TWI319591B - Method to produce semiconductor components and thin-film semiconductor components - Google Patents
Method to produce semiconductor components and thin-film semiconductor componentsInfo
- Publication number
- TWI319591B TWI319591B TW095128566A TW95128566A TWI319591B TW I319591 B TWI319591 B TW I319591B TW 095128566 A TW095128566 A TW 095128566A TW 95128566 A TW95128566 A TW 95128566A TW I319591 B TWI319591 B TW I319591B
- Authority
- TW
- Taiwan
- Prior art keywords
- semiconductor components
- layer
- thin
- produce
- carrier layer
- Prior art date
Links
Classifications
-
- H10P72/74—
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/01—Manufacture or treatment
- H10H20/011—Manufacture or treatment of bodies, e.g. forming semiconductor layers
- H10H20/018—Bonding of wafers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/01—Manufacture or treatment
- H10H20/036—Manufacture or treatment of packages
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
- H10H20/85—Packages
- H10H20/852—Encapsulations
- H10H20/853—Encapsulations characterised by their shape
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
- H10H20/85—Packages
- H10H20/857—Interconnections, e.g. lead-frames, bond wires or solder balls
-
- H10P72/7432—
-
- H10W72/325—
-
- H10W72/352—
-
- H10W72/354—
-
- H10W72/536—
-
- H10W72/5363—
-
- H10W72/884—
-
- H10W74/00—
-
- H10W90/736—
-
- H10W90/756—
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P20/00—Technologies relating to chemical industry
- Y02P20/50—Improvements relating to the production of bulk chemicals
- Y02P20/582—Recycling of unreacted starting or intermediate materials
Landscapes
- Led Device Packages (AREA)
- Laminated Bodies (AREA)
- Recrystallisation Techniques (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102005037023 | 2005-08-05 | ||
| DE102005055293A DE102005055293A1 (de) | 2005-08-05 | 2005-11-21 | Verfahren zur Herstellung von Halbleiterchips und Dünnfilm-Halbleiterchip |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200746231A TW200746231A (en) | 2007-12-16 |
| TWI319591B true TWI319591B (en) | 2010-01-11 |
Family
ID=37135458
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW095128566A TWI319591B (en) | 2005-08-05 | 2006-08-04 | Method to produce semiconductor components and thin-film semiconductor components |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US8058147B2 (zh) |
| EP (1) | EP1911104B1 (zh) |
| JP (1) | JP5361381B2 (zh) |
| KR (1) | KR101330455B1 (zh) |
| CN (1) | CN101238593B (zh) |
| DE (1) | DE102005055293A1 (zh) |
| TW (1) | TWI319591B (zh) |
| WO (1) | WO2007016908A1 (zh) |
Families Citing this family (25)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102005055293A1 (de) | 2005-08-05 | 2007-02-15 | Osram Opto Semiconductors Gmbh | Verfahren zur Herstellung von Halbleiterchips und Dünnfilm-Halbleiterchip |
| DE102007004303A1 (de) * | 2006-08-04 | 2008-02-07 | Osram Opto Semiconductors Gmbh | Dünnfilm-Halbleiterbauelement und Bauelement-Verbund |
| DE102007004301A1 (de) * | 2006-08-04 | 2008-02-07 | Osram Opto Semiconductors Gmbh | Verfahren zur Herstellung eines Halbleiterbauelements und Dünnfilm-Halbleiterbauelement |
| DE102007004304A1 (de) | 2007-01-29 | 2008-07-31 | Osram Opto Semiconductors Gmbh | Dünnfilm-Leuchtdioden-Chip und Verfahren zur Herstellung eines Dünnfilm-Leuchtdioden-Chips |
