TWI374770B - Dehumidification method and dehumidifier system - Google Patents

Description

1374770 IX. EMBODIMENT OF THE INVENTION TECHNICAL FIELD The present invention relates to a manufacturing apparatus room for manufacturing a dehumidification of a supply air, a L-tuning of a building, a dry air to be used, a liquid crystal, an electron, and the like. 'spear: wet: and manufacturing semi-conducting air dehumidification, etc., for the air to be treated =, the dehumidification device of the method inside the transport device, more specifically, the method and the dehumidification roller for implementing the dehumidification, and rotating the removal ;: The air to be treated carrying the dehumidifying agent is regenerated at the same time; the dehumidification agent is dehumidified, and the dehumidifying agent for dehumidifying the treated air is continuously dehumidified, and the dehumidifying device is used. And the dehumidification method for the prior art. [Prior Art] Oxidation is generated in each step of the wafer fabrication process in a semiconductor manufacturing plant: = The formation of the oxide film is known to be affected by water in recent years.

: One or two So, in order to reduce the defects of the finished product, it is necessary to remove the moisture in the air such as the inside of the manufacturing device. The method of removing moisture in the air in the manufacturing apparatus mainly includes a method of purging by dry nitrogen gas and a method of dehumidifying. With the method of purging the nitrogen gas, the amount of moisture can be made very low because the moisture in the device chamber is ejected from the outside of the device, but the running cost (the cost of dry nitrogen, and N2 Pressure Swing Adsorption (PAS; nitrogen generator) The operating cost is higher and it is necessary to manage the oxygen concentration in the chamber. On the other hand, the dehumidification method does not require drying of nitrogen, and it does not need to manage the oxygen concentration. Therefore, compared with the method of using the dry nitrogen to be cleaned, the running cost is higher than that of the 312XP/invention specification (supplement)/96·10/96122874 6

V 1374770 is low.

Therefore, in recent years, there has been research on a dehumidification apparatus for the purpose of dehumidifying a semiconductor manufacturing apparatus room or the like. The dehumidifying apparatus disclosed in Japanese Laid-Open Patent Publication No. 2004-000824, the entire disclosure of which is incorporated herein by reference. An adsorbent composed of one of Nd, Ce, and Pr or a plurality of elements substituted with aluminum citrate; and the rotating region of the drum is divided into an adsorption zone and a regeneration zone; and is provided with: a gas to be treated A path supplied to the adsorption zone, a path for supplying a gas treated in the adsorption zone to the target space, and a path for supplying the regeneration gas to the regeneration zone. The method for obtaining such a dry air for such a dehumidifying device is, for example, (i) adding a thickness of the dehumidifying drum, or increasing the diameter of the dehumidifying drum, or increasing the number of the dehumidifying drum to a plurality, thereby increasing the processing area; (1) reducing A method of reducing the surface speed through which the air to be treated is passed, and a method of reducing the amount of processing per unit time; (iii) a method of increasing the regeneration temperature and increasing the regeneration efficiency. For example, in Japanese Patent Laid-Open (10) No. 44 of the Patent Document 2 There is a dehumidification device that discloses two dehumidification rollers. [Patent Document 1] Japanese Laid-Open Patent Publication No. 2004-160444 (Japanese Patent Application No. JP-A No. 2004-160444) SUMMARY OF THE INVENTION (Problems to be Solved by the Invention) There is a problem of increasing the size of the dehumidification device but the above-mentioned (i) increasing the treatment area 312XP / invention specification (supplement) / 96·1 〇 / 96122874 7 丄) / 4770 size In addition, the above (i method, because the reduction of the average! The amount of processing of the table: the side of the c-quantity • because of the method of increasing the regeneration temperature, due to the efficiency of t, the increase in operation The object of the present invention is to provide a dehumidifying device for removing P dehumidification method which can reduce the dew point of dehumidified air in a simple manner without being able to operate the conditions of the female Φ5 锑 队 、 θ θ θ θ 装置 装置 装置 装置 装置 装置 装置 装置 装置 装置 装置 装置 装置 装置 装置 装置 装置 装置 装置 装置In order to solve the above-mentioned problems of the prior art, the U method and the method for implementing the dehumidification (the means for solving the problem) have been studied intensively, and the following items (1) and (2) have been found, and the present invention has been completed. (1) The B-machine is used between the regeneration zone and the cooling zone, and the functional zone is supplied with cooling/-/using or cooling and drying functional zones; or a functional zone is provided between the cooling:::dehumidification zone, and Functional area supply, cooling, cooling and drying function zone flow ventilation in the area of "excluding": door, set this area 'and supply the heart to the functional area ^ machine J ^ area circulation milk, worse Increasing the adsorption capacity of the desiccant and reducing the waypoint of the dehumidified air' (2) by increasing the surface velocity of the gas flowing through the functional zone to the functional zone, and setting it faster than other zones, the dehumidification can be further improved. Air dew point effect, etc. In other words, the dehumidifying method of the present invention (1) divides the opening surface of the dehumidifying drum composed of the carrier in which the through-rolling cavity is formed in the direction of the rotating shaft and the dehumidifying agent carried on the carrier into the dehumidifying zone and is regenerated. Zone and cooling zone, in 312XP / invention manual (supplement) / 96-1 〇 /96122874 〇 1374770 to supply the treated air to the dehumidification zone while rotating the dehumidification drum, and supply regeneration gas to the regeneration zone, The cooling zone supplies a cooling gas, and a dehumidification method for continuously dehumidifying the treated air and regenerating the dehumidifying agent; an organic energy zone is disposed between the regeneration zone and the cooling zone; and the functional zone is protected by cooling or drying the dehumidification The functional area of the drum* the circulating gas; the surface speed of the circulating gas supplied to the functional area to the functional area is set to 〇5~1〇 times the surface speed of the cooling gas supplied to the cooling zone;... the functional area The area is 0.003 to 0.07 of the opening area of the dehumidifying drum. horse

Further, in the dehumidifying method according to the second aspect of the invention, the opening of the dehumidifying roller formed by the carrier in which the ventilation hole is formed in the direction of the rotation axis and the dehumidifying agent carried on the carrier is divided into the dragon, a regeneration zone and a cooling zone, supplying the treated gas to the dehumidification zone while rotating the dehumidification zone and supplying the regeneration gas to the regeneration zone, supplying cooling body to the cooling zone, and continuously dehumidifying the treated air and regenerating a dehumidifying agent dehumidifying method; an organic energy zone is disposed between the cooling zone and the dehumidifying zone; the functional zone of the dehumidifying drum is supplied to the functional zone for cooling or drying the circulating gas; ♦ the functional zone is supplied to the functional zone The surface velocity of the circulating gas is set. The surface velocity of the cooling gas supplied to the cooling zone is #0.5 to 10 times; 'the area of the functional zone is 0.003 to 0.07 to the opening surface of the dehumidifying drum. 4 Further, the 'dehumidification method of the present invention (3)' will be carried by the carrier of the K, the county=hole in the direction of the rotation axis 312XP/invention specification (supplement)/96-10/96122874 9 and carried in the carrier The dehumidifying agent on the body is composed of: an open surface of the wet rolling, which is divided into a dehumidifying zone, a regeneration zone and a cooling zone. Dehumidification method is provided in the dehumidification zone by supplying the treated air 1 to the dehumidification zone and supplying the regeneration gas to the regeneration zone, supplying the cooling gas to the cooling zone, continuously dehumidifying the process air, and regenerating the dehumidification agent. An organic energy zone is disposed between the regeneration zone and the functional zone for heating the dehumidification drum; the surface velocity of the functional zone is supplied to the functional zone, and the regeneration zone is provided for The surface speed of the regenerative gas should be 05 to 10 times; the area of the functional area should be slightly and obvious: Hui Wei 〇 7. In addition, the dehumidification device of the present invention (4) includes a dehumidification roller which is a carrier in which a ventilation hole is formed in the direction of the rotation axis, and is carried on the carrier. a dehumidification drum formed by the dehumidifying agent, wherein the opening surface is divided into: a dehumidification zone, a regeneration zone, a cooling zone, and a functional zone disposed between the regeneration zone and the cooling zone; the dividing member; 'rotating the dehumidification drum; a first supply means for supplying the treated air to the dehumidification zone; a second supply means for supplying a regeneration gas second supply means for supplying the cooling gas to the cooling zone, heating Means, which is disposed in the front stage of the regeneration zone and heats the regenerator; and 312XP/invention specification (supplement)/9匕] ο,% 122874 functional zone circulation gas supply means, through gas; wherein 'the functional area 0。 The 003~0. 07. The ratio of the area of the opening surface of the functional zone to the wetness roller of the functional zone is further provided. The dehumidifying device of the invention (5) is provided with: a dehumidification roll, which is composed of a chain brace & ^ _ rotating shaft a dehumidification drum formed by a carrier having a venting cavity and a dehumidifying agent supported on the carrier, wherein the opening surface is divided by a dividing member into: a dehumidifying zone, a regeneration zone, a cooling zone, and the cooling zone; a functional zone between the dehumidification zones; the dividing member; a rotating means for rotating the dehumidification drum; a first supply means for supplying the treated air to the dehumidification zone; and a second supply means for supplying the regeneration gas to the regeneration zone; a third supply means for supplying a cooling gas to the cooling zone; a heating means disposed in a portion of the regeneration zone and heating the regeneration gas; and a functional zone flow gas supply means for supplying the functional zone with a gas flow in the functional zone The ratio of the area of the functional area to the open area of the dehumidification roller is 〇·003~0. 07. In addition, the dehumidifying apparatus of the present invention (6) includes: a dehumidifying drum which is a dehumidifying drum formed of a carrier in which a ventilation hole is formed in a direction of a rotation axis, and a dehumidifying agent carried on the carrier; The surface is divided into: a dehumidification zone, a regeneration zone, a cooling zone, and a functional zone between the dehumidification zone and the regeneration zone; the division member; a rotating means for rotating the dehumidification drum; a first supply means 'which supplies the treated air to the dehumidification zone; - a supply means for supplying the regeneration gas to the regeneration zone; and a second supply means for supplying cooling to the cooling zone a heating means disposed in a portion of the regeneration zone and heating the regeneration gas; a functional zone flow gas supply means for supplying a functional zone flow gas to the functional zone; and a second heating means for heating the functional zone to circulate 003-0. 07 〇 (Effect of the invention) According to the present invention, it is provided that the ratio of the area of the functional area to the opening area of the dehumidification drum is 0. 003-0. A dehumidifying method for reducing the dew point of the dehumidified air and a dehumidifying device for performing the dehumidifying method by a simple method, wherein the size of the dehumidifying device is increased, and the operating condition of the dehumidifying device is not greatly changed. [Embodiment] The first aspect of the present invention The dehumidification method is described with reference to Fig. 3. Fig. 1 is a view showing an example of a dehumidification drum of a dehumidifying apparatus provided to carry out the dehumidification method of the first embodiment of the present invention, and Fig. 2 is for carrying out the first embodiment of the present invention. The dehumidification apparatus of the dehumidification apparatus is shown in the third embodiment in the form of a division member when viewed from the side of the opening of the cylinder of Fig. 1. Fig. i 312XP/invention specification (supplement)/96-10/96122874 0 1374770 The dehumidification/cylinder 1 is composed of a carrier and a dehumidifying agent carried by the carrier, and a roller shaft 5 is mounted at the center of the dehumidifying drum 1. In the dehumidifying cylinder, a ventilation hole is formed in the dehumidification roller. The opening faces 4a and 4b of the drum 1 have the opening P 3 of the air gap. Therefore, the opening of the dehumidifying drum 1 is wide, and the opening surface 4b j is the air when the dehumidifying drum 1 is ventilated or Body At the inlet, the venting cavity becomes a flow path of air, and the ventilated air or gas contacts the desiccant in the through-hole cavity, and moisture moves between the ventilated air or gas and the desiccant. The opening face 4a is divided by the first dividing member 6a, and the opening face is divided by the second dividing member 6b, whereby the dehumidifying drum i is surrounded by the regeneration zone 8, the cooling zone 9, and the function zone 1G. 7. The treated air is dehumidified by moisture absorption of the moisture in the air to be treated by the dehumidifying agent. The regeneration zone 8 dehumidifies the moisture-removing dehumidifying agent to regenerate the moisture absorption property of the dehumidifying agent. Cooling the regenerated dehumidifier. The functional zone 1 vents the gas flowing through the functional zone. In addition, the first dividing member Φ 6a and the second dividing member 6b are fixed in the drum box 21 of the dehumidifying device 20 in Fig. 2, and within a degree that does not hinder the rotation of the dehumidifying drum, the dehumidification is close to the dehumidification Roller 1. Then, the dehumidifying drum 1 is placed in a rotatable state in the drum box 21 of the dehumidifying device 2 through the drum shaft 5. In FIG. 2, the dehumidifying device 20 is composed of: the dehumidifying drum 1 shown in FIG. 1, the drum box 21 rotatably provided in the dehumidifying drum 1, the drum shaft 5, the first dividing member 6a, and the second dividing member. 6b, first supply machine 22, second supply machine 23, third supply machine 24, heating device 25, and 312XP/invention specification (supplement)/96-10/96122874 13 1374770 not shown in the drawing It is composed of a motor. Further, in Fig. 2, the position of the first dividing member 6a in the roll in phase 21 is indicated by a broken line. In addition, the dehumidifying device 20 is provided with: a processed air supply pipe 26 connecting the first supply machine 22 and the drum box, for discharging from the dehumidifying zone 7 The first regeneration gas supply pipe 28 of the heating device 25 and the second regeneration gas supply pipe 29 connected to the heating device 25 are used to connect the second regeneration gas supply pipe 29 from the regeneration zone 8 a regeneration zone exhaust gas exhaust pipe 3 that discharges the regeneration gas of the regeneration zone, a cooling gas supply officer 31 that connects the third supply machine 24 with the drum tank 21, and a cooling zone discharge discharge gas of the cooling zone from the cooling zone 9 The gas exhaust pipe 32, the functional zone flow gas supply pipe 33 for supplying the functional zone 10 with the gas flowing through the functional zone, and the functional zone exhaust gas exhaust pipe 34 for discharging the gas from the functional zone discharge area. In Fig. 3, (3-1) is a view when the dehumidifying drum i is viewed from the opening surface 4a side, and (3-2) is a pattern when the dehumidifying drum i is viewed from the opening surface 4b side. The opening face 4a is sequentially divided by the first dividing member 6a in the rotating direction 38 of the dehumidifying drum 1 into the dehumidifying zone 7, the regeneration zone 8, the functional zone 10, and the cooling zone 9. In addition, the opening surface 4b is sequentially divided by the second dividing member 6b in the rotating direction 38 of the dehumidifying drum 1 into: the dehumidifying zone 7, the regeneration zone 8, the functional zone 1 and the cooling zone i (3_i) The position of the first dividing member 6a in the middle is symmetrical with the position of the second dividing member 6b in (3-2). The dehumidification method according to the first aspect of the present invention is carried out using the dehumidification apparatus 2 as follows. First, the internal treated air A such as a clean room containing moisture, 312xp/invention specification (supplement)/96-10/96122874 14 1374770 is supplied to the dehumidification zone 1 of the dehumidification drum 1 by the first supply machine 22. . %, then, while the treated air A is passing through the dehumidifying drum 1, by contacting the desiccant, the moisture in the treated air A is directed toward the removing agent, so the treated air a A Dehumidified. The dehumidified empty nip which has been dehydrated is discharged from the dehumidifying zone 7 of the dehumidifying drum 1 through the π exhausting officer 27, and returned to the clean room or the like. "Secondly, the dehumidifying agent that absorbs moisture in the dehumidifying zone 7 is moved to the regeneration zone 8 by the rotation of the dehumidifying drum 1. Then, the first supply machine 23 is used to supply the regeneration gas helium to the The heating device 25 is heated by the heating device 25 and supplied to the regeneration zone 8 of the dehumidifying drum cartridge. The regeneration gas is moved to the regeneration gas by contacting the dehumidifying agent. Therefore, the dehumidifying agent is dehumidified. The effluent gas F in the regeneration zone that absorbs moisture is discharged from the regeneration zone 8 of the dehumidifying drum , through the regeneration zone exhaust gas exhaust pipe 3〇 to the outside. The dehumidifying agent that has been dehumidified in the regeneration zone 8 is moved to the functional zone 1 by the rotation of the dehumidification roller 1. Then, the gas supply is supplied through the unillustrated functional zone, and the supply function is provided. The circulation gas G is supplied to the functional zone 10 of the dehumidification drum 1 to cool the dehumidification drum i. The functional zone flow gas G moves the heat or moisture of the dehumidifier by contacting the dehumidified dehumidifying agent. Flowing gas G to the functional area, thus the division The wet agent is cooled or partially dried to absorb the gas η of the heat of the dehumidifier. From the functional zone 1 of the dehumidification drum 1, the exhaust gas exhaust pipe 34 is discharged through the functional zone. External. In addition, 'the dehumidifier cooled in the 1 机 functional area 1 藉, by the 312 ΧΡ / invention manual (supplement) / 96-10/96122874 15 1374770

The rotation of the wet drum 1 is moved to the cooling zone 9. Then, the cooling gas C* is supplied to the cooling zone g• of the dehumidification drum 1 by the third supply machine 24. The desiccant is further cooled by contacting the cooling gas c with the desiccant. The cooling zone discharge gas D, which absorbs the heat of the dehumidifying agent, is discharged from the cooling zone 9 of the dehumidifying drum 1 through the cooling zone. The pipe 3 2 is discharged to the outside. Next, the desiccant cooled in the cooling zone 9 is moved to the dehumidifying zone 7 by the rotation of the dehumidifying drum 1, and is again used for dehumidification of the treated air A. Therefore, by supplying the treated air A, the regenerative gas E, the functional region flowing gas G, and the cooling gas c to the dehumidifying drum i while simultaneously rotating the dehumidifying drum 1 continuously or intermittently, the quilt can be continuously dehumidified. Process air A. At this time, when the gas flowing in the functional area is supplied to the functional area, the surface area of the functional area is supplied with the locating gas, and the Φ is the surface speed of the cooling gas supplied to the cooling area. 0.5 to 10 times. Preferably, the surface velocity of the gas flowing through the functional zone to the functional zone is set to be 1 to 7 times, preferably 2 to 5 times, the surface velocity of the cooling gas supplied to the cooling zone. By setting the surface velocity of the gas flowing through the functional region to the functional region within the above range, the moisture in the treated air A can be increased, and the dew point of the dehumidified air β can be lowered. Further, if the surface velocity of the gas flowing through the functional region is too slow, it is difficult to obtain the effect of the present invention for reducing the path of the dehumidified air crucible. Conversely, if it is too fast, the dehumidifying agent carried by the drum may fall off or cause Vibration caused by damage to the drum, or the 312 ΧΡ / invention manual (supplement) / 96·1 〇 / 96122874 16 1374770 The use of circulating gas in the functional area is too much, resulting in increased operating costs, etc., when the functional area 1 〇 When the gas flow in the functional area is supplied, the ratio of the area of the sensation of the dehumidification roller to the σ area of the dehumidification roller (the machine, the area of the area/the opening area of the dehumidification roller) is set to G. GG3~〇. 〇7 . The ratio of the area of the functional area to the opening area of the dehumidification roller is determined to be 0.005 to 0.05 Å, preferably 0.008 to 0.03. By using the machine

The area ratio of the energy region is set within the above range, and the amount of moisture dehumidification in the air to be treated 8 can be increased, and the dew point of the dehumidified air B can be lowered. If the area of the functional area is too small, it is difficult to obtain the effect of the present invention for reducing the dew point of the dehumidified air B. On the other hand, if it is too large, since the area of other areas becomes too small, the dehumidification efficiency is lowered. In other words, the dehumidification method according to the first aspect of the present invention divides the opening surface of the dehumidification drum composed of the carrier having the ventilation hole formed in the direction of the rotation axis and the dehumidifier carried on the carrier into the dehumidification zone and the regeneration zone. And a cold heading zone, supplying the treated air to the dehumidifying zone while rotating the dehumidifying drum, supplying the regeneration gas to the regeneration zone, supplying the cooling gas to the cooling zone, and continuously dehumidifying the treated air and the dehumidifying agent. a method; an organic energy region is disposed between the regeneration zone and the cooling zone; and the functional zone is provided with a functional zone for cooling the dehumidification roller, and the surface velocity of the functional zone is supplied to the functional zone. The surface speed of the cooling gas is supplied to the cooling zone. 5~1 Seto · and the ratio of the area of the functional area to the opening area of the dehumidifying drum is set to 312XP/invention specification (supplement)/96-10/96122874 17 1374770 〇 003 〇 〇 〇 〇 〇 有关 有关 有关 有关 有关 有关 有关 有关 有关 有关 有关 有关 有关 有关 有关 有关 有关 有关 有关 有关 有关 有关 有关 有关 有关 有关 有关 有关 有关 有关 有关 有关 有关 有关 有关 有关 有关 有关 有关 有关The dehumidification zone, the regeneration zone, and the machine showing the shape of the energy range of the cooling zone, also viewed from the opening down to the v divided member disposed FIG. The division of the first aspect of the present invention provides the functional zone between the regeneration zone and the cooling zone, and the so-called "providing the functional zone between the regeneration zone and the cooling zone" is included in the opening face of the dehumidification roller. As shown in (i) the example shown in (3-1) of FIG. 3 or the example shown in (4-1) of FIG. 4, the functional area is provided between the regeneration zone 8 and the cooling zone 9, And as in the case of (ii) the form shown in (4_2) of FIG. 4, only a part of the regeneration zone 8 and the cooling zone 9 are provided. There are two cases, such as setting up the machine area. As shown in the example of (4_2) in Fig. 4, between the regeneration zone 8 and the cooling zone 9, there is a portion where the functional region 10 is provided (the portion indicated by the symbol 41) and a portion not provided ( The part indicated by the symbol 42). Further, in the embodiment shown in (4_3) of Fig. 4, the functional region is provided in a part of the between the regeneration zone 8 and the cooling zone 9. In addition, in any of the embodiments of the embodiment shown in FIG. 4, the regeneration zone 8 is adjacent to the boundary of the cooling zone 9, or the functional zone 1 is disposed on the boundary between the regeneration zone 8 and the cooling zone 9. However, the functional area 10 may be disposed away from the boundary between the regeneration zone 8 and the cooling zone 9 without impairing the effects of the present invention. That is, the functional region 10 can be provided in the vicinity of the boundary between the regeneration zone 8 and the cooling zone 9 without damaging the effects of the present invention. Therefore, in the present invention, "providing the casing area between the regeneration zone and the cooling zone" also includes "in the scope of not impairing the effects of the present invention, in the 312XP/invention specification (supplement)/96- 10/96122874 18 The functional zone is disposed near the boundary of the regeneration zone and the cooling zone. The shape of the functional zone 10 is, for example, the fan-shaped 2 4 "2" shown in (5) of FIG. 3, which is not in the central angle of the sector. The shape in which the defect is formed in the vicinity, i L3), the rectangular shape, the circle indicated by (4-4), the circle indicated by (4_5), etc., are appropriately selected. Further, the first form of the present invention = In the dehumidification method, the functional area iG may be set to a state in which the ί protrudes toward the cooling zone 9 as shown in (4-3) of FIG. 4, or may be set only toward the regeneration zone 8 as shown in (4-6). The state of the side protrusion may also be as shown in (4_7), and the side of the living area 8曰 and the side of the cooling area 9 are both protruding. In addition, the number of the functional area may also be as shown in FIG. 4 (4- 5) and (4-8), there are two or more functional areas 1 〇. In addition, in the present invention, the "opening surface area of the dehumidifying drum" means that the dehumidifying roller is viewed from the open side of the field. The area of the portion other than the drum shaft 5 is the area of the portion 39 indicated by the oblique line in (5-1) of Fig. 5 .匕 = "The area of the functional area" means the area close to the opening surface of the dehumidification drum that supplies the side of the functional area = gas, and is ventilated by the supply of the functional area, as shown in Figure 3 (3-1) The morphological example refers to the line in the (5-2) of Fig. 5. [5 points of 4Qa, the example of the form of (4_3) in Fig. 4 refers to the area of the portion indicated by the oblique line (5-3) of Fig. 5). In the port diagram 2, the dehumidifying device 2 is not provided, and the flow of the gas in the functional region is supplied from the side of the opening face 4a, but the arrangement of the gas supply device in the functional zone can be changed, and the supply is made from the side of the opening face 4b. However, in order to improve the functional area, the cooling efficiency consideration is preferably from the opening surface of the regenerative gas supplied to the opening surface of the regenerative gas, and the circulation gas of the functional area is supplied to the function 312XP/invention specification (complement Item V96-10/96122874 19 1374770. • In the dehumidification method according to the first aspect of the present invention, the gas flowing through the functional region may be wetted by a gas having a small moisture content after being dehumidified through the dehumidification zone. Air enthalpy, clean gas, dry gas or inert gas, etc., among the collars, preferably the dehumidified air enthalpy. In addition, the clean gas, dry f or inert gas is compared with the dehumidified air β. Because the moisture content is small, the dew point of the dehumidified air 8 obtained by dehumidification in the dehumidification zone is reduced, and the gas flowing in the functional zone is preferably a clean gas, a dry gas or an inert gas, especially in a semiconductor manufacturing factory. In this case, since a clean gas, a gas, an inert gas, or the like is used in many cases, it can be used at a lower cost. In addition, the clean gas system referred to in the present invention refers to semiconductor manufacturing and the like. Dedusting and dehumidifying gas. 2. Supplying the functional area to circulate the gas to cool or dry the desiccant to the cooling zone, or to cool and dry the f-dehumidifying agent moved from the regeneration zone. In the functional zone ventilation system, the gas for cooling, the gas for drying, or the gas for cooling and drying. In addition, the gas flowing in the functional zone can be the same as the process air: but the obtained dehumidification gas B is lowered. In the point test, it is better that the dew point of the circulating gas in the functional area is lower, and the dew point of the air is 1 (rc or more. In addition, the temperature of the functional zone ventilation can be considered: (1) moving from the regeneration zone to the functional zone. The temperature of the two agents and (li) are mainly selected for the purpose of cooling, or for the purpose of drying, or the main purpose of cooling and drying, etc., and then appropriately selected. Usually, the function The temperature of the circulating gas in the area can be set to 〇~60°c, preferably 5~3〇〇c. 312XP/Invention Manual (Replenishment)/96•丨〇/96丨22874 1374770 Lightly perform this function area 10 Passing gas in the functional area Thereafter, /'l discharges the gas from the functional area discharged from the functional area 10 and discharges it into the outside air', but in terms of efficient use of the gas, it is preferable to incorporate it into the regeneration gas. And the regenerative gas Ε or the cooling gas c is not particularly limited, and is usually the treated air enthalpy. 忒 Dehumidification zone 7, the regeneration zone 8 and the cooling Area 9 size, according to the

f The water content of the air A, the dehumidifying performance of the dehumidifying agent, the regenerative energy, the dew point required for the dehumidified air β, the rotational speed of the dehumidifying drum 等, and the like are appropriately selected. The dehumidification method according to the first aspect of the present invention can increase the cooling efficiency or the regeneration efficiency by cooling, drying, or cooling and drying the high-temperature dehumidifying agent moved from the regeneration zone before cooling in the cooling zone. Or both of these efficiencies are increased. Therefore, the dehumidification method according to the first aspect of the present invention further cools and dries the dehumidifying agent as compared with the case where the functional region is not provided, so that the adsorption capacity of moisture can be increased, thereby reducing the dew point of the obtained dehumidified air crucible. On the other hand, in the conventional dehumidification method, in order to increase the cooling efficiency or the regeneration efficiency, it is necessary to increase the area of the cooling zone or the regeneration zone. However, if the area of the cooling zone or the regeneration zone is increased, the area of the dehumidification zone will be reduced, thus reducing the overall dehumidification efficiency. Furthermore, in the first-type (four) dehumidification method of the present invention, the surface velocity of the gas flowing through the functional region to the functional region is set to be faster than the surface velocity of the cooling gas supplied to the cooling region, and The functional area supply surface catch 312 ΧΡ / invention manual (supplement) / 96 · 1 〇 / 96122874 higher in the functional area of the flow of gas, can have a lower effect. Therefore, the desiccant dehumidification method of the first aspect of the present invention is reduced by the first embodiment of the present invention. The dehumidification device has: a display "', ~ meat' which is made up of a dehumidification roller composed of a desiccant in the shovel, 38 and 4 s. a functional area between the regeneration zone and the cooling zone; and - the dividing member; a rotating means for rotating the dehumidifying drum; a first supply means for supplying the treated air to the dehumidifying zone; a means for supplying a regeneration gas to the regeneration zone; a third supply means for supplying a cooling gas to the cooling zone; a heating means disposed in front of the regeneration zone and adding; and a gas supply of the pore function zone And means, the machine area is supplied with a gas; wherein the ratio of the area of the functional area to the opening area of the dehumidifying drum is 0.003 to 0.07. The dehumidifying drum, the dehumidifying zone, the regeneration zone, the functional zone, and the cooling positive of the dehumidifying apparatus according to the first aspect of the present invention are the dehumidifying drum, the dehumidifying zone, the regeneration zone, the functional zone, and the cooling zone of the dehumidification method according to the first aspect of the present invention. . 312ΧΡ/Invention Manual (Repair)/96-ι〇/96122874 22 1374770 The ratio of the area of the functional area to the opening area of the dehumidification roller is 0.003~0.07, preferably 〇〇〇5~〇05, especially 〇〇 Preferably, the dividing member is capable of dividing the opening surface of the dehumidifying roller into the dehumidifying zone, the regeneration zone, the functional zone, and the cooling zone, and the helmet is limited, for example, In the gap between the opening surface of the dehumidifying drum and the drum box, the first dividing member Ga and the second dividing member 6b may be arranged radially from the center of rotation of the dehumidifying drum, and a partition plate fixed to the drum box; or shaped into the shape of each zone of each embodiment as shown in FIG. 4, and disposed in the gap between the opening surface of the dehumidifying drum and the drum box, and fixed on the drum box Compartment board. The first supply means, the second supply means, and the third supply means are not particularly limited, and a device which is generally used for supplying a gas, such as an intake fan, a blower, an air compressor, or the like, can be used. Further, the first supply means, the second supply means, or the installation position of the third supply means are located in the front stage of the dehumidification drum 1 in the dehumidifying apparatus 2, but the dehumidifying apparatus of the first aspect of the present invention It may also be located at the rear of the dehumidification drum 1. Fig. 6 shows an example of the form of the dehumidifying apparatus in which the first supply means, the second supply means, or the third supply means are located in the subsequent stage of the dehumidifying drum 1. In the dehumidifying apparatus 2〇1 in Fig. 6, the installation positions of the first supply means 221, the second supply means 231, and the third supply means 241 are located in the subsequent stage of the dehumidification drum. In this case, the first supply means, the second supply means or the third supply means suctions the treated air A, the regeneration gas E or the cooling gas c from the opposite side of the dehumidification drum 1 And supplying the device to the 312XP/invention specification (supplement)/96-10/96122874 23 1374770 device such as a fan or the like in the dehumidifying drum. In addition, in FIG. 6 , except for the first supply means 231 and the third supply means, the setting position is the same as the dehumidification setting shown in FIG. 2, and thus The same member of the dehumidifying device 2 is provided with the same / /r/r port ' n Wu ° . The heating means is not particularly limited, and for example, an electric heater, a heat exchanger, etc. A device that is generally used to heat a gas is used. _ There is no particular restriction on the flow of gas in the functional area. It is possible to use a device that is generally used when supplying gas, such as an intake fan, a blower, an air compressor, and the like. Furthermore, the dehumidification apparatus of the first aspect of the present invention adjusts the area of the dehumidification zone, the regeneration zone, the functional zone, and the cooling zone, and adjusts the first supply means, the second supply means, and the third supply The means and the air volume of the flow-through gas supply means in the functional zone can adjust the surface velocity of the functional zone to the circulating gas to be 0.5 to 10 times the surface velocity of the cooling gas supplied to the cooling zone. Thereby, the dehumidifying method according to the first aspect of the present invention can be carried out by using the dehumidifying apparatus according to the first aspect of the present invention. Further, in the dehumidification device of the first aspect of the present invention, the regeneration gas E can use the cooling zone discharge gas D. The cooling zone discharge gas 使用 is used as an example of the form of the regeneration gas E, for example, the dehumidification apparatus shown in Fig. 7. Fig. 7 shows another embodiment of the first dehumidification crack of the present invention. In FIG. 7, the dehumidifying device 50 is not provided with the second supply machine 23 of FIG. 2, and instead, the cooling zone exhaust gas exhaust pipe 32 and the first regeneration 312XP/invention specification are provided (refill pottery 0/ 96122874 2 1^/4770 The gas supply pipe 28 is connected to the connection f 44. In other words, in the child dehumidification device 50 shown in Fig. 6, the connection pipe 44 is a second supply means. In the divided member of the dehumidifying device of the form, the dividing member partitioning the area of the machine may be two openings including the opening π on the gas inlet side of the functional region and the opening on the gas outlet side of the machine food & And the opening area is gradually reduced from the gas inlet side of the functional zone toward the outlet side, and the opening surface of the gas outlet side of the functional zone is disposed to face the opening surface of the dehumidification drum (hereinafter also This member is referred to as a "deformation opening division member". The deformation opening division member will be described with reference to Fig. 8 to Fig. 1 . Fig. 8 is a schematic view of the deformation opening division member shown in Fig. 9. Cutting member The schematic view of the installation position is shown in a cross-sectional view of the drum box to which the deformation opening dividing member is fixed. Fig. 8 is a plan view showing the deformation opening dividing member 45, which is shown in (8_2) (8 i) The XX line cross-sectional view '(8-3) is a cross-sectional view of the yy line of 8-n. As shown in Fig. 8, the sinusoidal deformation opening dividing member 45 has an opening in the functional gas inlet side of the functional area (the functional area circulation gas population) The side opening 46 and the opening of the functional gas outlet gas outlet side (function region flow gas outlet side opening) 47' and the opening area are gradually reduced from the inlet side toward the outlet side. Referring to Fig. 9 and Fig. 1A, the drum box will be described. 21. The positional relationship between the dehumidifying roller, the I-shaped opening dividing member 45, and the functional area circulating gas supply pipe 43. As shown in Fig. 9, 'the drum box 21 is provided with the S1 A opening knife J member 45. The slit 49 having the same shape of the population side opening 46, in a part of the slit 49, is provided from the inner side of the drum box 21 312XP/invention specification (supplement)/96-10/96122874 25 1374770 having the deformation opening Split member 45. In addition, the connection The tube end 'on one side of the drum box 2' forms a functional area flow gas supply pipe 43 that can surround the slit 49, and is disposed on the outer side of the drum box 21. As shown in the figure, the deformation opening dividing member 45 Between the opening surface 4 a of the dehumidifying drum i and the tearing phase U, the opening side opening 47 of the opening surface of the dehumidifying drum 1 is opposite to the opening π surface 4a of the dehumidifying drum 1, and FIG. 1() is for explanation. The dehumidification device of the first aspect of the present invention has the deformation opening division except that the dehumidification drum i, the deformation opening division member 45, and the functional area flow gas supply pipe "are omitted" In the case of the member 45, since the flow-out side opening 47 of the functional region dividing member of the deformation opening is supplied to the opening surface of the hollow dehumidification roller to supply the gas in the functional region, the shape of the functional region 1{) is as shown in Fig. 1Q. The shape of the flow-through gas outlet side opening 47 of the functional region is formed. In this case, the deformation opening division member is used to divide the function from the opening surface of the dehumidification roller.

Area. In the dehumidifying apparatus according to the first aspect of the present invention, a supply pipe for supplying gas to other regions or a gas exhaust pipe for exhausting other regions may be provided, and the branch pipe connected to the gas supply pipe of the functional region may be branched and branched. : This condition shows that the surface velocity of the gas flowing through the functional zone can be adjusted by adjusting the amount of air drawn by the component that adjusts the air volume, such as a damper. In addition, when the branch pipe is provided, the branch pipe is a flow of gas supply means in the functional zone. Further, the branch pipe is the same as the dehumidifier of the second aspect of the present invention and the 312XP/invention specification (supplement)/96-i〇/96i22874 26 1374770 de-leaking device of the third aspect of the present invention to be described later. When the supply direction of the flow-through gas G to the functional zone is the same as the supply direction of the cooling gas C to the cooling zone, and the exhaust gas D of the functional zone is mixed with the discharge gas H of the functional zone, The split surface of the dehumidification drum on the exhaust side of the exhaust gas of the functional area is not provided with a dividing member that partitions the functional area, so that the gas can be discharged in the functional area immediately after passing through the dehumidifying drum. H is mixed in the cooling zone discharge gas D. This case will be described with reference to FIG. Figure u is a schematic view showing the arrangement of the divided member or the deformed opening dividing member when viewed from the opening face side of the dehumidifying drum, as shown in the side of the opening face of the dehumidifying drum, the cooling gas c and The pattern of the supply side of the flow-through gas G in the functional area, (11-2) is shown from the side of the opening surface of the dehumidification drum, and the exhaust gas D in the δ-thin cold portion and the exhaust gas in the functional area are arranged. Fig. 11 is a view showing an opening face 4a#J of a dehumidifying drum which is supplied with a gas disk in the functional region, and the deformation opening 4 is provided on the side of the opening face 4a. The cooling zone and the functional zone are divided by the shape opening dividing member 45, but the dehumidifying roller opening face 4b" on the opposite side does not have a dividing member that separates the functional zone. Therefore, just after passing through the dehumidification drum, in the drum box, the grand machine p % / η

The dehumidification method of the second form of the exhaust gas is combined with the gas in the cooling zone, and the second aspect of the dehumidification method is carried out by a carrier in which an oxygen-passing hole is formed in the direction of the rotation axis, and a 々 j of the 々 衮 谭 谭 谭 衮The same open surface of the dehumidifier on the carrier is divided into a dehumidification zone, a regeneration zone and a cooling zone, and the dehumidification zone is rotated while supplying the treated air to the dehumidification zone and the 312XP/invention specification (supplement y96) -1〇/96122纠^1374770 The regeneration zone supplies regeneration gas, supplies cooling gas to the cooling zone, and continuously dehumidifies the treated air and regenerates the dehumidifying agent, 4 between the cooling zone and the dehumidification zone Providing an organic energy zone; supplying a functional zone for cooling or drying the dehumidification roller to the functional zone; and setting a surface velocity of the flow of the gas to the cooling zone of the machine b& The ratio of the surface area of the cooling gas is 〇5 to 1〇; the ratio of the area of the 6-Hing functional area to the opening area of the dehumidifying drum is set to be 0.003 to 0.07. The dehumidifying method according to the second aspect of the present invention is as shown in Fig. 12 segmentation The members 51a and 51b are the opening faces 4a and 4b of the wet roller, and the organic energy zone 1 is disposed between the cooling zone 9 and the dehumidifying zone 7. The dehumidifying apparatus for carrying out the dehumidifying method of the second aspect of the present invention is exemplified. As shown in Fig. 13. In Fig. 13, the dehumidifying device 6 is a dehumidifying device for performing the dehumidifying method of the second aspect of the present invention, and the dehumidifying device 6 is different from the dehumidifying device 2 of Fig. 2 The installation position of the functional area 1〇 is thus different from the position of the divided member 51a# 51b and the position where the functional area circulating gas supply pipe 53 and the functional area exhaust gas exhaust pipe 54 are connected to the drum box 2丨, Therefore, in Fig. 13, the same members as those of the dehumidifying device 20 are given the same reference numerals. The dehumidifying device 60 flows the gas supply pipe 53 from the functional region, and supplies the functional region circulating gas G to The functional zone between the cooling zone 9 and the dehumidification zone 7 is exhausted, and the exhaust gas venting of the functional zone is discharged from the functional zone exhaust gas exhaust pipe 54. 312ΧΡ/Invention Manual (Supplement)/96·]〇 /96122874 28 1374770 the invention The dehumidifying method of the first shape g is carried out by using the dehumidifying apparatus. First, the inside of the clean room containing moisture, etc., is supplied to the dehumidifying drum 1 by the first supply machine 22. The second:, zone 7 then 'the treated air A passes through the dehumidification roller ^, and the water in the treated air A moves toward the dehumidifying agent by contacting the dehumidifying agent. The treated air A is dehumidified. The dehumidified air B that has been removed is exhausted from the dehumidifying zone 7 of the dehumidifying drum! by the dehumidifying air exhaust pipe 27, and is returned to the clean room or the like. The dehumidifying agent that absorbs moisture in the wet area 7 of the yarn is moved to the regeneration zone 8 by the rotation of the dehumidifying drum 1. Then, the regeneration gas E is supplied to the heating device 25 by the second supply machine 23, and is heated by the heating device 25 to be supplied to the regeneration zone 8 of the dehumidifying drum cartridge. The regeneration gas E moves the moisture in the dehumidifying agent to the regeneration gas E by contacting the dehumidifying agent, and thus the dehumidifying agent is dehumidified. The regeneration zone discharge gas F, which absorbs moisture, is discharged from the regeneration zone 8 of the dehumidification drum , through the regeneration zone exhaust gas exhaust pipe 3〇 to the outside. Further, the desiccant that has been dehumidified in the regeneration zone 8 is moved into the cooling zone 9 by the rotation of the dehumidification drum 1. Then, the cooling gas C is supplied to the cooling zone of the dehumidifying drum i by the third supplier 24 to cool the dehumidifying drum 1. By the cooling gas c contacting the desiccant dehumidifying agent, the heat of the desiccant is transferred to the cooling gas c, whereby the desiccant is cooled. The cooling zone discharge gas D which has absorbed the heat of the dehumidifying agent is discharged from the cooling zone 9 of the dehumidifying drum 1 through the cooling zone exhaust pipe 32 to the outside. 312XP/Invention Manual (Supplement)/96-10/96122874 29 1374770 Further, the cooled dehumidifier ‘ in the cooling zone 9 is rotated by the cylinder j and moved into the functional zone 10. Then, the functional area 10 of the dehumidification drum 1 is supplied to the supply area by supplying the gas G by means of a non-machine = zone flow gas supply. The dehumidifying agent is further cooled or dried by the flow of the gas G in contact with the descaling agent in the functional zone. The functional zone exhaust gas after the contact with the dehumidifying agent is discharged from the functional zone 1 〇 I of the dehumidifying drum 1 from the functional zone exhaust gas exhaust pipe 54 to the outside. The dehumidifying agent which has been cooled or dried in the functional area 10 is moved to the dehumidifying zone 7 by the rotation of the dehumidifying drum 1, and the dehumidification of the treated air crucible is again used. Then, by supplying the treated air A, the regeneration gas E, the cooling gas c, and the circulation gas g in the functional region to the dehumidification drum , while continuously or intermittently rotating the dehumidification drum 1, the dehumidification drum 1 can be continuously dehumidified. Air A is treated. At this time, when the flow of the gas in the functional zone is supplied to the functional zone, the surface velocity of the flow of the gas in the functional zone is supplied to the functional zone, and the surface velocity of the cooling gas is supplied to the cooling zone. 0.5^10 times. Preferably, the surface velocity of the gas flowing through the functional zone to the functional zone is set to be 7 times the surface velocity of the cooling gas supplied to the cooling zone, particularly preferably 2 to 5 times. By setting the surface speed of the gas flowing through the functional area to the functional area within the above range, the amount of moisture removal in the air to be treated can be increased, and the dew point of the dehumidified air B can be lowered. In addition, if the surface velocity of the gas is too slow, it is difficult to obtain the effect of the invention for reducing the dew point of the dehumidified air 8. On the contrary, if it is too fast, the drum 312XP/invention specification (supplement)/96 may occur. -10/96122874 30 The use of circulating gas in the dehumidifying agent shedding energy zone. ‘There is damage to the drum due to vibration, or the machine becomes too much, resulting in increased operating costs, etc.

Further, when the functional area 10 is supplied with the gas flowing through the functional area, the ratio of the area of the U (area) U area to the opening area of the dehumidifying roller is set to be 2.003 to 0.07. Preferably, the ratio of the area of the functional area to the dehumidification roller is set to U05~G.G5, especially L0.03 is ::: by setting the area ratio of the functional area within the above range, which can be increased The second break, the amount of moisture dehumidification in the air A, and the area of the functional area of the dehumidification line b being too small, it is difficult to obtain the effect of the invention of reducing the dehumidification space:: waypoints. Conversely, if it is too large, because other areas The area will become too small, thus reducing the dehumidification efficiency.

Needle', the functional area of the first form dehumidification method of the moon. In the dehumidification method of the present invention, the function region is disposed between the cooling zone and the dehumidification zone, and the so-called "the functional zone is disposed between the cooling zone and the dehumidification zone" means that the dehumidification roller is The open surface, as shown in FIG. 12, includes all of the functional regions between the cooling zone 9 and the dehumidifying zone 7, and only a part of the functional zone between the cooling zone 9 and the dehumidifying zone 7 is disposed. A situation. In this regard, in the present invention, as in the dehumidification method of the first aspect of the present invention, the phrase "the functional region is provided between the cooling zone and the dehumidification zone" also includes "the scope of the present invention is not impaired." Within the binding, the functional zone is disposed near the boundary between the cooling zone and the dehumidification zone. In this regard, it is also like the dehumidification method of the first aspect of the invention. The shape of the functional area 10 is the dehumidifying side 312XP of the first aspect of the present invention/invention specification (supplement)/96_]〇/96i22s74 31 = can be fan-shaped, form a defect shape near the central angle of the sector, long trapezoidal, And a circle or the like, and it is appropriately selected in consideration of dehumidification efficiency. Further, the dehumidification method of the -S%-gp_Ding^2 mode is the same as the dehumidification of the first aspect of the present invention. The casing 10 can be set to protrude only toward the dehumidification zone 7 side, and (4) cooling. The state in which the region 9 is protruded may also be protruded toward the cooling zone/denier = the dehumidification zone 7 on both sides. In addition, the function area 10 can also be set as the dehumidification method of the first aspect of the present invention, and the function area 1 is shown in FIG. 13 in the dehumidification device 6 , and the functional area is circulated by the gas G from the U 4 & The side supply 'but can also change the function area flow gas supply machine 2' to supply from the opening face 4b side. However, it is preferable to increase the efficiency of the cold portion of the machine. It is preferable to supply the gas in the functional area to the functional area from the side of the opening surface on the same side as the opening surface on which the regenerated gas is supplied. In the dehumidification method of the shape 4, the gas flowing through the functional zone may be a gas having a small moisture content after being dehumidified through the dehumidification zone, and may be the dehumidified air gas, the material gas, the dry gas or the inert gas. The gas is supplied to the ventilating zone to move the desiccant to the 'cold part of the dehumidification zone or to dry, or to cool and dry the "coolant" from the cooling zone. Gp 'This functional zone ventilation system cooling gas, drying pore body, or cold part and drying gas. The lower the dew point of the circulating gas in the functional area, the better, but as long as the gas is less in moisture content, the desiccant can be further cooled or dried from the cooling zone, so that it is lower than the treated air. The dew point 1{rc or more can be adapted to make the 312XP/invention manual (supplement)/96-10/96122874 32 13/4770 field, and the temperature of the circulating gas in the functional area can be considered: (i) from the cold • The temperature of the desiccant moved to the functional area, and (ii) the main purpose of the ^ ^ but the main purpose of drying, or the main purpose of cooling and drying, etc. After the main purpose, then appropriate == choice. Usually, the temperature of the circulating gas in the functional area can be set to 0 to 4 (TC, preferably 5 to 3 (TC.) After the ventilation of the functional gas in the functional area is performed in the functional area, the function can also be The discharge zone of the functional zone discharged from the zone 1Q is discharged into the outside air, but it is preferably used in the regeneration gas E and is used as the regeneration gas E. The regeneration gas E or the cooling gas c is not particularly limited, and may generally be the treated air A. The size of the dehumidification zone 7, the regeneration zone 8 and the cooling zone 9, according to the treatment air A The moisture content, the dehumidifying performance of the dehumidifying agent, and the regenerative energy are appropriately selected from the dew point required for the dehumidifying air B and the rotational speed of the dehumidifying drum 1. The second aspect of the dehumidifying method is The cooling zone moves to the removing agent, and the dehumidifying zone agent is supplied to the functional zone agent before dehumidifying in the dehumidifying zone. Therefore, the dehumidifying phase of the present invention is compared with the case where the functional zone is not provided. Change, & π „ j dehumidification zone The dehumidification efficiency = can reduce the dew point of the dehumidified air B obtained. In another aspect, the conventional dehumidification method, in order to increase the dehumidification rate, must increase the area of the dehumidification zone, and increase the dehumidification zone 312XP/ SUMMARY OF THE INVENTION (Spread) /96-i〇/96i22874 33 The area of 1374770 'the dehumidification efficiency of the regeneration zone or the entire cooling zone. The product 1 will become less. By supplying the functional zone flow ventilation ft $ , the function cooling zone for the library 2:: speed ' is set to be faster than the speed, and the effect of the supply zone is low, and the gas is Can further improve the dew point of dehumidified air

A dehumidifying apparatus according to a second aspect of the present invention is a dehumidifying apparatus for carrying out the dehumidifying method of the present invention.

The dehumidifying device 60. In other words, the dehumidifying apparatus according to the second aspect of the present invention is provided with a dehumidifying drum vertical opening formed by a carrier which forms (4) a gas cavity in the direction of the rotating shaft and a dehumidifying agent carried on the carrier. The surface is divided into: a dehumidification zone, a regeneration zone cooling zone, and a functional zone formed between the cooling zone and the dehumidification zone; the dividing member; a rotating means 'rotating the dehumidifying drum; a first supply means, Supplying the treated air to the dehumidification zone; a second supply means for supplying the regeneration gas to the regeneration zone; a second supply means for supplying the cooling gas to the cooling zone; the heating means 'which is disposed before the regeneration zone, and Heating the regeneration gas; and distributing the gas supply means in the functional area, and supplying the functional area to the functional area to circulate the gas; 312XP/invention specification (supplement)/96-1〇/96122874 34 1374770 wherein the functional area is dehumidified The ratio of the area of the opening surface of the drum is 〇·003~〇. 〇7. , . The dehumidification drum, the dehumidification zone, the regeneration zone, the function zone, and the cooling zone' of the dehumidification device according to the second aspect of the present invention are all the dehumidification roller, the dehumidification zone, the regeneration zone, the function zone, and the cooling zone of the second aspect of the present invention. The ratio of the area of the functional area to the opening area of the dehumidifying drum is 0-003 to 0.07, preferably 0.005 to 〇 〇 5, particularly preferably 〇 8 to 〇 〇 3. The dividing member can be divided into the dehumidifying zone, the regeneration zone, the functional zone, and the cooling zone as long as the opening surface of the dehumidifying drum can be divided into, for example, the opening surface of the dehumidifying drum and the drum. In the gap of the tank, the partition plate is radially radiated from the center of rotation of the dehumidifying drum, and is fixed to the partition plate on the drum box, or may be shaped as shown in FIG. And disposed in the gap between the opening surface of the dehumidification drum and the drum box, and fixed to the compartment plate on the drum box. The first supply means, the second supply means, the third supply means, the functional area flow gas supply means, and the heating means of the second aspect dehumidification apparatus of the present invention are the first supply means of the dehumidification apparatus of the first aspect of the present invention, and Two supply means, third supply means, means of supplying gas in the functional area, and heating means. Furthermore, the dehumidification apparatus according to the first aspect of the present invention adjusts the area of the dehumidification zone, the regeneration zone, the function zone, and the cooling zone, and adjusts the first supply means, the second supply means, and the third supply The means and the air volume of the flow-through gas supply means in the functional area can adjust the surface velocity of the gas flowing through the functional zone to the functional zone to be adjusted to supply the cooling gas to the cooling zone 312XP/invention specification (supplement V96-10/ 96122874 35 1374770 0.5 times the surface speed. By means of this device, it is possible to implement the dehumidification method of the invention. The dehumidification method of the second form of the invention is as follows. In the first dehumidification device of the present invention, the regeneration gas E can be extracted using the cooling zone exhaust gas as shown in FIG.

In the case of the dehumidification device of the connection pipe in which the cooling zone exhaust gas exhaust pipe 32 == the supply pipe 28 is connected, the connection pipe is the second supply means. In the divided member of the dehumidifying apparatus according to the second aspect of the present invention, the sub-fourth member partitioning the functional region may be a deformed opening dividing member as in the dehumidifying device of the first aspect of the present invention. The deformed opening dividing member ′ of the dehumidifying device according to the second aspect of the present invention is a deformed opening dividing member of the dehumidifying device according to the first aspect of the present invention. When the dehumidifying apparatus according to the second aspect of the present invention has the deformed opening dividing member, as in the dehumidifying apparatus according to the first aspect of the present invention, since the gas outlet side opening is opened from the functional region of the deforming opening dividing member, the opening of the dehumidifying roller The surface is supplied with the gas flowing in the functional region, and thus the shape of the functional region forms the shape of the opening of the gas outlet side of the functional region of the deformed opening dividing member. In this case, the functional opening region is divided from the opening surface of the dehumidifying roller by the deformed opening dividing member. When the supply zone G of the functional zone supplies the functional zone in the same direction as the supply direction of the cold zone gas C to the cooling zone, and the exhaust gas D in the cooling zone is mixed with the exhaust gas η of the functional zone, In the functional area, the opening surface of the dehumidifying drum on the exhaust side of the exhaust gas is not provided with a dividing member that separates the functional area from the 312ΧΡ/invention specification (supplement)/96-10/96122874 36 1374770 After the dehumidification drum, the functional zone exhaust gas is mixed in the cooling zone exhaust gas d. With regard to this, it is explained with reference to Fig. 14 that the cooling partition of the opening face 4a side is provided on the opening of the opening face 4a from the side of the 4a side of the opening of the dehumidifying drum through which the gas and the cooling gas are supplied. The functional area is divided by the dividing portion of the functional area at the side of the opening surface of the dehumidifying drum on the opposite side. Therefore, immediately after passing through the dehumidification drum, the functional zone discharge gas h can be mixed into the cooling zone discharge gas D in the drum tank. In the dehumidifying method according to the third aspect of the present invention, the opening surface of the dehumidifying drum formed by the carrier in which the ventilation hole is formed in the direction of the rotation axis and the dehumidifying agent carried on the carrier is divided into a dehumidification zone and a regeneration zone. a cooling zone that supplies the treated air to the dehumidification zone and supplies the regeneration gas to the regeneration zone while rotating the dehumidification drum, supplies the cooling gas to the cooling zone, and continuously dehumidifies the treated air and regenerates the dehumidifying agent; An organic energy zone is disposed between the dehumidification zone and the regeneration zone; the functional zone is supplied with a flow of gas for heating the function zone of the dehumidification roller; and the surface velocity of the flow zone of the functional zone is supplied to the functional zone. The regeneration zone supplies 面. 5 times of the surface velocity of the regeneration gas; the ratio of the functional zone area to the opening face area of the dehumidification drum is set to 0.003 to 0.07. In the dehumidifying method of the third aspect of the present invention, as shown in Fig. 15, the opening faces 讣 and 讣 of the dehumidifying drum are divided by the dividing members 61a and 61b and are dehumidified 312XP/invention specification (supplement)/%-10/96122874 37 An organic energy zone 10 is provided between the zone 7 and the regeneration zone 8. Example: such as g ^ : the form of the dehumidification device for the second form of dehumidification method. The dehumidification device for the dehumidification method of the present invention is the dehumidification device of the present invention. The dehumidification device 20 is different in that the dehumidification device 20 is different in the functional region == cutting member 61. The configuration of the coffee, and the functional zone flow_2 are the same as the position where the functional zone exhaust gas I gas pipe 63 is connected to the roller 21, and the rest are the same. Therefore, in Fig. 16, the same components are assigned to the same components of the device 2. The dividing 65 flows from the functional area to the gas supply pipe 62, and supplies the functional zone flow body G to the zone disposed between the dehumidifying zone 7 and the regeneration zone 8 to discharge the gas exhaust pipe 63. Functionality The dehumidification method according to the third aspect of the present invention is carried out by using the dehumidifying apparatus 65 as follows. First, the inside of the clean room containing water or the like is supplied to the dehumidification drum by the first supply machine 22! The dehumidification zone is then moved to the dehumidifying agent by contacting the dehumidifying agent while the treated air a passes through the dehumidifying roller, thereby treating the treated air A is dehumidified. The dehumidified air B, which has been removed, is exhausted from the dehumidifying zone 7 of the dehumidifying drum 1 through the dehumidifying air exhaust pipe 27, and returned to the clean room or the like. Next, the dehumidifying agent that absorbs moisture in the dehumidifying zone 7 is moved to the functional zone 1 by the rotation of the dehumidifying drum 1, and then the gas G in the functional zone flows through the functional zone (not shown). Supply machine, supply to 312XP / invention manual (supplement) / 96] 0 / 96122874 38 1374770 ! = force: thermal device (second heating means), after being supplied by the heating device to the dehumidification drum i The function area is 1〇. Thereafter: the zone flow gas GH is heated by contacting the desiccant to heat the dehumidifier, and the water (4) of the dehumidification agent towel is circulated to the functional zone to be heated and dehumidified. The venting gas h in the functional region of the absorbing water is discharged from the functional region 10' through the functional region (4) f 63 to the outside. Next, the desiccant heated and dehumidified in the functional zone 10 is moved to the regeneration zone 8 by the rotation of the dehumidification drum 1. The second supply machine 23 then supplies the regeneration gas E to the heating device 25, and after being heated by the heating device 25, is supplied to the regeneration zone 8 of the dehumidification drum 。. The regeneration gas E is moved to the regeneration gas E by contacting the dehumidifying agent, whereby the desiccant is further dehumidified. The regeneration zone discharge gas F, which has absorbed moisture, is discharged from the regeneration zone 8 of the dehumidification drum 1 through the regeneration zone exhaust gas exhaust pipe 3 to the outside. Further, the desiccant that has been dehumidified in the regeneration zone 8 is moved into the cooling zone 9 by the rotation of the quencher drum 1. Then, the cooling gas is supplied to the cooling zone 9 of the dehumidification drum 1 by the third supply machine 24. The cooling gas C cools the desiccant by contacting the desiccant. The cooling zone discharge gas D which has absorbed the heat of the dehumidifying agent is discharged from the cooling zone 9 of the dehumidifying drum 1 to the outside via the cooling zone exhaust gas exhaust pipe 32. Next, the dehumidifying agent cooled in the cooling zone 9 is moved to the dehumidifying zone 7 by the dehumidification roller 312XP/invention specification (supplement)/96-10/96122874 39 and is reused in the dehumidification zone 7 The dehumidification of the second rolling A is treated. The $2 stomach is supplied to the dehumidification drum 1 by the treated air A, the second, the second two: _E_. the cold portion gas C, and the functional region circulating gas G, while simultaneously rotating the dehumidification roller intermittently} , the treated helium A can be continuously dehumidified. Hey, Tian is the functional area! In the middle of the supply of the gas in the functional area, the surface velocity of the gas flowing through the functional zone is set to 0.5 to 10 times the surface velocity of the regeneration gas supplied to the regeneration zone. The function area is supplied with a flow rate of the circulating gas of the functional zone to the regeneration zone at twice the speed of the surface of the regeneration gas, especially 2 . By supplying the functional region with the surface velocity of the gas flowing through the functional region: within the above range, the moisture in the treated air enthalpy can be increased: 'and the dew point of the dehumidified air B is lowered. Further, if the surface velocity of the rolling body in the functional region is too slow, it is difficult to obtain the effect of the present invention for reducing the dew point of the dehumidified air B. Conversely, if the secret is fast, the roller may be removed: the dehumidifying agent carried off, or due to vibration The drum is damaged, or the functional zone is ventilated. (4) The usage amount becomes excessive and the running cost is increased. Further, when the functional area 1 is supplied with the gas in the functional area, the area ratio of the area of the functional area 10 to the opening area of the dehumidifying drum is set to 0.003 0.07. Preferably, the ratio of the area of the functional area to the area of the opening surface of the dehumidifying drum is set to 0.005 to 〇. 〇 5, preferably 〇. 〇〇 8 〇 〇 〇 3 is preferable. By setting the area ratio of the functional area within the above range, the amount of moisture dehumidification in the treated air A can be increased by 312XP/invention specification (supplement)/96-10/96122874 40 1374770, and the dew point of the dehumidified air is lowered. If the area of the functional area is too small, it is difficult to obtain the effect of the present invention for lowering the dew point of the dehumidified air. On the contrary, if it is too large, since the area of other areas will become too small, the dehumidification efficiency is lowered. This functional area description of the third form dehumidification method of this praise is given. In the dehumidification method according to the second aspect of the present invention, the functional zone is disposed between the dehumidification zone and the regeneration zone, and the so-called "the zone b zone between the dehumidification zone and the regeneration zone" means the dehumidification The open surface of the drum, as shown in FIG. 5, includes the functional zone between the dehumidification zone 7 and the regeneration zone 8, and the portion between the dehumidification positive 7 and the regeneration zone 8 is disposed. Functional areas and other two kinds of love; brother. In this regard, a dehumidification method as in the first aspect of the invention. In addition, the present inventor said that "the functional zone is provided between the dehumidification zone and the regeneration zone", and the boundary between the dehumidification zone and the regeneration zone is also included in the "without detrimental to the effect of the present invention". Set this function nearby."". In this regard, it is also a method of quenching thirst according to the first aspect of the present invention. The shape of this = Π), like the first aspect of the present invention, may be a fan shape, and a shape in which a defect is formed in the vicinity of a central angle of a sector: a trapezoidal shape, and a round material, which is selected in consideration of dehumidification efficiency (4). In addition, the dehumidification method of the second embodiment is the same as the first method of the present invention, and the functional area 1〇 can be set to protrude only toward the side of the regeneration zone 8:: It can also be set to protrude only toward the dehumidification zone 7 side. The cancer, 7 and both sides of the regeneration zone 8 are provided with protrusions = the number of dehumidification zones can also be the dehumidification method of the first aspect of the invention: the functional zone 10 of zone 2 · 10. °2 or more, the 312XP/invention specification (supplement)/96-]〇/96122874 1374770 In the dehumidifying device 65 shown in Fig. 16, the functional gas G is supplied from the side of the opening face 4a, but may be changed. The configuration of the flow-through gas supply device in the functional area is instead supplied from the side of the opening face 4b. Therefore, the gas flowing from the functional region to the functional region is supplied to the functional region from the opening surface on the opposite side to the opening surface on which the regeneration gas is supplied, so that the desiccant which is not easily heated by the regeneration gas can be efficiently heated (ie, supplied It is preferable that the opening surface of the regenerating gas is in the opposite direction of opening π (four) and dividing (4)), so that the regeneration efficiency in the high-function region is improved. In the dehumidification method according to the third aspect of the present invention, the gas flowing in the functional region may be, for example, a dehumidified air B dehumidified by the dehumidification zone, a gas having a small moisture content such as a clean gas, a dry gas or an inert gas, and the like. In addition, the treated air A can still be used. & supplying the functional area flow-through gas to preheat the desiccant moved from the dehumidification zone just before the dehumidifying agent moves to the regeneration zone. That is, the function is to circulate the gas for heating the ventilation system. In addition, the flow of the gas in the functional zone dehumidifies part of the moisture of the desiccant when passing through the functional zone. The humidity of the circulating gas in the functional area may be the same as the humidity of the treated air, and the dew point of the circulating gas in the functional area may be below the dew point of the treated air, but the dehumidified air obtained is reduced. , the point of consideration, preferably lower than the dew point of the treated air 1 (rc or more. In addition, the temperature of the circulating gas in the functional area is as long as the dehumidifying agent that can be moved from the dehumidifying zone is preheated. Alternatively, the type of the desiccant, the temperature of the regeneration gas supplied to the regeneration zone, and the operating strip may be appropriately selected. 312XP/Invention Manual (Supplement)/96-10/96122874 42 U/4770 'The regeneration gas E or the cooling gas c is not particularly limited, and may be the treated air A. The size of the dehumidification zone 7, the regeneration zone 8, and the cooling zone 9 is in accordance with the moisture content of the mutual aeration A. The amount, the dehumidifying performance of the dehumidifying agent, the regenerative energy, the dew point required for the team wet bleed b, the rotational speed of the dehumidifying drum 1, and the like are appropriately selected.

