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TWI371057B - Pattern forming apparatus and pattern forming method - Google Patents

Pattern forming apparatus and pattern forming method

Info

Publication number
TWI371057B
TWI371057B TW096131624A TW96131624A TWI371057B TW I371057 B TWI371057 B TW I371057B TW 096131624 A TW096131624 A TW 096131624A TW 96131624 A TW96131624 A TW 96131624A TW I371057 B TWI371057 B TW I371057B
Authority
TW
Taiwan
Prior art keywords
pattern forming
forming apparatus
forming method
pattern
forming
Prior art date
Application number
TW096131624A
Other languages
Chinese (zh)
Other versions
TW200822172A (en
Inventor
Yabe Manabu
Iwahsima Masanobu
Original Assignee
Dainippon Screen Mfg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dainippon Screen Mfg filed Critical Dainippon Screen Mfg
Publication of TW200822172A publication Critical patent/TW200822172A/en
Application granted granted Critical
Publication of TWI371057B publication Critical patent/TWI371057B/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7003—Alignment type or strategy, e.g. leveling, global alignment
    • H10P72/0448—
    • H10P76/00—

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Coating Apparatus (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Gas-Filled Discharge Tubes (AREA)
TW096131624A 2006-11-15 2007-08-27 Pattern forming apparatus and pattern forming method TWI371057B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006308598A JP4738319B2 (en) 2006-11-15 2006-11-15 Pattern forming device

Publications (2)

Publication Number Publication Date
TW200822172A TW200822172A (en) 2008-05-16
TWI371057B true TWI371057B (en) 2012-08-21

Family

ID=39448836

Family Applications (1)

Application Number Title Priority Date Filing Date
TW096131624A TWI371057B (en) 2006-11-15 2007-08-27 Pattern forming apparatus and pattern forming method

Country Status (4)

Country Link
JP (1) JP4738319B2 (en)
KR (1) KR100836415B1 (en)
CN (1) CN101183632B (en)
TW (1) TWI371057B (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5819621B2 (en) * 2011-03-25 2015-11-24 株式会社Ｓｃｒｅｅｎホールディングス Pattern forming method and pattern forming apparatus
JP5790098B2 (en) * 2011-04-05 2015-10-07 セイコーエプソン株式会社 Liquid ejection apparatus and liquid ejection method
JP6452318B2 (en) * 2014-05-20 2019-01-16 中外炉工業株式会社 Substrate coating apparatus and substrate coating method
CN109870880A (en) * 2019-04-09 2019-06-11 合肥京东方显示技术有限公司 gluing equipment and gluing method
CN110687722B (en) * 2019-10-29 2021-09-03 武汉华星光电技术有限公司 Alignment liquid coating method and mask plate assembly
JPWO2023166577A1 (en) * 2022-03-02 2023-09-07

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0698628B2 (en) * 1989-09-01 1994-12-07 株式会社総合歯科医療研究所 Method and apparatus for continuous curing of visible light polymerization resin
JPH05335223A (en) * 1992-05-30 1993-12-17 Sony Corp Method for forming resist pattern
JP3113212B2 (en) * 1996-05-09 2000-11-27 富士通株式会社 Plasma display panel phosphor layer forming apparatus and phosphor coating method
JP3501598B2 (en) * 1996-10-16 2004-03-02 キヤノン株式会社 Laser processing method, ink jet recording head, and ink jet recording head manufacturing apparatus
JP3366630B2 (en) * 2000-10-04 2003-01-14 大日本スクリーン製造株式会社 Method and apparatus for forming barrier ribs for flat display device
JP3425946B2 (en) * 2001-09-13 2003-07-14 大日本スクリーン製造株式会社 Method and apparatus for forming barrier ribs for flat display device
JP2003279724A (en) * 2002-03-26 2003-10-02 Seiko Epson Corp Display device manufacturing method, display device manufacturing apparatus, display device, and device
JP4082499B2 (en) * 2002-09-20 2008-04-30 大日本スクリーン製造株式会社 Pattern forming apparatus and pattern forming method
JP4408241B2 (en) * 2004-06-14 2010-02-03 大日本スクリーン製造株式会社 Pattern forming apparatus and pattern forming method
JP4383268B2 (en) 2004-06-29 2009-12-16 アルプス電気株式会社 Spray coating method and spray coating apparatus
JP2006138911A (en) * 2004-11-10 2006-06-01 Dainippon Screen Mfg Co Ltd Pattern forming method and pattern forming apparatus
WO2006085741A1 (en) * 2005-02-09 2006-08-17 Stichting Dutch Polymer Institute Process for preparing a polymeric relief structure

Also Published As

Publication number Publication date
TW200822172A (en) 2008-05-16
JP4738319B2 (en) 2011-08-03
CN101183632A (en) 2008-05-21
KR100836415B1 (en) 2008-06-09
CN101183632B (en) 2010-06-02
KR20080044152A (en) 2008-05-20
JP2008119647A (en) 2008-05-29

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees