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TWI371082B - Method for manufacturing elemental device - Google Patents

Method for manufacturing elemental device

Info

Publication number
TWI371082B
TWI371082B TW095137661A TW95137661A TWI371082B TW I371082 B TWI371082 B TW I371082B TW 095137661 A TW095137661 A TW 095137661A TW 95137661 A TW95137661 A TW 95137661A TW I371082 B TWI371082 B TW I371082B
Authority
TW
Taiwan
Prior art keywords
elemental device
manufacturing elemental
manufacturing
elemental
Prior art date
Application number
TW095137661A
Other languages
Chinese (zh)
Other versions
TW200725805A (en
Inventor
Takashi Kubota
Yoshinori Matsuura
Original Assignee
Mitsui Mining & Smelting Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsui Mining & Smelting Co filed Critical Mitsui Mining & Smelting Co
Publication of TW200725805A publication Critical patent/TW200725805A/en
Application granted granted Critical
Publication of TWI371082B publication Critical patent/TWI371082B/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362—Active matrix addressed cells
    • G02F1/136286—Wiring, e.g. gate line, drain line
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1343—Electrodes
    • G02F1/13439—Electrodes characterised by their electrical, optical, physical properties; materials therefor; method of making
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362—Active matrix addressed cells
    • G02F1/1368—Active matrix addressed cells in which the switching element is a three-electrode device
    • H10D64/01354—
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/40—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/40—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
    • H10D86/441—Interconnections, e.g. scanning lines
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/40—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
    • H10D86/60—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs wherein the TFTs are in active matrices

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Mathematical Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Liquid Crystal (AREA)
  • Weting (AREA)
TW095137661A 2005-10-14 2006-10-13 Method for manufacturing elemental device TWI371082B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005299666A JP2007109916A (en) 2005-10-14 2005-10-14 Device manufacturing method

Publications (2)

Publication Number Publication Date
TW200725805A TW200725805A (en) 2007-07-01
TWI371082B true TWI371082B (en) 2012-08-21

Family

ID=37942866

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095137661A TWI371082B (en) 2005-10-14 2006-10-13 Method for manufacturing elemental device

Country Status (5)

Country Link
JP (1) JP2007109916A (en)
KR (1) KR20080063339A (en)
CN (1) CN101283443A (en)
TW (1) TWI371082B (en)
WO (1) WO2007043645A1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102034832A (en) * 2009-09-28 2011-04-27 株式会社神户制钢所 Thin film transistor substrate, method for manufacturing thin film transistor substrate, and display device
JP2011091352A (en) * 2009-09-28 2011-05-06 Kobe Steel Ltd Thin-film transistor substrate, method of manufacturing the same, and display device
CN110993694B (en) * 2019-10-22 2023-08-25 清华大学 Two-Dimensional Thin Film Field Effect Transistor with Sub-10nm Channel Prepared by Self-oxidation

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05102151A (en) * 1991-10-07 1993-04-23 Fujitsu Ltd Method for manufacturing semiconductor device
JPH0618912A (en) * 1992-07-03 1994-01-28 Fujitsu Ltd Liquid crystal display device and manufacturing method thereof
JP2944336B2 (en) * 1992-11-02 1999-09-06 シャープ株式会社 Wiring structure
JPH07169966A (en) * 1993-12-16 1995-07-04 Sharp Corp Electronic component and manufacturing method thereof
JP4663829B2 (en) * 1998-03-31 2011-04-06 三菱電機株式会社 Thin film transistor and liquid crystal display device using the thin film transistor
JP2001023990A (en) * 1999-07-07 2001-01-26 Mitsubishi Electric Corp Semiconductor device and method of manufacturing the same
JP2003273109A (en) * 2002-03-14 2003-09-26 Advanced Display Inc Al WIRING FILM AND METHOD FOR MANUFACTURING THE SAME, AND LIQUID CRYSTAL DISPLAY EMPLOYING THE SAME
JP3940385B2 (en) * 2002-12-19 2007-07-04 株式会社神戸製鋼所 Display device and manufacturing method thereof
JP2005062802A (en) * 2003-07-28 2005-03-10 Advanced Display Inc Thin film transistor array substrate manufacturing method

Also Published As

Publication number Publication date
WO2007043645A1 (en) 2007-04-19
KR20080063339A (en) 2008-07-03
TW200725805A (en) 2007-07-01
JP2007109916A (en) 2007-04-26
CN101283443A (en) 2008-10-08

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees