1321653 九、發明說明： 【發明所屬之技術領域】 本發明涉及一種通過由發光源所產生的透射光及反射光，來 檢驗被測物的光學裝置。 【先前技術】 習知LCD檢驗裝置僅藉由透射光來對被測物進行檢驗。這種 檢驗裝置中，具有透明底面的玻璃基板下方設有光源，而藉由這 一光源所產生的光透過該玻璃基板後透射光，來對被測物進行檢 驗。 第一圖表示這種習知光學裝置。如第一圖所示，習知光學裝 置包括發光單元（100)及測光器（200)，其中，由所述發光單元（1〇〇) 所透射的光經過玻璃基板(B)和被測物（A)後射入測光器（2〇〇)。 即’由發光單元（100)所透射的光透過玻璃基板(B)及被測物（a) 後，可藉由測光器（200)觀察到該透射光。即，在這種習知光學裝 置中’只利用透射光來檢驗被測物（A)。 但是’這種習知光學裝置中並不存在用於支援玻璃基板的部 件，因此作為底面來使用的玻璃基板，由於其具有嚴重變形的特 性’因此，無法在部分領域中觀察到透射光。 此外，如果在該玻璃基板的底面設置支撐部件，則不能像習 知光學裝置那樣利用透射光進行檢驗。 另外，當於玻璃基板的底面設置支撐部件時，不能僅利用反 射光來對被測物進行準確的檢驗。 【發明内容】 雲於上述問題，本發明的目的是提供一種包含用於支援玻璃 基板的反射盤之光學裝置。 ' 本發明的另一目的是提供一種即使在包含用於支援玻璃基板 的反射盤之情況下，也能夠利用透射光及反射光進行檢驗的光學 裝置。 5 實施例1 : 下面參照第二圖至第五圖，來說明本發明光學裝置的第一 施例。 、 首先說明本發明光學裝置的結構。如第二圖所示，本發明光 學裝置包括第一發光單元（10)、分光鏡(20)、光學透鏡(3〇)、第 二發光單元(40)、遮光部件（50)、反射片（60)、反射盤（7〇)、測 光器（80)。 ’ ^其中，第一發光單元（10)用於產生並照射具一定大小波長的 第一光線，所照射的第一光線射入分光鏡(2〇)。 分光鏡(20)位於所述第一發光單元（1〇)的一側，其用於反射 所射入光的一部分，而另一部分入射光則被分光鏡（2〇)透射。 被反射的第一光線射入像濾光片或TFT等被測物^)，而射入濾光 片或TFT等的第一光線則在其表面反射或透過。 光學透鏡（30)配置在分光鏡(20)的下方，其用於聚集入射 光，並將其透過。 第二發光單元(40)配置在所述光學透鏡(30)下方的一側，其 用於產生及照射具預定大小波長的第二光線。由所述第二發光單 元(40)所產生的第二光線射入濾光片或TFT。射入濾光片或TFT 的第二光線在其表面反射或透過。 遮光部件（50)設置在第二發光單元(4〇)的周圍，其上設有遮 光壁’所述遮光壁用於阻隔第二發光單元（4〇)和光學透鏡（so) 之間，以防止由所述第二發光單元（40)照射出的第二光線在被 測物處反射後，射入所述光學透鏡（30)。 為了有效地圍住第二發光單元(40)的周圍，所述遮光部件（5 〇)可設成”型，或者也可設成半圓形或平板狀。 反射片（60)位於所述遮光部件（50)的下方，並從遮光部件（50) 隔開設置。所謂反射片（60)是用於反射透過濾光片或TFT、玻璃基 板的光線的片體。本實施例中反射片（60)可以是棱鏡片。第五圖 1321*653 中不出棱鏡片，射入棱鏡片的光線將根據不同的波長，向不同的 方向反射出。所述棱鏡片可以是圓錐形，也可以是三角錐形。 反射盤⑽固定在反射片⑽的下方。反射盤^)用ς穩定 地固定遽光片或TFT等被測物(Α)及附著有被測物的玻璃基板⑻。 本實把例中，可通過配置在分光鏡(2〇)上方的測光器（8〇)， 觀察到透過濾光片或TFT等被測物，或者由所述被測物反射的光。 下面，參照第二圖及第四圖，來看一下通過本發明光學裝置， 利用反射光及透射光對被測物進行檢驗的方法。 首先，參照第三圖說明利用第一發光單元（1〇)所引起的反射 籲光來檢驗被測物的方法。如第三圖所示，由第一發光單元（10)所 產生的第一光線(K)在分光鏡(20)反射，並射入光學透鏡(3〇h而 透過光學透鏡(30)的第一光線(κ)則到達濾光片或TFT(B)等被測 物。遽光片或TFT(B)具有反射大部分的光，而只透過一部分光線 的特性。因此，只要第一光線(K)的強度不是很大，大部分的光線 (L)被反射，而重新回到光學透鏡(3〇)。這些反射光(1〇中的一部 分將透過分光鏡(20)後到達測光器（8〇)。如此，利用第一發光單 元（10)所引起的反射光，可觀察到濾光片或TFT(；B)的表面狀態。 此時，濾光片的反射影像利於檢查濾光片中凸出的部分（即將此叫 φ 作黑(black)缺陷）。 其次，參照第四圖說明利用第二發光單元(4〇)所引起的透射 光來檢驗被測物的方法。如第四圖所示，由第二發光單元（4〇)所 產生的弟一光線直接射入渡光片或tft(b)。如上述說明，在濾光 片中大部分光線被反射，因此為了利用透射光，需要讓第二發光 單元（40)產生遠大于第一發光單元（1〇)所產生的光線之強度的 光。在濾光片或TFT(B)處被反射的光〇|)則被遮光部件(5〇)擋住而 免於進入光學透鏡(30)。在此，可適當選擇遮光部件（5〇)的位置， 以免反射光(M)進入光學透鏡(3〇)。由濾光片或TFT(B)透過的光(N) 將透過玻璃基板(B)後，到達反射片（6〇)。本實施例中，反射片（6〇) 8 是棱鏡片，在第五圖中示出光的前進方向。如第五圖所示，所進 入的光根據不同的波長，被反射而分散於不同的方向。其中，一 部分光線重新透過玻璃基板(B)及濾光片或TFT(B)，並射入光學透 鏡(30)。這些透射光(N)將透過分光鏡(2〇)後’到達測光器（8〇)。 如此，可利用第二發光單元（4〇)所引起的透射光來觀察濾光片或 TFT(B)的狀態。此時，濾光片的透射影像利於檢查濾光片中凹進 的部分（即將此叫作白（white)缺陷）。 這樣，在檢驗附著於玻璃基板上的濾光片或TFT的雜質時， 可通過選擇利用第一發光單元所引起的反射光或第二發光單元所 引起的透射光，來準確地觀察濾光片或TFT的全般領域。另外， 在利用第二發光單元所引起的透射光時，可通過增加遮光部件， 以防止受到反射光的干擾。 實施例2 ,,、下面，參照第六圖說明本發明光學裝置的第三實施例。在此， 省略說明和實施例1相同的結構。 苐✓、圖表示本發明另一實施例中的遮光部件。 ^第六圖所示，在光學透鏡(3〇)的周圍配置有兩個以上第二 發光單元(40)及遮光部件（5〇)。如第六圖所示，第二發光單元(4〇) 及遮光部件（50)可以有4個，但也可配置其他數目。從業人員也 應該可以理解到為了防止㈣二發光單元㈤所產生的光線直 接，被測物膜片上反射後進入光學透鏡（3〇)，所述遮光部件(5〇) 在第二光源(4〇)的周圍可設置具一定深度的遮光壁。 也可在光學透鏡（3〇)的周圍配置多數第二發光單元(4〇)及 ，光部件(50)’由此更加有效地通過反射光（第四圖中符號N)來進 行對濾光片的觀察及檢驗操作。 實施例3 最後，參照第七圖說明本發明光學裝置的第三實施例。在此， 也省，說明和實施例1烟的結構。 +，ΐΐΐί示本發㈣第三實補t的錢部件。如第七圖所 抑鏡(3G)的觸，第二發光單元⑽光部件⑽ 农逑接5又置。遮光部件（50)以光學透鏡（30)為t心，設成環带 狀，且和第二實施例同樣地設有遮光壁。此時，可以理解到遮^ 部=(50)可設成如壯騎示的_狀，或者也可設成四邊形或 二角形狀。遮光部件(训）的内部可配置多個第二發光單元(4〇)， 由此更加有效地通過反射光（第四圖巾符號N)進行制光片 察及檢驗。 —本發明的保護範圍並不限於上述實施例，而在後述的申請專 利範圍内可實現不同的實施方式。在不脫離申請專利範圍中記載 的發明要闕範® Η ’從業者所能進行的各齡飾及變更也應該 屬於本發明的保護範圍。 " 本發明的光學裝置和習知技術不同’即使在玻絲板被反射 盤支援的情況下’也可以通過其他光源所引起的透射光，來檢驗 濾光片或TFT。 另外，本發明的光學裝置可選擇利用透射光及反射光，由此 可準確地觀察濾光片或TFT的全般區域。 此外，利用第二發光單元所引起的透射光的情況下，可增加使用 遮光部件，由此可防止受到反射光的干擾。 【圖式簡單說明】 ，-圖是習知光學裝置的剖視圖。 ，二圖是根據本發明第一實施例的光學裝置剖視圖。 二第三圖表示根據本發明第一實施例的光學裝置中第一光線的 前進方向。 二第四圖表示根據本發明第一實施例的光學裝置中第二光線的 前進方向。 第五圖是本發明的第一實施例中反射片的俯視圖。 f六圖是本發明的第二實施例中遮光部件的俯視圖。 第七圖是本發明的第三實施例中遮光部件的俯視圖。 【主要元件符號說明】 (共計16項元件符號或編號） 10:第一發光單元 20:分光鏡 30:光學透鏡 40:第二發光單元 50:遮光部件 60:反射片 70:反射盤 80:測光器 100:發光單元 200:測光器 A:被測物 B:玻璃基板 K:第一光線 L:光線 反射光 N:透射光[Technical Field] The present invention relates to an optical device for inspecting an object to be measured by transmitted light and reflected light generated by a light source. [Prior Art] The conventional LCD inspection apparatus tests the object to be tested only by transmitted light. In such an inspection apparatus, a light source is disposed under a glass substrate having a transparent bottom surface, and light generated by the light source is transmitted through the glass substrate to transmit light to inspect the object to be tested. The first figure shows such a conventional optical device. As shown in the first figure, the conventional optical device includes a light emitting unit (100) and a photometer (200), wherein light transmitted by the light emitting unit (1) passes through the glass substrate (B) and the measured object (A) After entering the photometer (2〇〇). That is, after the light transmitted by the light-emitting unit (100) passes through the glass substrate (B) and the object (a), the transmitted light can be observed by the photometer (200). Namely, in this conventional optical device, only the transmitted light is used to inspect the object to be tested (A). However, the conventional optical device does not have a member for supporting the glass substrate. Therefore, the glass substrate used as the bottom surface has a characteristic of being severely deformed. Therefore, transmitted light cannot be observed in some fields. Further, if a support member is provided on the bottom surface of the glass substrate, it is not possible to perform inspection using transmitted light like a conventional optical device. Further, when the supporting member is provided on the bottom surface of the glass substrate, it is not possible to accurately inspect the object to be measured using only the reflected light. SUMMARY OF THE INVENTION In view of the above problems, it is an object of the present invention to provide an optical device including a reflective disk for supporting a glass substrate. Another object of the present invention is to provide an optical device capable of inspecting transmitted light and reflected light even when a reflecting disk for supporting a glass substrate is included. 5 Embodiment 1: A first embodiment of the optical apparatus of the present invention will be described below with reference to Figs. 2 to 5. First, the structure of the optical device of the present invention will be described. As shown in the second figure, the optical device of the present invention comprises a first light emitting unit (10), a beam splitter (20), an optical lens (3 inch), a second light emitting unit (40), a light shielding member (50), and a reflection sheet ( 60), reflector (7〇), photometer (80). The first light-emitting unit (10) is for generating and illuminating a first light having a wavelength of a certain size, and the irradiated first light is incident on the beam splitter (2〇). The beam splitter (20) is located on one side of the first light emitting unit (1〇) for reflecting a portion of the incident light, and the other portion of the incident light is transmitted by the beam splitter (2〇). The reflected first light is incident on the object to be measured such as a filter or a TFT, and the first light incident on the filter or the TFT is reflected or transmitted through the surface. The optical lens (30) is disposed below the beam splitter (20) for collecting incident light and transmitting it. A second light emitting unit (40) is disposed on a side below the optical lens (30) for generating and illuminating a second light having a wavelength of a predetermined size. The second light generated by the second light emitting unit (40) is incident on the filter or TFT. The second light incident on the filter or TFT is reflected or transmitted through its surface. The light shielding member (50) is disposed around the second light emitting unit (4〇), and is provided with a light shielding wall for blocking between the second light emitting unit (4〇) and the optical lens (so) The second light ray irradiated by the second light emitting unit (40) is prevented from being reflected at the object to be measured, and then incident on the optical lens (30). In order to effectively surround the periphery of the second light emitting unit (40), the light shielding member (5 〇) may be set to "type", or may be set to a semicircular shape or a flat shape. The reflection sheet (60) is located at the light shielding. The member (50) is disposed below the light shielding member (50). The reflection sheet (60) is a sheet for reflecting light transmitted through the filter or the TFT or the glass substrate. In this embodiment, the reflection sheet ( 60) It may be a prism sheet. The prism sheet is not shown in the fifth figure 1321*653, and the light incident on the prism sheet will be reflected in different directions according to different wavelengths. The prism sheet may be conical or The reflection plate (10) is fixed under the reflection sheet (10). The reflection plate is used to stably fix the object (Α) such as a phosphor film or a TFT and the glass substrate (8) to which the object to be measured is attached. In the example, the object to be measured such as a filter or a TFT or the light reflected by the object to be measured can be observed by a photometer (8〇) disposed above the beam splitter (2〇). 2 and 4, let us look at the optical device of the present invention, using reflected light and transmitted light A method of inspecting an object to be tested. First, a method of inspecting an object to be detected by using a reflection light caused by the first light-emitting unit (1〇) will be described with reference to the third figure. As shown in the third figure, the first light-emitting unit is used. (10) The generated first light (K) is reflected by the beam splitter (20) and is incident on the optical lens (3〇h and the first light (κ) transmitted through the optical lens (30) reaches the filter or TFT. (B) The object to be tested, such as a phosphor film or a TFT (B), which reflects most of the light and transmits only a part of the light. Therefore, as long as the intensity of the first light (K) is not large, most of the light (L) is reflected and returned to the optical lens (3〇). These reflected light (a part of 1〇 will pass through the beam splitter (20) and then reach the photometer (8〇). Thus, using the first light-emitting unit ( 10) The reflected light caused by observing the surface state of the filter or TFT (; B). At this time, the reflected image of the filter facilitates inspection of the convex portion of the filter (ie, this is called φ black) (black) defect). Next, referring to the fourth figure, the transmitted light caused by the second light-emitting unit (4〇) is used to test the object to be tested. Method: As shown in the fourth figure, the light generated by the second light-emitting unit (4〇) directly enters the light beam or tft(b). As explained above, most of the light is reflected in the filter. Therefore, in order to utilize the transmitted light, it is necessary for the second light emitting unit (40) to generate light which is much larger than the intensity of the light generated by the first light emitting unit (1). Light reflected at the filter or the TFT (B) 〇|) is blocked by the light-shielding member (5〇) from entering the optical lens (30). Here, the position of the light-shielding member (5〇) can be appropriately selected to prevent the reflected light (M) from entering the optical lens (3〇) The light (N) transmitted by the filter or the TFT (B) will pass through the glass substrate (B) and reach the reflection sheet (6 〇). In the present embodiment, the reflection sheet (6 〇) 8 is a prism sheet, and the direction of advancement of light is shown in the fifth diagram. As shown in the fifth figure, the incoming light is reflected and dispersed in different directions according to different wavelengths. Among them, a part of the light is re-transmitted through the glass substrate (B) and the filter or TFT (B), and is incident on the optical lens (30). These transmitted light (N) will pass through the beam splitter (2〇) and then reach the photometer (8〇). Thus, the state of the filter or the TFT (B) can be observed by the transmitted light caused by the second light-emitting unit (4〇). At this point, the transmitted image of the filter facilitates inspection of the recessed portion of the filter (ie, this is called a white defect). Thus, when the impurities of the filter or the TFT attached to the glass substrate are inspected, the filter can be accurately observed by selecting the reflected light caused by the first light-emitting unit or the transmitted light caused by the second light-emitting unit. Or the general field of TFT. In addition, when the transmitted light caused by the second light emitting unit is utilized, the light shielding member can be added to prevent interference by the reflected light. Embodiment 2, Next, a third embodiment of the optical apparatus of the present invention will be described with reference to a sixth diagram. Here, the same configuration as that of the first embodiment will be omitted.苐✓, the figure shows a light shielding member in another embodiment of the present invention. As shown in the sixth figure, two or more second light-emitting units (40) and light-shielding members (5 turns) are disposed around the optical lens (3 turns). As shown in the sixth figure, there may be four second light-emitting units (4〇) and light-shielding members (50), but other numbers may be arranged. The practitioner should also understand that in order to prevent the light generated by the (four) two light-emitting unit (5) from being directly reflected on the test object film, it enters the optical lens (3〇), and the light-shielding member (5〇) is in the second light source (4).