| DE102007017113A1 (de) | 2007-01-31 | 2008-08-07 | Osram Opto Semiconductors Gmbh | Halbleiterbauelement mit einer optisch aktiven Schicht, Anordnung mit einer Vielzahl von optisch aktiven Schichten und Verfahren zur Herstellung eines Halbleiterbauelements |
| DE102007010755A1 (de) | 2007-03-06 | 2008-10-30 | Osram Opto Semiconductors Gmbh | Anordnung mit einem Halbleiterchip und einer Lichtleiterschicht |
| DE102007030129A1 (de) * | 2007-06-29 | 2009-01-02 | Osram Opto Semiconductors Gmbh | Verfahren zur Herstellung einer Mehrzahl optoelektronischer Bauelemente und optoelektronisches Bauelement |
| DE102007041896A1 (de) | 2007-09-04 | 2009-03-05 | Osram Opto Semiconductors Gmbh | Halbleiterbauelement und Verfahren zur Herstellung eines Halbleiterbauelements |
| DE102007053286B4 (de) | 2007-09-20 | 2025-03-27 | Osram Oled Gmbh | Verfahren zur Herstellung eines optoelektronischen Bauelements |
| DE102007051168B4 (de) * | 2007-09-26 | 2026-01-29 | OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung | Verfahren zur Herstellung eines LED-Moduls und Modul |
| DE102007054800B4 (de) | 2007-09-28 | 2024-12-12 | OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung | Lumineszenzdiodenchip mit Lumineszenzkonversionsvorrichtung und Verfahren zum Herstellen von Lumineszenzdiodenchips mit Lumineszenzkonversionsvorrichtung |
| DE102008005935A1 (de) | 2007-11-29 | 2009-06-04 | Osram Opto Semiconductors Gmbh | Halbleiteranordnung sowie Verfahren zur Herstellung einer Halbleiteranordnung |
| DE102008008599A1 (de) * | 2007-12-20 | 2009-06-25 | Osram Opto Semiconductors Gmbh | Halbleiteranordnung, insbesondere Leuchtdiodenanordnung und Leuchtmittelanordnung |
| DE102008019612A1 (de) * | 2008-04-18 | 2009-10-22 | Osram Opto Semiconductors Gmbh | Optoelektronisches Bauteil |
| DE102008025693A1 (de) | 2008-05-29 | 2009-12-03 | Osram Opto Semiconductors Gmbh | Optoelektronisches Bauelement |
| WO2010016206A1 (ja) | 2008-08-04 | 2010-02-11 | パナソニック株式会社 | フレキシブル半導体装置の製造方法 |
| KR100969131B1 (ko) * | 2010-03-05 | 2010-07-07 | 엘지이노텍 주식회사 | 발광 소자 제조방법 |
| KR101011757B1 (ko) | 2010-04-09 | 2011-02-07 | 엘지이노텍 주식회사 | 발광 소자, 발광 소자의 제조방법 및 발광 소자 패키지 |
| KR101028277B1 (ko) * | 2010-05-25 | 2011-04-11 | 엘지이노텍 주식회사 | 발광 소자, 발광 소자 제조방법, 발광 소자 패키지 및 라이트 유닛 |
| DE102010054068A1 (de) * | 2010-12-10 | 2012-06-14 | Osram Opto Semiconductors Gmbh | Verfahren zur Herstellung eines optoelektronischen Bauelements und Bauelement |
| JP2012191019A (ja) * | 2011-03-10 | 2012-10-04 | Shin Etsu Chem Co Ltd | 光半導体装置用接着剤シートの製造方法及び光半導体装置用接着剤シート |
| DE102013210668A1 (de) * | 2013-06-07 | 2014-12-11 | Würth Elektronik GmbH & Co. KG | Verfahren zur Herstellung eines optischen Moduls |
| KR20160032236A (ko) * | 2013-07-19 | 2016-03-23 | 코닌클리케 필립스 엔.브이. | 광학 요소를 가지며 기판 캐리어를 갖지 않는 pc led |
| DE102017112223A1 (de) | 2017-06-02 | 2018-12-06 | Osram Opto Semiconductors Gmbh | Halbleiterlaser-Bauteil und Verfahren zur Herstellung eines Halbleiterlaser-Bauteils |
| DE102020118260B3 (de) * | 2020-07-10 | 2021-05-06 | Jenoptik Optical Systems Gmbh | Verfahren zum Herstellen einer optischen Vorrichtung |
Family Cites Families (79)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE8711105U1 (de) * | 1987-08-14 | 1987-11-26 | Siemens AG, 1000 Berlin und 8000 München | Leiterplatte für die Elektronik |
| JP2953468B2 (ja) | 1989-06-21 | 1999-09-27 | 三菱化学株式会社 | 化合物半導体装置及びその表面処理加工方法 |
| JPH0992878A (ja) | 1995-09-25 | 1997-04-04 | Shin Etsu Handotai Co Ltd | 半導体発光素子及びその製造方法 |
