JP2008012400A - Dehumidification method and dehumidifier - Google Patents

Abstract

A dehumidification method capable of reducing the dew point of dehumidified air by a simple method without enlarging the size of the dehumidifier or greatly changing the operating conditions of the dehumidifier, and the dehumidification method. To provide a dehumidifying device for carrying out.
The dehumidification rotor is divided into a dehumidification zone, a regeneration zone, and a cooling zone by dividing an opening surface of a dehumidification rotor formed of a carrier in which a ventilation cavity is formed in the rotation axis direction and a dehumidifying agent carried on the carrier. While rotating the air, the air to be treated is supplied to the dehumidification zone, the regeneration gas is supplied to the regeneration zone, the cooling gas is supplied to the cooling zone, and the dehumidification of the air to be treated and the regeneration of the dehumidifying agent are continuously performed. A functional zone is provided between the regeneration zone and the cooling zone, or between the cooling zone and the dehumidification zone, or between the dehumidification zone and the regeneration zone. A dehumidification method for supplying functional zone ventilation gas to the zone.
[Selection] Figure 1

Description

  The present invention relates to the dehumidification of supply air for producing dry air used for drying raw materials, dehumidification for air conditioning of buildings, the production equipment room in the production of semiconductors, liquid crystals, electronics, etc. A dehumidifying method for carrying out the dehumidifying method, such as dehumidification, and a dehumidifying device for carrying out the dehumidifying method, more specifically, a dehumidifying rotor carrying a dehumidifying agent, the dehumidifying rotor rotating, and a dehumidifying agent The present invention relates to a dehumidifying method for performing dehumidification of the air to be treated containing water and the regeneration of the dehumidifying agent that has absorbed moisture simultaneously and continuously dehumidifying the air to be treated, and a dehumidifying apparatus for performing the dehumidifying method.

  In a manufacturing process of a silicon wafer or the like in a semiconductor manufacturing factory, the generation of an oxide film causes a product defect, but it has recently been found that moisture has a great influence on the generation of the oxide film. For this reason, in order to reduce product defects, it has become necessary to remove moisture in the air in the manufacturing equipment room and the like.

As a method for removing moisture in the air in the production apparatus, there are mainly a method of purging with dry nitrogen gas and a method of dehumidifying. In the method of purging with the nitrogen gas, the moisture in the apparatus chamber is expelled to the outside of the apparatus chamber, so that the amount of moisture is very low. However, the running cost (cost of dried nitrogen gas and N ₂ Pressure Swing Adsorption (PAS; nitrogen generator) ) Is expensive, and it is necessary to control the oxygen gas concentration in the equipment room. On the other hand, the dehumidifying method does not require dry nitrogen gas, and it is not necessary to control the oxygen gas concentration, so that the running cost is lower than the method of purging with the dry nitrogen gas.

  Therefore, in recent years, research on a dehumidifier for the purpose of dehumidification in a semiconductor manufacturing apparatus room or the like has been advanced. As the dehumidifying apparatus, for example, Japanese Patent Application Laid-Open No. 2004-000824 of Patent Document 1 discloses that a part of sodium in a hydrophilic zeolite is replaced with one or more elements selected from La, Nd, Ce, and Pr. The adsorbent made of aluminosilicate is carried and has a rotor having rotating means, the rotation area of the rotor is divided into an adsorption zone and a regeneration zone, and a path for supplying a gas to be treated to the adsorption zone, and the adsorption zone A dehumidifying device is disclosed that includes a path for supplying the gas treated in step 1 to the target space and a path for supplying the regeneration gas to the regeneration zone.

  In such a dehumidifying apparatus, as a method for obtaining a drier air, (i) increasing the thickness of the dehumidifying rotor, increasing the diameter of the dehumidifying rotor, or increasing the number of dehumidifying rotors to plural, There are a method of increasing the area, (ii) a method of reducing the passing surface speed of the air to be processed to reduce the processing amount per unit time, and (iii) a method of increasing the regeneration temperature and increasing the regeneration efficiency.

  For example, Japanese Patent Laid-Open No. 2004-160444 of Patent Document 2 discloses a dehumidifying device having two dehumidifying rotors.

Japanese Patent Laid-Open No. 2004-000824 (Claims) Japanese Patent Laid-Open No. 2004-160444 (Claims)

  However, the method (i) of increasing the processing area has a problem that the size of the dehumidifying device increases. Further, the method (ii) for reducing the processing amount per unit time has a problem that the number of dehumidifying devices has to be increased because the processing amount per unit is small. In addition, the above (iii) method for increasing the regeneration efficiency has a problem in that a large amount of energy is required to increase the regeneration temperature and the running cost is increased.

  Accordingly, an object of the present invention is to provide a dehumidifying method capable of reducing the dew point of dehumidified air by a simple method without increasing the size of the dehumidifying device or greatly changing the operating conditions of the dehumidifying device, and It is providing the dehumidification apparatus for enforcing this dehumidification method.

  As a result of intensive studies to solve the problems in the conventional technology, the present inventors have established (1) a functional zone between the regeneration zone and the cooling zone, and the functional zone is used for cooling and drying. Alternatively, a functional zone for cooling and drying is provided by supplying aeration gas, or a functional zone is provided between the cooling zone and the dehumidifying zone, and the functional zone for cooling, drying or cooling and drying is provided in the functional zone. By supplying aeration gas or by providing a functional zone between the dehumidification zone and the regeneration zone and supplying the functional zone aeration gas for heating to the functional zone, the adsorption capacity of the dehumidifying agent is increased, The dew point of the dehumidified air can be lowered, and (2) the dew point of the dehumidified air is lowered by making the surface speed of the functional zone ventilation gas supplied to the functional zone faster than other zones. It found such that further enhances the effect that, and have completed the present invention.

That is, the present invention (1) divides the opening surface of the dehumidification rotor composed of the carrier in which the ventilation cavity is formed in the rotation axis direction and the dehumidifying agent carried on the carrier into the dehumidification zone, the regeneration zone, and the cooling zone. Then, while the dehumidification rotor is rotated, the air to be treated is supplied to the dehumidification zone, the regeneration gas is supplied to the regeneration zone, the cooling gas is supplied to the cooling zone, and the dehumidification of the air to be treated is continuously performed. And a dehumidifying method for regenerating the dehumidifying agent,
A functional zone is provided between the regeneration zone and the cooling zone,
Supplying a functional zone aeration gas to the functional zone for cooling or drying the dehumidifying rotor;
The surface speed of the functional zone ventilation gas supplied to the functional zone is 0.5 to 10 times the surface speed of the cooling gas supplied to the cooling zone,
The ratio of the area of the functional zone to the area of the opening surface of the dehumidifying rotor is 0.003 to 0.07,
The dehumidification method characterized by the above is provided.

Further, in the present invention (2), the opening surface of the dehumidification rotor composed of the carrier having a ventilation cavity formed in the rotation axis direction and the dehumidifying agent carried on the carrier is divided into a dehumidification zone, a regeneration zone and a cooling zone. Then, while the dehumidification rotor is rotated, the air to be treated is supplied to the dehumidification zone, the regeneration gas is supplied to the regeneration zone, the cooling gas is supplied to the cooling zone, and the dehumidification of the air to be treated is continuously performed. And a dehumidifying method for regenerating the dehumidifying agent,
A functional zone is provided between the cooling zone and the dehumidifying zone,
Supplying a functional zone aeration gas to the functional zone for cooling or drying the dehumidifying rotor;
The surface speed of the functional zone ventilation gas supplied to the functional zone is 0.5 to 10 times the surface speed of the cooling gas supplied to the cooling zone,
The ratio of the area of the functional zone to the area of the opening surface of the dehumidifying rotor is 0.003 to 0.07,
The dehumidification method characterized by the above is provided.

Further, in the present invention (3), the opening surface of the dehumidification rotor composed of the carrier having a ventilation cavity formed in the rotation axis direction and the dehumidifying agent carried on the carrier is divided into a dehumidification zone, a regeneration zone, and a cooling zone. Then, while the dehumidification rotor is rotated, the air to be treated is supplied to the dehumidification zone, the regeneration gas is supplied to the regeneration zone, the cooling gas is supplied to the cooling zone, and the dehumidification of the air to be treated is continuously performed. And a dehumidifying method for regenerating the dehumidifying agent,
A functional zone is provided between the dehumidification zone and the regeneration zone,
Supplying a functional zone aeration gas for heating the dehumidification rotor to the functional zone;
The surface speed of the functional zone ventilation gas supplied to the functional zone is 0.5 to 10 times the surface speed of the regeneration gas supplied to the regeneration zone;
The ratio of the area of the functional zone to the area of the opening surface of the dehumidifying rotor is 0.003 to 0.07,
The dehumidification method characterized by the above is provided.

Further, the present invention (4) is a dehumidification rotor comprising a carrier in which a ventilation cavity is formed in the rotation axis direction and a dehumidifying agent carried on the carrier, the opening surface of which is a dehumidification zone by a divided member, A dehumidification rotor divided into a regeneration zone, a cooling zone, and a functional zone provided between the regeneration zone and the cooling zone;
The divided member;
Rotating means for rotating the dehumidifying rotor;
First supply means for supplying air to be treated to the dehumidification zone;
Second supply means for supplying regeneration gas to the regeneration zone;
Third supply means for supplying cooling gas to the cooling zone;
A heating means provided in a preceding stage of the regeneration zone for heating the regeneration gas;
Functional zone ventilation gas supply means for supplying functional zone ventilation gas to the functional zone;
Have
The ratio of the area of the functional zone to the area of the opening surface of the dehumidifying rotor is 0.003 to 0.07,
The dehumidifying device characterized by the above is provided.

Further, the present invention (5) is a dehumidification rotor comprising a carrier in which a ventilation cavity is formed in the rotation axis direction and a dehumidifying agent carried on the carrier, the opening surface of which is a dehumidification zone by a divided member, A dehumidification rotor divided into a regeneration zone, a cooling zone, and a functional zone provided between the cooling zone and the dehumidification zone;
The divided member;
Rotating means for rotating the dehumidifying rotor;
First supply means for supplying air to be treated to the dehumidification zone;
Second supply means for supplying regeneration gas to the regeneration zone;
Third supply means for supplying cooling gas to the cooling zone;
A heating means provided in a preceding stage of the regeneration zone for heating the regeneration gas;
Functional zone ventilation gas supply means for supplying functional zone ventilation gas to the functional zone;
Have
The ratio of the area of the functional zone to the area of the opening surface of the dehumidifying rotor is 0.003 to 0.07,
The dehumidifying device characterized by the above is provided.

Further, the present invention (6) is a dehumidification rotor comprising a carrier in which a ventilation cavity is formed in the rotation axis direction and a dehumidifying agent carried on the carrier, the opening surface of which is a dehumidification zone by a divided member, A dehumidification rotor divided into a regeneration zone, a cooling zone, and a functional zone provided between the dehumidification zone and the regeneration zone;
The divided member;
Rotating means for rotating the dehumidifying rotor;
First supply means for supplying air to be treated to the dehumidification zone;
Second supply means for supplying regeneration gas to the regeneration zone;
Third supply means for supplying cooling gas to the cooling zone;
A heating means provided in a preceding stage of the regeneration zone for heating the regeneration gas;
Functional zone ventilation gas supply means for supplying functional zone ventilation gas to the functional zone;
A second heating means for heating the functional zone aeration gas;
Have
The ratio of the area of the functional zone to the area of the opening surface of the dehumidifying rotor is 0.003 to 0.07,
The dehumidifying device characterized by the above is provided.

  According to the present invention, a dehumidification method capable of reducing the dew point of dehumidified air by a simple method without increasing the dimensions of the dehumidifier or greatly changing the operating conditions of the dehumidifier, and the dehumidifier A dehumidifying device for carrying out the method can be provided.

  The dehumidification method of the 1st form of this invention is demonstrated with reference to FIGS. FIG. 1 is a diagram showing a form example of a dehumidification rotor installed in a dehumidification apparatus for carrying out the dehumidification method of the first aspect of the present invention, and FIG. 2 is a dehumidification method of the first aspect of the present invention. FIG. 3 is a diagram showing the arrangement of the divided members when viewed from the opening surface side of the dehumidification rotor shown in FIG. 1. In FIG. 1, a dehumidification rotor 1 includes a carrier and a dehumidifying agent carried on the carrier, and a rotor shaft 5 is attached to the center of the dehumidification rotor 1. The dehumidifying rotor 1 is formed with a ventilation cavity, and the opening 3 of the ventilation cavity exists on the opening surfaces 4 a and 4 b of the dehumidifying rotor 1. Accordingly, the one opening surface 4a and the other opening surface 4b of the dehumidifying rotor 1 serve as an inlet / outlet of air or gas vented to the dehumidifying rotor 1, and the ventilation cavity serves as an air flow path. Within the vent cavity, the dehumidifying agent comes into contact with the vented air or gas, and moisture moves between the vented air or gas and the dehumidifying agent. Then, when the opening surface 4a is divided by the first divided member 6a and the opening surface 4b is divided by the second divided member 6b, the dehumidifying rotor 1 absorbs moisture in the air to be treated by the dehumidifying agent, A dehumidifying zone 7 where the air to be treated is dehumidified, a dehumidifying agent that has absorbed moisture is dehumidified, a regeneration zone 8 where the moisture absorbing performance of the dehumidifying agent is regenerated, and a cooling where the regenerated dehumidifying agent is cooled It is divided into a zone 9 and a functional zone 10 for venting the functional zone aeration gas. Note that the first divided member 6a and the second divided member 6b are fixed to the rotor case 21 of the dehumidifying device 20 in FIG. 2, and the dehumidifying rotor 1 does not interfere with the rotation of the dehumidifying rotor 1. Is close to. The dehumidifying rotor 1 is installed on the rotor case 21 of the dehumidifying device 20 through the rotor shaft 5 so as to be rotatable.

  2, the dehumidifying device 20 includes the dehumidifying rotor 1 shown in FIG. 1, the rotor case 21 in which the dehumidifying rotor 1 is rotatably installed, the rotor shaft 5, the first divided member 6a, and the second divided member. 6b, the 1st supply machine 22, the 2nd supply machine 23, the 3rd supply machine 24, the heating apparatus 25, and the motor for rotating this dehumidification rotor 1 which is not shown in figure. In FIG. 2, the position of the first divided member 6a in the rotor case 21 is indicated by a dotted line. Further, the dehumidifying device 20 includes a treated air supply pipe 26 that connects the first supply device 22 and the rotor case 21, a dehumidified air exhaust pipe 27 for exhausting dehumidified air from the dehumidifying zone 7, and the second supply. A first regeneration gas supply pipe 28 connecting the machine 23 and the heating device 25, a second regeneration gas supply pipe 29 connecting the heating device 25 and the rotor case 21, and a regeneration zone for exhausting the regeneration zone exhaust gas from the regeneration zone 8. An exhaust gas exhaust pipe 30, a cooling gas supply pipe 31 that connects the third feeder 24 and the rotor case 21, a cooling zone exhaust gas exhaust pipe 32 that exhausts the cooling zone exhaust gas from the cooling zone 9, and the functional zone 10 A functional zone ventilation gas supply pipe 33 for supplying the functional zone ventilation gas, and a functional zone exhaust gas exhaust pipe 34 for exhausting the functional zone exhaust gas from the functional zone 10. .

  (3-1) in FIG. 3 is a view when the dehumidification rotor 1 is viewed from the opening surface 4a side, and (3-2) is a view when the dehumidification rotor 1 is viewed from the opening surface 4b side. It is. The opening surface 4a is divided into the dehumidifying zone 7, the regeneration zone 8, the functional zone 10 and the cooling zone 9 in order in the rotational direction 38 of the dehumidifying rotor 1 by the first dividing member 6a. . Further, the opening surface 4b is divided into the dehumidifying zone 7, the regeneration zone 8, the functional zone 10 and the cooling zone 9 in order in the rotational direction 38 of the dehumidifying rotor 1 by the second dividing member 6b. ing. The position of the first divided member 6a in (3-1) and the position of the second divided member 6b in (3-2) are symmetrical.

  The dehumidifying method of the first aspect of the present invention is performed as follows using the dehumidifying device 20. First, air to be treated A in a clean room or the like containing moisture is supplied to the dehumidifying zone 7 of the dehumidifying rotor 1 using the first supply device 22. When the air to be treated A comes into contact with the dehumidifying agent when passing through the dehumidifying rotor 1, moisture in the air to be treated A moves to the dehumidifying agent. Is dehumidified. The dehumidified air B from which moisture has been removed is exhausted from the dehumidifying zone 7 of the dehumidifying rotor 1 through the dehumidified air exhaust pipe 27 and returned to a clean room or the like.

  Next, the dehumidifying agent that has absorbed moisture in the dehumidifying zone 7 moves to the regeneration zone 8 as the dehumidifying rotor 1 rotates. Then, the regeneration gas E is supplied to the heating device 25 using the second supply device 23, heated by the heating device 25, and then supplied to the regeneration zone 8 of the dehumidifying rotor 1. When the regeneration gas E comes into contact with the dehumidifying agent, the moisture in the dehumidifying agent moves to the regeneration gas E, so that the dehumidifying agent is dehumidified. The regeneration zone exhaust gas F that has absorbed moisture is discharged from the regeneration zone 8 of the dehumidifying rotor 1 through the regeneration zone exhaust gas exhaust pipe 30 to the outside.

  Further, the dehumidifying agent dehumidified in the regeneration zone 8 moves to the functional zone 10 as the dehumidifying rotor 1 rotates. And in order to cool this dehumidification rotor 1, the functional zone ventilation gas G is supplied to this functional zone 10 of this dehumidification rotor 1 using the functional zone ventilation gas supply machine which is not shown in figure. When the functional zone aeration gas G comes into contact with the dehumidified dehumidifying agent, the heat or moisture of the dehumidifying agent is transferred to the functional zone aeration gas G, so that the dehumidifying agent is cooled or dried. The functional zone exhaust gas H that has absorbed the heat of the dehumidifying agent is discharged from the functional zone 10 of the dehumidifying rotor 1 to the outside through the functional zone exhaust gas exhaust pipe 34.

  Further, the dehumidifying agent cooled in the functional zone 10 moves to the cooling zone 9 as the dehumidifying rotor 1 rotates. Then, the cooling gas C is supplied to the cooling zone 9 of the dehumidifying rotor 1 using the third supply machine 24. As the cooling gas C comes into contact with the dehumidifying agent, the dehumidifying agent is further cooled. The cooling zone exhaust gas D that has absorbed the heat of the dehumidifying agent is discharged from the cooling zone 9 of the dehumidifying rotor 1 to the outside through the cooling zone exhaust gas exhaust pipe 32.

  Next, the dehumidifying agent cooled in the cooling zone 9 moves to the dehumidifying zone 7 as the dehumidifying rotor 1 rotates, and is used again for dehumidifying the air to be treated A.

  Then, the air to be treated A, the regeneration gas E, the functional zone ventilation gas G, and the cooling gas C are supplied to the dehumidification rotor 1 and the dehumidification rotor 1 rotates continuously or intermittently. Thus, dehumidification of the air to be treated A is continuously performed.

  At this time, when supplying the functional zone ventilation gas to the functional zone 10, the surface speed of the functional zone ventilation gas supplied to the functional zone is set to 0.5 of the surface speed of the cooling gas supplied to the cooling zone. -10 times. The surface velocity of the functional zone ventilation gas supplied to the functional zone is preferably 1 to 7 times the surface velocity of the cooling gas supplied to the cooling zone, particularly 2 to 5 times. preferable. By setting the surface speed of the functional zone ventilation gas supplied to the functional zone within the above range, the dehumidification amount of the moisture in the air to be treated A increases and the dew point of the dehumidified air B decreases. Further, if the surface speed of the functional zone ventilation gas is too slow, it is difficult to obtain the effect of the present invention that lowers the dew point of the dehumidified air B, and if it is too fast, the dehumidifying agent carried on the rotor is reduced. The running cost increases due to falling off, damage to the rotor due to vibration, or excessive use of the functional zone aeration gas.

  Further, when supplying the functional zone aeration gas to the functional zone 10, the ratio of the area of the functional zone 10 to the area of the opening surface of the dehumidification rotor (area of the functional zone / area of the opening surface of the dehumidification rotor) Is set to 0.003 to 0.07. The ratio of the area of the functional zone 10 to the area of the opening surface of the dehumidifying rotor is preferably 0.005 to 0.05, and particularly preferably 0.008 to 0.03. By setting the ratio of the area of the functional zone within the above range, the dehumidification amount of the water in the air to be treated A increases and the dew point of the dehumidified air B decreases. If the area of the functional zone is too small, it will be difficult to obtain the effect of the present invention to lower the dew point of the dehumidified air B. If it is too large, the area of the other zone will be too small, so the dehumidification efficiency will be low. Lower.

That is, in the dehumidifying method of the first aspect of the present invention, the opening surface of the dehumidification rotor composed of the carrier in which the ventilation cavity is formed in the rotation axis direction and the dehumidifying agent carried on the carrier is divided into the dehumidification zone and the regeneration zone. And dividing the cooling zone, rotating the dehumidification rotor, supplying the air to be treated to the dehumidification zone, supplying the regeneration gas to the regeneration zone, supplying the cooling gas to the cooling zone, and continuously A dehumidifying method for dehumidifying treated air and regenerating a dehumidifying agent,
A functional zone is provided between the regeneration zone and the cooling zone,
Supplying a functional zone aeration gas to the functional zone for cooling the dehumidifying rotor;
The surface speed of the functional zone ventilation gas supplied to the functional zone is 0.5 to 10 times the surface speed of the cooling gas supplied to the cooling zone,
The ratio of the area of the functional zone to the area of the opening surface of the dehumidifying rotor is 0.003 to 0.07.
Dehumidification method.

  The functional zone according to the dehumidifying method of the first aspect of the present invention will be described with reference to FIG. FIG. 4 is a schematic diagram showing the shapes of the dehumidifying zone, the regeneration zone, the functional zone, and the cooling zone formed on the opening surface 4a, and showing the arrangement of the divided members as viewed from the opening surface 4a side. It is. In the dehumidifying method of the first aspect of the present invention, the functional zone is provided between the regeneration zone and the cooling zone, but “the functional zone is provided between the regeneration zone and the cooling zone.” Means that, on the opening surface of the dehumidifying rotor, (i) the regeneration zone 8 and the cooling as in the embodiment shown in (3-1) of FIG. 3 and the embodiment shown in (4-1) of FIG. The functional zone is provided at all between the zones 9, and (ii) a part between the regeneration zone 8 and the cooling zone 9 as in the embodiment shown in (4-2) of FIG. , Refers to both providing the functional zone. In the example shown in (4-2) of FIG. 4, the functional zone 10 is provided between the regeneration zone 8 and the cooling zone 9 (the location indicated by reference numeral 41) and is not provided. There are locations (locations indicated by reference numeral 42). In the example shown in (4-3) of FIG. 4, the functional zone is provided in a part between the regeneration zone 8 and the cooling zone 9. In the embodiment shown in FIG. 4, any embodiment is in contact with the boundary between the regeneration zone 8 and the cooling zone 9 or on the boundary between the regeneration zone 8 and the cooling zone 9. However, as long as the effect of the present invention is not impaired, the functional zone 10 may be provided apart from the boundary between the regeneration zone 8 and the cooling zone 9. That is, the functional zone 10 may be provided in the vicinity of the boundary between the regeneration zone 8 and the cooling zone 9 as long as the effects of the present invention are not impaired. Therefore, in the present invention, “providing the functional zone between the regeneration zone and the cooling zone” means “in the vicinity of the boundary between the regeneration zone and the cooling zone within a range not impairing the effect of the present invention. Are provided with the functional zone.

  The shape of the functional zone 10 is a sector as shown in (3-1) of FIG. 3, a shape where the vicinity of the central angle of the sector as shown in (4-2) of FIG. 4 is omitted, and as shown in (4-3) A rectangular shape, a trapezoidal shape such as (4-4), a circular shape such as (4-5), and the like can be mentioned, and the selection is made in consideration of the dehumidifying efficiency. In the dehumidifying method of the first aspect of the present invention, the functional zone 10 may be provided so as to protrude only to the cooling zone 9 as shown in (4-3) of FIG. It may be provided so as to protrude only to the regeneration zone 8 side as in 4-6), or provided so as to protrude on both sides of the regeneration zone 8 and cooling zone 9 as in (4-7). Also good. Further, the number of the functional zones 10 may be two or more as shown in (4-5) and (4-8) of FIG.

  In addition, in this invention, the area of the opening surface of this dehumidification rotor refers to the area of parts other than this rotor shaft 5 when this dehumidification rotor is seen from an opening surface side, (5-1) of FIG. It is the area of the part 39 shown by the oblique line. Further, the area of the functional zone refers to the area where the functional zone aeration gas is supplied in the opening surface of the dehumidification rotor on the side where the functional zone aeration gas is supplied, and (3-1) in FIG. 5 is the area of the portion 40a indicated by hatching in FIG. 5B, and in the embodiment of FIG. 4C, the portion indicated by hatching in FIG. The area is 40b.

  In the dehumidifying apparatus 20 shown in FIG. 2, the functional zone ventilation gas G is supplied from the opening surface 4a side, but the functional zone ventilation gas supply device is changed and supplied from the opening surface 4b side. May be. Then, it is preferable that the functional zone ventilation gas is supplied to the functional zone from the opening surface side that is the same side as the opening surface to which the regeneration gas is supplied from the viewpoint of increasing the cooling efficiency in the functional zone.

  The functional zone aeration gas according to the dehumidification method of the first aspect of the present invention is a gas having a low water content such as the dehumidified air B, clean gas, dry gas or inert gas dehumidified by the dehumidification zone. Of these, the dehumidified air B is preferable because it is inexpensive. Further, since the clean gas, dry gas, or inert gas has a lower moisture content than the dehumidified air B, the functional zone ventilation gas may be a clean gas, a dry gas, or an inert gas. This is preferable in that the dew point of the dehumidified air B obtained by dehumidification in the dehumidification zone is lowered. In particular, clean gas, dry gas, inert gas, or the like is often used in a semiconductor manufacturing factory or the like, and in this case, it can be used relatively inexpensively. In the present invention, the clean gas is a dust-removed and dehumidified gas used for manufacturing semiconductors.

  The functional zone aeration gas is supplied to cool or dry the dehumidifying agent moving from the regeneration zone, or to both cool and dry before moving to the cooling zone. That is, the functional zone ventilation gas is a cooling gas, a drying gas, or a cooling and drying gas. Further, the humidity of the functional zone ventilation gas may be approximately the same as that of the air to be treated, but the dew point of the functional zone ventilation gas is 10 ° C. or more lower than the dew point of the air to be treated. Is preferable in that it becomes low. The temperature of the functional zone aeration gas includes (i) the temperature of the dehumidifying agent moving from the regeneration zone to the functional zone, and (ii) whether the main purpose is cooling or the main purpose is drying. Or the main purpose of installing the functional zone, which is whether the main purpose is to perform both cooling and drying. Usually, the temperature of the functional zone ventilation gas is set to 0 to 60 ° C, preferably 5 to 30 ° C.

  The functional zone exhaust gas H discharged from the functional zone 10 may be discharged to the outside air after the functional zone ventilation gas is passed through the functional zone 10, but mixed with the regeneration gas E, Use as the regeneration gas E is preferable because of effective utilization of the gas. .

  The regeneration gas E or the cooling gas C is not particularly limited, but is usually the air to be treated A.

  The sizes of the dehumidifying zone 7, the regeneration zone 8 and the cooling zone 9 are as follows: the moisture content of the air to be treated A, the dehumidifying performance of the dehumidifying agent, the regeneration energy, the dew point required for the dehumidifying air B, the dehumidifying It is appropriately selected depending on the rotational speed of the rotor 1 and the like.

  In the dehumidifying method of the first aspect of the present invention, the high-temperature dehumidifying agent moving from the regeneration zone is cooled or dried or both cooled and dried before being cooled in the cooling zone. Alternatively, the regeneration efficiency or both are increased. Therefore, in the dehumidifying method of the first aspect of the present invention, the dehumidifying air B obtained has a dew point because the cooling and drying of the dehumidifying agent further proceeds and the moisture adsorption capacity increases as compared with the case where the functional zone is not provided. Lower.

  On the other hand, in the conventional dehumidification method, in order to increase the cooling efficiency or the regeneration efficiency, the area of the cooling zone or the regeneration zone must be increased. However, when the area of the cooling zone or the regeneration zone is increased, the area of the dehumidifying zone is reduced, and therefore, the dehumidifying efficiency is lowered as a whole.

  In the dehumidifying method of the first aspect of the present invention, the surface speed of the aeration gas is set to be higher than the surface speed of the cooling gas to be supplied to the cooling zone. In addition, the effect of lowering the dew point of the dehumidified air is further enhanced by supplying the functional zone ventilation gas having a high surface speed.

  The dehumidifying apparatus of the first aspect of the present invention is a dehumidifying apparatus for carrying out the dehumidifying method of the first aspect of the present invention, and the form example is the dehumidifying apparatus 20 in FIG.

That is, the dehumidifying device of the first aspect of the present invention is a dehumidifying rotor comprising a carrier having a ventilation cavity formed in the rotation axis direction and a dehumidifying agent carried on the carrier, the opening surface of which is a divided member A dehumidification rotor divided into a dehumidification zone, a regeneration zone, a cooling zone, and a functional zone provided between the regeneration zone and the cooling zone;
The divided member;
Rotating means for rotating the dehumidifying rotor;
First supply means for supplying air to be treated to the dehumidification zone;
Second supply means for supplying regeneration gas to the regeneration zone;
Third supply means for supplying cooling gas to the cooling zone;
A heating means provided in a preceding stage of the regeneration zone for heating the regeneration gas;
Functional zone ventilation gas supply means for supplying functional zone ventilation gas to the functional zone;
Have
The ratio of the area of the functional zone to the area of the opening surface of the dehumidifying rotor is 0.003 to 0.07.
Dehumidifier.

  The dehumidification rotor, dehumidification zone, regeneration zone, function zone, and cooling zone according to the dehumidification device of the first aspect of the present invention are the dehumidification rotor, dehumidification zone, regeneration zone, function according to the dehumidification method of the first aspect of the present invention. The same as the zone and the cooling zone.

  The ratio of the area of the functional zone to the area of the opening surface of the dehumidifying rotor is 0.003 to 0.07, preferably 0.005 to 0.05, and particularly preferably 0.008 to 0.03. It is.

  The dividing member is not particularly limited as long as it can divide the opening surface of the dehumidifying rotor into the dehumidifying zone, the regeneration zone, the functional zone, and the cooling zone. Like the first divided member 6a and the second divided member 6b in FIG. 3, the gap is provided between the opening surface of the dehumidifying rotor and the rotor case so as to radiate from the rotation center of the dehumidifying rotor toward the circumference. The partition plate fixed to the rotor case or the shape of each zone of each embodiment shown in FIG. 4 is provided in the gap between the opening surface of the dehumidifying rotor and the rotor case, and fixed to the rotor case. Partition plates to be used.

  The first supply means, the second supply means, and the third supply means are not particularly limited, and devices generally used for supplying gas can be used, such as an air supply fan, a blower, and a compressor. Is mentioned.

  The installation position of the first supply means, the second supply means, or the third supply means is the front stage of the dehumidifying rotor 1 in the dehumidifying device 20, but the dehumidifying device of the first aspect of the present invention. May be a subsequent stage of the dehumidifying rotor 1. FIG. 6 shows an example of a dehumidifying device in which the installation position of the first supply means, the second supply means, or the third supply means is subsequent to the dehumidification rotor 1. In FIG. 6, in the dehumidifying apparatus 201, the installation positions of the first supply unit 221, the second supply unit 231, and the third supply unit 241 are the subsequent stage of the dehumidification rotor 1. In this case, the first supply means, the second supply means, or the third supply means sucks the air to be treated A, the regeneration gas E, or the cooling gas C by suction from the opposite side of the dehumidifying rotor 1. , A device for supplying the air into the dehumidifying rotor 1, and examples thereof include a suction fan. In FIG. 6, except for the installation positions of the first supply unit 221, the second supply unit 231, and the third supply unit 241, it is the same as the dehumidifying device 20 shown in FIG. The same members are denoted by the same reference numerals.

  The heating means is not particularly limited, and examples thereof include an electric heater, a heat exchanger, and the like, and an apparatus generally used for heating a gas can be appropriately used.

  The functional zone ventilation gas supply means is not particularly limited, and an apparatus generally used for supplying gas can be used, and examples thereof include an air supply fan, a blower, and a compressor.

  In the dehumidifying device according to the first aspect of the present invention, the area of the dehumidifying zone, the regeneration zone, the functional zone, and the cooling zone, the first supply means, the second supply means, and the third supply means And by adjusting the air volume of the functional zone ventilation gas supply means, the surface velocity of the functional zone ventilation gas supplied to the functional zone is set to 0.5 to the surface velocity of the cooling gas supplied to the cooling zone. It can be adjusted 10 times. By this, the dehumidification method of the 1st form of this invention can be implemented using the dehumidification apparatus of the 1st form of this invention.

  In the dehumidifying device of the first aspect of the present invention, the cooling zone exhaust gas D can be used as the regeneration gas E. An example of using the cooling zone exhaust gas D as the regeneration gas E is a dehumidifier 50 shown in FIG. FIG. 7 shows another embodiment of the first dehumidifying device of the present invention. In FIG. 7, the dehumidifying device 50 is not provided with the second feeder 23 in FIG. 2, but instead is a connecting pipe that connects the cooling zone exhaust gas exhaust pipe 32 and the first regeneration gas supply pipe 28. 44 is provided. That is, in the dehumidifying device 50 shown in FIG. 6, the connecting pipe 44 is the second supply means.

  Of the divided members according to the dehumidifying device of the first aspect of the present invention, the divided members that divide the functional zone are the opening on the inlet side of the functional zone ventilation gas and the opening on the outlet side of the functional zone ventilation gas. The opening area of the functional zone ventilation gas decreases from the functional zone ventilation gas inlet side to the outlet side, and the opening surface of the functional zone ventilation gas outlet side is the opening surface of the dehumidifying rotor. May be a member provided so as to oppose (hereinafter, the member is also referred to as a deformed aperture dividing member).

  The deformed opening dividing member will be described with reference to FIGS. FIG. 8 is a schematic diagram showing the irregular shaped aperture dividing member, FIG. 9 is a schematic diagram showing an installation position of the irregular shaped aperture dividing member, and FIG. 10 is a rotor to which the irregular shaped aperture dividing member is fixed. It is sectional drawing of a case. (8-1) of FIG. 8 is a plan view of the odd-shaped aperture dividing member 45, (8-2) is an xx cross-sectional view of (8-1), and (8-3) is ( It is yy sectional drawing of 8-1). As shown in FIG. 8, the modified opening dividing member 45 includes an opening on the inlet side of the functional zone ventilation gas (functional zone ventilation gas inlet side opening) 46 and an opening on the outlet side of the functional zone ventilation gas (functional zone ventilation gas outlet). Side opening) 47, and the opening area decreases from the inlet side toward the outlet side.