The dehumidification I method according to the second aspect of the present invention preheats the dehumidifying agent 'moved from the dehumidifying zone' before being heated and dehumidified in the regeneration zone, and dehumidifies part of the moisture of the dehumidifying agent, thereby improving the Regeneration efficiency of the regeneration zone. Therefore, the dehumidification method of the third aspect of the present invention can improve the regeneration in the regeneration zone and obtain the filament of the dehumidification Mb as compared with the case where the current functional zone is not provided. In the low aspect, the conventional dehumidification method is required to increase the regeneration efficiency in the regeneration zone. However, if the area of the regeneration zone is increased, the area of the dehumidification zone or the cooling zone will be reduced due to the low overall dehumidification efficiency. Further, in the dehumidification method according to the third aspect of the present invention, the surface velocity of the gas flowing through the machine region is set to be faster than the pair = regeneration! The surface velocity of the regenerative gas is supplied, and the gas flowing through the functional region in which the surface velocity is supplied to the functional region can further improve the effect of low dehumidification. The dehumidifying apparatus according to the third aspect of the present invention is a dehumidifying apparatus for carrying out the dehumidifying method of the third aspect of the present invention, and examples thereof include the dehumidifying apparatus 65. Nothing 312XP / invention manual (supplement) / 96 • 丨 _122874 43