遮光) can be set around the shade wall with a certain depth. It is also possible to arrange a plurality of second light-emitting units (4〇) and an optical member (50)' around the optical lens (3〇) to thereby more effectively filter the light by reflecting light (symbol N in the fourth figure). Film observation and inspection operations. Embodiment 3 Finally, a third embodiment of the optical apparatus of the present invention will be described with reference to the seventh drawing. Here, the structure of the cigarette of the embodiment 1 is also explained. +, ΐΐΐί shows the money component of the third (the third) of the hair. As with the touch of the mirror (3G) in the seventh figure, the second light unit (10) optical component (10) is connected to the farm. The light shielding member (50) is formed in a ring shape with the optical lens (30) as a t-center, and is provided with a light shielding wall as in the second embodiment. At this time, it can be understood that the mask portion = (50) can be set to be in the shape of a strong horse, or it can be set to a quadrangular shape or a double-angle shape. A plurality of second light-emitting units (4 turns) may be disposed inside the light-shielding member, thereby more effectively performing light-lighting inspection and inspection by reflected light (fourth towel symbol N). The scope of the present invention is not limited to the above embodiments, and different embodiments can be implemented within the scope of the application patents described later. The inventions and modifications that can be made by the practitioners without departing from the scope of the invention are also within the scope of the invention. " The optical device of the present invention is different from the prior art. The filter or TFT can be inspected by transmitted light caused by other light sources even when the glass plate is supported by the reflective disk. Further, the optical device of the present invention can selectively use transmitted light and reflected light, whereby the entire area of the filter or the TFT can be accurately observed. Further, in the case of using the transmitted light caused by the second light-emitting unit, the use of the light-shielding member can be increased, whereby the interference of the reflected light can be prevented. BRIEF DESCRIPTION OF THE DRAWINGS [FIG.] is a cross-sectional view of a conventional optical device. 2 is a cross-sectional view of an optical device according to a first embodiment of the present invention. The second third diagram shows the advancing direction of the first light in the optical device according to the first embodiment of the present invention. The second fourth diagram shows the advancing direction of the second light in the optical device according to the first embodiment of the present invention. The fifth drawing is a plan view of the reflection sheet in the first embodiment of the present invention. F is a plan view of the light shielding member in the second embodiment of the present invention. Figure 7 is a plan view of a light shielding member in a third embodiment of the present invention. [Main component symbol description] (Total 16 component symbols or numbers) 10: First light emitting unit 20: Beam splitter 30: Optical lens 40: Second light emitting unit 50: Light blocking member 60: Reflecting sheet 70: Reflecting disk 80: Metering 100: Light-emitting unit 200: Photometer A: Test object B: Glass substrate K: First light L: Light reflected light N: Transmitted light