| US5779924A (en) | 1996-03-22 | 1998-07-14 | Hewlett-Packard Company | Ordered interface texturing for a light emitting device |
| KR100481994B1 (ko) * | 1996-08-27 | 2005-12-01 | 세이코 엡슨 가부시키가이샤 | 박리방법,박막디바이스의전사방법,및그것을이용하여제조되는박막디바이스,박막집적회로장치및액정표시장치 |
| DE19640594B4 (de) * | 1996-10-01 | 2016-08-04 | Osram Gmbh | Bauelement |
| JP4032443B2 (ja) | 1996-10-09 | 2008-01-16 | セイコーエプソン株式会社 | 薄膜トランジスタ、回路、アクティブマトリクス基板、液晶表示装置 |
| US5833073A (en) | 1997-06-02 | 1998-11-10 | Fluoroware, Inc. | Tacky film frame for electronic device |
| US6071795A (en) * | 1998-01-23 | 2000-06-06 | The Regents Of The University Of California | Separation of thin films from transparent substrates by selective optical processing |
| JP2000049382A (ja) | 1998-07-27 | 2000-02-18 | Matsushita Electron Corp | 半導体発光装置及びその製造方法 |
| EP0977277A1 (en) | 1998-07-28 | 2000-02-02 | Interuniversitair Microelektronica Centrum Vzw | Devices for emitting radiation with a high efficiency and a method for fabricating such devices |
| US7253445B2 (en) * | 1998-07-28 | 2007-08-07 | Paul Heremans | High-efficiency radiating device |
| US6504180B1 (en) * | 1998-07-28 | 2003-01-07 | Imec Vzw And Vrije Universiteit | Method of manufacturing surface textured high-efficiency radiating devices and devices obtained therefrom |
| US6876003B1 (en) * | 1999-04-15 | 2005-04-05 | Sumitomo Electric Industries, Ltd. | Semiconductor light-emitting device, method of manufacturing transparent conductor film and method of manufacturing compound semiconductor light-emitting device |
| JP2001168344A (ja) | 1999-12-13 | 2001-06-22 | Sony Corp | 薄膜トランジスタ及びその製造方法と加熱装置並びに表示装置 |
| DE10017336C2 (de) | 2000-04-07 | 2002-05-16 | Vishay Semiconductor Gmbh | verfahren zur Herstellung von strahlungsemittierenden Halbleiter-Wafern |
| JP2003532298A (ja) * | 2000-04-26 | 2003-10-28 | オスラム オプト セミコンダクターズ ゲゼルシャフト ミット ベシュレンクテル ハフツング | 発光半導体素子 |
| DE10020464A1 (de) | 2000-04-26 | 2001-11-08 | Osram Opto Semiconductors Gmbh | Strahlungsemittierendes Halbleiterbauelement auf GaN-Basis |
| DE10051465A1 (de) * | 2000-10-17 | 2002-05-02 | Osram Opto Semiconductors Gmbh | Verfahren zur Herstellung eines Halbleiterbauelements auf GaN-Basis |
| TWI289944B (en) * | 2000-05-26 | 2007-11-11 | Osram Opto Semiconductors Gmbh | Light-emitting-diode-element with a light-emitting-diode-chip |
| WO2002009192A1 (en) | 2000-07-24 | 2002-01-31 | Matsushita Electric Industrial Co., Ltd. | Semiconductor device, liquid crystal display device, el display device, semiconductor film producing method, and semiconductor device producing method |
| DE10040448A1 (de) | 2000-08-18 | 2002-03-07 | Osram Opto Semiconductors Gmbh | Halbleiterchip und Verfahren zu dessen Herstellung |
| US6562648B1 (en) * | 2000-08-23 | 2003-05-13 | Xerox Corporation | Structure and method for separation and transfer of semiconductor thin films onto dissimilar substrate materials |
| DE10041328B4 (de) * | 2000-08-23 | 2018-04-05 | Osram Opto Semiconductors Gmbh | Verpackungseinheit für Halbleiterchips |
| US6614103B1 (en) * | 2000-09-01 | 2003-09-02 | General Electric Company | Plastic packaging of LED arrays |
| DE10051159C2 (de) * | 2000-10-16 | 2002-09-19 | Osram Opto Semiconductors Gmbh | LED-Modul, z.B. Weißlichtquelle |
| JP4461616B2 (ja) * | 2000-12-14 | 2010-05-12 | ソニー株式会社 | 素子の転写方法、素子保持基板の形成方法、及び素子保持基板 |
| EP3078899B1 (en) * | 2001-08-09 | 2020-02-12 | Everlight Electronics Co., Ltd | Led illuminator and card type led illuminating light source |