u/47/U =: The dehumidification skirt of the third aspect of the present invention is provided with: except for "," which is formed by a carrier surface in which a ventilating cavity is formed in the direction of rotation, 鄱, 芬鄱社+Λ Eight (four); the dehumidification roller formed by the dehumidifier on the carrier, the basin is opened, and the knife finger is divided into: a dehumidification zone, a regeneration zone, a cooling zone, and a functional zone formed between the dehumidification zone and the regeneration zone; And a rotating means for rotating the dehumidifying drum; a supply means 'which supplies the treated air to the dehumidification zone; a supply means for supplying the regeneration gas to the regeneration zone; the first supply means' Supplying a cooling gas to the cooling zone; heating means for setting a portion of the regeneration zone before heating, and heating the regenerative gas functional zone flow gas supply means for supplying a functional zone flow gas to the functional zone; and first heating means 003〜0. 07。 The dehumidification roller, dehumidification zone, regeneration zone of the dehumidification device of the second aspect of the present invention, wherein the ratio of the area of the functional zone to the opening area of the dehumidification roller is 0. 003~0. 07. machine The energy zone and the cooling zone are both the dehumidification drum, the dehumidification zone, the regeneration zone, the function zone and the cooling zone of the dehumidification method according to the third aspect of the present invention. The ratio of the area of the functional zone to the opening face area of the dehumidification drum is 〇. 003 〜5·07, preferably 〇. 〇〇5~〇. 05, especially 〇〇〇8~〇〇3. The dividing member can divide the opening surface of the dehumidifying drum into the dehumidifying zone, The regeneration zone, the functional zone and the cooling zone can be used without any special 312XP/invention specification (supplement)/96-10/96122874 44 1^/4770, for example, on the opening surface of the dehumidification drum and the roller The gap 1 of the box is arranged to be radially radiated from the center of rotation of the dehumidifying drum, and the partition plate fixed to the drum box may be shaped into the shape of each zone as shown in FIG. The partitioning plate of the dehumidifying drum is in the gap and is fixed to the partition plate on the drum box. The first embodiment of the dehumidifying device of the present invention, the second supply means, the supply means, and the function District distribution gas supply means and heating means are the same as this The first supply means 1 of the first form dehumidification apparatus - the supply means, the third supply means, the functional area flow gas supply means and the force: thermal means. Further, the second heating means of the third embodiment of the dehumidification apparatus of the present invention is According to a third aspect of the present invention, in the dehumidifying apparatus of the third aspect of the present invention, the dehumidifying apparatus of the third aspect of the present invention adjusts the area of the dehumidification zone, the X regeneration zone, and the cooling zone, and adjusts the first supply. The means, the second supply means, the third supply means, and the air volume of the flow-through gas supply means of the functional zone may supply the surface velocity of the gas flowing to the functional zone to the functional zone, and (4) supply the regeneration gas to the regeneration zone The surface speed is 0.5 to (4). Thus, the dehumidification method according to the third aspect of the present invention can be carried out by using the thirst removing device of the third aspect of the present invention. Further, the dehumidifying apparatus according to the third aspect of the present invention is the same as the dehumidifying apparatus of the first aspect of the present invention. The regenerative gas E can use the cooling zone to discharge the gas. For example, in FIG. 16, the second is not provided. The supply machine 23 is instead replaced with a device for removing the connecting pipe that connects the cooling zone exhaust gas exhaust pipe to the first regeneration gas supply pipe 28. In this embodiment, the connecting pipe is the second supply means. 312XP/Invention Manual (Supplement)/96-10/96122874 In addition, 'This ^^日月_ The divisional component of the dehumidification device in the functional area of the functional area, the partition can be the deformation opening The deformation opening division of the dehumidification device of the D-th aspect of the invention is the deformation opening division member of the dehumidification device of the third aspect of the invention. The dehumidification device of the third aspect of the present invention is the dehumidifier of the present invention, as in the case of the present invention, as in the case of the dehumidification device of the present invention: The deformation of the open face is supplied by the functional zone to form a deformation opening to determine the shape of the zone (4). In the case where the functional area of the device is open to the gas outlet side opening, the functional region is divided from the opening face of the dehumidifying roller by the door of the 兮铁 secretion pq \ 。. :: Machine: The flow direction of the circulating gas G in the functional zone is the same as the supply direction of the regeneration zone, and is discharged in the regeneration zone: 'When the gas is discharged from the functional zone, it is discharged in the functional zone. The cutting surface of the dehumidification drum on the exhaust side of the body is not provided with a cutting member that separates the lunar area of the machine, so that the exhaust gas of the functional area can be mixed in the regeneration area immediately after passing through the dehumidifying drum Exhaust gas f. With respect to this I# condition, the description will be made with reference to Fig. 17 because the deformation opening dividing member 45 is provided on the side of the dehumidifying roller opening face 11 through which the gas and the regenerating gas are supplied in the functional region, and thus the regeneration region on the opening surface 4b side is provided. It is divided into the functional zone, but on the side of the dehumidifying drum opening face 4a on the opposite side, there is no dividing member of the zone b zone. Therefore, immediately after passing through the dehumidifying drum, the functional zone exhaust gas H can be mixed into the regeneration zone exhaust gas F in the 312 ΧΡ / invention specification (supplement) / 96_1 〇 / 96122874 46 1374770 in the drum tank. A dehumidification method according to a first aspect of the present invention, a dehumidification device according to a first aspect of the present invention, a dehumidification method according to a second aspect of the present invention, a dehumidification apparatus according to a second aspect of the present invention, and a dehumidification method according to a third aspect of the present invention. In the dehumidification apparatus according to the third aspect of the present invention, the structure of the dehumidifying drum i is not particularly limited as long as it has a ventilation hole formed in the direction of the rotation axis, and may be, for example, a tile-like honeycomb structure. The tile-shaped honeycomb structure is a ridge of the wavy fiber base paper using a flat fiber-like base paper and a wavy fiber base paper obtained by performing the tile-like processing of the flat-shaped fiber base paper, using an inorganic binder or an organic binder. The parts are bonded and obtained by lamination. At this time, a cavity having a substantially semi-cylindrical shape formed between the flat fiber precursor and the paper and the wavy fiber base paper can be a flow path of the air, so that the cavity faces the rotation axis of the dehumidification drum 1. The direction is formed by lamination. Further, the material of the carrier of the dehumidifying drum 1 is not particularly limited as long as it is a material which is usually used in the dehumidifying apparatus. Further, the desiccant roller 1 • the dehumidifying agent carried by the dehumidifying drum 1 is not particularly limited as long as it is generally used in the dehumidifying apparatus, and may be, for example, a synthetic zeolite, wherein the hygroscopicity is high. 'It is best to use the ratio of catch/skill to the lower one, especially X-type zeolite and γ-type zeolite. It is to be understood that the invention is not to be construed as limiting the invention. [Examples] (Example 1) 1. Dehumidifying device 312XP / invention manual (supplement) / 96-10/96122874 47 丄 374770 (dehumidifying roller) • Paper made of yttrium aluminum fiber (thickness 〇 2 mm, void ratio 90) %) The honeycomb structure carrier (manufactured by NIC NICHIAS Co., Ltd., trade name: Honeycle) having a width of 3.0 mm and a high nest is cut into the outer diameter of the open surface (component symbol 67 in Fig. 18). 2000 mm, the diameter of the rotating shaft (component symbol 66 in Fig. 18) 270 mm' and a cylindrical shape of 200 mm in thickness, as a carrier. • Next, 'on this carrier', a synthetic zeolite (γ-type Fossil, Si〇2/Al2〇3=5.4 (Morbi)), which is used as a desiccant, is carried at a carrying amount of MOlcg/m3. Become a dehumidification roller. (Device Structure) A dehumidification device having the following detailed structure was produced in the dehumidifying device 5A shown in Fig. 7. (1) An organic energy region is provided in a part of the regeneration zone and the cooling zone on the opening face 4a side of the dehumidification drum. Lu (ii) the opening surface on the side where the gas is supplied to the functional area is used to separate the functional area of the functional area (component symbol 68 in Fig. 18) 35 mm, long (component symbol 69 in Fig. 18) 850 mm rectangle, The depth (i.e., the length of the front and back directions of the paper sheet in Fig. 18) is 3 mm. • The arrangement of the (lii) split members 6a, 6b is as shown in FIG. Surface area of each zone. Product ratio zone: Dehumidification zone: Regeneration zone: Cooling zone = 1: 14. 4: 14. 4: 85.4. (IV) Cooling zone The exhaust gas exhaust pipe 32 and the first regeneration gas supply pipe are connected by a connecting pipe. 312XP/Invention Manual (Repair V96-10/96122874 48 1374770 The dehumidification device allows the flow of gas in the functional area to be supplied from the opening face 4a side of the dehumidification drum because there is no functional area and cooling on the opening face 4b side of the dehumidification drum The divided member of the zone, and thus the exhaust gas of the functional zone is mixed with the discharge gas of the cooling zone in the drum tank after passing through the opening face 4b of the dehumidifying drum. 2. The dehumidification test uses the above-described dehumidifying device at a rotating speed Under the rotation/hour rotation dehumidification drum, according to the supply conditions shown in Table 1, the treated air A, the cold gas C and the functional area flow gas H are continuously supplied to the dehumidification drum for dehumidification operation. The flow chart is shown in Fig. 9. As a result, the dew point of the dehumidified air 为 is -1 〇. 〇, the temperature is 3 〇. 〇 • The air to be treated Α. The air in the clean room (the temperature • 25°) C, dew point 14 ° C) • Cooling gas c. Air in the clean room (temperature 25 〇, dew point 14 ° C) φ • Functional area G gas: clean gas (25 ° c) • Regeneration area Entrance side Regeneration gas: a mixed gas of the exhaust gas D passing through the cooling zone of the cooling zone and a gas zone H passing through the functional zone of the functional zone and being a heating gas after passing through the heating means. '(Example 2) 1 · Dehumidifying device (dehumidifying roller) The same dehumidification roller as in Embodiment 1. (Device configuration) 312XP/Invention Manual (Supplement)/96-10/96122874 49 1374770 A dehumidification device having the following detailed configuration is produced in the dehumidification device 50 shown in Fig. 7. (1) Between the cooling zone and the dehumidification zone, an organic energy zone is provided at the t-portion thereof. 111) an opening surface on the side where the gas is supplied in the functional region, and an opening surface on the side where the functional region is distributed in the functional region. The divided member of the functional area is a rectangle having a width of 35 mm and a length of 850 mm and a depth of 3 mm. The arrangement of the (111) dividing members 6a, 6b is as shown in Fig. 2A. The area ratio of each zone is the functional zone··Dehumidification zone: regeneration zone··cooling zone=1: 14. 4 : 14. 4 : 85. 4. (iv) The cooling zone exhaust gas exhaust pipe 32 and the first regeneration gas supply pipe 28 are connected by a connecting pipe. (v) The functional area on the side of the opening face 4b of the dehumidifying drum (i.e., the drum box on the side of the opening face 4b of the dehumidifying drum) is connected to the dehumidifying air exhaust pipe 27 to supply the dehumidified air B to the functional area. • (V1) connects the functional area on the side of the opening surface 4a of the dehumidifying drum (i.e., the drum box on the side of the opening face 4a of the dehumidifying drum) to the cooling gas supply pipe 31, so that the exhaust gas in this area can be mixed into the cooling gas. c. In the dehumidifying apparatus, the circulating gas in the functional area is supplied from the opening surface '4b side of the dehumidifying drum> > 2. The dehumidifying test uses the above-described dehumidifying apparatus, and rotates the dehumidifying drum at a rotating speed of 1 Torr/hour, according to Table 1 The supply conditions shown are that the process air A, the cooling gas C, and the functional zone flow gas H are continuously supplied to the dehumidification drum, and the dehumidification operation is performed by the 312 ΧΡ/invention specification (supplement)/96-_6122874 sn 1374770. The flow chart at this time is as shown in FIG. 21. As a result, dehumidification • Air B has a dew point of -7 ° C and a temperature of 32. (:. ' • Air to be treated A: Air in a clean room to be treated (temperature 25 Ϊ, dew point 14 ° C) • Cooling gas C: air in a clean room (temperature 25 〇 c, dew point) 14°C), mixed gas with exhaust gas η passing through the functional area of the functional area • Functional gas flow G: Dehumidified air after passing through the dehumidification zone (temperature • 32〇C, dew point -7°C) • Regeneration zone entrance The regeneration gas on the side: the gas D' is discharged through the cooling zone after the cooling zone and is the heated gas after passing through the heating means. (Example 3) 1. Dehumidifying apparatus (dehumidifying drum) The same dehumidifying drum as in Example 1 was produced. I (Device Structure) A dehumidifying apparatus having the following detailed structure is produced in the dehumidifying apparatus 50 shown in Fig. 7. (i) An organic energy source region is disposed between the dehumidifying zone and the regeneration zone. The opening surface on the side where the gas is distributed in the functional area and the opening surface on the side where the gas is exhausted in the functional area are used to divide the dividing member of the functional area, and have a rectangular shape with a width of 35 mm and a length of 850 mm and a depth of 30 mm. Member 6a, 6b The configuration is shown in Figure 22. 312XP/invention specification (supplement)/96-10/96122874 area ratio is functional area; dehumidification area: regeneration area: cooling area=1: 丨4 4 . .14· 4: 85. 4. (1V) The cooling zone exhaust gas exhaust pipe 32 and the first regeneration gas supply pipe 28 are connected by a connecting pipe. (v) The gn is disposed in the middle of the flow of the gas supply pipe in the functional zone. % ..., 丁权 'flows the gas in the heating function zone. (VI) The functional zone on the side of the opening face 4b of the dehumidification drum (ie, the drum box on the side of the opening face 4b of the dehumidification drum is connected to the discharge gas discharge pipe 32 of the cooling zone) The function area exhaust gas is mixed in the regeneration gas e. In the dehumidification apparatus, the circulation gas in the function area is supplied from the opening face 4a side of the dehumidification drum. 2 • The dehumidification test uses the above-described dehumidifying apparatus to rotate at a rotation speed of 10/hr. Under the dehumidification drum, according to the supply conditions shown in Table 1, the treated air A, the cold portion gas C, and the functional region flow gas η are continuously supplied to the dehumidification drum, and the dehumidification operation is called for the dehumidification operation. As shown, the dew point of the dehumidified air It is -13 ° C and the temperature is 37 ° C. • Air to be treated A: Air in a clean room (temperature: 25 ° C, dew point: 14 ° C) to be treated, • Cooling gas C: dust-free as a treatment target Indoor air (temperature 25°c, 'dew point 14°C) • Functional area flow gas G: nitrogen (temperature i4(TC) • Regeneration gas on the inlet side of the regeneration zone: exhaust gas D and functional zone through the cooling zone The gas η is exhausted and is heated by the heating means 312 ΧΡ / invention manual (supplement) / 96-10/96122874 52 1374770 (Comparative Example 1) 1. Dehumidifier « (Dehumidification roller) • Manufactured in the same manner as in the example i Dehumidification roller. (Device configuration) A dehumidifying device having the following detailed structure in the dehumidifying device 50 shown in Fig. 7 was produced. • (i) The function area is not set. (i i) The flow-through gas supply pipe in the functional area, the split member in the split function area, and the exhaust gas exhaust pipe in the functional area are not provided. The arrangement of the '(i i i) division members 6a, 6b is as shown in FIG. The area ratio of each zone is dehumidification zone: regeneration zone: cooling zone = 6 : 1 : 1. (iv) Cooling zone The exhaust gas exhaust pipe 32 and the first regeneration gas supply pipe 28 are connected by a connecting pipe. I 2. Dehumidification test Using the above-mentioned dehumidifying apparatus, under the rotating dehumidification drum at a rotational speed 丨〇 rotation/hour, according to the supply conditions shown in Table 1, the air to be treated A, the cooling gas C and the circulation gas H in the functional area are continuously supplied. The dehumidification drum is given, and the dehumidification operation is performed. The flow chart at this time is shown in Fig. 25. As a result, the dew point of the dehumidified air B was -4 ° C and the temperature was 35. (: • Air to be treated A: Air in a clean room to be treated (temperature: 25 ° C, dew point: 14 ° C) • Cooling gas c • Air in a clean room to be treated (temperature, 312 ΧΡ / invention Instruction manual (supplement)/96-10/96122874 „ 1374770

Exhaust gas path 14°c) Regeneration gas on the inlet side of the regeneration zone: the gas D' is discharged through the cooling zone of the cooling zone and is the heated gas after passing through the heating means. [Table 1 ]

Cooling zone into supply Surface velocity Temperature Temperature _ Functional zone input Supply surface velocity 1 〗 Temperature Gas type Regeneration zone Intake Surface velocity

Dehumidified air B 1# output temperature dew point _ i district discharge amount m /rain.