  With reference to FIG.9 and FIG.10, the positional relationship of this rotor case 21, this dehumidification rotor 1, this deformed opening division member 45, and the functional zone ventilation gas supply pipe 43 is demonstrated. As shown in FIG. 9, the rotor case 21 is provided with a slit 49 having the same shape as the inlet side opening 46 of the deformed opening dividing member 45, and the slit 49 has a portion of the rotor case 21. From the inside, the deformed opening dividing member 45 is installed. Further, the functional zone ventilation gas supply pipe 43 having a shape in which the pipe end connected to the rotor case 21 can surround the slit 49 is installed outside the rotor case 21. As shown in FIG. 10, the deformed opening dividing member 45 has an opening surface of the outlet side opening 47 between the opening surface 4 a of the dehumidification rotor 1 and the opening surface 4 a of the dehumidification rotor 1. It is installed to face each other. In FIG. 10, descriptions other than the rotor case 21, the dehumidifying rotor 1, the deformed opening division member 45, and the functional zone aeration gas supply pipe 43 are omitted for convenience of explanation.

  When the dehumidifying device according to the first aspect of the present invention has the modified opening dividing member 45, the functional zone ventilation gas passes from the functional zone ventilation gas outlet side opening 47 of the modified opening dividing member to the opening surface 4a of the dehumidification rotor. Therefore, as shown in FIG. 10, the shape of the functional zone 10 is the shape of the functional zone ventilation gas outlet side opening 47. In this case, the functional zone is divided from the opening surface of the dehumidifying rotor by the deformed opening dividing member.

  In the dehumidifying device of the first aspect of the present invention, a branch branched from a gas supply pipe supplied to another zone or a gas exhaust pipe exhausted from another zone and connected to the functional zone ventilation gas supply pipe 33 A tube may be installed. In this case, a member for adjusting the air volume such as a damper is provided at the branch point, and the surface speed of the functional zone ventilation gas is adjusted by adjusting the air volume of the extracted gas. When the branch pipe is installed, the branch pipe is the functional zone aeration gas supply means. Moreover, this branch pipe is the same also about the dehumidification apparatus of the 2nd form of this invention mentioned later and the dehumidification apparatus of the 3rd form of this invention mentioned later.

  The supply direction of the functional zone ventilation gas G to the functional zone is the same as the supply direction of the cooling gas C to the cooling zone, and the functional zone exhaust gas H is mixed with the cooling zone exhaust gas D. In this case, the cooling zone is formed in the rotor case immediately after passing through the dehumidification rotor by not providing a dividing member that divides the functional zone in the opening surface of the dehumidification rotor on the exhaust side of the functional zone exhaust gas. The functional zone exhaust gas H can be mixed with the exhaust gas D. This case will be described with reference to FIG. FIG. 11 is a schematic diagram showing the arrangement of the divided member or the odd-shaped opening divided member when viewed from the opening surface side of the dehumidifying rotor, and (11-1) shows that the cooling gas C and the functional zone ventilation gas G are It is the figure seen from the opening surface 4a side of the dehumidification rotor of the supplied side, (11-2) is the opening surface of the dehumidification rotor of the side from which this cooling zone exhaust gas D and this functional zone exhaust gas H are exhausted It is the figure seen from the 4b side. In FIG. 11, the deformed opening dividing member 45 is installed on the opening surface 4a side of the dehumidification rotor to which the functional zone ventilation gas and the cooling gas are supplied. The cooling zone and the functional zone on the opening surface 4a side are provided. Is divided by the deformed opening dividing member 45, but there is no dividing member that divides the functional zone on the opening surface 4b side of the opposite dehumidifying rotor. Therefore, immediately after passing through the dehumidifying rotor, the functional zone exhaust gas H is mixed with the cooling zone exhaust gas D in the rotor case.

The dehumidifying method according to the second aspect of the present invention includes a dehumidification zone, a regeneration zone, and a cooling zone provided on the opening surface of a dehumidification rotor composed of a carrier having a ventilation cavity formed in the direction of the rotation axis and a dehumidifying agent carried on the carrier. Dividing into zones, supplying the air to be treated to the dehumidification zone while rotating the dehumidification rotor, supplying the regeneration gas to the regeneration zone, and supplying the cooling gas to the cooling zone, and continuously treating A dehumidifying method for dehumidifying air and regenerating a dehumidifying agent,
A functional zone is provided between the cooling zone and the dehumidifying zone,
Supplying a functional zone aeration gas to the functional zone for cooling or drying the dehumidifying rotor;
The surface speed of the functional zone ventilation gas supplied to the functional zone is 0.5 to 10 times the surface speed of the cooling gas supplied to the cooling zone,
The ratio of the area of the functional zone to the area of the opening surface of the dehumidifying rotor is 0.003 to 0.07.
Dehumidification method.

  In the dehumidifying method according to the second aspect of the present invention, as shown in FIG. 12, the opening surfaces 4a and 4b of the dehumidifying rotor are divided by the dividing members 51a and 51b, and the function is provided between the cooling zone 9 and the dehumidifying zone 7. Zone 10 is provided.

  The form example of the dehumidification apparatus for enforcing the dehumidification method of the 2nd form of this invention is shown in FIG. In FIG. 13, a dehumidifying device 60 is a dehumidifying device for carrying out the dehumidifying method of the second aspect of the present invention. The dehumidifying device 60 and the dehumidifying device 20 in FIG. However, the positions of the divided members 51a and 51b and the positions where the functional zone ventilation gas supply pipe 53 and the functional zone exhaust gas exhaust pipe 54 are connected to the rotor case 21 are different. It is the same. Therefore, in FIG. 13, the same code | symbol was attached | subjected to the member similar to this dehumidifier 20. In the dehumidifying device 60, the functional zone ventilation gas G is supplied from the functional zone ventilation gas supply pipe 53 to the functional zone 10 provided between the cooling zone 9 and the dehumidification zone 7, and the functional zone exhaust gas is exhausted. The functional zone exhaust gas H is exhausted from the gas exhaust pipe 54.

  The dehumidifying method of the second aspect of the present invention is performed using the dehumidifying device 60 as follows. First, air to be treated A in a clean room or the like containing moisture is supplied to the dehumidifying zone 7 of the dehumidifying rotor 1 using the first supply device 22. When the air to be treated A comes into contact with the dehumidifying agent when passing through the dehumidifying rotor 1, moisture in the air to be treated A moves to the dehumidifying agent. Is dehumidified. The dehumidified air B from which moisture has been removed is discharged from the dehumidifying zone 7 of the dehumidifying rotor 1 through the dehumidified air exhaust pipe 27 and returned to a clean room or the like.

  Next, the dehumidifying agent that has absorbed moisture in the dehumidifying zone 7 moves to the regeneration zone 8 as the dehumidifying rotor 1 rotates. Then, the regeneration gas E is supplied to the heating device 25 using the second supply device 23, heated by the heating device 25, and then supplied to the regeneration zone 8 of the dehumidifying rotor 1. When the regeneration gas E comes into contact with the dehumidifying agent, the moisture in the dehumidifying agent moves to the regeneration gas E, so that the dehumidifying agent is dehumidified. The regeneration zone exhaust gas F that has absorbed moisture is discharged from the regeneration zone 8 of the dehumidifying rotor 1 through the regeneration zone exhaust gas exhaust pipe 30 to the outside.

  Further, the dehumidifying agent dehumidified in the regeneration zone 8 moves to the cooling zone 9 as the dehumidifying rotor 1 rotates. And in order to cool this dehumidification rotor 1, the cooling gas C is supplied to this cooling zone 9 of this dehumidification rotor 1 using the 3rd supply machine 24. FIG. When the cooling gas C comes into contact with the dehumidified dehumidifying agent, the heat of the dehumidifying agent is transferred to the cooling gas C, so that the dehumidifying agent is cooled. The cooling zone exhaust gas D that has absorbed the heat of the dehumidifying agent is discharged from the cooling zone 9 of the dehumidifying rotor 1 to the outside through the cooling zone exhaust gas exhaust pipe 32.

  Further, the dehumidifying agent cooled in the cooling zone 9 moves to the functional zone 10 as the dehumidifying rotor 1 rotates. Then, the functional zone ventilation gas G is supplied to the functional zone 10 of the dehumidification rotor 1 using a functional zone ventilation gas supply machine (not shown). When the functional zone ventilation gas G comes into contact with the dehumidifying agent, the dehumidifying agent is further cooled or dried. The functional zone exhaust gas H after coming into contact with the dehumidifying agent is discharged from the functional zone 10 of the dehumidifying rotor 1 to the outside through the functional zone exhaust gas exhaust pipe 54.

  Next, the dehumidifying agent cooled or dried in the functional zone 10 moves to the dehumidifying zone 7 as the dehumidifying rotor 1 rotates, and is used again for dehumidifying the air to be treated A.

  Then, the air to be treated A, the regeneration gas E, the cooling gas C, and the functional zone aeration gas G are supplied to the dehumidification rotor 1, and the dehumidification rotor 1 rotates continuously or intermittently. Thus, dehumidification of the air to be treated A is continuously performed.

  At this time, when supplying the functional zone ventilation gas to the functional zone 10, the surface speed of the functional zone ventilation gas supplied to the functional zone is set to 0.5 of the surface speed of the cooling gas supplied to the cooling zone. -10 times. The surface velocity of the functional zone ventilation gas supplied to the functional zone is preferably 1 to 7 times the surface velocity of the cooling gas supplied to the cooling zone, particularly 2 to 5 times. preferable. By setting the surface speed of the functional zone ventilation gas supplied to the functional zone within the above range, the dehumidification amount of the moisture in the air to be treated A increases and the dew point of the dehumidified air B decreases. Further, if the surface speed of the functional zone ventilation gas is too slow, it is difficult to obtain the effect of the present invention that lowers the dew point of the dehumidified air B, and if it is too fast, the dehumidifying agent carried on the rotor is reduced. The running cost increases due to falling off, damage to the rotor due to vibration, or excessive use of the functional zone aeration gas.

  Further, when supplying the functional zone aeration gas to the functional zone 10, the ratio of the area of the functional zone 10 to the area of the opening surface of the dehumidifying rotor is set to 0.003 to 0.07. The ratio of the area of the functional zone 10 to the area of the opening surface of the dehumidifying rotor is preferably 0.005 to 0.05, and particularly preferably 0.008 to 0.03. By setting the ratio of the area of the functional zone within the above range, the dehumidification amount of the water in the air to be treated A increases and the dew point of the dehumidified air B decreases. If the area of the functional zone is too small, it will be difficult to obtain the effect of the present invention to lower the dew point of the dehumidified air B. If it is too large, the area of the other zone will be too small, so the dehumidification efficiency will be low. Lower.

  The functional zone according to the dehumidifying method of the second aspect of the present invention will be described. In the dehumidifying method of the second aspect of the present invention, the functional zone is provided between the cooling zone and the dehumidifying zone, but “the functional zone is provided between the cooling zone and the dehumidifying zone”. Means that the functional zone is provided in all the space between the cooling zone 9 and the dehumidifying zone 7 on the opening surface of the dehumidifying rotor, and that the cooling zone 9 and the dehumidifying zone 7 are provided. It means both of providing the functional zone in a part between the two. This point is the same as the dehumidifying method of the first aspect of the present invention. Further, in the present invention, “the functional zone is provided between the cooling zone and the dehumidifying zone” means “in the vicinity of the boundary between the cooling zone and the dehumidifying zone within a range not impairing the effects of the present invention. Are provided with the functional zone. This point is also the same as the dehumidifying method of the first aspect of the present invention.

  As the shape of the functional zone 10, as in the dehumidifying method of the first aspect of the present invention, a sector shape, a shape lacking the central angle of the sector shape, a rectangle shape, a trapezoid shape, a circular shape, and the like can be cited, taking into consideration dehumidification efficiency. Are appropriately selected. In the dehumidifying method of the second aspect of the present invention, the functional zone 10 may be provided so as to protrude only to the dehumidifying zone 7 side, as in the dehumidifying method of the first aspect of the present invention. Further, it may be provided so as to protrude only on the cooling zone 9 side, or may be provided so as to protrude on both sides of the cooling zone 9 and the dehumidifying zone 7. Further, the number of the functional zones 10 may be two or more as in the dehumidifying method of the first aspect of the present invention.

