九、發明說明： 【發明所屬之技術領域】 本發明係關於一種環境光線濾波器結構及其濾波 反應，特別是關於一種環境光線濾波器結構用以封鎖於 700奈米至Π00奈米之範圍内之紅外光。 【先前技術】 環境光線感應器目前受到廣泛的應用，包括照相 ，、攝影LH、電子賴鏡㈣。環境光線感應 器之功能係轉換光源成一電子信號。進一步地，環境光 線感應器偵測環境光源是否充份以決定提供一背光源 與否。環境光線感應器之光波長感測範圍一般皆高於人 眼之感文範圍。請參閱第一圖，係關於習知之環境光線 感應器及人眼之感《光譜波長曲線圖。i常人眼反應光 線之光譜波長係落於400奈米及6〇〇奈米丨丨之間而 裱境光線感應器之光波長感測範圍不僅含括人眼所能 反應之光線光譜波長，更能反應至6〇〇奈米以上即人眼 所無法反應之光譜波長範疇。因此光譜範圍在6〇〇奈米 及1200奈米之間並無封鎖而產生二道波峰a，後果是 當人眼感受到之環境光源不盡充分時而環境光線感^ 器料為^到之環境光源已缺。再者，環境光㈣ 應器由於寬廣的光譜波長反應導致電路產生誤解換古 之，環境光線感應、器也會感測到丨眼所無法反應之 見光’處理這類非可見光造成不必要之電力損耗。基於 前述理由，本發明提供一滤波器結構藉由法布立—拍若 1323481 (Fabry-Per〇t)光學共振腔所製成一薄片用以有效的封 鎖範圍自700奈米至11〇〇奈米之光譜波長並減少電力 耗損。 【發明内容】 本發明之一目的係提供一環境色彩濾波器應用於 一色彩感測系統，進一步包括：一第一銀成份層（Ag)、 一第一氮化矽成份層（Si3N4)、一第二銀成份層（Ag)、 一第二氮化矽成份層（Si3N4)、一第三銀成份層（Ag)、 一第二氮化矽成份層（Si3N4)及一第四銀成份層（Ag)。 應用於色彩感應系統之環境色彩濾波器結構係用於對 特定光譜波長，如紅藍綠三原色。在氮化矽成份層之厚 度上.第一氮化矽成份層小於第二氮化矽成份層且小於 第二氮化矽成份層。除了基本的三原色之外，應用於色 彩感應系統之環境色彩濾波器結構也可應用在互補色 彩光谱如青綠、洋紅及黃色。 本發明之另一目的係提供一多光學共振腔的法布 立一拍若環境光線濾波器結構，係包含一第一法布立一 拍若光學共振腔，其包含一第一銀成分層、一第二銀成 分層以及-第-氮切成分層，其t該第—氮化石夕成分 層係位於該第一銀成分層和該第二銀成分層的中心；以 及一第二法布立—拍若光學共振腔，其包含一第三銀成 分層、一第四銀成分層以及一第二氮化矽成分層^其中 該第二氮切成分層係位於該第三銀成分層和日該第四 銀成分層的中^其巾該第二法布立—拍若光學丑振腔 6 1323481 ' 以梯狀疊架係於該第一法布立一拍若光學共振腔旁，該 第二銀成分層與該第三銀成分層係為—第一分享銀成 分層’該第一銀成分層和該第四銀成分層具一物理性的 間隔於該第二銀成分層與該第三銀成分層之一侧。其中 多光學共振腔的法布立—拍若環境光線濾波器結構更 包含一第三法布立—拍若光學共振腔，其包含一第五銀 ' 成分層、一第六銀成分層以及一第三氮化矽成分層，該 第二氮化石夕成分層係位於該第五銀成分層和該第六銀 • 成分層的中心；其中該第三法布立—拍若光學共振腔以 梯狀疊架係於該第二法布立—拍若光學共振腔旁，該第 四銀成分層與第五銀成分層以形成一第二分享銀成分 層，該第三銀成分層和該第六銀成分層具一物理性的間 隔於該第四銀成分層與該第五銀成分層之一侧。 因此，環境光線濾波器結構可以有效的實現非可見 光譜之封鎖且穿透率在700奈米至11〇〇奈米之範圍可 減夕至百为之—。進一步地，藉由Fabry-Perot光學共 • 振腔所得之環境光線濾波器結構之光譜反應可完全對 應人眼之光譜頻帶反應。 • 茲為使貴審查委員對本發明之實施及達成方式 有更進步之瞭解與認識，下文謹提供較佳之實施例及 • 相關圖式以為辅佐，並以文字說明之配合描述如後。 【實施方式] 以下所參照相關圖式，說明依本發明之一種環境光 線濾波器結構，其中相同之元件將以相同之參照符號加 7 1323481 以述明。 第二圖係為環境光線濾波器結構示意圖。此環境光 線濾波器結構包含一矽基板21、一第一氮化矽成份層 (Si3N4 : 3200 埃±200 ) 22、一 第一銀成份層（Ag : 285 埃±35 ) 23、一第二氮化矽成份層（Si3N4 : 92〇埃士5〇) 24、第二銀成份層（Ag : 285埃±35 ) 25及一第三氮化 石夕成份層（Si3N4 : 3500埃±200 ) 26。矽基板21係為IX. INSTRUCTIONS: [Technical Field] The present invention relates to an ambient light filter structure and a filtering reaction thereof, and more particularly to an ambient light filter structure for blocking in the range of 700 nm to 00 nm. Infrared light. [Prior Art] Ambient light sensors are currently widely used, including photography, photography LH, and electronic mirrors (4). The function of the ambient light sensor is to convert the light source into an electrical signal. Further, the ambient light sensor detects whether the ambient light source is sufficient to determine whether to provide a backlight or not. The wavelength sensing range of the ambient light sensor is generally higher than the range of the human eye. Please refer to the first figure for the spectral wavelength chart of the known ambient light sensor and the human eye. i The spectral wavelength of the common human eye reaction light falls between 400 nm and 6 〇〇 nanometer 裱 and the light wavelength sensing range of the ambient light sensor includes not only the wavelength of the light spectrum that the human eye can react, but also It can react to more than 6 nanometers of the spectral wavelength range that the human eye cannot react. Therefore, the spectral range between 6〇〇N and 1200nm is not blocked and two peaks a are generated. The consequence is that when the human eye feels that the ambient light source is not sufficient, the ambient light is ^^ The ambient light source is missing. Furthermore, the ambient light (4) reactor is misunderstood due to the wide spectral wavelength response, and the ambient light sensor will also sense the light that the blinking eye cannot respond to. Power loss. For the foregoing reasons, the present invention provides a filter structure formed by a Fabry-Per-Ter optical resonator to effectively block the range from 700 nm to 11 〇〇. The spectral wavelength of the meter reduces power consumption. SUMMARY OF THE INVENTION An object of the present invention is to provide