| DE20220258U1 (de) | 2002-09-20 | 2004-02-19 | Osram Opto Semiconductors Gmbh | Halbleiterchip |
| TWI226139B (en) * | 2002-01-31 | 2005-01-01 | Osram Opto Semiconductors Gmbh | Method to manufacture a semiconductor-component |
| DE10303977A1 (de) * | 2002-01-31 | 2003-11-27 | Osram Opto Semiconductors Gmbh | Verfahren zur Herstellung eines Halbleiterbauelements |
| JP2004047975A (ja) * | 2002-05-17 | 2004-02-12 | Semiconductor Energy Lab Co Ltd | 積層体の転写方法及び半導体装置の作製方法 |
| JP2003347524A (ja) * | 2002-05-28 | 2003-12-05 | Sony Corp | 素子の転写方法、素子の配列方法及び画像表示装置の製造方法 |
| EP1536487A4 (en) * | 2002-05-28 | 2008-02-06 | Matsushita Electric Works Ltd | ELECTROLUMINESCENT ELEMENT, LIGHT EMITTING DEVICE AND SURFACE EMISSION LIGHTING DEVICE USING THE SAME |
| JP2004047691A (ja) * | 2002-07-11 | 2004-02-12 | Seiko Epson Corp | 半導体装置の製造方法、電気光学装置、及び電子機器 |
| DE10234978A1 (de) | 2002-07-31 | 2004-02-12 | Osram Opto Semiconductors Gmbh | Oberflächenmontierbares Halbleiterbauelement und Verfahren zu dessen Herstellung |
| EP1525619A1 (de) * | 2002-07-31 | 2005-04-27 | Osram Opto Semiconductors GmbH | Oberflächenmontierbares halbleiterbauelement und verfahren zu dessen herstellung |
| US7078737B2 (en) * | 2002-09-02 | 2006-07-18 | Matsushita Electric Industrial Co., Ltd. | Light-emitting device |
| TWI313062B (en) * | 2002-09-13 | 2009-08-01 | Ind Tech Res Inst | Method for producing active plastic panel displayers |
| DE10245628A1 (de) * | 2002-09-30 | 2004-04-15 | Osram Opto Semiconductors Gmbh | Elektromagnetische Strahlung emittierender Halbleiterchip und Verfahren zu dessen Herstellung |
| DE10245631B4 (de) * | 2002-09-30 | 2022-01-20 | OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung | Halbleiterbauelement |
| US20040068572A1 (en) * | 2002-10-04 | 2004-04-08 | Zhixue Wu | Methods and systems for communicating over a client-server network |
| JP4097510B2 (ja) * | 2002-11-20 | 2008-06-11 | 株式会社沖データ | 半導体装置の製造方法 |
| JP4472314B2 (ja) * | 2002-11-22 | 2010-06-02 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法、表示装置の作製方法、および発光装置の作製方法 |
| JP4662918B2 (ja) | 2003-01-31 | 2011-03-30 | オスラム オプト セミコンダクターズ ゲゼルシャフト ミット ベシュレンクテル ハフツング | 半導体構成素子の製造のための方法 |
| US6786390B2 (en) * | 2003-02-04 | 2004-09-07 | United Epitaxy Company Ltd. | LED stack manufacturing method and its structure thereof |
| US6903381B2 (en) * | 2003-04-24 | 2005-06-07 | Opto Tech Corporation | Light-emitting diode with cavity containing a filler |
| TWI330413B (en) * | 2005-01-25 | 2010-09-11 | Epistar Corp | A light-emitting device |
| US20050033638A1 (en) * | 2003-08-08 | 2005-02-10 | Toni-Diane Donnet | System and method for advertising compliance |
| DE10339985B4 (de) * | 2003-08-29 | 2008-12-04 | Osram Opto Semiconductors Gmbh | Optoelektronisches Bauelement mit einer transparenten Kontaktschicht und Verfahren zu dessen Herstellung |
| DE10353679A1 (de) * | 2003-11-17 | 2005-06-02 | Siemens Ag | Kostengünstige, miniaturisierte Aufbau- und Verbindungstechnik für LEDs und andere optoelektronische Module |
| US7341882B2 (en) * | 2003-11-18 | 2008-03-11 | Uni Light Technology Inc. | Method for forming an opto-electronic device |
| JP4496774B2 (ja) * | 2003-12-22 | 2010-07-07 | 日亜化学工業株式会社 | 半導体装置の製造方法 |
| JP4368225B2 (ja) * | 2004-03-10 | 2009-11-18 | 三洋電機株式会社 | 窒化物系半導体発光素子の製造方法 |