  In the dehumidifying apparatus 60 shown in FIG. 13, the functional zone ventilation gas G is supplied from the opening surface 4a side. However, the functional zone ventilation gas supply means is changed and supplied from the opening surface 4b side. May be. Then, it is preferable that the functional zone ventilation gas is supplied to the functional zone from the opening surface side that is the same side as the opening surface to which the regeneration gas is supplied from the viewpoint of increasing the cooling efficiency in the functional zone.

  The functional zone aeration gas according to the dehumidifying method of the second aspect of the present invention is a gas having a low water content such as the dehumidified air B, clean gas, dry gas or inert gas dehumidified by the dehumidifying zone. If it is.

  The functional zone aeration gas is supplied for further cooling or drying, or both cooling and drying, before the dehumidifying agent moving from the cooling zone is moved to the dehumidifying zone. . That is, the functional zone ventilation gas is a cooling gas, a drying gas, or a cooling and drying gas. The lower the dew point of the functional zone ventilation gas, the better. However, the dehumidifying agent moving from the cooling zone may be a gas having a low water content so that it can be further cooled or dried. It should just be 10 degreeC or more lower than the dew point of air, and is selected suitably. Further, the temperature of the functional zone aeration gas includes (i) the temperature of the dehumidifying agent moving from the cooling zone to the functional zone, and (ii) whether the main purpose is cooling or drying. Or the main purpose of installing the functional zone, which is whether the main purpose is to perform both cooling and drying. Usually, the temperature of the functional zone aeration gas is set to 0 to 40 ° C, preferably 5 to 30 ° C.

  The functional zone exhaust gas H discharged from the functional zone 10 may be discharged to the outside air after the functional zone ventilation gas is passed through the functional zone 10, but mixed with the regeneration gas E, Use as the regeneration gas E is preferable because it effectively uses the gas.

  The regeneration gas E or the cooling gas C is not particularly limited, but is usually the air to be treated A.

  The sizes of the dehumidifying zone 7, the regeneration zone 8 and the cooling zone 9 are as follows: the moisture content of the air to be treated A, the dehumidifying performance of the dehumidifying agent, the regeneration energy, the dew point required for the dehumidifying air B, the dehumidifying It is appropriately selected depending on the rotational speed of the rotor 1 and the like.

  In the dehumidifying method according to the second aspect of the present invention, the dehumidifying agent moving from the cooling zone is further cooled or dried in the functional zone before dehumidifying in the dehumidifying zone. An agent can be provided to the dehumidifying zone agent. Therefore, the dehumidifying method of the second aspect of the present invention can increase the dehumidifying efficiency in the dehumidifying zone as compared with the case where the functional zone is not provided, and thus the dew point of the obtained dehumidified air B is lowered.

  On the other hand, in the conventional dehumidification method, in order to increase the dehumidification efficiency in the dehumidification zone, the area of the dehumidification zone must be increased. However, when the area of the dehumidifying zone is increased, the area of the regeneration zone or the cooling zone is reduced, so that the dehumidifying efficiency is lowered as a whole.

  In the dehumidifying method of the second aspect of the present invention, the surface speed of the aeration gas is set to be higher than the surface speed of the cooling gas supplied to the cooling zone in the functional zone supplied to the functional zone. In addition, the effect of lowering the dew point of the dehumidified air is further enhanced by supplying the functional zone ventilation gas having a high surface speed.

  The dehumidifying device of the second aspect of the present invention is a dehumidifying device for carrying out the dehumidifying method of the first aspect of the present invention, and the form example is the dehumidifying device 60 in FIG.

That is, the dehumidifying device of the second aspect of the present invention is a dehumidifying rotor comprising a carrier having a ventilation cavity formed in the direction of the rotation axis and a dehumidifying agent carried on the carrier, the opening surface of which is a divided member A dehumidification rotor divided into a dehumidification zone, a regeneration zone, a cooling zone, and a functional zone formed between the cooling zone and the dehumidification zone,
The divided member;
Rotating means for rotating the dehumidifying rotor;
First supply means for supplying air to be treated to the dehumidification zone;
Second supply means for supplying regeneration gas to the regeneration zone;
Third supply means for supplying cooling gas to the cooling zone;
A heating means provided in a preceding stage of the regeneration zone for heating the regeneration gas;
Functional zone ventilation gas supply means for supplying functional zone ventilation gas to the functional zone;
Have
The ratio of the area of the functional zone to the area of the opening surface of the dehumidification rotor is 0.003 to 0.07.
Dehumidifier.

  The dehumidification rotor, dehumidification zone, regeneration zone, function zone and cooling zone according to the dehumidification device of the second aspect of the present invention are the dehumidification rotor, dehumidification zone, regeneration zone and function according to the dehumidification method of the second aspect of the present invention. The same as the zone and the cooling zone.

  The ratio of the area of the functional zone to the area of the opening surface of the dehumidifying rotor is 0.003 to 0.07, preferably 0.005 to 0.05, and particularly preferably 0.008 to 0.03. It is.

  The dividing member is not particularly limited as long as the opening surface of the dehumidifying rotor can be divided into the dehumidifying zone, the regeneration zone, the functional zone, and the cooling zone, and the opening of the dehumidifying rotor is not limited. A partition plate that is provided radially from the rotation center of the dehumidifying rotor to the circumference in the gap between the surface and the rotor case, and fixed to the rotor case, or in the shape of each zone of each embodiment shown in FIG. Examples of the partition plate are molded and provided in a gap between the opening surface of the dehumidifying rotor and the rotor case, and are fixed to the rotor case.

  The first supply means, the second supply means, the third supply means, the functional zone aeration gas supply means, and the heating means according to the dehumidifier of the second aspect of the present invention relate to the dehumidifier of the first aspect of the present invention. The same as the first supply means, the second supply means, the third supply means, the functional zone aeration gas supply means and the heating means.

  In the dehumidifying device of the second aspect of the present invention, the area of the dehumidifying zone, the regeneration zone, the functional zone, and the cooling zone, the first supply means, the second supply means, and the third supply means And by adjusting the air volume of the functional zone ventilation gas supply means, the surface velocity of the functional zone ventilation gas supplied to the functional zone is set to 0.5 to the surface velocity of the cooling gas supplied to the cooling zone. It can be adjusted 10 times. By this, the dehumidification method of the 2nd form of this invention can be implemented using the dehumidification apparatus of the 2nd form of this invention.

  Further, in the dehumidifying device of the second aspect of the present invention, the cooling zone exhaust gas D can be used as the regeneration gas E, similarly to the dehumidifying device of the first aspect of the present invention. As an example of such a configuration, in FIG. 13, the second supply unit 23 is not installed, but instead, a connecting pipe that connects the cooling zone exhaust gas exhaust pipe 32 and the first regeneration gas supply pipe 28 is provided. The dehumidification apparatus currently used is mentioned. In the case of this embodiment, the connecting pipe is the second supply means.

  Moreover, among the divided members according to the dehumidifying device of the second aspect of the present invention, the divided member that divides the functional zone is an odd-shaped opening divided member as in the dehumidifying device of the first aspect of the present invention. Also good. The deformed opening dividing member according to the dehumidifying device of the second aspect of the present invention is the same as the deformed opening dividing member according to the dehumidifying device of the first aspect of the present invention.

  When the dehumidifying device of the second form of the present invention has the modified opening dividing member, the functional zone ventilation gas outlet side opening of the deformed opening dividing member, as in the dehumidifying device of the first form of the present invention, Since the functional zone ventilation gas is supplied to the opening surface of the dehumidifying rotor, the shape of the functional zone is the shape of the functional zone ventilation gas outlet side opening of the deformed opening dividing member. In this case, the functional zone is divided from the opening surface of the dehumidifying rotor by the deformed opening dividing member.

  The supply direction of the functional zone ventilation gas G to the functional zone is the same as the supply direction of the cooling gas C to the cooling zone, and the functional zone exhaust gas H is mixed with the cooling zone exhaust gas D. In this case, the cooling zone exhaust gas D immediately after passing through the dehumidification rotor is not provided on the opening surface of the dehumidification rotor on the side from which the functional zone exhaust gas is exhausted, so that the division zone is divided. The functional zone exhaust gas H can be mixed. This case will be described with reference to FIG. 14. The deformed opening dividing member 45 is installed on the opening surface 4a side of the dehumidification rotor to which the functional zone ventilation gas and the cooling gas are supplied. Although the cooling zone and the functional zone on the side of the opening surface 4a are divided, there is no division member that divides the functional zone on the side of the opening surface 4b of the dehumidifying rotor on the opposite side. Therefore, immediately after passing through the dehumidifying rotor, the functional zone exhaust gas H is mixed with the cooling zone exhaust gas D in the rotor case.

The dehumidifying method according to the third aspect of the present invention includes a dehumidification zone, a regeneration zone, and a cooling zone provided on the opening surface of a dehumidification rotor composed of a carrier having a ventilation cavity formed in the direction of the rotation axis and a dehumidifying agent carried on the carrier. Dividing into zones, supplying the air to be treated to the dehumidification zone while rotating the dehumidification rotor, supplying the regeneration gas to the regeneration zone, and supplying the cooling gas to the cooling zone, and continuously treating A dehumidifying method for dehumidifying air and regenerating a dehumidifying agent,
A functional zone is provided between the dehumidification zone and the regeneration zone,
Supplying a functional zone aeration gas for heating the dehumidification rotor to the functional zone;
The surface speed of the functional zone ventilation gas supplied to the functional zone is 0.5 to 10 times the surface speed of the regeneration gas supplied to the regeneration zone;
The ratio of the area of the functional zone to the area of the opening surface of the dehumidifying rotor is 0.003 to 0.07.
Dehumidification method.

  In the dehumidifying method of the third aspect of the present invention, as shown in FIG. 15, the opening surfaces 4 a and 4 b of the dehumidifying rotor are divided by the dividing members 61 a and 61 b, and the function is provided between the dehumidifying zone 7 and the regeneration zone 8. Zone 10 is provided.

  An example of a dehumidifying apparatus for carrying out the dehumidifying method of the third aspect of the present invention is shown in FIG. In FIG. 16, a dehumidifying device 65 is a dehumidifying device for carrying out the dehumidifying method of the third aspect of the present invention. The dehumidifying device 65 and the dehumidifying device 20 in FIG. However, the arrangement of the dividing members 61a and 61b, and the position where the functional zone ventilation gas supply pipe 62 and the functional zone exhaust gas exhaust pipe 63 are connected to the rotor case 21 are different, but the other is the same. It is. Therefore, in FIG. 16, the same code | symbol was attached | subjected to the member similar to this dehumidifier 20. In the dehumidifier 65, the functional zone ventilation gas G is supplied from the functional zone ventilation gas supply pipe 62 to the functional zone 10 provided between the dehumidification zone 7 and the regeneration zone 8, and the functional zone exhaust gas is exhausted. The functional zone exhaust gas H is exhausted from the gas exhaust pipe 63.

  The dehumidifying method of the third aspect of the present invention is performed as follows using the dehumidifying device 65. First, the air to be treated A in a clean room or the like containing moisture is supplied to the dehumidifying zone 7 of the dehumidifying rotor 1 using the first supply device 22. When the air to be treated A comes into contact with the dehumidifying agent when passing through the dehumidifying rotor 1, moisture in the air to be treated A moves to the dehumidifying agent. Is dehumidified. The dehumidified air B from which moisture has been removed is discharged from the dehumidifying zone 7 of the dehumidifying rotor 1 through the dehumidified air exhaust pipe 27 and returned to a clean room or the like.

  Next, the dehumidifying agent that has absorbed moisture in the dehumidifying zone 7 moves to the functional zone 10 as the dehumidifying rotor 1 rotates. Then, the functional zone ventilation gas G is supplied to a heating device (second heating means) (not shown) using a functional zone ventilation gas supply machine (not shown), and heated by the heating device, and then the dehumidification rotor 1 It is supplied to the function zone 10. When the functional zone ventilation gas G comes into contact with the dehumidifying agent, the dehumidifying agent is heated and the moisture in the dehumidifying agent moves to the functional zone aeration gas G. Heated and dehumidified. The functional zone exhaust gas H that has absorbed moisture is discharged from the functional zone 10 of the dehumidifying rotor 1 to the outside through the functional zone exhaust gas exhaust pipe 63.

  Further, the dehumidifying agent heated and dehumidified in the functional zone 10 moves to the regeneration zone 8 as the dehumidifying rotor 1 rotates. Then, the regeneration gas E is supplied to the heating device 25 using the second supply device 23, heated by the heating device 25, and then supplied to the regeneration zone 8 of the dehumidifying rotor 1. When the regeneration gas E comes into contact with the dehumidifying agent, the moisture in the dehumidifying agent moves to the regeneration gas E, so that the dehumidifying agent is further dehumidified. The regeneration zone exhaust gas F that has absorbed moisture is discharged from the regeneration zone 8 of the dehumidifying rotor 1 through the regeneration zone exhaust gas exhaust pipe 30 to the outside.

  Further, the dehumidifying agent dehumidified in the regeneration zone 8 moves to the cooling zone 9 as the dehumidifying rotor 1 rotates. Then, the cooling gas C is supplied to the cooling zone 9 of the dehumidifying rotor 1 using the third supply device 24. The dehumidifying agent is cooled by the cooling gas C coming into contact with the dehumidifying agent. The cooling zone exhaust gas D that has absorbed the heat of the dehumidifying agent is discharged from the cooling zone 9 of the dehumidifying rotor 1 to the outside through the cooling zone exhaust gas exhaust pipe 32.

  Next, the dehumidifying agent cooled in the cooling zone 9 moves to the dehumidifying zone 7 as the dehumidifying rotor 1 rotates, and is used again for dehumidifying the air to be treated A.

  Then, the air to be treated A, the regeneration gas E, the cooling gas C, and the functional zone aeration gas G are supplied to the dehumidification rotor 1, and the dehumidification rotor 1 rotates continuously or intermittently. Thus, dehumidification of the air to be treated A is continuously performed.

  At this time, when supplying the functional zone aeration gas to the functional zone 10, the surface speed of the functional zone aeration gas supplied to the functional zone is set to 0.5 of the surface speed of the regeneration gas supplied to the regeneration zone. -10 times. The surface speed of the functional zone ventilation gas supplied to the functional zone is preferably 1 to 7 times, particularly 2 to 5 times the surface speed of the regeneration gas supplied to the regeneration zone. preferable. By setting the surface speed of the functional zone ventilation gas supplied to the functional zone within the above range, the dehumidification amount of the moisture in the air to be treated A increases and the dew point of the dehumidified air B decreases. Further, if the surface speed of the functional zone ventilation gas is too slow, it is difficult to obtain the effect of the present invention that lowers the dew point of the dehumidified air B, and if it is too fast, the dehumidifying agent carried on the rotor is reduced. The running cost increases due to falling off, damage to the rotor due to vibration, or excessive use of the functional zone aeration gas.

  Further, when supplying the functional zone aeration gas to the functional zone 10, the ratio of the area of the functional zone 10 to the area of the opening surface of the dehumidifying rotor is set to 0.003 to 0.07. The ratio of the area of the functional zone 10 to the area of the opening surface of the dehumidifying rotor is preferably 0.005 to 0.05, and particularly preferably 0.008 to 0.03. By setting the ratio of the area of the functional zone within the above range, the dehumidification amount of the water in the air to be treated A increases and the dew point of the dehumidified air B decreases. If the area of the functional zone is too small, it will be difficult to obtain the effect of the present invention to lower the dew point of the dehumidified air B. If it is too large, the area of the other zone will be too small, so the dehumidification efficiency will be low. Lower.

  The functional zone according to the dehumidifying method of the third aspect of the present invention will be described. In the dehumidifying method of the third aspect of the present invention, the functional zone is provided between the dehumidifying zone and the regeneration zone, but “the functional zone is provided between the dehumidifying zone and the regeneration zone”. Means that, on the opening surface of the dehumidification rotor, as shown in FIG. 15, the functional zone is provided between the dehumidification zone 7 and the regeneration zone 8, and the dehumidification zone 7 and the regeneration zone 8 It means both of providing the functional zone in a part between the two. This point is the same as the dehumidifying method of the first aspect of the present invention. In the present invention, “providing the functional zone between the dehumidification zone and the regeneration zone” means that “in the vicinity of the boundary between the dehumidification zone and the regeneration zone within a range not impairing the effects of the present invention. Are provided with the functional zone. This point is also the same as the dehumidifying method of the first aspect of the present invention.

  As the shape of the functional zone 10, as in the dehumidifying method of the first aspect of the present invention, a sector shape, a shape lacking the central angle of the sector shape, a rectangle shape, a trapezoid shape, a circular shape, and the like can be cited, taking into consideration dehumidification efficiency. Are appropriately selected. Further, in the dehumidifying method of the third aspect of the present invention, the functional zone 10 may be provided so as to protrude only to the regeneration zone 8 side as in the dehumidifying method of the first aspect of the present invention. In addition, it may be provided so as to protrude only on the dehumidifying zone 7 side, or may be provided so as to protrude on both sides of the dehumidifying zone 7 and the regeneration zone 8. Further, the number of the functional zones 10 may be two or more as in the dehumidifying method of the first aspect of the present invention.

  In the dehumidifying device 65 shown in FIG. 16, the functional zone ventilation gas G is supplied from the opening surface 4a side, but the functional zone ventilation gas supply means is changed and supplied from the opening surface 4b side. May be. Then, supplying the functional zone aeration gas to the functional zone from the opening surface opposite to the opening surface to which the regeneration gas is supplied is a dehumidifying agent that is difficult to be heated by the regeneration gas (that is, the regeneration gas). The dehumidifying agent in the vicinity of the opening surface on the side opposite to the opening surface to which is supplied can be efficiently heated, which is preferable in that the regeneration efficiency in the high-function zone is increased.

  As the functional zone ventilation gas according to the dehumidification method of the third aspect of the present invention, the dehumidified air B dehumidified by the dehumidification zone, a gas having a low water content such as a clean gas, a dry gas or an inert gas In addition, the air to be treated A can be used.

  The functional zone aeration gas is supplied to preheat the dehumidifying agent moving from the dehumidifying zone before moving it to the regeneration zone. That is, the functional zone ventilation gas is a heating gas. Further, when the functional zone ventilation gas passes through the functional zone, a part of the moisture of the dehumidifying agent is dehumidified. The humidity of the functional zone ventilation gas may be approximately the same as the humidity of the air to be treated, and the dew point of the functional zone ventilation gas may be equal to or lower than the dew point of the air to be treated. It is preferable that the dew point of the dehumidified air B obtained is 10 ° C. or more lower than the dew point. Further, the temperature of the functional zone ventilation gas may be a temperature at which the dehumidifying agent moving from the dehumidifying zone can be heated in advance, and the type of the dehumidifying agent and the regenerating gas supplied to the regenerating zone. The temperature and operating conditions are selected as appropriate.

  The regeneration gas E or the cooling gas C is not particularly limited, but is usually the air to be treated A.

  The sizes of the dehumidifying zone 7, the regeneration zone 8 and the cooling zone 9 are as follows: the moisture content of the air to be treated A, the dehumidifying performance of the dehumidifying agent, the regeneration energy, the dew point required for the dehumidifying air B, the dehumidifying It is appropriately selected depending on the rotational speed of the rotor 1 and the like.

  In the dehumidifying method of the third aspect of the present invention, the dehumidifying agent moving from the dehumidifying zone is preheated before being heated and dehumidified in the regeneration zone, and a part of the moisture of the dehumidifying agent is removed. Since dehumidification is performed, the regeneration efficiency of the regeneration zone is increased. Therefore, the dehumidification method of the third aspect of the present invention can increase the regeneration efficiency in the regeneration zone as compared with the case where the functional zone is not provided, and thus the dew point of the obtained dehumidified air B is lowered.

  On the other hand, in the conventional dehumidification method, in order to increase the regeneration efficiency in the regeneration zone, the area of the regeneration zone must be increased. However, when the area of the regeneration zone is increased, the area of the dehumidifying zone or the cooling zone is decreased, and therefore, the dehumidifying efficiency is lowered as a whole.

  Further, in the dehumidifying method of the third aspect of the present invention, the surface speed of the aeration gas is made higher in the functional zone supplied to the functional zone than the surface speed of the regeneration gas supplied to the regeneration zone, In addition, the effect of lowering the dew point of the dehumidified air is further enhanced by supplying the functional zone ventilation gas having a high surface speed.

  The dehumidifying apparatus of the third aspect of the present invention is a dehumidifying apparatus for carrying out the dehumidifying method of the third aspect of the present invention, and the form example is the dehumidifying apparatus 65 in FIG.

That is, the dehumidifying device of the third aspect of the present invention is a dehumidifying rotor comprising a carrier having a ventilation cavity formed in the direction of the rotation axis and a dehumidifying agent carried on the carrier, the opening surface of which is a divided member A dehumidification rotor divided into a dehumidification zone, a regeneration zone, a cooling zone, and a functional zone formed between the dehumidification zone and the regeneration zone;
The divided member;
Rotating means for rotating the dehumidifying rotor;
First supply means for supplying air to be treated to the dehumidification zone;
Second supply means for supplying regeneration gas to the regeneration zone;
Third supply means for supplying cooling gas to the cooling zone;
A heating means provided in a preceding stage of the regeneration zone for heating the regeneration gas;
Functional zone ventilation gas supply means for supplying functional zone ventilation gas to the functional zone;
A second heating means for heating the functional zone aeration gas;
Have
The ratio of the area of the functional zone to the area of the opening surface of the dehumidification rotor is 0.003 to 0.07.
Dehumidifier.

  The dehumidification rotor, dehumidification zone, regeneration zone, function zone and cooling zone according to the dehumidification device of the third aspect of the present invention are the dehumidification rotor, dehumidification zone, regeneration zone and function according to the dehumidification method of the third aspect of the present invention. The same as the zone and the cooling zone.

  The ratio of the area of the functional zone to the area of the opening surface of the dehumidifying rotor is 0.003 to 0.07, preferably 0.005 to 0.05, and particularly preferably 0.008 to 0.03. It is.

  The dividing member is not particularly limited as long as the opening surface of the dehumidifying rotor can be divided into the dehumidifying zone, the regeneration zone, the functional zone, and the cooling zone, and the opening of the dehumidifying rotor is not limited. A partition plate that is provided radially from the rotation center of the dehumidifying rotor to the circumference in the gap between the surface and the rotor case, and fixed to the rotor case, or in the shape of each zone of each embodiment shown in FIG. Examples of the partition plate are molded and provided in a gap between the opening surface of the dehumidifying rotor and the rotor case, and are fixed to the rotor case.

  The first supply means, the second supply means, the third supply means, the functional zone aeration gas supply means, and the heating means according to the dehumidifier of the third aspect of the present invention relate to the dehumidifier of the first aspect of the present invention. The same as the first supply means, the second supply means, the third supply means, the functional zone aeration gas supply means and the heating means. Moreover, the 2nd heating means which concerns on the dehumidification apparatus of the 3rd form of this invention is the same as the heating means which concerns on the dehumidification apparatus of the 3rd form of this invention.