an environmental color filter applied to a color sensing system, further comprising: a first silver component layer (Ag), a first tantalum nitride component layer (Si3N4), and a a second silver component layer (Ag), a second tantalum nitride component layer (Si3N4), a third silver component layer (Ag), a second tantalum nitride component layer (Si3N4), and a fourth silver component layer ( Ag). The ambient color filter structure applied to the color sensing system is used for specific spectral wavelengths, such as red, blue and green. The first tantalum nitride composition layer is smaller than the second tantalum nitride composition layer and smaller than the second tantalum nitride composition layer in the thickness of the tantalum nitride composition layer. In addition to the basic three primary colors, the ambient color filter structure applied to the color sensing system can also be applied to complementary color spectra such as cyan, magenta, and yellow. Another object of the present invention is to provide a multi-optical resonant cavity structure, comprising a first method, an optical resonant cavity, and a first silver component layer, a second silver component layer and a -nitrogen-cut component layer, wherein the first-nitride component layer is located at a center of the first silver component layer and the second silver component layer; and a second method cloth An optical cavity comprising a third silver component layer, a fourth silver component layer, and a second tantalum nitride component layer, wherein the second nitrogen component layer is located in the third silver component layer And the fourth silver component layer of the second method of the cloth, the second method of the cloth - the optical ugly cavity 6 1323481 'to the ladder-like stack tied to the first method, a photo of the optical cavity The second silver component layer and the third silver component layer are - a first shared silver component layer - the first silver component layer and the fourth silver component layer are physically spaced apart from the second silver component layer One side of the third silver component layer. The multi-optical cavity of the multi-optical cavity has a third method, the optical cavity, and a fifth silver component layer, a sixth silver component layer and a a third tantalum nitride composition layer, the second nitride layer is located at a center of the fifth silver component layer and the sixth silver component layer; wherein the third method is a photo-resonance cavity The second stacking layer is adjacent to the second silver component layer and the fifth silver component layer to form a second shared silver component layer, the third silver component layer and the first The six silver component layer is physically spaced apart from one side of the fourth silver component layer and the fifth silver component layer. Therefore, the ambient light filter structure can effectively achieve the blocking of the non-visible spectrum and the transmittance can be reduced from 700 nm to 11 nm. Further, the spectral response of the ambient light filter structure obtained by the Fabry-Perot optical co-vibration cavity can completely respond to the spectral band of the human eye. • For the purpose of making the reviewer's understanding and understanding of the implementation of the invention and the way to achieve it, the following is a summary of the preferred embodiment and the related drawings, and the description of the text is described below. [Embodiment] Hereinafter, an environmental light filter structure according to the present invention will be described with reference to the related drawings, in which the same elements will be denoted by the same reference numeral 7 1323481. The second picture is a schematic diagram of the structure of the ambient light filter. The ambient light filter structure comprises a substrate 21, a first layer of tantalum nitride (Si3N4: 3200 angstroms ± 200) 22, a first silver component layer (Ag: 285 angstroms ± 35) 23, a second nitrogen The bismuth layer (Si3N4: 92 〇 〇 5 〇) 24, the second silver component layer (Ag: 285 angstroms ± 35) 25 and a third nitriding layer (Si3N4: 3500 angstroms ± 200) 26 .矽 substrate 21 is