| US7427782B2 (en) * | 2004-03-29 | 2008-09-23 | Articulated Technologies, Llc | Roll-to-roll fabricated light sheet and encapsulated semiconductor circuit devices |
| EP1736035A4 (en) | 2004-03-29 | 2009-01-07 | Articulated Technologies Llc | FROM ROLE TO ROLLED LIGHT LEAF AND CAPSULE SEMICONDUCTOR CIRCUIT ELEMENTS |
| WO2005100016A2 (de) | 2004-04-16 | 2005-10-27 | Lucea Ag | Lichtemittierendes paneel und optisch wirksame folie |
| US6956246B1 (en) * | 2004-06-03 | 2005-10-18 | Lumileds Lighting U.S., Llc | Resonant cavity III-nitride light emitting devices fabricated by growth substrate removal |
| US20050274971A1 (en) * | 2004-06-10 | 2005-12-15 | Pai-Hsiang Wang | Light emitting diode and method of making the same |
| DE102005013894B4 (de) * | 2004-06-30 | 2010-06-17 | Osram Opto Semiconductors Gmbh | Elektromagnetische Strahlung erzeugender Halbleiterchip und Verfahren zu dessen Herstellung |
| WO2006012838A2 (de) * | 2004-07-30 | 2006-02-09 | Osram Opto Semiconductors Gmbh | Verfahren zur herstellung von halbleiterchips in dünnfilmtechnik und halbleiterchip in dünnfilmtechnik |
| DE102004036962A1 (de) | 2004-07-30 | 2006-03-23 | Osram Opto Semiconductors Gmbh | Verfahren zur Herstellung von Halbleiterchips in Dünnfilmtechnik und Halbleiterchip in Dünnfilmtechnik |
| KR100616600B1 (ko) * | 2004-08-24 | 2006-08-28 | 삼성전기주식회사 | 수직구조 질화물 반도체 발광소자 |
| JP4254669B2 (ja) * | 2004-09-07 | 2009-04-15 | 豊田合成株式会社 | 発光装置 |
| US7476910B2 (en) * | 2004-09-10 | 2009-01-13 | Kabushiki Kaisha Toshiba | Semiconductor light emitting device and method for manufacturing the same |
| DE102004050371A1 (de) | 2004-09-30 | 2006-04-13 | Osram Opto Semiconductors Gmbh | Optoelektronisches Bauelement mit einer drahtlosen Kontaktierung |
| US7256483B2 (en) | 2004-10-28 | 2007-08-14 | Philips Lumileds Lighting Company, Llc | Package-integrated thin film LED |
| JP4906256B2 (ja) * | 2004-11-10 | 2012-03-28 | 株式会社沖データ | 半導体複合装置の製造方法 |
| JP2006147787A (ja) | 2004-11-18 | 2006-06-08 | Sony Corp | 発光素子及びその製造方法 |
| KR100638666B1 (ko) * | 2005-01-03 | 2006-10-30 | 삼성전기주식회사 | 질화물 반도체 발광소자 |
| US7596398B2 (en) * | 2005-03-01 | 2009-09-29 | Masimo Laboratories, Inc. | Multiple wavelength sensor attachment |
| KR101249230B1 (ko) * | 2005-03-30 | 2013-04-01 | 코닌클리즈케 필립스 일렉트로닉스 엔.브이. | 플렉시블 led 어레이 |
| US20060237735A1 (en) * | 2005-04-22 | 2006-10-26 | Jean-Yves Naulin | High-efficiency light extraction structures and methods for solid-state lighting |
| KR100599012B1 (ko) | 2005-06-29 | 2006-07-12 | 서울옵토디바이스주식회사 | 열전도성 기판을 갖는 발광 다이오드 및 그것을 제조하는방법 |
| DE102005055293A1 (de) | 2005-08-05 | 2007-02-15 | Osram Opto Semiconductors Gmbh | Verfahren zur Herstellung von Halbleiterchips und Dünnfilm-Halbleiterchip |
| DE102007004303A1 (de) | 2006-08-04 | 2008-02-07 | Osram Opto Semiconductors Gmbh | Dünnfilm-Halbleiterbauelement und Bauelement-Verbund |
| DE102007004301A1 (de) | 2006-08-04 | 2008-02-07 | Osram Opto Semiconductors Gmbh | Verfahren zur Herstellung eines Halbleiterbauelements und Dünnfilm-Halbleiterbauelement |
| TW200830593A (en) | 2006-11-15 | 2008-07-16 | Univ California | Transparent mirrorless light emitting diode |
| DE102007004304A1 (de) | 2007-01-29 | 2008-07-31 | Osram Opto Semiconductors Gmbh | Dünnfilm-Leuchtdioden-Chip und Verfahren zur Herstellung eines Dünnfilm-Leuchtdioden-Chips |
-
2005
- 2005-11-21 DE DE102005055293A patent/DE102005055293A1/de not_active Withdrawn
-
2006
- 2006-08-04 CN CN2006800287081A patent/CN101238593B/zh active Active
