, screen printing, etc., the material of the county powder layer can be turned into a monochromatic camping light material or a multi-color camping light material as needed. Step (5) 'There will be a carbon nanotube slurry layer ride The glass element of the powder layer is sensitized with nitrogen or inert gas 3(10): 5G 『c and kept for a certain period of time, and then cooled to room temperature, thereby forming a transparent conductive film of carbon nanotubes on the surface of the glass element. The powder layer further has a contact device. The heating temperature is preferably 32 (rc, the holding time is excellent.
請參閱圖2，藉由上述方法製造之陽極裂置1〇包括— 玻璃元件20、形成於玻璃元件表面上的透明導電膜以 及形成於透明導電膜上㈣光粉層4G。其中，透胺 30爲奈米碳管薄膜。玻璃元件的形狀依據該陽極裳置:、 料同而不同，如，當陽極裝置制於場發射平板顯顿 術B守’玻璃兀件爲玻璃板；當陽極裳置應用於場發射昭 光源時，玻璃元件可爲玻璃管或玻璃泡。 X 11 1327735 提出=ί，Γ明確已符合發明專利之要件，遂依法 &出專财上所述者縣本發日狀較佳實施例， 自不能以此_本案之申請專利範圍。舉凡熟悉本案技藝 之人士援依本發明之精神所作之料修飾或變化 ，皆應涵 盖於以下申凊專利範圍内。 【圖式簡單說明】 圖1係本發明實施例陽極裝置之製造方法的流程示意 圖。 、 圖2係本發明實施例陽極裝置的結構杀意圖。 【主要元件符號說明】 陽極裝置 1() 玻璃元件 20 透呀導電膜·， 3〇 ; 螢光粉層 12Referring to Fig. 2, the anode cleavage 1 manufactured by the above method comprises a glass member 20, a transparent conductive film formed on the surface of the glass member, and a (4) powder layer 4G formed on the transparent conductive film. Among them, the permeamide 30 is a carbon nanotube film. The shape of the glass element is different depending on the anode: the same material, for example, when the anode device is made in the field emission flat panel, the glass guard is used as the glass plate; when the anode is used for the field emission, the light source is used. The glass element can be a glass tube or a glass bulb. X 11 1327735 proposed = ί, Γ has clearly met the requirements of the invention patent, 遂 & & 出 出 出 出 出 较佳 较佳 较佳 较佳 较佳 较佳 较佳 较佳 较佳 较佳 较佳 较佳 较佳 较佳 较佳 较佳 较佳 较佳 较佳 较佳 较佳 较佳 较佳 较佳 较佳 较佳 较佳 较佳 较佳 较佳 较佳Any modification or variation made by a person familiar with the art of the present invention in accordance with the spirit of the present invention shall be within the scope of the following claims. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic flow chart showing a method of manufacturing an anode device according to an embodiment of the present invention. 2 is a schematic view of the structure of the anode device of the embodiment of the present invention. [Description of main component symbols] Anode device 1() Glass component 20 Translucent conductive film ·, 3〇 ; Fluorescent powder layer 12