一基礎層（此基礎層可以薄片形態覆蓋於一光電二極體 感測區之一 N+接面），第一氮化矽成份層22以薄片形 態覆盍於矽基板21上，第一銀成份層23以薄片形態覆 蓋於第一氮化矽成份層22上，第二氮化矽成份層24以 薄片形態覆蓋於第一銀成份層23上，第二銀成份層25 以薄片形態覆蓋於第二氮化矽成份層24上，及第三氮 化矽成份層26以薄片形態覆蓋於第二銀成份層25上。 猎由以上製作程序達成環境光線濾波器結構之製備並 形成一簡單五層結構加上一矽基板21之構造。慣例上 所有’I電薄膜S學濾波ϋ要求四十二層薄膜塗佈，第一 氮化石夕成份層22係為-底部層，第—銀成份層23係為 -底部反射層，第二氮切成份層24係為—中心介電 層’第-銀成份層25係為—頂部反射層，第三氮化石夕 成份層係為-頂部層。第二氮切成份層24係用以傳 輸不同光譜頻帶且可附加—二氧切（Si⑻或一氧化 氮成伤即”電材料。第二氮化石夕成份層可經由電 漿化學氣相沉積法塑形。第—銀成份層23、第二氮化 8 1323481 石夕成份層24及第二銀成份層25係為環境光線濾波器結 構之核心由法布立一拍若（Fabry-Perot)光學共振腔與 第一氮化矽成份層22及第三氮化矽成份層26共組以提 鬲及保護第一銀成份層23及第二銀成份層25不受溼氣 影響。環境光線濾波器結構可由互補金氧半導體技術、 雙極電晶體技術及雙載子互補金氧半導體技術所製。進 一步地，環境光線濾波器結構結合一三金屬光線屏障層 可提供一有效的迷散光排除結構用以整合電路（三金屬 光線屏障層係沉積於矽基板之間）。此環境光線濾波器 之設計係基於第一順序光學理論以提供一完善的其波 長在700奈米至11〇〇奈米之非可見光封鎖特色。 請參閱第三圖係環境光線濾波器及人眼之反應結 果曲線圖。如第三圖所示，曲線圖說明了二個反應結 果。第-反應結果係為-實線曲線31為環境紐渡波 為結構所反應而第二反應結果係為一虛線曲線犯為人 眼所反應。明顯的光譜波長範圍從65〇奈米至Η⑽奈 米已讓環境光線濾波器有效的封鎖使其能夠緊密的趨 ^在_奈米至65G奈米之虛㈣線32之人眼反應範 二環Λ光線濾波器結構之波峰係座落在挪奈米 應之虛線㈣32。 反U 一對應如人眼反 請參閱第四圖，係為本發明一泰 油51紝姐^ 赞明男、她例之環境色彩濾 /皮斋、，、吉構示意圖。環境色深 見邑衫濾波蒸結構係設一光電二極 體44即設於至少三個雷先 N+電極於該光電二極體表面， 9 1323481 進一步包含至少七層構體：一第一 N +電極41區，提 供一第一銀成份層（Ag) 411以薄片形態覆蓋於該第一 N +電極41，一第一氮化矽成份層（Si3N4) 412以薄片 形態覆蓋於該第一銀成份層411，以及一第二銀成份層 (Ag ) 413以薄片形態覆蓋於該第一氮化矽成份層 412。一第二N +電極42區’提供一第二銀成份層（Ag) 413以薄片形態覆蓋於該第二N+電極42，一第二氮化 矽成份層（Si3N4) 421以薄片形態覆蓋於該第二銀成 份層413，以及一第三銀成份層（Ag) 422以薄片形態 覆蓋於該第二氮化矽成份層421。一第三N +電極43 區，提供一第三銀成份層（Ag) 422以薄片形態覆蓋於 該第三N +電極43’ 一第三氮化矽成份層（si 3N4) 431 以薄片形態覆蓋於該第三銀成份層422，以及一第四銀 成份層（Ag) 432以薄片形態覆蓋於該第三氮化矽成份 層431。第二銀成份層413延伸自第一 N +電極41區至 第二N +電極42區，第三銀成份層422延伸自第二N +電極42區至第三N+電極43區。易言之，第二銀成 份層413及第三銀成份層422係為分享銀成份層也為環 境色彩;慮波斋之關鍵創新’猎由上述成形方式，環境色 彩濾波器可構成一梯狀疊架❶第一氮化矽成份層、 第二氮化矽成份層421、第三氮化矽成份層431為環境 色彩濾波器之核心介電層。每一氮化矽成份層之沉積厚 度係使用現代薄膜沉積技術如電漿化學氣相沉積技術 係為一完善控制沉積厚度之處理技術。環境色彩濾波器 結構所形叙七層構體通常料三色“。此三色系統 人眼得以識別如紅藍綠。環境色彩遽波器 、、、。構係反應三原色系統之波峰。第—Ν+電極41區上 部係用以通過450奈米之藍光波峰，第二Ν+電極42 區上部係用以通過550奈米之綠光波峰，第三電極 43區上部係用以通過65〇奈米之紅光波峰。進一步的， 此七層形態之環境色㈣波器結構提供了模組化電池 解決方案（此模組化電池係由二道銀成份層加上一氮化 石夕成份層且氮切成份層係置於二道銀成份層之間）用 :解決額外之色彩濾'波及_。每—額外色彩滤波電池 要求-額外模組化遽波遮罩層及經由氮化石夕成份厚 度/儿積以疋義-特殊通過之光譜。模組化遮罩光學圖形 處理係基於不論是剝離或乾式㈣處理以定義模組化 滤波區域。 最後，藍色矩形51係對應至第—Ν+電極41上部 區域係用以藉由七層之環境色彩渡波器結構通過過據 光線’綠色矩型52係對應至第二Ν+電極42上部區域 係用以藉由七層之環境色職波器結構通過過據光 線’紅色矩形53係對應至第三Ν+電極㈡上部區域係 用以藉由七層之環境色彩滤波器結構通過軸光線。此 三色矩形係成形為由上至下之鳥敵而設於環境色彩據 波器結構54之中如第五圖所示之本發明—實施例之^ 除了三基礎顏色矩形所依社環境色彩滤波器結構 1323481 和互補顏色之矩形可藉由環境色彩濾波器結構通過， 请參閱第六圖，係為本發明一實施例之另一由上至下島 瞰互補色彩矩形而設於環境色彩濾波器結構54之中: 互補色包括青綠、洋紅及黃色。因此，黃色矩形61係 , 對應至第一 N+電極41上部區域係用以藉由七層之環 境色彩慮波裔結構通過過渡光線，洋紅色矩型6 2係對 應至第二N +電極42上部區域係用以藉由七層之環境 φ 色彩濾波器結構通過過濾光線，青綠色矩形63係對應 至第一 N +電極43上部區域係用以藉由七層之環境色 彩遽波益結構通過過濾光線。請參閱第七圖，為多光學 共振腔的法布立—拍若環境光線濾波器結構，係包含一 第一法布立一拍若光學共振腔71，其包含一第一銀成分 層711、一第二銀成分層713以及一第一氮化矽成分層 712’其中第一氮化矽成分層712位於第一銀成分層711 和第二銀成分層713的中心；以及一第二法布立—拍若 # 光學共振腔72，其包含一第三銀成分層721、一第四銀 成分層723以及一第二氮化矽成分層722，其中第二氮 化石夕成分層722位於第三銀成分層721和第四銀成分層 723的中心；其中第二法布立一拍若光學共振腔72以梯 狀疊架於該第一法布立—拍若光學共振腔71旁，第二 銀成分層713與第三銀成分層721為一第一分享銀成分 層74,第一銀成分層711和第四銀成分層723具一物理 性的間隔於第二銀成分層713與該第三銀成分層721之 一側。其中多光學共振腔的法布立一拍若環境光線濾波 12 1323481 器結構更包含一第三法布立一拍若光學共振腔73,其包 含一第五銀成分層731、一第六銀成分層733以及一第 三氣化梦成分層732’第三氮化梦成分層732位於第五 銀成分層731和該第六銀成分層733的中心；其中第三 法布立一拍若光學共振腔73以梯狀疊架於該第二法布 立一拍若光學共振腔72旁，第四銀成分層723與第五 銀成分層731以形成一第二分享銀成分層75，第三銀 成分層721和第六銀成分層733具一物理性的間隔於第 四銀成分層723與第五銀成分層73 1之一側。其中第一 氮化矽成分層712、第二氮化矽成分層722以及該第三 氮化矽成分層732之厚度是不一樣的，第一法布立一拍 若光學共振腔71、第二法布立一拍若光學共振腔72以 及第三法布立一拍若光學共振腔73可由互補金氧半導 體（CMOS)技術、雙極電晶體（bipolar)技術或雙載子互補 金氧半導體（Bi-Complementary Metal Oxide Semiconductor，BiCMOS)達成。 多光學共振腔的法布立一拍若環境光線濾波器結構 通常用於三色系統。此三色系統係為三原色而人眼得以 識別如紅藍綠。多光學共振腔的法布立一拍若環境光線 濾波器結構係反應三原色系統之波峰。其中第一法布 立一拍若光學共振腔7卜第二法布立一拍若光學共振腔 72以及第三法布立一拍若光學共振腔73具有不同的光 譜響應，其中第一法布立一拍若光學共振腔71之光譜 響應為一紅光波長光譜，第二法布立一拍若光學共振腔 13 1323481 72之光譜響應為一綠光波長光譜，第三法布立一拍若光 學共振腔73之光譜響應為一藍光波長光譜，其中紅光 波長光譜包含一峰值，其峰值接近65〇奈米，綠光波長 光譜包含一峰值，其峰值接近55〇奈米，藍光波長光譜 — 包含一峰值，其峰值接近450奈米，其中第一 n+電^ 76區上部係用以通過450奈米之藍光波峰，第二n +電 極77區上部係用以通過55〇奈米之綠光波峰，第三1 • +電極78區上部係用以通過650奈米之紅光波峰。 最後，藍色矩形81係對應至第一 N+電極76上部 區域係用以藉由多光學共振腔的法布立—拍若環境光 線濾波器結構通過以過濾光線，綠色矩型82係對應至 第一 N +電極77上部區域係用以藉由多光學共振腔的 法布立一拍若環境光線濾波器結構通過以過濾光線，紅 色矩形83係對應至第三N+電極78上部區域係用以藉 由多光學共振腔的法布立—拍若環境光線濾波器結構 • 通過以過濾光線。此三色矩形係成形為由上至下之烏瞰 而設於多光學共振腔的法布立—拍若環境光線遽波器 , 結構84之中如第八圖所示之本發明一實施例之示意。 除了二基礎顏色矩形所依附之多光學共振腔的法布 立一拍若環境光線濾波器結構外，互補顏色之矩形可藉 由多光學共振腔的法布立一拍若環境光線濾波器結構 通過，請參閱第九圖，係為本發明一實施例之另一由上 至下鳥瞰互補色彩矩形而設於多光學共振腔的法布 立一拍若環境光線濾波器結構之中。互補色包括青 1323481 ，汽色矩形91係對應至第—a base layer (the base layer may cover a N+ junction of one of the photodiode sensing regions), and the first tantalum nitride composition layer 22 is coated on the ruthenium substrate 21 in a sheet form, the first silver component The layer 23 is covered on the first tantalum nitride composition layer 22 in a sheet form, and the second tantalum nitride composition layer 24 is covered on the first silver composition layer 23 in a sheet form, and the second silver composition layer 25 is covered in a sheet form. The hafnium dinitride component layer 24 and the third tantalum nitride component layer 26 are overlaid on the second silver component layer 25 in the form of a sheet. Hunting is accomplished by the above fabrication process to achieve the fabrication of an ambient light filter structure and to form a simple five-layer structure plus a stack of substrates 21. Conventionally, all 'I-electro-film S-filters require forty-two layers of film coating, the first layer of the nitride layer is a bottom layer, and the first layer of the silver layer 23 is a bottom reflection layer, the second nitrogen. The slice layer 24 is a central dielectric layer 'the first silver component layer 25 is a top reflective layer, and the third nitride layer is a top layer. The second nitrogen-cut component layer 24 is used to transport different spectral bands and may be added with a bismuth (Si(8) or nitric oxide as a wound" electrical material. The second nitride layer may be deposited by plasma chemical vapor deposition. The first shape of the silver component layer 23, the second nitriding layer 8 1323481, the stone layer composition layer 24 and the second silver component layer 25 are the core of the ambient light filter structure by Fabry-Perot. The optical resonant cavity is combined with the first tantalum nitride component layer 22 and the third tantalum nitride component layer 26 to enhance and protect the first silver component layer 23 and the second silver component layer 25 from moisture. The structure can be made by complementary MOS technology, bipolar transistor technology and bipolar complementary MOS technology. Further, the ambient light filter structure combined with a three metal light barrier layer can provide an effective scatter light exclusion structure. Used to integrate circuits (three metal light barrier layers are deposited between the germanium substrates). The design of this ambient light filter is based on the first sequential optical theory to provide a perfect wavelength between 700 nm and 11 nm. Non-available Light blocking features. Please refer to the third graph for ambient light filter and human eye reaction results. As shown in the third figure, the graph illustrates two reaction results. The first reaction result is - solid curve 31 The environmental reaction is effectively blocked by the ambient light filter, which is reflected by the human eye, and the second reaction result is a dotted curve. The apparent spectral wavelength range from 65 〇 to Η (10) nanometer has effectively blocked the ambient light filter. The crest system of the human eye reaction 二 二 Λ 四 四 四 四 四 65 65 65 65 65 65 65 65 65 65 65 65 65 65 65 65 65 65 65 65 65 65 65 65 65 挪 65 挪 65 65 65 65 65 65 65 65 65 65 65 _ _ _ _ Please refer to the fourth picture for the