  In the dehumidifying device of the third aspect of the present invention, the areas of the dehumidifying zone, the regeneration zone, the functional zone and the cooling zone, the first supply means, the second supply means, and the third supply means And by adjusting the air volume of the functional zone ventilation gas supply means, the surface velocity of the functional zone ventilation gas supplied to the functional zone is set to 0.5 to the surface velocity of the regeneration gas supplied to the regeneration zone. It can be 10 times. By this, the dehumidification method of the 3rd form of this invention can be implemented using the dehumidification apparatus of the 3rd form of this invention.

  In the dehumidifying device of the third aspect of the present invention, the cooling zone exhaust gas D can be used as the regeneration gas E as in the dehumidifying device of the first aspect of the present invention. As an example of such a configuration, in FIG. 16, the second supply unit 23 is not installed, but instead, a connecting pipe connecting the cooling zone exhaust gas exhaust pipe 32 and the first regeneration gas supply pipe 28 is provided. The dehumidification apparatus currently used is mentioned. In the case of this embodiment, the connecting pipe is the second supply means.

  In addition, among the divided members according to the dehumidifying device of the third aspect of the present invention, the divided member that divides the functional zone is an odd-shaped opening divided member similar to the dehumidifying device of the first aspect of the present invention. Also good. The deformed opening dividing member according to the dehumidifying apparatus of the third aspect of the present invention is the same as the deformed opening dividing member according to the dehumidifying apparatus of the first aspect of the present invention.

  When the dehumidifying device of the third aspect of the present invention has the deformed opening dividing member, the functional zone ventilation gas outlet side opening of the deformed opening dividing member, like the dehumidifying device of the first aspect of the present invention, Since the functional zone ventilation gas is supplied to the opening surface of the dehumidifying rotor, the shape of the functional zone is the shape of the functional zone ventilation gas outlet side opening of the deformed opening dividing member. In this case, the functional zone is divided from the opening surface of the dehumidifying rotor by the deformed opening dividing member.

  The supply direction of the functional zone ventilation gas G to the functional zone is the same as the supply direction of the regeneration gas E to the regeneration zone, and the functional zone exhaust gas H is mixed with the regeneration zone exhaust gas F. In this case, the regeneration zone exhaust gas F immediately after passing through the dehumidification rotor is not provided on the opening surface of the dehumidification rotor on the side from which the functional zone exhaust gas H is exhausted, so that the dividing member is divided. The functional zone exhaust gas H can be mixed with the gas. This case will be described with reference to FIG. 17. Since the deformed opening dividing member 45 is installed on the opening surface 4b side of the dehumidification rotor to which the functional zone ventilation gas and the regeneration gas are supplied, The regeneration zone and the functional zone on the side of the opening surface 4b are divided, but there is no division member that divides the functional zone on the side of the opening surface 4a of the dehumidifying rotor on the opposite side. Therefore, the functional zone exhaust gas H is mixed with the regeneration zone exhaust gas F in the rotor case immediately after passing through the dehumidifying rotor.

Dehumidification method of the first aspect of the present invention, dehumidification apparatus of the first aspect of the present invention, dehumidification method of the second aspect of the present invention, dehumidification apparatus of the second aspect of the present invention, third of the present invention In the dehumidifying method of the embodiment and the dehumidifying device of the third embodiment of the present invention, the structure of the dehumidifying rotor 1 is not particularly limited as long as it has a structure in which a ventilation cavity is formed in the rotation axis direction. A honeycomb structure. The corrugated honeycomb structure is obtained by using a flat fiber base paper and a corrugated fiber base paper obtained by corrugating the flat fiber base paper using an inorganic adhesive or an organic adhesive. It is manufactured by bonding and stacking at the peak of the base paper. At this time, in the flat fiber base paper and the corrugated fiber base paper, a substantially semi-cylindrical cavity formed between them serves as an air flow path. They are stacked so as to be formed in the direction of the rotation axis. Further, the material of the carrier of the dehumidifying rotor 1 is not particularly limited as long as it is usually a material used for a dehumidifying device. In addition, the dehumidifying agent supported on the dehumidifying rotor 1 is not particularly limited as long as it is a dehumidifying agent used in a dehumidifying device, and includes, for example, synthetic zeolite, of which high hygroscopicity, Those having a low SiO ₂ / Al ₂ O ₃ ratio are preferred, and X-type zeolite and Y-type zeolite are particularly preferred.

  EXAMPLES Next, although an Example is given and this invention is demonstrated more concretely, this is only an illustration and does not restrict | limit this invention.

(Example 1)
1. Dehumidifier (dehumidification rotor)
A honeycomb structure carrier made of silica alumina fiber paper (thickness 0.2 mm, porosity 90%) and having cells having a width of 3.0 mm and a height of 1.6 mm (manufactured by NICHIAS Corporation, trade name: hanicle) The outer diameter of the opening surface (reference numeral 67 in FIG. 18) is 2000 mm, the diameter of the rotating shaft mounting portion (reference numeral 66 in FIG. 18) is 270 mm, and is cut into a cylindrical shape so as to have a thickness of 200 mm. .
Next, synthetic zeolite (Y-type zeolite, SiO ₂ / Al ₂ O ₃ = 5.4 (molar ratio)) is supported on the carrier as a dehumidifying agent at a loading amount of 140 kg / m ³ to produce a dehumidifying rotor. did.

(Device configuration)
In the dehumidifying apparatus 50 shown in FIG. 7, a dehumidifying apparatus having the following detailed configuration was produced.
(I) A functional zone is provided in a part between the regeneration zone and the cooling zone on the opening surface 4a side of the dehumidifying rotor.
(Ii) Functional zone The dividing member that divides the functional zone on the opening surface to which the ventilation gas is supplied is a rectangle whose horizontal (reference numeral 68 in FIG. 18) is 35 mm and whose vertical (reference numeral 69 in FIG. 18) is 850 mm. The depth (that is, the length in the front and back direction of the paper surface in FIG. 18) is 30 mm.
(Iii) The arrangement of the dividing members 6a and 6b is as shown in FIG. The area ratio of each zone is functional zone: dehumidification zone: regeneration zone: cooling zone = 1: 14.4: 14.4: 85.4.
(Iv) The cooling zone exhaust gas exhaust pipe 32 and the first regeneration gas supply pipe 28 are connected by a connecting pipe.
In the dehumidifying apparatus, the functional zone ventilation gas is supplied from the opening surface 4a side of the dehumidifying rotor, and there is no dividing member that partitions the functional zone and the cooling zone on the opening surface 4b side of the dehumidifying rotor. The gas H is mixed with the cooling zone exhaust gas D in the rotor case after passing through the opening surface 4b of the dehumidifying rotor.

2. Dehumidification test Using the above dehumidifying device, the air to be treated A, the cooling gas C, and the functional zone aeration gas H are continuously supplied under the supply conditions shown in Table 1 while rotating the dehumidification rotor at a rotation speed of 10 rotations / hour. Then, the dehumidifying rotor was supplied to perform dehumidifying operation. A flow chart at this time is shown in FIG. As a result, dehumidified air B had a dew point of −10 ° C. and a temperature of 30 ° C.
-Processed air A: Air in a clean room to be treated (temperature 25 ° C, dew point 14 ° C)
Cooling gas C: Clean room air to be treated (temperature 25 ° C, dew point 14 ° C)
・ Function zone ventilation gas G: Clean gas (25 ℃)
Regeneration gas at the regeneration zone inlet side: a mixed gas of the cooling zone exhaust gas D that has passed through the cooling zone and the functional zone exhaust gas H that has passed through the functional zone, and is the heating gas that has passed through the heating means.

(Example 2)
1. Dehumidifier (dehumidification rotor)
The same dehumidification rotor as Example 1 was produced.

(Device configuration)
In the dehumidifying apparatus 50 shown in FIG. 7, a dehumidifying apparatus having the following detailed configuration was produced.
(I) A functional zone is provided in a part between the cooling zone and the dehumidifying zone.
(Ii) The division member that divides the functional zone on the opening surface on the side to which the functional zone ventilation gas is supplied and the opening surface on the side on which the functional zone ventilation gas is exhausted is a rectangle having a width of 35 mm and a length of 850 mm. The depth is 30 mm.
(Iii) The arrangement of the dividing members 6a and 6b is as shown in FIG. The area ratio of each zone is functional zone: dehumidification zone: regeneration zone: cooling zone = 1: 14.4: 14.4: 85.4.
(Iv) The cooling zone exhaust gas exhaust pipe 32 and the first regeneration gas supply pipe 28 are connected by a connecting pipe.
(V) In order to supply the dehumidified air B to the functional zone, the functional zone on the opening surface 4b side of the dehumidifying rotor (that is, the rotor case on the opening surface 4b side of the dehumidifying rotor) and the dehumidified air exhaust pipe 27 were connected.
(Vi) In order to mix the functional zone exhaust gas H with the cooling gas C, the functional zone on the opening surface 4a side of the dehumidification rotor (that is, the rotor case on the opening surface 4a side of the dehumidification rotor) and the cooling gas supply pipe 31 Connected.
In the dehumidifying device, the functional zone ventilation gas is supplied from the opening surface 4b side of the dehumidifying rotor.

2. Dehumidification test Using the above dehumidifying device, the air to be treated A, the cooling gas C, and the functional zone aeration gas H are continuously supplied under the supply conditions shown in Table 1 while rotating the dehumidification rotor at a rotation speed of 10 rotations / hour. Then, the dehumidifying rotor was supplied to perform dehumidifying operation. A flow chart at this time is shown in FIG. As a result, dehumidified air B had a dew point of −7 ° C. and a temperature of 32 ° C.
-Processed air A: Air in a clean room to be treated (temperature 25 ° C, dew point 14 ° C)
-Cooling gas C: Mixed air of clean zone air to be treated (temperature 25 ° C, dew point 14 ° C) and functional zone exhaust gas H that has passed through the functional zone-Functional zone ventilation gas G: Dehumidified air after passing through the dehumidifying zone B (Temperature 32 ° C, dew point -7 ° C)
Regeneration gas at the regeneration zone inlet side: the cooling zone exhaust gas D that has passed through the cooling zone, and the heating gas that has passed through the heating means.

(Example 3)
1. Dehumidifier (dehumidification rotor)
The same dehumidification rotor as Example 1 was produced.

(Device configuration)
In the dehumidifying apparatus 50 shown in FIG. 7, a dehumidifying apparatus having the following detailed configuration was produced.
(I) A functional zone is provided in a part between the dehumidifying zone and the regeneration zone.
(Ii) The division member that divides the functional zone on the opening surface on the side to which the functional zone ventilation gas is supplied and the opening surface on the side on which the functional zone ventilation gas is exhausted is a rectangle having a width of 35 mm and a length of 850 mm. The depth is 30 mm.
(Iii) The arrangement of the dividing members 6a and 6b is as shown in FIG. The area ratio of each zone is functional zone: dehumidification zone: regeneration zone: cooling zone = 1: 14.4: 14.4: 85.4.
(Iv) The cooling zone exhaust gas exhaust pipe 32 and the first regeneration gas supply pipe 28 are connected by a connecting pipe.
(V) In order to heat the functional zone ventilation gas, a second heating means was provided in the middle of the functional zone ventilation gas supply pipe.
(Vi) In order to mix the functional zone exhaust gas H with the regeneration gas E, the functional zone on the opening surface 4b side of the dehumidification rotor (that is, the rotor case on the opening surface 4b side of the dehumidification rotor) and the cooling zone exhaust gas exhaust pipe 32 connected.
In the dehumidifying device, the functional zone ventilation gas is supplied from the opening surface 4a side of the dehumidifying rotor.

2. Dehumidification test Using the above dehumidifying device, the air to be treated A, the cooling gas C, and the functional zone aeration gas H are continuously supplied under the supply conditions shown in Table 1 while rotating the dehumidification rotor at a rotation speed of 10 rotations / hour. Then, the dehumidifying rotor was supplied to perform dehumidifying operation. A flow chart at this time is shown in FIG. As a result, dehumidified air B had a dew point of −13 ° C. and a temperature of 37 ° C.
-Processed air A: Air in a clean room to be treated (temperature 25 ° C, dew point 14 ° C)
Cooling gas C: Clean room air to be treated (temperature 25 ° C, dew point 14 ° C)
-Functional zone ventilation gas G: Nitrogen gas (temperature 140 ° C)
Regeneration gas at the regeneration zone inlet side: the cooling zone exhaust gas D and the functional zone exhaust gas H that have passed through the cooling zone, and the heating gas after having passed through the heating means.