- 2006-08-04 US US11/990,099 patent/US8058147B2/en active Active
- 2006-08-04 JP JP2008524355A patent/JP5361381B2/ja active Active
- 2006-08-04 KR KR1020087005494A patent/KR101330455B1/ko active Active
- 2006-08-04 WO PCT/DE2006/001367 patent/WO2007016908A1/de not_active Ceased
- 2006-08-04 EP EP06775806.0A patent/EP1911104B1/de active Active
- 2006-08-04 TW TW095128566A patent/TWI319591B/zh active
Also Published As
| Publication number | Publication date |
|---|---|
| EP1911104A1 (de) | 2008-04-16 |
| DE102005055293A1 (de) | 2007-02-15 |
| JP2009503878A (ja) | 2009-01-29 |
| EP1911104B1 (de) | 2019-05-15 |
| CN101238593A (zh) | 2008-08-06 |
| TW200746231A (en) | 2007-12-16 |
| US8058147B2 (en) | 2011-11-15 |
| KR101330455B1 (ko) | 2013-11-15 |
| CN101238593B (zh) | 2010-05-26 |
| US20100133564A1 (en) | 2010-06-03 |
| WO2007016908A1 (de) | 2007-02-15 |
| KR20080035679A (ko) | 2008-04-23 |
| JP5361381B2 (ja) | 2013-12-04 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| TWI319591B (en) | Method to produce semiconductor components and thin-film semiconductor components | |
| TW200608455A (en) | Semiconductor film manufacturing method and substrate manufacturing method | |
| WO2004101177A3 (de) | Verfahren zur beschichtung von substraten mit kohlenstoffbasiertem material | |
| WO2004090201A3 (fr) | Procede de fabrication de cristaux monocristallins | |
| TW200628574A (en) | Adhesion promoter, electroactive layer and electroactive device comprising same, and method | |
| WO2005108108A8 (de) | Sicherheitselement und verfahren zu seiner herstellung | |
| EP2199437A3 (en) | Organic semiconductor solution | |
| TW200520112A (en) | Method for production of a film | |
| AU2003244361A1 (en) | Method for depositing inorganic/organic films | |
| WO2008017472A3 (de) | Verfahren zum herstellen einer porösen, keramischen oberflächenschicht | |
| SG150377A1 (en) | Adhesive sheet for producing semiconductor device, semiconductor device therewith, and manufacturing method therefor | |
| DE60043946D1 (de) | Verfahren für die herstellung eigekapselten organischen elektronischen vorrichtungen | |
| AU2003214052A1 (en) | Self-adhesive, addition cross-linking silicone-rubber blends, method for their production, method for producing composite moulded parts and use of the latter | |
| AU2003247130A1 (en) | Method of transferring of a layer of strained semiconductor material | |
| TW200623425A (en) | Method of forming at least one thin film device | |
| TW200520609A (en) | Mask, method for manufacturing thereof, method for manufacturing organic electroluminescent device, and organic electroluminescent device | |
| WO2005104259A3 (de) | Verkapselung für ein organisches elekronisches bauteil, herstellungsverfahren dazu, sowie verwendung | |
| WO2009005042A1 (ja) | 金属材料、その製造方法、及びそれを用いた電気電子部品 | |
| ATE395985T1 (de) | Beschichtungsverfahren und beschichtungsmittel | |
| ATE519223T1 (de) | Verfahren zur herstellung mehrerer halbleiteranordnungen und trägersubstrat | |
| TW200644104A (en) | Manufacturing method for electronic component, electronic component, and electronic equipment | |
| ATE514049T1 (de) | Mikrostrukturen | |
| MY154939A (en) | Cover tape and method for manufacture | |
| TW200635984A (en) | Novel polycarbosilane and method of producing the same, film-forming composition, and film and method of forming the same | |
| TW200603270A (en) | Method to form a film |