1) The surface velocity of each zone refers to the speed. [Simple diagram of the example I example I example application | example application | example | comparison

5 41 2 II 22514 0 22514 Helium I 432 Empty Wet Remover 4 5 Gas 2 Net Clean 3 5 4 2 1 22514 10 Gas 1 Nitrogen 25143.22514

Fig. 1 is a view showing an example of a form of a dehumidifying drum which is placed in a dehumidifying apparatus for performing the dehumidifying method according to the first aspect of the present invention. 312ΧΡ/发明发明(补件)/96-10/96122874 54 13/4770 Fig. 2 is a view showing an example of a dehumidification method for carrying out the first embodiment of the present invention. In Fig. 3, '(3-1) and (3-2) are arrangement diagrams of the divided members when viewed from the side of the dehumidifying drum shown in Fig. i.曲,, \中, (4_1)芏(4_δ) is a schematic view of the shape of the "., zone 4 regeneration zone, the functional zone and the cooling zone formed on the opening face 4a. ® 5 to '5-3' is the area diagram of the open σ surface function area of the dehumidification roller. Han 涊 Figure 6 is a diagram showing the dehumidification of the first supply means, the second supply means or the third supply hand & Further, Fig. 7 is another embodiment of the first dehumidifying apparatus of the present invention. Fig. 8 is a schematic view showing a deformed opening dividing member, wherein (view-2) is a cross-sectional view of the χ_χ line, and ( ―) is a cross-sectional view taken along the line y-y. Fig. 9 is a schematic view showing the arrangement position of the deformed opening dividing member. Figure 10 is a cross-sectional view of the drum box 21. In Fig. 11, (11-1) and (11-2) are schematic views showing the arrangement of the member (division member) or the deformation opening member from the opening surface side of the dehumidification roller. In Fig. 12, '(12-1) and (12-2) are schematic views showing the arrangement of the divided members when viewed from the side of the opening face of the dehumidifying drum. Fig. 13 is a view showing an example of a configuration for carrying out the dehumidification method according to the second aspect of the present invention. ...,, Figure 14, in. 4-1M (14-2) is the configuration of the 312XP/Invention Manual (when the 55 is added, the split member or the deformation opening is divided into pi 1C . / ′) in the opening face side of the dehumidification roller. In Fig. 15, (15) -1) and (15-2) are schematic diagrams of the arrangement of the knife-cutting members when the horses are dissuaded from the open side of the dehumidifying drum from the horses, and the shackles are shown in Fig. 16 for the implementation of the present invention. Example: Dehumidification diagram of the dehumidification method of the form: 7 Lu and (17-2) are schematic diagrams of the arrangement of the cutter member or the deformation opening division member when the dehumidification roller is opened. See Figure U in '18-1 And (18-2) is a schematic view showing the arrangement of the dividing member when viewed from the side of the thirst-removing device of the embodiment of the thirst-removing device: Fig. 19 is a flow chart of Embodiment 1. In Fig. 20, '(2〇- 1) and (2〇-2) are schematic views of the arrangement of the divided members when viewed from the opening surface side of the dehumidifying drum of the dehumidifying apparatus of the second embodiment. Fig. 21 is a flow chart of the second embodiment. In Fig. 22, (22-1) And (22-2) is a schematic view showing the arrangement of the dividing members when viewed from the opening surface side of the dehumidifying drum of the dehumidifying apparatus of the third embodiment. Fig. 23 is a flow of the embodiment 3. Fig. 24, (24-1) and (24-2) are schematic views showing the arrangement of the dividing members when viewed from the opening surface side of the dehumidifying drum of the dehumidifying apparatus of Comparative Example 1. Fig. 25 is a flow of Comparative Example 1. Fig. [Description of main component symbols] 1 Dehumidification roller 3 Ventilation opening 4a, 4b Dehumidification roller opening surface 5 Roller shaft 312XP / Invention manual (supplement) / 96-10/96122874 56 1374770 6a, 6b, 51a, 51b, 61a 7 8 9 • λ n

1U • 20, 50, 60, 65, 201 21 22 • 23 24 25 26 27 28 29 • 3〇31 32 33, 43, 53, 62 ' 34 , 54 , 63 ' 38 • 39 40a ' 40b 41 , 61b Split Component dehumidification zone regeneration zone cooling zone

» .1,. / L mib liE Dehumidifier Roller Box First Supply Machine Second Supply Machine Third Supply Machine Heating Device Processed Air Supply Pipe Dehumidified Air Exhaust Pipe First Regeneration Gas Supply Pipe Second Regeneration Gas Supply Pipe Regeneration Zone exhaust gas exhaust pipe cooling gas supply pipe cooling zone exhaust gas exhaust pipe function zone circulation gas supply pipe function zone exhaust gas exhaust pipe rotation direction dehumidification roller opening surface area functional area area of the functional area 10 set place 312XP /Invention Manual (Repair)/96-10/96122874 57 1374770

42 The place where the functional area 10 is provided 44 The connection pipe 45 The deformation opening division member 46 The deformation opening division member functional area circulation gas inlet side opening 47 The deformation opening division member functional area circulation gas outlet side opening 48 The supply of the circulation gas in the functional area Direction 49 Slit 66 Rotary shaft mounting portion diameter 67 Open surface outer diameter 68 Width of the divided member that divides the functional area 69 Length of the divided member that divides the functional area 221 First supply means 231 Second supply means 241 Third supply means A treated air B dehumidified air C cooling gas D cooling zone exhaust gas E regeneration gas F regeneration zone exhaust gas G functional zone flow gas 机 functional zone exhaust gas 312XP / invention manual (supplement) / 96-10/96122874 58

Claims (1)

1374770 X. The scope of application for patents·· ^Replacement of a book 1. A method of deconstruction of the dehumidification drum consisting of a ventilating cavity in the woman's side (4) and a dehumidification roller on the body. The surface is divided into a dehumidification zone, a regeneration zone and a cooling zone, and the dehumidification zone is supplied with the treated air while rotating the dehumidification=cylinder, and the gas 胄4 is supplied to the regeneration zone to cool and lightly supply the cooling gas, and the continuous dehumidification is carried out. a dehumidifying method for dioxing and regenerating a dehumidifying agent; characterized in that: an organic energy region is disposed between the regeneration zone and the cooling zone; and a flow region of a functional region for cooling or drying the dehumidifying roller is supplied to the machine application zone; The uc is supplied with a heating gas which is heated by the cooling gas of the cooling zone of the cooling zone and the mixed gas of the exhaust gas of the functional zone of the second zone; J will supply the functional zone with the circulating gas for the cooling zone The surface speed of the gas should be cooled to 05H; ^ is the area of the functional zone to the dehumidification drum opening . 003~0. 〇7. The illusion is a two-body method in which a dehumidification roller composed of a dehumidifying agent formed on a carrier having a venting opening surface in the direction of a rotating shaft is cut into a dehumidification zone, a regeneration zone, and a cooling raft. The same direction of the wire drum W Dan Wang L and the cold center, in the dehumidification should be the regeneration gas, the cooling zone for the reservoir f: regeneration of the supply of air and re-enrichment of the body and continuous dehumidification of the regenerator Dehumidification method; characterized in that an organic energy region is disposed between the cold portion of the 6 HM and the dehumidification zone; 96122874 59 5〜10倍; The ratio of the opening area of the wet roller is set to 0.5 to 10 times; the ratio of the opening area of the wet roller is set to be 0. 5~10 times; The dehumidification method is divided into a dehumidification zone, a regeneration zone, and a cooling zone by a surface of a dehumidification drum formed by a ventilating cavity formed in a direction of a rotating shaft and a dehumidifying agent carried on the carrier, and is rotated. a dehumidification drum supplying the treated air to the dehumidification zone, supplying a gas to the regeneration zone, supplying a cooling gas to the cooling zone, and continuously dehumidifying the treated air and regenerating the dehumidifying agent; and characterized in that An organic energy zone is disposed between the dehumidification zone and the regeneration zone; and a heating zone heated by the heating means is heated to heat the circulation zone of the dehumidification roller; and the regeneration zone is supplied with a cooling zone that passes through the cooling zone a heating gas heated by the exhaust gas and a mixed gas of the exhaust gas in the functional area of the functional zone; the surface velocity of the circulating gas of the functional zone is supplied to the remote functional zone , Supply times set square 5~1〇 face velocity of the regeneration gas to the regeneration zone ·;. The function of the area ratio is set dehumidifying surface area of the drum opening 07 0. 003~0. 96122874 60 匕Η月》丨崎, 4.—A kind of dehumidification device, i is a 'dehumidification method, which is to be levied, and it has the body of the first item of π heart circumference ΓΓ1: it is formed by the direction of the rotation axis a dehumidification drum composed of a ventilating hole n, a g ^4 on the carrier, and an open dehumidification drum, which is divided into: a dehumidification zone, a regeneration zone, a cooling zone, and a settling regeneration zone a functional zone between the cooling zones; the dividing member; a rotating means for rotating the dehumidifying drum; a supply means for supplying the treated air to the dehumidifying zone; and a supply means for supplying the regeneration gas to the regeneration zone ——, 手段, means, the cooling zone is supplied with cooling gas; the body plus = segment ' is disposed in the front of the regeneration zone, and heats the regenerative gas machine: the zone machine through the rolling body supply means, the function The area is supplied with the gas; the second middle ▲ is supplied with the mixed gas of the exhaust gas passing through the cooling zone of the cooling zone through the cooling zone of the cooling zone; the area of the functional zone is the opening area of the dehumidifying drum Than, pass 0.003 ~ 0.07'5·-Dehumidification Farming' is used to implement the dehumidification method of the second paragraph of the patent application scope, which is to be levied, which has: a heart removal, and a ventilator formed by the direction of the rotation axis The dehumidification roller composed of the hollow carrier and the dehumidifying agent supported on the carrier has an opening surface divided into a dividing member: a dehumidifying zone, a regeneration zone, a cooling zone, and a setting of 96122874 丄J/4//U. The dividing member is divided by the amount of (4) (3); the slave means rotating the dehumidifying drum; the supplying means for supplying the treated air to the dehumidifying zone; and the second supplying means for regenerating the regeneration B; a third supply means for supplying a cooling gas to the cooling zone; a heating means disposed in a front portion of the regeneration zone and adding the body; and a flow of the gas supply means in the functional zone; wherein the functional zone supplies the functional zone 003〜0· 07。 The ratio of the area of the area of the area of the dehumidification roller is 0. 003~0· 07. 6. A dehumidification farm, which is used for implementing the dehumidification method of claim 3, characterized in that it has: a spear, ...; a cylinder which is a carrier having a ventilation hole formed in the direction of the rotation axis And a dehumidifying drum comprising the dehumidifying agent supported on the carrier, wherein the opening surface is divided into: a dehumidifying zone, a regeneration zone, a cooling zone, and a functional zone disposed between the dehumidification zone and the regeneration zone. a dividing member; a rotating means for rotating the dehumidifying drum; a first supply means for supplying the treated air to the dehumidifying zone; and a second supplying means for supplying the regeneration gas to the regeneration zone; 96122874 62 1374770 a means for supplying a cooling gas to the cooling zone; > a heating means 'which is disposed in the preceding section of the regeneration zone' and heating the regeneration gas; a functional zone flow gas supply means for supplying a functional zone flow to the functional zone οαΙ» % · In the case of a milk basket, the second heating means from the Han, which heats the flow of gas in the functional zone; wherein the regeneration zone is supplied with a cooling zone through the cooling zone Gas and the mixed gas of exhaust gas through the machine can function zone region; machine can dehumidification area ratio of the surface area of the drum opening, based 003~0 0. 07. 96122874 63