(Comparative Example 1)
1. Dehumidifier (dehumidification rotor)
The same dehumidification rotor as Example 1 was produced.

(Device configuration)
In the dehumidifying apparatus 50 shown in FIG. 7, a dehumidifying apparatus having the following detailed configuration was produced.
(I) No functional zone is provided.
(Ii) The functional zone ventilation gas supply pipe, the dividing member that divides the functional zone, and the functional zone exhaust gas exhaust pipe are not provided.
(Iii) The arrangement of the dividing members 6a and 6b is as shown in FIG. The area ratio of each zone is dehumidification zone: regeneration zone: cooling zone = 6: 1: 1.
(Iv) The cooling zone exhaust gas exhaust pipe 32 and the first regeneration gas supply pipe 28 are connected by a connecting pipe.

2. Dehumidification test Using the above dehumidifying device, the air to be treated A and the cooling gas C were continuously supplied to the dehumidifying rotor under the supply conditions shown in Table 1 while rotating the dehumidifying rotor at a rotation speed of 10 rotations / hour. The dehumidifying operation was performed. A flow chart at this time is shown in FIG. As a result, dehumidified air B had a dew point of −4 ° C. and a temperature of 35 ° C.
-Processed air A: Air in a clean room to be treated (temperature 25 ° C, dew point 14 ° C)
Cooling gas C: Clean room air to be treated (temperature 25 ° C, dew point 14 ° C)
Regeneration gas at the regeneration zone inlet side: the cooling zone exhaust gas D that has passed through the cooling zone, and the heating gas that has passed through the heating means.

１）各ゾーンの面速は、除湿ローターの開口面に供給される直前の面速である。

1) The surface speed of each zone is the surface speed immediately before being supplied to the opening surface of the dehumidifying rotor.

It is a figure which shows the example of a form of the dehumidification rotor installed in the dehumidification apparatus for enforcing the dehumidification method of the 1st form of this invention. It is an example of the form of the dehumidification apparatus for enforcing the dehumidification method of the 1st form of this invention. It is a figure which shows arrangement | positioning of the division member when it sees from the opening surface side of the dehumidification rotor shown in FIG. It is a schematic diagram which shows the shape of this dehumidification zone, this regeneration zone, this functional zone, and this cooling zone which are formed in this opening surface 4a. It is a figure which shows the area of the opening surface of this dehumidification rotor, and the area of this functional zone. FIG. 3 is a diagram illustrating an example of a dehumidifying device in which the installation position of the first supply unit, the second supply unit, or the third supply unit is a rear stage of the dehumidification rotor 1. It is another example of a form of the 1st dehumidification apparatus of this invention. It is a schematic diagram which shows a deformed opening division member. It is a schematic diagram which shows the installation position of this deformed opening division member. 3 is a cross-sectional view of a rotor case 21. FIG. It is a schematic diagram which shows arrangement | positioning of a division member or a different shape opening division member when it sees from the opening surface side of a dehumidification rotor. It is a schematic diagram which shows arrangement | positioning of the division member when it sees from the opening surface side of a dehumidification rotor. It is an example of the form of the dehumidification apparatus for enforcing the dehumidification method of the 2nd form of this invention. It is a schematic diagram which shows arrangement | positioning of a division member or a different shape opening division member when it sees from the opening surface side of a dehumidification rotor. It is a schematic diagram which shows arrangement | positioning of the division member when it sees from the opening surface side of a dehumidification rotor. It is an example of the form of the dehumidification apparatus for enforcing the dehumidification method of the 3rd form of this invention. It is a schematic diagram which shows arrangement | positioning of a division member or a different shape opening division member when it sees from the opening surface side of a dehumidification rotor. It is a schematic diagram which shows arrangement | positioning of the division member when it sees from the opening surface side of the dehumidification rotor of the dehumidification apparatus of Example 1. FIG. FIG. 3 is a flowchart of the first embodiment. It is a schematic diagram which shows arrangement | positioning of the division member when it sees from the opening surface side of the dehumidification rotor of the dehumidification apparatus of Example 2. FIG. FIG. 5 is a flowchart of Example 2. It is a schematic diagram which shows arrangement | positioning of the division member when it sees from the opening surface side of the dehumidification rotor of the dehumidification apparatus of Example 3. FIG. 10 is a flowchart of Example 3. FIG. It is a schematic diagram which shows arrangement | positioning of the division member when it sees from the opening surface side of the dehumidification rotor of the dehumidification apparatus of the comparative example 1. 10 is a flowchart of Comparative Example 1. FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Dehumidification rotor 3 Ventilation cavity opening 4a, 4b Dehumidification rotor opening surface 5 Rotor shaft 6a, 6b, 51a, 51b, 61a, 61b Split member 7 Dehumidification zone 8 Regeneration zone 9 Cooling zone 10 Function zone 20, 50, 60, 65 Dehumidifier 21 Rotor case 22 First supply machine 23 Second supply machine 24 Third supply machine 25 Heating device 26 Processed air supply pipe 27 Dehumidified air exhaust pipe 28 First regeneration gas supply pipe 29 Second regeneration gas supply pipe 30 Regeneration zone exhaust gas exhaust pipe 31 Cooling gas supply pipe 32 Cooling zone exhaust gas exhaust pipe 33, 43, 53, 62 Functional zone ventilation gas supply pipes 34, 54, 63 Functional zone exhaust gas exhaust pipe 38 Rotating direction 39 Dehumidification rotor opening Surface area 40a, 40b Function zone area 41 Location 42 where the function zone 10 is provided Function zone 1 No. 44 Connection pipe 45 Modified opening dividing member 46 Functional zone ventilation gas inlet side opening 47 of modified opening dividing member Functional zone ventilation gas outlet side opening 48 of modified opening dividing member Functional zone ventilation gas supply direction 49 Slit 66 Rotating shaft mounting diameter 67 Opening surface outer diameter 68 Functional zone dividing member 69 Horizontal portion dividing member dividing functional zone A Processed air B Dehumidified air C Cooling gas D Cooling zone exhaust gas E Regeneration gas F Regeneration zone exhaust gas G Functional zone ventilation gas H Functional zone exhaust gas

Claims (6)

The opening surface of the dehumidification rotor composed of the carrier in which the ventilation cavity is formed in the rotation axis direction and the dehumidifying agent carried on the carrier is divided into a dehumidification zone, a regeneration zone and a cooling zone, and the dehumidification rotor is rotated. A dehumidification method for supplying dehumidification zone and dehumidifying agent continuously by supplying air to be treated to the dehumidification zone, supplying regeneration gas to the regeneration zone, and supplying cooling gas to the cooling zone Because
A functional zone is provided between the regeneration zone and the cooling zone,
Supplying a functional zone aeration gas to the functional zone for cooling or drying the dehumidifying rotor;
The surface speed of the functional zone ventilation gas supplied to the functional zone is 0.5 to 10 times the surface speed of the cooling gas supplied to the cooling zone,
The ratio of the area of the functional zone to the area of the opening surface of the dehumidifying rotor is 0.003 to 0.07,
A dehumidification method characterized by. The opening surface of the dehumidification rotor composed of the carrier in which the ventilation cavity is formed in the rotation axis direction and the dehumidifying agent carried on the carrier is divided into a dehumidification zone, a regeneration zone and a cooling zone, and the dehumidification rotor is rotated. A dehumidification method for supplying dehumidification zone and dehumidifying agent continuously by supplying air to be treated to the dehumidification zone, supplying regeneration gas to the regeneration zone, and supplying cooling gas to the cooling zone Because
A functional zone is provided between the cooling zone and the dehumidifying zone,
Supplying a functional zone aeration gas to the functional zone for cooling or drying the dehumidifying rotor;
The surface speed of the functional zone ventilation gas supplied to the functional zone is 0.5 to 10 times the surface speed of the cooling gas supplied to the cooling zone,
The ratio of the area of the functional zone to the area of the opening surface of the dehumidifying rotor is 0.003 to 0.07,
A dehumidification method characterized by. The opening surface of the dehumidification rotor composed of the carrier in which the ventilation cavity is formed in the rotation axis direction and the dehumidifying agent carried on the carrier is divided into a dehumidification zone, a regeneration zone and a cooling zone, and the dehumidification rotor is rotated. A dehumidification method for supplying dehumidification zone and dehumidifying agent continuously by supplying air to be treated to the dehumidification zone, supplying regeneration gas to the regeneration zone, and supplying cooling gas to the cooling zone Because
A functional zone is provided between the dehumidification zone and the regeneration zone,
Supplying a functional zone aeration gas for heating the dehumidification rotor to the functional zone;
The surface speed of the functional zone ventilation gas supplied to the functional zone is 0.5 to 10 times the surface speed of the regeneration gas supplied to the regeneration zone;
The ratio of the area of the functional zone to the area of the opening surface of the dehumidifying rotor is 0.003 to 0.07,
A dehumidification method characterized by. A dehumidification rotor comprising a carrier in which a ventilation cavity is formed in the direction of the rotation axis and a dehumidifying agent carried on the carrier, the opening surface of which is divided by a dehumidifying zone, a regeneration zone, a cooling zone, and the regeneration A dehumidification rotor divided into functional zones provided between the zone and the cooling zone;
The divided member;
Rotating means for rotating the dehumidifying rotor;
First supply means for supplying air to be treated to the dehumidification zone;
Second supply means for supplying regeneration gas to the regeneration zone;
Third supply means for supplying cooling gas to the cooling zone;
A heating means provided in a preceding stage of the regeneration zone for heating the regeneration gas;
Functional zone ventilation gas supply means for supplying functional zone ventilation gas to the functional zone;
Have
The ratio of the area of the functional zone to the area of the opening surface of the dehumidifying rotor is 0.003 to 0.07,
Dehumidifier characterized by. A dehumidification rotor comprising a carrier having a ventilation cavity formed in the direction of the rotation axis and a dehumidifying agent carried on the carrier, wherein the opening surface is divided by a dehumidifying zone, a regeneration zone, a cooling zone, and the cooling A dehumidification rotor divided into functional zones provided between the zone and the dehumidification zone;
The divided member;
Rotating means for rotating the dehumidifying rotor;
First supply means for supplying air to be treated to the dehumidification zone;
Second supply means for supplying regeneration gas to the regeneration zone;
Third supply means for supplying cooling gas to the cooling zone;
A heating means provided in a preceding stage of the regeneration zone for heating the regeneration gas;
Functional zone ventilation gas supply means for supplying functional zone ventilation gas to the functional zone;
Have
The ratio of the area of the functional zone to the area of the opening surface of the dehumidifying rotor is 0.003 to 0.07,
Dehumidifier characterized by. A dehumidification rotor comprising a carrier in which a ventilation cavity is formed in the direction of the rotation axis and a dehumidifying agent carried on the carrier, the opening surface of which is divided by a dehumidification zone, a regeneration zone, a cooling zone, and the dehumidification A dehumidification rotor divided into functional zones provided between the zone and the regeneration zone;
The divided member;
Rotating means for rotating the dehumidifying rotor;
First supply means for supplying air to be treated to the dehumidification zone;
Second supply means for supplying regeneration gas to the regeneration zone;
Third supply means for supplying cooling gas to the cooling zone;
A heating means provided in a preceding stage of the regeneration zone for heating the regeneration gas;
Functional zone ventilation gas supply means for supplying functional zone ventilation gas to the functional zone;
A second heating means for heating the functional zone aeration gas;
Have
The ratio of the area of the functional zone to the area of the opening surface of the dehumidifying rotor is 0.003 to 0.07,
Dehumidifier characterized by.

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