eye, which is the invention of a Thai oil 51 纴 sister ^ praise the male, her example of the environmental color filter / skin fast,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,, The diode 44 is disposed on the surface of the photodiode of at least three Rayon N+ electrodes, and 9 1323481 further comprises at least seven layers of structures: a first N + electrode 41 region, providing a first silver component layer (Ag) 411 covers the first N + electrode in a sheet form 41. A first tantalum nitride component layer (Si3N4) 412 is coated on the first silver component layer 411 in a sheet form, and a second silver component layer (Ag) 413 is covered in the sheet form on the first tantalum nitride component. Layer 412. A second N + electrode 42 region 'provides a second silver composition layer (Ag) 413 to cover the second N+ electrode 42 in a sheet form, and a second tantalum nitride composition layer (Si3N4) 421 in a sheet form. Covering the second silver component layer 413, and a third silver component layer (Ag) 422 covering the second tantalum nitride component layer 421 in a sheet form. A third N + electrode 43 region provides a third silver The component layer (Ag) 422 covers the third N + electrode 43 ′ in a sheet form, and a third tantalum nitride component layer (si 3N 4 ) 431 covers the third silver component layer 422 in a sheet form, and a fourth silver A composition layer (Ag) 432 is applied to the third tantalum nitride composition layer 431 in a sheet form. The second silver component layer 413 extends from the first N + electrode 41 region to the second N + electrode 42 region, and the third silver component layer 422 extends from the second N + electrode 42 region to the third N + electrode 43 region. In other words, the second silver component layer 413 and the third silver component layer 422 are shared with the silver component layer and also for the environmental color; the key innovation of the wave of the wave is the hunting method, and the environmental color filter can form a ladder shape. The first tantalum nitride composition layer, the second tantalum nitride composition layer 421, and the third tantalum nitride composition layer 431 are the core dielectric layers of the environmental color filter. The deposition thickness of each tantalum nitride layer is a modern thin film deposition technique such as plasma chemical vapor deposition (CVD) which is a processing technique for controlling the deposition thickness. The seven-layer structure of the environmental color filter structure is usually three-color. The three-color system can be recognized by the human eye as red, blue and green. The environmental color chopper, the structure of the three primary color system peaks. The upper part of the Ν+electrode 41 is used to pass the blue peak of 450 nm, the upper part of the second Ν+electrode 42 is used to pass the green light peak of 550 nm, and the upper part of the third electrode 43 is used to pass the 65 〇. The red light peak of the meter. Further, the seven-layered ambient color (four) wave structure provides a modular battery solution (the modular battery is composed of two silver components plus a layer of nitride layer The nitrogen-cut component layer is placed between the two silver component layers): to solve the extra color filter 'waves'. Each - additional color filter battery requirements - additional modular chopper mask layer and via nitriding element The thickness/integration is based on the spectrum of the special meaning. The modular mask optical pattern processing is based on either stripping or dry (4) processing to define the modular filtering area. Finally, the blue rectangle 51 corresponds to the first +The upper area of the electrode 41 is used for seven The layer of the ambient color waver structure passes through the light ray 'green rectangle type 52 corresponds to the second Ν + electrode 42 upper area is used to pass the seven-layer environmental color wave machine structure through the light ray 'red rectangle 53 series Corresponding to the third Ν+electrode (2) upper region is used to pass the axial ray through a seven-layer environmental color filter structure. The three-color rectangular system is formed as a top-down bird enemies in the environmental color data structure. In the present invention, as shown in the fifth figure, in addition to the three basic color rectangles, the ambient color filter structure 1323481 and the complementary color rectangle can be passed through the ambient color filter structure, see the sixth The figure is set in the ambient color filter structure 54 from the top to the bottom of the island according to an embodiment of the present invention: the complementary colors include cyan, magenta and yellow. Therefore, the yellow rectangle 61 is corresponding to The upper region of the first N+ electrode 41 is used to pass the transition light by a seven-layer environmental color wave-like structure, and the magenta rectangular pattern 6 2 corresponds to the upper region of the second N + electrode 42 for use by the seven layers. ring The φ color filter structure filters the light, and the cyan rectangle 63 corresponds to the upper region of the first N + electrode 43 for filtering the light by the seven-layer environmental color 遽 wave structure. Please refer to the seventh figure for more The optical resonant cavity of the optical resonant cavity includes a first method, an optical resonant cavity 71, and a first silver component layer 711 and a second silver component layer 713. a first tantalum nitride composition layer 712' in which the first tantalum nitride composition layer 712 is located at the center of the first silver composition layer 711 and the second silver composition layer 713; and a second method Bu Liruo # optical resonator 72, comprising a third silver component layer 721, a fourth silver component layer 723, and a second tantalum nitride component layer 722, wherein the second nitride component layer 722 is located in the third silver component layer 721 and the fourth silver The center of the component layer 723; wherein the second method is set up, if the optical cavity 72 is stacked in a ladder form next to the first method, the second silver component layer 713 and the third silver The component layer 721 is a first shared silver component layer 74, and the first silver component 713 and fourth side 711 silver component layer 723 physically spaced a silver component in the second layer and the third layer 721 of the silver component. The multi-optical cavity of the multi-optical cavity, if the ambient light filtering 12 1323481 structure further comprises a third method, the optical cavity 73, which comprises a fifth silver component layer 731 and a sixth silver component. The layer 733 and a third vaporized dream component layer 732' are located at the center of the fifth silver component layer 731 and the sixth silver component layer 733; wherein the third method is optically resonant The cavity 73 is stacked in a ladder shape next to the second method, and the fourth silver component layer 723 and the fifth silver component layer 731 form a second shared silver component layer 75, the third silver The component layer 721 and the sixth silver component layer 733 are physically spaced apart from one side of the fourth silver component layer 723 and the fifth silver component layer 73 1 . The thickness of the first tantalum nitride component layer 712, the second tantalum nitride component layer 722, and the third tantalum nitride component layer 732 are different, and the first method is a photo-resonant cavity 71 and a second If the optical resonator 72 and the third method are used, the optical cavity 73 can be made of complementary metal oxide semiconductor (CMOS) technology, bipolar transistor technology or bipolar complementary metal oxide semiconductor ( Bi-Complementary Metal Oxide Semiconductor, BiCMOS). Multi-optical resonators are commonly used in three-color systems if the ambient light filter structure is used. This three-color system is the three primary colors and the human eye is recognized as red, blue and green. Multi-optical resonant cavity method If the ambient light filter structure is the peak of the three primary color system. The first method is as follows: if the optical resonant cavity 7 is the second method, if the optical resonant cavity 72 and the third method are provided, the optical resonant cavity 73 has different spectral responses, wherein the first method is If the spectral response of the optical cavity 71 is a red wavelength spectrum, the second method is a beat. If the optical response of the optical cavity 13 1323481 72 is a green wavelength spectrum, the third method is a shot. The spectral response of the optical cavity 73 is a blue wavelength spectrum, wherein the red wavelength spectrum contains a peak with a peak close to 65 nanometers, and the green wavelength spectrum contains a peak with a peak close to 55 nanometers and a blue wavelength spectrum. Containing a peak with a peak value close to 450 nm, wherein the upper portion of the first n+ electric 76 is used to pass the blue peak of 450 nm, and the upper portion of the second n + electrode 77 is used to pass the green light of 55 nanometer. Crest, the third 1 • The upper part of the 78 electrode is used to pass the 650 nm red light peak. Finally, the blue rectangle 81 corresponds to the upper region of the first N+ electrode 76 for filtering through the multi-optical resonator cavity to filter the light, and the green rectangle 82 corresponds to the first An upper region of the N+ electrode 77 is used to illuminate a multi-optical resonant cavity. If the ambient light filter structure passes to filter light, the red rectangle 83 corresponds to the upper region of the third N+ electrode 78. The method of multi-optical resonant cavity is used to filter the light. The three-color rectangular shape is formed as a Fabry-Perot ambient light chopper provided in a multi-optical cavity from top to bottom, and an embodiment of the present invention as shown in FIG. The indication. In addition to the structure of the multi-optical cavity to which the two basic color rectangles are attached, if the ambient light filter structure is used, the rectangle of the complementary color can be made by the method of the multi-optical cavity. Please refer to the ninth figure, which is another ambient light filter structure of a multi-optical resonant cavity which is disposed in a multi-optical resonant cavity from a top-down bird's-eye view complementary color rectangle according to an embodiment of the present invention. The complementary colors include cyan 1323481, and the cyan rectangle 91 series corresponds to the first—
• 環境光線濾波器結構通過以過濾光線。 右 雖本發明已以較佳實施例揭露如上，然其非用以限 綠、洋紅及黃色。因此， +電極7 6上部區域係/• The ambient light filter structure passes through to filter the light. Right Although the invention has been disclosed above in the preferred embodiment, it is not intended to limit green, magenta and yellow. Therefore, the + electrode 7 6 upper area is /
立-拍甚拷"伞.始、法、、rf* ES 離本發明之精神和範圍内，當視後附 •^申睛專利範圍所界定者為準。 【圖式簡單說明】 光譜波長曲線圖； 圖係關於f知之環境光線感應ϋ及人眼之感 ^ 一圖係為環境光線濾波器結構示意圖； rsn · 圚， 第四圖係為本發明— 示意圖； 第三圖係環境光線據波器及人眼之反應結果曲線 實施例之環境色彩濾波器結構 第五圖係為本發明一實施例之三原色矩形藉由環境 色彩遽波器結構通過之鳥瞰示意圖； 第八圖係為本發明一實施例之另一三互補色矩形藉 由環境色彩濾波器結構通過之鳥瞰示意圖； 15 1323481 第圖係為夕光學共振腔的法布立—拍若環境光線 渡波器結構； 第八圖本發明一實施例之三原色矩形藉由多光學共 振腔的法布立一拍若環境光線濾波器結構通過 ^ 之鳥瞰示意圖；以及 第九圖係為本發明一實施例之另一三互補色矩形藉 ^多光學共振腔的法布立—拍#料光線滤波 益結構通過之鳥嗽示意圖。 【元件符號說明】 11 : 400奈米及600奈米； 12 ;二道波峰； 21 :矽基板； 22:第一氮化石夕成份層； 23 :第一銀成份層； • 24 :第二氮化矽成份層； 25 :第二銀成份層； 26 :第三氮化矽成份層； « 31 :實線曲線； 312 : 555 奈米； 32 :虛線曲線； 41 :第一 N+電極； 411 :第一銀成份層（Ag); 412:第一氮化矽成份層（Si3N4); 16 1323481 413··第二銀成份層（Ag); 42 :第二N +電極； 421 :第二氮化矽成份層（Si3N4); 422 :第三銀成份層（Ag) 422 ; 43:第三N +電極； 431 :第三氮化矽成份層（Si3N4); 432 :第四銀成份層（Ag); 44 :光電二極體； 51 :藍色矩形； 52 :綠色矩型； 53 :紅色矩形； 54 :環境色彩濾波器結構； 61 :黃色矩形； 62 :洋紅色矩型； 6 3 :青綠色矩形； 71 :第一法布立一拍若光學共振腔； 711 :第一銀成份層（Ag); 712:第一氮化矽成份層（Si3N4); 713 :第二銀成份層（Ag); 72 :第二法布立一拍若光學共振腔； 721 :第三銀成份層（Ag) 722:第二氮化矽成份層（Si3N4) 723 :第四銀成份層（Ag); 73 :第三法布立一拍若光學共振腔； 17 1323481 731 :第五銀成份層（Ag); 732:第三氮化矽成份層（Si3N4); 733 :第六銀成份層（Ag); 74:第一共享銀成分層； 75 :第二共享銀成分層； 76 :第一 N +電極； 77 :第二N+電極； 78 :第三N +電極； 81 :藍色矩形； 82 :綠色矩型； 83 :紅色矩形； 84 :多光學共振腔的法布立一拍若環境光線濾波 器結構； 91 :黃色矩形； 92 :洋紅色矩型；以及 9 3 ··青綠色矩形。立-拍过copy" Umbrella. The beginning, the law, and the rf* ES are within the spirit and scope of the present invention, and are subject to the definition of the patent scope. [Simple diagram of the spectrum] Spectral wavelength curve; The diagram is about the ambient light sensing and the human eye. The picture is the structure of the ambient light filter; rsn · 圚, the fourth picture is the invention - schematic The third figure is an environmental color filter structure of the ambient light according to the filter and the human eye. The fifth figure is a bird's-eye view of the three primary color rectangles passing through the environment color chopper structure according to an embodiment of the present invention. The eighth figure is a bird's-eye view of the other three complementary color rectangles passing through the environment color filter structure according to an embodiment of the present invention; 15 1323481 is a method for the optical cavity of the ray optical cavity. The eighth embodiment of the present invention is a bird's eye view of the three primary color rectangles by means of a multi-optical resonant cavity. If the ambient light filter structure passes through a bird's eye view, the ninth figure is an embodiment of the present invention. The other three complementary color rectangles are borrowed from the multi-optical resonant cavity. [Description of component symbols] 11 : 400 nm and 600 nm; 12; two wave crests; 21 : ruthenium substrate; 22: first nitrite layer; 23: first silver component layer;矽 composition layer; 25: second silver component layer; 26: third cerium nitride component layer; « 31 : solid curve; 312: 555 nm; 32: dashed curve; 41: first N+ electrode; First silver composition layer (Ag); 412: first tantalum nitride composition layer (Si3N4); 16 1323481 413 · second silver composition layer (Ag); 42: second N + electrode; 421: second nitridation矽 composition layer (Si3N4); 422: third silver component layer (Ag) 422; 43: third N + electrode; 431: third tantalum nitride component layer (Si3N4); 432: fourth silver component layer (Ag) 44 : Photodiode; 51 : Blue rectangle; 52 : Green rectangle; 53 : Red rectangle; 54 : Environmental color filter structure; 61 : Yellow rectangle; 62 : Magenta rectangle; 6 3 : Cyan Rectangular; 71: The first method is a photo-resonant cavity; 711: the first silver component layer (Ag); 712: the first tantalum nitride component layer (Si3N4); 713: the second silver component layer (Ag) ; 72: The second method is a shot. Learning resonant cavity; 721: third silver component layer (Ag) 722: second tantalum nitride component layer (Si3N4) 723: fourth silver component layer (Ag); 73: third method Bolivia optical cavity 17 1323481 731: fifth silver composition layer (Ag); 732: third tantalum nitride composition layer (Si3N4); 733: sixth silver composition layer (Ag); 74: first shared silver composition layer; 75: Two shared silver constituent layers; 76: first N + electrode; 77: second N+ electrode; 78: third N + electrode; 81: blue rectangle; 82: green rectangle; 83: red rectangle; 84: multi-optical The cavity of the resonant cavity is a beat of the ambient light filter structure; 91: yellow rectangle; 92: magenta rectangle; and 9 3 ·· cyan rectangle.